JP4689445B2 - Band saw type cutting device - Google Patents

Description

  The present invention relates to a band saw type cutting apparatus mainly used for cutting crystalline ingots such as silicon and gallium silicon.

  Conventionally, a band saw type cutting in which an endless blade with a grindstone is mounted across a pair of wheels, and a workpiece such as a crystal ingot is cut while the blade is moved around the vertical axis by driving the wheel. Devices are generally known.

This type of band saw type cutting device incorporates a mechanism for adjusting the inclination of each wheel, as disclosed in, for example, Patent Document 1, and the wheel has a specific bending curve or the like. By adjusting the inclination, the blade can be stably moved around while preventing the blade from falling off the wheel (for example, Patent Document 1).
Utility Model Registration No. 3078335

  In this type of conventional device, the support shaft of the wheel is held by a swingable holder, and this holder is configured to swing by the driving force of the motor. Adjustment of the tilt of the wheel is input by an operator. This is done by controlling only the rotation angle of the motor (output shaft) based on the value (command value). That is, the deviation between the current rotation angle of the motor and the rotation angle of the motor corresponding to the command value is calculated, and while the change in the rotation of the motor is detected by the encoder, the motor is driven by the difference to swing the support shaft. It is like that.

  In such a configuration, the motor can be accurately driven by the rotation angle corresponding to the command value, and errors due to mechanical factors such as gear backlash generated in the power transmission process are not compensated. Therefore, the wheel tilt angle after adjustment includes an error due to such mechanical factors, and it is difficult to adjust the wheel tilt angle with high accuracy. Therefore, it is required to improve this point. In this type of device, the adjusted tilt angle is maintained using the torque of the motor, but the support shaft may fluctuate unexpectedly within the range of backlash, etc. It is also required to improve the points.

  The present invention has been made in view of the above problems, and it is an object of the present invention to make it possible to adjust the inclination of the wheel on which the blade is mounted more accurately and to move the blade more stably. Yes.

In order to solve the above-described problems, a band saw type cutting device of the present invention includes a pair of wheels that are rotatably supported with respect to a machining head via a support shaft extending in a substantially vertical direction, and are attached to these wheels. A band saw-type cutting device comprising: a blade that circulates with the rotation of the wheel; and a changing unit that changes a tilt of the wheel with respect to the head by a driving force of a motor. A swing mechanism that holds the support shaft so as to be swingable about an axis orthogonal to the axial direction, and swings the support shaft by driving the motor; and an angle detection unit that detects an inclination angle of the support shaft; Control means for driving and controlling the motor so that the detected angle coincides with the target angle based on a deviation between the detected angle by the angle detecting means and the target angle; Yes, and the angle detection means includes an interlocking member which moves in conjunction with the swinging of the support shaft provided separately from the said supporting shaft, and a displacement detector for detecting the displacement of the interlocking member, wherein The interlocking member has a portion that is displaced larger than the displacement amount of the portion in which the support shaft is displaced the most with the swinging, and a detected portion in which the displacement is detected by the displacement detecting portion. is shall be provided (claim 1).

According to this band saw type cutting device, when adjusting the inclination of the wheel, the inclination of the wheel is changed by changing the inclination angle of the support shaft by driving the motor. At this time, the actual tilt angle of the support shaft is detected, and the motor is driven and controlled so that the detected angle matches the target angle. Therefore, even if there is an operation error due to a mechanical factor in the swing mechanism, the error is compensated for naturally, and thereby the tilt adjustment of the wheel is accurately performed. As for the inclination angle of the support shaft, the displacement detector detects the displacement of the interlocking member, and the inclination angle of the support shaft is detected based on this displacement. At this time, a portion where the support shaft is displaced more than the displacement amount of the portion where the support shaft is displaced the most with the swing is provided in the interlocking member, and the detected portion is provided in this portion, thereby A change in the tilt angle is detected after being amplified. Therefore, it is possible to accurately detect a slight change in the tilt angle of the support shaft.

As a more specific configuration, the interlocking member is supported by the head via a fulcrum shaft, and is integrated with the support shaft or at a connecting portion at a position different from the support position by the fulcrum shaft. The link comprises a link that swings around the fulcrum shaft in conjunction with the swing of the support shaft by being connected to a swinging member, and the link is further moved to a position different from the fulcrum shaft and the connecting portion. A detected portion is provided, and the distance from the detected portion to the fulcrum shaft is set longer than the distance from the fulcrum shaft to the connecting portion (claim 2 ).

  According to this configuration, when the link support shaft swings, the link swings around the fulcrum shaft. At this time, since the distance from the fulcrum shaft to the detected portion is larger than the distance from the fulcrum shaft to the connecting portion, the detected portion is larger than the maximum displacement per unit angle of the support shaft. It will be displaced.

In the above apparatus, it is preferable that further includes a locking mechanism for locking the support shaft by blocking the swinging of the support shaft (claim 3).

  According to this configuration, by forcibly locking the swing of the head, it is possible to prevent the tilt angle of the support shaft from fluctuating unexpectedly within the range of backlash during work, for example.

  According to the band saw type cutting device of the present invention, the actual inclination angle of the support shaft of the wheel is detected, and the motor is driven and controlled so that the detected angle coincides with the target angle. Therefore, due to mechanical factors such as backlash. It is possible to eliminate the error and adjust the inclination of the wheel more accurately, and as a result, it is possible to move the blade more stably.

  Embodiments of the present invention will be described with reference to the drawings.

  1 and 2 schematically show a band saw type cutting apparatus according to the present invention, FIG. 1 is a side view, and FIG. 2 is a front view (viewed in the direction of arrow A in FIG. 1) showing the apparatus. Yes.

  A band saw type cutting device (hereinafter, abbreviated as a cutting device) shown in these drawings is a device that cuts a crystal ingot such as silicon as a work W, and a device main body 2 that cuts a work W on a base 1; A transfer device 3 for transferring the workpiece W to a predetermined processing position of the apparatus main body 2 is provided side by side.

  The apparatus main body 2 has a pair of columns 10 that stand upright on the base 1 at a predetermined interval and whose upper end portions are connected by a top beam 11.

  A front beam (a right side surface in FIG. 1) of these columns 10 is provided with a cross beam 14 on which a processing head 12 is mounted. The cross beam 14 is driven up and down along the column 10. In other words, each column 10 is provided with a guide rail 16 extending in the vertical direction, and a horizontal girder 14 is movably mounted on the guide rail 16 and is driven in a vertical direction driven by a driving mechanism (not shown), for example, a motor. A cross beam 14 is connected to the extending ball screw shaft. As the drive mechanism operates, the cross beam 14 moves in the vertical direction along the guide rail 16, and the head 12 and the cross beam 14 move up and down integrally with the movement.

  A portion of the guide rail 16 below the cross beam 14 is covered with a rail cover 18 that telescopically expands and contracts as the cross beam 14 moves. Adhesion is prevented.

  The head 12 is provided with a pair of wheels 20a and 20b which are arranged on the lower surface of the head 12 at a predetermined interval in the direction in which the columns 10 are arranged (hereinafter referred to as the width direction) and which can rotate around the vertical axis. Has been. Endless blades 22 for cutting the workpiece W are mounted on the wheels 20a and 20b, and the wheel 20a (or 20b) is driven to rotate by driving means (not shown). Accordingly, the blade 22 moves around at high speed. Although not shown in detail, the blade 22 has a configuration in which a grindstone such as a diamond grindstone is arranged at a constant interval in the circumferential direction at the lower end edge of a metal belt belt having a width in the vertical direction. As the head 12 descends, the lower end edge of the blade 22 cuts into the workpiece W.

  The wheels 20a and 20b are supported so as to be swingable with respect to the head 12, and the blades 22 can be adjusted by individually adjusting the inclinations of the wheels 20a and 20b in accordance with a specific bending curve or the like of the blade 22. It is configured to be able to stably move around. This point will be described in detail later.

  In the apparatus main body 2, the workpiece W is used by using a linearly traveling portion located between the wheels 20 a and 20 b and on the front side of the head 12 (right side in FIG. 1). A pair of blade holders 24 are disposed in the linearly-advanced portion at intervals in the width direction. These blade holders 24 stabilize the trajectory of the blades 22 and are configured to hold the blades 22 by sandwiching the blades 22 in the thickness direction with, for example, rollers.

  The blade holders 24 are each provided with nozzles 26 for injecting coolant. During processing, coolant is injected from the nozzles 26 toward the cutting position of the blade 22, so that processing heat and Chips are removed.

  On the other hand, the transfer device 3 is provided on the front side of the device body 2. The transport device 3 includes a table 30, a guide rail (not shown) for guiding the table 30, a drive mechanism using a motor 32 that moves the table 30 along the guide rail as a drive source, and the like. As shown in the figure, the work W is supported on the table 30 and is conveyed in a direction orthogonal to the width direction of the apparatus main body 2 (hereinafter, this direction is referred to as the front-rear direction).

  3 and 4 show a specific structure of the head 12. FIG. 3 shows the head 12 in a longitudinal section, and FIG. 4 shows a head section in a plane section (a section taken along line BB in FIG. 3). .

  As shown in these drawings, the head 12 has an elongated frame 12a in the width direction. A pair of support shafts 40 extending substantially in the vertical direction are disposed on the frame 12a at a predetermined interval in the width direction, and the wheels 20a and 20b are fixed to the tips (lower ends) of the support shafts 40. ing.

  Each support shaft 40 is rotatably held by a holder 42 via a bearing 44 and is assembled to the frame 12 a via this holder 42. Among these support shafts 40, a drive shaft 62 is rotatably supported by the frame 12a via a bearing 63 above one support shaft 40 (left support shaft 40 in FIG. 3). A lower end portion of the drive shaft 62 and an upper end portion of the support shaft 40 are connected to each other via a coupling 60. A drive wheel 64 is attached to the drive shaft 62, and a drive belt 66 is attached to the wheel 64. That is, when the wheel 20a is rotationally driven by the motor (not shown) via the belt 66, the drive wheel 64, the drive shaft 62, the coupling 60, and the like, the blade 22 moves around, and the other wheel 20b moves in this movement. It comes to follow.

  The holder 42 holding each support shaft 40 is provided so as to be swingable with respect to the frame 12a via a support shaft 46 extending in the front-rear direction (hereinafter referred to as a swing shaft 46 to be distinguished from the support shaft 40). Thus, the inclination of the wheels 20a and 20b can be adjusted.

  More specifically, the holder 42 is provided with bearing portions 42a and cam receiving portions 42b on both sides of the support shaft 40 (right and left sides in FIG. 3). 46 is swingably mounted. On the other hand, a cam follower 48 is fixed downward on the cam receiving portion 42b, and the holder 42 is supported on a cam member 57 provided on the frame 12a side via the cam follower 48.

  As shown in FIG. 5, the cam member 57 is provided so as to be slidable in a direction (left and right direction in FIG. 3) perpendicular to the swing shaft 46 along a guide portion 58 provided on the frame 12a. By 56, the support shaft 40 is driven forward and backward. In addition, a tapered cam surface 57a is formed on the upper portion of the cam member 57 so as to be inclined downward toward the support shaft 40 side. The cam surface 57a receives the holder 42 (cam follower 48). It is configured. That is, when the cam member 57 moves, the height position for receiving the cam follower 48 (holder 42) is displaced accordingly, and as a result, the support shaft 40 swings integrally with the holder 42 with the swing shaft 46 as a fulcrum. It has become.

  The drive mechanism of the cam member 57 includes a drive shaft 50 supported by the frame 12a via a bearing 52, a gear 54 attached to the rear end (left end in FIG. 5) of the drive shaft 50, and a gear 54 on the output shaft. The motor 56 is provided with a driving gear that meshes. When the screw shaft portion 50a formed at the tip of the drive shaft 50 is screwed into a nut member incorporated in the cam member 57 and the motor 56 is operated, the rotational driving force is transmitted to the drive shaft 50 and The shaft 50 rotates, and the cam member 57 moves along the guide portion 58 with this rotation. That is, in this embodiment, the holder 42, the swing shaft 46, the cam follower 48, the cam member 57, the drive mechanism, and the like constitute the swing mechanism according to the present invention.

  The head 12 incorporates a hydraulic locking mechanism that locks the holder 42 with respect to the swing shaft 46. Specifically, as shown in FIG. 8, a sleeve 80 is inserted between the swing shaft 46 and the bearing portion 42a of the holder 42, and a hydraulic chamber 81 is formed between the sleeve 80 and the bearing portion 42a. In addition, pressure oil can be supplied to and discharged from the hydraulic chamber 81 through a passage outside the figure. That is, when the lock mechanism is on, pressure oil is supplied to the hydraulic chamber 81, the sleeve 80 is pressed against the swing shaft 46, and the friction force causes the holder 42 to be locked to the swing shaft 46, while the lock mechanism When is turned off, the pressure oil is discharged from the hydraulic chamber 81, so that the holder 42 is allowed to rotate with respect to the swing shaft 46.

  In the head 12, a sensor for detecting the tilt angle of the support shaft 40 is further provided near the upper end of each support shaft 40, as shown in FIGS. 4, 6 and 7.

  Specifically, a pin 70 extending in the horizontal direction is fixed to the holder 42 via a mounting base 71, while a link 74 (interlocking member) is connected to the frame 12 a with a shaft 76 parallel to the pin 70 (according to the present invention). The fulcrum shaft is supported so as to be swingable. As shown in FIG. 7, the link 74 is formed in an L-shape having a short portion 74a extending in the vertical direction (vertical direction) from the shaft 76 and a long portion 74b extending in the horizontal direction orthogonal to the short portion 74a. The pin 70 is inserted into a long hole 75 (corresponding to a connecting portion according to the present invention) formed in the short portion 74a and connected to the holder 42. Further, a reflection surface 78 (corresponding to the detected portion according to the present invention) is provided upward at the tip of the long portion 74b, and an optical distance is provided at a position corresponding to the reflection surface 78 in the frame 12a. A sensor 72 (corresponding to a displacement detection unit according to the present invention) is fixed. That is, when the support shaft 40 swings and its inclination angle changes, the link 74 swings around the shaft 76 in conjunction with this, and the distance from the distance sensor 72 to the reflecting surface 78 varies. By detecting this distance, the inclination angle of the support shaft 40 is detected in the NC control unit 85 to be described later using the distance as a parameter (that is, in this embodiment, the pin 70, the link 74, the distance, The sensor 72, the reflecting surface 78, the NC control unit 85, and the like constitute the angle detecting means according to the present invention).

  In the link 74, the distance from the shaft 76 to the reflecting surface 78 is set sufficiently longer than the distance from the coaxial 76 to the pin 70 (position of the long hole 75), and the support shaft 40 is oscillated. Accordingly, the reflecting surface 78 is displaced more than the displacement amount of the portion that is displaced most greatly. That is, the change in the tilt angle of the support shaft 40 is apparently amplified and detected, and by this configuration, a slight change in the tilt angle of the support shaft 40 can be detected more accurately. It is like that.

  The band saw type cutting device as described above has an NC control unit 85 as shown in FIG. The NC control unit 85 is composed of a CPU for executing logical operations, a ROM for storing various programs for controlling the CPU in advance, a RAM for temporarily storing various data during operation of the apparatus, an HDD, and the like. The drive of the head 12 and the like is controlled by the NC control unit 85 to execute the cutting operation of the workpiece W according to a predetermined program.

  The NC control unit 85 is connected to a display 87a for performing various displays and an operation panel 86 provided with operation keys 87b. The operator operates the operation keys 87b while confirming the display contents of the display 87a. Thus, a predetermined operation corresponding to this operation is executed by the NC control unit 85.

  For example, in this apparatus, in order to move the blade 22 around in a stable manner, the inclination angle of the wheels 20a and 20b (that is, the inclination angle of the support shaft 40) is adjusted in accordance with the inherent curvature of the blade 22 and the like. Such adjustment of the inclination angle of the wheels 20a, 20b is automatically executed based on numerical input.

  Specifically, the NC control unit 85 stores correlation data indicating the relationship between the detection value of the distance sensor 72 (the distance between the reflecting surface 78 and the distance sensor 72) and the tilt angle of the support shaft 40 in advance. When the operator operates the operation key 87b to input a desired tilt angle (command value), the NC control unit 85 determines the current value (current tilt angle of the support shaft 40) based on the detection value of the distance sensor 72 and the correlation data. Is calculated, and a deviation between the command value and the current value is calculated, and the motor 56 is driven and controlled so that the deviation becomes “0”.

  In the adjustment operation of the tilt angle of the wheels 20a and 20b, before the motor 56 is operated, the pressure oil in the hydraulic chamber 81 is discharged and the lock mechanism of the holder 42 is switched from the locked state to the released state. After the adjustment of the tilt angle, the NC control unit 85 controls the control valve of the hydraulic circuit (not shown) to supply the hydraulic oil to the hydraulic chamber 81 and switch the lock mechanism from the unlocked state to the locked state. It has become.

  In order to cut the workpiece W with the band saw type cutting device configured as described above, first, the head 12 is set at the initial position (upward end position), and the table 30 is placed at the retracted position, and then the workpiece W is cut. Set on table 30. At this time, for example, the inclination angles of the wheels 20a and 20b are adjusted in advance according to the material of the blade 22 to be used. This adjustment is performed by operating the operation key 87b of the operation panel 86 and inputting a desired angle as described above.

  Then, by moving the work W by driving the table 30, the work W is positioned at a machining position below the head 12, and after the positioning is completed, the wheel 20a (or 20b) is driven. This causes the blade 22 to move around at high speed. Then, the head 12 is lowered at a predetermined cutting speed, and along with this lowering, the blade 22 is brought into contact with the outer peripheral surface of the workpiece to start cutting the workpiece W.

  Thus, when the cutting of the blade 22 proceeds and the cutting of the workpiece W is completed, the head 12 is raised and reset to the initial position, the driving of the blade 22 is stopped, and then the table 30 is moved to the retracted position. Thereby, a series of cutting operations of the workpiece W is completed.

  According to the band saw-type cutting device according to the present invention as described above, as described above, the operator operates the operation key 87b to input a desired tilt angle (command value), whereby the tilt angle of each wheel 20a, 20b ( (The inclination angle of the support shaft 40) can be adjusted by the driving force of the motor 56, so that the inclination angle of the wheels 20a, 20b is appropriately adjusted in accordance with the specific bending curvature of the blade 22, It is possible to stably move the blades while preventing the blades 22 from falling off the wheels 20a and 20b.

  In particular, in this device, the actual inclination angle of the support shaft 40 to which the wheels 20a and 20b are mounted is detected, and the motor 56 is driven and controlled so that the detected angle matches the command value (that is, the support shaft 40). (The tilt angle is directly feedback controlled), so that the angle adjustment can be performed with high accuracy while the tilt angle of the wheels 20a and 20b is adjusted by driving the motor 56. That is, in this apparatus, the rotational driving force of the motor 56 is converted into a straight movement of the cam member 57 via the gear 54 and the screw shaft 50a (drive shaft 50), and the wheels 20a and 20b are moved along with the movement of the cam member 57. Since it is swung, there is a drive error due to backlash of the gear 54 and the like. However, since the tilt angle of the support shaft 40 is directly feedback-controlled as described above, the influence of such backlash can be eliminated. Therefore, it is possible to adjust the inclination of the wheels 20a and 20b with higher accuracy as compared with a conventional device of this type that includes an error due to mechanical factors such as backlash.

  Moreover, in this apparatus, regarding the detection of the tilt angle of the support shaft 40, the link 74 that is displaced in conjunction with the support shaft 40 is provided as described above, and the change in the tilt angle of the support shaft 40 is apparent by detecting this link 74. Since the detection is performed by amplification, the slight change in the tilt angle of the support shaft 40 can be accurately detected. Accordingly, the reliability of the detection angle is high, and the angle can be adjusted based on such a highly reliable value. As a result, the inclination angle of the wheels 20a and 20b can be adjusted more accurately. .

  Further, in this apparatus, after the adjustment of the inclination angles of the wheels 20a and 20b, the lock mechanism is configured to forcibly prevent the support shaft 40 from swinging. It is possible to effectively prevent the tilt angle of 20b from changing unexpectedly. Therefore, the tilt angle after adjustment can be maintained for a longer period, and as a result, there is also an advantage that the blade 22 can be moved around in a more stable manner.

  The cutting device according to the above-described embodiment is an embodiment of the band saw type cutting device according to the present invention, and the specific configuration thereof can be appropriately changed without departing from the gist of the present invention. For example, in the above embodiment, the link 74 interlocking with the support shaft 40 is provided, and the support shaft 40 tilt angle is detected by detecting the link 74 with the distance sensor 72. This is a device for apparently amplifying the amount of change associated with the swinging of the support shaft 40. Of course, the support shaft 40 and the holder 42 may be directly detected by the distance sensor 72.

  In the embodiment, when adjusting the angles of the pulleys 20a and 20b, the lock mechanism is automatically turned on / off by the control of the NC control unit 85. Of course, the lock mechanism can be turned on / off manually by an operator. You may do it.

It is a side view which shows the band saw type cutting device which is a processing machine which concerns on this invention. The front view which shows a band saw type cutting device (A arrow line view of FIG. 1). It is a longitudinal cross-sectional view which shows the structure of the head of a band saw type cutting device. FIG. 5 is a cross-sectional view taken along the line BB in FIG. It is principal part sectional drawing which shows the structure of a head. It is a D arrow line view of Drawing 3 showing the composition of a head. It is EE sectional drawing of FIG. 6 which shows the structure of a head. It is CC sectional drawing of FIG. 3 which shows the structure of a head.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Base 2 Apparatus main body 3 Conveyance apparatus 12 Head 20a, 20b Wheel 22 Blade 30 Table 40 Support shaft 42 Holder 46 Support shaft (oscillation shaft)
50 Drive shaft 54 Gear 57 Cam member 56 Motor 85 NC control unit 86 Operation panel W Workpiece

Claims (3)

A pair of wheels that are rotatably supported by a machining head via a support shaft extending in a substantially vertical direction, a blade that is mounted on these wheels and moves around as the wheels rotate, and a motor drive In a band saw type cutting device comprising a changing means for changing the inclination of the wheel relative to the head by force,
The changing means holds the support shaft with respect to the head so as to be swingable about an axis orthogonal to the axial direction, and swings the support shaft by driving the motor; and the support shaft an angle detecting means for detecting an inclination angle of the basis of the deviation between the detected angle and the target angle by the angle detecting means, have a control means for the detecting angle drives and controls the motor to match the target angle ,
The angle detection means includes an interlocking member that is provided separately from the support shaft and is displaced in conjunction with the swing of the support shaft, and a displacement detection unit that detects the displacement of the interlocking member, The support shaft has a portion that is displaced larger than the amount of displacement of the portion that is displaced the most with the swing, and a detected portion in which the displacement is detected by the displacement detector is provided in this portion. Tei Rukoto band saw type cutting apparatus according to claim. In the band saw type cutting device according to claim 1,
The interlocking member is supported by the head via a fulcrum shaft, and is connected to the support shaft or a member that swings integrally with the support shaft at a connection portion that is different from the support position by the fulcrum shaft. Thus, a link that swings around the fulcrum shaft in conjunction with the swing of the support shaft is provided, and the detected portion is provided at a position different from the fulcrum shaft and the connecting portion of the link. A band saw type cutting apparatus, wherein a distance from a detected part to the fulcrum axis is set longer than a distance from a fulcrum axis to the connecting part . In the band saw type cutting device according to claim 1 or 2,
The band saw type cutting device further comprising a lock mechanism for locking the support shaft by preventing the support shaft from swinging .

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