JP4566052B2 - Constant temperature maintenance device. - Google Patents

Constant temperature maintenance device. Download PDF

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JP4566052B2
JP4566052B2 JP2005110439A JP2005110439A JP4566052B2 JP 4566052 B2 JP4566052 B2 JP 4566052B2 JP 2005110439 A JP2005110439 A JP 2005110439A JP 2005110439 A JP2005110439 A JP 2005110439A JP 4566052 B2 JP4566052 B2 JP 4566052B2
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temperature
cooler
circulating fluid
heater
cooling capacity
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JP2006292204A (en
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和重 清水
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ATS Japan Corp
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25D—REFRIGERATORS; COLD ROOMS; ICE-BOXES; COOLING OR FREEZING APPARATUS NOT OTHERWISE PROVIDED FOR
    • F25D17/00—Arrangements for circulating cooling fluids; Arrangements for circulating gas, e.g. air, within refrigerated spaces
    • F25D17/02—Arrangements for circulating cooling fluids; Arrangements for circulating gas, e.g. air, within refrigerated spaces for circulating liquids, e.g. brine
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
    • H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
    • H01L21/3065—Plasma etching; Reactive-ion etching
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B41/00—Fluid-circulation arrangements
    • F25B41/30—Expansion means; Dispositions thereof
    • F25B41/31—Expansion valves
    • F25B41/34—Expansion valves with the valve member being actuated by electric means, e.g. by piezoelectric actuators
    • F25B41/35—Expansion valves with the valve member being actuated by electric means, e.g. by piezoelectric actuators by rotary motors, e.g. by stepping motors
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B49/00—Arrangement or mounting of control or safety devices
    • F25B49/02—Arrangement or mounting of control or safety devices for compression type machines, plants or systems
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B2400/00—General features or devices for refrigeration machines, plants or systems, combined heating and refrigeration systems or heat-pump systems, i.e. not limited to a particular subgroup of F25B
    • F25B2400/04—Refrigeration circuit bypassing means
    • F25B2400/0403—Refrigeration circuit bypassing means for the condenser
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B2400/00—General features or devices for refrigeration machines, plants or systems, combined heating and refrigeration systems or heat-pump systems, i.e. not limited to a particular subgroup of F25B
    • F25B2400/04—Refrigeration circuit bypassing means
    • F25B2400/0409—Refrigeration circuit bypassing means for the evaporator
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B2400/00—General features or devices for refrigeration machines, plants or systems, combined heating and refrigeration systems or heat-pump systems, i.e. not limited to a particular subgroup of F25B
    • F25B2400/24—Storage receiver heat
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B2600/00—Control issues
    • F25B2600/02—Compressor control
    • F25B2600/021—Inverters therefor
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B2700/00—Sensing or detecting of parameters; Sensors therefor
    • F25B2700/21—Temperatures
    • F25B2700/2117—Temperatures of an evaporator
    • F25B2700/21171—Temperatures of an evaporator of the fluid cooled by the evaporator
    • F25B2700/21172—Temperatures of an evaporator of the fluid cooled by the evaporator at the inlet
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B2700/00—Sensing or detecting of parameters; Sensors therefor
    • F25B2700/21—Temperatures
    • F25B2700/2117—Temperatures of an evaporator
    • F25B2700/21171—Temperatures of an evaporator of the fluid cooled by the evaporator
    • F25B2700/21173—Temperatures of an evaporator of the fluid cooled by the evaporator at the outlet
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02B—CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO BUILDINGS, e.g. HOUSING, HOUSE APPLIANCES OR RELATED END-USER APPLICATIONS
    • Y02B30/00—Energy efficient heating, ventilation or air conditioning [HVAC]
    • Y02B30/70—Efficient control or regulation technologies, e.g. for control of refrigerant flow, motor or heating

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Thermal Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Computer Hardware Design (AREA)
  • Manufacturing & Machinery (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Plasma & Fusion (AREA)
  • Air Conditioning Control Device (AREA)

Description

本発明は、外部熱負荷装置の温度を一定に保つための恒温維持装置に関し、特に、半導体製造装置等に使用されるチラー装置等の、一定温度の液体熱媒体を循環させて外部熱負荷装置の温度を一定に保つための恒温維持装置に関する。   The present invention relates to a constant temperature maintaining device for maintaining a constant temperature of an external heat load device, and in particular, an external heat load device by circulating a liquid heat medium at a constant temperature, such as a chiller device used in a semiconductor manufacturing device or the like. The present invention relates to a constant temperature maintaining device for keeping the temperature of the apparatus constant.

従来の通常チラー装置と呼ばれている恒温維持装置は、冷却器、加熱器および外部熱負荷装置の間を循環する環状管路に液体の熱媒体を流し、外部熱負荷装置で加温された液媒体を冷却器で過冷却し、過冷却した液媒体を加熱器で外部熱負荷装置の要求する設定温度に迄加熱して外部熱負荷装置に供給している。   A conventional constant temperature maintenance device called a normal chiller device is a liquid heating medium that flows through an annular pipe that circulates between a cooler, a heater, and an external heat load device, and is heated by the external heat load device. The liquid medium is supercooled by a cooler, and the supercooled liquid medium is heated by a heater to a set temperature required by the external heat load device and supplied to the external heat load device.

通常このような装置では、外部熱負荷装置の熱負荷があるなしに拘わらず、冷却器はその装置仕様の冷却能力を常に発揮している。そのために、冷却が仮に冷凍機であった場合などは常に大きな電力を浪費することになる。そこで、外部熱負荷装置の運転状況にあわせて、運転モードと省エネルギーモードとを切り換えできる恒温維持装置が提案されている（特許文献１参照）。
特開２００４-１６９９３３号公報 Usually, in such a device, the cooler always exhibits the cooling capacity of the device specification regardless of whether or not the external heat load device has a heat load. For this reason, a large amount of electric power is always wasted if the cooling is a refrigerator. Therefore, a constant temperature maintenance device that can switch between an operation mode and an energy saving mode in accordance with the operation status of the external heat load device has been proposed (see Patent Document 1).
JP 2004-169933 A

また、恒温維持装置の冷却器は通常冷却器の出口の液媒体の温度が冷却器の設定温度になるように制御されている。ところが、冷却器の冷凍サイクル内の冷媒ガス（フロンガス等）は熱伝達速度が遅いので、設定温度に到着してから設定温度を大きく超えたり（オーバーシュート）、設定温度を大きく下回ったり（アンダーシュート）することがしばしば起こる。これは加熱器への負担が大きくなり、大型で広い温度範囲の温度調節ができる加熱器が要求される。   Further, the cooler of the constant temperature maintaining device is normally controlled so that the temperature of the liquid medium at the outlet of the cooler becomes the set temperature of the cooler. However, the refrigerant gas (such as chlorofluorocarbon gas) in the refrigeration cycle of the cooler has a slow heat transfer rate, so when it reaches the set temperature, it greatly exceeds the set temperature (overshoot) or falls below the set temperature (undershoot). ) Often happens. This increases the burden on the heater, and requires a large-sized heater capable of adjusting the temperature in a wide temperature range.

そこで、恒温維持装置の外で外部熱負荷装置に近い位置に熱媒体の温度を微調節する温度調節装置を設けることが提案されている（特許文献２参照）。
特開２００１-１５３５１８号公報 Therefore, it has been proposed to provide a temperature adjusting device that finely adjusts the temperature of the heat medium at a position near the external heat load device outside the constant temperature maintaining device (see Patent Document 2).
Japanese Patent Laid-Open No. 2001-153518

上記、特開２００４-１６９９３３号公報には、コンピュータでプラズマエッチング処理装置の工程シーケンスのレシピ情報を先読みして、一定以上の休止状態がある時またはそれが回復される時にチラー装置の運転モードと省エネルギーモードとを切り換えるチラー制御装置が開示されている。   In JP-A-2004-169933, the recipe information of the process sequence of the plasma etching processing apparatus is pre-read by a computer, and the operation mode of the chiller apparatus when there is a certain pause state or when it is recovered. A chiller control device that switches between energy saving modes is disclosed.

しかしこの装置では、温度制御対象装置の稼働状況を常に把握し、その状況をチラー装置の制御系に送信するためのコンピュータやそれに付随する信号線等を必要とする。   However, this device requires a computer for constantly grasping the operating status of the temperature control target device and transmitting the status to the control system of the chiller device, a signal line associated therewith, and the like.

上記特開２００１-１５３５１８号公報には、プロセス装置側の温度によってチラー装置の出口温度を設定すると共に、プロセス装置に供給する熱媒体の温度を微調整する第２温度制御部をチラー装置から分離してプロセス装置の近傍に設けた温度制御システムが開示されている。しかし、このシステムでは温度制御部が２箇所あり、電源系が２系統必要になるので、熱エネルギーロスが大きくなる。また、操作する信号線も２系統必要となり、また、操作自体も複雑になるという欠点がある。   In the above Japanese Patent Laid-Open No. 2001-153518, the outlet temperature of the chiller apparatus is set according to the temperature on the process apparatus side, and the second temperature control unit for finely adjusting the temperature of the heat medium supplied to the process apparatus is separated from the chiller apparatus. Thus, a temperature control system provided in the vicinity of the process apparatus is disclosed. However, in this system, there are two temperature control units and two power supply systems are required, so that thermal energy loss increases. Further, two signal lines are required for operation, and the operation itself is complicated.

本発明は、運転モードの切替え機能を持つ省エネルギー運転の可能な恒温維持装置を提供することを目的としている。   An object of the present invention is to provide a constant temperature maintenance device capable of energy-saving operation having an operation mode switching function.

本発明は、高精度の温度制御が可能であるにも拘わらず、熱エネルギーの消費が極めて少なく且つ運転制御の容易な恒温維持装置を安価に提供することを他の目的としている。   Another object of the present invention is to provide a constant temperature maintaining device that consumes very little heat energy and is easy to control operation at a low cost, despite the fact that highly accurate temperature control is possible.

本発明の恒温維持装置は、冷却器、加熱器および外部熱負荷装置とを接続する循環液路に熱媒体循環液を循環させて外部熱負荷装置を一定の設定温度に維持する恒温維持装置において、冷却器の入り口の循環液の温度と加熱器の出口の循環液の温度との温度差に基づいて少なくとも無負荷時の最小限の冷却能力で温度維持をするアイドリングモードと外部熱負荷に応じて冷却能力を増減させるロードモードとを含む冷却器運転モードを切り換える冷却器運転モード切替手段と、上記ロードモードにおいて冷却器の出口の循環液の温度と加熱器の設定温度との温度差が予め定められた値の指定温度差になるように冷却器の冷却能力を調整する冷却能力調整制御手段とを備えていることを特徴とするものである。   The constant temperature maintaining device of the present invention is a constant temperature maintaining device that maintains the external heat load device at a constant set temperature by circulating the heat medium circulating fluid in a circulating fluid path connecting the cooler, the heater, and the external heat load device. Based on the temperature difference between the circulating fluid temperature at the inlet of the cooler and the circulating fluid temperature at the outlet of the heater, depending on the idling mode and external heat load that maintain the temperature with the minimum cooling capacity at least when there is no load A cooling device operation mode switching means for switching a cooling device operation mode including a load mode for increasing or decreasing the cooling capacity, and a temperature difference between the temperature of the circulating fluid at the outlet of the cooler and the set temperature of the heater in the load mode in advance. Cooling capacity adjustment control means for adjusting the cooling capacity of the cooler so as to have a specified temperature difference of a predetermined value is provided.

上記冷却器運転モードの切り替えは、冷却器の入り口の循環液の温度と加熱器の出口の循環液の温度差によって実行される。
その理由は、温度制御対象である外部熱負荷装置から変動した熱負荷が何時戻って来るかは正確には予測できない。加熱器の設定温度すなわち恒温維持装置の設定温度は外部熱負荷装置の運転状態によって時々変更されることがある。恒温維持装置の設定温度が変更された場合、恒温維持装置の出口の循環液の温度が新たに設定された設定温度に到達し安定してから外部熱負荷装置から変動した熱負荷が戻ってくるとは限らない。恒温維持装置の設定温度を変更している際の温度変化中に変動した熱負荷が戻って来る可能性もある。 The switching of the cooler operation mode is executed by the temperature difference between the circulating fluid at the inlet of the cooler and the circulating fluid at the outlet of the heater.
The reason is that it cannot be accurately predicted when the fluctuating heat load returns from the external heat load device that is the temperature control target. The set temperature of the heater, that is, the set temperature of the constant temperature maintaining device, may be changed from time to time depending on the operating state of the external heat load device. When the set temperature of the temperature maintaining device is changed, the temperature of the circulating fluid at the outlet of the temperature maintaining device reaches the newly set temperature and stabilizes, and then the fluctuating heat load is returned from the external heat load device. Not necessarily. There is also a possibility that the fluctuating heat load returns during the temperature change when changing the set temperature of the constant temperature maintaining device.

従来のように冷却器の入り口の循環液の温度と恒温維持装置の設定温度の温度差で運転モードを切替える制御方式を採用すると、恒温維持装置の設定温度の変更中、すなわち恒温維持装置の出口の循環液の温度が新たに設定された設定温度に到達しないうちに変動した熱負荷が戻って来ると、設定温度を基準としているため設定温度を大きく超えたり（オーバーシュート）、設定温度を大きく下回ったり（アンダーシュート）する現象が起こる。   If the control method that switches the operation mode by the temperature difference between the circulating fluid temperature at the inlet of the cooler and the set temperature of the constant temperature maintenance device as in the past is adopted, the set temperature of the constant temperature maintenance device is being changed, that is, the outlet of the constant temperature maintenance device. If the fluctuating heat load returns before the circulating fluid temperature reaches the newly set temperature, the set temperature is used as the reference, so the set temperature may be exceeded (overshoot) or the set temperature may be increased. A phenomenon of undershoot occurs.

この状況を回避するため、本発明のように冷却器の入り口の循環液の温度と加熱器の出口の循環液の温度差によって運転モードの切替えを行う方式を採用すると、恒温維持装置の設定温度の変更中でも温度差の変化を迅速に検出することができるので、熱負荷の変動に対する反応速度が速く、設定温度を大きくオーバーシュートしたりアンダーシュートすることなく安定して運転モードの切り替えを行うことができる。その結果、早期に運転モードを切り替えることができ、早期に運転状態が安定する。   In order to avoid this situation, adopting a method of switching the operation mode according to the temperature difference between the circulating fluid temperature at the inlet of the cooler and the circulating fluid temperature at the outlet of the heater as in the present invention, the set temperature of the constant temperature maintaining device The change in temperature difference can be detected quickly even during the change of temperature, so the reaction speed against the fluctuation of the heat load is fast, and the operation mode can be switched stably without excessively overshooting or undershooting the set temperature. Can do. As a result, the operation mode can be switched early, and the operation state is stabilized early.

この温度差は外部熱負荷装置の種類や規模、恒温循環装置の種類や規模によって異なるが、通常１℃〜５℃の範囲で定められる。この温度差を測定するために冷却器の入り口に第１温度センサをまた加熱器の出口に第３温度センサーを設ける。   This temperature difference varies depending on the type and scale of the external heat load device and the type and scale of the constant temperature circulation device, but is usually determined in the range of 1 ° C to 5 ° C. In order to measure this temperature difference, a first temperature sensor is provided at the inlet of the cooler and a third temperature sensor is provided at the outlet of the heater.

上記冷却器の運転モードの切り替えは、冷却器の冷凍サイクル中に組み込まれた圧縮機を駆動するインバータの周波数を切り換えて行う。即ち、アイドリングモードでは圧縮機を低いインバータ周波数で駆動する。低い周波数で駆動することにより冷却能力を小さくすることができる。   The operation mode of the cooler is switched by switching the frequency of an inverter that drives a compressor incorporated in the refrigerating cycle of the cooler. That is, in the idling mode, the compressor is driven at a low inverter frequency. By driving at a low frequency, the cooling capacity can be reduced.

それと同時に、インバータを低周波数の電力で駆動するとインバータの消費電力も少なくなる。アイドリングモードでは外部熱負荷装置からの戻り熱負荷はほとんど無いので、リアルタイムに冷却能力を調整する必要はなく、低い冷却能力をほぼ一定に出力するように運転すればよい。この運転モードは恒温維持装置の仕様温度帯の全帯域で実行可能である。   At the same time, when the inverter is driven with low frequency power, the power consumption of the inverter is reduced. In the idling mode, there is almost no return heat load from the external heat load device, so there is no need to adjust the cooling capacity in real time, and it is sufficient to operate so as to output a low cooling capacity almost constant. This operation mode can be executed in the entire temperature range of the constant temperature maintaining device.

ロードモードは冷凍サイクルの圧縮機を高いインバータ周波数の電力で駆動する。インバータ周波数を高くすると冷却能力を大きくすることができる。しかし、圧縮機のインバータ周波数による制御方法は反応速度が遅いので、ロードモードではインバータの周波数を固定し、冷却器の冷却能力の制御には電子膨張弁を使用する。   In load mode, the compressor of the refrigeration cycle is driven by electric power at a high inverter frequency. Increasing the inverter frequency can increase the cooling capacity. However, since the control method based on the inverter frequency of the compressor has a slow reaction speed, the frequency of the inverter is fixed in the load mode, and an electronic expansion valve is used to control the cooling capacity of the cooler.

また、ロードモードにおいて冷凍機のインバータ周波数を固定する理由は、冷媒ガス（フロンガスなど）はインバータの周波数を可変にすると一時的に不安定になり温度精度が悪くなるためである。   The reason why the inverter frequency of the refrigerator is fixed in the load mode is that the refrigerant gas (such as chlorofluorocarbon) becomes unstable temporarily when the frequency of the inverter is made variable, resulting in poor temperature accuracy.

また、ロードモードでは外部熱負荷装置から変動する熱負荷が戻ってくるので、その熱負荷の変動に応じて冷却器の冷却能力をリアルタイムで制御しなければならない。そのために、ロードモードにおける冷却器の冷却能力の制御には反応速度の速い電子膨張弁を使用し、その弁開度の調節で冷却能力の調節を行うようにする。   In the load mode, the fluctuating heat load is returned from the external heat load device, so that the cooling capacity of the cooler must be controlled in real time according to the fluctuating heat load. For this purpose, an electronic expansion valve with a fast reaction speed is used for controlling the cooling capacity of the cooler in the load mode, and the cooling capacity is adjusted by adjusting the valve opening.

電子膨張弁の弁開度の調節は冷却器の出口の循環液の温度と加熱器の設定温度の差が予め定められた温度差（ここではこれを指定温度差と呼ぶ）になるように調整する。この指定温度差は加熱器のヒーターの加熱しろを確保するのに必要とする程度の温度差であって、冷却器の出口の循環液の温度が加熱器の設定温度より数度、例えば１℃〜５℃低いように設定すればよい。そのために冷却器の出口の循環液の温度を測定するための第２温度センサを設ける。   Adjustment of the valve opening of the electronic expansion valve is adjusted so that the difference between the circulating fluid temperature at the outlet of the cooler and the set temperature of the heater is a predetermined temperature difference (this is called the specified temperature difference here) To do. This specified temperature difference is a temperature difference required to secure the heating margin of the heater of the heater, and the temperature of the circulating fluid at the outlet of the cooler is several degrees from the set temperature of the heater, for example, 1 ° C. What is necessary is just to set so that -5 degreeC may be low. For this purpose, a second temperature sensor is provided for measuring the temperature of the circulating fluid at the outlet of the cooler.

電子膨張弁の弁開度の調節は、冷却器の出口の循環液の温度によってヒードバック制御する。
このヒードバック制御の方法は、冷却器の出口の循環液の温度を予め定められた複数の温度帯に区分し、各温度帯に応じて冷却器の冷却能力を調整する。
ここに、加熱器の設定温度より予め定められた温度だけ低い温度にある程度の幅を持たせた温度帯をターゲット温度帯とし、このターゲット温度帯よりも高い温度帯を高温温度帯、低い温度帯を低温温度帯と呼ぶことにする。 The adjustment of the opening degree of the electronic expansion valve is controlled by feedback based on the temperature of the circulating fluid at the outlet of the cooler.
In this method of feedback control, the temperature of the circulating fluid at the outlet of the cooler is divided into a plurality of predetermined temperature zones, and the cooling capacity of the cooler is adjusted according to each temperature zone.
Here, a temperature range in which a certain range is given to a temperature that is lower than a preset temperature of the heater is set as a target temperature range, and a temperature range higher than the target temperature range is a high temperature range and a low temperature range Is called a low temperature zone.

冷却器の出口の循環液の温度がターゲット温度帯にある場合は、電子膨張弁の弁開度をそのまま維持する。循環液の温度がターゲット温度帯よりも高い高温温度帯に移行した場合は、冷却能力が大きくなるように電子膨張弁の弁開度を大きくなる方に徐々に開く。反対に、循環液の温度がターゲット温度帯よりも低い低温温度帯に移行した場合は、冷却能力が小さくなるように電子膨張弁の弁開度を小さくなる方に徐々に閉じる。このように弁開度を制御する温度に幅を持たせることにより循環液温度の安定性が向上する。   When the temperature of the circulating fluid at the outlet of the cooler is in the target temperature range, the valve opening degree of the electronic expansion valve is maintained as it is. When the temperature of the circulating fluid has shifted to a high temperature range higher than the target temperature range, the valve opening degree of the electronic expansion valve is gradually opened to increase the cooling capacity. Conversely, when the temperature of the circulating fluid has shifted to a low temperature range that is lower than the target temperature range, the valve opening degree of the electronic expansion valve is gradually closed so as to reduce the cooling capacity. Thus, the stability of the circulating fluid temperature is improved by giving a range to the temperature for controlling the valve opening.

これをさらに具体的に説明すると、外部熱負荷装置に＋３０℃の循環液を供給したい場合、冷却器の出口温度は＋３０℃より１〜５℃低い指定温度差を保つように運転しなければならない。例えば、指定温度差を２℃とした場合、ターゲット温度は＋２８℃となり、＋２８℃より０．１℃高くても０．１℃低くても、膨張弁が開閉し、循環液温度の安定性に欠けることになる。そこでターゲット温度に幅を持たせ、例えば、＋２８．５℃〜＋２７．５℃をターゲット温度帯とすれば、この温度帯では膨張弁の開閉は行われず循環液温度の安定性が得られる。   More specifically, when it is desired to supply + 30 ° C. circulating fluid to the external heat load device, the outlet temperature of the cooler must be operated to maintain a specified temperature difference that is 1 to 5 ° C. lower than + 30 ° C. . For example, when the specified temperature difference is 2 ° C., the target temperature is + 28 ° C., and the expansion valve opens and closes regardless of whether it is 0.1 ° C. higher or lower than + 28 ° C. It will be lacking. Therefore, if the target temperature is widened, for example, if the target temperature range is + 28.5 ° C. to + 27.5 ° C., the expansion valve is not opened and closed in this temperature range, and the stability of the circulating fluid temperature can be obtained.

加熱器の設定温度とは恒温維持装置の設定温度のことで、この設定温度は外部熱負荷装置の種類または運転状況に応じて適宜変更される。
また、この加熱器は、加熱器の出口の循環液の温度を設定温度になるようにフィードバック制御する機能を備えている。 The set temperature of the heater is the set temperature of the constant temperature maintaining device, and this set temperature is appropriately changed according to the type of the external heat load device or the operating condition.
In addition, this heater has a function of performing feedback control so that the temperature of the circulating fluid at the outlet of the heater becomes a set temperature.

このフィードバック制御機能としてＰＩＤ制御機能を使用する。ＰＩＤ制御機能を使用することによって極めて高精度に恒温維持装置の出口の循環液の温度を制御することができる。   A PID control function is used as the feedback control function. By using the PID control function, the temperature of the circulating fluid at the outlet of the constant temperature maintaining device can be controlled with extremely high accuracy.

さらに、冷却器の運転モードには昇温モードと降温モードを設定する事ができる。昇温モードとは恒温維持装置の設定温度を低い温度から高い温度に変更した場合に、新しく設定された高い温度の設定温度まで温度上昇させる運転モードである。このモードでは冷却能力を極力少なくし、加熱能力を最大限にして早く温度上昇するようにする。     Furthermore, a temperature increase mode and a temperature decrease mode can be set as the operation mode of the cooler. The temperature increase mode is an operation mode in which the temperature is increased to a newly set high temperature when the set temperature of the constant temperature maintaining device is changed from a low temperature to a high temperature. In this mode, the cooling capacity is minimized and the heating capacity is maximized so that the temperature rises quickly.

降温モードとは恒温維持装置の設定温度を高い温度から低い温度に変更した場合に、新しく設定された低い温度の設定温度まで温度降下させる運転モードである。このモードでは冷却能力を大きくし、加熱能力を無くして早く温度降下するようにする。昇温モードおよび降温モードの切り替えは恒温維持装置の設定温度を変更したときに自動的にまたは半自動的に行われる。   The temperature lowering mode is an operation mode in which when the set temperature of the constant temperature maintaining device is changed from a high temperature to a low temperature, the temperature is lowered to a newly set low set temperature. In this mode, the cooling capacity is increased, the heating capacity is lost, and the temperature drops quickly. Switching between the temperature raising mode and the temperature lowering mode is performed automatically or semi-automatically when the set temperature of the constant temperature maintaining device is changed.

本発明の恒温維持装置は、冷却器の入り口の循環液の温度と加熱器の出口の循環液の温度との温度差に基づいて冷却器の運転モードを切り換える冷却器運転モード切替手段を備えているので、恒温維持装置の設定温度の変更中でも温度差の変化を迅速に検出することができ、熱負荷の変動に対する反応速度が速く、設定温度を大きくオーバーシュートしたりアンダーシュートすることなく安定して運転モードの切り替えを行うことができる。その結果、早期に運転モードを切り替えることができ、早期に運転状態が安定する。   The constant temperature maintenance device of the present invention comprises a cooler operation mode switching means for switching the operation mode of the cooler based on the temperature difference between the temperature of the circulating fluid at the inlet of the cooler and the temperature of the circulating fluid at the outlet of the heater. Therefore, even if the set temperature of the constant temperature maintenance device is changed, the change in temperature difference can be detected quickly, the response speed to the fluctuation of the heat load is fast, and the set temperature is stable without greatly overshooting or undershooting. The operation mode can be switched. As a result, the operation mode can be switched early, and the operation state is stabilized early.

本発明の恒温維持装置は、冷凍サイクル中の圧縮機を駆動するインバータの周波数によって冷却能力を調整する冷却能力調整手段を備えているので、外部熱負荷装置の熱負荷に応じて冷却器の運転モードをアイドリングモードとロードモードに切り替えることができ、省エネルギーの運転を行うことができる。   Since the constant temperature maintaining device of the present invention includes the cooling capacity adjusting means for adjusting the cooling capacity according to the frequency of the inverter that drives the compressor in the refrigeration cycle, the operation of the cooler according to the heat load of the external heat load device The mode can be switched between an idling mode and a load mode, and energy-saving operation can be performed.

本発明の恒温維持装置は、冷凍サイクル中の電子膨張弁の弁開度によって冷却能力を調整する冷却能調整手段とを備えているので、ロードモード中の熱反応性が早く、しかも、高精度の冷却器の温度制御を行うことができる。   The constant temperature maintenance device of the present invention includes a cooling capacity adjusting means that adjusts the cooling capacity according to the opening degree of the electronic expansion valve in the refrigeration cycle, so that the thermal reactivity during the load mode is fast and highly accurate. The temperature of the cooler can be controlled.

本発明の恒温維持装置は、冷却器の出口の循環液の温度と加熱器の設定温度との温度差が予め定められた指定温度差になるように冷却器の冷却能力を調整する冷却器能力調整制御手段を備えているので、加熱器に流入される循環液の温度がほぼ一定し、しかも、その指定温度差を小さく設定すれば、外部熱負荷装置から戻ってくる戻り熱負荷の変化に影響されることが少なくなり、極めて小さな出力の加熱器、例えば、電熱ヒータを選定することができ、リアルタイムに加熱器を出る循環液の温度を高精度で制御することができる。   The constant temperature maintenance device of the present invention is a cooler ability that adjusts the cooling ability of the cooler so that the temperature difference between the temperature of the circulating fluid at the outlet of the cooler and the set temperature of the heater becomes a predetermined specified temperature difference. Since the adjustment control means is provided, the temperature of the circulating fluid flowing into the heater is almost constant, and if the specified temperature difference is set small, the return heat load returned from the external heat load device is changed. A heater with a very small output, for example, an electric heater, can be selected because it is less affected, and the temperature of the circulating fluid exiting the heater can be controlled with high accuracy in real time.

本発明の恒温維持装置は、冷却器の出口の循環液の温度を予め定められた複数の温度帯に区分し、各温度帯に応じて冷却器の冷却能力を調整する電子膨張弁による温度制御機能を備えているので、膨張弁の開度を調整する温度に幅を持たせることができ、温度安定性が向上する。    The constant temperature maintenance device of the present invention divides the temperature of the circulating fluid at the outlet of the cooler into a plurality of predetermined temperature zones, and controls the temperature by an electronic expansion valve that adjusts the cooling capacity of the cooler according to each temperature zone Since the function is provided, the temperature for adjusting the opening degree of the expansion valve can be widened, and the temperature stability is improved.

本発明の恒温維持装置は、ＰＩＤフィードバック制御機能を備えた加熱器を使用しているので、電熱ヒーターのサイズを小さくして省エネルギーの運転を可能にすると共に、外部熱負荷装置に供給する循環液の温度を高精度に制御することができる。   Since the constant temperature maintaining device of the present invention uses a heater having a PID feedback control function, the size of the electric heater can be reduced to enable energy saving operation, and the circulating fluid supplied to the external heat load device Can be controlled with high accuracy.

本発明を実施するための恒温維持装置の実施例を図面によって説明する。   An embodiment of a constant temperature maintenance device for carrying out the present invention will be described with reference to the drawings.

図１は本発明の恒温維持装置の概念図を示すもので、破線で囲まれた部分が恒温維持装置１である。恒温維持装置１は冷却器２と加熱器４とより構成されている。５は例えば半導体ウエハのエッチング装置のような一定の温度に維持する必要のある外部熱負荷装置で循環液管路６によって恒温維持装置１と連結され閉回路を構成している。   FIG. 1 is a conceptual diagram of a constant temperature maintaining device according to the present invention. A portion surrounded by a broken line is a constant temperature maintaining device 1. The constant temperature maintaining device 1 includes a cooler 2 and a heater 4. Reference numeral 5 denotes an external heat load device that needs to be maintained at a constant temperature, such as a semiconductor wafer etching device, and is connected to the constant temperature maintaining device 1 by a circulating liquid pipe 6 to form a closed circuit.

循環液管路６内には熱媒体である水が封入されている。循環液管路６には熱媒体の温度を測定するための温度センサが随所に取り付けられている。４１は冷却器の入り口の循環液の温度、即ち外部熱媒体からの戻り温度を測定する第１温度センサ、４２は冷却器の出口の循環液の温度を測定するための第２温度センサ、４３は加熱器の出口の循環液の温度を測定するための第３温度センサである。   Water, which is a heat medium, is sealed in the circulating liquid pipe 6. A temperature sensor for measuring the temperature of the heat medium is attached to the circulating liquid pipe 6 everywhere. 41 is a first temperature sensor for measuring the temperature of the circulating fluid at the inlet of the cooler, that is, the return temperature from the external heat medium, 42 is a second temperature sensor for measuring the temperature of the circulating fluid at the outlet of the cooler, 43 Is a third temperature sensor for measuring the temperature of the circulating fluid at the outlet of the heater.

図２は本発明の恒温維持装置のブロック図を示すもので、破線に囲まれた機器が恒温維持装置１であり、一点破線で囲まれた冷却器２と加熱器４とで構成されている。恒温維持装置１は循環液管路６によって外部熱負荷装置と連結されている。そのために外部熱負荷装置からの循環液を受け入れる循環液戻り口６４と循環液を供給する循環液供給口６５が設けられている。   FIG. 2 is a block diagram of the constant temperature maintaining device of the present invention. The device surrounded by a broken line is the constant temperature maintaining device 1, and is composed of a cooler 2 and a heater 4 surrounded by a single dotted line. . The constant temperature maintaining device 1 is connected to an external heat load device by a circulating liquid pipe 6. For this purpose, a circulating fluid return port 64 that receives the circulating fluid from the external heat load device and a circulating fluid supply port 65 that supplies the circulating fluid are provided.

冷却器２は圧縮機２１、コンデンサ２２、熱交換器２６が冷媒回路７で連結され冷凍機サイクルを構成している。冷媒回路７には第１電子膨張弁２３、第２電子膨張弁２４、第３電子膨張弁２５、セパレータ２７等が付設されている。コンデンサ２２は冷媒回路７の冷媒を冷却水回路８の冷却水で冷却して冷媒を液化させるためのものである。   In the cooler 2, a compressor 21, a condenser 22, and a heat exchanger 26 are connected by a refrigerant circuit 7 to constitute a refrigerator cycle. The refrigerant circuit 7 is provided with a first electronic expansion valve 23, a second electronic expansion valve 24, a third electronic expansion valve 25, a separator 27, and the like. The capacitor 22 is for cooling the refrigerant in the refrigerant circuit 7 with the cooling water in the cooling water circuit 8 to liquefy the refrigerant.

なお、図中７０はドライヤー（Ｄ：冷媒ガスの水分を除去するための乾燥剤入りフイルタ）、７１はストレーナ（冷媒ガスのメッシュ式フィルタ）、７２はサイトグラス（ＳＧ：冷媒ガスの液化状況を確認するための窓）、７３は圧力センサ（高圧側の冷媒ガスの圧力を検知するセンサ）、７４は低圧側サービスバルブ（冷媒ガス封入、メンテナンスなどに使用するアクセスポイント）、７５は圧力センサ（低圧側の冷媒ガスの圧力を検知するセンサ）、７６は高圧側サービスバルブ（冷媒ガス封入、メンテナンスなどに使用するアクセスポイント）、７７は温度センサ（第４番目のセンサで、冷凍機から吐出される冷媒ガスの温度を検知する）、７８はホットガスバイパス回路（冷媒ガスの圧縮熱を利用するための回路）、７９はインジェクション回路（冷凍機の冷媒ガス吸い込み温度を下げ冷凍機を保護する回路）、８１は冷却水入口、８２は冷却水出口である。   In the figure, 70 is a dryer (D: a filter containing a desiccant for removing moisture from the refrigerant gas), 71 is a strainer (mesh type filter for refrigerant gas), and 72 is a sight glass (SG: liquefaction state of refrigerant gas). A window for checking), 73 is a pressure sensor (sensor for detecting the pressure of refrigerant gas on the high pressure side), 74 is a low pressure side service valve (access point used for refrigerant gas filling, maintenance, etc.), 75 is a pressure sensor ( A sensor for detecting the pressure of the refrigerant gas on the low-pressure side, 76 is a high-pressure side service valve (access point used for refrigerant gas filling, maintenance, etc.), and 77 is a temperature sensor (fourth sensor, which is discharged from the refrigerator). 78 is a hot gas bypass circuit (a circuit for utilizing the compression heat of the refrigerant gas), 79 is an injector. Deployment circuit (circuit for protecting the refrigerator lowering the refrigerant gas suction temperature of the refrigerator), 81 cooling water inlet, 82 is a cooling water outlet.

圧縮機２１で圧縮された冷媒はコンデンサ２２に送られ冷却水回路８を流れる冷却水によって冷却され液化される。液化した冷媒は第１電子膨張弁２３によって断熱膨張されて急激に温度が降下する。温度が下がった冷媒は熱交換機２６において循環液と熱交換して循環液を所望の温度に冷却する。温度の上がった冷媒はセパレータ３０で液体を分離して再び圧縮機２１に入る。   The refrigerant compressed by the compressor 21 is sent to the condenser 22 and is cooled and liquefied by the cooling water flowing through the cooling water circuit 8. The liquefied refrigerant is adiabatically expanded by the first electronic expansion valve 23, and the temperature rapidly decreases. The refrigerant whose temperature has been lowered exchanges heat with the circulating fluid in the heat exchanger 26 to cool the circulating fluid to a desired temperature. The refrigerant whose temperature has risen is separated by the separator 30 and enters the compressor 21 again.

第１電子膨張弁２３は冷却器の冷却能力を主として調整するためものである。第２電子膨張弁２４は圧縮機２１を保護するためのもので、第３電子膨張弁２５は冷却器２の冷却能力を補助的に調整するものである。この電子膨張弁２５を備えた回路はホットガスバイパス回路と呼ばれ、冷凍機で圧縮され圧縮熱を持つ冷媒ガスをコンデンサ２２で冷却せず、直接熱交換機２６に入れて熱交換させることにより加熱エネルギーを回収して、一時的に冷却能力が過多にった場合に冷却能力を調整する。
なお、各電子膨張弁はステッピングモーター２７、２８、２９によって開度が調整される。 The first electronic expansion valve 23 is mainly for adjusting the cooling capacity of the cooler. The second electronic expansion valve 24 is for protecting the compressor 21, and the third electronic expansion valve 25 is for supplementarily adjusting the cooling capacity of the cooler 2. The circuit provided with the electronic expansion valve 25 is called a hot gas bypass circuit, and the refrigerant gas compressed by the refrigerator and having the heat of compression is not cooled by the condenser 22 but directly put into the heat exchanger 26 to be heat-exchanged. Energy is recovered and the cooling capacity is adjusted if the cooling capacity is temporarily excessive.
The opening degree of each electronic expansion valve is adjusted by stepping motors 27, 28, and 29.

４は加熱器で、外部熱負荷装置から戻り管路６１によって戻ってきた循環液を冷却器２の熱交換器２６で一旦過冷却し、過冷却された循環液を設定温度まで加熱するために使用される。設定温度まで加熱された循環液はポンプ６６で圧送され、送り管路６３を経て外部熱負荷装置に供給される。   4 is a heater for temporarily cooling the circulating fluid returned from the external heat load device through the return pipe 61 by the heat exchanger 26 of the cooler 2 and heating the supercooled circulating fluid to a set temperature. used. The circulating fluid heated to the set temperature is pumped by the pump 66 and supplied to the external heat load device via the feed pipe 63.

図３は冷却器および加熱器を制御するためのコントローラ１１の配線図を示すものである。コントローラ１１は第１温度センサ４１によって測定される外部熱負荷装置からの戻り循環液の温度と第３温度センサ４３によって測定される加熱器４から送り出される循環液の温度差によって冷却器の圧縮機２１を駆動するためのインバータ１３の周波数制御信号を切り換え、冷却器の運転モードを切り換える。なお、図中１２は表示・設定入力パネルである。   FIG. 3 shows a wiring diagram of the controller 11 for controlling the cooler and the heater. The controller 11 uses a temperature difference between the circulating fluid returned from the external heat load device measured by the first temperature sensor 41 and the circulating fluid sent out from the heater 4 measured by the third temperature sensor 43, so that the compressor of the cooler. The frequency control signal of the inverter 13 for driving 21 is switched, and the operation mode of the cooler is switched. In the figure, reference numeral 12 denotes a display / setting input panel.

第１温度センサ４１と第３温度センサ４３との温度差がほとんど無い時、即ち外部負荷装置が休止状態の場合は、コントローラ１１はアイドリングモードを設定し、インバータ１３の周波数を下げ、冷凍機サイクルの圧縮器２１を低いインバータ周波数で駆動させる。インバータを低周波数で駆動するとインバータの消費電力も低くなる。同時に第１電子膨張弁２３の開度を絞って、熱交換機に供給する冷熱のエネルギーを恒温維持装置の設定温度が維持できる最低限度にする。   When there is almost no temperature difference between the first temperature sensor 41 and the third temperature sensor 43, that is, when the external load device is in a resting state, the controller 11 sets the idling mode, lowers the frequency of the inverter 13, and the refrigerator cycle The compressor 21 is driven at a low inverter frequency. When the inverter is driven at a low frequency, the power consumption of the inverter is also reduced. At the same time, the opening degree of the first electronic expansion valve 23 is reduced so that the energy of the cold supplied to the heat exchanger is kept to the minimum level at which the set temperature of the constant temperature maintaining device can be maintained.

第１温度センサ４１と第３温度センサ４３との温度差が予め定められた閾値を超えた場合、即ち外部熱負荷装置が稼働を始めたときは、コントローラ１１はロードモードを設定して、冷凍サイクルの圧縮機２１を高いインバータ周波数で駆動させるようにする。それによって冷却能力を高める一方、コントローラ１１はステッピングモーター２７に第１電子膨張弁２３の開度を大きくする制御信号を送って冷却器２の冷却能力を高め、必要とする冷熱を熱交換器２６に供給する。   When the temperature difference between the first temperature sensor 41 and the third temperature sensor 43 exceeds a predetermined threshold value, that is, when the external heat load device starts operation, the controller 11 sets the load mode to The cycle compressor 21 is driven at a high inverter frequency. While the cooling capacity is thereby increased, the controller 11 sends a control signal for increasing the opening degree of the first electronic expansion valve 23 to the stepping motor 27 to increase the cooling capacity of the cooler 2, and the necessary cold heat is transferred to the heat exchanger 26. To supply.

しかし、ロードモードの場合は、外部熱負荷は一定ではないので、外部熱負荷に応じた冷却能力の調整が必要になる。この調整は、第２温度センサー４２の検知温度と加熱器４の設定温度の温度差を常に一定に保つように電子膨張弁の弁開度を開閉して冷却能力を調整する。温度差は、加熱器４の電気ヒーター４４の加熱しろを確保する程度の差で十分である。   However, in the load mode, since the external heat load is not constant, it is necessary to adjust the cooling capacity according to the external heat load. In this adjustment, the cooling capacity is adjusted by opening and closing the opening of the electronic expansion valve so that the temperature difference between the temperature detected by the second temperature sensor 42 and the set temperature of the heater 4 is always kept constant. The temperature difference is sufficient to ensure the heating margin of the electric heater 44 of the heater 4.

冷却器２の出口の循環液の温度と加熱器４の設定温度の温度差が一定に保たれていることは、加熱器４に入る負荷がほぼ一定に保たれたことになる。この負荷がほぼ一定になればヒーター４４による温度制御も容易になり、結果的には加熱器４を出る循環液の温度を高精度で制御することができるようになる。また、温度差を狭くすることにより、ヒーター４４の加熱能力を低く抑えることができる。   The fact that the temperature difference between the temperature of the circulating fluid at the outlet of the cooler 2 and the set temperature of the heater 4 is kept constant means that the load entering the heater 4 is kept almost constant. If this load becomes substantially constant, the temperature control by the heater 44 becomes easy, and as a result, the temperature of the circulating fluid exiting the heater 4 can be controlled with high accuracy. Moreover, the heating capability of the heater 44 can be kept low by narrowing the temperature difference.

ヒーター４４はＰＩＤ制御によって、加熱器４の設定温度と第３温度センサ４３の検知した循環液の温度が等しくなるように制御される。
このヒーターの設定温度は外部熱負荷装置の種類または運転状況に応じて変更されることがある。 The heater 44 is controlled by PID control so that the set temperature of the heater 4 is equal to the temperature of the circulating fluid detected by the third temperature sensor 43.
The set temperature of the heater may be changed depending on the type of the external heat load device or the operation status.

循環ポンプ６６は第３温度センサ４３の上流側に配置している。これはポンプ６６の仕事熱も加熱器４以外の加熱源と考え消費エネルギーを抑えることと、外部熱負荷装置に供給される循環液の温度精度を良くすることを目的としている。   The circulation pump 66 is disposed on the upstream side of the third temperature sensor 43. This is because the work heat of the pump 66 is also considered as a heating source other than the heater 4, and the purpose is to suppress energy consumption and improve the temperature accuracy of the circulating fluid supplied to the external heat load device.

次に、図４によって本発明の恒温維持装置の運転モード切り換えおよび各運転モードにおける冷却器の冷却能力制御方法について説明する。
まず、ステップ９１において、恒温維持装置の設定温度ＳＶを入力し、第１温度センサ４１の温度ＴＳ１、第２温度センサ４２の温度ＴＳ２、第３温度センサ４３の温度ＴＳ３をそれぞれ読み込む。 Next, the operation mode switching of the constant temperature maintaining device of the present invention and the cooling capacity control method of the cooler in each operation mode will be described with reference to FIG.
First, in step 91, the set temperature SV of the constant temperature maintaining device is input, and the temperature TS1 of the first temperature sensor 41, the temperature TS2 of the second temperature sensor 42, and the temperature TS3 of the third temperature sensor 43 are read.

ステップ９２において、ＴＳ３−ＴＳ１の値と指定温度差とを比較し、指定温度差よりも小さい場合はアイドルモードのステップ９３に進む。指定温度差よりも大きい場合はロードモードのステップ９５に進む。ステップ９３では圧縮機２１を駆動するインバータの周波数を降下させ冷却器２の冷却能力を低下させる。ステップ９４では電子膨張弁２７の弁開度をアイドリングモード用の開度に設定する。ロードモードのステップ９５ではインバータ周波数を上げる。ステップ９６では（設定温度ＳＶ−第２温度センサの温度ＴＳ２）の値と指定温度差とを比較し、指定温度差よりも小さい場合はステップ９７に進み電子膨張弁ＥＬＶ１の弁開度を絞る方向に調整する。   In step 92, the value of TS3-TS1 is compared with the specified temperature difference, and if smaller than the specified temperature difference, the process proceeds to step 93 in the idle mode. If it is larger than the specified temperature difference, the process proceeds to step 95 of the load mode. In step 93, the frequency of the inverter that drives the compressor 21 is lowered to lower the cooling capacity of the cooler 2. In step 94, the opening degree of the electronic expansion valve 27 is set to the opening degree for the idling mode. In step 95 of the load mode, the inverter frequency is increased. In step 96, the value of (set temperature SV-temperature TS2 of the second temperature sensor) is compared with the specified temperature difference, and if smaller than the specified temperature difference, the process proceeds to step 97 in which the valve opening degree of the electronic expansion valve ELV1 is reduced. Adjust to.

一方、指定温度差よりも大い場合はステップ９８に進み電子膨張弁ＥＬＶ１の弁開度を開く方向に調整する。ステップ９９ではアイドリングモード、ロードモードとも加熱器４をＰＩＤ制御して加熱器の出口の循環液の温度が設定温度になるように制御する。   On the other hand, when it is larger than the specified temperature difference, the routine proceeds to step 98 and the valve opening degree of the electronic expansion valve ELV1 is adjusted to open. In step 99, both the idling mode and the load mode are controlled so that the heater 4 is PID-controlled so that the temperature of the circulating fluid at the outlet of the heater becomes the set temperature.

次に本発明の恒温維持装置を運転状態を具体的に説明する。
指定温度差（１）は第１温度センサ４１の測定温度と第３温度センサ４３の測定温度の差を３℃と設定する。
指定温度差（２）は第２温度センサ４２の測定温度と加熱器４の設定温度の差を−２℃と設定する。 Next, the operation state of the constant temperature maintaining device of the present invention will be specifically described.
The designated temperature difference (1) sets the difference between the measured temperature of the first temperature sensor 41 and the measured temperature of the third temperature sensor 43 to 3 ° C.
The designated temperature difference (2) sets the difference between the measured temperature of the second temperature sensor 42 and the set temperature of the heater 4 to −2 ° C.

図５は無負荷時のアイドリングモードで運転した状態を現わしている。
この場合の外部熱負荷は０Ｗ、第１温度センサ４１の測定温度は３０℃、第２温度センサ４２の測定温度は２９℃、第３温度センサ４３の測定温度は３０℃、冷却器の消費エネルギーは−５００Ｗ、加熱器の消費エネルギーは＋５００Ｗである。 FIG. 5 shows a state in which the engine is operated in the idling mode when there is no load.
In this case, the external heat load is 0 W, the measured temperature of the first temperature sensor 41 is 30 ° C., the measured temperature of the second temperature sensor 42 is 29 ° C., the measured temperature of the third temperature sensor 43 is 30 ° C., and the energy consumption of the cooler Is -500W and the energy consumption of the heater is + 500W.

図６は熱負荷大のロードモードで運転した状態を現わしている。
この場合の外部熱負荷は＋３０００Ｗ、第１温度センサ４１の測定温度は３６℃、第２温度センサ４２の測定温度は２８℃、第３温度センサ４３の測定温度は３０℃、冷却器の消費エネルギーは−４０００Ｗ、加熱器の消費エネルギーは＋１０００Ｗである。 FIG. 6 shows a state where the engine is operated in a load mode with a large heat load.
In this case, the external heat load is +3000 W, the measured temperature of the first temperature sensor 41 is 36 ° C., the measured temperature of the second temperature sensor 42 is 28 ° C., the measured temperature of the third temperature sensor 43 is 30 ° C., and the energy consumption of the cooler Is -4000W, and the energy consumption of the heater is + 1000W.

図７は熱負荷小のロードモードで運転した状態を現わしている。
この場合の外部熱負荷は＋１５００Ｗ、第１温度センサ４１の測定温度は３３℃、第２温度センサ４２の測定温度は２８℃、第３温度センサ４３の測定温度は３０℃、冷却器の消費エネルギーは−２５００Ｗ、加熱器の消費エネルギーは＋１０００Ｗである。 FIG. 7 shows a state where the engine is operated in a load mode with a small heat load.
In this case, the external heat load is +1500 W, the measured temperature of the first temperature sensor 41 is 33 ° C., the measured temperature of the second temperature sensor 42 is 28 ° C., the measured temperature of the third temperature sensor 43 is 30 ° C., and the energy consumption of the cooler Is -2500W, and the energy consumption of the heater is + 1000W.

このように１℃当たり５００Ｗの熱量と仮定して指定温度差を設定・制御した場合、指定温度差（１）の３℃は、１５００Ｗ以上の熱負荷が戻ってきたことになる。指定温度差（２）の−２℃は冷却器で戻り熱負荷を−１０００Ｗ分過冷却し、加熱器で＋１０００Ｗ分をＰＩＤ制御されたヒータを用いて精度の高い温度調節を行うことになる。
また、指定温度差（２）を−１℃とした場合は、−５００Ｗの過冷却となり、ヒーターの容量はさらに少ないエネルギーで制御が可能になる。 As described above, when the designated temperature difference is set and controlled on the assumption that the heat amount is 500 W per 1 ° C., the heat load of 1500 W or more is returned at 3 ° C. of the designated temperature difference (1). The specified temperature difference (2) of −2 ° C. is returned by the cooler, the heat load is subcooled by −1000 W, and the heater is +1000 W and the temperature is adjusted with high accuracy using a PID-controlled heater.
Further, when the specified temperature difference (2) is set to −1 ° C., the supercooling is −500 W, and the heater capacity can be controlled with less energy.

次に、従来の恒温維持装置（冷却器の運転モード切替機能と冷却能力調整機能を備えていないので大きなヒーターを搭載している）と本発明の恒温維持装置を同じ条件で運転した場合の熱効率について説明する。     Next, the thermal efficiency when operating the conventional constant temperature maintaining device (which is equipped with a large heater because it does not have an operation mode switching function and a cooling capacity adjustment function) and the constant temperature maintaining device of the present invention under the same conditions Will be described.

従来の恒温循環装置は、冷却器の発揮する冷却能力は温度制御対象（外部熱負荷装置）より戻ってくる熱負荷に関係無く一定の冷却能力を発揮している。
温度制御対象より戻って来る熱負荷が小さい場合は、冷却器の冷却能力は余ってしまい加熱器の加熱能力を大きく発揮しなければ循環液の温度を制御することができない。 The conventional constant-temperature circulation device exhibits a constant cooling capacity regardless of the heat load returned from the temperature control target (external heat load device).
When the heat load returned from the temperature control target is small, the cooling capacity of the cooler is excessive, and the temperature of the circulating fluid cannot be controlled unless the heating capacity of the heater is fully exerted.

温度制御対象より戻って来る熱負荷が仮に無負荷の場合は、冷却器の発揮する冷却能力のほぼ同等の加熱器の加熱能力を発揮して循環液温度を制御しなければならない。このため加熱器が大型になり、これに伴って消費されるエネルギーも多くなる。   If the heat load returned from the temperature control target is unloaded, the circulating fluid temperature must be controlled by exhibiting the heating capacity of the heater that is substantially equivalent to the cooling capacity exhibited by the cooler. For this reason, a heater becomes large-sized and the energy consumed with this increases.

最大冷却能力５０００Ｗ恒温維持装置の場合、１０００Ｗの加熱・冷却能力を発生させた時に消費されるエネルギーを１として、本発明の恒温維持装置とと従来の恒温維持装置との消費エネルギーを比較したものを表１に示す。

Figure 0004566052
In the case of a constant temperature maintaining device with a maximum cooling capacity of 5000 W, the energy consumed when generating a heating / cooling capacity of 1000 W is taken as 1, and the energy consumption of the constant temperature maintaining device of the present invention is compared with the conventional constant temperature maintaining device. Is shown in Table 1.
Figure 0004566052

表１に示すように、無負荷時と有負荷時との合計の消費エネルギーは、従来装置では、１０＋７＝１７であるが、本発明の装置では、２＋５＝７となり、従来方式より約６０％の消費エネルギーの削減となる。   As shown in Table 1, the total energy consumption during no load and when there is a load is 10 + 7 = 17 in the conventional device, but is 2 + 5 = 7 in the device of the present invention, which is about 60% of the conventional method. The energy consumption will be reduced.

本発明の恒温維持装置の概念図である。It is a conceptual diagram of the constant temperature maintenance apparatus of this invention. 本発明の恒温維持装置のブロック図である。It is a block diagram of the constant temperature maintenance apparatus of this invention. 本発明の恒温維持装置の制御系を示す回路図である。It is a circuit diagram which shows the control system of the constant temperature maintenance apparatus of this invention. 本発明の恒温維持装置の制御方法を示すフローチャートである。It is a flowchart which shows the control method of the constant temperature maintenance apparatus of this invention. 本発明の恒温維持装置をアイドリングモードで稼働した場合の状態を表す説明図。Explanatory drawing showing the state at the time of operating the constant temperature maintenance apparatus of this invention in idling mode. 本発明の恒温維持装置をロードモード（熱負荷大）で稼働した場合の状態を表す説明図。Explanatory drawing showing the state at the time of operating the constant temperature maintenance apparatus of this invention by load mode (heat load large). 本発明の恒温維持装置をロードモード（熱負荷小）で稼働した場合の状態を表す説明図。Explanatory drawing showing the state at the time of operating the constant temperature maintenance apparatus of this invention by load mode (low thermal load).

符号の説明Explanation of symbols

１ 恒温維持装置
２ 冷却器
４ 加熱器
４１ 第１温度センサ
４２ 第２温度センサ
４３ 第３温度センサ DESCRIPTION OF SYMBOLS 1 Constant temperature maintenance apparatus 2 Cooler 4 Heater 41 1st temperature sensor 42 2nd temperature sensor 43 3rd temperature sensor

Claims (8)

冷却器、加熱器および外部熱負荷装置とを接続する循環液路に熱媒体循環液を循環させて外部熱負荷装置を一定の設定温度に維持する恒温維持装置において、冷却器の入り口の循環液の温度と加熱器の出口の循環液の温度との温度差に基づいて少なくともアイドリングモードとロードモードとを含む冷却器運転モードを切り換える冷却器運転モード切替手段と、上記ロードモードにおいて冷却器の出口の循環液の温度と加熱器の設定温度との温度差が予め定められた値の指定温度差になるように冷却器の冷却能力を調整する冷却能力調整制御手段とを備えていることを特徴とする恒温維持装置。   In the constant temperature maintaining device that maintains the external heat load device at a constant set temperature by circulating the heat medium circulating fluid through the circulating fluid path connecting the cooler, the heater, and the external heat load device, the circulating fluid at the inlet of the cooler A cooler operation mode switching means for switching a cooler operation mode including at least an idling mode and a load mode based on the temperature difference between the temperature of the circulating fluid at the outlet of the heater and the temperature of the circulating fluid at the outlet of the heater; Cooling capacity adjustment control means for adjusting the cooling capacity of the cooler so that the temperature difference between the temperature of the circulating fluid and the set temperature of the heater becomes a specified temperature difference of a predetermined value. A constant temperature maintenance device. 上記冷却器運転モード切替手段は、冷却器の冷凍サイクル中に組み込まれた圧縮機を駆動するインバータの周波数によって冷却能力を調整するインバータ周波数による冷却能力調整手段を備えていることを特徴とする請求項１記載の恒温維持装置。   The cooler operation mode switching means includes a cooling capacity adjusting means based on an inverter frequency for adjusting a cooling capacity according to a frequency of an inverter that drives a compressor incorporated in a refrigerating cycle of the cooler. Item 2. The constant temperature maintenance device according to Item 1. 上記冷却能力調整制御手段における指定温度差は冷却器の出口の循環液の温度が加熱器の設定温度より予め定められた温度だけ低くなるように設定されていることを特徴とする請求項１記載の恒温維持装置。   The specified temperature difference in the cooling capacity adjustment control means is set so that the temperature of the circulating fluid at the outlet of the cooler is lower than the set temperature of the heater by a predetermined temperature. Constant temperature maintenance device. 上記冷却能力調整制御手段は冷却器の冷凍サイクル中に組み込まれた電子膨張弁の弁開度によって冷却能力を調整する電子膨張弁による冷却能力調整手段を備えていることを特徴とする請求項１または３記載の恒温維持装置。   2. The cooling capacity adjustment control means comprises cooling capacity adjustment means using an electronic expansion valve that adjusts the cooling capacity according to the opening degree of an electronic expansion valve incorporated in the refrigeration cycle of the cooler. Or the constant temperature maintenance apparatus of 3. 上記電子膨張弁による冷却能力調整手段は冷却器の出口の循環液の温度によるフィードバック制御機能を備えていることを特徴とする請求項４記載の恒温維持装置。   5. The constant temperature maintaining device according to claim 4, wherein the cooling capacity adjusting means using the electronic expansion valve has a feedback control function based on the temperature of the circulating fluid at the outlet of the cooler. 上記フィードバック制御機能は冷却器の出口の循環液の温度を予め定められた複数の温度帯に区分し、各温度帯に応じて冷却器の冷却能力を調整するように構成されていることを特徴とする請求項５記載の恒温維持装置。    The feedback control function is configured to divide the temperature of the circulating fluid at the outlet of the cooler into a plurality of predetermined temperature zones and adjust the cooling capacity of the cooler according to each temperature zone. The constant temperature maintenance device according to claim 5. 上記加熱器は、該加熱器の出口の循環液の温度によるフィードバック制御機能を備えていることを特徴とする請求項１記載の恒温維持装置。     The constant temperature maintenance device according to claim 1, wherein the heater has a feedback control function based on the temperature of the circulating fluid at the outlet of the heater. 上記フィードバック制御機能がＰＩＤ制御機能であることを特徴とする請求項７記載の恒温維持装置。   The constant temperature maintaining device according to claim 7, wherein the feedback control function is a PID control function.
JP2005110439A 2005-04-07 2005-04-07 Constant temperature maintenance device. Expired - Fee Related JP4566052B2 (en)

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