JP4819551B2 - Remote monitoring and operation device for single crystal pulling device - Google Patents

Description

  The present invention relates to a remote monitoring / operating device for centrally monitoring and operating a plurality of single crystal pulling devices at a location remote from a plurality of single crystal pulling devices when pulling and growing a single crystal silicon ingot. is there.

  In a silicon wafer manufacturing factory, a large number of single crystal pulling apparatuses (CZ furnaces) are installed at predetermined intervals in a building. Each single crystal pulling apparatus is individually provided with a monitor screen and an operation panel for monitoring the pulling state of the single crystal silicon ingot and operating the pulling. Therefore, the operator circulates between the single crystal pulling apparatuses, monitors the monitor screen, and operates the operation panel.

  In recent years, the diameter of silicon wafers is about 300 mm and has become larger. With the increase in diameter and weight of single crystal silicon ingots, single crystal pulling devices (CZ furnaces) are also becoming larger. With the increase in the size of such a single crystal pulling apparatus, the installation interval of each single crystal pulling apparatus is long and wide. For this reason, the operator's work range is expanded and the time required for patrol is increased. If a large number of CZ furnaces are installed, the operator moves a long distance obtained by multiplying the number of CZ furnace installations by the number of installations in one round. For this reason, a great load is imposed on the operator, and workability and work efficiency are reduced.

  Thus, with the increase in size of the pulling device for single crystal silicon ingots, the work range of the operator is expanded, the load on the operator becomes excessive, and workability and work efficiency are reduced.

  Further, while pulling up the single crystal silicon ingot, the single crystal silicon ingot may unexpectedly fall into the quartz crucible. When a large-diameter and heavy-weight single crystal silicon ingot falls into the quartz crucible, the high-temperature (1200 ° C.˜) silicon melt in the quartz crucible becomes severe and the scattering range is expanded. The CZ furnace is provided with a cooling water pipe for cooling the furnace wall. For this reason, there is a possibility that an abnormal situation may occur in which the scattered high-temperature silicon melt comes into contact with the cooling pipe and high-temperature steam leaks to the outside.

  As described above, there is a possibility that an abnormal situation occurs in which the silicon melt is scattered by the fall of the single crystal silicon ingot and the hot water vapor in the cooling water channel leaks to the outside.

  The above is a problem when the operator goes to the location of each single crystal pulling apparatus for monitoring and operation.

  Therefore, each single crystal pulling device can be installed at one remote location in order to avoid the work load and the damage caused by abnormal situations when the operator actually goes to the location of each single crystal pulling device to perform monitoring and operation. The invention of concentrating, remotely monitoring and remotely operating is already known as can be seen in Patent Documents 1 and 2 described later.

That is, a monitor and an operation panel are provided in a remote monitoring / operation room away from the single crystal pulling apparatus. The operator selects the single crystal pulling apparatus of the number machine to be monitored and operated from all the single crystal pulling apparatuses. Then, the pulling state in the single crystal pulling apparatus of the selected machine is displayed on the monitor screen, and the single crystal pulling apparatus of the selected car can be remotely controlled by the operation panel.
JP 2001-72489 A JP-A-6-64993

A control example of each step of pulling a single crystal by the CZ method will be described.

For example, by dissolving polycrystalline silicon (polycrystalline dissolution process), immersing the seed crystal in silicon melt (seed crystal immersing process), and then forming the neck (squeezed part) by necking method, dislocation-free The single crystallization is confirmed (necking step). In the subsequent process of this process, a process of forming a shoulder (shoulder) is performed.

  The operation until the above-described necking process is completed is a process that requires a long time in all the processes, and requires high visibility and high-speed operation responsiveness.

  However, with the current remote devices, when the single crystal pulling device of the unit to be monitored and operated is selected, only the selected unit can be monitored and operated, and the pulling state of the single crystal pulling device of the other unit is changed. It cannot be monitored or manipulated. For this reason, it is occupied for a long time in the monitoring and operation of one unit, and during that time, it is impossible to monitor and operate the lifting status of other units, and monitor and operate other units in the interval Because it was not possible, work efficiency was supposed to be poor. That is, if the number of units increases, the polycrystal dissolution process, seed crystal soaking process, and necking process may overlap in the same time zone, but operating a specific unit while monitoring all units. Therefore, manual operations such as a polycrystal dissolution process, a seed crystal dipping process, and a necking process cannot be performed in a plurality of units at the same time zone.

  Further, in the polycrystalline melting step, the seed crystal dipping step, and the necking step, it is necessary for the operator to perform a careful and reliable operation while monitoring the inside of the furnace. For this reason, very high visibility and high operation responsiveness are required in the polycrystal dissolving step, the seed crystal dipping step, and the necking step.

  However, in the current remote device, such very high visibility and high operation responsiveness cannot be obtained due to the disadvantage of centralized control. That is, it is not possible to obtain the same visibility and operation responsiveness as monitoring and operating with the monitor and operation panel provided for each unit.

  In addition, since the current remote device is designed to be remotely operated for each single crystal pulling device, when giving a command such as an emergency stop to the single crystal pulling device of all units, It is necessary to switch the selection one by one and give an emergency stop command to each unit, and it is impossible to deal with an emergency situation quickly. In addition, when water vapor leaks from the cooling water pipe as described above, for example, the single crystal pulling device of the currently selected unit has an influence on the single crystal pulling device of the adjacent unit, It is necessary to simultaneously give an emergency stop command such as an emergency stop to the single crystal pulling devices of the adjacent units at the same time. However, the current remote device that switches the current selection one by one and gives a command for each unit cannot meet such a request. As described above, there has been a problem that it is impossible to deal with an abnormal situation urgently.

  The present invention has been made in view of such circumstances, and each single crystal pulling device is centrally monitored and remotely operated at a remote location, so that the operator can actually go to the location of each single crystal pulling device. The problem to be solved is to avoid the work burden caused by monitoring and operation and damage caused by abnormal situations. In addition, the problem to be solved is to improve the working efficiency by operating one specific unit while monitoring all the units.

  In addition, when remotely monitoring and operating, it should be possible to obtain high visibility and operational responsiveness equivalent to or higher than that of monitoring and operating with conventional monitors and operation panels provided for each unit. It is a problem to be solved.

  In addition, when an abnormal situation occurs during remote monitoring and operation, an emergency stop command can be given to multiple units at the same time so that the emergency situation can be dealt with urgently Is a solution issue.

The first invention is
In the remote monitoring / operating device for a single crystal pulling apparatus, which is configured to monitor and operate a plurality of single crystal pulling apparatuses with a remote monitoring / operating system provided at a location remote from a plurality of single crystal pulling apparatuses,
Monitoring information collecting means for collecting monitoring information of a plurality of single crystal pulling devices;
First transmission means for transmitting the monitoring information to a remote monitoring / operation system,
Remote monitoring and operation system
A first monitor device for displaying monitoring information for each single crystal pulling device on each divided screen obtained by dividing the monitor screen;
Split screen selection means for selecting a specific split screen from the split screens of the first monitor device;
A second monitor device for displaying the monitoring information of the selected specific divided screen on the monitor screen;
And operating means for operating the single crystal pulling device corresponding to the selected specific divided screen,
Second transmission means for transmitting operation information of the operation means to the corresponding single crystal pulling device;
And a control means for controlling the single crystal pulling apparatus according to the transmitted operation information.

The second invention is the first invention,
The monitoring information collected by the monitoring information collecting means is information obtained by imaging the inside of the furnace of the single crystal pulling apparatus.

The third invention is the first invention,
The monitoring information collected by the monitoring information collecting means is information indicating the control state of the single crystal pulling apparatus.

The fourth invention is characterized in that, in the first invention, the monitoring information collected by the monitoring information collecting means is trend data indicating a past history and / or a current value of a control parameter of the single crystal pulling apparatus. .

A fifth invention is the first invention,
The monitoring information collected by the monitoring information collecting means includes information obtained by imaging the inside of the furnace of the single crystal pulling apparatus, information indicating the control state of the single crystal pulling apparatus, and trend data indicating a history of control parameters of the single crystal pulling apparatus. Any two types of monitoring information, or these three types of monitoring information,
The first monitor device has two or three monitor screens corresponding to two types of monitoring information or three types of monitoring information,
The second monitor device has two or three monitor screens corresponding to two types of monitoring information or three types of monitoring information.

The sixth invention
In the remote monitoring / operating device for a single crystal pulling apparatus, which is configured to monitor and operate a plurality of single crystal pulling apparatuses with a remote monitoring / operating system provided at a location remote from a plurality of single crystal pulling apparatuses,
Imaging means for imaging the interior of the furnace of a plurality of single crystal pulling devices at a plurality of different viewpoints;
A viewpoint in the furnace to be imaged is associated in advance for each step of pulling the single crystal,
Each time the single crystal pulling process shifts, a transmission means for transmitting an image of the inside of the furnace captured by the imaging means at a viewpoint corresponding to the transferred process to the remote monitoring / operation system is provided.
Remote monitoring and operation system
It is characterized by including a monitor device for displaying imaging information for each process in each single crystal pulling device on a monitor screen.

A seventh invention is the sixth invention,
A plurality of imaging means are provided corresponding to a plurality of viewpoints.

The eighth invention is a remote monitoring / operation system provided at a location remote from a plurality of single crystal pulling devices, wherein the single crystal pulling device is monitored and operated remotely. -In the operating device,
Remote monitoring and operation system
A monitoring device for displaying monitoring information of the single crystal pulling device on a monitor screen;
An operation device that generates an operation signal corresponding to the operation of the operation element by a processing circuit independent of the processing circuit of the monitor device,
Transmitting means for transmitting the generated operation signal to a corresponding single crystal pulling device;
And a control means for controlling the single crystal pulling apparatus in accordance with the transmitted operation signal.

A ninth invention is the eighth invention,
The operation element is a push button, and an operation signal for operating the single crystal pulling apparatus is generated only while the push button is pushed or every time the push button is pushed,
The control means operates the single crystal pulling apparatus according to the operation signal.

The tenth invention is
In the remote monitoring / operating device for a single crystal pulling apparatus, which is configured to monitor and operate a plurality of single crystal pulling apparatuses with a remote monitoring / operating system provided at a location remote from a plurality of single crystal pulling apparatuses,
Error information collecting means for collecting error information of a plurality of single crystal pulling devices;
A first transmission means for transmitting the error information to a remote monitoring / operation system,
Remote monitoring and operation system
A monitor device for displaying error information for each single crystal pulling device on the monitor screen;
An operation means for selecting one or more specific single crystal pulling devices from each single crystal pulling device and performing an operation to cope with an error;
Second transmission means for transmitting operation information of the operation means to the corresponding single crystal pulling device;
And a control means for controlling the single crystal pulling apparatus according to the transmitted operation information.

In an eleventh aspect based on the tenth aspect,
In the monitor screen, the display portion corresponding to the single crystal pulling apparatus in which an error has occurred is displayed in a display mode different from the display portions corresponding to other single crystal pulling apparatuses in which no error has occurred. .

In a twelfth aspect based on the tenth aspect,
The operating means is characterized by operating an operation button displayed on the monitor screen of the monitor device.

In a thirteenth aspect based on the tenth aspect,
The operation for dealing with the error includes an operation for emergency stop of the single crystal pulling device,
The control means makes an emergency stop of the single crystal pulling apparatus according to the operation information of the operation means.

The fourteenth invention is
In the remote monitoring / operating device for a single crystal pulling apparatus, which is configured to monitor and operate a plurality of single crystal pulling apparatuses with a remote monitoring / operating system provided at a location remote from a plurality of single crystal pulling apparatuses,
Trend data collection means for collecting trend data indicating the history of control parameters of a plurality of single crystal pulling devices;
And transmission means for transmitting trend data to a remote monitoring / operation system.
Remote monitoring and operation system
It is characterized by including a monitor device that displays actual trend data in each single crystal pulling device on a monitor screen together with reference trend data.

In a fifteenth aspect based on the fourteenth aspect,
When the deviation between the actual trend data value and the reference trend data value exceeds a predetermined threshold, the display mode is displayed on the monitor screen to call attention. To do.

  The effects of the present invention will be described below.

  According to the present invention, as in the prior art, each single crystal pulling apparatus 1 is concentrated by the remote monitoring / operation system 300 so as to be remotely monitored and remotely operated. It is possible to avoid work load and damage caused by an abnormal situation by going to the location of the pulling device 1 and performing monitoring and operation.

  And according to 1st invention, 2nd invention, 3rd invention, 4th invention, 5th invention, it becomes possible to operate a specific number machine, monitoring all the number machines.

  That is, as shown in FIG. 5, each of the divided screens 312D, 312D... Of the monitor screen 312 of the first monitor device 310 displays an image in the CZ furnace 2 of each unit. Each of the divided screens 322D, 322D,... Of the monitor screen 322 of the monitor device 320 displays an image indicating the control state of each unit, and each of the divided screens 332D of the monitor screen 332 of the first monitor device 330. Each of 332D ... displays an image showing trend data of each unit. Therefore, the operator can monitor all the units at a remote place. On the other hand, when a specific unit (for example, unit number # n6) is selected by the unit selection button 372 of the operating device 370, the image in the CZ furnace 2 of that specific unit (unit number # n6) is enlarged, An image that is displayed on the monitor screen 342 of the second monitor device 340 and that indicates the control state of the specific unit (unit number # n6) is enlarged and displayed on the monitor screen 352 of the second monitor device 350. In addition, an image indicating the trend data of the specific number (number # n6) is enlarged and displayed on the monitor screen 362 of the second monitor device 360. The operator operates the seed axis operation buttons 375U and 375D or the in-furnace component operation buttons 377U and 377D while looking at the monitor screen of the second monitor device, and remotely operates the specific unit (unit number # n6). can do. For this reason, it becomes possible to operate one specific unit while monitoring all the units. For example, while the single crystal pulling apparatus 1 of the machine number # n6 is being operated, the fact that the other machine number # n5 has entered the process to be manually operated is indicated by the first monitor devices 310, 320, 330. It can be easily known from the monitor screens 312, 322, and 332 (particularly the monitor screen 322). As a result, the other machine number # n5 can be quickly selected by the operation device 370, and the operation of the single crystal pulling device 1 of the other machine can be quickly moved. For this reason, the working efficiency is dramatically improved.

  The monitoring information displayed on the monitor device includes an in-furnace image, an image indicating a control state, and an image indicating trend data (second invention, third invention, and fourth invention).

  The first monitor device may be composed of three monitor devices 310, 320, and 330 that respectively display three types of images such as an in-furnace image, an image that indicates a control state, and an image that indicates trend data. Alternatively, two monitor devices each displaying any two of the three types of images, ie, the image indicating the control state and the image indicating the trend data, may be used. Similarly, the second monitor device may be composed of three monitor devices 340, 350, and 360 that display three types of images such as an in-furnace image, an image that indicates a control state, and an image that indicates trend data, respectively. Further, it may be constituted by two monitor devices that display any two types of images among the three types of images: the in-furnace image, the image indicating the control state, and the image indicating the trend data (fifth invention).

  According to the sixth and seventh aspects, monitoring and operation with high visibility are possible.

  That is, on the monitor screen 342 of the second monitor device 340, an in-furnace image of a viewpoint corresponding to the current process is displayed for a specific unit. For example, in the polycrystalline melting step, the in-furnace monitoring camera 200 </ b> A is selected, and the in-furnace image captured at the viewpoint A is displayed on the monitor screen 342. In the polycrystalline melting step, in the process of melting the polycrystalline silicon, an operation of raising or lowering the in-furnace components is performed while viewing the in-furnace image of the degree of melting in the quartz crucible 3. The in-furnace image at the viewpoint A is an image that can best confirm the inside of the quartz crucible 3. For this reason, the operator can operate with high visibility in the polycrystalline melting step.

  In the seed crystal immersion process, the in-furnace monitoring camera 200 </ b> A is selected, and the in-furnace image captured at the viewpoint A is displayed on the monitor screen 342. In the seed crystal soaking process, it is necessary to perform an operation of raising and lowering the seed shaft 4a by looking at the in-furnace image, and determining the dip of the seed crystal 4b or re-dissolution (re-attachment). is there. The in-furnace image of the viewpoint A is an image that can make the determination most reliably. For this reason, the operator can operate with high visibility in the seed crystal immersion step.

  In the necking process, the in-furnace monitoring camera 200 </ b> D is selected, and the in-furnace image captured at the viewpoint D is displayed on the monitor screen 342. In the necking process, it is necessary to perform an ascending operation of the seed shaft 4a by looking at the in-furnace image to determine formation of the narrowed portion 6a, determination of no dislocation, and determination of single crystallization. The in-furnace image of the viewpoint D is an image that can make the determination most reliably. Therefore, the operator can perform operations with high visibility in the necking process.

  In the straight body process, double rings, ridge lines, and ridge line cracks are similarly confirmed using an in-furnace monitoring camera. In the straight body process, the in-furnace monitoring camera 200 </ b> B is selected, and the in-furnace image captured at the viewpoint B is displayed on the monitor 342.

  On the monitor screen 312 of the first monitor device 310, the furnace images of the viewpoints corresponding to the current process are displayed for all the units. For this reason, the operator can operate with high visibility by visually recognizing the monitor screen 312 of the first monitor device 310.

  A plurality of in-furnace monitoring cameras 200A, 200B, 200C, and 200D are provided corresponding to a plurality of viewpoints A, B, C, and D, and an in-furnace image of a viewpoint corresponding to each process is acquired. Well (seventh invention), instead of fixing the viewpoint of the in-furnace monitoring camera, the viewpoint can be changed, for example, by changing the viewpoint of one in-furnace monitoring camera for each process. It is also possible to obtain an in-furnace image of a viewpoint corresponding to each process.

  According to the eighth and ninth inventions, an operation with high motion responsiveness is possible.

  That is, in the polycrystalline melting step, the seed crystal dipping step, and the necking step, it is necessary to perform operations with high responsiveness while viewing the in-furnace image. Further, in the case of remote operation, real-time property equivalent to that operated by the operation panel 102 provided in the single crystal pulling apparatus 1 is required. In addition, a man-machine interface is required for the operator to recognize that he is operating.

  If the operation responsiveness is delayed, the seed shaft 4a and the crystal may be soaked in the melt 5 in some cases, and the liquid may leak from the quartz crucible 3. If an operation command is given using a personal computer, the time from when the computer is operated until the single crystal pulling apparatus 1 is actually operated is a CPU that performs other processes in parallel. A certain response cannot be obtained due to the influence of the internal processing time. In addition, when an operation command is given using a personal computer, a mouse is generally used. However, in mouse operation, there is little sense that the operator is operating.

  In the present invention, when the seed axis operation buttons 375U and 375D of the operation device 370 are operated, the operation signal S1 is changed from the CPUs 349, 359 and 369 inside the monitor devices 340, 350 and 360 as shown in FIG. The signal is generated by another signal processing circuit 379 and sent to the control device 100 of the corresponding single crystal pulling apparatus 1 via the independent signal line 430, and the seed shaft 4a of the single crystal pulling apparatus 1 operates. Similarly, when the in-furnace component operation buttons 377U and 377D of the operation device 370 are operated, the operation signal S2 is a signal processing circuit 379 different from the CPUs 349, 359 and 369 inside the monitor devices 340, 350 and 360. And sent to the control device 100 of the corresponding single crystal pulling apparatus 1 through an independent signal line 430, and the in-furnace components of the single crystal pulling apparatus 1 move up and down. For example, the system is constructed so that the time from the operation to the actual operation (stop) is within a predetermined time (for example, 100 msec). As described above, in the present invention, the operation signal is generated by the signal processing circuit 379 independent of the processing of the CPU in the personal computer (for example, a circuit for generating an on / off signal by the intermittent contact), and directly by the independent signal line. Since it can transmit to the single crystal pulling apparatus 1, the single crystal pulling apparatus 1 can be operated with high operation responsiveness. Also, it can be operated with high real-time properties.

  Further, in the present invention, the operation buttons 375U, 375D, 377U, and 377D of the operation device 370 are configured as push buttons, and for example, a lamp integrated with the push button is provided while the push button is pressed or every time the push button is pressed. Light. Therefore, the operator can feel that he / she is operating, and the operability is dramatically improved (the ninth invention).

  According to the tenth invention, the eleventh invention, the twelfth invention, and the thirteenth invention, it is possible to simultaneously give a command to a plurality of units when an abnormal situation occurs.

  That is, as shown in FIG. 8, the monitor screen 352 of the second monitor device 350 displays not only the control state of a specific unit selected by the unit selection button 372 but also the control states of other units. The When an abnormality occurs, not only the error information of the specific unit but also the error information of other units is displayed on the same monitor screen 352. In the present invention, the display unit 570 (display units 571, 572...) Of the monitor screen 352 of the second monitor device 350 includes control information including error information of the plurality of single crystal pulling devices 1, 1. The status is displayed. In addition, operation buttons 571B, 572B ... for emergency stop of the plurality of single crystal pulling devices 1, 1, ... are displayed on the display unit 570 (display units 571, 572 ...) of the monitor screen 350. Provided.

  For example, while the control state of the single crystal pulling apparatus 1 with the unit number # n6 is largely displayed on the monitor screen 352 by the unit selection button 372, an abnormality ( For example, it is assumed that water vapor leakage occurs. Depending on the type of abnormality, damage may occur not only to the single crystal pulling apparatus in which the abnormality has occurred but also to the adjacent single crystal pulling apparatus.

  In this regard, according to the present invention, when an abnormality occurs in the single crystal pulling apparatus 1 of the machine number # n5, not only the single crystal pulling apparatus 1 of the machine number # n5 in which this abnormality has occurred but the adjacent machine number # n4, It can be easily recognized from the display unit 570 (display units 571, 572,...) Of the monitor screen 350 that the # n6 single crystal pulling apparatuses 1 and 1 may be damaged. And in that case, by operating the operation buttons 574B, 575B, and 576B all at once, a plurality of single crystal pulling apparatuses 1, 1, n, (unit numbers # n4, # n5, # n6) corresponding to all at once. 1 can be brought to an emergency stop. As described above, according to the present invention, an abnormal situation can be dealt with urgently.

The fourteenth and fifteenth aspects of the invention will be described with reference to FIG. 9. As shown in FIG. 9, the actual value of the control parameter at a certain time and the reference value of the control parameter are within a predetermined deviation ΔL. Then, it is judged that the single crystal 6 is manufactured with high quality. In this case, assuming that the single crystal 6 is in a normal state with high quality, among the monitor screens 332 of the first monitor device 330, the corresponding split screen 332D and the monitor of the second monitor device 360 are displayed. The background of the screen 362 is displayed in, for example, “dark blue” to indicate “normal trend data”. On the other hand, if the actual value of the control parameter at a certain time and the reference value of the control parameter exceed the deviation ΔL for a predetermined time or more, the single crystal 6 may not be manufactured with high quality. It is judged that there is. In this case, assuming that there is a possibility that the single crystal 6 may not be manufactured with high quality or an abnormal state, the screen showing the apparatus state shown in FIG. Attention is given to the operator that “there is” (15th invention).

  The operator can quickly take appropriate measures according to the display of the device status screen.

  Hereinafter, an apparatus according to an embodiment will be described with reference to the drawings.

  FIG. 1 is a cross-sectional view of the configuration of the single crystal pulling apparatus 1 of the embodiment as seen from the side.

  As shown in FIG. 1, a single crystal pulling apparatus 1 according to the embodiment includes a CZ furnace (chamber) 2 as a single crystal pulling container.

  In the CZ furnace 2, there is provided a quartz crucible 3 for melting a polycrystalline silicon raw material and storing it as a melt 5. The quartz crucible 3 is covered with a graphite crucible 19 on the outside. Around the crucible 3 is provided a heater 9 for heating and melting the polycrystalline silicon material in the crucible 3.

  The heater 9 is provided around the quartz crucible 3 and on the side of the quartz crucible 3. Further, the heater 9 can adjust the heating amount, that is, the output of the quartz crucible 3.

A pulling mechanism 4 is provided above the crucible 3. The pulling mechanism 4 includes a pulling shaft (seed shaft) 4a and a seed (seed) crystal 4b.

  When polycrystalline silicon is charged into the quartz crucible 3 and melting is stabilized (polycrystalline melting step), the pulling shaft 4a moves in the vertical direction and the seed crystal 4b is immersed in the melt 5 (seed crystal soaking step). . Then, an ingot 6 of single crystal silicon is pulled up from the melt 5 by the CZ method. That is, it is confirmed that the neck portion 6a is formed by the necking method (dash neck method) and is single-crystallized without dislocation (the necking step). Next, a shoulder portion is formed (shoulder portion forming step), a straight body portion is formed (straight body portion forming step), a tail portion is formed, and the single crystal silicon 6 is cooled (tail processing step). Although these seven steps can be further subdivided into individual steps, in this embodiment, for convenience of explanation of the present invention, the entire pulling process consists of the above seven steps. And

  In each step of pulling up the single crystal ingot 6, the control parameter of the single crystal pulling apparatus 1 is adjusted to an appropriate desired value. Here, the control parameters are crystal length, crystal weight, crystal diameter, pulling speed, pulling shaft (crystal) rotation speed, crucible position, crucible rotation speed, heat shield plate position, crucible heating temperature, argon gas flow rate, furnace pressure. Furnace temperature.

  The pulling shaft 4a is pulled up at a desired pulling speed for each process and rotated at a desired pulling shaft rotational speed.

  The quartz crucible 3 is rotated by the rotation shaft 10. Moreover, the rotating shaft 10 can be driven in the vertical direction, and the quartz crucible 3 can be moved up and down to be positioned at an arbitrary position. Thereby, the quartz crucible 3 is controlled to a desired crucible position and crucible rotation speed for each process.

Further, by adjusting the heating amount of the heater 9, the desired crucible heating temperature is controlled for each process.

    By shutting off the outside air from the CZ furnace 2, the inside of the furnace 2 is maintained at a desired low pressure in the furnace. That is, argon gas 7 as an inert gas is supplied to the CZ furnace 2 at a desired flow rate, and is exhausted from the exhaust port of the CZ furnace 2 by a pump. Thereby, the inside of the furnace 2 is depressurized to a desired low pressure. Further, the temperature in the furnace 2 is maintained at a desired furnace temperature.

  Various evaporants are generated in the CZ furnace 2 during the single crystal pulling process (one batch). Therefore, the argon gas 7 is supplied to the CZ furnace 2 and exhausted together with the evaporated substance outside the CZ furnace 2 to remove the evaporated substance from the CZ furnace 2 and clean it. The supply flow rate of the argon gas 7 is controlled to a desired flow rate for each step in one batch.

  Above the quartz crucible 3 and around the single crystal silicon 6, a heat shielding plate 8 (gas rectifying tower) having a substantially inverted truncated cone shape is provided. The heat shielding plate 8 guides an argon gas 7 as a carrier gas supplied from above into the CZ furnace 2 to the center of the melt surface 5a, and further passes through the melt surface 5a so that the peripheral portion of the melt surface 5a. Lead to. The argon gas 7 is discharged together with the gas evaporated from the melt 5 from an exhaust port provided in the lower part of the CZ furnace 2. For this reason, the oxygen evaporated from the melt 5 can be kept stable, and the gas flow rate on the liquid surface can be stabilized.

  The heat shielding plate 8 insulates and shields the single crystal silicon 6 from radiant heat generated by a heat source such as the crucible 3, the melt 5, and the heater 9. The heat shielding plate 8 prevents the single crystal silicon 6 from being impeded by impurities (for example, silicon oxide) generated in the furnace and hindering the single crystal growth.

  The size of the distance between the lower end of the heat shielding plate 8 and the melt surface 5a affects the above-described stabilization of the gas flow rate. For this reason, this distance is controlled to a desired value in the crystal growth step. For example, it can be adjusted by raising and lowering the quartz crucible 3.

In this way, single crystal silicon 6 having a desired diameter, a desired weight, and a desired crystal length is obtained for each step. Each process of the pulling process includes a process ID number for identifying each process from other processes, ID = “1”, ID = “2”, ID = “3”, ID = “4”, ID = “5” ”, ID =“ 6 ”, and ID =“ 7 ”.

  FIG. 2 shows the overall configuration of the single crystal silicon manufacturing plant.

  In the single crystal silicon manufacturing factory, a plurality of the above-described single crystal pulling apparatuses 1 are arranged. A plurality of single crystal pulling devices 1, 1,... Are installed at a predetermined interval. The single crystal pulling devices 1, 1,... Have a unit number # that identifies the single crystal pulling device of each unit from the single crystal pulling units of other units, that is, # n1, # n2, # n3, # n4, # N5, # n6, # n7, # n8, # n9, # n10, # n11 ... are assigned.

  Each of the plurality of single crystal pulling apparatuses 1, 1... Is provided with an in-furnace monitoring camera 200 that images the inside of the CZ furnace 2. The in-furnace monitoring camera 200 includes a transmission unit 201. The in-furnace monitoring camera 200 includes a plurality of cameras 200A, 200B, 200C, and 200D.

  Each of the plurality of single crystal pulling devices 1, 1... Is provided with a control device 100. The control device 100 includes the above-described monitor screen 101, operation panel 102, control unit 103 that controls each step of pulling the single crystal pulling device 1 according to various control parameters, and a transmission / reception unit 104 that performs communication. .

  The weight, crystal length, crystal diameter, and height of the liquid surface 5a of the crystal 6 are set in advance for each step. A sensor for detecting the weight, the crystal length, the crystal diameter, and the height of the liquid surface 5 a of the crystal 6 is provided in the single crystal pulling apparatus 1. The current process ID can be detected based on the detection values of these sensors.

  The control unit 103 displays the monitoring information of the process corresponding to the detected current process ID on the monitor screen 101 and sends the monitoring information to the transmission / reception unit 104 in association with its own machine number #. Further, the control unit 103 transmits the detected current process ID to the remote monitoring / operation system 300. The remote monitoring / operation system 300 transmits to the control unit 103 a signal for switching to the in-furnace monitoring camera corresponding to the detected current process ID. The control unit 103 selects the in-furnace monitoring camera corresponding to the detected current process ID from the in-furnace monitoring cameras 200A to 200D, and sets the imaging information of the selected in-furnace monitoring camera. The transmission unit 201 sends the data to the own machine number #.

  A remote monitoring / operation system 300 is provided at a location remote from each single crystal pulling apparatus 1. As will be described later, the remote monitoring / operation system 300 is for monitoring and operating a plurality of single crystal pulling apparatuses 1, 1... From a remote location, and monitors 310, 320, 330, 340, 350, 360 and an operating device 370 are provided. The remote monitoring / operation system 300 includes transmission / reception units 301, 302, 303, and 304. The monitor devices 340, 350, and 360 include operation units 341, 351, and 361, respectively. As will be described later, the operation device 370 is an operation device that generates an operation signal independently of processing performed by the operation units 341, 351, and 361 of the monitor devices 340, 350, and 360.

  The transmission / reception unit 301 of the remote monitoring / operation system 300 and the transmission unit 201 of the in-furnace monitoring camera 200 are connected by a signal line 410. The signal line 410 is an analog signal line, for example, a coaxial cable. An imaging signal indicating an image in the CZ furnace 2 captured by the in-furnace monitoring camera 200 is transmitted from the transmission unit 201 to the transmission / reception unit 301 of the remote monitoring / operation system 300 through the signal line 410 together with the machine number #. And received by the transceiver 301.

  The transmission / reception unit 302 of the remote monitoring / operation system 300 and the transmission / reception unit 104 of the control device 100 are connected by a signal line 420. As the signal line 420, a digital signal line, for example, an optical cable is used. The control state and trend data of the control device 100 are transmitted from the transmission / reception unit 104 to the transmission / reception unit 302 of the remote monitoring / operation system 300 through the signal line 420 together with the machine number # and received by the transmission / reception unit 302. In addition, the operation data generated by the operation units 341, 351, and 361 of the remote monitoring / operation system 300 is transmitted from the transmission / reception unit 302 to the transmission / reception unit 104 of the control device 100 via the signal line 420 together with the machine number #. The transmission / reception unit 104 receives the data.

  The transmission / reception unit 303 of the remote monitoring / operation system 300 and the transmission / reception unit 104 of the control device 100 are connected by a signal line 430. The signal line 430 is a digital signal line, for example, an optical cable. The operation signal generated by the operation device 370 of the remote monitoring / operation system 300 is transmitted to the transmission / reception unit 104 of the control device 100 from the transmission / reception unit 303 via the signal line 430 together with the machine number #. Received.

  The transmission / reception unit 304 of the remote monitoring / operation system 300 and the transmission / reception unit 104 of the control device 100 are connected by a signal line 440. The signal line 440 is a digital signal line, for example, a metal cable. Data indicating the manufacturing recipe generated by the operation unit 351 of the remote monitoring / operation system 300 is transmitted to the transmission / reception unit 104 of the control device 100 from the transmission / reception unit 304 via the signal line 440 together with the machine number #. Received by the unit 104.

  FIG. 3 shows the positional relationship between the in-furnace monitoring cameras 200A, 200B, 200C, and 200D and the CZ furnace 2.

  4A shows the relationship between the camera port 2a and the viewpoints A, B, C, and D. FIG. 4B shows each part in the CZ furnace 2 and the viewpoint A. , B, C, and D are shown.

  Each in-furnace monitoring camera 200A, 200B, 200C, 200D is arranged in a predetermined arrangement manner with the CZ furnace 2 so that different viewpoints A, B, C, D can be imaged.

  A camera port 2 a is opened in the wall of the CZ furnace 2. Each of the in-furnace monitoring cameras 200A to 200D takes an image of the inside of the CZ furnace 2 via the camera port 2a.

  The viewpoints A, B, C and D in the CZ furnace 2 to be imaged, that is, the furnace monitoring cameras 200A, 200B, 200C and 200D are associated with each step of pulling the single crystal.

The in-furnace monitoring camera 200 </ b> A that captures the viewpoint A is a camera that is used to perform total melting determination, in-furnace abnormality determination (liquid level position), reattachment (remelting) determination, and seed dip determination.

The in-furnace monitoring camera 200B that captures an image of the viewpoint B is a camera used for confirming a single crystal state, crystal hunting, deformation, and liquid level position.

The in-furnace monitoring camera 200 </ b> C that captures the viewpoint C is a camera that is used to perform quartz collapse confirmation and material adhesion confirmation.

The in-furnace monitoring camera 200D that captures the viewpoint D is a camera that is used to perform the blending determination, the eye-out, the meniscus determination, and the aperture (single crystallization) determination.

As shown in FIG. 3, an angle with respect to the horizontal axis is set for each in-furnace monitoring camera 200A to 200D. The in-furnace monitoring camera 200A is installed outside and above the CZ furnace 2 so that the entire field inside the CZ furnace 2 can be imaged at an angle of view of α ° with respect to the horizontal axis. ing. The in-furnace monitoring camera 200B is located on the outside of the CZ furnace 2 so that the boundary between the crystal 6 and the liquid surface 5a can be imaged at an angle of view of β ° with respect to the horizontal axis. Is arranged. The in-furnace monitoring camera 200C is located outside the CZ furnace 2 so that the upper end of the quartz crucible 3 outside the liquid surface 5a can be imaged at an angle of view of γ ° with respect to the horizontal axis. And it is arranged above. The in-furnace monitoring camera 200D is arranged outside and above the CZ furnace 2 so that the field of view angle is δ ° with respect to the horizontal axis so that the diaphragm 6a of the crystal 6 can be imaged. Has been. The focal lengths of the in-furnace monitoring cameras 200A to 200D are set to a predetermined distance.

  The viewpoints A, B, C, and D of the in-furnace monitoring cameras 200A, 200B, 200C, and 200D are set in the positional relationship shown in FIG. 4A in relation to the camera port 2a.

  Further, the viewpoints A, B, C, and D of the in-furnace monitoring cameras 200A, 200B, 200C, and 200D are set in the positional relationship shown in FIG. Has been. The focal position of the in-furnace monitoring camera 200 </ b> A is set in the entire CZ furnace 2. The focal position of the in-furnace monitoring camera 200B is set near the boundary between the crystal 6 and the liquid surface 5a. The focal position of the in-furnace monitoring camera 200C is set at the upper end of the quartz crucible 3 outside the liquid surface 5a. The focus position of the in-furnace monitoring camera 200D is set to the narrowing portion 6a.

  FIG. 5 shows the configuration of each monitor device 310, 320, 330, 340, 350, 360, and operation device 370 of the remote monitoring / operation system 300.

  FIG. 6 shows an arrangement example of the monitor devices 310, 320, 330, 340, 350, 360, and the operation device 370 of the remote monitoring / operation system 300.

  FIG. 7 shows an operation panel 371 of the operation device 370.

  FIG. 8 shows an enlarged monitor screen 352 of the monitor device 350.

  Each monitor device 310, 320, 330, 340, 350, 360 can be configured by combining a main body of a personal computer and a monitor such as a CRT.

  Monitor screens 312, 322, 332, 342, 352, and 362 are provided in the monitor devices 310, 320, 330, 340, 350, and 360, respectively.

  The monitor devices 310, 320, 330 display the monitoring information for each single crystal pulling device 1, 1,... On the divided screens 312D, 322D, 332D obtained by dividing the monitor screens 312, 322, 332, respectively. 1 monitor apparatus is comprised.

  The operation device 370 constitutes a divided screen selection unit that selects a specific divided screen from the divided screens of the first monitor devices 310, 320, and 330.

  The monitor devices 340, 350, and 360 constitute a second monitor device that displays the monitoring information of the selected specific divided screen on the monitor screens 342, 352, and 362.

  The operation device 370 constitutes operation means for operating the single crystal pulling device 1 corresponding to the selected specific divided screen.

  As shown in FIG. 6, the first monitor devices 310, 320, and 330 are arranged on the upper stage 910 of the shelf 900, and the second monitor devices 340, 350, and 360 are arranged on the lower stage 920 of the shelf 900. All monitor screens 312, 322, 332, 342, 352, and 362 are arranged in such a manner that they can be listed at the same time. The operation device 370 is arranged at a place where it can be operated while listing all the monitor screens 312, 322, 332, 342, 352, and 362.

  In this embodiment, different types of monitoring information are displayed on the monitor screens 312, 322, and 332 of the monitor devices 310, 320, and 330.

  The monitoring information displayed on the monitor screen 312 of the monitor device 310 is imaging information in the CZ furnace 2 captured by the furnace monitoring cameras 200A, 200B, 200C, and 200D.

  The monitoring information displayed on the monitor screen 322 of the monitor device 320 is monitoring information indicating the control state of the single crystal pulling device 1. The monitoring information indicating the control state of the single crystal pulling apparatus 1 is generated by the control unit 103 of the control apparatus 100 of the single crystal pulling apparatus 1. The monitoring information indicating the control state includes, for example, an apparatus state (control parameter) including information indicating the current process (for example, “currently a necking process”), work name information, and error information of the single crystal pulling apparatus 1. Current value), etc.

  The monitoring information displayed on the monitor screen 332 of the monitor device 330 is trend data indicating the history of the control parameters of the single crystal pulling apparatus 1 from the past to the present, and the control unit 103 of the control device 100 of the single crystal pulling apparatus 1. Is generated. The trend data is, for example, a graph showing a change in pulling speed with the horizontal axis representing time or crystal length and the vertical axis representing the pulling speed, and such trend data is displayed on the monitor screen 332. In addition, trend data indicating a change in the furnace temperature is displayed on the monitor screen 332 with the horizontal axis representing time or crystal length and the vertical axis representing the furnace temperature. Trend data indicating a change in deviation from the current weight of the crystal 6 with respect to the target weight of the crystal 6 is displayed on the monitor screen 332 with the horizontal axis representing time or crystal length. In addition, trend data indicating a change in crystal diameter is displayed on the monitor screen 332 with the horizontal axis being time or crystal length and the vertical axis being the diameter of the crystal 6.

  The divided screen 312 of the monitor device 310 is divided into 12 divided screens 312D, 312D... Corresponding to the plurality of single crystal pulling devices 1, 1. The divided screens 312D, 312D,... Correspond to the machine numbers # n1, # n2,. The in-furnace imaging signal received by the transmission / reception unit 301 of the remote monitoring / operation system 300 is sent to the monitor device 310 and converted into image information. Then, according to the machine number # associated with the received in-furnace imaging signal, the in-furnace imaging information of the corresponding number # is displayed on each of the divided screens 312D, 312D. As a result, in-furnace imaging information of the single crystal pulling apparatuses 1, 1 ... of the machine numbers # n1, # n2 ... is displayed on the divided screens 312D, 312D ..., respectively. .

  Similarly, the divided screen 322 of the monitor device 320 is divided into 12 divided screens 322D, 322D... Corresponding to the plurality of single crystal pulling devices 1, 1. The divided screens 322D, 322D,... Correspond to the machine numbers # n1, # n2,. A signal indicating the control state received by the transmission / reception unit 302 of the remote monitoring / operation system 300 is sent to the monitor device 320 and converted into image information. In accordance with the machine number # associated with the signal indicating the control state, information indicating the control state of the corresponding machine number # is displayed on each of the divided screens 322D, 322D. As a result, information indicating the control state of the single crystal pulling apparatuses 1, 1 ... of the machine numbers # n1, # n2 ... is displayed on each of the divided screens 322D, 322D ..., respectively. Become.

  Similarly, the divided screen 332 of the monitor device 330 is divided into 12 divided screens 332D, 332D,... Corresponding to the plurality of single crystal pulling devices 1, 1,. The divided screens 332D, 332D,... Correspond to the machine numbers # n1, # n2,. A signal indicating trend data received by the transmission / reception unit 302 of the remote monitoring / operation system 300 is sent to the monitor device 330 and converted into image information. Then, according to the machine number # associated with the received trend data, the trend data of the corresponding machine number # is displayed on each of the divided screens 332D, 332D. As a result, the trend data of the single crystal pulling apparatuses 1, 1 ... of the machine numbers # n1, # n2 ... are displayed on the divided screens 332D, 332D ..., respectively.

  In this way, on the divided screens 312D, 312D... Of the monitor screen 312 of the monitor device 310, the images in the CZ furnaces 2, 2,. Is done.

  In addition, on the divided screens 322D, 322D,... Of the monitor screen 322 of the monitor device 320, images indicating the control states of the machine numbers # n1, # n2,. However, the divided screen 322D corresponding to the unit where the error has occurred (for example, the divided screen corresponding to the unit number # n5) is identified as the divided screens 322D, 322D,. They are displayed in different display modes. Here, the error information is, for example, information such as “the furnace temperature is an abnormal temperature” or “the diameter of the throttle portion 6a is abnormal”. The error information is generated by comparing the current value of the control parameter with each threshold value that determines the degree of error. The degree of error (normal) is set to a plurality of stages, for example, “normal”, “caution”, and “abnormal”. In the present embodiment, for example, if the degree of error is “normal”, the background of the divided screen 322D of the corresponding unit is displayed in “dark blue”. If the degree of error is “Caution”, the background of the split screen 322D of the corresponding unit is displayed in “yellow”, and the background of the other “normal” split screens 322D, 322D. ". If the degree of error is “abnormal”, the background of the divided screen 322D of the corresponding unit is displayed in “red”, and the background of the other “normal” divided screens 322D, 322D. ". Note that changing the background color to identify the divided screen is an example, and in addition to changing the background color, it may be distinguished from other normal divided screens by blinking or the like.

  On the divided screens 332D, 332D,... Of the monitor screen 332 of the monitor device 330, images showing trend data of the machine numbers # n1, # n2,.

  On the operation panel 371 of the operation device 370, a specific divided screen from among the twelve divided screens 312D ..., 322D ..., 332D ... of the first monitor devices 310, 320, 330, that is, a specific one. .. Are provided for selecting the single crystal pulling apparatus 1 of the No. machine. The machine number selection buttons 372, 372,... Correspond to the single crystal pulling apparatuses 1, 1,. The unit selection buttons 372, 372,... Are configured such that when any one button is pushed, the other buttons are not pushed. When any one of the unit selection buttons 372 is pressed, the unit selection button 372 is a lamp formed integrally with the button 372 in order to alert the operator that “currently selected”. Is configured to light up.

  On the operation panel 371 of the operation device 370, the in-furnace image of the specific unit currently selected by the unit selection button 372 is switched to each of the viewpoints A, B, C, and D, and the monitor screen 342 of the monitor device 340 is displayed. Viewpoint selection buttons 373, 373... For display are provided. The viewpoint selection buttons 373, 373,... Correspond to the in-furnace monitoring cameras 200A, 200B, 200C, 200D set to the viewpoints A, B, C, D, respectively. The viewpoint selection buttons 373, 373... Are configured such that when any one button is pushed, the other buttons are not pushed. Further, when any one viewpoint selection button 373 is pressed, the viewpoint selection button 373 is formed integrally with the button 373 in order to alert the operator that “currently selected”. The lamp is lit up.

  On the operation panel 371 of the operation device 370, the specific machine currently selected by the machine selection button 372 performs a specific process (seed crystal dipping process, necking process) in which the raising and lowering of the seed shaft 4a should be manually operated. A seed axis manually operable display lamp (indicator) 374 is provided in order to alert the operator to that effect by turning on when entering.

  On the operation panel 371 of the operation device 370, the specific machine currently selected by the machine selection button 372 also has a specific process (seed crystal dipping process, necking process) in which the raising and lowering of the seed shaft 4a should be manually operated. When entering, a seed axis operation button 375U for remotely operating the ascending operation of the seed shaft 4a and a seed axis operation button 375D for remotely operating the descending operation of the seed shaft 4a are provided.

The seed axis operation buttons 375U and 375D are configured such that when any one of the seed axis operation buttons is pushed, the other seed axis operation buttons are not pushed. In addition, when any one of the seed axis operation buttons is pushed, the seed axis operation button is formed integrally with the seed axis operation button in order to alert the operator that “currently selected”. The lamp is lit up.

  The seed axis operation buttons 375U and 375D generate an operation signal S1 for causing the seed axis 4a to move up or down at a predetermined speed only while the seed axis operation button is pressed.

  Here, as illustrated in FIG. 2, the operation device 370 is an operation device that generates an operation signal independently of processing performed by the operation units 341, 351, and 361 of the second monitor devices 340, 350, and 360. The operation signal S1 is generated by a signal processing circuit 379 different from the CPUs 349, 359, and 369 in the monitor devices 340, 350, and 360. As the signal processing circuit 379, a circuit in which a contact is connected or disconnected according to operation or non-operation of a button and a predetermined voltage is turned on or off can be used.

  The operation signal S1 generated by the signal processing circuit 379 is sent to the transmission / reception unit 303. In the transmission / reception unit 303, the operation signal S <b> 1 is transmitted to the signal line 430 by a predetermined protocol together with the data indicating the machine number # of the machine to be operated. The operation signal S1 sent to the signal line 430 and the data indicating the machine number # associated therewith are sent to the single crystal pulling devices 1, 1. Is done. Data transfer between the single crystal pulling apparatuses 1, 1... And the remote monitoring / operation system 300 is performed by assigning an address to each machine number # and designating the machine. The control unit 103 of the single crystal pulling apparatus 1, 1... For each unit number # reads out the data written at the address corresponding to its own unit number # from the received data, and takes in the operation signal S1. Then, an operation signal corresponding to the operation signal S1 is generated, and this operation signal is sent to the actuator that drives the seed shaft 4a. Thereby, the seed shaft 4a moves up or down according to the operation signal S1. Considering response response performance and operability, the time from when the seed axis operation buttons 375U and 375D are pressed until the seed axis 4a actually operates, or from the state where the seed axis operation buttons 375U and 375D are pressed The system is constructed so that the time from when the hand is released until the seed shaft 4a actually stops is within a predetermined time (100 msec).

  The operation panel 371 of the operation device 370 is lit when the specific machine currently selected by the machine selection button 372 enters a specific process (polycrystalline dissolution process) in which the descent and the up should be manually operated. In the furnace, an in-furnace component operable indicator lamp (indicator) 376 is provided to alert the operator to that effect.

  On the operation panel 371 of the operation device 370, the specific machine currently selected by the machine selection button 372 enters the specific process (polycrystalline melting process) in which the rise and fall of the in-furnace components should be manually operated. In this case, an in-furnace component operation button 377U for remotely controlling the ascending operation of the in-furnace component and an in-furnace component operation button 377D for remotely operating the descending operation of the in-furnace component are provided. . The in-furnace component operation buttons 377U and 377D are configured such that when any one of the in-furnace component operation buttons is pushed, the other in-furnace component operation buttons are not pushed. In addition, when any one of the in-furnace component operation buttons is pressed, the in-furnace component operation button operates the in-reactor component operation to alert the operator that “currently selected”. A lamp formed integrally with the button is lit.

  The in-furnace component operation buttons 377U and 377D are used to raise or lower the in-furnace component at a predetermined speed at every predetermined step (predetermined distance) every time the in-furnace component operation button is pushed. The operation signal S2 is generated.

  Here, as described with reference to FIG. 2, the operation device 370 generates an operation signal independently of the processing performed by the operation units 341, 351, and 361 of the second monitor devices 340, 350, and 360. The operation signal S2 is generated by a signal processing circuit 379 different from the CPUs 349, 359, and 369 in the monitor devices 340, 350, and 360. The operation signal S <b> 2 generated by the signal processing circuit 379 is sent to the transmission / reception unit 303. In the transmission / reception unit 303, the operation signal S2 is transmitted to the signal line 430 by a predetermined protocol together with data indicating the machine number # of the machine to be operated. The operation signal S2 sent to the signal line 430 and the data indicating the machine number # associated therewith are sent to the single crystal pulling devices 1, 1,. Is done. The control unit 103 of the single crystal pulling apparatus 1, 1... For each unit number # reads out the data written in the address corresponding to its own unit number # from the received data, and takes in the operation signal S2. Then, an operation signal corresponding to the operation signal S2 is generated, and this operation signal is sent to the actuator that drives the in-furnace component. Thereby, the in-furnace component relatively moves up or down according to the operation signal S2. Considering response response performance and operability, the time from when the in-furnace component operation buttons 377U and 377D are pressed until the in-furnace component actually moves up and down is within a predetermined time (for example, 100 msec). So that the system is built.

When a specific car is selected by the car number selection button 372 of the operation device 370, a display signal corresponding to the selected car is transferred from the first monitor device 310 to the second monitor 340. As a result, the same in-furnace image displayed on the divided screen 312D corresponding to the selected unit among the divided screens 312D, 312D... Of the monitor screen 312 of the first monitor device 310 is 2 is enlarged and displayed on the monitor screen 342 of the second monitor device 340.

  Similarly, when a specific car is selected by the car number selection button 372 of the operating device 370, a display signal corresponding to the selected car is transferred from the first monitor device 320 to the second monitor 350. As a result, among the divided screens 322D, 322D... Of the monitor screen 322 of the first monitor device 320, an image showing the same control state as that displayed on the divided screen 322D corresponding to the selected number machine is displayed. The image is enlarged and displayed on the monitor screen 352 of the second monitor device 350.

  Similarly, when a specific car is selected by the car number selection button 372 of the operating device 370, a display signal corresponding to the selected car is transferred from the first monitor device 330 to the second monitor 360. As a result, among the divided screens 332D, 332D... Of the monitor screen 332 of the first monitor device 330, an image showing the same trend data as that displayed on the divided screen 332D corresponding to the selected number machine is displayed. The image is enlarged and displayed on the monitor screen 362 of the second monitor device 360.

  In this way, on the monitor screens 342, 352, 362 of the second monitor devices 340, 350, 360, the image of the specific car selected by the car number selection button 372 of the operating device 370 is enlarged and displayed. become. For example, if the single crystal pulling apparatus 1 of the machine number # n6 is selected, the monitor screen 342 of the second monitor apparatus 340 shows an image in the CZ furnace 2 of the single crystal pulling apparatus 1 of the machine number # n6. Thus, an image of the viewpoint corresponding to the current process is displayed, and an image of the control state of the single crystal pulling apparatus 1 of the machine number # n6 is displayed on the monitor screen 352 of the second monitor apparatus 350. As a result, an image of trend data of the single crystal pulling apparatus 1 of the machine number # n6 is displayed on the monitor screen 362 of the second monitor apparatus 360.

  As shown in FIG. 5, the second monitor devices 340, 350, and 360 are provided with operation units 341, 351, and 361, respectively. The operation units 341, 351, and 361 are configured by operation buttons 343, 353, and 363 provided on the monitor screens 342, 352, and 362 and command input operation means such as a mouse that instructs the operation buttons 343, 353, and 363. ing.

  For example, when the operation button 353 on the monitor screen 352 of the second monitor device 350 is clicked with the mouse, the image indicating the control state is similarly switched to another desired image. In addition, when the operation button 363 on the monitor screen 362 of the second monitor device 360 is clicked by the mouse, the trend data is similarly changed from the time axis to the crystal long axis. The image showing the data is switched to another desired image.

  Of the second monitor devices 340, 350, and 360, the operation button 353 of the second monitor device 350 that displays the control state performs not only the screen switching control described above but also the control of the corresponding number machine. This will be described with reference to FIG.

  As shown in FIG. 8, the monitor screen 352 of the second monitor device 350 includes display units 510, 520, 530...

  Display unit 510 displays a current process (for example, “straight body part forming process”). The display unit 520 displays each unit of the corresponding single crystal pulling apparatus 1 together with the current value of the control parameter. In addition, the display unit 520 displays another display of the ascending operation and descending operation of the seed shaft 4a, the ascending operation of the in-furnace component, the descending operation, and the current height of the in-furnace component. Display unit 530 displays the current value of the control parameter.

  The display unit 540 is provided with operation buttons 541 that indicate control parameters that can be manually operated among the control parameters. This operation button 541 constitutes the operation button 353 of the operation unit 351 (FIG. 5). The operation button 541 is composed of, for example, an operation button for causing the seed shaft 4a to move up or down. However, the operation button 541 functions only in a process that allows manual operation. When an operation button 541 (for example, an operation button for operating the seed axis 4a) is clicked by a mouse in a process that can be manually operated, operation data S3 is generated by the CPU 359 inside the monitor device 350 as shown in FIG. Is done. The generated operation data S3 is sent to the transmission / reception unit 302. In the transmission / reception unit 302, the operation data S3 is transmitted to the signal line 420 by a predetermined protocol together with data indicating the machine number # of the machine to be operated. The operation data S3 sent to the signal line 420 and the data indicating the machine number # associated therewith are sent to the single crystal pulling devices 1, 1. Is done. The control unit 103 of each unit number # single crystal pulling apparatus 1, 1... Reads out the data associated with the address of its own unit number # from the received data, takes in the operation data S3, An operation signal corresponding to the operation data S3 is generated, and this operation signal is sent to the actuator that drives the seed shaft 4a. Thereby, the seed shaft 4a moves up or down according to the operation data S3.

  The display unit 550 displays error information. The error information is, for example, information such as “the furnace temperature is abnormal temperature” or “the diameter of the throttle 6a is abnormal”, and alerts the operator by the color together with the characters indicating the error. ing. As described above, if the degree of error (normal) is “normal”, the display unit 550 is displayed in “dark blue” that is the same color as the background color. If the degree of error is “caution”, it is displayed in “yellow” different from the background color to alert the operator. If the degree of error is “abnormal”, it is displayed in “red” that is different from the background color to alert the operator. In addition to making the color of the display unit 550 different from the background, the operator may be alerted by making it different from the background by blinking or the like.

  The display unit 560 is provided with an operation button 561 for making an emergency stop of the single crystal pulling apparatus 1 of the machine number # currently selected by the machine selection button 372. The operation button 561 constitutes the operation button 353 of the operation unit 351 (FIG. 5). For example, if the currently selected unit number # is “# n6”, clicking the operation button 561 generates operation data for emergency stop of the single crystal pulling apparatus 1 of the unit number # n6. The However, in order to prevent an erroneous operation, operation data for emergency stop is generated by operating again the “OK” display among the “OK / Cancel” displays after the button operation. Yes.

  That is, when the operation button 561 is clicked, “OK / Cancel” is displayed on the screen, and when the portion displayed as “OK” is clicked, the unit selection button 372 is currently selected. Operation data S4 for emergency stop of the single crystal pulling apparatus 1 of the machine number # is generated by the CPU 359 inside the monitor apparatus 350. Note that when the “OK / Cancel” portion of “Cancel” is clicked, the emergency stop function is disabled and the operation data S4 is not generated.

  As shown in FIG. 2, the operation data S <b> 4 generated by the CPU 359 is sent to the transmission / reception unit 302. In the transmission / reception unit 302, the operation data S4 is transmitted to the signal line 420 according to a predetermined protocol together with data indicating the machine number # of the machine to be emergency stopped. The operation data S4 sent to the signal line 420 and the data indicating the machine number # associated therewith are sent to the single crystal pulling devices 1, 1. Is done. The control unit 103 of the single crystal pulling apparatus 1, 1... For each unit number # reads out the data written at the address corresponding to its own unit number # from the received data, and takes in the operation data S4. Then, a power stop signal corresponding to the operation data S4 is generated, and this power stop signal is applied to the power circuit. As a result, the single crystal pulling apparatus 1 of the corresponding number machine is brought to an emergency stop.

  The display unit 570 includes display units 571, 572,... Corresponding to the respective unit numbers # n1, # n2,... And an emergency stop (EM) valid button 582.

  Each display section 571, 572,... Is provided with operation buttons 571B, 572B,. These operation buttons 571B, 572B... And the emergency stop valid button 582 constitute an operation button 353 of the operation unit 351 (FIG. 5).

  Each of the display units 571, 572,... Displays the control state of the single crystal pulling apparatuses 1, 1,. However, since the display portion is small, the current values of typical control parameters such as the current crystal length value are displayed. Of the display units 571, 572,..., The display unit of the number No. # currently selected by the unit selection button 372 has a background color ( It is displayed in a different color (light blue) from the dark blue). Of the display units 571, 572,..., Regarding the display unit of the machine number # whose error level is “Caution” or “Abnormal”, the background of other display units is used to alert the operator. It is displayed in a color (yellow, red) different from the color (dark blue).

  For example, if the unit number # n6 is currently selected by the unit number selection button 372, the background color of the display unit 576 corresponding to the unit number # n6 is light blue, and the other unit numbers # n1 to # n5, # n7 .. Corresponding to the background color (dark blue) of the display units 571 to 575, 575.

  Also, for example, if an error has occurred in the single crystal pulling apparatus 1 of the machine number # n5 and the degree of error is “caution” or “abnormal”, the display unit 575 corresponding to the machine number # n5 The background color is yellow or red, and is identified as the background color (dark blue or light blue) of the display units 571 to 574, 576... Corresponding to the other machine numbers # n1 to # n4, # n6.

  The display unit 570 is configured so that operation data for emergency stop is not generated unless two reliable operations are performed continuously within a predetermined time in order to prevent erroneous operations.

  That is, when the emergency stop valid button 582 is clicked, the emergency stop valid button 582 is changed to a red display together with the characters “valid” for a predetermined time (for example, 10 seconds), and the emergency stop function is the same. Valid for a time (10 seconds). Further, among the operation buttons 571B, 572B ... of the display units 571, 572 ... of each unit number #, the operation button of the display unit of the unit number # to be emergency stopped is an emergency stop function valid time. When the click operation is performed within a predetermined time (for example, 10 seconds), the clicked display section is changed to a red display, and the single crystal pulling apparatus 1 of the unit corresponding to the click operated display section is stopped emergencyly. Operation data S <b> 5 is generated by the CPU 359 inside the monitor device 350. If the display buttons 571B, 572B,... Are not clicked within a predetermined time (for example, 10 seconds) that is the emergency stop function valid time, the emergency stop valid button 582 displays the original “invalid” character, amber color. Returning to the display, the emergency stop function is disabled, and the operation data S5 is not generated.

  For example, the user clicks the emergency stop valid button 582, and operates the display units 574, 575, and 576 corresponding to the machine number, # n4, # n5, and # n6 within a predetermined time (for example, 10 seconds) after the click operation. When the buttons 574B, 575B, and 576B are clicked, operation data S5 for emergency stop of the single crystal pulling apparatuses 1, 1, and 1 of the machine numbers # n4, # n5, and # n6 is generated.

  As shown in FIG. 2, the operation data S <b> 5 generated by the CPU 359 is sent to the transmission / reception unit 302. In the transmission / reception unit 302, the operation data S5 is transmitted to the signal line 420 by a predetermined protocol together with data indicating the machine number # of the machine to be emergency stopped. The operation data S5 sent to the signal line 420 and the data indicating the machine number # associated therewith are sent to the single crystal pulling devices 1, 1. Is done. The control unit 103 of the single crystal pulling apparatus 1, 1... For each unit number # reads out the data written in the address corresponding to its own unit number # from the received data, and takes in the operation data S5. Then, a power stop signal corresponding to the operation data S5 is generated, and this power stop signal is applied to the power circuit. As a result, the single crystal pulling apparatus 1 of the corresponding number machine is brought to an emergency stop.

  The display contents of the monitor screen 332 of the first monitor device 330 that displays an image of trend data and the monitor screen 362 of the second monitor device 360 will be described with reference to FIG.

FIG. 9 shows trend data displayed on the monitor screen 332 of the first monitor device 330 and the monitor screen 362 of the second monitor device 360. As shown in FIG. 9, the trend data has time or crystal length on the horizontal axis, and main control parameters such as the pulling speed, furnace temperature, crystal diameter, and deviation of the crystal weight from the target crystal diameter on the vertical axis. Actual change L of control parameter in the past certain period L
Data indicating 1. On the other hand, along with the actual control parameter change L1, the reference control parameter change L is shown on the same graph.
r is displayed. The reference control parameter change Lr is data obtained when the single crystal 6 is manufactured with high quality. If the actual value of the control parameter at a certain time and the reference value of the control parameter are within the predetermined deviation ΔL, it is determined that the single crystal 6 is manufactured with high quality. In this case, assuming that the single crystal 6 is in a normal state with high quality, among the monitor screens 332 of the first monitor device 330, the corresponding split screen 332D and the monitor of the second monitor device 360 are displayed. The background of the screen 362 is displayed in, for example, “dark blue” to indicate “normal trend data”. On the other hand, if the actual value of the control parameter at a certain time and the reference value of the control parameter exceed the deviation ΔL for a predetermined time or more, the single crystal 6 may not be manufactured with high quality. It is judged that there is. In this case, assuming that there is a possibility that the single crystal 6 may not be manufactured with high quality or an abnormal state, the screen showing the apparatus state shown in FIG. Attention is given to the operator.

  The operator can quickly take appropriate measures according to the display of the device status screen. Hereinafter, the operation performed in the single crystal silicon manufacturing factory in which the system is configured as described above and the effects thereof will be described.

(It becomes possible to operate a specific unit while monitoring all units)
As shown in FIG. 5, each of the divided screens 312D, 312D... Of the monitor screen 312 of the first monitor device 310 displays an image in the CZ furnace 2 of each unit, and the first monitor device. Each of the divided screens 322D, 322D,... Of the 320 monitor screen 322 displays an image showing the control state of each unit, and each of the divided screens 332D, 332D, etc. of the monitor screen 332 of the first monitor device 330. .. displays an image showing the trend data of each unit. Therefore, the operator can monitor all the units at a remote place. On the other hand, when a specific unit (for example, unit number # n6) is selected by the unit selection button 372 of the operating device 370, the image in the CZ furnace 2 of that specific unit (unit number # n6) is enlarged, An image that is displayed on the monitor screen 342 of the second monitor device 340 and that indicates the control state of the specific unit (unit number # n6) is enlarged and displayed on the monitor screen 352 of the second monitor device 350. In addition, an image indicating the trend data of the specific number (number # n6) is enlarged and displayed on the monitor screen 362 of the second monitor device 360. The operator operates the seed axis operation buttons 375U and 375D or the in-furnace component operation buttons 377U and 377D while looking at the monitor screen of the second monitor device, and remotely operates the specific unit (unit number # n6). can do. For this reason, it becomes possible to operate one specific unit while monitoring all the units. For example, while the single crystal pulling apparatus 1 of the machine number # n6 is being operated, the fact that the other machine number # n5 has entered the process to be manually operated is indicated by the first monitor devices 310, 320, 330. It can be easily known from the monitor screens 312, 322, and 332 (particularly the monitor screen 322). As a result, the other machine number # n5 can be quickly selected by the operation device 370, and the operation of the single crystal pulling device 1 of the other machine can be quickly moved. For this reason, the working efficiency is dramatically improved.

  In this embodiment, the first monitor device is composed of three monitor devices 310, 320, and 330 that display three types of images such as an in-furnace image, an image that indicates a control state, and an image that indicates trend data, respectively. However, you may comprise by two monitor apparatuses which each display any two types of images among three types of images, an image in a furnace, an image which shows a control state, and an image which shows trend data. Similarly, the second monitor device is also composed of two monitor devices that display any two of the three types of images: the in-furnace image, the control state image, and the trend data image. May be.

  In this embodiment, an image of one unit selected by the unit selection button 372 of the operation device 370 is enlarged and displayed on the second monitor devices 340, 350, 360. However, when two or more units can be selected by the operation device 370 and two or more second monitor devices 340, 350, and 360 are provided and two or more units are selected, the second unit is selected. The monitor devices 340, 340,..., 350, 350..., 360, 360.

(High visibility monitoring and operation are possible)
On the monitor screen 342 of the second monitor device 340, an in-furnace image of a viewpoint corresponding to the current process is displayed for a specific unit. For example, in the polycrystalline melting step, the in-furnace monitoring camera 200 </ b> A is selected, and the in-furnace image captured at the viewpoint A is displayed on the monitor screen 342. In the polycrystalline melting step, in the process of melting the polycrystalline silicon, an operation of raising or lowering the in-furnace components is performed while viewing the in-furnace image of the degree of melting in the quartz crucible 3. The in-furnace image at the viewpoint A is an image that can best confirm the inside of the quartz crucible 3. For this reason, the operator can operate with high visibility in the polycrystalline melting step.

  In the seed crystal immersion process, the in-furnace monitoring camera 200 </ b> A is selected, and the in-furnace image captured at the viewpoint A is displayed on the monitor screen 342. In the seed crystal soaking process, it is necessary to perform an operation of raising and lowering the seed shaft 4a by looking at the in-furnace image, and determining the dip of the seed crystal 4b or re-dissolution (re-attachment). is there. The in-furnace image of the viewpoint A is an image that can make the determination most reliably. For this reason, the operator can operate with high visibility in the seed crystal immersion step.

  In the necking process, the in-furnace monitoring camera 200 </ b> D is selected, and the in-furnace image captured at the viewpoint D is displayed on the monitor screen 342. In the necking process, it is necessary to perform an ascending operation of the seed shaft 4a by looking at the in-furnace image to determine formation of the narrowed portion 6a, determination of no dislocation, and determination of single crystallization. The in-furnace image of the viewpoint D is an image that can make the determination most reliably. Therefore, the operator can perform operations with high visibility in the necking process.

In the straight body process, double rings, ridge lines, and ridge line cracks are similarly confirmed using an in-furnace monitoring camera. In the straight body process, the in-furnace monitoring camera 200 </ b> B is selected, and the in-furnace image captured at the viewpoint B is displayed on the monitor 342.

  Also on the monitor screen 312 of the first monitor device 310, the furnace image of the viewpoint corresponding to the current process is displayed for all units. For this reason, the operator can operate with high visibility by visually recognizing the monitor screen 312 of the first monitor device 310.

  In the embodiment, a plurality of in-furnace monitoring cameras 200A, 200B, 200C, and 200D are provided corresponding to the plurality of viewpoints A, B, C, and D, and the in-furnace images of the viewpoints corresponding to the respective processes are provided. However, instead of fixing the viewpoint of the in-furnace monitoring camera, the viewpoint may be changeable. For example, by changing the viewpoint of one in-furnace monitoring camera for each process, it is possible to obtain an in-furnace image of the viewpoint corresponding to each process.

(Operation with high motion responsiveness is possible)
In the polycrystalline melting step, the seed crystal dipping step, and the necking step, it is necessary to perform operations with high responsiveness while viewing the in-furnace image. Further, in the case of remote operation, real-time property equivalent to that operated by the operation panel 102 provided in the single crystal pulling apparatus 1 is required. In addition, a man-machine interface is required for the operator to recognize that he is operating.

  If the operation responsiveness is delayed, the seed shaft 4a and the crystal may be soaked in the melt 5 in some cases, and the liquid may leak from the quartz crucible 3. If an operation command is given using a personal computer, the time from when the computer is operated until the single crystal pulling apparatus 1 is actually operated is a CPU that performs other processes in parallel. A certain response cannot be obtained due to the influence of the internal processing time. In addition, when an operation command is given using a personal computer, a mouse is generally used. However, in mouse operation, there is little sense that the operator is operating.

  In this embodiment, when the seed axis operation buttons 375U and 375D of the operation device 370 are operated, the operation signal S1 is sent to the CPUs 349, 359 and 369 inside the monitor devices 340, 350 and 360 as shown in FIG. Is generated by another signal processing circuit 379 and sent to the control device 100 of the corresponding single crystal pulling apparatus 1 via an independent signal line 430, and the seed shaft 4a of the single crystal pulling apparatus 1 operates. Similarly, when the in-furnace component operation buttons 377U and 377D of the operation device 370 are operated, the operation signal S2 is a signal processing circuit 379 different from the CPUs 349, 359 and 369 inside the monitor devices 340, 350 and 360. And sent to the control device 100 of the corresponding single crystal pulling apparatus 1 via the independent signal line 430, and the single crystal pulling apparatus 1 operates. As described above, in this embodiment, the system is constructed so that the time from the operation to the actual operation (stop) is within a predetermined time (for example, 100 msec). As described above, in this embodiment, the operation signal is generated by the signal processing circuit 379 independent of the processing of the CPU in the personal computer (for example, the circuit that generates the on / off signal by the contact interruption) and directly by the independent signal line. Since it can transmit to the single crystal pulling apparatus 1, the single crystal pulling apparatus 1 can be operated with high operation responsiveness. Also, it can be operated with high real-time properties.

  In addition, in this embodiment, the operation buttons 375U, 375D, 377U, and 377D of the operation device 370 are configured as push buttons, and a lamp integrated with the push buttons while the push buttons are pressed or every time the push buttons are pressed. Lights up. Therefore, the operator can feel that he / she is operating, and the operability is greatly improved. Note that the push button is just an example, and an operation element such as a toggle switch or an operation lever can be used as the operation element of the operation device 370.

(If an abnormal situation occurs, commands can be given to multiple units at the same time.)
As shown in FIG. 8, the monitor screen 352 of the second monitor device 350 displays not only the control state of a specific unit selected by the unit selection button 372 but also the control states of other units. When an abnormality occurs, not only the error information of the specific unit but also the error information of other units is displayed on the same monitor screen 352. In the present embodiment, the display unit 570 (display units 571, 572,...) Of the monitor screen 353 of the second monitor device 350 includes error information of a plurality of single crystal pulling devices 1, 1,. The control status is displayed. In addition, operation buttons 571B, 572B... For emergency stop of the plurality of single crystal pulling apparatuses 1, 1... Are displayed on the display unit 570 (display units 571, 572...) Of the monitor screen 352. Provided.

  For example, while the control state of the single crystal pulling apparatus 1 with the unit number # n6 is largely displayed on the monitor screen 350 by the unit selection button 372, an abnormality (for example, water vapor leakage) occurs in the single crystal pulling apparatus 1 with the adjacent unit number # n5. ) Occurs. Depending on the type of abnormality, damage may occur not only to the single crystal pulling apparatus in which the abnormality has occurred but also to the adjacent single crystal pulling apparatus.

  In this regard, according to this embodiment, not only the single crystal pulling apparatus 1 of the machine number # n5 in which an abnormality has occurred, but also the adjacent single crystal pulling apparatuses 1 and 1 of the machine numbers # n4 and # n6 may be damaged. It can be easily recognized from the display unit 570 (display units 571, 572,...) Of the monitor screen 350. And in that case, by operating the operation buttons 574B, 575B, and 576B all at once, a plurality of single crystal pulling apparatuses 1, 1, n, (unit numbers # n4, # n5, # n6) corresponding to all at once. 1 can be brought to an emergency stop. Thus, according to the present embodiment, it is possible to urgently cope with an abnormal situation.

  The present invention is naturally applicable not only to pulling single crystal silicon but also single crystal semiconductors other than silicon, and also to pulling compound semiconductors.

FIG. 1 is a cross-sectional view of a configuration of a single crystal pulling apparatus according to an embodiment as viewed from the side. FIG. 2 is an overall configuration diagram of a single crystal silicon manufacturing plant. FIG. 3 is a diagram showing the positional relationship between each in-furnace monitoring camera and the CZ furnace. FIG. 4A is a diagram showing the relationship between the camera port and each viewpoint, and FIG. 4B is a diagram showing the relationship between each part in the CZ furnace and each viewpoint. is there. FIG. 5 is a configuration diagram of each monitor device and operation device of the remote monitoring / operation system. FIG. 6 is a diagram illustrating an arrangement example of each monitor device and operation device of the remote monitoring / operation system. FIG. 7 is a diagram showing an operation panel of the operation device. FIG. 8 is an enlarged view of the monitor screen of the second monitor device that displays the control state. FIG. 9 is a diagram showing a display example of the monitor screen of the second monitor device that displays trend data.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 1 Single crystal pulling apparatus, 2 CZ furnace, 100 Control apparatus, 104 Transmission / reception part, 200 (200A-200D) In-furnace monitoring camera, 201 Transmission part, 300 Remote monitoring / operation system, 301, 302, 303, 304 Transmission / reception part , 310, 320, 330 First monitor device, 340, 350, 360 Second monitor device, 370 Operation device, 410, 420, 430, 440 Signal line

Claims (15)

In the CZ furnace, a crucible whose vertical position can be adjusted and a heat shielding plate whose vertical position can be adjusted are provided.
Multiple single crystals pulling up the single crystal through multiple processes including a specific process that should be manually operated to raise and lower the seed shaft and a specific process that should be manually operated to raise and lower the crucible or heat shield plate In a remote monitoring / operation device for a single crystal pulling device, which is configured to monitor and operate a plurality of single crystal pulling devices with a remote monitoring / operation system provided at a location remote from the pulling device,
Process detection means for detecting the current process of each of a plurality of single crystal pulling devices;
Monitoring information collecting means for collecting monitoring information including the current process of each of the plurality of single crystal pulling devices;
First transmission means for transmitting the monitoring information to a remote monitoring / operation system,
Remote monitoring and operation system
A first monitor device for displaying monitoring information for each single crystal pulling device on each divided screen obtained by dividing the monitor screen;
Split screen selection means for selecting a specific split screen from the split screens of the first monitor device;
A second monitor device for displaying the monitoring information of the selected specific divided screen on the monitor screen;
A seed axis operating means for operating the raising and lowering of the seed axis of the single crystal pulling apparatus corresponding to the selected specific divided screen;
Rise of the crucible or the heat shield of the single crystal pulling apparatus for a specific split screen selected, and a crucible or the heat shield plate operating means for operating the downward,
The crucible or heat shielding plate operation information of the seed axis operation information and the crucible or a heat shielding plate operating means of the seed shaft operating means, and second transmitting means for transmitting to the single crystal pulling apparatus for a specific split screen selected ,
In accordance with the transmitted seed axis operation information, control of the raising and lowering of the seed axis of the single crystal pulling device corresponding to the selected divided screen, and according to the transmitted crucible or heat shield plate operation information And a control means for controlling ascent and descent of the crucible or heat shielding plate of the single crystal pulling device corresponding to the selected specific divided screen. The remote monitoring / manipulating device for a single crystal pulling apparatus according to claim 1, wherein the monitoring information collected by the monitoring information collecting means includes information obtained by imaging the inside of the furnace of the single crystal pulling apparatus. The remote monitoring / operation device for a single crystal pulling apparatus according to claim 1, wherein the monitoring information collected by the monitoring information collecting means includes information indicating a control state of the single crystal pulling apparatus. The remote monitoring / manipulating device for a single crystal pulling apparatus according to claim 1, wherein the monitoring information collected by the monitoring information collecting means includes trend data indicating a history of control parameters of the single crystal pulling apparatus. The monitoring information collected by the monitoring information collecting means includes information obtained by imaging the inside of the furnace of the single crystal pulling apparatus, information indicating the control state of the single crystal pulling apparatus, and trend data indicating a history of control parameters of the single crystal pulling apparatus. Including any two types of monitoring information or these three types of monitoring information,
The first monitor device has two or three monitor screens corresponding to two types of monitoring information or three types of monitoring information,
The second monitor device has two or three monitor screens corresponding to two types of monitoring information or three types of monitoring information, The remote monitoring of a single crystal pulling device according to claim 1 -Operating device. An imaging means for imaging the inside of a furnace of a plurality of single crystal pulling devices at a plurality of different viewpoints,
A viewpoint in the furnace to be imaged is associated in advance for each step of pulling the single crystal,
Each time the single crystal pulling process shifts, the first transmitting means transmits monitoring information including an image captured by the imaging means at the viewpoint corresponding to the shifted process to the remote monitoring / operation system. The apparatus for remotely monitoring and operating a single crystal pulling apparatus according to claim 1, wherein: 7. The single crystal pulling apparatus remote monitoring / operating device according to claim 6, wherein a plurality of imaging units corresponding to a plurality of viewpoints are provided. The seed axis operating means and the crucible or heat shielding plate operating means of the remote monitoring and operating system are:
An operation device that generates an operation signal independently of the processing performed by the operation unit of the first monitor device and the second monitor device, and generates an operation signal according to the operation of the operator,
The second transmission means includes
A signal line that is independent of a signal line that transmits an operation signal generated by the seed axis operation means and the crucible or heat shielding plate operation means to the signals generated by the operation units of the first monitor device and the second monitor device. 2. The apparatus for remotely monitoring and operating a single crystal pulling apparatus according to claim 1, wherein the transmitting means is a transmitting means for transmitting to the corresponding single crystal pulling apparatus via the. The operation element is a push button, and an operation signal for operating the single crystal pulling apparatus is generated only while the push button is pushed or every time the push button is pushed,
9. The apparatus for remotely monitoring and operating a single crystal pulling apparatus according to claim 8, wherein the control means operates the single crystal pulling apparatus according to the operation signal. Provided with error information collection means for collecting error information of a plurality of single crystal pulling devices,
The first transmission means is
Monitoring information including the error information is transmitted to a remote monitoring / operation system,
The first monitor device and the second monitor device of the remote monitoring / operation system are:
The error information for each single crystal pulling device is displayed on the monitor screen.
Remote monitoring and operation system
Selecting one or more specific single crystal pulling devices from each single crystal pulling device, and having an error handling operation means for performing an operation to deal with an error;
Transmission means for transmitting the operation information of the error handling operation means to the corresponding single crystal pulling device;
2. The apparatus for remotely monitoring and operating a single crystal pulling apparatus according to claim 1, further comprising control means for controlling the single crystal pulling apparatus in accordance with the transmitted operation information of the error handling operation means. In the monitor screen, the display portion corresponding to the single crystal pulling apparatus in which an error has occurred is displayed in a display mode different from the display portions corresponding to other single crystal pulling apparatuses in which no error has occurred. The remote monitoring and operating device for a single crystal pulling device according to claim 10. The remote monitoring / operation device for a single crystal pulling apparatus according to claim 10, wherein the error handling operation means is for operating an operation button displayed on the monitor screen of the second monitor device. The operation to deal with the error is an operation for emergency stop of the single crystal pulling device,
The remote monitoring / operation device for a single crystal pulling apparatus according to claim 10, wherein the control means makes an emergency stop of the single crystal pulling apparatus according to operation information of the error handling operation means. Trend data collecting means for collecting trend data indicating the history of control parameters of a plurality of single crystal pulling devices,
The first transmission means is
Sends monitoring information including trend data to a remote monitoring / operation system.
The first monitor device and the second monitor device of the remote monitoring / operation system are:
The actual monitoring data of each single crystal pulling apparatus is displayed on a monitor screen together with the trend data serving as a reference. The remote monitoring / manipulating apparatus for a single crystal pulling apparatus according to claim 1. When the deviation between the actual trend data value and the reference trend data value exceeds a predetermined threshold, the display mode is displayed on the monitor screen to call attention. 15. The remote monitoring / operating device for a single crystal pulling apparatus according to claim 14.

Images