JP4670700B2 - 3D shape measuring device - Google Patents

Description

  The present invention provides a three-dimensional shape imaging apparatus that irradiates a measurement object with light and outputs three-dimensional shape data representing the three-dimensional shape of the surface of the measurement object using reflected light from the measurement object. And a three-dimensional shape measuring apparatus for displaying a three-dimensional shape of a measurement object or calculating a characteristic value related to the three-dimensional shape based on the three-dimensional shape data.

Conventionally, there has been known a three-dimensional shape measuring apparatus that measures a three-dimensional surface shape of a measurement object by irradiating the measurement object with light such as laser light and receiving reflected light from the measurement object. Yes. Such a three-dimensional shape measuring apparatus irradiates the measurement object with light, receives reflected light from the measurement object, and outputs three-dimensional shape data representing the three-dimensional shape of the surface of the measurement object. A three-dimensional shape imaging device is provided. For example, in the three-dimensional shape measuring apparatus described in Patent Document 1 below, the measurement object is at a position corresponding to the laser light source that emits a constant amount of laser light and the distance from the laser light source to the surface of the measurement object. And a three-dimensional imaging device having a light receiving element array for receiving reflected light from the.
Japanese Patent Laid-Open No. 5-99617

  However, in such a three-dimensional shape measuring apparatus, when the surface of the measurement object irradiated with the laser beam is not orthogonal to the optical axis of the irradiated laser beam, in other words, the surface is a laser. The closer to parallel to the optical axis of light, the smaller the amount of reflected light received by the light receiving element array. For example, when the chamfered portion C of the edge of the measurement object shown in FIG. 11A and the curved surface portion R of the same edge shown in FIG. Since most of the laser light L irradiated to the chamfered portion C and the curved surface portion R is reflected in a direction different from the incident direction, the amount of reflected light guided to the light receiving element array is reduced. As a result, there is a problem that the measurement accuracy of the three-dimensional shape of the surface of the measurement object that is nearly parallel to the optical axis of the irradiated laser light is deteriorated. Specifically, for example, there is a problem that the hole diameter or groove width of the hole in the measurement object is measured larger than the actual hole diameter or groove width, or the outer shape of the measurement object is measured smaller than the actual outer shape. is there.

  The present invention has been made to address the above problems, and its purpose is to accurately measure the three-dimensional shape of the surface of the measurement object that is nearly parallel to the optical axis of the light emitted from the light source and applied to the measurement object. An object of the present invention is to provide a three-dimensional shape measuring apparatus that can measure well.

In order to achieve the above object, the present invention is characterized by irradiating a measurement object with a laser beam emitted from a laser light source while changing its direction , scanning the measurement object with the laser beam, and in the optical path of the emission laser beam. Distance detection comprising an imaging lens that condenses the reflected laser beam reflected and rotated by the object to be measured , and a sensor in which a plurality of light receiving elements for receiving the collected reflected laser beam are arranged. detecting the distance to the measurement object in the vessel, three-dimensional shape and outputs the three-dimensional shape data indicating a three-dimensional shape of the surface of the measurement object using the distance to be oriented to the detection of the emitted laser beam The laser beam emitted from the imaging device and the three-dimensional shape imaging device is reflected and guided to the measurement object from a different direction from the laser beam emitted from the three-dimensional shape imaging device and irradiated on the measurement target. From measurement object A reflection mirror that reflects reflected light and guides it to the three-dimensional shape imaging device, and a measurement object represented by three-dimensional shape data based on the reflected light that is guided from the measurement object to the three-dimensional shape imaging device via the reflection mirror 3D shape data for synthesizing the 3D shape of the surface of the object to the 3D shape of the surface of the measurement object represented by the 3D shape data based on the reflected light directly guided from the measurement object to the 3D shape imaging device And synthesizing means.

According to a feature of the thus constructed present invention, by reflecting by the reflecting mirror of the laser beam emitted from the three-dimensional shape image pickup apparatus, a laser for irradiating a directly emitted measurement object from the three-dimensional shape image pickup apparatus The object to be measured is irradiated with laser light from a direction different from that of the light. Then, the reflected light from the measurement object by the laser light irradiated from the same different direction is reflected again by the reflecting mirror, thereby guiding the reflected light to the three-dimensional shape imaging apparatus. That is, the measurement object is measured by irradiating the measurement object with laser beams from different directions. As a result, even when the optical axis of the laser beam that directly irradiates the measurement object from the three-dimensional shape imaging apparatus is nearly parallel to the irradiation surface of the measurement object, the laser beam is guided from a different direction from the laser beam. Reflected light from the measurement object can be guided to the three-dimensional shape imaging apparatus by the laser light. As a result, the three-dimensional shape of the surface of the measurement object that is nearly parallel to the optical axis of the laser light emitted from the laser light source and applied to the measurement object can be measured with high accuracy.

According to another aspect of the present invention, in the three-dimensional shape imaging apparatus, the reflection mirror causes the laser beam emitted from the three-dimensional shape imaging apparatus to be incident substantially perpendicularly on a specific part of the measurement target. It is in that. According to this, since the optical axis of the laser light irradiated through the reflection mirror is substantially orthogonal to the measurement object, more reflected light can be guided from the measurement object to the three-dimensional shape imaging apparatus. it can. As a result, the measurement object can be measured with higher accuracy.

Another feature of the present invention is that, in the three-dimensional shape imaging apparatus, the reflection mirror guides the laser light emitted from the three-dimensional shape imaging apparatus to two opposite surfaces of the measurement object, respectively. That is, the first and second reflecting mirrors are used. According to this, it is possible to irradiate laser light to two surfaces facing each other, for example, two side surfaces forming the groove portion, and to measure the groove portion with high accuracy. In this case, the inter-surface distance measuring means for measuring the inter-surface distance between the two surfaces facing each other in the measuring object using the three-dimensional shape of the measuring object synthesized by the three-dimensional shape data synthesizing means. It may be provided. According to this, the groove width of the groove part can be measured with high accuracy.

Another feature of the present invention is that in the three-dimensional shape imaging apparatus, the irradiation range on the measurement object of the laser light emitted from the three-dimensional shape imaging apparatus and irradiated on the measurement object, and the three-dimensional shape imaging apparatus The reflection mirror is provided so that the irradiation range on the measurement target object of the laser beam emitted from the laser beam and irradiated on the measurement target object via the reflection mirror overlaps. According to this, when measuring the whole surface of the measurement object arranged in the measurement object space of the three-dimensional shape imaging apparatus, the three-dimensional shape of the measurement object can be measured without omission.

Another feature of the present invention is that in the three-dimensional shape imaging apparatus, the position or direction of the optical axis of the laser light guided to the measurement object by the reflection mirror is changed. It is provided with an optical axis changing means for changing by this. According to this, even when measuring a plurality of measurement objects having different shapes, the position and orientation of the reflection mirror can be adjusted according to the shape of the measurement object.

  Hereinafter, an embodiment of a three-dimensional shape measuring apparatus according to the present invention will be described with reference to the drawings. FIG. 1 is a schematic diagram illustrating a basic configuration of a three-dimensional shape measuring apparatus that measures a gap between a workpiece WK1 and a workpiece WK2, which are measurement objects, and a step between the upper surface of the workpiece WK1 and the upper surface of the workpiece WK2. . Here, the workpiece WK1 and the workpiece WK2 are each formed in a flat plate shape, and are arranged adjacent to each other. End portions T1 and T2, which are side surfaces facing each other in the workpiece WK1 and the workpiece WK2, are each formed in an arc shape. FIG. 1 shows a part of the workpieces WK1 and WK2 around the gap between the workpiece WK1 and the workpiece WK2. The three-dimensional shape measuring apparatus includes a three-dimensional shape imaging device 10 that measures the three-dimensional shapes of the workpieces WK1 and WK2.

  The three-dimensional shape imaging apparatus 10 is formed in a box shape, emits laser light toward the workpieces WK1 and WK2, and receives reflected light from the workpieces WK1 and WK2, and receives the three-dimensional shapes of the workpieces WK1 and WK2. Measurement information representing the measurement result is output by measuring the three-dimensional surface shape. As this three-dimensional shape imaging device 10, any three-dimensional shape measuring device can be used as long as it measures the three-dimensional surface shape of the workpieces WK1 and WK2 and outputs a signal representing the measured three-dimensional surface shape. it can. In the present embodiment, a brief description will be given of measuring a three-dimensional surface shape of an object according to a triangulation method using laser light.

  In this three-dimensional shape imaging apparatus, a virtual plane that is substantially perpendicular to the traveling direction of laser light emitted from a laser light source toward an object is assumed, and an X-axis direction and a Y-axis that are orthogonal to each other on the virtual plane. Assume a large number of minute areas divided along the direction. The three-dimensional shape imaging apparatus sequentially irradiates the plurality of minute areas with laser light, sequentially detects the distance to the object surface defined by the minute areas by reflected light from the object as a Z-axis direction distance, Information on X, Y, and Z coordinates representing each divided area position obtained by dividing the surface of the object into minute areas is obtained, and the shape of the object surface facing the same three-dimensional shape imaging apparatus is measured.

  Accordingly, the three-dimensional shape imaging apparatus includes an X-axis direction scanner that changes the direction of the emitted laser light in the X-axis direction, a Y-axis direction scanner that changes the direction of the emitted laser light in the Y-axis direction, and an object surface. And a distance detector for detecting the distance to the object surface by receiving the reflected laser beam reflected by the. The X-axis direction scanner and the Y-axis direction scanner may be any mechanism that can change the optical path of the laser beam emitted from the laser light source independently in the X-axis direction and the Y-axis direction. Rotate by an electric motor around the axis in the axial direction and the Y-axis direction, or rotate a galvano mirror provided in the optical path of the emitted laser light and changing its direction by an electric motor around the axis in the X-axis direction and the Y-axis direction The mechanism is available. As the distance detector, a plurality of imaging lenses such as an imaging lens that condenses the reflected laser light reflected on the object surface and rotates following the optical path of the emitted laser light, and a CCD that receives the condensed laser light are used. It is possible to use a mechanism for detecting the distance to the object surface based on the light receiving position of the reflected laser beam by the line sensor.

  Therefore, such a three-dimensional shape imaging apparatus uses the reference direction of the laser beam emitted by the X-axis direction scanner as information on the X, Y, and Z coordinates representing the divided area positions obtained by dividing the surface of the object into minute areas. The inclination θx in the X-axis direction with respect to the angle, the inclination θy in the Y-axis direction with respect to the reference direction of the laser beam emitted by the Y-axis direction scanner, and the distance Lz to the object surface by the distance detector are the virtual X-axis direction. And output for each of a large number of minute areas divided along the Y-axis direction. More specifically, the inclinations θx and θy in the X-axis and Y-axis directions are rotation angles from the reference position of the electric motor. Further, the distance Lz to the object surface is the light receiving position of the reflected laser beam in the line sensor.

  This three-dimensional shape imaging apparatus 10 is supported by a support tool 20. The support 20 includes a support column 22 provided in a vertical direction on a base 21 on a flat plate. The three-dimensional imaging device 10 is fixed to the support 22 in a direction in which laser light is emitted toward the base 21 side, and a rod-shaped first arm 24 is horizontally connected to a lower portion of the support 22 via a joint 23. In the direction. The joint 23 can fix the first arm 24 in an arbitrary direction around the axis of the column 22 at an arbitrary position between the three-dimensional shape imaging device 10 and the base 21 on the column 22. The joint 23 is provided with a handle 23a, and the first arm 24 can be fixed and displaceable with respect to the column 22 by rotating the handle 23a.

  At both ends of the first arm 24, rod-shaped second arms 27 and 28 are provided in a state orthogonal to the first arm 24 via joints 25 and 26, respectively. The joints 25 and 26 can fix the second arms 27 and 28 at arbitrary positions between the end portions of the first arm 24 and the joints 23 in arbitrary directions around the axis of the first arm 24, respectively. It is like that. The joints 25 and 26 can fix the second arms 27 and 28 at arbitrary angles around the axes of the second arms 27 and 28, respectively. The joints 25 and 26 are provided with handles 25a and 26a, respectively, and the second arms 27 and 28 can be fixed and displaced with respect to the first arm 24 by rotating the handles 25a and 26a, respectively. Can be in a state. Further, by rotating the handles 25a and 26a, the second arms 27 and 28 can be fixed and displaceable around the respective axes of the second arms 27 and 28. Each central part of the second arms 27 and 28 is formed in a quadrangular prism shape, and flat reflecting mirrors 31 and 32 are fixed to one side surface of the portion formed in the quadrangular column shape.

  The reflection mirrors 31 and 32 are formed in a rectangular flat plate shape, reflect the laser light emitted from the three-dimensional shape imaging apparatus 10 and guide it to the workpieces WK1 and WK2, and the reflected light from the workpieces WK1 and WK2. This is a mirror for reflecting the light to the three-dimensional shape imaging apparatus 10. These reflection mirrors 31 and 32 are positioned in the measurement target space of the three-dimensional shape imaging apparatus 10 by adjusting the positions of the first arm 24 and the second arms 27 and 28 and the angles around the respective axes. Be placed.

  A controller 41 and a three-dimensional image processing device 42 are connected to the three-dimensional shape imaging device 10. The controller 41 controls the operation of the three-dimensional shape imaging apparatus 10 in accordance with an instruction from the input device 43 that is a keyboard. Further, the controller 41 controls the operation of the three-dimensional image processing device 42 in accordance with an instruction from the input device 43 and supplies data input through the input device 43 to the three-dimensional image processing device 42.

The three-dimensional image processing device 42 is configured by a computer device and calculates the shape data synthesis function F _S by executing the program shown in FIG. 3 and performs measurement by executing each program shown in FIGS. 7 and 9. Three-dimensional shape data for displaying a three-dimensional image of an object located in the target space is generated, a gap between the workpiece WK1 and the workpiece WK2 located in the measurement target space, and an upper surface of the workpiece WK1 The level difference from the upper surface of the workpiece WK2 is calculated. A display device 44 is connected to the three-dimensional image processing device 42. The display device 44 is configured by a liquid crystal display or a CRT, and the value of the gap between the workpiece WK1 and the workpiece WK2 output from the three-dimensional image processing device 42, and the level difference between the upper surface of the workpiece WK1 and the upper surface of the workpiece WK2. And a three-dimensional image of an object located in the measurement target space based on the three-dimensional image data output from the three-dimensional image processing device 42.

  Next, the operation of the three-dimensional shape measuring apparatus configured as described above will be described. First, the operator adjusts the position and orientation of the reflection mirrors 31 and 32. As shown in FIG. 1, the operator arranges the three-dimensional shape measuring device in the gap between the workpieces WK1 and WK2 arranged adjacent to each other, and the first arm 24 and the second arm 27 are arranged. , 28 and the angle around each axis are displaced to adjust the position and orientation of the reflecting mirrors 31, 32. Specifically, the position and orientation of the reflection mirror 31 are adjusted so that the optical axis of the laser beam emitted from the three-dimensional shape imaging apparatus 10 and reflected by the reflection mirror 31 is perpendicular to the surface of the end T2 of the workpiece WK2. adjust. That is, the position and orientation of the reflection mirror 31 are adjusted so that the laser light is irradiated from the vertical direction to the surface of the end T2 of the workpiece WK2. Further, the position and orientation of the reflection mirror 32 are adjusted so that the optical axis of the laser light emitted from the three-dimensional shape imaging apparatus 10 and reflected by the reflection mirror 32 is perpendicular to the surface of the end T1 of the workpiece WK1. That is, the position and orientation of the reflection mirror 32 are adjusted so that the laser light is irradiated from the vertical direction with respect to the surface of the end portion T1 of the workpiece WK1. Note that the end portions T1 and T2 of the workpieces WK1 and WK2 are specific portions according to the present invention.

Next, as shown in FIG. 2, the operator places the three-dimensional shape measuring device on the flat plate jig JG1 formed in a flat plate shape, and operates the input device 43 to set the three-dimensional image processing device 42. The calculation of the shape data synthesis function F _S is instructed. Shape data combining function F _S is three-dimensional shape data that is generated based on the reflected light is guided to the three-dimensional shape image pickup device 10 via the reflecting mirrors 31 and 32 (hereinafter, referred to as "indirect three-dimensional shape data") by Three-dimensional shape data (hereinafter referred to as “direct three-dimensional shape data”) generated based on reflected light that is directly guided from the workpieces WK1 and WK2 to the three-dimensional shape imaging device 10 as the three-dimensional shapes of the workpieces WK1 and WK2 represented. Is a function for synthesizing the workpieces WK1 and WK2 into a three-dimensional shape. In this case, the direct 3D shape data is 3D shape data represented by a camera coordinate system C which is a coordinate system related to the 3D shape imaging apparatus 10. Here, the camera coordinate system C is a three-dimensional coordinate system that includes three coordinate axes (X axis, Y axis, and Z axis) that are orthogonal to each other and that has a specific point of the three-dimensional shape imaging apparatus 10 as an origin.

Indirect three-dimensional shape data is also calculated as three-dimensional shape data by the camera coordinate system C. In this calculation, the traveling directions of the laser light and the reflected light are changed by the reflection mirrors 31 and 32. It is not considered. That is, the indirect three-dimensional shape data is reflected by the workpieces WK1 and WK2 after the laser light emitted from the three-dimensional shape imaging device goes straight through the reflection mirrors 31 and 32 and reaches the workpieces WK1 and WK2. Thus, the data is calculated as if the straight line is passed through without passing through the reflecting mirrors 31 and 32 and is guided to the three-dimensional shape imaging apparatus 10. In other words, the indirect three-dimensional shape data is obtained by a coordinate system C ′, C ″ (hereinafter referred to as camera coordinate system C ′, C ″) different from the camera coordinate system C existing for each of the reflection mirrors 31, 32. It can be said that it is the represented three-dimensional shape data. Therefore, in order to synthesize the three-dimensional shape of the workpieces WK1 and WK2 directly represented by the three-dimensional shape data and the three-dimensional shape of the workpieces WK1 and WK2 represented by the indirect three-dimensional shape data, both three-dimensional shapes The data needs to be three-dimensional shape data in the same coordinate system. Shape data combining function F _S is the coordinate transformation to the coordinate values of the indirect three-dimensional shape data camera coordinate system C ', C' to the coordinate value of the camera coordinate system C is a coordinate system of the three-dimensional shape data directly from the coordinate value by ' It is a function to do.

In response to the instruction to calculate the shape data synthesis function F _S , the three-dimensional image processing device 42 starts execution of the shape data synthesis function F _S calculation program shown in FIG. Then, input of measurement information of the flat jig JG1 is awaited. In this case, the operator uses the sheets 33 and 34 that hardly reflect light (the reflectance is very low) on the reflecting surfaces of the reflecting mirrors 31 and 32 prior to inputting measurement information of the flat jig JG1 in step S102. cover. The three-dimensional shape imaging apparatus 10 starts measurement of the upper surface of the flat plate jig JG1 in response to an instruction from the controller 41. Specifically, the three-dimensional shape imaging apparatus 10 has an X axis from the XY coordinate origin (on the reflection mirror 31 side and the support tool 20 side) in the camera coordinate system C that is a coordinate system related to the three-dimensional shape measurement apparatus 10. Laser beam scanning is started in the direction (on the reflection mirror 32 side), and the plate is scanned while the line for scanning the laser beam in the X-axis direction is sequentially shifted in the Y-axis direction (on the reflection mirrors 31 and 32 side with respect to the support 20). Measure the upper surface of the tool JG1.

  In this case, as shown in FIG. 4 (A), most of the laser light emitted from the three-dimensional shape imaging apparatus 10 toward the reflection mirrors 31 and 32 is absorbed by the sheets 33 and 34. A very small amount of laser light is guided to the tool JG1. And most of the reflected light reflected from the flat jig JG1 toward the reflecting mirrors 31 and 32 is absorbed by the sheets 33 and 34, so that the reflected light guided to the three-dimensional imaging device 10 (hereinafter, referred to as “light reflected”). There is almost no “indirect reflected light”. That is, as shown in FIG. 4B, most of the reflected light from the flat plate jig JG1 guided to the three-dimensional shape imaging device 10 is directly emitted from the three-dimensional shape imaging device 10 to the flat plate jig JG1. This is reflected light by light (hereinafter referred to as “directly reflected light”).

  The three-dimensional shape imaging device 10 outputs information representing the three-dimensional shape of the upper surface of the flat plate jig JG1 based on the received reflected light to the three-dimensional image processing device 42. That is, the information (specifically, the inclinations θx, θy and the distance Lz) regarding the XYZ coordinates representing the divided area positions obtained by dividing the upper surface of the flat jig JG1 into minute areas is obtained as a three-dimensional image processing device 42. Respectively. In this case, the information about the XYZ coordinates based on the directly reflected light has the same inclinations θx and θy and the distance Lz, but the information about the XYZ coordinates based on the indirect reflected light is the reflecting mirrors 31 and 32. The distance Lz is missing as incapable of measurement, and only the inclinations θx and θy are obtained.

  Next, the three-dimensional image processing apparatus 42 specifies the positions of the reflection mirrors 31 and 32 in step S104. Specifically, information regarding the XYZ coordinates from which the distance Lz is missing (ie, inclination θx, θy data) is extracted from the information regarding the input XYZ coordinates. In this case, the extracted inclinations θx and θy correspond to the positions of the reflection mirrors 31 and 32, respectively. Since there is no inclination θx data in the region where the directly reflected light between the reflection mirror 31 and the reflection mirror 32 is detected, the inclination θx can be classified into two groups. The three-dimensional image processing apparatus 42 classifies the inclination θx data into two groups, and stores the inclination θx and θy data extracted with the larger value corresponding to the reflecting mirror 31 and the smaller value corresponding to the reflecting mirror 32. To do.

  Next, in step S106, the three-dimensional image processing apparatus 42 waits for input of measurement information of the flat plate jig JG2. As shown in FIG. 5, the flat plate jig JG2 is formed in a flat plate shape, and a groove portion M having a predetermined depth is formed on the upper surface thereof. Two side surfaces T3 and T4 of the groove M facing each other are orthogonal to the upper surface of the flat plate jig JG2. That is, the groove portion M is a groove having a predetermined depth in a direction orthogonal to the upper surface of the flat plate jig JG2. When inputting the measurement information of the flat plate jig JG2 in step S106, the operator removes the sheets 33 and 34 from the reflection mirrors 31 and 32, and also has a three-dimensional shape on the groove M formed on the upper surface of the flat plate jig JG2. More specifically, the measurement device is arranged, and more specifically, the three-dimensional shape at a position where the laser light emitted from the three-dimensional shape imaging device 10 and guided through the reflection mirrors 31 and 32 is guided to the side surfaces T3 and T4 of the groove M. A measuring device is arranged to instruct the 3D image processing device 42 via the input device 43 to measure the flat plate jig JG2.

  In response to this instruction, the three-dimensional shape imaging apparatus 10 starts measuring the upper surface of the flat plate jig JG2 in the same manner as described above, and displays information representing the three-dimensional shape of the upper surface of the flat plate jig JG2 as a three-dimensional image. The data is output to the processing device 42. That is, as in step S102, information about XYZ coordinates (specifically, inclinations θx, θy, and distance Lz) representing each divided area position obtained by dividing the upper surface of the flat plate jig JG2 into minute areas. Are output to the three-dimensional image processing apparatus 42, respectively. In this case, the laser light emitted from the three-dimensional shape imaging apparatus 10 toward the reflection mirrors 31 and 32 is guided to the flat plate jig JG2 via the reflection mirrors 31 and 32 and reflected from the flat plate jig JG2. Light is guided to the three-dimensional shape imaging apparatus 10 via the reflection mirrors 31 and 32. The laser beam emitted from the three-dimensional shape imaging device 10 toward the flat plate jig JG2 is directly guided to the flat plate jig JG2, and is reflected by the flat plate jig JG and directly to the three-dimensional shape imaging device 10. Led. Then, the three-dimensional image processing device 42 represents the three-dimensional shape of the upper surface of the flat plate jig JG2 based on the information regarding the XYZ coordinates output from the three-dimensional shape imaging device 10 in step S106. Three-dimensional shape data including a three-dimensional shape data group is generated. In this case, as described above, the direct three-dimensional shape data is represented by the camera coordinate system C, and the indirect three-dimensional shape data is represented by the camera coordinate systems C ′ and C ″.

Next, in step S108, the three-dimensional image processing device 42 generates planes P _D , P _I1 , P _I2 representing the upper surface of the flat plate jig JG2 for each of the direct three-dimensional shape data and the two indirect three-dimensional shape data. Define each. Since the processes for defining these planes P _D , P _I1 , and P _I2 are respectively performed by the same process, the definition process of the plane P _D will be described. In this case, the three-dimensional image processing device 42 uses the generated three-dimensional shape data for the inclination θx and θy data corresponding to the reflection mirror 31 specified in step S104 and the inclination θx and θy corresponding to the reflection mirror 32. After the data is classified into direct 3D shape data that is 3D shape data based on directly reflected light and indirect 3D shape data that is 3D shape data based on two indirect reflected lights, Each definition process of P _D , P _I1 , P _I2 is executed. Defining process of this plane P _D consists processing of the next sub-step 1-3.

  Sub-step 1: The three-dimensional image processing device 42 is directly closest to the three-dimensional shape data having the smallest Z coordinate value among the three-dimensional shape data, that is, the three-dimensional shape imaging device 10 (the origin of the camera coordinate system C). Three-dimensional shape data is extracted. Thereby, any one three-dimensional shape data on the upper surface of the flat plate jig JG2 is extracted.

Sub-step 2: The 3D image processing device 42 directly extracts at least two 3D shape data belonging to a predetermined range with respect to the Z coordinate value of the extracted 3D shape data from the 3D shape data. To do. Then, these three or more three-dimensional shape data are respectively substituted into the plane equation shown in the following equation 1, and the unknowns a, b, and c are calculated by the least square method to define the provisional plane P ′.

Sub-step 3: The three-dimensional image processing apparatus 42 extracts all the three-dimensional shape data belonging to a predetermined range with respect to the defined provisional plane P ′ from the direct three-dimensional shape data, and extracts the same. If the number of the three-dimensional shape data is equal to or greater than the predetermined number, the extracted three-dimensional shape data is expressed as the above-described equation 1 assuming that the extracted three-dimensional shape data is the three-dimensional shape data representing the upper surface of the flat plate jig JG2. The plane is defined again by substituting into the formula of the plane and calculating a, b, and c by the method of least squares. Then, stored this defined plane and (a, b, values of c) as a plane P _D which represents the upper surface of the plate jig JG2. On the other hand, when the number of the extracted three-dimensional shape data is less than the predetermined number, the first extracted three-dimensional shape data is not the three-dimensional shape data representing the upper surface of the flat plate jig JG2, and the first extracted three-dimensional shape data is 3 A plane is defined by the least square method by substituting again three-dimensional shape data different from the dimension shape data into the plane formula shown in Formula 1. Then, the defined plane as a new provisional plane P ', to the plane P _D is defined repeatedly executes the processing in this sub-step 3.

The three-dimensional image processing apparatus 42, for planar P _I1, P _I2 as described above even by using two indirect three-dimensional shape data, defines respectively in the same manner as described above. Thereby, planes P _D , P _I1 , P _I2 representing the upper surface of the flat plate jig JG2 are defined for each of the direct three-dimensional shape data and the two indirect three-dimensional shape data. Next, in step S110, the three-dimensional image processing apparatus 42 uses three vectors (A _D , B _D , C _D ), (A _I1 , B B for each of the planes P _D , P _I1 , P _I2 defined above. _I1 , C _I1 ) and (A _I2 , B _I2 , C _I2 ) are defined respectively. Each of these three vector definition processes includes the following sub-steps 1 to 4.

Substep 1: The three-dimensional image processing device 42 defines vectors A _D , A _I1 , and A _I2 . Specifically, the three-dimensional image processing apparatus 42 _divides each of a, b, and c in Formula 1 representing the respective planes P _D , P _I1 , and P _I2 by the square root of (a ² + b ² + c ² ). Vectors whose values are vector components, that is, unit vectors of the respective normal vectors in the planes P _D , P _I1 , and P _I2 are set as vectors A _D , A _I1 , and A _I2 , respectively. In this case, the vectors A _D , A _I1 , and A _I2 are vectors directed from the planes P _D , P _I1 , and P _I2 to the three-dimensional shape imaging apparatus 10, respectively. The vectors A _D , A _I1 , A _I2 may be vectors from the three-dimensional shape imaging apparatus 10 toward the planes P _D , P _I1 , P _I2 .

Sub-step 2: The 3D image processing device 42 defines a vector _BD . Specifically, the three-dimensional image processing device 42 directly determines the three-dimensional data immediately before the change amount of each Z coordinate value in the three-dimensional shape data adjacent to each other directly from the three-dimensional shape data exceeds a predetermined range. Extract shape data. Thereby, the three-dimensional shape data representing each edge portion where the upper surface of the flat plate jig JG2 and the side surfaces T3 and T4 are orthogonal to each other is extracted along the groove portion M. The three-dimensional image processing device 42 calculates the unknowns a, b, and c by the least square method by substituting the extracted three-dimensional shape data representing the respective edge portions into the straight line equation shown in the following equation (2). A unit vector of a vector (vector parallel to the edge of the groove M) having the calculated a, b, and c as vector components is set as a vector _BD .

Substep 3: The three-dimensional image processing device 42 defines vectors B _I1 and B _I2 . Specifically, the three-dimensional image processing device 42 belongs to a predetermined range from the planes P _I1 and P _I2 among the indirect three-dimensional shape data, and the upper surface (planes P _I1 and P _{I2 of the} flat plate jig JG2. The three-dimensional shape data defining the portions other than) are respectively extracted. Thereby, three-dimensional shape data representing a part of the side surfaces T3 and T4 orthogonal to the upper surface of the flat plate jig JG2 is extracted. The three-dimensional image processing device 42 substitutes the extracted three-dimensional shape data representing the side surfaces T3 and T4 into the plane equation shown in the equation 1, and calculates the unknowns a, b, and c by the least square method. define respective planes _{P T3, P T4} representing a side T3, T4 by. Then, the three-dimensional image processing device 42 calculates Formula 2 that represents a straight line of each edge portion where the planes P _I1 and P _I2 and the planes P _T3 and P _T4 are orthogonal to each other, and the calculated a, b, A unit vector of a vector having c as a vector component (a vector parallel to the respective edge portions) is defined as vectors B _I1 and B _I2 . In this case, these vectors B _D , B _I1 , and B _I2 are vectors directed to the positive side in the scanning direction of the Y coordinate direction of the laser light emitted from the three-dimensional shape imaging apparatus 10. The vectors B _D , B _I1 , and B _I2 may be vectors that go to the negative side in the scanning direction of the Y coordinate direction of the laser light emitted from the three-dimensional shape imaging apparatus 10.

Substep 4: three-dimensional shape measurement device 42 defines a vector _{C D, C I1, C I2} . Specifically, the three-dimensional image processing apparatus 42, a vector that is calculated by the cross product between the vector A _D and the vector B _D and the vector C _D. A vector calculated by the outer product of the vector A _I1 and the vector B _I1 is a vector C _I1, and a vector calculated by the outer product of the vector A _I2 and the vector B _I2 is a vector C _I2 .

Next, in step S112, the three-dimensional image processing device 42 calculates a rotation component M _FS in the shape data synthesis function F _S. The rotation component _MFS includes a first coordinate system composed of X, Y, and Z coordinates and a second coordinate system obtained by rotating the first coordinate system about the X, Y, and Z axes by θx, θy, and θz, respectively. This is a function for specifying the relationship of the orientation of the coordinate axes between the two coordinate systems, that is, θx, θy, θz. If one vector in the first coordinate system is (αa, βa, γa) and the one vector in the second coordinate system is (αb, βb, γb), the following equation 3 is established between the two vectors. The relationship shown is established. In the following formula 3, M is a matrix value corresponding to the rotation component _MFS and represented by the following formula 4. In this case, it is assumed that the vector (αa, βa, γa) and the vector (αb, βb, γb) have the same size.

The calculation of the rotation component M _FS of the coordinate axis in the shape data synthesis function F _S in step S112 is performed by calculating the matrix value M (M = g ₁₁ , g ₁₂ , g ₁₃ , g ₂₁ , g ₂₂ , g ₂₃ , g ₃₁ , g ₃₂ , g ₃₃ ) is calculated. That is, assuming three vectors A, B, and C that are not in the same direction between the two coordinate systems, the components A ₁ , B ₁ , and A ₃ in the first coordinate system of these three vectors A, B, and C Let C ₁ be (α1, β1, γ1), (α2, β2, γ2), (α3, β3, γ3), and each component A _{2 of the} three vectors A, B, C in the second coordinate system. , B ₂ , C ₂ are (α′1, β′1, γ′1), (α′2, β′2, γ′2), (α′3, β′3, γ′3). For example, the following expressions 5 to 7 are established.

The matrix value M can be calculated by solving the nine simultaneous equations of Equations 5 to 7. In the present embodiment, the vector _{A D,} B D, each vector component of _{C D (α'1, β'1, γ'1} ), (α'2, β'2, γ'2), ( α′3, β′3, γ′3), and the vectors A _I1 , B _I1 , C _I1 and the vectors A _I2 , B _I2 , C _I2 are respectively (α1, β1, γ1), (α2, β2, If (γ 2), (α 3, β 3, γ 3), the rotation component M _FS in the shape data synthesis function F _S for directly synthesizing the indirect 3D shape data based on the reflection mirrors 31 and 32 into the 3D shape data is Each can be calculated. That is, the vector A _D in the camera coordinate system C of the three vectors defined on the plane _P, B _D, and vector C _D in the second coordinate system, the three vectors defined on the same plane P If the vectors A _I1 , B _I1 , C _I1 and A _I2 , B _I2 , C _I2 in the camera coordinate system C ′, C ″ are vectors in the first coordinate system, the camera coordinate system C ′, C ″ The rotation component in the coordinate conversion function for converting the coordinate value in to the coordinate value in the camera coordinate system C can be calculated as the rotation component _MFS .

  Next, in step S114, the three-dimensional image processing device 42 waits for input of measurement information of the fixed point setting jig JG3. As shown in FIG. 6, the fixed point setting jig JG3 is formed in a true sphere, and is used to set a fixed point in the measurement target space of the three-dimensional image capturing apparatus 10. The operator places the fixed point setting jig JG3 on the groove M of the flat plate jig JG2 in the measurement target space of the three-dimensional image pickup device 10 when inputting the measurement information of the fixed point setting jig JG3 in step S114. The measurement of the fixed point setting jig JG3 is instructed to the three-dimensional image processing device 42 via the input device 43.

  In response to this instruction, the three-dimensional shape imaging apparatus 10 starts measurement of the fixed point setting jig JG3 and outputs information representing the three-dimensional shape of the fixed point setting jig JG3 to the three-dimensional image processing apparatus 42. That is, similarly to the steps S102 and S106, information about the XYZ coordinates (specifically, the inclinations θx, θy and the slopes) representing each divided area position obtained by dividing the upper surface of the fixed point setting jig JG3 into minute areas. The distance Lz) is output to the three-dimensional image processing device 42, respectively. In this case, the three-dimensional shape imaging apparatus 10 outputs information related to the XYZ coordinates based on the direct reflected light and the two indirect reflected lights to the three-dimensional image processing apparatus 42 as described above. Then, the three-dimensional image processing device 42 represents a three-dimensional shape representing the three-dimensional shape of the fixed point setting jig JG3 based on the information about the XYZ coordinates output from the three-dimensional shape imaging device 10 in step S114. Three-dimensional shape data consisting of a shape data group is generated. In this case, as described above, the direct three-dimensional shape data is represented by the camera coordinate system C, and the indirect three-dimensional shape data is represented by the camera coordinate systems C ′ and C ″. In the three-dimensional shape data, in addition to the fixed point setting jig JG3, a three-dimensional shape representing the shape of another object (for example, the upper surface of the flat plate jig JG2) existing around the identification point setting jig JG3. Data is also included.

  Next, in step S116, the three-dimensional image processing device 42 obtains three-dimensional shape data representing the three-dimensional shape of the fixed point setting jig JG3 from the direct three-dimensional shape data and the two indirect three-dimensional shape data. Extract each one. In this case, the direct three-dimensional shape data and the two indirect three-dimensional shape data are classified using the inclination θx and θy data corresponding to the reflection mirrors 31 and 32 specified in step S104, respectively, as described above. . The extraction process of the three-dimensional shape data representing the three-dimensional shape of the fixed point setting jig JG3 is performed by executing a fixed point setting jig extraction subprogram (not shown). The processing contents of the fixed point setting jig extraction subprogram will be briefly described.

  The three-dimensional image processing apparatus 42 sets a unit block and a search block using data indicating that the fixed point setting jig JG3 is a sphere and data indicating the diameter of the sphere. The unit block is a minimum block for moving the search block in order to specify the position of the fixed point setting jig JG3, and the search block is used to specify the position that includes the fixed point setting jig JG3. It is a collection of unit blocks. The three-dimensional image processing device 42 three-dimensionally divides the measurement target space of the three-dimensional shape imaging device 10 by the size of the unit block, and sequentially moves the search block in the measurement target space to be included in the search block. The number of unit blocks including three-dimensional shape data among the unit blocks to be counted is counted. According to the counted number of unit blocks, it is determined whether or not the 3D shape data included in the search block is 3D shape data including the entire fixed point setting jig JG3, and the entire fixed point setting jig JG3. When it is determined that the three-dimensional shape data includes the three-dimensional shape data in the search block. This technique is already well known and is described in, for example, Japanese Patent Application Laid-Open No. 2004-333371.

  In addition to the method for extracting the fixed point setting jig JG3 described above, three-dimensional shape data representing the three-dimensional shape of the fixed point setting jig JG3 is extracted using the amount of reflected light from the fixed point setting jig JG3. You can also. In this case, the light amount of the reflected light from the fixed point setting jig JG3 is detected in advance, and the light amount of the reflected light is set in the three-dimensional image processing device 42. The three-dimensional shape imaging apparatus 10 detects the amount of reflected light from the fixed point setting jig JG3 in addition to the information about the XYZ coordinates (specifically, the inclinations θx, θy and the distance Lz). The three-dimensional shape data that matches the set light amount may be extracted.

Next, in step S118, the three-dimensional image processing device 42 uses the extracted three-dimensional shape data representing the fixed point setting jig JG3 to use the center coordinates of the fixed point setting jig JG3 for each three-dimensional shape data. Are calculated as the coordinates of the fixed points T _D , T _I1 , T _I2 , respectively. Specifically, each of the extracted three-dimensional shape data is assigned to the left side of Equation 8 below, and the unknowns a, b, and c are used as the coordinates of the fixed points T _D , T _I1 , T _I2 using the least square method. calculate. In this case, a, b, and c represent the center coordinates of the sphere represented by the three-dimensional shape data, that is, the fixed point setting jig JG3. In the above equation 8, d represents the radius of the fixed point setting jig JG3, but it is not necessary to calculate in the process of step S118.

Next, in step S120, the three-dimensional image processing device 42 calculates an origin deviation component G _FS in the shape data synthesis function F _S. The origin deviation component G _FS represents a vector component (a, b, c) from the origin of the first coordinate system to the origin of the second coordinate system by the second coordinate system. In other words, after the orientation of the coordinate axis of the first coordinate system is matched with the orientation of the coordinate axis of the second coordinate system by coordinate transformation by the rotation component M _FS , the origin of the first coordinate system is set to the The amounts a, b, and c are used to move the origin of the first coordinate system in the X-axis direction, the Y-axis direction, and the Z-axis direction, respectively, in order to match the origin of the second coordinate system. One coordinate value in the first coordinate system is (x, y, z), and a coordinate value corresponding to the one coordinate value in the second coordinate system is (x ′, y ′, z ′). For example, the relationship shown in the following formula 9 is established between the two coordinate values. In the following formula 9, M is a matrix value corresponding to the rotation component _MFS .

The calculation of the origin deviation component G _FS in the shape data composition function F _S in step S120 means that a, b, and c in Equation 9 are calculated. That is, the coordinate value coordinate values T _D of the camera coordinate system C of the fixed point calculated based on the direct three-dimensional shape data in the first coordinate system (x, y, z) and, in the indirect three-dimensional shape data If the coordinate values T _I1 and T _I2 of the fixed point camera coordinates system C ′ and C ″ calculated based on the second coordinate system are (x ′, y ′, z ′), the above equation By substituting these coordinate values into 9 and solving the simultaneous equations, the origin deviation component G _FS in the shape data synthesis function F _S for directly synthesizing the indirect 3D shape data based on the reflection mirrors 31 and 32 into the 3D shape data is obtained. (A, b, c) can be obtained respectively. Thereby, the shape data synthesis function F _S1 for directly synthesizing the indirect 3D shape data based on the reflection mirror 31 into the 3D shape data, and the indirect 3D shape data based on the reflection mirror 32 are directly synthesized into the 3D shape data. shape data combining function F _S2 to become the calculated as the shape data combining function F _S.

Next, three-dimensional image processing apparatus 42, at step S122, and stores the shape data synthesis function _{F S} consisting of the calculated geometry data combining function _{F S1} and shape data combining function _{F S2.} In step S124, the three-dimensional image processing apparatus 42 ends the execution of the shape data synthesis function F _S calculation program.

After execution of this shape data combining function F _S calculation program, the operator, the measurement of the work WK1, WK2 that is the measuring object, more specifically, between the end T2 of the end T1 and the workpiece WK2 work WK1 The gap between them and the level difference between the upper surface of the workpiece WK1 and the upper surface of the workpiece WK2 are measured. As shown in FIG. 1, the operator places the three-dimensional shape measuring device on the gap between the workpieces WK1 and WK2, and operates the input device 43 to instruct measurement of the workpieces WK1 and WK2. In this case, the operator scans in the X-axis direction of the laser light emitted from the three-dimensional shape imaging apparatus 10 with respect to the longitudinal direction of the gap between the end T1 of the work WK1 and the end T2 of the work WK2. The three-dimensional shape measuring device is arranged so that are substantially orthogonal.

  In response to the instruction to measure the workpieces WK1 and WK2, the three-dimensional image processing apparatus 42 starts executing the workpiece measurement program shown in FIG. 7 in step S200, and in step S202, the workpieces WK1 and WK2 are executed. Wait for input of measurement information. The three-dimensional shape imaging apparatus 10 starts measuring the workpieces WK1 and WK2 in the same manner as described above. Specifically, the three-dimensional shape imaging apparatus 10 has an X axis from the XY coordinate origin (on the reflection mirror 31 side and the support tool 20 side) in the camera coordinate system C that is a coordinate system related to the three-dimensional shape measurement apparatus 10. The workpiece WK1 starts scanning the laser beam in the direction (on the reflection mirror 32 side) and sequentially shifts the line for scanning the laser beam in the X-axis direction in the Y-axis direction (on the reflection mirrors 31 and 32 side with respect to the support 20). , Measure each upper surface of WK2.

  The laser light emitted from the three-dimensional shape imaging apparatus 10 toward the reflection mirror 31 is guided to the workpieces WK1 and WK2 via the reflection mirror 31, as shown in FIG. In this case, since the laser light guided to the workpieces WK1 and WK2 by the reflecting mirror 31 is incident substantially perpendicularly to the end T2 of the workpiece WK2, the reflected light from the end T2 of the workpiece WK2 passes through the reflecting mirror 31. To the three-dimensional shape imaging apparatus 10. That is, the three-dimensional shape imaging apparatus 10 can measure the shape of the end portion T2 of the workpiece WK2 with the indirectly reflected light from the reflection mirror 31. Further, the laser light emitted from the three-dimensional shape imaging apparatus 10 toward the reflection mirror 32 is guided to the workpieces WK1 and WK2 via the reflection mirror 32 as shown in FIG. 8B. In this case, since the laser light guided to the workpieces WK1 and WK2 by the reflection mirror 32 is incident substantially perpendicular to the end T1 of the workpiece WK1, the reflected light from the end T1 of the workpiece WK1 passes through the reflection mirror 32. To the three-dimensional shape imaging apparatus 10. That is, the three-dimensional shape imaging apparatus 10 can measure the shape of the end portion T1 of the workpiece WK1 by the indirectly reflected light from the reflection mirror 31. Laser light emitted directly from the three-dimensional shape imaging apparatus 10 toward the workpieces WK1 and WK2 receives reflected light from the upper surfaces of the workpieces WK1 and WK2, as shown in FIG. 8C. In this case, since most of the laser light irradiated on the end portions T1 and T2 of the workpieces WK1 and WK2 is reflected in a direction different from the incident direction, the reflected light received by the three-dimensional shape imaging apparatus 10 The amount of light is small.

  Then, the three-dimensional shape imaging apparatus 10 outputs information representing the three-dimensional shape of the upper surfaces (including the end portions T1 and T2) of the workpieces WK1 and WK2 to the three-dimensional image processing apparatus 42. That is, as in the above-described steps S102 and S106, information on XYZ coordinates (specifically, inclinations θx, θy, and distances) representing each divided area position obtained by dividing the upper surface of the workpieces WK1 and WK2 into minute areas. Lz) is output to the three-dimensional image processing device 42, respectively. In this case, the three-dimensional shape imaging apparatus 10 outputs information related to the XYZ coordinates based on the direct reflected light and the two indirect reflected lights to the three-dimensional image processing apparatus 42 as described above. The three-dimensional image processing device 42 then represents a three-dimensional shape representing the three-dimensional shape of the workpieces WK1 and WK2 based on the information about the XYZ coordinates output from the three-dimensional shape imaging device 10 in step S202. Three-dimensional shape data consisting of data groups is generated. In this case, as described above, the direct three-dimensional shape data is represented by the camera coordinate system C, and the indirect three-dimensional shape data is represented by the camera coordinate systems C ′ and C ″.

Next, in step S204, the three-dimensional image processing apparatus 42 directly represents the three-dimensional shapes of the workpieces WK1 and WK2 represented by the two indirect three-dimensional shape data generated in step S202 by the three-dimensional shape data. The workpieces WK1 and WK2 are combined into a three-dimensional shape. Specifically, the three-dimensional image processing device 42 uses the generated three-dimensional shape data for the inclination θx and θy data corresponding to the reflection mirror 31 specified in step S104 and the inclination θx corresponding to the reflection mirror 32. , Θy data are used to classify the data into direct 3D shape data that is 3D shape data based on directly reflected light and indirect 3D shape data that is 3D shape data based on two indirect reflected lights. 3D by the shape data combining function F _S camera coordinate system the two indirect three-dimensional shape data by using the shape data combining function F _S calculated by executing the calculation program is a coordinate system of direct three-dimensional shape data of C Convert coordinates to shape data. As a result, the two-dimensional shape data representing the surface shapes of the end portions T1 and T2 of the workpieces WK1 and WK2 that are not measured by the laser light emitted from the three-dimensional shape imaging device 10 and directly applied to the workpieces WK1 and WK2 While complemented by indirect 3D shape data, averaging processing of direct 3D shape data and indirect 3D shape data representing the same part in the workpieces WK1 and WK2 is performed to generate a set of 3D shape data groups. The

Next, three-dimensional image processing apparatus 42, at step S206, calculates the shape data correction function _{F R.} Shape data correction function F _R is a function for the three-dimensional shape data by the camera coordinate system C is Z coordinate axis converting work WK1, the three-dimensional shape data by the vertical coordinate system on the upper surface of WK2. The calculation of the shape data correction function F _R is performed by executing the shape data correction function F _R calculated subprogram shown in FIG.

3-dimensional image processing apparatus 42, the execution of the shape data correction function _{F R} calculated subprogram begins at step S300, the step S302, it defines the plane P which represents the upper surface of the work WK1, WK2. In this case, there is a step between the upper surface of the workpiece WK1 and the upper surface of the workpiece WK2, and they are not on the same plane. Therefore, precisely, the plane P representing the upper surface of the workpiece WK1 or the upper surface of the workpiece WK2 is defined. In the present embodiment, a plane P representing the upper surface of the workpiece WK1 is defined. The plane P definition process includes the following sub-steps 1 to 3.

  Substep 1: The three-dimensional image processing device 42 extracts at least three pieces of three-dimensional shape data from a predetermined range in the XY coordinate plane in which the three-dimensional shape data group exists in the camera coordinate system C. In this case, the predetermined range in the XY coordinate plane is a range in which the upper surface of the workpiece WK1 is positioned in the camera coordinate system C in advance when the workpieces WK1 and WK2 are measured. .

  Sub-step 2: The three-dimensional image processing device 42 substitutes the extracted at least three three-dimensional shape data into the plane equation shown in the equation 1, respectively, and calculates the unknowns a, b, and c by the least square method. To define a provisional plane P ′.

  Sub-step 3: The three-dimensional image processing apparatus 42 extracts all the three-dimensional shape data belonging to a predetermined range with respect to the defined provisional plane P ′ from the three-dimensional shape data group, and extracts the same. If the number of three-dimensional shape data is equal to or greater than a predetermined number, the extracted three-dimensional shape data is assumed to be three-dimensional shape data representing the upper surface of the workpiece WK1, and the extracted three-dimensional shape data is represented by Substituting again into the equation, a, b, c are calculated by the least square method to define the plane. The defined plane (values of a, b, and c) is stored as a plane P that represents the upper surface of the workpiece WK1. On the other hand, if the number of the extracted three-dimensional shape data is less than the predetermined number, it is assumed that the first extracted three-dimensional shape data is not the three-dimensional shape data representing the upper surface of the work WK1, and the first extracted three-dimensional shape data. The plane is defined by the least square method by substituting again the three-dimensional shape data different from the data into the plane formula shown in Formula 1. Then, the defined plane is set as a new provisional plane P ′, and the process of sub-step 3 is repeatedly executed until the plane P is defined.

Next, in step S304, the three-dimensional image processing apparatus 42 defines three vectors A, B, and C on the defined plane P, and components A _C and B _{C of} these vectors by the camera coordinate system C are defined. , C _C is calculated. Specifically, the three-dimensional image processing apparatus 42 is a vector having a, b, and c in Equation 1 representing the plane P as vector components, that is, a normal vector of the plane P and the direction is the origin of the camera coordinate system C. the unit vector of the vector directed in the plane P is calculated as the vector C _C from. Further, each three-dimensional shape data in the three-dimensional shape data group is classified by the same Y coordinate value (including a predetermined range) of the camera coordinate system C, and the classified three-dimensional shape data is represented by the straight line shown in the above equation 2. And the unknowns a ′, b ′, c ′ are calculated by the least square method, and unit vectors of vectors having the average values of the calculated a ′, b ′, c ′ as vector components are calculated. calculated as a vector _{A C.} That is, the vector A is a vector parallel to the X axis of the camera coordinate system C, in other words, a vector parallel to the scanning direction of the laser light emitted from the three-dimensional shape imaging apparatus 10 in the X axis direction. Then, three-dimensional image processing apparatus 42 calculates a vector by the outer product of the vector _{A C} and the vector _{C C} as a vector _{B C.}

Next, three-dimensional image processing apparatus 42, at step S306, calculates the shape data correction function _{F R.} The shape data correction function _{F R} is three vectors A defined respectively calculated at the step S304, B, vector _A C of the camera coordinate system C of _C, B C, _{C C} and, the three vectors A , B, and C are calculated using vector components A _P , B _P , and C _P in a coordinate system perpendicular to the upper surfaces of the workpieces WK1 and WK2. In this case, the vector components A _P , B _P , and C _P are (1, 0, 0), (0, 1, 0), (0, 0, 1), and the vector components A _C , B _C , and C _C Is a value shown in the following Equation 10.

The three-dimensional image processing apparatus 42 sets the vector components A _C , B _C , and C _C to (α1, β1, γ1), (α2, β2, γ2), (α3, β3, γ3) in the equations 5-7. the vector components _{a P,} B P, the _{C P} in the equation 5~7 (α'1, β'1, γ'1) , (α'2, β'2, γ'2), (α ' 3, β′3, γ′3), a shape data correction function for converting three-dimensional shape data based on the camera coordinate system C into three-dimensional shape data based on a coordinate system in which the Z coordinate axis is perpendicular to the upper surfaces of the workpieces WK1 and WK2. to calculate the F _R. Next, three-dimensional image processing apparatus 42, at step S308, and stores the shape data correction function _{F R} described above calculations. Then, at step S310, the ends the execution of the shape data correction function F _R calculated subprogram returns to step S208 in the workpiece measurement program.

Next, three-dimensional image processing apparatus 42, at step S208, the shape data correction function F _R calculated using the calculated geometry data correction function F _R by the execution of a subprogram, three-dimensional shape by the camera coordinate system C The data is coordinate-converted into three-dimensional shape data in a coordinate system in which the Z coordinate axis is perpendicular to the upper surfaces of the workpieces WK1 and WK2. If the three-dimensional shape imaging apparatus 10 is arranged on the workpieces WK1 and WK2 so that the Z axis of the camera coordinate system C is orthogonal to the upper surfaces of the workpieces WK1 and WK2, the processing shown in step S206 and step S208 is performed. Is unnecessary.

  Next, in step S210, the three-dimensional image processing apparatus 42 calculates a gap C between the end T1 of the work WK1 and the end T2 of the work WK2. The calculation process of the gap C includes the following sub-steps 1 to 3.

  Substep 1: Each 3D shape data in the 3D shape data group is classified for each Y coordinate value (including a predetermined range), and the Z coordinate value is the largest among the classified 3D shape data. A predetermined number of three-dimensional shape data is extracted. Here, the three-dimensional shape data having the largest Z coordinate value is extracted because the Z coordinate value in the three-dimensional shape data representing the end portions T1 and T2 of the workpieces WK1 and WK2 represents the upper surface of the workpieces WK1 and WK2. From the coordinate origin of the coordinate system in which the Z coordinate value is larger than the Z coordinate value in the shape data, in other words, the Z coordinate value in the three-dimensional shape data representing the end portions T1 and T2 is perpendicular to the upper surface of the workpieces WK1 and WK2. It is because it exists in the farthest position. As a result, as shown in FIG. 10 (A), for each Y coordinate value (including a predetermined range), the ends T1, T2 of the workpieces WK1, WK2 (in circles A, B indicated by broken lines in the figure) The three-dimensional shape data representing the part) is extracted. FIG. 10A shows a cross section of the workpieces WK1 and WK2 represented by a plurality of three-dimensional shape data having a common Y coordinate value (including a predetermined range).

Sub-step 2: The three-dimensional image processing device 42 extracts the three-dimensional shape data (X _{MAX in the} figure) having the largest X coordinate value from the three-dimensional shape data extracted in the sub-step 1 and extracts the same. The difference between the X coordinate value of the three-dimensional shape data thus obtained and the X coordinate value of the three-dimensional shape data extracted in the sub-step 1 is calculated. Then, the three-dimensional shape data extracted in the sub-step 1 is classified into two sets according to the calculated difference. Specifically, the group is classified into a group in which the calculated difference value is within a predetermined range and a group in which the difference value exceeds a predetermined range. As a result, the three-dimensional shape data extracted in the sub-step 1 is converted into the three-dimensional shape data representing the end T1 of the workpiece WK1 (three-dimensional shape data included in the circle A indicated by the broken line in the drawing), and the workpiece. It can be classified into three-dimensional shape data (three-dimensional shape data included in a circle B indicated by a broken line in the drawing) representing the end portion T2 of WK2.

Substep 3: The X coordinate value of the three-dimensional shape data (a in the figure) having the largest X coordinate value in the three-dimensional shape data representing the end portion T1 of the classified work WK1 and the end portion of the classified work WK2 The absolute value (| ab−) of the difference from the X coordinate value of the three-dimensional shape data (b in the figure) having the smallest X coordinate value in the three-dimensional shape data representing T2 is expressed as the end T1 of the workpiece WK1. Calculated as a gap C between the end T2 of the workpiece WK2. Since this calculation is executed for each Y coordinate value (including a predetermined range), a plurality of gaps C are obtained. Therefore, an average value of the plurality of gaps C is calculated and set as a gap C _ave .

  Next, in step S212, the three-dimensional image processing apparatus 42 calculates a step L between the upper surface of the workpiece WK1 and the upper surface of the workpiece WK2. The calculation process of the level difference L includes the following sub-steps 1 to 5.

  Sub-step 1: Similar to sub-step 1 in step S210, the three-dimensional shape data in the three-dimensional shape data group is classified by the same (including a predetermined range) Y coordinate value, and the classified three-dimensional shape A predetermined number of three-dimensional shape data having the largest Z coordinate value are extracted from the data. As a result, as shown in FIG. 10B, for each Y coordinate value (including a predetermined range), the ends T1, T2 of the workpieces WK1, WK2 (in circles A, B indicated by broken lines in the figure) The three-dimensional shape data representing the part) is extracted. FIG. 10B shows a cross section of the workpieces WK1 and WK2 represented by a plurality of three-dimensional shape data having common Y coordinate values (including a predetermined range).

Sub-step 2: In the same manner as in sub-step 2 in step S210, the three-dimensional image processing device 42 has the largest X-coordinate value among the three-dimensional shape data extracted in sub-step 1 ( In the figure, X _MAX ) is extracted, and the difference between the X coordinate value of the extracted three-dimensional shape data and the X coordinate value of the three-dimensional shape data extracted in the sub-step 1 is calculated. Then, the three-dimensional shape data extracted in the sub-step 1 is classified into two sets according to the calculated difference. As a result, the three-dimensional shape data extracted in the sub-step 1 is converted into the three-dimensional shape data representing the end T1 of the workpiece WK1 (three-dimensional shape data included in the circle A indicated by the broken line in the drawing), and the workpiece. It can be classified as three-dimensional shape data (three-dimensional shape data included in a circle B indicated by a broken line in the drawing) representing the end T2 of WK2.

  Sub-step 3: In the three-dimensional shape data representing the end portion T1 of the classified work WK1, the X coordinate that is smaller within a predetermined range than the X coordinate value of the three-dimensional shape data (a in the figure) having the largest X coordinate value 3D shape data having a value (3D shape data included in a circle C indicated by a broken line in the figure) is extracted, and the X coordinate value in the 3D shape data representing the end T2 of the work WK2 is classified. Three-dimensional shape data having a larger X-coordinate value within a predetermined range than the X-coordinate value of the smallest three-dimensional shape data (b in the figure) (three-dimensional shape data included in a circle D indicated by a broken line in the figure) To extract. As a result, three-dimensional shape data representing the surfaces of the workpieces WK1, WK2 (the ends T1, T2 and the upper surfaces) in a predetermined range from the ends T1, T2 of the workpieces WK1, WK2 is extracted.

  Sub-step 4: In the two sets of three-dimensional shape data groups extracted in sub-step 3, the frequency distribution of the Z coordinate value is calculated, and the three-dimensional shape data of the maximum coordinate Z coordinate value in the calculated frequency distribution. , And three-dimensional shape data of Z coordinate values belonging to a predetermined range with respect to the Z coordinate value of the same maximum frequency. As a result, as shown in FIG. 10B, the three-dimensional shape data (3 included in the circles c and d indicated by the broken lines in the figure) representing the upper surfaces near the ends T1 and T2 of the workpieces WK1 and WK2. Dimensional shape data) is extracted.

Substep 5: an average value Z1 _AV Z coordinate values of the three-dimensional shape data representing the upper surface of the work WK1 that the extracted (three-dimensional shape data contained in the circle c indicated by a broken line in the figure), a work in which the extracted The absolute value (| Z1 _AV −Z2 _AV |) of the difference between the average value Z2 _AV of the Z coordinate values of the three-dimensional shape data representing the upper surface of WK2 (three-dimensional shape data included in the circle d indicated by the broken line in the drawing) ) Is calculated as a step L between the upper surface of the workpiece WK1 and the upper surface of the workpiece WK2. Since this calculation is performed for each Y coordinate value (including a predetermined range), a plurality of steps L are obtained. Therefore, an average value of the plurality of steps L is calculated as a step L _ave .

Next, in step S214, the three-dimensional image processing 42 displays the three-dimensional shapes of the workpieces WK1 and WK2 on the display device 44 using the three-dimensional shape data group synthesized in step S204. In S216, the calculated gap C _ave between the end T1 of the workpiece WK1 and the end T2 of the workpiece WK2 and the step L _ave between the upper surface of the workpiece WK1 and the upper surface of the workpiece WK2 are displayed on the display device 44, respectively. Let In step S218, the three-dimensional image processing apparatus 42 ends the execution of the workpiece measurement program. In displaying the three-dimensional shapes of the workpieces WK1 and WK2, the operator can instruct the display direction of the workpiece WK by operating the input device 43. The controller 41 and the three-dimensional image processing device 42 are displayed on the display device 44. The display direction of the workpieces WK1 and WK2 displayed at is changed. Thereby, the three-dimensional shape of each edge part T1, T2 of the workpiece | work WK1, WK2 seen from arbitrary directions can be displayed.

If the three-dimensional shape measuring device is arranged on the new workpieces WK1 and WK2, and the measurement of the workpieces WK1 and WK2 is instructed and the measurement is performed by the three-dimensional shape imaging device 10 as described above, the workpiece measurement program By executing this, it is possible to calculate the gap C _ave between the end T1 of the work WK1 and the end T2 of the work WK2, and the step L _ave between the upper surface of the work WK1 and the upper surface of the work WK2. That is, if calculated only once the shape data synthesis function _{F S} prior to measurement of the work WK1, WK2, the end T2 of the end T1 and the work WK2 of changing the work WK1, WK2 one after another workpiece WK1 The gap C _ave between them and the level difference L _ave between the upper surface of the work WK1 and the upper surface of the work WK2 can be calculated.

  As can be understood from the above description of the operation, according to the above embodiment, the laser light emitted from the three-dimensional shape imaging apparatus 10 is reflected by the reflection mirrors 31 and 32 to be emitted from the three-dimensional shape imaging apparatus 10. The workpieces WK1 and WK2 are irradiated with laser light from a different direction from the laser beams that directly irradiate the workpieces WK1 and WK2. Then, the indirect reflected light from the workpieces WK1 and WK2 by the laser light irradiated from the same different direction is reflected again by the reflecting mirrors 31 and 32, thereby leading to the three-dimensional shape imaging apparatus 10. That is, the workpieces WK1 and WK2 are measured by irradiating the workpieces WK1 and WK2 with laser beams from different directions. Thereby, even when the optical axis of the laser beam directly irradiating the workpieces WK1 and WK2 from the three-dimensional shape imaging apparatus 10 is almost parallel to the irradiation surface of the workpieces WK1 and WK2, it is different from the laser beam. The indirectly reflected light from the workpieces WK1 and WK2 can be guided to the three-dimensional shape imaging apparatus 10 by the laser light guided from the direction. As a result, the surfaces of the workpieces WK1 and WK2 that are nearly parallel to the optical axis of the laser light emitted from the three-dimensional shape imaging apparatus 10 and applied to the workpieces WK1 and WK2, specifically, the three-dimensional shapes of the end portions T1 and T2 The shape can also be measured with high accuracy.

  Furthermore, in carrying out the present invention, the present invention is not limited to the above embodiment, and various modifications can be made without departing from the object of the present invention.

In the above embodiment, the three-dimensional shape of the workpieces WK1 and WK2 is measured by scanning the entire range of the XY coordinate plane in the measurement target space of the three-dimensional shape imaging apparatus 10 with the laser beam, and the workpiece WK1. The gap C _ave between the end T1 of the workpiece and the end T2 of the workpiece WK2 and the step L _ave between the upper surface of the workpiece WK1 and the upper surface of the workpiece WK2 are calculated. However, the gap C is obtained by scanning the laser beam only in one X-axis direction on the XY coordinate plane in the measurement target space of the three-dimensional shape imaging apparatus 10, that is, scanning the laser beam only once in the X-axis direction. And the step L can also be calculated. In this case, the laser light emitted from the three-dimensional shape imaging apparatus 10 toward the reflection mirrors 31 and 32 and the laser light reflected by the reflection mirrors 31 and 32 and guided to the workpieces WK1 and WK2 are included in the same plane. Thus, the direction of the reflection mirrors 31 and 32 is adjusted, specifically, the reflection mirror 31 so that the plane including the laser light emitted from the three-dimensional shape imaging apparatus 10 is orthogonal to the reflection surfaces of the reflection mirrors 31 and 32. , 32 need to be adjusted. This is because the laser beam emitted from the three-dimensional shape imaging apparatus 10 is directly irradiated onto the workpieces WK1 and WK2, and the position where the laser beam is irradiated onto the workpieces WK1 and WK2 via the reflection mirrors 31 and 32. This is because of matching.

  An example of a method for adjusting the orientation of the reflection mirrors 31 and 32 will be described. One triangle is formed on the upper surface of the flat jig JG2. The inside of the triangle and the outside of the triangle are formed with different reflectances. The three-dimensional shape imaging apparatus 10 scans the upper surface of the flat jig JG2 only once so as to cross the triangle. The three-dimensional image processing device 42 uses the three-dimensional shape data (position where the amount of reflected light changes greatly) in the direct three-dimensional shape data and indirect three-dimensional shape data to change the laser beam in the triangle. Calculating the width of each crossed by. If the orientation of the reflecting mirrors 31 and 32 is adjusted so that the triangle width calculated from the direct three-dimensional shape data is equal to the triangle width calculated from the indirect three-dimensional shape data, the three-dimensional shape imaging device The laser light emitted from 10 toward the reflecting mirrors 31 and 32 and the laser light reflected by the reflecting mirrors 31 and 32 and guided to the workpieces WK1 and WK2 are included in the same plane.

When the laser beam is scanned only once in the X-axis direction in this way, it is not necessary to consider the Y coordinate in the camera coordinate system C, and therefore the workpieces WK1 and WK2 are composed of an X coordinate value and a Z coordinate value. Represented by two-dimensional shape data. Therefore, the shape data combining function F _S and shape data correction function F _R also correspond to the two-dimensional coordinate system functions in the above embodiments. Further, in this case, when calculating the shape data synthesis function F _S , the intersection of the upper surface of the flat plate jig JG2 and the end T3 or the end T4 of the groove M and the laser light emitted from the three-dimensional shape imaging apparatus 10 Can be used as the fixed points T _D , T _I1 , T _I2 , so that the shape data composition function can be used without using the fixed point setting jig JG3, that is, using only the flat plate jig JG2. F _S can be calculated. Also by this, the same effect as this embodiment can be expected.

In the above-described embodiment, the flat plate jig JG2 and the fixed point setting jig JG3 are used to calculate the shape data synthesis function F _S. However, three vectors in the measurement target space of the three-dimensional shape imaging apparatus 10 are used. And one fixed point can be defined, it is not limited to this. For example, two circles that can be distinguished from each other (for example, having different diameters and reflectivities) are formed on the upper surface of the flat plate jig JG1. The inside of each circle and the outside of each circle are formed with different reflectances. Then, similarly to the above embodiment, the unit vector of the normal vector of the top surface of the flat tool JG1 (plane P) and the vector _{A D, A I1, A I2} . The unit vectors of the vectors passing through the central coordinates of the two circles are the vectors B _D , B _I1 , B _I2, and the vectors A _D , A _I1 , A _I2 and the vectors B _D , B _I1 , B _{If the} vectors of the outer products of _I2 are vectors C _D , C _I1 , and C _I2 , the rotation component M _FS of the shape data synthesis function F _S can be calculated in the same manner as described above. If the center coordinates of one of the two circles are the fixed points T _D , T _I1 , T _I2 , the origin deviation component G _FS of the shape data composition function F _S is calculated in the same manner as described above. be able to. As another method, an object (for example, a sphere) that can define at least three fixed points is arranged in the measurement target space of the three-dimensional shape imaging apparatus 10, and three or more fixed points defined by the same object are used. The shape data synthesis function F _S can also be calculated by defining one vector and one fixed point. Also by this, the same effect as this embodiment can be expected.

Since the shape data synthesis function F _S is a function calculated according to the position and orientation of the reflection mirrors 31 and 32 in the camera coordinate system C as described above, the shape data synthesis function F _S is the function of the reflection mirrors 31 and 32 in the camera coordinate system C. If the position and orientation can be specified, it is not always necessary to use various objects as described above. For example, sensors for detecting the positions and orientations of the reflection mirrors 31 and 32 in the camera coordinate system C are provided in the reflection mirrors 31 and 32, respectively, and the positions and orientations of the reflection mirrors 31 and 32 detected by the sensors are used. The shape data composition function F _S can also be calculated. Also by this, the same effect as this embodiment can be expected.

  In the above embodiment, the ends of the workpieces WK1 and WK2 together with the gap C between the end T1 of the workpiece WK1 and the end T2 of the workpiece WK2 and the step L between the upper surface of the workpiece WK1 and the upper surface of the workpiece WK2. The three-dimensional shape of the portions T1 and T2 is displayed. However, in the present embodiment, if the gap C and the step L are displayed, it is not always necessary to display the three-dimensional shape of the end portions T1 and T2 of the workpieces WK1 and WK2.

  In the above embodiment, the gap C between the end portion T1 of the workpiece WK1 and the end portion T2 of the workpiece WK2 and the step L between the upper surface of the workpiece WK1 and the upper surface of the workpiece WK2 are measured. Of course, either measurement may be performed. Moreover, it may replace with these clearance gap C and level | step difference L, and may measure the diameter of the hole provided on the measurement object. In this case, the reflection mirror is appropriately arranged so that the laser beam emitted from the three-dimensional shape imaging apparatus 10 is irradiated to the opening portion of the surface of the measurement object in the hole portion without leakage. When only the step L between the upper surface of the workpiece WK1 and the upper surface of the workpiece WK2 is measured, one reflection mirror is provided so that the stepped portion between the workpiece WK1 and the workpiece WK2 is irradiated with laser light. For example, the step L can be measured. In other words, the reflecting mirror may be used by appropriately setting the position and the number of the reflecting mirrors so as to guide the laser beam to the object to be measured. Also by this, the same effect as this embodiment can be expected.

  In the above-described embodiment, the reflection mirrors 31 and 32 are arranged so that the optical axes of the laser beams guided to the workpieces WK1 and WK2 by the reflection mirrors 31 and 32 are substantially orthogonal to the end portions T1 and T2 of the workpieces WK1 and WK2. The position and orientation were adjusted. However, if the three-dimensional shape imaging apparatus 10 can measure the three-dimensional shape of the end portions T1 and T2, the positions and orientations of the reflection mirrors 31 and 32 are such that the optical axis of the laser beam is substantially perpendicular to the end portions T1 and T2. There is no need to adjust. That is, the reason why the laser light is irradiated so as to be substantially orthogonal to the end portions T <b> 1 and T <b> 2 is to allow more indirect reflected light to enter the three-dimensional shape imaging apparatus 10. Therefore, the position and orientation of the reflection mirrors 31 and 32 may be adjusted within a range in which the three-dimensional shape imaging apparatus 10 can receive indirect reflected light.

  In the above embodiment, the joints 23, 25, 26 are provided on the support 20 that supports the reflection mirrors 31, 32 so that the positions and orientations of the reflection mirrors 31, 32 with respect to the three-dimensional shape imaging apparatus 10 can be adjusted. Configured. However, when there is no need to change the position and orientation of the reflection mirrors 31 and 32, such as when the measurement position on the measurement object is determined to be a specific position, the reflection mirrors 31 and 32 by the joints 23, 25, and 26 are used. A mechanism for adjusting the position and orientation of the is unnecessary. Also by this, the same effect as this embodiment can be expected.

  In the above embodiment, the three-dimensional shape measuring apparatus measures the gap C between the end T1 of the workpiece WK1 and the end T2 of the workpiece WK2 and the step L between the upper surface of the workpiece WK1 and the upper surface of the workpiece WK2. Although the present invention is applied to (for example, a profile scanner for inspecting sheet metal accuracy of an automobile), the present invention is not limited to this. For example, the present invention is applied to all three-dimensional shape measuring apparatuses that measure the three-dimensional shape of the end portion T1 of the workpiece WK1 and the end portion T2 of the workpiece WK2 and display the three-dimensional shapes of the end portions T1 and T2. Can do. In this case, the scanning range on the workpieces WK1 and WK2 of the laser light emitted from the three-dimensional shape imaging device 10 and irradiated on the workpieces WK1 and Wk2, and the reflection mirrors 31 and 32 emitted from the three-dimensional shape imaging device 10 are reflected. The reflection mirrors 31 and 32 are provided so that the scanning ranges on the workpieces WK1 and WK2 of the laser light irradiated onto the workpieces WK1 and WK2 overlap. Thereby, the three-dimensional shape of the workpieces WK1 and WK2 arranged in the measurement target space of the three-dimensional shape imaging apparatus 10 can be displayed on the display device 44 without omission.

It is the schematic which shows the whole three-dimensional shape measuring apparatus which concerns on one Embodiment of this invention. It is a perspective view which shows the state of the three-dimensional shape measuring apparatus at the time of measuring the position of a reflective mirror. It is a flowchart of the shape data synthesis function F _S calculation program executed by the three-dimensional image processing apparatus in the three-dimensional shape measuring apparatus of FIG. (A), (B) is explanatory drawing for demonstrating the irradiation state of the laser beam at the time of measuring the position of a reflective mirror. It is a perspective view showing a state of calculating the shape data synthesis function F _S with plate jig JG2. It is a perspective view showing a state of calculating the shape data synthesis function F _S using fixed point setting jig JG3. It is a flowchart of the workpiece | work measurement program performed by the three-dimensional image processing apparatus in the three-dimensional shape measuring apparatus of FIG. (A)-(C) are explanatory drawings for demonstrating the irradiation state of the laser beam at the time of measuring workpiece | work WK1, WK2. It is a flowchart of the shape data correction function F _R calculation program executed by the three-dimensional image processing apparatus in the three-dimensional shape measuring apparatus of FIG. (A), (B) is explanatory drawing for demonstrating the calculation method of the clearance gap C and the level | step difference L between the workpiece | work WK1 and the workpiece | work WK2. (A), (B) is explanatory drawing which shows the reflective state of the laser beam with respect to the measuring object in a prior art example.

Explanation of symbols

WK1, WK2 ... Workpiece, T1, T2 ... End, JG1, JG2 ... Flat plate jig, JG3 ... Fixed point setting jig, 10 ... Three-dimensional shape imaging device, 20 ... Support, 21 ... Base, 22 ... Post, 23 25, 26 ... joint, 24 ... first arm, 27, 28 ... second arm, 31, 32 ... reflecting mirror, 33, 34 ... sheet

Claims (6)

The measurement object is scanned with a laser beam emitted laser light from the laser light source is irradiated to the measurement object while changing its direction, and rotates following the optical path of the emitted laser beam, in the measurement object an imaging lens for converging the reflected reflected laser light, and the distance to the measurement target at a distance detector comprising a sensor which is disposed a plurality of light receiving elements for receiving the reflected laser beam light collection detected, and the three-dimensional shape image pickup device for outputting a three-dimensional shape data indicating a three-dimensional shape of the surface of the object using the distance to be the detection and orientation of the emitted laser beam,
The laser beam emitted from the three-dimensional shape imaging apparatus is reflected and guided to the measurement object from a direction different from the laser light emitted from the three-dimensional shape imaging apparatus and irradiated on the measurement object. A reflection mirror that reflects reflected light from an object and guides it to the three-dimensional shape imaging device;
The three-dimensional shape of the surface of the measurement object represented by the three-dimensional shape data based on the reflected light guided from the measurement object to the three-dimensional shape imaging device through the reflection mirror is directly from the measurement object. A three-dimensional shape measuring apparatus comprising: three-dimensional shape data synthesizing means for synthesizing the three-dimensional shape of the surface of the measurement object represented by the three-dimensional shape data based on the reflected light guided to the shape imaging apparatus. . In the three-dimensional shape measuring apparatus according to claim 1,
The reflection mirror is a three-dimensional shape measuring apparatus for causing the laser beam emitted from the three-dimensional shape imaging apparatus to enter the surface of a specific part of the measurement object substantially perpendicularly. In the three-dimensional shape measuring apparatus according to claim 1 or 2,
The three-dimensional shape measuring apparatus which comprised the said reflective mirror by the 1st and 2nd reflective mirror which each guide | induces the laser beam radiate | emitted from the said three-dimensional shape imaging device with respect to the two mutually opposing surfaces of a measuring object. The three-dimensional shape measuring apparatus according to claim 3, further comprising:
Three-dimensional provided with inter-surface distance measuring means for measuring the inter-surface distance between the two opposing surfaces of the measuring object using the three-dimensional shape of the measuring object synthesized by the three-dimensional shape data synthesizing means. Shape measuring device. In the three-dimensional shape measuring apparatus according to any one of claims 1 to 4,
The irradiation range on the measurement object of the laser light emitted from the three-dimensional shape imaging apparatus and irradiated on the measurement object, and the measurement object emitted from the three-dimensional shape imaging apparatus and irradiated onto the measurement object A three-dimensional shape measuring apparatus provided with the reflection mirror so as to overlap an irradiation range on a measurement target object of laser light. The three-dimensional shape measuring apparatus according to any one of claims 1 to 5, further comprising:
A three-dimensional shape measuring apparatus comprising optical axis changing means for changing the position or direction of an optical axis of laser light guided to a measurement object by the reflecting mirror by changing the position or direction of the reflecting mirror.

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