JP4518254B2 - A grindstone that prevents the side-associated air layer from entering the outer peripheral grinding surface - Google Patents

A grindstone that prevents the side-associated air layer from entering the outer peripheral grinding surface Download PDF

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JP4518254B2
JP4518254B2 JP2004315218A JP2004315218A JP4518254B2 JP 4518254 B2 JP4518254 B2 JP 4518254B2 JP 2004315218 A JP2004315218 A JP 2004315218A JP 2004315218 A JP2004315218 A JP 2004315218A JP 4518254 B2 JP4518254 B2 JP 4518254B2
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grindstone
grinding
outer peripheral
core
air layer
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JP2006123094A (en
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浩 森田
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JTEKT Corp
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Description

本発明は、砥石により工作物を研削する研削盤において、研削点にクーラントを良好に供給できるようにした砥石に関するものである。    The present invention relates to a grindstone capable of satisfactorily supplying coolant to a grinding point in a grinder that grinds a workpiece with a grindstone.

従来、高速で回転する砥石により工作物を研削加工する研削盤において、砥石に連れ回りする空気層を遮断して研削点にクーラントを確実に供給するために、特許文献1に記載されているように、クーランの圧力を高圧にし、ノズルからクーランントを砥石が工作物を研削加工する研削点に高速で供給する高圧クーラント方式、ノズルの噴出口を砥石の外周面に直角に対向させ、クーラントを砥石外周面に直角に噴き付ける直角ノズル方式が行われている。
特開2004−66411号公報(第1頁、図7,8)
Conventionally, in a grinding machine that grinds a workpiece with a grindstone that rotates at a high speed, as described in Patent Document 1, a coolant is reliably supplied to a grinding point by blocking an air layer that rotates around the grindstone. In addition, the pressure of the coolant is increased and the coolant is supplied from the nozzle to the grinding point where the grinding wheel grinds the workpiece at high speed. A right angle nozzle method is used in which the outer surface is sprayed at a right angle.
JP 2004-66411 A (first page, FIGS. 7 and 8)

高速で回転する砥石により工作物を研削加工する円筒研削盤、カム研削盤などにおいては、使用する砥石の幅は工作物の幅に応じて決められている。例えば、カム研削盤の場合、研削加工されるカムの幅より両側に2mm程度広くなるように砥石幅を決めている。   In a cylindrical grinder, a cam grinder, or the like that grinds a workpiece with a grindstone that rotates at high speed, the width of the grindstone to be used is determined according to the width of the workpiece. For example, in the case of a cam grinder, the grindstone width is determined to be about 2 mm wider on both sides than the width of the cam to be ground.

回転する砥石の外周研削面に連れ回りする空気層の流れは、砥石の側面に連れ回りされて中心部から外周に向けて砥石の側面に沿って流れる側面随伴空気層の一部が外周研削面に伝わって流速が速くなり、クーラントの研削点への到達を阻害していることを発明者は見出した。特に、研削能率を上げるために砥石周速を120m/sec以上の高速にした場合、外周研削面の砥石幅方向両端部では、砥石側面からの空気層の流れが大きく伝わり、クーラントが研削点に到達することが困難となり、研削量が多くなる例えばカム接線部の両端部に研削焼けが発生することがあった。   The flow of the air layer that rotates around the outer peripheral grinding surface of the rotating grinding wheel is part of the side-associated air layer that flows along the side surface of the grinding wheel from the center to the outer periphery. The inventor has found that the flow velocity is increased to prevent the coolant from reaching the grinding point. In particular, when the grinding wheel peripheral speed is increased to 120 m / sec or higher in order to increase the grinding efficiency, the flow of the air layer from the side of the grinding wheel is greatly transmitted at both ends of the grinding wheel width direction on the outer peripheral grinding surface, and the coolant is transferred to the grinding point. For example, grinding burn may occur at both ends of the tangential portion of the cam where it becomes difficult to reach and the amount of grinding increases.

砥石の外周研削面に連れ回りする空気層をクーラントで遮断し、クーラントを外周研削面に巻き付けて研削点に導く直角ノズル方式では、砥石幅が薄くなる程、砥石側面からの空気層の流れの影響が大きくなり、クーラントが外周研削面に巻き付き難くなって研削点に到達することが困難となる。また、高圧クーラント方式では、高い圧力で研削点にクーラントを供給するため、クーラント供給量が多くなり、高圧ポンプやクーラントタンクが大型化して設備コストが高くなり、クーラント消費量、使用電力等が多くなり維持管理コストがアップする不具合があった。   The right angle nozzle system that shuts off the air layer that rotates around the grinding surface of the grinding wheel with coolant, wraps the coolant around the grinding surface of the grinding wheel, and leads it to the grinding point, the smaller the grinding wheel width, the more the air layer flows from the side of the grinding wheel. The influence becomes large, and it becomes difficult for the coolant to wrap around the outer peripheral grinding surface and to reach the grinding point. In the high-pressure coolant system, the coolant is supplied to the grinding point at a high pressure, which increases the amount of coolant supplied, increases the size of the high-pressure pump and coolant tank, increases the equipment cost, and increases the amount of coolant consumption and power consumption. There was a problem that the maintenance cost increased.

本発明は、かかる従来の不具合を解消するためになされたもので、高速回転する砥石の側面に連れ回りする砥石側面随伴空気層が外周研削面に回り込むことを防止して研削点にクーラントを確実に供給することである。   The present invention has been made to solve such a conventional problem, and prevents the air surface accompanying the side surface of the grindstone rotating around the side surface of the grindstone rotating at high speed from flowing into the outer peripheral grinding surface, thereby ensuring the coolant at the grinding point. Is to supply.

上記課題を解決するため、請求項1に記載の発明の構成上の特徴は、砥石台に回転可能に支承された砥石と工作物支持装置に支持された工作物とを相対移動させて前記工作物を前記砥石により研削点にクーラントを供給しながら研削加工する研削盤に装着される砥石において、
前記砥石は、
円盤状の砥石コアと、
前記砥石コアの外周面に接着され外周研削面を形成する複数の砥石チップと、
前記砥石コアの外周面のうち前記砥石チップの幅方向両外側において、全周に亙って前記砥石コアの径方向外方に突設され、前記砥石コアの側面に連れ回りする側面随伴空気層が前記外周研削面に回り込むのを遮断する遮断壁と、
を備えることである。
In order to solve the above-mentioned problem, the structural feature of the invention described in claim 1 is that the work is carried out by relatively moving a grindstone rotatably supported on a grindstone table and a work piece supported by a work piece supporting device. In a grindstone mounted on a grinding machine that grinds an object while supplying coolant to the grinding point by the grindstone,
The grindstone is
A disc-shaped grinding wheel core ,
A plurality of grindstone chips bonded to the outer circumferential surface of the grindstone core to form an outer circumferential grinding surface ;
A side-associated air layer that protrudes radially outward of the grindstone core over the entire circumference on both outer sides in the width direction of the grindstone chip on the outer circumferential surface of the grindstone core, and rotates with the side surface of the grindstone core A blocking wall for blocking the wrap around the outer peripheral grinding surface ;
It is to provide.

請求項2に係る発明の構成上の特徴は、請求項1において、前記遮断壁の外径は、前記砥石チップの外径より大きく設定されていることである。
The structural feature of the invention according to claim 2 is that, in claim 1, the outer diameter of the blocking wall is set larger than the outer diameter of the grindstone tip .

請求項3に係る発明の構成上の特徴は、請求項1または2において、前記遮断壁は、当該遮断壁と前記砥石チップの間に空間が形成されるように、前記砥石チップに対して前記砥石コアの外周面の幅方向に離間していることである。
The structural feature of the invention according to claim 3 is that, in claim 1 or 2, the blocking wall is formed with respect to the grindstone chip so that a space is formed between the blocking wall and the grindstone chip. It is spaced apart in the width direction of the outer peripheral surface of the grindstone core .

上記のように構成した請求項1に係る発明においては、研削点にクーラントを供給しながら工作物を砥石により研削加工するとき、砥石コア側面に連れ回りする側面随伴空気層は、砥石コアの外周面に砥石チップの幅方向両外側で全周に亙って突設された遮断壁により外周研削面に回り込むのを遮断される。これにより、側面随伴空気層の一部が外周研削面に回り込んで外周随伴空気層の流速を速くすることがなくなり、クーラントを研削点に確実に供給することができる。    In the invention according to claim 1 configured as described above, when the workpiece is ground by the grindstone while supplying the coolant to the grinding point, the side-associated air layer that rotates around the grindstone core side surface is the outer periphery of the grindstone core. It is blocked | interrupted to the outer periphery grinding | polishing surface by the interruption | blocking wall projected over the perimeter on the surface in the width direction both sides of the grindstone chip. Thereby, a part of the side-associated air layer does not go around the outer peripheral grinding surface and increase the flow velocity of the outer peripheral-associated air layer, and the coolant can be reliably supplied to the grinding point.

以下本発明の第1の実施形態に係る側面随伴空気層が外周研削面に回り込むのを防止した砥石Gについて図1,2に基づいて説明する。砥石Gが装架された研削盤10のベッド11上には、砥石台12が摺動可能に載置され、サーボモータ13によりボールネジ機構を介してX軸方向に進退移動される。砥石台12には、先端に砥石Gが取り付けられた砥石軸14が回転可能に軸承されモータにより回転駆動される。砥石Gは鉄又はアルミニウム等の金属で成形された円盤状の砥石コア15の外周面26に複数の砥石チップ16が接着されて構成されている。複数の砥石チップ16の外周面が、工作物Wを研削加工する砥石Gの外周研削面Gaを形成する。砥石台12には砥石Gを覆う砥石カバー17が固定されている。砥石カバー17には、クーラント供給装置18のクーラントノズル19が取り付けられ、クーラントノズル19から砥石Gが工作物Wを研削加工する研削点P又は工作物Wに向けてクーラントが供給される。ベッド11上にはテーブル20が摺動可能に装架され、サーボモータ21によりボールネジ機構22を介してX軸と直角なY軸方向に移動される。テーブル20上には、工作物支持装置23を構成する主軸台及び心押台24が取り付けられ、工作物Wは主軸台と心押台24との両センタ間に挟持され回転駆動される。心押台24の砥石台12側の側面にはドレッサ28が取付けられ、サーボモータ13、21による砥石台12とテーブル20との相対移動によりドレッサ28は砥石Gの外周研削面Gaをドレッシングするようになっている。   The grindstone G that prevents the side-associated air layer according to the first embodiment of the present invention from entering the outer peripheral grinding surface will be described below with reference to FIGS. A grinding wheel base 12 is slidably mounted on the bed 11 of the grinding machine 10 on which the grinding wheel G is mounted, and is moved forward and backward in the X-axis direction by a servo motor 13 via a ball screw mechanism. A grindstone shaft 14 having a grindstone G attached to its tip is rotatably supported on the grindstone base 12 and is rotationally driven by a motor. The grindstone G is configured by adhering a plurality of grindstone chips 16 to an outer peripheral surface 26 of a disc-shaped grindstone core 15 formed of a metal such as iron or aluminum. The outer peripheral surfaces of the plurality of grindstone chips 16 form the outer peripheral grinding surface Ga of the grindstone G for grinding the workpiece W. A grindstone cover 17 that covers the grindstone G is fixed to the grindstone base 12. A coolant nozzle 19 of a coolant supply device 18 is attached to the grindstone cover 17, and coolant is supplied from the coolant nozzle 19 toward the grinding point P where the grindstone G grinds the workpiece W or the workpiece W. A table 20 is slidably mounted on the bed 11, and is moved by a servo motor 21 through a ball screw mechanism 22 in the Y-axis direction perpendicular to the X-axis. A spindle stock and a tailstock 24 constituting the workpiece support device 23 are mounted on the table 20, and the workpiece W is sandwiched between both centers of the spindle stock and the tailstock 24 and is driven to rotate. A dresser 28 is attached to the side surface of the tailstock 24 on the side of the grindstone 12, and the dresser 28 dresses the outer peripheral grinding surface Ga of the grindstone G by relative movement between the grindstone base 12 and the table 20 by the servo motors 13 and 21. It has become.

砥石チップ16が外周面26に接着された円盤状の砥石コア15の両側面15a,15bの外周縁部には、薄幅部25から外周縁に向かって幅が広くなるテーパ部が設けられ、該テーパ部により外周面26の幅が砥石チップ16の幅より広く形成されている。砥石コア15の幅は外周縁部のみ広くして軽量化が図られている。砥石コア15の外周面26には、遮断壁27が砥石チップ16の幅方向両外側で全周に亙って突設されている。なお、図2に示す遮断壁27の外径は砥石チップ16の外径より僅かに大きいが、同径或いは僅かに小さくてもよい。    On the outer peripheral edge portions of both side surfaces 15a and 15b of the disc-shaped grindstone core 15 in which the grindstone chip 16 is bonded to the outer peripheral surface 26, a taper portion that is widened from the thin width portion 25 toward the outer peripheral edge is provided. The width of the outer peripheral surface 26 is formed wider than the width of the grindstone tip 16 by the tapered portion. The width of the grindstone core 15 is widened only at the outer peripheral edge portion to reduce the weight. On the outer peripheral surface 26 of the grindstone core 15, a blocking wall 27 protrudes over the entire circumference on both outer sides in the width direction of the grindstone chip 16. The outer diameter of the blocking wall 27 shown in FIG. 2 is slightly larger than the outer diameter of the grindstone tip 16, but it may be the same diameter or slightly smaller.

上記のように構成した第1の実施形態の作動を説明する。工作物Wが主軸台と心押台24との両センタ間に挟持されて回転される。砥石台12がサーボモータ13により前進され、高速回転される砥石Gにより、例えば、砥石周速が160m/secで工作物Wが研削加工される。図3に示すような両側面31a,31bが平面である円盤状の砥石コア31の外周面に砥石コア31と同じ幅の砥石チップ32を接着した砥石Gsが、砥石周速160m/secで回転する場合、外周研削面Gaに連れ回りする空気層37の流れに、砥石コア31の両側面31a,31bに連れ回りされ砥石中心部から外周に向けて砥石コアの両側面31a,31bに沿って流れる側面随伴空気層33の一部が外周研削面Gaに伝わって流速が速くなり、外周研削面Gaに連れ回りする外周随伴空気層34の速度は、ピトー管で測定した結果、図4に示すように砥石研削面Gaの両端部分の方が中央部分よりかなり高くなる。   The operation of the first embodiment configured as described above will be described. The workpiece W is sandwiched between the center of the headstock and the tailstock 24 and rotated. The grindstone table 12 is advanced by the servo motor 13 and the workpiece W is ground by the grindstone G rotated at high speed, for example, at a grindstone peripheral speed of 160 m / sec. A grindstone Gs in which a grindstone chip 32 having the same width as the grindstone core 31 is bonded to the outer circumferential surface of a disc-shaped grindstone core 31 whose both side surfaces 31a and 31b are flat as shown in FIG. 3 rotates at a grindstone peripheral speed of 160 m / sec. In this case, the flow of the air layer 37 that rotates around the outer peripheral grinding surface Ga is rotated along the both side surfaces 31a and 31b of the grinding stone core 31 along the both side surfaces 31a and 31b of the grinding stone core from the center of the grinding stone toward the outer periphery. A part of the flowing side-associated air layer 33 is transmitted to the outer peripheral grinding surface Ga to increase the flow velocity, and the velocity of the outer peripheral air layer 34 that rotates around the outer peripheral grinding surface Ga is measured with a Pitot tube. Thus, both ends of the grindstone grinding surface Ga are considerably higher than the central portion.

本実施形態では、砥石コア15は、外周面26の幅が砥石チップ16の幅より広く形成され、外周面26に遮断壁27が砥石チップ16の幅方向両外側で全周に亙って突設されているので、該遮断壁27が側面随伴空気層33の一部が外周研削面Gaに回り込むのを遮断する。これにより、側面随伴空気層33の一部が外周研削面Gaに回り込んで外周随伴空気層34の流速を高速にすることがなくなり、クーラントノズル19から供給されるクーラントは研削点Pに確実に供給される。    In the present embodiment, the grindstone core 15 is formed such that the width of the outer peripheral surface 26 is wider than the width of the grindstone chip 16, and the blocking walls 27 protrude from the outer peripheral surface 26 over the entire circumference on both outer sides in the width direction. Therefore, the blocking wall 27 blocks a part of the side-associated air layer 33 from entering the outer peripheral grinding surface Ga. As a result, a part of the side-associated air layer 33 does not wrap around the outer peripheral grinding surface Ga to increase the flow velocity of the outer peripheral-associated air layer 34, and the coolant supplied from the coolant nozzle 19 is reliably at the grinding point P. Supplied.

次に、側面随伴空気層が外周研削面に回り込むのを防止した砥石の第1の参考例を図5に基づいて説明する。第1の参考例は、ドレッサにより砥石チップ16とともに削除される隔離層35が、砥石コア15の外周面26に砥石チップ16の幅方向両側に全周に亙って設けられた点のみが第1の実施形態と異なる。砥石コア15の外周面26に隔離層35が砥石チップ16の幅方向両側で全周に亙って設けられ、側面随伴空気層33が外周研削面Gaまで回り込んで外周随伴空気層34の流速を高くすることを開離層35により防止することができる。ドレッサ28により外周研削面Gaをドレッシングするときに、開離層35も砥石チップ16とともにドレッサにより削除されるので、開離層35がドレッサのドレッシング動作の邪魔になることはない。
Next, a first reference example of a grindstone in which the side-associated air layer is prevented from entering the outer peripheral grinding surface will be described with reference to FIG. The first reference example is that the isolation layer 35 to be removed together with the grindstone chip 16 by the dresser is provided on the outer circumferential surface 26 of the grindstone core 15 over the entire circumference on both sides in the width direction of the grindstone chip 16. Different from the first embodiment. Isolation layers 35 are provided on the outer peripheral surface 26 of the grindstone core 15 over the entire circumference on both sides in the width direction of the grindstone chip 16, and the side-associated air layer 33 wraps around to the outer peripheral grinding surface Ga and the flow velocity of the outer peripheral-associated air layer 34. Can be prevented by the release layer 35. When dressing the outer peripheral grinding surface Ga by the dresser 28, the release layer 35 is also removed by the dresser together with the grindstone tip 16, so that the release layer 35 does not interfere with the dressing operation of the dresser.

次に、側面随伴空気層33が外周研削面Gaに回り込むのを防止した砥石の第2の参考例を図6に基づいて説明する。第2の参考例は、砥石コア15の両側面15a,15bの外周縁部に薄幅部25から外周面26に向かって幅が広くなるテーパ部29が形成され、外周面26に遮断壁27、開離層35を設けず、砥石チップ16の幅方向両側にスペース36を設けた点のみが第1の実施形態および第1の参考例と異なる。砥石コア15の両側面15a,15bに連れ回りする側面随伴空気層33は、テーパ部29により砥石チップ16の外周研削面Gaから離れる方向にガイドされる。そして、側面随伴空気層33の一部が外周研削面Ga側に拡散しても砥石チップ16の幅方向両側に設けられたスペース36により外周研削面Gaまで到達することがなく、クーラントノズル19から供給されるクーラントは研削点Pに確実に供給される。
Next, a second reference example of a grindstone that prevents the side-associated air layer 33 from entering the outer peripheral grinding surface Ga will be described with reference to FIG. In the second reference example , a tapered portion 29 having a width increasing from the thin width portion 25 toward the outer peripheral surface 26 is formed on the outer peripheral edge portions of the both side surfaces 15 a and 15 b of the grindstone core 15, and the blocking wall 27 is formed on the outer peripheral surface 26. The only difference from the first embodiment and the first reference example is that the separation layer 35 is not provided and the spaces 36 are provided on both sides in the width direction of the grindstone tip 16. The side-associated air layer 33 that rotates around the both side surfaces 15 a and 15 b of the grindstone core 15 is guided by the taper portion 29 in a direction away from the outer peripheral grinding surface Ga of the grindstone chip 16. And even if a part of the side-associated air layer 33 diffuses to the outer peripheral grinding surface Ga side, the space 36 provided on both sides in the width direction of the grindstone tip 16 does not reach the outer peripheral grinding surface Ga, and the coolant nozzle 19 The supplied coolant is reliably supplied to the grinding point P.

第1の実施形態に係る側面随伴空気層が外周研削面に回り込むのを防止した砥石を装着した研削盤の一部を断面にした側面図。The side view which made the cross section of a part of grinding machine equipped with the grindstone which prevented the side accompaniment air layer which concerns on 1st Embodiment from wrapping around an outer periphery grinding surface. 第1の実施形態に係る砥石の要部拡大断面図。The principal part expanded sectional view of the grindstone concerning a 1st embodiment. 両側面が平面である砥石の要部拡大断面図。The principal part expanded sectional view of the grindstone whose both side surfaces are planes. 図3に示す砥石の外周随伴空気層の流速を示す図。The figure which shows the flow velocity of the outer periphery accompanying air layer of the grindstone shown in FIG. 第1の参考例を示す要部拡大断面図。 The principal part expanded sectional view which shows a 1st reference example . 第2の参考例を示す要部拡大断面図。 The principal part expanded sectional view which shows the 2nd reference example .

符号の説明Explanation of symbols

10…研削盤、11…ベッド、12…砥石台、13,14…砥石軸、15…砥石コア、16…砥石チップ、17…砥石カバー、18…クーラント供給装置、19…クーラントノズル、20…テーブル、23…工作物支持装置、26…外周面、27…遮断壁、28…ドレッサ、29…テーパ部、33…側面随伴空気層、34…外周随伴空気層、35…隔離層、36…スペース、G…砥石、Ga…外周研削面、W…工作物。    DESCRIPTION OF SYMBOLS 10 ... Grinding machine, 11 ... Bed, 12 ... Grinding wheel base, 13, 14 ... Grinding wheel shaft, 15 ... Grinding wheel core, 16 ... Grinding wheel tip, 18 ... Coolant supply device, 19 ... Coolant nozzle, 20 ... Table , 23 ... Workpiece support device, 26 ... Outer peripheral surface, 27 ... Shutting wall, 28 ... Dresser, 29 ... Tapered portion, 33 ... Side-associated air layer, 34 ... Peripheral associated air layer, 35 ... Isolation layer, 36 ... Space, G: Whetstone, Ga: Peripheral grinding surface, W: Workpiece.

Claims (3)

砥石台に回転可能に支承された砥石と工作物支持装置に支持された工作物とを相対移動させて前記工作物を前記砥石により研削点にクーラントを供給しながら研削加工する研削盤に装着される砥石において、
前記砥石は、
円盤状の砥石コアと、
前記砥石コアの外周面に接着され外周研削面を形成する複数の砥石チップと、
前記砥石コアの外周面のうち前記砥石チップの幅方向両外側において、全周に亙って前記砥石コアの径方向外方に突設され、前記砥石コアの側面に連れ回りする側面随伴空気層が前記外周研削面に回り込むのを遮断する遮断壁と、
を備えることを特徴とする砥石。
Mounted on a grinder that grinds the workpiece while supplying coolant to the grinding point by the grindstone by relatively moving the grindstone rotatably supported on the grindstone table and the workpiece supported by the workpiece support device. In the whetstone
The grindstone is
A disc-shaped grinding wheel core ,
A plurality of grindstone chips bonded to the outer circumferential surface of the grindstone core to form an outer circumferential grinding surface ;
A side-associated air layer that protrudes radially outward of the grindstone core over the entire circumference on both outer sides in the width direction of the grindstone chip on the outer circumferential surface of the grindstone core, and rotates with the side surface of the grindstone core A blocking wall for blocking the wrap around the outer peripheral grinding surface ;
Grindstone, characterized in that it comprises a.
請求項1において、In claim 1,
前記遮断壁の外径は、前記砥石チップの外径より大きく設定されていることを特徴とする砥石。The grindstone characterized in that an outer diameter of the blocking wall is set larger than an outer diameter of the grindstone tip.
請求項1または2において、In claim 1 or 2,
前記遮断壁は、当該遮断壁と前記砥石チップの間に空間が形成されるように、前記砥石チップに対して前記砥石コアの外周面の幅方向に離間していることを特徴とする砥石。The grindstone characterized in that the barrier wall is spaced apart from the grindstone chip in the width direction of the outer peripheral surface of the grindstone core so that a space is formed between the barrier wall and the grindstone chip.
JP2004315218A 2004-10-29 2004-10-29 A grindstone that prevents the side-associated air layer from entering the outer peripheral grinding surface Expired - Fee Related JP4518254B2 (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110142696A (en) * 2019-06-26 2019-08-20 西安奕斯伟硅片技术有限公司 Spray head, spray assemblies, the Supply Method of coolant and wafer grinding method

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002273662A (en) * 2001-03-14 2002-09-25 Noritake Super Abrasive:Kk Beveling wheel for silicon wafer periphery portion machining

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4725743Y1 (en) * 1968-10-25 1972-08-10

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002273662A (en) * 2001-03-14 2002-09-25 Noritake Super Abrasive:Kk Beveling wheel for silicon wafer periphery portion machining

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110142696A (en) * 2019-06-26 2019-08-20 西安奕斯伟硅片技术有限公司 Spray head, spray assemblies, the Supply Method of coolant and wafer grinding method

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