JP4830375B2 - Viscous fluid application device - Google Patents

Description

  The present invention relates to a viscous fluid application device that applies a viscous fluid for adhesion to an object to be applied such as a lead frame or a substrate.

In a die bonding process for manufacturing a semiconductor device, a viscous fluid coating apparatus that applies a viscous fluid such as a paste for bonding a semiconductor chip to an object to be coated such as a lead frame or a substrate is widely used. The viscous fluid application device is provided with a viscous fluid supply unit such as an application unit that applies viscous fluid to a substrate or the like, and a viscous fluid storage container that supplies viscous fluid to the application unit. Supply is made. Supply of the viscous fluid from the viscous fluid supply unit to the application unit is performed by controlling the flow rate and the like with a valve unit interposed therebetween (see, for example, Patent Document 1).
JP 2000-117171 A

  In general, a viscous fluid such as a paste has a property of changing in a short time, and therefore, it is required to appropriately clean the viscous fluid coating apparatus. In addition, there are many types of viscous fluids used in the viscous fluid application apparatus, and it is necessary to perform cleaning even when the types of viscous fluids are changed. Accordingly, when cleaning the viscous fluid application device, an operation of disassembling and cleaning the valve unit having the viscous fluid flow path frequently occurs.

  However, when the valve unit is incorporated in the application unit, an operation of detaching and disassembling the valve unit from the application unit, and an operation of assembling and mounting the valve unit after cleaning are required. Since such work requires tools and skilled techniques, it takes a lot of time and labor, and there is a problem that efficient work cannot be performed.

  SUMMARY OF THE INVENTION An object of the present invention is to provide a viscous fluid applicator capable of easily disassembling and assembling a valve unit when cleaning the viscous fluid applicator.

According to the first aspect of the present invention, there is provided a viscous fluid supply unit that supplies a viscous fluid, an application unit that is supplied with the viscous fluid from the viscous fluid supply unit and applies the viscous fluid to an object to be coated, and a horizontal that moves the application unit. A moving unit; a pipe line connecting the viscous fluid supply unit and the application unit; and a valve unit provided in the pipe line, wherein the valve unit is formed with a flow path communicating with the pipe line. And a main body having a movable part for opening and closing the flow path, a holder for detachably mounting the main body, and an actuator for operating the movable part to open and close the flow path. The main body is provided with an engagement body including an engagement element, and an engagement body having an engagement portion that is detachably engaged with the engagement element, and the engagement portion is engaged with the engagement element. Is attached to the holder and the engaged It is those detached from the holder to the body portion by disengaging from, also consist of protrusions having a large diameter portion which the Hikakarigoko is provided on the tip side of the small-diameter portion and the small diameter portion, and wherein The engaging portion is an engaging hole into which the engaged child is engaged, and the main body portion is moved by engaging the engaging hole with a small diameter portion of the engaged child engaged in the engaging hole. The engaging element is provided with a tapered portion whose diameter gradually increases from the small diameter portion toward the large diameter portion between the small diameter portion and the large diameter portion; and An urging means for urging the engaging body is provided at a position where the main body portion is mounted on the holder, and the main body portion is moved into contact with the engagement hole by the urging force of the urging means. Attach to the holder .

According to a second aspect of the present invention, there is provided a positioning unit for positioning an object to be coated, a viscous fluid supplying part for supplying a viscous fluid, and an application for applying the viscous fluid to the object to be coated by being supplied with the viscous fluid from the viscous fluid supplying part. And a horizontal moving means for moving the application part relative to the object to be applied, a pipe line connecting the viscous fluid supply part and the application part, and a valve unit provided in the pipe line. The valve unit is formed with a flow passage communicating with the pipe line and having a movable portion for opening and closing the flow passage, a holder for detachably mounting the main body portion, and operating the movable portion. An actuator that opens and closes the flow path, the main body portion includes an engaged element, and the holder includes an engaging body having an engaging portion that is detachably engaged with the engaged element. Engage the engaging part with the engaged element. Said body portion and movable and position to be attached to the holder, a selectively said engaging body in a position to leave the body part from the holder by disengaging from the Hikakarigoko by and said Hikakarigoko Is formed of a protrusion having a small diameter portion and a large diameter portion provided on the tip side of the small diameter portion, and the engagement portion is an engagement hole into which the engaged element is engaged, and the engagement hole The main body portion is attached to the holder by engaging the engagement hole with the small diameter portion of the engaged element engaged, and the engaged element is formed between the small diameter portion and the large diameter portion. A taper portion having a diameter gradually increasing from the small diameter portion toward the large diameter portion, and a biasing means for biasing the engaging body at a position where the holder attaches the main body portion to the holder; Due to the urging force of the urging means, the tape is inserted into the engagement hole. By press-contact the part attaching the body portion to the holder.

  According to the present invention, the valve unit is constituted by the main body and the holder for detachably mounting the main body, so that the valve unit can be easily disassembled and assembled during cleaning of the viscous fluid application device. it can. Therefore, the time and labor required for the work can be reduced, and the operating rate of the viscous fluid coating apparatus can be improved.

(Embodiment 1)
Embodiment 1 of the present invention will be described below with reference to the drawings. 1 is a side view of a viscous fluid application apparatus according to Embodiment 1 of the present invention, FIG. 2 is a perspective view of a valve unit of the viscous fluid application apparatus according to Embodiment 1 of the present invention, and FIG. 3 is an embodiment of the present invention. 4 is an exploded perspective view of the separated state of the main body part and the holder of the valve unit of the viscous fluid application apparatus in FIG. 1, and FIG. 4 is a part of the separated state of the main body part and the holder of the valve unit of the viscous fluid application apparatus according to Embodiment 1 of the present invention. 5 (a), 5 (b), 6 (a), and 6 (b) are side views of the valve unit of the viscous fluid applying apparatus according to Embodiment 1 of the present invention, and FIG. 7 is an implementation of the present invention. It is the elements on larger scale of the valve unit of the viscous fluid application apparatus in the form 1.

  First, the overall configuration of the viscous fluid coating apparatus will be described. In FIG. 1, a positioning portion 2 is disposed on a base 1. The positioning unit 2 includes a transport mechanism for a substrate P as an object to be coated, and transports the substrate P and positions it at a predetermined position. In the present invention, the transport direction of the substrate P by the positioning unit 2 is defined as the X direction, and the direction orthogonal thereto is defined as the Y direction. Above the positioning unit 2 is disposed a viscous fluid application unit 10 that applies paste as a viscous fluid to the substrate P.

  The viscous fluid application unit 10 includes an X table 11 and a Y table 12. A Z table 13 is provided below the X table 11. A coating unit 20 is mounted on the Z table 13 via a bracket 14, and a paste supply body 110 is mounted on the X table 11 as a viscous fluid supply unit. The paste supply body 110 and the application unit 20 are connected by a pipe line 120, and the paste stored in the paste supply body 110 is supplied to the application part 20 through the pipe line 120.

The X table 11, the Y table 12, and the Z table 13 each have an X motor M as a drive unit.
An X, Y motor MY, and a Z motor MZ are provided, and the application unit 20 moves in the X, Y, and Z directions by driving the motors MX, MY, and MZ. As a result, the paste supplied from the paste supply body 110 to the application unit 20 via the conduit 120 is discharged from the nozzle 19 at the lower end of the application unit 20 and applied to the substrate P with a predetermined drawing pattern. The X table 11 and the Y table 12 serve as a horizontal movement unit that horizontally moves the coating unit 20 relative to the substrate P.

  A sensor 100 is attached to the lower end of the Z table 13. The sensor 100 detects the distance between the tip of the nozzle 19 and the substrate P, and recognizes the recognition mark M provided on the substrate P to detect the horizontal position of the nozzle 19.

  The valve unit 50 is connected to the pipe line 120 by connecting portions 90 and 130. The valve unit 50 includes a rod-like movable part 62 (see FIG. 5A), and the movement of the movable part 62 (arrow a) opens and closes the flow path 65 that communicates with the pipe line 120. The paste supply to the application unit 20 is controlled.

  Next, the valve unit 50 will be described. 2 and 3, the valve unit 50 includes a main body portion 60 and a holder 80 for detachably mounting the main body portion 60. FIG. 2 shows a state where the main body 60 is mounted on the holder 80, and FIG. 3 shows a state where the main body 60 is separated from the holder 80.

  The main body 60 is provided on a box-shaped main body 61, a movable portion 62 that slides in the main body 61 in a longitudinal direction (arrow a) that is a direction orthogonal to the flow path 65, and an opposing surface of the main body 61. Inflow pipe 63 and outflow pipe 64 (see also FIG. 5A).

  In FIG. 4, an engaged element 70 projects from one side surface of the main body 61. The engaged element 70 includes a base portion 70a attached to one side surface of the main body 61, a small diameter portion 70b continuous with the base portion 70a, and a large diameter portion 70c provided on the tip side from the small diameter portion 70b. The large diameter portion 70c is continuous by a tapered portion 70d whose diameter gradually increases from the small diameter portion 70b toward the large diameter portion 70c (see also FIGS. 6A and 6B).

  In FIG. 3, the holder 80 is composed of a long plate-like frame 81, and an engagement body 82 is mounted on the back side thereof. The frame 81 is provided with side plates 81a and 81b and an end plate 81c. A groove 83 is formed between the side plates 81a and 81b. The frame 81 has two insertion holes 81d for inserting the engaged elements 70 protruding from one side of the main body 61 when the main body 60 is mounted on the holder 80. The engaging body 82 mounted on the back side of the frame 81 is formed in a long plate shape, and is held movably between a guide 85 provided on the back surface of the frame 81. The end of the engagement body 82 is refracted to form an operation portion 82a.

  In FIG. 4, a spring 86 is provided as a biasing means for the engaging body 82 between the guide 85 and the operating portion 82 a, and the operating portion 82 a biases the engaging body 82 in the direction b away from the frame 81. Yes. An engagement hole 82b as an engagement portion is opened in the engagement body 82, and the operation portion 82a is moved in the direction of arrow c (see FIG. 6B) by a fingertip or the like against the urging force of the spring 86. As a result, the frame 81 moves to a position that matches the insertion hole 81d of the frame 81.

  In FIG. 3, a through hole 81 e is opened at the approximate center of the end plate 81 c of the frame 81. An actuator 51 is provided outside the end plate 81c. A joint portion 52 is provided at the tip of the rod 51a of the actuator 51, and the joint portion 52 protrudes inside the end plate 81c through the through hole 81e. By driving the actuator 51, the rod 51a moves forward and backward, and the joint portion 52 moves in the arrow b direction.

  4 and 6, one end portion of the movable portion 62 is a joint portion 62 b and engages with the joint portion 52 of the actuator 51 when the main body portion 60 is attached to the holder 80. Therefore, when the rod 51a of the actuator 51 moves back and forth, the movable portion 62 slides in the main body 61 in the direction of the arrow a that is perpendicular to the flow path 65 (see FIG. 5A).

  Next, the inside of the main body 61 will be described. In FIG. 5, the main body 60 is attached to a holder 80. A flow path 65 communicating with the inflow pipe 63 and the outflow pipe 64 is formed in the main body 61 so as to be orthogonal to the movable portion 62. A hole 62 a is formed in the movable part 62. The hole 62a moves with the movement of the movable part 62 in the direction of the arrow a. As shown in FIG. 5A, the hole 62a communicates with the flow path 65 to open the flow path 65, or as shown in FIG. Thus, the flow path 65 is blocked and the flow path 65 is closed.

  The inflow pipe 63 is connected to the pipe line 120 a on the paste supply body 110 side via the first connecting portion 130. In addition, the outflow pipe 64 is connected to the pipe line 120b on the application unit 20 side via the second connection part 90. Accordingly, the supply of the paste stored in the paste supply body 110 to the application unit 20 is controlled by the opening / closing operation of the flow path 65 by the movement of the movable unit 62 (see also FIG. 1).

  Next, attachment / detachment of the main body 60 with respect to the holder 80 will be described. 6 and 7, the main body 60 is attached to the holder 80. FIG. 6A shows a state where the engaged element 70 and the engagement hole 82 b are engaged and the main body 60 is mounted on the holder 80. In FIG. 6B, by pushing the operating portion 82a with the fingertip F or the like, the engaging body 82 is moved in the direction of the arrow c so that the engaged member 70 can be detached from the engaging hole 82b, and the main body portion 60 is attached to the holder 80 shows a state where it can be detached.

  6 (a) and 6 (b), the operation portion 82a is forcibly pushed in the direction of the arrow c against the urging force of the spring 86 by the fingertip F or the like, and the engagement hole 82b matches the insertion hole 81d. To move. As a result, the engaged state between the engaged element 70 and the engaging hole 82b is released, so that the engaged element 70 is detached from the engaging hole 82b and the insertion hole 81d, and the main body 60 is detached from the holder 80 and separated. can do.

  Similarly, when the main body 60 is attached to the holder 80, the operation portion 82a is similarly pushed in the direction of the arrow c against the biasing force of the spring 86, and moved to a position where the engagement hole 82b matches the insertion hole 81d. . In this state, the engaged element 70 is inserted into the engagement hole 82b and the insertion hole 81d, the joint part 62b on the main body part 60 side is engaged with the joint part 52 on the holder 80 side, and the main body 61 is inserted into the groove part 83. . When the fingertip F is released from the operating portion 82a in this state, the engaging body 82 moves away from the frame 81 (in the direction of arrow b in FIG. 7) by the biasing force of the spring 86, as shown in FIG. Thus, the engagement hole 82 b is engaged with the engaged member 70, and the main body 60 is attached to the holder 80.

  In FIG. 7, the main body 60 attached to the holder 80 is in contact with the base 70a of the engaged element 70 and the edge 81d 'of the insertion hole 81d, and is in contact with the taper 70d and the edge 82a' of the engagement hole 82b. By being in contact with each other, the frame 81 and the engaging body 82 are sandwiched and held. At this time, since the engaging body 82 is urged in the arrow b direction by the urging force of the spring 86, the tapered portion 70d is pressed in the arrow d direction (horizontal direction) by the edge portion 82a 'of the engaging hole 82b. It becomes. Since the tapered portion 70d is formed at an oblique angle with respect to the arrow d direction in which the pressing force acts, the pressing force also acts on the tapered portion 70d in the arrow e direction (vertical direction). Thereby, the main-body part 60 will be in the state pressed by the holder 80 side (arrow f). Therefore, the main body 60 is mounted in a state in which the engaged element 70 is held between the frame 81 and the engaging body 82 by the urging force of the spring 86 and pressed to the holder 80 side.

  According to the viscous fluid applicator configured as described above, the valve unit 50 includes the main body portion 60 and the holder 80 for detachably mounting the main body portion 60. The valve unit 50 can be easily disassembled and assembled. In addition, since the main body 60 serving as a viscous fluid flow path and the actuator 51 serving as a drive source are separated, the main body 60 can be easily cleaned. Further, since the main body portion 60 is mounted in a state pressed against the holder 80 by the biasing force of the spring 86, for example, vibration caused by driving of the actuator 51, etc., compared with the case where the main body portion 60 is fastened to the holder 80 with a bolt or the like. Thus, there is no occurrence of an accident such as loosening of a bolt due to the above, and it is possible to prevent an accident in which the main body portion 60 is detached from or detached from the holder 80 during operation of the viscous fluid application device.

(Embodiment 2)
Next, a second embodiment of the present invention will be described with reference to FIG. FIG. 8 shows a state in which the main body 60 is mounted on the holder 80. In the following description, the same components as those in the first embodiment will not be described, and portions different in configuration will be mainly described.

  In FIG. 8, an engagement body 92 is provided on the back surface of the frame 81 of the holder 80. An engagement hole 92 a communicating with the insertion hole 81 d of the frame 81 is opened in the engagement body 92, and the engaged element 70 is inserted when the main body 60 is attached to the holder 80. A pair of pockets 93 are formed facing the engagement hole 92a. In the pocket 93, there are provided a spring 94 as an urging means and a spherical engagement element 95 as an engaging portion which is urged by the spring 94 and partially protrudes inside the engagement hole 92a. The engaging element 95 engages with the tapered portion 70d of the engaged element 70 in a state where the engaged element 70 is inserted into the engaging hole 92a, and presses it by the biasing force of the spring 94.

  The main body 60 and the holder 80 are attached / detached by inserting / removing the engaged element 70 into / from the engagement hole 92a. When the engaged element 70 is inserted into the engaging hole 92a, the engaging element 95 is urged by the spring 94 and presses against the tapered portion 70d of the engaged element 70, and the contact point between the engaging element 95 and the tapered portion 70d is indicated by an arrow d. Since the force in the direction (horizontal direction) and the direction of arrow e (vertical direction) acts, the main body portion 60 is mounted while being pressed toward the holder 80 (arrow f).

(Embodiment 3)
Next, Embodiment 3 of the present invention will be described with reference to FIG. FIG. 9 shows a state in which the main body 6 is attached to the holder 80. In the following description, the same components as those in the first embodiment will not be described, and portions different in configuration will be mainly described.

  In FIG. 9, an engagement body 96 is provided on the back surface of the frame 81 of the holder 80. The engaging body 96 includes a holding body 97 in which an engaging hole 96 a communicating with the insertion hole 81 d of the frame 81 is opened, and a slide cam 98 provided outside the holding body 97. The holding body 97 is formed with a pair of through holes 97a facing the engagement hole 96a, and a spherical engagement element 99 as an engagement part that partially protrudes inside the engagement hole 96a in the through hole 97a. Is installed. The engaging element 99 engages with the tapered portion 70d of the engaged element 70 in a state where the engaged element 70 is inserted into the engaging hole 96a.

The slide cam 98 is attached to the outside of the holding body 97 so as to be slidable in the vertical direction (arrow g), and the lower end portion thereof is supported by a spring 100 as an urging means and is urged upward. A pocket 98a is formed in the upper portion of the slide cam 98, and when the slide cam 98 is slid downward against the urging force of the spring 100, a part of the engaging element 99 is accommodated in the pocket 98a. ing. In a state where a part of the engagement element 99 is stored in the pocket 98a, the engagement element 99 does not protrude inside the engagement hole 96a. In a normal state, the slide cam 98 is slid upward by the biasing force of the spring 100. At this time, the engaging member 99 is engaged.
Partially protrudes inside the engagement hole 96a.

  When the main body 60 is attached to the holder 80, the slide cam 98 is slid downward with a finger or the like so that the engaging element 99 does not protrude inside the engaging hole 96a and the engaged element 70 is moved to the engaging hole 96a. Insert into. After the insertion, when the finger is released from the slide cam 98, the slide cam 98 is slid upward by the biasing force of the spring 100, and the engaging element 99 partially protrudes inside the engaging hole 96a. Press and hold it. Since forces in the direction of the arrow d (horizontal direction) and the direction of the arrow e (vertical direction) act on the contact point between the engagement element 99 and the taper portion 70d, the main body portion 60 is mounted while being pressed toward the holder 80 side. (Arrow f).

  When the main body 60 is detached from the holder 80, the slide cam 98 is slid downward in the same manner as the mounting, so that the engaging element 99 does not protrude inside the engaging hole 96a and the engaged element 70 is moved. This is done by extracting from the engagement hole 96a.

  In the viscous fluid application device of the present invention, the valve unit is composed of a main body portion and a holder for detachably mounting the main body portion, so that the valve unit can be easily disassembled and assembled during cleaning of the viscous fluid application device. Therefore, it is useful in the field of applying a viscous fluid for bonding a semiconductor chip or the like to an object to be applied such as a lead frame or a substrate.

Side view of viscous fluid application apparatus in Embodiment 1 of the present invention. The perspective view of the valve unit of the viscous fluid application apparatus in Embodiment 1 of this invention The disassembled perspective view of the separated state of the main-body part and holder of the valve unit of the viscous fluid application apparatus in Embodiment 1 of this invention The partial exploded perspective view of the separation | separation state of the main-body part of a valve unit and a holder of the viscous fluid application apparatus in Embodiment 1 of this invention (A), (b) Side view of valve unit of viscous fluid applying apparatus in embodiment 1 of the present invention. (A), (b) Side view of valve unit of viscous fluid applying apparatus in embodiment 1 of the present invention. The elements on larger scale of the valve unit of the viscous fluid application apparatus in Embodiment 1 of this invention The elements on larger scale of the valve unit of the viscous fluid application apparatus in Embodiment 2 of this invention The elements on larger scale of the valve unit of the viscous fluid application apparatus in Embodiment 3 of this invention

Explanation of symbols

2 Positioning part 10 Viscous fluid application part 11 X table 12 Y table 19 Nozzle 20 Application part 50 Valve unit 51 Actuator 52 Joint part 60 Main body part 62 Movable part 65 Flow path 70 Engagement element 70b Small diameter part 70c Large diameter part 70d Taper part 80 Holder 82, 92, 96 Engagement body 82b, 95, 99 Engagement part 86, 94 Spring 110 Paste supply body 120 Pipe line P Substrate

Claims (2)

A viscous fluid supply section for supplying a viscous fluid; an application section for supplying the viscous fluid to the object to be coated by supplying the viscous fluid from the viscous fluid supply section; horizontal moving means for moving the application section; and the viscous fluid supply section A pipe line connecting the part and the application part, and a valve unit provided in the pipe line,
The valve unit is formed with a flow passage communicating with the pipe line and having a movable portion for opening and closing the flow passage, a holder for detachably mounting the main body portion, and operating the movable portion. An actuator that opens and closes the flow path, the main body portion includes an engaged element, and the holder includes an engaging body that includes an engaging portion that is detachably engaged with the engaged element. The main part is attached to the holder by engaging a mating part with the engaged element, and the main body part is detached from the holder by detaching from the engaged element ,
Further, the engaged element is formed of a projection having a small diameter part and a large diameter part provided on the tip side from the small diameter part, and the engaging part is an engagement hole into which the engaged element is engaged, The main body portion is attached to the holder by engaging the engagement hole with the small diameter portion of the engaged member engaged with the engagement hole,
Further, the engaged element includes a tapered portion whose diameter gradually increases from the small diameter portion toward the large diameter portion between the small diameter portion and the large diameter portion, and the holder attaches the main body portion to the holder. And a biasing means for biasing the engaging body at a position, and the main body portion is mounted on the holder by pressing the tapered portion against the engagement hole by a biasing force of the biasing means. A viscous fluid application device. A positioning part for positioning the object to be coated, a viscous fluid supply part for supplying a viscous fluid, an application part for supplying the viscous fluid from the viscous fluid supply part and applying the viscous fluid to the object to be coated, and the coating part. A horizontal movement means for moving relative to the application body, a pipe line connecting the viscous fluid supply section and the application section, and a valve unit provided in the pipe line,
The valve unit is formed with a flow passage communicating with the pipe line and having a movable portion for opening and closing the flow passage, a holder for detachably mounting the main body portion, and operating the movable portion. An actuator that opens and closes the flow path, the main body portion includes an engaged element, and the holder includes an engaging body that includes an engaging portion that is detachably engaged with the engaged element. The engaging portion is selectively engaged with a position where the main body portion is attached to the holder by engaging with the engaged element, and a position where the main body portion is detached from the holder by being separated from the engaged element. The unit is movable , and the engaged element is formed of a protrusion having a small diameter part and a large diameter part provided on the distal end side from the small diameter part, and the engaging part is engaged with the engaged element. It is an engagement hole and is engaged with this engagement hole. It said body portion by engaging the engagement hole in the small diameter portion of the Hikakarigoko is intended to be attached to the holder and,
Further, the engaged element includes a tapered portion whose diameter gradually increases from the small diameter portion toward the large diameter portion between the small diameter portion and the large diameter portion, and the holder attaches the main body portion to the holder. And a biasing means for biasing the engaging body at a position, and the main body portion is mounted on the holder by pressing the tapered portion against the engagement hole by a biasing force of the biasing means. A viscous fluid application device.

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