JP4627966B2 - Light emitting device and manufacturing method thereof - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a semiconductor device, and more particularly to a light-emitting device having a light-emitting element formed over a substrate having an insulating surface and a manufacturing method thereof. The present invention also relates to a module in which an IC including a controller is mounted on a panel having the light emitting element. Note that in this specification, a panel having a light-emitting element and a module having a light-emitting element are collectively referred to as a light-emitting device. The present invention further relates to an apparatus for manufacturing the light emitting device.
[0002]
Note that in this specification, a semiconductor device refers to all devices that can function by utilizing semiconductor characteristics, and a light-emitting device, an electro-optical device, a semiconductor circuit, and an electronic device are all semiconductor devices.
[0003]
[Prior art]
In recent years, technology for forming TFTs (Thin Film Transistors) on a substrate has greatly advanced, and application development to active matrix display devices has been promoted. In particular, a TFT using a polysilicon film has a higher field effect mobility (also referred to as mobility) than a TFT using a conventional amorphous silicon film, and thus can operate at high speed. For this reason, a drive circuit composed of a TFT using a polysilicon film is provided on the same substrate as the pixel, and development for controlling each pixel has been actively conducted. An active matrix display device in which a pixel and a driver circuit are incorporated on the same substrate is expected to have various advantages such as a reduction in manufacturing cost, a reduction in size of the display device, an increase in yield, and a reduction in throughput.
[0004]
In addition, active matrix light-emitting devices (hereinafter also simply referred to as light-emitting devices) having EL elements as self-light-emitting elements have been actively researched. The light emitting device is also called an organic light emitting diode (OELD) or an organic light emitting diode (OLED).
[0005]
In an active matrix light emitting device, each pixel is provided with a switching element (hereinafter referred to as a switching element) made of a TFT, and a driving element (hereinafter referred to as a current control TFT) that controls current is operated by the switching TFT. The EL layer (strictly, the light emitting layer) emits light. For example, a light emitting device described in Patent Document 1 is known.
[0006]
The EL element emits light by itself and has high visibility, is not required for a backlight necessary for a liquid crystal display (LCD), is optimal for thinning, and has no restriction on the viewing angle. Therefore, a light emitting device using an EL element has attracted attention as a display device that replaces a CRT or an LCD.
[0007]
Note that the EL element includes a layer containing an organic compound (hereinafter, referred to as an EL layer) from which luminescence generated by applying an electric field is obtained, an anode, and a cathode. Luminescence in an organic compound includes light emission (fluorescence) when returning from the singlet excited state to the ground state and light emission (phosphorescence) when returning from the triplet excited state to the ground state. A light-emitting device manufactured by a film formation method can be applied to either light emission.
[0008]
An EL element has a structure in which an EL layer is sandwiched between a pair of electrodes, but the EL layer usually has a laminated structure. Typically, a laminated structure of “hole transport layer / light emitting layer / electron transport layer” can be given. This structure has very high luminous efficiency, and most of the light emitting devices that are currently under research and development employ this structure.
[0009]
In addition, a hole injection layer / a hole transport layer / a light emitting layer / an electron transport layer, or a hole injection layer / a hole transport layer / a light emitting layer / an electron transport layer / an electron injection layer are sequentially laminated on the anode. Good structure. You may dope a fluorescent pigment | dye etc. with respect to a light emitting layer. These layers may all be formed using a low molecular weight material, or may be formed using a high molecular weight material.
[0010]
Further, in an active matrix light emitting device so far, an electrode electrically connected to a TFT on a substrate is formed as an anode, an organic compound layer is formed on the anode, and a cathode is formed on the organic compound layer. It has a structure in which a light-emitting element is included and light generated in the organic compound layer is extracted from the anode, which is a transparent electrode, toward the TFT.
[0011]
However, in this structure, when the resolution is improved, there is a problem that the aperture ratio is limited by the arrangement of TFTs and wirings in the pixel portion.
[0012]
[Patent Document 1]
JP-A-10-189252
[0013]
[Problems to be solved by the invention]
In the present invention, a TFT-side electrode electrically connected to a TFT on a substrate is formed as a cathode, an organic compound layer is formed on the cathode, and an anode that is a transparent electrode is formed on the organic compound layer. An active matrix light-emitting device having a light-emitting element (hereinafter referred to as a top emission structure) is manufactured. Alternatively, a structure in which a TFT-side electrode electrically connected to a TFT on a substrate is formed as an anode, an organic compound layer is formed on the anode, and a cathode that is a translucent electrode is formed on the organic compound layer ( This structure is also referred to as a top emission structure), and an active matrix light-emitting device having a light-emitting element is manufactured.
[0014]
In each of these structures, there arises a problem that the film resistance of the transparent electrode is increased. In particular, when the film thickness of the transparent electrode is reduced, the film resistance is further increased. When the film resistance of the transparent electrode serving as the anode or the cathode becomes high, the in-plane potential distribution becomes non-uniform due to the voltage drop, resulting in a problem that the luminance of the light emitting element varies. Accordingly, an object of the present invention is to provide a light emitting device having a structure in which the film resistance of a transparent electrode in a light emitting element is reduced, and a method for manufacturing the same. Then, it is an object to provide an electric appliance using such a light-emitting device as a display portion.
[0015]
In addition, it is an object to improve reliability of the light-emitting element and the light-emitting device.
[0016]
[Means for Solving the Problems]
In the production of a light-emitting element formed on a substrate, the present invention forms a conductive film on an insulator disposed between pixel electrodes before forming an organic compound layer, thereby reducing the film resistance of a transparent electrode. It aims to make it easier.
[0017]
Further, it is a feature of the present invention that a lead-out wiring is formed using the conductive film and connected to another wiring existing in the lower layer.
[0018]
The configuration of the invention disclosed in this specification is as follows.
A pixel portion having a plurality of light emitting elements each including a first electrode, an organic compound layer in contact with the first electrode, and a second electrode in contact with the organic compound layer; a drive circuit; and a terminal portion. A light emitting device comprising:
In the pixel portion, an end portion of the first electrode connected to the thin film transistor is covered with an insulator, and a third electrode made of a conductive material is formed on the insulator, and the insulator And an organic compound layer and a second electrode in contact with the organic compound layer and the third electrode are provided on the first electrode,
Between the terminal portion and the pixel portion, a wiring made of the same material as the third electrode or a wiring made of the same material as the second electrode is connected to a wiring extending from the terminal. It is a light-emitting device.
[0019]
In the above structure, the third electrode may have the same pattern shape as the insulator. In that case, it is formed using the same mask as the insulator.
[0020]
Alternatively, in the above structure, the third electrode may have a pattern shape different from that of the insulator. In that case, after patterning the insulator, a film made of a conductive material is formed and formed using a mask different from the patterning of the insulator.
[0021]
According to another aspect of the present invention, in manufacturing a light emitting element formed over a substrate, a conductive film is formed on an insulator disposed between pixel electrodes before the organic compound layer is formed. After the layer and the transparent electrode are formed, an electrode made of a highly conductive material is formed on the transparent electrode to reduce the film resistance of the transparent electrode. Note that an electrode formed on the transparent electrode is not provided in a place to be a light emitting region. Further, it is a feature of the present invention that a lead-out wiring is formed using the conductive film and connected to another wiring existing in the lower layer.
[0022]
Other configurations of the invention disclosed in this specification are as follows:
A pixel portion having a plurality of light emitting elements each including a first electrode, an organic compound layer in contact with the first electrode, and a second electrode in contact with the organic compound layer; a drive circuit; and a terminal portion. A light emitting device comprising:
In the pixel portion, an end portion of the first electrode connected to the thin film transistor is covered with an insulator, and an organic compound layer is formed on a part of the insulator and the first electrode, and the organic compound A second electrode in contact with the layer, and a third electrode made of a conductive material in contact with a region of the second electrode that does not overlap the first electrode;
Between the terminal portion and the pixel portion, a wiring made of the same material as the third electrode or a wiring made of the same material as the second electrode is connected to a wiring extending from the terminal. It is a light-emitting device.
[0023]
In each of the above structures, the second electrode is a cathode or an anode of the light emitting element.
[0024]
In each of the above structures, the third electrode is made of a material having an electric resistance smaller than that of the material forming the second electrode, and is doped with an impurity element imparting a conductivity type, W, WSi _X An element selected from Al, Ti, Mo, Cu, Ta, Cr, or Mo, or a film mainly composed of an alloy material or compound material containing the element as a main component, or a laminated film thereof. It is said. For example, the third electrode is preferably an electrode composed of a laminate having a nitride layer or a fluoride layer as the uppermost layer.
[0025]
In each of the above structures, the first electrode is a cathode or an anode of the light emitting element. For example, when the second electrode is a cathode, the first electrode is an anode, and when the second electrode is an anode, the first electrode is a cathode.
[0026]
In each of the above structures, the insulator is a barrier (also referred to as a bank) made of an organic resin covered with an inorganic insulating film, or the insulator is an inorganic insulating film. The inorganic insulating film is an insulating film mainly composed of silicon nitride having a thickness of 10 to 100 nm.
[0027]
In the light emitting device, the incident external light (light outside the light emitting device) is reflected by the back surface of the cathode (the surface in contact with the light emitting layer) at the non-light emitting pixel, and the back surface of the cathode acts like a mirror. Then, there was a problem that the external scenery was reflected on the observation surface (the surface facing the observer). In addition, in order to avoid this problem, a device has been devised to attach a circularly polarizing film on the observation surface of the light emitting device so that no external scenery is reflected on the observation surface, but the circularly polarizing film is very expensive. For this reason, there is a problem in that the manufacturing cost is increased.
[0028]
An object of the present invention is to prevent the light emitting device from being mirrored without using a circularly polarizing film, thereby reducing the manufacturing cost of the light emitting device and providing an inexpensive light emitting device. Therefore, the present invention is characterized in that an inexpensive color filter is used instead of the circularly polarizing film. In the above structure, in order to improve color purity, the light emitting device preferably includes a color filter corresponding to each pixel. Moreover, what is necessary is just to make it the black part (black organic resin) of a color filter overlap between each light emission area | region. Furthermore, you may make it the black part (black colored layer) of a color filter overlap with the part which a different organic compound layer overlaps partially.
[0029]
However, a color filter is provided in the emission direction of light emission, that is, between the light emitting element and the observer. For example, in the case where a substrate provided with a light-emitting element is not allowed to pass, a color filter may be attached to the sealing substrate. Alternatively, in the case of passing a substrate provided with a light-emitting element, a color filter may be attached to the substrate provided with the light-emitting element. This eliminates the need for a circularly polarizing film.
[0030]
In addition, it is extremely useful to use a transparent conductive film (typically ITO, ZnO) as an anode on the layer containing an organic compound and form a protective film made of an inorganic insulating film thereon. Further, as a cathode on the layer containing an organic compound, a metal thin film (film thickness through which light passes) made of Al, Ag, Mg, or an alloy thereof (typically AlLi) is used, and an inorganic insulating film is formed thereon. It is also effective to form a protective film made of
[0031]
Further, before forming the protective film made of an inorganic insulating film, it is preferable to form a film containing hydrogen, typically a thin film containing carbon as a main component, or a silicon nitride film by a plasma CVD method or a sputtering method. The film containing hydrogen may be a stacked film of a thin film containing carbon as a main component and a silicon nitride film.
[0032]
In addition, other configurations of the present invention are:
A light-emitting element over a substrate having an insulating surface, the light-emitting element includes an anode, a cathode, and an organic compound layer sandwiched between the anode and the cathode;
The light-emitting element is covered with a film containing hydrogen.
[0033]
By performing heat treatment in a temperature range that the organic compound layer can withstand, or by using heat generated when the light emitting element emits light, hydrogen is diffused from the film containing hydrogen, so that defects in the organic compound layer are hydrogenated. Can be terminated. When defects in the organic compound layer are terminated with hydrogen, reliability as a light-emitting device is improved. Further, when the film containing hydrogen is formed, defects in the organic compound layer can be terminated with hydrogen by plasma-ized hydrogen. In addition, the protective film formed over the film containing hydrogen effectively blocks hydrogen diffused to the protective film side, efficiently diffuses hydrogen into the organic compound layer, and terminates defects in the organic compound layer with hydrogen. Also fulfills. Note that the film containing hydrogen can also function as a protective film of the light-emitting element.
[0034]
Further, the film containing hydrogen can function as a buffer layer. When a silicon nitride film is formed in contact with the transparent conductive film by a sputtering method, impurities (In, Sn, Zn, etc.) contained in the transparent conductive film are Although there is a possibility of being mixed into the silicon nitride film, impurities can be prevented from being mixed into the silicon nitride film by forming the hydrogen-containing film serving as the buffer layer therebetween. By forming the buffer layer with the above structure, impurities (In, Sn, etc.) from the transparent conductive film can be prevented from mixing, and an excellent protective film free of impurities can be formed.
[0035]
In addition, other configurations of the present invention are:
A light-emitting element over a substrate having an insulating surface, the light-emitting element includes an anode, a cathode, and an organic compound layer sandwiched between the anode and the cathode;
The light-emitting element is covered with a film containing hydrogen, and the film containing hydrogen is covered with a protective film made of an inorganic insulating film.
[0036]
In addition, a manufacturing method for realizing the above configuration is also one of the present invention, and a configuration related to the manufacturing method of the present invention is as follows.
Forming a TFT on an insulating surface; forming a cathode electrically connected to the TFT; forming an organic compound layer on the cathode; and forming an anode on the organic compound layer; A method for manufacturing a light-emitting device is characterized in that a film containing hydrogen is formed.
[0037]
In addition, other configurations relating to the manufacturing method of the present invention are as follows:
Forming a TFT on an insulating surface; forming an anode electrically connected to the TFT; forming an organic compound layer on the anode; and forming a cathode on the organic compound layer; A method for manufacturing a light-emitting device is characterized in that a film containing hydrogen is formed.
[0038]
In each of the above structures related to the manufacturing method of the present invention, the film containing hydrogen is formed by a plasma CVD method or a sputtering method in a temperature range that the organic compound layer can withstand, for example, room temperature to 100 ° C. or less. The film containing hydrogen is a thin film containing carbon as a main component or a silicon nitride film.
[0039]
In each of the above structures related to the manufacturing method of the present invention, the step of forming the organic compound layer is performed by a vapor deposition method, a coating method, an ion plating method, or an ink jet method.
[0040]
In each of the above structures related to the manufacturing method of the present invention, a protective film including an inorganic insulating film is formed over the hydrogen-containing film.
[0041]
In each of the above structures related to the manufacturing method of the present invention, when the film containing hydrogen is formed, defects in the organic compound layer are terminated with hydrogen.
[0042]
In addition, in order to prevent deterioration due to moisture or oxygen, when sealing a light emitting element with a sealing can or a sealing substrate, hydrogen gas is filled in a sealed space, or hydrogen and an inert gas (rare gas or nitrogen) are used. It may be filled.
[0043]
Other configurations of the present invention include:
A light-emitting element over a substrate having an insulating surface, the light-emitting element includes an anode, a cathode, and an organic compound layer sandwiched between the anode and the cathode;
The light-emitting element is a light-emitting device that is sealed with a light-transmitting substrate and a sealing material, and that the sealed space contains hydrogen.
[0044]
In the above structure, the light-emitting element is covered with a film containing hydrogen (a thin film containing carbon as a main component or a silicon nitride film).
[0045]
In addition, with the above structure, by performing heat treatment in a temperature range that the organic compound layer can withstand, or by using heat generated when the light emitting element emits light, hydrogen is diffused from the space containing hydrogen, and organic Defects in the compound layer can be terminated with hydrogen. When defects in the organic compound layer are terminated with hydrogen, reliability as a light-emitting device is improved.
[0046]
Note that in this specification, all layers provided between the cathode and the anode are collectively referred to as an EL layer. Therefore, the above-described hole injection layer, hole transport layer, light emitting layer, electron transport layer, and electron injection layer are all included in the EL layer.
[0047]
In the present invention, the carbon-based thin film is a DLC film (Diamond like Carbon) having a thickness of 3 to 50 nm. DLC films are short-range ordered as bonds between carbons, SP ^Three Although it has a bond, it has a macroscopic amorphous structure. The composition of the DLC film is 70 to 95 atomic% for carbon and 5 to 30 atomic% for hydrogen, and is very hard and excellent in insulation. Further, such a DLC film is characterized by low gas permeability such as water vapor and oxygen. Further, it is known to have a hardness of 15 to 25 GPa as measured by a micro hardness meter.
[0048]
The DLC film can be formed by a plasma CVD method (typically, an RF plasma CVD method, a microwave CVD method, an electron cyclotron resonance (ECR) CVD method, etc.), a sputtering method, or the like. Whichever film formation method is used, the DLC film can be formed with good adhesion. The DLC film is formed by placing the substrate on the cathode. Alternatively, a dense and hard film can be formed by applying a negative bias and utilizing ion bombardment to some extent.
[0049]
The reaction gas used for film formation includes hydrogen gas and hydrocarbon-based gas (for example, CH _Four , C ₂ H ₂ , C ₆ H ₆ And the like, and ionized by glow discharge, and the ions are accelerated and collided with a negative self-biased cathode to form a film. By doing so, a dense and smooth DLC film can be obtained.
[0050]
The DLC film is characterized by comprising an insulating film that is transparent or translucent to visible light.
[0051]
Further, in this specification, transparent to visible light means that the visible light transmittance is 80 to 100%, and translucent to visible light is a visible light transmittance of 50 to 80%. It means that.
[0052]
DETAILED DESCRIPTION OF THE INVENTION
Embodiments of the present invention will be described below.
[0053]
(Embodiment 1)
FIG. 2 is a top view of the EL module. A substrate provided with an infinite number of TFTs (also referred to as a TFT substrate) includes a pixel portion 40 on which display is performed, drive circuits 41a and 41b for driving each pixel of the pixel portion, and electrodes and leads provided on the EL layer. A connection portion for connecting the wiring and a terminal portion 42 for attaching the FPC for connection to an external circuit are provided. Further, the EL element is sealed with a substrate for sealing the EL element and a sealing material 33. 1A is a cross-sectional view taken along the chain line AA ′ in FIG.
[0054]
Pixels are regularly arranged in the direction of the chain line AA ′. Here, an example in which R, G, and B are arranged in the X direction is shown.
[0055]
In FIG. 1A, the light emitting region (R) indicates a red light emitting region, the light emitting region (G) indicates a green light emitting region, and the light emitting region (B) indicates a blue light emitting region. Thus, a light emitting display device that is full-colored by these three color light emitting regions is realized.
[0056]
In FIG. 1A, TFT 1 is an element for controlling the current flowing in the EL layer 17 that emits red light, and reference numerals 4 and 7 denote a source electrode or a drain electrode. The TFT 2 is an element that controls the current flowing through the EL layer 18 that emits green light, and 5 and 8 are a source electrode or a drain electrode. The TFT 3 is an element that controls the current flowing through the EL layer 19 that emits blue light, and reference numerals 6 and 9 denote a source electrode or a drain electrode. Reference numerals 15 and 16 denote interlayer insulating films made of an organic insulating material or an inorganic insulating film material.
[0057]
Reference numerals 11 to 13 denote anodes (or cathodes) of the EL elements, and reference numeral 20 denotes a cathode (or anode) of the EL elements. Here, 20 is a thin metal layer (typically an alloy such as MgAg, MgIn, AlLi) and a transparent conductive film (ITO (indium tin oxide alloy), indium oxide zinc oxide alloy (In ₂ O _Three —ZnO), zinc oxide (ZnO) or the like as a cathode, and light from each light emitting element is allowed to pass therethrough. However, the transparent conductive film does not function as a cathode and is provided to reduce electrical resistance. The anode has a large work function, specifically, a material such as platinum (Pt), chromium (Cr), tungsten (W), or nickel (Ni), a transparent conductive film (ITO, ZnO, etc.), or These laminates may be used.
[0058]
Further, both ends of 11 to 13 and the space between them are covered with an organic insulator 24 (also called a barrier or a bank). Further, the organic insulator 24 is covered with the inorganic insulating film 14. Further, an organic compound layer is formed on a part of the organic insulator 24.
[0059]
An auxiliary electrode 21 is provided on the organic insulator 24 (also called a barrier or bank) covered with the inorganic insulating film 14. The auxiliary electrode 21 has a function of lowering the electrical resistance value of the cathode (or anode). Since the resistance value of the transparent conductive film described above is relatively high, it is difficult to increase the screen size, but by providing the auxiliary electrode 21, the resistance of the entire cathode (or anode) electrode is reduced. be able to. In addition, the transparent conductive film can be made thin.
[0060]
Further, the auxiliary electrode 21 is connected to the underlying wiring or electrode. The auxiliary electrode 21 may be formed and patterned before forming the EL layer. The auxiliary electrode 21 is made of poly-Si, W, WSi doped with an impurity element imparting a conductivity type using a sputtering method or a vapor deposition method. _X , Al, Ti, Mo, Cu, Ta, Cr, or an element selected from Mo, or an alloy material or compound material containing the element as a main component, or a stacked film thereof. . Thus, the cathode can be drawn out by forming a transparent conductive film in contact with the auxiliary electrode 21 in contact with the lower electrode. FIG. 1C is a cross-sectional view taken along the chain line CC ′ shown in FIG. In addition, in FIG. 1C, the electrodes indicated by dotted lines are electrically connected. In the terminal portion, the electrode of the terminal is formed of the same material as the cathode 10.
[0061]
Further, the sealing substrate 30 is attached by the sealing material 33 so that the interval of about 10 μm is maintained, and all the light emitting elements are sealed. The sealing material 33 is preferably narrowed so as to overlap a part of the drive circuit. It is preferable to perform deaeration by annealing in vacuum immediately before the sealing substrate 30 is attached by the sealing material 33. Further, when the sealing substrate 30 is attached, it is performed in an atmosphere containing hydrogen and an inert gas (rare gas or nitrogen), and the sealing substrate 30 is sealed by the protective film 32, the sealing material 33, and the sealing substrate 30. It is preferable to include hydrogen in the space. By utilizing heat generated when the light emitting element emits light, hydrogen can be diffused from the space containing hydrogen, and defects in the organic compound layer can be terminated with hydrogen. When defects in the organic compound layer are terminated with hydrogen, reliability as a light-emitting device is improved.
[0062]
Furthermore, in order to improve color purity, the sealing substrate 30 is provided with a color filter corresponding to each pixel. Among the color filters, the red colored layer 31b is provided to face the red light emitting region (R), the green colored layer 31c is provided to face the green light emitting region (G), and the blue colored layer 31d. Is provided to face the blue light emitting region (B). The areas other than the light emitting area are shielded from light by the black part of the color filter, that is, the light shielding part 31a. In addition, the light-shielding part 31a is comprised with the organic film containing a metal film (chromium etc.) or a black pigment.
[0063]
In the present invention, a circularly polarizing plate is unnecessary by providing a color filter.
[0064]
1B is a cross-sectional view taken along the chain line BB ′ shown in FIG. Also in FIG. 1B, both ends of 11a to 11c and the space between them are covered with an inorganic insulating film 14. Here, an example is shown in which the EL layer 17 that emits red light is common, but there is no particular limitation, and an EL layer may be formed for each pixel that emits the same color.
[0065]
In FIG. 1, a protective film 32 is formed in order to increase the reliability of the light emitting device. The protective film 32 is an insulating film mainly composed of silicon nitride or silicon nitride oxide obtained by sputtering. In FIG. 1, it is preferable to make the thickness of the protective film as thin as possible in order to allow light emission to pass through the protective film.
[0066]
Further, in order to improve the reliability of the light emitting device, a film containing hydrogen is formed before the protective film 32 is formed. By forming a film containing hydrogen before forming the protective film 32, defects in the organic compound layers 17 to 19 are terminated. The film containing hydrogen may be a thin film containing carbon as a main component or a silicon nitride film. As a method of forming the film containing hydrogen, the film is formed by a plasma CVD method or a sputtering method in a temperature range that the organic compound layer can withstand, for example, room temperature to 100 ° C. or less. Note that in FIG. 1, a film containing hydrogen is not shown because it is regarded as a part of the protective film. The film containing hydrogen can also be used as a buffer layer that relieves the film stress of the protective film 32.
[0067]
Needless to say, the present invention is not limited to the structure shown in FIG. FIGS. 3A to 3D show examples in which the configuration is partly different from that in FIG. For simplification, in FIGS. 3A to 3D, the same reference numerals are used for the same portions as those in FIG.
[0068]
FIG. 1C shows an example in which an electrode made of the same material (transparent electrode) as the cathode is provided in the terminal portion, but FIG. 3A shows an electrode (upper layer) made of the same material as the gate electrode of the TFT. Is a W film, and a lower layer is a TaN film).
[0069]
FIG. 3B shows an example in which the electrode 10 made of the same material as the pixel electrode (anode) is connected to the FPC. The electrode 10 is provided in contact with an electrode (the upper layer is a W film and the lower layer is a TaN film) made of the same material as the TFT gate electrode.
[0070]
3C is formed on the electrode 10 made of the same material as the pixel electrode (anode) provided on the TFT lead-out wiring (wiring laminated in the order of TiN film, Al film, TiN film). This is an example of connecting the FPC with an electrode made of the same material (transparent electrode) as the cathode 20 made.
[0071]
FIG. 3D shows an electrode made of the same material (transparent electrode) as the cathode 20 formed on the TFT lead-out wiring (wiring laminated in the order of TiN film, Al film, TiN film). This is an example of connection.
[0072]
(Embodiment 2)
Here, a film containing hydrogen and a protective film are described with reference to FIGS.
[0073]
FIG. 4A is a schematic diagram illustrating an example of a stacked structure of EL elements. In FIG. 4A, 200 is a cathode (or anode), 201 is an EL layer, 202 is an anode (or cathode), 203 is a DLC film containing hydrogen, and 204 is a protective film. In the case where light emission is allowed to pass through the anode 202, a light-transmitting conductive film (such as ITO or ZnO) is preferably used as the anode 202. Further, as the cathode 200, a metal film (an alloy such as MgAg, MgIn, or AlLi, or a film formed by co-evaporation of an element belonging to Group 1 or 2 of the periodic table and aluminum) or a laminate thereof is used. Is preferred.
[0074]
As the protective film 204, an insulating film mainly containing silicon nitride or silicon nitride oxide obtained by a sputtering method (a DC method or an RF method) may be used. If a silicon target is used and formed in an atmosphere containing nitrogen and argon, a silicon nitride film can be obtained. A silicon nitride target may be used. Further, the protective film 204 may be formed using a film formation apparatus using remote plasma. Moreover, when light emission is allowed to pass through the protective film, the protective film is preferably as thin as possible.
[0075]
In addition, the DLC film 203 containing hydrogen has 70 to 95 atomic% of carbon and 5 to 30 atomic% of hydrogen, and is extremely hard and excellent in insulating properties. The DLC film containing hydrogen can be formed by a plasma CVD method (typically, an RF plasma CVD method, a microwave CVD method, an electron cyclotron resonance (ECR) CVD method, or the like), a sputtering method, or the like.
[0076]
As a method of forming the DLC film 203 containing hydrogen, the DLC film 203 is formed in a temperature range that the organic compound layer can withstand, for example, room temperature to 100 ° C. or less.
[0077]
The reaction gas used for film formation when generating plasma is hydrogen gas or a hydrocarbon-based gas (for example, CH _Four , C ₂ H ₂ , C ₆ H ₆ Etc.) may be used.
[0078]
By performing heat treatment in a temperature range that the organic compound layer can withstand or utilizing heat generated when the light emitting element emits light, hydrogen is diffused from the DLC film containing hydrogen, and defects in the organic compound layer are removed. It can be terminated with hydrogen. When defects in the organic compound layer are terminated with hydrogen, reliability as a light-emitting device is improved. Further, when the DLC film containing hydrogen is formed, defects in the organic compound layer can be terminated with hydrogen by plasma-ized hydrogen. In addition, the protective film formed to cover the DLC film containing hydrogen effectively blocks hydrogen diffused to the protective film side, efficiently diffuses hydrogen into the organic compound layer, and terminates defects in the organic compound layer with hydrogen. Also plays a role. Note that the DLC film containing hydrogen can also function as a protective film of a light-emitting element.
[0079]
Furthermore, the DLC film containing hydrogen can also function as a buffer layer. When a silicon nitride film is formed in contact with a film made of a transparent conductive film by a sputtering method, impurities (In, Sn, Zn, etc.) may be mixed into the silicon nitride film. However, impurities can be prevented from being mixed into the silicon nitride film by forming the DLC film containing hydrogen as a buffer layer therebetween. By forming the buffer layer with the above structure, impurities (In, Sn, etc.) from the transparent conductive film can be prevented from mixing, and an excellent protective film free of impurities can be formed.
[0080]
With such a structure, the light emitting element can be protected and the reliability can be improved.
[0081]
FIG. 4B is a schematic view illustrating another example of a stacked structure of EL elements. In FIG. 4B, 300 is a cathode (or anode), 301 is an EL layer, 302 is an anode (or cathode), 303 is a silicon nitride film containing hydrogen, and 304 is a protective film. In the case where light emission is allowed to pass through the anode 302, it is preferable to use a light-transmitting conductive material, a very thin metal film (MgAg), or a laminate thereof as 302.
In the case where light emission is allowed to pass through the anode 302, a light-transmitting conductive film (such as ITO or ZnO) is preferably used as the anode 302. Further, as the cathode 300, a metal film (an alloy such as MgAg, MgIn, or AlLi, or a film formed by co-evaporation of an element belonging to Group 1 or 2 of the periodic table and aluminum) or a laminate thereof is used. Is preferred.
[0082]
As the protective film 304, an insulating film mainly containing silicon nitride or silicon nitride oxide obtained by a sputtering method (DC method or RF method) may be used. If a silicon target is used and formed in an atmosphere containing nitrogen and argon, a silicon nitride film can be obtained. A silicon nitride target may be used. Further, the protective film 304 may be formed using a film formation apparatus using remote plasma. Moreover, when light emission is allowed to pass through the protective film, the protective film is preferably as thin as possible.
[0083]
The silicon nitride film 303 containing hydrogen is formed by a plasma CVD method (typically, an RF plasma CVD method, a microwave CVD method, an electron cyclotron resonance (ECR) CVD method, etc.), an RF sputtering method, a DC sputtering method, or the like. Can be formed.
[0084]
As a method for forming the silicon nitride film 303 containing hydrogen, the silicon compound film 303 is formed in a temperature range that the organic compound layer can withstand, for example, room temperature to 100 ° C. or less.
[0085]
When a plasma CVD method is used as a method for forming the silicon nitride film 303 containing hydrogen, the reaction gas is a gas containing nitrogen (N ₂ , NH _Three A nitrogen oxide gas represented by NOx) and a hydrogen silicide gas (for example, silane (SiH _Four Or disilane or trisilane).
[0086]
When a sputtering method is used as a method for forming the silicon nitride film 303 containing hydrogen, a silicon nitride film containing hydrogen can be obtained by using a silicon target and forming it in an atmosphere containing hydrogen, nitrogen, and argon. A silicon nitride target may be used.
[0087]
By performing heat treatment in a temperature range that the organic compound layer can withstand or utilizing heat generated when the light emitting element emits light, hydrogen is diffused from the silicon nitride film containing hydrogen to cause defects in the organic compound layer. Can be terminated with hydrogen. When defects in the organic compound layer are terminated with hydrogen, reliability as a light-emitting device is improved. Further, when the silicon nitride film containing hydrogen is formed, defects in the organic compound layer can be terminated with hydrogen by plasma-ized hydrogen. In addition, the protective film formed over the silicon nitride film containing hydrogen effectively blocks hydrogen diffused to the protective film side, effectively diffuses hydrogen into the organic compound layer, and terminates defects in the organic compound layer with hydrogen. Also plays the role of letting. Note that the silicon nitride film containing hydrogen can also function as a protective film of the light-emitting element.
[0088]
Further, the silicon nitride film containing hydrogen can also function as a buffer layer. When a silicon nitride film is formed in contact with a film made of a transparent conductive film by a sputtering method, impurities (In, Sn) contained in the transparent conductive film are formed. , Zn, or the like) may be mixed into the silicon nitride film, but the silicon nitride film containing hydrogen serving as a buffer layer may be formed therebetween to prevent impurities from entering the silicon nitride film. By forming the buffer layer with the above structure, impurities (In, Sn, etc.) from the transparent conductive film can be prevented from mixing, and an excellent protective film free of impurities can be formed.
[0089]
With such a structure, the light emitting element can be protected and the reliability can be improved.
[0090]
4A and 4B show an example in which a single layer is formed as a film containing hydrogen. However, a stack of a silicon nitride film containing hydrogen and a DLC film containing hydrogen, or these three layers are used. The above stacking may be used.
[0091]
Further, this embodiment can be applied not only to an active matrix display device but also to a passive display device.
[0092]
Further, this embodiment mode can be freely combined with Embodiment Mode 1.
[0093]
(Embodiment 3)
Here, an example in which the configuration is partially different from that in FIG. 1 is shown in FIG. Here, the present invention will be described below by taking a 3 × 3 pixel as an example among many pixels regularly arranged in the pixel portion. In the cross-sectional structure, the TFT is almost the same as that in FIG. 1. For the sake of simplification, the same reference numerals are used in FIG. 6 for the same portions as those in FIG.
[0094]
FIG. 6A is a cross-sectional view taken along the chain line AA ′ in FIG. The light emitting area 50R shows a red light emitting area, the light emitting area 50G shows a green light emitting area, the light emitting area 50B shows a blue light emitting area, and these three colors of light emitting areas are full-colored. A light emitting display device is realized.
[0095]
In this embodiment mode, as shown in FIG. 6A, patterning is performed using the same mask, and the shapes of the auxiliary electrode 621 and the organic insulator 624 viewed from the top are almost the same. is there. In this case, as shown in FIG. 6C, the auxiliary electrode 621 is electrically connected to the wiring made of the same material as the source wiring at the cathode 20.
[0096]
Further, the pixel electrode 612 is formed on the interlayer insulating film 15, and a TFT contact hole is formed after the pixel electrode 612 is formed, and the TFT and the pixel electrode 612 are electrically connected by electrodes 607 and 608 formed thereafter. Connected. In addition, both ends of the pixel electrode and the space between them are covered with an inorganic insulator 14. Further, as in FIG. 1, an organic compound layer is formed even on a part of the organic insulator 624.
[0097]
FIG. 5B is a top view immediately after formation of the pixel electrode, and corresponds to FIG. 5A and 5B, a strip-shaped organic compound layer is provided for each pixel row (Y direction). Between the organic compound layers having different colors, an organic insulator 624 is provided in a strip shape. In FIG. 5A, an organic insulator 624 and an auxiliary wiring 621 are provided for each column of pixels (Y direction).
[0098]
FIG. 7A is a top view corresponding to FIGS. 5 and 6. In FIG. 7A, a partial cross-sectional view of the connection portion in the diagram shown on the left side is shown on the right side, which is the same as FIG. 6C. FIG. 8A shows an example of a metal mask to be used when patterning the auxiliary wiring 621 and the organic insulator shown in FIG.
[0099]
In addition, when the total film thickness of the organic insulator and the auxiliary electrode becomes relatively large, the step becomes large, and it may be difficult to electrically connect with the transparent conductive film. In particular, when the transparent conductive film is thinned, a line defect may occur due to poor coverage. Therefore, in order to make the connection between the auxiliary electrode 621 and the lower layer electrode more reliable, the number of masks may be increased as shown in FIG. Alternatively, the electrode 622 may be formed by a vapor deposition method using a metal mask.
[0100]
As shown in FIG. 7C, a wiring 623 made of the same material as the source wiring is provided around the pixel portion in advance, and a second auxiliary electrode 625 is formed so as to be orthogonal to the auxiliary electrode 621. May be. Thus, the second auxiliary electrode 625 is provided in direct contact with the auxiliary electrode 621 and can also be in direct contact with the wiring 623. Note that the light-emitting region is appropriately designed between the auxiliary electrode 621 and the second auxiliary electrode 625. In addition, FIG. 8B illustrates an example of a metal mask to be used when the second auxiliary electrode 625 illustrated in FIG. 7A is patterned.
[0101]
FIG. 7C shows an example in which the first auxiliary electrode 621 and the second auxiliary electrode 625 are formed by patterning twice, but the lattice is formed using the metal mask shown in FIG. An auxiliary electrode may be formed in a shape. As shown in the right side view of FIG. 8C, each opening is divided by a thin line, but since there is a wraparound in vapor deposition, an auxiliary electrode can be formed in a lattice shape although a part of the film thickness is reduced. it can.
[0102]
Further, this embodiment can be freely combined with Embodiment 1 or Embodiment 2.
[0103]
(Embodiment 4)
Here, FIG. 9 shows an example in which the configuration is partially different from FIG. Here, the present invention will be described below by taking a 3 × 3 pixel as an example among many pixels regularly arranged in the pixel portion. The cross-sectional structure is substantially the same as that in FIG. 1 except that the organic insulator 24 is not present and the organic compound layer 60 made of a polymer is present on the entire surface. Parts that are the same as 1 use the same reference numerals. FIG. 9A is a cross-sectional view taken along the chain line AA ′ in FIG.
[0104]
The organic insulator 24 shown in FIG. 1 does not exist in the structure shown in FIG. 9. Instead, the inorganic insulating film 14 and the auxiliary electrode 721 keep the intervals between the organic compounds 17, 18, and 19.
[0105]
In addition, an organic compound layer 60 made of a polymer (typically a poly (ethylenedioxythiophene) / poly (styrenesulfonic acid) aqueous solution (hereinafter referred to as “PEDOT / PSS”), this PEDOT / PSS is Since it is formed by a coating method such as a spin coating method or a spray method, it is formed on the entire surface. The organic compound layer 60 made of a polymer has conductivity, and the cathode 20 and the auxiliary electrode 721 are electrically connected. By providing the auxiliary electrode 721, the resistance of the entire cathode (or anode) can be reduced. In addition, the transparent conductive film can be made thin. Further, the auxiliary electrode 721 is connected to the underlying wiring or electrode. The auxiliary electrode 721 may be formed and patterned before forming the EL layer. If a transparent conductive film is formed on the auxiliary electrode 721 in contact with the lower electrode, the cathode can be drawn out. FIG. 9C is a cross-sectional view taken along the chain line CC ′ shown in FIG. Further, in FIG. 9C, the electrodes indicated by dotted lines are electrically connected. In the terminal portion, the electrode of the terminal is formed of the same material as that of the cathode 20.
[0106]
FIG. 9B is a cross-sectional view taken along the chain line BB ′ shown in FIG. 9B, both ends of 11a to 11c and the space between them are covered with the inorganic insulator 14. Here, an example is shown in which the EL layer 17 that emits red light is common, but there is no particular limitation, and an EL layer may be formed for each pixel that emits the same color.
[0107]
Further, this embodiment mode can be freely combined with Embodiment Mode 1, Embodiment Mode 2, or Embodiment Mode 3.
[0108]
(Embodiment 5)
Here, FIG. 10 shows an example in which the configuration is partially different from FIG. Here, the present invention will be described below by taking a 3 × 3 pixel as an example among many pixels regularly arranged in the pixel portion. Note that the cross-sectional structure is substantially the same as that in FIG. 1 except that the auxiliary wiring 821 exists on the cathode 20, and for the sake of simplicity, the same reference numerals are used in FIG. . FIG. 10A is a cross-sectional view taken along the chain line AA ′ in FIG.
[0109]
In addition, since the auxiliary electrode 821 is formed on the cathode, the auxiliary electrode 821 is formed by an evaporation method using a metal mask. Here, an example in which the auxiliary electrode 821 is formed in a lattice shape is shown. By providing the auxiliary electrode 821, the resistance of the entire cathode (or anode) can be reduced. In addition, the transparent conductive film can be made thin. Further, the auxiliary electrode 821 is connected to the underlying wiring or electrode. If a transparent conductive film is formed on the auxiliary electrode 821 in contact with the lower electrode, the cathode can be drawn out. FIG. 10C is a cross-sectional view taken along the chain line CC ′ shown in FIG. Further, in FIG. 10C, the electrodes indicated by dotted lines are electrically connected. In the terminal portion, the electrode of the terminal is formed of the same material as that of the cathode 20.
[0110]
In addition, this embodiment mode can be freely combined with Embodiment Mode 1, Embodiment Mode 2, Embodiment Mode 3, or Embodiment Mode 4.
[0111]
The present invention having the above-described configuration will be described in more detail with the following examples.
[0112]
(Example)
[Example 1]
In this example, an active matrix light-emitting device manufactured over an insulating surface is described. Here, a thin film transistor (hereinafter referred to as “TFT”) is used as an active element, but a MOS transistor may be used.
[0113]
Further, although a top gate TFT (specifically, a planar TFT) is exemplified as the TFT, a bottom gate TFT (typically an inverted staggered TFT) can also be used.
[0114]
In this embodiment, a substrate made of glass such as barium borosilicate glass or alumino borosilicate glass, a quartz substrate, a silicon substrate, a metal substrate, or a stainless steel substrate with an insulating film formed thereon may be used. Further, a plastic substrate having heat resistance that can withstand the processing temperature of this embodiment may be used, or a flexible substrate may be used.
[0115]
First, as a lower layer of a base insulating film by a plasma CVD method on a heat resistant glass substrate having a thickness of 0.7 mm, a film formation temperature of 400 ° C. by a plasma CVD method and a source gas SiH _Four , NH _Three , N ₂ A silicon oxynitride film made of O (composition ratio Si = 32%, O = 27%, N = 24%, H = 17%) is formed to 50 nm (preferably 10 to 200 nm). Next, after cleaning the surface with ozone water, the oxide film on the surface is removed with dilute hydrofluoric acid (1/100 dilution). Next, as an upper layer of the base insulating film, a film formation temperature of 400 ° C. and a source gas SiH are formed by plasma CVD. _Four , N ₂ A silicon oxynitride film made of O (composition ratio Si = 32%, O = 59%, N = 7%, H = 2%) is laminated to a thickness of 100 nm (preferably 50 to 200 nm), and Deposition temperature 300 ° C., deposition gas SiH by plasma CVD method without opening to the atmosphere _Four A semiconductor film having an amorphous structure (here, an amorphous silicon film) is formed to a thickness of 54 nm (preferably 25 to 200 nm).
[0116]
Although the base insulating film is shown as a two-layer structure in this embodiment, it may be formed as a single layer film of an insulating film containing silicon as a main component or a structure in which two or more layers are stacked. The material of the semiconductor film is not limited, but preferably silicon or silicon germanium (Si _X Ge _1-X (X = 0.0001 to 0.02)) An alloy or the like may be used and may be formed by a known means (such as sputtering, LPCVD, or plasma CVD). The plasma CVD apparatus may be a single wafer type apparatus or a batch type apparatus. Alternatively, the base insulating film and the semiconductor film may be successively formed without being exposed to the air in the same film formation chamber.
[0117]
Next, after cleaning the surface of the semiconductor film having an amorphous structure, an extremely thin oxide film of about 2 nm is formed on the surface with ozone water. Next, a small amount of impurity element (boron or phosphorus) is doped in order to control the threshold value of the TFT. Here, diborane (B ₂ H ₆ ) Using a plasma-excited ion doping method without mass separation, a doping condition of an acceleration voltage of 15 kV, a gas obtained by diluting diborane to 1% with hydrogen at a flow rate of 30 sccm, and a dose of 2 × 10 ¹² / Cm ² Then, boron is added to the amorphous silicon film.
[0118]
Next, a nickel acetate salt solution containing 10 ppm of nickel in terms of weight was applied with a spinner. Instead of coating, a method of spreading nickel element over the entire surface by sputtering may be used.
[0119]
Next, heat treatment is performed for crystallization, so that a semiconductor film having a crystal structure is formed. For this heat treatment, heat treatment in an electric furnace or irradiation with strong light may be used. When the heat treatment is performed in an electric furnace, the heat treatment may be performed at 500 to 650 ° C. for 4 to 24 hours. Here, after heat treatment for dehydrogenation (500 ° C., 1 hour), heat treatment for crystallization (550 ° C., 4 hours) was performed to obtain a silicon film having a crystal structure. Although crystallization is performed here using heat treatment using a furnace, crystallization may be performed using a lamp annealing apparatus capable of crystallization in a short time.
[0120]
Next, after removing the oxide film on the surface of the silicon film having a crystal structure with dilute hydrofluoric acid or the like, a solid-state laser capable of continuous oscillation is used to obtain a crystal with a large grain size, and the second harmonic to the second fundamental wave are used. Irradiate the semiconductor film with the fourth harmonic. Laser irradiation is performed in the air or in an oxygen atmosphere. Note that since the reaction is performed in the air or in an oxygen atmosphere, an oxide film is formed on the surface by laser light irradiation. Typically, Nd: YVO _Four A second harmonic (532 nm) or a third harmonic (355 nm) of a laser (fundamental wave 1064 nm) may be applied. Output 10W continuous oscillation YVO _Four Laser light emitted from the laser is converted into a harmonic by a non-linear optical element. Also, YVO in the resonator _Four There is also a method of emitting harmonics by inserting a crystal and a nonlinear optical element. Then, it is preferably formed into a rectangular or elliptical laser beam on the irradiation surface by an optical system, and irradiated to the object to be processed. The energy density at this time is 0.01 to 100 MW / cm. ² Degree (preferably 0.1-10 MW / cm ² )is required. Then, irradiation may be performed by moving the semiconductor film relative to the laser light at a speed of about 10 to 2000 cm / s.
[0121]
Of course, continuous oscillation YVO _Four Although a TFT can be manufactured using a silicon film having a crystal structure before irradiation with the second harmonic of the laser, the crystallinity of the silicon film having a crystal structure after irradiation with laser light is improved. This is desirable because the electrical characteristics of the TFT are improved. For example, when a TFT is manufactured using a silicon film having a crystal structure before laser light irradiation, the mobility is 300 cm. ² / Vs, but when a TFT is manufactured using a silicon film having a crystal structure after laser light irradiation, the mobility is 500 to 600 cm. ² It is remarkably improved to about / Vs.
[0122]
Here, after crystallization using nickel as a metal element for promoting crystallization of silicon, continuous oscillation YVO is further performed. _Four The second harmonic of the laser was irradiated, but there is no particular limitation, and after forming a silicon film having an amorphous structure and performing a heat treatment for dehydrogenation, the above continuous wave YVO _Four A silicon film having a crystal structure may be obtained by irradiating the second harmonic of the laser.
[0123]
In addition, a pulsed laser can be used instead of the continuous wave laser. When a pulsed excimer laser is used, the frequency is 300 Hz and the laser energy density is 100 to 1000 mJ / cm. ² (Typically 200-800mJ / cm ² ) Is desirable. At this time, the laser beams may be overlapped by 50 to 98%.
[0124]
Next, in addition to the oxide film formed by the laser light irradiation, the surface is treated with ozone water for 120 seconds to form a barrier layer made of an oxide film having a total thickness of 1 to 5 nm. In this embodiment, ozone water is used to form the barrier layer. However, the surface of the semiconductor film having a crystal structure is formed by a method of oxidizing the surface of the semiconductor film having a crystal structure by irradiation with ultraviolet rays in an oxygen atmosphere or by oxygen plasma treatment. The barrier layer may be formed by depositing an oxide film of about 1 to 10 nm by an oxidation method, a plasma CVD method, a sputtering method, an evaporation method, or the like. Further, the oxide film formed by laser light irradiation may be removed before forming the barrier layer.
[0125]
Next, an amorphous silicon film containing an argon element serving as a gettering site is formed with a thickness of 50 nm to 400 nm, here 150 nm, over the barrier layer by plasma CVD or sputtering. In this embodiment, a silicon target is used by sputtering, and a film is formed at a pressure of 0.3 Pa in an argon atmosphere.
[0126]
After that, heat treatment is performed for 3 minutes in a furnace heated to 650 ° C., and gettering is performed to reduce the nickel concentration in the semiconductor film having a crystal structure. A lamp annealing apparatus may be used instead of the furnace.
[0127]
Next, the amorphous silicon film containing an argon element as a gettering site is selectively removed using the barrier layer as an etching stopper, and then the barrier layer is selectively removed with dilute hydrofluoric acid. Note that during gettering, nickel tends to move to a region with a high oxygen concentration, and thus it is desirable to remove the barrier layer made of an oxide film after gettering.
[0128]
Next, after forming a thin oxide film with ozone water on the surface of the obtained silicon film having a crystal structure (also called a polysilicon film), a mask made of resist is formed and etched into a desired shape to form an island shape. A separated semiconductor layer is formed. After the semiconductor layer is formed, the resist mask is removed.
[0129]
Next, the oxide film is removed with an etchant containing hydrofluoric acid, and at the same time, the surface of the silicon film is washed, and then an insulating film containing silicon as a main component and serving as a gate insulating film is formed. Here, a silicon oxynitride film (composition ratio: Si = 32%, O = 59%, N = 7%, H = 2%) with a thickness of 115 nm is formed by plasma CVD.
[0130]
Next, a first conductive film with a thickness of 20 to 100 nm and a second conductive film with a thickness of 100 to 400 nm are stacked over the gate insulating film. In this embodiment, a tantalum nitride film having a thickness of 50 nm and a tungsten film having a thickness of 370 nm are sequentially stacked on the gate insulating film, and patterning is performed in the following procedure to form each gate electrode and each wiring.
[0131]
The conductive material for forming the first conductive film and the second conductive film is an element selected from Ta, W, Ti, Mo, Al, and Cu, or an alloy material or a compound material containing the element as a main component. Form. Alternatively, a semiconductor film typified by a polycrystalline silicon film doped with an impurity element such as phosphorus, or an AgPdCu alloy may be used as the first conductive film and the second conductive film. Further, the present invention is not limited to the two-layer structure. For example, a three-layer structure in which a 50 nm-thickness tungsten film, a 500 nm-thickness aluminum and silicon alloy (Al-Si) film, and a 30 nm-thickness titanium nitride film are sequentially stacked. Also good. In the case of a three-layer structure, tungsten nitride may be used instead of tungsten of the first conductive film, or aluminum instead of the aluminum and silicon alloy (Al-Si) film of the second conductive film. A titanium alloy film (Al—Ti) may be used, or a titanium film may be used instead of the titanium nitride film of the third conductive film. Moreover, a single layer structure may be sufficient.
[0132]
An ICP (Inductively Coupled Plasma) etching method may be used for the etching of the first conductive film and the second conductive film (first etching process and second etching process). Using the ICP etching method, the film is formed into a desired taper shape by appropriately adjusting the etching conditions (the amount of power applied to the coil-type electrode, the amount of power applied to the substrate-side electrode, the electrode temperature on the substrate side, etc.) Can be etched. Here, after forming a mask made of resist, 700 W RF (13.56 MHz) power is applied to the coil-type electrode at a pressure of 1 Pa as the first etching condition, and CF is used as the etching gas. _Four And Cl ₂ And O ₂ Each gas flow ratio is 25/25/10 (sccm), 150 W RF (13.56 MHz) power is also applied to the substrate side (sample stage), and a substantially negative self-bias voltage is applied. To do. The electrode area size on the substrate side is 12.5 cm × 12.5 cm, and the coil-type electrode area size (here, a quartz disk provided with a coil) is a disk having a diameter of 25 cm. The W film is etched under this first etching condition so that the end portion is tapered. Thereafter, the resist mask is not removed and the second etching condition is changed, and the etching gas is changed to CF. _Four And Cl ₂ Each gas flow rate ratio is 30/30 (sccm), and plasma is generated by applying 500 W RF (13.56 MHz) power to the coil-type electrode at a pressure of 1 Pa, and etching is performed for about 30 seconds. Went. 20 W of RF (13.56 MHz) power is also applied to the substrate side (sample stage), and a substantially negative self-bias voltage is applied. CF _Four And Cl ₂ Under the second etching condition in which is mixed, the W film and the TaN film are etched to the same extent. Here, the first etching condition and the second etching condition are referred to as a first etching process.
[0133]
Next, a second etching process is performed without removing the resist mask. Here, as the third etching condition, CF as an etching gas is used. _Four And Cl ₂ Each gas flow rate ratio was 30/30 (sccm), 500 W RF (13.56 MHz) power was applied to the coil-type electrode at a pressure of 1 Pa, plasma was generated, and etching was performed for 60 seconds. . 20 W of RF (13.56 MHz) power is also applied to the substrate side (sample stage), and a substantially negative self-bias voltage is applied. Then, the resist mask is not removed and the etching condition is changed to the fourth etching condition. _Four And Cl ₂ And O ₂ The gas flow ratio is 20/20/20 (sccm), and 500 W of RF (13.56 MHz) power is applied to the coil-type electrode at a pressure of 1 Pa to generate plasma for about 20 seconds. Etching was performed. 20 W of RF (13.56 MHz) power is also applied to the substrate side (sample stage), and a substantially negative self-bias voltage is applied. Here, the third etching condition and the fourth etching condition are referred to as a second etching process. At this stage, the gate electrode and each electrode having the first conductive layer as a lower layer and the second conductive layer as an upper layer are formed.
[0134]
Next, after removing the resist mask, a first doping process is performed to dope the entire surface using the gate electrode as a mask. The first doping process may be performed by an ion doping method or an ion implantation method. The condition of the ion doping method is that the dose is 1.5 × 10 ¹⁴ atoms / cm ² The acceleration voltage is set to 60 to 100 keV. Typically, phosphorus (P) or arsenic (As) is used as the impurity element imparting n-type conductivity. The first impurity region (n ^- Region) is formed.
[0135]
Next, a mask made of resist is newly formed. At this time, in order to reduce the off-current value of the switching TFT, the mask covers the channel formation region and a part of the semiconductor layer forming the switching TFT of the pixel portion. Form. The mask is also provided to protect the channel formation region of the semiconductor layer forming the p-channel TFT of the driver circuit and the surrounding region. In addition, the mask is formed so as to cover the channel formation region of the semiconductor layer forming the current control TFT of the pixel portion and the surrounding region.
[0136]
Next, a second doping process is selectively performed using the mask made of the resist, so that an impurity region (n ^- Region). The second doping process may be performed by an ion doping method or an ion implantation method. Here, phosphine (PH _Three Gas) diluted to 5% with hydrogen at a flow rate of 30 sccm and a dose of 1.5 × 10 ¹⁴ atoms / cm ² And the acceleration voltage is 90 keV. In this case, the resist mask and the second conductive layer serve as a mask for the impurity element imparting n-type conductivity, and a second impurity region is formed. In the second impurity region, 1 × 10 ¹⁶ ~ 1x10 ¹⁷ /cm ^Three An impurity element imparting n-type is added in a concentration range of. Here, a region having the same concentration range as the second impurity region is n ^- Also called a region.
[0137]
Next, a third doping process is performed without removing the resist mask. The third doping process may be performed by an ion doping method or an ion implantation method. Typically, phosphorus (P) or arsenic (As) is used as the impurity element imparting n-type conductivity. Here, phosphine (PH _Three Gas) diluted to 5% with hydrogen at a flow rate of 40 sccm and a dose of 2 × 10 ¹⁵ atoms / cm ² And the acceleration voltage is 80 keV. In this case, the resist mask, the first conductive layer, and the second conductive layer serve as a mask for the impurity element imparting n-type conductivity, and a third impurity region is formed. The third impurity region has 1 × 10 ²⁰ ~ 1x10 ^{twenty one} /cm ^Three An impurity element imparting n-type is added in a concentration range of. Here, a region having the same concentration range as the third impurity region is n ⁺ Also called a region.
[0138]
Next, after removing the resist mask, a new resist mask is formed and a fourth doping process is performed. Through the fourth doping treatment, a fourth impurity region and a fifth impurity region in which an impurity element imparting p-type conductivity is added to the semiconductor layer forming the semiconductor layer forming the p-channel TFT are formed. .
[0139]
The fourth impurity region has 1 × 10 ²⁰ ~ 1x10 ^{twenty one} /cm ^Three An impurity element imparting p-type is added in a concentration range of. The fourth impurity region is a region to which phosphorus (P) is added in the previous step (n ^- The concentration of the impurity element imparting p-type is 1.5 to 3 times that of the impurity element, and the conductivity type is p-type. Here, a region having the same concentration range as the fourth impurity region is represented by p. ⁺ Also called a region.
[0140]
The fifth impurity region is formed in a region overlapping the tapered portion of the second conductive layer, and is 1 × 10. ¹⁸ ~ 1x10 ²⁰ /cm ^Three An impurity element imparting p-type is added in a concentration range of. Here, a region having the same concentration range as the fifth impurity region is represented by p. ^- Also called a region.
[0141]
Through the above steps, impurity regions having n-type or p-type conductivity are formed in each semiconductor layer. The electrode composed of the first conductive layer and the second conductive layer serves as a gate electrode of the TFT.
[0142]
Next, an insulating film (not shown) that covers substantially the entire surface is formed. In this example, a 50 nm-thickness silicon oxide film was formed by plasma CVD. Of course, this insulating film is not limited to the silicon oxide film, and another insulating film containing silicon may be used as a single layer or a laminated structure.
[0143]
Next, a step of activating the impurity element added to each semiconductor layer is performed. This activation step is performed by a rapid thermal annealing method (RTA method) using a lamp light source, a laser irradiation method, a heat treatment using a furnace, or a method combined with any of these methods.
[0144]
In this embodiment, the example in which the insulating film is formed before the activation is shown, but the step of forming the insulating film may be performed after the activation.
[0145]
Next, a first interlayer insulating film made of a silicon nitride film is formed and subjected to a heat treatment (heat treatment at 300 to 550 ° C. for 1 to 12 hours) to hydrogenate the semiconductor layer. This step is a step of terminating dangling bonds in the semiconductor layer with hydrogen contained in the first interlayer insulating film. The semiconductor layer can be hydrogenated regardless of the presence of an insulating film (not shown) made of a silicon oxide film. As another means of hydrogenation, plasma hydrogenation (using hydrogen excited by plasma) may be performed.
[0146]
Next, a second interlayer insulating film made of an organic insulating material is formed on the first interlayer insulating film. In this embodiment, an acrylic resin film having a thickness of 1.6 μm is formed by a coating method.
[0147]
Next, a contact hole reaching the conductive layer to be a gate electrode or a gate wiring and a contact hole reaching each impurity region are formed. In this embodiment, a plurality of etching processes are sequentially performed. In this embodiment, the first interlayer insulating film is etched after the second interlayer insulating film is etched using the first interlayer insulating film as an etching stopper.
[0148]
After that, electrodes such as a source wiring, a power supply line, a lead electrode, and a connection electrode are formed using Al, Ti, Mo, W, or the like. Here, patterning was performed using a laminated film of a Ti film (film thickness: 100 nm), an Al film containing silicon (film thickness: 350 nm), and a Ti film (film thickness: 50 nm) as materials for these electrodes and wirings. In this manner, source electrodes and source wirings, connection electrodes, lead electrodes, power supply lines, and the like are appropriately formed. The lead electrode for making contact with the gate wiring covered with the interlayer insulating film is provided at the end of the gate wiring, and the end of each other wiring is also connected to an external circuit or an external power source. An input / output terminal portion provided with a plurality of electrodes is formed.
[0149]
As described above, a driver circuit having an n-channel TFT, a p-channel TFT, and a CMOS circuit in which these are complementarily combined, and a plurality of n-channel TFTs or p-channel TFTs are provided in one pixel. A pixel portion can be formed.
[0150]
Next, a third interlayer insulating film made of an inorganic insulating material is formed on the second interlayer insulating film. Here, a 200 nm silicon nitride film is formed by sputtering.
[0151]
Next, a contact hole reaching the connection electrode formed in contact with the drain region of the current control TFT composed of the p-channel TFT is formed. Next, a pixel electrode is formed so as to overlap with the connection electrode. In this embodiment, since the pixel electrode functions as an anode of the EL element, a material having a high work function, specifically, platinum (Pt), chromium (Cr), tungsten (W), or nickel (Ni) is used. be able to.
[0152]
Next, an inorganic insulator is formed on both ends so as to cover the end of the pixel electrode. The inorganic insulator covering the end portion of the pixel electrode may be formed using an insulating film containing silicon by sputtering and patterned. Further, instead of the inorganic insulator, a bank made of an organic insulator may be formed.
[0153]
Next, as shown in Embodiment Mode 1, an auxiliary electrode is formed over the inorganic insulator.
[0154]
Next, an EL layer and a cathode of the EL element are formed on the pixel electrode whose both ends are covered with an inorganic insulator. As a method for forming the EL layer, it may be formed by an inkjet method, a vapor deposition method, a spin coating method, or the like.
[0155]
As the EL layer, an EL layer (a layer for emitting light and moving carriers therefor) may be formed by freely combining a light-emitting layer, a charge transport layer, or a charge injection layer. For example, a low molecular organic EL material or a high molecular organic EL material may be used. As the EL layer, a thin film made of a light emitting material (singlet compound) that emits light (fluorescence) by singlet excitation, or a thin film made of a light emitting material (phosphorescence) that emits light (phosphorescence) by triplet excitation can be used. It is also possible to use an inorganic material such as silicon carbide for the charge transport layer or the charge injection layer. As these organic EL materials and inorganic materials, known materials can be used.
[0156]
Further, as a material used for the cathode, it is preferable to use a metal having a small work function (typically, a metal element belonging to Group 1 or 2 of the periodic table) or an alloy containing these metals. As the work function is smaller, the luminous efficiency is improved. Among them, as a material used for the cathode, an alloy such as MgAg, MgIn, and AlLi, or an element belonging to Group 1 or 2 of the periodic table and aluminum are co-evaporated After thinly forming the film formed by the method, a transparent conductive film (ITO (indium oxide tin oxide alloy), indium oxide zinc oxide alloy (In ₂ O _Three (ZnO), zinc oxide (ZnO), or the like) is preferable.
[0157]
Next, a protective film covering the cathode is formed. As the protective film, an insulating film containing silicon nitride or silicon oxynitride as a main component may be formed by a sputtering method. As described in Embodiment 2, defects in the EL layer are terminated with hydrogen (termination). A film containing hydrogen is preferably provided on the cathode.
[0158]
As the film containing hydrogen, an insulating film containing carbon or silicon nitride as a main component may be formed by a PCVD method. In the film formation, defects in the organic compound layer may be terminated with hydrogen by plasma hydrogen. it can. In addition, by performing heat treatment in a temperature range that the organic compound layer can withstand or using heat generated when the light emitting element emits light, hydrogen is diffused from the film containing hydrogen, so that defects in the organic compound layer can be obtained. Can be terminated with hydrogen.
[0159]
In addition, a film containing hydrogen and a protective film prevent intrusion of substances that promote deterioration due to oxidation of the EL layer such as moisture and oxygen from the outside. Note that a protective film, a film containing hydrogen, and the like are not necessarily provided in the input / output terminal portion that needs to be connected to the FPC later.
[0160]
Needless to say, various circuits including a plurality of TFTs and the like may be provided at the tip of the gate electrode of the TFT disposed in the pixel portion, and there is no particular limitation.
[0161]
Next, an EL element having at least a cathode, an organic compound layer, and an anode is sealed with a sealing substrate or a sealing can to completely shut off the EL element from the outside, and EL such as moisture and oxygen from the outside. It is preferable to prevent intrusion of a substance that promotes deterioration due to oxidation of the layer. It is preferable to perform deaeration by annealing in vacuum immediately before sealing with a sealing substrate or a sealing can. In addition, when the sealing substrate is attached, it is preferable to perform under an atmosphere containing hydrogen and an inert gas (rare gas or nitrogen) and to include hydrogen in the space sealed by the sealing. By utilizing heat generated when the light emitting element emits light, hydrogen can be diffused from the space containing hydrogen, and defects in the organic compound layer can be terminated with hydrogen. When defects in the organic compound layer are terminated with hydrogen, reliability as a light-emitting device is improved.
[0162]
Next, an FPC (flexible printed circuit) is attached to each electrode of the input / output terminal portion with an anisotropic conductive material. The anisotropic conductive material is composed of resin and conductive particles having a diameter of several tens to several hundreds μm whose surface is plated with Au or the like, and is formed on each electrode and FPC of the input / output terminal portion by the conductive particles. Electrical connection with wiring.
[0163]
The substrate 400 is provided with a color filter corresponding to each pixel. By providing a color filter, a circularly polarizing plate is not necessary. Furthermore, if necessary, another optical film may be provided. Further, an IC chip or the like may be mounted.
[0164]
Through the above steps, a modular light emitting device to which an FPC is connected is completed.
[0165]
Further, this embodiment can be freely combined with Embodiment Mode 1, Embodiment Mode 2, Embodiment Mode 3, Embodiment Mode 4, or Embodiment Mode 5.
[0166]
[Example 2]
In this embodiment, a manufacturing apparatus is shown in FIG.
[0167]
In FIG. 11, 100a to 100k and 100m to 100v are gates, 101 and 119 are delivery chambers, 102, 104a, 107, 108, 111 and 114 are transfer chambers, 105, 106R, 106B, 106G, 106H, 109, 110, 112 and 113 are film forming chambers, 103 is a pretreatment chamber, 117a and 117b are sealing substrate loading chambers, 115 is a dispenser chamber, 116 is a sealing chamber, 118a is an ultraviolet irradiation chamber, and 120 is a substrate reversing chamber.
[0168]
Hereinafter, a procedure in which a substrate provided with TFTs in advance is carried into the manufacturing apparatus shown in FIG. 11 to form the stacked structure shown in FIG.
[0169]
First, a substrate provided with a TFT and a cathode (or anode) 200 is set in the delivery chamber 101. Next, it is transferred to a transfer chamber 102 connected to the delivery chamber 101. In advance, it is preferable to bring the atmosphere to atmospheric pressure by introducing an inert gas after evacuation so that moisture and oxygen do not exist in the transfer chamber as much as possible.
[0170]
Further, the transfer chamber 102 is connected to an evacuation processing chamber that evacuates the transfer chamber. As the vacuum evacuation processing chamber, a magnetic levitation type turbo molecular pump, a cryopump, or a dry pump is provided. As a result, the ultimate vacuum in the transfer chamber is reduced to 10 ^-Five -10 ^-6 Pa can be set, and the back diffusion of impurities from the pump side and the exhaust system can be controlled. In order to prevent impurities from being introduced into the apparatus, an inert gas such as nitrogen or a rare gas is used as the introduced gas. These gases introduced into the apparatus are those purified by a gas purifier before being introduced into the apparatus. Therefore, it is necessary to provide a gas purifier so that the gas is introduced into the film forming apparatus after being highly purified. Thereby, oxygen, water, and other impurities contained in the gas can be removed in advance, so that these impurities can be prevented from being introduced into the apparatus.
[0171]
Further, in order to remove moisture and other gases contained in the substrate, it is preferable to perform annealing for deaeration in a vacuum, and the substrate is transferred to a pretreatment chamber 103 connected to the transfer chamber 102, where annealing is performed. Just do it. Further, if it is necessary to clean the surface of the cathode, it may be transferred to a pretreatment chamber 103 connected to the transfer chamber 102 and cleaned there.
[0172]
If necessary, a poly (ethylenedioxythiophene) / poly (styrenesulfonic acid) aqueous solution (PEDOT / PSS) that acts as a hole injection layer may be formed on the entire surface of the anode. The manufacturing apparatus in FIG. 11 is provided with a film forming chamber 105 for forming an organic compound layer made of a polymer. In the case of forming by a spin coating method, an ink jet method, or a spray method, the substrate is set with the deposition surface of the substrate facing upward at atmospheric pressure. A substrate is appropriately reversed in a substrate reversing chamber 120 provided between the film forming chamber 105 and the transfer chamber 102. In addition, after film formation using an aqueous solution, it is preferably transferred to the pretreatment chamber 103 where heat treatment is performed in a vacuum to vaporize moisture.
[0173]
Next, after the substrate 104c is transferred from the transfer chamber 102 to the transfer chamber 104 without being exposed to the atmosphere, the substrate 104c is transferred to the deposition chamber 106R by the transfer mechanism 104b, and an EL layer that emits red light is appropriately formed over the cathode 200. . Here, an example of forming by vapor deposition is shown. In the film formation chamber 106R, the substrate inversion chamber 120 is set with the film formation surface of the substrate facing downward. Note that the film formation chamber is preferably evacuated before the substrate is carried in.
[0174]
For example, the degree of vacuum is 5 × 10 ^-3 Torr (0.665 Pa) or less, preferably 10 ^-Four -10 ^-6 Deposition is performed in the film forming chamber 106R evacuated to Pa. At the time of vapor deposition, the organic compound is vaporized in advance by resistance heating, and is scattered in the direction of the substrate by opening a shutter (not shown) at the time of vapor deposition. The vaporized organic compound is scattered upward and deposited on the substrate through an opening (not shown) provided in a metal mask (not shown). Note that the temperature of the substrate (T ₁ ) Is 50 to 200 ° C, preferably 65 to 150 ° C.
[0175]
In order to form three types of EL layers in order to obtain a full color, after forming the film in the film formation chamber 106R, the film formation may be performed sequentially in each of the film formation chambers 106G and 106B.
[0176]
Once a desired EL layer 201 is obtained on the cathode (or anode) 200, the substrate is then transferred from the transfer chamber 104 to the transfer chamber 107 without being exposed to the atmosphere, and further transferred without being exposed to the atmosphere. The substrate is transferred from the chamber 107 to the transfer chamber 108.
[0177]
Next, the film is transferred to the film formation chamber 109 by a transfer mechanism installed in the transfer chamber 108, and the anode 202 made of a transparent conductive film (ITO or the like) is appropriately formed over the EL layer 201. In the case of forming a cathode, after forming a thin metal layer to be a cathode in the film formation chamber 110, the thin film is transported to the film formation chamber 109 to form a transparent conductive film, and the thin metal layer (cathode) and the transparent conductive film are formed. A stack is formed as appropriate. Here, the film formation chamber 110 is a vapor deposition apparatus provided with Mg, Ag, or Al serving as a cathode as a vapor deposition source, and the film formation chamber 109 is a sputtering apparatus having at least a target made of a transparent conductive material serving as an anode. And
[0178]
Next, the film 203 is transferred to the film formation chamber 112 by a transfer mechanism installed in the transfer chamber 108, and the film 203 containing hydrogen is formed in a temperature range that the organic compound layer can withstand. Here, the film formation chamber 112 is equipped with a plasma CVD apparatus, and the reaction gas used for film formation is hydrogen gas and a hydrocarbon-based gas (for example, CH _Four , C ₂ H ₂ , C ₆ H ₆ Etc.) to form a DLC film containing hydrogen. Note that there is no particular limitation as long as a means for generating hydrogen radicals is provided, and when the DLC film containing hydrogen is formed, defects in the organic compound layer are terminated with hydrogen by plasma hydrogen.
[0179]
Next, the protective film 204 is formed over the film 203 containing hydrogen by being transferred from the transfer chamber 108 to the film formation chamber 113 without being exposed to the air. Here, a sputtering apparatus provided with a target made of silicon or a target made of silicon nitride in the film formation chamber 113 is used. The silicon nitride film can be formed by setting the film formation chamber atmosphere to a nitrogen atmosphere or an atmosphere containing nitrogen and argon.
[0180]
Through the above steps, the stacked structure illustrated in FIG. 4A, that is, a light-emitting element covered with a protective film and a film containing hydrogen is formed over the substrate.
[0181]
Next, the substrate over which the light-emitting element is formed is transferred from the transfer chamber 108 to the transfer chamber 111 without being exposed to the air, and further transferred from the transfer chamber 111 to the transfer chamber 114.
[0182]
Next, the substrate over which the light-emitting element is formed is transferred from the transfer chamber 114 to the sealing chamber 116. Note that a sealing substrate provided with a sealant is preferably prepared in the sealing chamber 116.
[0183]
The sealing substrate is set in the sealing substrate load chambers 117a and 117b from the outside. In order to remove impurities such as moisture, it is preferable to perform annealing in advance in vacuum, for example, annealing in the sealing substrate load chambers 117a and 117b. In the case of forming a sealing material on the sealing substrate, after the transfer chamber 108 is set to atmospheric pressure, the sealing substrate is transferred from the sealing substrate load chamber to the dispenser chamber 115, and the substrate provided with the light emitting element. And a sealing substrate on which the sealing material is formed is transported to the sealing chamber 116.
[0184]
Next, in order to deaerate the substrate provided with the light-emitting element, after annealing in a vacuum or an inert atmosphere, the sealing substrate provided with the sealant and the substrate provided with the light-emitting element are bonded to each other . The sealed space is filled with hydrogen or an inert gas. Note that here, an example in which the sealing material is formed over the sealing substrate is described; however, there is no particular limitation, and the sealing material may be formed over the substrate over which the light-emitting element is formed.
[0185]
Next, the pair of bonded substrates is transferred from the transfer chamber 114 to the ultraviolet irradiation chamber 118. Next, the sealing material is cured by irradiating UV light in the ultraviolet irradiation chamber 118. In addition, although ultraviolet curable resin was used here as a sealing material, if it is an adhesive material, it will not specifically limit.
[0186]
Next, the transfer chamber 114 is transferred to the delivery chamber 119 and taken out.
[0187]
As described above, by using the manufacturing apparatus illustrated in FIG. 11, it is not necessary to expose the light-emitting element to the outside air until the light-emitting element is completely enclosed in the sealed space, so that a highly reliable light-emitting device can be manufactured. In the transfer chambers 102 and 114, vacuum and atmospheric pressure are repeated, but the transfer chambers 104a and 108 are always kept in vacuum.
[0188]
Note that an in-line film deposition apparatus can also be used.
[0189]
FIG. 12 shows a manufacturing apparatus partially different from FIG.
[0190]
FIG. 11 shows an example in which only one film forming chamber formed by a spin coating method, an ink jet method, or a spray method is provided. However, the manufacturing apparatus in FIG. 12 uses a spin coating method, an ink jet method, or a spray method. In this example, three film forming chambers are formed. For example, when three types of EL layers are formed by a spin coating method, an ink jet method, or a spray method in order to obtain a full color, after the film formation in the film formation chamber 121a, the film formation chambers 121b and 121c are sequentially formed. The film may be formed by film formation.
[0191]
In addition, this embodiment can be freely combined with Embodiment Mode 1, Embodiment Mode 2, Embodiment Mode 3, Embodiment Mode 4, or Embodiment Mode 5, or Example 1.
[0192]
[Example 3]
By implementing the present invention, an EL module (active matrix EL module, passive EL module) can be completed. That is, by implementing the present invention, all electronic devices incorporating them are completed.
[0193]
Such electronic devices include video cameras, digital cameras, head mounted displays (goggles type displays), car navigation systems, car stereos, personal computers, personal digital assistants (mobile computers, mobile phones, electronic books, etc.) and the like. . Examples of these are shown in FIGS.
[0194]
FIG. 13A illustrates a personal computer, which includes a main body 2001, an image input portion 2002, a display portion 2003, a keyboard 2004, and the like.
[0195]
FIG. 13B illustrates a video camera, which includes a main body 2101, a display portion 2102, an audio input portion 2103, operation switches 2104, a battery 2105, an image receiving portion 2106, and the like.
[0196]
FIG. 13C illustrates a mobile computer, which includes a main body 2201, a camera unit 2202, an image receiving unit 2203, operation switches 2204, a display unit 2205, and the like.
[0197]
FIG. 13D shows a goggle type display, which includes a main body 2301, a display portion 2302, an arm portion 2303, and the like.
[0198]
FIG. 13E shows a player using a recording medium (hereinafter referred to as a recording medium) on which a program is recorded, and includes a main body 2401, a display portion 2402, a speaker portion 2403, a recording medium 2404, an operation switch 2405, and the like. This player uses a DVD (Digital Versatile Disc), CD, or the like as a recording medium, and can perform music appreciation, movie appreciation, games, and the Internet.
[0199]
FIG. 13F illustrates a digital camera, which includes a main body 2501, a display portion 2502, an eyepiece portion 2503, an operation switch 2504, an image receiving portion (not shown), and the like.
[0200]
FIG. 14A shows a mobile phone, which includes a main body 2901, an audio output portion 2902, an audio input portion 2903, a display portion 2904, operation switches 2905, an antenna 2906, an image input portion (CCD, image sensor, etc.) 2907, and the like.
[0201]
FIG. 14B illustrates a portable book (electronic book), which includes a main body 3001, display portions 3002 and 3003, a storage medium 3004, operation switches 3005, an antenna 3006, and the like.
[0202]
FIG. 14C illustrates a display, which includes a main body 3101, a support base 3102, a display portion 3103, and the like.
[0203]
Incidentally, the display shown in FIG. 14C is a medium or small size display, for example, a screen size of 5 to 20 inches. Further, in order to form a display portion having such a size, it is preferable to use a substrate having a side of 1 m and perform mass production by performing multiple chamfering.
[0204]
As described above, the applicable range of the present invention is so wide that the present invention can be applied to methods for manufacturing electronic devices in various fields. In addition, the electronic device of this example can be realized by using a configuration including any combination of Embodiment Modes 1 to 5, Example 1, and Example 2.
[0205]
【The invention's effect】
According to the present invention, since defects in the organic compound layer can be terminated with hydrogen, reliability as a light-emitting device is improved.
[0206]
In addition, according to the present invention, a very expensive circularly polarizing film can be made unnecessary, so that the manufacturing cost can be reduced.
[0207]
Further, according to the present invention, as a full-color flat panel display using red, green, and blue emission colors, high definition, high aperture ratio, and high reliability can be realized.
[Brief description of the drawings]
FIG. 1 is a cross-sectional view. (Embodiment 1)
FIG. 2 is a diagram showing a top view. (Embodiment 1)
FIG. 3 is a diagram showing a terminal portion. (Embodiment 1)
FIG. 4 is a view showing a laminated structure of the present invention. (Embodiment 2)
FIG. 5 is a diagram showing a top view. (Embodiment 3)
FIG. 6 is a cross-sectional view. (Embodiment 3)
FIG. 7 is a diagram showing a top view. (Embodiment 3)
FIG. 8 is a diagram showing a mask. (Embodiment 3)
FIG. 9 is a cross-sectional view. (Embodiment 4)
FIG. 10 is a cross-sectional view. (Embodiment 5)
FIG. 11 shows an example of a manufacturing apparatus. (Example 2)
FIG. 12 shows an example of a manufacturing apparatus. (Example 2)
FIG 13 illustrates an example of an electronic device.
FIG 14 illustrates an example of an electronic device.

Claims (14)

A pixel portion having a plurality of light emitting elements each including an anode, an organic compound layer including a light emitting layer provided on the anode, and a cathode provided on the organic compound layer on the same substrate; and the pixel portion. A driving circuit to be driven and a terminal portion connected to the flexible printed circuit;
Each of the pixel portion and the driving circuit is provided with a thin film transistor,
The pixel portion includes a first thin film transistor and a second thin film transistor,
A first interlayer insulating film on the first thin film transistor and the second thin film transistor;
On the first interlayer insulating film, a first source electrode connected to the first thin film transistor and a second source electrode connected to the second thin film transistor;
A second interlayer insulating film on the first interlayer insulating film, the first source electrode, and the second source electrode;
A second insulating layer disposed on the second interlayer insulating film and insulated from each other, and electrically connected to the first thin film transistor and electrically connected to the second thin film transistor. The anode,
An insulator covering an end portion of the first anode, an end portion of the second anode, and an end portion of the first anode and an end portion of the second anode;
An auxiliary electrode on the insulator partially provided in the pixel portion ;
A cathode on the insulator provided on the entire surface of the pixel portion and connected to the auxiliary electrode;
The terminal portion includes a first electrode obtained by the same process as a gate electrode of the thin film transistor provided in each of the pixel portion and the driving circuit,
The first interlayer insulating film on the first electrode;
A second electrode connected to the first electrode and obtained by the same process as the source electrode of the thin film transistor is provided on the first interlayer insulating film,
The pixel portion and the driving circuit are electrically connected to the second electrode of the terminal portion on the first interlayer insulating film and obtained by the same process as the source electrode of the thin film transistor. A third electrode formed;
The cathode on the second interlayer insulating film;
The auxiliary electrode connected to the cathode;
A location where the third electrode and the auxiliary electrode on the third electrode are connected in a contact hole formed in the second interlayer insulating film ;
The light-emitting device, wherein the portion is provided with the cathode . A pixel portion having a plurality of light emitting elements each including a cathode, an organic compound layer including a light emitting layer provided on the cathode, and an anode provided on the organic compound layer on the same substrate; and the pixel portion A driving circuit to be driven and a terminal portion connected to the flexible printed circuit;
Each of the pixel portion and the driving circuit is provided with a thin film transistor,
The pixel portion includes a first thin film transistor and a second thin film transistor,
A first interlayer insulating film on the first thin film transistor and the second thin film transistor;
On the first interlayer insulating film, a first source electrode connected to the first thin film transistor and a second source electrode connected to the second thin film transistor;
A second interlayer insulating film on the first interlayer insulating film, the first source electrode, and the second source electrode;
A second insulating layer disposed on the second interlayer insulating film and insulated from each other, and electrically connected to the first thin film transistor and electrically connected to the second thin film transistor. A cathode,
An insulator covering the end of the first cathode, the end of the second cathode, and the gap between the end of the first cathode and the end of the second cathode;
An auxiliary electrode on the insulator partially provided in the pixel portion ;
Provided on the entire surface of the pixel portion , connected to the auxiliary electrode, and provided with an anode on the insulator ,
The terminal portion includes a first electrode obtained by the same process as a gate electrode of the thin film transistor provided in each of the pixel portion and the driving circuit,
The first interlayer insulating film on the first electrode;
A second electrode connected to the first electrode and obtained by the same process as the source electrode of the thin film transistor is provided on the first interlayer insulating film,
The pixel portion and the driving circuit are electrically connected to the second electrode of the terminal portion on the first interlayer insulating film and obtained by the same process as the source electrode of the thin film transistor. A third electrode formed;
The anode on the second interlayer insulating film;
The auxiliary electrode connected to the anode;
A location where the third electrode and the auxiliary electrode on the third electrode are connected in a contact hole formed in the second interlayer insulating film ;
The light-emitting device, wherein the portion is provided with the anode . Oite to claim 1,
The auxiliary electrode is provided in contact with the insulator, the cathode is provided in contact with the auxiliary electrode, or the cathode is provided in contact with the insulator, and is in contact with the cathode. A light-emitting device provided with an auxiliary electrode. Oite to claim 1,
The auxiliary electrode is provided in contact with the insulator,
In contact with the auxiliary electrode, an organic compound layer made of a polymer having conductivity is provided,
A light emitting device, wherein the cathode is provided in contact with an organic compound layer made of a polymer having high conductivity. In claim 2 ,
The auxiliary electrode is provided in contact with the insulator, the anode is provided in contact with the auxiliary electrode, or the anode is provided in contact with the insulator, and is in contact with the anode. A light-emitting device provided with an auxiliary electrode. In claim 2 ,
The auxiliary electrode is provided in contact with the insulator,
In contact with the auxiliary electrode, an organic compound layer made of a polymer having conductivity is provided,
A light-emitting device, wherein the anode is provided in contact with an organic compound layer made of a polymer having high conductivity. In any one of Claims 1 thru | or 6 ,
The auxiliary electrode is composed of an element selected from poly-Si, W, WSi _x , Al, Ti, Mo, Cu, Ta, Cr, or Mo doped with an impurity element imparting a conductivity type, or the element as a main component. A light-emitting device comprising a film composed mainly of an alloy material or a compound material as a main component or a laminated film thereof. In any one of Claims 1 thru | or 7 ,
The light emitting device, wherein the first electrode of the terminal portion is connected to the flexible printed circuit. In any one of Claims 1 thru | or 7 ,
The terminal portion is connected to the first electrode and is obtained by the same process as the cathode, an electrode obtained by the same process as the anode, or an electrode obtained by the same process as the cathode A fourth electrode comprising a laminate of the anode and an electrode obtained by the same process is provided;
The light emitting device, wherein the fourth electrode is connected to the flexible printed circuit. In any one of Claims 1 thru | or 9 ,
The light emitting device, wherein the terminal portion is connected to an external circuit by the flexible printed circuit. In any one of Claims 1 thru | or 10 ,
The light emitting element is covered with a film containing hydrogen,
The light-emitting device, wherein the hydrogen-containing film is covered with a protective film made of an inorganic insulating film. In claim 11 ,
The film containing hydrogen is a thin film containing hydrogen and containing carbon as a main component, or an insulating film containing hydrogen and containing silicon nitride as a main component,
The light-emitting device, wherein the protective film is an insulating film containing silicon nitride or silicon nitride oxide as a main component. In any one of Claims 1 thru | or 12 ,
The light emitting device includes a color filter corresponding to each pixel configured by the light emitting element. In any one of Claims 1 thru | or 13 ,
The light emitting device is a video camera, a digital camera, a goggle type display, a car navigation system, a personal computer, or a portable information terminal.

Images