JP4784891B2 - Microwave structure heating system, microwave oscillation waveguide device, and microwave oscillator cooling method - Google Patents

Description

  The present invention is based on microwaves in the microwave frequency band (2 to 10 GHz) (in the present invention, roads include roads on which vehicles and pedestrians pass (including roads laid on bridges), rooftops of buildings ( (Including roofs) and various structures such as walls are heated to melt the snow that has fallen, to prevent snow from accumulating, to prevent the water accumulated on the surface from freezing or to freeze The present invention relates to a structure heating method and a microwave oscillator cooling method using microwaves for melting ice.

  As shown in Patent Document 1, a microwave waveguide in which a microwave oscillator is attached is embedded in a pavement containing a microwave absorbing material, and the microwave emitted from the microwave waveguide is converted into a microwave absorbing material. A method for melting snow on a pavement has been proposed in which the pavement is heated so that it can be heated so as to melt snow.

  When carrying out the above method, it is necessary to embed the microwave oscillator in the ground together with the microwave waveguide or to install it on the ground, but in any case, it is necessary to ensure electrical insulation, which is high. It needs to be waterproof with airtightness. In addition, when the air density of the microwave oscillator is poor, moisture penetrates into the microwave waveguide, and when the microwave propagates through the microwave waveguide, the penetrated moisture is heated so that the pavement is efficiently It cannot be heated. For this reason, it is necessary to waterproof the microwave waveguide and the microwave oscillator with high air density.

On the other hand, since the magnetron itself constituting the microwave oscillator is heated at the time of oscillation and the output becomes unstable, it is necessary to air-cool by blowing air with a cooling fan or the like to avoid this.

However, it is necessary to release the heated air that has cooled the magnetron to the outside and take in the outside air for air cooling. However, when the microwave oscillator is waterproofed at a high air density as described above, the heated air is discharged and the outside air is discharged. As a result, it was difficult to effectively cool the magnetron. This problem can be solved by adopting a structure that efficiently cools the magnetron by providing a cooling pipe through which the refrigerant flows, but the cooling structure of the microwave oscillator is complicated, resulting in an increase in size and cost. Have the problem of becoming
JP 2006-138172 A

  The problem to be solved by the present invention is that the installation location of the microwave oscillator needs to have a waterproof structure, but in the case of the waterproof structure, air heated by cooling the magnetron is discharged to the outside and the outside air is discharged. It is difficult to incorporate, and the magnetron cannot be cooled effectively. Further, in the cooling structure in which the cooling pipe is attached to the microwave oscillator and the refrigerant is circulated in the cooling pipe, the cooling structure of the microwave oscillator is complicated, resulting in an increase in size and cost.

  Claim 1 of the present invention is a microwave oscillator that contains a microwave absorber and is laid and a shield box that is embedded in the structure and oscillates microwaves of a predetermined frequency and output. And a large number of transmission parts embedded in the structure and connected to the output part of the microwave oscillator so that microwaves propagating in the longitudinal direction can be output to the microwave absorber side and are closed by the microwave non-absorber A microwave waveguide formed with a structure, and by generating oscillation by controlling the oscillation of the microwave oscillator to output and absorb the microwave propagating through the microwave waveguide from the transmission part to the microwave absorber side In a structure heating system that heats the body, air is blown to the microwave oscillator and cooled, and the end of the microwave waveguide and the shield box are aired. A heat radiating circulation member that is connected in a shape and that can be cooled when the air introduced into the microwave waveguide after cooling the microwave oscillator in accordance with the driving of the blower member is circulated from the terminal side to the shield box side, and And the air inside the shield box and the microwave waveguide can be circulated.

According to an eighth aspect of the present invention, a shield box for accommodating the microwave oscillator in an airtight manner and a shield case corresponding to the output portion of the microwave oscillator are attached in an airtight manner, and the propagation length of the microwave is a predetermined length. A microwave waveguide comprising a plurality of transmitting portions that allow microwaves to pass through the length of the surface, and each transmitting portion is hermetically sealed and a microwave absorbing material is provided in the other end. And a heat radiating and circulating member that is provided in the end portion of the microwave waveguide and the shield case and circulates the air in the microwave waveguide, and blows air to the microwave oscillator and flows the air that has flowed into the microwave waveguide And a blower member that circulates in the shield case via the heat dissipation circulation member.
Claim 9 is a structure in which a microwave absorber is contained, a microwave oscillator housed in a shield box embedded in the structure and oscillating microwaves of a predetermined frequency and output, and structure A large number of transmission parts are formed that are buried in the body and connected to the output part of the microwave oscillator so that microwaves propagating in the longitudinal direction can be output to the microwave absorbing material side and are closed by the microwave non-absorbing material. The microwave oscillator and control the oscillation of the microwave oscillator to output the microwave transmitted from the transmission part to the microwave absorber side and absorb it, thereby generating heat and heating the structure In the structure heating method, the microwave oscillator is blown by a blowing member by a circulation means connected in an airtight manner between the end side of the microwave waveguide and the shield box The air introduced into the microwave tube is sprayed, characterized in that to enable cooling when returning from its end side to the shield box side.

  The present invention can stabilize the output characteristics by effectively cooling the microwave oscillator while ensuring the waterproofness of the microwave oscillator. The cooling effect can be maintained by effectively radiating the heat of the air heated by the cooling of the microwave oscillator. The cooling structure of the microwave oscillator can be simplified and downsized, and the cost can be reduced.

  The present invention is an air blowing member that cools the microwave oscillator by blowing air, and is connected to the terminal side of the microwave waveguide and the shield box in an airtight manner, and after cooling the microwave oscillator as the blowing member is driven A heat dissipating circulation member that allows cooling when the air introduced into the microwave waveguide is circulated from the terminal side to the shield box side is provided to enable the air in the shield box and the microwave waveguide to be circulated. The best form.

Hereinafter, the present invention will be described according to an embodiment in which a structure is a road pavement.
As shown in FIGS. 1 to 4, the heat melting road 1 for melting snow as a structure includes, for example, concrete or asphalt base layer body 5 laid on the roadbed 3 on the roadbed, and concrete or A pavement 9 composed of a surface layer 7 made of asphalt is laid.

  The surface layer body 7 is laid with a required thickness on the upper portion of the base layer body 5 and is made of ferrite (iron oxide), oxide slag, ceramics, permalloy, or short fibers or long fibers containing, for example, the above-described microwave absorber. It consists of concrete or asphalt containing microwave absorbing material 7a such as microwave absorbing fiber, rubber chip or pellet impregnated with ferrite. A temperature sensor 11 is embedded in the surface layer body 7, and the temperature sensor 11 detects the temperature of the surface layer body 9.

When the microwave absorbing material 7a is made of ferrite (iron oxide), oxide slag, ceramics, permalloy, etc., the aggregate is contained in the surface layer body 7 with a maximum diameter of about 50 mm. It is adjusted to be about 5 to 100% with respect to the volume of 7b. When the microwave absorbing material 7a is a microwave absorbing fiber, the content is adjusted to be about 0.01 to 2 wt% with respect to the cement weight. As the material for the microwave absorbing fiber, polyamide fiber, glass fiber, polypropylene fiber, acrylic fiber and the like are suitable. The above-mentioned 100% means the case where the entire aggregate 7b mixed with concrete or asphalt is the microwave absorbing material 7a.

The surface layer 7 contains aggregate 7b such as crushed stone in addition to the above-described microwave absorbing material 7a, and these microwave absorbing material 7a and aggregate form innumerable independent voids and continuous voids. It is desirable to do. This gap functions as a dielectric layer that absorbs microwaves by dielectric loss together with the microwave absorbing action of the microwave absorbing material 7a, and contributes to efficiently generating heat on the surface layer body 7.

As the content distribution state of the microwave absorbing material 7a in the surface layer 7, it is desirable to increase the density on the road surface side. As a result, the road surface side of the heat melting road 1 for snow melting can be efficiently heated, and the rate at which the microwaves emitted from the microwave waveguides 11 leak outside the road surface of the heat generating road 1 for snow melting is reduced. And microwave interference to electronic equipment mounted on a vehicle can be reduced. What is necessary is just to set suitably the content distribution state of the microwave absorption material 7a in the surface layer body 7 from the relationship between the above-mentioned heat generation efficiency and microwave leakage, and the road surface intensity | strength requested | required.

  A plurality of microwave waveguides 13 are embedded in the base layer body 5 of the pavement 9 at a predetermined interval with respect to the crossing direction of the road, and the microwave waveguides 13 positioned outside the pavement 9 are arranged. On the one end side, the precast concrete or metal shield box 15 is buried or partly buried in an airtight state.

The shield box 15 has a microwave oscillator 17 such as a magnetron, a blower fan 19 as a blower member for forcibly blowing air to the microwave oscillator 17 and air-cooling, and a temperature sensor 21 for detecting the ambient temperature of the microwave oscillator 17. A microwave oscillation device 23 comprising: As will be described later, the microwave oscillator 23 is a control box 25 installed on the side of the road or in the central separation zone (the figure shows an example provided on the shoulder of the road, but it is of course not limited thereto). ) Is connected to the control means built in the terminal via an electric cable (none of which is shown). The blower fan 19 blows cooling air around the microwave oscillator 17 and is configured such that the heated air heated with the cooling of the microwave oscillator 17 is introduced into a microwave waveguide 13 described later. The

Each of the microwave oscillators 17 is a microwave (microwave) having a microwave band of 2.45 GHz, for example, assigned to industrial, scientific, medical, or the like according to the Radio Law or the like. Output at 5-5kW. The microwave output from the microwave oscillator 17 is not limited to the above-mentioned frequency and output, and can be appropriately selected in the range of about 1 to 20 GHz, and depending on the road environment such as a cold region and a very cold region. Output can be selected as appropriate. The control box 25 incorporates a power supply unit (not shown), and the temperature sensor 11 embedded in the surface layer body 7 is connected to the control means.

The microwave waveguide 13 that guides the microwave output from the microwave oscillator 17 in the transverse direction of the road has a λ / 2 (λ: wavelength) width of the microwave output from each microwave oscillator 17. The cross section in the longitudinal direction is a square or a circle (the figure shows a rectangular microwave waveguide), and is a metal material having a length corresponding to the road width, and the inner surface and the outer surface are galvanized. Each microwave waveguide 13 has one end connected to the output of the microwave oscillator 17 and a microwave absorber 13a provided in the other end.

A large number of slits 13b as transmission parts that extend in the width direction on the upper surface (on the side of the surface layer 7 described later) of each microwave waveguide 13 and emit microwaves propagating through the inside to the surface layer 7 side of the pavement 9. Are formed at a predetermined interval (λ / 4) with respect to the longitudinal direction. The location where the slit 13b is formed may be the upper corner portion in addition to the upper surface of the microwave waveguide 5 shown in the figure. The interval between the slits 13b in the microwave waveguide 13 is such that the mutual interval is wide on the microwave oscillator 17 side, and conversely, on the opposite side to the microwave oscillator 17, the mutual interval is narrowed to make the surface layer body. 7 can output a microwave with a uniform output.

An opening 13c is formed at the other end of each microwave waveguide 13, and a shield plate 13d is attached to the opening 13c. The shield plate 13d has a metal plate in which a large number of holes having a size of 1/4 or less of the microwave wavelength is formed, and the microwave propagating in the microwave waveguide 13 is restricted from leaking to the outside. On the other hand, internal air can be discharged.

An end portion of a circulation pipe 29 as a heat radiation circulation member is attached to the microwave waveguide 13 corresponding to the periphery of the opening 13c in an airtight manner. The circulation pipe 29 is made of, for example, a synthetic resin pipe such as vinyl chloride or a metal pipe, and the other end is attached to the shield box 15 in which the microwave oscillator 23 is accommodated in an airtight manner.

A waterproof body (not shown) is provided on the upper surface of each microwave waveguide 13 in which a large number of slits 13b are formed so as to hermetically seal each slit 13b. As a waterproof body, each slit 13b is filled with, for example, silicon resin and sealed. For example, a butyl rubber sheet is bonded to the upper surface of each microwave waveguide 13 to waterproof (air-tighten) each slit 13b. Any of the configurations may be used.

On the road side of the snow melting heat generating road 1, a pole 31 that is curved so that the upper portion extends to the road surface of the snow melting heat generating road 1 is erected, and a snowfall sensor 33 is attached to the top end of the pole 31. The snowfall sensor 33 is connected to the control means described above and detects snowfall on the road surface of the snow melting heat generating road 1.

Next, the snow melting action and the snow melting method by the snow melting heat generating road 1 will be described with reference to FIGS.
When the road surface temperature detects the temperature at which water can be frozen by the temperature sensor 11 embedded in the surface layer 7 of the snow melting heat generating road 1 or when the snow falling sensor 33 detects snowfall on the snow melting heat generating road 1, The control means outputs an oscillation drive signal to each microwave oscillator 17 in the shield box 15 to control the oscillation of the microwave.

As an oscillation start instruction method for each microwave oscillator 17, a worker in a road management office provided at a location distant from the snow melting heating road 1 is detected by a temperature sensor 11 provided on the snow melting heating road 1. The oscillation start instruction signal may be output to the control means based on the temperature data to be detected, the snowfall data detected by the snowfall sensor 33, or the like.

  Microwaves oscillated from the respective microwave oscillators 17 propagate while reflecting in the corresponding microwave waveguides 13, and in the course of the propagation, some of the microwaves pass through the slits 13 b and are on the surface layer body 7 side. Is released. The microwave emitted to the surface layer body 7 side is converted into thermal energy by the magnetic field loss, dielectric loss due to the microwave absorbing material 7a contained in the surface layer body 7 and dielectric loss due to the voids in the surface layer body 7, and is absorbed by the microwave. By doing so, the surface layer body 7 is entirely heated. This raises the temperature to about 1 to 5 ° C. by the heat generation of the surface layer 6 by the microwave absorbing action by the microwave absorbing material 7a and the gap, and prevents the snow that has fallen from immediately melting or water on the road surface from freezing. . (See Figure 5)

  When the microwave propagating in the microwave waveguide 13 reaches the terminal side, the microwave is absorbed by the microwave absorber 13a. When the microwave absorber 13a is not attached to the terminal end side of the microwave waveguide 13, the microwave is reflected and propagates to the starting end side, which may damage each microwave oscillator 17. Damage to the microwave oscillator 17 is prevented by absorbing the material 13a and eliminating return propagation.

Further, most of the microwaves emitted from the slits 13b of each microwave waveguide 13 are converted into thermal energy by the microwave absorbing material 7a and the air gaps and absorbed by the microwaves, but only a small part of the microwaves are on the road surface. There is a risk of leaking outside and causing microwave interference to people and electronic devices mounted on the vehicle. In this case, leakage microwaves can be reduced as much as possible by increasing the distribution density of the microwave absorbing material 7a on the road surface side in the surface layer 7 as described above.

  When the microwave oscillator 17 oscillates, the blower fan 19 is driven to air-cool the microwave oscillator 17 in order to prevent the output from becoming unstable due to overheating of the magnetron. The air to be blown is heated by cooling the microwave oscillator 17 and then introduced into the microwave waveguide 13 and circulates to the end side, and then circulates through the circulation pipe 29 through the hole of the shield plate 13d. Is returned to the shield box 15. At this time, since the size of the hole of the shield plate 13d is set to ¼ or less of the microwave wavelength, the leakage of the microwave to the outside of the microwave waveguide 13 is restricted.

The heated air flowing into the circulation pipe 29 is circulated to the shield box 15 side by the air drawing action of the blower fan 19. Since the heated air is cooled when it flows through the circulation pipe 29, the microwave oscillator 17 can be efficiently cooled by the air returned into the shield box 15. (See Figure 6)

  Note that the temperature of the air returned to the shield box 15 is detected by the temperature sensor 21. When the temperature of the air detected by the temperature sensor 21 is 140 ° C. or higher, for example, the control means stops the oscillation drive of the microwave oscillator 17 and continues the drive of the blower fan 19, Cooling is performed by circulating air in the microwave waveguide 13 and the circulation pipe 29. When the temperature of the air detected by the temperature sensor 21 becomes, for example, 100 ° C. or less, the control means resumes the oscillation drive of the microwave oscillator 17 and outputs the microwave.

  When the surface layer 6 is heated by the microwave output from the microwave oscillator 17 and the temperature detected by the temperature sensor 11 reaches, for example, about 1 to 5 ° C. or more, the control means detects the temperature from the temperature sensor 11. Based on the signal, the oscillation drive of each microwave oscillator 17 is interrupted to stop the output of the microwave.

Further, when the temperature of the surface layer body 6 falls below the above-mentioned specified temperature due to the interruption of the microwave output, the control means oscillates and drives each microwave oscillator 17 again based on the detection signal from the temperature sensor 11. A wave is output to the surface layer body 6 and heated. In this way, the microwave oscillators 17 are intermittently controlled based on the temperature detection signal from the temperature sensor 11 to keep the temperature of the surface layer body 6 substantially constant, and the snow melting heat generating road 1 is kept in the snow melting state.

  In the present embodiment, air is forcibly blown to the microwave oscillator 17 that is heated in accordance with the oscillation drive of the magnetron, and air is cooled to stabilize the oscillation output. On the other hand, the heated air heated by air cooling is used. The microwave oscillator 17 can be efficiently air-cooled by cooling by circulating through the circulation pipe 29 in the shield box 15 and the microwave waveguide 13 which are hermetically sealed.

For this reason, it is not necessary to consider the intake air for cooling the microwave oscillator 17 and the exhaust of the air heated with the air cooling of the microwave oscillator 17, and the shield box 15 and the microwave waveguide 13 are hermetically sealed. It is possible to prevent troubles caused by invading water.

The present invention can be modified as follows.
1. In the above description, a road pavement is taken as an example of the structure, but the structure of the present invention may be a rooftop of a building, a roof, a wall, a sidewalk, an approach, or the like.

2. In the above description, a linear waveguide is used as the microwave waveguide 5. However, as shown in FIG. 7, a plurality of divided waveguides 71 are separated from each other by a predetermined angle (in FIG. 7, an angle of 90 ° is used). And a reflective metal plate 73 that reflects microwaves so that the axis of each divided waveguide coincides with each other in the connecting portion of each divided waveguide 71. The configuration may be such that microwaves can propagate in each divided waveguide 71.

Further, as shown in FIG. 8, a plurality of partition walls 81a are provided in the panel body 81 so that the propagation paths are continuous with each other, and on the upper surface of the panel body 81 according to the propagation paths between the partition walls 81a. It may be a microwave waveguide 85 in which a number of slits 83a are hermetically fixed to an upper surface plate 83 formed along a propagation path. In this case, a reflection metal plate 87 may be attached to the turning point of the propagation path so that the microwave propagating in the propagation path between the partition walls 81a is turned at a predetermined angle.
In addition, about the same member as an Example, the same code | symbol is attached | subjected to a figure and detailed description is abbreviate | omitted.

3. In the above description, when the structure is the heat melting road 1 for snow melting, the roadbed, the base layer body and the surface layer body are provided on the road floor, but the present invention is not limited to this structure. Even various road structures can be implemented.

a. After burying a microwave waveguide with a microwave oscillator attached to the roadbed and laying the base layer thinly on the roadbed, tiles, interblocks, flat plates (washed flat plates, collars) containing microwave absorbing material Flat pavement, artificial stone flat plate, Braille flat plate, etc.), and a pavement having a structure in which a decorative surface layer such as semi-tough pavement in which cement milk (fiber mixed or oxidized slag sand) is injected into open-graded asphalt is laid.

b. A pavement having a structure in which a microwave waveguide having a microwave oscillator attached to a roadbed is embedded, and a surface layer body containing a microwave absorbing material is laid on the roadbed.

c. A base layer in which a microwave waveguide with a microwave oscillator attached is laid on the roadbed, and an artificial bone or natural stone containing a microwave absorbing material on the surface of the surface layer laid on the base layer A pavement structure with a decorative material such as

d. An artificial bone or natural stone containing a microwave absorbing material on the surface side of a surface layer body laid on a base layer body, in which a microwave waveguide having a microwave oscillator attached to a roadbed is embedded. A pavement with a structure in which decorative materials such as these are pressed.

  Needless to say, any pavement having the above-described structure may have a water-permeable structure or a water-impermeable structure.

4). In the above description, the blower fan 19 is provided in the shield box 15. However, the blower member is provided in the middle of the path of the heat dissipation circulation member to forcibly circulate the air in the shield box and the microwave waveguide. Also good.

It is explanatory drawing which shows the example which implemented this invention on the heat melting road for snow melting as a structure. It is a partial longitudinal cross-sectional view of the heat melting road for melting snow. It is explanatory drawing which shows the outline of a shield box and a microwave waveguide. It is explanatory drawing which shows the attachment state of the circulation pipe in a microwave waveguide terminal part. It is explanatory drawing which shows the heat_generation | fever state of a microwave absorption material. It is explanatory drawing which shows the circulation state of the air in a shield box and a microwave waveguide. It is explanatory drawing which shows the example of a change of a microwave waveguide. It is explanatory drawing which shows the example of a change of a microwave waveguide.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Heat-melting road 11 for snow melting as a structure Temperature sensor 13 Microwave waveguide 13b Slit 13c as a transmission part Opening part 13d Shield plate 15 Shield box 17 Microwave oscillator 19 Blower fan 23 Microwave oscillator 29 As a heat radiation circulation member Circulation pipe

Claims (15)

A structure containing a microwave absorbing material and laid, a microwave oscillator housed in a shield box embedded in the structure, and oscillating microwaves of a predetermined frequency and output, embedded in the structure, A microwave waveguide connected to the output part of a microwave oscillator and capable of outputting a microwave propagating in the longitudinal direction to the microwave absorber side and having a large number of transmission parts closed by a microwave non-absorber A structure heating system for heating the structure by generating heat by controlling the oscillation of the microwave oscillator and outputting the microwave propagating through the microwave waveguide from the transmission part to the microwave absorber and absorbing it In
A blowing member that cools the microwave oscillator by blowing air;
Air connected to the end side of the microwave waveguide and the shield box in an airtight manner, and the air introduced into the microwave waveguide after cooling the microwave oscillator in accordance with the driving of the blowing member is transferred from the end side to the shield box side. A heat-dissipating circulation member that enables cooling when circulating,
A structure heating system using microwaves in which a shield box and air in a microwave waveguide can be circulated. The air blowing member according to claim 1 is a structure heating system using microwaves provided on a non-output side of a microwave oscillator in a shield box. The air blowing member according to claim 1 is a structure heating system using a microwave provided on a non-output side of a microwave oscillator provided in a path of a heat radiation circulation member. A structure heating system using microwaves, wherein the permeation part of claim 1 is filled with a water-impermeable resin and hermetically sealed. The microwave waveguide according to claim 1, wherein the microwave structure is heated by a non-water-permeable material that covers the transmission part and is hermetically sealed. In the microwave waveguide according to the first aspect, a plurality of unit waveguides are connected to each other at a predetermined angle, and the axis lines of the connected unit waveguides coincide with the connection portions of the unit waveguides. A structure heating system using microwaves provided with a reflecting member for reflecting microwaves. The structure heating system according to claim 1, wherein the structure in which the microwave waveguide is embedded is a microwave structure that restricts microwave leakage by increasing the content density of the microwave absorber on the surface layer side. One end of the shield box that contains the microwave oscillator in an airtight manner and a shield case corresponding to the output portion of the microwave oscillator are attached in an airtight manner, and the propagation length of the microwave is a predetermined length. A microwave waveguide in which a number of transmission parts that allow microwaves to pass are formed in the length direction, each transmission part is hermetically sealed, and a microwave absorber is provided in the other end, and a microwave waveguide A heat radiating circulation member that is provided in the terminal end of the tube and the shield case and circulates the air in the microwave waveguide, and that blows air against the microwave oscillator and flows the air flowing into the microwave waveguide into the heat radiating circulation member. A blower member that circulates in the shield case through,
A microwave oscillation waveguide device comprising: A structure containing a microwave absorbing material and laid, a microwave oscillator housed in a shield box embedded in the structure, and oscillating microwaves of a predetermined frequency and output, embedded in the structure, A microwave waveguide connected to the output part of a microwave oscillator and capable of outputting a microwave propagating in the longitudinal direction to the microwave absorber side and having a large number of transmission parts closed by a microwave non-absorber A structure heating method for heating the structure by generating heat by controlling the oscillation of the microwave oscillator to output the microwave transmitted from the transmission part to the microwave absorber side and absorbing it In
The air that is blown to the microwave oscillator by the blowing member by the circulating means connected in an airtight manner between the end side of the microwave waveguide and the shield box is introduced into the microwave waveguide from the end side of the shield box. Microwave oscillator cooling method that enables cooling when returning to the side. The blowing member of Claim 9 is the microwave oscillator cooling method provided in the non-output side of the microwave oscillator in a shield box. The air blower member according to claim 9 is a microwave oscillator cooling method provided on a non-output side of a microwave oscillator provided in a path of a heat dissipation circulation member. The microwave oscillator cooling method according to claim 9, wherein the transmitting portion is filled with a non-permeable resin and hermetically sealed. 10. The microwave oscillator cooling method according to claim 9, wherein the microwave waveguide is hermetically sealed with a non-water-permeable material covering the transmission part. In the microwave waveguide according to the ninth aspect, a plurality of unit waveguides are connected to each other at a predetermined angle, and the axis lines of the connected unit waveguides coincide with the connection portions of the unit waveguides. A microwave oscillator cooling method in which a reflection member that reflects microwaves is provided. 10. The microwave oscillator cooling method according to claim 9, wherein the structure in which the microwave waveguide is embedded has a high density of the microwave absorbing material on the surface layer side to restrict leakage of the microwave.

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