JP2005121916A - Method for manufacturing base plate with recessed part for lenticular lens, base plate with recessed part for lenticular lens, lenticular lens base plate, transmission type screen and rear type projector - Google Patents

Method for manufacturing base plate with recessed part for lenticular lens, base plate with recessed part for lenticular lens, lenticular lens base plate, transmission type screen and rear type projector Download PDF

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JP2005121916A
JP2005121916A JP2003356977A JP2003356977A JP2005121916A JP 2005121916 A JP2005121916 A JP 2005121916A JP 2003356977 A JP2003356977 A JP 2003356977A JP 2003356977 A JP2003356977 A JP 2003356977A JP 2005121916 A JP2005121916 A JP 2005121916A
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substrate
lenticular lens
concave portions
manufacturing
method
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Daisuke Sawaki
大輔 澤木
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Seiko Epson Corp
セイコーエプソン株式会社
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Abstract

Provided are a method of manufacturing a substrate with a concave portion for a lenticular lens, a substrate with a concave portion for a lenticular lens, a lenticular lens substrate, a transmissive screen, and a rear projector capable of easily and precisely forming a concave portion for a lenticular lens. about.
A method of manufacturing a substrate with a lenticular lens recess for forming a lenticular lens recess on a substrate, the surface of the substrate opposite to the surface on which the lenticular lens recess is formed. And forming a modified region 6 on the substrate by irradiating a laser beam from an ultrashort pulse laser light source, and etching the substrate having the modified region to form a recess for a lenticular lens. And The pulse width of the laser light is 10 fs to 1 ps. The pulse energy of the laser light is 1 μJ to 1 mJ.
[Selection] Figure 1

Description

  The present invention relates to a method for manufacturing a substrate with concave portions for lenticular lenses in which a large number of concave portions for lenticular lenses are formed on a substrate, a substrate with concave portions for lenticular lenses, a lenticular lens substrate, a transmissive screen, and a rear projector.

A display device that projects an image on a screen is known. As such a display device, a rear-type projector applied to a home theater monitor, a large-screen television, or the like is known, and the demand thereof has been increasing in recent years.
In such a rear projector, a transmissive screen is mainly used for image formation. A lenticular lens is generally used for such a transmission screen.
As a method of manufacturing a lenticular lens used for such a transmission type screen, a concave portion (a concave portion for a lenticular lens) for forming a lenticular lens is formed by etching using a mask having a predetermined pattern of openings, and this is used as a mold. The manufacturing method is known (for example, refer to Patent Document 1).

However, with this technique, it has been difficult to finely form a lenticular lens recess on the substrate. Moreover, since such a method has many processes, there also existed a problem that it was complicated. Furthermore, a relatively large rear type projector or the like has a problem that it is technically difficult to form a lenticular lens substrate because it requires resist formation and patterning in a large area. In order to avoid this, a method of pasting together a plurality of lenticular lens substrates having a relatively small area is conceivable. However, in this case, there is a problem that a boundary line between the lenticular lens substrates is generated.
Japanese Patent Laid-Open No. 5-208848

  An object of the present invention is to provide a method of manufacturing a substrate with a concave portion for a lenticular lens capable of easily and precisely forming a concave portion for a lenticular lens, a substrate with a concave portion for a lenticular lens, a lenticular lens substrate, a transmissive screen, and a rear projector. Is to provide.

Such an object is achieved by the present invention described below.
The method for manufacturing a substrate with a concave portion for a lenticular lens according to the present invention is a method for manufacturing a substrate with a concave portion for a lenticular lens, wherein the concave portion for a lenticular lens is formed on the substrate,
Irradiating the substrate with laser light from an ultrashort pulse laser light source from the surface opposite to the surface on which the concave portion for the lenticular lens of the substrate is formed, and forming an altered region on the substrate;
Etching the substrate having the altered region and forming the concave portion for the lenticular lens.
Thereby, the board | substrate with a concave part for lenticular lenses in which the concave part for lenticular lenses was densely arranged can be manufactured simply.

The method for manufacturing a substrate with a concave portion for a lenticular lens according to the present invention is a method for manufacturing a substrate with a concave portion for a lenticular lens, wherein the concave portion for a lenticular lens is formed on the substrate,
Irradiating the substrate with laser light from an ultrashort pulse laser light source from the surface opposite to the surface on which the concave portion for the lenticular lens of the substrate is formed, and forming an altered region on the substrate;
Etching the substrate having the altered region to form the concave portion for the lenticular lens and an alignment mark.
Thereby, the board | substrate with a concave part for lenticular lenses in which the concave part for lenticular lenses was densely arranged can be manufactured simply. In addition, the alignment mark can be formed without significantly increasing the number of steps.

In the method for manufacturing a substrate with a concave portion for a lenticular lens according to the present invention, the pulse width of the laser light is preferably 10 fs to 1 ps.
Thereby, since multiphoton absorption can be effectively generated, the altered region can be formed more efficiently.
In the method for manufacturing a substrate with a concave portion for a lenticular lens according to the present invention, the pulse energy of the laser light is preferably 1 μJ to 1 mJ.
Thereby, the altered region can be formed more efficiently.

In the method for manufacturing a substrate with concave portions for a lenticular lens according to the present invention, the pulse repetition frequency of the laser light is preferably 10 Hz to 100 kHz.
Thereby, the altered region can be formed more efficiently.
In the method for manufacturing a substrate with a concave portion for a lenticular lens according to the present invention, it is preferable that the ultrashort pulse laser light source is irradiated with the laser light while being moved relative to the substrate.
As a result, the altered region can be formed more reliably and continuously.

In the method for manufacturing a substrate with concave portions for a lenticular lens according to the present invention, it is preferable that an interval between irradiation positions in the plane perpendicular to the optical axis of the ultrashort pulse laser light source is 1 to 100 μm.
As a result, the altered region can be formed more reliably and continuously.
In the method for manufacturing a substrate with concave portions for a lenticular lens according to the present invention, the length of the altered region in the thickness direction of the substrate is preferably 1 to 500 μm.
Thereby, in the etching process, the degree of etching of the substrate can be made moderate. In addition, the shape of the concave portion for the lenticular lens formed in the etching process is optimal for obtaining a lenticular lens having particularly excellent optical characteristics.

In the method for manufacturing a substrate with a concave portion for a lenticular lens according to the present invention, the width of the altered region in the direction perpendicular to the direction in which the ultrashort pulse laser light source is moved in the surface direction of the substrate is 0.5 to 10 μm. Is preferred.
Thereby, in the etching process, the degree of etching of the substrate can be made moderate. In addition, the shape of the concave portion for the lenticular lens formed in the etching process is optimal for obtaining a lenticular lens having particularly excellent optical characteristics.

In the method for manufacturing a substrate with concave portions for a lenticular lens of the present invention, the etching is preferably performed by wet etching.
As a result, the processing can be performed with a simpler apparatus as compared with the dry etching method, and more than one substrate can be processed at a time. As a result, productivity can be improved and a substrate with concave portions for lenticular lenses can be provided at low cost.

In the method for manufacturing a substrate with concave portions for lenticular lenses according to the present invention, the average width of the concave portion for lenticular lenses when viewed in plan is preferably 5 to 500 μm.
Thereby, for example, a transmission screen manufactured using such a substrate with concave portions for lenticular lenses has excellent resolution in an image projected on the screen.

In the method for manufacturing a substrate with concave portions for lenticular lenses of the present invention, the depth in the vicinity of the center of the concave portion for lenticular lenses is preferably 5 to 500 μm.
Thereby, the optical characteristics of the lenticular lens obtained using such a lenticular lens recess can be made particularly excellent.
In the method for manufacturing a substrate with concave portions for a lenticular lens of the present invention, it is preferable that the substrate is substantially transparent.
Thereby, when manufacturing a lenticular lens board | substrate using the board | substrate with a concave part for lenticular lenses, a lenticular lens board | substrate can be used without peeling from the board | substrate with a concave part for lenticular lenses.

The substrate with concave portions for a lenticular lens of the present invention is manufactured by the method for manufacturing a substrate with concave portions of the present invention.
Thus, a substrate with concave portions for lenticular lenses in which concave portions for lenticular lenses are densely arranged can be obtained with high productivity. In particular, it is possible to easily and inexpensively obtain a substrate having a concave portion for a lenticular lens having a relatively large area.

The lenticular lens substrate of the present invention is manufactured using the substrate with concave portions for lenticular lenses of the present invention.
Thereby, a lenticular lens substrate in which lenticular lenses are densely arranged can be obtained with high productivity. In particular, a relatively large area lenticular lens substrate can be obtained easily and inexpensively.

The transmission screen of the present invention is characterized by including the lenticular lens substrate of the present invention.
Thereby, a transmissive screen can be obtained with high productivity. In particular, a transmission screen having a relatively large area can be obtained easily and inexpensively.
The transmission type screen of the present invention, a Fresnel lens portion in which a Fresnel lens is formed on the light exit surface side surface,
The lenticular lens substrate of the present invention disposed on the exit surface side of the Fresnel lens part;
A light diffusing unit disposed between the Fresnel lens unit and the lenticular lens substrate is provided.
As a result, it is possible to provide a transmission screen that has a suitable viewing angle distribution and suppresses the generation of moire.

A rear projector according to the present invention includes the transmission screen according to the present invention.
Thereby, a rear projector can be obtained with high productivity. In particular, a rear projector having a relatively large area can be obtained easily and inexpensively.
A rear projector according to the present invention includes a projection optical unit, a light guide mirror, and a transmissive screen according to the present invention.
Thereby, a rear projector can be obtained with high productivity. In particular, a rear projector having a relatively large area can be obtained easily and inexpensively.

Hereinafter, the present invention will be described in detail based on preferred embodiments shown in the accompanying drawings.
The lenticular lens concave substrate and the lenticular lens substrate of the present invention each include both an individual substrate and a wafer.
First, the manufacturing method of the board | substrate with a recessed part for lenticular lenses of this invention is demonstrated, referring FIGS. 1-4.
FIG. 1 is a schematic longitudinal sectional view showing a method of manufacturing a substrate with concave portions for lenticular lenses of the present invention, FIG. 2 is a sectional view taken along line YY in FIG. 1, and FIG. 3 is a sectional view of concave portions for lenticular lenses. FIG. 4 is a schematic plan view showing a substrate with concave portions for a lenticular lens.

In the method for manufacturing a substrate with concave portions for a lenticular lens according to the present invention, a step of irradiating the substrate with laser light from an ultrashort pulse laser light source to form an altered region on the substrate, and a substrate on which the altered region is formed And a step of forming a recess for a lenticular lens (hereinafter also simply referred to as a recess). In practice, a large number of lenticular lens recesses are formed on the substrate. Here, in order to make the explanation easier to understand, a case where one lenticular lens recess is formed will be described as an example. In addition, the altered region in this specification refers to a chemically altered region, a region containing a minute crack or a defect, and the like.
First, when manufacturing the board | substrate 2 with a recessed part for lenticular lenses, the glass substrate 5 is prepared.

The glass substrate 5 is preferably used with a uniform thickness and no deflection or scratches. The glass substrate 5 is preferably one whose surface is cleaned by washing or the like.
Examples of the material of the substrate 5 include soda glass, crystalline glass, quartz glass, and borosilicate glass.
Among the above, for example, when soda glass or crystalline glass (for example, neo-serum) is used, processing becomes relatively easy, and the obtained substrate with concave portions of the lenticular lens has suitable optical characteristics. Can do. Further, soda glass and crystalline glass are relatively inexpensive and advantageous from the viewpoint of manufacturing cost.

In addition, for example, when quartz glass whose characteristics do not easily change depending on the environment at the time of manufacture is used, the obtained substrate with lenticular lens recesses is excellent in stability and is unlikely to be warped or bent.
Although the thickness of the glass substrate 5 changes with various conditions, such as the material which comprises the glass substrate 5, and a refractive index, about 0.3-3 mm is preferable normally and about 0.5-2 mm is more preferable. When the thickness is within this range, a compact lenticular lens-provided substrate 2 having necessary optical characteristics can be obtained.

[Deformed region formation process]
First, as shown in FIG. 1, laser light is emitted from the ultrashort pulse laser light source 7 to the inside of the glass substrate 5 from the surface of the glass substrate 5 opposite to the surface on which the recess 3 is formed. Irradiate to collect light.
When laser light is irradiated from the ultrashort pulse laser light source 7 in this way, the laser light is irradiated from the vicinity of the focal point (condensing point) of the laser light toward the irradiation direction of the laser light, that is, the X direction in FIG. Thus, the altered region 6 is formed.

  Furthermore, the laser beam is irradiated while moving the ultrashort pulse laser light source 7 linearly in parallel with the surface direction of the glass substrate 5. When the ultrashort pulse laser light source 7 (condensing point) is moved in this way, the altered region 6 can be continuously formed in the moving direction of the ultrashort pulse laser light source 7, as shown in FIG. Note that the glass substrate 5 may be moved without moving the ultrashort pulse laser light source 7, or both may be moved.

By using the ultrashort pulse laser light source 7 in this way, the width in the direction perpendicular to the direction in which the ultrashort pulse laser light source 7 is moved in the surface direction of the glass substrate 5 in the altered region 6 is extremely small. be able to. As a result, the finally obtained lenticular lens-equipped substrate 2 has the concave portions 3 arranged densely.
In addition, after forming the altered region 6 having a desired shape, the laser beam irradiation is stopped. Thereafter, the above operation is repeated in parallel with the formed altered region 6 at a predetermined interval. Thereby, the glass substrate 5 in which the altered regions 6 are regularly arranged is obtained.

  The laser used for the ultrashort pulse laser light source is not particularly limited, but a femtosecond order laser is preferably used in the pulse width. It is also preferable to use a regenerated and amplified ultrashort pulse. Thereby, energy intensity required for multiphoton absorption can be easily obtained, and absorption can be induced even in a material (glass substrate 5) transparent to the wavelength used. By using such a laser, it is possible to form the altered region 6 having almost no unwanted altered region caused by thermal diffusion. Further, due to the non-linear effect of multiphoton absorption, the altered region 6 can be formed in a region below the diffraction limit in the direction perpendicular to the optical axis.

The pulse width of the irradiated laser light is preferably 10 fs to 1 ps, more preferably 50 fs to 500 fs, and further preferably 100 fs to 150 fs. Thereby, since multiphoton absorption can be produced effectively, the altered region 6 can be formed more efficiently. Further, the altered region 6 can be selectively formed only at the target portion. On the other hand, if the pulse width is less than the lower limit value, it may be difficult to cause multiphoton absorption, and thus there is a possibility that the sufficient altered region 6 may not be formed. On the other hand, if the pulse width exceeds the upper limit, thermal diffusion may occur around the laser light irradiation region, and as a result, it may be difficult to control the shape of the altered region 6.
Further, the wavelength of the laser beam is preferably 200 to 1500 nm, and more preferably 400 to 800 nm. As a result, the altered region 6 inside the material (glass substrate 5) by multiphoton absorption can be formed, and the width of the altered region 6 in the direction perpendicular to the optical axis can be further reduced.

  The pulse energy of the laser light is preferably 1 μJ to 1 mJ, more preferably 10 μJ to 500 μJ, and even more preferably 80 μJ to 120 μJ. Thereby, the altered region 6 can be formed more efficiently. On the other hand, if the pulse energy is less than the lower limit, it may be difficult to form the altered region 6 for sufficiently improving the etching rate. On the other hand, if the pulse energy exceeds the upper limit value, it may be difficult to control the shape, size, etc. of the altered region 6.

Further, the pulse repetition frequency of the laser light is preferably 10 Hz to 100 kHz, and more preferably 1 kHz to 10 kHz. Thereby, the altered region 6 can be formed more efficiently.
The interval between irradiation positions in the plane perpendicular to the optical axis of the ultrashort pulse laser light source 7 with respect to the glass substrate 5 is preferably 1 to 100 μm, and more preferably 5 to 50 μm. Thereby, the altered region 6 can be formed with high productivity. On the other hand, if the interval between the irradiation positions is less than the lower limit, the productivity of the substrate 2 with concave portions for lenticular lenses may be lowered. On the other hand, if the interval between the irradiation positions exceeds the upper limit value, it may be difficult to reliably form the altered region 6 having a desired shape.

According to the method of the present invention, the length and width of the altered region can be easily controlled by controlling the irradiation conditions of the laser beam such as the focal position and pulse width of the irradiated laser beam. As a result, a lenticular lens recess described later can be reliably controlled by a desired shape and size. For example, when the focal point of the laser beam is adjusted so as to increase the length of the altered region 6, the concave portion 3 having a deep depth near the center can be formed, and the aspect ratio can be made relatively large. it can. Further, by adjusting the focus of the laser beam so as to reduce the length of the altered region, it is possible to form the concave portion 3 having a shallow depth near the center, and to make the aspect ratio relatively small. .
Since the altered region 6 formed as described above has a higher etching rate than other portions, the recessed portion 3 can be formed by performing etching as described in detail later.

  The length of the altered region 6 in the thickness direction of the glass substrate 5 (the length represented by A in the figure) is preferably 1 to 500 μm. Thereby, in the etching process mentioned later, the degree by which the glass substrate 5 is etched can be made moderate. In addition, the shape of the recess 3 formed in the etching step described later is optimal for obtaining a lenticular lens having particularly excellent optical characteristics. On the other hand, when the length of the altered region 6 is less than the lower limit value, it becomes difficult to sufficiently increase the depth of the concave portion 3 formed in the etching process described later. In the lenticular lens substrate obtained thereby, It may be difficult to obtain sufficient optical characteristics. On the other hand, if the length of the altered region 6 exceeds the upper limit value, it may be difficult to control the shape or the like of the recess 3.

Further, the width of the altered region 6 in the direction perpendicular to the direction in which the ultrashort pulse laser light source 7 is moved in the surface direction of the glass substrate 5 (the width represented by B in the figure) is 0.5 to 10 μm. Is preferable, and it is more preferable that it is 1-5 micrometers. Thereby, in the etching process mentioned later, the degree by which the glass substrate 5 is etched can be made moderate. In addition, the shape of the recess 3 formed in the etching step described later is optimal for obtaining a lenticular lens having particularly excellent optical characteristics.
Moreover, it is preferable that the space | interval of adjacent alteration region 6 is 5-500 micrometers, and it is more preferable that it is 10-100 micrometers. Thereby, the recessed part 3 of a precise | minute and moderate magnitude | size can be formed on the glass substrate 5 densely.

The altered region 6 may be formed continuously up to the surface of the glass substrate 5 (the surface on the side where the concave portion 3 is formed) as shown in the drawing, or up to the surface of the glass substrate 5. It may not be formed. In the former case, the recess 3 can be formed more economically without waste when the recess 3 is formed by etching as will be described in detail later. On the other hand, in the latter case, the depth, width, radius of curvature, etc. of each recess 3 formed on the glass substrate 5 can be controlled to be different in each recess 3.
Further, the irradiation condition of the laser beam may be different at each part to be irradiated.

[Etching process]
Next, as shown in FIG. 2, the glass substrate 5 on which the altered region 6 is formed is etched to form the recesses 3 on the glass substrate 5.
As described above, the altered region 6 has a higher etching rate than other portions, so that it is etched faster than the other portions and corresponds to the altered region 6 as shown in FIG. A hole 61 is formed at the site.

Thereafter, the hole 61 is gradually etched (see FIG. 2C), and etching is performed until a desired size is obtained, so that a recess 3 as shown in FIG. 2D is formed.
Examples of the etching method include a wet etching method and a dry etching method. Among these, it is preferable to use a wet etching method. As a result, the processing can be performed with a simpler apparatus as compared with the dry etching method, and more than one substrate can be processed at a time. As a result, productivity is improved and the substrate 2 with concave portions for lenticular lenses can be provided at low cost.

When using the wet etching method among the etching methods described above, an aqueous solution of hydrogen fluoride, an ammonium fluoride solution, an aqueous solution of hydrofluoric acid + nitric acid, an iron (III) chloride solution, an aqueous alkaline solution, or the like is used as an etchant. Can do.
In the case of using a dry etching method, CHF 3 gas, chlorine-based gas, or the like can be used as an etchant.
As described above, the lenticular lens-provided substrate 2 with the recess 3 (the lenticular lens-provided substrate with the recess of the present invention) is obtained.

The average width of the formed recess 3 when viewed in plan is preferably 5 to 500 μm, and more preferably 10 to 100 μm. Thereby, for example, a transmission screen manufactured using such a substrate 2 with concave portions for lenticular lenses has excellent resolution in an image projected on the screen.
Moreover, it is preferable that the average curvature radius in the center part vicinity of the recessed part 3 is 2.5-250 micrometers, and it is more preferable that it is 5-50 micrometers. Thereby, the optical characteristics of the lenticular lens obtained by using such a lenticular lens recess 3 can be made particularly excellent.

Further, the depth near the center of the recess 3 is preferably 5 to 500 μm, and more preferably 10 to 200 μm. Thereby, the optical characteristic of the lenticular lens obtained using such a recessed part 3 can be made especially excellent.
According to the method of the present invention as described above, the altered region can be densely formed on the substrate, so that the finally obtained substrate with concave portions for lenticular lenses is densely arranged with concave portions for lenticular lenses. Can be.

Also, according to the method of the present invention, d / c, so-called aspect ratio, can be easily controlled, where c is the average width of the lenticular lens recess formed and d is the depth near the center. Can do.
In addition, according to the method of the present invention, it is possible to easily process a large substrate. When manufacturing a large substrate, there is no need to bond a plurality of substrates as in the conventional case, and the seam of the bonding can be eliminated. This makes it possible to manufacture a high-quality substrate with a concave portion for a large lenticular lens at a low cost by a simple method.

  Further, according to the method of the present invention, as shown in FIG. 4, the alignment mark 4 can be formed in the same manner as the recess 3 described above. That is, a laser beam is irradiated from the ultrashort pulse laser light source 7 to a position where the alignment mark 4 is to be formed to form a modified region (modified region forming step), and then etching (etching step) is performed. An alignment mark 4 as a recess is formed.

The alignment mark 4 can be formed almost simultaneously with the formation of the recess 3. By forming the alignment mark 4 in the process of forming the recess 3 in this way, the alignment mark 4 can be formed without significantly increasing the number of steps.
The alignment mark 4 is used as a positioning index when, for example, a lenticular lens substrate 1 to be described later and various things are manufactured using the lenticular lens substrate 1.

The focal position and irradiation conditions of the laser beam when forming the altered region for forming the alignment mark 4 are different from those when forming the altered region 6 for forming the recess 3. It may be the same.
The formation position of the alignment mark 4 is not particularly limited. For example, the alignment mark 4 can be formed outside the formation region of the recess 3 as shown in FIG.

It is preferable to provide a plurality of alignment marks 4 on the substrate 2 with concave portions for lenticular lenses. In particular, it is preferable to provide a plurality of alignment marks 4 at the corners of the substrate 2 with concave parts for lenticular lenses. Thereby, positioning can be performed more easily.
FIG. 4 shows an example in which the alignment mark 4 has a cross shape. The shape of the alignment mark 4 is not particularly limited, but it is preferable to have a corner portion 41 that forms a corner as shown in FIG. Thus, when the alignment mark 4 has the corner | angular part 41, positioning can be performed more correctly.

Furthermore, as shown in FIG. 4, it is preferable that the alignment mark 4 has a mark (circular opening 44 in FIG. 1) indicating the central portion thereof. Thereby, the positioning accuracy can be further improved.
In the above-described embodiment, the alignment mark 4 is formed outside the region where the lenticular lens recess 3 is formed on the substrate 2 with the lenticular lens recess. However, the alignment mark 4 is placed inside the region where the lenticular lens recess 3 is formed. Needless to say, it may be formed.

This alignment mark 4 can be used for various positioning when assembling various things using the board | substrate 2 with a concave part for lenticular lenses, for example.
In the above-described embodiment, the case where the altered region 6 is continuously formed has been described. For example, the pulse repetition frequency, the interval between irradiation positions of the ultrashort pulse laser light source 7 and the relative movement speed are adjusted. As a result, as shown in FIG. 5, minute altered regions 6 can be intermittently formed in the moving direction of the ultrashort pulse laser light source 7. By forming intermittently in this way, the power consumption of the ultrashort pulse laser light source 7 can be suppressed, and the economy is improved. Further, compared to the case where the altered region 6 is formed continuously, the processing speed can be improved, and the productivity can be improved.

In such a case, it is preferable that the interval between the altered regions 6 adjacent to each other in the moving direction of the ultrashort pulse laser light source 7 is sufficiently small.
Specifically, the interval between adjacent altered regions 6 is preferably 100 μm or less, and more preferably 5 to 25 μm. Thereby, the recessed part 3 can be formed more reliably. If the interval between the adjacent altered regions 6 is too large, it may be difficult to make the shape of the recess 3 uniform in the length direction.

Next, a method of manufacturing the lenticular lens substrate 1 using the lenticular lens concave substrate 2 as described above will be described with reference to FIG.
The lenticular lens concave substrate and the lenticular lens substrate of the present invention are, for example, a liquid crystal display device (liquid crystal panel), organic or inorganic EL (Electro luminescence) in addition to the transmission screen and rear projector described below. It goes without saying that it can be used for various electro-optical devices such as luminescence display devices, CCDs, optical communication elements, and other devices.

<1> First, as shown in FIG. 6A, the cover glass 13 is bonded to the surface on which the concave portion 3 of the substrate with concave portions 2 for lenticular lenses is formed via an adhesive.
When this adhesive is cured (solidified), a resin layer (adhesive layer) 14 is formed. Thereby, the lenticular lens 8 made of the resin filled in the recess 3 and functioning as a convex lens is formed in the resin layer 14.
As this adhesive, an optical adhesive having a refractive index higher than the refractive index of the substrate 5 (for example, n = 1.60) is preferably used.

<2> Next, as shown in FIG. 6B, the cover glass 13 is made thinner.
This can be performed by subjecting the cover glass 13 to a process such as grinding, polishing, and etching.
Although the thickness of the cover glass 13 is not specifically limited, About 10-1000 micrometers is preferable from a viewpoint of obtaining the lenticular lens board | substrate 1 provided with the required optical characteristic, and about 20-150 micrometers is more preferable.
In addition, this process does not need to be performed when the laminated cover glass 13 is the optimal thickness for performing the subsequent processes.

Thereby, the lenticular lens substrate 1 having a large number of lenticular lenses 8 as shown in FIG. 7 is obtained.
In the description of the manufacturing method of the lenticular lens substrate, a case where the lenticular lens 8 is configured by filling the resin into the recess 3 of the substrate 2 with the lenticular lens recess and sandwiching the resin with the cover glass 13 is taken as an example. As described above, a lenticular lens substrate can also be manufactured by the 2P method (photopolymerization) using the substrate 2 with concave portions for lenticular lenses as a mold.

Hereinafter, a method for manufacturing a lenticular lens substrate by the 2P method will be described with reference to FIGS.
First, as shown in FIG. 8A, a lenticular lens-provided substrate 2 having a lenticular lens recess 3 formed according to the present invention is prepared. In this method, the substrate 2 with concave portions for lenticular lenses in which the concave portions 3 are formed is used as a mold. The lenticular lens 8 is formed by filling the recesses 3 with resin. Note that a release agent or the like may be applied to the inner surface of the recess 3, for example. Then, the substrate 2 with concave portions for lenticular lenses is installed so that the concave portions 3 open vertically upward, for example.

<C1> Next, an uncured resin that will form the resin layer 141 (lenticular lens 8) is supplied onto the substrate 2 with concave portions for lenticular lenses in which the concave portions 3 are formed.
<C2> Next, the transparent substrate 53 is bonded to the resin and pressed and adhered.
<C3> Next, the resin is cured. This curing method is appropriately selected depending on the type of resin, and examples thereof include ultraviolet irradiation, heating, and electron beam irradiation.
Thereby, as shown in FIG. 8B, the resin layer 141 is formed, and the lenticular lens 8 is formed of the resin filled in the recess 3.

<C4> Next, as shown in FIG. 8 (c), the substrate 2 with a concave portion for a lenticular lens, which is a mold, is removed from the lenticular lens 8.
<C5> Next, as shown in FIG. 9 (d), for example, after setting the transparent substrate 53 so that the lenticular lens 8 faces vertically upward, an uncured resin that will form the resin layer 142 is obtained. The lenticular lens 8 is supplied. Examples of the supply method include a coating method such as spin coating, and a 2P method using a flat plate mold.

<C6> Next, as shown in FIG. 10E, a substrate (glass layer) 54 is bonded to the resin and pressed and adhered, and then the resin is cured to form a resin layer 142. Examples of the constituent material of the substrate 54 include the same constituent materials as those of the substrate 5 described above.
<C7> Thereafter, the thickness of the substrate 54 may be adjusted by grinding, polishing, or the like, if necessary.
Thereby, the lenticular lens substrate 1 as shown in FIG. 12 is obtained.

In the above description, a lenticular lens substrate including a plano-convex lens (plano-convex lenticular lens) configured using a single lenticular lens concave substrate is used, but the lenticular lens substrate of the present invention is However, the present invention is not limited to this.
For example, a lenticular lens substrate having a biconvex lens can be configured using two lenticular lens concave substrates. In this case, it is preferable that the two substrates with concave portions for lenticular lenses each have a regular pattern of concave portions for lenticular lenses. Thereby, alignment of the two board | substrates with a recessed part for lenticular lenses can be performed easily.

Hereinafter, a lenticular lens substrate including a biconvex lens (biconvex lenticular lens) configured using two lenticular lens concave substrates in which lenticular lens concave portions are formed in a regular pattern will be described.
FIG. 11 is a schematic longitudinal sectional view showing an embodiment of this lenticular lens substrate.
As shown in the figure, this lenticular lens substrate 1 includes a first lenticular lens concave substrate (first substrate) 21 and a second lenticular lens concave substrate (first substrate) manufactured according to the present invention. 2 substrate) 22, resin layer 14, lenticular lens 8, and spacer 9.

The first lenticular lens-provided substrate 21 includes a plurality (a large number) of first concave portions (lenticular lens concave portions) 36 having concave curved surfaces (curved lens surfaces) on a first substrate (first transparent substrate) 55. And the first alignment mark 42 are formed.
The second lenticular lens concave substrate 22 has a plurality of (many) second concave portions (lenticular lens concave portions) 37 having concave curved surfaces (lens curved surfaces) on a second substrate (second transparent substrate) 56. And the second alignment mark 43 are formed.

  In this lenticular lens substrate 1, the first concave portion 36 and the second concave portion 37 face each other so that the first lenticular lens concave substrate 21 and the second lenticular lens concave substrate 22 face each other. The resin layer (adhesive layer) 14 is joined. In the lenticular lens substrate 1, the first lenticular lens concave substrate 21 and the second lenticular lens concave substrate 22 are disposed between the first concave portion 36 and the second concave portion 37. A lenticular lens 8 made of a biconvex lens is formed of the filled resin.

  The lenticular lens substrate 1 has two areas, an effective lens area 99 and an ineffective lens area 100. The effective lens region 99 refers to a region where the lenticular lens 8 formed of resin filled in the first recess 36 and the second recess 37 is effectively used as a lenticular lens. On the other hand, the ineffective lens region 100 is a region other than the effective lens region 99.

Such a lenticular lens substrate 1 is used, for example, by allowing light L to be incident from the first lenticular lens concave substrate 21 side and emitting light L from the second lenticular lens concave substrate 22 side. The
And such a lenticular lens board | substrate 1 can be manufactured as follows, for example. Hereinafter, a method for manufacturing a lenticular lens substrate will be described with reference to FIGS.

When manufacturing a lenticular lens substrate, first, the first substrate 21 with concave portions for lenticular lenses and the second substrate 22 with concave portions for lenticular lenses manufactured according to the present invention are prepared.
In this case, the shape (for example, the radius of curvature) of the first concave portion 36 of the first substrate 21 with concave portions for lenticular lenses is different from the shape of the second concave portion 37 of the second substrate 22 with concave portions for lenticular lenses. It may be a thing.

  <D1> First, as shown in FIG. 12, a predetermined refractive index (1) is formed so as to cover at least the effective lens region 99 on the surface where the first concave portion 36 of the first lenticular lens concave substrate 21 is formed. In particular, an uncured resin 143 having a refractive index higher than that of the first substrate 55 and the second substrate 56 is supplied, and the first recess 36 is filled with the resin 143. At this time, the uncured resin 144 including the spacers 9 is supplied onto the first substrate 21 having concave portions for lenticular lenses. The resin 144 is supplied to a portion where the spacer 9 is installed, for example.

The resin 143 and the resin 144 are preferably composed of the same type of material. Thereby, in the manufactured lenticular lens substrate, the resin 143 and the resin 144 having different thermal expansion coefficients are preferably prevented from being warped or bent.
When the resin 143 is supplied onto the first substrate 21 having concave portions for lenticular lenses, if the spacers 9 are dispersed in the resin 144, the spacers 9 can be easily disposed uniformly. Thereby, the thickness nonuniformity of the resin layer 14 formed is suppressed suitably.

<D2> Next, as shown in FIG. 13, a second substrate (concave body) 22 with concave portions for lenticular lenses is placed on resin 143 and resin 144 (the second substrate 22 with concave portions for lenticular lenses is made of resin). In close contact).
At this time, the second lenticular lens-equipped substrate 22 is placed on the resin so that the first concave portion 36 and the second concave portion 37 face each other. At this time, the second lenticular lens concave substrate 22 is placed on the resin so that the second lenticular lens concave substrate 22 contacts the spacer 9. Thus, the distance between the opposing end surfaces of the first lenticular lens concave substrate 21 and the second lenticular lens concave substrate 22 is defined by the spacer 9. Therefore, the edge thickness and the maximum thickness of the lenticular lens 8 are defined with high accuracy.

  <D3> Next, the first recess 36 and the second recess 37 are aligned using the first alignment mark 42 and the second alignment mark 43. As a result, the second recess 37 can be accurately positioned at a position corresponding to the first recess 36. For this reason, the shape and optical characteristics of the formed lenticular lens 8 become closer to the design values.

<D4> Next, the resin layer 143 is formed by curing the resin 143 and the resin 144.
As a result, the second lenticular lens concave substrate 22 is bonded to the first lenticular lens concave substrate 21 via the resin layer 14. In addition, the lenticular lens 8 is formed by a resin filled between the first recess 36 and the second recess 37 among the resins constituting the resin layer 14. The resin can be cured, for example, by irradiating the resin with ultraviolet rays or electron beams, heating the resin, or the like.
<D5> Thereafter, as shown in FIG. 13, the thickness of the second substrate 22 with concave portions for lenticular lenses may be adjusted by performing grinding, polishing, or the like, as necessary.
Thereby, a lenticular lens substrate 1 having a biconvex lens as shown in FIG. 11 can be obtained.

  Next, a transmission screen provided with the lenticular lens substrate 1 shown in FIG. 7 will be described with reference to FIGS. 14 is a longitudinal sectional view schematically showing an optical system of the transmission screen of the present invention, and FIG. 15 is an exploded perspective view of the transmission screen shown in FIG. In FIG. 14, the lenticular lens substrate 1 is shown in a simplified manner. That is, in FIG. 14, only the resin layer 14 is shown as the lenticular lens substrate 1, and the lenticular lens concave substrate 2, the cover glass 13, and the like are omitted.

The transmissive screen 200 includes a Fresnel lens portion 210 having a Fresnel lens formed on the exit surface side surface, and a lenticular lens having a large number of lenticular lenses 8 disposed on the exit surface side of the Fresnel lens portion 210. A lens substrate 1 and a light diffusion unit 230 disposed between the Fresnel lens unit 210 and the lenticular lens substrate 1 are provided.
Thus, the transmission screen 200 has the lenticular lens substrate 1. According to the above-described method of the present invention, the large-sized lenticular lens substrate 1 can be easily manufactured. Therefore, a high-quality large-sized screen without a joint seam can be manufactured.

  Further, as in the present embodiment, the light diffusing unit 230 is disposed between the Fresnel lens unit 210 and the lenticular lens substrate 1, so that the generation of diffracted light and moire of the transmission screen 200 can be more effectively performed. It can be prevented / suppressed. That is, as shown in FIG. 14, by arranging the light diffusion portion 230 on the incident surface side of the lenticular lens substrate 1, the regularity of light (intensity, angle, phase, etc.) incident on each lenticular lens is lowered. The generation of diffracted light in the lenticular lens substrate 1 is more effectively prevented / suppressed.

  Further, as shown in the drawing, the light diffusing unit 230 is disposed between the Fresnel lens unit 210 and the lenticular lens substrate 1 so that the light that has passed through the Fresnel lens is once diffused by the light diffusing unit 230 and then the lenticular lens substrate. 1 is incident. As a result, the occurrence of regular interference patterns is prevented / suppressed, and the occurrence of moire in the Fresnel lens portion 210 and the lenticular lens substrate 1 is prevented / suppressed.

  In the transmissive screen 200 of the present embodiment, the light diffusing unit 230 is a so-called surface light diffusion type resin sheet in which one surface is roughened (light diffuses on a substantially surface). For this reason, since a light-diffusion function is exhibited on the resin sheet surface, even if it makes a resin sheet thin, the fall of a light-diffusion function is prevented. For this reason, the space | interval of the Fresnel lens part 210 and the lenticular lens board | substrate 1 can be shortened, and generation | occurrence | production of the ghost by internal diffusion, a contrast fall, and the fall of the transmittance | permeability can be prevented and suppressed. The resin sheet can be produced by, for example, using a mold roughened by blasting or the like and transferring the resin sheet to the resin sheet by a casting method or an extrusion molding method. By manufacturing by such a method, the light-diffusion part in which generation | occurrence | production of the diffracted light and the moire was fully prevented can be manufactured by a comparatively simple method.

  The haze value of the light diffusing unit 230 (HAZE value: when the diffuse transmittance is Pd and the total transmittance is Pa, the value represented by (Pd / Pa) × 100) is preferably 5 to 95%. It is more preferably 20 to 93%, and further preferably 50 to 75%. When the haze value of the light diffusing unit 230 is a value within the above range, the regularity of light (intensity, angle, phase, etc.) incident on each lenticular lens 8 is sufficiently lowered, and diffracted light and moiré are generated. In the image projected on the screen, it is possible to sufficiently prevent or suppress the generation of fog and blur.

  Further, the glossiness of the light diffusion portion 230 is preferably 5 to 40%, more preferably 10 to 35%, and further preferably 15 to 30%. When the glossiness of the light diffusing unit 230 is a value within the above range, the regularity generated by superposing the Fresnel lens unit 210 and the lenticular lens substrate 1 in which the respective lenses are regularly arranged at regular intervals. It is possible to sufficiently prevent the generation of roughness and blur in the image projected on the screen while effectively suppressing the generation of interference patterns and more effectively preventing and suppressing the generation of diffracted light and moire. it can. The glossiness of the light diffusing unit 230 is a value represented by the ratio (%) of the reflected light amount to the incident light amount when the incident angle is 60 °.

Moreover, it is preferable that the surface of the resin sheet which comprises the light-diffusion part 230 has the substantially cone-shaped uneven | corrugated shape. Thereby, generation | occurrence | production of a diffracted light and a moire can be prevented and suppressed more effectively. Moreover, when the surface of the resin sheet which comprises the light-diffusion part 230 has a rough cone-shaped uneven | corrugated shape, it is preferable that the height difference of this substantially cone-shaped body is 5-200 micrometers. Thereby, generation | occurrence | production of a diffracted light and a moire can be prevented and suppressed more effectively.
The transmission screen of the present invention is not limited to the configuration described above. For example, a transmissive screen further adopting a black stripe, a light diffusion plate, or another lenticular lens on the exit surface side of the lenticular lens substrate 1 may be used.

A rear projector using the transmission screen will be described below.
FIG. 16 is a diagram schematically showing the configuration of the rear projector of the present invention.
As shown in the figure, the rear projector 300 has a configuration in which a projection optical unit 310, a light guide mirror 320, and a transmission screen 330 are arranged in a housing 340.
The rear projector 300 uses the transmissive screen 200 described above as the transmissive screen 330. This results in a high quality, large rear projector.

  As described above, in the present invention, first, after forming an altered region with a predetermined pattern on a glass substrate by irradiation with laser light from an ultrashort pulse laser light source, etching is performed without applying a mask. A desired recess can be formed on the substrate. For this reason, it is possible to manufacture a substrate with a concave portion for a lenticular lens having a concave portion more easily than in the case where the concave portion is formed by etching after applying a mask as in the prior art. As a result, productivity of a substrate with a concave portion for a lenticular lens, a lenticular lens substrate, a transmissive screen, a rear projector, and the like is improved.

  In particular, according to the method described above, it is possible to easily process a large substrate. In the case of manufacturing a large substrate, it is not necessary to bond a plurality of substrates as in the prior art, and the seam of bonding can be eliminated. This makes it possible to manufacture a high-quality large-sized substrate with a concave portion for a lenticular lens, a lenticular lens substrate, a transmissive screen, a rear projector, and the like at a low cost by a simple method.

As described above, the lenticular lens concave substrate, the lenticular lens substrate, the transmissive screen, and the rear projector according to the present invention have been described based on the illustrated embodiments, but the present invention is not limited thereto.
For example, in the method for manufacturing a substrate with concave portions for a lenticular lens according to the present invention, an optional process can be added as necessary.

In the above-described embodiment, the method of performing etching without applying a mask has been described. However, the etching may be performed with a mask. In this case, since the whole is not etched, the thickness of the substrate can be maintained, and as a result, the aspect ratio can be increased more easily.
In the above-described embodiment, the method of forming the altered region by moving the ultrashort pulse laser light source (condensing point) parallel to the surface direction of the glass substrate has been described. However, the present invention is not limited to this. The light spot may be moved in the width direction of the glass substrate.

In the above-described embodiment, the case of moving the ultrashort pulse laser light source has been described. However, the glass substrate may be moved, or both may be moved.
In the embodiment described above, the case where the alignment mark as the concave portion is formed by the same method as the concave portion for the lenticular lens has been described. However, the alignment mark may be formed in a convex shape.

In the above-described embodiment, the lenticular lens substrate has been described as having a lenticular lens concave substrate, a transparent resin layer, and a cover glass. For example, the lenticular lens concave substrate and / or cover may be used. There is no need for glass.
Further, the transmissive screen and rear projector of the present invention are not limited to those described in the above-described embodiments, and each component constituting the transmissive screen and rear projector has an arbitrary configuration that can exhibit the same function. Can be substituted. For example, the transmissive screen of the present invention may be a transmissive screen that further employs a black stripe, a light diffusing plate, or another lens on the exit surface side of the lenticular lens substrate 1. In the above-described embodiment, the configuration in which the resin sheet is installed as the light diffusing portion has been described. However, the light diffusing portion is, for example, the surface opposite to the surface on which the concave portion of the substrate with concave portions for lenticular lenses is formed. It may be formed by subjecting to a roughening treatment or the like. That is, the light diffusion part may be formed integrally with a substrate with a lenticular lens recess (lenticular lens substrate).

  Further, the screen (transmission type screen) and the rear type projector of the present invention may not have the light diffusing unit as in the above-described embodiment. That is, when the screen and the rear projector have the lenticular lens substrate of the present invention, the occurrence of interference fringes and the like can be sufficiently effectively prevented even without the light diffusion portion as described above. Can do.

In the above description, the case where the lenticular lens substrate of the present invention is used in a transmissive screen and a projection display device including the transmissive screen is described as an example. However, the present invention is not limited to this. The lenticular lens substrate of the present invention is not limited to, for example, various electro-optical devices such as CCDs and optical communication elements, liquid crystal display devices (liquid crystal panels), organic or inorganic EL (Electro luminescence) display devices, and others. Needless to say, it can be used in the above-mentioned apparatus.
Further, the display device is not limited to a rear projection type display device (rear type projector), and for example, the lenticular lens substrate of the present invention can be used for a front projection type display device.

(Example 1)
As described below, a substrate with concave portions for lenticular lenses provided with concave portions for lenticular lenses was manufactured, and a lenticular lens substrate was manufactured using the substrate with concave portions for lenticular lenses.
First, a quartz glass substrate having a size of 1.2 m × 0.7 m square and a thickness of 2 mm was prepared as a substrate.
The quartz glass substrate was cleaned by immersing it in a cleaning solution heated to 30 ° C. (mixed aqueous solution of 10% by weight of hydrogen fluoride + 15% by weight of glycerin) to clean the surface.

-1A- Next, a laser beam was irradiated on the one side of the quartz glass substrate in a range of 113 cm × 65 cm at the central portion of the quartz glass substrate using a femtosecond laser. At this time, the femtosecond laser is moved linearly while irradiating the laser beam from one end of the range to the other end to form an altered region as shown in FIGS. It was.
The laser light emitted from the femtosecond laser is focused on a position of 13 μm from the surface of the quartz glass substrate opposite to the surface irradiated with the laser light, with a wavelength of 800 nm and a pulse width. Irradiation was performed under the conditions of 100 fs, pulse energy 100 μJ, and pulse repetition frequency 1 kHz. The femtosecond laser was moved at a speed of 5 mm / s. The interval between the irradiation positions of the femtosecond laser was 5 μm.

Further, the above-described operation was repeatedly performed to form regularly arranged altered regions over the front surface of the quartz glass substrate. In addition, the said operation was repeatedly performed so that the space | interval of adjacent alteration regions may be set to 15 micrometers.
The average length of the altered region formed was 13 μm, and the average width of the altered region was 1 μm. Further, the altered region was continuously formed up to the surface of the quartz glass substrate opposite to the surface irradiated with the laser beam.
Further, when forming the altered region, the altered region for the alignment mark was formed at the four corners other than the central portion so as to be an alignment mark as shown in FIG. 4 under the same conditions as described above.

-2A- Next, the quartz glass substrate was wet-etched to form a large number of recesses on the quartz glass substrate.
In the wet etching, a hydrogen fluoride 5 wt% aqueous solution was used as an etchant at 20 ° C., and the immersion time was 3 hours.
As a result, a substrate with concave portions for lenticular lenses in which a large number of concave portions for lenticular lenses were regularly arranged on a quartz glass substrate was obtained. The average width of the formed lenticular lens recess was 15 μm, the radius of curvature was 7.5 μm, and the depth near the center was 15 μm. Further, the interval between adjacent concave portions for lenticular lenses (average distance between the centers of the concave portions) was 15 μm.

-3A- Next, a PMMA (polymethyl methacrylate, refractive index 1.49) resin was molded by casting using a substrate with concave portions for lenticular lenses as a mold.
As a result, a 1.2 m × 0.7 m lenticular lens substrate in which lenticular lenses having convex portions corresponding to the concave portions of the substrate with concave portions for lenticular lenses was regularly arranged was obtained. The average width of the formed Marenticular lens was 15 μm. The interval between adjacent lenticular lenses (average distance between centers of lenticular lenses) was 15 μm.

(Examples 2 to 5)
A substrate with a concave portion for a lenticular lens and a lenticular lens substrate were produced in the same manner as in Example 1 except that the irradiation conditions of the femtosecond laser were as shown in Table 1.
(Comparative example)
First, a quartz glass substrate having a thickness of 1 mm was prepared as a substrate.
The quartz glass substrate was cleaned by immersing it in a cleaning solution heated to 30 ° C. (mixed aqueous solution of 10% by weight of hydrogen fluoride + 15% by weight of glycerin) to clean the surface.

Next, this quartz glass substrate is put into a CVD furnace set at 600 ° C. and 80 Pa, SiH 4 is supplied at a rate of 300 mL / min, and a polycrystalline film having a thickness of 0.6 μm is formed by the CVD method. A silicon film (mask and back surface protective layer) was formed.
-2C- Next, a resist having a regular lenticular lens pattern is formed on the formed polycrystalline silicon film (mask) with a photoresist, and then the polycrystalline silicon film (mask) is formed with CF gas. Dry etching was performed, and then the resist was removed to form an opening in the polycrystalline silicon film (mask).

-3C- Next, first wet etching was performed on the quartz glass substrate to form a large number of recesses on the quartz glass substrate.
Note that a hydrofluoric acid-based etching solution was used as the etching solution.
-4C- Next, dry etching with CF gas was performed to remove the polycrystalline silicon film (mask and back surface protective layer).
As a result, a wafer-like substrate with concave portions for lenticular lenses in which a large number of concave portions for lenticular lenses were regularly formed on a quartz glass substrate was obtained. The average width of the formed recesses was 50 μm, and the interval between adjacent recesses (the average distance between the centers of the recesses) was 50 μm.

Thereafter, the step -3A- was performed, and a lenticular lens substrate on which a large number of lenticular lenses were regularly formed was obtained in the same manner as in Example 1. The average width of the formed lenticular lens was 50 μm. The interval between adjacent lenticular lenses (average distance between centers of lenticular lenses) was 50 μm.
In each of Examples 1 to 5 and Comparative Example, the conditions for forming the recesses, and the average width of the formed recesses, the radius of curvature of the recesses, the depth of the recesses, the interval between adjacent recesses, the average width of the lenticular lens Table 1 shows the distance between adjacent lenticular lenses.

(Evaluation)
In Examples 1 to 5 in which the altered region was formed on the substrate by the femtosecond laser, it was possible to manufacture the lenticular lens concave substrate and the lenticular lens substrate easily and inexpensively as compared with the conventional method. In particular, in the example, the processing for a large substrate of 1.2 m × 0.7 m could be easily performed. On the other hand, in the comparative example in which the opening was formed in the mask by photolithography, it was difficult to process a large substrate of 1.2 m × 0.7 m. In particular, in the photoresist process, many defective products were produced and the yield was extremely poor.

In addition, an attempt was made to fabricate a substrate with concave portions for a lenticular lens in the same manner as in the comparative example so that the average width of the concave portions was 20 μm, and the interval between adjacent concave portions was 20 μm. In other words, a large number of sites where no concave portion was formed were confirmed, and this was not practical.
Then, using the lenticular lens substrates obtained in Examples 1 to 5, a transmissive screen as shown in FIGS. 14 and 15 is produced, and a rear projector as shown in FIG. 16 is produced using the screen. Produced.

When images were projected on the screens of the obtained rear projectors, bright and high-quality images could be displayed.
Therefore, it is easily guessed that a projection display device using such a transmission screen can project a bright and high-quality image on the screen.

It is a typical longitudinal cross-sectional view which shows the manufacturing method of the board | substrate with a recessed part for lenticular lenses of this invention. It is sectional drawing in the YY line | wire in FIG. It is a typical longitudinal cross-sectional view which shows the formation process of the recessed part for lenticular lenses. It is a typical top view which shows the board | substrate with a recessed part for lenticular lenses of this invention. It is sectional drawing in the YY line in FIG. 1 in 2nd Embodiment. It is a typical longitudinal cross-sectional view which shows the manufacturing method of the lenticular lens board | substrate of this invention. It is a typical longitudinal cross-sectional view which shows the lenticular lens board | substrate of this invention. It is a typical longitudinal cross-sectional view which shows the manufacturing method of the lenticular lens board | substrate of this invention. It is a typical longitudinal cross-sectional view which shows the manufacturing method of the lenticular lens board | substrate of this invention. It is a typical longitudinal cross-sectional view which shows the lenticular lens board | substrate of this invention. It is a typical longitudinal cross-sectional view which shows the lenticular lens board | substrate of this invention. It is a typical longitudinal cross-sectional view which shows the manufacturing method of the lenticular lens board | substrate of this invention. It is a typical longitudinal cross-sectional view which shows the manufacturing method of the lenticular lens board | substrate of this invention. It is a longitudinal cross-sectional view which shows typically the optical system of the transmission type screen of this invention. It is a disassembled perspective view of the transmission type screen shown in FIG. It is a figure which shows typically the structure of the rear type projector of this invention.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 ... Lenticular lens board | substrate 2 ... Board | substrate with a recessed part for lenticular lenses 21 ...... 1st board | substrate with a recessed part for lenticular lenses 22 ...... 2nd board | substrate with a recessed part for lenticular lenses 200 ...... Lenticular lens substrate 3 ... Recessed part 4 …… Alignment mark 41 …… Corner 42 …… First alignment mark 43 …… Second alignment mark 44 …… Opening 5 …… Glass substrate 51 …… Transparent substrate 52 …… Glass substrate 53 …… First Glass substrate 54 ... Second glass substrate 6 ... Alteration area 61 ... Hole 7 ... Ultrashort pulse laser light source 8 ... Lenticular lens 9 ... Spacer 99 ... Effective lens area 100 ... Ineffective lens area 111 …… Open 13 …… Cover Glass 14 …… Resin Layer 141 …… Resin Layer 141, 142 …… Resin Layer 143, 1 44 …… Resin 200 …… Transmissible screen 210 …… Fresnel lens portion 230 …… Light diffusion portion 300 …… Rear projector 310 …… Projection optical unit 320 …… Light guide mirror 330 …… Transmissive screen 340 …… Housing body

Claims (19)

  1. A method of manufacturing a substrate with a lenticular lens recess for forming a lenticular lens recess on a substrate,
    Irradiating the substrate with laser light from an ultrashort pulse laser light source from the surface opposite to the surface on which the concave portion for the lenticular lens of the substrate is formed, and forming an altered region on the substrate;
    And a step of etching the substrate having the altered region to form the concave portion for the lenticular lens.
  2. A method of manufacturing a substrate with a lenticular lens recess for forming a lenticular lens recess on a substrate,
    Irradiating the substrate with laser light from an ultrashort pulse laser light source from the surface opposite to the surface on which the concave portion for the lenticular lens of the substrate is formed, and forming an altered region on the substrate;
    A method of manufacturing a substrate with concave portions for lenticular lenses, comprising: etching the substrate having the altered region to form concave portions for lenticular lenses and alignment marks.
  3.   3. The method for manufacturing a substrate with concave portions for a lenticular lens according to claim 1, wherein a pulse width of the laser light is 10 fs to 1 ps.
  4.   4. The method for manufacturing a substrate with concave portions for a lenticular lens according to claim 1, wherein the pulse energy of the laser light is 1 μJ to 1 mJ. 5.
  5.   The method for manufacturing a substrate with concave portions for a lenticular lens according to any one of claims 1 to 4, wherein a pulse repetition frequency of the laser light is 10 Hz to 100 kHz.
  6.   6. The method for manufacturing a substrate with concave portions for a lenticular lens according to claim 1, wherein the laser beam is irradiated while the ultrashort pulse laser light source is moved relative to the substrate.
  7.   The method for manufacturing a substrate with concave portions for a lenticular lens according to any one of claims 1 to 6, wherein an interval between irradiation positions in the plane perpendicular to the optical axis of the ultrashort pulse laser light source is 1 to 100 µm.
  8.   The method for manufacturing a substrate with concave portions for a lenticular lens according to any one of claims 1 to 7, wherein a length of the altered region in the thickness direction of the substrate is 1 to 500 µm.
  9.   9. The lenticular according to claim 6, wherein a width of the denatured region in a direction perpendicular to a direction in which the ultrashort pulse laser light source is moved in a surface direction of the substrate is 0.5 to 10 μm. A method for manufacturing a substrate with concave portions for lenses.
  10.   The method for manufacturing a substrate with concave portions for a lenticular lens according to any one of claims 1 to 9, wherein the etching is performed by wet etching.
  11.   The method for producing a substrate with concave portions for a lenticular lens according to any one of claims 1 to 10, wherein an average width of the concave portion for the lenticular lens in a plan view is 5 to 500 µm.
  12.   12. The method of manufacturing a substrate with a concave portion for a lenticular lens according to claim 1, wherein a depth in the vicinity of the center of the concave portion for the lenticular lens is 5 to 500 μm.
  13.   The method for manufacturing a substrate with concave portions for a lenticular lens according to claim 1, wherein the substrate is substantially transparent.
  14.   A substrate with concave portions for a lenticular lens, which is manufactured by the method for manufacturing a substrate with concave portions according to any one of claims 1 to 13.
  15.   A lenticular lens substrate manufactured using the substrate with concave portions for a lenticular lens according to claim 14.
  16.   A transmissive screen comprising the lenticular lens substrate according to claim 15.
  17. A Fresnel lens part in which a Fresnel lens is formed on the light emission surface side surface;
    The lenticular lens substrate according to claim 15, which is disposed on an emission surface side of the Fresnel lens unit,
    A transmissive screen, comprising: a light diffusing unit disposed between the Fresnel lens unit and the lenticular lens substrate.
  18.   A rear projector comprising the transmissive screen according to claim 16.
  19. A rear projector comprising a projection optical unit, a light guide mirror, and the transmissive screen according to claim 16.
JP2003356977A 2003-10-16 2003-10-16 Method for manufacturing base plate with recessed part for lenticular lens, base plate with recessed part for lenticular lens, lenticular lens base plate, transmission type screen and rear type projector Pending JP2005121916A (en)

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