JP4840125B2 - X-ray inspection equipment - Google Patents

Description

  The present invention relates to an X-ray inspection apparatus that performs fluoroscopic inspection, CT inspection, and the like of industrial products, and more particularly to an X-ray inspection apparatus that includes a vertical drive mechanism of an X-ray measurement optical system.

  X-ray inspection equipment can be used for non-destructive inspection of industrial products and the like because it can observe internal defects and internal defects that cannot be determined from visual appearance inspection by means of X-ray images displayed on a display device. Yes.

Such an X-ray inspection apparatus includes an X-ray source and an X-ray detector that combines an image intensifier (hereinafter abbreviated as II) and a CCD camera so as to face the X-ray source. A line measuring optical system is provided. Recently, a flat panel X-ray detector is used instead of an X-ray detector combining II and a CCD camera.
Further, some X-ray inspection apparatuses include a drive mechanism that moves the X-ray measurement optical system based on a drive signal, and the object to be measured is moved by moving the X-ray measurement optical system vertically or horizontally. A fluoroscopic X-ray image is taken while adjusting the measurement position (see, for example, Patent Document 1).

When the X-ray measurement optical system is moved in the vertical direction, the counterweight is connected to the X-ray measurement optical system with a wire or the like via a pulley in order to reduce energy consumed by the vertical movement. . The counterweight has a weight that balances with the weight of the X-ray measurement optical system. By moving the counterweight up and down in the direction opposite to the movement direction of the X-ray measurement optical system, the change in potential energy accompanying the vertical movement is achieved. Is offset to reduce the load on the drive mechanism. If the wire connecting the counter weight is cut, the counter weight will drop. For the purpose of improving safety, the counter weight will not be dropped with two wires instead of one wire. I try to connect them.
JP-A-6-277205

In the conventional X-ray inspection apparatus as described above, since there is another wire when one wire is cut, it is possible to prevent an accident in which the counterweight is immediately dropped.
However, even when one wire is cut, no significant change has occurred in the apparatus itself, so that it is not noticed that one wire has been cut and will be used as it is, and then the second wire. When the was cut, the counterweight sometimes dropped.

  Therefore, an object of the present invention is to provide an X-ray inspection apparatus that can immediately detect an abnormality when a wire that is connected to a counterweight is cut.

An X-ray inspection apparatus according to the present invention, which has been made to solve the above-described problems, is an X-ray detector that captures a fluoroscopic X-ray image of an object to be measured, and an X-ray that irradiates fluoroscopic X-rays toward the X-ray detector. An X-ray measurement optical system having a radiation source, a drive mechanism for moving the X-ray measurement optical system in the vertical direction based on a drive signal, a drive signal generator for outputting a drive signal to the drive mechanism, a counter weight, A wire that connects the X-ray measurement optical system and the counterweight, and supports the wire in a state in which tension is applied to the both sides by the weight of the X-ray measurement optical system and the weight of the counterweight, and the X-ray measurement optical system An X-ray inspection apparatus comprising a pulley that rotates in proportion to the amount of movement of the wire when the wire moves up and down, and a marker that is integrally attached to the pulley and moves in conjunction with the rotation of the pulley Setting And a marker attaching portions, when the drive signal generating unit outputs a drive signal, so that and a detector for detecting a movement of the marker.

According to the X-ray inspection apparatus of the present invention, in a normal state, the X-ray measurement optical system and the counterweight are connected by a wire. When the drive signal generation unit outputs the drive signal, the detection unit detects the movement of the marker. Under normal conditions, the pulley supports the wire in a state where tension is applied, and thus the pulley rotates in proportion to the amount of movement of the wire connecting the X-ray measurement optical system and the counterweight. Since the marker moves in conjunction with the rotation of the pulley at this time, the detection unit detects that the marker is moving. On the other hand, if the wire is cut for some reason, no tension is applied to the pulley, and the pulley does not rotate. Therefore, the detection unit detects that the marker is not moving.
Therefore, the detection unit can detect the difference between the normal time and the abnormal time by the movement of the marker.

  According to the present invention, when the wire connecting the X-ray measurement optical system and the counterweight is cut, the marker moves in conjunction with the rotation of the pulley even if some safety mechanism is activated and no significant change appears. The occurrence of an abnormality can be reliably detected by a change in the movement of the wire, and when a wire break occurs, the user can immediately know that the abnormality is detected by a signal from the detection unit and take necessary measures. it can.

(Means and effects for solving other problems)
In the above invention, a plurality of markers are attached to the marker attachment portion so as to rotate and move on the same circle in conjunction with the rotation of the pulley, and the detection unit detects a detection signal of one marker, An abnormal signal may be output when a detection signal of another marker different from is not detected.
By using a plurality of markers to be attached, it is possible to accurately determine whether the marker is in a normal state or a wire cut state even when the vertical movement by the drive signal is small.

In the above invention, the marker is an opening, and the detection unit is an optical sensor in which the light irradiation unit and the light receiving unit are arranged to face each other with the opening interposed therebetween, and detects a change in light amount due to movement of the opening. You may do it.
According to the present invention, the detection unit can optically detect the movement of the marker.

In the above invention, the X-ray measurement optical system and the counterweight may be connected by at least two wires, and the pulley, the marker, and the detection unit may be provided for each wire.
According to the present invention, it is possible to reliably grasp the occurrence of wire cutting regardless of which wire is cut.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings. In addition, this invention is not limited to the following embodiment, It cannot be overemphasized that various aspects are included in the range which does not deviate from the meaning of this invention.

FIG. 1 is a block diagram showing a configuration of an X-ray inspection apparatus according to an embodiment of the present invention. FIG. 2 is a side view showing the configuration of the pulley and the optical sensor (detecting unit) according to the present invention, and FIG. 3 is a cross-sectional view taken along the line AA shown in FIG.
The X-ray inspection apparatus 1 includes an X-ray measurement optical system 13 having an X-ray source 11 and an X-ray detector 12, a stage (not shown) on which an object to be measured is placed, and an X-ray measurement optical system 13. A drive mechanism 16 to be moved, a counter weight 14, a wire 17 connecting the X-ray measurement optical system 13 and the counter weight 14, and a wire 17 are supported, and a plurality of openings (markers) 15a and 15b are formed on the side surfaces. The pulleys 18 and 58, the optical sensors (detectors) 19 and 59 for detecting the movement of the openings 15a and 15b, the support 10, the alarm (not shown), and the entire X-ray inspection apparatus 1 are controlled. And a control system (computer) 20.

The X-ray measurement optical system 13 includes an X-ray detector 12 and an X-ray source 11. The X-ray detector 12 is composed of II and a CCD camera attached integrally to the rear surface of the II. On the other hand, the X-ray source 11 is configured by an X-ray tube that irradiates fluoroscopic X-rays toward the surface of II.
A device under test is arranged between the X-ray detector 12 and the X-ray source 11. When II detects the fluoroscopic X-ray, a fluoroscopic image of the object to be measured is formed. Further, the fluoroscopic X-ray video signal (analog signal) is output to the computer 20 by photographing the fluoroscopic image with a CCD camera.
The X-ray measurement optical system 13 is provided so as to move or rotate in the vertical direction by the drive mechanism 16. Therefore, the measurement position of the object to be measured is moved by moving the X-ray measurement optical system 13.

The drive mechanism 16 includes, for example, a vertical drive motor and a rotational drive motor. Note that the control of the drive mechanism 16 is executed by receiving a drive signal output from the drive signal generator 36 of the computer 20.
The wire 17 has a counterweight 14 suspended from one end thereof by a fastener or the like, and an X-ray measurement optical system 13 coupled to the other end by a fastener or the like. And the wire is supported by the pulleys 18 and 58 fixed to the upper part of the support body 10 so that a movement is possible. The wire 17 is composed of two wires 17a and 17b.
The alarm is, for example, a voice alarm device, and can notify an abnormality that the wire 17 has been cut off by a sound such as a buzzer or a bell. Note that the alarm control is executed when an abnormal signal output from the wire state calculation unit 32 of the computer 20 is given.

Next, the configuration of the pulley and the optical sensor (detection unit) according to the present invention will be described with reference to FIGS.
A first support shaft 18a is fixed horizontally on the left side of the support shaft mounting plate 10a fixed to the upper surface of the support 10, and the first roller 18b rotates on the first support shaft 18a via a bearing or the like. It is supported freely. Accordingly, when the first wire 17a supported by the first roller 18b moves in the vertical direction, the first roller 18b rotates, and the rotation amount is proportional to the movement amount of the first wire 17a. .
An index plate 18c that rotates in conjunction with the first support shaft 18a as an axis is attached to the first roller 18b. The first index plate 18c is provided with a plurality of openings (markers) 15a at equal angular intervals along the circumference.
The pulley 18 includes a first support shaft 18a, a first roller 18b, and a first index plate 18c (marker mounting portion). Further, the shape of the opening is only required to allow light to pass, and may be round, square, or other shapes.

  The optical sensor (detection unit) 19 is fixed to the support shaft mounting plate 10a and is provided so as to sandwich the circumference of the first index plate 18c between the light emitting element 19a and the light receiving element 19b. As a result, the light receiving element 19b receives the light from the light emitting element 15A that has passed through the opening 15a when the first index plate 18c rotates and the opening 15a arrives, and sends an electric signal to the wire state calculation unit 32 of the computer 20. Is output. On the other hand, when a portion that is not the opening 15a comes, it is blocked and therefore cannot receive light and does not output an electrical signal to the wire state calculation unit 32 of the computer 20. As the optical sensor (detecting unit), for example, an IC output type photomicrosensor (trade name: “EE-SX4009-P1”, manufactured by OMRON Corporation) is used.

Similarly, a second support shaft 58a is fixed in the horizontal direction on the right side of the support shaft mounting plate 10a fixed to the upper surface of the support 10, and a second roller 58b is provided with a bearing or the like on the second support shaft 58a. It is pivotally supported via the shaft. A second index plate 58c that rotates in conjunction with the second support shaft 58a as an axis is attached to the second roller 58b. The second index plate 58c is provided with a plurality of openings (markers) 15b at equal angular intervals along the circumference. The pulley 58 includes a second support shaft 58a, a second roller 58b, and a second index plate 58c.
The optical sensor (detection unit) 59 is fixed to the support shaft mounting plate 10a, and is provided so as to sandwich the circumference of the second index plate 58c between the light emitting element 59a and the light receiving element 59b.

The computer 20 includes a CPU 21, and further includes a memory 25 that stores data, a display device 23 having a monitor screen 23 a and the like, and a keyboard 22 a and a mouse 22 b that are input devices.
Further, the functions processed by the CPU 21 will be described as a block. The CPU 21 has an X-ray image creation unit 31, a drive signal generation unit 36, and a wire state calculation unit 32.
The memory 25 is set such that when the drive signal generator 36 outputs a drive signal, the optical sensors 19 and 59 must detect the other openings 15a and 15b different from the one openings 15a and 15b in the normal state. It stores time or driving distance.

  The drive signal generator 36 outputs a drive signal for moving the X-ray measurement optical system 13 to the drive mechanism 16 and outputs a drive signal for moving the X-ray measurement optical system 13 in the vertical direction. Control to output a driving signal to the calculation unit 32 is performed. The drive signal generator 36 moves the X-ray measurement optical system 13 by various operations of the keyboard 22a and the mouse 22b.

  The X-ray image creation unit 31 performs control to display an image of the X-ray image 24a on the monitor screen 23a based on a digital signal converted from the video signal (analog signal) output from the X-ray detector 12. It is.

  When the wire state calculation unit 32 receives a driving signal from the drive signal generation unit 36 for a set time, one of the optical sensors 19 and 59 detects another opening 15a and 15b different from the one opening 15a and 15b. If not, control is performed to output an abnormal signal to the alarm. Specifically, after receiving the electric signal from the light receiving element 19b during the set time, the electric signal from the light receiving element 19b is not received, and further, the electric signal from the light receiving element 19b is received again, In addition, after receiving the electric signal from the light receiving element 59b, the electric signal from the light receiving element 59b is not received, and when the electric signal from the light receiving element 59b is received again, no abnormal signal is output to the alarm. On the other hand, during the set time, the electric signal from the light receiving element 19b is continuously received, the electric signal from the light receiving element 19b is not received at all, the electric signal from the light receiving element 59b is continuously received, or When no electrical signal is received from the light receiving element 59b, an abnormal signal is output as an alarm.

Next, an abnormality detection method for notifying that one wire has been cut by the X-ray inspection apparatus 1 will be described. FIG. 4 is a flowchart for explaining an example of the abnormality detection method by the X-ray inspection apparatus 1.
First, in the process of step S <b> 101, the wire state calculation unit 32 determines whether or not a driving signal is received from the driving signal generation unit 36. If it is determined that the driving signal has not been received, the process returns to step S101 again. That is, the process of step S101 is repeatedly executed until the driving signal is received.

On the other hand, if it is determined that the driving signal has been received, in step S102, the wire state calculation unit 32 starts control to receive the electrical signals from the light receiving elements 19b and 59b.
Next, in the process of step S103, the wire state calculation unit 32 determines whether or not the driving signal is no longer received from the driving signal generation unit 36 after a set time from the determination that the driving signal has been received. . If it is determined that the driving signal is not received, the process returns to step S101. That is, it is determined whether the driving signal is continuously received for the set time.

  On the other hand, when it is determined that the driving signal is continuously received, in step S104, the wire state calculation unit 32 starts the control of receiving the electrical signals from the light receiving elements 19b and 59b, It is determined whether one of the sensors 19 and 59 has detected other openings 15a and 15b different from the one opening 15a and 15b. If both the optical sensors 19 and 59 detect other openings 15a and 15b different from the one opening 15a and 15b, the process returns to the process of step S101.

  On the other hand, when it is determined that one of the optical sensors 19 and 59 is not detecting other openings 15a and 15b different from the one opening 15a and 15b, the wire state calculation unit 32 in the process of step S105, An abnormal signal is output to the alarm. When the process of step S105 is completed, this flowchart is ended.

(Other embodiments)
(1) In the X-ray inspection apparatus 1 described above, the optical sensor is used as the detection unit and the marker is an opening. However, the magnetic sensor is used as the detection unit and the marker unit is a magnetic mark. It is good.

  INDUSTRIAL APPLICABILITY The present invention can be used in an X-ray inspection apparatus that can move an X-ray measurement optical system in order to perform a fluoroscopic inspection, a CT inspection, and the like of industrial products.

It is a block diagram which shows the structure of the X-ray inspection apparatus which is one Embodiment of this invention. It is a side view which shows the structure of the pulley which concerns on this invention, and an optical sensor (detection part). It is sectional drawing of the AA line shown in FIG. 3 is a flowchart for explaining an example of an abnormality detection method by the X-ray inspection apparatus 1;

Explanation of symbols

1: X-ray inspection apparatus 11: X-ray source 12: X-ray detector 13: X-ray measurement optical system 14: Counterweight 15: Aperture (marker part)
16: Drive mechanism 17: Wire 18, 58: Pulley 19, 59: Optical sensor (detection unit)
20: Control system (computer)
21: CPU
22: Input device 23: Display device 25: Memory 31: X-ray image creation unit 36: Drive signal generation unit

Claims (4)

An X-ray measurement optical system having an X-ray detector that captures a fluoroscopic X-ray image of the object to be measured and an X-ray source that irradiates fluoroscopic X-rays toward the X-ray detector;
A drive mechanism for moving the X-ray measurement optical system in the vertical direction based on the drive signal;
A drive signal generator for outputting a drive signal to the drive mechanism;
Counter weight,
A wire connecting the X-ray measurement optical system and the counterweight;
The wire is supported in a state in which tension is applied to the both sides by the weight of the X-ray measurement optical system and the weight of the counterweight, and the wire rotates in proportion to the amount of movement of the wire when the X-ray measurement optical system moves vertically. An X-ray inspection apparatus comprising a pulley to perform,
A marker mounting portion provided integrally with the pulley and provided with a marker that moves in conjunction with the rotation of the pulley;
An X-ray inspection apparatus comprising: a detection unit that detects a movement of a marker when the drive signal generation unit outputs a drive signal. A plurality of markers are attached to the marker attachment part so as to rotate on the same circle in conjunction with the rotation of the pulley.
The X-ray examination apparatus according to claim 1, wherein the detection unit outputs an abnormal signal when a detection signal of one marker is detected and a detection signal of another marker different from the marker is not detected. . The marker is an opening, and
3. The X-ray according to claim 1, wherein the detection unit is an optical sensor in which the light irradiation unit and the light receiving unit are arranged to face each other with the opening interposed therebetween, and detects a change in light amount due to movement of the opening. Inspection device. While connecting the X-ray measurement optical system and the counterweight with at least two wires,
The X-ray inspection apparatus according to claim 1, further comprising the pulley, the marker, and the detection unit for each wire.

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