JP4491064B2 - Optical path changing device, optical switch, and optical head - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to an apparatus for changing an optical path , such as an optical switch or an optical head.
[0002]
[Prior art]
Conventionally, a mechanical micro optical switch generally has an advantage that the optical path can be greatly changed. As a configuration method thereof, (1) a light traveling in the substrate plane parallel to the substrate surface is used and a mirror perpendicular to the substrate surface is used. (2) A method of switching the optical path by changing the position of a droplet having the same refractive index as the optical waveguide by a micro heater, (3) A method of switching the optical path in a three-dimensional manner using a two-degree-of-freedom mirror, (4) There is a method of switching an optical path by bending an optical fiber using electrostatic force or magnetic force.
[0003]
However, conventional problems are as follows: (1) It is not easy to construct a mirror perpendicular to the substrate surface, and there is a limit to the material or rigidity that can be selected depending on the yield stress of the material. There are problems such as degradation and structural complexity. (2) There is a problem of individually enclosing as many as the number of droplet switching. (3) There is a problem that the mirror group must be arranged three-dimensionally and the apparatus becomes large. (4) There is a problem that the apparatus becomes large due to the bending limit of the optical fiber.
[0004]
[Problems to be solved by the invention]
<B> The present invention is to provide an optical path changing device that can easily change the optical path.
<B> The present invention can provide a small-sized optical path changing device with a simple structure.
<C> The present invention also provides an optical switch having a novel structure.
<D> Further, the present invention is to provide an optical head for a recording disk having a novel structure.
[0005]
[Means for Solving the Problems]
The present invention includes a bendable light beam direction changing member having a reflecting portion for reflecting a light beam, and an attracting portion arranged to face each other, and a part of the light beam direction changing member is one of the attracting portions. The light beam direction changing member is attracted to the other attracting portion, the light beam direction changing member is bent in the space between the attracting portions to form a curved portion, and the light beam direction changing member is attracted by the attracting portion. The optical path changing device is configured to move the bending portion by changing the position, reflect the incident light beam by the reflecting portion of the bending portion, and change the optical path of the light beam.
In addition, the present invention includes a plurality of light beam direction changing members having a reflecting portion that reflects light rays, and attracting portions that are arranged to face each other and attract each light beam direction changing member, A beam direction changing member is arranged adjacent to each other, a part of each beam direction changing member is attracted to one attracting part, and another part of each beam direction changing member is attracted to the other attracting part. Is bent in the space between the attracting portions to form each bending portion, and each bending portion is moved by changing the attracting position of each light beam direction changing member by the attracting portion. There is a multi-channel optical path changing device that changes the optical path of each light beam by being reflected by the reflecting section.
In addition, the present invention includes the optical path changing device and the multi-channel optical path changing device, wherein the attracting portion of the optical path changing device and the attracting portion of the multi-channel optical path changing device are arranged to face each other. to the attracting portion forms a transmission unit which light is transmitted, and incident light into the optical path changing device through the transmission unit is reflected by the reflecting portion of the curved portion, the change multichannel optical path light rays through the transparent portion In the optical switch, the light is reflected by the reflecting portion of the bending portion through the transmission portion of the apparatus and is emitted to a plurality of optical paths.
Further, the present invention, the first and the multi-channel optical path changing devices comprising a multichannel optical path changing device, wherein a second multi-channel optical path changing devices comprising a multichannel optical path changing device, the first multi-channel optical path changing devices And the second multi-channel optical path changing device are arranged so as to face each other, and the opposing attracting portion is formed with a transmitting portion through which a light beam is transmitted, to the first multi-channel optical path changing device. It enters the plurality of light beams through the transmissive portion is reflected by the reflective portion of each curved portion, reflected by the reflecting portion of each of the curved portions a plurality of light rays through the transparent portion through the transmissive portion of the second multi-channel optical path changing devices The optical switch emits reflected light to a plurality of optical paths.
In addition, the present invention includes a bendable light beam direction changing member having a reflecting portion that reflects a light beam, an attracting portion arranged to face each other, and a light source with a rotation function, and the light beam direction changing member. A part of the light beam direction changing member, the other part of the light beam direction changing member is drawn to the other drawing part, and the light beam direction changing member is bent in the space between the drawing parts. The curved portion is moved by changing the attracting position of the light beam direction changing member by the attracting portion, and the light beam from the light source with the rotation function is reflected by the reflecting portion of the curved portion, and reflected light Is on an optical head.
[0006]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, embodiments of the present invention will be described with reference to the drawings.
[0007]
<I> Optical path changing device
The optical path changing device 10 is a device that changes the optical path . For example, as shown in FIG. 1, the light beam direction changing member 1 that changes the direction of the light beam 3, and the attracting units 2 and 2 that attract and curve the light beam direction changing member 1. It has. The optical path changing device 10 reflects the light beam by the bending portion 13 of the light beam direction changing member 1 and changes the direction of the light beam. For example, as shown in FIG. 1, the optical path changing device 10 draws the bending direction 13 along the attracting portion 2 by attracting the light beam direction changing member 1 up and down between the attracting portions 2 and 2 facing each other and changing the attracting position. Can move left and right. Thereby, the reflection position of the light beam can be moved along the attracting part 2. By using the bending portion 13 in this way, the angle difference between the incident light beam and the reflected light beam can be increased. The optical path changing device 10 has a simple structure and can be miniaturized. Moreover, since the optical path changing device 10 uses reflection, it is not easily affected by the wavelength of light. Since the optical path changing device 10 uses the curvature of the light beam direction changing member 1, it is difficult to be restricted by the yield stress of the material. The optical path changing device 10 has a high affinity with the manufacturing process of the micro system and is a device suitable for the micro system. The optical path changing device 10 can be used for an optical scanner. 1B and 1C are views of FIG. 1A viewed from the lateral direction.
[0008]
<B> Light Direction Changing Member The light direction changing member 1 is disposed between the attracting portions 2 and 2 facing each other, and has a bendable property and a light reflecting property. The light beam direction changing member 1 includes a reflection unit 14 that reflects light, and the light beam is reflected by the reflection unit 14 to change the direction. If the light beam direction changing member uses a thin film having a reflecting surface, it can have both the reflecting portion 14 and the bending performance. The light beam direction changing member 1 may take various shapes, and may have a horizontally long shape or a strip shape. Alternatively, a square shape, a rectangular shape, a polygonal shape, or a circular shape may be used depending on the object of use. Alternatively, a plurality of these light direction changing members 1 can be arranged adjacent to each other. The light beam direction changing member 1 may hold a mirror 11 as shown in FIG. 3, for example. In this case, if it is difficult to curve the surface of the mirror 11, the reflecting portion 14 of the mirror 11 can always be held flat.
[0009]
When the light beam direction changing member 1 is attached to the attracting portion 2, at least one end is attached via a stretchable means such as the spring material 4. As shown in FIG. 1A, even if the light beam direction changing member 1 is bent and one end moves to the left side as shown in FIG. It does not take a strong force. Moreover, since the edge part of the light beam direction changing member 1 is attached in an expandable / contractable state, the setting of the light beam direction changing member 1 becomes easy.
[0010]
The beam direction changing member 1 can use a conductive bendable film or thin film such as a metal material, a polymer material, or an inorganic material. For example, a TiNi thin film is used, and the thickness of the thin film is 4 μm. The size and thickness of the TiNi thin film are determined according to the application of the optical path changing device 10, but as an example, the length is 4 mm and the width is 1 mm. These sizes (numerical values) can be appropriately determined according to the application. At least one surface of the thin film is used as a mirror surface to form the reflecting portion 14. A thin film of TiNi alloy has corrosion resistance, is soft, and has superelasticity that is difficult to undergo plastic deformation. Since the thin film of TiNi alloy is a shape memory alloy, it can memorize the state of curvature and can maintain the previous state even during a power failure.
[0011]
<C> The attracting part attracting part 2 can attract the light beam direction changing member 1. For example, as shown in FIG. 1, the attracting portions 2 and 2 are arranged to face each other, and the light beam direction changing member 1 is arranged in a space between them. The attracting unit 2 includes attracting means (actuator) 21 that attracts the light beam direction changing member 1.
[0012]
The attracting means 21 may be any means as long as it can attract the light beam direction changing member 1. For example, means such as an electric field, a magnetic field, and air may be used. When the attracting means 21 uses an electric field, a large number of electrodes are arranged side by side along the longitudinal direction of the light beam direction changing member 1 in each of the pair of attracting portions 2 and 2. In the case of FIG. 1, a large number of parallel electrodes are mounted side by side along the direction of the incident light beam 3. The minimum moving distance of the bending portion 13 is determined by the density of the number of electrodes. By applying a voltage, for example, 500 V (an example in which the TiNi alloy thin film is used and the distance between the attracting portions is 1 mm) to the electrode and grounding the light beam direction changing member 1, the light beam direction changing member 1 is electrostatically charged. An attractive force is generated and the light beam direction changing member 1 can be electrically attracted to the electrode. When an electrode is used, the non-contact layer 22 is disposed between the electrode and the light direction changing member 1 in order to insulate between the electrode and the light direction changing member 1. Further, even when direct contact between the suction means 21 and the light beam direction changing member 1 is not preferable, the non-contact layer 22 is disposed between them. When air is used for suction, the light beam direction changing member 1 can be sucked into the attracting part 2 by arranging a suction device for sucking in the attracting part 2.
[0013]
When a magnetic field is used, for example, a magnet or other magnetic body is attached to at least one of the light beam direction changing member 1 or the attracting unit 2. In that case, a device for generating electromagnetic induction is arranged to attract or separate magnets or other magnetic materials. The device that generates electromagnetic induction is preferably attached to the attracting unit 2, for example, but may be attached to the light beam direction changing member 1 or both as required. When a magnet is attached to at least one and a magnet or other magnetic body is attached to the other, a self-holding function can be provided, and for example, a state can be held without applying external energy such as energization. If the self-holding function is unnecessary, a magnetic body other than a magnet is attached to one side, and a device that generates electromagnetic induction is attached to the other side.
[0014]
The attracting part 2 is provided with a transmission part 23 through which the light beam can be transmitted where the light beam passes. For example, a transparent member such as ITO or glass can be used for the transmission part 23 as shown in FIG. 1B, and a space through which light can pass can be provided in the attracting part as shown in FIG. 1C.
[0015]
<D> Movement of the bending portion 13 will be described with reference to FIG. 2 using an example in which the movement attracting means 21 of the bending portion of the light beam direction changing member is an electrode. A voltage is applied to the electrode indicated by the black arrow in the upper attracting part and the electrode indicated by the black arrow in the lower attracting part. In FIG. 2A, the left part of the light beam direction changing member 1 is sucked by the upper electrode, and the right part of the light beam direction changing member 1 is sucked by the lower electrode, and the light beam direction changing member 1 is not sucked. The curved portion 13 is formed. In this case, when the light beam 3 is incident from the left side, the light beam 3 is reflected by the bending portion 13. When the inclination of the curved portion 3 on which the light beam 3 is reflected is inclined 45 degrees with respect to the incident light beam 3, the reflected light beam changes its direction by 90 degrees.
[0016]
Next, when the upper electrode to which the voltage is applied is increased by two (black arrow) on the right side and the lower electrode to which the voltage is applied is decreased by two (white arrow) from the left side, the curved portion of the beam direction changing member is pulled. It moves to the right along the appendage 2. As a result, the position where the light beam 3 is reflected moves to the right. In this way, when the electrode to which the voltage is applied is controlled at the upper part and the lower part, the reflection position of the light beam 3 can be moved left and right. When the width of the electrode is narrowed, the moving distance can be finely controlled. In addition, the inclination angle of the bending portion 13 can be controlled by selecting an electrode to which a voltage is applied.
[0017]
As another method of moving the bending portion 13 of the light beam direction changing member 1, although not shown, the light beam direction changing member 1 itself may be provided with a bending drive portion. For example, bimetal is used as the bending drive unit. As a suction unit for the attracting unit 2, a heat application unit that applies heat to the bimetal is provided for each bimetal. By selecting this heat application means, the bimetal of the light beam direction changing member 1 can be selected, and the light beam direction changing member 1 can be bent at an arbitrary location.
[0018]
<E> Fine adjustment device 5 for adjusting the position of the reflected light beam reflection position between the attracting portions 2 and 2 is provided. For example, as shown in FIG. 3, the fine movement device 5 is disposed at the end of the attracting unit 2 where the light beam enters. When the light source 31 is moved by the fine movement device 5 in a direction perpendicular to the light beam 3 in the direction between the attracting portions 2 and 2, or in a direction from the attracting portion 2 toward the other attracting portion 2, the light direction changing member 1 The part reflected by the bending portion 13 moves. As a result, the reflected light moves left and right along the incident light as shown in FIG. When the surface of the reflecting portion 14 of the bending portion 13 is flattened and the light source 31 is moved up and down by the fine movement device 5, the light beam reflected by the reflecting portion 14 moves in a linear manner. As described above, the movement of the reflected light beam can be finely adjusted by the fine movement device in addition to the movement by the suction means 21.
[0019]
<F> Multi-channel optical path changing device The multi-channel optical path changing device 100 changes a plurality of optical paths . For example, as shown in FIG. Are arranged in parallel to change the direction of a plurality of rays. The multi-channel optical path changing device 100 has the same function as that in which a plurality of optical path changing devices 10 are arranged in parallel. The suction means 21 of the multi-channel optical path changing device 100 can be shared by each channel. When the suction means 21 is an electrode, the electrodes and the channels are arranged so as to intersect in a matrix. A predetermined portion of each of the plurality of light beam direction changing members 1 is bent by the suction means 21.
[0020]
<G> Optical switch The optical switch 6 is for switching the optical path. For example, the optical switch 6 is interposed between the optical fiber and switches the light from the optical fiber to another optical fiber. The optical switch 6 that switches light from one optical fiber to a plurality of optical fibers can be configured by arranging the optical path changing device 10 and the multi-channel optical path changing device 100 facing each other. Further, the optical switch 6 that switches light beams from a plurality of optical fibers to a plurality of optical fibers can be configured by arranging a pair of multi-channel optical path changing devices 100 facing each other. For example, as shown in FIG. 4, the optical switch 6 makes the light beam 3 incident on an upper optical path changing device or a multi-channel optical path changing device (not shown), and reflects the light beam 3 by the reflecting portion 14 of the light beam direction changing member. The reflected light is incident on the lower multi-channel optical path changing device 100. The light beam incident downward is reflected again by the reflecting portion 14 of one light beam direction changing member 1 of the multichannel optical path changing device 100. The light beam reflected by the multi-channel optical path changing device 100 passes along the attracting part 2 of one channel and enters an optical fiber arranged at the end of the attracting part 2.
[0021]
<H> Optical head The optical head is used for reading and writing of a recording disk using light. For example, as shown in FIG. 5, the optical head is disposed so as to face the surface of the recording disk 71 such as a rotating optical disk and to be orthogonal to the recording band 72 using the optical path changing device 10. The optical path changing device 10 of the optical head 7 differs from the light beam direction changing member 1 of FIG. 1 in its mounting shape, but the principle of changing the light beam 3 is the same. The light beam direction changing member 1 in FIG. 5 is fixed to the attracting portion 2 because the fixed end portions 12 at both ends are easily bent and extended like a spring.
[0022]
By selecting the upper and lower electrodes 21 of the optical head 7, the curved portion of the light beam direction changing member 1 moves so as to be orthogonal to the recording band 72. In this way, the recording band 72 of the optical disk is selected. Light can be irradiated to the position. In order to accurately match the irradiation position of the light beam with the position of the recording band 72, the fine movement device 5 of the light source 31 is used. As shown in FIG. 5A, the fine movement device 5 can finely adjust the irradiation position of the recording band 72 by simply moving the light source 31 up and down, and can record the recording band 72 with high density. it can.
[0023]
As an example of using the optical path changing device 10 as an optical head of another recording disk, it can be arranged as shown in FIG. The recording disk of FIG. 6 is fixed without rotating. Instead, the optical path changing device 10 is arranged facing the entire surface of the recording disk. The attracting part 21 and the light beam direction changing member 1 of FIG. 6 have a circular shape, but can take various shapes such as a square shape, an elliptical shape, and a polygonal shape. A light source 32 with a rotation function is used in which the light source is arranged at the center of the recording disk and rotates about the center. In this optical head operation method, a part of the light beam direction changing member 1 is attracted to one attracting part 2 and a part is attracted to the other attracting part 2 to form a curved part 13. A light beam is irradiated from the light source 32 with a rotation function to the reflecting portion 14 in the bending portion 13, for example, reflected at a right angle, and the reflected light is irradiated to a predetermined portion of the recording disk 71. If the fine movement device 5 is attached to the light source 32 with a rotation function, the density of the recording disk can be increased.
[0024]
The recording band 72 of the recording disk can be formed in various shapes other than a spiral shape. For example, as shown in FIG. . In that case, a large number of light sources 32 can be provided, translated, linearly moved, or the optical head 7 can be configured as shown in FIG. With the optical head of FIG. 7B, mechanical mechanisms such as rotation, parallel movement, and linear movement of the light source are not necessary. The optical path changing device 10 in FIG. 7B arranges a large number of strip-shaped light direction reflecting members 1 adjacent to each other. A reflector 24 that reflects the light beam 3 is arranged in the vicinity of the end portions of the attracting portions 2 and 2 so that the light beam 3 passes along each of the light beam direction reflecting members 1. The reflector 24 may be any material that bends the light beam 3 in a predetermined direction, such as a mirror or a prism. Although there is one light source in FIG. 7B, a plurality of light sources may be provided. If the fine movement device 5 is attached to the light source 31, the fine movement device 5 may be finely moved in a direction parallel to the drawing portion 2 instead of the direction between the drawing portions 2 and 2. As a result, a plurality of rows of data can be recorded on one strip-shaped recording surface as shown in FIG.
[0025]
By using the optical path changing device 10 having various shapes, it is not necessary to rotate the optical disk, and a rotating actuator, a minute gap securing and maintaining mechanism for preventing friction between the optical head and the recording disk become unnecessary. Therefore, miniaturization, simplification, energy saving, low vibration, and low noise can be achieved. (Since the rotating part is small and the manufacturing accuracy of the light source with a rotation function is easier to improve than the optical disk, energy consumption and vibration are reduced. Vibration and wind noise can be suppressed.) Further, with this configuration, the number of stationary parts increases, the light source can be moved minutely, and data can be recorded with high density.
[0026]
【The invention's effect】
<B> The present invention can provide an optical path changing device that can easily change the optical path.
<B> The present invention can also provide a small optical path changing device with a simple structure.
<C> Further, the present invention can provide an optical switch having a novel structure.
<D> Further, the present invention can provide an optical head for a recording disk having a novel structure.
[Brief description of the drawings]
FIG. 1 is an explanatory diagram of an optical path changing device. FIG. 2 is an explanatory diagram of moving a bending portion of the optical path changing device. FIG. 3 is an optical path changing device having a fine movement device that changes the position of a light source. an optical path changing device of FIG. 7 prismatic optical head utilizing Figure 6 circular optical path changing device for an optical head utilizing Figure 5 shows an optical path changing device of the optical switch utilizing the optical path changing device Diagram of optical head of recording disk used [Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 ... Light direction changing member 10 ... Optical path changing apparatus 100 Multi channel optical path changing apparatus 11 Mirror 12 Fixed end part 13 Curved part 14 Reflecting part 2 Attraction part 21 · Attracting means 22 · · Non-contact layer 23 · · Transmission portion 24 · · Reflector 3 · · · Light beam 31 · · Light source 32 · · Light source 4 with rotation function · · · Spring material 5 · · · fine movement device 6 ..Optical switch 7 ..optical head 71 ..recording disk 72 ..recording band

Claims (19)

A bendable beam direction changing member having a reflecting portion for reflecting the beam;
An attracting portion disposed opposite to each other,
Attracting a part of the light beam direction changing member to one of the attracting parts,
Attach the other part of the light beam direction changing member to the other attracting part,
Bending the light beam direction changing member in the space between the attracting portions to form a bending portion;
Moving the bending portion by changing the drawing position of the light beam direction changing member by the drawing portion;
An optical path changing device that changes an optical path of the light beam by reflecting an incident light beam on the reflecting portion of the curved portion. The optical path changing device according to claim 1,
An optical path changing device characterized in that the light beam direction changing member holds a mirror that is at least partially a reflecting portion and is less curved than the light beam direction changing member. The optical path changing device according to claim 1,
An optical path changing device comprising a transmitting part capable of transmitting a light beam to at least one part of an opposing attracting part. The optical path changing device according to claim 1,
At least one end of the light beam direction changing member is attached to the attracting portion via a means that can be expanded and contracted, and the optical path changing device. The optical path changing device according to claim 1,
An optical path changing device comprising a fine movement device that moves an incident position of a light beam between opposing attracting portions. The optical path changing device according to claim 1,
An optical path changing device, wherein the light direction changing member is made of a thin film of TiNi alloy. A plurality of bendable beam direction changing members having a reflecting portion for reflecting the beam;
An attracting part that is arranged to face each other, attracting each of the light beam direction changing members,
The light beam direction changing members are arranged adjacent to each other,
Attach a part of each of the light beam direction changing members to one of the attracting portions,
Attach the other part of each light direction changing member to the other attracting part,
Bending each light beam direction changing member in the space between the attracting portions to form each bending portion;
Moving each bending portion by changing the drawing position of each light beam direction changing member by the drawing portion;
A multi-channel optical path changing device that changes a light path of each light beam by reflecting a plurality of incident light beams by the reflecting section of each bending section. The optical path changing device according to claim 1 and the multi-channel optical path changing device according to claim 7,
The attracting portion of the optical path changing device and the attracting portion of the multi-channel optical path changing device are arranged to face each other,
Forming a transmission part through which the light beam is transmitted in the attracting part facing,
A light beam is incident on the optical path changing device and reflected by the reflecting portion of the curved portion, and passes through the transmitting portion.
Wherein the light rays through the transparent portion is reflected by the reflecting portion of the bending portion through the transmissive portion of the multichannel optical path changing device, it emits reflected light into a plurality of optical paths, an optical switch. A first multi-channel optical path changing device comprising the multi-channel optical path changing device according to claim 7, and a second multi-channel optical path changing device comprising the multi-channel optical path changing device according to claim 7,
The attracting part of the first multi-channel optical path changing device and the attracting part of the second multi-channel optical path changing device are arranged to face each other,
Forming a transmission part through which the light beam is transmitted in the attracting part facing,
A plurality of light beams are incident on the first multi-channel optical path changing device, reflected by a reflecting portion of each curved portion, and passed through the transmitting portion,
Wherein said reflected through the transmissive portion by the reflecting portion of each of the curved portions of the transmissive portion a plurality of the light beam to the second multi-channel optical path changing apparatus through the, emits reflected light into a plurality of optical paths, an optical switch. The optical path changing device according to claim 1,
The attracting part of the optical path changing device is arranged facing the recording disk surface,
Forming a transmission part on at least a part of the attracting part facing the recording disk surface;
A light beam is incident on the space between the opposing attracting portions, the direction of the light beam is changed by the reflecting portion of the curved portion, and the light passing through the transmitting portion, and the light beam is irradiated onto the recording disk surface,
An optical head, wherein the position of the bending portion is moved by changing the attracting position of the light beam direction changing member by the attracting portion, and the irradiation position of the light beam on the recording disk surface is moved. A bendable beam direction changing member having a reflecting portion for reflecting the beam;
An attracting portion disposed opposite to each other;
A light source with a rotation function,
Attracting a part of the light beam direction changing member to one of the attracting parts,
Attach the other part of the light beam direction changing member to the other attracting part,
Bending the light beam direction changing member in the space between the attracting portions to form a bending portion;
Moving the bending portion by changing the drawing position of the light beam direction changing member by the drawing portion;
An optical head that irradiates a recording disk with reflected light by reflecting a light beam from the light source with a rotation function by the reflecting portion of the curved portion. A plurality of optical path changing devices according to claim 1;
A reflector disposed between an end of the attracting part of the one optical path changing device and an end of the attracting part of the other one optical path changing device;
An optical head, wherein a light beam that has passed through one of the optical path changing devices is reflected by the reflecting material and sent to the other one of the optical path changing devices. The optical path changing device according to claim 1,
Attach one end of the beam direction changing member to one attracting part,
An optical path changing device, wherein the other end of the light beam direction changing member is attracted to the other attracting part. The optical path changing device according to claim 1,
Attach both ends of the beam direction changing member to one attracting part,
An optical path changing device, wherein the other part of the light beam direction changing member is attracted to the other attracting part. The optical path changing device according to claim 1,
A plurality of electrodes are arranged side by side on the attracting part,
An optical path changing device, wherein a voltage is applied to the electrode, an electrostatic attractive force is generated in the light beam direction changing member, and the light beam direction changing member is electrically attracted to the electrode. The optical path changing device according to claim 1,
Attach a magnet or other magnetic body to one of the beam direction changing member or the attracting part,
An optical path changing device, wherein a device for changing a magnetic field is arranged on the other of the light beam direction changing member or the attracting portion to attract or separate the magnet or the other magnetic body . The optical path changing device according to claim 1,
A device for changing the magnetic field is arranged on both the beam direction changing member and the attracting part ,
An optical path changing device characterized in that one device that changes the magnetic field attracts or separates the other device that changes the magnetic field . The optical path changing device according to claim 1,
Arrange the suction unit in the attracting part,
An optical path changing device, wherein a light beam direction changing member is sucked into the attracting part. The optical path changing device according to claim 1,
The beam direction changing member is made of bimetal,
Arranging heat application means in the attracting part,
An optical path changing device, wherein the heat application means heats the bimetal of the light beam direction changing member to curve the light beam direction changing member.

Images