JP4845146B2 - Carbon heater - Google Patents

Description

  The present invention relates to a carbon heater, and more particularly to a carbon heater suitable for use in a semiconductor manufacturing apparatus.

  In the semiconductor manufacturing process, for example, various heat treatments of a silicon wafer are performed.

In such a semiconductor manufacturing process involving some heating, strict temperature control is required. It is also important to keep the heat treatment atmosphere clean.

  Therefore, development and commercialization of a high-performance heater for semiconductor manufacturing equipment that is excellent in temperature uniformity and temperature rise / fall properties and does not release pollutants are strongly desired.

  Japanese Patent Laid-Open No. 7-161725 discloses an electrode structure in which a graphite-carbon fiber composite material (hereinafter referred to as C / C) that is solidified using a resin in a wafer heating apparatus and integrated is used as a heater member. .

  Conventionally, a flat spiral SiC heater member or a complex-shaped Mo—Si heater member subjected to a welding process has been used in the same apparatus.

  However, the C / C heater member has a very high mechanical strength as long as its length is sufficiently thin in two dimensions even if it is thin in structure. For example, the C / C heater member has a one-dimensional length or width. In the case of a vertically long shape of 5 mm or less, sufficient mechanical strength cannot be obtained, and when used as a heater for a semiconductor manufacturing apparatus, if both ends in the length direction are fixed to a terminal, C / C Along with the thermal expansion, there is a problem that a thermal load is generated and is easily damaged, particularly in the vicinity of the terminal fixing portion.

  Therefore, if the width is widened, the resistance value becomes small this time, and in order to perform predetermined heat generation, the current value has to be greatly increased, and the heat capacity becomes large and rapid heating is difficult. It was.

  Further, when trying to obtain a complicated shape such as a substantially spiral shape as shown in FIG. 3 of the above-mentioned JP-A-7-161725, it is difficult to perform slit processing to obtain a soaking structure, and to make it high resistance as described above. However, it is necessary to reduce the width of the same member, but such processing is difficult, and if the processing that increases the cost or matches the cost is performed, the thermal uniformity is not sufficient. Was the current situation.

In addition, in the SiC heater member and the Mo-Si heater member, the electric load density can only be about 20 W / cm ² in order to suppress deterioration due to sublimation, and as a result, the heating rate can be shortened. There was a limit. Further, even in these heater members, sufficient heat resistance strength has not been obtained in a complicated shape requiring a bent portion.

  Conventionally, a metal heater is sometimes used as a heater for a semiconductor heat treatment apparatus. However, the metal heater is liable to cause metal contamination, and the quality is likely to be unstable.

  In order to improve the heat treatment efficiency of the semiconductor, a heater capable of rapid temperature increase / decrease is required. However, since the metal heater has a large heat capacity, there is a limit to improving the temperature rising / falling characteristics.

  In general, the metal heater has a problem that it is difficult to rapidly raise and lower the temperature because the incidental facilities such as a heat insulating material and the heat capacity of the metal heater itself are large.

  Therefore, a carbon material having a small heat capacity and excellent in high temperature resistance in a non-oxidizing atmosphere has been used as a heater.

  However, a carbon material using a normal electrode material has a problem in terms of flexibility, and has become a bottleneck in shape design.

  In general, in a carbon heater using a carbon wire as a heating element, the carbon wire is disposed in a container kept in a non-oxidizing atmosphere in order to prevent oxidation. And since a carbon wire becomes very high temperature at the time of heat_generation | fever, what bundled a plurality of carbon wires is used as a terminal wire.

  Conventionally, carbon wires have been fixed by impregnation with carbon paste and firing. In the case of a relatively thin carbon wire, it may be fixed by screwing.

  However, in the fixing method using the carbon paste, the carbon paste fired body is peeled off, which may cause dust generation.

  On the other hand, with the screw-type fixing method, screwing work is complicated when the number of carbon wire bundles is large. Further, in the case of a thick carbon wire, it may not be able to be fixed firmly.

  Further, in a heater using a carbon wire as a heating element, a terminal device for connecting a terminal wire made of a carbon heater bundle and a metal terminal wire is also required.

  However, a terminal device that can reliably and easily connect both terminal wires has not yet been provided.

  In general, in order to keep the atmosphere around the carbon heating element in a non-oxidizing atmosphere, the sealing technique of the carbon heating element is important.

  However, in the conventional sealing method in which the carbon heating element is sandwiched between two quartz glass plates and the outer periphery is welded, the contact surface is distorted or deformed due to partial heating, and stress is concentrated on the weld fixing part. There was a great risk of breakage of the glass plate.

  An object of the present invention is to provide a carbon heater that is excellent in heat uniformity and flexibility, can be rapidly raised and lowered, and can be manufactured at low cost.

  The present invention is a heater member in which a plurality of carbon fiber bundles obtained by bundling a plurality of carbon fibers are knitted into a long shape such as a wire shape or a tape shape, and the impurity content is 10 ppm or less in ash content. A carbon heater provided with a heater member is one preferred solution.

  The carbon heater of the present invention uses a plurality of carbon fiber bundles obtained by bundling a plurality of carbon fibers having a diameter of 5 to 15 μm, and weaves them into a vertically long shape such as a wire shape or a tape shape. The following heater member is provided.

  One or a plurality of the heater members can be enclosed in a sealed member made of quartz glass or alumina.

  The resistance value of the heater member at 1000 ° C. is preferably 1 to 20 Ω / m · book.

  The sealed member has a shape selected from a double tube shape, a straight tube shape, and an annular tube shape, and a heating zone having a predetermined shape can be formed by combining a plurality of the sealed members.

  A non-oxidizing gas can be introduced into the space formed in the sealed member.

  The space formed in the sealed member can be evacuated to 20 torr or less.

  The sealed member is substantially integrated by a plate-like quartz glass support, and a hollow space is formed around the heater member in the quartz glass support. be able to.

  The quartz glass support is formed by fusing together the entire joining surfaces of a plurality of quartz glass plates, forming a wiring groove on the joining surface of at least one quartz glass plate, It can be set as the structure which has arrange | positioned the heater member.

  The quartz glass support is formed by fusing two quartz glass plates, and a wiring groove having a predetermined depth is formed on the joining surface of at least one quartz glass plate, including the depth. The thickness of each quartz glass plate which is not present can be made substantially the same.

  The quartz glass support is formed by fusing two quartz glass plates having different thicknesses, and a wiring groove having a predetermined depth is formed on the joining surface of at least one quartz glass plate. The thickness of one quartz glass plate not including the thickness can be made ½ or less of the other thickness.

  It is preferable that the wiring groove has a curved shape on at least the lower side of the cross-sectional shape perpendicular to the length direction and is polished.

  The wiring groove can be formed in a “convex” shape as a whole in a cross-sectional shape perpendicular to the length direction.

  A wiring groove is formed in the first quartz glass plate, and a narrow insertion groove or through slit that is paired with the wiring groove is formed in the second quartz glass plate. The first and second quartz glass plates are The grooves are joined so that they face each other, and the surface of the second quartz glass plate is polished or ground to remove the bottom of the insertion groove or the through slit, thereby exposing it as an insertion window. The heater member is pushed into the wiring groove of the quartz glass plate, the third quartz glass plate is aligned with the polished surface or the ground surface, and then the three quartz glass plates are fused to substantially cover the entire surface other than the groove. By integrating the wiring grooves, the cross-sectional shape perpendicular to the length direction of the wiring grooves can be formed into a “convex” shape as a whole. Furthermore, a similar structure can be obtained even if a convex groove is formed on the first quartz glass plate and the third quartz is fused.

  It is preferable that the wiring structure is fused in a state of being kept in a reduced pressure or non-oxidizing gas atmosphere.

  The quartz glass support may comprise an opaque quartz glass layer.

  One of the plurality of quartz glass plates can be an opaque quartz glass plate.

  The heater member and a carbon reflector having at least one mirror surface may be enclosed in a plate-like quartz glass support.

  Three quartz glass plates are used, and a heater reflector and at least one mirror reflector made of carbon are arranged in a wiring groove and a reflector setting spot provided on two joint surfaces of any quartz glass plate. The joined portions of the quartz glass plates can be integrated by fusion.

  It is possible to dispose the reflector plate adjacent to the sealed member by enclosing the reflector plate made of carbon having a mirror surface at least on one side in the overall plate-like quartz glass support.

  A convex part having a semicircular or trapezoidal cross section is formed on at least one outer surface of the plate-like quartz glass support, and the outer surface can be polished.

  The sealed member includes a setting member made of quartz glass having a wiring groove and a lid member made of quartz glass, and the heater member can be arranged in the wiring groove.

  Either one of the setting member and the lid member or a flame barrier is formed on the outer peripheral portion of both of the setting members and the lid member, and opposing surfaces other than the flame barrier are arranged at intervals of 0.2 to 1.0 mm. Can be integrated by the method of overlaying.

  A carbon terminal can be arranged at both ends of the heater member, an electrode can be connected to the carbon terminal, and a portion of the electrode on the carbon terminal side can be covered with a quartz glass pipe.

  A non-oxidizing gas can be introduced into the space in which the heater member is enclosed, and the gas can be discharged from the quartz glass pipe placed on the electrode.

  The impurity concentration of the carbon terminal is preferably 10 ppm or less in terms of ash.

  Alumina powder can be arranged in the arrangement groove, and the heater member can be supported by the sintered body of alumina powder.

  The iron powder preferably has an iron impurity concentration of 5 ppm or less.

  The heater member or the terminal portions connected to both ends of the heater member can be drawn substantially perpendicular to the heater surface formed by the heater member.

  A wire shape in which both ends of a heater member are protruded to the opposite side of the heater surface, and a plurality of or at least one end is arranged in a plurality in a quartz glass cylinder in which the protruding heater member is in contact with a quartz glass support plate The sealed member can be sealed by fixing with carbon and covering the quartz glass tube with a quartz glass tube.

  The other end of the wire-like carbon is connected to a second wire-like carbon connecting member having a hollow member formed therein and a core member inside thereof by pressing with the core member, and a split core is used. The metal inscribed line is connected by the metal wire connecting member, and both the connecting members can be connected by any connecting member.

  A tapered surface is formed on the outer side of the split mold core, a tapered portion that engages with the tapered surface is formed on the terminal body, and a metal inscribed line is sandwiched between the support sections formed on the split mold core. It can be connected to any connecting member while pressing.

  The heater members are arranged in line symmetry in the sealed member, a gas inlet / outlet is formed on the axis of symmetry, and a non-oxidizing gas is introduced from the gas inlet / outlet when the container is welded. It can be configured to exhaust from the gas inlet / outlet at the time of wearing.

  A heater member made of carbon wire and wire-like carbon are fixed by a plurality of wire-like carbons arranged in a quartz glass tube or wire-like carbon having at least ends divided into a plurality, and the inside of the wire-like carbon and the metal on the power source side is fixed. The tangent is connected to the second terminal device, and the second terminal device includes a second wire-like carbon connecting member for connecting wire-like carbon having a plurality or divided into a plurality of ends, A metal wire connecting member configured to connect a metal inscribed line using a split core, and a terminal body for connecting the second wire-like carbon connecting member and the metal wire connecting member; It can be set as the structure which connects a connection member to the one end side and other end side of a terminal part main body.

  The heater member may have a structure in which a quartz glass tube and a second terminal device in which wire-like carbon having a plurality of or at least end portions divided into a plurality are arranged inside are enclosed in a quartz glass tube.

  A third terminal having a configuration in which a metal internal tangent disposed inside the quartz glass tube and an external tangent on the power source side are connected via a Mo foil, and the Mo foil is sealed with a pinch seal portion made of quartz glass. It is more preferable to have a device.

  A terminal member can be connected to both ends of the heater member and protruded to the opposite side of the heater surface, and the quartz glass tube can be sealed by covering the terminal member with a quartz glass tube.

  A terminal part body can be arranged on the free end side of the quartz glass tube, and the terminal member and the terminal part body can be connected to each other by a plurality of wire-like carbons, or at least one end part of which is divided into a plurality. .

  The heater members are arranged in line symmetry in the sealed member, a gas inlet / outlet is formed on the axis of symmetry, and a non-oxidizing gas is introduced from the gas inlet / outlet when the container is welded. It can be configured to exhaust from the gas inlet / outlet at the time of wearing.

  The above-mentioned sealed member is a split plate with a semi-circular plate shape as a whole and a notch in the center part. A circular plate heater is formed by combining two of them, and a jig is passed through the center part. It is preferable to make it possible.

  The terminal member connects the heater member and the plurality of wire-like carbons, a heater member connecting portion is formed on one end side thereof to connect the heater member, and a plurality of or end portions are divided into a plurality. The first wire-like carbon connecting member for connecting the wire-like carbon in a lump is provided, and the first wire-like carbon connecting member is connected to the other end side of the terminal member. It is preferable that the connecting member is formed hollow, the core member is arranged inside, and the plurality of wire-like carbons are pressed and connected by the core member.

  Female screw portions are respectively formed on the opposite connection end sides of the terminal member and the first wire-like carbon connecting member, and male screw portions corresponding to the respective female screw portions are formed on the intermediate member. It is preferable to connect the members.

  The other end of the wire-like carbon is connected to a second wire-like carbon connecting member having a hollow member formed therein and a core member inside thereof by pressing with the core member, and a split core is used. It is preferable that the metal inscribed line is connected by the metal wire connecting member to be connected, and the both connecting members are connected by the terminal portion main body located in the middle.

  A taper surface is formed on the outer side of the split core, a taper portion that engages with the taper surface is formed on the terminal body, and a metal inscribed line is sandwiched by a support portion formed on the split core. It is preferable to connect to the terminal body while pressing.

  The metal inscribed line is preferably a Mo metal rod.

  It is preferable that the wire-like carbon connecting member and the terminal portion main body, and the terminal portion main body and the metal wire connecting member are respectively connected by a screw type.

  A heater member made of carbon wire and wire-like carbon are connected by a first terminal device, and the wire-like carbon and a metal inscribed line on the power source side are connected by a second terminal device. Is provided with a terminal member, and the heater member is connected to a heater member connecting portion formed on one end side thereof, and a first or the like for connecting a plurality of wire-shaped carbons having an end portion divided into a plurality thereof. The wire-like carbon connecting member is provided, and the first wire-like carbon connecting member is connected to the other end side of the terminal member. A core member is arranged, and the divided wire-like carbon is configured to be pressed and connected by the core member, and the second terminal device is a wire in which a plurality of or end portions are divided into a plurality. A second wire-like carbon connection member for connecting the carbon-like carbon, a metal wire connection member configured to connect a metal inscribed line using a split core, and a second wire-like carbon connection The terminal part main body for connecting a member and a metal wire connection member is provided, and it can be set as the structure which connects both connection members to the one end side and other end side of a terminal part main body.

  The heater member and the first and second terminal devices are enclosed in a quartz glass tube, and a metal inscribed line and an outer tangent line on the power supply side disposed inside the quartz glass tube are connected via a Mo foil, It is more preferable to include a third terminal device having a configuration in which the Mo foil is sealed with a pinch seal portion made of quartz glass.

  The sealed member enclosing the heater member can be formed of a flat plate container made of quartz glass or alumina.

  The heater member can be configured to be supported in a non-contact manner and sealed in the flat container by a plurality of terminal members and wire support jigs.

  A substantially cylindrical hole for inserting a bolt is formed in the length direction of the terminal member, and at least a substantially cylindrical horizontal hole penetrating the hole is formed, and the heater member is placed in the horizontal hole. It is possible to make a structure in which a bolt having a length reaching at least the lower end of the lateral hole is inserted into the hole.

  The diameter of the substantially cylindrical hole for inserting the bolt is made larger than the diameter of the substantially cylindrical side hole, and the heater member inserted into the side hole is pressed by the bolt and flattened so as to reach the hole. It is preferable to have a configuration deformed to.

  It is preferable that an expanded graphite sheet is interposed between the bolt and the heater member.

  It is preferable that the wire support jig is made of translucent alumina alone or an assembly member of high-purity carbon and translucent alumina.

  The part of the assembly member that contacts the heater member is preferably made of a high-purity carbon material, and the part of the assembly member that is arranged and connected to the flat container is preferably made of a translucent alumina material.

  A carbon reflector can be disposed below the heater member.

  A convex portion having a semicircular cross section or a trapezoidal shape is formed on the heat generating surface of the flat container, and the surface can be polished.

  The sealed member enclosing the heater member may be curved.

  A plate-like carbon heater in which the heater member is enclosed in the plate-like quartz glass support and the quartz glass support other than the peripheral part of the heater member is substantially integrated is made of carbon The plate-shaped carbon heater can be curved into a predetermined shape by pressing between the mold and the carbon upper mold that is paired with the mold.

  The carbon upper and lower molds have a semicircular cross-sectional shape, and a substantially semi-cylindrical carbon heater can be obtained.

  A carbon reflector having at least one mirror surface can be enclosed in the plate-like quartz glass support independently of the heater member.

  A summary of the invention of the first group is described below.

  An object of the first group is to provide a carbon heater which is excellent in heat uniformity and flexibility and can be manufactured at a low cost, particularly effective for a semiconductor manufacturing apparatus.

  The carbon heater of the first group of the invention uses a plurality of carbon fiber bundles obtained by bundling a plurality of carbon fibers having a diameter of 5 to 15 μm, and braids them into a vertically long shape such as a wire shape or a tape shape, and the amount of impurities contained therein A heater member having an ash content of 10 ppm or less is provided.

  As a result, the tensile strength at a high temperature as the heater member is ensured, and the adhesion of the carbon fiber becomes uniform in the length direction, thereby reducing the heat generation unevenness in the length direction.

  Here, the diameter of each of the carbon fibers to be bundled is set to 5 to 15 μm. If the diameter is less than 5 μm, the individual fibers are weak, and the heater members are bundled and knitted into a predetermined vertically long shape. It becomes difficult. Further, since the fibers are thin, the number of fibers for obtaining a predetermined resistance value increases, which is not practical. On the other hand, if it exceeds 15 μm, not only is it difficult to weave a plurality of bundles of carbon fibers due to poor flexibility, but also a problem occurs in that the carbon fibers are cut and the strength is significantly reduced.

  The reason why the carbon heater impurity is limited to 10 ppm or less in terms of ash is that if the impurity exceeds 10 ppm, even a very small amount of oxygen is likely to be oxidized, thereby causing abnormal heat generation.

  In fact, when the impurities are more than 10 ppm in ash, abnormal heat generation occurs in the air at 800 ° C. for 10 minutes, and in the atmosphere containing 100 ppm oxygen in nitrogen, abnormal heat generation occurs when used at 800 ° C. for 10 hours. It has been confirmed.

  On the other hand, when impurities are 10 ppm or less in ash content, abnormal heat generation will not occur even when used at 800 ° C. for 50 hours or more in an atmosphere containing 100 ppm oxygen in nitrogen, and in the atmosphere at 800 ° C. It has been confirmed that abnormal heat generation does not occur if it is less than 10 minutes.

  The impurities are more preferably 3 ppm or less in ash content. In this case, the effect of suppressing abnormal heat generation is particularly great, and a longer life can be achieved.

  The heater member is formed by bundling 100 to 800 carbon fibers of 5 to 15 μm, and knitting a bundle of 3 or more, preferably 6 to 12 into a vertically long shape such as a wire shape or a tape shape. It is preferable that

  If the number of carbon fibers to be bundled is less than 100, 6 to 12 bundles are insufficient to obtain a predetermined strength and resistance value, and knitting is difficult. Further, since the number is small, weaving is loosened against partial breakage, and it is difficult to maintain the shape. On the other hand, if the number exceeds 800, the number of bundles to obtain a predetermined resistance value decreases, and it becomes difficult to maintain the wire shape by weaving.

  Further, the heater member preferably has a resistance value at 1000 ° C. of 1 to 20 Ω / m · book. The reason is that it is necessary to match a conventional transformer capacity in a general heating apparatus for a semiconductor manufacturing apparatus.

  That is, when the resistance value exceeds 20 Ω / m · book, the heater length cannot be increased because the resistance is large, and heat is deprived between the terminals, resulting in uneven temperature.

On the other hand, if the resistance value is less than 1 Ω / m, the resistance is low and the heater length must be longer than necessary. The uneven structure of the elongated heater member such as carbon wire or carbon tape There is a greater risk of variations in temperature due to uneven atmosphere.

  The electrical resistance value at 1000 ° C. of the heater member is more preferably 2 to 10 Ω / m · in order to obtain the above characteristics with higher reliability.

  In addition, by braiding the carbon fiber bundle, the diameter of the heater member having a substantially circular cross-sectional shape can be made constant in the length direction, and as a result, the heat generation amount can be stabilized in the length direction. . Furthermore, this braiding makes it possible to form a fluffed state by carbon fibers on the surface of the heater member described later. In addition, the heater member generates thermal expansion by being heated. For example, if the heater member stretched between two terminals is not braided, it will sag and generate heat. Although it causes unevenness, such problems do not occur due to being knitted.

  In the first group of the invention, unlike conventional C / C, it is preferable that the carbon fiber used as the carbon heater material is not solidified and integrated with a resin. This is because the flexibility of the carbon fiber is lost, and the fiber is cut as the resin contracts.

  It is preferable to arrange one or a plurality of the heater members and enclose them in a sealed member made of quartz glass or translucent alumina to constitute, for example, a carbon heater for a semiconductor manufacturing apparatus.

  Thereby, the heater member can be used under various conditions such as an oxidizing atmosphere and a high temperature atmosphere.

  In particular, by using quartz glass, higher purity can be achieved, and it can be effective for a semiconductor manufacturing apparatus.

  In addition, when enclosing a plurality of the heater members in the sealed member, it is preferable to arrange them in parallel. In this case, arranging a plurality of heater members in parallel means that two or more heater members are arranged adjacent to and substantially parallel to each other over the entire length of the heater member. As a result, the electrical resistance value of the entire carbon heater can be easily adjusted, and a plurality of heater members are adjacent to each other, that is, in a state where they are in contact with each other at a number of locations in the length direction. Even if one heater member has a problem such as partial cutting at a predetermined portion, the presence of the contact portion in the vicinity thereof can prevent uneven heat generation due to the defect. it can.

  In addition, as used herein, the sealing member means a member that physically seals the heater member with quartz glass or a translucent alumina material. It also means a substantially sealed member in which a non-oxidizing gas such as nitrogen is flowed into and out of the member, and as a result, the heater member is prevented from coming into contact with outside air (air). It is.

  The shape of the sealed member can be selected from a double tube shape, a straight tube shape, an annular tube shape, and the like.

  By forming a heating zone having a predetermined shape by combining a plurality of quartz glass or translucent alumina containers having such shapes, it is possible to uniformly heat an object to be processed that matches the shape.

  Further, it is preferable that a non-oxidizing gas such as nitrogen flows into the sealed member or the inside of the container is evacuated to 20 torr or less. This is because the carbon heater is prevented from being deteriorated, and it is possible to extend the life and maintain the temperature uniformity for a long time.

  Next, the summary of the invention of the second group will be described.

  One of the objects of the invention of the second group is that there is little heat generation unevenness, for example, an object to be heated such as a semiconductor (wafer) can be uniformly heat-treated, high temperature strength can be maintained for a long time, and a high service life can be obtained. It is to provide a carbon heater.

  Another object of the invention of the second group is to form a sealed member that supports a heater member knitted into a vertically long shape such as a wire shape or a tape shape using a plurality of carbon fiber bundles obtained by bundling a plurality of carbon fibers. An object of the present invention is to provide a carbon heater in which sealing can be reliably performed in a form in which stress concentration on the quartz glass support does not occur, and the thickness of the quartz glass support that supports the heater member can be freely set.

  A carbon heater according to a second group of inventions is such that a sealed member enclosing one or more heater members is substantially integrated by a plate-like quartz glass support, and this quartz glass support A hollow space is formed around the heater member in the body.

  Here, the substantially integrated configuration means that when the bonding surfaces of a plurality of quartz glass plates are fused and the carbon heater of the present invention is manufactured without using a bonding agent as described later, carbon is used. The peripheral part of the carbon heater is fused so that the space such as the groove and the terminal part where the heater member is placed inside the heater is cut off from the outside (atmosphere or atmosphere in the furnace) by the fused part. The state in which the glass contact surface is fused over the entire surface is shown. However, it may be present as long as the unfused portion is about 30% or less with respect to the contact area to the extent that the fusion effect is not hindered. Further, the reason for setting it to about 30% or less is to prevent the radiation light from the heater member from becoming non-uniform.

  As a result, it is possible to reliably perform adhesion in a form in which stress concentration does not occur on the quartz glass support that supports the heater member, and even when a low-strength quartz glass plate having a thickness of 5 mm or less is used, a reduced pressure environment There is no damage to the quartz glass underneath.

  The hollow space around the heater member is a space where there is a fluffed portion of carbon fiber formed on the surface of the heater member as described later.

  In the carbon heater of the second group of the invention, the quartz glass support is substantially integrated by fusing the entire joint surfaces of a plurality of quartz glass plates. It is preferable that a wiring groove is formed on the joint surface and the heater member is disposed there.

  In this way, a wiring groove is formed on the bonding surface of at least one quartz glass plate, and a plurality of carbon fiber bundles in which a plurality of carbon fibers having a diameter of 5 to 15 μm are bundled in the wiring groove are used. This carbonaceous heater member is made into a wire-shaped or tape-shaped heater by arranging a heater member that is knitted into a vertically long shape such as a wire shape or a tape shape, and the impurity content is 10 ppm or less in ash content. Since it becomes a structure in contact with a sealed member made of quartz glass by carbon fibers having a fuzzy diameter of 5 to 15 μm on the surface of the member, even if the heater member is energized and heated to a high temperature, Reaction of carbon and quartz glass proceeds, and as a result, deterioration of the carbonaceous heater member can be prevented. (Since the fluffy carbon fiber on the surface of the heater member comes into contact with the sealed member made of quartz glass, silicification proceeds from the contacted part, but since this diameter is extremely fine and the volume is small, this silicidation reaction It is presumed that the heat is prevented from proceeding to the entire heater member.) In other words, this means that unevenness in heat generation is prevented and the service life can be extended.

  In addition, in order to adjust the calorific value or stabilize the quality, it is possible to arrange one or two or more heater members in parallel. In that case, it is preferable to further provide a two-step groove corresponding to this number at the bottom of the wiring groove.

  A carbon heater according to a second group of inventions is such that a sealed member enclosing one or more heater members is substantially integrated by a plate-like quartz glass support, and this quartz glass support A carbon heater having a structure in which a hollow space is formed around the heater member of the body, wherein the quartz glass support is formed by fusing two quartz glass plates, and at least 1 A wiring groove having a predetermined depth is formed on the bonding surface of the quartz glass plates, and the thickness of each quartz glass plate not including the depth is substantially the same. Thereby, heat can be dissipated evenly.

  According to another carbon heater of the second group of the invention, a sealed member in which one or a plurality of the heater members are enclosed is substantially integrated by a plate-like quartz glass support, A carbon heater having a structure in which a hollow space is formed around the heater member of the quartz glass support, wherein the quartz glass support fuses two quartz glass plates having different thicknesses. A wiring groove having a predetermined depth is formed on the joint surface of at least one quartz glass plate, and the thickness of one quartz glass plate not including the depth is the thickness of the other. It is the structure which becomes 1/2 or less. Thereby, the heat dissipation with respect to one side can be enlarged. One of the two types of carbon heaters can be selected as appropriate depending on the place where the carbon heater is disposed.

  Further, in the carbon heater of the second group of the invention, it is more preferable that the wiring groove has a curved shape at least on the lower side of the cross-sectional shape perpendicular to the length direction and is polished. Of course, the entire cross section may be curved.

  As a result, when a plurality of quartz glass plates are fused and integrated, it is possible to prevent the cross-sectional shape of the wiring groove from being thermally deformed and coming into surface contact with the carbon wire as much as possible. It is possible to prevent the deterioration of the carbon wire accompanying the above.

  This is due to the fact that the curved shape allows the stress to be dispersed by having the curvature of the curved shape inside the groove, and the deformation inside the groove is suppressed.

  Moreover, accumulation of internal strain of the quartz glass support accompanying the thermal deformation can be suppressed, and problems such as cracks can be prevented. Furthermore, unevenness of heat generation as the carbon heater due to absorption of heat generated from the heater member due to the surface contact can be prevented.

  In addition, the above-mentioned wiring groove is polished by, for example, oxyhydrogen burner for a predetermined time, in a normal state where there are a number of irregularities with the wiring groove formed on the quartz glass plate by machining. When the carbon heater generates heat and the wiring groove is heated, among the above-described unevenness, particularly in the convex portion, the extreme portion is heated, resulting in a structure that is sparsely polished. It is intended to prevent this from occurring due to uneven heating.

  The carbon heater of the second group of the invention is preferably a carbon heater fused in a state where the inside of the wiring groove is kept in a reduced pressure or non-oxidizing gas atmosphere. This is to prevent oxidative degradation during the production of the carbon wire.

  According to another carbon heater of the second group of the invention, a sealed member enclosing one or more heater members is substantially integrated by a plate-like quartz glass support. A carbon heater having a structure in which a hollow space is formed in the periphery of the heater member of the glass support, wherein the wiring groove has a cross-sectional shape perpendicular to the length direction as a whole. It has a configuration of a “convex” shape.

  Thereby, when arrange | positioning a carbon wire in the groove | channel for wiring, it can prevent that the wire floats upwards, and can make workability | operativity favorable. Further, it is possible to alleviate thermal distortion due to the deflection of the upper side (upper plate) of the groove, particularly around the groove.

  Here, the “convex” character shape is a shape in which a square whose one side is shorter than the upper side or a vertically long rectangle whose upper side is shorter than the upper side is connected to the upper part of the upper side of the horizontally long rectangle. It means such a shape.

  In the carbon heater of the second group of the invention, a wiring groove is formed in the first quartz glass plate, and a narrow insertion groove or through slit that is paired with the wiring groove is formed in the second quartz glass plate. Forming and joining the first and second quartz glass plates so that the grooves face each other, and polishing or grinding the surface of the second quartz glass plate to remove the bottom of the insertion groove or through slit. It is exposed as an insertion window, and a heater member is pushed into the wiring groove of the first quartz glass plate from there, and the third quartz glass plate is aligned with the polished or ground surface, and then three quartz glass plates are attached. It is preferable that the cross-sectional shape perpendicular to the length direction of the wiring groove is entirely “convex” by fusing and substantially integrating the entire surface other than the groove.

  As a result, the workability can be improved and the thermal strain can be alleviated more reliably.

  According to another carbon heater of the second group of the invention, a sealed member enclosing one or more heater members is substantially integrated by a plate-like quartz glass support. The carbon heater has a structure in which a hollow space is formed around the heater member of the glass support, and the quartz glass support has an opaque quartz glass layer.

  Further, one of the plurality of quartz glass plates may be an opaque quartz glass plate.

  Thus, the opaque quartz glass layer can prevent heat radiation to the side that is not desired to be heated by the carbon heater.

  In another carbon heater of the second group of the invention, the heater member and a carbon reflector having at least one mirror surface are enclosed in a plate-like quartz glass support.

  The carbon reflector preferably has a mirror surface on the side facing the heater member.

  At this time, when three quartz glass plates are used, a heater member and a reflector made of carbon having at least one mirror surface are provided on the wiring groove and the reflector setting spot provided on the two joining surfaces of the quartz glass plate. It is preferable that the joint portion of the quartz glass plate is substantially integrated by fusion.

  In this case, a more preferable form is as follows. That is, a reflector setting counterbore is formed on the upper surface of the first quartz glass plate, a carbon reflector having at least an upper surface is disposed on the counterbore portion, and the wiring is formed on the upper surface of the second quartz glass plate. The heater member is disposed in the groove, the second quartz glass plate is overlaid on the first quartz glass plate, and the third quartz glass plate is overlaid thereon. After that, the portions that contact each other are substantially integrated by fusion.

  As a result, heat dissipation in the direction of the reflector can be suppressed, and heat dissipation can be increased on the surface in one direction. Furthermore, the heat dissipated due to the presence of the reflector is uniformly dispersed by the stock heat, and the temperature distribution in the heater surface can be made uniform.

  The reason for selecting carbon in particular is that the carbon material is easy to purify, and by using the highly purified carbon material, metal contamination of the heater member and the object to be processed due to diffusion of impurities can be prevented. Because.

  A second aspect of the invention is a carbon heater in which a sealed member in which one or a plurality of heater members are enclosed is substantially integrated by a plate-like quartz glass support. A carbon heater having a structure in which a hollow space is formed in the peripheral portion of the heater member of the glass support, the carbon reflector having at least one mirror surface on the entire plate-like quartz glass support Is configured to be disposed adjacent to the sealed member.

  This makes it very easy to protect the portion that the reflecting plate member does not want to be heated by blocking and reflecting the radiation.

  In the carbon heater of the second group of the invention, in any of the forms described above, a convex part having a semicircular or trapezoidal cross section is formed on at least one outer surface of the plate-like quartz glass support, This outer surface is preferably polished. When viewed from above the heater surface, the convex portion is formed in a stripe shape or a concentric portion shape, or is formed in a large number in a lattice shape. As a result, a prism effect can be obtained in which heat generation upward of the heater surface by a linear heating element such as the heater member of the present invention is made uniform by light scattering.

Usually, in order to obtain a similar effect, a method of sand blanking last handle heater surface is employed, in this case, the surface has a roughened shape, the heat radiation from the surface is suppressed, quartz Heat accumulates in the glass itself and energy efficiency decreases. In this sense, it is an important matter that the glossing process is performed.

  Furthermore, in the carbon heater of the second group of the invention, it is preferable that the heater member or the terminal portions connected to both ends of the heater member are pulled out substantially perpendicular to the heater surface formed by the heater member. By pulling out the terminal portion perpendicular to the heater surface, the fused surface of the quartz glass support can be enlarged, which is advantageous in terms of strength. Moreover, according to this structure, the said carbon heater can be easily arrange | positioned to the semiconductor manufacturing apparatus which heats the one or several semiconductor wafer which is a to-be-processed object from the downward side or the upper side. The specific structure of the terminal portion of the carbon heater according to the second group of inventions can be applied to the fourth group of inventions described later.

  According to another carbon heater of the second group of the invention, a sealed member enclosing one or more heater members is substantially integrated by a plate-like quartz glass support. The carbon heater has a structure in which a hollow space is formed in the peripheral portion of the heater member of the glass support, and the sealed member has a curved shape.

  Thereby, for example, a cylinder that can generate heat unevenness, can maintain a high temperature strength for a long time, has a long service life, and can uniformly heat a rod on which a heated body such as a semiconductor (wafer) is arranged. It is possible to provide a curved carbon heater having a two-part shape.

  In the curved carbon heater, a plate-like carbon heater in which the heater member is enclosed in the plate-like quartz glass support and the quartz glass support other than the peripheral portion of the heater member is substantially integrated, It is preferable that a plate-like carbon heater is curved into a predetermined shape by pressing between a carbon lower die having a predetermined cross section and a carbon upper die paired therewith.

  As a result, a curved carbon heater in which the heater member is hermetically sealed to the quartz glass support and the quartz glass support other than the peripheral portion of the heater member is substantially integrated is obtained, whereby the heater member is obtained. Can be reliably sealed in a form that does not cause stress concentration on the quartz glass support that supports the quartz glass, and even when a low-strength quartz glass plate with a thickness of 5 mm or less is used, No damage will occur.

  The upper and lower molds made of carbon have a semicircular cross-sectional shape, preferably a substantially semi-cylindrical carbon heater. Further, at least one surface of the plate-like quartz glass support is a mirror surface More preferably, the carbon reflector is enclosed independently of the heater member. This is to protect the non-heated part and to stop radiation.

  The carbon heater of the invention of the second group can be applied not only to semiconductor heat treatment devices such as oxidation, diffusion, and CVD, but also to any kind of semiconductor manufacturing device that involves some heating in a cleaning device or the like. is there.

  Next, the summary of the invention of the third group will be described.

  In the first group of inventions described above, a carbon heater is formed using a flexible carbon wire in which carbon fibers are knitted. Thus, by using a carbon wire, a freedom degree arises in the shape of a heater and it can enjoy the advantage on a design surface or handling.

  The invention of the third group is to provide a carbon heater for, for example, a semiconductor manufacturing apparatus that can significantly improve the service life and can rapidly increase / decrease temperature by using a carbon wire heater member having such advantages. It is aimed.

  The carbon heater of the third group of the invention uses a plurality of carbon fiber bundles obtained by bundling a plurality of carbon fibers having a diameter of 5 to 15 μm and braids them into a vertically long shape such as a wire shape or a tape shape, and the amount of impurities contained therein A sealed member in which one or a plurality of heater members having an ash content of 10 ppm or less is enclosed is substantially integrated by a plate-like quartz glass support, and the heater in the quartz glass support A carbon heater having a structure in which a hollow space is formed in the peripheral part of the member, wherein the sealed member is composed of a setting member made of quartz glass having a groove for wiring and a lid member made of quartz glass, The heater member is arranged in the wiring groove.

  With this structure, there is little unevenness in heat generation, that is, the semiconductor (wafer) that is the object to be heated can be uniformly heat-treated, and the high-temperature strength for a long time can be maintained, and a high service life can be obtained.

  By making the surface of the heater member knitted into a wire shape using a plurality of carbon fiber bundles obtained by bundling a plurality of carbon fibers as described above with a fuzzy structure even with carbon fibers having a diameter of 5 to 15 μm, The surface contact area is extremely small (substantially, only the fluffy carbon fiber part of the heater member is in contact with the lath), and as a result, it can be used for a considerable time even at about 1350 ° C. Has been confirmed.

  In the carbon heater of the third group of the invention, a flame barrier is formed on the outer peripheral portion of either the setting member or the lid member, or the opposing surface other than the flame barrier is spaced by 0.2 to 1.0 mm. It is preferable that the two members are integrated by a quartz glass overlaying method.

  In addition, when covering the setting member and the lid member made of quartz glass, it is preferable that both members are fixed so as not to have a gap by a quartz glass build-up welding method in a state in which both members are separated from each other in a substantially parallel manner. This is because, for example, when the outer peripheral portion is welded or build-up welded in a state where both members are in contact with each other over almost the entire region, cracking or cracking occurs in both members or one of the members due to heating of the outer peripheral portion at this time. On the other hand, according to the above fixing, it is possible to firmly cover without such a problem. This is considered to be due to the relief of the concentration of thermal stress due to partial heating during processing and the occurrence of warpage due to the temperature difference between the setting member and the lid member.

In addition, the presence of the fire barrier in the above preferred embodiment can prevent the flame of the oxyhydrogen burner as a heating source from entering between the two members and oxidizing the internal carbon heater as much as possible. In addition, the distance between the setting member and the lid member can be made uniform over the entire region, and further, white fogging due to SiO ₂ fine powder can be prevented from occurring on the outer periphery of the setting member and the lid member. Thermal properties can be improved.

  In addition, it is important that the surface of the flame barrier that contacts the mating member is heated and welded on the entire surface. This is because cracks and cracks such as those described above will occur at the time of welding if there is a portion that is merely in surface contact without being welded.

  This flame barrier may be provided integrally when forming both members of a predetermined shape, or may be provided by welding to each outer peripheral portion later.

  And it is preferable that the opposing surface of the part which is not welded of both members is arrange | positioned in the space | interval of 0.2-1.0 mm. This is because if the thickness is less than 0.2 mm, cracks and cracks of both members cannot be sufficiently prevented, and if the thickness exceeds 1 mm, the welding flame easily enters and the carbon heater is likely to be oxidized. .

  Further, in the carbon heater of the third group of the invention, a carbon terminal is disposed at both ends of the heater member, an electrode is connected to the carbon terminal, and a portion of the electrode on the carbon terminal side is covered with a quartz glass pipe; It is preferable to do.

  By providing the carbon terminal, the carbon terminal can be kept at a lower temperature than the heater member, and oxidation can be prevented even if some oxygen enters. In particular, if a non-oxidizing gas is introduced from the periphery of the carbon terminal, the oxidation can be prevented more thoroughly.

  Further, when the heater member and the metal electrode are in direct contact, the life of the heater member is significantly reduced due to metal contamination. Interposing the carbon terminal is also useful in terms of eliminating contact between the heater member and the metal electrode.

  It is preferable to cover a quartz glass pipe on at least the carbon terminal side portion of the metal electrode. And the exposed part of a metal electrode or a terminal is arrange | positioned outside a furnace. Thus, by covering the furnace part of the metal electrode with quartz glass, impurity contamination such as Fe or Al from the metal electrode can be reduced.

  The impurity concentration of the carbon terminal is preferably 10 ppm or less in terms of ash. This is because the heater member can be prevented from deteriorating and the life can be extended.

  It is preferable that a non-oxidizing gas such as nitrogen or argon gas is introduced into the heater. By introducing the non-oxidizing gas in this way, it is possible to prevent the heater member from being oxidized.

  Although the metal electrode connected to the carbon terminal may also generate impurities when the temperature is high, the generation of impurities can be prevented by discharging the non-oxidizing gas from the quartz glass pipe containing the metal electrode.

  Furthermore, it is preferable to use molybdenum (Mo) as the metal electrode. This is because the thermal expansion coefficient of Mo approximates that of the carbon material, and good bonding with the carbon termill is maintained even at high temperatures.

  As the heater member, it is preferable to use the heater member described in the invention of the first group.

  It is possible to make the setting member and the lid member flat.

  Furthermore, in the carbon heater of the third group of the invention, in order to more reliably suppress the reaction between the carbon heater member and the quartz glass setting member, alumina powder is arranged in the arrangement groove, The heater member is preferably supported by the sintered body.

  As a result, the maximum operating temperature of the carbon heater can be more reliably raised to about 1350 ° C.

  The sintered body of alumina powder is formed by performing heat treatment at about 1300 ° C. after the alumina powder and the heater member are installed in the setting recess.

  Further, the iron impurity concentration of the alumina powder is preferably suppressed to 5 ppm or less so that the life of the carbonaceous heater member does not decrease due to iron contamination.

  The carbon heater of the invention of the third group can be applied not only to heat treatment devices such as semiconductor oxidation, diffusion, CVD, etc., but also to any device as long as it is a semiconductor manufacturing device that involves some heating in a cleaning device. is there.

  Next, the summary of the invention of the fourth group will be described.

  The invention of the fourth group provides a carbon heater for, for example, a semiconductor manufacturing apparatus that uses a carbon wire heater member having the advantages as described above, can greatly improve the service life, and can rapidly increase and decrease the temperature. It is an object.

  In addition, the invention of the fourth group is a simple one that can reliably and easily connect the heater member and the terminal wire made of wire-like carbon, and further, the terminal wire made of wire-like carbon and the metal terminal wire. The object is to provide a carbon heater having a structure.

  A carbon heater according to a fourth group of inventions is such that a sealed member enclosing one or more heater members is substantially integrated by a plate-like quartz glass support, and the quartz glass support A carbon heater having a structure in which a hollow space is formed in a peripheral portion of the heater member of the body, wherein the heater member or the terminal portion of the heater member is substantially with respect to a heater surface formed by the heater member. Thus, the structure is drawn vertically.

  According to such a configuration, the carbon heater can be easily disposed in a semiconductor manufacturing apparatus that heats a semiconductor wafer that is an object to be processed from the lower side or the upper side, and has excellent in-plane heat uniformity and durability. A heater having a long life can be obtained.

  The preferred form of the heater member is as described in the first group of inventions.

  One form of the carbon heater of the invention of the fourth group has a structure in which the heater member itself is pulled out substantially perpendicular to the heater surface formed by the heater member (hereinafter referred to as 4- In this case, both ends of the heater member are protruded to the opposite side of the heater surface, and the protruded heater members are arranged in a quartz glass cylinder that abuts the quartz glass support plate. It is preferable that a plurality of or at least end portions are fixed with a plurality of wire-like carbon, and the quartz glass tube is covered with a quartz glass tube to seal the sealed member.

  Thereby, a heater member can be tangent firmly and reliably to the terminal wire which consists of said wire-like carbon. Further, since the heater member is in contact with the same type of wire-like carbon and lowers the electrical contact resistance, problems such as sparks can be prevented.

  Furthermore, according to such a configuration, the end of the heater member as described later is disposed in the sealed member as compared with a method in which the terminal member is arranged in the quartz glass sealed member and connected to the terminal wire. Therefore, unevenness of heat generation above the heater surface tends to be further reduced by the amount of foreign matter other than the heater member.

  In the carbon heater of the invention of the 4th-1 group, the other end side of the above-mentioned wire-like carbon used as a terminal wire is formed into a second wire-like carbon connecting member having a hollow member and having a core member inside thereof. It is more preferable to connect by pressing with the core member, connect a metal inscribed line with a metal wire connecting member using a split core, and connect both connecting members with any connecting member.

  In particular, the electrical contact resistance can be suppressed and the occurrence of sparks can be prevented by a plurality of wire-like carbon connection methods utilizing the pressing by the core member. Further, the inscribed line connecting method using the split core allows the metal inscribed line and the carbon terminal member to be brought into contact with each other over a wide surface, thereby preventing the occurrence of sparks.

  As a method for connecting the inscribed line in the metal wire connecting member using the split core, a taper surface is formed on the outer side of the split core and the terminal body is engaged with the taper surface. It is preferable that the metal inscribed line is sandwiched between the support portions formed on the split core and pressed and connected to an arbitrary connecting member. Thereby, contact resistance can be suppressed and a spark generation can be prevented.

  Furthermore, the heater member is arranged in line symmetry in the sealed member, a gas introduction / discharge port is formed on the axis of symmetry, and a non-oxidizing gas is introduced from the gas introduction / discharge port during welding of the container, It is preferable that the gas is exhausted from the gas introduction / discharge port when the container is sealed. This makes it possible to introduce a non-oxidizing gas uniformly inside the heater, thereby preventing the oxidation of carbon and making the heater in-plane temperature distribution uniform.

  As understood from the above description, in the carbon heater of the 4-1th group of inventions, a plurality of heater members made of carbon wires and a wire-like carbon are arranged in a quartz glass tube, or at least a plurality of ends are provided. It fixes with the divided | segmented wire-like carbon, it is set as the structure which connects the said wire-like carbon and the metal inscribed line by the side of a power supply with a 2nd terminal device, A 2nd terminal device has two or more edge parts. A second wire-like carbon connecting member for connecting the divided wire-like carbon; a metal wire connecting member configured to connect a metal inscribed line using a split core; It is equipped with a terminal part main body for connecting the wire-like carbon connecting member and the metal wire connecting member, and is configured to connect both connecting members to an arbitrary connecting member. Masui it is clear.

  And the quartz glass tube and the 2nd terminal device which are such a structure and the said heater member arranged the wire-like carbon by which the said heater member was divided into several or at least the end part were enclosed in the inside of a quartz glass tube are enclosed. Depending on the configuration, a terminal wire made of a plurality of wire-like carbons, a second wire-like carbon connecting member, a terminal body, a metal wire connecting member, and a metal inscribed wire are connected from a heater member arranged on a quartz glass sealed member. All of the series of electrical connection systems can be cut off from the outside air, and as a result, the oxidation of all the members constituting the series of electrical connection systems can be prevented, and a long-life and stable heat uniformity can be ensured. It can be.

  In addition, as said arbitrary connection member, the cylindrical core which has a thread part on the outer periphery is employable, for example.

  In order to optimize the carbon heater according to the invention of the 4-1th group, the metal internal tangent line and the external tangent line on the power source side disposed inside the quartz glass tube are further passed through the Mo foil. It is important that the Mo foil is sealed with a quartz glass pinch seal.

  The pinch seal part is a structure in which a cap part of a quartz glass tube sealed at one end is sandwiched with a flat plate jig made of carbon at a high temperature and adhered and welded in a flat plate shape. means.

  On the other hand, if the inner tangent is pulled out of the cap and pinched, the pinch seal made of quartz glass will crack due to the difference in thermal expansion coefficient between Mo and quartz, and the sealing performance will be hindered. Occurs. In order to solve such a problem, a Mo foil body is interposed, and pinched with quartz glass and sealed.

  In the carbon heater of the fourth group of the invention, the quartz glass container can be formed into a flat plate donut shape having an opening in the center portion, and has a flat plate semicircular shape and a notch in the center portion as a whole. It is possible to form a doughnut-shaped flat plate heater by combining the split molds. This is because a shaft for supporting the object to be processed is inserted into the center opening of the donut shape so as to be inserted.

  In addition, the heating elements are arranged symmetrically in the quartz glass container, the gas introduction / discharge port is formed on the axis of symmetry, and the container is assembled by welding while introducing the non-oxidizing gas from the gas introduction / discharge port, Furthermore, it is preferable that the inside of the container is sealed under reduced pressure at normal temperature while exhausting from the gas inlet / outlet.

  It is preferable to seal the quartz glass container in a reduced pressure of 0.2 atm or less or a non-oxidizing gas atmosphere at room temperature.

  One form of the carbon heater of the invention of the fourth group has a configuration in which terminal portions connected to both ends of the heater member are pulled out perpendicularly to the heater surface formed by the heater member (hereinafter referred to as this). In this case, a terminal member is connected to both ends of the heater member and protruded to the opposite side of the heater surface, and the terminal member is covered with a quartz glass tube. The glass member is preferably sealed.

  In the carbon heater of the invention of the 4-2th group, the terminal part main body is further arranged on the free end side of the quartz glass tube in the above-described form, and the terminal member and the terminal part main body are plural or at least one end is plural. It is more preferable to use a configuration in which the wires are divided and connected. As a result, the electrical resistance at the terminal wire portion can be lowered, and the heat generation at this portion can be suppressed. Moreover, since heat conduction is small, heat transfer to the lower sealing terminal can be suppressed by heat transfer.

  Further, the heater member is arranged in line symmetry in the sealed member, a gas introduction / discharge port is formed on the axis of symmetry, and a non-oxidizing gas is introduced from the gas introduction / discharge port during welding of the vessel. It is preferable that the gas is exhausted from the gas introduction / exhaust port during sealing. As a result, the non-oxidizing gas can be uniformly introduced into the heater, and carbon oxidation can be prevented and the heater surface temperature distribution can be made uniform.

  Further, in the carbon heater of the invention of the 4-2th group, the terminal member connects the heater member and the plurality of wire-like carbons, and a heater member connecting portion is formed at one end side of the heater. A first wire-like carbon connecting member is provided for connecting the members, and connecting the wire-like carbon having a plurality of or one end portions divided into a plurality of pieces, and the first wire-like carbon connecting member is connected to the other end of the terminal member. A wire-like carbon connecting member is connected, a first wire-like carbon connecting member is formed in a hollow shape, a core member is disposed on the inside thereof, and the plurality of wire-like carbons are pressed and connected by the core member. It is preferable to adopt a configuration in which a female screw portion is formed on the connecting end side of the terminal member and the first wire-like carbon connecting member, and the intermediate member corresponds to each female screw portion. Forming a Ruoneji portion, it is more preferable that the configuration of connecting the two members via the intermediate member.

  And as a more preferable form, the other end side of the said wire-like carbon is connected to the 2nd wire-like carbon connection member in which a hollow part is formed and has a core member in the inside by the press in this core member. Then, a metal inscribed wire is connected by a metal wire connecting member using a split core, both the connecting members are connected by a terminal portion body located in the middle, and a taper that engages the tapered surface of the terminal portion main body. Forming the part, sandwiching the metal inscribed line with the support part formed in the split core, and pressing the same to connect the terminal part body to the metal inscribed line Mo metal rod, the above There exists a structure which connects a wire-shaped carbon connection member, a terminal part main body, and a terminal part main body and a metal wire connection member with a screw type, respectively.

In the carbon heater of the 4-2 group invention, a heater member made of carbon wire and wire-like carbon are connected by a first terminal device, and the wire-like carbon and a metal inscribed line on the power source side are secondly connected. The first terminal device includes a terminal member, and the heater member is connected to the heater member connecting portion formed on one end side thereof, and a plurality of or a plurality of end portions are provided. A first wire-like carbon connecting member for connecting the wire-like carbon divided into two, and the first wire-like carbon connecting member is connected to the other end side of the terminal member. A wire-shaped carbon connecting member is connected, a first wire-shaped carbon connecting member is formed in a hollow shape, a core member is disposed on the inside thereof, and a divided wire-shaped carbon The second terminal device is configured to be connected by pressing with a core member, and the second terminal device is a second wire-like carbon connecting member for connecting a plurality of wire-like carbons whose ends are divided into a plurality. A metal wire connecting member configured to connect a metal inscribed line using a split core, and a terminal body for connecting the second wire-like carbon connecting member and the metal wire connecting member. It is preferable that both the connection members are connected to one end side and the other end side of the terminal body. As an optimal example, the heater member and the first and second terminal devices are made of quartz. A metal inner tangent line placed inside a quartz glass tube and a power source side outer tangent line are connected via Mo foil, and the Mo foil is sealed with a pinch seal made of quartz glass. A configuration having a third terminal device of Those were. In addition, the said pinch seal | sticker part is equivalent to what was described in description of invention of the said 4th-1 group.

  The carbon heater of the invention of the above-mentioned 4-2 group is different from the carbon heater of the above-mentioned invention of the 4-1 group in that the first wire-like carbon connecting member is present. In the configuration, substantially the same operation effect is established.

  Next, the summary of the invention of the fifth group will be described.

  An object of the fifth group is to provide a carbon heater for, for example, a semiconductor manufacturing apparatus that is excellent in heat uniformity and flexibility and can be manufactured at low cost.

  Another object is to provide a carbon heater that further reduces unevenness in heat generation and improves the service life.

  The carbon heater of the fifth group of the invention uses a plurality of carbon fiber bundles obtained by bundling a plurality of carbon fibers having a diameter of 5 to 15 μm, and weaves them into a vertically long shape such as a wire shape or a tape shape, and the amount of impurities contained therein A carbon heater in which one or more heater members having an ash content of 10 ppm or less are enclosed in a quartz glass sealed member in parallel, and the sealed member in which the heater member is sealed is made of quartz glass or alumina It is the structure which is a flat container.

  In particular, it is preferable that the heater member is supported and sealed in the flat container by a plurality of terminal members and wire support jigs in a non-contact manner.

  This is to prevent the heater member from deteriorating as much as possible due to the reaction between the carbon heater member and the quartz glass plate container at a high temperature.

  Further, a substantially cylindrical hole for inserting a bolt is formed in the length direction of the terminal member, and a substantially cylindrical horizontal hole penetrating at least the hole is formed. It is preferable that a heater member is inserted and a bolt having a length reaching at least the lower end of the lateral hole is rotationally inserted into the hole. Accordingly, the elongated heater member can be easily and securely held.

  Further, in this structure, the diameter of the substantially cylindrical hole portion for inserting the bolt is made larger than the width of the substantially cylindrical lateral hole, and the heater member inserted into the lateral hole is pressurized by the bolt, and the hole It is preferably deformed flat so as to reach the part. Accordingly, the elongated heater member can be connected to the rod-shaped terminal member firmly and without electrical loss. In the above structure, it is more preferable that an expanded graphite sheet is interposed between the bolt and the heater member. Thereby, the cutting | disconnection of the carbon fiber which forms a heater member at the time of the said bolt fastening can be reduced as much as possible.

  The wire support jig is preferably formed of translucent alumina alone or an assembly member of high-purity carbon and translucent alumina. Further, in the assembly member, a portion in contact with the heater member is made of a high-purity carbon material. It is more preferable that the portion where the assembly member is arranged and connected to the flat container is made of a translucent alumina material. According to translucent alumina, non-reactivity with a high-temperature carbon material and electrical insulation are achieved at a high level. In particular, according to the latter assembly member, even if there is a sudden temperature change of the heating element, the life of the component is extended without causing cracks or breakage in the wire support jig.

  More preferably, a structure in which a carbon reflector is disposed below the heater member is added.

  In particular, by providing a reflecting plate whose upper surface is mirror-finished, it is possible to reduce the release of heat to the lower side of the carbon heater and to greatly increase the heat uniformity and the temperature increase rate above the carbon heater.

  Furthermore, an effective carbon heater particularly for a semiconductor manufacturing apparatus is configured by enclosing the heater member, the rod-shaped terminal member and the wire support jig in a sealed quartz glass container or a translucent alumina container. Can do.

  At this time, it is preferable that a branch pipe is appropriately attached to the container so that a non-oxidizing gas such as nitrogen flows from the branch pipe or the inside of the container is evacuated to 20 torr or less. This is because the heater member is prevented from being deteriorated, and it is possible to extend the life and maintain the temperature uniformity for a long time.

  Furthermore, the carbon heater of the fifth group of the invention may have a configuration in which a convex portion having a semicircular or trapezoidal cross section is formed on the heater surface of the flat plate container, and the surface is polished. Preferably, this provides a prism effect in which heat generation upward of the heater surface by a linear heating element such as carbon wire is made uniform by light scattering.

  In addition, when the said convex part is seen from the heater surface upper direction, this is formed in the shape of a stripe or concentric part, or this is in the state formed in large numbers by the grid | lattice form.

  Usually, in order to obtain the same effect, a method of sand plasting the heater surface is adopted. In this case, the surface is grainy, and heat radiation from this surface is suppressed, and quartz glass is used. It accumulates heat in itself and reduces energy efficiency. In this sense, it is an important matter that the glossing process is performed.

  Further, the heater surface of the carbon heater can be made larger in diameter than the object to be processed. Since the carbon material has a small heat capacity, the heating rate can be further increased by increasing the diameter of the heater surface in this way, and the heat uniformity on the workpiece can be improved.

First Group Invention Hereinafter, a preferred embodiment of the first group invention will be described with reference to FIGS. 29 to 40 and 88.

FIG. 88 is a three-dimensional view showing a first embodiment of the carbon heater according to the first group of the invention. (The drawing shows the case where three carbon fiber bundles are used so that the knitted state can be described most simply.)
In this embodiment, the heater member 111 is formed by knitting a wire shape using three carbon fiber bundles obtained by bundling 330 carbon fibers having a diameter of 7 μm. The diameter of the carbon wire is about 1.2 mm.

  This carbon fiber woven heater member has a braided span (in the length direction, one wire bundle is regularly entangled with the other two, and the distance until it returns to the original position) Is 5 to 7 mm.

  Therefore, even if each carbon fiber is cut halfway, the influence of this cutting is limited to only the length of 5 to 7 mm of the braiding span, which affects the overall length of the heater member. As a result, it is possible to effectively suppress variations in the electric resistance value in the length direction of the heater member, and hence generation of heat unevenness.

  Further, according to the heater member, when three carbon fiber bundles are knitted, a substantial number of 330 × 3 carbon fibers are cut at some points, and when viewed as a whole, A large number of fluffs 115 of 3 to 6 mm are formed on the surface.

  FIG. 29 is a perspective view showing a second embodiment of the carbon heater according to the invention of the first group.

  In this embodiment, the heater member 111 is made of carbon wire. The carbon wire is knitted into a wire shape using nine carbon fiber bundles obtained by bundling 300 carbon fibers having a diameter of 7 μm. The diameter of the carbon wire is, for example, about 2 mm. The braided span is about 3 mm, and the fluff caused by the carbon fiber is about 0.5 to 2.5 mm.

  Carbon electrodes 112 are connected to both ends of the heater member 111. The heater member 111 is supported by a plurality of alumina support members 113 and is bent many times in the same plane. In this embodiment, the heating (uniform heating) zone is planar.

  The amount of impurities contained in the heater member 111 is 10 ppm or less in terms of ash. The resistance value of the heater member 111 at 1000 ° C. is 1 to 10 Ω / m · book.

  FIG. 30 is a perspective view showing a third embodiment of the carbon heater. FIG. 31 is a cross-sectional view showing a state in the vicinity of the carbon electrode 122 in the carbon heater of FIG.

  In this embodiment, the heater member 121 is formed of carbon tape. The carbon tape is knitted into a tape shape using a plurality of carbon fiber bundles obtained by bundling a plurality of carbon fibers. The width of the carbon tape is, for example, about 10 mm, and the thickness is, for example, about 1 mm. Also in this case, the fluff caused by the carbon fiber is equivalent to the case where the carbon wire is used.

  The four heater members 121 are connected in series via support members 123 and 124, and carbon electrodes 122 are disposed at both ends thereof. The support members 123 and 124 are two flat plates, and sandwich and fix the heater member 121 therebetween. The lower (base) support member 124 is made of quartz, and the upper support member 123 is made of carbon. Also in this embodiment, the heating zone is planar.

  The amount of impurities contained in the heater member 121 is 10 ppm or less in terms of ash. Further, the resistance value of the heater member 121 at 1000 ° C. is 1 to 20 Ω / m · book.

  FIG. 32 is a perspective view showing a fourth embodiment of a carbon heater particularly effective for a semiconductor manufacturing apparatus.

  In this embodiment, the heater member 131 is spirally disposed in the quartz glass double tube 136.

  The heater member suppresses oxidation consumption and prevents devitrification of the quartz glass, so that the impurity concentration is 10 ppm or less in terms of ash.

  The quartz glass double tube 136 has a sealed structure composed of an inner cylinder, an outer cylinder, and upper and lower plates, and nitrogen gas can be introduced into the interior or a vacuum state of 20 torr or less can be achieved.

  The heater member 131 is supported by a small projection 133 made of alumina attached to the inner cylinder. The protrusion 133 may be linear. The heater member 131 can be supported by a groove instead of a protrusion.

  The small protrusions made of alumina are preferably made of high-purity translucent alumina, and even in translucent alumina, if an attempt is made to increase the degree of rapid temperature increase, the above-mentioned small projecting portions are caused by thermal shock. Since there is a possibility that cracks and breakage may occur in the protrusions, it is preferable to use the protrusions as an assembly member of high-purity carbon and translucent alumina. In that case, the portion in contact with the heater member is made of high purity carbon. Furthermore, quartz glass may be used instead of translucent alumina.

  In this embodiment, three heater members 131 are spirally wound around the inner cylinder, and three heating zones are continuously formed. Thus, by forming two or more heating zones, it becomes easy to balance the temperature of the heating region. The zone width and the number of zones can be arbitrarily determined. From the economical viewpoint, the number of zones is advantageously 3-5.

  The heater member 131 penetrates the outer cylinder through a metal attachment member 134 and is connected to a power source 135 through a graphite electrode 132.

  FIG. 33 is a perspective view showing a fifth embodiment of a carbon heater particularly effective for a semiconductor manufacturing apparatus.

  The carbon heater 140 is formed by a number of heater units 149.

  Each heater unit 149 has a configuration in which the heater member 141 made of the above-described carbon wire is arranged in a sealed quartz glass straight pipe. A large number of heater units 149 are arranged in a cylindrical shape, and a cylindrical carbon heater 140 is formed as a whole.

  The carbon heater 140 has a cylindrical heating zone. Such a cylindrical shape is preferable for the heat treatment of the wafer, but depending on the object to be heated, or from the viewpoint of recognition of the heating conditions, it may be a box shape.

  When the furnace body is configured using the carbon heater 140, a plurality of carbon heaters 140 (for example, 3 to 5 zones) can be used in order to improve the temperature balance above and below the furnace body. At that time, carbon heaters having different shapes and configurations may be used.

  In addition, although the said example was described about the case where the carbon heater unit used as a part of carbon heater was made into the tubular body, it is not limited to this, A quartz glass member other than the peripheral part of a heater member is not substantially limited to this carbon heater unit. Can be made into an integrated rod-shaped body.

  FIG. 34 shows an example of the heater unit 149 that is a part of the carbon heater 140.

  The heater unit 149 has a configuration in which both ends of a quartz glass straight pipe 146 are sealed with a quartz flange 162 and a metal flange 161. A metal electrode 144 is provided through both flanges 161 and 162, and a carbon electrode 142 is connected to the inside thereof. A heater member 141 is stretched between the two carbon electrodes 142.

In the vicinity of both ends of the quartz glass straight tube 146, inlets / outlets 147 and 148 used for N ₂ introduction and vacuum suction are formed.

  The metal electrode 144 may be a carbon electrode, but is preferably made of metal in order to maintain a vacuum state.

  FIG. 35 and FIG. 36 show a modification of the heater unit 149 that is a part of the carbon heater 140.

  In the heater unit 149 of FIG. 35, the metal electrode 44 and the carbon electrode 142 are inserted into the protruding portion from the side surface of the quartz glass straight pipe 46.

  In the heater unit 149 of FIG. 36, a wire support protrusion 143 is formed on the end face of a quartz glass straight pipe, and the heater member 141 is configured to face the other end via the support protrusion 143. For this reason, the heater length can be maximized, which can be used to improve the thermal uniformity in the furnace.

  FIGS. 37A and 37B show a sixth embodiment of a carbon heater particularly effective for a semiconductor manufacturing apparatus.

  The carbon heater 150 is formed by a number of annular tube heater units 159.

  Each heater unit 159 has a configuration in which a heater member 151 made of carbon wire is disposed in an annular tube 156 made of sealed translucent alumina. A large number of substantially annular heater units 150 are stacked in a cylindrical shape to form a cylindrical heater 150 as a whole.

  Examples of the heater unit 159 are shown in FIGS. 38 (A), (C) and (B), (D).

  In the heater unit 159 of FIGS. 38A and 38C, both ends of the ring are arranged on the same plane. On the other hand, in the heater unit 159 of FIGS. 38B and 38D, both ends of the ring are overlapped vertically.

  The heater unit 159 has a configuration in which both ends of a transparent alumina annular tube 156 are sealed with flanges 163. The flange 163 has a structure in which translucent alumina and metal are bonded together. A metal electrode 154 passes through the flange 163, and a carbon electrode 142 is connected to the inside thereof. A heater member 151 is connected between the two carbon electrodes.

  In the carbon heater 150 of FIG. 37A, the positions of the electrodes 154 are aligned in the vertical direction, and a phase is generated at the electrode terminal positions. On the other hand, in the carbon heater 150 of FIG. 37 (B), the position of the electrode 154 can be freely set as shown.

  The number of overlapping heater units 159 can be arbitrarily adjusted. In addition, it is possible to further improve the thermal uniformity by controlling the power of each heater unit.

  In the heater unit 159 shown in FIG. 39, both ends of a translucent alumina annular tube 156 are in contact with each other, and the electrode 154 protrudes in the radial direction from the center of the cross section of the tube. In this type of heater unit 159, the heater length can be maximized, and the thermal uniformity of the furnace body can be improved.

  Although not shown in FIGS. 37 to 39, the translucent alumina annular pipe 156 can also be provided with a piping system at both ends so that nitrogen gas can be introduced into the pipe or the inside of the pipe can be evacuated.

  In addition, although the example of FIGS. 37-39 described about the case where the carbon heater unit used as a part of carbon heater was made into the shape of an annular tube or an annular tube, it is not limited to this, All are the peripheral parts of a heater member A rod-like body in which the above quartz glass members are substantially integrated can be obtained. Further, in this example, the same effect can be achieved even if an annular tube 156 made of quartz glass is used.

  Next, the embodiment of FIG. 40 will be described.

  The heater member 161 is supported in a spiral shape and enclosed in an insulating material container 166 by an arbitrary configuration not shown. Electrodes are installed at both ends of the heater member 161.

  The electrode part of the heater member 161 is made of a carbon material. The support electrode portion 162 may be made of either metal or carbon, but preferably the tip portion in contact with the heater is made of high purity carbon in order to prevent impurity contamination.

  The wire support member 163 is made of a nonconductive material such as alumina or quartz glass.

  The space between the heat insulating material container 166 containing the heater member and the furnace core tube 167 is hermetically sealed, and nitrogen can be introduced into the inside or a vacuum state can be established. The degree of vacuum is set to 20 or 10 torr or less, for example. it can.

  A plurality of heater units can be used to form a long cylindrical heater heating zone.

  By overlapping the heater units in this way, the uniformity of the temperature distribution at the center can be improved. For example, in the single unit, the temperature difference of the central heater unit at 1000 ° C. was 50 ° C. or more, but when the heater unit was tripled, it was confirmed that the temperature difference was 5 ° C. or less.

  As a carbon heater, a heater member made of a plurality of carbon fiber bundles made by bundling a plurality of carbon fibers can reduce the heat capacity when compared with the C / C one, thus dramatically improving the rapid quenching throughput. did it.

  Further, by using the heater member, the heat generation unevenness can be reduced as compared with the case of using only carbon fiber.

In addition, with the conventional SiC heater, the electric load density could only be increased up to 10 W / cm ² , whereas when the carbon wire was used, the electric load density could be increased up to 30 W / cm ^2. As a result, a high temperature increase of about 3 times became possible.

  Further, it is possible to further improve the thermal uniformity by controlling the power of each heater unit.

  The carbon heater particularly effective for the semiconductor manufacturing apparatus of the invention of the first group is excellent in heat uniformity and flexibility, and can be manufactured at low cost.

  The invention of the first group is not limited to the above embodiment. The shape of the illustrated carbon heater is merely an example, and various modifications are possible. In the third embodiment of FIG. 30, a tape-shaped heater member can be used instead of the wire-shaped heater member.

Second Group Invention A preferred embodiment of the second group invention will now be described with reference to FIGS.

  1 to 28 are simplified drawings in which the heater member 11 and the peripheral portion of the heater member in the sealed member 12 are in contact with each other. Is one in which a hollow space is formed (by fuzz of carbon fibers formed on the surface of the heater member).

  First, a first embodiment of the invention of the second group will be described with reference to FIGS.

  This carbon heater 10 is a rectangular flat heater as a whole, and has a structure in which a heater member 11 is enclosed in a quartz glass support 12. As shown in FIG. 2, the quartz glass support 12 has a substantially hollow space formed in the periphery of the heater member 11, and is substantially integrated except for the space. It has become a structured.

  Here, the most preferable form as a substantially integrated configuration is that, when the carbon heater of the present invention is manufactured by fusing a plurality of quartz glass plates, the fused surfaces are fused on the quartz glass plates. This is a state in which there are no parts that are not attached and are not separated, or there are no structurally non-uniform parts in a semi-fused state.

  As the heater member 11, a member in which a plurality of carbon fiber bundles obtained by bundling a plurality of carbon fibers and knitted into a wire shape is used.

  The heater member 11 is arranged in a zigzag shape on substantially the center plane of the quartz glass support 12. The wiring form may be spiral or other shapes.

  As a specific example of the heater member, nine carbon fiber bundles (a total of 2970 pieces) obtained by bundling about 330 carbon fibers having a diameter of 7 μm are knitted into a wire shape having a diameter of about 2 mm. The braided span is 3 mm, and the surface fluff due to the carbon fiber is about 0.5 to 2.5 mm. Two, three or more such heater members can be used. If a plurality of lines are used, the quality related to the heat generation characteristics can be stabilized.

As shown in FIG. 3, the quartz glass support 12 is formed by fusing together two quartz glass plates 12a and 12b having a thickness at which the wire is located at the center, and substantially integrating them. On the joint surface of one quartz glass plate 12b, a wiring groove 14 for accommodating the heater member 11 is formed in a rectangular cross section. The thicknesses t ₁ and t ₂ of the quartz glass plates 12 a and 12 b not including the wiring groove 14 are the same, and the heater member 11 is located at the center of the support 12.

  The terminal wire of the heater member 11 is drawn perpendicularly to the heater surface 13 from a hole 21 having a diameter of 3 mm, for example.

  FIG. 4 shows the manner of the fusing process. The quartz glass plates 12a and 12b are arranged on the carbon lower member 27, the carbon upper member 28 is placed thereon, and the weight 29 made of a carbon material is placed thereon and set in the heat treatment furnace.

  The upper surface of the lower member 27 and the lower surface of the upper member 28 are mirror-finished. These carbon members are all purified products having impurities of 5 ppm or less.

In order to adopt a structure in which the quartz glass support other than the peripheral part of the heater member is substantially integrated like the present carbon heater, the homogeneity of the carbon member and the portion in contact with the quartz glass support are particularly important. Surface roughness is important. In order to make the surface roughness and homogeneity appropriate, the carbon member having an open porosity of 15% or less and having a bulk density characteristic of 1.8 to 2.0 g / cm ³ is used. It is important to make the surface roughness buffed or mirror-polished. This makes it possible to apply uniform pressure to the entire surface of the quartz glass support by the carbon member, and to prevent thermal strain from remaining in the quartz glass during production due to the difference in thermal expansion coefficient between quartz glass and carbon. It becomes.

  The inside of the furnace is kept at a vacuum of 1 torr or less, and is heat-treated at 1200 to 1600 ° C. for 0.5 to 5 hours to fuse the joining surfaces of the two quartz glass plates 12a and 12b. This heat treatment is long when the temperature is low, short when the temperature is high, and is changed depending on the situation. The bonding is performed so that the atmosphere of the heater member 11, that is, the atmosphere in the wiring groove is a reduced pressure or non-oxidizing atmosphere.

  At the time of cooling, cooling near 1100 ° C., which is the strain point of quartz glass, is gently performed. The cooling rate in the vicinity of 1100 ° C. is set to, for example, about 50 to 150 ° C./hour.

  By such heat treatment, the entire bonded surface of the quartz glass support 12, that is, the two quartz glass plates 12a and 12b can be fused and substantially integrated. That is, a substantially hollow space is formed in the peripheral part of the heater member 11, and the structure is substantially integrated except for the space part.

  The fusing process employs a method of heating in a heat treatment furnace, that is, an external heating means. However, not only this, a quartz glass plate is sandwiched between carbon members in a predetermined furnace, and quartz glass is used. A method in which the carbon wire in the plate is energized and heated to fuse the quartz glass plate, or a method in which the heater member in the quartz glass plate is heated by high frequency induction heating, for example, sandwiched by a member such as AlN instead of the carbon member Can also be adopted.

  With such a heating means from the inside, the fusion proceeds from the center side, not from the outer periphery of the quartz glass plate, so that the gas existing between the quartz glass plates is taken into the interior at the time of fusion and bubbles remain. That will be as little as possible.

  FIG. 5 shows an example of how the carbon heater is used. The end of the heater member 11 is drawn from the heater member 11 substantially perpendicularly to the heater surface 13 and connected to the Mo terminal wire 62 via the carbon terminal 61. These are arranged in a quartz glass tube. The Mo terminal wire 62 is connected to the two Mo outer tangent wires 64 via the Mo foil 63. The Mo foil 63 is pinch-sealed.

  Next, a carbon heater according to a second embodiment will be described with reference to FIGS. The subsequent embodiments will be described with a focus on differences from the first embodiment.

  In the carbon heater 10 of FIG. 7, the heater member 11 is disposed on the side close to the heater surface 13 when viewed in the thickness direction of the quartz glass support 12.

As shown in FIG. 6, the carbon heater 10 is formed by using two quartz glass plates 12c and 12d having different thicknesses. For example, the thickness t ₁ of _one quartz glass plate 12c can be set to ½ or less of the thickness t ₂ of the other 12d. The groove 14 for accommodating the carbon heating element 11 is formed in the thicker quartz glass plate 12d. However, the thickness of the quartz glass plate is a thickness that does not include the wiring groove portion.

  The upper quartz glass plate 12c can be formed with a size of 100 × 100 × 3, for example, and the lower quartz glass 12d can be formed with a size of 100 × 100 × 7, for example.

  Next, a carbon heater according to a third embodiment will be described with reference to FIGS.

  The carbon heater 10 has an opaque (or foamed) quartz glass layer 12e having a large number of fine closed pores.

  The opaque quartz glass layer 12e is disposed on the opposite side of the heater surface and prevents radiant heat from being transmitted to the lower part of the heater.

  As shown in FIG. 8, a thin quartz glass plate 12c and an opaque quartz glass plate 12e are arranged above and below the quartz glass plate 12d to which the heater member 11 is wired, and the above-described fusing process is performed. As a result, as shown in FIG. 9, the quartz glass layer 12e including the opaque quartz glass layer 12e is substantially integrated by a plate-like quartz glass support 12 enclosing one heater member 11, and this quartz glass A structure in which a hollow space is formed around the heater member in the support 12 can be obtained.

  FIG. 10 is a modification of the carbon heater 10 of FIG. In the carbon heater 10, the opaque quartz glass layer 12 e occupies about ½ of the total thickness of the quartz glass support 12. The heater member 11 is disposed between the opaque quartz glass layer 12e and the transparent quartz glass layer.

  Thus, by increasing the thickness of the opaque quartz glass layer 12e, it is possible to increase the effect of preventing transmission of radiant heat below the heater.

  Next, a fourth embodiment will be described with reference to FIGS.

  The carbon heater 10 has a configuration in which a heater member 11 made of carbon fiber and a carbon reflector 15 having at least one mirror surface facing the heater member 11 are enclosed in a plate-like quartz glass support 12. Yes. The quartz glass support 12 is formed with a hollow space in the peripheral portion of the heater member 11 and is substantially integrated in other portions.

  The quartz glass upper plate 12c, the quartz glass middle plate 12d, the heater member 11, the carbon reflector 15 and the quartz glass lower plate 12e are assembled as shown in FIG. The support 12 (12c, 12d, 12e) is substantially integrated.

  The quartz glass lower plate 12e is provided with a counterbore 16 for carbon reflector, but the counterbore 16 is formed slightly larger than the reflector in order to absorb the thermal expansion difference.

  Thus, by providing the carbon reflector below the carbon heating element, it is possible to increase the effect of preventing the transmission of radiant heat below the heater, and to improve the heat radiation above the heater. be able to.

  Next, a fifth embodiment will be described with reference to FIGS.

  This embodiment is a reflector 20 for a carbon heater, which corresponds to a single reflector portion taken out from the carbon heater 10 (FIGS. 11 to 13) provided with the aforementioned reflector.

  That is, the reflector 20 for carbon heater has a configuration in which a carbon reflector 15 having at least one mirror surface is enclosed in a plate-like quartz glass support 22.

  By assembling a quartz glass upper plate 22a, a carbon reflecting plate 15 having a mirror surface on one side, and a quartz glass lower plate 22b having a setting spot for a reflecting plate in the arrangement shown in FIG. The quartz glass support 22 (22a, 22b) is integrated.

  As shown in FIG. 17, the quartz glass support 22 encapsulating the reflector 20 for carbon heater is disposed so as to overlap the lower surface of the carbon heater of FIG. It can be in one form.

  The setting spot for the reflecting plate of the quartz glass lower plate 22b is larger than the reflecting plate to absorb the difference in thermal expansion, and a space for this is formed as shown in FIG.

  The above-mentioned carbon reflector 15 is made of a thermally expanded graphite sheet, a Kapton fired body sheet, a glassy carbon sheet, etc., and has a thickness of 20 to 2000 μm.

  The sheet preferably has a thin thickness of 20 to 200 μm in order to make the carbon heater more compact and to reduce the heat capacity. In order to obtain the cost, a Kapton fired sheet produced by firing a Kapton sheet is most preferable.

  In addition, the description regarding the said carbon reflecting plate-like body is common to the carbon reflecting plate-like body described in the present invention.

  The carbon heater reflector 20 is clean and excellent in heat resistance and has a low heat capacity, and is therefore suitable as a heat reflector disposed below or outside the heater.

  FIG. 16 is a modification of the carbon heater reflector 20 of FIG. In the carbon heater reflector 20, two carbon reflectors 15 a and 15 b are sealed in a quartz glass support 22. By arranging a plurality of carbon reflectors having a small area in this manner, it is possible to more effectively suppress the occurrence of cracks associated with the thermal expansion of the carbon material. In FIG. 16, the two carbon reflectors have a structure in which only one part is overlapped. However, the two carbon reflectors may be entirely overlapped. In this case, more effective heat insulation can be obtained.

  18 and 19, two heater members 11 made of carbon fibers are arranged in parallel in the wiring groove 14 (three or more are also possible). Two auxiliary grooves 14c are formed at the bottom of the wiring groove 14 in accordance with the number of heater members. Thereby, a heater member can be supported by line contact of three places, for example, and troubles, such as heat generation unevenness accompanying surface contact, can be eliminated.

  20 and 21, the bottom 14d and the whole 14d, 14e of the cross section of the wiring groove have a curved cross section. As a result, when a plurality of quartz glass plates are fused and integrated, it is possible to prevent the cross-sectional shape of the wiring groove from being thermally deformed and coming into surface contact with the heater member as much as possible. It is possible to prevent the heater member from being deteriorated. Moreover, accumulation of internal strain of the quartz glass support accompanying the thermal deformation can be suppressed, and problems such as cracks can be prevented. Furthermore, unevenness of heat generation as the heater member due to absorption of the amount of heat generated from the heater member due to the surface contact can be prevented.

  22 to 24, a convex portion 13a or 13b having a semicircular or trapezoidal cross section is formed on the heater surface (outer surface). FIG. 22 shows stripes as viewed from above the heater surface, FIG. 23 shows concentric protrusions, and FIG. 24 shows a large number of protrusions in a lattice pattern. The surface of these convex portions 13a and 13b is polished by heating with an oxyhydrogen burner.

  By adopting such a configuration, it is possible to obtain a prism effect in which planar heat generation by the linear heater member such as the heater member is made uniform by scattering of light.

  Usually, in order to obtain the same effect, a method of sandblasting the heater surface is adopted, but in this case, the surface is grainy, heat radiation from this surface is suppressed, and the quartz glass itself Heat accumulates and energy efficiency decreases. In this sense, it is an important matter that the glossing process is performed.

  Furthermore, generation of dust can be prevented by the same configuration.

  As for the radius or bottom part length of the convex part 13a or 13b, 0.5-5 mm is preferable in all. If the thickness is less than 0.5 mm, the manufacturing cost is increased due to fine processing. In addition, sufficient polishing cannot be performed. Furthermore, a sufficient prism effect cannot be obtained. On the other hand, if the thickness exceeds 5 mm, uneven heat generation may occur.

  Moreover, the space | interval of two convex parts can be set to 0.2-1 mm.

  Next, an example of another carbon heater manufacturing method will be described with reference to FIGS.

  First, as shown in FIG. 25A, a first quartz glass plate 32a formed with a wiring groove 14a (groove width: 2 to 4 mm) and polished with a oxyhydrogen burner for a predetermined time, The grooves 14a and 14b face each other (communication) with the second quartz glass plate 32b on which the insertion groove 14b (groove width: 1.5 to 2.5 mm smaller than the width of 14a) is paired with the groove 14a. To join. This bonding may be a fusion that integrates the two quartz glass plates 32a and 32b, or may be a fixing that can withstand the next polishing or grinding process. The insertion groove 14b can also be regarded as a kind of wiring groove.

  Then, as shown in FIG. 25B, the surface layer 32d of the second quartz glass plate 32b is removed by polishing or grinding to expose the insertion groove 14b. Thereby, the insertion groove 14b serves as an insertion window for inserting the heater member 11. The heater member 11 is inserted from the insertion window and pushed into the inner wiring groove 14a.

  Since the cross-sectional shape of the groove is a “convex” character, it is possible to reliably prevent the heater member 11 from rising and jumping out of the groove after the heater member 11 is inserted. This also allows the quartz glass plate to be fused uniformly and reliably over the entire joining surface.

  After wiring, dust on the quartz glass plate surface 33 is removed, and a third quartz glass plate 32c is placed on the polishing surface 33 of the second quartz glass plate 32b as shown in FIG. .

  As a result of the fusing process, the joining surfaces of the three quartz glass plates are welded, and the portions other than the grooves 14 (14a, 14b) are substantially integrated as shown in FIG.

  In this embodiment, the wiring grooves 14a, 14b before fusion are formed in a “convex” shape as a whole. After the fusion, the above-mentioned “convex” shape is deformed to a slightly collapsed shape.

  Thus, by forming the wiring groove before fusion into a “convex” shape, it is possible to alleviate thermal distortion due to deflection due to its own weight around the groove. Since the deflection due to its own weight becomes large especially at the upper side of the groove, the residual thermal strain can be reduced by making the groove into a “convex” shape. Therefore, in this embodiment, the probability of occurrence of cracks and cracks in the upper plate due to the thermal history during use can be greatly reduced.

  As an example of the dimensions of each part in FIG. 25, L is 0.5 to 1.5 mm, M is about 2 mm, and N is about 3 mm.

  As the heater member, one to three wires having a diameter of about 2 mm can be wired in parallel. The total thickness of the carbon heater can be 5 to 10 mm, for example.

  Next, with reference to FIG. 26, the manufacturing method of the carbon heater which has an arc-shaped cross section, or the reflector for carbon heaters is demonstrated.

  This manufacturing method is a method of bending the above-described carbon heater 10 into a predetermined shape.

  The flat carbon heater 10 is inserted between a carbon lower mold 41 having a convex semicircular cross section and a carbon upper mold 42 having a concave semicircular cross section corresponding thereto. The upper mold 42 functions as a carbon load. Of course, a carbon load separate from the upper mold 42 may be used.

  On the sides of the upper and lower molds 41 and 42, a carbon mold 43 for preventing misalignment is disposed. The misalignment prevention mold 43 guides the upper mold 42 so that it moves directly below.

  The flat carbon heater 10 having a thickness of about 5 to 15 mm is deformed into a circular arc cross section by inserting the setting in this manner into a heat treatment furnace and heating at 1500 to 1600 ° C. for 1 to 5 hours. Can do.

  Examples of the arc shape of the cross section include a 1/3 arc and a 1/2 arc, and the carbon heater 40 in FIG. 27 has a semicircular cross section (1/2 arc).

  The carbon heater shown in FIG. 28 is a cylindrical heater in which two carbon heaters 40 shown in FIG. 19 are combined, and forms a substantially cylindrical heater surface. The terminal wire is covered with a quartz glass tube 19.

  On the other hand, the carbon heater reflector can also be deformed into an arc shape in the same manner as the carbon heater if a sheet-like reflector made of carbon as described above is used. In FIG. 26, this is indicated by reference numerals with parentheses.

  Such a carbon reflector deformed in an arc shape can be used integrally with the carbon heater deformed in the same manner as described above.

Example 2-1
The carbon heater of FIG. 7 was manufactured by the following procedure.

  A 100 × 100 × 3 t upper quartz glass plate was prepared, and the fused surface was mirror finished. Further, C0.2 chamfering was performed to prevent pitching.

  Further, a lower quartz glass plate of 100 × 100 × 7 t was prepared, a wiring groove having a depth of 4 mm and a width of 2 mm was processed, and then the groove portion was polished with an oxyhydrogen burner. Further, the fused surface was mirror-finished and C0.2 was chamfered.

  Instead of the above mirror finish, it may be polished with flame.

  In the same manner as in FIG. 4, the heater member made of carbon fiber was placed in the wiring groove of the lower quartz glass plate in the heat treatment furnace, and at this time, the carbon fiber waste adhering to the surface of the lower quartz glass plate was completely removed. Thereafter, an upper quartz glass plate was placed thereon, and these were set on a glassy carbon mirror plate. A 10 kg carbon block weight was placed thereon.

  In addition, all of these carbon members used purified products having impurities of 5 ppm or less. If the carbon material is impure, the quartz glass surface may be devitrified, and there is a possibility that impurities are attached to the quartz glass and diffused in the semiconductor manufacturing apparatus.

  Then, the pressure inside the furnace was reduced to 1 torr or less, and a heat treatment was performed at 1450 ° C. for 3 hours. During cooling, the cooling was gently performed at around 1100 ° C., which is the strain point of quartz glass. That is, the cooling rate at 1450 to 1000 ° C. was set to 100 ° C./hour. The cooling rate in other temperature ranges was not particularly controlled.

  Through the above-described fusing process, the contact portions of the upper and lower quartz glass plates were completely fused, and in appearance, the heater member was wired inside the integrated quartz glass.

  The heater member was somewhat pressed by the load.

  The wiring groove provided on the quartz glass plate was also deformed and pressed during the fusion, and both the groove width and the groove depth were reduced.

  Then, using this carbon heater, a terminal portion carbon wire was passed through a quartz glass pipe and connected to a power source as shown in FIG.

  As a result, the heater temperature could be heated to 1350 ° C. without any problem.

  Moreover, although raising / lowering temperature was repeated 100 times between room temperature and 1200 degreeC, there were no problems, such as a crack generation.

In addition, although the thing which has a 5% unfused part in the total contact area of both quartz glass plates with the same manufacturing method was manufactured, and the said evaluation was performed, it was an equivalent result. (This unfused portion occurs when the carbon fiber scrap attached to the surface of the lower quartz glass plate is not completely removed when the heater member is disposed in the wiring groove.)
Furthermore, using these two carbon heaters, a test was carried out in which a φ200 mm semiconductor wafer, the outer periphery of which was supported by a ring-shaped susceptor, was heated to 1000 ° C. from below about 50 mm in a vacuum furnace. Even in this case, temperature unevenness in the upper surface of the semiconductor wafer could be suppressed within a range of ± 0.5 ° C.

  In addition, a reaction evaluation test between quartz glass and a carbon heater member was performed by setting the temperature of the heater member in the carbon heater to 1300 ° C. in a furnace in the atmosphere and maintaining this temperature for a long time. Even after 2500 hours have passed, it has been confirmed that no problems have occurred in any of the above carbon heaters.

  In the carbon heater of the second group of the invention, since the quartz glass support is integrated by fusion, stress concentration does not occur and a long life can be enjoyed.

  In addition, since the quartz glass support that supports the heater member is integrated outside the periphery of the heater member, the quartz glass support can be made thinner to reduce the heat capacity. Therefore, it can cope with rapid temperature rise and fall.

  Since the reflector for carbon heaters of the second group of the invention is clean and excellent in heat resistance, it is suitable as a heat reflector disposed below or outside the heater. Moreover, since the thickness can be reduced and the heat capacity can be reduced for the above-mentioned reasons, it is particularly suitable for a heater of a semiconductor heat treatment apparatus.

  According to the carbon heater of the second group and the method of manufacturing the reflector for the same, a high-quality carbon heater and reflector having the above-described effects can be efficiently manufactured at low cost.

  The invention of the second group is not limited to the above embodiment. For example, the shape of the carbon heater or the reflecting plate is not limited to a rectangle, and a circle or other various shapes can be adopted. The heater member can also be arranged in two or more stages in the quartz glass support.

Third Group Invention Hereinafter, a preferred embodiment of the third group invention will be described with reference to FIGS.

  FIG. 62 is a schematic view showing a carbon heater particularly effective for a semiconductor manufacturing apparatus according to the invention of the third group.

  The carbon heater 410 is formed in a flat plate shape as a whole.

  The carbon heater 410 has a configuration in which a heater member 411 made of carbon fiber is disposed as a heating element in a setting recess 413 of a setting member 412 made of quartz glass, and a lid member 414 made of quartz glass is covered. Therefore, the heater member 411 is dressed between quartz glass.

  As a specific example of the heater member 411, there is one in which nine carbon fiber bundles obtained by bundling 400 carbon fibers having a diameter of 7 μm are knitted into a wire shape having a diameter of about 2 mm. Further, the span of the weaving is about 3.2 mm, and the fluff caused by the carbon fiber is about 1.0 to 3.0 mm.

  The wiring form of the heater member 411 may be arbitrary. In the illustrated example, the shape is zigzag, but it may be spiral or other shapes. It can also be divided into a plurality of zones. In that case, a plurality of terminals are required.

  As shown also in FIGS. 63 and 64, the setting member 412 is a quartz glass plate that is generally rectangular. The setting member 412 is formed with a meandering groove 413 serving as a setting recess for the heater member 411. Wide terminal setting portions 421 are provided at both ends of the groove 413. A metal electrode through groove 422 extends from the carbon terminal setting portion 421 to the outside.

  The setting member 412 is also formed with a gas introduction groove 423 for introducing a non-oxidizing gas.

  A metal electrode quartz glass tube 428 and a gas introducing quartz glass tube 429 are connected to the metal electrode through groove 422 and the gas introduction groove 423, respectively. The quartz glass tubes 428 and 429 are welded to the setting member 412, and after the welding, an annealing process is performed to prevent the occurrence of cracks.

  These quartz glass tubes 428 and 429 can be reinforced by reinforcing bars 431.

  The groove 413 is formed by, for example, excavating a plate-like setting member 412 by machining using a diamond drill and smoothing the processed surface. There are countless chippings on the machined surface, which causes cracking due to thermal shock, and therefore is smoothed by mirror polishing or polishing. In particular, in order to prevent unevenness of heat generation as described above, it is optimal to perform a polishing process by heating with an oxyhydrogen burner. However, as will be described later, when the alumina powder 415 is filled in the groove, the above smoothing is not necessarily required.

  Here, the mirror surface means a surface having a surface roughness Rmax (based on the maximum height JIS B0601-1982) of 1 μm or less.

When the surface roughness Rmax of the surface of the groove 413 is larger than 1 μm, local contact with the heater member occurs, the reactivity increases in that region, and the life of the heater member is shortened. That is, quartz glass and carbon cause a reaction of SiO ₂ + 3C → SiC + 2CO or SiO ₂ + 2C → SiC + CO ₂ , and the heater member 411 is damaged. For example, a 10% increase in resistance due to silicification was confirmed at 1200 ° C. for 300 hours.

  One or a plurality of heater members 411 can be disposed in the groove 413, but the depth of the groove 413 is preferably deeper than their net thickness. It is also important that the heater member 411 and the lid member 414 do not come into surface contact.

  As shown in FIGS. 68 and 69, the setting member 412 and the lid member 414 are hermetically fixed by welding 427 using an oxyhydrogen burner. The facing surfaces of the setting member 412 and the lid member 414 are opposed to each other with a distance L. The distance L is 0.2-1 mm.

  When the distance L is short (near 0.2 mm), it is preferable to mirror the opposing surfaces of the setting member 412 and the lid member 414. This is because when the surface sag occurs due to the gloss, the opposing surfaces may come into contact with each other, possibly causing damage. If the distance L is less than 0.2 mm, the possibility of breakage increases.

  When the distance L is long (around 1 mm), there is no need for mirror finishing because there is no risk of surface contact. When the distance L exceeds 1 mm, a welding flame enters and the heat generating element 411 is likely to be oxidized.

  A groove is provided around the setting member 412 and the lid member 414. Thereby, the welding strength between the setting member 412 and the lid member 414 can be dramatically improved. If only a right-angled corner is welded without providing a groove, it becomes side welding and sufficient welding strength cannot be obtained.

  For example, when the thickness of the setting member 412 and the lid member 414 is 6 mm, the chamfering of the groove is C5. In general, the width of C: y is preferably selected according to y ≦ t−1 mm (t is the thickness). This is to prevent such chipping by leaving about 1 mm at the upper and lower ends of the setting member 412 and the lid member 414. Further, it is preferable to weld not only the groove portion but also about 1 mm as shown by reference numeral 427. In that case, the strength can be further improved.

  Note that the gap between the setting member 412 and the lid member 414 is useful for preventing damage due to a local temperature difference during welding.

  In order to provide a gap between the setting member 412 and the lid member 414 and weld them, in the case of FIG. 69, a spacer having a thickness of 0.2 to 1 mm is interposed, and the setting member 412 and the lid member 414 are separated. What is necessary is just to carry out the buildup welding of the outer peripheral part whole region, after carrying out 3-4 point buildup welding of an outer peripheral part and removing a spacer. In addition, as shown in FIG. 68, a fire barrier 434 having a height of 0.2 to 1 mm and a width of about 0.1 to 9 mm is formed in advance on the lid member 414 by integral molding or welding over the entire outer peripheral side of the lid member 414. After the setting member 412 and the lid member 414 are overlaid, the flame barrier portion is welded by heating with a oxyhydrogen burner while a predetermined quartz glass rod is applied to the groove portion, and a built-up portion 427 is formed. Can be welded.

In particular, according to the latter method, (1) oxidation of the heater member due to burner heating can be prevented as much as possible, (2) the distance between the setting member and the lid member can be made more uniform, and (3) setting White fogging due to SiO ₂ fine powder can be prevented from occurring on the outer peripheral portions of the member and the lid member, and the heat uniformity of the carbon heater can be improved.

  The fire barrier 434 may be provided on the lid member 414 at a height of 0.2 to 1 mm, and the total height of both the setting member 412 and the lid member 414 is 0.2 to 1 mm. You may provide so that it may become.

  As shown in FIG. 65, it is advantageous to fill the setting portion 413 with alumina powder 415 and support the heater member 411 with the alumina powder 415. The alumina powder 415 is sintered by performing heat treatment at about 1300 ° C. after the alumina powder 415 and the heater member 411 are arranged in the setting portion 413.

  As a result, the maximum operating temperature of the carbon heater can be more reliably raised to about 1350 ° C.

  Alumina powder is arrange | positioned in the following procedure, for example. After the quartz glass tubes 428 and 429 are welded and annealed, a paste obtained by dissolving alumina powder with pure water is poured into the groove 413 of the setting member 412, and after setting the heater member 411, the alumina paste is also applied to the upper portion of the heater member. Pour. Then, moisture is removed with a dryer at 200 ° C. for 3 hours.

  A carbon terminal 416 is disposed in the carbon terminal setting portion 421, and both ends of the heater member 411 are connected thereto.

  As shown in FIGS. 66 and 67, the heater member 411 is inserted into the hole of the carbon terminal 416 and fixed by a screw 425.

  The carbon terminal 416 is also connected with a metal electrode 417 made of Mo. A screw 426 is cut at the tip of the metal electrode 417 and is fixed by screwing into a screw hole of the carbon terminal 416.

  The metal electrode 417 is drawn out through the quartz glass tube 428 and connected to the electrode 432.

  Then, after the setting member 412 and the lid member 414 are welded and fixed in the same manner as described above, the distortion of the quartz glass is eliminated by heat treatment at 1150 ° C. The alumina powder dried by this heat treatment becomes a calcined state, and it can be made into a sintered body by further subjecting it to a heat treatment at 1300 ° C. A gap of 0.2 to 1.0 mm is opened between the setting member 412 and the lid member 414.

  A flexible tube 433 is connected to the gas introduction pipe 429, and a non-oxidizing gas such as nitrogen gas is blown from there (arrow G). The blown gas passes through the gas introduction passage 423 and flows around the carbon terminal. And it discharges through the quartz tube 428 for metal electrodes.

  Further, gas can be supplied also to the heater member 411, but care must be taken in that case because temperature unevenness is likely to occur.

Example 3-1
A carbon heater having the form shown in FIG. 62 was prepared without using alumina powder.

  When a heating test was conducted while introducing nitrogen gas into the carbon heater, the temperature of the carbon wire heater was 850 ° C. and 51 V 10.6 A. Even after 100 hours of use, there was no change in resistance, and stable heating could be performed. Furthermore, even if the temperature of the carbon heater was 1300 ° C., it could be used without problems for 2000 hours or more.

Example 3-2
A carbon heater was prepared in the same manner as in Example 3-1, except that the carbon wire was supported using alumina powder.

  A heating test was conducted while introducing nitrogen gas, and the heater was used continuously at a heater temperature of 1350 ° C. (alumina powder surface temperature) for 200 hours, but there were no problems such as an increase in resistance. Thereafter, when the temperature was further increased, the heater member was disconnected at 1550 ° C. on the surface of the alumina powder.

  The carbon heater particularly effective for the semiconductor manufacturing apparatus of the third group of the invention has a significantly longer service life than conventional heaters and can be rapidly raised and lowered.

  The invention of the third group is not limited to the above embodiment. For example, the overall shape of the heater is not limited to a rectangular flat plate, but may be a circular plate or a cylindrical shape. Further, the groove can be formed not only on the setting member but also on the lid member.

4-1 Group Invention A preferred embodiment of the 4-1 group invention will now be described with reference to FIGS. 87 and 89-92.

  FIG. 89 is a perspective view showing a use state of a carbon heater particularly effective for a semiconductor heat treatment apparatus according to the invention of the 4-1th group. 90 is a top view showing details of the carbon heater, FIG. 91 is a side view with a part omitted, and FIG. 87 is an enlarged view of a part of FIG.

  In the carbon heater 610 of the invention of the 4-1th group, a heater member 612 in which a plurality of carbon fiber bundles obtained by bundling a plurality of carbon fibers are knitted into a wire shape is used.

  As a specific example of the carbon wire used as the heater member 612, for example, there is a carbon wire bundle of 300 carbon fibers having a diameter of 7 μm and knitted into a wire shape having a diameter of about 2 mm using nine carbon fiber bundles. Further, the span of the weaving is about 3 mm, and the surface fluff due to the carbon fiber is about 0.5 to 2.5 mm.

  The heater members 612 are arranged concentrically and zigzag on substantially the center plane of the quartz glass support 12. The wiring form may be spiral or other shapes.

  The terminal wire of the heater member 612 is drawn perpendicularly to the heater surface 13 from a hole 21 having a diameter of 3 mm, for example.

  The wiring groove is formed in a “convex” shape.

  Through the heat treatment, the quartz glass support 602, that is, the entire joining surface of the two quartz glass plates is fused and substantially integrated. That is, this carbon heater is substantially integrated by a plate-like quartz glass support 602 in which two heater members 612 are enclosed, and the heater member 612 in the plate-like quartz glass support 602 is integrated. A hollow space is formed in the peripheral portion of the heater member 612 by fuzz of carbon fibers formed on the surface of the heater member 612.

  A method for manufacturing the terminal portion of this embodiment will be described.

1) A quartz transparent pipe 603 having a large diameter (for example, a diameter of 19 mm) is welded to a flat quartz container while N ₂ is flowing. Annealing treatment (for example, cooling at 1150 ° C. for 1 hour) is appropriately performed to prevent cracking.

  2) A plurality of wire-like carbons are pulled into a quartz pipe 661 having a small diameter (for example, a diameter of 9 mm) using a string. Then, this quartz pipe is inserted into the setting hole of the quartz container. The wire is tightly arranged in the small diameter quartz pipe 661.

  3) The members are arranged as shown in FIG. 87, and the connecting member 640 is assembled. At this time, the cutting of the carbon wire can be prevented by the action of the carbonizing carbon material 662.

4) A transparent pipe is welded to the lower part of the opaque pipe 603a previously joined by welding. At that time, N ₂ gas is introduced from the branch pipe 664 to prevent oxidation of the heater member.

5) A sealing terminal is attached to the lower side of the lower transparent pipe while introducing N ₂ .

  6) A vacuum is drawn from the branch pipe 664 to reduce the pressure inside the heater. Thereafter, the root 664a of the technique tube 664 is rolled and sealed with a flame, and the branch tube 664 is taken out.

  The end of the heater member 612 is drawn from the heater member substantially perpendicular to the heater surface, and is connected to the Mo terminal wire 641 through a carbon terminal. These are arranged in a glass tube. The Mo terminal line 641 is connected to the two Mo outer tangent lines 653 via the Mo foil 655. The Mo foil 655 is pinch-sealed.

  The carbon heater of the 4-1 group invention has the same configuration as the carbon heater of the 2nd group invention except for the terminal portion, and is manufactured by an equivalent manufacturing method.

  The structure of the carbon heater of the invention of the 4-1 group is the same as that of the carbon heater of the invention of the 4-2 group described later, except for the terminal part and the quartz glass support (fusion method). Can do.

  By adopting such a configuration, the temperature unevenness on the surface of the semiconductor wafer disposed approximately 100 mm apart above the carbon heater can be kept at ± 0.5 ° C. or less. Further, it can be made compact, easy to manufacture, and has great merit in terms of cost.

  The opaque quartz glass pipe 603a disposed in the middle of the quartz transparent glass pipe 603 has an effect of blocking the heat radiation inside the quartz transparent glass pipe 603 transmitted from the heater portion and the heat conduction by itself. Thereby, the oxidation of the Mo rods 641 and 653 can be prevented, and further, the breakage of the quartz pinch portion 656 can be effectively prevented.

  In this experimental example, since the carbon material 662 for curling is interposed between the core 635 and the cylindrical core 648, the core rotates when the wire-like carbon is pressed by the core. The problem that the carbon wire is cut can be solved.

4-2 Group Invention Hereinafter, a preferred embodiment of the 4-2 group invention will be described with reference to FIGS.

  FIG. 70 is a perspective view showing a use state of a carbon heater particularly effective for a semiconductor heat treatment apparatus according to the invention of the 4-2 group, and FIG. 71 is a perspective view showing a carbon heater alone. 72 is a top view showing details of the carbon heater of FIG. 71, and FIG. 73 is a side view with a part omitted.

  In the carbon heater 510 of the invention of the 4-2th group, a heater member 515 in which a plurality of carbon fiber bundles obtained by bundling a plurality of carbon fibers are knitted into a wire shape is used. The cross section of the heater member 515 is not limited to a circle but may be a flat shape.

  As a specific example of the heater member 515, for example, there is one in which nine carbon fiber bundles obtained by bundling 300 carbon fibers having a diameter of 7 μm are knitted into a wire shape having a diameter of about 2 mm. Moreover, the span of the braid is about 3 mm, and the surface fluff due to the carbon fiber is about 0.5 to 2.5 mm.

  By using such a heater member 515, the current load density can be improved to about 1.5 times that of a conventional Mo-Si wire, and rapid heating becomes possible.

  The heater member 515 is disposed in the setting recess 516 of the lower container 511 of the quartz glass flat plate container, and the upper container 512 is covered thereon. The heater member 515 is sealed in the container so as to be sandwiched between the lower container 511 and the upper container 512 of the quartz glass flat plate container.

  Although the upper surface of the upper container 512 is the heater surface 512, in this embodiment, the heater surface 512 is a semicircular plane.

  The setting recesses 516 are arranged symmetrically on the plane of FIG. 72, and a gas passage 517 and a gas introduction / exhaust port 518 for guiding gas are formed on the symmetry line.

  The wiring form of the heater member 515, that is, the shape of the setting recess 516 may be arbitrary. In the illustrated example, the shape is zigzag, but it may be spiral or other shapes.

  The quartz glass containers 511 and 512 have a semicircular shape and a split shape having a semicircular cutout at the center. Therefore, as shown in FIG. 70, if two are combined, a donut-shaped heater 520 can be formed.

  A rod-shaped terminal insertion portion 519 is formed at both ends of the setting recess 516, and the rod-shaped terminal 521 is disposed perpendicular to the heater surface 531. The end of the heater member 515 is connected to the rod-shaped terminal 521. Grooves for rod-shaped terminals are also formed at corresponding positions of the upper container 512.

  A quartz glass tube 513 is connected to the rod-shaped terminal insertion portion 519. The quartz glass tube 513 is hermetically fixed to the lower surface of the lower container 511 perpendicular to the heater surface 531.

  Opaque quartz can be used for part of the quartz glass tube 513. In this case, heat transfer and heat conduction by light from the heater side can be suppressed. And the temperature rise of the member arrange | positioned below it can be suppressed, the said member can be protected, and a heat loss can be prevented.

  Inside the quartz glass tube 513, the terminal body 523 and the rod-like terminal 521 are connected by terminal wires 522 made of a plurality of wire-like carbons. An inscribed line 524 made of Mo is led downward from the terminal portion main body 523. Thus, by using the terminal wire 522 made of a plurality of wire-like carbons as the conductive wire, the electrical resistance can be reduced and heat generation can be suppressed.

  A quartz glass cap 526 is connected to the lower end of the quartz glass tube 513. The inscribed line 524 is drawn downward through the cap 526.

  The lower end portion of the drawn inscribed line 524 is connected to the upper portion of the Mo foil body 528. An external tangent 529 made of Mo is connected to the lower part of the foil body 528. The outer tangent line 529 is two poles in FIG. 73, but may be one pole. The foil body 528 made of Mo is sealed with a quartz sealing terminal 527. The quartz sealing terminal 527 is heat-softened and pinched (pinched) and sealed at the tip of a quartz cap 526.

  By the way, when the inscribed line 524 is taken out of the cap as it is and pinched, a crack or the like occurs in the quartz sealing terminal 527 due to the difference in thermal expansion coefficient between Mo and quartz, and the sealing performance is hindered. . In order to eliminate such a problem, the foil body 528 is interposed, and the quartz sealing terminal 527 is pinched and sealed.

  As shown in FIGS. 74 and 75, the opposing surfaces of the upper container 512 and the lower container 511 are opposed to each other with a distance L. The distance L is 0.2-1 mm.

  When the distance L is short (near 0.2 mm), it is preferable to mirror the opposing surfaces of the upper and lower containers 511 and 512. This is because when the surface sag occurs due to the gloss, the opposing surfaces may come into contact with each other, possibly causing damage. If the distance L is less than 0.2 mm, the possibility of breakage increases.

  When the distance L is long (around 1 mm), there is no need for mirror finishing because there is no risk of surface contact. When the distance L exceeds 1 mm, a welding flame enters and the heat generating element 515 is likely to be oxidized.

  A groove is provided around the upper and lower containers 511 and 512. Thereby, the welding strength of the upper and lower containers 511 and 512 can be dramatically improved. If only a right-angled corner is welded without providing a groove, it becomes side welding and sufficient welding strength cannot be obtained.

  For example, when the thickness of the upper and lower containers 511 and 512 is 6 mm, the chamfering of the groove is C5. In general, the width of C: y is preferably selected according to y ≦ t−1 mm (t is the thickness). This is to prevent such chipping by leaving about 1 mm at the upper and lower ends of the upper and lower containers 511 and 512. Further, it is preferable to weld not only the groove portion but also about 1 mm as shown by reference numeral 532, and in that case, the strength can be further improved.

  In addition, opening the space | interval of the upper and lower containers 511 and 512 is useful also for preventing the failure | damage by the local temperature difference at the time of welding.

  In order to weld the upper and lower containers 511 and 512 with a space therebetween, in the case of FIG. 75, a spacer having a thickness of 0.2 to 1 mm is interposed, and the outer peripheral portions of the upper and lower containers 511 and 512 are 3 After the 4-point overlay welding and removing the spacer, the entire outer peripheral portion may be overlay welded. In addition, as shown in FIG. 74, a fire barrier 534 having a height of 0.2 to 1 mm and a width of about 0.1 to 9 mm is previously formed on the upper container 512 by integral molding or welding over the entire outer peripheral side of the upper container 512. Then, after superposing the upper container 512 and the lower container 511, the flame barrier is welded by heating with a oxyhydrogen burner while a predetermined quartz glass rod is applied to the groove portion, and the built-up portion 532 is formed. And can be welded.

In particular, according to the latter method, (1) oxidation of the heater member due to burner heating can be prevented as much as possible, (2) the distance between the upper and lower containers can be made more uniform, and (3) the outer circumference of the upper and lower containers It is possible to prevent the occurrence of white cloudiness due to SiO ₂ fine powder in the portion, and to improve the heat uniformity of the present carbon heater.

  The fire barrier 534 may be provided at a height of 0.2 to 1 mm in the lower container 511. Furthermore, the total height of both the upper container 512 and the lower container 511 is 0.2 to 1 mm. You may provide so that it may become.

  The upper and lower containers 511 and 512 are welded while introducing nitrogen gas from a gas introduction pipe 514 connected to the gas introduction / discharge port 518. Nitrogen gas is introduced to flow out from the surroundings, and the oxyhydrogen flame for welding is pushed back to prevent the heating element 515 disposed in the setting recess 516 from being oxidized. The gas passage 517 needs to be arranged so as to be suitable for the action of such nitrogen gas. Introducing nitrogen gas is also useful for preventing oxidation of wire-like carbon in terminals and terminal wires in quartz glass pipes.

  Even in the annealing process after welding, work is carried out while introducing nitrogen gas.

  Thereafter, while introducing nitrogen, the wire-like carbon 522 is set on the quartz glass tube 513 and the sealing terminal 523 is attached.

  The annealing process after setting the terminal body is also performed while introducing nitrogen gas.

  As the introduced gas, a non-oxidizing gas such as nitrogen, helium, argon, or neon can be used, but nitrogen is appropriate from the viewpoint of economy.

  When the assembly of the quartz glass container is completed, the container is evacuated to set the container at a predetermined pressure. As a result, the above-described quartz glass tube 513 is also in a predetermined reduced pressure state.

  In general, since carbon materials are easily oxidized, it is necessary to fill a container with a non-oxidizing gas such as nitrogen or to evacuate the container. However, since the reaction between the carbon material and quartz glass tends to accelerate in a vacuum state, the present invention employs a method of filling the container with a non-oxidizing gas.

  In the method of heating the heater while introducing nitrogen gas, the structure of the heat treatment apparatus becomes complicated due to the installation of a nitrogen gas line, etc. Therefore, in a preferred embodiment of the present invention, the inside of the container is sealed and a slight amount of nitrogen gas is put inside. Encapsulate. The sealing pressure is determined as follows.

  For example, when it is used at 1000 ° C. and the pressure in the heat treatment furnace is used in both a vacuum and a normal pressure, the pressure inside the heater is set to about 0.5 atm taking a middle of 0 to 1 atm. In order to obtain 0.5 atm at 1000 ° C., 0.5 atm × 293 K / 1273 K × 760 Torr / atm = 87 Torr at room temperature 20 ° C., and the inside of the heater is depressurized and sealed so as to be 87 Torr at room temperature. The inside of the heater is set to about 0.1 atm, for example.

  That is, an assembly operation is performed while introducing nitrogen gas, and after the assembly is completed, nitrogen gas is extracted from the gas introduction pipe 514 and the inside of the container is adjusted to a predetermined pressure.

  Depressurizing the inside of the container is also advantageous in terms of the life of the quartz glass container. As a result of computer simulation, it has been obtained that the quartz glass container for the heater is weaker to damage than the pressure from the outside against the pressure from the inside. When nitrogen gas is sealed at 1 atm at room temperature, the nitrogen inside expands when the heater is heated, and pressure acts from the inside of the quartz glass container.

  Finally, the gas introduction pipe 514 is removed by sealing with a flame at a position close to the lower surface of the lower container 511. For this reason, the gas introduction tube 514 and the quartz glass tube 513 are arranged at an interval that allows a capping operation.

  The carbon heater particularly effective for a semiconductor processing apparatus of the present invention can be applied not only to the heat treatment apparatus as described above but also to a cleaning apparatus for cleaning a semiconductor at a high temperature.

Example 4-2-1
A quartz glass plate having a thickness of 8.0 mm was subjected to grooving and outer diameter processing, and then the processed surface was polished with an oxyhydrogen flame to obtain a semicircular, quartz glass lower container having an outer diameter of 240 mm. Moreover, the upper container corresponding to a lower container was formed using the quartz glass plate of thickness 8.0mm.

  A quartz glass tube for introducing gas and a quartz glass tube for terminals were welded to the lower container. The outer diameter of the former was 6.5 mm, and the outer diameter of the latter was 25.4 mm.

  A heater member and a set of terminals were placed in the groove of the lower container and in the terminal glass tube, and the upper container was covered. The groove was C5 and the weld overlay was 1 mm. The subsequent steps were also performed while introducing nitrogen gas in principle.

  The terminal body of the other end of the heater member was placed at the open end of the quartz glass tube and sealed.

Then, an annealing process was performed.

  Finally, nitrogen gas was exhausted from the quartz glass tube for gas introduction, the pressure in the container was set to 180 Torr, and the gas introduction tube was sealed and removed.

  A heating test was performed using a carbon heater having a T-shaped cross section manufactured by the above procedure.

  When a current was passed through the heating element and the heater temperature reached 1100 ° C. with a radiation thermometer, the pressure inside the heater was measured and found to be about 1 atmosphere. In addition, the temperature of the plurality of carbon wire bundle portions was 105 ° C.

  The time required for the heater temperature to reach 1100 ° C. from room temperature was about 10 seconds.

  Although it was continuously used at a heater temperature of 1100 ° C. for 1000 hours, no abnormality was observed.

  Further, heating at a heater temperature of 1300 ° C. could be performed without any problem.

  Hereinafter, a more preferred embodiment of the invention of the 4-2th group will be described with reference to FIGS.

  FIG. 76 is a perspective view showing a carbon heater to which the terminal device for carbon heater of the present invention is applied. FIG. 77 is a top view thereof.

  The carbon heater 601 has a semi-doughnut-shaped quartz glass container 602, and a quartz glass tube 603 is vertically connected to the lower part thereof.

  The quartz glass container 602 includes a container main body and a lid member, and a groove 604 for arranging the heater member 612 is formed in the container main body. At both ends of the groove 604, terminal recesses 606 for arranging the terminal device are provided. In addition, a gas inlet / outlet 608 and a gas passage 607 for making the inside of the container 602 into a non-oxidizing atmosphere are also formed.

  Two carbon heaters 601 can be combined to form a circular heater surface and used as a semiconductor manufacturing apparatus heater.

  In the terminal recess 606 and the quartz glass tube 603, the terminal device according to the present invention is arranged.

  In the terminal device of the present invention, the first terminal devices 610 and 600 for connecting the heater member 612 and the plurality of wire-like carbon terminal wires 613, and the plurality of wire-like carbon terminal wires 613 and the metal terminal wires 641 are connected. Of the second terminal device 640 for connecting the metal terminal wire (inscribed line) 641 inside the quartz glass tube 603 and the metal terminal wire (outer tangent wire) 653 on the power source side of the third terminal device 650 There are three types.

  First, the first terminal device will be described with reference to FIGS. 78 to 83.

  The terminal device 620 is configured to connect the terminal member 611 and the terminal wire connecting member 616 using an intermediate member 634.

  The external shape of the rod-shaped terminal member 611 is a cylindrical rod shape as a whole. A through hole 614 for inserting the heater member 612 is formed on one end side of the rod-shaped terminal member 611 in parallel with the end surface. A screw hole 623 is provided so as to communicate with the through hole 614. The through hole 614 and the screw hole 623 intersect with each other in a T shape at the center of the through hole 614 as shown in FIG.

  The heater member 612 is inserted into the through hole 614 and the fixing screw 619 is screwed into the screw hole 623 to fix the heating element 612. If it does in this way, it can fix firmly and can supply electric power to the heater member 612 from the rod-shaped terminal member 611, without generating a spark.

  On the other end side of the rod-shaped terminal member 611, a large-diameter blind screw hole 615 for connecting the terminal wire guide member 616 is formed. The blind screw hole is arranged on the axis. The terminal wire guide member 616 is connected to the terminal member 611 via the intermediate member 633.

  The intermediate member 633 is a cylindrical member having a threaded portion 634 on the outer periphery.

  The terminal line connecting member 616 is formed in a cylindrical shape as a whole. The through hole is conically narrow near the lower end. A female thread portion 622 corresponding to the male thread portion 634 of the intermediate member 633 is formed on the inner periphery of the opposite connection end side.

  A core member 635 is inserted into the through hole of the terminal line connecting member 616. The core member 635 has a plain cylindrical shape, and an end portion on the terminal wire side projects in a conical shape.

  Only a part of the core member 635 may be inserted into the through hole of the terminal wire connecting member 616. For this purpose, for example, a recess may be formed in the intermediate member 633.

  The terminal wire 613 made of wire-like carbon is pressed and fixed in a state of being sandwiched and distributed between the terminal wire connecting member 616 and the core member 635. A plurality of shallow grooves may be provided outside the core member 635 to guide the divided wires.

  When assembling, as shown in FIG. 78, the plurality of wire-like carbon terminal wires 613 are appropriately distributed to the plurality of wires 613a and lightly pressed by the core member 635, and the intermediate member 635 is screwed so as not to be displaced. Do.

  The set of the connecting member 618 and the core member 631 in which the plurality of wire-like carbon terminal wires 613 are arranged in this way is screwed into the terminal member 611 via the intermediate member 633, and is arranged in the groove-like region. The terminal wire 613a can be strongly connected to the terminal member 611. Therefore, good conduction is guaranteed.

  Moreover, it becomes possible to connect the heater member having shape flexibility without causing abnormal stress in the carbon heater against thermal expansion and thermal deformation.

  The wire-like carbon terminal wire 613 is preferably made of the same material as the heater member 612. When the materials are different, the resistance value per unit length of the plurality of wire-like carbon terminal wires 613 is made to be correspondingly smaller than that of the heater member 612 so as to sufficiently suppress the heat generation of the terminal wires. To.

  The temperature of the wire-like carbon terminal wire 613 and the heater member 612 was approximately the electrical resistance value ratio. For example, when the resistance value of the heater member 612 is 10 Ω / m and the terminal wire 613 is 1 Ω / m · wire, the terminal wire is about 100 ° C. when the temperature of the heater member 612 is 1000 ° C.

  When the wire-like carbon terminal wire 613 and the heater member 612 are made of the same material, it is preferable that the number of wires of the terminal wire is five times or more the number of heaters. Assuming that the number of terminal wires is four for one heater, the terminal wire temperature was about 275 ° C. when the heater temperature reached 1100 ° C. as in a normal semiconductor processing process. 275 ° C. is a temperature at which a vacuum sealing material such as Viton deteriorates. On the other hand, by setting the number of wires to five, the terminal wire temperature was about 220 ° C., and the heat resistant temperature was 230 ° C. or lower.

  In this way, by reducing the temperature of the wire-like carbon terminal wire 613 that transmits electric power, it is possible to prevent deterioration of the vacuum sealing material such as Viton. Moreover, since wire-like carbon itself is comprised from the carbon fiber, the heat conduction from a heater can be suppressed. For example, the thermal conductivity of a normal special carbon material is 100 W / mK, while that of wire-like carbon is 1 W / mK or less.

  Next, the second terminal device will be described with reference to FIGS.

  This terminal device 640 is configured to connect a terminal wire 613 made of wire-like carbon and a metal terminal wire 641 using the wire-like carbon connecting member 643, the terminal portion main body 642, and the metal wire connecting member 645. It has become.

  The wire-like carbon connecting member 643 has substantially the same shape as the terminal wire connecting member 616 in the first terminal device described above, and the operation thereof is also the same.

  The terminal portion main body 642 is a cylindrical member as a whole, and a connection portion 644 for connecting the wire bundle guide means 643 is provided on one end side thereof. A connecting portion 646 for connecting a metal wire connecting member 645 is provided on the other end side.

  The connection portion 644 is a large-diameter screw hole having a female screw portion.

  The connecting portion 646 is formed with a tapered portion (hole) 642 b for accommodating the core member 647. The tapered hole and the large diameter screw hole penetrate. A male thread portion is formed on the outer periphery of the connection portion 646.

  The metal wire connecting member 645 is configured as a cup-shaped member, and is screwed over the connecting portion 46 of the terminal portion main body 642.

  As shown in FIG. 85, the core member 647 has two split shapes, and when combined, it has a truncated cone shape. The outer tapered surface corresponds to the tapered portion 642 b of the terminal body 642. A groove-shaped holding portion 647a for holding a metal wire is provided on the opposing surface of each split mold.

  The connection part 644 of the terminal part main body 642 and the bottom part (the opposite side of the wire bundle 613) of the plurality of wire-like carbon connection members 643 are connected via a cylindrical core 648 having a screw part on the outer periphery.

  As shown in FIG. 84, the metal wire 641 can be reliably connected to the terminal portion main body 642 by screwing the metal wire connecting member 645 into the connection portion 646 of the terminal portion main body 642 in a state where the metal wire 641 is held. Can prevent the occurrence of sparks. This is due to the taper engagement action between the split core 647 and the tapered hole of the terminal body 642.

  As the metal terminal wire 641, it is preferable to use a metal rod 641 made of Mo (molybdenum), but tungsten can also be used.

  Since Mo has a thermal expansion coefficient very close to that of the carbon material, cracks such as cracks can be prevented by the thermal history of the carbon terminal body.

  Moreover, since Mo has a high melting point of about 2100 ° C., generation of metal impurities can be suppressed. Therefore, the Mo metal rod is suitable as an inscribed line (heater side terminal wire) of the sealing terminal made of quartz.

The terminal body 642 and the core member 647 are preferably formed of a carbon material. Carbon materials are convenient because they are easy to purify and can withstand high temperatures of 3000 ° C. Further, since the core member 647 supports the molybdenum rod, a carbon material having a thermal expansion coefficient close to that of molybdenum is suitable for preventing cracks. Note that the thermal expansion coefficients of Mo and the carbon material are both 4.2 to 4.8 × 10 ⁻⁶ / ° C.

  Finally, an example of the third terminal device will be described with reference to FIG. FIG. 86 schematically shows a part of the carbon heater and the first to third terminal devices.

  The first terminal device and the second terminal device are connected by a plurality of wire-like carbon terminal wires 613 within the glass tube 603. As described above, by using the plurality of wire-like carbon terminal wires 613 as the conductive wires, the electrical resistance can be reduced and heat generation can be suppressed. Further, wire-like carbon has an advantage that heat conduction is extremely small.

  The glass tube 603 is preferably charged with nitrogen or argon gas. Thereby, the oxidation resistance at the time of high temperature of the terminal device arrange | positioned in a pipe | tube can be improved.

  The third terminal device 650 is for connecting the internal tangent line 641 disposed inside the quartz glass tube 603 and the external tangent line 653 on the power source side.

  In this embodiment, the inscribed line 641 is a molybdenum rod 641. One end of the molybdenum rod 641 is connected to the second terminal device 640, and the other end is connected to the molybdenum foil 655. The molybdenum rod 641 is indirectly connected to the heater member 612.

  A quartz glass cap is connected to the lower end of the quartz glass tube 603, and the molybdenum rod 641 is drawn through the cap.

  Two external tangent lines 653 are drawn out from the bottom side of the molybdenum foil 655. The outer tangent line 653 may be a single pole.

  A pinch seal portion 656 is formed so that the entire molybdenum foil 655 is wrapped. The pinch seal portion 656 blocks the molybdenum foil 655 from the inside of the glass tube 3 and the atmosphere. The pinch seal portion 656 is made of quartz glass.

  The pinch seal portion 656 can be formed, for example, by heat softening and pinching (pinching) the tip portion of a quartz cap.

  As described above, the heater member 612 in which the carbon fiber bundle is knitted is not directly connected to the inscribed line 641 but is indirectly connected. That is, it is important to arrange the heater member away from the heat.

  As the outer tangent line 653, two molybdenum rods having a diameter of 1.4 mm to 2.0 mm can be used.

  As the inscribed line 641, a molybdenum rod having a diameter of 1.4 mm to 2.0 mm can be used.

  As the quartz pipe 603, a pipe having an outer diameter of 15 mm or more can be used.

  As the molybdenum foil 655, one having a width of 8 mm or more and a thickness of 0.2 mm to 0.5 mm can be used.

Example 4-2-2
Example 4-2-2 relates to the first terminal device.

  Two terminal members purified in a nitrogen atmosphere were arranged, and two purified heater members were fixed between them at an interval of 1 m. The electrical resistance value at this time was 5Ω. Next, 18 heater members were fixed to the terminal member using the core member and the terminal wire connecting member, and the terminal device of FIG. 78 was manufactured. And electric power was supplied to the heater from this heater member.

  After 10 minutes, the temperature of the heater reached 1100 ° C. and the electrical resistance value became 2.5Ω. The temperature of the 18 carbon wires at this time was measured and found to be 105 ° C.

  Although it was used for 1000 hours in this state, no change in electrical resistance was confirmed.

  The used carbon wire, terminal member, and other carbon member are purified with ash to 5 ppm or less.

  On the other hand, when an unpurified product was used, it was disconnected in 16 hours. When the carbon wire heater portion after the disconnection was observed with EPMA, deterioration due to iron was observed.

  Thus, the heater member and other carbon members are preferably 5 ppm or less in distribution. The iron concentration of the purified carbon material is preferably 0.1 ppm or less.

Example 4-2-3
Example 4-2-3 relates to the second terminal device.

  A terminal device shown in FIG. 84 was manufactured using a Mo metal rod having a diameter of 2 mm. A carbon wire heater was placed in a quartz glass container to keep the inside of the container in a nitrogen atmosphere, and the terminal device of Example 4-2-2 and the terminal device of Example 4-2-3 were connected.

  The length of the heater member was 1 m, and two wires were used. The resistance value of the heater was 5Ω at room temperature and 2.5Ω when heated at 1100 ° C. When the heater was 1100 ° C., the temperature of the wire-like carbon terminal wires (18 wires) was 105 ° C. Moreover, Mo metal terminal parts were 55 degreeC.

  As a result of using this carbon heater for 1000 hours, no damage such as cracks occurred in the terminal body, and other problems did not occur.

  In addition, the carbon member of the terminal device in Example 4-2-3 was also used after purification as in Example 4-2-2.

Example 4-2-4
Example 4-2-4 relates to a third terminal device.

  A third terminal device shown in FIG. 86 was manufactured using two outer tangent lines with a diameter of 1.4 mm, a quartz pipe with an outer diameter of 15 mm, and a Mo foil with a width of 8 mm. When a current of 30 A was passed through the terminal device, it was confirmed that no damage such as cracks occurred in the sealing portion.

  According to the first carbon heater terminal device of the invention of the 4-2th group, the heater member and the terminal wire made of a plurality of wire-like carbon can be reliably and easily connected. Further, this terminal device has a simple structure and has a sufficiently long life.

  According to the second carbon heater terminal device of the invention of the 4-2 group, a plurality of wire-like carbon terminal wires and metal terminal wires can be reliably and easily connected. Further, this terminal device has a simple structure and has a sufficiently long life.

  According to the third carbon heater terminal device of the invention of the 4th-2 group, a long life can be enjoyed even when used with a large current of about 30A.

  The invention of the 4-2th group is not limited to the above-described embodiments. For example, it is possible to freely reverse the relationship between the female screw and the male screw of each member and the relationship between the irregularities. Such design changes can be easily made by those skilled in the art based on the description of the present specification, and thus will not be described in detail here.

Fifth Group Invention A preferred embodiment of the fifth group invention will now be described with reference to FIGS.

  FIGS. 41A and 41B are schematic views showing a first embodiment and a second embodiment in which the invention of the fifth group is used in a semiconductor manufacturing apparatus.

  The heater unit 210 includes a cylindrical furnace core tube 211, and a heater member 212 is wound around the outer side thereof. In the first embodiment shown in FIG. 41A, the heater member 212 is wound so as to reciprocate in the vertical direction. However, in the second embodiment shown in FIG. It is wound into a shape.

  Further, if the heater members 212 of the first and second embodiments are divided into a plurality of zones and controlled separately, the temperature distribution in the upper and lower sides of the furnace can be easily controlled uniformly.

  As the heater member 212, a high purity carbon wire having an ash content of 10 ppm or less is suitable. By using such a high-purity carbon wire, impurity contamination can be prevented, and since the heat conduction is small and the heat capacity is small, rapid temperature rise and fall is possible.

Inside the lower portion of the furnace core tube pipe 211, flat container-like carbon heater 220 to the heater member 222 woven into a wire-like long narrow shape using a plurality of the a plurality of carbon fiber bundles proof carbon fiber bundle Has been placed. As the heater member 222, a tape-like member can be used as long as it has an elongated shape. Further, as a specific example of the heater member, nine carbon fiber bundles obtained by bundling 330 carbon fibers having a diameter of 3 μm are used and knitted into a wire shape having a diameter of about 2 mm.

  42 and 43 are a top view and a cross-sectional view showing the carbon heater 220. FIG.

  The carbon heater 220 is configured such that the heater member 222 is supported in a quartz glass container 221 by a wire support jig 224 made of a high-purity carbon rod-shaped terminal member 223 and a translucent alumina alone.

  The quartz glass container 221 can be made of transparent quartz and includes a container body 247 and a base 248. The container body 247 and the base 248 are joined by frosted glass.

  The outer surface exposed portion of the container body 247, particularly the upper surface serving as a heat generating surface, is formed with a semicircular or trapezoidal cross section as a whole in the form of stripes, concentric circles, or in the form of a lattice. The surface is preferably polished. As a result, a prism effect can be obtained in which the heat generated above the heater surface by the linear heater member such as the heater member of the present invention is made uniform by scattering of light.

  Usually, in order to obtain the same effect, a method of sand plasting the heater surface is adopted. In this case, the surface is grainy, and heat radiation from this surface is suppressed, and quartz glass is used. It accumulates heat in itself and reduces energy efficiency. In this sense, it is an important matter that the glossing process is performed.

  The quartz glass container can also be made of opaque quartz having a large number of minute closed pores.

  A branch pipe 233 made of quartz glass is connected to the base 248. An inert gas, nitrogen gas, or the like can be introduced from the branch pipe 233 in order to prevent oxidation of carbon as a heater member. Further, the branch pipe 233 can be used also when the inside of the container is evacuated to make a vacuum of, for example, 10 torr or less.

  The upper surface of the base 248 is provided with a number of insertion holes for setting a wire support member 224 to be described later and two through holes for allowing the rod-shaped terminal member 223 to pass therethrough.

  The base 248 is made of opaque quartz glass in order to prevent heat from escaping below the carbon heater 220. A carbon reflector 225 made of glassy carbon is disposed on or above the base. Thus, by placing the reflector 225 below the heater member 222, downward heat radiation can be reduced. The surface of the reflecting plate 225 is mirror-finished with a center line average roughness Ra of 0.1 μm or less.

  As described above, in the fifth group of the invention, the heater member 222 knitted into a wire-like long shape using a plurality of carbon fiber bundles obtained by bundling carbon fibers is used as a heater, and this is used as a plurality of wire support jigs. It is bent by 224 to heat a substantially disk-like body such as a semiconductor wafer so that its in-plane temperature distribution is uniform.

  For that purpose, an important point is how to make the heater member 222 in a uniform tension state.

  In the invention of the fifth group, as shown in FIG. 42, first, the heater member 222 is passed through the through holes of all the wire support jigs 224, and both ends are respectively inserted into the horizontal holes 237 of the rod-shaped terminal members 223. The heater member 222 is pressed and held on one rod-shaped terminal member 223 by a bolt-shaped pressing member 228, and the other one-side heater member 222 is similarly pulled by a bolt-shaped pressing member 228 while being pulled with an appropriate force. The pressure is maintained.

  As the heater member 222, one having an ash content of 10 ppm or less is preferably used. In this case, impurity contamination can be prevented, and since the heat conduction is small and the heat capacity is small, rapid temperature rise / fall is possible.

  The heater member 222 is guided by the wire support jig 224 and has a plurality of bent portions on a surface parallel to the surface of the container 221 and is arranged in a zigzag manner. At both ends of the heater member 222, rod-shaped terminal members 223 are arranged, and electric power is supplied through these.

  FIG. 44 is an assembly diagram of the terminal member 223. The terminal member 223 includes a terminal body 223a, a pressing member 228, and a cap 229. The terminal member 223 is coated with SiC at least a part of the exposed portion, preferably the entire exposed portion. If SiC coating is performed in this way, it can be used even in the atmosphere.

  The terminal body 223a is made of carbon and is formed in a bolt shape as a whole. A penetrating horizontal hole 237 perpendicular to the axis is provided in the vicinity of the middle of the terminal body 223a in the axial direction. An axial hole 236 for accommodating the pressing member is formed from the hexagonal head of the terminal body 223a to the horizontal hole 237 penetrating therethrough. The inner wall of the axial hole 236 is threaded. Screws are also cut in the legs of the terminal body 223a. In FIG. 44, the head of the terminal main body 223 is hexagonal, but other shapes may be used as long as the shape can be rotated by a tool such as a spanner.

  The holding member 228 is formed in a screw shape corresponding to the axial hole 236 of the terminal body 223. A groove 235 for a flathead screwdriver is provided on the head. The holding member 228 is screwed into the axial hole 236 of the terminal body 223 and holds the heater member 222 inserted into the through hole 203. As described above, the heater member 222 is firmly attached to the terminal main body 223a using the pressing member 228, so that the heater member 222 can be prevented from falling off and sparking.

  The cap 229 is formed in a nut shape corresponding to the screw of the leg portion of the terminal body 223a.

  By sandwiching an expanded graphite sheet (not shown) in the contact portion between the terminal body 223a and cap 229 and the quartz glass surface, air leakage and dust generation into the heater can be prevented.

  45A is a perspective view showing the wire support jig 224 of FIGS. 42 to 43, and FIG. 45B is a cross-sectional view showing a modification of the wire support jig.

  The wire support jig 224 has a thin cylindrical shape, and has a hole 224a through which the heater member 222 passes. The root portion of the wire support jig 224 is embedded in the setting hole of the quartz glass container 221.

  By supporting the heater member 222 with the wire support jig 224, the heater member 222 is kept from touching the quartz glass container. If it does in this way, silicidation of a wire can be prevented and a change of electrical resistance can be prevented.

  If the wire support jig 224 is formed into a thin cylindrical shape, that is, a pipe shape, the heat radiation upward can be increased and the heat capacity can be decreased. If the heat capacity is small, the thermal response is quick and it is strong against thermal shock.

  The wire support jig 224 can be formed of translucent transparent alumina. In this case, since heat radiation from the transparent portion is increased, the temperature uniformity of the workpiece can be improved.

  The characteristic required for the wire support jig 224 is, for example, non-reactivity with the heater member 222 at a high temperature of about 1300 ° C. and non-conductivity. Translucent alumina satisfies both of these conditions and can be formed as a single substance. However, even in the case of translucent alumina, if an attempt is made to increase the degree of rapid temperature rise, there is a possibility that the wire support jig may be cracked or broken due to thermal shock. As a structure to solve this, it is composed of an assembly member of high-purity carbon and translucent alumina. In particular, a configuration in which a portion of the assembly member that contacts the heater member is made of a high-purity carbon material, and a portion of the assembly member that is arranged and connected to the flat container 221 is made of a translucent alumina material is optimal. .

  The wire support jig 241 in FIG. 45B has a configuration in which a carbon member 242 and an alumina pipe member 243 are connected. The carbon member 242 is formed with a lateral hole 244 for allowing the heater member 222 to pass therethrough.

  46-60 has shown the Example which added the change to the Example of FIGS. 42-44.

  FIG. 46 is a cross-sectional view showing the main part of the heater member 220. The connection structure between the rod-shaped terminal member and the heater member is substantially the same in the embodiments of FIGS. 42 to 44 and the embodiments of FIGS. Below, the characteristic structure will be described.

  The heater member 222 is formed by weaving a plurality of carbon fiber bundles obtained by bundling a plurality of carbon fibers into a wire shape. As the heater member 222, a tape-like member can be used as long as it has an elongated shape. The heater member 222 is preferably a braided type having a certain thickness (about 2 mm). Twisted (twisted) wires are easy to loosen, have temperature variations, and tend to be inferior in heat uniformity. As a result, the electrical resistance varies, and the thermal uniformity with respect to the wafer decreases.

  As the heater member 222, it is preferable to use a carbon wire having an ash content of 3 ppm or less. In this case, impurity contamination can be prevented, and since the heat conduction is small and the heat capacity is small, rapid temperature rise / fall is possible.

  Carbon terminal members 223 are disposed at both ends of the heater member 222, and power is supplied through the terminal members 223.

  As shown in FIGS. 46 to 48, the terminal member 223 has a flange 223a at the intermediate portion. A male screw 223b is formed on one side of the flange 223a, and an axial hole 223c and a horizontal hole 223d are formed on the other side. After the wire heater member 222 is inserted into the lateral hole 223d of the terminal member 223, the carbon bolt-like holding member 228 is screwed into the axial hole 223c of the terminal member 223, and the wire 223 is attached to the terminal member 223. Fix it.

  An alumina insulator ring 263 is spaced downward from the wire heater member 222 and is in contact with the flange 223 a of the terminal member 223. Thus, electrical insulation between the carbon reflector 225 made of glassy carbon and the carbon terminal member 223 is achieved.

  The flange 223a of the terminal member 223 described above is set on the upper side of the base 248, and a spring washer 265 made of a composite material of carbon and carbon fiber (C / C) is set on the lower side of the base 248. The terminal member 223 is fixed to the base 248 by screwing the nut 266 into the male screw 223 b of the terminal body 223.

  The additional terminal 267 is fixed by screwing a female screw formed in an axial hole 267 b to a male screw 223 b of the terminal member 223.

  A bolt-shaped pressing member 268 is screwed into the carbon additional terminal 267. The additional terminal 267 is coated with SiC at least a part of the exposed portion, preferably the entire exposed portion. If SiC coating is performed in this way, it can be used even in the atmosphere.

  Near the middle of the additional terminal 267 in the axial direction, a penetrating horizontal hole 267a perpendicular to the axis is provided. An axial hole 267b for accommodating the holding member 268 is formed from one end of the additional terminal 267 to the hole 267a. The inner wall of the axial hole 267b is threaded. The other end of the additional terminal 267 is also threaded.

  The holding member 268 is formed in a screw shape corresponding to the axial hole 267 b of the additional terminal 267. The holding member 268 is screwed into the axial hole 267b of the additional terminal 267 and holds the terminal wire 270 made of wire-like carbon inserted into the lateral hole 267a. As described above, the terminal wire 270 made of wire-like carbon is firmly attached to the additional terminal 267 using the pressing member 268, so that the terminal wire 270 made of wire-like carbon can be prevented from falling off and sparking.

  The terminal wire 270 made of wire-like carbon is obtained by weaving a plurality (for example, 20) of carbon fiber bundles obtained by bundling a plurality of carbon fibers.

  The other end of the terminal wire 270 made of wire-like carbon is fixed to another additional terminal 272. An axial hole 272a is formed at the upper end of the additional terminal 272, and a female screw is cut there. A lateral hole 272b is formed in the additional terminal 272 so as to penetrate the bottom of the hole 272a. After inserting the end portion of the terminal wire 270 made of wire-like carbon into the lateral hole 272b, the set screw 273 is screwed into the hole 272a in the axial direction of the additional terminal 272, and the terminal wire 270 made of wire-like carbon is attached. Fix to the additional terminal 272.

  A male screw portion 272 c is formed at the lower end of the additional terminal 272. A nut 274 is screwed there, and one end of the metal wiring 275 is fixed to the additional terminal 272. The other end of the metal wiring 275 is connected to a power source (not shown).

  Normally, the metal wiring 275 is connected to the above-described nut 266. In this case, the metal wiring is oxidized and deteriorated as the carbon terminal body 223 generates heat. Such a problem is solved by the provided structure.

  48 to 49 show specific examples of the terminal member 23 of FIG.

  50 to 51 show specific examples of the additional terminal 67 of FIG.

  52 to 53 show specific examples of the pressing member 28 of FIG.

  54 to 55 show specific examples of the pressing member 68 of FIG.

  56 to 57 show specific examples of the additional terminal 72 of FIG.

  58 to 59 show specific examples of the nut 74 shown in FIG.

  The wire support jig 224 has a thin cylindrical shape and is provided with a hole for allowing the heater member 222 to pass therethrough. The root portion of the wire support jig 224 is embedded in the setting hole of the quartz glass container 221.

  By supporting the heater member with the wire support jig 224, the heater member 222 is kept from touching the quartz glass container. If it does in this way, silicidation of the heater member made of carbon can be prevented more certainly, and change of electric resistance can be prevented.

  By making the wire support jig 224 into a thin cylindrical shape, that is, a pipe shape, the heat radiation upward can be increased and the heat capacity can be decreased. If the heat capacity is small, the thermal response is quick and it is strong against thermal shock.

  The wire support jig 224 can be formed of translucent transparent alumina. In this case, since heat radiation from the transparent portion is increased, the temperature uniformity of the workpiece can be improved.

  In the fifth group of the invention, a substantially cylindrical hole 223c for inserting the bolt-shaped pressing member 228 is formed in the length direction of the rod-shaped terminal member 223, and at least a substantially circular shape penetrating through the hole 223c. A horizontal hole 223d is formed, and a heater member is inserted into the horizontal hole 223d, and a bolt-shaped pressing member 228 having a length reaching at least the lower portion of the horizontal hole 223d is rotationally inserted into the hole. As shown in FIG. 60A, the diameter of the substantially cylindrical hole 223c for inserting the bolt-shaped pressing member 228 is made larger than the diameter of the substantially cylindrical side hole 223d, and inserted into the horizontal hole 223d as shown in FIG. It is preferable that the heater member thus pressed is pressed by the bolt-shaped pressing member 228 and is flattened so as to reach the bottom of the hole 223d.

  As shown in FIG. 60, if the heater member 222 is held flat by being directly deformed by the bolt-shaped pressing member 228, the carbon fiber constituting the heater member 222 is not a little when the bolt-shaped pressing member 228 is rotationally inserted. As a result, the holding strength may decrease, but by adopting a configuration in which an expanded graphite sheet (not shown) is interposed between the bolt-shaped pressing member 228 and the heater member 222, Such a problem can be avoided.

  The carbon heater of the fifth group of the invention can be applied not only to the above-described embodiment, but also to a semiconductor manufacturing apparatus that performs heat treatment by placing it under a semiconductor wafer as shown in FIG.

  The invention of the fifth group is not limited to the above-described embodiments. For example, the carbon heater is not limited to a cylindrical shape, and may be a hexagonal shape or a rectangular shape. In addition, the arrangement of the heater members in the carbon heater may be spiral or other shapes.

  In the invention of the fifth group, a heater member knitted into a wire-like long shape using a plurality of carbon fiber bundles obtained by bundling a plurality of carbon fibers with a carbon heater particularly effective for a semiconductor manufacturing apparatus is formed into a plurality of rod shapes. By adopting a structure in which the terminal member and the wire support jig are supported in a flat container in a non-contact manner and sealed, heat generation unevenness of the heating element can be reduced, and soaking performance is improved. In addition, rapid temperature increase / decrease can be achieved.

  In addition, the carbon heater can have a simple structure, and the cost can be reduced. Furthermore, by selecting the detailed structure and material, various problems unique to the carbon heater can be solved. The service life can be improved.

The top view which shows one Example of the carbon heater of invention of 2nd group. XX sectional drawing of the carbon heater of FIG. Sectional drawing which shows the assembly state before carrying out the melt | fusion process of the carbon heater of FIG. FIG. 2 is a cross-sectional view showing a method for fusing the carbon heater of FIG. 1. The side view which shows the use condition of the carbon heater of FIG. Sectional drawing which shows the assembly state before carrying out the melt | fusion process of the carbon heater of FIG. Sectional drawing which shows the other Example of the carbon heater of this invention of a 2nd group. Sectional drawing which shows the assembly state before carrying out the melt | fusion process of the carbon heater of FIG. Sectional drawing which shows the further another Example of the carbon heater of this invention of a 2nd group. Sectional drawing which shows the further another Example of the carbon heater of invention of 2nd group. The assembly figure of the carbon heater of FIG. Sectional drawing which shows the further another Example of the carbon heater of invention of 2nd group. The top view of the carbon heater of FIG. FIG. 16 is an assembly diagram of the carbon heater reflector of FIG. 15. Sectional drawing which shows one Example of the reflecting plate for carbon heaters of invention of 2nd group. Sectional drawing which shows the other Example of the reflecting plate for carbon heaters of invention of 2nd group. Sectional drawing which shows the Example of the carbon heater by which the reflector for carbon heaters of 2nd group invention was arrange | positioned adjacently. Sectional drawing which shows the state before the fusion process in the further another Example of the carbon heater of invention of 2nd group. FIG. 19 is a cross-sectional view showing a state after the fusion treatment of the carbon heater of FIG. 18. Sectional drawing which shows the state before the fusion process in the further another Example of the carbon heater of invention of 2nd group. Sectional drawing which shows the state before the fusion process in the further another Example of the carbon heater of invention of 2nd group. It is a figure which shows the further another Example of the carbon heater of invention of 2nd group, (A) is a top view, (B) is XX sectional drawing in the case of having a cross-sectional semicircle convex part, (C) is XX sectional drawing in case it has a cross-sectional trapezoidal convex part. It is a figure which shows further another Example of the carbon heater of invention of 2nd group, (A) is a top view, (B) is YY sectional drawing in case a cross-sectional semicircular convex part is provided, (C) is YY sectional drawing in case it has a cross-sectional trapezoidal convex part. It is a figure which shows the further another Example of the carbon heater of invention of 2nd group, (A) is a top view, (B) is ZZ sectional drawing in the case of having a cross-sectional semicircular convex part, (C) is ZZ sectional drawing in the case of having a cross-section trapezoidal convex portion. Process drawing which shows an example of the manufacturing method of the carbon heater of invention of 2nd group. Process drawing which shows the other example of the manufacturing method of the carbon heater (or reflector for carbon heaters) of invention of 2nd group. The perspective view which shows an example of the carbon heater (or reflector for carbon heaters) manufactured with the manufacturing method of FIG. The perspective view which shows the use condition of the carbon heater (or reflector for carbon heaters) of FIG. The perspective view which shows 1st Example of the carbon heater of invention of 1st group. The perspective view which shows 2nd Example of the carbon heater of invention of 1st group. Sectional drawing which shows the carbon electrode vicinity of FIG. The perspective view which shows 3rd Example of the carbon heater of invention of 1st group. The perspective view which shows the 4th Example of the carbon heater of invention of 1st group. The top view which shows a part of carbon heater of FIG. The top view which shows the modification of the carbon heater of FIG. The top view which shows another modification of the carbon heater of FIG. The perspective view which shows 5th Example of the carbon heater of invention of 1st group. (A), (B) is a perspective view which shows a part of carbon heater of FIG. 37, (C), (D) is the side view. The perspective view which shows the modification of the carbon heater of FIG. The other Example of invention of the 1st group is shown, (A) is a cross-sectional view, (B) is a longitudinal cross-sectional view. (A) And (B) is the schematic which shows 1st Example and 2nd Example which respectively used invention of the 5th group for the semiconductor heat processing apparatus. The top view which shows the carbon heater of FIG. FIG. 42 is a cross-sectional view of the carbon heater of FIG. 41. FIG. 42 is an assembly diagram of the carbon rod-shaped terminal member of FIG. 41. (A) is a perspective view which shows the wire support jig | tool of FIG. 41, (B) is sectional drawing which shows the modification. Sectional drawing which shows the outline of the principal part in another Example of the carbon heater of invention of 5th group. The perspective view which shows an example of the terminal member of FIG. The front view which shows an example of the terminal member of FIG. The top view which shows an example of the terminal member of FIG. The front view which shows the specific example of the additional terminal of FIG. The top view which shows the specific example of the additional terminal of FIG. The front view which shows the specific example of the pressing member of FIG. The top view which shows the specific example of the pressing member of FIG. The top view which shows the specific example of the pressing member of FIG. The top view which shows the specific example of the pressing member of FIG. The front view which shows the specific example of the additional terminal of FIG. The top view which shows the specific example of the additional terminal of FIG. The front view which shows the specific example of the nut of FIG. The top view which shows the specific example of the nut of FIG. (A) shows the state which puts the heat generating body of the wire in the horizontal hole of the terminal member in the embodiment of the invention of the 5th group, and does not contain the holding member in the axial hole, (B) After that, the presser member is fully screwed into the axial hole of the terminal member, Explanatory drawing which shows one example of arrangement | positioning of the carbon heater of invention of 5th group. Schematic which shows the carbon heater of invention of 3rd group. The top view which shows the setting member of the carbon heater of invention of 3rd group. FIG. 64 is an end view of the setting member of FIG. 63. Sectional drawing which shows the method of the setting of the heater member in the Example of invention of a 3rd group. The top view which shows the carbon terminal in the Example of invention of a 3rd group. Sectional drawing which shows the carbon terminal in the Example of invention of a 3rd group. Sectional drawing which shows the outer peripheral part vicinity in the Example of the carbon heater of the invention of 3rd group. Sectional drawing which shows another aspect of the outer peripheral part vicinity in the Example of the carbon heater of the invention of 3rd group. The perspective view which shows the use condition of the carbon heater by invention of 4th group. The perspective view which shows the carbon heater single-piece | unit of invention of 4th group. The top view which shows the detail of the carbon heater of invention of the 4th-2 group. The side view which abbreviate | omitted a part of carbon heater of invention of the 4th-2 group. The fragmentary sectional view which shows the outer peripheral part of the carbon heater of invention of the 4th-2 group. The fragmentary sectional view which shows the outer peripheral part of the carbon heater of invention of the 4th-2 group. The perspective view which shows the carbon heater to which the terminal device of invention of the 4th-2 group is applied. FIG. 77 is a top view of the carbon heater of FIG. 76. The fragmentary sectional view which shows the Example of the 1st terminal device by invention of 4th-2 group. FIG. 79 is a side view showing a terminal member of the terminal device of FIG. 78. FIG. 80 is a cross-sectional view of the terminal member A-A in FIG. 79. FIG. 79 is a side view showing a screw used in the terminal device of FIG. 78. The top view which shows the screw of FIG. FIG. 79 is an assembly diagram of the terminal device of FIG. 78. Sectional drawing which shows the 2nd terminal device by invention of 4th-2 group. FIG. 85 is a perspective view showing a split core member of the terminal device of FIG. 84. Schematic which shows a 1st-3rd terminal device by invention of 4th-2 group, and a part of carbon heater which applied it. Sectional drawing which shows another Example of invention of the 4th-1 group. An example of the heater member in the invention of the first group is shown, showing a state in which three carbon fiber bundles are knitted in three, The perspective view which shows the use condition of the carbon heater for semiconductor heat processing apparatuses by invention of the 4th-1 group. FIG. 90 is a top view showing details of the carbon heater of FIG. 89. FIG. 90 is a side view schematically showing the carbon heater of FIG. The expanded sectional view of the part of the code | symbol 100 of FIG.

Claims (3)

A heater member made only by weaving a long and narrow shape using a plurality of carbon fiber bundles obtained by bundling a plurality of carbon fibers is a heater member having an ash content of 10 ppm or less,
A carbon heater in which a heater member is supported and enclosed in a sealed member made of a quartz glass support. A carbon heater composed of a heater member made by simply knitting a plurality of carbon fiber bundles into a long and narrow shape using a plurality of carbon fiber bundles, and the heater member has an ash content of 10 ppm or less. A heater member, a quartz glass plate different from the quartz glass plate and an opaque quartz glass plate are arranged above and below the quartz glass plate on which the heater member is wired, and an opaque quartz glass layer is formed by a fusing process. A carbon heater which is substantially integrated by a plate-shaped quartz glass support enclosing one member, and in which a hollow space is formed around the heater member in the quartz glass support. A carbon heater composed of a heater member made by simply knitting a plurality of carbon fiber bundles into a long and narrow shape using a plurality of carbon fiber bundles, and the heater member has an ash content of 10 ppm or less. A heater member comprising a carbon fiber heater member and at least a carbon reflector having a mirror surface on one side facing the heater member enclosed in a plate-like quartz glass support. The body is a carbon heater in which a hollow space is formed in the peripheral portion of the heater member, and the other portions are substantially integrated.

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