JP4674553B2 - X-ray inspection equipment - Google Patents

Description

  The present invention relates to an X-ray inspection apparatus, and more particularly to an X-ray inspection apparatus for performing fluoroscopic inspection or CT inspection of industrial products and the like.

The X-ray inspection apparatus is used for nondestructive inspection of an internal defect of an aluminum casting, a component bonding state of a semiconductor substrate, and the like. In general, an X-ray inspection apparatus includes an X-ray source and an X-ray detector that combines an image intensifier (hereinafter abbreviated as II) and a CCD camera so as to face the X-ray source. Has been placed. Recently, a flat panel X-ray detector is used instead of an X-ray detector combining II and a CCD camera. Such an X-ray inspection apparatus includes a stage on which an object to be measured is placed between an X-ray source and an X-ray detector. Then, while adjusting the position of the object to be measured by rotating movement or parallel advancing movement of the stage and the like, it has taken a fluoroscopic X-ray image. Furthermore, fluoroscopic X-ray images of the measurement object at various positions are taken while tilting the angle at which the fluoroscopic X-ray is irradiated by moving the X-ray detector or the like.

The rotational movement of the stage, parallel advances movement of the stage, control of the driving unit for moving the X-ray detector is performed by various drive signals are supplied. At this time, various drive signals are given to drive units such as a stage drive mechanism and an X-ray detector drive mechanism by various operations of an input device such as a mouse, joystick, or keyboard.

  By the way, the fluoroscopic X-ray image displayed on the display device is often a local fluoroscopic X-ray image obtained by photographing a part of the object to be measured. Therefore, it is difficult for the operator to grasp the positional relationship between the X-ray detector and the object to be measured only by looking at the fluoroscopic X-ray image displayed on the display device. Therefore, when the operator moves the X-ray detector or the stage, in order to avoid a collision between the X-ray measurement optical system and the object to be measured, the operator can put a protective cover covering the X-ray measurement optical system, the stage, etc. The stage drive mechanism and the X-ray detector drive mechanism were controlled while visually confirming the positional relationship between the X-ray measurement optical system and the object to be measured, as viewed from the formed small window.

However, in recent X-ray inspection apparatuses, the moving speed of the stage and the moving speed of the X-ray detector have been increased, so that a collision between the X-ray measuring optical system and the object to be measured can be caused by a slight mistaken operation by the operator. May cause damage.
Therefore, as a method for preventing the collision between the X-ray measurement optical system and the object to be measured, it is disclosed that the operator himself determines and pre-sets a collision risk area where the X-ray measurement optical system and the object to be measured collide. (For example, refer to Patent Document 1).
JP 2001-153818 A

However, it takes time and effort for the operator to determine the collision risk area by himself.
Therefore, as another method, a plurality of optical cameras (cameras that shoot using visible light such as video cameras and digital cameras) are used to shoot visible light images of the object to be measured from multiple directions, and the obtained visible light is obtained. It is also conceivable to set the appearance shape of the object to be measured based on the optical image. However, if a plurality of optical cameras are used, the number of parts including the control circuit of each camera will increase significantly, resulting in an increase in cost and a complicated structure of the X-ray inspection apparatus.

  Accordingly, the present invention provides a collision between the X-ray measurement optical system and the object to be measured without visually confirming the positional relationship between the X-ray measurement optical system and the object to be measured or mounting a plurality of optical cameras. It is an object of the present invention to provide an X-ray inspection apparatus that can capture fluoroscopic X-ray images of an object to be measured at various positions by moving an X-ray detector or a stage while preventing damage due to.

An X-ray inspection apparatus of the present invention made to solve the above problems includes an X-ray detector that captures a fluoroscopic X-ray image and an X-ray source that irradiates fluoroscopic X-rays toward the X-ray detector. X-ray examination apparatus comprising an X-ray measurement optical system, a stage for placing the measured object between the previous SL X-ray detector wherein the X-ray source, and a stage drive mechanism for rotating and translating the stage having The measurement object and the X-ray measurement optics are based on one optical camera that captures a visible light image of the object to be measured, and the visible light image that is photographed while rotating the stage. A collision risk area setting means for setting a collision risk area where there is a possibility of contact with the system; a collision determination means for determining whether a part of the X-ray measurement optical system is in the collision risk area; Part of the X-ray measurement optical system enters the collision risk area. When it is determined that that the moving speed of the stage, and a moving speed controlling means for a predetermined movement speed slower than the moving speed at which all of the X-ray measurement optical system is not in the collision risk area, the The collision risk area setting means creates, as the collision risk area, trajectory data indicating a rotating body graphic of the object to be measured based on the visible light image captured while rotating the stage. Is set to include .

According to the X-ray inspection apparatus of the present invention, since the collision risk area is set based on the visible light image of the object to be measured while rotating the stage, there is no need to mount a plurality of optical cameras, There is also no need for the operator to set the collision risk area asking himself.
Further, when a part of the X-ray measurement optical system is in the collision risk area, the moving speed of the stage is lower than the movement speed when the entire X-ray measurement optical system is not in the collision risk area. Become speed. Therefore, the X-ray measurement optical system can be brought close to the object to be measured while preventing a collision between the X-ray measurement optical system and the object to be measured. At this time, even if the X-ray measurement optical system collides with the object to be measured, since the stage moving speed is a predetermined moving speed that is slow, the impact due to the collision can be suppressed, and the X-ray measurement can be performed. The optical system and the object to be measured are not damaged.
Further, when the entire X-ray measurement optical system is not in the collision risk area, the moving speed of the stage is fast, so that the operation of taking a fluoroscopic X-ray image of the object to be measured can be quickly performed.
Even if the object to be measured has a complicated external shape, it is possible to set a thing including a rotating figure as a collision risk area. For example, it can be simplified and speeded up by approximating with a simple model. it can.

(Means and effects for solving other problems)
The X-ray inspection apparatus according to the present invention further includes an X-ray detector driving mechanism for moving the X-ray detector, and the moving speed control means includes a part of the X-ray measurement optical system in which the collision risk area is provided. When it is determined that the X-ray detector has entered, the moving speed of the X-ray detector is set to a predetermined moving speed that is slower than the moving speed when the entire X-ray measurement optical system is not in the collision risk area. Also good .

According to X-ray inspection apparatus of the present invention, such as this, when a portion of the X-ray measuring optical system is in the collision risk area, the moving speed of the X-ray detector, the entire X-ray measurement optical system It becomes a predetermined moving speed that is slower than the moving speed when not entering the collision risk area. Therefore, the X-ray measurement optical system can be brought close to the object to be measured while preventing a collision between the X-ray measurement optical system and the object to be measured. At this time, even if the X-ray measurement optical system collides with the object to be measured, since the moving speed of the X-ray detector is a predetermined moving speed that is slow, the impact due to the collision can be suppressed, The X-ray measurement optical system and the object to be measured are not damaged.
Further, when the entire X-ray measurement optical system is not in the collision risk area, the moving speed of the X-ray detector is fast, so that the operation of taking a fluoroscopic X-ray image of the object to be measured can be performed quickly.

In the X-ray inspection apparatus according to the present invention, the collision risk area setting means is selected from the group of a cylinder, a sphere, an ellipsoid, and a cone as the collision risk area, or at least You may make it set the thing approximated by what combined two.
According to such an X-ray inspection apparatus of the present invention, any one selected from the group of a cylindrical body, a sphere, an ellipsoid, and a cone, or a combination of at least two is set as the collision risk area. Therefore, for example, simplification and high speed can be achieved by simplification.

Furthermore, in the X-ray inspection apparatus of the present invention, when it is determined that a part of the X-ray measurement optical system has entered the collision risk area, the movement of the X-ray detector or the stage is stopped and a warning is given. A collision warning means for generating a signal may be provided.
According to such an X-ray inspection apparatus of the present invention, when it is determined that a part of the X-ray measurement optical system has entered the collision risk area, the movement of the X-ray measurement optical system or the stage is stopped and a warning signal is sent. Therefore, the collision between the X-ray measurement optical system and the object to be measured can be reliably prevented. Further, when the X-ray measurement optical system is further entered into the collision risk area, the X-ray measurement optical system and the object to be measured can be brought close to each other by receiving a warning signal.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings. Note that the present invention is not limited to the embodiments described below, and it is needless to say that various aspects are included without departing from the spirit of the present invention.

  FIG. 1 is a block diagram showing a configuration of an X-ray inspection apparatus according to an embodiment of the present invention. The X-ray inspection apparatus 1 includes an X-ray measurement optical system 13 having an X-ray generator 11 and an X-ray detector 12, a stage 14 on which an object S is mounted, an X-ray detector drive mechanism 15a and a stage. The driving unit 15 includes a driving mechanism 15b, an optical camera 16, and a control system (computer) 20 that controls the entire X-ray inspection apparatus 1.

The X-ray measurement optical system 13 includes an X-ray detector 12 and an X-ray generator 11. The X-ray detector 12 has II and a CCD camera attached integrally to the back surface of the II. On the other hand, the X-ray generator 11 is an X-ray source and has an X-ray tube that irradiates fluoroscopic X-rays toward the surface of II.
Therefore, a fluorescent image is formed when II detects X-ray for fluoroscopy. Further, by photographing this fluorescent image with a CCD camera, a video signal (analog signal) of fluoroscopic X-rays is output to the computer 20.
Note that the X-ray detector 12 is provided so as to be movable by the X-ray detector driving mechanism 15a so that the angle at which the fluoroscopic X-ray is irradiated is inclined. The X-ray generator 11 is formed so as to be able to irradiate fluoroscopic X-rays toward the surface of the moved II.

The stage 14 includes a lower disk-shaped body 14b having an axis in a direction perpendicular to the upper surface (Z direction), and an upper disk-shaped body 14a formed so as to be rotatable about the axis. The And the to-be-measured object S will be mounted on the upper surface of the upper disc-shaped body 14a.
The lower disk-like body 14b is moved in a direction (XY direction) parallel to the surface of the stage 14 or moved up and down in a direction perpendicular to the surface of the stage 14 (Z direction) by the stage drive mechanism 15b. Are movably provided. Further, the upper disk-like body 14a is provided so as to be rotated (α direction) by the stage drive mechanism 15b.
Therefore, the position of the DUT S is moved by moving the position of the stage 14.

The drive unit 15 includes an X-ray detector drive mechanism 15a and a stage drive mechanism 15b. The X-ray detector drive mechanism 15a and the stage drive mechanism 15b each have a motor, for example.
The control of the drive unit 15 is executed by receiving drive signals output from the optical camera photographing control unit 35 and the drive signal generation unit 50 of the computer 20.

  The optical camera 16 captures a visible light image of the measurement object S, and is a video camera, a digital camera, or the like. A video signal (analog signal) of a visible light image of the measured object S is output to the computer 20. Further, the optical camera 16 is attached at a position that does not hinder the imaging of a fluoroscopic X-ray image, and at a position where a visible light image of the appearance shape of the measurement object S can be taken. .

The computer 20 includes a CPU 21 and is connected to an image memory 24 for storing frame image data and the like, a display device 23 having a liquid crystal panel and the like, and a keyboard 22a and a mouse 22b as input devices.
Further, the functions processed by the CPU 21 will be described in the form of blocks. An X-ray image creation means 31, an optical camera imaging control means 35, a collision risk area setting means 32, a collision determination means 33, a collision warning means 34, The driving signal generating means 51, the moving speed control means 52, and the moving speed stop means 53 are divided.
Further, the collision risk area setting unit 32 includes an object appearance shape extraction unit 36, a trajectory data extraction unit 37, and a collision risk area calculation unit 38. Further, the image memory 24 includes background image data storage means 41, trajectory image data storage means 42 and collision risk area data storage means 43.
Note that the keyboard 22a and the mouse 22b perform input operations on the computer 20 by various operations.

The X-ray image creating means 31 performs control to display a fluoroscopic X-ray image on the display device 23 based on a digital signal converted from the video signal (analog signal) output from the X-ray detector 12. It is.
The drive signal generation means 51 performs control to generate a drive signal for moving the X-ray detector 12 or the stage 14 in the drive unit 15 by various operations of the keyboard 22a and the mouse 22b. At this time, the drive signal generating means 51 moves the X-ray detector 12 or the stage 14 at the moving speed set by the moving speed control means 52 described later.

The optical camera photographing control means 35 generates a driving signal for photographing a visible light image on the driving unit 15 and / or the optical camera 16 and also a digital signal converted from a video signal (analog signal) output from the optical camera 16. The image data of the visible light image created based on the control is stored in the image memory 24, or the display device 23 is controlled to display the image of the visible light image.
Specifically, the optical camera photographing control means 35 translates the stage 14 and adjusts the optical camera 16 toward the axis of the stage 14, and then is visible with the optical camera 16 while rotating the stage 14 at a constant speed. By taking a light image, it is possible to store in the image memory 24 the frame image data indicating the respective external shapes when rotated by a certain angle.
At this time, the frame image data created when the visible light image is taken in a state where the measurement object S is not placed on the stage 14 is stored in the background image data storage means 41 of the image memory 24. On the other hand, the frame image data created when the visible light image is taken with the object S to be measured placed on the stage 14 is stored in the trajectory image data storage means 42 of the image memory 24.
Note that the frame image data created when the visible light image is taken in a state in which the object to be measured S is not placed on the stage 14 need only be stored once. It may be accumulated in

The to-be-measured object appearance shape extraction unit 36 compares the frame image data stored in the same direction in the background image data storage unit 41 and the trajectory image data storage unit 42, respectively, and performs binarization processing, for example. Control for creating binary appearance data indicating the appearance shape of the object S to be measured is performed.
It should be noted that the object appearance shape extraction means 36 is a well-known image process for reducing or removing the effects of illumination, reflection, etc. inside the X-ray inspection apparatus 1 before binarization processing. (Laplace transform or the like) may be executed. Further, the threshold value in the binarization process may be based on a predetermined threshold value, or may be determined dynamically by performing a discriminant analysis by a statistical process.

The trajectory data extraction unit 37 performs control to create trajectory data indicating a rotating figure (trajectory) of the object S to be measured based on the binarized appearance data in each direction.
The collision risk area calculation means 38 sets the collision risk area A so as to completely include the rotating body figure of the object S to be measured based on the trajectory data, and also sets the collision risk area A as the collision risk area of the image memory 24. Control to be stored in the data storage means 43 is performed.

  The collision determination unit 33 performs control to determine whether or not a part of the X-ray measurement optical system 13 is in the collision risk area A. That is, the collision determination means 33 stores the current position and size of the X-ray generator 11, X-ray detector 12, and stage 14, and the stage 14 moves in translation and the collision risk area A also moves. By doing so, it is determined whether or not a part of the X-ray generator 11 or the X-ray detector 12 overlaps the collision risk area A.

When a part of the X-ray measurement optical system 13 enters the collision risk area A, the collision warning unit 34 generates a stop signal for stopping the movement of the stage 14 or the X-ray detector 12 and also generates a warning signal. Control is performed. That is, for example, the warning signal indicates to the display device 23 that a part of the X-ray measurement optical system 13 has entered the collision risk area A, and the stage 14 or the X-ray detector 12 is further moved to the collision risk area A. An image is displayed to ask the operator whether to move or not to notify the operator.

  The movement speed control means 52 determines the movement speed of the X-ray detector 12 or the stage 16 when the part of the X-ray measurement optical system 13 is in the collision risk area A. Control is performed so that the entire moving speed of the system 13 is lower than the moving speed when the entire area 13 is not in the collision risk area A. That is, the moving speed control means 52 sets the normal moving speed and determines a part of the X-ray measuring optical system 13 when it is determined that the entire X-ray measuring optical system 13 is not in the collision risk area A. Is determined to be in the collision risk area A, control for setting a predetermined moving speed is performed. The predetermined moving speed is preferably a speed at which the X-ray measuring optical system 13 and the measured object S are not damaged even if the X-ray measuring optical system 13 and the measured object S collide with each other. Specifically, it is preferably 10 mm / s or more and 150 mm / s or less.

  The moving speed stop means 53 performs control to generate a stop signal for stopping the movement of the stage 14 or the X-ray detector 12 when the object to be measured S and the X-ray measuring optical system 13 come into contact with each other. For example, when a load is applied to the motor of the X-ray detector drive mechanism 15a or the stage drive mechanism 15b, the moving speed stop means 53 is such that the object to be measured S and the X-ray measurement optical system 13 are in contact with each other. By determining, a stop signal is generated.

  Here, an example of a method for setting the collision risk area A will be described. For example, a virtual cylinder is assumed in which the outermost peripheral point of the rotating object shape of the object to be measured S is a radius and the highest point of the rotating object shape of the object to be measured S is the height, and the optical camera 16 passes through the rotation center of the stage 14. Assuming a virtual screen Sc that faces the virtual screen Sc, a virtual cylinder is projected onto the virtual screen Sc to form a projected image, and a region that passes when the projected image rotates is defined as a collision risk region A.

  Specifically, a method of setting the collision risk area A in the measurement object S having a cylindrical shape with a diameter of 150 mm and a height of 400 mm will be described with reference to FIGS. 2 is a side view of the measurement object S placed on the stage 14, and FIG. 3 is a plan view of FIG. The rotation center of the stage 14 surface is 0 in the XYZ direction, the X direction is parallel to the stage 14 surface, the Y direction is parallel to the stage 14 surface and perpendicular to the X direction, and the Z direction is the X direction and Suppose that it is perpendicular to the Y direction. Further, it is assumed that the optical camera 16 is installed at positions of 450 mm in the X direction, 0 in the Y direction, and 200 mm in the Z direction.

The center of the object S to be measured is arranged at a position of 25 mm in the X direction and 0 in the Y direction. Therefore, the shape of the rotating object S to be measured is a cylindrical shape having a diameter of 200 mm and a height of 400 mm. As shown in FIG. 2, the height of the image projected on the virtual screen Sc (Y plane) passing through the rotation center of the stage 14 is 460 mm in a cylindrical shape having a diameter of 200 mm and a height of 400 mm. The height of this image is the height H of the collision risk area A. Therefore, the height H of the collision risk area A always includes the height of the measurement object S even if the measurement object S is rotated and moved by the stage 14.

On the other hand, as shown in FIG. 3, the width of the image projected on the virtual screen Sc (Y plane) passing through the rotation center of the stage 14 in the cylindrical shape having a diameter of 200 mm and a height of 400 mm is set to the width of the collision risk area A. W. Therefore, the width W of the collision risk area A always includes the width of the measurement object S even if the measurement object S is rotated by the stage 14.
Therefore, a cylindrical shape having a diameter W and a height H is set as the collision risk area A. Since such a collision risk area A is larger than the shape of the rotating body of the object S to be measured, the collision between the X-ray measurement optical system 13 and the object S can be surely prevented.

Depending on the external shape of the object S to be measured, an appropriate one can be obtained by approximating any one selected from the group of cylinders, spheres, ellipsoids and cones, or a combination of at least two. A collision risk area A can also be set.
Further, when the collision risk area A is set as a simple figure, it can be stored in the collision risk area data storage means 43 by a mathematical formula (cylinder equation, sphere equation, etc.). Arithmetic processing for determining whether or not the vehicle is in the dangerous area A can be facilitated.

Next, an example of the movement speed control operation by the X-ray inspection apparatus 1 will be described. FIG. 4 is a flowchart showing an example of the movement speed control operation.
First, in the process of step S101, it is determined whether or not a part of the X-ray measurement optical system 13 is in the collision risk area A. When it is determined that a part of the X-ray measurement optical system 13 is in the collision risk area A, the process proceeds to step S107 described later.

On the other hand, when it is determined that the entire X-ray measurement optical system 13 is not in the collision risk area A, the movement speed control means 52 sets a normal movement speed in the process of step S102.
Next, in the process of step S103, it is determined whether or not there has been an operation of the keyboard 22a or the mouse 22b for moving the X-ray detector 12 or the stage 14. When there is no operation of the keyboard 22a or the mouse 22b, this flowchart is ended.

  On the other hand, when there is an operation on the keyboard 22a or the mouse 22b, it is determined whether or not a part of the X-ray measurement optical system 13 is in the collision risk area A in the process of step S104. When it is determined that a part of the X-ray measurement optical system 13 is not in the collision risk area A, the process returns to step S103.

  On the other hand, when it is determined that a part of the X-ray measurement optical system 13 is in the collision risk area A, the collision warning unit 51 stops the movement of the stage 14 or the X-ray detector 12 in the process of step S105. A stop signal is generated and a warning signal is generated.

Next, in the process of step S106, the operator determines whether to move the stage 14 or the X-ray detector 12 to the collision risk area A. When it is determined that the stage 14 or the X-ray detector 12 is not moved to the collision risk area A, the process returns to step S103. That is, the processes in steps S103 to S106 are executed until it is determined that the operation of the keyboard 22a or the mouse 22b is lost or the stage 14 or the X-ray detector 12 is moved to the collision risk area A.
In the X-ray inspection apparatus 1, if the operator does not determine that the stage 14 or the X-ray detector 12 is moved to the collision risk area A, the stage 14 or the X-ray detector 12 is moved to the collision risk area A. There may be controls to prevent this.

On the other hand, when the operator determines to move the stage 14 or the X-ray detector 12 to the collision risk area A, the movement speed control means 52 sets a predetermined movement speed in the process of step S107. The predetermined moving speed is slower than the normal moving speed.
Next, in the process of step S108, it is determined whether or not there has been an operation of the keyboard 22a or the mouse 22b for moving the X-ray detector 12 or the stage 14. When there is no operation of the keyboard 22a or the mouse 22b, this flowchart is ended.

  On the other hand, when there is an operation on the keyboard 22a or the mouse 22b, it is determined whether or not a part of the X-ray measurement optical system 13 is in the collision risk area A in the process of step S109. When it is determined that a part of the X-ray measurement optical system 13 is in the collision risk area A, the process returns to step S108. That is, the processing in step S108 and the processing in step S109 are performed until it is determined that there is no operation of the keyboard 22a or the mouse 22b or that a part of the X-ray measurement optical system 13 is not in the collision risk area A. Repeated. That is, when it is determined that a part of the X-ray measurement optical system 13 is in the collision risk area A, the X-ray detector 12 or the stage 14 is moved at a predetermined moving speed.

  On the other hand, when it is determined that a part of the X-ray measurement optical system 13 is not in the collision risk area A, the process returns to step S102. That is, when it is determined that the entire X-ray measurement optical system 13 is not in the collision risk area A, the X-ray detector 12 or the stage 14 is moved at a normal movement speed.

As described above, when a part of the X-ray measurement optical system 13 is in the collision risk area A, the moving speed of the stage 14 or the X-ray detector 12 is such that the entire X-ray measurement optical system 13 is in the collision risk area A. It becomes a predetermined moving speed slower than the moving speed when it is not entered. Therefore, the X-ray measurement optical system 13 can be brought close to the measurement object S while preventing a collision between the X-ray measurement optical system 13 and the measurement object S. At this time, even if the X-ray measurement optical system 13 and the object S to be measured collide, the movement speed of the stage 14 is a slow predetermined movement speed, so that the impact due to the collision can be suppressed, The X-ray measurement optical system 13 and the object to be measured S are not damaged.
Further, when the entire X-ray measurement optical system 13 is not in the collision risk area A, the moving speed of the stage 14 is fast, so that the operation of photographing a fluoroscopic X-ray image of the measurement object S can be performed quickly. .

  The present invention can be used for an X-ray inspection apparatus having a stage to be rotated.

It is a block diagram which shows the structure of the X-ray inspection apparatus which is one Embodiment of this invention. It is a side view of the to-be-measured object mounted in the stage of the X-ray inspection apparatus which concerns on this invention. FIG. 3 is a plan view of FIG. 2. It is a flowchart which shows an example of the movement speed control operation | movement of the X-ray inspection apparatus which concerns on this invention.

Explanation of symbols

1: X-ray inspection device 11: X-ray source (X-ray generator)
12: X-ray detector 13: X-ray measurement optical system 14: Stage 15: Drive unit 16: Optical camera 20: Control system (computer)
21: CPU
22: Input device 23: Display device 24: Image memory 31: X-ray image creation means 32: Collision risk area setting means 33: Collision determination means 35: Optical camera imaging control means 36: Object appearance shape extraction means 37: Trajectory Data extraction means 38: collision risk area calculation means 41: background image data storage means 42: trajectory image data storage means 43: collision risk area data storage means 52: moving speed control means

Claims (4)

An X-ray measurement optical system having an X-ray detector that captures a fluoroscopic X-ray image and an X-ray source that irradiates X-rays for fluoroscopy toward the X-ray detector;
A stage for placing an object to be measured between the X-ray detector and the X-ray source;
An X-ray inspection apparatus comprising a stage drive mechanism for rotating and translating the stage,
One optical camera for taking a visible light image of the object to be measured;
A collision risk area setting means for setting a collision risk area where the object to be measured and the X-ray measurement optical system may come into contact based on the visible light image photographed while rotating the stage;
Collision determination means for determining whether a part of the X-ray measurement optical system is in the collision risk area;
When it is determined that a part of the X-ray measurement optical system is in the collision risk area, the moving speed of the stage is the movement speed when the entire X-ray measurement optical system is not in the collision risk area. A moving speed control means for setting a slower predetermined moving speed ,
The collision risk area setting means creates, as the collision risk area, trajectory data indicating a rotating body figure of an object to be measured based on the visible light image photographed while rotating the stage. An X-ray inspection apparatus characterized by setting an object including a figure . An X-ray detector driving mechanism for moving the X-ray detector;
The moving speed control means determines the moving speed of the X-ray detector when all of the X-ray measuring optical system collides when it is determined that a part of the X-ray measuring optical system is in the collision risk area. The X-ray inspection apparatus according to claim 1, wherein the X-ray inspection apparatus has a predetermined moving speed that is lower than a moving speed when not entering the dangerous area. The collision risk area setting means sets, as the collision risk area, any one selected from a group of a cylinder, a sphere, an ellipsoid, and a cone, or an approximation of a combination of at least two The X-ray inspection apparatus according to claim 1 , wherein: When it is determined that a part of the X-ray measurement optical system has entered the collision risk area, the X-ray detector or the stage is provided with a collision warning means for stopping movement and generating a warning signal. The X-ray inspection apparatus according to any one of claims 1 to 3 .

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