JP4562114B2 - Manufacturing method of stationary stage of turbo molecular pump - Google Patents

Manufacturing method of stationary stage of turbo molecular pump Download PDF

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Publication number
JP4562114B2
JP4562114B2 JP2002235414A JP2002235414A JP4562114B2 JP 4562114 B2 JP4562114 B2 JP 4562114B2 JP 2002235414 A JP2002235414 A JP 2002235414A JP 2002235414 A JP2002235414 A JP 2002235414A JP 4562114 B2 JP4562114 B2 JP 4562114B2
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Japan
Prior art keywords
stationary blade
molecular pump
blade stage
stationary
cylindrical portion
Prior art date
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Expired - Fee Related
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JP2002235414A
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JP2004076623A (en
Inventor
昌司 井口
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Osaka Vacuum Ltd
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Osaka Vacuum Ltd
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Priority to JP2002235414A priority Critical patent/JP4562114B2/en
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/54—Fluid-guiding means, e.g. diffusers
    • F04D29/541—Specially adapted for elastic fluid pumps
    • F04D29/542—Bladed diffusers

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)

Description

【０００１】
【発明の属する技術分野】
本発明は、ターボ分子ポンプの静翼段の製造方法に関する。
【０００２】
【従来の技術】
ターボ分子ポンプは分子流領域において気体の排気を行なう高真空ポンプである。
【０００３】
図３に従来のターボ分子ポンプの縦断面図の一例を示した。
【０００４】
即ち、ターボ分子ポンプは、ローターａの外周部に多数の動翼ｂを外向きの放射状に突出させて形成した動翼段Ｍ１、Ｍ２、…と、ケーシングｃの内周部に多数の静翼ｄを内向きの放射状に多数突出させて形成した静翼段Ｓ１、Ｓ２、…とを交互に多段に有している。
【０００５】
前記静翼段Ｓ１の詳細な構造の一例を図４に示した。
【０００６】
従来の静翼段Ｓ１は、薄板円板にプレスの切り起し加工を行なって形成した放射状の静翼ｄを多数有しており、該薄板円板の外周部には平坦な鍔部ｅが形成されている。
【０００７】
従来のターボ分子ポンプでは、スペーサリングを兼ねる押さえリングｆ１、ｆ２によりこの鍔部ｅを上下から挟持して、前記静翼段Ｓ１をケーシングｃに係着するようにしていた。
【０００８】
尚、スペーサリングとは動翼段の翼部の外周を覆うように環状に形成された静翼段と動翼段との間隔を適切に配置するためのリングであり、該スペーサリングの内周と前記動翼段の翼部の外周との間には僅少の隙間を有して、前記動翼段が該スペーサリング内を自在に回動できるように形成されている。
【０００９】
【発明が解決しようとする課題】
前記の静翼段の如く、静翼ｄ及び鍔部ｅが押さえリングｆ１、ｆ２を介してケーシングｃに係着している従来の構造は、静翼ｄからケーシングｃへの熱伝達率が低いという問題があった。
【００１０】
このため、高流量排気時には、翼部で発生する熱が冷却されずに翼部の昇温をもたらし、内部部品、特にローターａの過熱による故障の発生原因になるという問題があった。
【００１１】
本発明は上記の問題点を解消し、ターボ分子ポンプにおいて、冷却性能が良く製造コストの低い静翼段の製造方法を提供することを目的とする。
【００１２】
【課題を解決するための手段】
本発明は上記の目的を達成すべく円板状部と該円板状部の外周に形成した第１円筒状部と該円板状部の内周に形成した第２円筒状部とからなり、該第２円筒状部を前記第１円筒状部より短かく形成すると共に、前記円板状部を前記第２円筒状部の短かさに相当する厚さよりも小さい厚さの薄板により形成した静翼段の中間工程部材を形成し、該中間工程部材における外周の第１円筒状部と内周の第２円筒状部との間の前記円板状部にプレスの切り起し加工を行なって該円板状部に多数の静翼を放射状に形成して静翼段を得るようにした。
【００１３】
【発明の実施の形態】
本発明の一実施の形態を図１及び図２により説明する。
【００１４】
図１は、本発明のターボ分子ポンプの静翼段の製造工程における中間工程部材１の縦断面図を示す。
【００１５】
該中間工程部材１は、外周部に形成された短い第１円筒状部即ちスペーサリング１ａと、該スペーサリング１ａの内周部に形成された薄板状の円板状部１ｂと、該円板状部１ｂの内周部に形成された短い第２円筒状部１ｃとからなり、これは鋼又はアルミニウム合金等の金属素材から旋盤加工等により一体に削り出されて形成されている。ここで、前記第２円筒状部１ｃを前記第１円筒状部１ａより短かく形成すると共に、前記円板状部１ｂを、該第２円筒状部１ｃの短かさに相当する厚さよりも小さい厚さの薄板により形成した。
【００１６】
然る後に該中間工程部材１の円板状部１ｂにプレスの切り起し加工を施工して、多数の静翼１ｂａを放射状に形成し、該中間工程部材１の中心を通る直径線に沿って該中間工程部材１を２分割して、図２に示す２つの半月形からなる静翼段２を形成した。
【００１７】
尚、前記プレスの切り起し加工とは、前記円板状部１ｂにプレスにてスリット１ｂｃを多数打ち抜くと共に該スリット１ｂｃの左右の板状部を一様に前後に捩り曲げて静翼１ｂａに形成する加工法である。
【００１８】
次に本実施の形態によって製造された静翼段２の使用方法及びその効果について説明する。
【００１９】
ターボ分子ポンプを組立てる際には、多数の動翼段を有するローターを軸受箱部に回動自在に軸支して取付け、次いで前記各動翼段の間に静翼段を取付ける。
【００２０】
このとき、前記静翼段２は２つ割れとなっているので、各動翼段の間に上下又は左右からこれら半月形の静翼段２を割り込ませて、相対する該半月形を互いに突き合せて１つの段の静翼段２を形成させ、更に相隣る静翼段２の各々のスペーサリング１ａの側縁部を逐次当接させて多段に形成し、これらスペーサリング１ａの外側からケーシング（図示せず）をこれらスペーサリング１ａと接するように被せて、ターボ分子ポンプを組立てていく。
【００２１】
このように本実施の形態では、静翼段２を構成する静翼１ｂａとスペーサリング１ａとが一体に形成されているので熱伝導性がよく、更に該スペーサリング１ａが外側のケーシングに直接に接していて熱伝達率も高いので、翼部が異常に昇温したり、又はローターの過熱のため故障を発生したりするということがない。
【００２２】
又、静翼段２の製造工程において、前記円板状部１ｂの全周にわたってプレスによる静翼の切り起し加工を行うと、第２円筒状部１ｃを有していないと円板状部１ｂの内周部に切り起し加工に伴う歪みの発生があるので、該円板状部１ｂの内周に該円板状部１ｂよりも厚い第２円筒状部１ｃを有することにより歪みの発生を防止できる。
【００２３】
尚、本実施の形態はターボ分子ポンプの場合について説明したが、これはターボ分子ポンプ部とねじ溝ポンプ部とを有する複合分子ポンプにおいても同様に実施してよい。又、本実施の形態では静翼段の中間工程部材１の内周部に第２円筒状部１ｃを有する構造としたが、この第２円筒状部を有しない中間工程部材を使用するようにしてもよい。
【００２４】
或いは又、中間工程部材１の円板状部１ｂに多数の静翼１ｂａを切り起し加工後、前記第２円筒状部１ｃを切り落して静翼段に形成してもよい。
【００２５】
【発明の効果】
このように本発明によれば、翼部から外側のケーシング部への熱伝達率が向上するので、翼部が異常に昇温したり、又はローターの過熱のために故障が発生したりすることのないようなターボ分子ポンプの静翼段の製造方法を提供できる効果を有しており、又、静翼段の翼部はプレスによる切り起し加工としたため、製造コストが大幅に低減する効果を有する。
【図面の簡単な説明】
【図１】本発明の一実施の形態の静翼段の中間工程部材の縦断面図である。
【図２】前記静翼段の完成品の正面図である。
【図３】従来のターボ分子ポンプの一例を示す縦断面図である。
【図４】従来のターボ分子ポンプの静翼段の詳細を示す一部縦断面図である。
【符号の説明】
１ 静翼段の中間工程部材
１ａ、１ｃ 円筒部材
１ｂ 円板状部
１ｂａ 静翼
２ 静翼段[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a method of manufacturing a stationary blade stage of a turbo molecular pump.
[0002]
[Prior art]
The turbo molecular pump is a high vacuum pump that exhausts gas in the molecular flow region.
[0003]
FIG. 3 shows an example of a longitudinal sectional view of a conventional turbo molecular pump.
[0004]
That is, the turbo-molecular pump has a plurality of blades M1, M2,... Formed by projecting a large number of moving blades b radially outward on the outer periphery of the rotor a, and a large number of stationary blades on the inner periphery of the casing c. The stationary blade stages S1, S2,... formed by projecting a large number of d radially inward are alternately provided in multiple stages.
[0005]
An example of the detailed structure of the stationary blade stage S1 is shown in FIG.
[0006]
The conventional stationary blade stage S1 has a large number of radial stationary blades d formed by cutting and raising a thin disk, and a flat flange e is formed on the outer periphery of the thin disk. Is formed.
[0007]
In the conventional turbo molecular pump, the flange portion e is sandwiched from above and below by holding rings f1 and f2 that also serve as spacer rings, and the stationary blade stage S1 is engaged with the casing c.
[0008]
The spacer ring is a ring for appropriately arranging the space between the stationary blade stage and the moving blade stage formed in an annular shape so as to cover the outer periphery of the blade part of the moving blade stage. And the outer periphery of the blade portion of the blade stage are formed with a small gap so that the blade stage can freely rotate in the spacer ring.
[0009]
[Problems to be solved by the invention]
The conventional structure in which the stationary blade d and the flange portion e are engaged with the casing c via the holding rings f1 and f2 as in the stationary blade stage has a low heat transfer coefficient from the stationary blade d to the casing c. There was a problem.
[0010]
For this reason, at the time of high-flow exhaust, there is a problem that heat generated in the blade portion is not cooled and the temperature of the blade portion is raised, which causes a failure due to overheating of internal components, particularly the rotor a.
[0011]
An object of the present invention is to solve the above-described problems and to provide a method for manufacturing a stationary blade stage having a good cooling performance and a low manufacturing cost in a turbo molecular pump.
[0012]
[Means for Solving the Problems]
From the present invention and the second cylindrical portion formed on the inner periphery of the first cylindrical portion and the circular plate-shaped portion formed on the outer periphery of the disc-shaped portion in order to achieve the above object and circular plate-shaped portion Do Ri, the second cylindrical portion as well as shorter form than the first cylindrical portion, the small thickness of the sheet than the thickness corresponding to the disk-like portion to shortness of the second cylindrical portion an intermediate step member of the formed Shizutsubasadan formed, cut-and-raised working of the press in the disc-shaped portion between the first cylindrical portion and the inner second cylindrical portion of the outer periphery of the intermediate step member To obtain a stationary blade stage by forming a large number of stationary blades radially on the disk-shaped portion.
[0013]
DETAILED DESCRIPTION OF THE INVENTION
An embodiment of the present invention will be described with reference to FIGS.
[0014]
FIG. 1 shows a longitudinal sectional view of an intermediate process member 1 in a manufacturing process of a stationary blade stage of a turbo molecular pump of the present invention.
[0015]
The intermediate process member 1 includes a short first cylindrical portion formed on an outer peripheral portion, that is, a spacer ring 1a, a thin disc-like portion 1b formed on an inner peripheral portion of the spacer ring 1a, and the disc It consists of a short second cylindrical portion 1c formed on the inner peripheral portion of the shape portion 1b, which is formed by being integrally cut from a metal material such as steel or aluminum alloy by lathe processing or the like. Here, the second cylindrical portion 1c is formed shorter than the first cylindrical portion 1a, and the disk-like portion 1b is smaller than the thickness corresponding to the shortness of the second cylindrical portion 1c. It was formed by a thin plate having a thickness.
[0016]
Thereafter, the disk-like portion 1b of the intermediate process member 1 is subjected to press cutting and raising processing so that a large number of stationary blades 1ba are formed radially, along the diameter line passing through the center of the intermediate process member 1. Thus, the intermediate process member 1 was divided into two parts to form a stationary blade stage 2 having two half-moon shapes shown in FIG.
[0017]
The pressing and raising process of the press means punching a large number of slits 1bc into the disc-like portion 1b with a press and twisting the left and right plate-like portions of the slit 1bc back and forth uniformly to the stationary blade 1ba. It is a processing method to form.
[0018]
Next, the usage method and effect of the stationary blade stage 2 manufactured according to the present embodiment will be described.
[0019]
When assembling the turbo molecular pump, a rotor having a large number of blade stages is pivotally supported on a bearing box, and then a stationary blade stage is installed between the blade stages.
[0020]
At this time, since the stationary blade stage 2 is split into two, the half-moon shaped stationary blade stages 2 are inserted between the moving blade stages from above and below or from the left and right, and the opposed half-moon shapes are pushed into each other. In combination, one stator blade stage 2 is formed, and the side edges of the spacer rings 1a of the adjacent stator blade stages 2 are successively brought into contact with each other to form multiple stages, from the outside of these spacer rings 1a. A turbo molecular pump is assembled by putting a casing (not shown) in contact with the spacer ring 1a.
[0021]
As described above, in the present embodiment, the stator blade 1ba and the spacer ring 1a constituting the stator blade stage 2 are integrally formed, so that the heat conductivity is good, and the spacer ring 1a is directly attached to the outer casing. Since they are in contact with each other and have a high heat transfer rate, the wings do not rise abnormally or fail due to overheating of the rotor.
[0022]
Further, in the manufacturing process of the stationary blade stage 2, if the stationary blade is cut and raised by pressing over the entire circumference of the disk-shaped portion 1b, the disk-shaped portion unless the second cylindrical portion 1c is provided. Since there is distortion due to cutting and raising in the inner peripheral part of 1b, distortion is caused by having the second cylindrical part 1c thicker than the disk-like part 1b on the inner circumference of the disk-like part 1b. Occurrence can be prevented.
[0023]
In addition, although this Embodiment demonstrated the case of the turbo-molecular pump, you may implement similarly in the composite molecular pump which has a turbo-molecular pump part and a thread groove pump part. Further, in this embodiment, the second cylindrical portion 1c is provided on the inner peripheral portion of the intermediate process member 1 of the stationary blade stage. However, an intermediate process member having no second cylindrical portion is used. May be.
[0024]
Alternatively, a large number of stator blades 1ba may be cut and raised in the disk-like portion 1b of the intermediate process member 1, and then the second cylindrical portion 1c may be cut off to form a stator blade stage.
[0025]
【The invention's effect】
As described above, according to the present invention, the heat transfer rate from the wing portion to the outer casing portion is improved, so that the wing portion is abnormally heated or a failure occurs due to overheating of the rotor. It has the effect of providing a method for manufacturing a stationary blade stage of a turbo molecular pump that does not have any effect, and because the blade part of the stationary blade stage is cut and raised by a press, the production cost is greatly reduced. Have
[Brief description of the drawings]
FIG. 1 is a longitudinal sectional view of an intermediate process member of a stationary blade stage according to an embodiment of the present invention.
FIG. 2 is a front view of a finished product of the stationary blade stage.
FIG. 3 is a longitudinal sectional view showing an example of a conventional turbo molecular pump.
FIG. 4 is a partial longitudinal sectional view showing details of a stationary blade stage of a conventional turbo molecular pump.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 Intermediate process member 1a of a stator blade stage, 1c Cylindrical member 1b Disk-shaped part 1ba

Claims (4)

円板状部と該円板状部の外周に形成した第１円筒状部と該円板状部の内周に形成した第２円筒状部とからなり、該第２円筒状部を前記第１円筒状部より短かく形成すると共に、前記円板状部を前記第２円筒状部の短かさに相当する厚さよりも小さい厚さの薄板により形成した静翼段の中間工程部材を形成し、該中間工程部材における外周の第１円筒状部と内周の第２円筒状部との間の前記円板状部にプレスの切り起し加工を行なって該円板状部に多数の静翼を放射状に形成して静翼段を得るターボ分子ポンプの静翼段の製造方法。 Ri Do from the disc-shaped portion and the circular plate portion second cylindrical portion formed on the inner periphery of the first cylindrical portion and the circular plate-shaped portion formed on the outer periphery of the second cylindrical portion An intermediate process member of a stationary blade stage that is formed shorter than the first cylindrical portion and the disk-shaped portion is formed by a thin plate having a thickness smaller than the thickness corresponding to the shortness of the second cylindrical portion. A large number of the disk-shaped parts are formed by pressing and raising the disk-shaped part between the first cylindrical part on the outer periphery and the second cylindrical part on the inner periphery in the intermediate process member. Of a stationary vane stage of a turbo molecular pump to obtain a stationary vane stage by forming the stationary vanes radially. 前記円板状部に多数の静翼を放射状に形成してから前記第２円筒状部を切り落して静翼段を得る請求項１に記載のターボ分子ポンプの静翼段の製造方法。  The method of manufacturing a stationary blade stage of a turbo molecular pump according to claim 1, wherein a plurality of stationary blades are radially formed on the disk-shaped portion, and then the second cylindrical portion is cut off to obtain a stationary blade stage. 前記中間工程部材は、金属素材から機械加工によって一体に成型して製造するようにした請求項１又は請求項２のいずれか１に記載のターボ分子ポンプの静翼段の製造方法。  The method for manufacturing a stationary blade stage of a turbo molecular pump according to any one of claims 1 and 2, wherein the intermediate process member is integrally formed from a metal material by machining. 前記静翼段を、中心を通る半径線に沿って２以上の複数に分割する請求項１乃至請求項３のいずれか１に記載のターボ分子ポンプの静翼段の製造方法。  The method for manufacturing a stationary blade stage of a turbo molecular pump according to any one of claims 1 to 3, wherein the stationary blade stage is divided into two or more along a radial line passing through the center.
JP2002235414A 2002-08-13 2002-08-13 Manufacturing method of stationary stage of turbo molecular pump Expired - Fee Related JP4562114B2 (en)

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JP4562114B2 true JP4562114B2 (en) 2010-10-13

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102004023961A1 (en) * 2004-05-14 2005-12-01 Leybold Vacuum Gmbh Process for the preparation of a turbomolecular pump stator stage
JP2006090231A (en) * 2004-09-24 2006-04-06 Boc Edwards Kk Method for manufacturing fixed blade of turbo molecular pump and vacuum pump
JP2007309245A (en) * 2006-05-19 2007-11-29 Boc Edwards Kk Vacuum pump
JP5397138B2 (en) * 2009-10-02 2014-01-22 株式会社島津製作所 Turbo molecular pump

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