JP4815955B2 - Fine movement position adjusting device and ultra-precision machining device using the same - Google Patents

Description

  The present invention relates to a fine movement position adjustment device that finely moves a tool or the like and adjusts the position thereof, and an ultraprecision machining apparatus that uses the fine movement position adjustment device.

2. Description of the Related Art Conventionally, fine movement position adjustment of a workpiece or the like attached to a movable part by moving the movable part is performed. Therefore, in the fine movement stage described in Patent Document 1, as shown in FIG. 1 of Patent Document 1, the movable part 1, the outer frame 2, the rigid body 10, the movable part 1, the rigid body 10, and the rigid body 10 A pair of double parallel spring mechanisms 3 that connect the frame 2 are formed by cutting out from a single thick plate. A ball screw mechanism is provided on the central axis of the outer frame 2, and the movable portion 1 is brought into contact with the tip of the screw shaft 42 by the spring force of the compression spring 6 interposed between the movable portion 1 and the outer frame 2. Yes. When the screw shaft 42 is rotated via the bellows coupling 8 by the motor 9, the screw shaft 42 is slightly moved, and the movable portion 1 is straight along the center line against the spring force of the compression spring 6. It has been moved.
Japanese Unexamined Patent Publication No. 2000-19415 (pages 2, 3 and 1)

   Recently, the functions and shapes of lenses have become complicated, and lenses and lens molds are required to be processed with extremely high shape accuracy. In the ultra-precision machining apparatus that moves the tool table 55 on which the tool T is fixed in the X-axis and Z-axis directions perpendicular to each other and processes the mold surface on the end surface of the workpiece W that is rotationally driven, as shown in FIG. With the tip R of the tool T aligned with the B axis, the tool base 55 is turned around the B axis so that the axial direction L of the tool T matches the normal direction N of the processing surface WS. Is called. In order to accurately match the tip R of the tool T with the B-axis line, it is necessary to finely move the tool base 55 to which the tool T is attached in the X-axis and Z-axis directions to adjust the position. However, in the conventional fine movement stage, since the position of the movable portion 1 can be adjusted only in one axial direction, it is necessary to stack two fine movement stages in order to make the tip R of the tool T coincide with the B axis. The equipment becomes complicated and large, and labor is required for assembling adjustment, resulting in high costs.

  The present invention has been made to solve the conventional problems, and has a simple and compact configuration in which a movable part is finely moved in two axial directions perpendicular to each other so that a tool attached to the movable part can be finely adjusted. It is an object of the present invention to provide a fine-movement position adjusting device that can be made into an adjustable position.

In order to solve the above-mentioned problem, the structural feature of the invention described in claim 1 is that longitudinal directions perpendicular to each other in a plane perpendicular to the vertical direction and through the base in the vertical direction are passed through the base. A plurality of slits extending in the lateral direction, the slits extending in the longitudinal direction inside the pair of lateral slits and the pair of lateral slits, A pair of vertical slits that are not connected to the pair of horizontal slits, a plurality of horizontal connecting slits that are connected to both ends of each of the pair of vertical slits and that are opposed to the inner sides of both ends of the pair of horizontal slits, A pair of inner slits, and a pair of inner slits parallel to the transverse slit, and both ends of each of the pair of inner slits. A plurality of vertical connection slits facing each other on the inner side of the end portion, and forming an outer peripheral frame by the pair of horizontal slits and the pair of vertical slits, and by the horizontal slits and the inner slits, A pair of intermediate portions extending in the lateral direction is formed, and the intermediate portion is disposed in the longitudinal direction with respect to both end portions of the opposite vertical side portions of the outer peripheral frame by both end portions of the lateral slit and the lateral connection slit. A plurality of horizontal links that are flexibly connected to each other, a fine movement base is formed by the pair of inner slits and the vertical connection slits, and each intermediate portion is formed by both ends of the vertical slits and the vertical connection slits. formed by a plurality of vertical links is formed, provided on one of the two lateral sides of the peripheral frame said slit of said intermediate portion connecting to allow flexible the fine movement stage in the transverse direction with respect to A vertical fine movement device for finely moving said intermediate portion in the longitudinal direction by pressing the the surface, said fine stage by pressing the surface formed by the slits of said fine stage is provided on one of the two vertical side portions And a lateral fine movement device that finely moves the movement of the horizontal direction.

The structural feature of the invention according to claim 2 is that, in claim 1, the slits forming both ends of the horizontal link and both ends of the vertical link are formed with bent portions that are bent in an arc shape. It is.
According to a third aspect of the present invention, in the first or second aspect , the vertical fine movement device and the horizontal fine movement device each include a reduction gear that reduces the rotation of the input member, and the rotation of the reduction gear. A conversion mechanism for converting the output member into vertical and horizontal fine movements, and a fine movement range of the output member, a position where the intermediate portion and the fine movement table are pushed in a predetermined amount from a free state, and a certain amount from the position. And a regulating device that regulates the rotation of the input member so as to regulate between the positions.

According to a fourth aspect of the present invention, there is provided a structural feature according to any one of the first to third aspects, wherein the vertical movement and the vertical movement table that are coarsely moved in the vertical direction and the horizontal direction are perpendicular to each other. The base is placed on a coarse moving table that is coarsely moved in the direction, the horizontal direction, and the vertical direction .

  According to a fifth aspect of the present invention, there is provided a structural support for supporting a workpiece so as to be rotationally driven, and relative to the X-axis, Z-axis, and Y-axis directions perpendicular to the workpiece support. A tool table to be moved, and a rotating table mounted on the tool table so that the tool table supporting the tool is fixed and can be driven to rotate about the B axis parallel to the Y axis. The rotary table is moved relative to the tool table at least in the X-axis and Z-axis directions, and the tool axis coincides with the normal of the workpiece in a state where the tip of the tool coincides with the B-axis. 5. An ultra-precision machining apparatus that turns the B workpiece around the B-axis and processes the workpiece with the tool, wherein the tool table is moved through the fine movement position adjusting device according to claim 1. Provided in Is Rukoto.

  In the invention according to claim 1 configured as described above, an outer peripheral frame, and a pair of intermediate portions that are flexibly coupled to both ends of both vertical sides opposed to the outer peripheral frame, respectively, A fine movement base that is flexibly connected to both ends of a pair of intermediate portions in a lateral direction is formed by cutting out the base from a single base by slits that vertically penetrate the base, and the intermediate portion is a vertical fine movement device. Is finely moved in the vertical direction, and the fine movement table is finely moved in the horizontal direction by the horizontal fine movement device.

  As a result, it is possible to adjust the position of an object requiring position adjustment in the biaxial direction very accurately, and it is possible to easily provide a fine movement position adjusting device that has a simple configuration and can be miniaturized at low cost.

In the invention according to claim 3 configured as described above, the fine movement range of the output member of the vertical fine movement device and the horizontal fine movement device is constant from the position where the intermediate portion and the fine movement table are pushed in a predetermined amount from the free state and the position. In addition, the backlash of the vertical fine movement device and the horizontal fine movement device is removed, and the intermediate part and fine movement table are precisely moved within the appropriate fine movement range with high precision. Adjusted.

In the invention according to claim 4 configured as described above, the base in which the fine movement table is cut out by the slit is placed on the coarse movement table that is coarsely moved in the vertical and horizontal directions perpendicular to each other. As a result, an object fixed on the fine movement table and requiring position adjustment can be quickly and surely adjusted in the vicinity of a predetermined position, for example, within the field of view of the position adjustment microscope, by coarse movement of the coarse movement table.

Further, in another invention according to claim 4 configured as described above, the base on which the fine movement base is cut out by the slit is coarsely moved in the vertical direction, the horizontal direction and the vertical direction perpendicular to each other. Since the object is placed on the moving table, the object that needs to be adjusted on the fine moving table is quickly moved from the three-dimensional direction to the vicinity of the predetermined position, for example, within the field of view of the position adjusting microscope. In addition, the rough position can be reliably adjusted.

  In the invention which concerns on Claim 5 comprised as mentioned above, a rotary table is a tool table so that the axis of a tool may correspond with the normal line of a workpiece in the state in which the front-end | tip of a tool corresponds with the B-axis parallel to a Y-axis. A tool provided on a rotary table in an ultra-precise machining apparatus that is turned about the B-axis and the workpiece support table and the tool table are moved relative to each other at least in the X-axis and Z-axis directions to process the workpiece. By adjusting the position of the table with the fine movement position adjusting device according to any one of claims 1 to 3, the tip of the tool provided on the tool table can be easily and reliably connected to the B-axis which is the rotation center of the rotary table. Can match.

   DESCRIPTION OF THE PREFERRED EMBODIMENTS Embodiments of a fine movement position adjusting device and an ultraprecision machining device using the same according to the present invention will be described below with reference to the drawings. 1 and 2, the bed 1 of the ultraprecision machining apparatus MT is installed on a pedestal 2 via a vibration isolation table 3. A tool table 4 is mounted on the front surface of the bed 1 by a guide mechanism 5 so as to be linearly movable in the vertical Y-axis direction. The tool table 4 is linearly moved in the Y-axis direction by a linear motor, the amount of movement is detected by a linear scale, and the position is controlled by feedback.

   A slide table 6 is mounted on the horizontal upper surface of the bed 1 so as to be linearly movable in the left and right X-axis directions by a guide mechanism 7. The slide table 6 is linearly moved in the X-axis direction by a linear motor 8, and the amount of movement is detected by a linear scale 9 and fed back to control the position. A work table 10 is mounted on the slide table 6 by a guide mechanism 11 so as to be linearly movable in the front and rear Z-axis directions. The workpiece support 10 is linearly moved in the Z-axis direction by a linear motor, the amount of movement is detected by a linear scale 12, and the position is controlled by feedback.

   A rotary table 15 is mounted on the tool table 4 so as to be rotatable about a B axis parallel to the Y axis, and is driven to rotate by a servo motor (not shown). A guide plate 18 is fixed on the rotary table 15, and an intermediate slide 20 is guided laterally on the guide plate 18 by a guide mechanism 19. This lateral direction is parallel to the Z-axis direction when the rotary table 15 is indexed to the original position. A feed screw 21 whose shaft movement is restricted by the guide plate 18 and is rotatably supported is screwed into the intermediate slide 20, and the rotation of the feed screw 21 coarsely moves the intermediate slide 20 in the lateral direction. The coarse motion table 17 is guided in the vertical direction by the guide mechanism 22 on the intermediate slide 20. This vertical direction is parallel to the X-axis direction when the rotary table 15 is indexed to the original position. A feed screw 23 that is supported by the intermediate slide 20 so as to be able to rotate is supported by the coarse motion table 17, and the coarse motion table 17 is coarsely moved in the vertical direction by the rotation of the feed screw 23. Thereby, the coarse movement table 17 coarsely moved in the vertical direction and the horizontal direction is provided on the rotary table 15.

   A guide 24 is fixed on the coarse motion table 17, and an inclined body 25 is guided to the guide 24 in the lateral direction by a guide mechanism 26. On the upper surface of the inclined body 25 inclined in the lateral direction, a coarse moving table 27 is placed by being guided by a guide mechanism 28. A vertical guide mechanism 29 is provided between the coarse moving table 27 and the guide 24. The coarse moving table 27 is guided by the vertical guide mechanism 29 and can move only in the vertical direction and the vertical direction perpendicular to the horizontal direction. Yes. When the feed screw 30 whose shaft movement is regulated by the guide 24 and rotatably supported is screwed into the inclined body 25, and the inclined body 25 is moved in the lateral direction by the rotation of the feed screw 30, the coarse moving base 27 is moved. It is finely moved in the vertical direction by the inclination of the upper surface of the inclined body 25. Thus, on the upper surface of the turntable 15, the coarse motion table 27 that is coarsely moved in the vertical direction, the horizontal direction, and the vertical direction is provided.

  A base 30 is placed on the coarse moving base 27. As shown in FIG. 3, the base 30 is provided with an outer peripheral frame 32 and an outer periphery within the base 30 by slits 31 penetrating the base 30 in the vertical direction. A pair of intermediate portions 35 that are flexibly connected to both ends of both vertical side portions 32a of the frame 32 in a vertical direction and a pair of intermediate portions 35 that are opposed to each other are flexible in the horizontal direction. A connected fine movement table 36 is formed. That is, an outer peripheral frame 32 is formed on the base 30 by slits 31a and 31b extending in the vertical and horizontal directions perpendicular to each other in a plane perpendicular to the vertical direction. Each of the lateral slits 31b extending in the lateral direction is provided with eight bent portions 31c that are bent inward in an arc shape at both ends of a pair of opposing lateral side portions 32b. Both ends of each longitudinal slit 31a extending in the longitudinal direction are connected to lateral coupling slits 31d that respectively oppose both end portions of the lateral slit 31b. The lateral coupling slit 31d has a circular outer side facing each bent portion 31c. Eight bent portions 31e that are bent in an arc shape are provided. Between the both ends of the horizontal slit 31b and the horizontal connecting slit 31d, four horizontal links 34b having flexible portions 33 formed at both ends by eight bent portions 31c and bent portions 31e provided at predetermined intervals. Is cut out.

  Each of the vertical slits 31a extending in the vertical direction is provided with eight bent portions 31c that are bent inward in an arc shape at both ends of a pair of opposing vertical side portions 32a at predetermined intervals. A longitudinal coupling slit 31g that is opposite to both ends of the longitudinal slit 31a is connected to both ends of each inner slit 31f extending in the lateral direction inside the lateral coupling slit 31d, and each bent portion 31c is connected to the longitudinal coupling slit 31g. 8 bent portions 31e that are bent outward in an arc shape are provided. Between the both ends of the vertical slit 31a and the vertical connection slit 31g, four vertical links 34a having flexible portions 33 formed at both ends by eight bent portions 31c and bent portions 31e provided at predetermined intervals. Is cut out.

  A pair of intermediate portions 35 are cut out by the center portion of the horizontal slit 31 b and the inner slit 31 f, both ends of the pair of intermediate portions 35 are connected to the horizontal link 34 b by the flexible portion 33, and the horizontal link 34 b is connected to the outer peripheral frame 32. The pair of intermediate portions 35 can be flexed in the vertical direction at both end portions of the opposing vertical side portions 32a of the outer peripheral frame 32 by being connected to both end portions of the opposing vertical side portions 32a by the flexible portions 33. Are connected to each other. The fine movement table 36 is cut out by the inner slit 31f and the vertical connection slit 31g, the central portions of both ends in the horizontal direction of the fine movement table 36 are connected to the vertical link 34a by the flexible portion 33, and the vertical link 34a is connected to the pair of intermediate portions 35. By being connected to opposite ends by the flexible portion 33, the fine movement base 36 is connected to both ends of the pair of intermediate portions 35 so as to be flexible in the lateral direction.

  A vertical fine movement device 37 and a horizontal fine movement device 38 are provided on the outer wall surfaces of one horizontal side portion 32b and one vertical side portion 32a of the outer peripheral frame 32, respectively. Since the vertical fine movement device 37 and the horizontal fine movement device 38 have the same configuration, the vertical fine movement device 37 will be described. A stepped hole 39 is provided in the central portion of one horizontal side portion 32 b in the vertical direction, a large-diameter hole is opened in the outer wall surface, and a small-diameter hole is opened in the inner wall surface facing the intermediate portion 35. The small-diameter cylindrical portion 40a of the base 40 of the vertical fine movement device 37 is fitted and positioned in the large-diameter hole, and the large-diameter cylindrical portion 40b is fixed to the outer wall surface of the lateral side portion 32b with a bolt 41. On the inner peripheral surface of the small-diameter cylindrical portion 40a, a female screw that engages with a male screw 42a engraved on the outer peripheral surface of the output member 42 is engraved, and a contact portion 42b that projects from the tip of the output member 42 is intermediate. It is in contact with the central portion of the portion 35.

A fitting hole formed coaxially with the female screw on the rear end surface of the large-diameter cylindrical portion 40b of the base 40 is a fitting projecting from the front end surface of the housing 44 of the ultra-small harmonic drive (registered trademark) speed reducer 43. The front end surface is in contact with the end surface of the large-diameter cylindrical portion 40b and is fixed by being stopped by a pin. The rear end portion of the large-diameter cylindrical portion 40b is fitted with a superposition hole formed at the front end of the casing 45, and the bottom surface of the casing 45 is fixed to the rear end surface of the large-diameter cylindrical portion 40b with a bolt. ing. A housing 44 is fitted into the storage hole 45 a formed in the casing 45. In the harmonic drive speed reducer 43, an input shaft 46 and an output shaft 47 project in the vertical direction from both ends of the housing 44, and the rotation of the input shaft 46 is reduced to one-hundred by the harmonic mechanism to rotate the output shaft 47. It is like that.

  A bottomed hole formed in the front end surface of the input member 48 is fitted to the rear end of the input shaft 46, and the input member 48 is concentrically fixed by a bolt 49 inserted from the rear end surface. The output shaft 47 is fitted in the center hole of the output member 42 so as to be relatively movable in the axial direction while being restricted in rotation. Accordingly, the harmonic drive speed reducer 43 and the like constitute a speed reducer that reduces the rotation of the input member 48, and the male screw 42a engraved on the output member 42 and the female screw engraved on the small diameter cylindrical portion 40a are output shaft 47. The converter 50 is configured to convert the rotation of the output member 42 into the vertical fine movement of the output member 42.

   Between the input member 48 and the casing 45, the fine movement range of the output member 42 is restricted between a position where the intermediate portion 35 is pushed a predetermined amount from the free state and a position where the intermediate portion 35 is pushed a certain amount from the position. Further, a regulating device 51 that regulates the rotation of the input member 48 is provided. The input member 48 is formed with a large-diameter handle portion 48a and a male screw portion 48b in which a male screw is engraved on a small-diameter outer peripheral surface, and the male screw portion 48b is engraved on the inner peripheral surface of the annular portion 52a of the regulating member 52. The internal thread is screwed. An engaging portion 52b is projected from the front end surface of the annular portion 52a, and is engaged with an engaging groove 45b recessed in the rear end surface of the casing 45 so as to be restricted in rotation and movable in the axial direction. Thereby, the restricting member 52 is moved in the axial direction according to the rotation direction of the input member 48. A screw member 53 for adjusting the advance position of the restricting member 52 in contact with the bottom surface of the engaging groove 45 b is screwed into the engaging portion 52 b, and the restricting member 52 is connected to the step of the input member 48. It is rotated between a rotation position when it comes into contact with the portion and a rotation position when the screw member 53 comes into contact with the bottom surface of the engagement groove 45b. Then, the output member 42 pushes the intermediate portion 35 from the free state by a predetermined amount at the rotational position of the input member 48 when the regulating member 52 abuts on the stepped portion of the input member 48, and the screw member 53 engages with the engagement groove 45b. At the rotational position of the input member 48 when contacting the bottom surface, the intermediate portion 35 is adjusted so as to be pushed further by a certain amount from the position where the intermediate portion 35 is pushed from the free state. A lock nut 54 is screwed onto the outer periphery of the annular portion 52a. After the input member 48 is adjusted and rotated, the lock nut 54 is tightened and pressed against the rear end surface of the casing 45, whereby the axial movement of the regulating member 52 is performed. The input member 48 is restricted and locked at the adjusted rotational position.

   In the lateral fine movement device 38, the abutting portion 42 b protruding from the tip of the output member 42 is brought into contact with the center portion of the fine movement table 36, and the regulating device 51 is in a state where the fine movement table 36 is in a free state within the fine movement range of the output member 42. The rotation of the input member 48 is regulated so as to be regulated between a position where it is pushed a predetermined amount from the position and a position where it is pushed a certain amount from that position.

   A tool base 55 is fixed on the fine movement base 36, and a tool T is attached to the tool base 55 such that the tool tip R coincides with the B axis and the tool axis is directed in the lateral direction. A spindle 57 that is rotationally driven by a motor 56 is supported on the workpiece support 10 so as to be rotatable about a C axis parallel to the Z axis, and a workpiece W is detachably attached to the tip of the spindle 57 by a chuck. .

   A light source 58 emits parallel light rays parallel to the X-axis direction, and is fixed to the front surface of the bed 1 so as to irradiate the tool tip R. Reference numeral 59 denotes a microscope for measuring the position of the tool tip R irradiated to the light source 58 in an enlarged manner so that the optical axis is parallel to the X axis on the opposite side of the light source 58 with the tool T attached to the tool table 55 interposed therebetween. It is fixed to the bed 1. The position is adjusted so that the intersection of the XZ plane including the C axis and the B axis coincides with the intersection of the horizontal reference line and the vertical reference line drawn in the field of view of the microscope 59.

   In order to make the tip R of the tool T mounted on the tool table 55 coincide with the B axis, the feed screw 21 is rotated and the intermediate is performed while the tool table 4, the slide table 6 and the rotary table 15 are moved to the original positions. The slide 20 is coarsely moved in the horizontal direction, the feed screw 23 is rotated, the coarse movement table 17 is coarsely moved in the vertical direction, the feed screw 30 is rotated, and the coarse moving table 27 is coarsely moved in the vertical direction. The tip R of the tool T is reliably and rapidly moved into the field of view of the microscope 59 by the movement of the coarse moving table 27 in the horizontal direction, the vertical direction, and the vertical direction.

   The tool table 4 is finely moved in the Y-axis direction by the linear motor so that the rake face of the tip R of the tool T coincides with the horizontal reference line, and the rake face of the tool tip R coincides with the XZ plane including the C axis. Next, when the input member 48 of the lateral fine movement device 38 is rotated to make the tool tip R coincide with the vertical reference line, the rotation of the input member 48 is decelerated by the harmonic drive speed reducer 43 and the output member 42 rotates. Then, the output member 42 is finely moved in the axial direction by the screw action of the male screw 42 a screwed into the base 40. As a result, the fine movement table 36 is pushed by the abutting portion 42b of the output member 42, and each of the four vertical links 34a that respectively connect the center portions of both ends of the fine movement table 36 in the lateral direction to both ends of the pair of intermediate portions 35. The flexible portions 33 formed at both ends are bent, the fine movement table 36 is finely moved in the lateral direction accurately, and the tip R of the tool T attached to the tool table 55 fixed on the fine movement table 36 is moved in the Z-axis direction. Slightly moved to match the vertical reference line. In this state, the lock nut 54 is tightened and the rotation of the input member 48 is locked.

   When the input member 48 of the vertical fine movement device 37 is rotated, the output member 42 is finely moved in the axial direction, one intermediate portion 35 is pushed by the contact portion 42b of the output member 42, and both ends of the pair of intermediate portions 35 are moved. The flexible portions 33 formed at the both ends of the four horizontal links 34b respectively connecting the opposite ends of the vertical side portions 32a facing each other are bent, and the pair of intermediate portions 35 and the fine movement table 36 are moved in the vertical direction. The tool tip R is finely moved in the X-axis direction so that the tool tip R forms an image in the field of view of the microscope 59 without being out of focus, and the tool tip R coincides with the B-axis. In this state, the lock nut 54 is tightened and the rotation of the input member 48 is locked.

  In order to process a curved surface on the workpiece W by the tip R of the tool T, the slide table 6 is linearly moved in the X-axis direction by the linear motor 8, and the workpiece support 10 is linearly moved in the Z-axis direction by the linear motor. . At this time, the rotary table 15 is turned around the B axis by the servomotor so that the axis of the tool T coincides with the normal of the workpiece W in a state where the tip R of the tool T coincides with the B axis. As a result, the normal direction of the tool T coincides with the normal direction of the machining surface of the workpiece W, and the cutting point in contact with the machining surface of the tool tip R does not change, so that a desired curved surface can be obtained with high shape accuracy. It can be processed into the end face of W.

  In the above embodiment, the tool T is fixed to the tool table 55, but the spindle is tilted with respect to the Z axis on the tool table 55 so that it can be driven to rotate, and a rotary tool such as a grinding wheel is attached to the tip of the spindle. You may make it attach.

The figure which shows the whole precision processing apparatus which concerns on embodiment of this invention. Sectional drawing of the fine movement position adjustment apparatus which concerns on embodiment of this invention. Sectional drawing cut | disconnected along the 3-3 line of FIG. The figure which shows a processing state.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 ... Bed, 2 ... Base, 4 ... Tool table, 5, 7, 11, 19, 22, 26, 28, 29 ... Guide mechanism, 6 ... Slide table, 8 ... Linear motor, 9, 12 ... Linear scale, 10 ... Work support table, 15 ... Rotary table, 17 ... Coarse motion table, 18 ... Guide plate, 20 ... Intermediate slide, 21,23,30 ... Feed screw, 24 ... Guide, 25 ... Inclined body, 27 ... Coarse motion table 31 ... Slit, 32 ... Outer frame, 32a ... Vertical side portion, 32b ... Horizontal side portion, 33 ... Flexible portion, 34a ... Vertical link, 34b ... Horizontal link, 35 ... Intermediate portion, 36 ... Fine adjustment table, 37 ... Vertical fine movement device, 38 ... Horizontal fine movement device, 40 ... Base, 42 ... Output member, 42a ... Male screw, 42b ... Abutting part, 43 ... Harmonic drive reducer, 44 ... Housing, 45 ... Casing, 46 ... Input shaft, 47 ... output shaft, DESCRIPTION OF SYMBOLS 8 ... Input member, 50 ... Converter, 51 ... Restriction device, 52 ... Restriction member, 53 ... Screw member, 54 ... Lock nut, 55 ... Tool stand, 56 ... Motor, 57 ... Main shaft, 58 ... Light source, 59 ... Microscope , MT ... Ultra-precision machining equipment, T ... Tool, W ... Workpiece.

Claims (5)

A plurality of slits extending vertically and laterally perpendicular to each other in a plane perpendicular to the vertical direction and penetrating the base vertically in the vertical direction are formed in the base.
The slit is
A pair of lateral slits extending in the lateral direction;
A pair of vertical slits that are inside the pair of horizontal slits and extend in the vertical direction and are not connected to the pair of horizontal slits;
A plurality of laterally connected slits connected to both ends of each of the pair of vertical slits and facing the inner sides of both ends of the pair of horizontal slits;
A pair of inner slits parallel to the horizontal slit, inside the pair of vertical slits and inside the horizontal connecting slit;
A plurality of longitudinally connected slits connected to both ends of each of the pair of inner slits and facing the inner sides of both ends of the pair of longitudinal slits;
With
An outer peripheral frame is formed by the pair of horizontal slits and the pair of vertical slits,
A pair of intermediate portions extending in the lateral direction are formed by the lateral slits and the inner slits,
The lateral slits and the lateral coupling slits form a plurality of lateral links that flexibly couple the intermediate portion to the longitudinal ends of the opposing vertical sides of the outer peripheral frame. ,
A fine movement base is formed by the pair of inner slits and the vertical connection slit,
A plurality of vertical links that flexibly connect the fine movement base in the lateral direction with respect to each of the intermediate portions by both ends of the vertical slit and the vertical connection slit,
A vertical fine movement device that finely moves the intermediate portion in the vertical direction by pressing against the surface formed by the slit of the intermediate portion provided on one of both lateral sides of the outer peripheral frame, and one of the two vertical sides A fine movement position adjusting device comprising: a horizontal fine movement device that finely moves the fine movement table in a horizontal direction by being pressed against a surface formed by the slit of the fine movement table .   2. The fine movement position adjusting device according to claim 1, wherein the slits forming both ends of the horizontal link and both ends of the vertical link are formed with bent portions that are bent in an arc shape. 3. The vertical fine movement device and the horizontal fine movement device according to claim 1 , wherein the vertical fine movement device and the horizontal fine movement device are a reduction gear that decelerates rotation of the input member, and a conversion mechanism that converts the rotation of the reduction gear into vertical and horizontal fine movements of the output member. And the rotation of the input member so as to restrict the fine movement range of the output member between a position where the intermediate part and the fine movement table are pushed a predetermined amount from the free state and a position where the intermediate member and the fine movement table are pushed a certain amount further from the position. A fine movement position adjusting device, comprising: a restriction device for restricting each of the two. In any one of claims 1 to 3, wherein the longitudinal and lateral directions on Sododai which are respectively flutter or are respectively flutter in mutually orthogonal the longitudinal direction, transverse direction and vertical direction crude A fine movement position adjusting device, wherein the base is placed on a moving table.   A workpiece support table that supports a workpiece so as to be rotatable, a tool table that is relatively moved in the X-axis, Z-axis, and Y-axis directions perpendicular to the workpiece support table, and a tool table that supports the tool. A rotary table mounted on the tool table so that it can be driven to rotate about a B axis parallel to the Y axis, and the workpiece support table and the tool table are relative to each other at least in the X axis and Z axis directions. And moving the rotary table about the B axis so that the axis of the tool coincides with the normal of the workpiece while the tip of the tool coincides with the B axis. An ultraprecision machining apparatus for machining, wherein the tool table is provided on the rotary table via the fine movement position adjusting device according to any one of claims 1 to 4. .

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