JP4569230B2 - Device for moving fan filter unit - Google Patents

Description

  The present invention relates to a moving device for a fan filter unit used in a clean room requiring a clean space such as a semiconductor factory or a food factory.

The moving device of this type of fan filter unit relies on human power for a small fan filter unit, and does not require a special moving device. In general, there is known a method in which wheels are provided for horizontal movement (see, for example, Patent Document 1).
Japanese Patent Laid-Open No. 10-246481 ([0001] to [0019], FIGS. 1 to 10)

  In such a conventional fan filter unit moving device, in order to suspend the fan filter unit with an eyebolt or the like and suspend it with a wire or the like, a large work space is required in the moving space, and a large facility for movement and installation. Therefore, there is a need to be able to move and install efficiently in a small space using light and small equipment and tools in as little space as possible.

  In addition, when installing the fan filter unit on the installation surface, there is a problem that the airtight packing, which is important as a clean device, may be damaged during the work, so that the airtight packing can be installed carefully and accurately without damaging it. Is required.

  Furthermore, if the moving device with wheels is left in the clean room after installing the fan filter unit, there is a problem that foreign matter is released in the clean room and becomes a contamination source. Is required to be easily removed and removed.

  The present invention solves such a conventional problem. The fan filter unit can be moved and installed efficiently in a short time and in a short time, and the installation work can be performed carefully and accurately without damaging the airtight packing. An object of the present invention is to provide a moving device for a fan filter unit that can be removed easily and safely after the fan filter unit is installed.

In order to achieve the above object, the fan filter unit moving device of the present invention includes a fan unit including a fan and a motor, and a fan filter unit in which a dust removing filter is disposed on the downstream side of the fan unit. The moving means includes a moving means for horizontally moving the fan filter unit, and the moving means includes a receiving metal fitting integrally formed on the side surface of the chamber and a moving metal fitting provided on the receiving metal fitting. and attached frame becomes the frame has a movable supporting means for supporting vertically movably with respect to said receiving metal, the surface on the inner side surface of said frame on both sides bent upwards in the frame of the receiving metal and a guide portion formed, and forming a slight gap between the inner side surface of the frame and the guide portion

As a result, a moving device that can be installed carefully and accurately without damaging the airtight packing is obtained. A moving device capable of efficiently moving and installing the fan filter unit in a short time and in a short time can be obtained.

  ADVANTAGE OF THE INVENTION According to this invention, the moving apparatus of a fan filter which has the effect of being able to carry out a horizontal movement of a fan filter unit easily to a predetermined place easily and carefully without damaging packing can be provided.

  Further, it is possible to provide a moving device for a fan filter unit that can quickly remove a wheel that becomes a contamination source of a clean room after the fan filter unit is installed at a predetermined position.

  In addition, the support bolt maintains a predetermined height when the fan filter unit is moved horizontally, can be placed slowly so as not to damage the airtight packing during installation, and the tip can be joined to the installation surface to fix the fan filter unit. It is possible to provide a moving device for a fan filter unit that can be hung by a hook provided on the head of the bolt, and can be installed with a reduced number of parts in a small space.

According to a first aspect of the present invention, there is provided a fan filter unit in which a fan unit comprising a fan and a motor is built in a chamber, and a dust removing filter is disposed on the downstream side of the fan unit, and the fan filter unit is moved horizontally. The moving means comprises a receiving metal fitting integrally projecting on the side surface of the chamber, and a moving metal fitting provided on the receiving metal fitting, the moving metal fitting includes a frame with wheels attached thereto, It becomes a movable support means for vertically movably supported relative to the receiving metal frame, forming a guide portion facing the inner side of the frame by bending the both sides in the frame of the receiving metal upwardly and, obtained by forming a slight gap between the inner side surface of the frame and the guide portion, when the horizontal movement of the fan filter unit and据When moving up and down the frame of the time, even slightly inclined frame, the inner side surface of the guide portion of the receiving metal frame, i.e. it is possible to maintain the correct orientation in contact with the reverse side, receiving the frame fittings By forming the guide portion that is bent upward on both sides of the inside, the receiving metal has an effect that the strength is increased and the frame can be stably supported . In addition, there is an effect that the fan filter unit can be horizontally moved to a predetermined place where the fan filter unit is to be installed in a small transport space, and can be surely installed by being gradually lowered by the movable support means.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings.

( Reference form 1)
As shown in FIG. 1, a fan unit 3 including a fan 1 and a motor 2 is built in a chamber 4, and a dust removing filter 5 is disposed on the downstream side of the chamber 4 to form a fan filter unit 6. Plural pairs of receiving metal fittings 7 project horizontally from both sides of the chamber 4, and a fixing nut 12 is welded to the upper surface of the receiving metal fitting 7, and a support bolt 10 is detachably screwed to the fixing nut 12. Attached. The upper portion of the support bolt 10 is rotatably held by an opening (not shown) provided in the upper portion of a square-shaped frame 11 provided with a horizontally moving wheel 9 at the lower end. By screwing the support bolt 10 into the fixing nut 12 of the receiving metal 7, the receiving metal 7 rises inside the frame 11. That is, when the frame 11 is gradually lowered with respect to the metal fitting 7 and lowered until the wheel 9 provided at the lower end portion of the metal fitting 7 is grounded, the fan filter unit 6 is relatively lifted.

  In the above configuration, as shown in FIG. 2A, all the wheels 9 can be protruded downward from the fan filter unit 6 by turning the four support bolts 10 to the right. 9 is supported and can move horizontally.

  Next, as shown in FIG. 2B, when the fan filter unit 6 is horizontally moved to the installation surface and the support bolt 10 is turned counterclockwise, the frame 11 is moved upward, so that the fan The filter unit 6 approaches the installation surface 13 and can be slowly placed on the installation surface 13 as it is. At this time, by lowering the fan filter unit 6 while maintaining the horizontal state while adjusting the plurality of support bolts 10, it is possible to safely and surely install without damaging the packing 5 a that maintains the sealing performance.

  Further, by turning the support bolt 10 to the right and removing it from the fixing nut 12, the frame 11 with the wheels 9 can be removed, and the wheels 9 that can become a contamination source can be taken out of the clean room and stored.

  Here, the procedure for attaching the fan filter unit 6 to the clean booth installation surface 13 in the clean room will be described. As shown in FIGS. 3 (a) and 3 (b), the fan filter unit 6 is cleaned using an elevator such as a lifter 14. It can be lifted up to the height of the top of the booth, moved horizontally and placed on a predetermined installation surface 13. Thereafter, as shown in FIG. 2A, the fan filter unit 6 can be safely lowered to perform the installation work by loosening the support bolt 10.

  In this way, the wheel 9 can be protruded downward by operating the support bolt 10 to easily move the fan filter unit 6 horizontally to the installation surface 13, and the fan filter unit 6 can be safely and reliably installed on the installation surface 13. Thus, the packing 5a provided on the lower surface of the dust removing filter 5 can be prevented from being damaged, and the frame 11 with the wheels 9 as a contamination source can be removed and removed from the clean room.

( Reference form 2)
4 (a) and 4 (b), the length of the neck lower portion 10a of the support bolt 10 is made larger than the dimension obtained by adding the plate thickness of the metal fitting 7 and the thickness of the fixing nut 12, and the thickness of the neck lower portion 10a. Is made thinner than the inner diameter of the fixing nut 12. Further, the length of the threaded portion 10b from the neck lower portion 10a to the tip of the support bolt 10 is set to be longer than the length from the metal fitting 7 to the lower end surface of the fan filter unit 6.

  In the above configuration, when the fan filter unit 6 is installed, the support bolt 10 is loosened and the wheel 9 is pulled up, and the fan filter unit 6 is placed on the installation surface 13.

  Next, the support bolt 10 is removed from the metal fitting 7 to separate the frame 11 with the wheels 9, and only the support bolt 10 is screwed into the metal fitting 7 to the end, so that the tip of the screw portion 10b is screwed into the installation surface 13. At the same time, the head 10c of the support bolt 10 presses the surface of the fixing nut 12, whereby the fan filter unit 6 can be fixed to the installation surface 13. At this time, the neck lower portion 10a of the support bolt 10 is free to rotate without being screwed to the fixing nut 12.

  Thus, after separating the frame 11 with the wheels 9, the fan filter unit 6 can be fixed to the installation surface 13 by using the support bolts 10 and the metal fittings 7 for fixing the wheels 9, thereby increasing the number of parts to be used. In addition, the fan filter unit 6 can be installed in a short time by reusing the moving parts.

(Embodiment 1 )
As shown in FIG. 5, a guide portion 7 a is formed by bending both sides of the receiving metal 7 upward, and a slight gap is formed between the inner surface of the frame 11. Further, by forming the guide portions 7 a on both sides of the receiving metal 7, the strength of the receiving metal 7 is increased so that the frame 11 can be supported stably.

  In the above configuration, when the frame 11 is moved up and down by operating the support bolt 10, the frame 11 is in a position close to the guide portion 7 a of the metal fitting 7, so even if the frame 11 is temporarily deformed, the guide Since the original posture can be maintained by coming into contact with the portion 7a, the fan filter unit 6 supported by the frame 11 can be moved in the vertical direction with high accuracy, and can be safely installed and placed at an accurate position. Can be installed.

( Reference form 3 )
As shown in FIG. 6, a hooking portion 15 having a round hole is integrally formed at the upper end portion of the support bolt 10 that is screwed into the receiving bracket 7. The bracket 7 is provided at four or more target positions with respect to the center of the fan filter unit 6 so that it can be transported while maintaining the center of gravity when the hanging hook 16 is suspended and moved from above.

  Further, by inserting a tool or the like into the hooking portion 15, the support bolt 10 can be easily rotated.

  In the above configuration, when there is an existing transport crane in the clean room, the crane hook hook 16 is hung on the hook 15 provided on the support bolt 10 and can be easily transported over the clean booth. There is no need to separately attach a hanging part to the unit 6, and the number of parts can be reduced.

  In addition, after the fan filter unit 6 is placed in the clean booth, when the support bolt 10 is rotated, by inserting a tool or the like into the hooking portion 15, the support bolt 10 can be easily rotated. Installation work can be performed efficiently.

( Reference form 4 )
As shown in FIG. 7, a wheel 9 is attached to the lower end portion of the frame 11, a screw hole 17 is provided in a support fitting portion adjacent to the wheel 9, and a fixing screw 18 is attached to the screw hole 17. The tip of the fixing screw 18 is provided so as to be able to contact the wheel 9, and the wheel 9 can be locked by tightening the fixing screw 18.

  In the above configuration, when the fan filter unit 6 is lowered to the installation surface by the rotation of the support bolt 10, the fixing screw 18 is tightened to lock the wheel 9 and prevent the movement, and the fan filter unit 6 is provided on the lower surface of the fan filter unit 6. The packing 5a can be installed at an accurate position without being damaged.

( Reference form 5 )
As shown in FIG. 8, a vertical scale 19 is provided on a plurality of frames 11 attached to the fan filter unit 6. Further, the receiving bracket 7 is extended in the horizontal direction, the tip end portion of the receiving bracket 7 is exposed to the side of the scale 19 of the frame 11, and the cursor 20 is provided at the tip end portion. When the frame 11 is moved up and down by the support bolt 10, the relative position between the frame 11 and the metal fitting 7 can be visually confirmed by the instruction of the cursor 20 with respect to the scale 19.

  In the above configuration, when the support bolt 10 is rotated in the right direction, the cursor 20 of the metal fitting 7 is lowered with respect to the scale 19 provided on the frame 11, and when the support bolt 10 is rotated in the left direction, the cursor 20 of the metal fitting 7 is provided. Goes up. By rotating and adjusting the support bolts 10 of all the frames 11 so that the numerical values of the scale 19 indicated by the cursor 20 are matched, the installation work can be performed safely while maintaining the horizontal balance of the fan filter unit 6.

  When installing a large fan filter unit on the installation surface of the facility, it can be installed easily and safely in a small carry-in space by installing the fan filter unit moving device of the present invention. It can be used for loading and installing large fan filter units.

Front view of the fan filter unit moving device of Reference Embodiment 1 (A) Enlarged side view showing the state at the time of movement (b) Enlarged side view showing the state at the time of installation (c) Enlarged side view showing the state of the same bracket only (A) Enlarged view showing the moving state during installation (b) Enlarged view showing the installation state during installation (A) Enlarged side view of the fan filter unit moving device of Reference Embodiment 2 before installation (b) Enlarged side view after installation The block diagram which shows the metal fitting of the moving apparatus of the fan filter unit of Embodiment 1 of this invention The principal part front view which shows the hook part of the moving apparatus of the fan filter unit of the reference form 3 Installation explanatory drawing of fixing screw of moving device of fan filter unit of reference form 4 External appearance perspective view of the main part of the moving device of the fan filter unit of Reference Embodiment 5

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Fan 2 Motor 3 Fan unit 4 Chamber 5 Dust removal filter 5a Packing 6 Fan filter unit 7 Receptacle (moving means, movable support means)
7a Guide 9 Wheel (Moving bracket)
10 Support bolt (moving bracket, movable support means)
10a Neck lower part 10b Screw part 10c Head part 11 Frame (Mounting bracket)
12 Fixed nut (movable support means)
13 Installation Surface 15 Hooking Section 17 Screw Hole 18 Fixing Screw 19 Scale 20 Cursor

Claims (1)

A fan unit composed of a fan and a motor is built in the chamber, and has a fan filter unit in which a dust removing filter is disposed on the downstream side of the fan unit, and a moving means for horizontally moving the fan filter unit. It consists of a receiving bracket integrally projecting on the side surface of the chamber and a moving bracket provided on the receiving bracket. The moving bracket can be moved up and down with respect to the receiving bracket with a frame provided with wheels. a movable support means for supporting it on the both sides of the frame bent upward guide portion is formed facing the inner side of the frame, the inner side surface of the frame and the guide portion of the receiving metal mobile devices fan filter unit to form a small gap between the.

Images