JP4713350B2 - Work surface processing method, pipe manufacturing method, work surface processing apparatus, pipe manufacturing apparatus, work surface processing liquid management method, and work surface processing liquid management apparatus - Google Patents

Description

  The present invention relates to a workpiece surface processing method and a workpiece surface processing apparatus for sequentially performing liquid honing treatment and cleaning treatment on the surface of various workpieces such as a base pipe of a pipe for a photosensitive drum substrate.

  For example, in a photosensitive drum mounted on an electronic copying machine, a laser printer, or the like, a photosensitive drum base that supports a photoconductive photosensitive layer such as selenium or an organic photosensitive member is a metal pipe such as aluminum (including an alloy thereof). Formed from. This pipe is required to have high dimensional accuracy (for example, straightness) and also to have high surface accuracy in order to obtain a high-quality image.

By the way, in many cases, this pipe is manufactured from a raw tube obtained by drawing, but such a raw tube often has a non-uniform surface state. Therefore, conventionally, in order to make the surface of the raw tube uniform (for example, uniformly roughen), a honing liquid containing abrasive grains is sprayed on the surface of the raw tube, and liquid honing treatment is performed on the surface of the raw tube. Furthermore, since the abrasive grains in the honing liquid are attached to the surface of the liquid honing-treated raw tube, the surface of the raw pipe is subjected to a cleaning process in order to remove the abrasive grains (for example, (See Patent Documents 1-4).
JP-A-9-179324 (Claim 1, FIG. 1) Japanese Patent Laid-Open No. 9-236937 (Claim 1, FIG. 1) JP 2001-296679 A JP 2004-246124 A

  Thus, in the above-described surface processing method of a pipe that sequentially performs liquid honing treatment and cleaning treatment on the surface of the pipe, when a honing liquid is repeatedly used to liquid honing a plurality of pipes, There were the following problems.

  That is, the used honing liquid contains a small amount of crushed grains of abrasive grains that are generated by finely pulverizing the abrasive grains by collision of the abrasive grains with the surface of the base tube, and these crushed grains are sharp. Has horns. Therefore, when the honing liquid once used is used again, the surface roughness of the raw pipe deteriorates due to the crushed particles in the honing liquid sticking into the surface of the raw pipe, and the surface of the raw pipe is uniformly roughened. I can't do that.

  Further, when the abrasive concentration of the honing liquid varies when the honing liquid is used repeatedly, it becomes impossible to obtain a stable surface roughness for a plurality of elementary tubes.

  The present invention has been made in view of the above-described technical background, and an object of the present invention is to provide a workpiece surface processing method that can uniformly roughen the workpiece surface and the workpiece surface that can be suitably used for this method. Providing a processing apparatus, further providing a pipe manufacturing method using the workpiece surface processing method and a pipe manufacturing apparatus that can be suitably used for the method, and further using the workpiece surface processing method Provided is a workpiece surface machining fluid management method capable of managing the honing fluid in the machining fluid to be used so that the abrasive grain concentration becomes substantially constant, and a workpiece surface machining fluid management apparatus suitably used for this. It is in.

  The present invention provides the following means.

[1] A liquid honing treatment process in which a honing liquid containing abrasive grains is applied to the surface of the workpiece using a honing liquid, and the surface of the workpiece subjected to the liquid honing treatment in the honing treatment section is cleaned. A cleaning process step of performing a cleaning process using a cleaning liquid supplied to the cleaning process unit from the outside in the processing unit, and a used honing liquid used in the honing process unit, A mixing step of mixing the used cleaning liquid used in the cleaning processing unit, a crushed particle removing step of separating and removing the crushed particles of the abrasive grains from the first mixed liquid mixed in the mixing step, and the crushed particle removal A reuse step in which a second mixed liquid obtained by removing crushed particles from the first mixed liquid in the step is sent to the honing treatment section and reused as a honing liquid; A healthy abrasive recovery process for recovering and removing healthy abrasive grains from the first separated liquid containing crushed grains separated from the first mixed liquid in the grain removal process, and a healthy recovered in the healthy abrasive grain recovery process A recovery liquid returning step for returning the recovery liquid containing the abrasive grains to the first mixed liquid, and a second separation liquid obtained by removing healthy abrasive grains from the first separation liquid in the healthy abrasive grain recovery step. A separation liquid discharge step for discharging the liquid, a discharge amount of the second separation liquid discharged to the outside in the separation liquid discharge step, and a supply amount of the cleaning liquid supplied from the outside to the cleaning processing unit in the cleaning processing step. And a balancing step for balancing. The workpiece surface processing method.

[2] The workpiece surface processing method according to item 1, wherein in the crushed particle removal step, the crushed particles are separated and removed from the first mixed liquid by sending the first mixed liquid to a first hydrocyclone separator.

  [3] The surface processing method for a workpiece according to item 2, wherein the first hydrocyclone separator is arranged in a plurality of stages.

[4] In the healthy abrasive grain collection step, any one of items 1 to 3 described above, wherein the healthy abrasive grains are recovered and removed from the first separated liquid by sending the first separated liquid to a second hydrocyclone separator. The surface processing method of the workpiece | work of description.

  [5] The workpiece surface processing method according to item 4, wherein the second hydrocyclone separator is arranged in a plurality of stages.

[6] In the balancing step, a second separation liquid flow control valve interposed in a separation liquid discharge pipe for discharging the second separation liquid to the outside, and a cleaning liquid supply for supplying the cleaning liquid to the cleaning processing unit from the outside 6. The method according to any one of 1 to 5 above, wherein the discharge amount of the second separation liquid and the supply amount of the cleaning liquid are balanced by operating at least one of the flow control valves for the cleaning liquid interposed in the pipe. Surface processing method for workpieces.

  [7] The surface processing method for a workpiece according to any one of the preceding items 1 to 6, further comprising a conveying step of conveying the workpiece subjected to the liquid honing treatment in the honing treatment section from the honing treatment section to the cleaning treatment section by a conveyance device. .

  [8] Any one of the preceding items 1 to 7, wherein the liquid honing treatment step and the washing treatment step are performed in a processing tank that has the honing treatment portion and the washing treatment portion inside and is blocked from outside air. Surface processing method for workpieces.

[9] The surface processing method for a workpiece according to any one of items 1 to 8, including an abrasive grain replenishing step of replenishing the first mixed liquid with abrasive grains.

  [10] The workpiece surface processing method according to any one of [1] to [9], wherein the workpiece is a base pipe of a pipe for a photosensitive drum substrate.

  [11] A method for manufacturing a pipe, characterized in that the surface of a raw pipe is processed as a workpiece by the workpiece surface processing method according to any one of items 1 to 10.

  [12] The method for producing a pipe as described in 11 above, wherein the pipe is a photosensitive drum base pipe.

[13] A honing processing unit that performs a liquid honing process on the surface of the work using a honing liquid containing abrasive grains, and a cleaning liquid that is supplied from the outside to the surface of the work subjected to the liquid honing process in the honing processing unit In a surface processing apparatus for a workpiece comprising a cleaning processing unit that performs a cleaning process using a used honing liquid used in the honing processing unit and a used cleaning liquid used in the cleaning processing unit A first liquid cyclone separator that separates and removes the crushed grains of the abrasive grains from the first mixed liquid, and a second liquid mixture obtained by removing the crushed grains from the first mixed liquid by the first liquid cyclone separator. Contains a honing liquid feed pipe that is fed to the honing processing section as a honing liquid, and crushed particles separated from the first liquid mixture by the first liquid cyclone separator A second liquid cyclone separator for recovering and removing healthy abrasive grains from the first separated liquid, and a recovery liquid containing healthy abrasive grains recovered by the second liquid cyclone separator to the first mixed liquid. A recovery liquid return pipe for returning, a separation liquid discharge pipe for discharging the second separation liquid from which healthy abrasive grains have been removed from the first separation liquid by the second liquid cyclone separator, and a cleaning liquid from the outside. A cleaning liquid supply pipe supplied to the cleaning processing section, a second separation liquid discharge amount discharged to the outside through the separation liquid discharge pipe, and a cleaning liquid supply supplied from the outside to the cleaning processing section through the cleaning liquid supply pipe A workpiece surface processing apparatus comprising: balancing means for balancing the amount.

  [14] The workpiece surface processing apparatus according to [13], wherein the first hydrocyclone separator is disposed in a plurality of stages.

  [15] The workpiece surface processing apparatus according to [13] or [14], wherein the second hydrocyclone separator is arranged in a plurality of stages.

[16] The item 13 above, wherein the balancing means includes a second separation liquid flow control valve interposed in the separation liquid discharge pipe and a cleaning liquid flow control valve interposed in the cleaning liquid supply pipe. The work surface processing apparatus of any one of -15.

  [17] The workpiece surface processing apparatus according to any one of [13] to [16], further including a transfer device that transfers the workpiece subjected to the liquid honing process in the honing process unit to the cleaning process unit from the honing process unit. .

  [18] The workpiece surface processing apparatus according to any one of items 13 to 17, further including a processing tank having the honing processing unit and the cleaning processing unit therein.

[19] The workpiece surface processing apparatus according to any one of [13] to [18], further including an abrasive replenishing unit that replenishes the first mixed liquid with abrasive grains.

  [20] The workpiece surface processing apparatus according to any one of items 13 to 19, wherein the workpiece is a base pipe of a pipe for a photosensitive drum base.

  [21] A pipe surface characterized in that it comprises the workpiece surface processing apparatus according to any one of items 13 to 19, and the workpiece surface processing apparatus is configured to process a surface of a raw pipe as a workpiece. Manufacturing equipment.

  [22] The pipe manufacturing apparatus according to item 21, wherein the pipe is a photosensitive drum base pipe.

[23] The surface of the workpiece is used to perform a liquid honing process in the honing process unit, and the honing liquid containing abrasive grains and the surface of the work subjected to the liquid honing process in the honing process unit are cleaned in the cleaning process unit. And a cleaning liquid supplied to the cleaning processing unit from the outside, and a method of managing the surface processing liquid of the workpiece, the used honing liquid used in the honing processing unit and the cleaning process In the mixing step of mixing the used cleaning liquid used in the section, the crushed particle removing step of separating and removing the crushed particles of the abrasive grains from the first mixed liquid mixed in the mixing step, and the crushed particle removing step In the honing liquid feeding step of sending the second mixed liquid obtained by removing the crushed particles from the first mixed liquid to the honing processing unit as the honing liquid, and in the crushed particle removing process, Contains a healthy abrasive recovery process for recovering and removing healthy abrasive grains from the first separated liquid containing crushed grains separated from the first mixed liquid, and healthy abrasive grains recovered in the healthy abrasive recovery process A recovery liquid returning step for returning the recovered liquid to the first mixed liquid, and a separation liquid for discharging the second separation liquid from which the healthy abrasive grains are removed from the first separation liquid in the healthy abrasive grain recovery step to the outside A discharge step, a cleaning liquid supply step for supplying a cleaning liquid from the outside to the cleaning processing unit, a discharge amount of the second separation liquid discharged to the outside in the separation liquid discharge step, and the cleaning process from the outside in the cleaning liquid supply step And a balancing step of balancing the supply amount of the cleaning liquid supplied to the part.

[24] The surface machining fluid management method for a workpiece according to item 23, wherein in the crushed particle removing step, the crushed particles are separated and removed from the first mixed liquid by sending the first mixed liquid to a first hydrocyclone separator. .

  [25] The workpiece surface processing liquid management method according to [24], wherein the first hydrocyclone separator is arranged in a plurality of stages.

[26] Any one of the preceding items 23 to 25, wherein in the healthy abrasive grain recovery step, the healthy abrasive grains are recovered and removed from the first separated liquid by sending the first separated liquid to a second hydrocyclone separator. The method for managing the surface machining fluid of the workpiece according to the item.

  [27] The workpiece surface processing liquid management method according to [26], wherein the second hydrocyclone separator is disposed in a plurality of stages.

[28] In the balancing step, a flow rate control valve for second separation liquid interposed in a separation liquid discharge pipe for discharging the second separation liquid to the outside, and a cleaning liquid supply for supplying the cleaning liquid from the outside to the cleaning processing unit 28. Any one of the preceding items 23 to 27, wherein the discharge amount of the second separation liquid and the supply amount of the cleaning liquid are balanced by operating at least one of the flow control valves for the cleaning liquid interposed in the pipe. Method for managing the surface machining fluid of workpieces.

[29] The workpiece surface processing liquid management method according to any one of items 23 to 28, further including an abrasive grain replenishing step of replenishing the first mixed liquid with abrasive grains.

  [30] The work surface management liquid management method according to any one of items 23 to 29, wherein the work is a base pipe of a pipe for a photosensitive drum substrate.

[31] The surface of the workpiece is used to perform a liquid honing process in the honing processing unit, and the honing liquid containing abrasive grains and the surface of the workpiece subjected to the liquid honing process in the honing processing unit are cleaned in the cleaning processing unit. And a cleaning liquid supplied to the cleaning processing unit from the outside, and a workpiece surface processing liquid management apparatus comprising the used honing liquid used in the honing processing unit and the cleaning process A first liquid cyclone separator that separates and removes the crushed particles of the abrasive grains from the first mixed liquid mixed with the used cleaning liquid used in the section, and the first liquid cyclone separator crushes the first mixed liquid. The honing liquid feed pipe that sends the second mixed liquid from which the particles have been removed to the honing treatment section as the honing liquid, and the first liquid cyclone separator A second liquid cyclone separator that recovers and removes healthy abrasive grains from the first separated liquid containing crushed grains separated from the first mixed liquid, and healthy abrasive grains recovered by the second liquid cyclone separator a recovery fluid return pipe of the recovering solution containing back to the first mixture, discharging the second separated liquid to healthy abrasive from said first separated liquid by the second liquid cyclone separator is formed by removing the outside A separation liquid discharge pipe, a cleaning liquid supply pipe for supplying a cleaning liquid to the cleaning processing unit from the outside, a discharge amount of the second separation liquid discharged to the outside through the separation liquid discharge pipe, and the cleaning liquid supply pipe from the outside And a balancing means for balancing the supply amount of the cleaning liquid supplied to the cleaning processing section through the surface processing liquid management apparatus for a workpiece.

  [32] The workpiece surface processing liquid management device according to [31], wherein the first hydrocyclone separator is arranged in a plurality of stages.

  [33] The workpiece surface processing liquid management device according to [31] or [32], wherein the second hydrocyclone separator is disposed in a plurality of stages.

[34] The item 31 above, wherein the balancing means includes a second separation liquid flow rate adjustment valve interposed in the separation liquid discharge pipe and a cleaning liquid flow rate adjustment valve interposed in the cleaning liquid supply pipe. 34. The workpiece surface processing liquid management device according to any one of .about.33.

[35] The workpiece surface processing liquid management device according to any one of the above items 31 to 34, further comprising an abrasive replenishing unit that replenishes the first mixed liquid with abrasive grains.

  [36] The workpiece surface processing liquid management device according to any one of [31] to [35], wherein the workpiece is a base pipe of a pipe for a photosensitive drum substrate.

  The present invention has the following effects.

  In the invention of [1], since the liquid mixture of the used honing liquid and the used cleaning liquid from which the crushed particles have been removed is reused as the honing liquid, the surface of the workpiece can be uniformly roughened.

  Furthermore, in the healthy abrasive grain recovery process, the healthy abrasive grains are recovered and removed from the separated liquid containing the crushed grains separated from the mixed liquid, and the recovered healthy abrasive grains are contained in the recovered liquid return process. Since the recovered liquid to be returned is returned to the mixed liquid, it is possible to prevent the healthy abrasive grains from being discharged to the outside, so that the amount of the healthy abrasive grains can be maintained substantially constant. Further, in the balancing step, the abrasive concentration of the re-used honing liquid is reduced by balancing the discharge amount of the separation liquid discharged to the outside and the supply amount of the cleaning liquid supplied from the outside to the cleaning processing unit. Can be kept constant. Therefore, stable surface roughness can be obtained when the honing liquid is used repeatedly.

  In the invention of [2], the crushed particles can be reliably separated and removed from the mixed solution.

  In the invention of [3], the crushed particles can be further reliably separated and removed from the mixed solution.

  In the invention of [4], healthy abrasive grains can be reliably recovered and removed from the separated liquid.

  In the invention of [5], sound abrasive grains can be more reliably recovered and removed from the separated liquid.

  In the invention of [6], it is possible to reliably balance the discharge amount of the separation liquid and the supply amount of the cleaning liquid.

  In the invention of [7], the work subjected to the liquid honing process in the honing process part can be reliably conveyed from the honing process part to the cleaning process part.

  In the invention of [8], it is possible to prevent a decrease in the surface cleanliness of the workpiece due to foreign matters such as dust and dust in the outside air adhering to the workpiece surface.

  In the invention of [9], the abrasive grain concentration of the re-used honing liquid can be reliably maintained constant. Therefore, the number of times that the honing liquid can be used repeatedly can be increased.

  In the invention of [10], the surface of the pipe of the pipe for the photosensitive drum base can be uniformly roughened.

  In the invention of [11], the surface of the pipe pipe can be uniformly roughened.

  In the invention of [12], the surface of the pipe of the pipe for the photosensitive drum base can be uniformly roughened.

  In the inventions of [13] to [20], a workpiece surface processing apparatus that can be suitably used in the workpiece surface processing method according to the present invention can be provided.

  According to the invention [21], it is possible to provide an apparatus for manufacturing a pipe that can uniformly roughen the surface of the raw pipe.

  According to the invention [22], it is possible to provide a photosensitive drum substrate pipe manufacturing apparatus that can uniformly roughen the surface of the photosensitive drum substrate pipe.

  In the invention of [23], the mixed solution of the used honing liquid and the used cleaning liquid from which the crushed particles have been removed is sent to the honing processing section as the honing liquid. By reusing the sent honing liquid, the surface of the workpiece can be uniformly roughened.

  Furthermore, in the healthy abrasive grain recovery process, the healthy abrasive grains are recovered and removed from the separated liquid containing the crushed grains separated from the mixed liquid, and the recovered healthy abrasive grains are contained in the recovered liquid return process. Since the recovered liquid to be returned is returned to the mixed liquid, it is possible to prevent the healthy abrasive grains from being discharged to the outside, so that the amount of the healthy abrasive grains can be maintained substantially constant. Further, in the balancing step, the honing liquid to be reused has a substantially equal abrasive concentration by balancing the discharge amount of the separation liquid discharged to the outside and the supply amount of the cleaning liquid supplied to the cleaning processing unit from the outside. It can be managed to be constant.

  In the invention of [24], the crushed particles can be reliably separated and removed from the mixed solution.

  In the invention of [25], the crushed particles can be further reliably separated and removed from the mixed solution.

  In the invention of [26], healthy abrasive grains can be reliably recovered and removed from the separated liquid.

  In the invention of [27], healthy abrasive grains can be more reliably recovered and removed from the separated liquid.

  In the invention [28], the discharge amount of the separation liquid and the supply amount of the cleaning liquid can be reliably balanced.

  In the invention of [29], the abrasive grain concentration of the reused honing liquid can be reliably maintained constant. Therefore, the number of times that the honing liquid can be used repeatedly can be increased.

  In the invention [30], the processing liquid used for processing the surface of the base pipe of the pipe for the photosensitive drum substrate can be managed.

  In the inventions [31] to [36], it is possible to provide a workpiece surface processing fluid management apparatus that can be suitably used in the workpiece surface processing fluid management method according to the present invention.

  Next, several embodiments of the present invention will be described below with reference to the drawings.

  FIG. 1 is a schematic configuration diagram of a workpiece surface processing apparatus according to a first embodiment of the present invention.

  The workpiece (W) to be processed by the workpiece surface processing apparatus (1A) is a precision pipe blank. Specifically, the workpiece (W) is formed on a substrate of a photosensitive drum mounted on an electronic copying machine, a laser printer, a FAX apparatus, or the like. A pipe pipe used, that is, a pipe pipe for a photosensitive drum base.

  The workpiece (element tube) (W) is a cylindrical one set to a predetermined length, and is made of a drawn tube made of aluminum (including an alloy thereof) obtained by drawing. For example, the length of the workpiece (W) is set to 200 to 450 mm, the outer diameter is set to 15 to 50 mm, and the wall thickness is set to 0.5 to 2 mm.

  In the present invention, the workpiece (W) is not limited to one made of aluminum, and may be made of another metal or other material. Further, the shape of the workpiece (W) may be a columnar shape, or may be another shape. In addition, the workpiece (W) is not limited to one made of a drawn tube, and may be made of a cutting tube using cutting, for example.

  In this embodiment, the surface of the workpiece (element tube) (W) (more specifically, the outer peripheral surface) is subjected to liquid honing treatment and cleaning treatment sequentially by this processing apparatus (1A), whereby a photosensitive drum base pipe is manufactured. The In other words, the processing apparatus (1A) is for sequentially performing the liquid honing process and the cleaning process on the surface of the workpiece (element tube) (W) provided in the manufacturing apparatus of the photosensitive drum base pipe.

  The workpiece surface processing apparatus (1A) includes a processing tank (7) as shown in FIG. A honing processing unit (1), a cleaning processing unit (3), and a transfer device (5) are arranged inside the processing tank (7). The honing processing section (1) and the cleaning processing section (3) are arranged adjacent to each other in the processing tank (7). Moreover, the inside of this processing tank (7) is shielded from outside air.

  In the honing process part (1), the liquid honing process is given to the surface of a workpiece | work (W).

  In the cleaning processing unit (3), the surface of the workpiece (W) subjected to the liquid honing processing in the honing processing unit (1) is subjected to cleaning processing. According to the present embodiment, the cleaning process section (3) performs the shower cleaning process on the surface of the workpiece (W) as the cleaning process.

  The transport device (5) is for transporting the workpiece (W) subjected to the liquid honing process in the honing processing section (1) from the honing processing section (1) to the cleaning processing section (3). The transfer device (5) is of a turntable type, for example, and (5a) is a turntable of the transfer device (5).

  Moreover, although not shown in figure, this process tank (7) is provided with the workpiece | work insertion port, the workpiece taking-out port, and the opening-and-closing lid | cover (for example, electric opening-and-closing lid) corresponding to a workpiece | work insertion port and a taking-out port, respectively. In this processing tank (7), the work inlet and the work outlet are closed by corresponding opening / closing lids during the liquid honing process and the cleaning process, respectively, while the work (W) is placed in the honing process tank (7). When the workpiece is loaded and when the workpiece (W) is taken out from the inside of the processing tank (7), the workpiece loading port and the workpiece take-out port are opened.

  The honing liquid (2) used to perform the liquid honing process on the surface of the workpiece (W) in the honing process section (1) contains a predetermined concentration of abrasive grains set in a predetermined average particle diameter range. . A conventionally well-known thing can be used for an abrasive grain, For example, what consists of aluminum oxide, silicon carbide, silicon nitride, boron nitride, calcium oxide etc. can be used.

  The honing liquid (2) is ejected toward the surface of the workpiece (W) by the honing gun (1a) disposed in the honing processing section (1) and sprayed onto the surface of the workpiece (W).

  The average particle size of the abrasive grains contained in the honing liquid (2) is preferably set in the range of 10 to 60 μm. By doing so, the surface of the workpiece (W) can be surely roughened to a roughness suitable for the photosensitive drum substrate pipe. In other words, the abrasive grains having an average particle diameter set within this range can roughen the surface of the workpiece (W) to a roughness suitable for the photosensitive drum substrate pipe (ie, a predetermined roughness). It can be used as an abrasive. A particularly desirable average grain size range of the abrasive grains is 20 to 40 μm.

  Moreover, it is desirable to set the abrasive grain concentration in the honing liquid (2) in the range of 5 to 20 vol%. By doing so, the surface of the workpiece (W) can be surely roughened to a roughness suitable for the photosensitive drum substrate pipe. A particularly desirable abrasive concentration range is 7 to 13 vol%.

  In addition, the average particle diameter range and concentration range of the abrasive grains described above are ranges suitable for a pipe for a photosensitive drum substrate as a product manufactured from the workpiece (W), and these ranges are those of the workpiece (W). The setting is appropriately changed according to the material and the type of product.

  The cleaning liquid (4) used for performing the shower cleaning process on the surface of the workpiece (W) in the cleaning processing unit (3) is made of clean water or the like.

  The cleaning liquid (4) is supplied to the cleaning processing section (3) from the outside, and is sprayed onto the surface of the workpiece (W) from the cleaning liquid spray nozzle (3a) disposed in the cleaning processing section (3). Is.

  In this processing tank (7), the used honing liquid (2) used in the honing processing section (1) and the used cleaning liquid (4) used in the cleaning processing section (3) are discarded to the outside. However, it is stored in a mixed liquid sub tank (9) described later in a mixed state.

  The used honing liquid (2) contains a small amount of crushed grains finer than the healthy abrasive grains in addition to the abrasive grains set in the predetermined average particle diameter range described above, that is, healthy abrasive grains. ing. The crushed grains are produced by finely pulverizing the abrasive grains when the abrasive grains in the honing liquid (2) collide with the workpiece surface during the liquid honing process.

  Furthermore, the workpiece surface processing apparatus (1A) includes a mixed liquid sub tank (9), a mixed liquid main tank (15), a first liquid cyclone separator (13), and a second liquid cyclone separator (20). A honing liquid feed pipe (16), a recovered liquid return pipe (21), a separation liquid discharge pipe (22), and a cleaning liquid supply pipe (24).

  The mixed liquid sub tank (9) stores the used honing liquid (2) used in the honing processing section (1) and the used cleaning liquid (4) used in the cleaning processing section (3) in a mixed state. Is for. In this mixed liquid sub tank (9), a mixed liquid introduction pipe for a sub tank for introducing a mixed liquid of the used honing liquid (2) and the used cleaning liquid (4) from the processing tank (7) to the mixed liquid sub tank (9). (8) is connected. The used honing liquid (2) and the used cleaning liquid (4) are uniformly mixed in the mixed liquid sub tank (9). Alternatively, both liquids may be mixed when flowing into the mixed liquid introducing pipe (8) from the processing tank (7) or in the middle of flowing.

  The mixed liquid sub tank (9) has a stirring device (not shown) for stirring the mixed liquid in the sub tank (9). By stirring the mixed solution in the mixed solution sub-tank (9) by this stirring device, the abrasive grains in the mixed solution can be uniformly dispersed, and thus the abrasive particles are crushed by the first liquid cyclone separator (13). Grain separation and removal accuracy can be improved.

  The first liquid cyclone separator (13) is for separating and removing crushed abrasive grains from the mixed liquid in the mixed liquid sub tank (9). The first liquid cyclone separator (13) has a liquid mixture feed pipe (10) for sending the liquid mixture in the liquid mixture sub tank (9) from the liquid mixture sub tank (9) to the first liquid cyclone separator (13). It is connected.

  In addition, (11) and (12) are a mixed liquid feed pump and a mixed liquid flow control valve interposed in the mixed liquid feed pipe (10). The flow control valve (12) includes a flow meter (12a). (43) is a mixed liquid return pipe for returning the mixed liquid flowing through the mixed liquid feed pipe (10) to the mixed liquid sub tank (9) as necessary. (44) is an on-off valve interposed in the mixed liquid return pipe (43). The feeding amount of the mixed liquid to the first hydrocyclone separator (13) can be adjusted by operating the mixed liquid flow control valve (12). The mixed liquid return pipe (43) is normally closed by an on-off valve (44), and the mixed liquid return pipe (43) can, for example, control the feed amount of the mixed liquid to the first hydrocyclone separator (13). It is opened and closed when adjusting with the mixed liquid flow control valve (12).

  The crushed particles separated and removed by the first liquid cyclone separator (13) have a particle size smaller than the average particle size range of the above-mentioned abrasive grains, and particularly have a particle size of 20 μm or less (more preferably 15 μm). The following is desirable. The lower limit value of the crushed particles to be separated and removed is 0 μm.

  The particle size range of the crushed particles to be separated and removed as described above is a range suitable for a pipe for a photosensitive drum substrate as a product manufactured from the workpiece (W). The setting is appropriately changed according to the type of the item.

  In addition, the particle size range of the crushed particles separated and removed by the first hydrocyclone separator (13) is determined according to the feed amount of the mixed liquid to the first hydrocyclone separator (13) and the first hydrocyclone separator (13 ) Is determined by various conditions such as dimensions. Therefore, by selecting this condition, the particle size range of the crushed particles separated and removed by the first hydrocyclone separator (13) can be reliably set to the above range.

  The mixed liquid main tank (15) is for storing the mixed liquid from which the crushed particles have been removed by the first liquid cyclone separator (13). Into the mixed liquid main tank (15), the mixed liquid from which the crushed particles have been removed by the first liquid cyclone separator (13) is introduced from the first liquid cyclone separator (13) into the mixed liquid main tank (15). A mixed liquid introduction pipe (14) for the main tank is connected.

  The mixed liquid main tank (15) has a stirring device (not shown) for stirring the mixed liquid in the main tank (15). By stirring the mixed liquid in the mixed liquid main tank (15) with this stirring device, the abrasive grains in the mixed liquid can be uniformly dispersed, and the honing process can be performed satisfactorily.

  The honing liquid feed pipe (16) is used as the honing liquid (2) from the first liquid cyclone separator (13) and the honing processing section (1) as the mixed liquid from which the crushed particles have been removed by the first liquid cyclone separator (13). To send to. In this embodiment, the liquid mixture in the liquid mixture main tank (15) is sent as the honing liquid (2) from the liquid mixture main tank (15) to the honing processing section (1) through the honing liquid feed pipe (16). . The end of the honing liquid feed pipe (16) on the outlet side is connected to the honing gun (1a) of the honing processing section (1).

  In addition, (17) and (18) are a honing liquid feed pump and a honing liquid flow control valve interposed in the honing liquid feed pipe (16). (45) is a honing liquid return pipe for returning the honing liquid (2) flowing through the honing liquid feed pipe (16) to the mixed liquid main tank (15) as necessary. (46) is an on-off valve interposed in the honing liquid return pipe (45). The feed amount of the honing liquid (2) to the honing processing section (1) can be adjusted by operating the honing liquid flow rate adjusting valve (18). The honing liquid return pipe (45) is normally closed by an on-off valve (46), and the honing liquid return pipe (45) is used, for example, to feed the honing liquid (2) to the honing processing section (1). It is opened and closed when adjusting with the flow control valve (18) for the honing liquid.

  The second hydrocyclone separator (20) is for recovering and removing healthy abrasive grains from the separated liquid containing crushed grains separated from the mixed liquid by the first liquid cyclone separator (13). The second liquid cyclone separator (20) is connected to a separation liquid feed pipe (19) for sending the separation liquid from the first liquid cyclone separator (13) to the second liquid cyclone separator (20).

  The sound abrasive grains recovered and removed by the second hydrocyclone separator (20) can uniformly roughen the surface of the workpiece (W). Is, for example, in the average particle size range of the abrasive grains described above.

  In addition, the particle size range of the above-mentioned healthy abrasive grains recovered and removed from the separation liquid is a range suitable for a pipe for a photosensitive drum substrate as a product manufactured from the workpiece (W), and this range is: The setting is appropriately changed according to the material of the workpiece (W), the type of product, and the like.

  In addition, the particle size range of the healthy abrasive grains recovered and removed by the second hydrocyclone separator (20) is determined by the amount of the separated liquid fed to the second hydrocyclone separator (20) and the second hydrocyclone separator. It is determined by various conditions such as the dimension of (20). Therefore, by selecting this condition, the particle size range of healthy crushed particles recovered and removed by the second hydrocyclone separator (20) can be reliably set to the above range.

  In addition, (19 ') is a flow control valve interposed in the separated liquid feed pipe (19). The flow control valve (19 ′) includes a flow meter (19′a). The feeding amount of the separation liquid to the second hydrocyclone separator (20) can be adjusted by operating the flow rate control valve (19 ′).

  The recovered liquid return pipe (21) is for returning the recovered liquid containing healthy abrasive grains recovered by the second hydrocyclone separator (20) from the second hydrocyclone separator (20) to the mixed liquid. is there. In this embodiment, the recovered liquid is supplied from the second hydrocyclone separator (20) through the recovered liquid return pipe (21) to the mixed liquid sub tank (9) and mixed with the mixed liquid in the sub tank (9). Is done.

  The separation liquid discharge pipe (22) is for discharging the separation liquid from which healthy abrasive grains have been removed by the second liquid cyclone separator (20) to the outside. In the present embodiment, the separated liquid from which the healthy abrasive grains have been removed by the second liquid cyclone separator (20) is discharged from the second liquid cyclone separator (20) through the separated liquid discharge pipe (22). Is done. The end of the separation liquid discharge pipe (22) on the outlet side is connected to a sedimentation separation tank (not shown), so that the separation liquid is discharged to the outside through the separation liquid discharge pipe (22). And this separation liquid is supplied to a sedimentation tank.

  The cleaning liquid supply pipe (24) is for supplying the cleaning liquid (4) from the outside to the cleaning processing section (3) in the processing tank (7). The end of the cleaning liquid supply pipe (24) on the outlet side is connected to the cleaning liquid spray nozzle (3a) of the cleaning processing section (3).

  Furthermore, the surface processing apparatus (1A) for this workpiece has a discharge amount of the separation liquid discharged to the outside through the separation liquid discharge pipe (22) and a cleaning processing section (from the outside through the cleaning liquid supply pipe (24)). There is provided balancing means (26) for balancing the amount of the cleaning liquid (4) supplied to 3). The balancing means (26) includes a separation liquid flow control valve (23) interposed in the separation liquid discharge pipe (22), and a cleaning liquid flow control valve (25) interposed in the cleaning liquid supply pipe (24). It consists of.

  The separation liquid flow control valve (23) is for adjusting the discharge amount of the separation liquid discharged to the outside through the separation liquid discharge pipe (22) and can be operated manually or electrically. Yes, equipped with a flowmeter for the separated liquid (23a).

  The flow control valve for cleaning liquid (25) is for adjusting the supply amount of the cleaning liquid (4) supplied to the cleaning processing section (3) through the cleaning liquid supply pipe (24), and is manually or electrically operated. Operable and equipped with a flowmeter for cleaning liquid (25a).

  Further, in the mixed liquid sub tank (9), an abrasive replenishing section (40) comprising an abrasive replenishing port as abrasive replenishing means (41) for replenishing abrasive grains to the mixed liquid in the mixed liquid sub tank (9). Is provided.

  In the workpiece surface processing apparatus (1A), the total amount of machining liquid is determined by the amount of cleaning liquid (4) supplied from the outside to the cleaning processing section (3) through the cleaning liquid supply pipe (24) and the separation liquid discharge. It is set only by the discharge amount of the separation liquid discharged to the outside through the pipe (22).

  In addition, the liquid cyclone separator (13) (20) used for this invention can be selected from the conventional standard liquid cyclone separator. As the hydrocyclone separators (13) and (20), for example, those having a ratio of the total length of 1.5 to 3 with respect to the diameter 1 can be used. Part 1) can be used. The first hydrocyclone separator (13) is selected for the purpose of ensuring the throughput, and the second hydrocyclone separator (20) is selected for the purpose of ensuring the classification accuracy.

  Next, a workpiece surface processing method using the workpiece surface processing apparatus (1A) will be described below.

  First, an unprocessed workpiece (W) is placed in the processing tank (7) and placed in the honing processing section (1). In the present embodiment, the workpiece (W) arranged in the honing processing section (1) is mounted on the turntable (5a) of the transfer device (5).

  Next, in the honing treatment section (1), the surface of the workpiece (W) is subjected to a liquid honing treatment by a known method [liquid honing treatment step].

  The liquid honing process will be briefly described as follows.

  That is, the honing liquid (2) sent to the honing treatment section (1) through the honing liquid feed pipe (16) is applied to the surface of the workpiece (W) rotating on its own axis by the honing gun (1a). The honing gun (1a) is moved in the axial direction of the work (W) while spraying the honing liquid (2) onto the surface of the work (W). Thereby, the liquid honing process is performed on the entire surface of the workpiece (W), and the entire surface of the workpiece (W) is roughened. At this time, an initial amount of honing liquid (2) is stored in advance in the main tank (15).

  Next, the workpiece (W) subjected to the liquid honing process in the honing processing section (1) is transported from the honing processing section (1) to the cleaning processing section (3) by the transport device (5) [conveying step].

  Next, a new unprocessed work (W) is placed in the processing tank (7) and arranged in the honing processing section (1) in the same manner as described above.

  Next, in the cleaning processing section (3), the surface of the workpiece (W) subjected to the liquid honing processing is subjected to shower cleaning processing as a cleaning processing by a known method [cleaning processing step]. At the same time, in the honing processing section (1), the surface of the unprocessed workpiece (W) is subjected to liquid honing processing.

  The cleaning process performed in the cleaning processing unit (3) will be briefly described as follows.

  That is, the cleaning liquid (4) is supplied from the outside to the cleaning processing section (3) through the cleaning liquid supply pipe (24) [cleaning liquid supply step]. The nozzle (3a) is moved in the axial direction of the workpiece (W) while ejecting the supplied cleaning fluid (4) from the cleaning fluid injection nozzle (3a) onto the surface of the rotating workpiece (W). Let Thereby, the cleaning process is performed on the entire surface of the workpiece (W), and the abrasive grains attached to the surface of the workpiece (W) are removed.

  Next, the workpiece (W) subjected to the cleaning process is taken out of the processing tank (7) from the cleaning processing unit (3). Thereby, a desired processed product is obtained. This processed product is used as a pipe for a photosensitive drum substrate.

  Next, the workpiece (W) subjected to the honing process in the honing processing section (1) is transported from the honing processing section (1) to the cleaning processing section (3) by the transport device (5). Next, a new unprocessed work (W) is placed in the processing tank (7) and arranged in the honing processing section (1) in the same manner as described above. Then, a predetermined process is performed on the surface of each workpiece (W) as described above.

  As described above, unprocessed workpieces (W) are successively placed in the processing tank (7), and the workpieces (W) placed in the processing tank (7) are honed (1) and the cleaning processing section. By sequentially transporting to (3), surface processing of the workpieces is continuously performed for a plurality of workpieces (W).

  In this workpiece surface processing method, the used honing liquid (2) used in the honing processing section (1) and the used cleaning liquid (4) used in the cleaning processing section (3) are mixed into a sub tank mixed liquid. The mixed liquid sub tank (9) is introduced and supplied through the introduction pipe (8), and both liquids (2) and (4) are mixed and temporarily stored in the mixed liquid sub tank (9) [mixing step].

  Next, since the mixed liquid in the mixed liquid sub tank (9) contains a small amount of crushed grains of abrasive grains, the mixed liquid in the mixed liquid sub tank (9) is used to separate and remove the crushed particles from the mixed liquid. Is fed to the first hydrocyclone separator (13) through the mixed liquid feed pipe (10) by the power of the mixed liquid feed pump (11). Thus, the crushed particles are separated and removed from the mixed liquid by the first liquid cyclone separator (13) [crushed particle removing step].

  In this crushed particle removal step, when the mixed liquid is sent to the first hydrocyclone separator (13) and supplied, the healthy abrasive grains in the mixed liquid have a higher specific gravity than the crushed particles, and thus the first liquid Due to the centrifugal force from the cyclone separator (13), the liquid flows down in the first liquid cyclone separator (13), and from the mixed liquid discharge port of the first liquid cyclone separator (13), 14). On the other hand, the crushed grains in the mixed liquid have a specific gravity smaller than that of healthy abrasive grains, and therefore rise in the first hydrocyclone separator (13) and the separated liquid discharge port of the first hydrocyclone separator (13). Into the separated liquid feed pipe (19). In this way, the crushed particles are separated and removed from the mixed solution.

  The feed amount of the mixed liquid to the first liquid cyclone separator (13) can be adjusted by operating the mixed liquid flow control valve (12).

  The mixed liquid from which the crushed particles have been removed is introduced and supplied to the mixed liquid main tank (15) through the mixed liquid introducing pipe (14) for the main tank, and is temporarily stored in the main tank (15).

  Next, the mixed liquid in the mixed liquid main tank (15) is sent as the honing liquid (2) to the honing processing section (1) through the honing liquid feed pipe (16) by the power of the honing liquid feed pump (17). The sent honing liquid (2) is supplied to the honing gun (1a) and reused for liquid honing the surface of the unprocessed workpiece (W) disposed in the honing processing section (1). [Reuse process].

  On the other hand, since a small amount of healthy abrasive grains remain in the separated liquid containing the crushed grains separated from the mixed liquid by the first liquid cyclone separator (13), the healthy abrasive grains are removed from the separated liquid. In order to recover and remove, the separated liquid is sent to the second hydrocyclone separator (20) through the separated liquid feed pipe (19). Thereby, healthy abrasive grains are recovered and removed from the separated liquid by the second hydrocyclone separator (20) [sound abrasive recovery process].

  In this healthy abrasive grain recovery step, when the separated liquid is sent to the second hydrocyclone separator (20) and supplied, the healthy abrasive grains in the separated liquid have a higher specific gravity than the crushed grains. Due to the centrifugal force from the hydrocyclone separator (20), it flows down in the second hydrocyclone separator (20) and returns from the recovery liquid outlet of the second hydrocyclone separator (20) to the recovered liquid return pipe (21). Flow into. On the other hand, the crushed grains in the separation liquid have a specific gravity smaller than that of healthy abrasive grains, and therefore, the crushed grains rise in the second hydrocyclone separator (20) and the separation liquid discharge port of the second liquid cyclone separator (20). Into the separation liquid discharge pipe (22). In this way, healthy abrasive grains are recovered and removed from the separated liquid.

  In addition, the feed rate of the separation liquid to the second hydrocyclone separator (20) can be adjusted by operating the flow rate control valve (19 ′).

  Next, in order to return the recovered liquid containing healthy abrasive grains to the mixed liquid, the recovered liquid is supplied to the mixed liquid sub tank (9) through the recovered liquid return pipe (21) [recovered liquid returning step]. As a result, the recovered liquid is mixed with the mixed liquid in the mixed liquid sub-tank (9).

  On the other hand, the separation liquid from which the healthy abrasive grains have been removed is discharged to the outside through the separation liquid discharge pipe (22) [separation liquid discharge step]. Note that the discharged separation liquid is supplied to a sedimentation separation tank (not shown) as described above.

  Furthermore, during the surface processing of the above workpiece (W), the amount of the separation liquid discharged to the outside through the separation liquid discharge pipe (22) and the cleaning processing section from the outside through the cleaning liquid supply pipe (24) Balancing the supply amount of the cleaning liquid (4) supplied to (3) [equilibrium step]. In the present embodiment, the discharge amount of the separation liquid and the supply amount of the cleaning liquid (4) are balanced by operating at least one of the separation liquid flow rate adjustment valve (23) and the cleaning liquid flow rate adjustment valve (25). .

  In this embodiment, only the separation liquid flow rate adjustment valve (23) is operated to adjust the discharge amount of the separation liquid, so that both amounts may be balanced, or the cleaning liquid flow rate adjustment valve (25). Both can be balanced by adjusting the supply amount of the cleaning liquid (4) only by operating the flow rate control valve (23) (25) or discharging the separation liquid. By adjusting the amount and the supply amount of the cleaning liquid (4), both amounts may be balanced. In addition, the operation of each flow control valve (23) (25) may be performed manually or may be performed automatically.

  In this balancing step, when the abrasive grain concentration of the honing liquid (2) changes due to an unexpected situation, the abrasive grain concentration can be easily adjusted by changing the balance between the discharge amount of the separation liquid and the supply amount of the cleaning liquid. Can be adjusted. For example, when the abrasive concentration is lowered, the supply amount of the cleaning liquid may be decreased or the discharge amount of the separation liquid may be increased. On the other hand, when the abrasive concentration increases, the supply amount of the cleaning liquid may be increased or the discharge amount of the separation liquid may be reduced.

  Therefore, the surface processing method and the surface processing apparatus (1A) of the workpiece have the following advantages.

  That is, in the workpiece surface processing method, the used honing liquid (2) and the used cleaning liquid (4) are mixed in the mixing step, and then the crushed particles are separated and removed from the mixed solution in the crushed particle removing step. In the reuse step, the mixed liquid from which the crushed particles have been removed is sent as a honing liquid (2) to the honing treatment section (1) through the honing liquid feed pipe (16) for reuse. At this time, since the crushed particles are removed from the re-used honing liquid (2), the surface of the work (W) can be satisfactorily subjected to the liquid honing process, and the surface of the work (W) can be made uniform. Can be roughened.

  Furthermore, in the healthy abrasive grain recovery process, the healthy abrasive grains are recovered and removed from the separated liquid containing the crushed grains separated from the mixed liquid, and the healthy abrasive grains recovered from the mixed liquid in the recovered liquid return process Since the recovered liquid containing selenium is returned to the mixed liquid through the recovered liquid return pipe (21), it is possible to prevent the healthy abrasive grains from being discharged to the outside, thereby reducing the amount of healthy abrasive grains. Can be kept constant. Furthermore, in the balancing step, the amount of the separation liquid discharged to the outside through the separation liquid discharge pipe (22) and the cleaning liquid supplied from the outside to the cleaning processing section (3) through the cleaning liquid supply pipe (24) By balancing the supply amount of (4), the abrasive concentration of the re-used honing liquid (2) can be maintained substantially constant. Therefore, when surface processing of a plurality of works (W) is performed by repeatedly using the honing liquid (2), stable surface roughness can be obtained.

  According to the workpiece surface processing method described above, the crushed particles in the separation liquid are discharged to the outside together with the separation liquid in the separation liquid discharging step, so that the total amount of abrasive grains is strictly reduced, but the separation is performed. Since the content of crushed particles in the liquid is extremely small, even if the crushed particles in the separated liquid are discharged to the outside, the abrasive concentration of the honing liquid (2) is hardly lowered. Therefore, the abrasive concentration of the honing liquid (2) is maintained substantially constant.

  Furthermore, in this embodiment, at the time of surface processing of a workpiece, new abrasive grains (T) may be replenished from the outside to the mixed liquid by an amount corresponding to the discharge amount of crushed grains [abrasive grain replenishing step]. By doing so, the abrasive concentration of the honing liquid (2) can be reliably maintained constant, and the number of times that the honing liquid can be used repeatedly can be further increased. The abrasive grains (T) are appropriately put into the sub tank (9) from the abrasive grain replenishing section (40) of the mixed liquid sub tank (9) as the abrasive replenishing means (41), and the sub tank (9 ) Is replenished to the mixed solution.

  In the crushed particle removal step, the first liquid cyclone separator (13) is used as a device for separating and removing crushed particles from the mixed liquid, and therefore the mixed liquid is sent to the first liquid cyclone separator (13). Thus, the crushed particles can be reliably separated and removed from the mixed solution.

  Furthermore, since the second hydrocyclone separator (20) is used as a device for recovering and removing healthy abrasive grains from the separated liquid in the healthy abrasive grain recovery step, the second hydrocyclone separator (20) is separated. By sending the liquid, healthy abrasive grains can be reliably recovered and removed from the separated liquid.

  Moreover, since the workpiece | work (W) by which the honing process part (1) carried out the liquid honing process in a conveyance process is conveyed by the conveyance apparatus (5) from a honing process part (1) to a washing | cleaning process part (3), (W) can be reliably transferred.

  In addition, since the honing processing unit (1) and the cleaning processing unit (3) are included inside and the liquid honing processing step and the cleaning processing step are performed in the processing tank (7) cut off from the outside air, In addition to preventing deterioration of the surface cleanliness of the workpiece (W) due to foreign matter such as dust or dust adhering to the surface of the workpiece (W), the used honing liquid (2) to be recovered and used Foreign matter can be prevented from being mixed into the finished cleaning liquid (4). Furthermore, you may set the pressure in a processing tank (7) to a positive pressure with respect to external air, and the same effect can be acquired in this case.

  In addition, the workpiece surface processing apparatus (1A) uses a separation liquid flow control valve (23) and a cleaning liquid flow control as balancing means (26) for balancing the discharge amount of the separation liquid and the supply amount of the cleaning liquid (4). Since it has a valve (25), it is possible to ensure the discharge amount of the separation liquid and the supply amount of the cleaning liquid (4) by operating at least one of the flow control valves (23) and (25). And can be balanced easily.

  Next, the workpiece surface processing fluid management method and management device (1C) according to the first embodiment of the present invention when the surface of the workpiece (W) is machined by the workpiece surface machining device (1A) This will be described with reference to the process diagram shown in FIG.

  In the workpiece surface machining fluid management method and management apparatus (1C) of the first embodiment, the workpiece surface machining fluid is a honing fluid (2) used in the honing treatment section (1) in the machining tank (7). And a cleaning liquid (4) used in the cleaning processing section (3).

  As shown in FIGS. 1 and 2, the honing liquid (2) is supplied to the honing processing section (1) through the honing liquid feed pipe (16) as described above.

  As described above, the cleaning liquid (4) is supplied from the outside to the cleaning processing section (3) through the cleaning liquid supply pipe (24) [cleaning liquid supply step (106)].

  The used honing liquid (2) and the used cleaning liquid (4) used in the honing processing section (1) and the cleaning processing section (3), respectively, pass through the sub tank mixed liquid introduction pipe (8) to form the mixed liquid sub tank. Introduced and supplied to (9), mixed and temporarily stored in the sub-tank (9) [mixing step (100)].

  The liquid mixture in the liquid mixture sub-tank (9) is sent to the first liquid cyclone separator (13) through the liquid mixture feed pipe (10), whereby the crushed particles are separated and removed from the liquid mixture [crushed particles Removal step (101)].

  The mixed liquid from which the crushed particles have been removed in the crushed particle removal step (101) is introduced and supplied to the mixed liquid main tank (15) through the mixed liquid introduction pipe (14) for the main tank, and is supplied to the main tank (15). Stored temporarily. Then, the mixed liquid in the mixed liquid main tank (15) is sent as the honing liquid (2) to the honing processing section (1) through the honing liquid feed pipe (16) by the power of the honing liquid feed pump (17). [Honing liquid feeding step (102)]. The sent honing liquid (2) is supplied to the honing gun (1a) and reused for liquid honing the surface of the unprocessed workpiece (W) disposed in the honing processing section (1). .

  The separation liquid containing the crushed particles separated from the mixed liquid in the crushed particle removal step (101) is sent to the second hydrocyclone separator (20) through the separation liquid feed pipe (19), and thereby separated. Healthy abrasive grains are collected and removed from the liquid [healthy abrasive grain collecting step (103)].

  The recovered liquid containing the healthy abrasive grains recovered in the healthy abrasive grain recovery step (103) is supplied to the mixed liquid sub tank (9) through the recovered liquid return pipe (21) to return it to the mixed liquid. And mixed with the mixed liquid in the sub tank (9) [recovered liquid returning step (104)].

  The separation liquid from which the healthy abrasive grains have been removed in the healthy abrasive grain collection step (103) is discharged to the outside through the separation liquid discharge pipe (22) [separation liquid discharge step (105)].

  The discharge amount of the separation liquid discharged to the outside in the separation liquid discharge step (105) and the supply amount of the cleaning liquid (4) supplied from the outside to the cleaning processing unit (3) in the cleaning liquid supply step (106) are balanced. The balance is achieved by operating at least one of the flow control valve for separated liquid (23) and the flow control valve for cleaning liquid (25) as means (26) [equilibrium step (107)].

  Further, if necessary, new abrasive grains (T) are introduced from the outside into the mixed liquid subtank (9) from the abrasive grain replenishing section (40) by an amount corresponding to the discharge amount of the crushed grains. Replenish the mixed solution [abrasive grain replenishing step (108)].

  Therefore, the above-mentioned surface processing fluid management method and management device (1C) for the workpiece have the following advantages.

  That is, in the crushed particle removing step (101), crushed particles are separated and removed from the mixed liquid of the used honing liquid (2) and the used cleaning liquid (4). Then, in the honing liquid feeding step (102), the mixed liquid from which the crushed particles have been removed is sent to the honing processing section (1) through the honing liquid feeding pipe (16) as the honing liquid (2). By reusing the sent honing liquid (2), the surface of the workpiece (W) can be uniformly roughened.

  Further, in the healthy abrasive grain recovery step (103), the healthy abrasive grains are recovered and removed from the separated liquid containing the crushed grains separated from the mixed liquid, and the recovered healthy grains are recovered in the recovered liquid return step (104). Since the recovered liquid containing the correct abrasive grains is returned to the mixed liquid through the recovered liquid return pipe (21), it is possible to prevent the healthy abrasive grains from being discharged to the outside. The amount can be kept substantially constant. Further, in the balancing step (107), the separation liquid discharged to the outside is re-used by balancing the supply amount of the cleaning liquid (4) supplied from the outside to the cleaning processing section (3). The honing liquid (2) can be managed so that the abrasive concentration is substantially constant.

  In the crushed particle removal step (101), the crushed particles can be reliably separated and removed from the mixed solution by sending the mixed solution to the first liquid cyclone separator (13).

  Further, in the healthy abrasive grain recovery step (103), by sending the separation liquid to the second hydrocyclone separator (20), the healthy abrasive grains can be reliably recovered and removed from the separation liquid.

  Further, in the abrasive grain replenishing step (108), the abrasive grain concentration of the honing liquid (2) can be reliably maintained constant by replenishing the abrasive liquid (T) to the mixed liquid from the outside. The number of times that (2) can be used repeatedly can be further increased.

  In addition, the workpiece surface processing fluid management device (1C) uses a separation liquid flow control valve (23) and a cleaning liquid as a balancing means (26) for balancing the discharge amount of the separation liquid and the supply amount of the cleaning liquid (4). Since it has a flow rate control valve (25), by operating at least one of both flow rate control valves (23) and (25), the discharge amount of the separation liquid and the supply amount of the cleaning liquid (4) Can be reliably and easily balanced.

  FIG. 3 is a schematic configuration diagram of a workpiece surface processing apparatus according to a second embodiment of the present invention.

  In the workpiece surface processing apparatus (1B), the first hydrocyclone separator (13) is arranged in two stages on the upstream side and the downstream side in the mixed liquid flow direction, and the second hydrocyclone separator ( 20) is arranged in two stages on the upstream side and the downstream side in the flow direction of the separated liquid.

  In the workpiece surface processing apparatus (1B), the mixed liquid in the mixed liquid sub-tank (9) is passed through the first mixed liquid feed pipe (10A) by the power of the first mixed liquid feed pump (11A) to the first stage. To the first hydrocyclone separator (13A). Thereby, crushed grains are separated and removed from the mixed solution.

  The mixed liquid from which the crushed particles have been removed is introduced and supplied to the first mixed liquid main tank (15A) through the first main tank mixed liquid introducing pipe (14A) and temporarily stored in the main tank (15A). Is done. The first mixed liquid main tank (15A) has a stirring device (not shown) for stirring the mixed liquid in the main tank (15A).

  Then, the liquid mixture in the first liquid mixture main tank (15A) is passed through the second liquid mixture feed pipe (10B) by the power of the second liquid mixture feed pump (11B), and the second stage first liquid cyclone. It is sent to the separator (13B). Thereby, the crushed particles are separated and removed from the mixed solution again, and the content (residual amount) of the crushed particles in the mixed solution is further reduced.

  The mixed liquid in which the content of the crushed particles has been remarkably reduced is introduced and supplied to the second mixed liquid main tank (15B) through the second main tank mixed liquid introducing pipe (14B), and is supplied to the main tank (15B). Stored temporarily. The second mixed liquid main tank (15B) has a stirring device (not shown) for stirring the mixed liquid in the main tank (15B).

  Then, the mixed liquid in the second mixed liquid main tank (15B) passes through the honing liquid feed pipe (16) as the honing liquid (2) by the power of the honing liquid feed pump (17). ) And reused for subjecting the surface of the workpiece (W) to a liquid honing process.

  The separated liquid containing crushed particles separated from the mixed liquid by the first stage first liquid cyclone separator (13B) passes through the second separated liquid feed pipe (19B) to the mixed liquid sub tank (9). Supplied and mixed with the mixed liquid in the sub tank (9).

  On the other hand, the separated liquid containing the crushed particles separated from the mixed liquid by the first stage first liquid cyclone separator (13A) passes through the first separated liquid feed pipe (19A) and is separated from the first stage second liquid cyclone. Sent to the container (20A). Thereby, healthy abrasive grains are recovered and removed from the separated liquid.

  The recovered liquid containing healthy abrasive grains recovered by the second hydrocyclone separator (20A) at the first stage is supplied to the mixed liquid sub tank (9) through the first recovered liquid return pipe (21A). It is mixed with the liquid mixture in the sub tank (9).

  The separation liquid from which the healthy abrasive grains have been removed by the second liquid cyclone separator (20A) at the first stage is introduced and supplied to the separation liquid tank (31) through the separation liquid introduction pipe (30). Stored temporarily at (31). The separation liquid tank (31) has a stirring device (not shown) for stirring the separation liquid in the tank (31).

  Then, the separation liquid in the separation liquid tank (31) passes through the third separation liquid feed pipe (32) by the power of the separation liquid feed pump (33), and the second stage second liquid cyclone separator (20B). Sent to. Thereby, the healthy abrasive grains are recovered and removed again from the separation liquid, so that the content (remaining amount) of the healthy abrasive grains in the separation liquid is further reduced.

  Thus, the separation liquid in which the content of the healthy abrasive grains is remarkably reduced is discharged to the outside through the separation liquid discharge pipe (22).

  The recovered liquid containing healthy abrasive grains recovered by the second second cyclone separator (20B) is supplied to the mixed liquid sub tank (9) through the second recovered liquid return pipe (21B). It is mixed with the liquid mixture in the sub tank (9).

  In addition, (12A) is the 1st flow volume adjustment valve for liquid mixture interposed by the 1st liquid mixture feed pipe (10A). The first flow rate control valve (12A) includes a flow meter (12Aa). (43A) is a first mixed liquid return pipe that returns the mixed liquid flowing through the first mixed liquid feed pipe (10A) to the mixed liquid sub tank (9) as necessary. (44A) is an on-off valve interposed in the first mixed liquid return pipe (43A). The feed amount of the mixed liquid to the first hydrocyclone separator (13A) at the first stage can be adjusted by operating the first flow rate control valve (12A).

  Further, (12B) is a second flow rate adjusting valve for mixed liquid interposed in the second mixed liquid feed pipe (10B). The second flow rate control valve (12B) includes a flow meter (12Ba). (43B) is a second mixed liquid return pipe that returns the mixed liquid flowing through the second mixed liquid feed pipe (10B) to the first mixed liquid main tank (15A) as necessary. (44B) is an on-off valve interposed in the second mixed liquid return pipe (43B). The feeding amount of the mixed liquid to the second stage first cyclone separator (13B) can be adjusted by operating the second flow rate control valve (12B).

  Further, (19A ′) is a flow rate adjusting valve interposed in the first separated liquid feed pipe (19A). The flow rate control valve (19A ′) includes a flow meter (19A′a). The feed rate of the separation liquid to the second hydrocyclone separator (20A) at the first stage can be adjusted by operating this flow rate control valve (19A ').

  Further, (19B ′) is a flow rate adjusting valve interposed in the second separated liquid feed pipe (19B). The flow rate control valve (19B ′) includes a flow meter (19B′a).

  Further, (34) is a flow rate adjusting valve interposed in the third separated liquid feed pipe (32). The flow control valve (34) includes a flow meter (34a). The amount of the separation liquid fed to the second stage second cyclone separator (20B) can be adjusted by operating this flow rate control valve (34). (47) is a separation liquid return pipe for returning the separation liquid flowing through the third separation liquid feed pipe (32) to the separation liquid tank (31) as necessary. (48) is an on-off valve interposed in the separated liquid return pipe (47).

  Other configurations of the workpiece surface processing method and the processing apparatus (1B) of the second embodiment are the same as those of the first embodiment.

  Thus, the workpiece surface processing method and the processing apparatus (1B) further have the following advantages.

  That is, since the first hydrocyclone separator (13) is arranged in two stages, the crushed particles can be more reliably separated and removed from the mixed solution, and the surface of the workpiece (W) can be more uniformly roughened. Can be surfaced.

  Furthermore, since the second hydrocyclone separator (20) is arranged in two stages, it is possible to more reliably collect and remove healthy abrasive grains from the separated liquid.

  Thus, in the case where the surface of the workpiece (W) is machined by the workpiece surface machining apparatus (1B) of the second embodiment, the workpiece surface machining fluid management method and management apparatus according to the second embodiment of the present invention. In (1D), the configuration will be easily understood from the description of the workpiece surface processing method and the processing apparatus (1B) of the second embodiment described above.

  As mentioned above, although several embodiment of this invention was described, this invention is not limited to what was shown to the said embodiment, It is various setting change processing.

  For example, the first hydrocyclone separator (13) may be one stage, may be arranged in three stages, or may be arranged in four or more stages. Further, the second hydrocyclone separator (20) may be arranged in one stage, arranged in three stages, or arranged in four or more stages.

  In the present invention, the liquid honing process and the cleaning process may be performed at the same place, that is, the honing process unit and the cleaning process unit may be shared. In this case, as a matter of course, a transport device that transports the workpiece from the honing processing unit to the cleaning processing unit is not required.

  The workpiece processed by the workpiece surface processing method according to the present invention includes, for example, a tube for a lens barrel mounted on an optical device (eg, a camera, a telescope), etc., in addition to a base tube of a photosensitive drum base pipe. The pipe of a precision pipe may be used, or a pipe used for other purposes may be used.

  Next, specific examples of the present invention will be described below.

<Example 1>
As the workpiece surface processing apparatus, the one (1A) of the first embodiment shown in FIG. 1 was prepared. In addition, as a work (W), a base pipe (made of aluminum) of a pipe for a photosensitive drum base was prepared. The length of the workpiece (element tube) (W) is 200 to 450 mm, the outer diameter is 15 to 50 mm, and the wall thickness is 0.5 to 2.0 mm.

Further, the abrasive grains used is made of aluminum oxide (Al ₂ O _3), the average particle diameter is set in a range of 20 to 40 [mu] m. Moreover, the abrasive grain density | concentration of the used honing liquid (2) is set to the range of 7-13 vol%.

  Further, in the first hydrocyclone separator (13), the length (height) is 400 mm, the diameter of the upper part (that is, the large diameter part) is φ150 mm, and the liquid mixture supply port connected to the liquid mixture feed pipe (10) The diameter of the liquid mixture discharge port connected to the main tank mixed liquid introduction pipe (14) is 15 mm, and the diameter of the separation liquid discharge port connected to the separation liquid feed pipe (19) is 10 mm.

  In the second hydrocyclone separator (20), the length (height) is 200 mm, the diameter of the upper part (that is, the large diameter part) is φ100 mm, and the separation liquid supply port connected to the separation liquid feed pipe (19). The diameter of the recovery liquid discharge port connected to the recovery liquid return pipe (21) is 13 mm, and the diameter of the separation liquid discharge port connected to the separation liquid discharge pipe (22) is 10 mm.

  Further, as shown in FIG. 1, the flow rate of the honing liquid (2) flowing through the honing liquid feed pipe (16) was set to 35 L / min by operating the honing liquid flow control valve (18). The flow rate of the cleaning liquid flowing through the cleaning liquid supply pipe (24), that is, the supply amount of the cleaning liquid (4) supplied from the outside to the cleaning processing unit (3) is 10 L / L by operating the flow control valve for cleaning liquid (25). Set to min. Accordingly, the flow rate of the mixed liquid flowing through the sub tank mixed liquid introducing pipe (8) is set to 45 L / min.

  The flow rate of the mixed liquid flowing through the mixed liquid feed pipe (10) was set to 50 L / min by operating the mixed liquid flow control valve (12). The flow rate of the mixed liquid flowing through the mixed liquid introduction pipe (14) for the main tank was set to 35 L / min, and the flow rate of the separated liquid flowing through the separated liquid feed pipe (19) was set to 15 L / min.

  The flow rate of the recovered liquid flowing through the recovered liquid return pipe (21) was set to 5 L / min. The flow rate of the separation liquid flowing through the separation liquid discharge pipe (22), that is, the discharge amount of the separation liquid discharged to the outside is set to 10 L / min by operating the flow control valve for separation liquid (23), and the external From the above, it was balanced with the supply amount of the cleaning liquid (4) supplied to the cleaning processing unit (3) (that is, the same amount).

  The particle size of the crushed particles separated and removed by the first liquid cyclone separator (13) was set to 20 μm or less.

  Moreover, the particle diameter of the healthy abrasive grains recovered and removed by the second hydrocyclone separator (20) was set to the average particle diameter range of the abrasive grains.

  Moreover, the liquid in each tank (9) (15) was stirred with a propeller stirring device.

  Under the above conditions, when surface processing of 1000 workpieces (W) was performed repeatedly using the honing liquid (2), the surfaces of all the workpieces (W) could be uniformly roughened, A stable surface roughness could be obtained.

  In this embodiment, in order to obtain a uniform surface roughness in the workpiece (W), when the supply amount of the honing liquid (2) to the honing treatment section (1) is 35 L / min, the separated liquid is fed. It is desirable to set the flow rate of the separation liquid flowing through the pipe (19) to be 5 L / min or more (particularly preferably 10 L / min or more). The reason is that when the flow rate of the separation liquid is less than 5 L / min, the ability to separate and remove the crushed particles by the first liquid cyclone separator (13) is insufficient, and the crushed particles may remain in the mixed liquid. .

<Example 2>
As a workpiece surface processing apparatus, the one (1B) of the second embodiment shown in FIG. 3 was prepared. Moreover, the same thing as the said Example 1 was prepared as a workpiece | work (W).

  Moreover, the range of the used abrasive grain and its average particle diameter is the same as the said Example 1. FIG. Similarly, the abrasive grain concentration of the honing liquid (2) is the same as in Example 1 above.

  Of the first-stage first hydrocyclone separators (13A) and (13B), the first-stage first hydrocyclone separator (13A) has a length (height) of 400 mm and an upper portion (that is, a large diameter portion). ) Has a diameter of 150 mm, the diameter of the mixed liquid supply port connected to the mixed liquid feed pipe (10A) is 20 mm, and the diameter of the mixed liquid discharge port connected to the main tank mixed liquid introduction pipe (14A) is 15 mm. The diameter of the separation liquid outlet connected to the liquid feed pipe (19A) is φ10 mm. The configuration of the first-stage first hydrocyclone separator (13B) is the same as that of the first-stage first hydrocyclone separator (13A).

  Of the second-stage second hydrocyclone separators (20A) and (20B), the first-stage second hydrocyclone separator (20A) has a length (height) of 200 mm and an upper portion (that is, a large diameter portion). ) Has a diameter of 100 mm, a separation liquid supply port connected to the first separation liquid feed pipe (19A) has a diameter of 15 mm, a recovery liquid discharge port connected to the first recovery liquid return pipe (21A) has a diameter of 13 mm, The diameter of the separation liquid discharge port connected to the separation liquid introduction pipe (30) is φ10 mm. The configuration of the second hydrocyclone separator (20B) at the second stage is the same as that of the second hydrocyclone separator (20A) at the first stage.

  As shown in FIG. 3, the flow rate of the honing liquid (2) flowing through the honing liquid feed pipe (16) was set to 35 L / min by operating the flow control valve for honing liquid (18). The flow rate of the cleaning liquid flowing through the cleaning liquid supply pipe (24), that is, the supply amount of the cleaning liquid (4) supplied from the outside to the cleaning processing unit (3) is 10 L / L by operating the flow control valve for cleaning liquid (25). Set to min. Accordingly, the flow rate of the mixed liquid flowing through the sub tank mixed liquid introducing pipe (8) is set to 45 L / min.

  The flow rate of the mixed liquid flowing through the first mixed liquid feed pipe (10A) was set to 80 L / min by operating the first mixed liquid flow control valve (12A). The flow rate of the mixed liquid flowing through the first main tank mixed liquid introduction pipe (14A) was set to 60 L / min, and the flow rate of the separation liquid flowing through the first separated liquid feed pipe (19A) was set to 20 L / min.

  The flow rate of the mixed liquid flowing through the second mixed liquid feed pipe (10B) was set to 60 L / min by operating the second mixed liquid flow control valve (12B). The flow rate of the mixed liquid flowing through the second main tank mixed liquid introduction pipe (14B) was set to 35 L / min, and the flow rate of the separated liquid flowing through the second separated liquid feed pipe (19B) was set to 25 L / min. .

  The flow rate of the recovered liquid flowing through the first recovered liquid return pipe (21A) was set to 5 L / min. The flow rate of the separation liquid flowing through the separation liquid introduction pipe (30) was set to 15 L / min.

  The flow rate of the separation liquid flowing through the third separation liquid feed pipe (32) was set to 15 L / min by operating the third separation liquid flow control valve (34). The flow rate of the recovered liquid flowing through the second recovered liquid return pipe (21B) was set to 5 L / min. The flow rate of the separation liquid flowing through the separation liquid discharge pipe (22), that is, the discharge amount of the separation liquid discharged to the outside is set to 10 L / min by operating the flow control valve for separation liquid (23), and the external From the above, it was balanced with the supply amount of the cleaning liquid (4) supplied to the cleaning processing unit (3) (that is, the same amount).

  Moreover, the particle size of the crushed particles separated and removed by each first hydrocyclone separator (13A) (13B) was set to 15 μm or less.

  Moreover, the particle size of the healthy abrasive grains recovered and removed by each of the second hydrocyclone separators (20A) and (20B) was set to the average particle size range of the abrasive grains.

  Moreover, the liquid in each tank (9) (15A) (15B) (31) was stirred with a propeller stirring device.

  Under the above conditions, when the surface processing of 5000 workpieces (W) was performed repeatedly using the honing liquid (2), the surfaces of all the workpieces (W) could be uniformly roughened. A stable surface roughness could be obtained.

  A workpiece surface processing method and a workpiece surface processing apparatus according to the present invention include a liquid honing process and a cleaning process on the surfaces of various workpieces such as a base pipe of a pipe for a photosensitive drum substrate and a base pipe of a lens barrel pipe of an optical instrument. Can be used in a workpiece surface processing method and a workpiece surface processing apparatus.

  The workpiece surface processing fluid management method and workpiece surface processing fluid management apparatus according to the present invention provide liquid honing on the surface of various workpieces such as a pipe of a pipe for a photosensitive drum substrate and a pipe of a barrel for an optical instrument. The present invention can be used for a management method and a management apparatus for a surface processing liquid of a workpiece used when processing and cleaning are sequentially performed.

It is a schematic block diagram of the surface processing apparatus of the workpiece | work which concerns on 1st Embodiment of this invention. It is process drawing of the surface processing liquid management method of a workpiece | work in the case of surface-working a workpiece | work with the surface processing apparatus of the workpiece | work. It is a schematic block diagram of the surface processing apparatus of the workpiece | work which concerns on 2nd Embodiment of this invention.

Explanation of symbols

1A, 1B ... Workpiece surface processing equipment
1C, 1D ... Workpiece surface processing fluid management device 1 ... Honing processing unit 2 ... Honing solution 3 ... Cleaning processing unit 4 ... Cleaning solution 5 ... Conveying device 7 ... Processing tank 9 ... Mixed solution sub tank
10 ... Mixed liquid feed pipe
13 ... 1st liquid cyclone separator
15 ... Mixed liquid main tank
16 ... Honing liquid feed pipe
19 ... Separated liquid feed pipe
20 ... Second liquid cyclone separator
21… Recovered liquid return pipe
22 ... Separate discharge pipe
23… Flow control valve for separation liquid
24 ... Cleaning liquid supply pipe
25… Flow control valve for cleaning liquid
26 ... Balance means
40 ... Abrasive supply part
41 ... Abrasive supply means W ... Workpiece

Claims (36)

A liquid honing treatment step of applying a liquid honing treatment to the surface of the workpiece using a honing liquid containing abrasive grains in the honing treatment section;
A cleaning process step of performing a cleaning process on the surface of the workpiece subjected to the liquid honing process in the honing process unit, using a cleaning liquid supplied to the cleaning process unit from the outside in the cleaning process unit;
In the surface processing method of the workpiece including
A mixing step of mixing the used honing liquid used in the honing processing section and the used cleaning liquid used in the cleaning processing section;
A crushed particle removing step of separating and removing the crushed particles of the abrasive grains from the first mixed liquid mixed in the mixing step;
A reuse step in which the second mixed liquid in which the crushed particles are removed from the first mixed liquid in the crushed particle removing process is sent to the honing treatment unit and reused as a honing liquid;
From the first separated liquid containing the crushed grains separated from the first mixed liquid in the crushed grain removing process, a healthy abrasive grain collecting process for collecting and removing healthy abrasive grains,
A recovered liquid returning step for returning the recovered liquid containing the healthy abrasive grains recovered in the healthy abrasive recovery step to the first mixed liquid;
A separation liquid discharge step for discharging the second separation liquid, in which the healthy abrasive grains are removed from the first separation liquid in the sound abrasive grain recovery step, to the outside;
A balancing step of balancing a discharge amount of the second separation liquid discharged to the outside in the separation liquid discharge step and a supply amount of the cleaning liquid supplied from the outside to the cleaning processing unit in the cleaning processing step;
A method for surface processing of a workpiece, comprising: The workpiece surface processing method according to claim 1, wherein in the crushed particle removing step, the crushed particles are separated and removed from the first mixed liquid by sending the first mixed liquid to a first hydrocyclone separator.   The workpiece surface processing method according to claim 2, wherein the first hydrocyclone separator is arranged in a plurality of stages. The said healthy abrasive grain collection | recovery process WHEREIN: The healthy abrasive grain is collect | recovered and removed from the said 1st separated liquid by sending the said 1st separated liquid to a 2nd liquid cyclone separator. Surface processing method for workpieces.   The workpiece surface processing method according to claim 4, wherein the second hydrocyclone separator is disposed in a plurality of stages. In the balancing step, the second separation liquid flow control valve interposed in the separation liquid discharge pipe for discharging the second separation liquid to the outside, and the cleaning liquid supply pipe for supplying the cleaning liquid to the cleaning processing unit from the outside. The workpiece according to any one of claims 1 to 5, wherein the discharge amount of the second separation liquid and the supply amount of the cleaning liquid are balanced by operating at least one of the mounted flow control valves for the cleaning liquid. Surface processing method.   The work surface processing method according to any one of claims 1 to 6, further comprising: a transporting step of transporting the work subjected to the liquid honing process in the honing processing unit from the honing processing unit to the cleaning processing unit by a transporting device.   The workpiece according to any one of claims 1 to 7, wherein the liquid honing treatment step and the cleaning treatment step are performed in a processing tank that has the honing treatment portion and the washing treatment portion inside and is blocked from outside air. Surface processing method. The surface processing method of the workpiece | work of any one of Claims 1-8 including the abrasive grain replenishment process of supplying an abrasive grain to a said 1st liquid mixture.   The work surface processing method according to claim 1, wherein the work is a base pipe of a pipe for a photosensitive drum substrate.   A method for manufacturing a pipe, comprising processing a surface of a raw pipe as a workpiece by the surface processing method for a workpiece according to any one of claims 1 to 10.   The pipe manufacturing method according to claim 11, wherein the pipe is a pipe for a photosensitive drum substrate. A honing treatment unit that performs a liquid honing treatment on the surface of the workpiece using a honing liquid containing abrasive grains;
A cleaning processing unit that performs a cleaning process using a cleaning liquid supplied from the outside on the surface of the workpiece subjected to the liquid honing process in the honing processing unit,
In a workpiece surface processing apparatus equipped with
A first liquid cyclone separator for separating and removing crushed grains of the abrasive grains from a first mixed liquid obtained by mixing the used honing liquid used in the honing processing section and the used cleaning liquid used in the cleaning processing section; ,
A honing liquid feed pipe for sending a second liquid mixture obtained by removing crushed particles from the first liquid mixture by the first liquid cyclone separator as a honing liquid to the honing processing section;
A second liquid cyclone separator for recovering and removing healthy abrasive grains from the first separated liquid containing the crushed grains separated from the first mixed liquid by the first liquid cyclone separator;
A recovery liquid return pipe for returning a recovery liquid containing healthy abrasive grains recovered by the second hydrocyclone separator to the first mixed liquid;
A separation liquid discharge pipe for discharging to the outside a second separation liquid obtained by removing healthy abrasive grains from the first separation liquid by the second liquid cyclone separator;
A cleaning liquid supply pipe for supplying a cleaning liquid from the outside to the cleaning processing unit;
Balancing means for balancing the second separation liquid discharge amount discharged to the outside through the separation liquid discharge pipe and the cleaning liquid supply amount supplied from the outside to the cleaning processing unit through the cleaning liquid supply pipe;
An apparatus for processing a surface of a workpiece.   The workpiece surface processing apparatus according to claim 13, wherein the first hydrocyclone separator is arranged in a plurality of stages.   15. The workpiece surface processing apparatus according to claim 13, wherein the second hydrocyclone separator is arranged in a plurality of stages. 16. The balancing means includes a second separation liquid flow rate adjustment valve interposed in the separation liquid discharge pipe, and a cleaning liquid flow rate adjustment valve interposed in the cleaning liquid supply pipe. The surface processing apparatus of the workpiece | work of any one of these.   The surface processing apparatus for a workpiece according to any one of claims 13 to 16, further comprising a conveying device that conveys the workpiece subjected to the liquid honing treatment in the honing treatment portion to the cleaning treatment portion from the honing treatment portion.   The workpiece surface processing apparatus according to any one of claims 13 to 17, further comprising a processing tank having the honing processing unit and the cleaning processing unit therein. The workpiece surface processing apparatus according to claim 13, further comprising an abrasive replenishing unit that replenishes the first mixed liquid with abrasive grains.   The workpiece surface processing apparatus according to claim 13, wherein the workpiece is a base pipe of a pipe for a photosensitive drum substrate. While equipped with the surface processing apparatus of the workpiece | work of any one of Claims 13-19,
An apparatus for manufacturing a pipe, wherein the surface processing apparatus for a workpiece is configured to process a surface of a raw pipe as a workpiece.   The pipe manufacturing apparatus according to claim 21, wherein the pipe is a photosensitive drum base pipe. Used for subjecting the surface of the workpiece to a liquid honing treatment in the honing treatment section, and for performing a washing treatment in the washing treatment section on the honing liquid containing abrasive grains and the surface of the workpiece subjected to the liquid honing treatment in the honing treatment section. A cleaning liquid supplied to the cleaning processing unit from the outside, and a method for managing the surface processing liquid of the workpiece,
A mixing step of mixing the used honing liquid used in the honing processing section and the used cleaning liquid used in the cleaning processing section;
A crushed particle removing step of separating and removing the crushed particles of the abrasive grains from the first mixed liquid mixed in the mixing step;
A honing liquid feeding step for sending the second mixed liquid obtained by removing the crushed grains from the first mixed liquid in the crushed particle removing process to the honing processing section as a honing liquid;
From the first separated liquid containing the crushed grains separated from the first mixed liquid in the crushed grain removing process, a healthy abrasive grain collecting process for collecting and removing healthy abrasive grains,
A recovered liquid returning step for returning the recovered liquid containing the healthy abrasive grains recovered in the healthy abrasive recovery step to the first mixed liquid;
A separation liquid discharge step for discharging the second separation liquid, in which the healthy abrasive grains are removed from the first separation liquid in the sound abrasive grain recovery step, to the outside;
A cleaning liquid supply step of supplying a cleaning liquid from the outside to the cleaning processing unit;
A balancing step of balancing a discharge amount of the second separation liquid discharged to the outside in the separation liquid discharge step and a supply amount of the cleaning liquid supplied from the outside to the cleaning processing unit in the cleaning liquid supply step;
A surface processing fluid management method for a workpiece characterized by comprising: The surface processing liquid management method for a workpiece according to claim 23, wherein in the crushed particle removing step, the crushed particles are separated and removed from the first mixed liquid by sending the first mixed liquid to a first hydrocyclone separator.   25. The workpiece surface processing liquid management method according to claim 24, wherein the first hydrocyclone separator is disposed in a plurality of stages. 26. In the healthy abrasive grain collection step, the healthy abrasive grains are recovered and removed from the first separated liquid by sending the first separated liquid to a second hydrocyclone separator. Of surface machining fluids for various workpieces.   27. The workpiece surface processing liquid management method according to claim 26, wherein the second hydrocyclone separator is arranged in a plurality of stages. In the balancing step, the second separation liquid flow control valve interposed in the separation liquid discharge pipe for discharging the second separation liquid to the outside, and the cleaning liquid supply pipe for supplying the cleaning liquid to the cleaning processing unit from the outside. The workpiece according to any one of claims 23 to 27, wherein the discharge amount of the second separation liquid and the supply amount of the cleaning liquid are balanced by operating at least one of the mounted flow control valves for the cleaning liquid. Surface processing fluid management method. The work surface management liquid management method according to any one of claims 23 to 28, further comprising an abrasive replenishment step of replenishing the first mixed liquid with abrasive grains.   30. The work surface management liquid management method according to claim 23, wherein the work is a base pipe of a pipe for a photosensitive drum substrate. Used for subjecting the surface of the workpiece to a liquid honing treatment in the honing treatment section, and for performing a washing treatment in the washing treatment section on the honing liquid containing abrasive grains and the surface of the workpiece subjected to the liquid honing treatment in the honing treatment section. A cleaning liquid supplied to the cleaning processing unit from the outside, and a workpiece surface processing liquid management device comprising:
A first liquid cyclone separator that separates and removes the crushed particles of the abrasive grains from a first mixed liquid obtained by mixing the used honing liquid used in the honing processing section and the used cleaning liquid used in the cleaning processing section; ,
A honing liquid feed pipe for sending a second liquid mixture obtained by removing crushed particles from the first liquid mixture by the first liquid cyclone separator as a honing liquid to the honing processing section;
A second liquid cyclone separator for recovering and removing healthy abrasive grains from the first separated liquid containing the crushed grains separated from the first mixed liquid by the first liquid cyclone separator;
A recovery liquid return pipe for returning a recovery liquid containing healthy abrasive grains recovered by the second hydrocyclone separator to the first mixed liquid;
A separation liquid discharge pipe for discharging to the outside a second separation liquid obtained by removing healthy abrasive grains from the first separation liquid by the second liquid cyclone separator;
A cleaning liquid supply pipe for supplying a cleaning liquid from the outside to the cleaning processing unit;
Balancing means for balancing the discharge amount of the second separation liquid discharged to the outside through the separation liquid discharge pipe and the supply amount of the cleaning liquid supplied to the cleaning processing unit from the outside through the cleaning liquid supply pipe;
A surface processing fluid management device for a workpiece characterized by comprising:   32. The workpiece surface processing liquid management device according to claim 31, wherein the first hydrocyclone separator is arranged in a plurality of stages.   33. The workpiece surface processing liquid management device according to claim 31 or 32, wherein the second hydrocyclone separator is arranged in a plurality of stages. The balance means includes a second separation liquid flow rate adjustment valve interposed in the separation liquid discharge pipe and a cleaning liquid flow rate adjustment valve interposed in the cleaning liquid supply pipe. The surface processing fluid management device for a workpiece according to any one of the above. The workpiece surface processing liquid management device according to any one of claims 31 to 34, further comprising an abrasive replenishing means for replenishing the first mixed liquid with abrasive grains. The workpiece surface processing liquid management device according to any one of claims 31 to 35, wherein the workpiece is a base pipe of a pipe for a photosensitive drum substrate.

Images