JP4642881B2 - Control device, control method, processing device, and program - Google Patents

Description

  The present invention relates to a remote control system, and more particularly to a control device, a control method, a processing device, and a program in a remote control system in which a computer and a processing device arranged outside a room in which a processing device is installed are connected via a network. .

  A processing apparatus such as a semiconductor manufacturing apparatus includes a control device for controlling its own operation, and the control device is provided with an input device and a display device. The operator inputs commands and information to the control device through the input device, and the processing condition setting of the processing device and the current state are displayed on the display device. Therefore, the operator can control and monitor the processing apparatus at a place where the processing apparatus is installed in the clean room.

  Usually, a processing apparatus such as a semiconductor manufacturing apparatus is installed in a clean room. However, since it is necessary to maintain the environment in the clean room to be constant, it is necessary to suppress the entry and exit of people into the clean room as much as possible. Therefore, a remote control system has been proposed in which a processing apparatus installed in a clean room is connected to a computer outside the clean room via a network, and the operation of the processing apparatus is controlled and monitored by the computer.

In the remote control system as described above, the screen displayed on the display device provided in the control device of the processing device is displayed as it is on the display device of the computer outside the clean room, and the operation is input through the screen on the computer. The same control and operation as those performed via the screen of the control device of the processing device can be performed.
VNC Study Group, Tetsuya Shirai, “Introduction to Virtual Network Computing”, First Edition, Cut System Co., Ltd., June 1996 Tristan Richardson, Quentin Stafford-Foster, Kenneth R. Wood & Andy Hopper, "virtual Network Computing" IEEE Internet Computing, Vol.2 No.1, Jan / Feb 1998 pp33-38

  As described above, a computer placed outside the room in which the device is installed is connected to the device via a network, and the device can be controlled by operation on the terminal while displaying the same operation screen as the device operation screen on the terminal. The remote control system is a technology developed for computing and control in a general network, and cannot be directly applied to a specific individual network control system. Accordingly, there is a demand for development of a modified or improved technique that can be applied to a remote control system for controlling a processing apparatus used in semiconductor manufacturing or the like.

  The present invention has been made in view of the above points, and in order to control the processing apparatus, remote control using a technique for controlling the processing apparatus while displaying the same screen as the processing apparatus on the terminal screen. It is an object of the present invention to provide a control device and control method, a processing device, and a program in a system.

In order to solve the above-described problems, according to the present invention, a terminal disposed outside a room in which a plurality of processing apparatuses are installed and the processing apparatus are connected via a network, and an operation screen of the processing apparatus is provided. A control device incorporated in the processing device, configured to be used in a remote control system capable of controlling the processing device by an operation on the terminal while displaying the same operation screen on the terminal, An operation right switching means for switching an operation right to and from the terminal, and when the operation right is granted to the terminal to control the processing apparatus and when it is detected that an abnormality has occurred in the processing apparatus in the case of non-abnormality expected pre detected abnormality, the control device is provided which is characterized by having a operation right means to force migration of the operation right to the processing unit
Further, according to the present invention, a terminal arranged outside a room in which a plurality of processing devices are installed and the processing device are connected via a network, and the same operation screen as the operation screen of the processing device is displayed on the terminal. A control device incorporated in the processing device configured to be used in a remote control system capable of controlling the processing device by an operation on the terminal while being displayed on the terminal, the operation being performed between the processing device and the terminal Operating right switching means for switching rights, and operation right grant prohibiting means for prohibiting the granting of operating rights to the terminal when the control device is displaying a predetermined screen. A control device is provided.

Further, according to the present invention, a terminal arranged outside a room in which a plurality of processing devices are installed and the processing device are connected via a network, and the same operation screen as the operation screen of the processing device is displayed on the terminal. A control method used in a remote control system capable of controlling the processing device by an operation at the terminal while being displayed at the terminal, wherein the operation right is switched between the processing device and the terminal, and the operation right is given to the terminal. When the control device is controllable and an abnormality has occurred in the processing device, the operation right is forced to the processing device in the case of an abnormality other than the previously predicted abnormality detected. the method according to claim Rukoto manner to shift is provided.
Further, according to the present invention, a terminal arranged outside a room in which a plurality of processing devices are installed and the processing device are connected via a network, and the same operation screen as the operation screen of the processing device is displayed on the terminal. A control method used in a remote control system capable of controlling the processing device by an operation at the terminal while being displayed at the terminal, wherein the control right is switched between the processing device and the terminal, and the control device displays a predetermined screen. A control method is provided that prohibits the operation right from being given to the terminal when the terminal is in a display state.

Further, according to the present invention, a terminal arranged outside a room in which a plurality of processing devices are installed and the processing device are connected via a network, and the same operation screen as the operation screen of the processing device is displayed on the terminal. A program incorporated in a control device incorporated in the processing device, configured to be used in a remote control system capable of controlling the processing device by operation on the terminal while being displayed on the terminal, the processing device and the When the operation right is switched between the terminals, the operation right is given to the terminal and the processing apparatus can be controlled, and it is detected that an abnormality has occurred in the processing apparatus, the detected right is expected in advance. If abnormal non abnormal, program characterized Rukoto forcibly migrated the operation right to the processing apparatus is provided.
Further, according to the present invention, a terminal arranged outside a room in which a plurality of processing devices are installed and the processing device are connected via a network, and the same operation screen as the operation screen of the processing device is displayed on the terminal. A program incorporated in a control device incorporated in the processing device, configured to be used in a remote control system capable of controlling the processing device by operation on the terminal while being displayed on the terminal, the processing device and the An operation right is switched between terminals, and when the control device is in a state of displaying a predetermined screen, a program for prohibiting the operation right from being given to the terminal is provided.

Further, according to the present invention, the terminal is connected to a plurality of terminals arranged outside the room in which the terminal is installed via the network, and the same operation screen as the own operation screen is displayed on the terminal. A processing device that can be controlled by operation, comprising: a processing unit that processes an object to be processed; and a control device that controls the operation of the processing unit and transmits image information to the terminal via the network. The control device is operable to switch the operation right between the processing device and the terminal, and is capable of controlling the processing device when the operation right is given to the terminal. when an abnormality is detected that occurs, in the case of non-abnormality expected pre detected anomaly, and having a operation right means to force migration of the operation right to the processing unit Management apparatus is provided.
Further, according to the present invention, the terminal is connected to a plurality of terminals arranged outside the room in which the terminal is installed via the network, and the same operation screen as the own operation screen is displayed on the terminal. A processing device that can be controlled by operation, comprising: a processing unit that processes an object to be processed; and a control device that controls the operation of the processing unit and transmits image information to the terminal via the network. The control device includes an operation right switching means for switching an operation right between the processing device and the terminal, and an operation right to the terminal when the control device is displaying a predetermined screen. There is provided a processing device characterized by having an operation right grant prohibiting means for prohibiting the grant of.

  As described above, according to the present invention, in a remote control system using the VNC technology, a control device, a control method, a processing device, and a program that are particularly suitable for controlling a processing device used for semiconductor manufacturing or the like are realized. be able to.

  Next, embodiments of the present invention will be described with reference to the drawings.

  FIG. 1 is a diagram showing the overall configuration of a remote control system to which the present invention is applied. The remote control system shown in FIG. 1 is a system constructed to remotely control a plurality of processing apparatuses 1 for semiconductor manufacturing by a plurality of computers 2.

  The processing apparatus 1 is installed in a clean room 3, and the processing apparatuses 1 in the clean room are connected to each other by a network 4. The processing apparatus 1 is an apparatus that performs processing such as film formation processing, etching, and photolithography processing for semiconductor manufacturing, for example. Each of the processing apparatuses 1 includes a processing unit that performs processing on the object to be processed and a control device that controls the processing unit. In FIG. 1, the control device is not shown because it is provided in the processing device 1, but a state where a touch panel 5 that is a display / input device of the control device is attached to the processing device 1 is shown.

  A computer 2 serving as a host device is disposed outside the clean room 3, for example, in an office and connected by a network 6. In order to control the processing apparatus 1 by the computer 2, the network 4 in the clean room is connected to a network 6 outside the clean room, and communication can be performed between the computer 2 and the processing apparatus.

  In the network configuration as described above, the processing device 1 is controlled from the computer 2 by introducing control software to each of the computers 2. The control software in the present embodiment can display the same screen as the screen of the touch panel 5 provided in each processing device 1 on the display device of the computer 2 and is displayed on the display device of the computer 2. This is for controlling the processing device 1 by operating the screen. This software is hereinafter referred to as VNCviewer.

  Since the same screen as the screen of the processing device 1 is displayed on the computer 2, the control operation of the processing device 1 can be performed on the screen of the computer 2. Therefore, even an operator who is not used for network operation or computer operation can perform a control operation as if he / she is operating the processing device 1 at a location away from the processing device 1.

  Each of the computers 2 communicates with each of the processing devices 1 via the network 4 and the network 6 connected to each other, acquires screen information of the processing devices 1, and sends operation / control information from the computer 2 to the processing devices. . As described above, the control device is incorporated in the processing device 1, and the control device and the computer 2 communicate with each other.

  FIG. 2 is a schematic functional block diagram of the control device 10 incorporated in the processing device 1. 2 includes a control / calculation unit 11, a display / input unit 12 (corresponding to the touch panel 5 in FIG. 1), an external storage unit 13 such as a flexible disk device, and a printing unit 14 such as a printer.

  The control / arithmetic unit 11 is configured by general computer hardware including a CPU, a memory such as a ROM and a RAM, and controls operations and settings of the entire processing apparatus 1. The control / calculation unit 11 transmits screen information to be displayed on the display / input unit 12 to the computer 2 via the networks 4 and 6. As a result, the screen displayed on the display / input unit 12 can be displayed on the screen of the computer 2.

  Further, the control / arithmetic unit 11 receives information input by the screen operation of the computer 2 via the networks 4 and 6 and controls the processing device 1 based on this information. Specifically, the control / calculation unit 10 is connected to the machine control / calculation unit 16 via the internal bus 15, and control information is supplied from the control / calculation unit 10 to the machine control / calculation unit 16. The machine control / arithmetic unit 16 includes computer hardware including a CPU, a ROM, a RAM, and the like, and controls the operation and setting of each unit of the processing device 1 based on the supplied control information. Control commands from the machine control / arithmetic unit 16 are supplied to corresponding units via the input / output unit 17.

  In the control device 10 as described above, software (program) corresponding to the VNC viewer installed in the computer 2 is stored in the memory of the control / arithmetic unit 11 and is remotely controlled by this program and the VNC viewer on the computer 2 side. The system is built. Therefore, the operation content of the remote control system can be changed by changing the program stored in the memory of the control / calculation unit 11 of the processing device 1.

  In the present invention, the following functions are added to the above-described remote control system to solve the problem of remote control of the semiconductor manufacturing processing apparatus 1 installed in the clean room. A control system is provided. In the following description, the computer 2 may be referred to as a terminal, and the processing device 1 may be simply referred to as a device. Moreover, although the processing apparatus 1 shall be installed in the clean room, it is not restricted to the clean room where cleanliness is required, For example, the room of a normal environment where a manufacturing facility is arrange | positioned may be used.

  1) Limit the number of terminals having the right to operate the device to one.

  This function is provided in order to prevent the processing apparatus 1 from malfunctioning when different commands are issued from a plurality of terminals to one processing apparatus at a time.

  2) When a specific operation is performed on the apparatus, a part of the screen of the terminal is masked so that it cannot be seen.

  This function is provided in order to prevent other operators from seeing the screen of the terminal among the screens displayed during the operation performed in the processing apparatus 1.

  3) Increase the time interval for updating the screen of the terminal other than the terminal having the operation right.

  This function is provided to reduce the amount of communication data to a terminal that does not have an operation right to reduce the CPU load and network traffic.

  4) Limit the terminals that can communicate with the device.

  This function is provided in order to prevent security information from being acquired from a terminal that is not related to the control of the processing device, even if it is a terminal on the network, and to enhance security.

  5) When an error occurs, the operation right is forcibly transferred to the device.

  This function is provided so that control must be performed by directly operating the processing device when an error that cannot be solved only by control operation from the terminal occurs.

  6) When a specific screen is displayed on the apparatus or when a specific operation is performed, the transfer of the operation right to the terminal is prohibited.

  This function is provided so as not to cause an unintentional interruption because there is a possibility that data inconsistency may occur due to an unintentional interruption, resulting in a malfunction or inoperability. Also, when the operation right is transferred to the terminal and the control operation is performed immediately from the terminal, the operation right cannot be transferred when there is a possibility that the operation already performed is interrupted or invalidated. To be provided.

  7) When the operation right can be transferred from the apparatus to the terminal, the processing apparatus is logged out when any terminal first logs in.

  This function does not display a login screen and does not display the login screen from the time when the operation right can be transferred from the processing device to the terminal until the time when any terminal performs an operation for acquiring the operation right. It is provided to display the screen.

  8) A specific state of a plurality of devices is monitored so that whether or not a VNC viewer corresponding to the device is activated can be recognized on the screen.

  This function is provided for recognizing the states of a plurality of processing apparatuses on a single screen.

  Among the functions 1) to 8) as described above, the functions 1) to 7) are achieved mainly by changing the program on the control device side of the processing apparatus 1, and the function 8) is performed on the computer 2 (terminal) side. This is achieved by installing a dedicated program.

  Next, the above functions 1) to 8) will be described in more detail.

  1) A function for limiting the number of terminals having the right to operate the apparatus to one.

  This function is provided to prevent the processing device 1 from malfunctioning when different commands are issued to a single processing device at a time from a plurality of computers 2 (terminals) at the same time. . Here, the operation right is a right to control and operate the processing device 1, and the computer 2 or the processing device 1 on which a screen capable of controlling the processing device 1 is displayed is a terminal having the operation right. Or a device.

  When a plurality of computers 2 can acquire the operation right of the same processing apparatus 1 at the same time, there is a possibility that a control command is simultaneously transmitted from the plurality of computers 2 to the processing apparatus 1. For example, if the plurality of control commands are different commands, there is a possibility that control contrary to the intention of the operator who issued the command may be performed. Further, if completely different commands are input simultaneously or in a short time, the control device of the processing apparatus 1 may malfunction.

  Therefore, when a certain computer 2 or processing device 1 has the operation right, the other computer 2 cannot acquire the operation right until the computer 2 or the processing device 1 gives up or loses the operation right. .

  Here, there are the following two methods for the processing device 1 or the computer 2 to acquire the operation right.

  One method for acquiring the operation right is a method in which the processing device 1 acquires the operation right by operating the local / remote changeover switch 7 provided in the processing device 1. When the local / remote changeover switch 7 is switched to the local side, the operation right is always given only to the processing device 1, and the remote side, that is, the computer 2 cannot acquire the operation right.

  Therefore, when the local / remote changeover switch 7 is switched to the local side, the operation right is given only to the processing device 1, and the operation right is given to only one unit.

  Another method for acquiring the operation right is to switch the local / remote changeover switch 7 to the remote side, and any of the computers 2 logs in from the screen. In this case, the operation right is given to the computer 2 that has logged in.

  FIG. 3 shows a login screen displayed on the computer 2 when the local / remote changeover switch 7 is switched to the remote side. By clicking the key labeled “LOGIN REMOTE” at the top of the login screen shown in FIG. 3, the operating right is given to the clicked operator, that is, the computer 2 displaying the screen.

  When any one of the computers 2 or the processing device 1 logs in, the login screens displayed on all the computers 2 and the processing devices 1 disappear. Therefore, the computers 2 other than the computer 2 that performed the login log in. Cannot be done. The login screen is displayed after the computer 2 that has obtained the operation right selects the logout screen shown in FIG. 4 and clicks the “Logout” key to log out and abandon the operation right. Therefore, after one computer 2 obtains the operation right, the other computer and the processing apparatus 1 cannot obtain the operation right until the computer 2 abandons the operation right, and one computer has the operation right. Limited to.

  However, even when a certain computer 2 has the operation right, the operation right can be forcibly transferred to the processing device 1 by switching the local / remote changeover switch 7 to the local side. Even in this case, since the operation right is transferred from the computer 2 to the processing device 1, only one processing device 1 is provided.

An indicator such as an LED is provided in the vicinity of the local / remote switch 7 or the switch itself. For example, when the switch 7 is switched to the local side, the LED is turned off and switched to the remote side. If so, turn on the LED. Thereby, the operator who is operating the processing apparatus 1 can easily confirm the state of the switch 7 by turning on / off the LED. That is, it is possible to easily recognize whether the current operation right exists in the processing apparatus 1 or in the remote computer 2.

2) A function of masking a part of the terminal screen when performing a specific operation in the apparatus.

  This function is provided in order to prevent other operators from seeing through the screen of the computer 2 among the screens displayed during the operation performed in the processing apparatus 1. It is done.

  Of the screens displayed during operations performed in the processing device 1, as an example of operations that are not desired to be seen by other operators via the screen of the computer 2, for example, an operation of inputting a password when logging in is there.

  When the display / input unit 12 of the control device 10 provided in the processing device 1 is a touch panel, a password is input by selecting and touching a key displayed on the screen. At this time, on the screen, in order to indicate that the key has been touched, the key in a state of being pressed while being touched is displayed. Such a key-down display appears not only on the screen of the processing apparatus 1 but also on the screen of the computer 2 connected to the processing apparatus 1 and running the VNC viewer. That is, if the key press display is seen on the screen of the computer 2, the password input by the operator of the processing apparatus 1 can be known.

  Therefore, in order to prevent such a security problem, when performing a password input operation, the portion of the password input screen of the computer 2 that prompts the key operation is masked (that is, the information to be displayed is deleted). The password input operation screen cannot be viewed from the computer 2. As a result, the password input screen is displayed only on the screen of the processing device 1, and it is possible to prevent the password from being known to anyone other than the operator of the processing device 1.

  The deletion of a part of the screen information described above is a process performed in the control device 10 of the processing device 1 and is performed by a program stored in the control / calculation unit 11 of the control device 10.

As described above, the operation that needs to mask a part of the screen is not limited to the password input operation, for example, a special screen that is displayed at the time of maintenance service of the apparatus, and it is not necessary for the operator other than the maintenance to know. There are operation screens.

3) A function of extending the time interval for updating the screen of a terminal other than the terminal having the operation right.

  This function is provided in order to reduce the data transmission amount to the computer 2 that does not have the operation right to reduce CPU load and network traffic.

  Even the computer 2 that does not have the operation right can display the same screen as the screen of the processing apparatus 1 by starting VNCviewer. That is, the processing device 1 activates the VNC viewer and transmits screen information at regular intervals to all the computers 2 that have established communication with the processing device. Thereby, even if it is not an operator, the present state of the processing apparatus 1 and the control operation currently performed on the processing apparatus 1 can be known.

  However, as the number of computers 2 running VNCviewer increases, the amount of screen information transmitted from the processing device 1 to each computer 2 increases, and the control / calculation unit 11 of the control device 10 provided in the processing device 1 A large load is applied to the provided CPU. In addition, the amount of data transferred on the networks 4 and 6 becomes very large.

  Since the computer 2 that does not have the operation right does not perform the control operation, no input operation is performed. If you have the operation right, you need to update the screen once every 0.5 seconds, for example, whereas if you do not have the operation right, you simply look at the status of the processing device, It is considered unnecessary to update the screen frequently. Therefore, when the user does not have the operation right, it can be determined that the screen only needs to be updated about once every 2 seconds, for example.

Therefore, for the computer 2 that does not have the operation right, the data transfer amount is reduced by increasing the transmission interval of the image information, the load on the CPU is reduced, and the data transfer amount on the network is also reduced. To do. That is, the control / arithmetic unit 11 of the processing apparatus 1 responds several times to an image information transfer request sent at a fixed interval (for example, 0.5 seconds) from the computer 2 that does not have an operation right. Control is performed so that image information is transmitted only once (for example, once every four times). Thereby, the transfer amount of the image information from the processing apparatus 1 can be significantly reduced.

4) Limit the terminals that can communicate with the device.

  Even if this function is a computer connected to the network 6, if it is a terminal that is not related to the control of the processing device 1, the processing device 1 rejects communication with the non-related terminal and acquires information. It is provided to prevent security and enhance security.

  Various terminals are connected to the network 6 to which the computer 2 is connected, and computers of different production lines and departments are also connected. If VNCviewer is installed in such a computer, it is possible to easily establish communication with the processing apparatus 1 and acquire screen information. That is, an outside person can easily know the contents of processing and control in the processing apparatus 1 via a computer, and there is a possibility that information that is not desired to be disclosed to the outside is leaked.

  Therefore, by specifying in advance a computer that can establish communication with the processing apparatus 1 using the VNC viewer, an unspecified computer can be prevented from establishing communication with the processing apparatus 1 using the VNC viewer. The computer can be specified by, for example, a host name (Host Name) or an IP address (IP Address) assigned to each computer 2 on the network.

  FIG. 5 shows a setting screen for registering the computer 2 that can be connected to one processing apparatus 1. On the setting screen, the host name (Host Name), port number (Port), IP address (IP Address) to be registered, and password (Password) used for connection are input. The password input here is a password that must be input when the computer 2 logs in.

Only the computer 2 corresponding to the host name or IP address registered on the setting screen is set so that communication can be established with respect to the processing apparatus 1 using the VNC viewer. Therefore, even if an unregistered computer attempts to establish communication with the processing device 1, the request is rejected.

5) A function for forcibly transferring the operation right to the device when an error occurs.

  This function is provided in order to prompt the operator to go to the installation location of the processing apparatus 1 and directly solve the error when an error that cannot be solved only by the control operation from the computer 2 occurs. .

  When any error occurs in the processing apparatus 1, the occurrence of an error (abnormality) is displayed on the screen, and it is requested to solve the error. There are various types of errors, such as abnormal processing conditions, mechanical failure of the processing device, and errors on the software of the control device. Among these errors, when the cause can be easily identified and the countermeasure is known in advance, an operation for solving the error may be performed via the screen of the computer 2 having the operation right. However, if the error is an unknown error or the error is not known, it is dangerous to perform remote control, and it is desirable for the operator to go to the installation location of the processing apparatus and directly operate the processing apparatus.

  Therefore, when an abnormality occurs in the processing device 1 including the control device, the operation right is forcibly transferred to the processing device 1 side so that the operation right cannot be granted to the computer 2 until the abnormality is removed. As a result, when an abnormality occurs, the operator must always go to the place where the processing apparatus 1 is installed to check the state of the processing apparatus 1 and operate without confirming the actual state of the processing apparatus by remote control. It is possible to prevent problems that may occur in some cases.

  It should be noted that not all errors are forced to transfer the operation right to the processing device 1, but for example, abnormalities whose causes are known in advance and whose countermeasures are known. In this case, it is not necessary to perform the above-mentioned forced operation right transfer.

Abnormalities that require the transfer of a forced operation right to a processing device are abnormalities that cannot be assumed in advance. For example, a mechanical failure such as when the arm of a transfer robot in the device is damaged, or a control device Includes abnormalities in data processing in the software of the control device such that no data to be read is found.

6) A function for prohibiting transfer of the operation right to the terminal when a specific screen is being displayed on the apparatus or when a specific operation is being performed.

  This function is provided so as not to cause an unintentional interruption because there is a possibility that data inconsistency may occur due to an unintentional interruption, resulting in a malfunction or inoperability. In addition, when the operation right is transferred from the processing device 1 to the computer 2 and a control operation is immediately performed from the computer 2, this function may interrupt or invalidate the operation already performed. In some cases, it is provided to prevent the operation right from being transferred.

  There are the following operations (states) that should be prohibited from transferring the operation right.

  a) The touch panel of the processing apparatus 1 is in a pressed state.

  In this case, a warning is displayed so as not to perform an operation on the touch panel, and the transfer of the operation right to the computer 2 is prohibited.

  b) When a transition prohibition screen is displayed.

  In this case, a warning is displayed so as to end the currently displayed screen, and the transfer of the operation right to the computer 2 is prohibited.

  c) When the current operation level cannot be switched to remote operation.

  The operation level is a level selected when logging in (see the login screen in FIG. 3), normal operation (Normal Operation), processing operation (Process Operation), device operation (Equipment Operation), service operation (Service Operation). Etc. For example, the normal operation level is permitted to be operated by anyone, but in the case of a service operation, an operation at a level that can be performed only by a maintenance person can be performed. Therefore, when logging in from the computer 2, if the normal operation is selected, the login is executed as it is and the operation right is given to the computer 2. However, when a service operation is selected when logging in from the computer 2, a warning is displayed to change the operation level or to log out, and no login is performed. That is, the granting of the operation right is prohibited.

  d) When a password is being entered.

  In this case, a warning is displayed so as to end the password input, and the transfer of the operation right to the computer 2 is prohibited.

  As described above, when the operation right is transferred from the processing apparatus 1 to the computer 2, there is a possibility that a problem may occur, and the process for prohibiting the transfer of the operation right is performed.

FIG. 6 is an example of a screen displayed when the transfer of the operation right to the computer 2 is prohibited as described above. When the transfer of the operation right is prohibited, the “Select Screen” button in the upper right of the screen turns yellow, and a pop-up screen showing the reason for the prohibition of the operation right transfer is displayed in the center.

7) A function of logging out the processing device when any terminal first logs in when the operation right can be transferred from the device to the terminal.

  This function does not display a login screen from the time when the operation right can be transferred from the processing apparatus 1 to the computer 2 until the time when any computer 2 performs an operation for acquiring the operation right. Is provided to display a normal screen.

  In the remote control system according to the present embodiment, as described above, the processing device 1 is provided with the local / remote changeover switch 7, and by operating this, only the processing device 1 has the operation right, and the computer 2 operates. It is possible to switch between the states that can have the right.

  Here, consider a case where the control operation is finished in the processing apparatus 1 and the switch 7 is switched to the remote side. In this case, switching the switch 7 means that the operation right given to the processing apparatus has been abandoned, and the logout process of the processing apparatus 1 is normally performed. That is, unless the processing device 1 is logged out, the operation right cannot be transferred to the remote side, that is, the computer 2.

  However, if logout of the processing apparatus 1 is executed immediately after the local / remote changeover switch 7 is switched, a login screen (see FIG. 3) for prompting login will be displayed on the screen of the processing apparatus 1. Therefore, a login screen which is a screen displayed on the processing device 1 is also displayed on all the computers 2.

  In such a case, if there is an operator who has previously monitored the state of the processing device 1 on the screen of the computer 2, a screen showing the state of the processing device when the local / remote changeover switch 7 is switched becomes the login screen. It will be switched. Since the display of the login screen continues until one of the computers 2 performs a login operation, in order to display a normal screen on the computer screen, the operator does not intend to operate the processing device 1 but logs in. Must be done.

  In order to eliminate such a problem, in this embodiment, when the local / remote changeover switch 7 is switched to the remote side, the logout process of the processing apparatus 1 is not performed, and any one of the computers 2 logs in. The logout process of the processing apparatus 1 is performed for the first time when the first operation is performed.

As a result, the login screen is displayed for the first time when any one of the computers 2 performs the login operation, and continues even after the local / remote changeover switch 7 is switched to the remote side. Thus, a normal operation screen can be displayed on the computer 2 or the processing device. Here, the first operation for login performed in any of the computers 2 is to press (click) the login button shown at the upper left on the normal operation screen. This button is the “LOGIN REMOTE” button in FIG.

8) A function for monitoring a specific state of a plurality of apparatuses and recognizing on the screen whether or not a VNC viewer corresponding to the apparatus is activated.

  This function is provided for recognizing the states of the plurality of processing apparatuses 1 on a single screen. In the remote control system shown in FIG. 1, three processing devices 1 are shown. However, the number of processing devices is not limited to three. For example, 20 processing devices 1 are connected to the network 4. Suppose. In this case, if it is attempted to monitor the status of 20 processing devices 1 at a time, the screen information of 20 processing devices must be displayed on the screen of one computer 2.

  In order to achieve such a function, dedicated software (program) is incorporated into the computer 2 in addition to the VNC viewer. This dedicated program is called an RCS monitor. The RCS monitor is a program for causing the computer 2 to execute a process of displaying only necessary specific information by communicating with all connected processing apparatuses 1.

  FIG. 7 is a diagram showing a display example by the RCS monitor. In this example, twelve processing devices are in operation, and a small display frame 20 for twelve is displayed on the screen of one computer 2. In this embodiment, a small display frame 20 corresponding to each processing apparatus 1 has a name 21 of the processing apparatus 1 and an alarm indicating whether an alarm has occurred in the processing apparatus 1 as shown in FIG. Information 22, switch information 23 indicating the state of the local / remote changeover switch 7, and VNC information 24 indicating whether or not the VNC viewer of the computer 2 is activated are displayed. In other words, the specific information required in this embodiment includes information 22 indicating whether an alarm has occurred in the processing apparatus 1, information 23 indicating the state of the local / remote changeover switch 7, and the computer 2. This is information 24 indicating whether or not the VNC viewer is activated.

  The information indicating the alarm is displayed in green around the display of “ALARM” when no alarm is generated in the processing apparatus 1, and is displayed in red when an alarm is generated. Therefore, it is possible to confirm at a glance which of the processing apparatuses in operation are operating normally and which are abnormal and causing an alarm.

  Further, the information 23 indicating the state of the local / remote changeover switch 7 is displayed as “LOCAL” when the switch 7 is switched to the local side, and “REMOTE” when switched to the remote side. Display.

  The information 24 indicating whether or not the VNC viewer of the computer 2 is activated is displayed in yellow around the “VNC ACT” when the VNC viewer is activated, and is displayed in blue when the VNC viewer is not activated. Is done.

  In addition to the display as described above, the RCS monitor communicates with all the processing devices 1, and if the connection with the processing device 1 is unexpectedly disconnected due to a broken wire or the like, it detects it. It has a function of displaying on the screen of the computer 2.

  In addition, the RCS monitor has a function of notifying the processing device 1 of the end when the VNC viewer ends other than the normal logout process.

  Further, the RCS monitor also has a function of notifying the processing device 1 that the information of the processing device 1 can be displayed on the screen of the computer 2 when the VNC viewer is activated in the computer 2.

It is a figure which shows the structure of the remote control system to which this invention is applied. It is a block diagram of the control apparatus integrated in the processing apparatus shown in FIG. It is a figure which shows a login screen. It is a figure which shows a logout screen. It is a figure which shows a connection terminal setting screen. It is a figure which shows a display screen when operation right grant is prohibited. It is a figure for demonstrating the function of a RCS monitor. It is a figure for demonstrating the display content by a RCS monitor.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Processing apparatus 2 Computer 3 Clean room 4,6 Network 5 Touch panel 7 Local / remote changeover switch 10 Control apparatus 11 Control / calculation part 12 Display / input part 13 External storage part 14 Printing part 15 Bus 16 Machine control / calculation part 17 Input / output Part 20 Display frame 21 Name 22 Alarm information 23 Switch information 24 VNC information

Claims (16)

A terminal arranged outside a room in which a plurality of processing devices are installed and the processing device are connected via a network, and an operation on the terminal is displayed while the same operation screen as the operation screen of the processing device is displayed on the terminal. A control device incorporated in the processing device, configured to be used in a remote control system capable of controlling the processing device in
Operation right switching means for switching operation right between the processing device and the terminal;
When an operation right is granted to the terminal and the processing apparatus can be controlled, and when it is detected that an abnormality has occurred in the processing apparatus, in the case of an abnormality other than an abnormality that is detected in advance, Operation right transfer means for forcibly transferring operation right to the processing device ;
Control apparatus characterized by having a. The control device according to claim 1 ,
The control apparatus further comprising operation right grant prohibiting means for prohibiting the operation right from being given to the terminal when the processing apparatus is in a predetermined state. The control device according to claim 2 ,
The control device characterized in that the predetermined state is a state in which the control device is performing a predetermined operation. The control device according to claim 2 ,
The control device characterized in that the predetermined state is a state in which the control device is displaying a predetermined screen. The control device according to claim 2 ,
In the predetermined state, when the display input unit of the control device is in operation, and when a screen prohibiting the operation right from being given to the terminal is displayed, the level setting of the control operation is equal to or higher than the predetermined level. And a control device characterized in that an operation right cannot be given to the terminal. A terminal arranged outside a room in which a plurality of processing devices are installed and the processing device are connected via a network, and an operation on the terminal is displayed while the same operation screen as the operation screen of the processing device is displayed on the terminal. A control device incorporated in the processing device, configured to be used in a remote control system capable of controlling the processing device in
Operation right switching means for switching operation right between the processing device and the terminal;
Operation right grant prohibiting means for prohibiting the grant of the operation right to the terminal when the control device is in a state of displaying a predetermined screen;
A control device comprising: The control device according to claim 6,
An operation right for forcibly transferring the operation right to the processing apparatus when it is detected that an abnormality has occurred in the processing apparatus when the operation right is granted to the terminal and the processing apparatus can be controlled. A control device further comprising a transition means. The control device according to any one of claims 1 to 7,
It further comprises a transmission interval extending means for extending a transmission interval of screen information to be transmitted at regular time intervals to terminals other than the terminal to which the operation right is given and can control the processing device. Control device. The control device according to claim 8, comprising:
The control apparatus according to claim 1, wherein the transmission interval extending means extends the transmission interval by interrupting transmission of the image information at the fixed time interval. A control device according to any one of claims 1 to 9,
A control device further comprising communication control means for setting a terminal capable of communicating with the processing device. A terminal arranged outside a room in which a plurality of processing devices are installed and the processing device are connected via a network, and an operation on the terminal is displayed while the same operation screen as the operation screen of the processing device is displayed on the terminal. And a control method used in a remote control system capable of controlling the processing device.
Switching the operation right between the processing device and the terminal ,
When an operation right is granted to the terminal and the processing apparatus can be controlled, and when it is detected that an abnormality has occurred in the processing apparatus, in the case of an abnormality other than an abnormality that is detected in advance, the method according to claim Rukoto forcibly shifts the operation right to the processing unit. A terminal arranged outside a room in which a plurality of processing devices are installed and the processing device are connected via a network, and an operation on the terminal is displayed while the same operation screen as the operation screen of the processing device is displayed on the terminal. And a control method used in a remote control system capable of controlling the processing device.
Switching the operation right between the processing device and the terminal,
A control method characterized by prohibiting the operation right from being given to the terminal when the control device is in a state of displaying a predetermined screen. A terminal arranged outside a room in which a plurality of processing devices are installed and the processing device are connected via a network, and an operation on the terminal is displayed while the same operation screen as the operation screen of the processing device is displayed on the terminal. A program incorporated in a control device incorporated in the processing device, configured to be used in a remote control system capable of controlling the processing device,
Switching the operation right between the processing device and the terminal ,
When an operation right is granted to the terminal and the processing apparatus can be controlled, and when it is detected that an abnormality has occurred in the processing apparatus, in the case of an abnormality other than an abnormality that is detected in advance, program characterized Rukoto forcibly shifts the operation right to the processing unit. A terminal arranged outside a room in which a plurality of processing devices are installed and the processing device are connected via a network, and an operation on the terminal is displayed while the same operation screen as the operation screen of the processing device is displayed on the terminal. A program incorporated in a control device incorporated in the processing device, configured to be used in a remote control system capable of controlling the processing device,
Switching the operation right between the processing device and the terminal,
A program for prohibiting the operation right from being given to the terminal when the control device is displaying a predetermined screen. A processing device that is connected via a network to a plurality of terminals arranged outside the room in which it is installed, and that can be controlled by operation on the terminal by displaying the same operation screen as the own operation screen on the terminal. There,
A processing unit for processing an object;
A control device that controls the operation of the processing unit and transmits image information to the terminal via the network;
The controller is
Operation right switching means for switching operation right between the processing device and the terminal ;
When an operation right is granted to the terminal and the processing apparatus can be controlled, and when it is detected that an abnormality has occurred in the processing apparatus, in the case of an abnormality other than an abnormality that is detected in advance, An operation right transfer means for forcibly transferring an operation right to the processing device. A processing device that is connected via a network to a plurality of terminals arranged outside the room in which it is installed, and that can be controlled by operation on the terminal by displaying the same operation screen as the own operation screen on the terminal. There,
A processing unit for processing an object;
A control device for controlling the operation of the processing unit and transmitting image information to the terminal via the network;
Have
The control device includes:
Operation right switching means for switching operation right between the processing device and the terminal;
Operation right grant prohibiting means for prohibiting the grant of the operation right to the terminal when the control device is in a state of displaying a predetermined screen;
A processing apparatus comprising:

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