JP4774525B2 - Surface shape detection device - Google Patents

Description

  The present invention relates to a surface shape detection device.

  For example, as shown in FIG. 2, the surface shape detection device irradiates the surface of the target object with the light emitted from the light projecting means through the slit plate, and receives the reflected light by the two-dimensional imaging device. It has become. If the surface of the target object (illuminated surface) is flat, the irradiation image formed by the reflected light on the two-dimensional image sensor has the same shape (for example, a straight line shape) as the opening shape of the slit, and the surface of the target object If is uneven, it has a shape corresponding to the unevenness. Therefore, the surface shape of the target object can be detected based on the image captured by the two-dimensional image sensor.

More specifically, in such a surface shape detection device, for example, a light reception signal from each pixel of the two-dimensional image sensor is compared with a predetermined threshold value, and a light reception signal having a level equal to or higher than this threshold value is set as a light incident state. The received light signals at other levels are converted to digital received light data in a non-incident state. Then, based on the received light data, the detected image is displayed on the monitor, so that the surface shape of the target object can be inspected.
JP 2002-286425 A

  By the way, outside light with high light intensity from the surroundings may enter the imaging surface of the two-dimensional imaging element in addition to the reflected light from the light projecting means. Then, the light reception signal level from the pixel that has received this external light also exceeds the threshold value, and a position different from the normal light reception position by the reflected light from the light projecting means is displayed on the monitor as a light reception state, The accurate surface shape cannot be detected.

  As a countermeasure, first light reception data (light reception data of only external light) obtained in a state where no light is emitted from the light projection means and second light reception data (light reception data from the light projection means) obtained in a state where light is emitted. There is a method of displaying an image from which the influence of external light is removed on a monitor by taking the difference between the reflected light and the received light data including external light). Here, when the light receiving portion of the reflected light from the light projecting unit and the light receiving portion of the external light overlap, the external light component is removed and the reflected light component is also removed, and the surface shape of the target object on the monitor May be displayed intermittently. In this case, the correction of the image is performed so that the ends of the intermittent line are connected and displayed with a straight line, but in this case, the reliability of the line at the correction point becomes low. Become.

  By the way, in practice, there are many cases where the importance of the detection result is high or low depending on the detection location of the surface shape of the displayed target object, and the detection result (image display is low) for the low importance location. ) But there is no problem, but for highly important parts, if a highly reliable detection result is not obtained, it is necessary to repeat the detection operation. However, the conventional device has a problem that the user cannot determine whether or not there is a location where the reliability of the detection result is low, and if it exists, which location.

  The present invention has been completed based on the above-described circumstances, and an object thereof is to provide a surface shape detection device that can easily determine the reliability of a detection result.

  As means for achieving the above object, a surface shape detection apparatus according to the invention of claim 1 comprises: a light projecting means for irradiating light linearly from an oblique direction to the surface of a target object; and the light projecting means. And a plurality of pixels capable of receiving reflected light reflected from the surface of the target object, and an imaging means for outputting a light reception signal corresponding to the amount of light received by each pixel, and the light projecting means and the At least one of the imaging means is disposed so as to be inclined with respect to the target object, and is based on a light reception signal output from the imaging means in a state where no light is emitted from the light projecting means. A first received light data generating means for generating first received light data including information on whether the light is incident or not, and a light reception signal output from the imaging means in a state where light is emitted from the light projecting means. The second received light data generating means for generating the second received light data including information on whether the light incident state or the non-light incident state for each pixel position, display means, and A detection image corresponding to the pixel position of the light incident state in the second light reception data is displayed, and a position corresponding to the pixel position of the light reception state in the first light reception data in the detection image and the first light reception data And a display control means for displaying a portion that does not correspond to the pixel position in the light incident state in a distinguishable manner from each other.

  A surface shape detection device according to a second aspect of the present invention is a light projecting unit that irradiates light linearly from an oblique direction with respect to the surface of the target object, and is reflected from the surface of the target object that is irradiated from the light projecting unit. An imaging unit having a plurality of pixels capable of receiving reflected light and outputting a light reception signal corresponding to the amount of light received by each pixel, and at least one of the light projecting unit and the imaging unit is provided on the target object. Whether the light incident state or the non-light incident state is set for each pixel position based on the light reception signal output from the imaging unit in a state in which light is not emitted from the light projecting unit. First light reception data generation means for generating first light reception data including information, and a light incident state for each pixel position based on a light reception signal output from the imaging means in a state where light is emitted from the light projection means. The second received light data generating means for generating the second received light data including information on whether the light is received or not, the display means, and the pixel position of the light incident state in the second received light data with respect to the display means Display control means for displaying a detection image corresponding to the area, an area designation means for designating an arbitrary determination area in the detection image displayed on the display means, and a determination area designated by the area designation means, An external light determination unit that determines whether or not an image corresponding to a pixel position in a light incident state in the first light reception data is included, and an external light determination unit that enters the first light reception data within the determination region. In the case where it is determined that an image corresponding to the pixel position in the light state is included, a notification means is provided for notifying that effect.

A surface shape detection apparatus according to a third aspect of the present invention is a light projecting unit that irradiates light linearly from an oblique direction with respect to the surface of the target object, and is reflected from the surface of the target object that is irradiated from the light projecting unit. An imaging unit having a plurality of pixels capable of receiving reflected light and outputting a light reception signal corresponding to the amount of light received by each pixel, and at least one of the light projecting unit and the imaging unit is provided on the target object. Whether the light incident state or the non-light incident state is set for each pixel position based on the light reception signal output from the imaging unit in a state in which light is not emitted from the light projecting unit. First light reception data generation means for generating first light reception data including information, and a light incident state for each pixel position based on a light reception signal output from the imaging means in a state where light is emitted from the light projection means. A second received light data generating means for generating second received light data including information on whether or not the light is received; and a pixel in the light received state in the first received light data among the pixel positions of the second received light data An external light removal processing unit that generates external light removal data in which a light corresponding to the position is in a non-light-incidence state; a display unit; and the display unit at a pixel position in a light-incidence state in the external light removal data. If there is a non-light incident state among the light incident pixel positions in the second received light data by the display control means for displaying the corresponding detected image and the external light removal processing means And a notifying means for notifying the device.

According to a fourth aspect of the present invention, there is provided a surface shape detection device, a light projecting unit that irradiates light linearly from an oblique direction with respect to a surface of a target object, and the light projected from the light projecting unit and reflected by the surface of the target object An imaging unit having a plurality of pixels capable of receiving reflected light and outputting a light reception signal corresponding to the amount of light received by each pixel, and at least one of the light projecting unit and the imaging unit is provided on the target object. Whether the light incident state or the non-light incident state is set for each pixel position based on the light reception signal output from the imaging unit in a state in which light is not emitted from the light projecting unit. First light reception data generation means for generating first light reception data including information, and a light incident state for each pixel position based on a light reception signal output from the imaging means in a state where light is emitted from the light projection means. A second received light data generating means for generating second received light data including information on whether or not the light is received; and a pixel in the light received state in the first received light data among the pixel positions of the second received light data external light removal processing means for generating ambient light removal data was non-light incidence state corresponds to the position in the external light removal data, when the pixel position of receiving light is turned intermittently, the generating a pixel position of receiving light in the outer light removal data, the interpolated data with incident state, and the pixel position of the non-receiving light disposed between the pixel positions of the input light condition that the intermittent The interpolation processing means, the display means, and the display means display a detection image corresponding to the pixel position of the light incident state in the interpolation data, and are interpolated by the interpolation processing means in the detection image. Point Characterized in was and a display control means for distinguishably displaying the portion which is not interpolated.

A surface shape detection apparatus according to a fifth aspect of the present invention is a light projecting unit that irradiates light linearly from an oblique direction with respect to the surface of the target object, and is reflected from the surface of the target object that is irradiated from the light projecting unit. An imaging unit having a plurality of pixels capable of receiving reflected light and outputting a light reception signal corresponding to the amount of light received by each pixel, and at least one of the light projecting unit and the imaging unit is provided on the target object. Whether the light incident state or the non-light incident state is set for each pixel position based on the light reception signal output from the imaging unit in a state in which light is not emitted from the light projecting unit. First light reception data generation means for generating first light reception data including information, and a light incident state for each pixel position based on a light reception signal output from the imaging means in a state where light is emitted from the light projection means. A second received light data generating means for generating second received light data including information on whether or not the light is received; and a pixel in the light received state in the first received light data among the pixel positions of the second received light data external light removal processing means for generating ambient light removal data was non-light incidence state corresponds to the position in the external light removal data, when the pixel position of receiving light is turned intermittently, the generating a pixel position of receiving light in the outer light removal data, the interpolated data with incident state, and the pixel position of the non-receiving light disposed between the pixel positions of the input light condition that the intermittent Interpolation processing means, display means, display control means for causing the display means to display a detection image corresponding to a pixel position in a light incident state in the interpolation data, and in the detection image displayed on the display means any area And that can be specified area specifying means, to have been determined in the area designated by said area designating means, determines the interpolation determination whether includes an image corresponding to the pixel position that is a receiving light by said interpolation means And means for notifying that, when it is determined by the interpolation determination means that the image corresponding to the pixel position that has been made light incident by the interpolation processing means is included in the determination region, It has the feature in having.

<Invention of Claim 1>
On the display means, a detection image corresponding to the pixel position of the light incident state in the second light reception data (that is, a detection image including reflected light from the light projecting means and external light) is displayed, and in the detection image In FIG. 5, a location corresponding to the pixel position in the light incident state in the first light reception data (external light receiving location) and a non-corresponding location (receiving location of only the reflected light from the light projecting means) are displayed in a distinguishable manner. . As a result, the user can grasp whether or not there is a spot for receiving external light in the displayed detection image, and if so, in which position it exists, and thus the detection result can be trusted. The sex can be easily judged.

<Invention of Claim 2>
On the display means, a detection image corresponding to the pixel position of the light incident state in the second received light data (that is, a detection image including reflected light from the light projecting means and external light) is displayed. When an image corresponding to a pixel position in the light incident state in the first light reception data is included in the determination region designated by the user, the notification means notifies that fact. As a result, the user can grasp whether or not there is a spot for receiving external light in the designated determination area in the detection image displayed on the display means. Therefore, if a highly important area (an area where the reliability of the detection result is required) is designated as the determination area, if it is determined that there is no spot for receiving external light in the area, the detection operation is repeated. There is no need, and the detection operation can proceed efficiently.

<Invention of Claim 3 >
When the external light removal process is performed, the notification means notifies that fact. Thereby, the user can reliably grasp whether or not there is a portion removed by external light even in the case where there is no intermittent portion in the detection image displayed by the display means. Can do. Therefore, the reliability of the detection result can be easily determined.

<Invention of Claim 4 >
On the display means, an image obtained by interpolating the intermittent portion due to the external light removal process is displayed, and the interpolated portion and the non-interpolated portion are displayed in a distinguishable manner. Thereby, the user can grasp whether or not an interpolated portion (that is, a light receiving portion of external light) exists in the displayed detection image, and if it exists, in which position it exists. Therefore, the reliability of the detection result can be easily determined.

<Invention of Claim 5 >
The display means displays an image obtained by interpolating the intermittent portions due to the external light removal process. When an image (external light receiving location) corresponding to the interpolated pixel position is included in the determination region designated by the user, this is notified by the notification means. Thereby, the user can grasp | ascertain whether the location interpolated in the designated determination area | region exists in the detection image displayed on the display means. Therefore, if a highly important area (an area where reliability of the detection result is required) is designated as the determination area, if it is determined that there is no interpolation point in the area, there is no need to repeat the detection operation. The detection work can be efficiently performed.

<Embodiment 1>
A first embodiment of the present invention will be described with reference to FIGS.
1. Overall Configuration of Surface Shape Detection Device FIG. 1 shows an overall configuration diagram of a surface shape detection device 10 according to the present embodiment. Reference numeral 11 denotes a laser light source (corresponding to the “light projection means” of the present invention), from which laser light R1 (parallel light) is emitted toward the surface of the target object W. In front of the laser light source 11, a slit plate 12 having an opening cross section extending long in a predetermined direction (in this embodiment, the depth direction in FIG. 1) is disposed. Accordingly, the surface of the target object W is irradiated with the laser beam R1 in a line corresponding to the opening shape of the slit plate 12 from an oblique direction.

  Reflected light (hereinafter referred to as “laser reflected light R2”) that is irradiated onto the target object W from the laser light source 11 via the slit plate 12 and reflected on the surface of the target object W is referred to as a two-dimensional CCD 13 (“multiple pixels” of the present invention). The light is received by the imaging surface 13 </ b> A corresponding to “imaging means”. Here, the irradiation image 16 formed by the laser reflected light R2 on the imaging surface 13A of the two-dimensional CCD 13 corresponds to the opening shape of the slit plate 12 if the surface (irradiation range) of the target object W is flat. Make a straight line. On the other hand, as shown in FIG. 2, for example, when a convex portion is formed on the surface of the target object W, a projection irradiation image 16 corresponding to the convex portion shape is obtained. Therefore, the surface shape of the target object W can be detected by capturing the irradiation image 16 on the imaging surface 13A of the two-dimensional CCD 13.

  The CCD drive circuit 14 (corresponding to the “imaging means” of the present invention together with the two-dimensional CCD 13) receives a light reception signal from each pixel of the imaging surface 13A of the two-dimensional CCD 13 for each scanning line based on a drive signal from the control unit 15. The analog light-receiving signals that are read sequentially are converted into digital signals by an A / D converter (not shown), and then output to the control unit 15. In this embodiment, the direction of the scanning line (pixel scanning direction) is a direction orthogonal to the thickness direction of the laser light that has passed through the slit plate 12, in other words, an irradiation image on the imaging surface 13A by the laser reflected light R2. 16 along the thickness direction.

  The monitor 18 (corresponding to “display means” and “notification means” of the present invention) displays the detected image based on the video signal output from the control unit 15. The operation unit 19 (corresponding to the “region designation means” of the present invention) is configured to be able to perform various operations such as region designation described later on the control unit 15. The above configuration is common to the embodiments described below.

2. Control Operation by Control Unit Next, the control operation by the control unit 15 will be described with reference to the flowchart of FIG.
The controller 15 first outputs a drive signal to the CCD drive circuit 14 to drive the two-dimensional CCD 13 (S10). Then, the control unit 15 reads the light reception signal output from the two-dimensional CDD 13 for each scanning line in a state where the laser light source 11 is not activated, and the level of the light reception signal (light reception level) corresponding to each pixel position of the two-dimensional CCD 13. ) Is compared with whether or not the digital value is equal to or greater than a predetermined threshold, and for each pixel position, a value equal to or greater than the predetermined threshold is set as a light incident state (1), and a digital value corresponding to the pixel value is not a light incident state (0). The first received light data is generated and stored in the memory 17 (S11).

  Here, FIG. 4 is an explanatory diagram exemplarily illustrating the contents of the first light reception data, in which the vertical columns correspond to the respective scanning lines, and the respective cells correspond to the respective pixel positions. Each pixel position contains either the light incident state (1) or the non-light incident state (0). In the figure, only the light incident state (1) is described, and the non-light incident state (0). Description of values is omitted (the same applies to the following data content examples). Thus, the 1st light reception data obtained in the state which does not irradiate the laser beam R1 from the laser light source 11 is considered to be the light reception data of only external light.

  Next, the control unit 15 outputs a start signal to the laser light source 11, and outputs a drive signal to the CCD drive circuit 14 in synchronization with this (S12). Then, the control unit 15 reads the light reception signal output from the two-dimensional CDD 13, and whether the digital value corresponding to the light reception signal level (light reception level) corresponding to each pixel position of the two-dimensional CCD 13 is equal to or greater than a predetermined threshold value. 2nd received light data is generated and stored in the memory 17 with each pixel position having a predetermined threshold value or more as a light incident state (1) and other pixels at a non-light incident state (0). (S13). This second light reception data is considered to be light reception data including the laser reflected light R2 and external light. For example, as shown in FIG. 5, when compared with the first light reception data of FIG. Pixel positions are increasing.

  Subsequently, the control unit 15 generates a video signal for displaying the detected image on the monitor 18 based on the first light reception data and the second light reception data stored in the memory 17, and outputs the video signal to the monitor 18 (S14). ). At this time, in the video signal, the display color of the image corresponding to the light incident pixel position in the first light reception data, the light reception pixel position in the second light reception data, and the first light reception data The colors are specified so that the display colors of the images corresponding to the pixel positions in the light receiving state are different from each other. As a result, as shown in FIG. 6, the monitor 18 displays a detection image corresponding to the pixel position in the incident state of the second light reception data. In the detected image, an image (external light incident portion A) corresponding to the pixel position of the light incident state in the first light reception data and the first light reception corresponding to the pixel position of the light incident state in the second light reception data. In the data, an image (regular light incident portion B) corresponding to the pixel position in the non-light-receiving state is displayed in different colors. For this reason, the user displays on the monitor 18 a regular light incident portion B that is a location where the laser reflected light R2 is received and represents the surface shape of the target object W, and an external light incident portion A that is a location where external light is received. It can be easily distinguished.

  As described above, according to the present embodiment, the monitor 18 has a detection image (a detection image including reflected light and external light from the laser reflected light R2) corresponding to the pixel position in the light incident state in the second received light data. ) Is displayed, and in the detected image, an external light incident portion A (external light receiving location) which is a location corresponding to the pixel position of the incident light in the first received light data, and the second received light data The regular light incident part B (the light receiving part only of the reflected light from the light projecting unit) corresponding to only the pixel position in the light incident state is displayed in a distinguishable manner. As a result, the user can grasp whether or not there is a spot for receiving external light in the displayed detection image, and if so, in which position it is, and the reliability of the detection result. Can be easily judged. Therefore, if external light is detected in a highly important part of the surface shape, repeat the inspection, otherwise (if it is in a different part from the line, or external light in a less important part If there is, it is possible to make a decision to continue as it is.

<Embodiment 2>
Next, a second embodiment of the present invention will be described with reference to FIGS.
In the present embodiment, the control unit 15 operates according to the flowchart shown in FIG. The control unit 15 generates the first light reception data and the second light reception data in the same procedure as in the first embodiment, and stores it in the memory 17 (S10 to S13). Based on the second light reception data stored in the memory 17, the control unit 15 generates a video signal corresponding to the pixel position in the incident state of the second light reception data, and outputs the video signal to the monitor 18 (S20). As a result, on the monitor 18, as shown in FIG. 8, a detection image C (detection including reflected light and external light from the laser reflected light R2) corresponding to the pixel position of the incident state of the second received light data is displayed. Image) is displayed.

  Next, the determination area is designated by the user via the operation unit 19 (S21). This determination area is specified by, for example, inputting an arbitrary pair of coordinates (L1, L2) in the horizontal direction of the detected image from the operation unit 19 while confirming the detected image displayed on the monitor 18. A region between the coordinates (L1, L2) is designated as a determination region. Note that the coordinates (determination area) input by the user may be displayed on the detected image.

  When the determination region designation signal is input from the operation unit 19, the control unit 15 displays an image corresponding to the pixel position of the light incident state in the first light reception data (corresponding to the external light incident unit A in FIG. 6). It is determined whether or not it is included in the specified determination area (S22), and if it is included (S22: Yes), that fact is notified (S23). As a notification method, the information may be displayed on the monitor 18, a predetermined lamp may be turned on, or a sound may be emitted from a speaker or the like.

  As described above, according to this configuration, the monitor 18 has the detection image C corresponding to the pixel position in the light incident state in the second light reception data (that is, the detection image including the reflected light and the external light from the light projecting unit). ) Is displayed. When the determination region designated by the user includes an image (external light incident portion in FIG. 6) corresponding to the pixel position in the light incident state in the first light reception data, the fact is notified. Thereby, the user can grasp | ascertain whether the light reception location of external light exists in the designated determination area | region. Therefore, if a highly important area (an area where the reliability of the detection result is required) is designated as the determination area, if it is determined that there is no spot for receiving external light in the area, the detection operation is repeated. There is no need, and the detection operation can proceed efficiently.

<Embodiment 3>
Next, Embodiment 3 of the present invention will be described with reference to FIGS.
In the present embodiment, the control unit 15 operates according to the flowchart shown in FIG. The control unit 15 first generates first light reception data and second light reception data in the same procedure as in the first embodiment, and stores the first light reception data and the second light reception data in the memory 17 (S10 to S13). And the control part 15 performs the external light removal process which subtracts the part for external light incident light from 2nd light reception data (S30). Specifically, among the pixel positions (see FIG. 5) in the light incident state (1) in the second light reception data, those corresponding to the pixel positions (see FIG. 4) in the light incident state (1) in the first light reception data. , The external light removal data (see FIG. 10) converted into the non-light incident state (0) is generated, and the external light removal data is stored in the memory 17.

  Then, the control part 15 produces | generates the video signal based on external light removal data, and outputs it to the monitor 18 (S31). Thereby, on the monitor 18, as shown in FIG. 11, the detection image D (detection image only of the reflected light from the laser reflected light R2) corresponding to the pixel position in the incident state of the external light removal data is displayed. The Then, the control unit 15 determines whether or not there is actually converted data from the light incident state (1) to the non-light incident state (0) in the external light removal process of S30 (S32). If it is determined to do so (S32: Yes), the fact is notified (S33). As a notification method, the information may be displayed on the monitor 18, a predetermined lamp may be turned on, or a sound may be emitted from a speaker or the like.

  As described above, according to this configuration, the monitor 18 displays the image corresponding to the pixel position in the light incident state in the second light reception data (the image C in FIG. 8, ie, the reflected light and the external light from the light projecting means). An image D is displayed in which the light receiving portion of external light (external light incident portion A in FIG. 6) is removed from the included image. Here, when the light receiving location of the laser reflected light R2 and the light receiving location of the external light overlap, the external light component is removed and the reflected light component is also removed, and an image showing the light receiving location on the monitor 18 D (that is, a line indicating the surface shape of the target object) may be displayed intermittently as shown in FIG. In this case, the user can grasp that the part E where the image D becomes intermittent is a part where the external light is removed. Therefore, it can be determined that the detected image at the location E has low reliability.

  When the external light removal process is performed, the fact is notified by the monitor 18 or the like. Accordingly, the user can surely grasp whether or not there is a portion removed by external light even in the case where there is no intermittent portion in the detected image displayed on the monitor 18. Can do. Therefore, the reliability of the detection result can be easily determined.

<Embodiment 4>
Next, a fourth embodiment of the present invention will be described with reference to FIGS.
In the present embodiment, the control unit 15 operates according to the flowchart shown in FIG. First, the control unit 15 generates the first light reception data and the second light reception data in the same procedure as in the third embodiment (S10 to S13), and the external light removal data obtained by subtracting the external light incident light amount from the second light reception data. Generate (S30). Subsequently, when the incident light pixel position is intermittent in the external light removal data, the control unit 15 performs an interpolation process for generating interpolation data obtained by interpolating between the two pixel positions (S40). Specifically, for example, it is checked whether each column (corresponding to the scanning line) includes a pixel position in the light incident state (1) in the external light removal data (see FIG. 10). Then, a column that does not include the pixel position in the light incident state (1) is defined as an intermittent point, and a non-light incident that is located on a straight line that connects the pixel positions in the light incident state (1) in columns located on both sides of the intermittent point. Data obtained by converting the value of the pixel position in the light state (0) into the light incident state (1) is generated (see FIG. 13), and the interpolation data is stored in the memory 17.

  Subsequently, the control unit 15 generates a video signal for displaying the detected image on the monitor 18 based on the interpolation data stored in the memory 17 and outputs the video signal to the monitor 18 (S41). At this time, in the video signal, the color is specified so that the display color of the image corresponding to the pixel position in the incident state of the external light removal data before interpolation is different from the display color of the image interpolated by the interpolation process. Is done. As a result, as shown in FIG. 14, the monitor 18 displays a detection image corresponding to the pixel position in the light incident state in the interpolation data. In this detected image, an image corresponding to the pixel position in the incident state of the external light removal data before interpolation (regular light incident portion F) and an image corresponding to the pixel position interpolated by the interpolation processing (interpolation portion G). ) Are displayed in different colors. For this reason, the user easily discriminates on the monitor 18 the regular light incident portion F that is the location where the laser reflected light R2 is received and represents the surface shape of the target object W, and the interpolation portion G that is the interpolated location. be able to.

  As described above, according to the present configuration, the monitor 18 displays an image obtained by interpolating a portion that has become intermittent due to the external light removal processing, and distinguishes the interpolation portion G from the non-interpolated portion F. Displayed as possible. Thereby, the user can grasp whether or not an interpolated portion (that is, a light receiving portion of external light) exists in the displayed detection image, and if it exists, in which position it exists. Therefore, the reliability of the detection result can be easily determined.

<Embodiment 5>
Next, a fifth embodiment of the present invention will be described with reference to FIGS.
In the present embodiment, the control unit 15 operates according to the flowchart shown in FIG. First, the control unit 15 generates the first light reception data and the second light reception data in the same procedure as in the fourth embodiment (S10 to S13), and the external light removal data obtained by subtracting the external light incident light amount from the second light reception data. Then, in the external light removal data, when the incident light pixel position is intermittent, interpolation processing is performed to generate interpolation data obtained by interpolating between the pixel positions (S40). Subsequently, the control unit 15 generates a video signal corresponding to the pixel position in the light incident state of the interpolation data, and outputs it to the monitor 18 (S50). Thereby, on the monitor 18, as shown in FIG. 16, the detection image H (detection image subjected to the interpolation process) corresponding to the pixel position in the incident state of the second light reception data is displayed.

  Next, the determination area is designated by the user via the operation unit 19 (S51). This determination area is specified by, for example, inputting an arbitrary pair of coordinates (L3, L4) in the horizontal direction of the detected image from the operation unit 19 while confirming the detected image displayed on the monitor 18. A region between the coordinates (L3, L4) is designated as a determination region.

  When the determination region designation signal is input from the operation unit 19, the control unit 15 designates an image (corresponding to the interpolation unit G in FIG. 14) corresponding to the pixel position interpolated in the interpolation processing of S 40. If it is included (S52: Yes), the fact is notified (S53). As a notification method, the information may be displayed on the monitor 18, a predetermined lamp may be turned on, or a sound may be emitted from a speaker or the like.

  As described above, according to the present configuration, the monitor 18 displays the image H obtained by interpolating the intermittent portion due to the external light removal process. If an image (external light receiving location) corresponding to the interpolated pixel position is included in the determination region designated by the user, this is notified. Thereby, the user can grasp | ascertain whether the location interpolated in the designated determination area | region exists. Therefore, if a highly important area (an area where reliability of the detection result is required) is designated as the determination area, if it is determined that there is no interpolation point in the area, there is no need to repeat the detection operation. The detection work can be efficiently performed.

<Other embodiments>
The present invention is not limited to the embodiments described with reference to the above description and drawings. For example, the following embodiments are also included in the technical scope of the present invention.
(1) In each of the above-described embodiments, the two-dimensional image pickup device is shown as the image pickup means. However, the present invention can also be applied to one having an image pickup device arranged one-dimensionally as the image pickup means. it can. Moreover, you may comprise so that a light projection means, an imaging means, and a target object may be displaced relatively.
(2) An operation mode corresponding to each of the above embodiments may be provided so as to be switchable so that the user can select which operation mode to operate.
(3) In the first and fourth embodiments, the display can be determined by making the display colors of the two types of images different from each other. However, the present invention is not limited to this. For example, the display may be performed by blinking one of the images. .

1 is an overall configuration diagram of a surface shape detection device according to Embodiment 1 of the present invention. A perspective view showing the positional relationship of laser light, target object, and two-dimensional CCD Flow chart showing control operation by control unit The figure explaining the contents of the 1st light reception data The figure explaining the contents of the 2nd received light data Figure showing monitor display contents 7 is a flowchart showing a control operation by the control unit in the second embodiment. Figure showing monitor display contents 7 is a flowchart showing a control operation by the control unit in the third embodiment. The figure explaining the contents of external light removal data Figure showing monitor display contents 9 is a flowchart showing a control operation by a control unit in the fourth embodiment. Diagram explaining the contents of interpolation data Figure showing monitor display contents 7 is a flowchart showing a control operation by a control unit in the fifth embodiment. Figure showing monitor display contents

Explanation of symbols

DESCRIPTION OF SYMBOLS 10 ... Surface shape detection apparatus 11 ... Laser light source (light projection means)
13 ... Two-dimensional CCD (multiple pixels, imaging means)
14 ... CCD drive circuit (imaging means)
15. Control unit (first received light data generation means, second received light data generation means, display control means, external light removal processing means, external light determination means, interpolation processing means, interpolation determination means)
18 ... Monitor (display means, notification means)
19 ... operation part (area designation means)
W ... Target object

Claims (5)

A light projecting means for irradiating light linearly on the surface of the target object;
An imaging unit that includes a plurality of pixels that can receive reflected light that is irradiated from the light projecting unit and reflected by the surface of the target object, and that outputs a light reception signal corresponding to the amount of light received by each pixel; At least one of the light unit and the imaging unit is disposed so as to be inclined with respect to the target object,
Based on a light reception signal output from the imaging unit in a state where no light is emitted from the light projecting unit, first light reception data including information on whether each pixel position is in a light incident state or a non-light incident state is generated. First light reception data generating means;
Based on a light reception signal output from the imaging unit in a state where light is emitted from the light projecting unit, second light reception data including information on a light incident state or a non-light incident state for each pixel position is created. Second received light data generating means;
Display means;
The display means displays a detection image corresponding to the pixel position of the light incident state in the second light reception data, and corresponds to the pixel position of the light reception state in the first light reception data in the detection image. Display control means for displaying a location and a location that does not correspond to the pixel position of the light incident state in the first light reception data so as to be distinguishable from each other;
A surface shape detection apparatus comprising: A light projecting means for irradiating light linearly from an oblique direction to the surface of the target object;
An imaging unit that includes a plurality of pixels that can receive reflected light that is irradiated from the light projecting unit and reflected by the surface of the target object, and that outputs a light reception signal corresponding to the amount of light received by each pixel; At least one of the light unit and the imaging unit is disposed so as to be inclined with respect to the target object,
Based on a light reception signal output from the imaging unit in a state where no light is emitted from the light projecting unit, first light reception data including information on whether each pixel position is in a light incident state or a non-light incident state is generated. First light reception data generating means;
Based on a light reception signal output from the imaging unit in a state where light is emitted from the light projecting unit, second light reception data including information on a light incident state or a non-light incident state for each pixel position is created. Second received light data generating means;
Display means;
Display control means for causing the display means to display a detection image corresponding to a pixel position in a light incident state in the second light reception data;
Area designating means capable of designating an arbitrary determination area in the detection image displayed on the display means;
Outside light determination means for determining whether or not an image corresponding to a pixel position of a light incident state in the first light reception data is included in the determination area specified by the area specification means;
A notification means for notifying that when it is determined by the outside light determination means that an image corresponding to a pixel position in a light incident state in the first light reception data is included in the determination area;
A surface shape detection apparatus comprising: A light projecting means for irradiating light linearly from an oblique direction to the surface of the target object;
An imaging unit that includes a plurality of pixels that can receive reflected light that is irradiated from the light projecting unit and reflected by the surface of the target object, and that outputs a light reception signal corresponding to the amount of light received by each pixel; At least one of the light unit and the imaging unit is disposed so as to be inclined with respect to the target object,
Based on a light reception signal output from the imaging unit in a state where no light is emitted from the light projecting unit, first light reception data including information on whether each pixel position is in a light incident state or a non-light incident state is generated. First light reception data generating means;
Based on a light reception signal output from the imaging unit in a state where light is emitted from the light projecting unit, second light reception data including information on a light incident state or a non-light incident state for each pixel position is created. Second received light data generating means;
Outside light removal processing means for generating outside light removal data in which a pixel corresponding to a light incident pixel position in the first light reception data among the pixel positions of the second light reception data is set to a non-light incident state;
Display means;
Display control means for causing the display means to display a detection image corresponding to a pixel position in a light incident state in the external light removal data;
Informing means for notifying that when there is a non-light incident state among the light incident pixel positions in the second light reception data by the external light removal processing means,
A surface shape detection apparatus comprising: A light projecting means for irradiating light linearly from an oblique direction to the surface of the target object;
An imaging unit that includes a plurality of pixels that can receive reflected light that is irradiated from the light projecting unit and reflected by the surface of the target object, and that outputs a light reception signal corresponding to the amount of light received by each pixel; At least one of the light unit and the imaging unit is disposed so as to be inclined with respect to the target object,
Based on a light reception signal output from the imaging unit in a state where no light is emitted from the light projecting unit, first light reception data including information on whether each pixel position is in a light incident state or a non-light incident state is generated. First light reception data generating means;
Based on a light reception signal output from the imaging unit in a state where light is emitted from the light projecting unit, second light reception data including information on a light incident state or a non-light incident state for each pixel position is created. Second received light data generating means;
Outside light removal processing means for generating outside light removal data in which a pixel corresponding to a light incident pixel position in the first light reception data among the pixel positions of the second light reception data is set to a non-light incident state;
In the external light removal data, when the light incident pixel position is intermittent, between the light incident pixel position in the external light removal data and the intermittent light incident pixel position. and interpolation processing means for generating interpolation data and the pixel position of the non-receiving light, was used as a light entrance state is disposed,
Display means;
The display means displays a detected image corresponding to the pixel position of the light incident state in the interpolation data, and in the detected image, a place interpolated by the interpolation processing means and a place not interpolated. Display control means for displaying in a distinguishable manner;
A surface shape detection apparatus comprising: A light projecting means for irradiating light linearly from an oblique direction to the surface of the target object;
An imaging unit that includes a plurality of pixels that can receive reflected light that is irradiated from the light projecting unit and reflected by the surface of the target object, and that outputs a light reception signal corresponding to the amount of light received by each pixel; At least one of the light unit and the imaging unit is disposed so as to be inclined with respect to the target object,
Based on a light reception signal output from the imaging unit in a state where no light is emitted from the light projecting unit, first light reception data including information on whether each pixel position is in a light incident state or a non-light incident state is generated. First light reception data generating means;
Based on a light reception signal output from the imaging unit in a state where light is emitted from the light projecting unit, second light reception data including information on a light incident state or a non-light incident state for each pixel position is created. Second received light data generating means;
Outside light removal processing means for generating outside light removal data in which a pixel corresponding to a light incident pixel position in the first light reception data among the pixel positions of the second light reception data is set to a non-light incident state;
In the external light removal data, when the light incident pixel position is intermittent, between the light incident pixel position in the external light removal data and the intermittent light incident pixel position. and interpolation processing means for generating interpolation data and the pixel position of the non-receiving light, was used as a light entrance state is disposed,
Display means;
Display control means for causing the display means to display a detection image corresponding to a pixel position of a light incident state in the interpolation data;
And that can be specified area specifying means any area in the detected image to be displayed on said display means,
Interpolation determination means for determining whether or not an image corresponding to a pixel position that has been made light incident by the interpolation processing means is included in the determination area specified by the area specifying means;
When it is determined by the interpolation determination means that an image corresponding to the pixel position that has been made light incident by the interpolation processing means is included in the determination area, a notification means for notifying that effect;
A surface shape detection apparatus comprising:

Images