JPH08334708A - Shape variable mirror - Google Patents

Shape variable mirror

Info

Publication number
JPH08334708A
JPH08334708A JP14158895A JP14158895A JPH08334708A JP H08334708 A JPH08334708 A JP H08334708A JP 14158895 A JP14158895 A JP 14158895A JP 14158895 A JP14158895 A JP 14158895A JP H08334708 A JPH08334708 A JP H08334708A
Authority
JP
Japan
Prior art keywords
mirror
magnetic plates
solenoid
magnets
fitted
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14158895A
Other languages
Japanese (ja)
Inventor
Masayuki Eguchi
雅之 江口
Original Assignee
Mitsubishi Heavy Ind Ltd
三菱重工業株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Heavy Ind Ltd, 三菱重工業株式会社 filed Critical Mitsubishi Heavy Ind Ltd
Priority to JP14158895A priority Critical patent/JPH08334708A/en
Publication of JPH08334708A publication Critical patent/JPH08334708A/en
Application status is Pending legal-status Critical

Links

Abstract

PURPOSE: To drive a shape variable mirror with a low voltage while the driver is of a non contacting type by forming the mirror with magnetic plates fitted on the back face of the mirror and with solenoid magnets oppositely arranged with gaps with respect to magnetic plates.
CONSTITUTION: A mirror 11 is a disk-shaped copper mirror having flexibility and the peripheral edge of the mirror is supported by a case body 12. Plural magnetic plates 13 are fitted on the back face of the mirror 11. The opening of the other plane of case body 12 is covered with a rear lid 14. Moreover, in the inside of the case body 12, plural solenoid magnets 15 are provided on the rear lid 14 by being fixed and respective magnets 15 are covered with magnetic covers 16. Further, upper end planes of these solenoid magnets 15 are opposed to magnetic plates 13 with gaps. Thus, electromagnetic forces are generated by flowing currents in the solenoid magnets 15 and the mirror surface is deformed because the solenoid magnets 15 attract and repulse magnetic plates 13 fitted on the mirror 11.
COPYRIGHT: (C)1996,JPO

Description

【発明の詳細な説明】 DETAILED DESCRIPTION OF THE INVENTION

【0001】 [0001]

【産業上の利用分野】本発明は光学機器に適用される形状可変鏡に関し、非接触型でありながら駆動に要する電圧が低くてすむように工夫したものである。 The present invention relates to an deformable mirror which is applied to an optical device, the voltage required for driving while a non-contact type is everything you need to be low.

【0002】 [0002]

【従来の技術】光学機器には形状可変鏡(Deform BACKGROUND ART The optical instrument deformable mirror (Deform
able Mirror、Active Mirro able Mirror, Active Mirro
r:「位相補正鏡」、「能動鏡」とも呼ぶ)が用いられることがある。 r: "phase correction mirror", sometimes also referred to as "active mirror") is used. 従来の形状可変鏡としては、駆動素子と鏡を直接取り付けた直付け型(図2〜図5参照)と、鏡と駆動素子が直接には取り付けられていない非接触型(図6参照)とがある。 Conventional deformable mirror, direct mounting type, fitted with a driving element and the mirror directly (see FIGS. 2-5), a non-contact type mirror and the driver element is not attached directly to a (see FIG. 6) there is.

【0003】更に詳述すると、図2に示す形状可変鏡では、ベース1に備えた各駆動素子2の上端部に、剛性を有する鏡3をそれぞれ取り付けている。 [0003] To be more specific, in the deformable mirror shown in FIG. 2, the upper end portion of the driving element 2 provided on the base 1, is mounted a mirror 3 having rigidity, respectively. 駆動素子2は、 Driving element 2,
図中上下方向(矢印A方向)に伸縮する素子であり、具体的にはピエゾ素子、電歪素子、油圧/電動アクチュエータなどを用いることができ、この中ではピエゾ素子を用いることが多い。 An element for expanding and contracting in in the vertical direction in the drawing (in the direction of the arrow A), the piezoelectric element, the electrostrictive element in particular, may be used an hydraulic / electric actuator, is often used a piezoelectric element in this.

【0004】図3に示す形状可変鏡では、1つの鏡3に対して2つの駆動素子2a,2bを取り付けており、駆動素子2a,2bの伸び長を異ならせることにより、鏡3をベース1に対して傾斜させることができる。 [0004] In the deformable mirror shown in FIG. 3, two drive elements 2a for one mirror 3, and fitted with 2b, the drive element 2a, by varying the 2b elongation length of the mirror 3 base 1 it can be inclined with respect to.

【0005】図4に示す形状可変鏡では、鏡3aは可撓性を有しており、各駆動素子2の伸び長を異ならせることにより、鏡3aの鏡面形状を連続的に変化(撓ませて変化)させることができる。 [0005] In the deformable mirror shown in FIG. 4, the mirror 3a has flexibility, by changing the stretch length of the driving element 2, thereby continuously changing (deflect a mirror shape of the mirror 3a can Te change) is allowed.

【0006】図5に示す形状可変鏡では、可撓性を有する鏡3aの裏面に突出部4を備えており、隣接する突出部4どうしを連結する状態で駆動素子2が配置されている。 [0006] In the deformable mirror shown in FIG. 5, the flexible includes a protruding portion 4 on the rear surface of the mirror 3a having a drive element 2 in a state that connects with what protruding portions 4 adjacent is placed. この例では、駆動素子2を伸縮させることにより鏡3aの鏡面形状を連続的に変化させることができる。 In this example, the mirror surface shape of the mirror 3a by expanding and contracting the drive element 2 can be continuously changed.

【0007】図6に示す形状可変鏡は非接触型であり、 [0007] deformable mirror shown in FIG. 6 is a non-contact type,
特に静電型と呼ばれている。 In particular, it has been referred to as an electrostatic type. この例では、可撓性を有する鏡3aの周縁は筐体5で支持されており、筐体5内には、駆動素子となる電極6が配置されている。 In this example, the peripheral edge of the mirror 3a having flexibility is supported by the housing 5, within the housing 5, electrode 6 serving as a drive element is arranged. そして各電極6は、鏡3aの裏面に対して間隔をあけて対向している。 And each electrode 6 are opposed at a distance from the rear surface of the mirror 3a. そして電極6に電圧をかけると、電極6と鏡3a When the applied voltage to the electrode 6, the electrode 6 and the mirror 3a
との間で生じる静電気力が駆動力となって、鏡3aの鏡面形状が変化する。 Electrostatic force generated between the becomes a driving force, the mirror surface shape of the mirror 3a is changed. なお図6に示す非接触型の形状可変鏡では、接触型(図2〜図5)と異なり、取付部がないため、鏡の軽量化が達成でき、また、歪の少ない鏡面を得ることができる。 In still non-contact of the deformable mirror shown in FIG. 6, differs from the contact (FIGS. 2-5), there is no attachment portion, can achieve weight reduction of the mirror, also be obtained with less mirror distortion it can.

【0008】 [0008]

【発明が解決しようとする課題】ところで図2〜図5に示す直付け型の形状可変鏡では、鏡3,3aと駆動素子2,2a,2bの間を機械的に取り付ける必要があるため、形状可変鏡全体の重量増を招いたり、取付の際に鏡3,3aに歪みを与える等の問題があった。 In THE INVENTION It is an object of the way direct mounting type deformable mirror shown in FIGS. 2-5, it is necessary to mount the mirror 3,3a and the driving element 2, 2a, 2b between the mechanical, or inviting deformable mirror overall weight gain, there is a problem such as distorting the mirror 3,3a during installation.

【0009】一方、図6に示す静電型と呼ばれる非接触型形状可変鏡では、電極6と鏡3aの間の静電気力を駆動力として用いているため、比較的高い電圧(数百〜数千ボルト)が必要で扱いが難しかった。 On the other hand, the non-contact type deformable mirror called electrostatic shown in FIG. 6, because of the use of electrostatic force between the electrode 6 and the mirror 3a as a driving force, a relatively high voltage (several hundred to number thousand volts) is required to handle was difficult.

【0010】本発明は、上記従来技術に鑑み、非接触型でありながら低電圧で駆動することのできる形状可変鏡を提供することを目的とする。 [0010] The present invention has been made in view of the above prior art, and an object thereof is to provide a deformable mirror that can yet contactless driven at a low voltage.

【0011】 [0011]

【課題を解決するための手段】上記課題を解決する本発明の構成は、周縁が筐体に支持された可撓性を有する鏡と、この鏡の裏面に取り付けられたマグネット板と、前記筐体内に備えられると共に前記マグネット板に対して間隔をあけて対向配置されたソレノイド磁石とでなることを特徴とする。 Configuration of the present invention to solve the above problems SUMMARY OF THE INVENTION comprises a mirror having a flexible peripheral edge is supported by the casing, a magnet plate mounted on the rear surface of the mirror, the housing an interval with respect to the magnet plate with provided in the body, characterized by comprising at the oppositely disposed solenoid magnet.

【0012】 [0012]

【作用】本発明では、ソレノイド磁石に電流を流すことにより、電磁力を発生し、鏡に装着されたマグネット板と吸引・反発することにより、鏡面を変形させることができる。 According to the present invention, by supplying a current to the solenoid magnet, by generating a magnetic force, is sucked and repelled a magnet plate which is mounted in the mirror, it is possible to deform the mirror surface.

【0013】 [0013]

【実施例】以下に本発明の実施例を図面に基づき詳細に説明する。 EXAMPLES Based embodiments of the present invention with reference to the drawings will be described below in detail. 図1は本発明の実施例に係る形状可変鏡10 Figure 1 is the deformable mirror 10 according to an embodiment of the present invention
を示す。 It is shown. 同図に示すように、鏡11は可撓性を有する円板状の銅ミラーであり、その周縁は筐体12で支持されている。 As shown in the figure, the mirror 11 is copper mirror disk shape having flexibility, its periphery is supported by the housing 12. 鏡11の裏面(図では下面)には複数のマグネット板13が取り付けられている。 The rear surface of the mirror 11 (the lower surface in the figure) is attached a plurality of magnets plate 13. 筐体12の下面開口は裏蓋14で塞がれている。 Surface opening of the housing 12 is closed by the back cover 14. 更に筐体12の内部では、 In still inside the housing 12,
複数のソレノイド磁石15が裏蓋14に固定されて備えられており、各ソレノイド磁石15はソレノイド磁石カバー16で被われている。 A plurality of solenoid magnets 15 are provided is fixed to the rear cover 14, the solenoid magnet 15 is covered by the solenoid magnet cover 16. これらソレノイド磁石15の上端面は、間隔をあけてマグネット板13に対向している。 The upper end surface of the solenoid magnet 15 is opposed to the magnet plate 13 with an interval. また、各ソレノイド磁石15には、信号線17を介して外部から個別に電流が流れるようになっている。 Moreover, each solenoid magnet 15, so that the individual current flows from the outside through the signal line 17.

【0014】かかる構成となっている本実施例では、外部から信号線17を介してソレノイド磁石15に電流を流すと電磁力が発生し、この電磁力によりマグネット板13に対し反発力や吸引力が発生する。 [0014] In the present embodiment has such a configuration, the electromagnetic force is generated when an electric current is applied to the solenoid magnet 15 via a signal line 17 from the outside, the repulsive force or attractive force to the magnet plate 13 by the electromagnetic force There occur. つまり電流を一方向(正方向)に流すと反発力が生じ、電流を他方(負方向)に流すと吸引力が生じる。 That electric current is passed through a repulsive force is generated in one direction (forward direction), and the suction force current flow in the other (the negative direction) occurs. このように、マグネット板13が反発・吸引されることにより鏡11の鏡面が変形する。 Thus, the mirror surface of the mirror 11 is deformed by the magnet plate 13 is repelled-suction. 鏡11の変形方向及び変形量は、ソレノイド磁石15に流す電流の方向及び電流量を変えることにより制御できる。 Deformation direction and deformation amount of the mirror 11 can be controlled by changing the direction and amount of current flowing through the solenoid magnet 15.

【0015】ここで、実施例の形状可変鏡10を駆動するのに必要となる電圧について試算する。 [0015] Here, a trial calculation the voltage required to drive the deformable mirror 10 of the embodiment. 鏡11は直径10cm、厚さ1mmの銅ミラーとし、この鏡11の中央部を20μmだけ変位させるものとする。 Mirror 11 is a copper mirror diameter 10 cm, thickness 1 mm, it is assumed to displace the central portion of the mirror 11 by 20 [mu] m. このとき必要となる力は鏡11の周辺を固定している場合、5Nである。 Force required at this time if securing the periphery of the mirror 11 is 5N. マグネット板13として、磁束密度0.6Wb/ As the magnet plate 13, magnetic flux density 0.6Wb /
m/m、直径1.0cm、厚さ2.0mmのアルニコ磁石を用い、ソレノイド磁石15として、巻き数100 m / m, diameter 1.0 cm, with alnico magnet having a thickness of 2.0 mm, a solenoid magnet 15, the winding number 100
0、コイル直径1.0cm、抵抗2.8Ωの銅ソレノイドを用いると、5Nの力を得るにはマグネット板13とソレノイド磁石15の間隔を0.1mmとした場合、ソレノイド磁石15に印加する必要電圧は2.8Vとなる。 0, the coil diameter 1.0 cm, the use of copper solenoid resistor 2.8Omu, when a 0.1mm spacing of the magnet plate 13 and the solenoid magnet 15 to obtain the power of 5N, to be applied to the solenoid magnet 15 voltage is 2.8V.

【0016】これに対し、図6の静電型の形状可変鏡の場合では、電極6を半径0.5cmの銅とすると、電極間の間隔を30μmとして、5Nの静電力を得るための必要電圧は3600Vとなり、ソレノイド磁石に比べ、 [0016] In contrast, in the case of the deformable mirror of the electrostatic type 6, when the electrode 6 and the copper radius 0.5 cm, the spacing between the electrodes as a 30 [mu] m, necessary to obtain the electrostatic force 5N voltage compared becomes 3600V, the solenoid magnet,
大きな電圧が必要となる。 A large voltage is required.

【0017】なお上記実施例ではマグネット板13やソレノイド磁石15を複数備えたが、これら部材は1つであってもよい。 [0017] Although in the above embodiment with a plurality of magnets plate 13 and solenoid magnet 15, these members may be one.

【0018】 [0018]

【発明の効果】本発明では鏡の形状を変形させるために、ソレノイド磁石の電磁力を用いている。 [Effect of the Invention] In the present invention, in order to deform the shape of the mirror, and an electromagnetic force of the solenoid magnet. ソレノイド磁石の電磁力は少ない電圧で大きな力を発生することができるため、従来の例である静電型の形状可変鏡で問題となる高電圧を使用する必要がない。 Because the electromagnetic force of the solenoid magnet capable of generating a large force with a small voltage, it is not necessary to use a high voltage becomes a problem in the electrostatic type deformable mirror is a conventional example. よって、高電圧電源を用意する必要がなく、また安全面でも優れる、取り扱いやすい形状可変鏡を実現できる。 Therefore, it is not necessary to prepare a high-voltage power supply, also excellent in safety, it can be realized easily handled deformable mirror.

【図面の簡単な説明】 BRIEF DESCRIPTION OF THE DRAWINGS

【図1】本発明の実施例に係る形状可変鏡を示す構成図。 Figure 1 is a configuration diagram illustrating a deformable mirror according to an embodiment of the present invention.

【図2】直付け型の従来の形状可変鏡を示す構成図。 Figure 2 is a configuration diagram showing a direct mounting type of the conventional deformable mirror.

【図3】直付け型の従来の形状可変鏡を示す構成図。 Figure 3 is a configuration diagram showing a direct mounting type of the conventional deformable mirror.

【図4】直付け型の従来の形状可変鏡を示す構成図。 Figure 4 is a configuration diagram showing a direct mounting type of the conventional deformable mirror.

【図5】直付け型の従来の形状可変鏡を示す構成図。 Figure 5 is a configuration diagram showing a direct mounting type of the conventional deformable mirror.

【図6】非接触型の従来の形状可変鏡を示す構成図。 Figure 6 is a configuration diagram showing a conventional deformable mirror contactless.

【符号の説明】 DESCRIPTION OF SYMBOLS

1 ベース 2,2a,2b 駆動素子 3,3a 鏡 4 突出部 5 筐体 6 電極 10 形状可変鏡 11 鏡 12 筐体 13 マグネット板 14 裏蓋 15 ソレノイド磁石 16 ソレノイド磁石カバー 17 信号線 1 base 2, 2a, 2b driven element 3,3a mirror 4 projection 5 housing 6 electrodes 10 deformable mirror 11 mirror 12 housing 13 magnet plate 14 back cover 15 solenoid magnet 16 solenoid magnet cover 17 signal lines

Claims (1)

    【特許請求の範囲】 [The claims]
  1. 【請求項1】 周縁が筐体に支持された可撓性を有する鏡と、この鏡の裏面に取り付けられたマグネット板と、 1. A peripheral edge and a mirror having flexibility, which is supported by the casing, a magnet plate mounted on the rear surface of the mirror,
    前記筐体内に備えられると共に前記マグネット板に対して間隔をあけて対向配置されたソレノイド磁石とでなることを特徴とする形状可変鏡。 The deformable mirror with a gap relative to the magnet plate with provided in the housing, characterized by comprising at the oppositely disposed solenoid magnet.
JP14158895A 1995-06-08 1995-06-08 Shape variable mirror Pending JPH08334708A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14158895A JPH08334708A (en) 1995-06-08 1995-06-08 Shape variable mirror

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14158895A JPH08334708A (en) 1995-06-08 1995-06-08 Shape variable mirror

Publications (1)

Publication Number Publication Date
JPH08334708A true JPH08334708A (en) 1996-12-17

Family

ID=15295508

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14158895A Pending JPH08334708A (en) 1995-06-08 1995-06-08 Shape variable mirror

Country Status (1)

Country Link
JP (1) JPH08334708A (en)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002228816A (en) * 2001-01-29 2002-08-14 Olympus Optical Co Ltd Driving device for deformable mirror
JP2004240308A (en) * 2003-02-07 2004-08-26 Rikogaku Shinkokai Light direction change device, optical switch and optical head
US6986587B2 (en) 2002-10-16 2006-01-17 Olympus Corporation Variable-shape reflection mirror and method of manufacturing the same
FR2876460A1 (en) * 2004-10-12 2006-04-14 Centre Nat Rech Scient deformable mirror
JP2010107658A (en) * 2008-10-29 2010-05-13 Mitsubishi Electric Corp Variable shape mirror device
US7874688B2 (en) * 2004-07-30 2011-01-25 Sony Corporation Deformable mirror device, deformable mirror plate
US7907326B2 (en) 2006-05-23 2011-03-15 Canon Kabushiki Kaisha Reflecting apparatus
US8238223B2 (en) 2003-11-06 2012-08-07 Panasonic Corporation Deformable mirror, optical head, and optical recording and playback device

Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002228816A (en) * 2001-01-29 2002-08-14 Olympus Optical Co Ltd Driving device for deformable mirror
US6986587B2 (en) 2002-10-16 2006-01-17 Olympus Corporation Variable-shape reflection mirror and method of manufacturing the same
JP2004240308A (en) * 2003-02-07 2004-08-26 Rikogaku Shinkokai Light direction change device, optical switch and optical head
JP4491064B2 (en) * 2003-02-07 2010-06-30 佐藤 海二 Optical path changing device, an optical switch and an optical head
US8238223B2 (en) 2003-11-06 2012-08-07 Panasonic Corporation Deformable mirror, optical head, and optical recording and playback device
US7874688B2 (en) * 2004-07-30 2011-01-25 Sony Corporation Deformable mirror device, deformable mirror plate
JP2008516277A (en) * 2004-10-12 2008-05-15 サントル ナショナル ドゥ ラ ルシェルシュ スィヤンティフィック(セーエヌエルエス)Centre National De La Recherche Scientifique(Cnrs) Deformable mirror
WO2006040477A1 (en) * 2004-10-12 2006-04-20 Centre National De La Recherche Scientifique - Cnrs Deformable mirror
US7733550B2 (en) 2004-10-12 2010-06-08 Centre National De La Recherche Scientifique - Cnrs Deformable mirror
FR2876460A1 (en) * 2004-10-12 2006-04-14 Centre Nat Rech Scient deformable mirror
JP4833987B2 (en) * 2004-10-12 2011-12-07 サントル ナショナル ドゥ ラ ルシェルシュ スィヤンティフィック(セーエヌエルエス)Centre National De La Recherche Scientifique(Cnrs) Optoelectronic device and manufacturing method thereof
US7907326B2 (en) 2006-05-23 2011-03-15 Canon Kabushiki Kaisha Reflecting apparatus
JP2010107658A (en) * 2008-10-29 2010-05-13 Mitsubishi Electric Corp Variable shape mirror device

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