JP4724448B2 - Vibration wave driving device and apparatus provided with the vibration wave driving device - Google Patents

Vibration wave driving device and apparatus provided with the vibration wave driving device Download PDF

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JP4724448B2
JP4724448B2 JP2005103820A JP2005103820A JP4724448B2 JP 4724448 B2 JP4724448 B2 JP 4724448B2 JP 2005103820 A JP2005103820 A JP 2005103820A JP 2005103820 A JP2005103820 A JP 2005103820A JP 4724448 B2 JP4724448 B2 JP 4724448B2
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friction member
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JP2006288060A (en
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敬夫 森
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Canon Inc
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Description

本発明は、振動波駆動装置及び該振動波駆動装置を備える機器に関する。   The present invention relates to a vibration wave driving device and a device including the vibration wave driving device.

振動波駆動装置としての振動波モータ等は、駆動振動が形成される円形の振動体と、振動体に加圧接触する円形の接触体とを備え、振動体の駆動振動により振動体に対して接触体を相対的に移動させることにより駆動力を得る。   A vibration wave motor or the like as a vibration wave drive device includes a circular vibrating body in which driving vibration is formed and a circular contact body that is in pressure contact with the vibrating body. A driving force is obtained by relatively moving the contact body.

振動体は、一般に、弾性体と、この弾性体上に配置された電気−機械エネルギー変換素子としての圧電素子とにより構成される。例えば、弾性体に対して空間的に互いに90°の位相差を持った位置に2つの駆動相を有する圧電素子を配置し、この2つの駆動相に互いに90°の位相差を持つ2相の交番信号を印加することによって弾性体上に2つの曲げ振動を発生させる。この2つの曲げ振動の合成により得られた駆動振動により、振動体に対して接触体を相対的に移動させる。振動体及び接触体の少なくとも一方における接触部には、適切な摩擦力を得るための円形の摩擦部材が接着、塗布、又は形成されている。   In general, the vibrating body includes an elastic body and a piezoelectric element as an electro-mechanical energy conversion element disposed on the elastic body. For example, a piezoelectric element having two driving phases is disposed at a position spatially having a phase difference of 90 ° with respect to the elastic body, and a two-phase having a phase difference of 90 ° with respect to the two driving phases. By applying an alternating signal, two bending vibrations are generated on the elastic body. The contact body is moved relative to the vibrating body by the driving vibration obtained by combining the two bending vibrations. A circular friction member for obtaining an appropriate frictional force is bonded, applied, or formed on the contact portion of at least one of the vibrating body and the contact body.

この摩擦部材の接触面は、円周方向に連続体であり周長が変化しないので、振動の入力により接触面の形状が歪む。この歪みにより接触面がねじれると、磨耗の増大、摺動損失の増加、及び鳴き発生等の原因になる。   Since the contact surface of this friction member is a continuous body in the circumferential direction and the circumference does not change, the shape of the contact surface is distorted by the input of vibration. If the contact surface is twisted due to this distortion, it causes an increase in wear, an increase in sliding loss, and occurrence of squealing.

そこで、板金プレス加工を利用して、図12に示すように、摩擦部材を複数の摩擦部材要素に分割して、それぞれの摩擦部材要素が独立して変形することがきるように形成した振動波駆動装置が提案されている(例えば、特許文献1参照)。   Therefore, by using sheet metal pressing, as shown in FIG. 12, the friction member is divided into a plurality of friction member elements, and the vibration wave formed so that each friction member element can be deformed independently. A drive device has been proposed (see, for example, Patent Document 1).

図12において、この振動波駆動装置は、駆動振動が形成される円形の振動体3(図13を参照)と、振動体に加圧接触する円形の接触体5(図13を参照)とを備え、振動体3における接触部に、適切な摩擦力を得るための円形の摩擦部材2が形成されている。摩擦部材2は、円周方向においてスリットにより複数の摩擦部材要素に分割されているので、接触面の形状の歪みを防止することができる。また、摩擦部材2は、図13に示すように、振動体3において同心円上に複数配置されているので、摩擦部材2と接触体5との接触面積が広く、接触面圧が低いので、振動波駆動装置の耐久性が高い。
特開2002−315364号公報
In FIG. 12, this vibration wave driving device includes a circular vibrating body 3 (see FIG. 13) in which a driving vibration is formed, and a circular contact body 5 (see FIG. 13) in pressure contact with the vibrating body. In addition, a circular friction member 2 for obtaining an appropriate frictional force is formed at the contact portion of the vibrating body 3. Since the friction member 2 is divided into a plurality of friction member elements by slits in the circumferential direction, distortion of the shape of the contact surface can be prevented. Further, as shown in FIG. 13, a plurality of the friction members 2 are arranged concentrically on the vibrating body 3, so that the contact area between the friction member 2 and the contact body 5 is large and the contact surface pressure is low. The durability of the wave drive device is high.
JP 2002-315364 A

しかしながら、上記特許文献1に記載された振動波駆動装置において、個々の摩擦部材2は、図14(b)に示すように、外周付近の限られた部分でのみ接触体5と強く接触している。振動波駆動装置の耐久性を向上させるために、摩擦部材2と接触体5との接触面積を広くするためには、図14(a)に示すように、同心円上に配置された摩擦部材2の数を増やさなければならない。   However, in the vibration wave driving device described in Patent Document 1, each friction member 2 is in strong contact with the contact body 5 only at a limited portion near the outer periphery, as shown in FIG. Yes. In order to increase the contact area between the friction member 2 and the contact body 5 in order to improve the durability of the vibration wave driving device, as shown in FIG. 14 (a), the friction member 2 arranged concentrically. The number of must be increased.

振動波駆動装置において、積層される部品の加工精度、特に嵌合面の加工精度は、摩擦部材2の静的及び動的な剛性に大きく影響し、振動波駆動装置の性能に反映される。従って、大量生産の場合は積層される部品の点数を増やすことは好ましくない。   In the vibration wave driving device, the processing accuracy of the stacked components, particularly the processing accuracy of the fitting surface, greatly affects the static and dynamic rigidity of the friction member 2, and is reflected in the performance of the vibration wave driving device. Therefore, in the case of mass production, it is not preferable to increase the number of parts to be stacked.

本発明の目的は、部品点数を増やすことなく耐久性を向上させることができる振動波駆動装置及び該振動波駆動装置を備える機器を提供することにある。   An object of the present invention is to provide a vibration wave driving device capable of improving durability without increasing the number of parts and a device including the vibration wave driving device.

上述の目的を達成するために、請求項1記載の振動波駆動装置は、駆動振動が形成される振動体と、前記振動体に対して摩擦部材を介して加圧接触する接触体とを備え、前記駆動振動により前記振動体に対して前記接触体を相対的に回転させる振動波駆動装置において、前記摩擦部材は、前記摩擦部材の回転の軸に対する周方向に分割して複数の摩擦部材要素が配置され、各々の前記摩擦部材要素は、回転の軸に対する径方向に配置された両端の固定部間に、一方の支持部、内周側の両持ち梁状弾性部、連結部、外周側の両持ち梁状弾性部及び他方の支持部が連続して形成され、前記内周側の両持ち梁状弾性部に形成された接触面と、前記外周側の両持ち梁状弾性部に形成された接触面とが、2つの同心円上に配置され、外径側の前記接触面と、内径側の前記接触面とが、独立したばね性により回転の軸方向と回転の軸に対する径方向とに夫々変形可能に構成されていることを特徴とする。 To achieve the above object, the vibration wave driving apparatus according to claim 1 is provided with a vibrating body driving vibration is formed, and a contact body for the vibrating member in pressure contact through a friction member against In the vibration wave driving device that rotates the contact body relative to the vibrating body by the driving vibration, the friction member is divided in a circumferential direction with respect to an axis of rotation of the friction member to be a plurality of friction member elements. Each of the friction member elements is arranged between a fixed portion at both ends arranged in the radial direction with respect to the axis of rotation, one supporting portion, an inner-end supported beam-like elastic portion, a connecting portion, an outer peripheral side The both-end supported elastic part and the other support part are continuously formed, the contact surface formed on the inner-end supported end-like elastic part, and the outer-end supported end-like elastic part and by contact surfaces are arranged on two concentric circles, the contact surface of the outer diameter side , And the contact surface on the inner diameter side, characterized in that the separate spring properties and is configured to be respectively deformed in the radial direction and axial direction relative to the axis of rotation of the rotary.

本発明によれば、振動体及び接触体の一方における接触部に固定された円形の摩擦部材は、摩擦部材の周方向において複数の摩擦部材要素に分割され、複数の摩擦部材要素は、振動体及び接触体の他方における接触部と接触する複数の接触面を夫々有し、独立したばね性により接触面の法線方向及び摩擦部材の径方向に変形可能であるので、部品点数を増やすことなく耐久性を向上させることができる。   According to the present invention, the circular friction member fixed to the contact portion in one of the vibrating body and the contact body is divided into the plurality of friction member elements in the circumferential direction of the friction member, and the plurality of friction member elements are the vibration body. And a plurality of contact surfaces that contact the contact portion on the other side of the contact body, and can be deformed in the normal direction of the contact surface and the radial direction of the friction member by independent spring characteristics, without increasing the number of parts. Durability can be improved.

以下、本発明の実施の形態を図面を参照しながら詳述する。   Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.

本発明の実施の形態に係る振動波駆動装置としての振動波モータは、駆動振動が形成される円形の振動体と、振動体に加圧接触する円形の接触体とを有する。ここで、振動体と接触体の接触部が円形であれば、振動体と接触体は必ずしも円形でなくてもよい。振動体は、弾性体と、この弾性体上に配置された電気−機械エネルギー変換素子とを備え、電気−機械エネルギー変換素子を駆動源として弾性体に駆動振動を形成する。この振動体の駆動振動により振動体に対して接触体を相対的に移動させることにより駆動力が得られる。振動体及び接触体の少なくとも一方における接触部には、適切な摩擦力を得るための円形の後述する図1の摩擦部材が形成されている。   A vibration wave motor as a vibration wave driving device according to an embodiment of the present invention includes a circular vibration body in which drive vibration is formed, and a circular contact body that is in pressure contact with the vibration body. Here, if the contact portion between the vibrating body and the contact body is circular, the vibrating body and the contact body do not necessarily have to be circular. The vibration body includes an elastic body and an electro-mechanical energy conversion element disposed on the elastic body, and forms drive vibration in the elastic body using the electro-mechanical energy conversion element as a drive source. A driving force is obtained by moving the contact body relative to the vibrating body by the driving vibration of the vibrating body. A circular friction member shown in FIG. 1 to be described later for obtaining an appropriate frictional force is formed in the contact portion of at least one of the vibrating body and the contact body.

図1は、本発明の実施の形態に係る振動波駆動装置の摩擦部材の部分斜視図である。   FIG. 1 is a partial perspective view of a friction member of a vibration wave driving device according to an embodiment of the present invention.

図1において、矢印Aは摩擦部材の周方向、矢印Bは摩擦部材の径方向を示す。このことは、他の図面において同様である。   In FIG. 1, arrow A indicates the circumferential direction of the friction member, and arrow B indicates the radial direction of the friction member. This is the same in other drawings.

摩擦部材11は、放射状に複数の摩擦部材要素に分割されている。本図では、5個の摩擦部材要素を図示している。個々の摩擦部材要素は、2つの接触面を含む両持ち梁状弾性部12と、両持ち梁状弾性部12を支持する支持部13と、2つの接触面を連結する連結部14とから構成される。摩擦部材11の固定部15は、接着剤による接着、金属ろう付け、溶接、圧入、焼きバメ等により、基部16に接合されている。   The friction member 11 is radially divided into a plurality of friction member elements. In this figure, five friction member elements are illustrated. Each friction member element includes a double-supported beam-like elastic portion 12 including two contact surfaces, a support portion 13 that supports the double-supported beam-like elastic portion 12, and a connecting portion 14 that connects the two contact surfaces. Is done. The fixing portion 15 of the friction member 11 is joined to the base portion 16 by bonding with an adhesive, metal brazing, welding, press-fitting, shrinking, or the like.

摩擦部材要素は、独立したばね性により接触面の法線方向(以下、「軸方向」という)と径方向に変形可能である。軸方向の変形量は、内径側及び外径側の固定部15から張出した部分の剛性により管理され、相対する接触面同士の接触領域を決めるパラメータである。   The friction member element can be deformed in the normal direction of the contact surface (hereinafter referred to as “axial direction”) and the radial direction by independent spring characteristics. The amount of deformation in the axial direction is managed by the rigidity of the portion protruding from the fixed portion 15 on the inner diameter side and the outer diameter side, and is a parameter that determines the contact area between the opposing contact surfaces.

軸方向の剛性が高すぎると、接触体が跳躍し、接触が不安定になり異音を発生する。軸方向の剛性が低すぎると、必要な回転数が得られず、十分な出力を得るために過大な入力を要する。そのため、安定した接触を得るために、軸方向の剛性を適切に管理することが重要である。   If the axial rigidity is too high, the contact body jumps, the contact becomes unstable, and abnormal noise is generated. If the axial rigidity is too low, the required rotational speed cannot be obtained, and excessive input is required to obtain a sufficient output. Therefore, it is important to appropriately manage the axial rigidity in order to obtain a stable contact.

また、径方向の変形量は、接触面の周縁から垂直な方向に延出した部分の剛性により管理され、相対する接触面の振動方向(即ち、軸方向振幅と径方向振幅により得られる質点移動方向)に略一致させることで、接触面同士の径方向滑りを減少させ安定した接触を得ることができる。   The amount of deformation in the radial direction is controlled by the rigidity of the portion extending in the direction perpendicular to the periphery of the contact surface, and the mass movement obtained by the vibration direction (that is, axial amplitude and radial amplitude) of the opposing contact surface. By substantially matching (direction), the radial slip between the contact surfaces can be reduced and stable contact can be obtained.

両持ち梁状弾性部12、支持部13、及び連結部14は、固定部15間の連続体であるため、設計においては静的及び動的な有限要素解析により、それぞれの挙動と影響を総合的に把握することが必須である。   Since the cantilever-like elastic part 12, the support part 13, and the connecting part 14 are a continuous body between the fixed parts 15, their behavior and influence are comprehensively determined by static and dynamic finite element analysis in the design. It is essential to grasp it.

摩擦部材11が周方向に分割されることにより、磨耗粉が開口部を通過して排出される。また、基部16や摩擦部材11の接触面以外の面に粘着性の物質を塗布することにより、磨耗粉が粘着性の物質に定着し、磨耗粉が外部へ排出されるのを防止することができる。   By dividing the friction member 11 in the circumferential direction, the wear powder passes through the opening and is discharged. Further, by applying an adhesive substance to the surface other than the contact surface of the base 16 or the friction member 11, it is possible to prevent the abrasion powder from being fixed to the adhesive substance and discharged to the outside. it can.

摩擦部材11は、厚さ0.1mmのマルテンサイト系ステンレスの板材を材料として、プレス加工により製造される。まず、丸板に放射状のスリットを接触面側から打ち抜く。接触面側から打ち抜くことで発生したエッジ部のダレにより、エッジ部の応力の集中を緩和することができる。次に、接触面とは反対側から軸方向にしごき加工を施すことにより、固定部15と接触面の段差を成形する。   The friction member 11 is manufactured by press working using a martensitic stainless steel plate having a thickness of 0.1 mm as a material. First, radial slits are punched into the round plate from the contact surface side. The stress concentration at the edge portion can be alleviated by the sagging of the edge portion generated by punching from the contact surface side. Next, a step between the fixed portion 15 and the contact surface is formed by ironing in the axial direction from the side opposite to the contact surface.

図1の構成によれば、摩擦部材11は、放射状に複数の摩擦部材要素に分割され、個々の摩擦部材要素は、2つの接触面を有し、独立したばね性により軸方向と径方向に変形可能であるので、部品点数を増やすことなく耐久性を向上させることができる。   According to the configuration of FIG. 1, the friction member 11 is radially divided into a plurality of friction member elements, and each friction member element has two contact surfaces and has an independent spring property in the axial direction and the radial direction. Since it is deformable, the durability can be improved without increasing the number of parts.

図2は、図1の摩擦部材11の第1の変形例の部分斜視図である。   FIG. 2 is a partial perspective view of a first modification of the friction member 11 of FIG.

図2の摩擦部材11は、連結部14と基部16の間に設けられた緩衝部材17を有する点で図1の摩擦部材11と異なる。   The friction member 11 in FIG. 2 is different from the friction member 11 in FIG. 1 in that it has a buffer member 17 provided between the connecting portion 14 and the base portion 16.

緩衝部材17は、樹脂等の粘性減衰を有する材料から成り、摩擦部材11に発生した不要な振動を吸収する。緩衝部材17は、支持部13と基部16の間に設置されてもよく、接触面以外の面に塗布されてもよい。   The buffer member 17 is made of a material having a viscous damping such as a resin, and absorbs unnecessary vibration generated in the friction member 11. The buffer member 17 may be installed between the support part 13 and the base part 16, and may be apply | coated to surfaces other than a contact surface.

両持ち梁状弾性部12の2つの接触面は、外径側の接触面の変位方向(矢印C)が、内径側の接触面の変位方向(矢印D)より接触面に垂直な方向になるように管理されている。具体的な設計値は、入力される振動波によって変化する。接触面の変位方向は、両持ち梁状弾性部12の接触面と支持部13の成す角度をパラメータとして管理されている。なお、接触面の変位方向は、摩擦部材11の板厚又は連結部14の形状により管理されてもよい。   The two contact surfaces of the double-supported beam-like elastic portion 12 are such that the displacement direction of the contact surface on the outer diameter side (arrow C) is perpendicular to the contact surface than the displacement direction of the contact surface on the inner diameter side (arrow D) Managed. The specific design value varies depending on the input vibration wave. The displacement direction of the contact surface is managed by using the angle formed by the contact surface of the double-supported beam-like elastic portion 12 and the support portion 13 as a parameter. The displacement direction of the contact surface may be managed by the plate thickness of the friction member 11 or the shape of the connecting portion 14.

接触面の内径側で支持される一般的な振動体の場合、径が大きい位置ほど振動波振幅が大きくなるため、径方向張り出し部の長さによって内径側の剛性を外径側よりも大きくしている。   In the case of a general vibrating body supported on the inner diameter side of the contact surface, the vibration wave amplitude increases as the diameter increases, so the rigidity on the inner diameter side is made larger than that on the outer diameter side depending on the length of the radially extending portion. ing.

図2の構成によれば、外径側の接触面の変位方向(矢印C)が、内径側の接触面の変位方向(矢印D)より接触面に垂直な方向になるように管理されているので、接触面同士の径方向滑りを減少させ安定した接触を得ることができる。   According to the configuration of FIG. 2, the displacement direction of the contact surface on the outer diameter side (arrow C) is managed so as to be perpendicular to the contact surface with respect to the displacement direction of the contact surface on the inner diameter side (arrow D). Therefore, it is possible to reduce the radial slip between the contact surfaces and obtain a stable contact.

図3は、図1の摩擦部材11の第2の変形例の部分斜視図である。   FIG. 3 is a partial perspective view of a second modification of the friction member 11 of FIG.

図3の摩擦部材11は、摩擦部材要素が周方向に複数の接触面を有する点で図1の摩擦部材11と異なる。   The friction member 11 of FIG. 3 differs from the friction member 11 of FIG. 1 in that the friction member element has a plurality of contact surfaces in the circumferential direction.

摩擦部材要素は、両持ち梁状弾性部12の周方向に片持ち梁状の張出し部31を有しているので、摩擦部材要素が周方向に分割されていることによる断続的な接触により、摩擦部材要素が破壊されるのを防止することができる。摩擦部材11は、複雑な形状を有しているが、図1の摩擦部材11と同様に、打ち抜き工程、及びしごき加工工程の2工程で製造することができる。   Since the friction member element has the cantilever-like overhanging portion 31 in the circumferential direction of the both-end supported elastic portion 12, due to intermittent contact due to the friction member element being divided in the circumferential direction, It is possible to prevent the friction member element from being broken. Although the friction member 11 has a complicated shape, it can be manufactured in two steps, a punching process and a ironing process, like the friction member 11 of FIG.

図3の構成によれば、周方向に複数の接触面を有しているので、相対する接触面の入力振動波に倣った歪みを発生しやすくなり、応力の集中を緩和することができる。さらに、径方向の接触面積を広くすることができる。   According to the configuration of FIG. 3, since there are a plurality of contact surfaces in the circumferential direction, it is easy to generate distortion following the input vibration wave of the opposing contact surfaces, and stress concentration can be reduced. Furthermore, the radial contact area can be increased.

図4は、図1の摩擦部材11の第3の変形例の部分斜視図である。   FIG. 4 is a partial perspective view of a third modification of the friction member 11 of FIG.

図4の摩擦部材11は、連結部14が円弧状である点で図1の摩擦部材11と異なる。   The friction member 11 in FIG. 4 differs from the friction member 11 in FIG. 1 in that the connecting portion 14 has an arc shape.

摩擦部材要素は、径方向に複数の接触面を有する。連結部14の円弧の曲率、及び円弧の軸方向位置は、しごき加工における雌型の形状により操作する。   The friction member element has a plurality of contact surfaces in the radial direction. The curvature of the arc of the connecting portion 14 and the axial position of the arc are manipulated by the shape of the female die in the ironing process.

図4の構成によれば、円弧状の連結部14の円弧の曲率、及び円弧の軸方向位置を操作することにより、複数の接触面の振動方向を管理することができる。   According to the configuration of FIG. 4, the vibration direction of the plurality of contact surfaces can be managed by manipulating the curvature of the arc of the arcuate connecting portion 14 and the axial position of the arc.

図5は、図1の摩擦部材11の第4の変形例の部分斜視図である。   FIG. 5 is a partial perspective view of a fourth modification of the friction member 11 of FIG.

図5の摩擦部材11は、連結部14が接触面と同じ面内に配置されている点で図1の摩擦部材11と異なる。支持部13と連結部14は、軸方向と径方向のばね性を有する。   The friction member 11 of FIG. 5 differs from the friction member 11 of FIG. 1 in that the connecting portion 14 is disposed in the same plane as the contact surface. The support part 13 and the connection part 14 have spring properties in the axial direction and the radial direction.

図5の構成によれば、連結部14が接触面と同じ面内に配置されているので、しごき加工が不要であり、打ち抜き加工のみで摩擦部材を成形することができる。   According to the configuration of FIG. 5, since the connecting portion 14 is disposed in the same plane as the contact surface, the ironing process is unnecessary, and the friction member can be formed only by punching.

図6及び図7は、図1の摩擦部材11の第5の変形例の部分斜視図である。   6 and 7 are partial perspective views of a fifth modification of the friction member 11 of FIG.

図6及び図7の摩擦部材11は、2列の接触面群がリング連結部61により固定されている点で図1の摩擦部材11と異なる。   The friction member 11 shown in FIGS. 6 and 7 is different from the friction member 11 shown in FIG. 1 in that two rows of contact surface groups are fixed by a ring connecting portion 61.

それぞれ放射状に分割された2列の接触面群が、同心円上に互いに周方向にずれた位置に配置されて、リング連結部61により固定されることにより、摩擦部材11は、周方向及び径方向の両方に複数の接触面を有する。   The frictional members 11 are arranged in the circumferential direction and the radial direction by arranging two rows of contact surface groups, which are each divided radially, on the concentric circles at positions shifted in the circumferential direction and fixed by the ring connecting portion 61. Both have a plurality of contact surfaces.

図6及び図7の構成によれば、2列の接触面群が周方向に互いにずれた位置に配置されているので、接触が断続的にならず安定した接触を得ることができる。   According to the configuration of FIGS. 6 and 7, since the two contact surface groups are arranged at positions shifted from each other in the circumferential direction, the contact is not intermittent and a stable contact can be obtained.

図8は、図1の摩擦部材11の第6の変形例の部分斜視図である。   FIG. 8 is a partial perspective view of a sixth modification of the friction member 11 of FIG.

図8の摩擦部材11は、2つの摩擦部材11a及び11bから構成されている点で図1の摩擦部材11と異なる。   The friction member 11 shown in FIG. 8 is different from the friction member 11 shown in FIG. 1 in that the friction member 11 includes two friction members 11a and 11b.

摩擦部材11a及び11bは、摩擦部材要素の位置が周方向において互いに重ならないように積層されている。   The friction members 11a and 11b are stacked such that the positions of the friction member elements do not overlap each other in the circumferential direction.

放射状のスリットを打ち抜く雄型は、数万回の使用に耐える耐久性を確保するために、ある程度の強度を有する必要がある。一方、接触面積を増やすためには摩擦部材のスリット幅を細くすることが望ましいが、雄型に十分な厚みがないと、雄型の強度や耐久性が著しく低下する。   A male die that punches radial slits needs to have a certain degree of strength in order to ensure durability that can withstand tens of thousands of uses. On the other hand, in order to increase the contact area, it is desirable to reduce the slit width of the friction member. However, if the male mold does not have a sufficient thickness, the strength and durability of the male mold are significantly reduced.

図8の構成によれば、2つの摩擦部材を摩擦部材要素の位置をずらして積層するので、それぞれの摩擦部材のスリット幅を広げることが可能であり、雄型の十分な強度を確保することができる。   According to the configuration of FIG. 8, the two friction members are stacked while shifting the position of the friction member elements, so that it is possible to widen the slit width of each friction member and ensure sufficient strength of the male mold. Can do.

図9は、図1の摩擦部材11の第7の変形例の部分斜視図である。   FIG. 9 is a partial perspective view of a seventh modification of the friction member 11 of FIG.

図9の摩擦部材11は、摩擦部材11に積層された補強部材91を有する点で図1の摩擦部材11と異なる。   The friction member 11 in FIG. 9 is different from the friction member 11 in FIG. 1 in that it includes a reinforcing member 91 laminated on the friction member 11.

補強部材91は、摩擦部材11を補強する役割を果たす。補強部材91は1つに限らず、複数であってもよい。   The reinforcing member 91 serves to reinforce the friction member 11. The number of reinforcing members 91 is not limited to one and may be plural.

図9の構成によれば、一定の厚みの平板から摩擦部材を製造する場合において、所望の剛性が得られないときに、簡単な方法で摩擦部材の剛性を調節することができる。   According to the configuration of FIG. 9, when a friction member is manufactured from a flat plate having a constant thickness, the rigidity of the friction member can be adjusted by a simple method when a desired rigidity cannot be obtained.

図10及び図11は、図1の摩擦部材11の第8の変形例の部分斜視図である。   10 and 11 are partial perspective views of an eighth modification of the friction member 11 of FIG.

図10及び図11の摩擦部材11は、接触面が複数の異なる同心円上に配置されている点で図1の摩擦部材11と異なる。   The friction member 11 shown in FIGS. 10 and 11 differs from the friction member 11 shown in FIG. 1 in that the contact surfaces are arranged on a plurality of different concentric circles.

摩擦部材11は、2つの摩擦部材11a及び11bから構成されている。摩擦部材11aは、内周側及び外周側の2つの同心円上に配置された2列の接触面を有し、摩擦部材11bは、摩擦部材11aの2列の接触面を跨ぐように配置された1列の接触面を有する。なお、接触面が複数の異なる同心円上に配置されていれば、摩擦部材は単板構造であってもよい。図11に示すように、摩擦部材11の接触面は、当接される摩擦部材11´の接触面に径方向において全領域で接触する。   The friction member 11 is composed of two friction members 11a and 11b. The friction member 11a has two rows of contact surfaces disposed on two concentric circles on the inner peripheral side and the outer peripheral side, and the friction member 11b is disposed so as to straddle the two rows of contact surfaces of the friction member 11a. It has one row of contact surfaces. Note that the friction member may have a single plate structure as long as the contact surfaces are arranged on a plurality of different concentric circles. As shown in FIG. 11, the contact surface of the friction member 11 is in contact with the contact surface of the friction member 11 ′ in contact in the entire region in the radial direction.

摩擦部材11の接触面の硬度は、当接される摩擦部材11´の接触面の硬度より高く設定しているので、摩擦部材11の接触面の磨耗量はごく微量である。そのため、振動波駆動装置の性能劣化の主な原因は、当接される摩擦部材11´の磨耗による接触面性状、例えば平面度等の劣化である。   Since the hardness of the contact surface of the friction member 11 is set higher than the hardness of the contact surface of the friction member 11 ′ to be abutted, the amount of wear of the contact surface of the friction member 11 is very small. For this reason, the main cause of the performance deterioration of the vibration wave driving device is deterioration of the contact surface property, for example, flatness due to wear of the friction member 11 ′ to be contacted.

図10及び図11の構成によれば、摩擦部材11の接触面は、当接される摩擦部材11´の接触面に径方向において全領域で接触するので、摩擦部材11´の磨耗による影響を緩和し、振動波駆動装置の性能劣化を防止することができる。   10 and 11, the contact surface of the friction member 11 contacts the contact surface of the friction member 11 ′ in contact with the entire surface in the radial direction. It can be mitigated and performance deterioration of the vibration wave drive device can be prevented.

本発明の実施の形態に係る振動波駆動装置の摩擦部材の部分斜視図である。It is a fragmentary perspective view of the friction member of the vibration wave drive device concerning an embodiment of the invention. 図1の摩擦部材の第1の変形例の部分斜視図である。It is a fragmentary perspective view of the 1st modification of the friction member of FIG. 図1の摩擦部材の第2の変形例の部分斜視図である。It is a fragmentary perspective view of the 2nd modification of the friction member of FIG. 図1の摩擦部材の第3の変形例の部分斜視図である。It is a fragmentary perspective view of the 3rd modification of the friction member of FIG. 図1の摩擦部材の第4の変形例の部分斜視図である。It is a fragmentary perspective view of the 4th modification of the friction member of FIG. 図1の摩擦部材の第5の変形例の部分斜視図である。It is a fragmentary perspective view of the 5th modification of the friction member of FIG. 図1の摩擦部材の第5の変形例の部分斜視図である。It is a fragmentary perspective view of the 5th modification of the friction member of FIG. 図1の摩擦部材の第6の変形例の部分斜視図である。It is a fragmentary perspective view of the 6th modification of the friction member of FIG. 図1の摩擦部材の第7の変形例の部分斜視図である。It is a fragmentary perspective view of the 7th modification of the friction member of FIG. 図1の摩擦部材の第8の変形例の部分斜視図である。It is a fragmentary perspective view of the 8th modification of the friction member of FIG. 図1の摩擦部材の第8の変形例の部分斜視図である。It is a fragmentary perspective view of the 8th modification of the friction member of FIG. 従来の振動波駆動装置の摩擦部材の形状を示す図であり、(a)は正面図、(b)は部分断面図である。It is a figure which shows the shape of the friction member of the conventional vibration wave drive device, (a) is a front view, (b) is a fragmentary sectional view. 図12の摩擦部材の断面図である。It is sectional drawing of the friction member of FIG. 図12の摩擦部材の断面図であり、(a)は全体図、(b)は部分拡大図である。It is sectional drawing of the friction member of FIG. 12, (a) is a general view, (b) is the elements on larger scale.

符号の説明Explanation of symbols

11 摩擦部材
12 両持ち梁状弾性部
13 支持部
14 連結部
15 固定部
DESCRIPTION OF SYMBOLS 11 Friction member 12 Dual-supported elastic part 13 Support part 14 Connection part 15 Fixed part

Claims (5)

駆動振動が形成される振動体と、
前記振動体に対して摩擦部材を介して加圧接触する接触体とを備え、
前記駆動振動により前記振動体に対して前記接触体を相対的に回転させる振動波駆動装置において、
前記摩擦部材は、前記摩擦部材の回転の軸に対する周方向に分割して複数の摩擦部材要素が配置され、
各々の前記摩擦部材要素は、回転の軸に対する径方向に配置された両端の固定部間に、一方の支持部、内周側の両持ち梁状弾性部、連結部、外周側の両持ち梁状弾性部及び他方の支持部が連続して形成され、
前記内周側の両持ち梁状弾性部に形成された接触面と、前記外周側の両持ち梁状弾性部に形成された接触面とが、2つの同心円上に配置され、
外径側の前記接触面と、内径側の前記接触面とが、独立したばね性により回転の軸方向と回転の軸に対する径方向とに夫々変形可能に構成されていることを特徴とする振動波駆動装置。
A vibrating body in which driving vibration is formed;
And a contact body for pressure contact via the friction member against the vibration member,
In the vibration wave driving device that rotates the contact body relative to the vibrating body by the driving vibration,
The friction member is divided in a circumferential direction with respect to an axis of rotation of the friction member, and a plurality of friction member elements are arranged,
Each of the friction member elements includes one supporting portion, an inner peripheral side cantilevered elastic portion, a connecting portion, and an outer peripheral side cantilever beam between fixed portions at both ends arranged in a radial direction with respect to the axis of rotation. A cylindrical elastic part and the other support part are formed continuously,
The contact surface formed on the inner peripheral side cantilever-like elastic portion and the contact surface formed on the outer peripheral side cantilever-like elastic portion are arranged on two concentric circles,
The vibration characterized in that the contact surface on the outer diameter side and the contact surface on the inner diameter side are configured to be deformable in an axial direction of rotation and a radial direction with respect to the axis of rotation by independent springiness, respectively. Wave drive device.
外径側の前記接触面の変位方向が、内径側の前記接触面の変位方向より前記接触面に垂直な方向になるように構成されていることを特徴とする請求項1記載の振動波駆動装置。 The vibration wave drive according to claim 1 , wherein the displacement direction of the contact surface on the outer diameter side is configured to be perpendicular to the contact surface from the displacement direction of the contact surface on the inner diameter side. apparatus. 前記摩擦部材は、
前記摩擦部材の回転の軸に対する周方向に分割して配置された外径側の前記接触面及び内径側の前記接触面を有する各々の前記摩擦部材要素に隣接して、
外径側の前記接触面と内径側の前記接触面との間に対応した位置に、両持ち梁状弾性部に形成された接触面が配置された他の摩擦部材要素が設けられていることを特徴とする請求項1又は2に記載の振動波駆動装置。
The friction member is
Adjacent to each of the friction member elements having the contact surface on the outer diameter side and the contact surface on the inner diameter side arranged in a circumferential direction with respect to the rotation axis of the friction member,
Another friction member element in which the contact surface formed on the double-supported beam-like elastic portion is disposed at a position corresponding to the contact surface on the outer diameter side and the contact surface on the inner diameter side. The vibration wave driving device according to claim 1, wherein:
前記連結部に、不要な振動を吸収する緩衝部材を設置したことを特徴とする請求項1乃至3の何れか1項に記載の振動波駆動装置。 The vibration wave driving device according to claim 1 , wherein a buffer member that absorbs unnecessary vibration is installed in the connecting portion . 請求項1乃至何れか1項に記載の振動波駆動装置と、駆動振動により前記振動体に対して前記接触体を相対的に移動させることにより得られた駆動力により駆動される被駆動体とを備えることを特徴とする機器。 A vibration wave driving apparatus according to any one of claims 1 to 4, driven to the driven by the driving force obtained by relatively moving the contact member relative to the vibrating member by driving the vibration A device characterized by comprising a body.
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