JP4776464B2 - Optical device manufacturing method - Google Patents

Description

  The present invention relates to an optical device and an optical device manufacturing method, and more particularly to an optical device including at least a multi-core optical fiber, an optical element array, a lid member, and a substrate.

An optical device including a multi-core optical fiber and an optical element array has been proposed. This optical element array is mounted on a substrate, and each optical fiber of the multi-core optical fiber is positioned along a V-groove formed in the substrate. The end face of each optical fiber is arranged corresponding to the optical element of the optical element array (see, for example, Patent Document 1).
Japanese Patent No. 2984747

  By the way, in the optical device disclosed in Patent Document 1, each optical fiber of the multi-core optical fiber may float from the V-groove of the substrate. It has been proposed that the substrate and the glass lid can be fixed with a multi-core optical fiber sandwiched between them by placing an adhesive on the fiber and applying an adhesive between the substrate and the glass lid.

  However, the adhesive spreads between the substrate and the glass lid by capillary action along the V-groove, but the adhesive adhesive moves between the substrate and the glass lid along the V-groove. Takes a long time and the bonding process becomes long, and it is difficult to reduce the manufacturing cost of the optical device.

  In addition, the adhesive must be securely disposed over the entire length of the V-groove between the substrate and the glass lid, and the position of the multi-core optical fiber must be fixed to the substrate by fixing the glass lid to the substrate. . If the glass lid cannot be securely fixed to the substrate, the multi-core optical fiber will float from the V-groove and the optical device will be defective, resulting in a decrease in yield when manufacturing the optical device. Resulting in.

  Therefore, in order to solve the above-mentioned problems, the present invention reliably disposes the adhesive along the V-groove between the lid member and the substrate to accelerate the bonding operation of the lid member to reduce the manufacturing cost. It is an object of the present invention to provide an optical device capable of improving the yield in manufacturing by securely fixing a multi-core optical fiber to the substrate side by securely fixing to the substrate.

In order to solve the above problems, a method of manufacturing an optical device of the present invention includes a multi-core optical fiber composed of a plurality of optical fibers,
An optical element array in which a plurality of optical elements composed of light emitting elements and / or light receiving elements are arranged in an array;
A mounting surface on which the optical element array is mounted, and on the mounting surface, the end surfaces of the optical fibers of the multi-core optical fiber are positioned so as to correspond to the optical elements, respectively. A substrate having a V-groove for optically coupling an end face of each optical fiber of the multi-core optical fiber and each optical element;
A lid member for fixing the multi-core optical fiber to the mounting surface of the substrate;
A ferrule having a through hole to be fixed through the multi-core optical fiber,
The V-groove has a first groove portion and a second groove portion, the second groove portion is located on the optical element array side , and the first groove portion is an optical element across the second groove portion. The first groove portion and the second groove portion are located on the opposite side of the array, and are formed continuously along the length direction of each optical fiber of the multi-core optical fiber, and the first groove The cross-sectional area of the portion is set larger than the cross-sectional area of the second groove portion,
The lid member is fixed to the mounting surface of the substrate using an adhesive ,
Along front SL adhesive to the V-groove of the substrate, the introduced towards the end surface of the distal end portion from the end surface of the rear end portion of the lid member, wherein the on-board the substrate of the multi-core optical fiber lid member during and the first groove portion and the second groove portion and the inner surface of said the first groove portion toward the second groove portion is filled by use of a capillary phenomenon, the said multi-fiber optical fiber substrate After fixing with an adhesive between the mounting surface of
Encapsulating each optical fiber end face and each optical element of a multi-core optical fiber with a light refractive index matching agent,
Applying the adhesive to the through holes on both the substrate side and the through hole on the opposite side of the ferrule, and reciprocating the substrate along the longitudinal direction of the optical fiber, the through holes Filled with the adhesive ,
After moving the ferrule along the optical fiber until it contacts the substrate, by further applying an adhesive between the substrate and the ferrule, the ferrule and the substrate , and the ferrule and the optical fiber, It is characterized by adhering.

In the optical device manufacturing method of the device of the present invention, preferably, the lid member is a plate-like member, and a lid member V-groove is formed on the inner surface of the lid member at a position corresponding to the V-groove of the substrate. The optical fibers of the multi-core optical fiber are accommodated in the V-groove and the lid member V-groove of the substrate so as to cover the second groove portion and not to cover the first groove portion. It is fixed.

The method for producing an optical device of a device according to the present invention is preferably characterized in that the first groove portion of the V-groove has a V-shaped cross section and the second groove portion has a trapezoidal cross section.

In the method of manufacturing an optical device of the device according to the present invention, preferably, the substrate is parallel to the optical element array at a position between the optical element array and an end surface of the lid member facing the optical element array. The lid member is exposed in the vicinity of the slit of the substrate .

  According to the optical device of the present invention, the adhesive is securely disposed along the V-groove between the lid member and the substrate to accelerate the bonding operation of the lid member, thereby reducing the manufacturing cost, and the glass lid to the substrate. The yield during manufacturing can be improved by securely fixing the multi-fiber optical fiber to the substrate side.

  Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the drawings.

  FIG. 1 is a diagram showing a preferred embodiment of the optical device of the present invention.

  An optical device 1 shown in FIG. 1 includes at least a multi-core optical fiber, an optical element array, and a substrate, and is a mounting apparatus on which, for example, an optical element array and a multi-core optical fiber used for optical communication are mounted. The optical device 1 shown in FIG. 1 schematically includes a ferrule 5, a multi-core optical fiber 10, a lid member 12, a substrate 11, and an optical element array 20.

  A ferrule 5 in FIG. 1 is a holder for holding a substrate 11 and has a central portion 13 and left and right end portions 14 and 15 and is formed in a substantially U shape when viewed from the X1 direction. The ferrule 5 is made of, for example, plastic, and has an opening 16 for inserting and fixing the substrate between the central portion 13 and the left and right end portions 14 and 15.

  A substrate 11 in FIG. 1 is, for example, a plate-like silicon substrate, and a portion to be fixed to the multi-core optical fiber 10, a lid member 12, and an optical element array 20 are mounted on the substrate 11. . A part of the multi-core optical fiber 10 mounted in this way, the lid member 12, the substrate 11, and the optical element array 20 are positioned in the opening 16 of the ferrule 5.

  FIG. 2 is a perspective view showing an example of a single shape of the substrate 11.

  An optical element array 20 is mounted along the Z direction on the mounting surface 22 of the substrate 11 shown in FIG. 2, and the optical element array 20 includes a plurality of light emitting elements 21 arranged along the Z direction. Yes. The light emitting element 21 is a laser diode as an example. Each light emitting element 21 is connected to the wiring pattern 23, and each light emitting element 21 can be driven by being electrically connected to an external circuit board. The wiring pattern 23 is formed on the mounting surface 22. The lid member 12 is a square or rectangular glass plate, for example, and is a member for fixing a part to be fixed to the multi-core optical fiber 10 on the substrate 11.

  On the mounting surface 22 of the substrate 11 in FIG. 2, a plurality of V grooves 30 are formed side by side along the Y direction. The inner end 31 of the V groove 30 is located at a position corresponding to each light emitting element 21 of the optical element array 20. A slit 35 is formed along the Z direction at a position between the inner end 31 of the V groove 30 and the optical element array 20. That is, the formation direction of the slit 35 and the arrangement direction of the optical element array 20 are both parallel to the Z direction.

  The slit 35 has a rectangular cross section, and has inner walls 36 and 37 and a bottom surface 38. The inner end portion 31 of the V groove 30 reaches the inner wall 37 of the slit 35, and the outer end portion 32 of the V groove 30 reaches the end surface 11 </ b> R of the substrate 11. The inner wall 36 of the slit 35 is located in the vicinity of the laser light emission surface 20 </ b> P of each light emitting element 21 of the optical element array 20.

  Next, an assembly manufacturing procedure of the optical device 1 shown in FIG. 1 will be described with reference to FIGS.

  3 shows the ferrule 5, the multi-fiber optical fiber 10, and the substrate 11 before assembly. FIG. 4 shows the initial alignment of the tip portion 10 F of the multi-fiber optical fiber 10 along the V-groove 30 of the substrate 11. It shows the state that has been. FIG. 5 shows a state where the distal end portion 10F of the multi-core optical fiber 10 is positioned at a position facing each light emitting element of the optical element array 20. The optical element array 20 and its wiring pattern are already mounted on the substrate 11.

  As shown in FIG. 3, the multi-core optical fiber 10 is inserted into the opening 16 of the ferrule 5, and the end 10 </ b> D of the multi-core optical fiber 10 is passed through the insertion hole of the ferrule 5. The distal end portion 10F of the multi-core optical fiber 10 is positioned above the V groove 30 of the substrate 11.

  As shown in FIG. 4, the multi-core optical fiber 10 is inclined at an angle θ with respect to the substrate 11, and the distal end portions 10 </ b> F of the multi-fiber optical fiber 10 are respectively disposed at midpoint positions of the plurality of V grooves 30 of the substrate 11. The

  As shown in FIG. 5, the ferrule 5 and the multi-core optical fiber 10 are moved along the Y1 direction with respect to the substrate 11, and the tip portion 10F of the multi-core optical fiber 10 is slit 35 as illustrated in FIG. The front end portion 10F of the multi-core optical fiber 10 is positioned at a position facing each light emitting element of the optical element array 20 by being abutted against the inner wall 36.

  Next, as shown in FIG. 6, the lid member 12 is mounted on the mounting surface 22 of the substrate 11. FIG. 7 shows the substrate 11, the lid member 12, the multi-core optical fiber 10, and the optical element array 20 as viewed from the X1 direction in FIG. 6.

  FIG. 8 shows a state immediately before the adhesive B such as trabond is applied between the substrate 11 and the lid member 12. FIG. 9 shows a state where the adhesive B has been applied.

  As shown in FIG. 8, the adhesive B is applied from the adhesive supply unit 100 via the syringe 101 to the mounting surface 22 of the substrate 1 in a necessary amount in the vicinity of the end surface 12G of the rear end portion 12D of the lid member 12. It has become. When the adhesive B is applied, the syringe 101 is linearly moved in the Z direction as shown in FIGS. 8 and 9 by a moving means (not shown), so that the adhesive is crossed in the direction intersecting the multi-core optical fiber 10. B is applied.

  When the application of the adhesive B is completed, the adhesive B is applied to the front end portion 12F from the end surface 12G side of the rear end portion 12D of the rear end portion 12D of the lid member 12 by capillary action in the Y1 direction along the V groove 30 of the substrate 11 shown in FIG. It progresses between the board | substrate 11 and the inner surface of the cover member 12 toward the end surface 12H. How the adhesive B is spread and applied in the Y1 direction will be described in detail later. The adhesive B can fix the lid member 12 to the mounting surface 22 side of the substrate 11, and a part to be fixed of the multi-core optical fiber 10 is securely fixed between the lid member 12 and the mounting surface 22 of the substrate 11. The

  Thereafter, as shown in FIG. 10, for example, silicone 44 as a sealant is used to mount the mounting surface 22 of the substrate 11, the distal end portion 12 </ b> F of the lid member 12, the distal end portion 10 </ b> F of the multi-core optical fiber 10, the slit 35, and the optical element array. 20 and lead wire 39 in the region. Silicone 44 functions as a refractive index matching agent for light.

  Further, as shown in FIG. 10, an insertion through-hole 49 through which the multi-core optical fiber 10 is inserted is formed on the end surface 13T of the central portion 13 of the ferrule 5, but the end surface 13T and the inner surface 13G are bonded to each other. Agent B is applied. The multi-core optical fiber 10 is fixed to the central portion 13 of the ferrule 5 by the adhesive B by reciprocating the substrate 11 along the Y direction. As shown in FIG. 1, the substrate 11 is placed in the opening 16 of the ferrule 5, and an adhesive is further applied and fixed between the substrate 11 and the ferrule 5, thereby completing the manufacture of the optical device 1.

  Next, an example of a preferable shape of the plurality of V grooves 30 of the substrate 11 will be described with reference to FIGS.

  Generally, the V-groove formed in the substrate has the same cross-sectional shape over the entire length. However, in the substrate 11 according to the embodiment of the present invention, the V-groove 30 has a characteristic structure as shown in FIG.

  11 is a perspective view showing a structural example of a plurality of V-grooves 30 of the substrate 11, and FIG. 12 is a plan view showing the shape of the V-grooves 30 as viewed from the X1 direction of FIG. 13 is a diagram showing the shape of the V-groove 30 as seen from the line MM in FIG. 11, and FIG. 14 is a diagram showing the shape of the V-groove 30 as seen from the line NN in FIG.

  As shown in FIGS. 11 and 12, each V-groove 30 has a first region 151 and a second region 152. The first region 151 and the second region 152 are continuously formed along the Y direction on the mounting surface 22 of the substrate 11, and the cross-sectional area of the first region 151 of the V groove 30 is the second area of the V groove 30. It is set larger than the cross-sectional area of the region 152. The length in the Y direction of the first region 151 and the length in the Y direction of the second region 152 can be arbitrarily set.

  13 shows a cross-sectional shape example of the first region 151 of the V-groove 30 shown in FIGS. 11 and 12, and FIG. 14 shows a cross-sectional shape example of the second region 152 of the V-groove 30.

  As shown in FIG. 13, the first region 151 of the V-groove 30 has a substantially V-shaped cross section (V-groove cross-sectional shape). As shown in FIG. 14, the second region 152 of the V-groove 30 has a substantially trapezoidal cross section. Characteristically, the cross-sectional area of the first groove portion 30-1 of the first region 151 of FIG. 13 is set larger than the cross-sectional area of the second groove portion 30-2 of the second region 152 of FIG. That is. By forming the first region 151 of the V-groove 30 to have a V-shaped cross section, it is easier to manufacture than to form a trapezoidal cross section. However, the first region 151 of the V groove 30 may be formed in a trapezoidal cross section.

  On the other hand, the lid member 12 shown in FIGS. 13 and 14 has another V-groove 60, and the V-groove 60 has a substantially trapezoidal cross section. The depth of the first groove portion 30-1 and the depth of the second groove portion 30-2 of the V groove 30 are larger than the depth of the V groove 60 of the lid member 12.

  The first groove portion 30-1, the second groove portion 30-2 of the V groove 30, and the V groove 60 of the lid member 12 are formed along the Y direction (perpendicular to the paper surface of FIG. 11) at positions facing each other. Yes. The outer peripheral surface of each optical fiber 70 of the multi-core optical fiber 10 has three points at fixed points P1, P2, and P3 in the second groove portion 30-2 of the V groove 30 and the V groove 60 of the lid member 12. It is stably and securely fixed by the support.

  The adhesive B in FIG. 10 is formed between the outer peripheral surface of the optical fiber 70 shown in FIGS. 13 and 14 and the first groove portion 30-1 of the V groove 30 on the substrate 11 side and the V groove 60 of the lid member 12. And the space formed between the second groove portion 30-2 and the V groove 60 of the lid member 12. Also, the adhesive B in FIG. 10 is disposed so as to spread between the mounting surface 22 of the substrate 11 and the inner surface 59 of the lid member 12 shown in FIGS. 13 and 14.

  The structure of each V-groove 30 of the substrate 11 is divided into the first region 151 and the second region 152 as shown in FIGS. The adhesive B described above is introduced into the first groove portion 30-1 from the adhesive introduction portion 160 of the first groove portion 30-1 shown in FIG. 12, and the second groove having a smaller cross-sectional area due to capillary action. It progresses along the Y1 direction with respect to the part 30-2. Thus, the cross-sectional area of the first groove portion 30-1 of the first region 151 on the side where the adhesive B is introduced is larger than the cross-sectional area of the second groove portion 30-2 of the second region 152 of FIG. Since it is set large, the adhesive B having viscosity is smoothly spread over the entire length in the first groove portion 30-1 of the first region 151 and the second groove portion 30-2 of the second region 152 in a short time. Can be arranged.

  As a result, the adhesive B can be smoothly and reliably disposed between the lid member 12 and the substrate 11 along the V-groove 30, and the bonding work of the lid member 12 to the substrate 11 can be accelerated, thereby reducing the manufacturing cost. be able to. In addition, the lid member 12 is securely fixed to the substrate 11 and the multi-core optical fiber 10 is securely fixed to the substrate 11 side, whereby the yield when manufacturing the optical device 1 can be improved.

  In the optical device 1 of the embodiment of the present invention, a multi-core optical fiber 10 composed of a plurality of optical fibers 70, an optical element array 20 in which a plurality of optical elements 21 are arranged in an array, and an optical element array 20 are mounted. The mounting surface 22 is provided.

  The end face 10T of each optical fiber 70 of the multi-core optical fiber 10 is positioned on the mounting surface 22 of the substrate 11 so as to correspond to each optical element 21, and the end face 10T of each optical fiber 70 of the multi-core optical fiber 10 and each A V-groove 30 for optically coupling the optical element 21 is provided. The lid member 12 is a member for fixing the multi-core optical fiber 10 to the mounting surface 22 of the substrate 11.

  The V-groove 30 has a first groove portion 30-1 and a second groove portion 30-2, and the first groove portion 30-1 and the second groove portion 30-2 are formed of the multi-core optical fiber 10. The cross-sectional area of the first groove portion 30-1 is set to be larger than the cross-sectional area of the second groove portion 30-2. Yes. The lid member 12 is fixed to the mounting surface 22 of the substrate 11 using the adhesive B. As a result, the adhesive B can be reliably disposed between the lid member 12 and the substrate 11 along the V-groove 30 to accelerate the bonding operation of the lid member 12 to the substrate 11, thereby reducing the manufacturing cost. it can.

  In addition, the yield of the optical device 1 can be improved by securely fixing the multi-core optical fiber 10 to the substrate 11 side by securely fixing the lid member 12 to the substrate 11.

  In the optical device 1 according to the embodiment of the present invention, the lid member 12 is a plate-like member, and a lid member V-groove 60 is formed on the inner surface 59 of the lid member 12 at a position corresponding to the V-groove 30 of the substrate 11. Each optical fiber 70 of the multi-core optical fiber 10 is housed and fixed in the V-groove 30 and the lid member V-groove 60 of the substrate 11. Thereby, each optical fiber 70 of the multi-core optical fiber 10 can be reliably fixed using the lid member 12 on the mounting surface 22 of the substrate 11.

  In the optical device 1 according to the embodiment of the present invention, the plurality of optical elements 21 of the optical element array 20 are light emitting elements. Thereby, the light emitted from the light emitting element can be transmitted through the end face of the corresponding optical fiber 70.

  In the optical device 1 according to the embodiment of the present invention, the first groove portion 30-1 of the V groove has a V-shaped cross section, and the second groove portion 30-2 has a trapezoidal cross section. Thereby, each optical fiber can be reliably and stably fixed in the V-groove.

  In the optical device 1 according to the embodiment of the present invention, the substrate 11 has a slit 35 at a position between the end surface 12T facing the optical element array 20 of the lid member 12 and the laser emission surface 20P of the optical element array 20. , And so as to be parallel to the optical element array 20. Thus, the end face 10T of each optical fiber 70 can be positioned by abutting against the inner wall 36 of the slip 35.

  An optical device 1 according to an embodiment of the present invention includes a multi-core optical fiber 10 including a plurality of optical fibers 70, an optical element array 20 in which a plurality of optical elements 21 are arranged in an array, and an optical element array 20. The mounting surface 22 is provided. On the mounting surface 22 of the substrate 11 of the optical device 1, the end surfaces 10T of the optical fibers 70 of the multi-core optical fiber 10 are positioned so as to correspond to the optical elements 21, and the optical fibers 70 of the multi-fiber optical fiber 10 are positioned. A V-groove 30 for optically coupling the end face 10T and each optical element 21 is provided. A lid member 12 is provided for fixing the multi-fiber optical fiber 10 to the mounting surface 22 of the substrate 11.

  The substrate 11 is preferably provided with a slit 35 at a position between the end face 12H of the lid member 12 facing the optical element array 20 and the optical element array 20 so as to be parallel to the optical element array 20. The member 12 is fixed to the mounting surface 22 of the substrate 11 using the adhesive B. As a result, the end face 10T of the optical fiber 70 abuts against the inner wall 36 of the slit 35, so that the end face 10T of the optical fiber 70 can be reliably positioned.

  By the way, this invention is not limited to the said embodiment, A various modified example is employable.

  For example, the plurality of light emitting elements 21 of the optical element array 20 are laser diodes as an example, but may be, for example, photodiodes that are light receiving elements instead of the light emitting elements.

  The first groove portion 30-1 and the second groove portion 30-2 of the V-groove 30 of the substrate 11 shown in FIG. 11 and the V-groove 60 of the lid member 12 are not limited to the trapezoidal cross-sectional shape, and other shapes are adopted. Also good.

  The lid member 12 may be a block body such as a rectangular parallelepiped instead of a plate-like member. The cross-sectional shape of the slit 35 is not limited to a rectangular cross-sectional shape, and may be another shape. The slit 35H and the mounting surface 22 of the substrate 11 may not be provided. In FIG. 12, the position of the rear end portion 12D of the lid member 12 is in the boundary connecting portion between the first groove portion 30-1 and the second groove portion 30-2 of the V-groove. The position of the rear end portion 12D of the member 12 may be on the second groove portion 30-2.

It is a perspective view which shows preferable embodiment of this invention. It is a figure which shows the example of a single shape of a board | substrate. It is a figure which shows the ferrule, multi-fiber optical fiber, and board | substrate before an assembly. It is a figure which shows the state which aligned the front-end | tip part of the multi-core optical fiber along the V groove | channel of a board | substrate at the initial stage. It is a figure which shows the state by which the front-end | tip part of the multi-core optical fiber was positioned in the position which faces each light emitting element of an optical element array. It is a figure which shows the state by which the cover member was mounted in the board | substrate. It is a figure which shows the board | substrate, the cover member, the multi-core optical fiber, and the optical element array which were seen from the X1 direction of FIG. It is a figure which shows the state just before apply | coating the adhesive agent B between a board | substrate and a cover member. It is a figure which shows the state which has finished apply | coating the adhesive agent B. FIG. It is a figure which shows the state which apply | coated the refractive index matching agent. It is a perspective view which shows the structural example of the some V groove of a board | substrate. It is a figure which shows the plane which shows the shape of the V groove seen from the X1 direction of FIG. It is a figure which shows the shape of the V groove seen from the MM line | wire of FIG. It is a figure which shows the shape of the V groove seen from the NN line | wire of FIG.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Optical device 5 Ferrule 10 Multi-core optical fiber 12 Cover member 16 Ferrule opening 20 Optical element array 20P Light emission end surface of optical element array 22 Substrate mounting surface 30 Substrate V groove 30-1 1 groove portion 30-2 2nd groove portion of second region of V groove 35 Slit 36, 37 Inner wall 44 of slit 44 Sealant 59 Inner surface of lid member 60 V groove of lid member 70 Each optical fiber 151 V of multi-core optical fiber Groove first region 152 V groove second region 160 Adhesive introduction part B Adhesive

Claims (4)

A multi-core optical fiber composed of a plurality of optical fibers;
An optical element array in which a plurality of optical elements composed of light emitting elements and / or light receiving elements are arranged in an array;
It has a mounting surface mounted with the said optical element array, the mounting surface, the end faces of each of the optical fibers of the multi-core optical fiber together when positioned to correspond to the each optical element a substrate having a pre-Symbol multiple-core optical V grooves for the end face and the and the respective optical elements optically coupled in the optical fibers of the fiber,
A lid member for fixing the multi-core optical fiber to the mounting surface of the substrate;
A ferrule having a through hole to be fixed through the multi-core optical fiber,
The V-groove has a first groove portion and a second groove portion, the second groove portion is located on the optical element array side , and the first groove portion is an optical element across the second groove portion. The first groove portion and the second groove portion are located on the opposite side of the array, and are formed continuously along the length direction of each optical fiber of the multi-core optical fiber, and the first groove sectional area of the portion is set larger than the sectional area of the second groove portion,
Along adhesives to the V groove of the substrate, is introduced toward the end surface of the distal end portion from the end surface of the rear end portion of the substrate, the inner surface of the mounted substrate and the lid member of the multi-core optical fiber and between and the first groove portion and the second groove portion, from said first groove portion toward the second groove portion is filled by use of a capillary phenomenon, and the lid member and the multi-fiber optical fiber After fixing with the adhesive between the mounting surface of the substrate,
Encapsulating each optical fiber end face and each optical element of a multi-core optical fiber with a light refractive index matching agent ,
Applying the adhesive to the through holes on both the substrate side and the through hole on the opposite side of the ferrule, and reciprocating the substrate along the longitudinal direction of the optical fiber, the through holes Filled with the adhesive ,
After moving the ferrule along the optical fiber until it contacts the substrate, by further applying an adhesive between the substrate and the ferrule, the ferrule and the substrate , and the ferrule and the optical fiber, A method for manufacturing an optical device , characterized in that : The lid member is a plate-like member, and on the inner surface of the lid member, a lid member V-groove is formed at a position corresponding to the V-groove of the substrate, and each optical fiber of the multi-core optical fiber is 2. The substrate according to claim 1, wherein the substrate is housed in the V-groove and the lid member V-groove of the substrate, covers the second groove portion, and is fixed so as not to cover the first groove portion. Optical device manufacturing method . 3. The method of manufacturing an optical device according to claim 1 , wherein the first groove portion of the V groove has a V-shaped cross section, and the second groove portion has a trapezoidal cross section . The substrate is provided with a slit so as to be parallel to the optical element array at a position between an end surface of the lid member facing the optical element array and the optical element array. The optical device manufacturing method according to claim 3, wherein the vicinity of the slit is exposed .

Images