JP4560626B2 - Ultrasonic guide unit - Google Patents

Description

  The present invention relates to a machine guide element, and in particular, to a linear motion guide.

Conventionally, sliding and rolling guide elements have been used as machine guide elements, but in recent ultra-precision processing machines and measuring machines, ultra-high resolution positioning and high motion accuracy are required. Air static pressure guidance has come to be widely used.
This static air pressure guide has advantages such as high motion accuracy and no friction, but it is low in rigidity and vibration damping, and requires an air source such as a compressor. There was a problem that it was difficult to apply.
As a guide element that does not require an air source, there is a dynamic pressure guide, but its performance tends to depend on a moving speed, a rotational speed, etc., and it is not so popular as an air guide.
On the other hand, it is known that when the opposing surfaces are vibrated at a high frequency, the air pressure between them increases, and an air film (squeeze air film) is generated, and a precision positioning device as shown in JP-A-2003-83326 is proposed. Has been.

However, in this structure proposed in the conventional publication, since the table is merely placed so as to ride over the rail, there is a problem that the rigidity as a bearing is low, and it contributes most to levitating the table. Is considered to be an air film generated in the vicinity of the anti-node position at the time of vibration in the rail, it cannot be said that an air film for floating the table on the rail is efficiently generated.
JP 2003-83326 A

  Therefore, the present invention is characterized in that an air film is formed by propagating ultrasonic vibrations in a direction perpendicular to 90 degrees by the Poisson effect phenomenon of the horn, and the air film at that time can be generated efficiently. Furthermore, an object of the present invention is to provide an ultrasonic guide unit that can increase the guide rigidity easily and inexpensively.

In order to achieve the above object, in the ultrasonic guide unit of the present invention, in the first aspect of the present invention , at least one overhanging portion is formed at the node position at the time of vibration, and the rod-shaped is horizontally installed. has a horn, and the slider is an object that can be moved in the axial direction of the horn circumferential surface of the overhung portion as a guide surface, and an ultrasonic transducer which is connected and fixed to at least one end face of the horn, the The overhanging portion has an outer dimension in which the circumferential surface becomes an antinode position during vibration , and applies ultrasonic vibration of the ultrasonic vibrator as a longitudinal wave from the end surface of the horn to the axial direction thereof, and the Poisson of the horn Due to the effect phenomenon, the propagation direction of the ultrasonic vibration is propagated in the direction of the peripheral surface of the horn overhang 90 degrees perpendicular to the axial direction of the horn, and an air film is formed between the overhang and the slider. formed projecting portion of the horn the slider and the non-close Wherein the floated state.
In the ultrasonic guide unit configured as described above, an air film is formed by propagating ultrasonic vibrations in a direction perpendicular to 90 degrees due to the Poisson effect phenomenon of the horn. Therefore, the slider , which is an object on the horn , is levitated by the air film. In addition, since the ultrasonic transducer is not provided on the lower side of the horn, it can be compactly formed in the vertical direction.

In particular, in the ultrasonic guide unit configured as described above, the entire rod-shaped horn is not used as a guide surface, but the peripheral surface thereof is an antinode position at the time of vibration at a portion corresponding to a node position at the time of vibration. Since the peripheral surface of the projecting portion of the outer dimension is used as the guide surface of the slider, it faces the slider at the place where the vibration amplitude is the largest. In addition, since the remaining portions do not face each other close to each other, the vibration of the ultrasonic vibrator can be efficiently generated as an air film on the guide surface without causing interference due to strange distortion or the like .

According to a second aspect of the present invention, a horn formed in a rod shape, a pair of ultrasonic transducers that are coupled and fixed to both ends of the horn in the axial direction, and vibrate the horn in the axial direction in synchronization with each other, and the horn And a projecting portion provided along a plane orthogonal to the axis of the horn, and the horn is connected to the pair of ultrasonic transducers. vibration is Poisson effect phenomenon caused by Te by to propagate ultrasonic vibration to the peripheral surface of the projecting portion, the air between the slider is peripheral surface and the support of the overhanging portion by ultrasonic vibration By forming a film, the slider is supported in a non-contact state with respect to the horn and movably in the axial direction of the horn .
In the ultrasonic guide unit having the above configuration, the transmission direction of ultrasonic vibration is converted with respect to the excitation direction by the Poisson effect phenomenon of the horn, and an air film is formed by the converted ultrasonic vibration. On the other hand , the slider which is a to-be-supported body can be supported without contact. Moreover, instead of simply using the entire horn as a guide surface, the peripheral surface of the overhanging portion whose outer surface is the antinode position at the time of vibration at the portion corresponding to the node position during vibration is the slider surface. Since it is a guide surface, the portion with the largest vibration amplitude in the horn faces the slider. Moreover, since the remaining portion of the horn does not face the slider in close proximity, the vibration of the ultrasonic vibrator is efficiently generated as an air film on the guide surface without causing interference due to strange distortion or the like. be able to. Furthermore, since the ultrasonic vibration from a pair of ultrasonic vibrators sandwiching the rod-shaped horn from both sides in the axial direction is synchronously applied to one horn, the vibration is synthesized and a larger vibration amplitude is given, The guide rigidity can be further increased. Further, since the ultrasonic transducer is not provided on the outer side in the radial direction with respect to the axis of the horn, the ultrasonic guide unit can be compactly formed in the direction orthogonal to the axis. The cross-sectional shape of the rod-shaped horn is not limited.

According to a third aspect of the present invention, in the first or second aspect of the present invention, the slider surrounds the protruding portion with a minute clearance .
In the ultrasonic guide unit having the above arrangement, since the slider surrounds with a small clearance the projecting portion, has, it is possible to increase the guiding rigidity.

According to a fourth aspect of the present invention, in the third aspect of the present invention, the overhang portion and the slide are formed in a non-rotating shape around the axis of the horn.
In the ultrasonic guide unit having the above configuration, the slider is loosely fitted with a small clearance on the non-circular shaped overhanging portion, so that a non-rotating structure for the slider horn is not separately provided. The moving direction of the slider can be restricted to one degree of freedom along the axial direction of the horn.

Moreover, in invention of Claim 5 or Claim 6, in the invention of any one of Claims 1-4 , the said horn has a full length about 1/2 wavelength of an excitation wavelength. , One overhang is formed at the center, or has a total length of about one wavelength of the excitation wavelength, and two overhangs are formed on the axis or It is characterized in that it is horizontally installed by supporting and fixing the vicinity of the part corresponding to the node position during vibration on the axis extension.
The ultrasonic guide unit having the above configuration can secure a stable guide surface and can be installed in a state in which the ultrasonic vibration of the ultrasonic vibrator is not inhibited as much as possible. As a compact and practical ultrasonic guide unit Can be provided.

Furthermore, in the invention according to claim 7 or claim 8, in the invention according to any one of claims 1 to 4 , the projecting portion has a quadrangular cross-sectional shape, and its outline dimension is It is the distance from the axis to the corner or the distance from the axis to the side, and is about ¼ wavelength of the excitation wavelength.
In the ultrasonic guide unit configured as described above, a strong air film is generated by obtaining the maximum vibration amplitude between the four inner corners of the slider or the center of the four sides, and high guide rigidity. Can be obtained.

Further, the invention of claim 9 or 1 0, wherein, in the invention of claim 5 or claim 6, wherein said slider, or has a width of about twice the width of the protruding portion, the protruding It has at least a width corresponding to ½ wavelength of the width of the portion + excitation wavelength.
In the ultrasonic guide unit having the above-described configuration, the overhanging portion and the slider are reliably opposed to each other with corresponding width dimensions, so that a certain guide rigidity can be provided within the lateral movement range of the slider.

Further, in the invention of claim 1 1 or claim 1 2, wherein, in the invention according to any one of claims 1 to 10, wherein the ultrasonic transducer has a plurality mounting, all synchronously driven In addition to this, the ultrasonic transducer is connected and fixed to each of the multi-branched end faces of the vibration synthesizer connected and fixed to the end face of the horn.
In the ultrasonic guide unit having the above configuration, since the ultrasonic vibration from each ultrasonic vibrator is vibrated to one horn, the vibrations are synthesized, a larger vibration amplitude is given, and the guide rigidity is further increased. Can be increased.

  As described above, according to the present invention, an air film can be formed by propagating ultrasonic vibrations in a direction perpendicular to 90 degrees by the Poisson effect phenomenon of the horn, and the air film at that time can be efficiently generated. Further, it is possible to provide an ultrasonic guide unit that can increase the guide rigidity easily and inexpensively.

  The best mode for carrying out the present invention will be described.

Hereinafter, an ultrasonic guide unit according to the present invention will be described with reference to FIGS.
10 is a rod-shaped horn, 20 is a slider, 30 is an ultrasonic transducer, 40 is a stay, 50 is a base, and the horn 10 has two enlarged diameter portions 11 as overhangs, The slider 20 surrounds the enlarged diameter portion 11 and can move left and right with the peripheral surface of the enlarged diameter portion 11 as a guide surface. The ultrasonic transducer 30 is connected and fixed to both end faces 15 of the horn 10, and the diameter enlarged portion 11 of the horn 10 is connected and fixed to the base 50 via the stay 40 to constitute the ultrasonic guide unit 1. This is used by being installed horizontally on the base 60.

  The horn 10 has a total length of about one wavelength of ultrasonic vibration applied to the horn 10 from the ultrasonic transducer 30, and from a portion corresponding to a node position at the time of vibration, in other words, from both the left and right end faces 15. The diameter-enlarged portion 11 is formed with an appropriate width on the left and right sides, for example, a width dimension Wh of a little less than 1/4 wavelength, centering on a position corresponding to about 1/4 wavelength. The diameter-enlarged portion 11 has a quadrangular longitudinal cross-sectional shape, and its outer peripheral surface is an antinode position during vibration, that is, from the axis C of the horn 10 to the square-shaped corner 12 that is the diameter-enlarged portion 11. The distance dimension is set to about 1/4 wavelength. For this reason, the portions other than the diameter-enlarging portion 11 are cylindrical with a circular cross-sectional shape, and as a whole, as shown in FIG. 4, a cylindrical body having a wide rectangular flange portion at two locations, a square iron array It looks like this. Note that one side of the stay 40 is screwed to the fastening portion 13 that is thinned by striking a portion closer to the axis C of the enlarged diameter portion 11, and the other side is screwed to the base 50 to be integrated with the base 60. It can be installed horizontally. The horn 10 is grasped as an amplifying member for ultrasonic vibration in a narrow sense, but is grasped as a vibration transmitting member in a broad sense. That is, the horn 10 may be a member that propagates ultrasonic vibration.

  The slider 20 straddles the two enlarged diameter portions 11 and has a width Ws that is wider than the width Wh + 1/2 wavelength of the enlarged diameter portion 11 and is also enlarged when moved left and right. The dimensional relationship is such that it does not deviate from 11, and the diameter-enlarged portion 11 is surrounded with a minute clearance so that it can move left and right on the horn 10.

  The clearance between the enlarged diameter portion 11 of the horn 10 and the slider 20 has a great influence on the rigidity as a guide element, so it is preferable that the clearance is narrow. However, the horn 10 can be narrow and highly accurate with the method shown in FIGS. The slider 20 that can surround the ten enlarged diameter portions 11 can be manufactured. That is, with respect to the vertical direction, as shown in FIG. 5, the upper and lower surfaces of the slider piece 21 as the left and right members of the slider 20 are ground simultaneously with the diameter enlarged portion 11 of the horn 10 to the same height. As shown in FIG. 6, a spacer 23 having a known thickness such as a washer may be sandwiched between the slider piece 22 as the upper and lower members and assembled. Further, with respect to the left and right direction, a slightly counterbore hole is made in the slider piece 22 which is an upper and lower member, a spacer 24 such as a sickness tape is sandwiched and assembled, and then the spacer 24 is removed.

 The material of the horn 10 and the slider 20 is not necessarily limited to a metal material, but is preferably a light and rigid material that does not attenuate ultrasonic vibration. The ultrasonic transducer 30 is not limited to this, but is commercially available as a “bolt-clamped Langevin transducer” in which two washer-shaped piezo elements are stacked and unitized with bolts. Is preferred. The ultrasonic transducer 30 is connected and fixed to both end faces 15 of the horn 10 with bolts, and receives vibration from a power supply circuit having a conventionally known transmitter (not shown) to generate vibration in the ultrasonic region. The vibration is vibrated from the end face 15 in the axial direction of the horn 10. The horn 10 also functions as a vibration direction changer described later, and the propagation direction of the ultrasonic vibration is 90 degrees perpendicular to the axial direction of the horn. Propagates in the direction of the circumferential surface of the horn.

  In the ultrasonic guide unit 1 of the above embodiment, a slider is formed on the peripheral surface of the enlarged diameter portion 11 formed at the node position when the rod-shaped horn 10 is vibrated, instead of using a mere rod-shaped horn as a guide surface. There are 20 guide surfaces. This is because the dimension length on the axis is about 1/4 wavelength from the end face 15 of the horn 10 and the position is about 1/4 wavelength in the direction 90 degrees perpendicular to the axis. This is the outer peripheral surface of the enlarged diameter portion 11, and as a result, the guide surface, which is the peripheral surface of the enlarged diameter portion 11, becomes a vibration antinode position, and is the location with the largest vibration amplitude. Further, the diameter enlarged portion 11 has a corresponding width dimension Wh, and the surface facing the slider in the vicinity thereof is a portion of the width dimension Wh of the diameter enlarged portion 11. The largest part of is facing the center close to each other. On the contrary, since the remaining portion does not face closely, the interference of the ultrasonic transducer does not occur in the remaining portion, and the vibration of the ultrasonic vibrator is efficiently squeezed on the guide surface. Can be generated as.

  The slider 20 surrounds the enlarged diameter portion 11 with a minute clearance so that the slider 20 can move left and right on the horn 10 with the peripheral surface of the enlarged diameter portion 11 as a guide surface, and is wider than the width of the enlarged diameter portion 11. It has a dimension Ws. As the width dimension, when there is one diameter enlarged portion on the horn, the width is about twice the width of the diameter enlarged portion, and when there are two diameter enlarged portions, the width Wh of the diameter enlarged portion 11 + the excitation wavelength. It is desirable to have at least a width corresponding to ½ wavelength. By adopting such a configuration, the enlarged-diameter portion 11 and the slider 20 are reliably opposed to each other with corresponding width dimensions, and can have a certain guide rigidity within the slider's lateral movement range.

  Therefore, in such an ultrasonic guide unit 1, if the left and right ultrasonic transducers 30 are driven in synchronization, the vibration of the ultrasonic transducer 30 is transmitted from both end faces 15 of the horn 10 to the horn 10 in the axial direction. Propagates as longitudinal vibration. At this time, since the total length of the horn 10 is about one wavelength of the vibration excited by the ultrasonic transducer 30, a standing wave as shown in FIG. That is, when the ultrasonic wave is considered as a longitudinal wave here, the ultrasonic wave transmitted through the inside of the horn 10 has a wavelength λ determined by the frequency f and the speed of sound C and periodically increases and decreases. Here, λ = C / f [λ is the wavelength (m), C is the velocity of the longitudinal wave propagating in the solid (horn) (m / s), and f is the ultrasonic frequency (Hz)].

  In this case, the amplitude of the displacement becomes maximum at both end faces 15 of the horn 10, and becomes minimum at a distance of λ / 4 inward from there and further becomes maximum again at a distance of λ / 4. In contrast to this displacement, the stress is minimum at both end faces 15 and maximum at a distance of λ / 4 therefrom. In general, a portion where the vibration amplitude is maximum is called an antinode, and a portion where the vibration amplitude is minimum is called a node. This is because the vibration amplitude is zero at the position of λ / 4 from the both end faces 15 on the axis of the horn 10, so that the fastening portion 13 that is thinned by sitting inside the enlarged diameter portion 11 that is as close as possible to the portion is provided. If supported, the ultrasonic transducer 30 can be installed in a state that does not hinder the ultrasonic vibration as much as possible. Since the oscillation frequency of the power supply circuit is usually adjusted to some extent, the excitation wavelength is naturally a value having a width, and the ultrasonic transducer 30 is driven by the ambient temperature or long-time driving. Since the horn 10 also generates heat, expands, etc., each dimension such as the total length of the horn is not strictly determined in one point. It is desirable to make the final manufacture after confirming the dimensions that can truly provide the maximum amplitude. In this sense, it should be understood that the dimension based on the excitation wavelength is a dimension having a certain extent and a “degree”.

  Here, it will be described with reference to FIG. 7 that the longitudinal vibration in the axial direction of the horn 10 can be converted into a direction perpendicular to 90 degrees. If the compressive load P is applied to the vibration direction change body 70 from the right direction as shown in FIG. 7A, the horizontal length of the vibration direction change body 70 is shortened. At this time, since the material of the vibration direction change body 70 tries to keep the volume constant due to the Poisson effect, it becomes longer in the vertical direction. On the contrary, when the tensile load S is applied as shown in FIG. 7B, the length in the horizontal direction becomes large, but it contracts in the vertical direction. In other words, the vibration direction can be converted by 90 degrees by this operation. At this time, if the distance from the vibration surface 71 to the fixed point Z in the figure and the distance from the fixed point Z to the guide surface 72 are set to be ¼ wavelength of the vibration, the vibration surface 71 and the guide The surface 72 becomes the antinode position of the vibration amplitude, and the vibration can be efficiently transmitted from the excitation surface 71 to the guide surface 72.

  Accordingly, the distance from the both end surfaces 15 of the horn 10 to the left and right sides of the horn 10 about a quarter wavelength and the distance from the axis to the corner 12 of the diameter-enlarged portion 11 having a quadrangular section is also ¼ wavelength. When formed with a size of about a minute, the vibration of the ultrasonic transducer 30 has a maximum amplitude at the four corners 12 of the enlarged diameter portion 11. This leads to generation of a squeeze air film around the four corners on the inside of the slider 20, and the slider 20 separates so as to float on the outer peripheral surface of the enlarged diameter portion 11 of the horn 10, and the lower surface of the outer periphery. Since the same separation also occurs on the outer peripheral left and right surfaces, the contact with the enlarged diameter portion 11 is brought into a non-contact state and functions as a linear guide having the outer peripheral surface of the enlarged diameter portion 11 as a guide surface.

According to the ultrasonic guide unit of the above-described embodiment, the horn 10 and the ultrasonic transducer 30 have no movable part and no bending part and have high rigidity, and the slider 20 also has a closed closed structure having a square shape. Since the slider 20 is restrained except for one degree of freedom in the linear motion direction, and the clearance can be made constant, the squeeze air pressure is increased by increasing the vibration amplitude and the guide rigidity is improved. It becomes possible to make it. Therefore, the ultrasonic vibration of the ultrasonic transducer 30 can be efficiently transmitted to the surface where the slider 20 faces the horn 10, that is, the outer peripheral surface of the diameter enlarged portion 11, and a larger squeezed air film is generated. The slider 20 can be floated between the clearances, and can be provided as a highly rigid guide element. Further, since the ultrasonic transducer 30 is connected and fixed to the end face 15 of the horn 10, it is a compact unit in the vertical direction.
Needless to say, the slider is moved linearly by applying a non-contact stress in the lateral direction to the slider that is flying, and the workpiece on the slider is suspended in the flying state or suspended after moving. Of course, measurement, processing, etc. are performed.

  In the above embodiment, the enlarged diameter portion has a quadrangular longitudinal cross-sectional shape. However, the present invention is not limited to this, and may be a polygon such as a triangle as another embodiment. It can also be circular. If it is a polygon, it is difficult to obtain the processing accuracy of the clearance between the slider, and if it is a circle, there is a degree of freedom around the axis of the horn, and a separate anti-rotation mechanism is required. It can be said that a rectangular shape is most desirable above. In the above embodiment, the entire length of the horn is about 1 wavelength, and two enlarged diameter portions are formed. For example, as shown in FIG. 8, the entire length of the horn is about 1/2 wavelength. As a dimension, one enlarged diameter portion 11 may be formed at the center, and the ultrasonic transducer 30 may be connected and fixed only to one end face 15. Further, in the above-described embodiment, the diameter enlarged portion has a quadrangular longitudinal section, and the distance dimension from the horn axis C to the square corner 12 that is the diameter enlarged portion is configured to be about 1/4 wavelength. However, the distance L from the axis C to the side may be configured to have a dimension of about ¼ wavelength. In this case, the vibration amplitude becomes maximum at the center of each slider piece on the upper, lower, left and right sides of the slider, and a squeezed air film corresponding to the vibration amplitude is generated and floats to increase the guide rigidity.

  As another embodiment, as shown in FIG. 9 and FIG. 10, a vibration synthesizer 80 that branches into four at a distance corresponding to a quarter wavelength in the horizontal crossing direction is formed. The acoustic transducer 30 is connected and fixed to each other, the remaining end face is connected and fixed to the end face 15 on one or both sides of the horn 10, and the support portion 81 near the branch center point in the vibration synthesizer 80 is connected and fixed to the stay 41. It may be supported on a base or base. In this case, the diameter-enlarged portion 11 on the horn 10 does not need to sit down in order to attach the stay, and the stay 41 is attached by the support portion 81 of the vibration synthesizer 80, so the position is closest to the node position at the time of vibration. It becomes possible to support and fix, and it is least likely to inhibit the propagation of ultrasonic vibration. Although not shown, only in order to adopt this support and fixing method, the horn has a total length of about two wavelengths, and two diameter enlarged portions are formed on the left and right sides of each quarter wavelength from the center. Only the same support portion as that in the vibration synthesizer may be formed and supported and fixed at a position of a quarter wavelength inside each. From this point, in the present invention, the enlarged diameter portion is formed at an odd multiple of 1/4 wavelength from the end face of the horn, including the case where the first and last formations are omitted. Should be understood.

  In a specific example according to an embodiment of the present invention, an aluminum alloy called duralumin 17S is formed into a rod shape having two diameter enlarged portions having a total length of 120 mm, a cylindrical portion having a diameter of 31 mm, and a cross-sectional square having a side of 53 mm. The ultrasonic guide unit having the same structure as shown in FIGS. 1 to 4 was produced. Other dimensions are designed so that the total length is 120 mm, the width of the enlarged diameter part is 22 mm, the width of the slider is 130 mm, and the clearance between the horn and the slider is 10 μm in the vertical and horizontal directions. Formed using. Further, as an ultrasonic vibrator, a “bolt-clamped Langevin vibrator (HEC-3039P4B)” manufactured by Honda Electronics Co., Ltd. was used, and it was driven at a frequency of 38.5 to 40.5 kHz.

A reference block gauge for measurement or a reflective tape was attached to the slider of the ultrasonic guide unit thus manufactured, and the displacement in the vertical direction and the horizontal direction was measured with an optical fiber displacement meter. When the direction was 39.6 kHz, the outer peripheral surface of the enlarged diameter portion had the largest amplitude, and the amplitudes at that time were 2.473 μm and 2.043 μm.
In addition, when the vibration was performed at 39.7 kHz where the amplitude in the vertical direction was maximum and the flying slider was linearly moved by 20 mm, the error between the peaks in the vertical direction was 1.572 μm. Furthermore, the guide rigidity was 1.0975 N / μm in the vertical direction and 0.2651 N / μm in the left and right direction, and it was confirmed that the performance can be improved as compared with the conventional structure.

The front view which shows a part of ultrasonic guide unit of one Embodiment of this invention as a cross section. The longitudinal cross-sectional view in the diameter expansion part of the ultrasonic guide unit of FIG. FIG. 2 is a transverse cross-sectional view showing only the horn of the ultrasonic guide unit of FIG. The perspective view which takes out and shows only the horn of the ultrasonic guide unit of FIG. The longitudinal cross-sectional view which shows the state at the time of processing simultaneously the diameter expansion part of the horn of the ultrasonic guide unit of FIG. 1, and the slider piece which is a left-right member. The longitudinal cross-sectional view which shows the state at the time of assembling the slider surrounding the horn of the ultrasonic guide unit of FIG. The schematic explanatory drawing which shows a mode that a vibration direction is converted 90 degree | times. The front view which shows a part of ultrasonic guide unit which is other embodiment as a cross section. Furthermore, the front view which shows a part of ultrasonic guide unit which is other embodiment as a cross section. The top view which takes out and shows the vibration synthesizer and ultrasonic transducer | vibrator of the ultrasonic guide unit of FIG.

Explanation of symbols

1 Ultrasonic guide unit 10 Horn 11 Diameter enlarged part (overhang part)
12 Square 13 Fastening portion 15 End face 20 Slider 21 Slider piece 22 as left and right members Slider piece 23 as upper and lower members Spacer 24 Spacer 30 Ultrasonic vibrator 40 Stay 41 Stay 50 Base 60 Base 70 Vibration direction change body 71 Excitation surface 72 Guide surface 80 Vibration synthesizer 81 Support section C Distance dimension P to side of horn axis L Compressive load S Tensile load Wh Width dimension Ws of enlarged diameter part Slider width dimension Z Fixed point

Claims (12)

A rod-shaped horn that forms at least one overhang at the node position during vibration and is horizontally installed , and an object that can move in the axial direction of the horn using the circumferential surface of the overhang as a guide surface A slider and an ultrasonic transducer coupled and fixed to at least one end face of the horn , and the overhanging portion has an outer dimension in which a circumferential surface thereof becomes an antinode position during vibration, and the ultrasonic wave The ultrasonic vibration of the vibrator is applied as a longitudinal wave in the axial direction from the end face of the horn, and the propagation direction of the ultrasonic vibration is 90 degrees perpendicular to the axial direction of the horn due to the Poisson effect phenomenon of the horn. An ultrasonic wave propagating in a circumferential direction of a portion , forming an air film between the overhanging portion and the slider, and floating the slider in a non-contact state with the overhanging portion of the horn Guide unit. A rod-shaped horn;
A pair of ultrasonic transducers that are coupled and fixed to both ends in the axial direction of the horn and that vibrate the horn in the axial direction in synchronization with each other ;
An overhang portion provided at a node position of the excitation vibration by the ultrasonic vibrator in the horn, and projecting along a plane perpendicular to the axis of the horn;
Have
Ultrasonic vibration is propagated to the peripheral surface side of the overhanging portion by the Poisson effect phenomenon generated when the horn is vibrated by the pair of ultrasonic vibrators, and the ultrasonic vibration causes the peripheral surface of the overhanging portion to By forming an air film between the slider, which is a supported body, the slider is supported in a non-contact state with respect to the horn and movable in the axial direction of the horn. Sonic guide unit. The ultrasonic guide unit according to claim 1, wherein the slider surrounds the protruding portion with a minute clearance . 4. The ultrasonic guide unit according to claim 3, wherein the projecting portion and the slider are formed in a shape that prevents rotation around the axis of the horn . The horn has a total length of about ½ wavelength of the excitation wavelength, and has one overhang portion formed in the center thereof, and is a node at the time of excitation on the axis or on the axis extension. The ultrasonic guide unit according to any one of claims 1 to 4, wherein the ultrasonic guide unit is installed horizontally by supporting and fixing the vicinity of a portion corresponding to the position . The horn has a total length of about one wavelength of the excitation wavelength, has two overhangs, and corresponds to a node position at the time of excitation on its axis or on its axis extension The ultrasonic guide unit according to any one of claims 1 to 4, wherein the ultrasonic guide unit is horizontally installed by being connected and fixed to a base while supporting the vicinity . The projecting portion has a quadrangular cross-sectional shape, and its outer dimension is a distance from an axis to its corner and is about a quarter wavelength of an excitation wavelength. Item 5. The ultrasonic guide unit according to any one of Items 4 . The projecting portion has a quadrangular cross-sectional shape, and its outer dimension is a distance from the axis to its side, which is about 1/4 wavelength of the excitation wavelength. Item 5. The ultrasonic guide unit according to any one of Items 4 . The ultrasonic guide unit according to claim 5, wherein the slider has a width that is approximately twice the width of the overhanging portion . The ultrasonic guide unit according to claim 6, wherein the slider has at least a width corresponding to a width of the overhanging portion + a half wavelength of an excitation wavelength . The ultrasonic guide unit according to any one of claims 1 to 10, wherein a plurality of the ultrasonic transducers are attached and driven in synchronization with each other . The ultrasonic guide unit according to claim 11, wherein the ultrasonic transducer is connected and fixed to each end face of the vibration synthesizer connected and fixed to the end face of the horn .

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