JP4559377B2 - X-ray generator - Google Patents

X-ray generator Download PDF

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JP4559377B2
JP4559377B2 JP2006080661A JP2006080661A JP4559377B2 JP 4559377 B2 JP4559377 B2 JP 4559377B2 JP 2006080661 A JP2006080661 A JP 2006080661A JP 2006080661 A JP2006080661 A JP 2006080661A JP 4559377 B2 JP4559377 B2 JP 4559377B2
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heat
ray generator
conducting member
heat conducting
ray
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JP2007257995A (en
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敬一郎 山本
隆司 株本
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Ishida Co Ltd
Job Corp
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Ishida Co Ltd
Job Corp
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Description

本発明はX線発生装置に関し、詳しくは食料品や医薬品などの被検査物中の異物を検出する非破壊検査に用いられるX線発生装置に関する。   The present invention relates to an X-ray generation device, and more particularly to an X-ray generation device used for nondestructive inspection for detecting foreign matter in an object to be inspected such as food and medicine.

食料品や医薬品などの製造ラインにおいては、製品中の異物の有無について連続的な全品検査が実施されており、その手段としてX線を用いた非破壊の検査が行われている。この検査は、X線発生装置から放射されたX線を被検査物に照射して、その透過量を画像処理することにより異物を検出するものである。   In a production line for foodstuffs and pharmaceuticals, continuous inspection of all products is performed for the presence or absence of foreign substances in the product, and non-destructive inspection using X-rays is performed as the means. In this inspection, X-rays radiated from the X-ray generator are irradiated onto an object to be inspected, and foreign matter is detected by image processing the amount of transmission.

このX線発生装置は、図5に示すように、X線管球20と絶縁油21を収納し、上面にフィン状の伝熱器22と放熱器23を有する封入容器24から主に構成され、封入容器24全体を収納する金属製の筐体25を備えている。   As shown in FIG. 5, the X-ray generator mainly includes an X-ray tube 20 and an insulating oil 21, and is mainly composed of a sealed container 24 having a fin-like heat transfer device 22 and a heat radiator 23 on the upper surface. In addition, a metal casing 25 that houses the entire enclosure 24 is provided.

上記のX線発生装置においては、X線管球20の固定アノード電極26とカソード電極27間に高電圧を印加することによりX線28を外部へ放射するが、このときX線管球20に供給されたエネルギーの99%以上は熱に変化してしまう。そのため、X線管球20で発生した熱を絶縁油21と伝熱器22を介して放熱器23へ伝達し、筐体25に取り付けられた空冷ファン29により外部へ放熱するという冷却方法が取られている。   In the above X-ray generator, X-rays 28 are radiated to the outside by applying a high voltage between the fixed anode electrode 26 and the cathode electrode 27 of the X-ray tube 20. More than 99% of the supplied energy is converted into heat. Therefore, a cooling method is adopted in which the heat generated in the X-ray tube 20 is transmitted to the radiator 23 via the insulating oil 21 and the heat transfer device 22 and is radiated to the outside by the air cooling fan 29 attached to the housing 25. It has been.

ここで、最近の食料品や医薬品の製造ラインにおいては、主に防塵対策の観点から、冷却ファン29のない密封構造のX線発生装置の採用が要望されている。   Here, in recent food and pharmaceutical production lines, it has been demanded to adopt an X-ray generator having a sealed structure without a cooling fan 29 mainly from the viewpoint of dust-proof measures.

しかし、従来のX線発生装置では、上記のように主として絶縁油21の対流現象により熱伝達を行っているため冷却効率に限界があり、冷却ファン29の設置は必須のものとされていた。   However, in the conventional X-ray generator, since the heat transfer is performed mainly by the convection phenomenon of the insulating oil 21 as described above, the cooling efficiency is limited, and the installation of the cooling fan 29 is indispensable.

この冷却効率の改善については、固定アノード電極を電気絶縁性の熱伝導部材を介して封入容器内面に連結することにより冷却効率を改善する発明が特許文献1に開示されている。しかし、封入容器に伝達された熱は絶縁油にも伝わってその温度を上昇させてしまうため、冷却効率の改善効果は小さく、依然として冷却ファンが必要であり密封型のX線発生装置を提供することは困難であるという問題があった。
特許第3168760号
Regarding the improvement of the cooling efficiency, Patent Document 1 discloses an invention in which the cooling efficiency is improved by connecting the fixed anode electrode to the inner surface of the enclosure via an electrically insulating heat conducting member. However, since the heat transferred to the sealed container is also transferred to the insulating oil and raises its temperature, the effect of improving the cooling efficiency is small, and a cooling fan is still required and a sealed X-ray generator is provided. There was a problem that it was difficult.
Japanese Patent No. 3168760

本発明は、このような問題点に鑑みてなされたものであり、冷却効率が高く、冷却ファンが不要な密封構造のX線発生装置を提供することを目的とするものである。   The present invention has been made in view of such problems, and an object of the present invention is to provide an X-ray generator having a sealed structure that has high cooling efficiency and does not require a cooling fan.

上記の目的を達成するため、請求項1に記載の本発明は、カソード電極と固定アノード電極とが対向して配置されたX線管球と、前記X線管球が浸漬する絶縁油と、前記X線管球と前記絶縁油とを収納する金属製の封入容器とからなるX線発生装置であって、前記固定アノード電極の端部に前記封容器を貫通して外部へ突出する第1の熱伝導部材を接続し、前記封入容器と前記第1の熱伝導部材との間に熱絶縁体を設けたことを特徴とするX線発生装置である。   In order to achieve the above object, the present invention according to claim 1 includes an X-ray tube in which a cathode electrode and a fixed anode electrode are arranged to face each other, an insulating oil in which the X-ray tube is immersed, An X-ray generator comprising a metal enclosure containing the X-ray tube and the insulating oil, wherein the first anode protrudes outside through the sealed container at an end of the fixed anode electrode. The X-ray generator is characterized in that a heat insulator is connected and a thermal insulator is provided between the enclosure and the first heat conductive member.

請求項2に記載の本発明は、前記第1の熱伝導部材は、窒化アルミニウム、ベリリア、炭化珪素又はアルミナのいずれか1つであることを特徴とする請求項1に記載のX線発生装置である。   According to a second aspect of the present invention, in the X-ray generator according to the first aspect, the first heat conducting member is any one of aluminum nitride, beryllia, silicon carbide, or alumina. It is.

請求項3に記載の本発明は、前記第1の熱伝導部材の前記絶縁油と接触する表面は、熱絶縁性物質により覆われていることを特徴とする請求項1又は2に記載のX線発生装置である。   According to a third aspect of the present invention, the surface of the first heat conducting member that contacts the insulating oil is covered with a heat insulating material. It is a line generator.

請求項4に記載の本発明は、前記X線発生装置は前記封入容器を収納する筐体を備え、前記第1の熱伝導部材を第2の熱伝導部材を介して前記筐体の内面と接続したことを特徴とする請求項1乃至3のいずれか1項に記載のX線発生装置である。   According to a fourth aspect of the present invention, the X-ray generator includes a housing that houses the enclosure, and the first heat conducting member is connected to an inner surface of the housing via a second heat conducting member. The X-ray generator according to any one of claims 1 to 3, wherein the X-ray generator is connected.

請求項5に記載の本発明は、前記第2の熱伝導部材は、銅、アルミニウム又はヒートパイプのいずれか1つであることを特徴とする請求項4に記載のX線発生装置である。   The present invention according to claim 5 is the X-ray generator according to claim 4, wherein the second heat conducting member is any one of copper, aluminum, and a heat pipe.

本発明によれば、X線管球の固定アノード電極に、封入容器を貫通して外部へ突出する第1の熱伝導部材を接続し、貫通部との間に熱絶縁体を設けたことにより、X線管球に発生する熱の冷却効率を向上させることができ、冷却ファンが不要な密封構造のX線発生装置を提供することができる。   According to the present invention, the first heat conducting member that protrudes outside through the enclosure is connected to the fixed anode electrode of the X-ray tube, and the thermal insulator is provided between the through portion. The cooling efficiency of the heat generated in the X-ray tube can be improved, and an X-ray generator having a sealed structure that does not require a cooling fan can be provided.

また、上記第1の熱伝導部材を第2の熱伝導部材を介して、封入容器全体を収納する筐体と接続したことにより、冷却効率を更に向上させることができる。   In addition, the cooling efficiency can be further improved by connecting the first heat conducting member to the housing that houses the entire sealed container via the second heat conducting member.

以下に、本発明に係るX線発生装置について、図面を参照して説明する。   The X-ray generator according to the present invention will be described below with reference to the drawings.

本発明の第1実施形態に係るX線発生装置を図1に示す。図1は、X線発生装置の構造を断面図である。   An X-ray generator according to the first embodiment of the present invention is shown in FIG. FIG. 1 is a cross-sectional view of the structure of the X-ray generator.

このX線発生装置は、X線管球1と絶縁油2を収納し、上面にフィン状の伝熱器3と放熱器4を有する金属製の封入容器5から主に構成されている。   This X-ray generator mainly includes an X-ray tube 1 and an insulating oil 2 and a metal enclosure 5 having a fin-like heat transfer device 3 and a heat radiator 4 on the upper surface.

X線管球1は、真空ガラス内に封入され対向配置された固定アノード電極7とカソード電極8を備え、それらの間に高電圧発生装置(図示せず)により高電圧を印加して、カソード電極8からの熱電子を固定アノード電極7に衝突させることにより外部へX線9を放射する。   The X-ray tube 1 is provided with a fixed anode electrode 7 and a cathode electrode 8 which are enclosed in a vacuum glass and arranged opposite to each other, and a high voltage is applied between them by a high voltage generator (not shown) to X-rays 9 are radiated to the outside by causing the thermoelectrons from the electrode 8 to collide with the fixed anode electrode 7.

絶縁油2は、封入容器5内に充填されており、X線9の放射に伴い発熱するX線管球1を冷却するとともに、固定アノード電極7とカソード電極8の間、及びそれら両極と封入容器5の間を絶縁する役目を有している。   The insulating oil 2 is filled in a sealed container 5, cools the X-ray tube 1 that generates heat due to the radiation of the X-ray 9, encloses between the fixed anode electrode 7 and the cathode electrode 8, and both the electrodes. It serves to insulate between the containers 5.

そして、X線管球1の固定アノード電極7には、封入容器5を貫通して外部へ突出する第1の熱伝導部材10が接続されており、それら両者の間には熱絶縁体11が設けられている。この熱絶縁体11には、例えばプラスチック材料であるポリブチレンテレフタレートや、セラミックス系材料などを用いることができる。   The fixed anode electrode 7 of the X-ray tube 1 is connected to a first heat conducting member 10 that penetrates the enclosure 5 and protrudes to the outside, and a thermal insulator 11 is interposed between them. Is provided. For this thermal insulator 11, for example, polybutylene terephthalate, which is a plastic material, or a ceramic material can be used.

この第1の熱伝導部材10は、固定アノード電極7に接続するため高い電気絶縁性を有する必要があり、例えば窒化アルミニウム、ベリリア、炭化珪素又はアルミナなどを用いることができるが、取り扱いの容易さと熱伝導度の高さから窒化アルミニウムを使用することが好ましい。   The first heat conducting member 10 needs to have high electrical insulation properties in order to be connected to the fixed anode electrode 7. For example, aluminum nitride, beryllia, silicon carbide, or alumina can be used. It is preferable to use aluminum nitride because of its high thermal conductivity.

また、冷却効率を高める観点から、第1の熱伝導部材10の形状は、外部に突出する部分の表面積が大きくなるように、図1に示すように、長手方向の断面がT字状になるようにすることが望ましい。   Further, from the viewpoint of increasing the cooling efficiency, the shape of the first heat conducting member 10 has a T-shaped longitudinal section as shown in FIG. 1 so that the surface area of the portion protruding to the outside is increased. It is desirable to do so.

このような構成においては、X線管球1からのX線9の発生に伴い固定アノード電極7に生じた熱は、第1の熱伝導部材10を通じて封入容器5の外部へ直接的に導かれることにより放熱される。このとき、第1の熱伝導部材10と封入容器5との間には、熱絶縁体11が設けられているため、貫通部分からの絶縁油2の漏洩と、固定アノード電極7からの熱が封入容器5を介して絶縁油2に伝わることを防ぐことができる。   In such a configuration, the heat generated in the fixed anode electrode 7 with the generation of X-rays 9 from the X-ray tube 1 is directly guided to the outside of the enclosure 5 through the first heat conducting member 10. To dissipate heat. At this time, since the thermal insulator 11 is provided between the first heat conducting member 10 and the enclosure 5, the leakage of the insulating oil 2 from the through portion and the heat from the fixed anode electrode 7 are generated. Transmission to the insulating oil 2 through the enclosure 5 can be prevented.

従って、固定アノード電極7の熱を効率よく封入容器5外へ放熱することができるため、冷却効率を大幅に向上させ、かつ絶縁油の温度上昇を抑えることができる。   Therefore, since the heat of the fixed anode electrode 7 can be efficiently radiated to the outside of the enclosure 5, the cooling efficiency can be greatly improved and the temperature rise of the insulating oil can be suppressed.

また、第1の熱伝導部材10と絶縁油2が直接接触する部分から、固定アノード電極7の熱が絶縁油2に局所的に伝わり、絶縁油2の温度が上昇することを防ぐために、図2に示すように、接触部分を熱絶縁性部材12により覆うことが好ましい。   Further, in order to prevent the heat of the fixed anode electrode 7 from being locally transmitted to the insulating oil 2 from the portion where the first heat conducting member 10 and the insulating oil 2 are in direct contact, the temperature of the insulating oil 2 is prevented from rising. As shown in FIG. 2, it is preferable to cover the contact portion with a heat insulating member 12.

この熱絶縁部材12の材料は熱絶縁体11と同じでよく、電気絶縁性を高めるために、図2に示すような波形の断面形状にして沿面距離を長くすることが望ましい。   The material of the thermal insulating member 12 may be the same as that of the thermal insulator 11, and it is desirable to increase the creepage distance by making the corrugated cross-sectional shape as shown in FIG.

このような構成により、冷却効率をより向上させることができる。また、絶縁油2の局所的な温度上昇を抑えることができるため、その耐久性を高めることができるとともに、封入容器5内の熱平衡を均一にしてX線9の安定発生を担保することも可能である。   With such a configuration, the cooling efficiency can be further improved. Moreover, since the local temperature rise of the insulating oil 2 can be suppressed, its durability can be enhanced, and it is also possible to ensure the stable generation of the X-ray 9 by making the thermal equilibrium in the enclosure 5 uniform. It is.

本発明の第2実施形態に係るX線発生装置を図3に示す。図3は、X線発生装置の構造を断面図であり、図1と共通する部分には同一の符号を付して説明を省略する。   An X-ray generator according to the second embodiment of the present invention is shown in FIG. FIG. 3 is a cross-sectional view of the structure of the X-ray generator, and the same reference numerals are given to portions common to FIG. 1 and description thereof is omitted.

本X線発生装置は封入容器5全体を収納する金属製の筐体6を備えており、第1実施形態における第1の熱伝導部材10の外側に突出する部分を、第2の熱伝導部材13を介して筐体6の内面と接続したものである。   The X-ray generator includes a metal housing 6 that houses the entire enclosure 5, and a portion that protrudes outside the first heat conducting member 10 in the first embodiment is a second heat conducting member. 13 is connected to the inner surface of the housing 6 via 13.

この第2の熱伝導部材13には電気絶縁性は必要ないため、例えば銅、アルミニウムなどの極めて高い熱伝導度を有する材料を用いることができる。なお、第2の熱伝導部材13と、第1の熱伝導部材10及び筐体6内面との接合は、溶接又は機械的な固定のいずれでもよい。   Since the second heat conducting member 13 does not require electrical insulation, a material having an extremely high thermal conductivity such as copper or aluminum can be used. The second heat conducting member 13, the first heat conducting member 10 and the inner surface of the housing 6 may be joined by welding or mechanical fixing.

このような構成においては、固定アノード電極7に生じた熱は、第1の熱伝導部材10と第2の熱伝導部材13を介して、表面積の大きな筐体6へ伝えられることにより外部へ放熱される。   In such a configuration, the heat generated in the fixed anode electrode 7 is transferred to the casing 6 having a large surface area through the first heat conducting member 10 and the second heat conducting member 13 to dissipate heat to the outside. Is done.

従って、第1実施形態の場合よりも冷却効率を更に向上させることができる。   Therefore, the cooling efficiency can be further improved as compared with the case of the first embodiment.

また、第2の熱伝導部材13として、図4に示すように、ヒートパイプ14を用いることもできる。ここで、ヒートパイプ14とは、液体の蒸発と凝縮の潜熱を利用して熱伝達を行う装置を意味する。ヒートパイプ14と、第1の熱伝導部材10及び筐体6内面との接合は、直接的に機械的手段などで固定するか、あるいはヒートブロック等を介して固定してもよい。   Moreover, as the 2nd heat conductive member 13, the heat pipe 14 can also be used as shown in FIG. Here, the heat pipe 14 means a device that performs heat transfer using latent heat of liquid evaporation and condensation. The joining of the heat pipe 14 to the first heat conducting member 10 and the inner surface of the housing 6 may be directly fixed by mechanical means or may be fixed through a heat block or the like.

このような構成により、冷却効率を一層向上できるとともに、ヒートパイプ14自体が小型で設備スペースを取らず、しかも安価であるため、X線発生装置全体の小型化及び低コスト化をも図ることが可能となる。   With such a configuration, the cooling efficiency can be further improved, and the heat pipe 14 itself is small in size, does not take up equipment space, and is inexpensive, so that the entire X-ray generator can be reduced in size and cost. It becomes possible.

なお、以上の実施形態における第1及び第2の熱伝導部材の形状、大きさ及び配置などについては、X線発生装置の性能や使用環境により適宜設計変更されるものであり、図面に示す例に限定されるものではない。   In addition, about the shape of the 1st and 2nd heat conductive member in the above embodiment, a magnitude | size, arrangement | positioning, etc., it changes suitably according to the performance and use environment of an X-ray generator, and the example shown in drawing It is not limited to.

本発明の第1実施形態に係るX線発生装置の断面図である。It is sectional drawing of the X-ray generator which concerns on 1st Embodiment of this invention. 第1実施形態において熱絶縁性部材を設置したX線発生装置の断面図である。It is sectional drawing of the X-ray generator which installed the heat insulating member in 1st Embodiment. 本発明の第2実施形態に係るX線発生装置の断面図である。It is sectional drawing of the X-ray generator which concerns on 2nd Embodiment of this invention. 第2実施形態においてヒートパイプを用いたX線発生装置の断面図である。It is sectional drawing of the X-ray generator which used the heat pipe in 2nd Embodiment. 従来のX線発生装置の断面図である。It is sectional drawing of the conventional X-ray generator.

符号の説明Explanation of symbols

1 X線管球 2 絶縁油 3 伝熱器
4 放熱器 5 封入容器 6 筐体
7 固定アノード電極8 カソード電極 9 X線
10 第1の熱伝導部材 11 熱絶縁体12 熱絶縁性部材
13 第2の熱伝導部材 14 ヒートパイプ

DESCRIPTION OF SYMBOLS 1 X-ray tube 2 Insulating oil 3 Heat exchanger 4 Radiator 5 Enclosed container 6 Case 7 Fixed anode electrode 8 Cathode electrode 9 X-ray 10 First heat conduction member 11 Thermal insulator 12 Thermal insulation member
13 Second heat conduction member 14 Heat pipe

Claims (5)

カソード電極と固定アノード電極とが対向して配置されたX線管球と、前記X線管球が浸漬する絶縁油と、前記X線管球と前記絶縁油とを収納する金属製の封入容器とからなるX線発生装置であって、前記固定アノード電極の端部に前記封入容器を貫通して外部へ突出する第1の熱伝導部材を接続し、前記封入容器と前記第1の熱伝導部材との間に熱絶縁体を設けたことを特徴とするX線発生装置。 An X-ray tube in which a cathode electrode and a fixed anode electrode are arranged to face each other, an insulating oil in which the X-ray tube is immersed, and a metal enclosure containing the X-ray tube and the insulating oil A first heat conduction member that penetrates the enclosure and protrudes to the outside at an end of the fixed anode electrode, and the enclosure and the first heat conduction An X-ray generator characterized in that a thermal insulator is provided between the members. 前記第1の熱伝導部材は、窒化アルミニウム、ベリリア、炭化珪素又はアルミナのいずれか1つであることを特徴とする請求項1に記載のX線発生装置。 The X-ray generator according to claim 1, wherein the first heat conducting member is any one of aluminum nitride, beryllia, silicon carbide, or alumina. 前記第1の熱伝導部材の前記絶縁油と接触する表面は、熱絶縁性物質により覆われていることを特徴とする請求項1又は2に記載のX線発生装置。 The X-ray generator according to claim 1, wherein a surface of the first heat conducting member that contacts the insulating oil is covered with a heat insulating material. 前記X線発生装置は前記封入容器を収納する筐体を備え、前記第1の熱伝導部材を第2の熱伝導部材を介して前記筐体の内面と接続したことを特徴とする請求項1、2又は3に記載のX線発生装置。 2. The X-ray generator includes a housing that houses the enclosure, and the first heat conducting member is connected to an inner surface of the housing through a second heat conducting member. 2. The X-ray generator according to 2 or 3. 前記第2の熱伝導部材は、銅、アルミニウム又はヒートパイプのいずれか1つであることを特徴とする請求項4に記載のX線発生装置。 The X-ray generator according to claim 4, wherein the second heat conducting member is any one of copper, aluminum, and a heat pipe.
JP2006080661A 2006-03-23 2006-03-23 X-ray generator Expired - Fee Related JP4559377B2 (en)

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JP5194261B2 (en) * 2008-01-28 2013-05-08 株式会社日立メディコ X-ray tube device
JP5911283B2 (en) * 2011-12-09 2016-04-27 キヤノン株式会社 Radiation generator
CN115410882A (en) * 2021-05-28 2022-11-29 上海超群检测科技股份有限公司 X-ray source insulation heat dissipation device and manufacturing method thereof

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JPH06251735A (en) * 1993-02-26 1994-09-09 Shimadzu Corp Fixed anode x-ray tube device
JP2003036806A (en) * 2001-07-19 2003-02-07 Hitachi Medical Corp Fixed anode type x-ray tube device and said manufacturing method
JP2003515877A (en) * 1999-11-24 2003-05-07 シーメンス アクチエンゲゼルシヤフト X-ray irradiator with forced cooling rotary anode
JP2005512288A (en) * 2001-12-04 2005-04-28 エックス−レイ オプティカル システムズ インコーポレーテッド X-ray source assembly with improved output stability and application of its fluid stream analysis

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JPH06251735A (en) * 1993-02-26 1994-09-09 Shimadzu Corp Fixed anode x-ray tube device
JP2003515877A (en) * 1999-11-24 2003-05-07 シーメンス アクチエンゲゼルシヤフト X-ray irradiator with forced cooling rotary anode
JP2003036806A (en) * 2001-07-19 2003-02-07 Hitachi Medical Corp Fixed anode type x-ray tube device and said manufacturing method
JP2005512288A (en) * 2001-12-04 2005-04-28 エックス−レイ オプティカル システムズ インコーポレーテッド X-ray source assembly with improved output stability and application of its fluid stream analysis

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