JP4846728B2 - 曲げ剛性が変化する２点固定熱アクチュエータ - Google Patents

曲げ剛性が変化する２点固定熱アクチュエータ Download PDF

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JP4846728B2
JP4846728B2 JP2007543284A JP2007543284A JP4846728B2 JP 4846728 B2 JP4846728 B2 JP 4846728B2 JP 2007543284 A JP2007543284 A JP 2007543284A JP 2007543284 A JP2007543284 A JP 2007543284A JP 4846728 B2 JP4846728 B2 JP 4846728B2
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deformation element
layer
fixed
electrode
switch
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JP2008521205A5 (enExample
JP2008521205A (ja
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アントニオ カバル
スティーブン フラトン ポンド
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イーストマン コダック カンパニー
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H61/00—Electrothermal relays
    • H01H61/02—Electrothermal relays wherein the thermally-sensitive member is heated indirectly, e.g. resistively, inductively
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H61/00—Electrothermal relays
    • H01H2061/006—Micromechanical thermal relay
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H37/00—Thermally-actuated switches

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  • Micromachines (AREA)
JP2007543284A 2004-11-22 2005-11-18 曲げ剛性が変化する２点固定熱アクチュエータ Expired - Fee Related JP4846728B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US10/999,645 2004-11-22
US10/999,645 US7283030B2 (en) 2004-11-22 2004-11-22 Doubly-anchored thermal actuator having varying flexural rigidity
PCT/US2005/041867 WO2006057910A1 (en) 2004-11-22 2005-11-18 Doubly-anchored thermal actuator having varying flexural rigidity

Publications (3)

Publication Number Publication Date
JP2008521205A JP2008521205A (ja) 2008-06-19
JP2008521205A5 JP2008521205A5 (enExample) 2008-12-18
JP4846728B2 true JP4846728B2 (ja) 2011-12-28

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JP2007543284A Expired - Fee Related JP4846728B2 (ja) 2004-11-22 2005-11-18 曲げ剛性が変化する２点固定熱アクチュエータ

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US (2) US7283030B2 (enExample)
EP (1) EP1815488A1 (enExample)
JP (1) JP4846728B2 (enExample)
WO (1) WO2006057910A1 (enExample)

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US8154378B2 (en) * 2007-08-10 2012-04-10 Alcatel Lucent Thermal actuator for a MEMS-based relay switch
US20090210103A1 (en) * 2007-12-03 2009-08-20 Mr. Michael Cook Controlling aircraft aerial movements, defeating icing on aircraft surfaces, aiding decontamination, and damping turbulence effects on aircraft by the method of micro-perforated airfoil coordinated precision flow management
US8232858B1 (en) 2008-02-20 2012-07-31 Sandia Corporation Microelectromechanical (MEM) thermal actuator
US7972865B2 (en) * 2008-08-26 2011-07-05 Ut-Battelle, Llc Sensor for detecting and differentiating chemical analytes
TW201012043A (en) * 2008-09-10 2010-03-16 Micro Star Int Co Ltd Movement device
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US9511995B2 (en) * 2012-02-15 2016-12-06 Massachusetts Institute Of Technology Method and apparatus for building three-dimensional MEMS elements
US9217755B2 (en) 2012-02-15 2015-12-22 Massachusetts Institute Of Technology Method and apparatus for building three-dimensional MEMS elements
US9573802B2 (en) 2012-02-15 2017-02-21 Massachusetts Institute Of Technology Method and apparatus for building three-dimensional MEMS elements
ITTO20120691A1 (it) * 2012-08-01 2014-02-02 Milano Politecnico Sensore d'urto con meccanismo bistabile e metodo per il rilevamento di urti
US10330564B2 (en) * 2013-05-03 2019-06-25 The Boeing Company System and method for predicting distortion of a workpiece resulting from a peening machine process
US10643502B2 (en) 2017-01-19 2020-05-05 Grant J. Eliuk Thermal-sensitive appearance-changing label
FR3086386B1 (fr) * 2018-09-21 2020-12-04 Commissariat Energie Atomique Dispositif de mesure comportant un fil semiconducteur suspendu
JP2023057348A (ja) * 2021-10-11 2023-04-21 株式会社リコー 液体吐出ユニット、液体吐出装置、液体吐出ヘッド

Citations (2)

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WO2002088017A1 (en) * 2001-04-26 2002-11-07 Advantest Corporation Connection member, microswitch, method for manufacturing connection member, and method for manufacturing microwitch
JP3590872B2 (ja) * 1996-08-27 2004-11-17 オムロン株式会社 マイクロリレー

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3590872B2 (ja) * 1996-08-27 2004-11-17 オムロン株式会社 マイクロリレー
WO2002088017A1 (en) * 2001-04-26 2002-11-07 Advantest Corporation Connection member, microswitch, method for manufacturing connection member, and method for manufacturing microwitch

Also Published As

Publication number Publication date
WO2006057910A1 (en) 2006-06-01
US20060109075A1 (en) 2006-05-25
US7283030B2 (en) 2007-10-16
US7508294B2 (en) 2009-03-24
US20070296539A1 (en) 2007-12-27
JP2008521205A (ja) 2008-06-19
EP1815488A1 (en) 2007-08-08

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