JP4594256B2 - Laser processing system and laser processing method - Google Patents

Description

  The present invention relates to a laser processing system and a laser processing method, and in particular, achieves high-precision laser processing by adjusting the focus position of a processing laser beam and the focus positions of a plurality of visible laser beams within an allowable range. The present invention relates to a laser processing system and a laser processing method that can be performed.

  In laser processing, there is a remote welding method in which laser light is condensed and welded far from a laser oscillator while using a long-focus condenser lens. The processing laser beam condensed by the long focal point condensing lens can be processed to the same degree as the processing at the focal position even at a position slightly deviated from the focal position. That is, since the focal depth can be increased in the thickness direction of the workpiece, it is not necessary to perform strict focal position management.

  By the way, in order to focus the processing laser far from the laser oscillator, a relatively high quality laser oscillator is required. Conventionally, however, a laser oscillator that mainly emits a carbon dioxide gas laser has been frequently used. Since a carbon dioxide laser cannot be guided by an optical fiber, a large number of mirrors must be provided to focus light from a distance, for example, from a laser oscillator outside the vehicle to a welding site inside the vehicle. Therefore, there are problems that it takes time to adjust the mirror and the cost increases. A technique for guiding an optical fiber has been developed for the laser oscillator that irradiates the carbon dioxide laser. According to this technology, it is possible to guide the laser by utilizing the flexibility of the optical fiber even when condensing far away, such as up to the welding site inside the vehicle, and adjustment of the mirror and the like is possible. It becomes unnecessary, and furthermore, the cost can be reduced.

  In the process of applying the remote welding method using this optical fiber light guide type laser beam, it is necessary to manage the focal position of the processing laser more strictly than in the past. This is due to the difference in beam shape between the focal position and its periphery in order to form an optical system that forms an image on the end face of the outgoing fiber of the optical fiber when condensing the optical fiber guided laser beam. It is considered to be one.

  When laser processing is applied, the focus position of the processing laser cannot be visually recognized regardless of whether the above-described carbon dioxide laser light or optical fiber light guide type laser light is applied. The focal positions of a plurality of possible visible lasers are matched to some extent, and the focal positions of the lasers for processing are simulated by visually focusing the focal points of the respective visible lasers, and laser processing is performed. Is the current situation.

  By the way, a technique disclosed in Patent Document 1 can be cited as a conventional technique related to a laser processing system using the above-described optical fiber. This laser processing system (and laser processing method) irradiates the surface of a workpiece with a processing laser and a visible laser via an optical fiber, shoots a visible laser beam reflected from the surface of the workpiece, and applies it to a television monitor or the like. The lens position where the contrast of the projected luminance distribution is maximized is automatically specified.

  Further, Patent Document 2 discloses a laser processing system in which, in laser processing using a carbon dioxide laser, in a captured image obtained by capturing a visible laser, a converging position where the size of a bright spot is the minimum is used as a focal position of the processing laser. ing.

JP-A-9-216087 Japanese Patent No. 3352373

  According to the laser processing system disclosed in Patent Document 1 described above, the laser processing position can be observed and the focal position of the laser beam can be automatically adjusted even if the processing position is not visible such as in a pipe. It becomes. Further, the focal position of the processing laser can be automatically specified by specifying the in-focus degree of the visible laser with the lens position where the contrast of the luminance distribution is maximized. However, in the method of specifying the focus position of the visible laser with high and low contrast, it is difficult to specify the focus position with high accuracy such as specifying a focus shift of about 1 mm. Further, in such an apparatus, guide light (visible laser) and YAG laser (processing laser) are irradiated in the coaxial direction to the incident lens, the composite optical fiber, and the output lens. The wavelength of light is very different from that of light. In such a device configuration, the distance from the exit lens to the workpiece (focal length) and the difference in wavelength of both lasers must be corrected for the distance between the visible laser and the processing laser. For example, the focal point of the processing laser cannot be specified only by the contrast of the visible laser. Further, the applied composite optical fiber is an extremely expensive fiber in which a fiber for guiding laser light and an image transmission fiber are integrally formed, and the production cost of the apparatus cannot be denied.

  Further, in the laser processing system disclosed in Patent Document 2, it is difficult to specify the focus position of the processing laser with the minimum value of the size of the bright spot, as in Patent Document 1, with high accuracy. In addition, such a device has a configuration including a large number of mirrors, and since the configuration is complicated, there is a problem of an increase in the manufacturing cost of the device. Application is difficult.

  The present invention has been made in view of the above-described problems, and can focus the focus position of a processing laser and the focus positions of a plurality of visible lasers with high accuracy, and can also be manufactured with a simple apparatus configuration. It is an object of the present invention to provide a laser processing system with a relatively low cost and a laser processing method using the laser processing system.

  In order to achieve the above object, a laser processing system according to the present invention is a laser processing system that performs laser processing by irradiating a workpiece surface with laser light, and the laser processing system includes a processing laser oscillator, a collecting laser oscillator, and a laser processing system. A condensing optical system including an optical lens, two or more visible laser oscillators, a movement control device that adjusts the condensing lens and the visible laser oscillator in advance and retreat, and a focal point of visible laser light on the surface of the workpiece An image pickup device that picks up light, and an image processing device that performs image processing on the picked-up video and displays a processed image, and includes a focus position of a processing laser and a focus position of each visible laser. Further, it is characterized in that it further includes a focal position control means for adjusting the value within a range of the allowable deviation amount based on a preset correlation graph.

  The laser processing system of the present invention is an apparatus that performs laser welding processing, laser drilling processing, or the like on an arbitrary workpiece by applying an appropriate laser. The processing laser applied here includes a YAG laser and a YAG-SHG laser in addition to a carbon dioxide laser.

  The condensing optical system is configured, for example, by arranging two or more condensing lenses or a collimating lens and a condensing lens with an appropriate interval. In the laser processing system of the present invention, two or more visible laser oscillators are provided on the opposite side (processing laser oscillator side) of the condenser lens closest to the workpiece to the workpiece. The condensing lens and the two or more visible laser oscillators are moved and controlled by a movement control device so as to be able to advance and retreat synchronously, and each visible laser falls within a preset allowable deviation range. The movement is controlled so that the focal position (and the focal position of the processing laser) enters.

  The focal position of the processing lens is set in advance using a known focus monitor or the like, and the focusing lens and the visible laser are separated from each other so that the focal position of each visible laser coincides with the focal position of the processing laser. Or the angle adjustment of each visible laser is performed in advance.

  In addition, an imaging device for photographing the focus light of the visible laser on the surface of the workpiece is provided, and the photographed video is displayed on the screen after being image-processed by the image processing device. For example, a CCD camera can be applied to this imaging apparatus. Further, the image processing apparatus is composed of a personal computer, for example, and is connected to a CCD camera. For example, the imaging apparatus is configured to be provided on the rear end side of the condensing optical system, that is, on the side opposite to the workpiece, so that it is irradiated through the condenser lens and reflected on the surface of the workpiece. A visible laser (focused light) can be taken.

  In the laser processing system of the present invention, a correlation graph is prepared in advance so that the focal positions of two or more visible lasers coincide with the focal positions of the processing lasers or precisely coincide with each other within an allowable deviation range. Based on this correlation graph, the degree of coincidence of the focal position of each visible laser is specified, and the focal position is adjusted while the visible laser and the condensing lens closest to the workpiece are moved synchronously as necessary. To do.

  Here, when creating the correlation graph, the correlation value is 100% when the focal positions of two or more visible lasers are completely coincident with each other, so that the correlation value decreases in accordance with the planar shift amount of both focal positions. A simple correlation graph. In this correlation graph, for example, the correlation value corresponds to 95% when both focal positions are shifted by 1 mm, and the allowable deviation required for processing is 1 mm. Each of the visible lasers (and the condensing lens) is adjusted to advance and retract within a range where the correlation value falls within 95%.

  The method for creating the correlation graph, that is, the method for calculating the correlation value is not particularly limited. For example, a known normalized correlation (CC: Correlation Coefficient) or the normalized correlation is further expanded. A correlation graph based on selective normalized correlation (SCC) or the like can be applied.

  According to the laser processing system of the present invention, the focusing lens close to the workpiece and two or more visible lasers installed in the vicinity thereof can be moved synchronously, and the focal position of the workpiece laser is specified. The degree of coincidence of two or more visible lasers is specified based on the correlation graph, and the focus position is within an allowable range while moving the condenser lens and the visible laser as necessary, so that an accuracy error of about 1 mm. It is possible to focus a high-precision visible laser that can cope with the above.

  In another embodiment of the laser processing system according to the present invention, the two or more visible laser oscillators irradiate visible laser beams having different wavelengths.

  When visually confirming the degree of coincidence of the focal positions of two or more visible lasers on the image monitor, the degree of coincidence of the focal positions due to the difference in hue of the focused light by applying lasers having different wavelengths to the respective visible lasers Can be identified more clearly.

  Shooting / image processing of the focus light of visible lasers with different hues, measuring the amount of misalignment of both on the screen, and reading them into the created correlation graph, the misalignment amount is within the allowable deviation range It becomes possible to determine whether or not. An appropriate mask may be provided in the visible laser oscillator, and the image form when the focused light is image-processed may be a form other than a circle. For example, a mask pattern in which the focal position is a cross-shaped intersection is prepared for one visible laser, and the circular focus light of the other visible laser having a different hue matches the cross-shaped intersection. There is also a form of determining whether or not.

  Another embodiment of the laser processing system according to the present invention is a laser processing system for performing laser processing by irradiating a workpiece surface with laser light, the laser processing system comprising: a processing laser oscillator; A condensing optical system including a condensing lens, a visible laser oscillator, a branching mirror that divides the visible laser light emitted from the visible laser oscillator into two or more visible laser lights, a condensing lens, and a visible laser oscillator Control device that adjusts advancing and retreating synchronously, an imaging device that captures the focus light of visible laser light on the surface of the workpiece, and an image processing device that performs image processing on the captured image and displays a processed image The focus position of the processing laser and the focus position of each visible laser are adjusted within the allowable deviation range based on a preset correlation graph. Characterized in that it further includes a focus position control means for.

  In the laser processing system of the present invention, instead of applying two or more separate visible laser oscillators, one visible laser oscillator on the side opposite to the workpiece out of the condensing lens closest to the workpiece. The processing system is configured such that the visible laser beam from the visible laser oscillator is split into two or more by a branching mirror and passes through a condenser lens.

  For example, one visible laser is split by branching the visible laser emitted from the visible laser oscillator so that two visible lasers pass near the two ends at the position of the point object with respect to the central point of the condenser lens. By forming two visible lasers only from the oscillator and specifying the degree of coincidence of both focal positions based on the correlation graph described above, the focal position of the processing laser can be identified with high accuracy.

  According to the laser processing system of the present invention, the number of visible laser oscillators can be reduced, and the production cost of the system can be reduced.

  In another embodiment of the laser processing system according to the present invention, an optical fiber for guiding the processing laser light is interposed between the processing laser oscillator and the condensing optical system, and at least the condensing is performed. It further comprises a manipulator equipped with an optical system and a unit comprising the imaging device.

  An image pickup apparatus including a condensing optical system, a visible laser oscillator, and a CCD camera is used as one unit, and the processing laser oscillator and the unit are connected by an optical fiber, and the processing laser passes through the optical fiber. The system is configured by irradiating the condensing optical system and further mounting the unit on a manipulator such as an articulated robot arm.

  According to the laser processing system of the present invention, it is possible to perform laser processing of a part that cannot be directly recognized inside the vehicle, laser processing when the processing space is narrow, laser processing when the processing part is located in the back of the product, etc. High precision laser processing becomes possible.

  Furthermore, a laser processing method according to the present invention is a laser processing method for irradiating the surface of a workpiece with a processing laser beam irradiated from a processing laser oscillator via a condensing optical system provided with a condensing lens. The processing laser oscillator side of the condenser lens is provided with a visible laser oscillator capable of irradiating two or more visible laser beams, and the focal position of the processing laser and the focal position of each visible laser are completely A correlation graph in which the correlation value is the maximum correlation value and the correlation value decreases in accordance with the amount of deviation of the focus position of each visible laser is prepared in advance, The allowable deviation amount of the focus position of each visible laser is set in advance, and the focus light of each visible laser is imaged and image-processed by the imaging device, and the focus of each visible laser is It is determined whether or not the position deviation is within the range of the allowable deviation of the correlation graph. The forward and backward adjustment is performed in synchronization with the laser oscillator.

  The present invention relates to a laser processing method to which the laser processing system described above is applied. Here, the visible laser light may be emitted from two or more visible laser oscillators, or the visible laser emitted from one visible laser oscillator is converted into two or more lasers by a branching mirror. It may be a form of branching.

  The arrangement position and angle of the condenser lens and the visible laser oscillator are adjusted in advance so that the focal position of the processing laser and the focal position of the two or more visible lasers coincide with each other. A correlation graph relating to the amount of shift of the focal position is created.

  When performing arbitrary laser processing, an allowable deviation amount of the focal position required for the laser processing is set in the correlation graph, and the positional deviation amount is calculated in the computer based on the captured images related to the focus light of two or more visible lasers. Measure and determine whether the displacement is within the allowable range of the correlation graph.

  As a result of the determination, if the amount of positional deviation is within the allowable range, the laser processing is performed by proceeding to the processing laser irradiation as it is. On the other hand, when the amount of positional deviation is outside the allowable range, adjustment is made so that the focal positions of both visible laser beams fall within the allowable range while the condensing lens and the visible laser oscillator are advanced and retracted in synchronization. In addition, since the required allowable deviation amount can be set in the correlation graph each time, it becomes possible to easily set the focal position of the processing laser according to the processing accuracy.

  According to the laser processing method of the present invention, the degree of coincidence of the focal positions of two or more visible lasers is evaluated by the correlation value, and whether or not it is within the allowable range is specified by the correlation value. It becomes possible to specify the focal position of the processing laser with higher accuracy than the processing method. The laser processing method of the present invention is suitable for precision laser processing that requires adjustment of the shift amount of the focal position of a processing laser within a range of, for example, about 1 mm.

  As can be understood from the above description, according to the laser processing system and the laser processing method of the present invention, it is created in advance when the focal position of the processing laser is specified by the amount of deviation of the focal positions of two or more visible lasers. It is possible to perform laser processing with extremely high accuracy by determining whether or not the focal position is within the allowable deviation amount range based on the correlation value, and adjusting the visible laser oscillator and condenser lens to advance and retract as necessary. At the same time, the focus position can be adjusted efficiently.

  Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is a schematic view of an embodiment of the laser processing system of the present invention, FIG. 2 is a schematic view of the focus light of two visible lasers formed on the surface of the workpiece, and FIG. One embodiment is shown, and FIG. 2b shows a diagram illustrating another embodiment. FIG. 3 is a control block diagram of the laser processing system, FIG. 4 is a diagram showing one embodiment of a correlation graph, and FIG. 5 is a diagram showing another embodiment of the condensing optical system. FIG. 6 shows a schematic diagram of another embodiment of the laser processing system, respectively. The laser processing system of the present invention is generally applied to laser processing such as laser welding processing and laser drilling processing.

  FIG. 1 shows a schematic diagram of an embodiment of a laser processing system. The laser processing system 100 includes a processing laser oscillator 1 that irradiates a processing laser L1, such as a YAG laser and a YAG-SHG laser, an optical fiber 2 that guides the processing laser L1, and a laser beam irradiated from the optical fiber 2. Refracting lens 41, condensing optical system 3 for condensing light refracted by the refractive lens 41, and refraction for refracting the processing laser L1 collected by the condensing optical system 3 toward the workpiece. The lens 42 is generally composed of visible laser oscillators 51 and 52 that oscillate the visible laser L2, a CCD camera 6, and a personal computer 7 that controls the system. The refractive lens 41, the condensing optical system 3, the visible laser oscillators 51 and 52, and the refractive lens 42 are accommodated in the housing 9, and the optical fiber 2 and the CCD camera 6 are mounted at predetermined positions of the housing. ing.

  The condensing optical system 3 includes a collimating lens 31 that converts the processing laser L1 refracted through the refractive lens 41 into parallel light, and a condensing lens 32 that condenses the parallel light. Visible laser oscillators 51 and 52 are integrally mounted on the collimating lens side of the condensing lens 32 via the condensing lens 32 and hinges 51 a and 52 a, and a wheel 52 b mounted on the lower surface of the visible laser oscillator 52. Is movable on the moving rail 8 (Y direction). The angles of the visible laser oscillators 51 and 52 can be adjusted by hinges 51a and 52a (X1 direction and X2 direction), and the processing laser L1 and the visible laser L2 are focused on the workpiece W, respectively. To be adjusted.

  An image of the focus light of each of the laser beams L1 and L2 formed on the surface of the workpiece W is taken by the CCD camera 6 through the refractive lens 42. The captured image is transmitted to the personal computer 7 and subjected to image processing therein, and then the amount of deviation of the focal positions of the visible lasers L2 and L2 is measured inside the computer (described later).

  FIG. 2 shows a situation in which the focal positions of the focus lights L2a and L2b of the two visible lasers and the focus light L1a of the processing laser are shifted, and the focus lights L2a and L2b have different hues. The form is shown.

  In the embodiment of FIG. 2a, the processing laser oscillators 51 and 52 irradiate visible lasers having different wavelengths, respectively, and the images of the focused light are both formed in a circle (L2a and L2b). In the drawing, the visible laser focus lights L2a and L2b are both displaced with respect to the focus light L1a of the processing laser. When the wavelengths of the visible lasers are different, the hues of the respective focused lights after image processing are also different, the focal position deviation amounts of both are clearer, and the measurement of the focal position deviation amount is facilitated.

  On the other hand, in the embodiment of FIG. 2 b, a cross-shaped mask is applied to one processing laser oscillator 51, a cross-shaped focus light L 2 a ′ is formed, and the focus light from the other processing laser oscillator 52 is formed. L2b ′ is formed in a circular shape. By setting the shape of one focus light to a cross shape, it is possible to easily specify the positional deviation amount of the other focus light on the XY coordinates formed in a cross shape.

  FIG. 3 shows a control block diagram of the laser processing system 100. A photographed image of the focus laser beam photographed by the CCD camera 6 is transmitted to the I / F circuit 71 a in the personal computer 7, and the image processing unit 72 performs image processing. The image after image processing is displayed on the display unit 74 in a manner as shown in FIGS. On the other hand, data relating to the allowable deviation amount is input from a keyboard or the like, and the input data is stored in the allowable deviation amount storage unit 77 via the I / F circuit 71b.

  In addition, the correlation graph creation unit 76 creates a correlation graph related to the coincidence and shift amount of the focus light positions of the two visible lasers based on an appropriate correlation algorithm. As a method of calculating the correlation value, a correlation graph based on a known normalized correlation (CC: Correlation Coefficient) or a selective normalized correlation (SCC: Selective Correlation Coefficient) obtained by further expanding the normalized correlation is applied. However, the present invention is not limited to such a correlation graph (method).

  One embodiment of the correlation graph is shown in FIG. In this correlation graph Z, the case where the focal position of the processing laser coincides with the focal positions of the two visible lasers is a correlation value of 100%, and the focal positions of both visible lasers deviate from the focal position of the processing laser. Accordingly, the correlation value decreases. In the graph shown in the figure, a deviation amount of ± 1 mm of the positional deviation amount with respect to the focal position A having a correlation value of 100% corresponds to a correlation value of 95%, and the range up to this tolerance error of ± 1 mm is the allowable positional deviation amount. An example is shown.

  Returning to FIG. 3, at the time of laser processing, the required allowable deviation amount is stored in the allowable deviation amount storage section 77 and read into the created correlation graph. Here, data related to the measurement value from the deviation amount measurement unit 73 is transmitted to the determination unit 75, and the correlation graph data to which the allowable deviation amount is input is similarly transmitted to the determination unit 75 from the correlation graph creation unit 76. . The determination unit 75 determines whether or not the data regarding the deviation amount is within the allowable deviation amount range. If the deviation amount data is within the allowable deviation amount range, the current position of the visible laser oscillator and the condenser lens is determined. A command indicating that the processing laser may be irradiated is transmitted from the determination unit 75 to the driving unit (not shown) that drives the wheel 52b via the I / F circuit 71c. On the other hand, if the result of determination is outside the allowable deviation amount range, a movement amount command signal is transmitted from the determination unit 75 to the visible laser oscillator 52 via the movement amount adjustment unit 79, and the visible laser oscillators 51, 52 It moves on the moving rail 8 while synchronizing with the condenser lens 32 (Y direction). For example, a certain amount of movement is performed according to a certain amount of movement pulse signal transmitted from the movement amount adjusting unit 79, the visible laser is irradiated, the focal position is photographed, and the deviation amount of the focal position is measured again. Then, the determination unit 75 determines whether or not it is within the allowable range. Such feedback control is repeated until the amount of positional deviation of the focus position of the visible laser is within the allowable range, and a command signal is transmitted that the processing laser may be irradiated when it is determined to be within the allowable range. Is done.

  In addition, each operation | movement of the display part 74 mentioned above, the determination part 75, the correlation graph preparation part 76, the movement amount adjustment part 79, and the image process part 72 is controlled by CPU78 which is a central control part. Further, the synchronous movement of the visible laser oscillators 51 and 52 and the condenser lens 32 may be an embodiment using a feed screw mechanism by a servo motor.

  FIG. 5 is a diagram showing another embodiment of the condensing optical system. In the illustrated condensing optical system 3a, the visible laser irradiated from one visible laser oscillator 53 becomes two visible lasers via the half mirror 33 and the refractive mirror 34, and passes through the condensing lens 32 to be processed. The object W is irradiated. By adopting a configuration including one visible laser oscillator, the production cost of the system can be reduced as much as possible.

  FIG. 6 is a schematic diagram showing another embodiment of the laser processing system. This laser processing system 100 </ b> A is configured with a housing 9 and a CCD camera 6 attached to the tip of an articulated robot arm 10. According to this laser processing system 100A, the housing 9 and the CCD camera 6 are transferred by the articulated robot arm 10 to an appropriate laser processing site in the vehicle C shown in the figure, and the amount of visible laser displacement is measured and required. The laser processing with the visible laser is performed after the focusing lens and the like are moved and adjusted accordingly.

  According to the laser processing system 100A, the length of the optical fiber 2 can cope with the extension of the articulated robot arm 10, and laser processing can be easily performed even in a vehicle part where an operator cannot enter. Therefore, a system with a wide application range and high work efficiency can be provided, which is suitable for remote welding processing.

  The embodiment of the present invention has been described in detail with reference to the drawings. However, the specific configuration is not limited to this embodiment, and there are design changes and the like without departing from the gist of the present invention. They are also included in the present invention.

The schematic diagram of one Embodiment of the laser processing system of this invention. It is the schematic diagram of the focus light of two visible lasers formed on the surface of a workpiece, (a) has shown the one embodiment, (b) has shown the other embodiment. The control block diagram of a laser processing system. The figure which showed one Embodiment of the correlation graph. The figure which showed other embodiment of the condensing optical system. The schematic diagram of other embodiment of a laser processing system.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 1 ... Laser oscillator for processing, 2 ... Optical fiber, 3, 3a ... Condensing optical system, 31 ... Collimating lens, 32 ... Condensing lens, 41, 42 ... Refraction mirror, 51, 52, 53 ... Visible laser oscillator, 6 DESCRIPTION OF SYMBOLS ... CCD camera, 7 ... Personal computer, 8 ... Moving rail, 9 ... Housing, 10 ... Articulated robot arm, 100, 100A ... Laser processing system, W ... Workpiece, L1 ... Laser for processing, L2 ... Visible laser

Claims (5)

A laser processing system for performing laser processing by irradiating a workpiece surface with laser light,
The laser processing system includes a processing laser oscillator, a condensing optical system including a condensing lens, two or more visible laser oscillators, and a movement control device that adjusts advance and retreat of the condensing lens and the visible laser oscillator in synchronization. An imaging device that captures the focus light of visible laser light on the surface of the workpiece, and an image processing device that performs image processing on the captured image and displays a processed image. A laser processing system, further comprising a focus position control means for adjusting a laser focus position and a focus position of each visible laser within a range of an allowable deviation based on a preset correlation graph .   The laser processing system according to claim 1, wherein the two or more visible laser oscillators emit visible laser beams having different wavelengths. A laser processing system for performing laser processing by irradiating a workpiece surface with laser light,
The laser processing system includes a processing laser oscillator, a condensing optical system including a condensing lens, a visible laser oscillator, and a branch that splits visible laser light emitted from the visible laser oscillator into two or more visible laser lights. Mirror, a condensing lens and a movement control device that adjusts the visible laser oscillator synchronously, an imaging device that captures the focus light of visible laser light on the surface of the workpiece, and image processing of the captured image And an image processing device that displays an image after processing, and the focal position of the processing laser and the focal position of each visible laser are determined based on a preset correlation graph. A laser processing system, further comprising a focal position control means for adjusting within a range.   An optical fiber for guiding the processing laser light is interposed between the processing laser oscillator and the condensing optical system, and further includes a manipulator equipped with at least a unit composed of the condensing optical system and the imaging device. The laser processing system according to any one of claims 1 to 3. A laser processing method for irradiating a workpiece surface with a processing laser beam irradiated from a processing laser oscillator via a condensing optical system including a condensing lens,
A visible laser oscillator capable of irradiating two or more visible laser beams is provided on the processing laser oscillator side of the condensing lens, and the focal position of each processing laser and the focal position of each visible laser coincide completely. A correlation graph in which the correlation value is reduced in accordance with the amount of deviation of the focus position of each visible laser is prepared in advance, and An allowable shift amount of the focus position of the visible laser is set in advance, and the focus light of each visible laser is imaged by the imaging device and image processing is performed, and the shift amount of the focus position of each visible laser is represented by the correlation graph. If the focal position of both laser beams is outside the allowable deviation range, synchronize the condenser lens with the visible laser oscillator. Laser processing method characterized by forward and backward adjustment.

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