JP4611914B2 - Compressor blade, method for manufacturing the same, and gas turbine for thermal power generation - Google Patents

Description

  The present invention relates to a compressor blade (including a stationary blade and a blade root portion) mounted on a compressor such as a gas turbine for thermal power generation and an aircraft jet engine, a manufacturing method thereof, and the compressor blade. It is related with the gas turbine for thermal power generation provided with.

  A gas turbine is a rotating structure in which an axial flow compressor, a turbine shaft, turbine rotor blades, combustion equipment, and the like are basic components, and a bearing, a casing, and the like that hold these are integrated. Of these, the axial flow compressor has compressor blades for compressing air, and the compressor blades suck air from outside to compress the gas turbine and compress it. As a result, compressed air of 0.8 to 1.5 MPa is finally generated and sent to the combustor to be used for fuel combustion, and the combustor and its attached members, moving blades and stationary blades are cooled. Also used as industrial air.

  Around the rotating shaft of the axial compressor as described above, a large number of compressor blades having a hydrodynamically devised shape so that the intake air is gradually compressed with rotation are at an optimum angle. It is attached. Currently employed compressor blades are materials that can withstand high mechanical stresses during operation and maintain stable operation for a long period of time, specifically, high strength, fatigue strength, and large damping ratio. SUS403, SUS410, Lapelloy alloy steel (12% Cr-2.75% Mo), Greek Ascoloy alloy steel (13% Cr-3% W-2% Ni), precipitation hardened double layer stainless steel (% Cr steel) 17% Cr-4% Ni-3% Cu) etc. are used. Further, in the place where the air temperature at the rear stage of the compressor blade is high, A-286 (26Ni-15% Cr-2% Ti-1% Mo), Inconel 718 (Ni-based alloy containing 16% Cr), etc. are applied. .

  In addition, for high temperature parts of gas turbines, in particular, moving and stationary blades manufactured with Ni-base alloys or Co-base alloys, the high temperature resistance due to the construction of various refractory metals and alloy films as shown in Patent Documents 1-5. In addition to improving oxidizability, application of a heat shielding film as typified by Patent Documents 6 to 10 has been proposed.

Japanese Patent Publication No.51-4941 Japanese Patent Publication No. 61-10034 Japanese Patent Laid-Open No. 9-195049 Japanese Patent Laid-Open No. 11-061439 JP 2005-042186 A JP-A-4-36454 JP 2003-201803 A JP 2004-169558 A JP-A-2005-343107 JP 2005-42186 A JP 2005-273538 A

The temperature of the inlet air of the axial compressor is a low temperature that is almost equal to the outside air temperature, but the temperature of the pressurized / compressed air is 300 to 600 ° C. Therefore, the moisture (humidity) contained in the intake air is Sea salt particles (floating water floating in the air as seawater droplets are contained in the air, adhering as condensed water on the low-stage compressor blade surface located near the inlet of the axial compressor. Only evaporates and salts such as NaCl and MgCl ₂ are fine particles), oil smoke (unburned material mainly contained in exhaust gas of diesel engines), SO ₂ , SO ₃ , corrosive gas components such as NO _x is in the environment of the compressor blade surface coexist is corroded. In addition, solid dust (sand dust) trapped in the intake air adheres to the compressor blades and reduces the efficiency thereof, and also causes problems such as contact with the compressor blades and causing erosion damage. More importantly, if the compressor blade corrosion appears as pitting corrosion, the compressor blade is broken and a major accident is induced. In addition, in the case of rust generation, adhesion of foreign matter, erosion damage, etc., it is expected that the compression efficiency will be reduced by changing the shape of the compressor blades. This is an important research topic that contributes to the improvement of overall power generation efficiency.

In order to solve the problems of the compressor blades as described above, various techniques have been proposed in the past, but each has the following problems.
(1) Moisture and sea salt particles, SOx, NOx that entered the base surface of the compressor blade through pinholes existing in the plating film when a coating such as Cr plating or Ni plating was applied to the compressor blade surface The substrate is preferentially corroded by an environmental pollutant gas such as pitting corrosion, which causes breakage of the compressor blade.
(2) The current coating of chromium oxide containing Al improves corrosion resistance compared to untreated compressor blades, but it still does not prevent the adhesion of fine dust contained in the intake air. The compressor must be washed with water.
(3) Dusts on the surface of the compressor blades in the operation of the gas turbine, including the untreated compressor blades, as well as the surface-treated film-formed blades constructed by existing techniques such as (1) to (2) above. As a result, the compression efficiency decreases. As a countermeasure against this, there is a method of removing hard tree nuts or shell crushed pieces by putting them into the intake air and bringing them into contact with the compressor blades during operation of the gas turbine. The crushed pieces conveyed to the turbine section together with the compressed air may block the cooling air holes and cause overheating damage to high-temperature members such as turbine blades.
(4) Although a multistage air filter installed to remove fine dust contained in the intake air is effective as it is, the equipment cost is high and the air is not completely air. When the filter is installed, the resistance of the intake air increases, so the effect has a certain limit.
(5) The occurrence of erosion damage due to corrosion and dust generated on the compressor blade surface roughens the compressor blade surface and often causes changes in the shape of the compressor blade, and also reduces the compression efficiency. Cause.
(6) There is a demand for early detection of failures caused by the above (1) to (5) and shortening of work time to be performed for maintenance and inspection.

  However, despite the above-mentioned problems with compressor blades, the environmental temperature is lower than the high temperature part of the gas turbine, and the degree of corrosion and erosion damage is minor. There are few proposals for countermeasure technology. Slightly, Patent Document 11 discloses a technique for forming a soft Cu—Ni—In alloy for the implanted portion of the compressor blade into the disk to prevent seizure with the disk.

  Accordingly, the present invention provides a compressor blade that suppresses deterioration in the performance of the compressor due to adhesion and deposition of dust, in addition to suppressing corrosion and erosion damage that occurs on the surface of the compressor blade, a manufacturing method thereof, and the compression blade The present invention provides a gas turbine for thermal power generation having a compressor provided with blades.

The compressor blade according to the present invention has a structure in which carbon and hydrogen are directly or via an undercoat film on the surface of a base material that is an alloy steel containing carbon and chromium, or on the surface of a base material that is stainless steel containing nickel and chromium. Are coated with a single lipophilic amorphous film, the thickness of the amorphous film is in the range of 1 to 50 μm, and the arithmetic average roughness Ra of the surface of the amorphous film is 0. 5 μm or less and 10-point average roughness Rz is 2.0 μm or less, and is used for a compressor in which air at an outside temperature is sucked in from outside and the temperature of pressurized / compressed air becomes 300 ° C. to 600 ° C. is there.

In the compressor blade of the present invention, the arithmetic average roughness Ra of the surface of the substrate is preferably 0.5 μm or less, and the ten-point average roughness Rz is preferably 2.0 μm or less .

In the compressor blade of the present invention, it is preferable that the thickness of the lipophilic amorphous film is in the range of 10 μm to 50 μm, and the arithmetic average roughness Ra of the surface of the substrate is 1 μm to 3 μm .

In the compressor blade of the present invention, it is preferable that the thickness of the lipophilic amorphous film is in the range of 25 μm to 50 μm and the arithmetic average roughness Ra of the surface of the substrate is 1 μm to 15 μm .

The compressor blade manufacturing method of the present invention has an arithmetic average roughness Ra of 0.5 μm on the surface of a base material that is an alloy steel containing carbon and chromium or on the surface of a base material that is a stainless steel containing nickel and chromium. Hereinafter, the substrate surface processing step is performed so that the ten-point average roughness Rz is 2.0 μm or less. In addition, a single-layer lipophilic amorphous film mainly composed of carbon and hydrogen is formed on the base material directly or through an undercoat film, and the surface of the amorphous film is arithmetically averaged. Amorphous film for forming a film so that Ra is 0.5 μm or less, ten-point average roughness Rz is 2.0 μm or less, and the thickness of the amorphous film is in the range of 1 μm to 50 μm. It has a coating process. Further, it is a method for manufacturing a compressor blade used in a compressor in which air at an outside temperature is sucked in from the outside and the temperature of pressurized / compressed air becomes 300 ° C. to 600 ° C.

In the method for manufacturing a compressor blade of the present invention, the arithmetic average roughness Ra of the surface of a base material that is an alloy steel containing carbon and chromium or the surface of a base material that is a stainless steel containing nickel and chromium is 1 μm to 3 μm. It has the substrate surface processing process processed only by mechanical polishing so that it may become. In addition, a single-layer lipophilic amorphous film mainly composed of carbon and hydrogen is formed on the base material directly or through an undercoat film, and the surface of the amorphous film is arithmetically averaged. Amorphous film formed so as to have a thickness of Ra of 0.5 μm or less, a ten-point average roughness Rz of 2.0 μm or less, and a thickness of the amorphous film in a range of 10 μm to 50 μm It has a coating process. Further, it is a method for manufacturing a compressor blade used in a compressor in which air at an outside temperature is sucked in from the outside and the temperature of pressurized / compressed air becomes 300 ° C. to 600 ° C.

The gas turbine for thermal power generation of the present invention has a compressor provided with any one of the above-described compressor blades .

  The amorphous film mainly composed of carbon and hydrogen in the present invention exhibits excellent corrosion resistance due to dense and chemically stable properties, and has properties such as smoothness like a mirror surface and moderately high hardness. In addition, the amorphous film in the present invention is uniformly formed with a thickness that can follow the deformation of the substrate. Therefore, according to the present invention, a compressor blade having an amorphous film that exhibits a remarkable effect on erosion resistance while preventing adhesion of foreign substances and is resistant to impact and bending stress, and is difficult to break or peel off, and The manufacturing method can be provided. In addition, when an amorphous film is formed on the substrate via an undercoat film or an injection layer, the adhesion of the amorphous film is increased as compared to simply forming on the substrate surface. Therefore, it is possible to provide a compressor blade having an amorphous film that is more unlikely to be broken or peeled off, and a method for manufacturing the compressor blade.

Further, according to the gas turbine for thermal power generation of the present invention having the compressor provided with the compressor blade using the above-described compressor blade, the moisture contained in the intake air, sea salt particles, SO _x It is possible to suppress deterioration in performance due to adhesion of foreign substances such as corrosion and erosion damage caused by NO _x and oil smoke. As a result, the maintenance check and repair process of the compressor blades of the gas turbine for thermal power generation are reduced and shortened, and the consumption of fossil fuel is reduced while suppressing the decrease in power generation efficiency of the entire gas turbine for thermal power generation. It can be expected to contribute to global warming countermeasures by reducing the amount of CO ₂ generated per unit power generation.

  Hereinafter, a compressor blade according to an embodiment of the present invention, a manufacturing method thereof, and a gas turbine for thermal power generation will be described.

<First Embodiment>
FIG. 1 is a cross-sectional view showing a compressor blade according to the first embodiment of the present invention. FIG. 2 is a partially enlarged view of the vicinity of the surface of the compressor blade of FIG.

  Although not shown, the compressor blade 1 has the same external shape as a general compressor blade. A partially enlarged portion 11 near the surface of the compressor blade 1 includes a metal base 12 and an amorphous film 13 formed on the surface of the base 12.

The substrate 12 includes a carbon-containing, structural steel to chromium as essential components, stainless steel or the like to the Ni and Cr as essential components. The arithmetic average roughness Ra of the surface of the substrate 12 is 0.5 μm or less, and the ten-point average roughness Rz is 2.0 μm.

  The amorphous film 13 is mainly composed of carbon and hydrogen, and has a thickness in the range of 1 μm to 50 μm. 5-20 micrometers is especially suitable. A film thinner than 1 μm does not have sufficient corrosion resistance and erosion resistance, and a film thicker than 50 μm may cause cracks in the film when the blade is deformed in the operating environment of the compressor.

  The hardness of the amorphous film 13 is in the range of HV800 to 2200 in terms of micro Vickers hardness. Compared to the hardness of 12 mass% Cr steel (HV200 to 250), it is much harder and exhibits excellent erosion resistance.

  Further, in the amorphous film 13, the carbon atom ratio is 85 to 69 atom% and the hydrogen atom ratio is 15 to 31 atom%. In addition, the composition ratio of the hydrogen atoms is adjusted to be 100 atomic% or less. The amorphous film 13 preferably has a hydrogen content of 15 to 31 atomic% and the remainder is made of carbon. Although the amorphous film 13 having a hydrogen content of less than 15% is hard, it is difficult to follow the thermal expansion and deformation of the base material 12 due to its poor ductility, and a large internal stress is latent when the amorphous film 13 is formed. Therefore, there is a drawback that it is easy to peel off in the operating environment of the compressor. On the other hand, when the hydrogen content is greater than 31%, the hardness and mechanical strength of the amorphous film 13 are lowered, which is not preferable.

  Further, the arithmetic average roughness Ra of the surface of the amorphous film 13 is 0.5 μm or less, and the ten-point average roughness Rz is 2.0 μm or less.

Such an amorphous film 13 is dense and does not corrode even when immersed in an aqueous solution of acid, alkali, etc., and has no pores, so that only the pores are corroded preferentially and become apparent. There is no pitting corrosion. Further, since the specific gravity of the amorphous film 13 formed on the surface of the base material 12 is about 1.7, even if the amorphous film 13 of the compressor blade 1 is separated for some reason during the operation of the compressor, It does not impede other blades disposed in the subsequent stage, and is decomposed into carbon dioxide (CO ₂ ) and water vapor (H ₂ O) at a temperature of 450 ° C. or higher. It will not cause any blockage.

  Next, the manufacturing method of the compressor blade 1 is demonstrated for every process.

(1: Finishing process of substrate surface)
On the surface of the base material 12 for forming the amorphous film 13, the arithmetic average roughness Ra is 0.5 μm or less and the ten-point average roughness Rz is 2.0 μm or less by mechanical, chemical and electrochemical methods. Finish with a mirror surface of If such surface finishing is not performed, the surface of the base material 13 is rough, and thus projections and the like may exist. Therefore, when the thickness of the amorphous film 13 formed on the surface of the base material 12 is relatively thin as 10 μm, the amorphous film 13 in the portion where the protrusion is present may be destroyed at an early stage or may be a starting point of corrosion. There is.

  When mechanically polishing, the arithmetic average roughness Ra is set to about 1 to 3 μm using a fine-grained # 600 polishing belt, and then surface projections are removed by lapping or buffing to obtain a ten-point average roughness. The thickness Rz can be finished to 0.8 or less. In addition, if the surface after finishing the fine abrasive belt is subjected to a chemical polishing method (for example, a mixed solution of nitric acid, hydrochloric acid, phosphoric acid, etc.) or an electrolytic polishing method is applied in these polishing solutions using the substrate 12 as an anode, arithmetic A mirror surface having an average roughness Ra of 0.1 μm and a ten-point average roughness Rz of 0.5 μm or less is obtained, and a particularly suitable pretreatment surface can be formed. However, when the thickness of the amorphous film 13 is 10 μm to 50 μm, the amorphous film 13 having good adhesion and performance can be formed only by mechanical polishing (arithmetic average roughness Ra is 1 to 3 μm). Since the surface roughness of the amorphous film is less affected by the roughness of the base material and tends to be smoothed, it is not particularly necessary to define the finishing degree.

(2: Amorphous film formation process)
Next, the process of forming an amorphous film on the surface of the substrate 12 that has undergone the above-described finishing process will be described. FIG. 3 is a schematic configuration diagram of an apparatus for forming an amorphous film. This apparatus includes a grounded reaction vessel 2, an organic gas introduction device (not shown) for film formation and a reaction vessel connected to the internal space of the reaction vessel 2 via valves 7a and 7b, respectively. A high-voltage pulse is applied to the conductor 3 connected to the base 12 of the compressor blade 1 disposed at a predetermined position in the reaction vessel 2 through the introduction terminal 9 for evacuation. A high-voltage pulse generating power source 4 for applying a high-frequency voltage to the conductor 3 via the high-voltage introducing unit 9 to generate plasma around the base 12 of the compressor blade 1, a pulse and In order to share the application of the high frequency with one conductor 3, the weighting device provided between the high voltage pulse generating power source 4 and the plasma generating power source 5 and electrically connected to the high voltage introducing unit 9 6 and reaction vessel 2 and the surface and electricity And a ground line 8 are connected.

  In order to form the amorphous film 13 on the surface of the base material 12 using the apparatus having the above-described configuration, the base material 12 as an object to be processed is installed at a predetermined position, the vacuum apparatus is operated, and the valve 7b is used. After the air in the reaction vessel 2 is discharged, an organic hydrocarbon gas is introduced into the reaction vessel 2 through the valve 7a by a gas introduction device.

  Here, the kind of hydrocarbon gas which can be used in this embodiment is demonstrated. The types of gases introduced into the reaction vessel 2 are as follows, and are organic hydrocarbons composed of carbon and hydrogen and B, Si, O, Cl, etc. added thereto.

(1) Gas phase state at room temperature (18 ° C.) CH ₄ , CH ₂ CH ₂ , C ₂ H ₂ , CH ₃ CH ₂ CH ₃ , CH ₃ CH ₂ CH ₂ CH ₃
(2) Liquid phase at normal temperature C ₆ H ₅ CH ₃ , C ₆ H ₅ CH ₂ CH, C ₆ H ₄ (CH ₃ ) ₂ , CH ₃ (CH ₂ ) ₄ CH ₃ , C ₆ H ₁₂ , C ₆ H ₅ Cl
(3) Organic Si compound (liquid phase)
_{(C 2 H 5 O) 4} Si, (CH 3 O) 4 Si, (CH 3) 4Si, [(CH) 3 Si] 2 O
A compound in a gas phase at normal temperature can be introduced into the reaction vessel 2 as it is, but a compound in a liquid phase is heated to gasify it, and this vapor is supplied into the reaction vessel 2. When an amorphous film is formed using an organic Si compound, Si may be mixed into the film, but since Si is strongly bonded to carbon, it does not hinder the use in this embodiment.

  After introducing the hydrocarbon gas into the reaction vessel 2 as described above, high frequency power from the plasma generating power source 5 is applied to the substrate 12. Since the reaction vessel 2 is in an electrically neutral state by the ground wire 8, the base material 12 has a relatively negative potential. For this reason, + ions in the plasma of the introduced gas generated by the application are characterized by being generated along the shape of the negatively charged substrate 12. Furthermore, a high voltage pulse (negative high voltage pulse) from the high voltage pulse generation source 4 can be applied to the base material 12 to positively attract + ions in the plasma to the surface of the base material 12. By this operation, an amorphous film 13 having a uniform thickness can be formed on the surface of the substrate 12. In this plasma, the following phenomena (1) to (4) occur, and it is considered that an amorphous film 13 mainly composed of carbon and hydrogen is finally formed on the surface of the substrate 12. Yes.

(1) Ionization of introduced gas (hydrocarbon) (active neutral particles called radicals also exist).
(2) The ions and radicals changed from the gas collide impactively with the blade surface to which a negative voltage is applied.
(3) C—H having a low binding energy is cut by impact at the time of collision, and H is sputtered.
(4) An amorphous film containing hydrogen is formed on the blade surface.

  Note that it is possible to repeat the pulse with a pulse width of 1 μSec to 10 mSec and a pulse number of 1 to multiple times. Further, the output frequency of the high frequency power of the plasma generating power source 5 can be changed in the range of several tens of kHz to several GHz. The method of forming the amorphous film 13 with the above policy is referred to herein as a high frequency plasma CVD method.

  According to the above configuration, the compressor blade 1 having the amorphous film 13 that exhibits a remarkable effect on the erosion resistance while preventing the adhesion of foreign matters and is resistant to impact and bending stress, and is not easily broken or peeled off. And a manufacturing method thereof.

<Second Embodiment>
Next, a compressor blade according to a second embodiment of the present invention will be described. In addition, the part of the codes | symbols 11 and 13 of 1st Embodiment and the part of the codes | symbols 21 and 23 of this embodiment respond | correspond in order, The description may be abbreviate | omitted. The figure is a partially enlarged cross-sectional view of the vicinity of the surface of the compressor blade according to the third embodiment of the present invention.

  Although not illustrated, the compressor blade of the present embodiment has the same outer shape as a general compressor blade. The partially enlarged portion 21 near the surface of the compressor blade includes a base material 22 and an amorphous film 23 formed on the surface of the base material 22.

  The base material 22 has a base material main part 22a and an injection layer 22b formed on the surface of the base material main part 32a (surface part of the base material 32). The injection layer 22 b is formed by injecting one or more elements selected from C, Ti, W, Nb, Ta, Cr, Al, and Si into the surface portion of the base material 22. As a modification, a metal thin film may be formed between the injection layer 22 b and the amorphous film 23.

  Next, a method for manufacturing the compressor blade according to the present embodiment will be described. In addition, since the finishing process of the base material 22 surface and the formation process of the amorphous film 23 are the same as those in the first embodiment, the description will be simplified, and the formation process of the injection layer 22b of the base material 22 will be described in detail.

  First, by using the apparatus of FIG. 3 described in the first embodiment, by changing the output voltage of the high voltage pulse generation source 4, ion implantation including metal is performed on the surface of the base material 22 for implantation. Layer 22b is formed. Then, an amorphous film 23 is formed on the surface of the injection layer 22b in the same manner as in the first embodiment.

In the modification described above, the apparatus shown in FIG. 3 can also be used when a metal thin film is formed between the injection layer 22 b and the amorphous film 23. For example, it can be used for formation of each layer on the surface of the base material 22 or the surface under the following conditions (1) to (4).
(1) When ion implantation is focused on the surface of the base material 22: 10 to 40 kV
(2) When ion implantation and metal thin film formation are performed: 5 to 20 kV
(3) When forming a metal thin film on the substrate 22: several hundred V to several kV
(4) When metal thin film formation is focused on the substrate 22 by sputtering or the like: several hundred V to several kV
Therefore, after forming a metal ion implantation or metal thin film having a strong chemical affinity with carbon such as Cr, Si, Ta, Nb, Ti on the surface or the surface of the base material 22, the amorphous film 23 is laminated thereon. It is possible.

  According to the above configuration, the same effect as that of the first embodiment is achieved, and the amorphous film 23 is formed on the base material 22 via the injection layer 22b. The adhesion of the amorphous film 23 is increased. Therefore, it is possible to provide a compressor blade having an amorphous film 23 that is more difficult to break or peel off and a method for manufacturing the compressor blade.

<Third Embodiment>
Next, a compressor blade according to a third embodiment of the present invention will be described. In addition, the site | part of the codes | symbols 11-13 of 1st Embodiment and the site | parts of the codes | symbols 31-33 of this embodiment respond | correspond in order, The description may be abbreviate | omitted. FIG. 5 is a partially enlarged cross-sectional view of the vicinity of the surface of the compressor blade according to the third embodiment of the present invention.

  Although not illustrated, the compressor blade of the present embodiment has the same outer shape as a general compressor blade. A partially enlarged portion 31 near the surface of the compressor blade is formed on a metal base 32, an undercoat 34 (undercoat film) formed on the surface of the base 32, and a surface of the undercoat 34. And an amorphous film 33.

  The undercoat 34 is a film having a film thickness of 0.1 to 3 μm of at least one selected from a simple substance of Ti, W, Nb, Ta, Cr, Al, Si or an alloy thereof.

  Next, a method for manufacturing the compressor blade according to the present embodiment will be described. In addition, since the finishing process of the base material 32 surface and the formation process of the amorphous film 33 are the same as those in the first embodiment, the description will be simplified and the formation process of the undercoat 34 will be described in detail.

  First, the surface of the base material 32 is finished in the same manner as in the first embodiment, and the undercoat 34 is applied to the surface of the base material 32 using one or more methods selected from an electroplating method, a CVD method, and a PVD method. Form. Then, an amorphous film 33 is formed on the surface of the undercoat 34 in the same manner as in the first embodiment.

  According to the above configuration, the same effect as that of the first embodiment is achieved, and the amorphous film 33 is formed on the base material 32 via the undercoat 34. Therefore, the amorphous film 33 is simply formed on the surface of the base material 32. The adhesion of the amorphous film 33 is increased. Accordingly, it is possible to provide a compressor blade having an amorphous film 33 that is more difficult to break or peel and a method for manufacturing the compressor blade.

  Hereinafter, the present invention will be specifically described with reference to examples.

Example 1
In this example, a test in which the surface of each carbon steel substrate having a different surface roughness was coated with an amorphous film having a thickness controlled in a range of 0.05 μm to 70 μm with the same configuration as in the first embodiment. A piece was prepared, and the salt spray test method specified in JISZ2371 was continuously carried out for 96 hours, and the appearance of each test piece was visually observed to investigate the occurrence of red rust. The carbon steel substrate has a width of 25 mm, a length of 60 mm, and a thickness of 1.0 μm, and a surface roughness of Ra of 1 μm to 10 μm is prepared by polishing with emery paper with different abrasive grains. The surface roughness Ra of 0.3 μm or less was finished by electrolytic polishing after polishing with # 1000 emery paper. A carbon steel substrate having a surface roughness with Ra of 10 μm or more was prepared by blasting using Al ₂ O ₃ particles. Table 1 below summarizes the above contents and test results.

  As apparent from the results in Table 1, when the thickness of the amorphous film is 0.90 μm or less, red rust is often generated even when the surface roughness of the carbon steel substrate is finished in a mirror state (0.01 μm or less). It was confirmed that the corrosion resistance was poor. However, when the thickness of the amorphous film is 1.0 μm or more, the corrosion resistance is improved, and when the thickness is 60 to 70 μm, excellent corrosion resistance is exhibited even when the Ra of the carbon steel substrate is 10 to 15 μm. From these results, it was found that the corrosion resistance of the amorphous film according to the present invention is greatly influenced by the film thickness and the surface roughness of the substrate.

(Example 2)
Using the same test piece as in Example 1, the central part was bent at 90 °, and then the test was continuously conducted for 96 hours by the salt spray test method defined in JISZ2371. The appearance of each test piece after the test, particularly the presence or absence of red rust in the bent part was investigated. Table 2 below summarizes the above contents and test results.

  As is apparent from the results in Table 2, bending is performed with a Ra of the carbon steel substrate surface of 0.3 μm or less and an amorphous film thickness of 1 μm (No. 3) to 50 μm (No. 6). However, the occurrence of red rust was not observed. That is, it was confirmed that an amorphous film satisfying this condition maintained excellent corrosion resistance without causing defects such as cracks on the surface of the test piece even after bending. On the other hand, when the amorphous film has a thickness of 60 to 70 μm (No. 7), even if the surface roughness of the carbon steel substrate is less than 0.1 μm, the amorphous film is cracked by bending, and this defect portion It was observed that the specimen was being corroded by the salt water that entered through.

  From the results of Examples 1 and 2 above, for a member to which a large bending moment is applied during operation, such as an axial compressor, Ra of the carbon steel substrate is 0.5 μm or less, and Rz is 0.00. If it is finished to be 8 μm or less, it is found that excellent corrosion resistance is exhibited even when the thickness of the amorphous film is 1 μm, and when the thickness of the amorphous film is 25 to 50 μm, the surface of the carbon steel substrate It was confirmed that sufficient corrosion resistance was maintained even if the roughness was not specified.

(Example 3)
In this example, an SS400 steel plate (Ra = 0.12 μm, Rz = 0.88 μm) having the same dimensions as the carbon steel substrate used in Example 1 was used as the substrate with the same configuration as that of the second embodiment. After injecting various elements into one surface by high-frequency plasma CVD, observe the surface of the amorphous film with a magnifying glass in a state where the amorphous film is bent at 90 ° with a 15 μm steel bar as a fulcrum. Recorded. Thereafter, the test piece was further bent at 180 °, and the same position was observed and recorded with a magnifying glass, and the presence or absence of improved adhesion of the amorphous film due to the formation of the injection layer on the surface portion of the SS400 steel sheet was investigated. The elements implanted into the implantation layer of this example are N, Ti, Nb, Ta, Cr, Al, and Si, which have high chemical affinity with C and C, and the implantation concentration is 1 × 10 ¹² to 1 × 10 ¹⁴ ion concentration. As a comparative example, Cu, Ni, and Sn, which have a small chemical affinity with C, were subjected to the same concentration injection treatment. Further, the amount of hydrogen in the amorphous film formed on each implantation layer is 12%, and the rest has a main structure of carbon. Table 3 below summarizes the above contents and test results.

  As is apparent from the results in Table 3, the specimens injected with Cu, Ni, and Sn (Nos. 9, 10, and 11) of the comparative examples were completely separated even by being bent by 90 °. In the test pieces (Nos. 1 to 8) formed by injecting metal ions with strong affinity to form an injection layer, the amorphous film was not peeled even when bent 180 °. Therefore, the effect that the adhesion force of the amorphous film to the SS400 steel plate base material was greatly improved by forming the injection layer on the surface portion of the SS400 steel plate base material was recognized.

Example 4
In this example, after forming an amorphous film with a thickness of 15 μm on the surface of a test piece of carbon steel, SUS410 steel (size: width 50 mm × length 100 mm × thickness 3.2 mm), the surface of the amorphous film On the other hand, the erosion resistance of the amorphous film was investigated by blowing 0.5 MPa air containing 60-mesh Al ₂ O ₃ powder at a 30 ° angle from a distance of 100 mm in height. FIG. 6 is a schematic configuration diagram of the erosion apparatus used in this embodiment. The usage method of this erosion apparatus is as follows. After the test piece 49 was fixed to a test piece holder 41, _Al 2 _{O 3} from the nozzle 42 installed in the right above the compressed air 5 kg · ^{cm -2} atm containing _Al 2 _{O 3} powder of 60 mesh on the surface of the test piece 500g was sprayed as a seed, and the erosion depth was estimated by measuring the surface morphology change due to erosion by visual observation (including magnifying glass observation) of the amorphous film surface after the test and a stylus type surface roughness meter of the erosion part did. Note 43 in FIG. 6 is a pneumatic compressor, 44 moisture removal device, 45 a pressure regulator, 46 airflow preparation machines, 47 _Al 2 _{O 3} powder feed hopper, 48 _Al 2 _{O 3} powder It is an air hole for conveying. In this example, an amorphous film having high hardness was used together with untreated SS400 and SUS410 as a test specimen for comparison. Table 4 below summarizes the above contents and test results.

As is apparent from the results in Table 4, wear marks were recognized so that the untreated (No. 1) and SUS410 steel (No. 2) of the comparative example could be visually discriminated. On the other hand, even if the amorphous film has high hardness (No. ₃ , 4, 7, 8), the film is destroyed by the impact energy of the Al ₂ O ₃ powder, the base material is exposed, and erosion occurs in the base material. Was recognized. On the other hand, the amorphous films (Nos. 5 and 6) according to the present invention all remained, and the erosion depth by the surface roughness meter was 2 μm or less, indicating excellent erosion resistance. . From the above results, it was found that a hard amorphous film has a high residual stress at the time of film formation, and thus is easily broken in an environment in which impacts are continuously applied.

(Example 5)
In this example, a test piece of SS400 steel (dimensions: width 10 mm × length 50 mm × thickness 1.5 mm) was used as a base material with the same configuration as that of the third embodiment, and the surface thereof was electroplated. After applying various metal thin films as an undercoat by CVD and PVD methods, an amorphous film according to the present invention was formed on the surface with a thickness of 15 μm, and this test piece was 180 ° in the same manner as in Example 3. The adhesion test of the morphous film was investigated using a magnifying glass. The undercoat formation method and the type of metal thin film are as follows.
Electroplating method: Cr, Cu-Ni
CVD method: Cr, Al, Si
PVD method: Ti, W, Nb, Ta, Cr, Al
Table 5 below summarizes the above contents and test results.

  As is clear from this result, in the test piece formed as an undercoat with a metal thin film having a strong chemical affinity with carbon such as Ti, W, Cr, Al, and Si, the electroplating method, the CVD method, and the PVD method were used. Regardless of which method was used, the amorphous film did not peel off and showed excellent adhesion. On the other hand, Cu (No. 8) and Ni (No. 9) formed by the electroplating method of the comparative example were weakly adhered to the amorphous film and completely separated.

The present invention can be changed in design without departing from the scope of the claims, and is not limited to the above-described embodiments and examples. Incidentally, amorphous films of the present invention belongs to the lipophilic (hydrophobic). In addition, according to the present invention , the compression used in the compressor shown in the above-described embodiment and examples is used for a compressor in which air at an outside temperature is sucked in from the outside and the temperature of the pressurized / compressed air becomes a temperature of 300 ° C. to 600 ° C. It is possible to provide a gas turbine for thermal power generation in which a blade is used for an axial compressor or the like. If this thermal power generation gas turbine is used, it suppresses deterioration in performance due to adhesion of foreign substances such as corrosion and erosion damage caused by moisture, sea salt particles, SOx, NOx and oil smoke contained in the intake air. Can do. As a result, the maintenance check and repair process of the compressor blades of the gas turbine for thermal power generation are reduced and shortened, and the consumption of fossil fuel is reduced while suppressing the decrease in power generation efficiency of the entire gas turbine for thermal power generation. It can be expected to contribute to global warming countermeasures by reducing the amount of CO2 generated per unit power generation.

  The technology of the present invention conveys and exhausts fan blades installed at the forefront of jet engines, combustion gases such as petroleum and coal, and hydrocarbon cracking gases derived from fossil fuels. The present invention can be applied to blade surfaces such as a blower and an exhaust fan, and attached members thereof, and can also be used for low-stage blades of a steam turbine. Furthermore, it can also be used for imparting corrosion resistance to geothermal turbine blades and the like and for preventing deposits from accumulating. In addition, the present invention can also be applied to a vacuum pump impeller for exhaust including a trace amount of corrosive gas and its attached members.

It is sectional drawing which shows the compressor blade | wing which concerns on 1st Embodiment of this invention. FIG. 2 is a partially enlarged cross-sectional view of the vicinity of the surface of the compressor blade of FIG. 1. It is a schematic block diagram of the apparatus used in the manufacturing process of the compressor blade | wing of FIG. It is a partially expanded sectional view of the surface vicinity of the compressor blade | wing which concerns on 2nd Embodiment of this invention. It is a partially expanded sectional view of the surface vicinity of the compressor blade | wing which concerns on 3rd Embodiment of this invention. 6 is a schematic configuration diagram of an erosion device used in a test of Example 4. FIG.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Compressor blade 2 Reaction vessel 3 Conductor 4 High voltage pulse generation source 5 Power source for plasma generation 6 Double riding device 7a, 7b Valve 8 Ground wire 9 Introduction terminal 12, 22, 32 Base material 11, 21, 31 (Compressor blade Partially enlarged portion 13, 23, 33 Amorphous film
34 Undercoat (undercoat film)
41 Test piece holder 42 Nozzle 43 Compressor 44 Moisture removal machine 45 Pressure regulator 46 Air flow rate adjustment machine 47 Supply hopper 48 Air hole 49 Test piece

Claims (7)

One layer mainly composed of carbon and hydrogen on the surface of a base material that is an alloy steel containing carbon and chromium, or on the surface of a base material that is a stainless steel containing nickel and chromium, either directly or through an undercoat film The thickness of the amorphous film is in the range of 1 μm to 50 μm, the arithmetic average roughness Ra of the surface of the amorphous film is 0.5 μm or less, and the ten-point average roughness Rz Ri der less 2.0 .mu.m, a compressor blade temperature of inhaled air by the outside air temperature from outside the pressure-compressed air, characterized by being used in the compressor to be 300 ° C. to 600 ° C.. 2. The compressor blade according to claim 1, wherein an arithmetic average roughness Ra of the surface of the base material is 0.5 μm or less and a ten-point average roughness Rz is 2.0 μm or less. 2. The compressor according to claim 1 , wherein the lipophilic amorphous film has a thickness in a range of 10 μm to 50 μm, and an arithmetic average roughness Ra of the surface of the base material is 1 μm to 3 μm. Wings. 2. The compressor according to claim 1 , wherein the lipophilic amorphous film has a thickness in a range of 25 μm to 50 μm, and an arithmetic average roughness Ra of the surface of the base material is 1 μm to 15 μm. Wings. The arithmetic average roughness Ra of the surface of the base material that is an alloy steel containing carbon and chromium or the surface of the base material that is a stainless steel containing nickel and chromium is 0.5 μm or less, and the ten-point average roughness Rz is 2. A substrate surface processing step for processing to be 0 μm or less;
A single-layer lipophilic amorphous film mainly composed of carbon and hydrogen is formed on the substrate directly or through an undercoat film, and the surface of the amorphous film has an arithmetic average roughness Ra. Amorphous film coating step of forming a film so that the 10-point average roughness Rz is 2.0 μm or less and the thickness of the amorphous film is in the range of 1 μm to 50 μm. And a method for producing a compressor blade having
A method for manufacturing a compressor blade, wherein the compressor blade is used in a compressor in which air at an outside temperature is sucked in from the outside and the temperature of the pressurized / compressed air becomes 300 ° C to 600 ° C. The surface of the base material, which is an alloy steel containing carbon and chromium, or the surface of the base material, which is a stainless steel containing nickel and chromium, is processed only by mechanical polishing so that the arithmetic average roughness Ra is 1 μm to 3 μm. Substrate surface processing step;
A single-layer lipophilic amorphous film mainly composed of carbon and hydrogen is formed on the substrate directly or through an undercoat film, and the surface of the amorphous film has an arithmetic average roughness Ra. Amorphous film coating step of forming a coating so that the thickness of the amorphous film is in the range of 10 μm to 50 μm so that the 10-point average roughness Rz is 2.0 μm or less and 0.5 μm or less. And a method for producing a compressor blade having
A method for manufacturing a compressor blade, wherein the compressor blade is used in a compressor in which air at an outside temperature is sucked in from the outside and the temperature of the pressurized / compressed air becomes 300 ° C to 600 ° C. A gas turbine for thermal power generation, comprising a compressor including the compressor blade according to any one of claims 1 to 4 .

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