JP4742886B2 - Rotating equipment - Google Patents

Rotating equipment Download PDF

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JP4742886B2
JP4742886B2 JP2006018982A JP2006018982A JP4742886B2 JP 4742886 B2 JP4742886 B2 JP 4742886B2 JP 2006018982 A JP2006018982 A JP 2006018982A JP 2006018982 A JP2006018982 A JP 2006018982A JP 4742886 B2 JP4742886 B2 JP 4742886B2
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shaft
chamber
fluid
impeller
motor
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JP2007198291A (en
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浩司 堀川
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Shimadzu Corp
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本発明は、シャフト挿通孔を備えた隔壁を有するケーシング内に、オイル潤滑式の軸受に回転可能に支持させてなるとともに翼車取付部を延出させたシャフトと、前記翼車取付部に取り付けた翼車とを収納させてなる回転機器に関する。   The present invention includes a shaft that is rotatably supported by an oil-lubricated bearing in a casing having a partition wall provided with a shaft insertion hole, and that is attached to the impeller attachment portion. The present invention relates to a rotating device that houses an impeller.

この種の回転機器として代表的なターボブロワには、翼車室、モータ室、及びこれらを区画するとともにシャフト挿通孔を備えた隔壁を有するケーシングと、モータ室に設けたモータに駆動されモータ室内に設けた流体潤滑式の軸受に回転可能に支持させてなるとともに翼車室側に翼車取付部を延出させたシャフトと、前記翼車取付部に取り付けた翼車とを具備するものが知られている。このような回転機器においては、前記軸受に供給する潤滑材が翼車室側に漏出し、該翼車室を通過するガス等の流体が汚染される不具合の発生を防ぐべく、モータ室側に真空ポンプ等の排気手段を接続し、該翼車室を通過するガス等の流体の一部を翼車室からモータ室へ流し、潤滑液をモータ室へ押し戻すことが従来考えられてきている。(例えば特許文献1を参照。)なお、前記特許文献1では、翼車室は循環ガス圧縮室、モータ室は軸受保持室、翼車はターボ翼としてそれぞれ述べられている。
特開平11−311197号公報
A typical turbo blower as a rotating device of this type includes an impeller chamber, a motor chamber, a casing having a partition wall that partitions these and having a shaft insertion hole, and a motor provided in the motor chamber and driven by a motor. It is known to have a shaft that is rotatably supported by a provided fluid lubricated bearing and has an impeller mounting portion extending on the impeller chamber side, and an impeller attached to the impeller mounting portion. It has been. In such a rotating device, the lubricant supplied to the bearing leaks to the impeller chamber side, and the motor chamber side is prevented in order to prevent the occurrence of a problem in which fluid such as gas passing through the impeller chamber is contaminated. Conventionally, it has been considered to connect exhaust means such as a vacuum pump, flow a part of fluid such as gas passing through the impeller chamber from the impeller chamber to the motor chamber, and push the lubricating liquid back to the motor chamber. (For example, refer to Patent Document 1.) In Patent Document 1, the impeller chamber is described as a circulating gas compression chamber, the motor chamber is described as a bearing holding chamber, and the impeller is described as a turbo blade.
Japanese Patent Laid-Open No. 11-311197

ところで、前記特許文献1記載のように構成すると、該翼車室を通過するガスがモータ保持室へ流すことにより空費されるので、該翼車室を通過するガス等の流体の量を維持すべく、翼車室側に流体を外部から補充する必要がある。そこで、流体の補充量を抑えるべく、シャフトとケーシングとの間に微小隙間を形成し、この微小隙間による絞り効果で流体のシールを行うようにしている。このようにシャフトとケーシングとの間に微小隙間を形成する際、従来は微小隙間の幅を小さくしてモータ室側への流出を極力少なくすべく、精密な加工によりシール部を設けるようにしている。しかし、シール部の形成の際に加工精度が要求されるので、シール部の製造コストがかさむ不具合が生じている。   By the way, if it comprises as the said patent document 1, since the gas which passes this impeller chamber will be wasted by flowing to a motor holding chamber, the quantity of fluids, such as gas which passes this impeller chamber, is maintained. Therefore, it is necessary to replenish fluid to the impeller chamber side from the outside. Therefore, in order to suppress the replenishment amount of the fluid, a minute gap is formed between the shaft and the casing, and the fluid is sealed by a throttling effect by the minute gap. Thus, when a minute gap is formed between the shaft and the casing in this way, conventionally, in order to minimize the outflow to the motor chamber side by reducing the width of the minute gap, a seal portion is provided by precise processing. Yes. However, since processing accuracy is required when forming the seal portion, there is a problem that the manufacturing cost of the seal portion is increased.

本実施形態は、このような課題を解決すべく、シャフトとケーシングとの間の隙間に潤滑材が留まらない構成を実現するものである。   In order to solve such a problem, the present embodiment realizes a configuration in which the lubricant does not remain in the gap between the shaft and the casing.

すなわち本発明に係る回転機器は、隔壁により翼車室及びモータ室に区画された内部空間を有し前記隔壁にシャフトを挿通可能なシャフト挿通孔を設けているケーシングと、このケーシングのモータ室内に設けた流体潤滑式の軸受に回転可能に支持させてなる基部及び前記翼車室内に配した翼車取付部を有し前記シャフト挿通孔に挿通させてなるシャフトと、このシャフトの翼車取付部に取り付けた翼車と、この翼車を回転駆動すべく前記モータ室内に設けられ前記シャフトを回転駆動するモータと、前記モータ室内を前記翼車室よりも低圧に保つための排気手段とを具備するものであって、前記シャフトとシャフト挿通孔との間の隙間に、螺旋溝を利用して流体の前記翼車室から前記モータ室への流れを抑制するための流体漏出抑制領域を設けるとともに、前記シャフトとシャフト挿通孔との間の隙間における前記流体漏出抑制領域よりも前記モータ室寄りの領域に、螺旋溝を利用して流体をモータ室側に付勢するための流体付勢領域を設け、さらに前記流体付勢領域による付勢能力を前記流体漏出抑制領域の抑制能力よりも大きくしていることを特徴とする。 That is, the rotating device according to the present invention includes a casing having an internal space partitioned into an impeller chamber and a motor chamber by a partition wall and provided with a shaft insertion hole through which the shaft can be inserted, and a motor chamber of the casing. A base that is rotatably supported by a fluid lubrication-type bearing provided, a shaft that has an impeller mounting portion disposed in the impeller chamber, and that is inserted through the shaft insertion hole; and an impeller mounting portion of the shaft An impeller attached to the impeller, a motor provided in the motor chamber for rotationally driving the impeller, and a shaft for rotating the shaft, and exhaust means for keeping the motor chamber at a lower pressure than the impeller chamber. A fluid leakage suppression region for suppressing a flow of fluid from the impeller chamber to the motor chamber using a spiral groove in a gap between the shaft and the shaft insertion hole. Only Rutotomoni, in the region of the motor chamber nearer the fluid leakage suppression area in the gap between the shaft and the shaft insertion hole, with the fluid for urging the fluid into the motor chamber side using a helical groove An urging area is provided, and the urging ability of the fluid urging area is made larger than that of the fluid leakage suppressing area .

このように構成すれば、精密な加工によりシール部を設けることなく、前記シャフト又は前記シャフト挿通孔の少なくとも一方に螺旋溝を設ける簡単な加工により、ガス等の流体の空費を抑える効果を実現できる。   If comprised in this way, the effect which suppresses the wasteful cost of fluids, such as gas, is realized by simple processing which provides a spiral groove in at least one of the shaft or the shaft penetration hole without providing a seal part by precise processing. it can.

本発明に係る回転機器は、螺旋溝を利用して流体の翼車室からモータ室への流れを抑制するための流体漏出抑制領域を設けているので、前記シャフト又は前記シャフト挿通孔の少なくとも一方に螺旋溝を設ける簡単な加工により、ガスの流体の空費を抑える効果を低コストで実現できる。   In the rotating device according to the present invention, since the fluid leakage suppression region for suppressing the flow of fluid from the impeller chamber to the motor chamber is provided using the spiral groove, at least one of the shaft or the shaft insertion hole is provided. The effect of suppressing the waste of the gas fluid can be realized at a low cost by a simple process of providing a spiral groove on the surface.

以下、本発明の一実施形態を、図面を参照して説明する。   Hereinafter, an embodiment of the present invention will be described with reference to the drawings.

本実施形態に係る回転機器であるターボブロワ100は、図示しないCO2ガスレーザ等のレーザ発振部にガス等の流体(以下単にガスと記す)を供給するためのものであり、ガス循環経路上にレーザ発振部と直列して設けられている。   A turbo blower 100, which is a rotating device according to the present embodiment, is for supplying a fluid such as gas (hereinafter simply referred to as gas) to a laser oscillation unit (not shown) such as a CO2 gas laser, and laser oscillation is performed on a gas circulation path. In series.

具体的にこのターボブロワ100は、概略断面図を図1に示すように、隔壁53により翼車室たるターボ翼室51及びモータ室52に区画された内部空間を有するケーシング5と、このケーシング5の内部空間に収納させたシャフト2と、このシャフト2に取り付けた翼車たるターボ翼1と、このターボ翼1を回転駆動すべく前記モータ室52内に設けられ前記シャフト2を回転駆動するモータ4とを具備する遠心式のものである。なお、本実施例のものはシャフト2を起立させて使用する。   Specifically, as shown in FIG. 1, the turbo blower 100 includes a casing 5 having an internal space partitioned by a partition wall 53 into a turbo blade chamber 51 and a motor chamber 52 by a partition wall 53, and the casing 5. A shaft 2 housed in an internal space, a turbo blade 1 as an impeller attached to the shaft 2, and a motor 4 provided in the motor chamber 52 for rotationally driving the turbo blade 1 to rotationally drive the shaft 2. And a centrifugal type. In the present embodiment, the shaft 2 is used upright.

前記ケーシング5のターボ翼室51内には前記ターボ翼1、モータ室52内には前記電動モータ4を収納するようにしている。前記隔壁53には前記シャフト2を挿通可能なシャフト挿通孔5xを設けていて、このシャフト挿通孔5xを介して前記ターボ翼室51及び前記モータ室52を連通させている。さらに詳述すると、前記ターボ翼室51は、各ターボ翼1の頂部方向に開口するガス導入ポート54と、ターボ翼1の側方に開口するガス導出ポート55とを備えている。一方、前記モータ室52は、その中央近傍に設けられ後述する電動モータ4を配設するためのモータ配設部56と、このモータ配設部55の上下方にそれぞれ設けられ転がり軸受3を配設するための上下の軸受配設部57a、57bと、下端部に設けられ軸受潤滑用の潤滑液である潤滑オイルOILを滞留させておくオイルだめ部58と備えている。そして本実施形態では、ガスが前記シャフト挿通孔5xと前記シャフト2との間の隙間を前記モータ室52内に向かう方向に流れるようにすべく、前記モータ保持室52内のガスを排気手段である真空ポンプ9により排気して前記モータ室52内を前記ターボ翼室51内よりも低圧に保つようにしている。   The turbo vane chamber 51 of the casing 5 accommodates the turbo vane 1 and the motor chamber 52 accommodates the electric motor 4. The partition wall 53 is provided with a shaft insertion hole 5x through which the shaft 2 can be inserted, and the turbo blade chamber 51 and the motor chamber 52 are communicated with each other through the shaft insertion hole 5x. More specifically, the turbo blade chamber 51 includes a gas introduction port 54 that opens in the top direction of each turbo blade 1 and a gas outlet port 55 that opens to the side of the turbo blade 1. On the other hand, the motor chamber 52 is provided in the vicinity of the center of the motor chamber 52 for disposing the electric motor 4 to be described later, and the motor bearing portion 55 is provided on the upper and lower sides of the motor housing portion 55. The upper and lower bearing arrangement portions 57a and 57b are provided, and the oil sump portion 58 is provided at the lower end portion and retains lubricating oil OIL which is a lubricating liquid for bearing lubrication. In this embodiment, the gas in the motor holding chamber 52 is exhausted by the exhaust means so that the gas flows through the gap between the shaft insertion hole 5x and the shaft 2 in the direction toward the motor chamber 52. The motor chamber 52 is evacuated by a certain vacuum pump 9 so as to be kept at a lower pressure than the turbo blade chamber 51.

上下の転がり軸受3、3は、前記モータ室52内の上下の軸受配設部57a、57bにそれぞれ支持させたもので、後述する電動モータ4の上下にそれぞれ配置されている。本実施例では、これら転がり軸受3、3としてアンギュラタイプのものを採用し、ジャーナル方向、スラスト方向に作用する両荷重を支持しうるようにしている。そして、これら転がり軸受3、3は、シャフト2内に設けた後述するオイル供給路21aを介して潤滑材、具体的には潤滑オイルOILの供給を受ける流体潤滑式の軸受である。   The upper and lower rolling bearings 3 and 3 are respectively supported by upper and lower bearing arrangement portions 57a and 57b in the motor chamber 52, and are respectively disposed above and below the electric motor 4 described later. In this embodiment, angular type bearings are used as the rolling bearings 3 and 3 so that both loads acting in the journal direction and the thrust direction can be supported. These rolling bearings 3 and 3 are fluid lubrication type bearings that receive supply of a lubricant, specifically, lubricating oil OIL, through an oil supply path 21a provided in the shaft 2 to be described later.

前記シャフト2は、前記モータ室52内に配した前記転がり軸受3に回転可能に支持させてなるとともに内部にオイル供給路21aを有する基部21と、この基部21から延出させているとともに前記シャフト挿通孔5xを通過させてなる中間部22と、この中間部22から延出させて前記ターボ翼室51内に配した翼車取付部たるターボ翼取付部23とを具備する。前記基部21内部に形成したオイル供給路21aはこのシャフト2の下端面に開口し、その開口がオイルだめ部58内の潤滑オイルOILに浸かっている状態にしてある。また、各転がり軸受3の上側におけるシャフト2の外周面にもそれぞれ開口するように構成されている。オイル供給路21aの下端部21bは、遠心ポンプ部として機能するように構成されている。具体的には下方に向かって断面積が減少するテーパ状のものとなっている。すなわち、シャフト2の回転による遠心力でオイルだめ58から潤滑オイルOILをテーパ面に沿って上昇させ、吸い上げたオイルをシャフト2の外周面にそれぞれ設けた開口から噴射して各転がり軸受3に供給できるように構成されている。なお、この潤滑オイルOILは、シャフト2の回転によって、モータ室52内では噴霧状態としても存在している。   The shaft 2 is rotatably supported by the rolling bearing 3 disposed in the motor chamber 52, and has a base portion 21 having an oil supply passage 21a therein, and is extended from the base portion 21 and the shaft. An intermediate portion 22 that passes through the insertion hole 5x, and a turbo blade attachment portion 23 that extends from the intermediate portion 22 and is disposed in the turbo blade chamber 51 as a impeller attachment portion. The oil supply passage 21 a formed inside the base portion 21 opens at the lower end surface of the shaft 2, and the opening is immersed in the lubricating oil OIL in the oil sump portion 58. Moreover, it is comprised so that it may each open also to the outer peripheral surface of the shaft 2 in the upper side of each rolling bearing 3. FIG. The lower end portion 21b of the oil supply path 21a is configured to function as a centrifugal pump portion. Specifically, it has a tapered shape whose cross-sectional area decreases downward. That is, the lubricating oil OIL is raised from the oil sump 58 along the taper surface by the centrifugal force generated by the rotation of the shaft 2, and the sucked oil is sprayed from the openings provided on the outer peripheral surface of the shaft 2 and supplied to each rolling bearing 3. It is configured to be able to. The lubricating oil OIL also exists in a sprayed state in the motor chamber 52 due to the rotation of the shaft 2.

ターボ翼1は、切頭円錐状の基体11の斜面部に螺旋状に複数の翼体12を立設した一般に知られているもので、前記シャフト2のターボ翼取付部23に取り付けている。   The turbo blade 1 is generally known in which a plurality of blade bodies 12 are installed in a spiral shape on a slope portion of a truncated conical base 11, and is attached to a turbo blade attachment portion 23 of the shaft 2.

電動モータ4は、ロータ41をシャフト2に外嵌させて固着するとともに、ロータ41の周囲にケーシング5に支持させてステータ42を配設した例えばDCブラシレス式のものであって、シャフト2と一体的に設け、直接的にシャフト2を回転駆動させるものである。本実施例ではシャフト2及び電動モータ4の駆動源として図示しないインバータを用いている。   The electric motor 4 is, for example, a DC brushless type in which a rotor 41 is externally fitted and fixed to the shaft 2, and a stator 42 is disposed around the rotor 41 and supported by a casing 5. The shaft 2 is directly driven to rotate. In this embodiment, an inverter (not shown) is used as a drive source for the shaft 2 and the electric motor 4.

しかして本実施形態では、本実施形態では、前記図1、およびこの図1におけるシャフト挿通孔5x付近の拡大図である図2に示すように、前記シャフト2と前記シャフト挿通孔5xとの間の隙間Sには、第2の螺旋溝2yを利用して流体のターボ翼室51からモータ室52への流れを抑制するための流体漏出抑制領域A2を設けている。具体的には、前記シャフト2の中間部22のうちターボ翼室51寄りの部位に、このシャフト2の前記図2における矢印x方向への回転に応じて見かけ位置がターボ翼室51側に移動するような第2の螺旋溝2yを設けている。ここで、前記図2に示す状態から位相を90度移動させた状態の図を図3に示す。以下、シャフト2の前記矢印x方向への回転に応じて螺旋溝間に位置するネジ山の見かけ位置がモータ室52側に移動するような螺旋溝を順方向ネジ溝と称する。また、シャフト2の前記矢印x方向への回転に応じて螺旋溝間に位置するネジ山の見かけ位置がターボ翼室51側に移動するような螺旋溝は逆方向ネジ溝と称する。   Accordingly, in this embodiment, as shown in FIG. 1 and FIG. 2 which is an enlarged view of the vicinity of the shaft insertion hole 5x in FIG. 1, the present embodiment is arranged between the shaft 2 and the shaft insertion hole 5x. In the gap S, a fluid leakage suppression region A2 for suppressing the flow of fluid from the turbo blade chamber 51 to the motor chamber 52 using the second spiral groove 2y is provided. Specifically, the apparent position of the intermediate portion 22 of the shaft 2 near the turbo blade chamber 51 is moved toward the turbo blade chamber 51 according to the rotation of the shaft 2 in the direction of the arrow x in FIG. Such a second spiral groove 2y is provided. Here, FIG. 3 shows a state in which the phase is shifted by 90 degrees from the state shown in FIG. Hereinafter, the spiral groove in which the apparent position of the thread located between the spiral grooves moves to the motor chamber 52 side in accordance with the rotation of the shaft 2 in the arrow x direction is referred to as a forward screw groove. Further, the spiral groove in which the apparent position of the thread located between the spiral grooves moves to the turbo blade chamber 51 side in accordance with the rotation of the shaft 2 in the arrow x direction is referred to as a reverse screw groove.

前記シャフト2を前記図2における矢印x方向に回転させると、この第2の螺旋溝2y内の流体、具体的には主にターボ翼室51からこの第2の螺旋溝2y内に進入したガスは、この第2の螺旋溝2y内で矢印x方向と逆方向に移動するよう付勢される。すなわち、この第2の螺旋溝2yは上述したように逆方向ネジ溝であるので、前記流体はターボ翼室51側、すなわちこのガスの流れる方向と逆側に付勢される。また、第2の螺旋溝2yを形成するネジ山2y1と前記シャフト挿通孔5xとの間に位置する微小隙間SSSも、シャフト2の回転につれて移動する。そして、この微小隙間SSSに侵入している潤滑オイルOILも、前記ネジ山2x1に付勢されてシャフト2の回転速度より低い速度で前記矢印x方向に移動し、第2の螺旋溝2y内に達する。   When the shaft 2 is rotated in the direction of the arrow x in FIG. 2, the fluid in the second spiral groove 2 y, specifically, the gas that has entered the second spiral groove 2 y mainly from the turbo blade chamber 51. Is biased to move in the direction opposite to the arrow x direction in the second spiral groove 2y. That is, since the second spiral groove 2y is a reverse screw groove as described above, the fluid is urged toward the turbo blade chamber 51, that is, opposite to the gas flow direction. In addition, the minute gap SSS located between the thread 2y1 forming the second spiral groove 2y and the shaft insertion hole 5x also moves as the shaft 2 rotates. The lubricating oil OIL entering the minute gap SSS is also urged by the thread 2x1 and moves in the direction of the arrow x at a speed lower than the rotational speed of the shaft 2, and enters the second spiral groove 2y. Reach.

また、本実施形態では、前記図1及び図2に示すように、前記シャフト2と前記シャフト挿通孔5xとの間の隙間Sにおける前記流体漏出抑制領域A2よりも前記モータ室52寄りの領域に、第1の螺旋溝2xを利用して流体をモータ室52側に付勢するための流体付勢領域A1を設けている。具体的には、前記シャフト2の中間部22のうちモータ室52寄りの部位に、順方向ネジ溝である第1の螺旋溝2xを設けている。   Moreover, in this embodiment, as shown in the said FIG.1 and FIG.2, in the area | region near the said motor chamber 52 rather than the said fluid leakage suppression area | region A2 in the clearance gap S between the said shaft 2 and the said shaft insertion hole 5x. The fluid energizing region A1 for energizing the fluid toward the motor chamber 52 using the first spiral groove 2x is provided. Specifically, a first spiral groove 2x that is a forward screw groove is provided in a portion of the intermediate portion 22 of the shaft 2 near the motor chamber 52.

前記シャフト2を前記図2における矢印x方向に回転させると、この第1の螺旋溝2x内の流体、具体的にはガスと潤滑オイルOILの微細粒子等との混合物はこの第1の螺旋溝2x内で矢印x方向と逆方向に移動するよう付勢される。すなわち、この第1の螺旋溝2xは上述したように順方向ネジ溝であるので、前記流体はモータ室52側に付勢され、潤滑オイルOILの微細粒子等がモータ室52に排出される。また、第1の螺旋溝2xを形成するネジ山2x1と前記シャフト挿通孔5xとの間に位置する微小隙間SSは、シャフト2の回転につれて移動する。そして、この微小隙間SSに侵入している潤滑オイルOILも、前記ネジ山2x1に付勢されてシャフト2の回転速度より低い速度で前記矢印x方向に移動し、第1の螺旋溝2x内に達した後、上述したようにこの第1の螺旋溝2x内をモータ室52側に向けて移動するよう付勢される。   When the shaft 2 is rotated in the direction of the arrow x in FIG. 2, the fluid in the first spiral groove 2x, specifically, the mixture of gas and fine particles of the lubricating oil OIL, etc., is the first spiral groove. It is urged to move in the direction opposite to the arrow x direction within 2x. That is, since the first spiral groove 2x is a forward screw groove as described above, the fluid is biased toward the motor chamber 52, and fine particles of the lubricating oil OIL are discharged to the motor chamber 52. Further, the minute gap SS located between the screw thread 2x1 forming the first spiral groove 2x and the shaft insertion hole 5x moves as the shaft 2 rotates. The lubricating oil OIL entering the minute gap SS is also urged by the thread 2x1 and moves in the direction of the arrow x at a speed lower than the rotational speed of the shaft 2, and enters the first spiral groove 2x. After reaching, the first spiral groove 2x is urged to move toward the motor chamber 52 side as described above.

そして本実施形態では、上述したターボ翼室51からモータ室52への流体の流れを確保すべく、シャフト2の流体付勢領域A1と流体漏出抑制領域A2との間に対応する部位に、該流体付勢領域A1及び流体漏出抑制領域A2の少なくともネジ山2x1、2y1に対応する部位よりも径を小さくした小径部221を設け、シャフト2の小径部221と前記シャフト挿通孔5xとの間の部位における前記隙間Sの幅を、これら流体付勢領域A1と流体漏出抑制領域A2における前記隙間Sの幅よりも大きくしている。   In the present embodiment, in order to ensure the flow of fluid from the turbo blade chamber 51 to the motor chamber 52, the portion corresponding to the portion between the fluid energizing region A1 and the fluid leakage suppressing region A2 of the shaft 2 A small-diameter portion 221 having a diameter smaller than a portion corresponding to at least the thread 2x1, 2y1 of the fluid energizing region A1 and the fluid leakage suppression region A2 is provided, and between the small-diameter portion 221 of the shaft 2 and the shaft insertion hole 5x. The width of the gap S in the part is made larger than the width of the gap S in the fluid urging region A1 and the fluid leakage suppression region A2.

また、モータ室52側の圧力脈動に起因してモータ室52とターボ翼室51との間の圧力差が逆転した場合においても上述したターボ翼室51からモータ室52への流体の流れを確保できるようにすべく、前記流体付勢領域A1による付勢能力を前記流体漏出抑制領域A2の抑制能力よりも大きくしている。   Further, even when the pressure difference between the motor chamber 52 and the turbo blade chamber 51 is reversed due to pressure pulsation on the motor chamber 52 side, the above-described fluid flow from the turbo blade chamber 51 to the motor chamber 52 is ensured. In order to be able to do so, the urging capability by the fluid urging region A1 is made larger than the suppressing capability of the fluid leakage suppression region A2.

以上に述べたように、本実施形態に係るターボ型回転機器であるターボブロワ100の構成によれば、前記流体付勢領域A1よりターボ翼室51寄りに逆方向ネジ溝である第2の螺旋溝2yを利用して流体をターボ翼室51側に付勢するための流体漏出抑制領域A2を設けているので、この流体漏出抑制領域A2ではガスが第2の螺旋溝2y内をターボ翼室51側に移動する方向に付勢され、ターボ翼室51からモータ室52へのガスの流出を抑えることができる。さらに、第2の螺旋溝2yを形成するネジ山2y1と前記シャフト挿通孔5xとの間に位置する微小隙間SSSがシャフト2の回転に伴い移動するので、上述した作用により潤滑オイルOILが表面張力によりこの微小隙間SSSに滞留することを防ぐこともできる。   As described above, according to the configuration of the turbo blower 100 that is the turbo rotating device according to the present embodiment, the second spiral groove that is a reverse screw groove closer to the turbo blade chamber 51 than the fluid biasing region A1. Since the fluid leakage suppression region A2 for urging the fluid to the turbo blade chamber 51 side using 2y is provided, gas flows in the second spiral groove 2y in the turbo blade chamber 51 in this fluid leakage suppression region A2. It is energized in the direction of moving to the side, and the outflow of gas from the turbo blade chamber 51 to the motor chamber 52 can be suppressed. Further, since the minute gap SSS located between the screw thread 2y1 forming the second spiral groove 2y and the shaft insertion hole 5x moves as the shaft 2 rotates, the above-described action causes the lubricating oil OIL to have surface tension. Therefore, it is possible to prevent staying in the minute gap SSS.

また、本実施形態では、前記シャフト2と前記シャフト挿通孔5xとの間の隙間Sに順方向ネジ溝である第1の螺旋溝2xを利用して流体をモータ室52側に付勢するための流体付勢領域A1を設けているので、この流体付勢領域A1に達した潤滑オイルOIL等の不純物の微細粒子はシャフト2の回転に伴い周囲のガスなど他の流体とともに第1の螺旋溝2x内をモータ室52側に移動するよう付勢され、モータ室52に排出される。したがって、真空ポンプ9の起動直後のモータ室52とターボ翼室51との間の圧力差が小さい時間帯であっても、潤滑オイルOIL等の不純物をモータ室52に排出でき、該不純物がターボ翼室51側に侵入してこのターボ翼室51を通過するガスが汚染されることを防げる。また、第1の螺旋溝2xを形成するネジ山2x1と前記シャフト挿通孔5xとの間に位置する微小隙間SSがシャフト2の回転に伴い移動するので、上述した作用により潤滑オイルOILが表面張力によりこの微小隙間SSに滞留することを防ぐことができ、従って前記シャフト2と前記シャフト挿通孔5xとの間に発生する摩擦熱や微小粒子との混合による潤滑オイルOILの劣化を防ぐこともできる。   Further, in the present embodiment, the fluid is urged toward the motor chamber 52 using the first spiral groove 2x that is a forward screw groove in the gap S between the shaft 2 and the shaft insertion hole 5x. Since the fluid energizing region A1 is provided, the fine particles of impurities such as the lubricating oil OIL that have reached the fluid energizing region A1 together with other fluids such as the surrounding gas as the shaft 2 rotates are rotated in the first spiral groove. It is urged to move in the 2x toward the motor chamber 52 and is discharged into the motor chamber 52. Therefore, even when the pressure difference between the motor chamber 52 and the turbo blade chamber 51 immediately after startup of the vacuum pump 9 is small, impurities such as the lubricating oil OIL can be discharged into the motor chamber 52, and the impurities are turbocharged. It is possible to prevent the gas that enters the blade chamber 51 side and passes through the turbo blade chamber 51 from being contaminated. Further, since the minute gap SS located between the screw thread 2x1 forming the first spiral groove 2x and the shaft insertion hole 5x moves with the rotation of the shaft 2, the lubricating oil OIL is subjected to surface tension by the above-described action. Therefore, it is possible to prevent the oil from staying in the minute gap SS. Therefore, it is possible to prevent deterioration of the lubricating oil OIL due to frictional heat generated between the shaft 2 and the shaft insertion hole 5x or mixing with minute particles. .

なお、本発明は以上に述べた実施形態に限られない。   The present invention is not limited to the embodiment described above.

例えば、上述したような前記第2の螺旋溝2yを利用した流体漏出抑制領域A2に代えて、図4に示すように、前記シャフト挿通孔5x側に刻設した順方向ネジ溝5zを利用して流体漏出抑制領域AA2を形成してもよい。このような流体漏出抑制領域AA2を設けた場合、シャフト2を図4の矢印x方向に回転させると、前記順方向ネジ溝5z内の流体もこれにつれて矢印x方向に進むよう付勢される。すなわち、前記順方向ネジ溝5z内の流体はターボ翼室51側に向けて付勢される。   For example, instead of the fluid leakage suppression region A2 using the second spiral groove 2y as described above, a forward screw groove 5z formed on the shaft insertion hole 5x side is used as shown in FIG. The fluid leakage suppression area AA2 may be formed. When such a fluid leakage suppression area AA2 is provided, when the shaft 2 is rotated in the direction of the arrow x in FIG. 4, the fluid in the forward screw groove 5z is also urged to advance in the direction of the arrow x accordingly. That is, the fluid in the forward screw groove 5z is biased toward the turbo blade chamber 51 side.

また、上述したような前記第1の螺旋溝2xを利用した流体付勢領域A1に代えて、上述した実施形態における図2に対応する図を図4に示すように、前記シャフト挿通孔5x側に刻設した逆方向ネジ溝5yを利用して流体付勢領域AA1を設けてもよい。このような流体付勢領域AA1を設けた場合、シャフト2を図4の矢印x方向に回転させると、前記逆方向ネジ溝5y内の流体もこれにつれて矢印x方向に進むよう付勢され、前記逆方向ネジ溝5y内の流体はこの逆方向ネジ溝5y内をモータ室52側に向けて移動する。   Further, instead of the fluid energizing region A1 using the first spiral groove 2x as described above, as shown in FIG. 4 corresponding to FIG. 2 in the above-described embodiment, the shaft insertion hole 5x side is shown. Alternatively, the fluid energizing area AA1 may be provided by using the reverse screw groove 5y engraved in FIG. When such a fluid urging area AA1 is provided, when the shaft 2 is rotated in the direction of the arrow x in FIG. 4, the fluid in the reverse screw groove 5y is also urged to advance in the direction of the arrow x along with this, The fluid in the reverse screw groove 5y moves in the reverse screw groove 5y toward the motor chamber 52 side.

もちろん、前記第1、第2の螺旋溝2x、2yと、前記シャフト挿通孔5x側に刻設した逆方向ネジ溝、及び前記シャフト挿通孔5x側に刻設した順方向ネジ溝の少なくとも一方を同時に設けてもよく、また、上述した実施形態に係る流体付勢領域A1と前記流体漏出抑制領域AA2との組合せ、または前記流体付勢領域AA1と上述した実施形態に係る流体漏出抑制領域A2との組合せを採用してもよい。   Of course, at least one of the first and second spiral grooves 2x and 2y, the reverse thread groove engraved on the shaft insertion hole 5x side, and the forward thread groove engraved on the shaft insertion hole 5x side is provided. The fluid urging area A1 according to the embodiment described above and the fluid leakage suppressing area AA2 may be provided at the same time, or the fluid urging area AA1 and the fluid leakage suppressing area A2 according to the embodiment described above. A combination of the above may be adopted.

さらに、前記流体付勢領域A1、AA1は省略し、前記流体漏出抑制領域A2、AA2を前記隙間の前記シャフトの延伸方向略全域にわたって設けてもよい。この場合、図5に示すように、前記シャフト挿通孔5xの前記モータ室52側端縁に他の部分よりも大径な大径部5x1を形成してこの大径部5x1とシャフト2との間の隙間Sの幅をシャフト2の径方向に広くし、この部位に達した潤滑オイルの微小粒子を含む流体が真空ポンプ9に向けて流れやすくするとよい。また、前記大径部5x1とシャフト挿通孔5xとの間に段部を設ければ、この回転機器の起動直後等において過渡的にモータ室内52がターボ翼室51よりも高圧となる時間帯においても、前記大径部5x1の壁面に付着した潤滑オイルをこの段部に留めることができるので、該潤滑オイルがシャフト挿通孔5x伝いにターボ翼室51に向かい移動することを抑止できる。さらに、シャフト2の前記大径部5x1に対向する部位に少なくとも前記ネジ山2y1に対応する部位より小径な小径部221を設けるとなおよい。   Further, the fluid urging regions A1 and AA1 may be omitted, and the fluid leakage suppression regions A2 and AA2 may be provided over substantially the entire extending direction of the shaft of the gap. In this case, as shown in FIG. 5, a large-diameter portion 5x1 having a larger diameter than other portions is formed at the end of the shaft insertion hole 5x on the motor chamber 52 side, and the large-diameter portion 5x1 and the shaft 2 It is preferable that the width of the gap S is increased in the radial direction of the shaft 2 so that the fluid containing the fine particles of the lubricating oil reaching this portion can easily flow toward the vacuum pump 9. Further, if a step portion is provided between the large diameter portion 5x1 and the shaft insertion hole 5x, the motor chamber 52 is transiently in a time zone in which the pressure in the motor chamber 52 becomes higher than that of the turbo blade chamber 51 immediately after activation of the rotating device. However, since the lubricating oil adhering to the wall surface of the large-diameter portion 5x1 can be retained at the stepped portion, the lubricating oil can be prevented from moving toward the turbo blade chamber 51 along the shaft insertion hole 5x. Furthermore, it is more preferable to provide a small diameter portion 221 having a smaller diameter than a portion corresponding to the thread 2y1 at a portion facing the large diameter portion 5x1 of the shaft 2.

その他、本発明の趣旨を逸脱しない範囲で種々変形が可能である。   In addition, various modifications can be made without departing from the spirit of the present invention.

本発明の一実施形態に係るターボブロワを示す概略断面図。1 is a schematic cross-sectional view showing a turbo blower according to an embodiment of the present invention. 図1におけるシャフト挿通孔付近の拡大図。The enlarged view of the shaft insertion hole vicinity in FIG. 同実施形態に係るターボブロワの動作を示す図。The figure which shows operation | movement of the turbo blower which concerns on the same embodiment. 本発明の他の実施態様に係るターボブロワにおける図2に対応する図。The figure corresponding to FIG. 2 in the turbo blower which concerns on the other embodiment of this invention. 本発明の他の実施態様に係るターボブロワにおける図2に対応する図。The figure corresponding to FIG. 2 in the turbo blower which concerns on the other embodiment of this invention.

符号の説明Explanation of symbols

1…ターボ翼
2…シャフト
2y…(第2の)螺旋溝
3…軸受
4…モータ
5…ケーシング
51…ターボ翼室
52…モータ室
53…隔壁
5x…シャフト挿通孔
9…真空ポンプ(排気手段)
A2…流体漏出抑制領域
DESCRIPTION OF SYMBOLS 1 ... Turbo blade 2 ... Shaft 2y ... (2nd) spiral groove 3 ... Bearing 4 ... Motor 5 ... Casing 51 ... Turbo blade chamber 52 ... Motor chamber 53 ... Partition 5x ... Shaft insertion hole 9 ... Vacuum pump (exhaust means)
A2 ... Fluid leakage suppression area

Claims (1)

隔壁により翼車室及びモータ室に区画された内部空間を有し前記隔壁にシャフトを挿通可能なシャフト挿通孔を設けているケーシングと、このケーシングのモータ室内に設けた流体潤滑式の軸受に回転可能に支持させてなる基部及び前記翼車室内に配した翼車取付部を有し前記シャフト挿通孔に挿通させてなるシャフトと、このシャフトの翼車取付部に取り付けた翼車と、この翼車を回転駆動すべく前記モータ室内に設けられ前記シャフトを回転駆動するモータと、前記モータ室内を前記翼車室よりも低圧に保つための排気手段とを具備するものであって、前記シャフトとシャフト挿通孔との間の隙間に、螺旋溝を利用して流体の前記翼車室から前記モータ室への流れを抑制するための流体漏出抑制領域を設けるとともに、前記シャフトとシャフト挿通孔との間の隙間における前記流体漏出抑制領域よりも前記モータ室寄りの領域に、螺旋溝を利用して流体をモータ室側に付勢するための流体付勢領域を設け、さらに前記流体付勢領域による付勢能力を前記流体漏出抑制領域の抑制能力よりも大きくしていることを特徴とする回転機器。 A casing having an internal space partitioned by a partition wall into an impeller chamber and a motor chamber and having a shaft insertion hole through which the shaft can be inserted, and a fluid lubrication type bearing provided in the motor chamber of the casing are rotated. A shaft that has a base portion that is supported and an impeller mounting portion disposed in the impeller chamber and that is inserted through the shaft insertion hole, an impeller that is attached to the impeller attachment portion of the shaft, and the blade A motor provided in the motor chamber for rotationally driving the vehicle, and a motor for rotating the shaft; and an exhaust means for maintaining the motor chamber at a lower pressure than the impeller chamber, shaft in the gap between the insertion hole, provided a fluid leakage suppression area for suppressing the flow to the motor chamber from said impeller chamber of the fluid by using the spiral groove Rutotomoni, the shaft and the sheet A fluid energizing region for energizing the fluid toward the motor chamber using a spiral groove in a region closer to the motor chamber than the fluid leakage suppressing region in the gap between the shaft insertion hole, and A rotating device characterized in that an urging ability by a fluid urging area is larger than an inhibiting ability of the fluid leakage suppressing area .
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