JP4594134B2 - Field emission vacuum tube - Google Patents

Field emission vacuum tube Download PDF

Info

Publication number
JP4594134B2
JP4594134B2 JP2005063391A JP2005063391A JP4594134B2 JP 4594134 B2 JP4594134 B2 JP 4594134B2 JP 2005063391 A JP2005063391 A JP 2005063391A JP 2005063391 A JP2005063391 A JP 2005063391A JP 4594134 B2 JP4594134 B2 JP 4594134B2
Authority
JP
Japan
Prior art keywords
field emission
electrode
vacuum tube
cathode electrode
gate electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2005063391A
Other languages
Japanese (ja)
Other versions
JP2006252783A (en
Inventor
方紀 羽場
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pureron Japan Co Ltd
Original Assignee
Pureron Japan Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pureron Japan Co Ltd filed Critical Pureron Japan Co Ltd
Priority to JP2005063391A priority Critical patent/JP4594134B2/en
Publication of JP2006252783A publication Critical patent/JP2006252783A/en
Application granted granted Critical
Publication of JP4594134B2 publication Critical patent/JP4594134B2/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Landscapes

  • Cold Cathode And The Manufacture (AREA)

Description

本発明は、三極管、多極管、蛍光灯、電界放射型表示装置等に用いて好適な電界放出型真空管に関するものである。   The present invention relates to a field emission vacuum tube suitable for use in a triode, a multipolar tube, a fluorescent lamp, a field emission display device, or the like.

近年の微細加工技術の進展により高電界において電子を放出する電界放出型電子源の製造技術の進歩は著しく、特に極めて小型な構造を有する電界放出型真空管が製造されている。このような電界放出型真空管は特許文献１等において各種提案されている。例えば、コーン型では、基板に垂直な方向に、アノード電極、ゲート電極、カソード電極を配置し、ゲート電極とカソード電極との間にゲート電圧を印加して強電界を発生させ、電界放出原理に従いカソード電極から電子を放出させ、さらにアノード電極に印加したアノード電圧により、電子をアノード電極に到達させるようにしたものである。また、プレーナ型では、基板に平行な方向にカソード電極、ゲート電極、アノード電極を配置し、カソード電極とゲート電極との間、カソード電極とアノード電極との間に、電圧を印加してカソード電極から電界放出の原理に基づいて電子を引き出して放出させ、この放出させた電子をアノード電極に向かわせるようにしたものである。しかしながら、コーン型もプレーナ型もアノード電極とカソード電極との対向面間に形成される電界が平行電界であるから、電子放出量を増大させるように大面積化を図り難く、また、同一の対向空間内にアノード電極とゲート電極とカソード電極とを配置しており、全体が一つの電界放出室となっていて、その室内では電界放出効率が高い領域や低い領域が存在し全体（マクロ的）としての電界放出効率が低い。また、電界も極めて高い電界を印加する必要があり、取り扱いにくい。
特開２００２−０４２６３５号公報 Recent advances in microfabrication technology have made significant progress in the manufacturing technology of field emission electron sources that emit electrons in a high electric field, and field emission vacuum tubes having a particularly small structure have been manufactured. Various types of such field emission vacuum tubes have been proposed in Patent Document 1 and the like. For example, in the cone type, an anode electrode, a gate electrode, and a cathode electrode are arranged in a direction perpendicular to the substrate, a strong electric field is generated by applying a gate voltage between the gate electrode and the cathode electrode, and the field emission principle is followed. Electrons are emitted from the cathode electrode, and the electrons reach the anode electrode by an anode voltage applied to the anode electrode. In the planar type, a cathode electrode, a gate electrode, and an anode electrode are arranged in a direction parallel to the substrate, and a voltage is applied between the cathode electrode and the gate electrode and between the cathode electrode and the anode electrode to apply the cathode electrode. Based on the principle of field emission, electrons are extracted and emitted, and the emitted electrons are directed toward the anode electrode. However, since the electric field formed between the opposing surfaces of the anode electrode and the cathode electrode is a parallel electric field in both the cone type and the planar type, it is difficult to increase the area so as to increase the amount of electron emission. An anode electrode, a gate electrode, and a cathode electrode are arranged in the space, and the whole is a single field emission chamber, and there are regions with high and low field emission efficiency in the chamber (macro) The field emission efficiency is low. Further, it is necessary to apply an extremely high electric field, which is difficult to handle.
JP 2002-042635 A

本発明により解決すべき課題は、大面積化が容易であり、その電子放出効率を向上することである。   The problem to be solved by the present invention is to easily increase the area and to improve the electron emission efficiency.

本発明による電界放出型真空管は、アノード電極とカソード電極とをゲート電極を間にして対向配置した電界放出型真空管において、真空容器を平面方向に複数の電界放出室に区画し、各電界放出室毎に筒状アノード電極と、筒状アノード電極で取り囲まれる形態の筒状ゲート電極と、筒状ゲート電極で取り囲まれる形態のワイヤ状カソード電極とを同心配置したことを特徴とするものである。 A field emission vacuum tube according to the present invention is a field emission vacuum tube in which an anode electrode and a cathode electrode are arranged to face each other with a gate electrode therebetween, and a vacuum vessel is partitioned into a plurality of field emission chambers in a plane direction. A cylindrical anode electrode, a cylindrical gate electrode surrounded by the cylindrical anode electrode, and a wire cathode electrode surrounded by the cylindrical gate electrode are arranged concentrically.

筒状アノード電極は、電界放出室の内壁面に蒸着等により形成した金属薄膜から構成することができるが、筒状アノード電極は、これに限定されるものではなく、電界放出室の内壁面から離れて設けることもできる。   The cylindrical anode electrode can be composed of a metal thin film formed on the inner wall surface of the field emission chamber by vapor deposition or the like. However, the cylindrical anode electrode is not limited to this, but from the inner wall surface of the field emission chamber. It can also be provided separately.

本発明によると、真空容器を平面方向に複数の電界放出室に区画しかつ各電界放出室それぞれにはアノード電極とゲート電極とカソード電極とを同心に配置したので、各電界放出室内部ではカソード電極から３６０度方向全周にわたり電子放出することができるので、電界放出型真空管全体でのマクロ的な電界放出効率が大きく向上するうえ、これら電極間にはそれほど高い電圧を印加する必要がなく、電界放出室それぞれは小さくて済むので大面積化が容易である。また、各電界放出室での電界も低く印加するだけで済むので扱い易い。 According to the present invention, the vacuum vessel is divided into a plurality of field emission chambers in the plane direction, and the anode electrode, the gate electrode, and the cathode electrode are arranged concentrically in each field emission chamber. Since electrons can be emitted from the electrodes over the entire 360 ° direction, the macroscopic field emission efficiency of the entire field emission vacuum tube is greatly improved, and it is not necessary to apply a high voltage between these electrodes. Since each field emission chamber can be small, it is easy to increase the area. In addition, the electric field in each field emission chamber is easy to handle because only a low electric field needs to be applied.

カソード電極の表面に電界集中補助用凹凸を設けるとともに、その凹凸表面に多数の電界集中用微細突起を有する炭素系薄膜を形成することが好ましい。この炭素系薄膜には、カーボンナノチューブ、カーボンナノウォール、ダイヤモンドライクカーボン、グラファイト、フラーレンなどが含まれる。   It is preferable to provide an electric field concentration assisting unevenness on the surface of the cathode electrode and to form a carbon-based thin film having a large number of electric field concentration fine protrusions on the uneven surface. This carbon-based thin film includes carbon nanotubes, carbon nanowalls, diamond-like carbon, graphite, fullerene and the like.

各アノード電極、各ゲート電極および各カソード電極がそれぞれ共通に接続されていることが好ましい。   It is preferable that each anode electrode, each gate electrode, and each cathode electrode are connected in common.

本発明によれば、マクロ的な電界放出特性に優れた電界放出型真空管を提供することができる。   According to the present invention, a field emission type vacuum tube excellent in macro field emission characteristics can be provided.

以下、添付した図面を参照して本発明の実施の形態を詳細に説明すると、図１は実施の形態の電界放出型真空管を示す一部破断斜視図、図２は同電界放出型真空管の一部破断平面図、図３は図２のＡ−Ａ線に沿う断面図である。これらの図を参照して、この電界放出型真空管は、平面視矩形形状の容器１０を有する。この容器１０は、前面パネル１０ａ、背面パネル１０ｂ、側面パネル１０ｃから囲まれてなるとともに、内部が仕切りパネル１０ｄにより多数の電界放出室１０ｅに区画されている。各パネル１０ａ，１０ｂ，１０ｃ，１０ｄはガラス等からなる。各電界放出室１０ｅの内側壁面（側面パネル１０ｃと仕切りパネル１０ｄのパネル面で構成される）にはスパッタリングやＥＢ蒸着等により導電材としてアルミニウム等の金属薄膜１２が形成されている。金属薄膜１２はそれぞれアノード電極１２を構成する。なお、接続の形態の図示は略するが、各アノード電極１２は外部端子Ａに共通に接続され、アノード電圧が共通に印加可能になっている。   DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings. FIG. 1 is a partially broken perspective view showing a field emission vacuum tube according to the embodiment, and FIG. 2 shows one of the field emission vacuum tubes. FIG. 3 is a sectional view taken along line AA in FIG. Referring to these drawings, this field emission vacuum tube has a container 10 having a rectangular shape in plan view. The container 10 is surrounded by a front panel 10a, a back panel 10b, and a side panel 10c, and the inside thereof is partitioned into a number of field emission chambers 10e by a partition panel 10d. Each panel 10a, 10b, 10c, 10d is made of glass or the like. A metal thin film 12 such as aluminum is formed as a conductive material on the inner wall surface of each field emission chamber 10e (configured by the panel surfaces of the side panel 10c and the partition panel 10d) by sputtering, EB deposition or the like. Each metal thin film 12 constitutes an anode electrode 12. Although illustration of the connection form is omitted, each anode electrode 12 is commonly connected to the external terminal A, and an anode voltage can be commonly applied.

各電界放出室１０ｅの内部には、それぞれ、各アノード電極１２と同心的に配置された円筒形でかつ多数の貫通孔を備えた円筒部材１４がゲート電極１４として配置されている。なお、接続の形態の図示は略するが、各ゲート電極１４は外部端子Ｇに共通に接続され、ゲート電圧が共通に印加可能になっている。   Inside each field emission chamber 10e, a cylindrical member 14 having a large number of through-holes arranged concentrically with each anode electrode 12 is arranged as a gate electrode. Although illustration of the connection form is omitted, each gate electrode 14 is commonly connected to the external terminal G, and a gate voltage can be commonly applied.

各ゲート電極１４の内部には、それぞれ、該ゲート電極１４と同心的に導電性ワイヤ１６が延びて配置されている。導電性ワイヤ１６それぞれはカソード電極１６を構成するとともにその外表面に多数のナノチューブ状あるいはナノウォール状の微細突起１８ａを有する炭素系薄膜１８が電子放出部１８として形成されている。なお、接続の形態の図示は略するが、各カソード電極１６は外部端子Ｋに共通に接続されている。導電性ワイヤ１６それぞれの表面は電界集中をより発生しやすくする表面粗さを有する凹凸１６ａに積極的に設定されており、この表面粗さの凹凸１６ａは炭素系薄膜１８だけの微細突起１８ａにさらに全体の凹凸を形成しており微細突起１８ａでの電界集中を助長する電界集中補助部として作用する。この表面粗さは微視的であるが、可視的な凹凸でもよい。例えば、複数の導線を撚り合わせてなる凹凸や、導線表面をねじ切り加工する凹凸でもよい。   Inside each gate electrode 14, a conductive wire 16 is disposed extending concentrically with the gate electrode 14. Each conductive wire 16 constitutes a cathode electrode 16, and a carbon-based thin film 18 having a large number of nanotube-like or nanowall-like fine protrusions 18 a on the outer surface is formed as an electron emission portion 18. Although illustration of the connection form is omitted, each cathode electrode 16 is connected to the external terminal K in common. The surface of each conductive wire 16 is positively set to unevenness 16a having a surface roughness that makes it easier to generate electric field concentration. The unevenness 16a having the surface roughness is formed on the fine protrusion 18a of the carbon thin film 18 alone. Further, the entire projections and depressions are formed, and act as an electric field concentration assisting part that promotes electric field concentration at the fine protrusions 18a. This surface roughness is microscopic but may be visible irregularities. For example, the unevenness | corrugation which twists several conducting wires and the unevenness | corrugation which carries out the threading process of the conducting wire surface may be sufficient.

以上の構成を備えた実施の形態の電界放出型真空管においては、全体に必要とする電流を例えば１０Ａとし、電界放出室１０ｅの数を１００とした場合、各電界放出室１０ｅそれぞれで行われる電子放出においては、電流を０．１Ａ分担するだけで済むので、各電界放出室１０ｅそれぞれにおける電極間にはそれほど高い電圧を印加する必要がなくなり、低圧電源でも本電界放出型真空管を容易に駆動することができる。   In the field emission vacuum tube of the embodiment having the above configuration, when the current required for the whole is, for example, 10 A and the number of the field emission chambers 10 e is 100, the electrons performed in each field emission chamber 10 e respectively. In discharging, it is only necessary to share a current of 0.1 A, so that it is not necessary to apply a very high voltage between the electrodes in each field emission chamber 10e, and this field emission vacuum tube can be easily driven even with a low-voltage power supply. be able to.

また、電界放出室１０ｅそれぞれは小さくて済むので各電界放出室１０ｅ内部を真空に保持することも容易であり、全体の耐久性も向上する。   Further, since each field emission chamber 10e can be small, it is easy to keep the inside of each field emission chamber 10e in a vacuum, and the overall durability is improved.

さらに、アノード電極１２と、ゲート電極１４と、カソード電極１６とが同心配置されているので、電極の対向間に形成される電界は円筒形となり、カソード電極１６から３６０度全周に電子放出させることができその電子放出効率は極めて高くなるとともに、これら各電界放出室１０ｅを集合した全体の電界放出効率を著しく向上することができる。また、電界放出室１０ｅは小さいので電界放出室１０ｅ内の電界も低く印加するだけで電子放出を行うことが可能である。   Further, since the anode electrode 12, the gate electrode 14, and the cathode electrode 16 are concentrically arranged, the electric field formed between the electrodes is cylindrical, and electrons are emitted from the cathode electrode 16 to the entire 360 ° circumference. The electron emission efficiency becomes extremely high, and the field emission efficiency of the entire group of the field emission chambers 10e can be remarkably improved. Moreover, since the field emission chamber 10e is small, it is possible to emit electrons only by applying a low electric field in the field emission chamber 10e.

なお、電界放出室１０ｅは図４で示すように円形でもよく、図５で示すように六角形等の多角形でもよいことは勿論である。円形の場合はより電界がより円筒形になり電界放出効率が向上し、また、図５のように六角形の場合は、真空容器１０の強度を高めることができる。   Needless to say, the field emission chamber 10e may be circular as shown in FIG. 4, or polygonal such as hexagon as shown in FIG. In the case of a circular shape, the electric field becomes more cylindrical and the field emission efficiency is improved, and in the case of a hexagonal shape as shown in FIG. 5, the strength of the vacuum vessel 10 can be increased.

本発明の実施の形態に係る電界放出型真空管をその一部を破断して示す斜視図である。1 is a perspective view showing a portion of a field emission vacuum tube according to an embodiment of the present invention. 実施の形態の電界放出型真空管をその一部を破断して示す平面図である。It is a top view which fractures | ruptures and shows the field emission type vacuum tube of embodiment. 実施の形態の電界放出型真空管の断面図である。It is sectional drawing of the field emission type vacuum tube of embodiment. 他の実施の形態に係る電界放出型真空管の部分平面図である。It is a fragmentary top view of the field emission type vacuum tube concerning other embodiments. さらに他の実施の形態に係る電界放出型真空管の部分平面図である。FIG. 5 is a partial plan view of a field emission vacuum tube according to still another embodiment.

符号の説明Explanation of symbols

１０ 真空容器
１０ｅ 電界放出室
１２ 金属薄膜（カソード電極）
１４ 円筒部材（ゲート電極）
１６ 導電性ワイヤ（カソード電極）
１６ａ 導電性ワイヤ
１６ｂ 炭素系薄膜
Ａ アノード電極用外部端子
Ｇ ゲート電極用外部端子
Ｋ カソード電極用外部端子

10 Vacuum vessel 10e Field emission chamber 12 Metal thin film (cathode electrode)
14 Cylindrical member (gate electrode)
16 Conductive wire (cathode electrode)
16a Conductive wire 16b Carbon-based thin film A External terminal for anode electrode G External terminal for gate electrode K External terminal for cathode electrode

Claims (2)

アノード電極とカソード電極とをゲート電極を間にして対向配置した電界放出型真空管において、真空容器を平面方向に複数の電界放出室に区画し、各電界放出室毎に筒状アノード電極と、筒状アノード電極で取り囲まれる形態の筒状ゲート電極と、筒状ゲート電極で取り囲まれる形態のワイヤ状カソード電極とを同心配置したことを特徴とする電界放出型真空管。 In a field emission vacuum tube in which an anode electrode and a cathode electrode are opposed to each other with a gate electrode interposed therebetween, a vacuum vessel is partitioned into a plurality of field emission chambers in a plane direction, and a cylindrical anode electrode and a cylinder are provided for each field emission chamber. A field emission vacuum tube comprising a cylindrical gate electrode surrounded by a cylindrical anode electrode and a wire-shaped cathode electrode surrounded by the cylindrical gate electrode arranged concentrically. カソード電極の表面に電界集中補助用凹凸を設けるとともに、その凹凸表面に多数の電界集中用微細突起を有する炭素系薄膜を形成した、ことを特徴とする請求項１に記載の電界放出型真空管。   2. The field emission vacuum tube according to claim 1, wherein the surface of the cathode electrode is provided with unevenness for assisting electric field concentration, and a carbon-based thin film having a number of fine protrusions for concentration of electric field is formed on the uneven surface.
JP2005063391A 2005-03-08 2005-03-08 Field emission vacuum tube Expired - Fee Related JP4594134B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2005063391A JP4594134B2 (en) 2005-03-08 2005-03-08 Field emission vacuum tube

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005063391A JP4594134B2 (en) 2005-03-08 2005-03-08 Field emission vacuum tube

Publications (2)

Publication Number Publication Date
JP2006252783A JP2006252783A (en) 2006-09-21
JP4594134B2 true JP4594134B2 (en) 2010-12-08

Family

ID=37093060

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2005063391A Expired - Fee Related JP4594134B2 (en) 2005-03-08 2005-03-08 Field emission vacuum tube

Country Status (1)

Country Link
JP (1) JP4594134B2 (en)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08510858A (en) * 1993-06-02 1996-11-12 マイクロイレクトラニクス、アンド、カムピュータ、テクナラジ、コーパレイシャン Amorphous diamond film flat field emission cathode
JPH09259824A (en) * 1996-03-27 1997-10-03 Mitsubishi Electric Corp Variable color lighting system, and method of driving variable color lighting system
JPH10125217A (en) * 1996-10-23 1998-05-15 Toyota Motor Corp Cathode for vacuum tube

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08510858A (en) * 1993-06-02 1996-11-12 マイクロイレクトラニクス、アンド、カムピュータ、テクナラジ、コーパレイシャン Amorphous diamond film flat field emission cathode
JPH09259824A (en) * 1996-03-27 1997-10-03 Mitsubishi Electric Corp Variable color lighting system, and method of driving variable color lighting system
JPH10125217A (en) * 1996-10-23 1998-05-15 Toyota Motor Corp Cathode for vacuum tube

Also Published As

Publication number Publication date
JP2006252783A (en) 2006-09-21

Similar Documents

Publication Publication Date Title
US7368867B2 (en) Field emission device with cathode wires and carbon nanotubes
TWI404449B (en) Lighting device
JP2007128877A (en) Electron emission device
TW512388B (en) Vacuum fluorescent display
JP4243693B2 (en) LIGHTING DEVICE AND BACKLIGHT DEVICE USING THE SAME
US7714493B2 (en) Field emission device and field emission display employing the same
JP2007095698A (en) Electric field emission display apparatus mounted with getter material
JP4594134B2 (en) Field emission vacuum tube
JP4468126B2 (en) Electron emitting device provided with dummy electrode and method of manufacturing the same
US7319287B2 (en) Electron emission device with grid electrode
JP5274828B2 (en) Field emission lamp with cold cathode electron source
JP4578350B2 (en) Carbon film, electron emission source and field emission type lighting lamp
US7256540B2 (en) Electron emission device with a grid electrode
JP5354859B2 (en) Cold cathode fluorescent lamp
KR20070044586A (en) Spacer and electron emission display device having the spacer
JP5023392B2 (en) Field emission cathode and field emission lamp
JP4414418B2 (en) Electron emission device and electron emission display device using the same
KR100300312B1 (en) Flat panel display with field emission cathode
KR101028715B1 (en) Large-Area Electron Beam Irradiator Having Triode-structure
KR20060118076A (en) Electron emission device
JP4418813B2 (en) Electron emission display device
KR101009978B1 (en) Field emission display device and manufacturing method thereof
JP2010055853A (en) Field electron emitter
KR20060001434A (en) Electron emission device
JP2006216386A (en) Electron emission device and its driving method

Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20080305

A711 Notification of change in applicant

Free format text: JAPANESE INTERMEDIATE CODE: A711

Effective date: 20100512

RD02 Notification of acceptance of power of attorney

Free format text: JAPANESE INTERMEDIATE CODE: A7422

Effective date: 20100628

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20100723

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20100805

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20100902

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20100914

A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20100916

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20130924

Year of fee payment: 3

R150 Certificate of patent or registration of utility model

Ref document number: 4594134

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

Free format text: JAPANESE INTERMEDIATE CODE: R150

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

LAPS Cancellation because of no payment of annual fees