JP4712151B2 - Light amount adjusting device for microscope and laser scanning microscope - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention , Example For example, used in scanning microscopes and optical microscopes Light amount adjusting device for microscope and laser scanning microscope It is about.
[0002]
[Prior art]
Conventionally, a laser light source device that generates laser light has been used as a light source for a scanning microscope. However, since such a laser light source device is structurally large, it is difficult to attach it directly to the microscope body. There is.
[0003]
Therefore, conventionally, the laser resonator of the laser source and the microscope main body are coupled by an optical fiber, and the laser light emitted from the laser resonator is condensed at the incident end of the optical fiber by a condenser lens. The light is advanced to a light deflection mechanism inside the microscope body via a collimator lens disposed at the emission end.
[0004]
By the way, it is preferable that the amount of light of the laser beam supplied to the scanning microscope can be varied as necessary. For this reason, conventionally, variable light is used as a light amount adjusting device before or after the condenser lens at the incident end to the optical fiber. There has been considered a method in which an attenuator is disposed and the amount of laser light incident on the optical fiber is changed by the variable optical attenuator to supply a laser beam having a light amount as necessary to the scanning microscope.
[0005]
In this case, as the variable optical attenuator, a plurality of fixed attenuation filters are attached to a rotating body, the rotating body is rotated, and a desired fixed attenuation filter is positioned on the optical path to change the light amount. These fixed attenuating filters are mounted in a line on a straight line, and the straight line is slid so that the desired fixed attenuating filter is positioned on the optical path, or sequentially transmitted along the circumferential direction of a disk-shaped glass plate. For example, a metal film is vapor-deposited so as to have different rates, and the glass plate is rotated to continuously change the amount of light.
[0006]
On the other hand, when the amount of laser light incident on the optical fiber is intermittently switched between maximum and minimum, a shutter is used as a kind of variable optical attenuator, and has such a shutter function. For example, an acousto-optic element (AOTF) as disclosed in JP-A-11-232122 is used.
[0007]
[Problems to be solved by the invention]
However, according to the one using a plurality of fixed attenuation filters, the fixed attenuation filter located on the optical path is selected, so that the amount of light can be varied step by step, but the amount of light is continuously changed. In order to achieve this, a large number of filters are required, and a rotation mechanism or a slide mechanism is required. Therefore, the entire variable optical attenuator is increased in size and requires a large space, and the change rate of the amount of light can be increased. There was a problem that it was difficult.
[0008]
In addition, a metal film deposited on a disk-shaped glass plate can change the attenuation capacity smoothly, but it requires a rotating mechanism, so it is also enlarged and the rate of change in the amount of light is increased. There was a problem that it was difficult to do.
[0009]
On the other hand, laser scanning microscopes often use light sources having a plurality of wavelengths from the UV region to the infrared region, and there is a demand for switching the laser light intermittently at high speeds for specific wavelengths. At the same time, when the optical path is interrupted, it is necessary that the light quantity can be completely reduced to zero. However, the acousto-optic element (AOTF) used as the shutter described above has a problem that the light quantity cannot be completely reduced to 0 due to structural problems.
[0010]
The present invention has been made in view of the above circumstances, and enables high-speed light amount adjustment and intermittent control. Light amount adjusting device for microscope and laser scanning microscope The purpose is to provide.
[0011]
[Means for Solving the Problems]
The invention according to claim 1 is based on a light source. Outgoing The amount of light emitted And supply to the microscope body In the light intensity adjustment device, A beam expander that enlarges the diameter of the light from the light source and makes it parallel light, and the light from the light source passes through the beam expander. Placed at a position where it becomes parallel light, deflection direction The A light deflecting means in which a large number of micro light deflecting elements each independently controllable are arranged in a plane; A condensing optical system that condenses the light from the light source deflected on the illumination optical path by the multiple micro light deflecting elements of the light deflecting means, and is condensed inside the condensing position of the condensing optical system An optical system that scatters light and supplies it to the microscope main body, and controls the deflection direction of each of the numerous micro light deflecting elements independently to adjust the ratio of deflecting the light from the light source, and from the light source The light is deflected in each direction on the illumination optical path and outside the illumination optical path to adjust the amount of light from the light source Control means; Means for preventing light deflected out of the illumination optical path by the control of the control means from entering the illumination optical path; Equipped with With the characteristics is doing.
[0012]
The invention according to claim 2 is the invention according to claim 1, The optical system that scatters the light collected inside is an optical fiber. It is characterized by that.
[0013]
The invention of claim 3 is claimed in claim 2 In the described invention, The optical fiber is a single mode fiber It is characterized by that.
[0014]
The invention of claim 4 is claimed in claim 1 In the described invention, The optical system that scatters the light collected inside is a light scattering plate. It is characterized by that.
[0015]
The invention of claim 5 claims 1 In the described invention, The light deflecting means is a micro mirror array in which a large number of micro mirrors are arranged in a lattice on the same plane as the micro light deflecting elements, and the deflection directions of these micro mirrors can be controlled independently. It is characterized by that.
[0016]
The invention of claim 6 claims 1 or 5 In the described invention, A light amount detecting unit configured to detect a light amount of the light from the light source adjusted by controlling the plurality of minute light deflecting elements of the light deflecting unit, wherein the control unit detects the light amount detected by the light amount detecting unit; And a preset set light amount, and based on the result, independently control each deflection direction of the multiple micro light deflection elements of the light deflection means. It is characterized by that.
[0017]
The invention of claim 7 is claimed in claim 1 In the invention of The light deflecting means is disposed at the position of the aperture stop of the illumination optical path in the upright microscope or the inverted microscope. It is characterized by that.
[0018]
The invention of claim 8 claims 7 In the invention of The light source is a lamp light source, and the control means adjusts the amount of illumination light by controlling the large number of minute light deflection elements while keeping the filament voltage of the lamp light source constant. It is characterized by that.
[0019]
The invention of claim 9 A laser light source, a beam expander that enlarges the beam diameter of the laser light from the laser light source and makes it parallel light, and the laser light from the laser light source becomes parallel light parallel light via the beam expander A light deflector having a plurality of micro light deflectors arranged in a plane and having a deflection direction that can be controlled independently, and a minute light of the light deflector in a direction on and outside the illumination light path. Control means for independently controlling the minute light deflection elements in order to deflect the laser light from the laser light source by the deflection elements, and collecting the laser light deflected on the illumination optical path by the minute light deflection elements. A condensing optical system that emits light, a single mode optical fiber disposed at a condensing position of the condensing optical system, and the laser light emitted from the single mode optical fiber, A scanning microscope main body having a scanner for two-dimensionally scanning light and a light detector for detecting light from the sample generated by the scanning of the laser light, and controlling each of the micro light deflecting elements independently by the control means By adjusting the ratio of deflecting the laser light from the laser light source, the amount of the laser light supplied to the scanning microscope main body is adjusted. It is characterized by that.
The invention of claim 10 is claimed in claim 9 In the invention of The laser light source is a plurality of laser light sources that generate laser beams having different wavelengths, the light deflecting means is provided corresponding to each of the plurality of laser light sources, and the control means is configured to each of the light deflectors. By individually controlling the means, the light amount of the laser light is adjusted for each wavelength and supplied to the scanning microscope main body by the single mode optical fiber. It is characterized by that.
The invention of claim 11 is claimed in claim 9 In the invention of In the illumination optical path reflected by the micromirror array, the stop, the condenser lens, and the incident end of the optical fiber are arranged. .
[0020]
As a result, according to the present invention, the number and position of the individual micro light deflecting elements of the light deflecting means are independently controlled to control the deflection direction and adjust the ratio of deflecting the light from the light source. The increase / decrease can be adjusted at a high speed, and also when used as a shutter that switches the light amount intermittently between the maximum and minimum, an operation of switching at a high speed is possible.
[0021]
Further, according to the present invention, it is possible to adjust the light amount according to the set light amount by controlling the deflection direction of the minute light deflection element of the light deflecting means using a preset set light amount.
[0022]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, embodiments of the present invention will be described with reference to the drawings.
[0023]
(First embodiment)
FIG. 1 shows a schematic configuration of a laser scanning microscope to which the light amount adjusting device of the present invention is applied. In the figure, reference numeral 1 denotes a laser generation source comprising a laser resonator, and this laser generation source 1 emits a laser beam comprising a parallel light beam. A light amount adjusting device 100 including a beam expander 3 and a micro mirror array 4 as a light deflecting unit is disposed in the light emission path 2 of the laser light from the laser generation source 1.
[0024]
The beam expander 3 is composed of a beam expanding optical system that expands the beam diameter of laser light composed of parallel light beams. The micromirror array 4 is arranged on a parallel light flux whose beam diameter is enlarged via the beam expander 3, and laser light whose beam diameter is enlarged is projected onto the micromirror array 4.
[0025]
Here, the micromirror array 4 will be described. The micromirror array 4 is manufactured by a microprocess such as a semiconductor process. Here, as shown in FIG. 2, a number of micromirror arrays 4 are arranged on the same plane. The micromirrors 41 are arranged in a lattice pattern, as if it were a single plane mirror. In this case, there are various configurations of the micromirrors 41 themselves. For example, both ends are independently supported so as to be freely rotatable. It is possible to turn from the state of 3 (a) to the state of FIG. These micromirrors 41 can change the amount of reflected laser light projected on the entire micromirror array 4 by controlling the rotation direction individually or in groups. That is, by selecting the micromirrors 41 that change the deflection direction of the reflected light and adjusting the ratio of the micromirrors 41 that deflect the laser light from the laser source 1, the proportion is proportional to the number of micromirrors 41 selected. Thus, the amount of reflected light can be attenuated, so that the amount of laser light from the laser source 1 can be changed continuously only by setting the selection number at this time. A mirror control device 101 is connected to the micromirror array 4 via a mirror drive device 102 for independently controlling the deflection direction of the micromirrors 41 of the micromirror array 4.
[0026]
In the illumination optical path 5 reflected by the micromirror array 4, an aperture 6, a condenser lens 7 and an incident end 81 of the optical fiber 8 are arranged. The stop 6 blocks off-axis light 103 deflected by the micro mirror 41 outside the illumination optical path, and the off-axis light 103 outside the illumination optical path enters the condenser lens 7 and affects the adjustment of the amount of laser light. This is to prevent this. The condensing lens 7 condenses the laser light incident through the diaphragm 6 on the incident end 81 of the optical fiber 8. The optical fiber 8 supplies the laser beam emitted from the emission end 82 to the scanning microscope main body 104 side which is a light source supply device.
[0027]
Here, the configuration of the scanning microscope main body 104 will be briefly described.
[0028]
The scanning microscope main body 104 includes an XY scanner 105 for two-dimensionally scanning laser light supplied from the output shaft 82, and an objective lens 107 that irradiates the sample 106 with laser light that has been two-dimensionally scanned by the XY scanner 105. The light returned from the sample 106 via the objective lens 107 and the XY scanner 105, for example, the dichroic mirror 108 for dividing the fluorescence, and the fluorescence reflected by the dichroic mirror 108 are collected by the condenser lens 109. The diaphragm 110 is arranged at the condensing position, and a photodetector 111 that detects light that has passed through the diaphragm 110.
[0029]
Next, the operation of the embodiment configured as described above will be described.
[0030]
Now, when a laser beam composed of a parallel light beam is emitted from the laser generation source 1, the beam diameter of the laser beam is expanded by the beam expander 3 and projected onto the micromirror array 4.
[0031]
The laser light is reflected by the micromirror array 4 and enters the incident end 81 of the optical fiber 8 through the diaphragm 6 and the condenser lens 7.
[0032]
The laser light incident on the incident end 81 of the optical fiber 8 passes through the optical fiber 8 and is guided into the scanning microscope main body 104 from the output end 82.
[0033]
In the scanning microscope main body 104, the laser light is guided to the XY scanner 105 via the dichroic mirror 108 and is two-dimensionally scanned.
[0034]
The laser light that has been two-dimensionally scanned by the XY scanner 105 is condensed by the objective lens 107 and scanned on the sample 106 two-dimensionally. ,
Next, light from the sample 106, for example, fluorescence, returns in the optical path in the reverse direction, and is reflected by the dichroic mirror 108 via the objective lens 107 and the XY scanner 105.
[0035]
The light reflected by the dichroic mirror 108 is collected by a condenser lens 109, detected by a photodetector 111 through a diaphragm 110, and subjected to image processing by an image processing device (not shown) to obtain a microscope image.
[0036]
Here, the case where the amount of laser light incident on the incident end 81 of the optical fiber 8 is maximized will be described below.
[0037]
First, the mirror control device 101 sets all the micromirrors 41 of the micromirror array 4 so as to be in a state as shown in FIG. As a result, the total amount of laser light incident on the micromirror array 4 from the beam expander 3 is deflected in the same direction, here the illumination optical path 5, and the incident end of the optical fiber 8 through the diaphragm 6 and the condenser lens 7. The maximum amount of laser light is incident on 81.
[0038]
On the other hand, a case where the amount of laser light incident on the incident end 81 of the optical fiber 8 is adjusted will be described below.
[0039]
First, an arbitrary micromirror 41 of the micromirror array 4 is rotated by the mirror control device 101 using an action force such as electromagnetic force or electrostatic force, and the micromirror 41 is rotated as shown in FIG. Set to be active. In this case, the black mirror 41 of the micro mirror 41 of the micro mirror array 4 shown in FIG. 2 represents that in the state of FIG.
[0040]
Then, the laser beam deflected by the micro mirror 41 set in this way is deflected in a different direction (outside the illumination optical path), and the deflected light (off-axis light 103) is blocked by the diaphragm 6. By doing so, the laser beam is adjusted so that it is not included in the illumination light path 5 of the laser light, and is not projected onto the condenser lens 7. In other words, by rotating some of the micromirrors 41 in the micromirror array 4 to set the deflection of the reflected light in different directions and reducing the amount of light projected onto the condenser lens 7, Laser light whose light amount has been adjusted is incident on the incident end 81.
[0041]
Therefore, in this way, each of the micromirrors 41 of the micromirror array 4 can be independently controlled for rotation, that is, deflection control, with respect to the number and position thereof, so that the rotation state shown in FIG. As the number of micromirrors 41 increases, the amount of light projected on the condenser lens 7 decreases and is reduced. If all the micromirrors 41 are set in the deflected state, the amount of light projected onto the condenser lens 7 is completely eliminated, so that a shutter function can be obtained. In this case, the micromirror array 4 controls the rotation of the micromirror 41 using an action force such as electromagnetic force or electrostatic force, and the increase / decrease in the amount of light can be adjusted at high speed by the deflection caused by the rotation. Also, when used as a shutter that switches the light quantity between maximum and minimum intermittently, it is possible to switch at a high speed as well as an operation of switching at a high speed.
[0042]
(Second Embodiment)
FIG. 4 shows a schematic configuration of the second embodiment of the present invention, and the same parts as those in FIG.
[0043]
In this case, a collimator lens 10 and a half mirror 11 are arranged on the emission optical path 9 of the laser beam emitted from the emission end 82 of the optical fiber 8. The collimator lens 10 converts the laser light from the optical fiber 8 into a parallel light beam. The half mirror 11 transmits a part of the laser light from the collimator lens 10 to enter a laser scanning microscope main body (not shown) and reflects the remaining part to the light quantity detector 12. . The light quantity detector 12 detects the quantity of laser light emitted from the emission end 82 of the optical fiber 8.
[0044]
An arithmetic device 13 is connected to the light quantity detector 12. The arithmetic unit 13 uses a preset set light amount and a light amount detected by the light amount detector 12 as external inputs in a memory (not shown), for example, compares these light amounts, and calculates the micromirror array 4 from the comparison result. The number and position of the micromirrors 41 to be rotated are determined, and each micromirror 41 is controlled via the mirror driving device 14.
[0045]
In this way, the light quantity of the laser light emitted from the emission end 82 of the optical fiber 8 is detected by the light quantity detector 12 and compared with a preset set light quantity in the arithmetic unit 13. From the comparison result, the number and position of the micro mirrors 41 to be rotated in the micro mirror array 4 are determined, and each micro mirror 41 is controlled via the mirror driving device 14.
[0046]
Accordingly, the amount of laser light reflected by the micromirror array 4 is adjusted using a preset amount of light set, so that a laser beam having a light amount corresponding to the set amount of light is emitted from the emission end 82 of the optical fiber 8. can do.
[0047]
Even if the light quantity detector 12 is disposed in front of the condenser lens 7, the same effect as described above can be expected.
[0048]
(Third embodiment)
By the way, in a laser scanning microscope, for example, light sources having a plurality of wavelengths from the UV region to the infrared region may be used. FIG. 5 shows a schematic configuration of a light source device applied to such a laser scanning microscope.
[0049]
In the figure, reference numerals 21, 22, and 23 denote laser generation sources, and these laser generation sources 21, 22, and 23 emit laser beams having different wavelengths. In the illustrated example, the laser source 21 emits a UV laser, the laser source 22 emits a red laser, and the laser source 23 emits a blue laser.
[0050]
Micromirror arrays 24, 25, and 26 are disposed on the respective light emission paths of the laser beams from these laser generation sources 21, 22, and 23 via beam expanders 3, respectively. The beam expander 3 and the micromirror arrays 24, 25, and 26 have the same configuration as described in the first embodiment.
[0051]
In addition, half mirrors 30 and 31 and a reflection mirror 32 are arranged on the respective reflection light paths of the micromirror arrays 24, 25 and 26 through diaphragms 27, 28 and 29.
[0052]
An incident end 331 of the optical fiber 33 is disposed on the reflection optical path of the reflection mirror 32 via the half mirrors 31 and 30 and the condenser lens 7. The reflected light from the micromirror array 24 is reflected by the half mirror 30 and condensed on the incident end 331 of the optical fiber 33, and the reflected light from the micromirror array 25 is reflected by the half mirror 31. The light is reflected, transmitted through the half mirror 30, and condensed on the incident end 331 of the optical fiber 33. The reflected light from the micromirror array 26 is reflected by the reflecting mirror 32, transmitted through the half mirrors 31 and 30, and condensed on the incident end 331 of the optical fiber 33.
[0053]
In such a configuration, for example, when only the laser generation source 21 is used due to a demand on the laser scanning microscope side, all the micromirrors in the micromirror array 24 are in a state as shown in FIG. After setting, the laser light from the laser source 21 is deflected in the same direction, reflected by the half mirror 30, and incident on the incident end 331 of the optical fiber 33 via the condenser lens 7, respectively. For the remaining micromirror arrays 25 and 26, all the micromirrors are set in a rotating state as shown in FIG. 3B, and the laser beams reflected by these micromirrors are all deflected in different directions. The amount of incident light on the incident end 331 of the optical fiber 33 is reduced to 0 by eliminating the passage of the apertures 28 and 29.
[0054]
In this state, if an arbitrary minute mirror of the minute mirror array 24 is rotated and the reflected light is set in a different direction, the amount of light incident on the emission end 331 of the optical fiber 33 can be adjusted. Further, if all the micromirrors are set to the rotating state at the same time, the amount of light incident on the incident end 331 of the optical fiber 33 can be reduced to zero, and all the micromirrors are shown in FIG. If the state and the rotation state shown in FIG. 5B are alternately switched, the incident light to the incident end 331 of the optical fiber 33 can be switched intermittently.
[0055]
Of course, the same applies to the case where other laser sources 22 and 23 are selectively used.
[0056]
Therefore, in this way, even when the laser generation sources 21, 22, and 23 having different wavelengths are selectively used according to the requirements of the laser scanning microscope, the respective micromirror arrays 24, 25, and 26 have their respective microscopic sizes. Only a light source having a desired wavelength can be used only by rotating the mirror. Further, the selected light source 21, 22, 23 can be adjusted at high speed by rotating a part of the micro mirrors of the corresponding micro mirror arrays 24, 25, 26. The light quantity can also be switched intermittently by alternately switching the state shown in FIG. 3C and the state shown in FIG.
[0057]
Note that the micromirror array used in the above-described embodiment is manufactured by a semiconductor process, and each micromirror is extremely small. For this reason, the beam expander 3 can be omitted when the beam diameter of the laser beam is several hundred μm to several thousand μm, whereas one side of the micromirror is sufficiently small, such as several μm. In this case, the configuration becomes simpler and the price can be reduced.
[0058]
When the beam diameter of the laser beam from the laser generation source is as large as several millimeters with respect to the micromirror, a beam reduction optical system may be used instead of the beam expander 3.
[0059]
Furthermore, when such a light amount adjusting device is used for a confocal laser scanning microscope, if a single mode fiber is used as an optical fiber, a point light source can be obtained, and a confocal effect can be obtained for effective detailed observation. You can also get an image.
[0060]
In the above-described embodiment, the scanning microscope main body has been described as an example. However, the present invention is not limited to this, and the light amount adjustment device of the present invention is, for example, a generally used upright microscope or inverted type. It can also be applied to a microscope.
[0061]
The configuration will be briefly described below.
[0062]
When trying to apply the light amount adjusting device of the present invention to an upright microscope, the micro mirror array of the light amount adjusting device is positioned at a position where the light from the light source is parallel, and the illumination light path for epi-illuminating the sample and the light beam from the sample. It may be anywhere as long as it is disposed at the position of the aperture stop (AS) on the optical path to the optical system that performs reflection and transmission, such as a dichroic mirror that separates the observation optical path.
[0063]
Further, the light modulated by the micromirror array for use as illumination light is once condensed through a condenser lens and passed through a light scattering plate or a small-diameter optical element, such as an optical fiber, arranged at the condensing position. Thus, it is possible to use illumination light whose light amount has been adjusted.
[0064]
In addition, when the light amount adjusting device of the present invention is applied to an inverted microscope, the micromirror array of the light amount adjusting device has an aperture stop on the optical path for transmitting and illuminating the sample at a position where the light from the light source is parallel. It may be anywhere as long as it is arranged at the position (AS). As in the case of an upright microscope, this is a light scattering plate or a light scattering plate disposed at the light condensing position after condensing the light adjusted by the micromirror array for use as illumination light once through a condensing lens. By passing through a small-diameter optical element such as an optical fiber, it is possible to use illumination light whose light amount has been adjusted.
[0065]
Conventional light amount adjustment devices for upright and inverted microscopes are devices that are configured to adjust the light amount of the light source itself mainly by adjusting the power supplied to the light source, and to adjust the gain according to the switching of the observation state It was a device.
[0066]
Therefore, when the light amount adjusting device of the present invention is applied to an upright microscope or an inverted microscope, switching of observation state such as magnification switching of an objective lens, optical system used for phase difference, differential interference, polarization, etc. In this case, the light amount can be adjusted at high speed.
[0067]
Further, in the light amount adjusting device of the present invention, the light amount from the light source is kept constant, and the light amount is adjusted at the portion of the micro mirror array for the constant light amount. The burden on the light source can be reduced as compared with the conventional device that has been adjusted.
[0068]
Note that the above-described constant amount of light is set so that it is too bright as illumination light used in normal observation when all of the illumination light optical path is reflected by the micromirror array. In such a state of light, the micromirrors of the micromirror array are controlled to be deflected independently, and the light whose light amount is adjusted by thinning out part of the light from the light source is used as illumination light used in normal observation. .
[0069]
Further, when the light amount is adjusted by adjusting the filament power supply voltage of the light source, the heat generation of the filament changes, so that the color temperature of light emission may change. However, when the light amount is adjusted using the configuration of the present invention, the change in heat generation of the filament itself is eliminated, so that the color temperature does not change even when the light amount is adjusted.
[0070]
Furthermore, by applying the light amount detector of the second embodiment to the light amount adjusting device applied to the above-described upright microscope and inverted microscope, it is possible to always automatically control the light amount suitable for the observation state.
[0071]
In addition, the light amount adjusting device of the present invention can be applied not only to a microscope or the like but also to other devices that require light amount adjustment. As such, it can be applied to, for example, a measuring apparatus, a processing apparatus using a laser found in three-dimensional modeling such as plastic, a laser treatment apparatus, a laser communication apparatus, and the like.
[0072]
【The invention's effect】
As described above, according to the present invention, high-speed light amount adjustment is possible and intermittent control is possible. Light amount adjusting device for microscope and laser scanning microscope Can provide.
[Brief description of the drawings]
FIG. 1 is a diagram showing a schematic configuration of a first embodiment of the present invention.
FIG. 2 is an enlarged view showing a micromirror array used in the first embodiment.
FIG. 3 is a diagram for explaining the operation of a micromirror used in the first embodiment.
FIG. 4 is a diagram showing a schematic configuration of a second embodiment of the present invention.
FIG. 5 is a diagram showing a schematic configuration of a third embodiment of the present invention.
[Explanation of symbols]
1 ... Laser source
2 ... Outgoing optical path
3 ... Beam expander
4 ... Micromirror array
41 ... micro mirror
5 ... Reflected light path
6 ... Aperture
7 ... Condensing lens
8. Optical fiber
81 ... Incident end
82 ... Output end
100: Light amount adjusting device
101 ... Mirror control device
102 ... Mirror drive device
103: Off-axis light
104 ... Scanning microscope body
105 ... XY scanner
106 ... Sample
107: Objective lens
108 ... Dichroic mirror
109 ... Condensing lens
110 ... Aperture
111 ... Photodetector
9: Output optical path
10 ... Collimator lens
11 ... Half mirror
12 ... Light intensity detector
13 ... arithmetic unit
14 ... Mirror drive circuit
21-23 ... Laser generation source
24-26 ... micro mirror array
27-29 ... Aperture
30, 31 ... Half Mira
32 ... Reflection mirror
33 ... Optical fiber
331 ... Incident end

Claims (11)

In the microscope light amount adjustment device that adjusts the amount of light emitted from the light source and supplies it to the microscope body ,
A beam expander that enlarges the diameter of the light from the light source and makes it parallel light;
Wherein via a beam expander arranged on the light becomes parallel light position from the light source, a light deflector which each independently controllable micro-optical deflecting element deflecting direction arrayed in a plane,
A condensing optical system for condensing light from the light source deflected on an illumination optical path by the multiple micro light deflecting elements of the light deflecting means;
An optical system that scatters the light collected internally at the condensing position of the condensing optical system and supplies the light to the microscope body;
The deflection direction of each of the plurality of minute light deflecting elements is independently controlled to adjust the ratio of deflecting the light from the light source, and the light from the light source is transmitted between the illumination light path and outside the illumination light path. Control means for deflecting in each direction and adjusting the amount of light from the light source ;
Means for preventing light deflected out of the illumination optical path by the control of the control means from entering the illumination optical path;
A microscope light amount adjusting device comprising: 2. The microscope light amount adjusting device according to claim 1 , wherein the optical system for scattering the light collected inside is an optical fiber . The light amount adjusting device for a microscope according to claim 2 , wherein the optical fiber is a single mode fiber . The internal optical system that scatters light collected is microscope light quantity adjusting device according to claim 1, characterized in that the light scattering plate. The light deflecting means is a micro mirror array in which a large number of micro mirrors are arranged in a lattice on the same plane as the micro light deflecting elements, and the deflection directions of these micro mirrors can be controlled independently. The microscope light amount adjusting device according to claim 1 . A light amount detection means for detecting the light amount of the light from the light source adjusted by controlling the multiple micro light deflection elements of the light deflection means;
The control unit compares the light amount detected by the light amount detection unit with a preset set light amount, and based on the result, determines each deflection direction of the multiple micro light deflection elements of the light deflection unit. Control independently,
The light quantity adjusting device for a microscope according to claim 1 or 5 . The light quantity adjusting device for a microscope according to claim 1 , wherein the light deflecting means is disposed at a position of an aperture stop of an illumination optical path in an upright microscope or an inverted microscope . The light source is a lamp light source;
8. The light amount adjusting device for a microscope according to claim 7 , wherein the control means adjusts the light amount of the illumination light by controlling the large number of minute light deflecting elements while the filament voltage of the lamp light source is constant. . A laser light source;
A beam expander that expands and collimates the beam diameter of the laser light from the laser light source;
Light in which a large number of micro light deflecting elements are arranged in a planar shape, arranged at a position where the laser light from the laser light source becomes parallel light parallel via the beam expander, and the deflection direction can be controlled independently. Deflection means;
Control means for independently controlling the micro light deflecting elements in order to deflect the laser light from the laser light source by the micro light deflecting elements of the light deflecting means in a direction on the illumination optical path and outside the illumination optical path; ,
A condensing optical system for condensing the laser beam deflected on the illumination optical path by the minute light deflection element;
A single mode optical fiber disposed at a condensing position of the condensing optical system;
Scanning microscope main body having a scanner that is supplied with the laser light emitted from the single-mode optical fiber and that scans the laser light two-dimensionally and a light detector that detects light from the sample generated by the scanning of the laser light When,
Comprising
Adjusting the ratio of deflecting the laser light from the laser light source and adjusting the amount of the laser light supplied to the scanning microscope main body by independent control of the minute light deflecting elements by the control means ; A laser scanning microscope . The laser light source is a plurality of laser light sources that generate laser beams of different wavelengths,
The light deflection means is provided corresponding to each of the plurality of laser light sources,
The control means controls the light deflecting means individually to adjust the amount of light for each wavelength and is supplied to the scanning microscope main body by the single mode optical fiber.
The laser scanning microscope according to claim 9. The laser scanning microscope according to claim 9 , wherein the diaphragm, the condenser lens, and the incident end of the optical fiber are arranged in the illumination optical path reflected by the micromirror array .

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