JP4761992B2 - Image pickup apparatus having birefringent optical element and method for manufacturing the same - Google Patents

Description

The present invention relates to a birefringent optical element that generates an extraordinary ray with respect to an ordinary ray, and in particular, an imager having a birefringent optical element used to prevent moiré fringes and false colors that occur in an imager. The present invention relates to a method for manufacturing the optical element .

  A digital camera or a digital video camera that is often used as a recent image pickup device uses a CCD (Charge Coupled Device) or the like as an image pickup device. In such digital cameras and digital video cameras, since the image pickup elements are discrete, a defect called false color associated with the generation of moire fringes or moire fringes appears in the image.

  Further, even in a display device having discrete display elements, for example, a flat panel display such as a liquid crystal display or a plasma display, a liquid crystal or a digital light processing (Texa Twin Strument Co., Ltd., registered trademark), the image is moire. Stripes are produced.

  Birefringence elements are effective for preventing the occurrence of moire fringes and false colors in imagers and projectors. Patent Document 1 discloses a birefringence element made of liquid crystal. Patent Document 2 describes that birefringence is caused by a quartz plate and a liquid crystal. Further, Patent Document 3 discloses a technique in which a quartz crystal plate and lithium niobate are laminated to be birefringent.

  On the other hand, a technique for forming a modified portion having a different refractive index in a transparent material by irradiating the transparent material with a laser beam having a high electric field strength has been developed along with the development of the laser. In addition, it is disclosed that a portion having a changed refractive index is continuously formed to form an optical waveguide.

Further, Patent Document 5, Ge on SiO ₂ or SiO _2,, P, Al, Ta, transparent layer having a reduced refractive index refractive index controlling dopant at least one addition to such Sb to the laser beam It is disclosed that a light transmission pattern is formed by focused irradiation.
JP-A-6-317765 Japanese Patent Laid-Open No. 9-15535 JP 11-218612 A JP 9-311237 A JP 2004-29285 A

  It is difficult to reduce the size and thickness of the crystalline materials and quartz disclosed in Patent Documents 1 to 3. Further, since the birefringence axis is determined, there is a problem that positional accuracy is required and the cost is high.

The present invention relates to an imaging device having a birefringent optical element that can be effectively used to develop birefringence in a glass material having a uniform refractive index, particularly a transparent glass material, and to prevent moire fringes and false colors. A method for manufacturing an optical element is provided.

The present invention provides an optical element in which a portion (modified portion) having a refractive index different from the refractive index of the transparent glass material is formed in the transparent glass by irradiating the transparent glass material with laser light. The image pickup apparatus includes a birefringent optical element in which the modified portion has birefringence characteristics and the modified portion is formed in a dot shape or a linear shape.

In addition, the present invention is an image pickup device including the birefringent optical element in which extraordinary light due to birefringence is generated in a conical shape or a fan shape with respect to an optical axis of incident light.

In addition, the present invention is an image pickup device having a birefringent optical element in which the modified portion is formed in a dot shape, a linear shape, or a lattice shape in the birefringent optical element.

In the birefringent optical element, the present invention provides a birefringent optical element in which the interval between the modified portions formed in a dot shape or a linear shape is 1 μm to 500 μm at a position where the refractive index is maximum. An imaging device having an optical element.

Further, the birefringent optical element of the present invention is the birefringent optical element in which the modified portion formed in a dotted or linear shape is formed in one or more layers in the birefringent optical element. An imaging device having an element.

The present invention also provides an optical element for use in the imaging device, wherein the transparent glass material is focused and irradiated with laser light having a high electric field strength of 0.05 GW / cm ^{2 to} 10 TW / cm ^2. Is the method.

The present invention relates to an imaging device having a birefringent optical element that can be effectively used to develop birefringence in a glass material having a uniform refractive index, particularly a transparent glass material, and to prevent moire fringes and false colors. A manufacturing method is provided.

  Hereinafter, although embodiment of this invention is described based on drawing, this invention is not limited to this embodiment.

  The present invention condenses and irradiates a transparent glass material with laser light, induces a structural change, generates a portion having a refractive index larger than the refractive index of the transparent glass material, and has a birefringent optical property. It is an element.

  FIG. 1 conceptually shows the birefringence of an optical element having birefringence, and incident light 10 is separated into extraordinary light 11 and ordinary light 12 by a modified portion 2 formed in a transparent glass material. .

  The extraordinary light 11 can be generated in a conical shape, an elliptical cone shape, or a fan shape by forming the modified portion.

  As shown in FIG. 2, the modifying unit 2 condenses and irradiates the transparent glass material 1 with the laser beam 20 using the condensing functional element 21, and the refractive index of the transparent glass material 1 is contained in the transparent glass material 1. It is formed by generating a part (modified part) having a refractive index larger than that. As the laser light 20, it is desirable to use an ultrashort pulse laser.

  The refractive index of the modified portion 2 is desirably at least 0.1 or more than the refractive index of the transparent glass material 1.

  Although it is desirable to use an objective lens for the light condensing function element 21, a concave mirror can also be used.

  A laser that can be suitably used as an ultrashort pulse laser is a titanium sapphire laser, a YAG laser, an Nd-doped, Yb-doped, or Er-doped fiber laser.

  The transparent glass material 1 needs to have a certain degree of transparency with respect to the laser light described above. For example, oxide glass (quartz glass, silicate glass, borosilicate glass, phosphate glass, aluminum silicate) Glass), halide glass, sulfide glass, or chalcogenide glass.

  In the present invention, it is desirable to use a glass material from the viewpoint of durability and transparency, but the material is not limited to the transparent glass material, and a polymer material such as PMMA, ceramics, or the like may be used.

In order to form the modified portion by condensing the laser beam of the ultrashort pulse laser inside the transparent glass material 1, it is preferable that a pulse laser beam having a high power density can be emitted. It is preferable to use a laser beam having a high electric field of 0.05 GW / cm ² or more. Further, for the 10 TW / cm ² or less, the maximum value of the laser 10 TW / cm ² are commercially available, not particularly limited.

In addition, an ultrashort pulse laser with a short pulse width, more specifically, an ultrashort pulse width at a condensing point of 10 femto (10 × 10 ⁻¹⁵ ) or more and 10 pico (10 × 10 ⁻¹² ) or less. A pulse laser is preferred. In particular, when the material for forming the modified portion is a glass material, the pulse width is more preferably 10 femtoseconds or more and 500 femtoseconds or less. If the pulse width is in the above range, the energy per pulse of the pulse laser can be reduced, which is advantageous in terms of energy.

  The optical effect of birefringence can be controlled by changing the refractive index of the modified portion.

  The magnitude of the refractive index of the modified portion and the region where the modified portion is formed can be improved by adjusting the power of the laser beam that focuses and irradiates the transparent glass material, or by adjusting the formation speed of the modified portion. The size of the refractive index of the mass portion and the size of the region where the modified portion is formed can be changed.

  Further, when an objective lens is used for condensing laser light, the size of the region where the modified portion is formed can be controlled by selecting the NA of the objective lens.

  Further, the polarization state of the laser to be irradiated may be elliptical polarization, but linear polarization is preferable because the birefringence direction can be easily controlled.

  By controlling the electric field direction of the laser light to form the modified portion, the direction in which abnormal light is generated can be controlled. By controlling the direction of the extraordinary light, for example, when incident light is polarized as in a liquid crystal display, moire fringes can be easily eliminated.

  In order to control the electric field direction of the laser light, it is preferable to use a diffraction grating or a polarizing element.

  When forming a modified part by irradiating a transparent glass material with laser light, the laser light may be moved relative to the transparent glass material, but the laser light is fixed and the transparent glass material is moved to modify It is preferable to form a part.

  The transparent glass material is preferably moved in the direction perpendicular to the optical axis of the laser beam or in the optical axis direction of the laser beam when forming the modified portion. In the birefringent optical element of the present invention, it is desirable to form a plurality of point-like or linear modified portions and distribute them on a plane.

  For example, FIG. 3 shows an example in which a plurality of reformed portions each having a circular plane and formed in a dot shape are distributed in FIG. This is an example in which a plurality of modified portions formed in a linear shape are distributed.

  As shown in FIG. 4, the modified portion having an elliptical plane can be formed by inclining the surface of the transparent glass material 1 with respect to the optical axis of the laser beam forming the modified portion. Alternatively, it can be formed by adjusting the condensing shape of the laser light to an ellipse.

  In addition, as shown in FIG. 6, the transparent glass material may be moved in the optical axis direction of the laser beam, and the modified portion having a circular plane may be formed thick in the thickness direction of the transparent glass material.

  FIG. 7 shows an example in which the point-like modified portion is formed in two layers, and FIG. 8 shows an example in which the linear modified portion is formed in two layers. As shown in FIG. 7 and FIG. The mass part may be formed three-dimensionally.

  FIGS. 3 to 8 show examples in which the modified portions 2 formed in the shape of dots or lines are distributed at regular intervals. The optical element showing the birefringence of the present invention is an example of these examples. However, the modified portions may be randomly distributed, and the shape of the modified portions and the interval between the modified portions are preferably determined in accordance with the purpose of use.

  By selecting the speed of scanning the laser beam or the speed of moving the transparent glass material and the repetition frequency of the pulse laser to be used, a dot-like or linear modified portion can be formed.

  For example, a laser having a repetition frequency of a 1 kHz pulse laser is suitable for forming a dot-shaped modified portion, and a laser having a repetition frequency of a 250 kHz pulse laser has a high repetition frequency, so that a line-shaped birefringence region is formed. Suitable for forming. A 1 kHz pulse laser with a low repetition frequency has a high irradiation energy per pulse and is suitable for obtaining a large birefringence.

In addition, when used as an imaging device having two or more modified portions and having a birefringent optical element , the interval x or y between the modified portions shown in FIGS. 3 and 4 is determined as a birefringent optical element. In order to use, it is preferable that it is 1 micrometer-100 micrometers. If it is smaller than 1 μm, the regions of the reforming portions are formed so as to overlap with each other, so that the difference in refractive index becomes non-uniform, making it difficult to use as an imaging device having a birefringent optical element.

Further, when the thickness exceeds 100 μm, the area between the modified portions becomes wide, there is no difference in refractive index, the range of the refractive index of the transparent glass material becomes wide, and it can function as an imaging device having a birefringent optical element. It becomes difficult.

Example 1
A 1 mm thick glass plate made of soda lime silicate glass (SiO ₂ —Na ₂ O—CaO) is used as the transparent glass material, and the laser beam has a repetition frequency of 250 kHz, a pulse width of 150 fs, and an average output of 500 mW, a femtosecond ultrashort pulse laser. The birefringent optical element as shown in FIG.

  An objective lens having an NA of 0.55 was used for condensing the laser beam, a transparent glass material was placed on the moving stage, the moving speed of the stage was set to 5 mm / sec, and the linear modified portion 2 was formed. The depth Z from the surface of the modified portion 2 was 100 μm. The interval y between the linear reforming portions was 50 μm.

  From the polarized photograph of FIG. 12, it was confirmed that the modified portion 2 has a birefringence and a refractive index different from the surroundings.

  Furthermore, the birefringent optical element produced in this example is placed in front of the lens of the digital camera, and a subject having a stripe pattern (1 mm period, approximately 0.3 mm line width) is photographed. As shown in FIG. 15, it was confirmed that the moire fringes disappeared from the image by the birefringent optical element produced in this example.

Example 2
A birefringent optical element as shown in FIG. 5 was produced in the same manner as in Example 1 except that the average output of the laser beam was 50 mW and the interval y between the linear modified portions was 3 μm.

  By using the birefringent optical element produced in Example 2, it was confirmed that the moire fringes disappeared from the image, similarly to the birefringent optical element of Example 1.

Example 3
A birefringent optical element as shown in FIG. 5 was produced in the same manner as in Example 1 except that the polarization of the laser beam was changed to linearly polarized light by a polarizing plate.

  Even when the birefringent optical element produced in this example was used, it was confirmed that the moire fringes disappeared from the image, similarly to the birefringent optical element of Example 1.

Example 4
Birefringence in which dot-like modified portions 2 are arranged as shown in FIG. 3 in the same manner as in Example 1 except that the repetition frequency of the laser beam is 1 KHz and the moving speed of the moving stage is 25 mm / sec. An optical element was prepared. The interval x between the reforming portions 2 was 25 μm.

  The formation of the modified portion as shown in the polarization photograph (FIG. 13) was confirmed. As in Example 1, the optical element showing the birefringence of this example was placed in front of the lens of the digital camera, and A live-patterned subject was photographed, and it was confirmed that the moire fringes disappeared from the image.

Example 5
Birefringence in which dot-like modified portions 2 are arranged as shown in FIG. 3 in the same manner as in Example 1 except that the repetition frequency of the laser beam is 1 KHz and the moving speed of the moving stage is 50 mm / sec. An optical element was prepared. The interval x between the reforming portions 2 was 50 μm.

  The formation of the modified portion as shown in the polarization photograph (FIG. 14) was confirmed, and similarly to Example 1, the optical element showing the birefringence of this example was placed in front of the lens of the digital camera, and the strike was made. A live-patterned subject was photographed, and it was confirmed that the moire fringes disappeared from the image.

It is a figure which shows notionally the function of the optical element which shows the birefringence of this invention. It is a figure which shows notionally forming a modification part by condensing and irradiating a laser beam. The figure which shows notionally the optical element which shows birefringence obtained by forming in a plate-shaped transparent glass material the modified part whose plane is circular in the shape of a dot. The figure which shows notionally the optical element which shows birefringence obtained by forming in a plate-shaped transparent glass material the modification part whose plane is elliptical in the shape of a dot. The figure which shows notionally the optical element which shows birefringence obtained by forming a plane-shaped modified part in a plate-shaped transparent glass material. The figure which shows notionally the optical element which shows birefringence obtained by forming the modified part whose plane is circular shape thickly in a thickness direction in plate-shaped transparent glass material. The figure which shows notionally the optical element which shows birefringence obtained by forming in a plate-shaped transparent glass material the modification part whose plane is circular shape in two layers. The figure which shows notionally the optical element which shows birefringence obtained by forming in a plate-shaped transparent glass material the modification part whose plane is linear in two layers. The figure which shows notionally the change of the refractive index of the modification part formed between aa of FIG. 3 or bb of FIG. 5 when a modification part is formed with a comparatively weak energy density. The graph which shows notionally the change of the refractive index of the modification part formed between aa of Drawing 3 or between bb of Drawing 5 when a modification part is formed with comparatively strong energy density. The graph which shows notionally the change of the refractive index of the modification part (for example, between cc of Drawing 5) at the time of forming a modification part in the shape of a line. 5 is a polarization photograph taken using polarized light of the modified portion of Example 1. FIG. FIG. 6 is a polarization photograph taken using polarized light of the modified portion of Example 4. FIG. FIG. 10 is a polarization photograph taken using polarized light of the modified portion of Example 5. FIG. The photograph which shows the image (b) image | photographed without using the image (a) image | photographed using the birefringent optical element of Example 1, and not using it.

1 Transparent glass material 2 Modified part (part with different refractive index)
DESCRIPTION OF SYMBOLS 10 Incident light 11 Abnormal light 12 Normal light 20 Pulsed laser light 21 Objective lens 31 Reformation part and its vicinity refractive index distribution 32 Reformation part and its vicinity refractive index distribution 33 Reformation part and its vicinity refractive index distribution

Claims (3)

In the optical element in which a portion having a refractive index different from the refractive index of the transparent glass material (modified portion) is formed in the transparent glass by irradiating the transparent glass material with the laser light, the modified portion includes It has birefringence characteristics in which extraordinary light is generated in the shape of a cone or a fan with respect to the optical axis of the incident light, and the modified portion is formed in a dot shape. An image pickup device having a birefringent optical element whose interval is 1 μm to 100 μm at an interval of a position where the refractive index is maximum. The imaging device having a birefringent optical element according to claim 1, wherein the modified portion formed in a dot shape is formed in one or more layers. 0.05GW ^/ cm 2 ~10TW ^/ cm optical element used in the imaging apparatus according to claim 1 or claim 2, characterized in that focused irradiation of the laser light transparent glass material having a high electric field strength of ² How to manufacture.

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