JP4792163B2 - Microscope equipment - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a microscope apparatus using epi-illumination.
[0002]
[Prior art]
Conventionally, as shown in FIG. 5A, a microscope is provided with a stage 3 on which a sample is placed on a movable table 2 provided on a microscope main body 1 so as to be movable in the vertical direction. A method of focusing by moving up and down with respect to the revolver 5 having the objective lens 4 fixed on the main body 1 side is used, but when the sample is heavy or the sample must be fixed (For example, when the position in the height direction of the sample cannot be changed in the system with the manipulator, the assembly work is performed while observing the sample). As shown in b), a revolver 5 having an objective lens 4 is provided on a movable table 2 provided on the microscope body 1 so as to be movable in the vertical direction, and the revolver 5 is fixed to the microscope body 1 side. It is that to be able to select a method of performing focusing and moved vertically relative.
[0003]
By the way, in such a microscope, Koehler illumination is often used as epi-illumination. FIG. 6 shows an epi-illumination optical system for explaining such Koehler illumination. In the drawing, principal rays of the illumination optical system are shown.
[0004]
In this case, the illumination light emitted from the light source 11 becomes a substantially parallel light beam by the collector lens 12, is condensed by the relay lens 13, and is focused by the aperture stop 14. The light beam that has passed through the aperture stop 14 is incident on the half mirror 16 via the relay lens 15, and the reflected light beam is at the pupil position (back focal position of the objective lens) 18 of the objective lens 4. The sample 19 is irradiated with light through the lens group 4a constituting the objective lens 4 after focusing again. On the other hand, the reflected light of the sample 19 irradiated with the illumination light passes through the objective lens 4, passes through the half mirror 16, enters the imaging lens 20 as a parallel beam, forms an image, and forms an image through the prism 21. Is observed.
[0005]
According to such Koehler illumination, the sample 19 can be illuminated uniformly even when the objective lens 4 having different magnifications is used due to the optical conjugate relationship between the pupil position of the objective lens 4 and the aperture stop 14. . Further, an aperture stop whose diameter can be changed by a diaphragm blade or the like is used. However, since the aperture stop 14 is in a conjugate position with the light source 11, even if the diameter of the aperture stop 14 is reduced, The illumination light can be reduced uniformly over the entire field of view. Further, by changing the diameter of the aperture stop 14 in accordance with the numerical aperture of the objective lens 4, it is possible to optimize the illumination, and further, by changing the aperture diameter with respect to the numerical aperture of the objective lens 4. It is also possible to change the illumination contrast and depth of focus. Further, by focusing the light beam 23 on the optical axis by the field stop 24 arranged at a conjugate position with the sample 19, the field of view can be changed depending on the diameter of the field stop 24.
[0006]
[Problems to be solved by the invention]
In this case, in the method of moving the stage 3 side shown in FIG. 5A, when the Koehler illumination described in FIG. 6 is adopted, the microscope main body 1 is placed on the optical axis of the illumination light from the light source 11. An epi-illumination projection tube 6 having a collector lens 12, a relay lens 13, an aperture stop 14, a field stop 24, a relay lens 15 and a half mirror 16 is disposed. Since the distance between them is fixed and the distance between them can always be constant, there is no problem with the optical advantage that this distance can be reduced.
[0007]
However, the method of moving the revolver 5 shown in FIG. 5B changes the distance between the pupil position of the objective lens 4 and the epi-illumination projection tube 6 due to the vertical movement of the revolver 5. The effect of lighting cannot be expected.
[0008]
Therefore, conventionally, as disclosed in Japanese Utility Model Publication No. 3-55931, a moving mechanism that enables the aperture stop to move together with the relay lens is provided, and the aperture stop and the relay lens are moved a predetermined distance by such a moving mechanism. There is known a method of keeping the pupil position of the objective lens and the aperture stop in an optical conjugate relationship by expanding and contracting the parallel light beam.
[0009]
However, providing such a special moving mechanism inside the epi-illumination tube requires that the optical cylinder shape, etc. must be significantly changed if it includes the operation part of the aperture stop. The incident-light projection tube is large and expensive.
[0010]
Japanese Patent Laid-Open No. 10-73768 discloses that the position of the aperture stop is switched or provided separately in order to correct the change in the pupil position of the objective lens. A special moving mechanism as described above is required, as is the case where the diaphragm is moved separately.
[0011]
The present invention has been made in view of the above circumstances, and the relationship between the pupil position of the objective lens and the aperture stop can always be maintained at the optical conjugate position, so that an optimal illumination effect can be expected and the cost can be reduced. An object of the present invention is to provide a microscope apparatus that can be used.
[0012]
[Means for Solving the Problems]
According to a first aspect of the present invention, there is provided an epi-illumination optical system for Koehler illumination in which illumination light from a light source is incident on a reflecting member through an optical path having at least an aperture stop, and a light beam reflected by the reflecting member is incident on an objective lens. a microscope apparatus having a vertical illuminator constituting an auxiliary optical element disposed between the first reflecting member blocks containing said reflecting member and for accommodating the reflecting member and the reflecting member with said aperture stop A second reflecting member block, wherein the first reflecting member block and the second reflecting member block selectively correspond to the movement of the pupil position of the objective lens relative to the reflecting member. It is arranged in an epi-illumination projection tube, and maintains an optical conjugate relationship between the aperture stop and the pupil position of the objective lens .
[0013]
According to a second aspect of the present invention, in the first aspect of the present invention, the incident light projection tube is provided with a lens that is disposed between the aperture stop and the reflecting member and forms an image of a light beam from the aperture stop. The auxiliary optical element is a concave lens that extends the imaging position of the light beam from the lens .
[0014]
According to a third aspect of the invention, in the invention of claim 1 or 2, wherein the vertical illuminator, the optical path, the diffusion plate close to the aperture stop is disposed between the aperture stop and the light source It is characterized by being.
[0016]
As a result, according to the present invention, the optical conjugate relationship between the pupil position of the objective lens of the epi-illumination optical system of the Koehler illumination and the aperture stop can be maintained, so that the illumination and aperture stop without unevenness can function. .
[0017]
Further, according to the present invention, since the basic unit of the microscope can be used in common, each unit can be provided at a minimum cost, and by preparing a plurality of reflecting member blocks together with each unit, different types of microscopes can be provided. Since it can be constructed, it can be economically advantageous.
[0018]
Furthermore, according to the present invention, the diffuser plate is arranged in the vicinity of the aperture stop, thereby correcting illumination unevenness due to aberration of off-axis light due to the change of the illumination optical system and a slight difference in the projection magnification of the light source. The difference from time can be made as inconspicuous as possible.
[0019]
Furthermore, according to the present invention, an intermediate unit or an intermediate lens barrel can be provided as an intermediate member in the optical path between the epi-illumination optical system and the objective lens, that is, in the observation system parallel light beam portion from the objective lens. Since the intermediate member can be inserted, it is possible to obtain a configuration suitable for systemization such as extraction of a light beam and addition of another optical system.
[0020]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, embodiments of the present invention will be described with reference to the drawings.
[0021]
(First embodiment)
FIG. 1 and FIG. 2 are schematic configuration diagrams of a microscope apparatus to which the present invention is applied. FIG. 1 shows a method for focusing on the stage side, and FIG. 2 shows a method for focusing on the objective lens side. Yes.
[0022]
First, FIG. 1 is an application of a method of moving the stage side in focus. In the figure, reference numeral 31 denotes a microscope main body, and this microscope main body 31 is provided upright on a horizontal base 31a and is provided with a body 31b. The epi-illumination projection tube 32 is directly attached to the upper portion of the body portion 31b by a bolt 30 in a direction parallel to the base 31a.
[0023]
The epi-illumination projection tube 32 constitutes an epi-illumination optical system for Koehler illumination, and is provided with a lamp house 35 having a light source 33 consisting of a point light source and a collector lens 34, and light of illumination light emitted from the light source 33. A collector lens 34, a relay lens 36, an aperture stop 37, a field stop 38, a relay lens 39, and a half mirror 40 as a reflecting member are disposed along the axis. In this case, the half mirror 40 is accommodated in the cube 41 which comprises a reflection member block. A plurality of such cubes 41 are accommodated in the cube unit 42 and can be selectively switched on the optical axis of the epi-illumination projection tube 32.
[0024]
A revolver 44 is provided at the tip of the epi-illumination projection tube 32. The revolver 44 is provided with a plurality of objective lenses 45, and by rotating the revolver 44, the objective lenses 45 can be selectively switched on the optical axis.
[0025]
On the other hand, a guide part 46 is formed in the body part 31 b of the microscope body 31 along the vertical direction, and a stage receiving part 47 is provided along the guide part 46 so as to be movable up and down. The stage receiving unit 47 is provided with a stage 49 on which the sample 48 is placed, and the stage 49 can be moved in the optical axis direction of the objective lens 45 by the vertical movement of the stage receiving unit 47. In this case, the stage 49 is moved up and down via a focusing mechanism (not shown) provided in the body 31b by rotating the focusing handle 50 disposed on the side surface of the microscope body 31, and the sample 63 is moved to the objective. The focus is adjusted to the focal position of the lens 45.
[0026]
In such a type of microscope, the illumination light emitted from the light source 33 is converted into a substantially parallel light beam by the collector lens 34, collected by the relay lens 36, and imaged by the aperture stop 37. Thereafter, the light beam that has passed through the aperture stop 37 is incident on the half mirror 40 via the relay lens 39, and the reflected light beam is at the pupil position of the objective lens 45 (the rear focal position of the objective lens) 51. The image is formed again, and the sample 48 is irradiated through the objective lens 45. On the other hand, the reflected light from the sample 48 passes through the objective lens 45, passes through the half mirror 40, and is observed as a parallel light beam through an imaging lens and an eyepiece lens (not shown).
[0027]
According to the microscope of this type, since the epi-illumination projection tube 32 constituting the epi-illumination optical system for Koehler illumination has a constant distance from the objective lens 45, the above-described advantage of Koehler illumination is obtained. In addition, since the incident-light projection tube 32 and the objective lens 45 can be attached at the closest distance, a wide field of view can be illuminated and observed.
[0028]
Next, FIG. 2 adopts a method of focusing and moving the objective lens side in which a part of the configuration shown in FIG. 1 is changed. Here, the same parts as those in FIG. Yes.
[0029]
In this case, the epi-illumination projection tube 32 is attached to the body 31 b of the microscope main body 31 by a bolt 60 via a raised spacer 61 having a predetermined height.
[0030]
On the base 31 a of the microscope main body 31, a stage receiver 62 is detachably provided by an ant or the like (not shown), and a stage 64 on which a sample 63 is placed is provided on the stage receiver 62.
[0031]
On the other hand, an objective arm 65 is provided in the guide portion 46 formed along the vertical direction of the body portion 31 b of the microscope main body 31, and can be moved up and down along the guide portion 46. A revolver 44 is provided at the tip of the objective arm 65, and the revolver 44 can be moved in the optical axis direction with respect to the stage 64 by the vertical movement of the objective arm 65. In this case, the revolver 44 is moved up and down via a focusing mechanism (not shown) provided in the body 31b by rotating the focusing handle 50 disposed on the side surface of the microscope body 31, and the sample 63 is moved to the objective. The focus is adjusted to the focal position of the lens 45.
[0032]
The plurality of cubes 41 constituting the reflecting member block accommodated in the cube unit 42 of the incident light projection tube 32 are each provided with a concave lens 66 as an auxiliary optical element on the front surface of the half mirror 40 of the reflecting member. The concave lens 66 extends the focal length of the relay lens 39, slightly reduces the ray angle of the light beam incident on the half mirror 40, and forms the light beam reflected by the half mirror 40 at the pupil position of the objective lens 45. Is for. That is, in this case, the focal length of the relay lens 39 is extended by the concave lens 66 as much as the distance between the incident light projection tube 32 and the objective lens 45 is extended by the thickness dimension of the objective arm 65 and the vertical movement stroke. .
[0033]
Others are the same as those in FIG. 1, and the description thereof is omitted here.
[0034]
In such a microscope that moves on the stage side, the illumination light emitted from the light source 33 becomes a substantially parallel light beam by the collector lens 34, is condensed by the relay lens 36, and is imaged by the aperture stop 37. . Thereafter, the light beam that has passed through the relay lens 39 from the aperture stop 37 enters the half mirror 40 via the concave lens 66. In this case, the focal length of the relay lens 39 is extended by the concave lens 66, and the light beam reflected by the half mirror 40 is imaged again at the pupil position (rear focal position of the objective lens) 51 of the objective lens 45, and the objective The sample 48 is irradiated through the lens 45. On the other hand, the reflected light from the sample 48 passes through the objective lens 45, passes through the half mirror 40, and is observed as a parallel light beam through an imaging lens and an eyepiece lens (not shown).
[0035]
According to such a microscope that moves the objective lens side in focus, the epi-illumination projection tube 32 constituting the epi-illumination optical system of Koehler illumination has a concave lens 66 disposed as an auxiliary optical element in front of the half mirror 40. The concave lens 66 extends the focal length of the relay lens 39, slightly reduces the angle of the light beam incident on the half mirror 40, and connects the light beam reflected by the half mirror 40 at the pupil position 51 of the objective lens 45. Since the image is formed, the optical conjugate relationship between the pupil position of the objective lens 45 and the aperture stop 37 can be maintained even when the distance between the epi-illumination tube 32 and the objective lens 45 is extended by L. All advantages can be secured. In particular, the aperture stop performance, which is important for epi-illumination, can be secured, so that even if the aperture stop diameter is reduced, the illumination light is not vignetted (the illumination field becomes narrow) and the illumination light is evenly distributed over the entire field of view. Can be reduced.
[0036]
If the concave lens 66 is inserted in front of the half mirror 40, the optical path extends and the light beam angle becomes shallow, so that off-axis light is reduced, the illumination field is narrowed, and the imaging position of the on-axis light beam is the field stop. Although it may move from position 38, the performance of Koehler illumination is ensured. In addition, in the case of epi-illumination, the field stop must have an optimum diameter to prevent flare around the field of view, but the others are fixed regardless of the magnification of the objective lens. Often used or not used.
[0037]
Therefore, according to such a first embodiment, the epi-illumination optical system for Koehler illumination is used for both the system for focusing on the stage side and the system for focusing on the objective lens side. Since the optical conjugate relationship between the aperture stop 14 and the pupil position of the objective lens 4 in the incident light projection tube 32 can be maintained, uniform illumination and the aperture stop can function, and the optimum illumination light is always obtained. The effect can be expected. Moreover, since the microscope main body 1 and the epi-illumination projection tube 32 revolver 44 which are the basic units of the microscope can be used in common for any of these methods, each unit can be provided at a minimum cost. Since only a plurality of reflecting member blocks are prepared together with the unit, each type of microscope can be constructed, which is extremely advantageous economically.
[0038]
In FIGS. 1 and 2 described above, the diffusion plate 70 may be disposed in the vicinity of the aperture stop 37 on the optical path between the light source 33 and the aperture stop 37. Such a diffusing plate 70 is usually arranged to suppress unevenness due to differences in the filament shape of the light source or luminance differences. Here, however, illumination unevenness or light source due to aberration of off-axis light due to a change in the illumination optical system. This is effective in correcting a slight difference in the projection magnification of the lens and making the difference from the normal use as inconspicuous as much as possible.
[0039]
(Second Embodiment)
FIG. 3 shows a schematic configuration of a main part of the second embodiment of the present invention. The same reference numerals are given to the same parts as those in FIG.
[0040]
In this case, an intermediate unit 72 is used as an intermediate member in an optical path between the epi-illumination optical system and the objective lens 45, that is, an intermediate member between the epi-illumination projection tube 32 and the revolver 44, using a microscope that moves the stage side. Inserting. In this case, the intermediate unit 72 is, for example, an annular illumination, an auxiliary illumination device, an autofocus, a fine focusing device (a focusing unit using a piezo element) that is more effective as it is closer to the objective lens 45.
[0041]
Further, in the plurality of cubes 41 accommodated in the cube unit 42 of the epi-illumination projection tube 32, a concave lens 73 is disposed as an auxiliary optical element on the front surface of the half mirror 40. The concave lens 73 extends the focal length of the relay lens 39, slightly reduces the ray angle of the light beam incident on the half mirror 40, and forms the light beam reflected by the half mirror 40 at the pupil position of the objective lens 45. For this purpose, the focal length of the relay lens 39 is extended by the concave lens 73 as much as the distance between the incident light projection tube 32 and the objective lens 45 is increased by the insertion of the intermediate unit 72.
[0042]
Even in this case, since the optical conjugate relationship between the pupil position 51 of the objective lens 45 and the aperture stop 37 can be maintained, the illumination and the aperture stop without unevenness can be functioned. Since the light projecting tube 32 revolver 44 and the like can be used in common, and a microscope of each type can be constructed only by preparing a plurality of reflecting member blocks together with these units, it can be extremely advantageous economically. Furthermore, since the intermediate unit 72 can be inserted into the observation system parallel light beam portion (infinite light beam portion) from the objective lens 45, a configuration suitable for systemization such as extraction of light rays and addition of another optical system can be obtained. .
[0043]
(Third embodiment)
FIG. 4 shows a schematic configuration of the main part of the third embodiment of the present invention. The same reference numerals are given to the same parts as those in FIG.
[0044]
In this case, an objective arm 31c is integrally formed on the upper portion of the body 31b of the microscope body 31 in a direction parallel to the base 31a, and the incident light is projected above the objective arm 31c via the intermediate lens barrel 81. A tube 32 is provided, and a revolver 44 is provided below the objective arm 31c. That is, also in this case, the intermediate lens barrel 81 is provided as an intermediate member in the optical path between the epi-illumination optical system and the objective lens 45.
[0045]
The cube 41 accommodated in the cube unit 42 of the epi-illumination projection tube 32 has a concave lens 82 disposed as an auxiliary optical element on the front surface of the half mirror 40. The concave lens 82 extends the focal length of the relay lens 39, slightly reduces the ray angle of the light beam incident on the half mirror 40, and forms the light beam reflected by the half mirror 40 at the pupil position of the objective lens 45. For this purpose, the focal length of the relay lens 39 is extended by the concave lens 82 by an amount corresponding to the distance L ″ between the incident light projection tube 32 and the objective lens 45 being increased by inserting the intermediate lens barrel 81.
[0046]
Even if it does in this way, the effect similar to 2nd Embodiment can be anticipated.
[0047]
【The invention's effect】
As described above, according to the present invention, the relationship between the pupil position of the objective lens and the aperture stop can always be maintained at the optical conjugate position, and an optimal illumination effect can be expected and the microscope can be inexpensive. Equipment can be provided.
[Brief description of the drawings]
FIG. 1 is a diagram showing a schematic configuration of a microscope of a system for moving a stage side according to a first embodiment of the present invention.
FIG. 2 is a diagram showing a schematic configuration of a microscope that moves the revolver according to the first embodiment;
FIG. 3 is a diagram showing a schematic configuration of a main part of a second embodiment of the present invention.
FIG. 4 is a diagram showing a schematic configuration of a main part of a third embodiment of the present invention.
FIG. 5 is a diagram showing a schematic configuration of a conventional microscope.
FIG. 6 is a diagram showing an epi-illumination optical system for explaining Koehler illumination.
[Explanation of symbols]
30 ... Bolt 31 ... Microscope body 31a ... Base 31b ... Body 31c ... Objective arm 32 ... Epi-illumination projection tube 33 ... Light source 34 ... Collector lens 35 ... Lamp house 36 ... Relay lens 37 ... Aperture stop 38 ... Field stop 39 ... Relay Lens 40 ... Half mirror 41 ... Cube 42 ... Cube unit 44 ... Revolver 45 ... Objective lens 46 ... Guide part 47 ... Stage receiving part 48 ... Sample 49 ... Stage 50 ... Focusing handle 51 ... Pupil position 60 ... Bolt 61 ... Spacer 63 ... sample 64 ... stage 65 ... objective arm 66 ... concave lens 70 ... diffuser plate 72 ... intermediate unit 73 ... concave lens 81 ... intermediate lens barrel 82 ... concave lens

Claims (3)

There is an epi-illumination light pipe that constitutes an epi- illumination optical system for Koehler illumination that makes illumination light from a light source enter at least a reflecting member through an optical path having an aperture stop and makes a light beam reflected by the reflecting member enter an objective lens. a microscope apparatus,
A first reflecting member block that houses the reflecting member;
A second reflecting member block in which an auxiliary optical element is disposed between the reflecting member and the aperture stop;
With
The first reflecting member block and the second reflecting member block are selectively disposed in the incident light projection tube in response to movement of a pupil position of the objective lens with respect to the reflecting member, and the aperture stop and the objective lens Maintain optical conjugate relationship with the pupil position of
A microscope apparatus characterized by that. In the epi-illumination projection tube, a lens that is disposed between the aperture stop and the reflection member and forms an image of a light beam from the aperture stop is disposed.
The auxiliary optical element is a concave lens that extends the imaging position of the light beam from the lens.
The microscope apparatus according to claim 1. Wherein the vertical illuminator, the optical path between the aperture stop and the light source, diffuser close to the aperture stop is disposed, that the microscope apparatus according to claim 1, wherein .

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