JP4836772B2 - Evaluation data creation method - Google Patents

Description

  The present invention relates to an evaluation data creation method, and more particularly to an evaluation data creation method capable of creating highly reliable evaluation data for evaluating the lubrication state of a lubrication target portion in a large facility or the like.

  As a conventional method for evaluating the lubrication state, the particle size distribution is calculated by detecting the number of suit (carbon particles) contained in the engine oil of an automobile, and the deterioration state of the engine oil and the engine wear are calculated based on the particle size distribution. What evaluates a state is known (for example, refer to patent documents 1).

  By the way, in large facilities such as generators, there are a large number of lubrication target parts (for example, bearing parts, gear parts, etc.) to which lubricating oil is supplied, and the particle size considered to be in a good lubrication state for each lubrication target part. Each distribution is different. Therefore, even if the conventional lubrication state evaluation method is applied to this large facility, the contamination degree of the lubricating oil can be managed, but the wear state of each lubrication target part can be accurately evaluated only from the particle size distribution. It was difficult.

Japanese Patent Laid-Open No. 10-19788

  As described above, the present invention has been made in view of the above-described present situation, and provides an evaluation data creation method capable of creating highly reliable evaluation data for evaluating the lubrication state of a lubrication target portion in a large facility or the like. Objective.

The inventors of the present invention have determined that the number of wear particles generated by the friction phenomenon is a "specific wear amount" that is a typical parameter indicating the degree of wear and a "friction coefficient" that is a typical parameter indicating a friction state. Based on this, a lubrication state evaluation parameter Lp indicating the rate of change over time in the number of wear particles in the lubricating oil and the above-mentioned “specific wear amount” and / or “friction coefficient” A certain correlation was observed between the two, and it was found that if this correlation was used, the lubrication state could be accurately evaluated, and the present invention was completed.
The present invention is as follows.
1. A method of creating evaluation data for evaluating the lubrication state of a lubrication target part,
In the sliding friction test, the number of particles in the lubricating oil is measured with a particle number measuring device, and the first evaluation parameter (Lp) indicating the time change rate of the number of particles in the lubricating oil is calculated from the measured value. And / or measuring a second evaluation parameter indicative of the state of friction;
Obtaining evaluation data based on a correlation between the first evaluation parameter (Lp) and the second evaluation parameter ,
“Pc” is the number of particles measured by the particle number measuring device, “k” is a correction coefficient determined according to the sliding area of the lubrication target portion, and “L” is the sliding area of the lubrication target portion and An evaluation data creation method , wherein the first evaluation parameter (Lp) is calculated by the following mathematical formula when the sliding distance is obtained from the sliding time .
Lp = Pc / (k · L)
2. The first evaluation parameter (Lp) is a value indicating the number of particles per unit sliding distance of the lubrication target portion. The evaluation data creation method described.
3. The second evaluation parameter is a friction coefficient and / or a specific wear amount. Or 2. The evaluation data creation method described in 1.
4). The particle number measuring device includes a light emitter that irradiates light to the lubricating oil flowing in the cell, a blocking light receiver that receives blocking light from the light emitter, and a scattered light receiver that receives scattered light from the light emitter. And a particle size calculating means for calculating a particle size of bubbles or fine particles contained in the lubricating oil by receiving the blocking light receiver, and a bubble and fine particles contained in the lubricating oil by receiving the scattered light receiver. 1. An identification means for identifying, and a counting means for counting fine particles for each predetermined particle diameter based on the calculation result of the particle diameter calculation means and the identification result of the identification means. To 3. The evaluation data creation method according to any one of the above.

According to the evaluation data creating method of the present invention, the number of particles in the lubricating oil is measured by the particle number measuring device by the sliding friction test, and the first evaluation indicating the time change rate of the number of particles in the lubricating oil from the measured value. The parameter is calculated, and a second evaluation parameter indicating the state of wear and / or friction is measured, and then evaluation data is obtained based on the correlation between the first evaluation parameter and the second evaluation parameter. And if this evaluation data is used, a 2nd evaluation parameter can be acquired from the 1st evaluation parameter calculated | required from the number of particles measured in an actual lubrication object part. As a result, it is possible to accurately evaluate the lubrication state of the lubrication target portion in a large facility or the like using the second evaluation parameter. In particular, if the lubricating oil sampling period is set to a short period (for example, on the order of several minutes), the lubrication state of the lubrication target portion can be evaluated in a shorter time.
Further, when the first evaluation parameter is a value indicating the number of particles per unit sliding distance of the lubrication target portion, more reliable evaluation data can be created.
In addition, when the second evaluation parameter is a friction coefficient and / or a specific wear amount, more reliable evaluation data can be created using a more general second evaluation parameter.
Further, when the particle number measuring device includes a light emitter, a blocking light receiver, a scattered light receiver, a particle size calculation means, an identification means, and a counting means, Bubbles and fine particles can be identified with high accuracy, and fine particles can be measured, and more reliable evaluation data can be created.

1. Evaluation Data Creation Method Embodiment 1 The evaluation data creation method according to the method includes a measurement process and an evaluation data acquisition process described below.

The above “measurement step” measures the number of particles in the lubricating oil by a sliding friction test with a particle number measuring device, calculates the first evaluation parameter from the measured value, and indicates the state of wear and / or friction. As long as it is a step of measuring the second evaluation parameter, its measurement form, timing, etc. are not particularly limited.
The sliding friction test can be, for example, a test in which a pair of test pieces are brought into contact with each other with a predetermined load and relatively sliding at a predetermined sliding speed in a state where lubricating oil is supplied at a predetermined supply amount. . In addition, the sliding friction test is usually performed many times by changing the type of lubricating oil (for example, viscosity). In the sliding friction test, the number of particles in the lubricating oil and the sliding distance (sliding time) are measured, and second evaluation parameters (for example, friction coefficient, specific wear amount, etc.) are measured.

The “first evaluation parameter Lp” is not particularly limited as long as it is a value indicating the time change rate of the number of particles in the lubricating oil.
The first evaluation parameter Lp can be a value indicating the number of particles per unit sliding distance of the lubrication target portion, for example. Specifically, it can be obtained by the following equation.
Lp = Pc / (k · L)
Here, Pc is the number of particles (pieces / 100 ml) measured by the particle number measuring device. Further, k is a correction coefficient (for example, 0.1) determined according to the sliding area of the lubrication target portion. L is a sliding distance (m) obtained from the sliding area and sliding time of the lubrication target part.

As long as the “second evaluation parameter” is a value indicating the state of wear and / or friction, its type, number, etc. are not particularly limited.
Examples of the second evaluation parameter include a specific wear amount Ws, a friction coefficient μ, and the like.

  As long as the “particle number measuring device” measures the number of particles in the lubricating oil, its measurement form, timing, etc. are not particularly limited. Examples of the measurement form of the particle number measuring device include one type or a combination of two or more types among a light scattering type, a light blocking type, an electric resistance type, and the like.

  The particle number measuring device includes, for example, a light emitting body (for example, a laser light emitting body) that irradiates the lubricating oil flowing in the cell, and a blocking light receiving body (for example, a photodiode) that receives blocking light from the light emitting body. Etc.), a scattered light receiver (for example, a photodiode) that receives scattered light from the light emitter, and a particle diameter for calculating the particle diameter of bubbles or fine particles contained in the lubricating oil by receiving the blocking light receiver Calculation means, identification means for identifying bubbles and fine particles contained in the lubricating oil by light reception of the scattered light receiver, and for each predetermined particle size based on the calculation result of the particle diameter calculation means and the identification result of the identification means And counting means for counting the fine particles. By using this particle number measuring device, it is possible to optically distinguish between a relatively large diameter and a wide range of fine particles and bubbles contained in the lubricating oil and to count fine particles for each predetermined particle size with high accuracy. .

As a more preferable form of the said particle number measuring device, the following (1)-(3) form can be mentioned, for example.
(1) The blocking light receiver is disposed on the opposite side of the light emitter through the cell on the optical axis of the light from the light emitter, and receives the blocking light from the lubricating oil and converts it into a blocking light pulse signal. The scattered light receiver is disposed on the outer peripheral side of the optical axis of the light from the light emitter and receives scattered light from the lubricating oil and converts it into a scattered light pulse signal. The particle diameter calculating means is means for calculating the particle diameter of bubbles or fine particles contained in the lubricating oil based on the pulse height of the blocking light pulse signal from the blocking light receiver, and the identifying means is the scattering means. A form that is a means for discriminating bubbles and fine particles contained in the lubricating oil based on the pulse height of the scattered light pulse signal by the light receiver.
(2) A pattern in which a plurality of the scattered light receivers are arranged in the optical axis direction of the light from the light emitter, and a scattering pattern is calculated from each pulse height of each scattered light pulse signal by the plurality of scattered light receivers. A mode that further comprises a calculation means, and wherein the identification means can identify bubbles and fine particles contained in the lubricating oil based on the scattering pattern calculated by the pattern calculation means.
(3) The scattered light receiver comprises at least a first scattered light receiver and a second scattered light receiver disposed at rotationally symmetric positions around the optical axis of the light from the light emitter, and the identification means The mode which can distinguish the bubble and fine particle which are contained in lubricating oil based on the comparison of each pulse height of each scattered light pulse signal of a 1st scattered light photoreceptor and a 2nd scattered light photoreceptor.

As long as the “evaluation data acquisition step” is a step of obtaining evaluation data based on the correlation between the first evaluation parameter and the second evaluation parameter, the acquisition form, timing, and the like are not particularly limited.
The evaluation data acquisition step may be, for example, a step of obtaining the evaluation data (calibration curve) by taking the first evaluation parameter on one of the vertical and horizontal axes and taking the second evaluation parameter on the other axis. it can.

  Examples of the lubrication target part include a sliding bearing part, a rolling bearing part, a gear part, and a sliding part. The sliding part can be, for example, a sliding part of a contact switching mechanism in a transformer. In addition, examples of the equipment provided with the lubrication target portion include fixed equipment such as various generators, transformers, and machine tools, and moving equipment such as vehicles, airplanes, and ships. Examples of the lubricating oil include spindle oil, machine oil, dynamo oil, turbine oil, and the like, which are petroleum-based lubricating oils. Furthermore, examples of the particles include wear particles generated in the lubrication target portion, particles entering from the outside of the lubrication target portion, and the like.

  Hereinafter, the present invention will be specifically described with reference to the drawings.

(1) Method of creating evaluation data The first evaluation data Q1 (see FIG. 4) and the second evaluation data Q2 (see FIG. 5) according to the present embodiment are obtained by a sliding friction test. In this sliding friction test, a block test piece having a predetermined surface roughness (for example, Ra: 0.2 μm) and a disk test piece having a predetermined surface roughness (for example, Ra: 0.5 ± 0.2 μm), Sliding relatively at a predetermined sliding speed (for example, 2.2 m / s) while making contact with a predetermined load (for example, 400 N). At that time, the average friction coefficient μ (see FIG. 1), the specific wear amount Ws, and the like are measured. Further, the number of particles in a plurality of particle size ranges (for example, 5 to 15 μm, 15 to 25 μm, 25 to 50 μm, etc.) in the lubricating oil is measured with a particle number measuring device described later (see FIG. 2).

  When the above sliding friction test is repeated with lubricating oils having different viscosities (that is, oil film thickness) (for example, oil supply amount 4.2 L), as shown in FIG. The specific wear amount Ws (mm3 / Nm), the sliding distance L (m), and the number of generated particles Pc (pieces / 100 ml) are measured. From these measurement results, a lubrication state evaluation parameter Lp (Lp = Pc / (k · L), exemplified as “first evaluation parameter” according to the present invention) is obtained. As shown in FIG. 4, when the friction coefficient μ (illustrated as “second evaluation parameter” according to the present invention) is taken on the vertical axis and the lubrication state evaluation parameter Lp is taken on the horizontal axis, the first evaluation data Q1. (Calibration curve) is created. In addition, as shown in FIG. 5, the specific wear amount Ws (illustrated as “second evaluation parameter” according to the present invention) is taken on the vertical axis, and the lubrication state evaluation parameter Lp is taken on the horizontal axis. Q2 (calibration curve) is created. A plurality of the first and second evaluation data Q1, Q2 are created according to a plurality of particle size ranges of the number of generated particles.

  The k is a correction coefficient (for example, 0.1) determined according to the sliding area of the lubrication target portion. The sliding friction tests 1 to 4 are in an initial state of mixed lubrication, the sliding friction test 5 is in an intermediate state of mixed lubrication, and the sliding friction test 6 is in an latter stage of mixed lubrication, and the sliding friction test is performed. 7 is a boundary lubrication state.

(2) Configuration of Particle Number Measuring Device Next, the configuration of the particle number measuring device 2 used in the sliding friction test will be described.
As shown in FIG. 6, the particle number measuring device 2 includes a cell 5, one semiconductor laser 6 (exemplified as a “light emitter” according to the present invention), and one blocking light photodiode 7 (according to the present invention). This is exemplified as a “blocking light receiver”), a number of first and second scattered light photodiodes 8 and 9 (illustrated as “scattered light receiver” according to the present invention), and a computer (not shown). ).

  The cell 5 is made of a colorless and transparent plastic, and is formed in a rectangular tube having a vertical dimension of 0.5 mm and a horizontal dimension of 1 mm. Lubricating oil used in the sliding friction test is passed through the cell 5 at a predetermined flow rate.

  The semiconductor laser 6 irradiates the lubricating oil flowing in the cell 5 with laser light having a predetermined wavelength (for example, 650 nm).

  The cutoff light photodiode 7 is disposed on the opposite side of the semiconductor laser 6 via the cell 5 on the optical axis of the laser light from the semiconductor laser 6. The photodiode 7 receives the blocking light blocked by bubbles or fine particles in the lubricating oil and converts it into a predetermined blocking light pulse signal. The pulse height of the blocking light pulse signal indicates a value proportional to the particle size of the bubbles or fine particles.

  Each of a large number (seven in the figure) of the first and second scattered light photodiodes 8a to 8g and 9a to 9g is on the outer peripheral side of the optical axis of the laser light from the semiconductor laser 6, and the light Adjacent along a straight line parallel to the axis. The first and second scattered light photodiodes 8a to 8g and 9a to 9g are arranged on the opposite side via the cell 5 and at positions to be rotated. Each of the first and second scattered light photodiodes 8a to 8g and 9a to 9g receives scattered light scattered by bubbles or fine particles in the lubricating oil and converts them into a predetermined scattered light pulse signal. Further, condensing lenses 15a to 15g facing the photodiodes 8a to 8g and 9a to 9g are arranged on the front side of the first and second scattered light photodiodes 8a to 8g and 9a to 9g. Yes.

  The computer executes various processing operations related to fine particle counting according to a control program. That is, as shown in FIG. 8, in step S1, input processing of pulse signals from the photodiodes 7, 8, and 9 described above is performed. In step S2, the calculation process of the scattering patterns P1, P1 ', P2, and P2' (see FIG. 7) is performed along with the particle diameter of the bubbles or fine particles based on each pulse signal. In steps S3 and S4, the calculated scattering pattern P1, P1 ′, P2, P2 ′ is compared with a preset reference scattering pattern SP of the fine particles (see FIG. 7). The identification process is performed. In step S5, fine particles are counted for each predetermined particle size.

  As shown in FIG. 7, the scattering patterns P1, P1 ′, P2, and P2 ′ are shown on the horizontal axis in the first and second scattered light photodiodes 8a to 8g and 9a with respect to the optical axis direction of the laser light. To 9g, the vertical axis represents the value of each pulse height of each scattered light pulse signal of each of the first and second scattered light photodiodes 8a to 8g, 9a to 9g, and each pulse It is a graph formed by interpolating height values.

  Here, it can be said that the “particle diameter calculating means” and the “pattern calculating means” according to the present invention are configured by the step S2. Moreover, it can be said that the "identification means" concerning this invention is comprised by said step S3 and S4. In addition, it can be said that the “counting means” according to the present invention is configured by the step S5.

(3) Operation of Particle Number Measuring Device Next, the operation of the particle number measuring device 2 will be described.
First, laser light is irradiated from the semiconductor laser 6 to the lubricating oil flowing in the cell 5. At this time, when bubbles or fine particles contained in the lubricating oil pass on the optical axis of the laser light, the blocking light blocked by the bubbles or fine particles is received by the blocking light photodiode 7 and is substantially synchronized with the light reception. The scattered light scattered by the bubbles or fine particles is received by the first and second scattered light photodiodes 8a to 8g and 9a to 9g.

  Next, the cutoff light pulse signal is input from the cutoff light photodiode 7 to the computer, and the scattered light pulse signals are input from the first and second scattered light photodiodes 8a to 8g and 9a to 9g. (Step S1 in FIG. 8). Next, the bubble or particle size is calculated based on the pulse height of the cutoff light pulse signal, and the bubble or particle scattering pattern P1, P1 ′, based on the pulse height of each scattered light pulse signal. P2 and P2 ′ (see FIG. 7) are calculated (step S2).

Here, since the bubble is substantially spherical, the amount of scattered light with respect to each of the first and second scattered light photodiodes 8 and 9 is increased, and the same amount of scattered light is received. Therefore, the scattering patterns P1 and P1 ′ (see FIG. 7) due to the bubbles show relatively large peaks, and the substantially same pattern is shown between the first and second scattered light photodiodes 8 and 9.
On the other hand, since the fine particles pass through the cell while rotating, the amount of scattered light for each of the first and second scattered light photodiodes 8 and 9 is extremely small, and it has been established that the same amount of scattered light is received. Lower. Therefore, the scattering patterns P2 and P2 ′ (see FIG. 7) due to the fine particles show relatively small peaks, and show different patterns between the first and second scattered light photodiodes 8 and 9.

  Thereafter, the calculated scattering patterns P1, P1 ', P2, P2' and the reference scattering pattern SP (see FIG. 7) of the fine particles are recognized and compared (step S3). As a result, if both patterns are similar and are identified as fine particles (YES in step S4), the number of fine particles is counted (step S5). On the other hand, if the two patterns are greatly different and are identified as not being fine particles (bubbles) (NO in step S5), the number of fine particles is not counted. Thereafter, the computer repeats the above steps S1 to S5 a predetermined number of times (or a predetermined time), and the series of measurement processes is completed.

(3) Effects of Example According to the evaluation data creation method of this example, the number of particles in the lubricating oil is measured by a particle number measuring device by a sliding friction test, and the unit slip distance of the lubrication target part is determined from the measured value. The lubrication state evaluation parameter Lp indicating the number of particles per unit is calculated, the friction coefficient μ and the specific wear amount Ws are measured, and then the first evaluation is performed based on the correlation between the lubrication state evaluation parameter Lp and the friction coefficient μ. Data Q1 is obtained, and second evaluation data Q2 is obtained based on the correlation between the lubrication state evaluation parameter Lp and the specific wear amount Ws. If the first and second evaluation data Q1 and Q2 are used, the friction coefficient μ and the specific wear amount Ws can be acquired from the lubrication state evaluation parameter Lp obtained from the number of particles measured in the actual lubrication target portion. As a result, it is possible to accurately evaluate the lubrication state of the lubrication target portion in a large facility or the like using the friction coefficient μ and the specific wear amount Ws which are these general evaluation parameters. In particular, if the lubricating oil sampling period is set to a short period (for example, on the order of several minutes), the lubrication state of the lubrication target portion can be evaluated in a shorter time.

  Further, in this embodiment, one semiconductor laser 6, one light blocking photodiode 7, a large number of first and second scattered light photodiodes 8a to 8g, 9a to 9g, and a computer are provided. Since the particle number measuring device 2 is configured, the particle diameter of bubbles or fine particles is calculated by the computer based on the cutoff light pulse signal of the cutoff light photodiode 7, and a large number of first and second scattered light photodiodes 8a are calculated. Scattering patterns P1 and P2 are calculated on the basis of the pulse signals for scattered light of ˜8g and 9a to 9g, and bubbles and fine particles are found based on a comparison based on pattern recognition between the scatter patterns P1 and P2 and the reference scattering pattern SP. Only the number of particles for each predetermined particle size is counted. As described above, the particle size of the fine particles is measured by the light blocking method, so the number of fine particles is measured corresponding to a relatively large diameter and a wide range of particle sizes (1 μm to 500 μm) of the fine particles contained in the lubricating oil. can do. Further, since the bubbles and the fine particles are discriminated based on the scattering patterns P1, P1 ′, P2 and P2 ′ obtained from the respective first and second scattered light photodiodes 8a to 8g and 9a to 9g. Both can be distinguished with extremely high accuracy. As a result, if the sliding friction test is performed using this particle number measuring device, the first and second evaluation data Q1 and Q2 with higher reliability can be created.

  In the present invention, the present invention is not limited to the above embodiment, and various modifications can be made within the scope of the present invention depending on the purpose and application. That is, in the above-described embodiment, the friction coefficient μ and the specific wear amount Ws are exemplified as the second evaluation parameter. However, the present invention is not limited thereto, and for example, an evaluation parameter (for example, the friction coefficient μ and / or specific wear amount Ws) Wear rate, wear rate, etc.) may be employed.

  Moreover, in the said Example, the particle number measuring device 2 formed by arranging two or more 1st and 2nd photodiodes 8a-8g and 9a-9g for scattered light along the straight line parallel to the optical axis of a laser beam. However, the present invention is not limited to this. For example, as shown in FIG. 9, the second is along an arc drawn around a point on the optical axis of the laser beam and on the flow center axis of the cell 5. A plurality of the first and second scattered light photodiodes 8a to 8g and 9a to 9g may be arranged.

  Moreover, in the said Example, although the scattering pattern P1, P1 ', P2P2' and the reference | standard scattering pattern SP illustrated the form identified when it is similar by pattern recognition, it was not limited to this For example, as shown in FIG. 8, in step S3, the scattering patterns P1, P1 ′, P2, P2 ′ and the reference scattering pattern SP are similar by pattern recognition, and step S ′ (virtual in the figure). The first scattering patterns P1 and P2 obtained from the first scattered light photodiodes 8a to 8g and the second scattered patterns P1 ′ and P2 obtained from the second scattered light photodiodes 9a to 9g. May be identified as a fine particle in step S4. Note that the order of step S3 and step S 'may be interchanged. Furthermore, it is good also as a structure provided only with step S 'instead of step S3.

  It is widely used as a technique for creating evaluation data for evaluating the lubrication state of the lubrication target part. In particular, it is suitably used as a technique for creating evaluation data for evaluating the lubrication state of a large facility.

It is explanatory drawing for demonstrating the sliding friction test which concerns on a present Example. It is explanatory drawing for demonstrating the said sliding friction test. It is explanatory drawing for demonstrating the said sliding friction test. It is explanatory drawing for demonstrating the production method of the 1st evaluation parameter which concerns on a present Example. It is explanatory drawing for demonstrating the production method of the 2nd evaluation parameter which concerns on a present Example. It is explanatory drawing for demonstrating the particle number measuring device which concerns on a present Example. It is explanatory drawing for demonstrating a scattering pattern. It is a flowchart figure for demonstrating the measurement process by the said particle number measuring device. It is explanatory drawing for demonstrating the other form of a particle number measuring device.

Explanation of symbols

  2; Particle number measuring device, 5; Cell, 6; Semiconductor laser, 7; Photodiode for blocking light, 8; Photodiode for first scattered light, 9; Photodiode for second scattered light, Lp; , Μ: friction coefficient, Ws: specific wear amount, Q1: first evaluation data, Q2: second evaluation data.

Claims (4)

A method of creating evaluation data for evaluating the lubrication state of a lubrication target part,
In the sliding friction test, the number of particles in the lubricating oil is measured with a particle number measuring device, and the first evaluation parameter (Lp) indicating the time change rate of the number of particles in the lubricating oil is calculated from the measured value. And / or measuring a second evaluation parameter indicative of the state of friction;
Obtaining evaluation data based on a correlation between the first evaluation parameter (Lp) and the second evaluation parameter ,
“Pc” is the number of particles measured by the particle number measuring device, “k” is a correction coefficient determined according to the sliding area of the lubrication target portion, and “L” is the sliding area of the lubrication target portion and An evaluation data creation method , wherein the first evaluation parameter (Lp) is calculated by the following mathematical formula when the sliding distance is obtained from the sliding time .
Lp = Pc / (k · L)   The evaluation data creation method according to claim 1, wherein the first evaluation parameter (Lp) is a value indicating the number of particles per unit sliding distance of the lubrication target portion.   The evaluation data creation method according to claim 1, wherein the second evaluation parameter is a friction coefficient and / or a specific wear amount.   The particle number measuring device includes a light emitter that irradiates light to the lubricating oil flowing in the cell, a blocking light receiver that receives blocking light from the light emitter, and a scattered light receiver that receives scattered light from the light emitter. And a particle size calculating means for calculating a particle size of bubbles or fine particles contained in the lubricating oil by receiving the blocking light receiver, and a bubble and fine particles contained in the lubricating oil by receiving the scattered light receiver. 4. An identification unit for identifying, and a counting unit for counting fine particles for each predetermined particle size based on the calculation result of the particle size calculation unit and the identification result of the identification unit. The evaluation data creation method according to one item.

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