JP4488682B2 - Isostatic pressure press - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
  The present invention provides an isotropic pressure pressurizing device.In placeRelated.
[0002]
[Prior art]
  In hot isostatic pressing (HIP processing), the inside of a high-pressure vessel is heated and pressurized, and the processed product is held in a high-temperature and high-pressure state and compression-molded. One batch process of taking out from the container is performed.
  Although the essence of the HIP process is a process of maintaining the processed material in a high temperature and high pressure state, the temperature rising / pressurizing process and the temperature decreasing / decreasing process before and after that occupy most of the time, and the productivity was extremely low. .
[0003]
  Therefore, a modular HIP device as shown in Japanese Patent Laid-Open No. 58-71301 has been proposed.
  This modular HIP device was provided with a plurality of heating devices and auxiliary stations, and was intended to shorten the cycle time by dispersing the respective steps.
  The conventional modular HIP apparatus has the effect of shortening the occupation time of the high-pressure vessel for one processed product and has improved the productivity. However, a plurality of furnace bodies (high-pressure vessels) themselves are required, or a furnace body. From the viewpoint of safety, it is difficult to use in an impregnation HIP apparatus handling a high-temperature melt as described in JP-A-2-18359, for example, by moving itself at a high temperature.
[0004]
  In order to shorten the cycle time, it is important to shorten the time for detaching the lid of the high pressure vessel. Regarding the removal of the lid, a technique described in Japanese Utility Model Publication No. 62-3676 is known.
[0005]
[Patent Document 1]
  JP 58-71301 A
[Patent Document 2]
  Japanese Patent Laid-Open No. 2-18359
[Patent Document 3]
  Japanese Utility Model Publication No. 62-3676
[0006]
[Problems to be solved by the invention]
  Therefore, the present invention eliminates the disadvantages of the prior art, incorporates the advantages, and reduces the cycle time.PlaceThe purpose is to provide.
[0007]
[Means for Solving the Problems]
  In order to achieve the above object, the present invention has taken the following measures. That is, the feature of the present invention is that the inside of the high-pressure vesselBottom ofA processing chamber surrounded by a heat insulating layer, a heating device in the processing chamber, and an apparatus for hot isostatic pressing in the processing chamber.And outside and above the heat insulating layer surrounding the processing chamber,A standby chamber for storing and cooling the processed material is provided, and the heat insulating layer is provided with a heat insulating layer opening that allows the processed material to be inserted into and removed from the processing chamber,In the heat insulating layer opening,An opening / closing device for freely opening and closing the opening is provided.The standby chamber is provided with a rectifier that circulates the gas in the standby chamber. The rectifier includes a cylindrical body that is open at both ends. Surrounding and arranged through a predetermined gap with the inner peripheral surface of the high-pressure vessel so that gas circulates from both ends of the cylinder through the inside and outsideThere is in point.
[0008]
  According to the present invention having the above-described configuration, the processing chamber can be maintained in a high temperature state to function as a furnace by closing the heat insulating layer opening in the high-pressure vessel, and the standby chamber is maintained in a low temperature state. be able to.
  Therefore, it becomes possible to put in and out the processed material while keeping the atmosphere in the processing chamber at a high temperature at all times, and it is possible to shorten the temperature raising time to the HIP holding temperature inherent in the HIP processing. Further, after the HIP, the processed material can be moved from the high temperature atmosphere in the processing chamber to the low temperature standby chamber, and the processed material can be rapidly cooled in the high-pressure vessel.
[0009]
  Further, by adopting such a configuration, the gas in the standby chamber is circulated, and the processed material is efficiently cooled. Furthermore, by providing such a cylindrical body, it is possible to prevent direct radiation from a high-temperature processed product to the inner surface of the high-pressure vessel, and to prevent local overheating of the inner surface of the high-pressure vessel.
  The high-pressure vessel has a first container and a second container that are formed in a cylindrical shape and divided into two in the axial direction, the processing chamber is provided in the first container, and the second container It can be set as the structure by which the waiting room was provided.
[0010]
  By adopting such a configuration, the size of the second container is sufficient for the second container, and the second container can be made smaller than the first container having the heat insulating layer and the heating device, so that the entire apparatus can be downsized.
  The processing chamber may be provided with a melt storage container for storing a melt capable of immersing the processed product.
[0011]
  By adopting such a configuration, impregnation HIP processing becomes possible.
  The melt storage container is preferably composed of a crucible, and the crucible preferably has a multi-layer structure.
  By adopting such a configuration, even if one layer of the crucible is broken, the melt does not spill out.
[0012]
  The high-pressure vessel is provided with a container opening that allows the processing object to be taken in and out, and a lid is provided in the opening so as to be openable and closable. The processing object can be moved from the standby chamber to the processing chamber on the lid. It is preferable that a processed product moving apparatus is provided.
  By adopting the above-described configuration, the processing object can be moved between the processing chamber and the standby chamber while the lid of the high-pressure vessel is closed, that is, while the inside of the high-pressure vessel is maintained in a high-pressure state.
[0013]
  It is preferable that the processed product moving device is provided with a holding unit for holding the material of the melt stored in the melt storage container.
  By adopting such a configuration, when the processed material is stored in the processing chamber, the material can be replenished to the melt storage container at the same time. For this reason, it is not necessary to separately open a high-pressure vessel and further a processing chamber in a high temperature state to replenish the same material..
[0014]
  in frontIt is preferable that a lid moving device is provided that allows the lid to move between a position where the lid is mounted on the container opening and a position where the lid is not mounted.
  By providing such a lid moving device, automation of lid mounting can be achieved.
  The lid moving device preferably has a plurality of lids.
  By adopting such a configuration, two lids can be alternately attached to the pressure vessel, and HIP processing can be performed with the other lid while the processing product is being detached with one lid. .
[0015]
  Similarly to the lid moving device, the first container and the second container are configured to be detachable, and the second container is movable between the mounting position and the non-mounting position of the first container. A container moving device can be provided.
  It is preferable that a gas flow forming device for generating a predetermined gas flow in the high-pressure vessel is provided in accordance with each step of the isotropic pressure pressurization process including a series of steps.
[0016]
  By adopting such a configuration, it is possible to prevent the hot gas in the processing chamber from flowing out of the heat insulating layer through the opening of the heat insulating layer. Thereby, the evaporation substance contained in the high temperature gas in the processing chamber is prevented from being deposited in the low temperature standby chamber.
  The gas flow forming device includes a first passage communicating the clearance between the outer peripheral surface of the heat insulating layer and the inner peripheral surface of the high-pressure vessel, the outside of the high-pressure vessel, and the first passage communicating the processing chamber and the outside of the high-pressure vessel. It can be set as the structure which has 2 channel | paths.
[0017]
  And in the process of opening the said heat insulation layer opening part by hold | maintaining the inside of the said high voltage | pressure container to high pressure, it can comprise so that a pressurized medium may be supplied from the said 1st channel | path and exhausted from the said 2nd channel | path. In the step of pressurizing the inside of the high-pressure vessel, a pressurized medium can be supplied from the second passage. In the step of reducing the pressure in the high-pressure vessel, the first passage may be configured to exhaust air.
[0018]
  The gas flow forming device has a third passage that communicates the standby chamber with the outside of the high-pressure vessel, and is configured to exhaust from the third passage in the step of evacuating the inside of the high-pressure vessel. Is preferred.
  TheFurther, in the isotropic pressure pressurizing apparatus of the present invention, the first and second containers are configured to be separable, and the processing object is moved from the standby chamber to the processing chamber in the second container. An object moving device can be provided.
[0019]
  In this configuration, the lid that closes one end of each container may be fixed to each container or integrally formed.
  Further, the high-pressure vessel is constituted by a cylindrical body having both ends opened, a lid is provided to be fitted and sealed in the both-end openings, and a frame for supporting the axial force of the high-pressure vessel internal pressure acting on the lid from the lid outer surface side. It can be movably provided on both sides of the high pressure vessel via the axis.
[0020]
  By adopting such a configuration, the lid can be attached and detached in a short time and the processing time can be shortened as compared with the case where the coupling between the lid and the high pressure vessel is screwed.
  In this case, it is preferable that a lid for the standby chamber is provided with a processing object moving device that is positioned between the frames and that allows the processing object to be moved from the standby chamber to the processing chamber.
[0021]
  Further, a frame for supporting the axial force of the internal pressure of the high pressure vessel acting on the first and second vessels from the outer surface side of the first and second vessels is provided movably on both sides via the axis of the high pressure vessel. It is preferred that
  It is preferable that the second container is provided with a flange that is supported by the frame so as to project outward in the radial direction.
[0022]
  It is preferable that the frames on both sides are linearly approaching and separating from each other in the radial direction of the high-pressure vessel, or approaching and separating in a double-spreading manner.
  It is preferable that a clamp device is provided that disables the movement of both frames while the both frames support the axial force of the high-pressure vessel.
[0023]
DETAILED DESCRIPTION OF THE INVENTION
  Hereinafter, embodiments of the present invention will be described with reference to the drawings.
  In FIG. 1, the isotropic pressure pressurizing apparatus has a high-pressure vessel 2 for storing a processed product 1 therein and performing hot isostatic pressing. The high-pressure vessel 2 has a cylindrical body 3 formed at both end openings. The cylindrical body 3 is formed in a cylindrical shape, arranged in the vertical axis, and a lower lid 5 is fitted in the lower opening 4 in an airtight manner. The upper opening 6 has a size that allows the processed material 1 to pass therethrough, and an upper lid 7 is detachably fitted into the opening 6 in an airtight manner. The upper opening 6 is called a container opening.
[0024]
  The outer peripheral surface of the cylindrical body 3 is cooled by a cooling device 8, and the cooling device 8 has a water cooling structure.
  A gas hole 9 is formed in the lower lid 5. A pressurized medium supply device and an exhaust device (not shown) are connected to the gas hole 9 to bring the inside of the high-pressure vessel 2 to a predetermined high pressure and to evacuate it. As the pressurizing medium, an inert gas such as argon (Ar) is used.
[0025]
  The high-pressure vessel 2 is configured to withstand an internal pressure of about 1 to 200 MPa. The axial force applied to the lower lid 5 and the upper lid 7 is supported by a yoke frame (not shown). Instead of the yoke frame type, a screw lid type may be used to hold the axial force.
  A heat insulating layer 10 is provided in the high pressure vessel 2. The heat insulating layer 10 is formed in a reverse cup shape using a thin gas-impermeable cylindrical material, and is placed on the lower lid 5 concentrically with the cylindrical body 3. An opening 11 through which the processed object 1 can pass is formed at the center of the ceiling of the heat insulating layer 10. An opening / closing device 12 is provided to open and close the heat insulating layer opening 11.
[0026]
  The opening / closing device 12 includes a sliding door 13 that is divided into two parts left and right from the center of the heat insulating layer opening 11 and is slidable in the left-right direction on the top surface of the ceiling. The sliding door 13 is moved in the left and right directions by the drive mechanism 14 so that the heat insulating layer opening 11 can be opened and closed. The drive mechanism 14 includes a cylinder 15 provided on the outer surface of the cylinder 3 and a piston rod 16 that is slidably provided in the cylinder 15 and penetrates the cylinder 3. Although the slide door 13 is attached, it is not limited to this.
[0027]
  A heating device 17 is disposed in the heat insulating layer 10. The heating device 17 is formed in a cylindrical shape having a size capable of accommodating the processed product 1 therein, and is disposed concentrically with the heat insulating layer 10. For example, the heating device 17 generates heat with an electric resistance type. The heating device 17 heats the inside of the heat insulating layer 10 to a high temperature of 1000 ° C. or higher.
  Thus, the inside of the heat insulating layer 10 is configured as a furnace for heating the processed object 1, and a space surrounded by the heat insulating layer 10 is a process for subjecting the processed object 1 to hot isostatic pressing. It is a chamber 18.
[0028]
  In the high-pressure vessel 2, a standby chamber 19 having a size capable of storing the processed material 1 is formed above the heat insulating layer 10.
  A processing object moving device 20 that allows the processing object 1 to be taken in and out through the heat insulating layer opening 11 is provided on the upper lid 7 of the high-pressure vessel 2.
  The processing object moving device 20 includes a cylinder 21 attached to the center of the upper surface of the upper lid 7, and a piston rod 22 that is fitted to the cylinder 21 so as to be slidable in the vertical direction and penetrates the upper lid 7. The processed product 1 is directly and detachably attached to the lower end of the piston rod 22. Alternatively, a dedicated case (not shown) is provided at the lower end of the piston rod 22, and the processed material can be stored in the case.
[0029]
  In addition, this processed material moving apparatus 20 is not limited to the said cylinder system.
  According to the embodiment of the present invention having the above configuration, first, the heat insulating layer opening 11 is closed by the opening / closing device 12, and the heating device 17 is energized in advance at normal pressure to raise the temperature in the heat insulating layer 10. At this time, since it is normal pressure, it is not necessary to attach the upper lid 7 to the cylinder 3. When a material that is easily oxidized, such as graphite or molybdenum, is used for the heating device 17, the inert gas is used during this period. Purge in the high pressure vessel 2 to prevent oxidation.
[0030]
  On the other hand, in the removed upper lid 7, the processing object 1 is attached to the processing object moving device 20 at another place.
  Next, the upper lid 7 on which the processed product 1 is mounted is inserted into the upper opening (container opening) 6 of the cylindrical body 3. The processed product 1 is located in the standby chamber 19 of the high-pressure vessel 2.
  Vacuuming is performed for the purpose of removing water adhering to the processed product 1, and contamination is removed by performing a series of gas replacement operations such as supplying an inert gas and vacuuming as necessary.
[0031]
  Thereafter, the heat insulating layer opening 11 is opened by the opening / closing device 12, and the processed material 1 is lowered to the processing chamber 18 in the heat insulating layer 10 by the processed material moving device 20. In this state, the slide door 13 of the opening / closing device 12 is closed.
  Since the inside of the high-pressure vessel 2 is kept airtight when the slide door 13 is opened for inserting the processed material, there is no circulation convection inside or outside the heat insulating layer 10 and the inside of the processing chamber 18 is thermally heated. It is kept stable.
[0032]
  Thereafter, the inside of the high-pressure vessel 2 is pressurized and held to perform HIP processing.
  After completion of the HIP process, the opening 11 of the heat insulating layer 10 is opened, the processed material 1 is pulled up to the standby chamber 19 above the processing chamber 18, and the heat insulating layer opening 11 is closed again. In this state, the processed object 1 is exposed to a low-temperature and high-pressure gas atmosphere, so that it rapidly dissipates heat and is cooled by gas convection and radiation on the surface of the processed object 1. In particular, since the high-pressure vessel 2 has a water cooling structure, the inside of the standby chamber 19 is maintained at a low temperature, and is rapidly cooled to a predetermined temperature. After cooling, the processed product 1 is taken out of the high-pressure vessel 2 together with the upper lid 7.
[0033]
  Thereafter, the next processing object 1 is immediately attached, and the next HIP processing is possible. At this time, since the processing chamber 18 in the heat insulating layer 10 is always kept at a high temperature, the temperature raising step is unnecessary.
  In addition, since the removed processed product 1 can be further cooled outside the high-pressure vessel 2, the cooling is completed in a short time. That is, the productivity can be greatly improved as compared with the conventional HIP.
[0034]
  In the above-described embodiment, the open / close device 12 that opens and closes the heat insulating layer opening 11 is exemplified by the one using the slide door 13. However, the open / close lid is fixed to the piston rod 22 of the workpiece moving device 20, and the process is performed. When the object 1 is lowered to the processing chamber 18, the heat insulating layer opening 11 may be closed by the opening / closing lid.
  FIG. 2 shows another embodiment of the present invention, in which the present invention is applied to an impregnation HIP apparatus.
[0035]
  That is, a melt storage container 24 capable of storing the melt 23 is installed in the processing chamber 18. The processed product 1 can be immersed in the melt 23 stored in the storage container 24. Other configurations are the same as those shown in FIG.
  In this embodiment, the processed product 1 is a porous carbon molded body, and the melt 23 is tar pitch, resin, metal, or the like.
[0036]
  The storage container 24 is composed of a crucible, and the crucible has a multilayer structure. Specifically, a structure in which two crucibles are stacked.
  According to the embodiment having the above-described configuration, the processing chamber 18 can be kept at a high temperature at all times, so that it is possible to keep a metal or the like in the melt storage container 24 in a molten state at all times.
  Accordingly, by immersing a porous material as the processed material 1 in the melt 23 and maintaining a high pressure state, it becomes possible to impregnate the molten metal with the porous material at a high pressure. And the cooling time after a process can be shortened significantly, and productivity can be improved significantly.
[0037]
  Moreover, even if the inner crucible containing the molten material is broken, the melt 23 does not spill out to the lower part of the furnace even if the inner crucible containing the molten material is broken. In this apparatus, the connection terminal (not shown) of the electric heater of the heating device 17 is arranged in the hearth part. If the molten metal 23 is spilled out, these are cooled and solidified in the hearth part, and the function of the apparatus is improved. Although this is a serious loss, this embodiment does not have such a risk.
[0038]
  As the crucible material, a carbon or ceramic material that can withstand high temperatures is used, but these are generally brittle materials and are easily broken.
  FIG. 3 shows another embodiment of the present invention, in which the processed product moving apparatus 20 is provided with a holding portion 26 for holding the melted material 25 stored in the storage container 24. The other configurations are the same as those shown in FIG.
[0039]
  That is, a processed product storage case 27 is provided at the lower end of the piston rod 22 of the processed product moving apparatus 20, and the holding portion 26 is provided at the lower portion of the storage case 27.
  A gas suction unit 28 is provided on the upper portion of the cylindrical body 3 of the high-pressure vessel 2.
  According to this embodiment, as shown in FIG. 3, the processed product 1 is stored in the storage case 27, and the low-temperature solid molten material 25 is stored in the holding portion 26.
[0040]
  In addition, what is shown with the arrow in this figure has shown the flow of the inert gas purged. In this state, the opening 11 of the heat insulating layer 10 is closed. Further, since the gas purge is performed, it is possible to prevent the structural material of the heating device 17 from being oxidized and consumed.
  Next, when the upper lid 7 is attached to the container opening 6, the processed material 1 is stored in the standby chamber 19, the heat insulating layer opening 11 is opened, and the processed material moving apparatus 20 lowers the processed material 1 to the processing chamber 18. The processed product 1 in the storage case 27 is immersed in the high-temperature melt 23 in the melt storage container 24, and the solid molten material 25 below the melt is also dissolved in the melt 23.
[0041]
  After the impregnation HIP process, when the processed material 1 is pulled up to the standby chamber 19, all the material 25 of the holding part 26 is dissolved in the melt storage container 24 and is pulled up in an empty state.
  After the processed product 1 is taken out of the high-pressure vessel 2, the holding material 26 is replenished with the replenishing material 25 for the next processing.
[0042]
  Since the impregnation HIP process is performed in the process as described above, the molten material replenishment is performed at the same time when the workpiece 1 is mounted, and there is no need to separately provide a molten material replenishment process.
  Conventionally, in order to replenish the molten material, both the container opening and the heat insulating layer opening were opened and the molten material was dropped into the crucible, so it was necessary to purge a large amount of inert gas, such as lack of oxygen However, such a problem is solved.
[0043]
  Further, conventionally, although purging the inert gas, it was necessary to insert a structure into the furnace from the outside such as a chute for material dropping, and oxidation of the furnace structure could not be completely prevented. According to the embodiment, this problem can be solved.
  Further, in the conventional apparatus, the operator cannot approach the apparatus due to the lack of oxygen, so that an automatic material replenishing apparatus is required, and the apparatus configuration is complicated and expensive.TheHowever, according to the present invention, such an automatic material replenishing device becomes unnecessary.
[0044]
  FIG. 4 shows another embodiment of the present invention.
  The high-pressure vessel 2 includes a first vessel 29 and a second vessel 30 that are formed in a cylindrical shape and divided into two in the axial direction, and the processing chamber 18 is provided in the first vessel 29, The standby chamber 19 is provided in the second container 30.
  The lower lid 5 is fitted in an airtight manner to the lower end of the first container 29, and the upper lid 7 is fitted in an airtight manner to the upper end of the second container 30. The first container 29 and the second container 30 are detachable.
[0045]
  A flange 31 having substantially the same outer diameter as that of the first container 29 is formed in the lower part of the second container 30, and the upper part of the flange 31 is formed to be smaller in diameter than the first container 29 and accommodates the processed material 1. The smallest possible inner diameter.
  The shoulder of the flange 31 of the second container 30 and the lower lid 5 are supported by a yoke frame (not shown), thereby supporting the axial force acting on the high-pressure container 2. Accordingly, the upper lid 7 and the second container 30 are fixed by screw connection or the like.
[0046]
  In addition, the container opening 6 of the present invention refers to the upper opening of the first container 29 in this embodiment.
  The workpiece moving device 20 is provided on the upper lid 7. A lid member 32 that covers the heat insulating layer opening 11 is fixed to the piston rod 22. In this embodiment, the lid member 32 is configured to close the heat insulating layer opening 11 while the slide door 13 of the opening / closing device 12 is opened.
[0047]
  According to the embodiment of the above-described configuration, the high pressure vessel 2 is divided into two parts, so that the upper second vessel 30 can have a minimum inner diameter for storing the processed material 1 and the cost can be reduced. . In addition, the cooling time can be shortened by bringing the inner surface of the second container 30 that is the cooling surface and the processed material 1 closer to each other. Furthermore, since the processed material 1 can be transported in a state where the processed material 1 is stored in the standby chamber 19 in the second container 30, contact with the atmosphere during transportation is minimized, and oxidation and other contaminants are attached. Can be prevented.
[0048]
  FIG. 5 shows another embodiment of the present invention, wherein the standby chamber 19 shown in FIG. 1 is provided with a rectifier 33 for circulating the gas in the standby chamber 19. The configuration of is the same as that shown in FIG.
  The rectifying device 33 is constituted by a cylindrical body 34 that is open at both ends. The cylindrical body 34 surrounds the processing object in the standby chamber 19, and gas circulates from both ends of the cylindrical body 34 through the inside and outside. The high-pressure vessel 2 is arranged with a predetermined gap from the inner peripheral surface.
[0049]
  The rectifying cylinder 34 is formed in a thin cylindrical shape from a gas-impermeable member, for example, a heat-resistant metal such as stainless steel or Inconel material, a carbon composite material, or a graphite material.
  The state shown in FIG. 5 shows the cooling process in the standby chamber 19 after the HIP process, and the processed product 1 is at a temperature of 1000 ° C. or more which is substantially equal to the HIP temperature. The same pressure as the HIP processing pressure is maintained. Since the outer surface of the high-pressure vessel 2 is cooled with cooling water and the inner peripheral surface is also kept at a low temperature, the periphery of the treatment object 1 is directed upward, and the gap between the rectifying cylinder 34 and the inner peripheral surface of the high-pressure vessel 2 is A vigorous circulating flow downward is formed. In the figure, this gas circulation flow is indicated by arrows.
[0050]
  This gas flow takes heat from the processed object 1 when it rises around the processed object 1, and transmits this heat to the inner surface of the high-pressure vessel 2 when descending the gap between the rectifying cylinder 34 and the inner surface of the high-pressure vessel 2. . Since the inside of the container 2 is at a high pressure, the heat transfer coefficient is large, and the inner peripheral surface of the container 2 can be widely used as a heat transfer surface by the rectifying cylinder 34, so that the processing object 1 is efficiently cooled.
[0051]
  Further, since the rectifying cylinder 34 itself prevents direct radiation from the high-temperature processed product 1 to the inner surface of the high-pressure vessel 2, excessive temperature rise of the high-pressure vessel 2 is prevented. Thereby, the heat transfer of the gas convection to the inner peripheral surface of the container 2 is performed more efficiently. Further, by preventing excessive temperature rise, the high-pressure vessel 2 itself can be kept below the design temperature.
  FIG. 6 shows another embodiment of the present invention. According to this embodiment, the upper lid 7 is movable by the lid moving device 35, and the lid moving device 35 is configured to detachably mount the upper lid 7 on the container opening 6. .
[0052]
  The lid moving device 35 has an up-and-down turning shaft 36 that can be raised and lowered and has a plurality of arms 37 that project radially on the up-and-down turning shaft 36. In this embodiment, there are two arms 37 projecting in opposite directions on the diameter line of the up-and-down turning shaft 36. The cylinders 21 of the workpiece moving device 20 are fixed to the arms 37, respectively, and the upper lid 7 is fixed to the lower ends of the cylinders 21.
[0053]
  In the state shown in FIG. 6, the processing object 1 attached to the lower side of one lid 7 has finished the HIP process, and has been pulled up from the processing chamber 18 to the standby chamber 19, and the other processing object unprocessed on the other lid 7. 1 is attached. From this state, the up-and-down turning shaft 36 moves upward, and the processed material 1 that has been subjected to the HIP processing is completely taken out from the standby chamber 19 of the high-pressure vessel 2. Then, as the lifting and lowering turning shaft 36 turns, the HIP-treated processed material 1 is moved to a position different from the installation position of the high-pressure vessel 2, and the untreated processed material 1 is moved above the installation position of the high-pressure vessel 2. . From this state, the up-and-down turning shaft 36 is lowered to store the unprocessed processed material 1 in the standby chamber 19 in the high-pressure vessel 2.
[0054]
  According to the above embodiment, the other processed material 1 can be mounted during the HIP processing of one processed material 1 and can be immediately stored in the high-pressure vessel 2 after the HIP processing on one side. The processing cycle time can be shortened. Further, according to the lid moving device 35, the upper lid 7 can be easily positioned and the operation can be automated.
[0055]
  FIG. 7 shows another embodiment of the present invention. This is the same as the lid moving device 35 except that the high-pressure vessel 2 shown in FIG.
  That is, a second container moving device 38 having an up-and-down turning shaft 36 and a plurality of arms 37 similar to the lid moving device 35 is provided, and the second container 30 is fixed to the arms 37.
[0056]
  According to this embodiment, the treatment object 1 can be moved while being accommodated in the standby chamber 19 in the second container 30, and the inert gas is introduced into the second container 30 during the movement of the treatment object. By purging downward, the inflow of air into the standby chamber 19 can be minimized. Further, the vertical movement amount of the lifting / lowering pivot shaft 36 is only required to attach / detach the second container 30 to / from the first container 29, and the vertical stroke can be made smaller than that of the lid moving device 35.
[0057]
  8 shows a case of impregnation HIP. A lid 40 in which the second container 30 is attached to one of the plurality of arms 37 of the second container moving device 38 and the liquid level measuring device 39 is arranged on the other arm 37 is shown. Is attached.
  In the case of impregnated HIP, it is necessary to replenish the molten material in the melt storage container 24 for the next processing. In order to determine the replenishment amount, the amount of the residual melt 23 in the melt storage container 24 It is necessary to measure
[0058]
  Usually this is done by measuring the liquid level, but in this embodiment it can be done during the desorption of the workpiece. In addition, since the measurement operation can be performed with an airtight pair with the upper opening of the high-pressure vessel closed, adverse effects such as oxidation of the furnace material due to air intrusion into the high-temperature heat insulation layer can be eliminated during this measurement.
  The lid moving device 35 can have the same configuration.
[0059]
  9 to 16 show another embodiment of the present invention. In addition to the configuration shown in FIG. 1, a gas flow forming device 41 is provided.
  That is, a gas flow forming device 41 that generates a predetermined gas flow in the high-pressure vessel 2 is provided in accordance with each step of the isotropic pressure pressurization process including a series of steps.
  The gas flow forming device 41 includes a first passage 42 that communicates the gap between the outer peripheral surface of the heat insulating layer 10 and the inner peripheral surface of the high-pressure vessel 2 and the outside of the high-pressure vessel 2. The first passage 42 is composed of gas holes formed in the lower lid 5.
[0060]
  Further, the gas flow forming device 41 has a second passage 43 that communicates the processing chamber 18 with the outside of the high-pressure vessel 2. The second passage 43 is composed of two independent gas holes formed in the lower lid 5.
  Further, the gas flow forming device 41 has a third passage 44 that communicates the standby chamber 19 with the outside of the high-pressure vessel 2. The third passage 44 includes a gas hole formed in the side surface of the high-pressure vessel cylinder 3 below the standby chamber 19.
[0061]
  A pressurized medium supply device 45 is connected to the first passage 42 and the second passage 43.
  The pressurized medium supply device 45 includes a high-pressure gas container 46, and the high-pressure gas container 46 and the first passage 42 are connected by a first pipe. A first valve 48 is provided in the first pipe 47. A second pipe 49 that bypasses the first valve 48 is provided in the first pipe 47. The second pipe 49 is provided with a throttle 50, a second valve 51, and a third valve 52 from the high-pressure gas container 46 side toward the first passage 42 side. A release pipe 53 that is open to the atmosphere is provided from the second pipe 49 between the second valve 51 and the third valve 52, and a release valve 54 is provided in the release pipe 53. An atmosphere release pipe 55 is connected to the first pipe 47 between the first valve 48 and the first passage 42, and a fourth valve 56 is provided in the atmosphere release pipe 55.
[0062]
  A third pipe 57 connects the high-pressure gas container 46 of the first pipe 47 and the branch portion of the second pipe 49 to one gas hole of the second passage 43. A fifth valve 58 is provided in the third pipe 57.
  A vacuum pump 60 is connected to the other gas hole of the second passage 43 via a fourth pipe 59. A sixth valve 61 is provided in the fourth pipe 59. An atmosphere release pipe 62 is connected between the second passage 43 of the fourth pipe 59 and the sixth valve 61, and a seventh valve 63 and a throttle 64 are interposed in the atmosphere release pipe 62.
[0063]
  A fourth pipe 59 between the sixth valve 61 and the vacuum pump 60 and the third passage 44 are connected by a fifth pipe 65, and an eighth valve 6 is provided in the fifth pipe 65.
  FIG. 9 shows a process of opening the upper lid 7 of the high-pressure vessel 2, opening the high-pressure vessel 2 to the atmosphere, and inserting the processing object 1 suspended from the upper lid 7 into the high-pressure vessel 2.
[0064]
  In this step, the second valve 51 and the third valve 52 are opened, and the other valves are closed. The inert gas in the high-pressure gas container 46 is depressurized through the restriction 50, and the gap between the outer peripheral surface of the heat insulating layer 10 and the inner peripheral surface of the high-pressure container 2 is extended from the lower lid 5 to a positive pressure slightly exceeding atmospheric pressure. The gas is fed upward through and so-called gas purge is continued.
  In this step, the heating device 17 in the heat insulating layer 10 continues to be energized, but since the heat insulating layer opening 11 is closed, high-temperature oxidation consumption in the processing chamber 18 is prevented.
[0065]
  FIG. 10 shows a process of evacuating the processed product 1 for the purpose of drying the processed product 1 after the processed product 1 is stored in the standby chamber 19 and the atmosphere in the high-pressure vessel 2 is discharged.
  In this evacuation step, the eighth valve 66 is opened and the other valves are closed. Thus, the atmosphere in the high-pressure vessel 2 is exhausted by the vacuum pump 60 through the third passage 44 and depressurized to a predetermined degree of vacuum.
[0066]
  At this time, since the inside of the standby chamber 19 can be evacuated intensively, the processing object 1 in the standby chamber 19 can be efficiently vacuum-dried.
  FIG. 11 shows a step of opening the opening 11 of the heat insulating layer 10 after the drying step by evacuation and inserting the processed material 1 from the standby chamber 19 into the processing chamber 18.
  In this step, the second, third and sixth valves 51, 52, 61 are opened and the other valves are closed.
[0067]
  Since this step is performed in a vacuum state in the high-pressure vessel 2, the problem is that various substances evaporated from the processing chamber 18 kept at a high temperature flow out of the heat insulating layer 10 and deposit in the low temperature portion. If they are stacked, the device function may be impaired. In particular, impregnation HIP is a big problem because the container 24 filled with the melt 23 is accommodated in the processing chamber 18.
[0068]
  In order to prevent this, in the embodiment of the present invention, a carrier gas is introduced from the high-pressure gas container 46 into the first passage 42 to such an extent that the vacuum state is not broken. Ascends through the gap between the perimeters,From the opening 11 at the top of the heat insulating layer 10, the inside of the processing chamber 18 is lowered, a gas flow that flows out from the lower lid 5 is generated, and is released to the atmosphere through the fourth pipe 59.
[0069]
  Accordingly, the various substances evaporated in the processing chamber 18 do not flow out from the processing chamber 18 to the upper standby chamber 19 due to the gas flow, and thus the evaporation substance can be prevented from being deposited on the mechanical part.
  FIG. 12 shows a pressurization process, which is a process of loading pressurized gas into the high-pressure vessel 2 for the HIP process after the processing object 1 is loaded in the processing chamber 18, and the fifth valve 8 is opened, The valve is closed.
[0070]
  At this time, since the heat insulation layer 10 is usually a thin gas-impermeable cylinder, when high-pressure gas is fed from the high-pressure gas container 46 into the processing chamber 18 through the second passage 43, the gas is It flows into the waiting chamber 19 through a narrow path in the gap of the slide door 13 in the upper opening 11. Due to the orifice effect of the flow in the narrow path, the pressure in the standby chamber 19 is lower than that in the processing chamber 18. Such a pressure difference prevents the heat insulating layer 10 from buckling.
[0071]
  On the contrary, when the pressure on the outer side of the heat insulating layer 10 is higher than that on the inner side, the heat insulating layer 10 made of a thin plate may buckle, and this occurs at a pressure difference of 0.5 MPa or less, so 1 to 200 MPa. In such an HIP apparatus that handles high-pressure gas, care must be taken. However, in the embodiment of the present invention, a gas flow from the inside of the processing chamber 18 to the standby chamber 19 is caused, so that the buckling can be prevented.
[0072]
  FIG. 13 shows a process in which high pressure gas is supplied and filled and then kept at high pressure to perform HIP processing. All valves are closed and gas is held in the high pressure vessel 2.
  FIG. 14 shows a process of opening the heat insulating layer opening 11 and raising the processed material 1 to the standby chamber 19 after maintaining the high pressure after the HIP process. At this time, the first valve 48 and the seventh valve 63 are opened, and the other valves are closed.
[0073]
  In the above process, the gas introduced into the high pressure vessel 2 from the first passage 42 rises through the gap between the outer periphery of the heat insulating layer 10 and the inner peripheral surface of the high pressure vessel 2, and from the opening 11 of the heat insulating layer 10 to the processing chamber 18. A gas flow descending inside is generated, and the air is released through the throttle 64 of the second passage 43.
  That is, when the heat insulating layer opening 11 is opened under high pressure, a gas flow descending from the upper opening 11 is generated, so that the high-temperature gas in the processing chamber 18 is prevented from rising to the standby chamber 19. It is possible to prevent the members in the standby chamber 19 from being damaged due to overheating, thermal shock, or the like.
[0074]
  At this time, since the gas introduced into the processing chamber 18 from the opening 11 of the heat insulating layer 10 is relatively low temperature, even if there is a gas flowing out from the processing chamber 18 to the standby chamber 19. Since the rising gas and the downstream gas are merged, the rising gas and the downstream gas do not flow into the standby chamber 19 in a high temperature state.
  FIG. 15 shows a process of holding the processing object 1 in the standby chamber 19 and cooling the processing object 1 while keeping the inside of the standby chamber 19 at a high pressure. At this stage, all the valves are closed.
[0075]
  FIG. 16 shows a pressure reduction process for lowering the pressure in the high-pressure vessel 2 after the cooling of the processed material 1 is completed. At this time, the fourth valve 56 is opened and the other valves are closed.
  What is important in this process is that the pressure is lowered while the sliding door 13 of the heat insulating layer opening 11 is closed, and the pressure difference between the inside and outside of the heat insulating layer 10 due to the orifice effect in this portion. Lead to damage. In particular, when the outside of the heat insulating layer 10 is higher than the inside, buckling occurs with a relatively small pressure difference. Therefore, even if there is a pressure difference, the inside needs to be higher than the outside.
[0076]
  Therefore, in the embodiment of the present invention, the gas is discharged from the first passage 42 to the outside of the high-pressure vessel 2 through the gap between the outer periphery of the heat-insulating layer 10 and the inner peripheral surface of the high-pressure vessel 2, so Even if it occurs, the pressure in the processing chamber 18 becomes high and buckling of the heat insulating layer 10 can be prevented.
  Further, since the high-pressure vessel 2 has a water cooling structure, the high-temperature gas in the processing chamber 18 is cooled by the inner peripheral surface of the high-pressure vessel 2 when passing through the gap between the outer periphery of the heat insulating layer 10 and the inner peripheral surface of the high-pressure vessel 2. The temperature is sufficiently lowered before reaching the atmosphere opening pipe 55.
[0077]
  In the above embodiment, the gas in the high-pressure gas container 46 is directly supplied, but the gas may be supplied to the high-pressure container 2 by a gas compressor. Moreover, the 4th piping 59 is unnecessary in the thing which does not perform the gas flow formation process shown in FIG. Furthermore, the present invention can also be applied to an impregnation HIP apparatus that performs an impregnation operation. In this case, a melt storage container 24 is installed in the processing chamber 18.
[0078]
  The embodiment of the isotropic pressure pressurizing method of the present invention is performed using the isotropic pressure pressurizing apparatus shown in each of the above embodiments.
  That is, a high-temperature region and a low-temperature region are formed in the high-pressure vessel 2, the processed product 1 is held in the high-temperature region, and hot isostatic pressing is performed. It is to be cooled with. The high temperature region is constituted by the processing chamber 18, and the low temperature region is constituted by the standby chamber 19.
[0079]
  The high temperature region is always maintained at a high temperature by a heating device 17 surrounded by the heat insulating layer 10 and provided therein. Then, by opening and closing the opening / closing device 12 provided between the high temperature region and the low temperature region, the treatment object 1 can move between the low temperature region and the high temperature region.
  It is assumed that before the hot isostatic pressing process, the processed product 1 is vacuum dried in the low temperature range.
[0080]
  When the opening / closing device 12 is opened, a gas flow is formed in the high-pressure vessel 2 so that the high temperature atmosphere in the high temperature region does not flow to the low temperature region.
  In the step of closing the opening / closing device 12 and increasing or decreasing the pressure in the high-pressure vessel 2, it is preferable to form a gas flow in the high-pressure vessel 2 so that the heat insulating layer 10 does not buckle.
[0081]
  It is preferable to have the process of vacuum-drying the said processed material 1 in the said low-temperature area before the process of the said hot isostatic pressing process.
  When the high-pressure vessel 2 is opened, a gas purge is performed so that the atmosphere does not enter the vessel 2.
  The high pressure vessel 2 is cooled to form the low temperature region.
[0082]
  When the melt 23 is stored in a high-temperature region and the processed product 1 is immersed in the melt 23 to perform hot isostatic pressing, the solid molten material 25 is immersed together with the processed product 1.
  The details of the above method are described in detail in the description of the apparatus shown in FIGS.
  FIG. 17 shows another embodiment of the present invention. This is because the high-pressure vessel 2 shown in FIG. 7 has a two-separation configuration, and the first container 29 and the second vessel 30 that are configured in a two-separation configuration in the axial direction of the cylindrical body 3 formed in a cylindrical shape. The second container 30 is provided with a processing object moving device 20 that allows the processing object 1 to be moved from the standby chamber 19 to the processing chamber 18.
[0083]
  The high-pressure vessel 2 is constituted by a cylindrical body 3 having openings at both ends, and a lower lid 5 is detachably fitted to the lower opening 4 and an upper lid 7 is detachably fitted to the upper opening 6. For the purpose of shortening the cooling time, the second container 30 is close to the processing object 1 and the inner peripheral surface of the container as a cooling surface, and therefore the diameter of the second container 30 perpendicular to the axial direction of the second container 30 is Compared to the diameter of the first container 29, it is configured to be small.
[0084]
  As shown in FIG. 17, the flange 71 of the second container is formed so as to protrude radially outward from the lower part of the second container 30, and the lower surface 72 of the flange 71 and the upper end portion 73 of the first container 29. Is detachably fitted. The flange 71 of the second container 30 has a projecting shape, and the axial force of the internal pressure of the high-pressure container 2 from the outer surface side of the upper surface 74 of the projecting flange 71 and the lower lid 5 of the lower opening 4 of the first container 29. The frame 70 is supported on both sides of the axial center of the high-pressure vessel 2 so as to sandwich the axial center of the high-pressure vessel 2 along the axial direction of the cylindrical body 3. A frame 70 (not shown) that supports the axial force of the internal pressure of the high-pressure vessel 2 to the upper opening 6 from the outer surface side of the upper lid 7 and the lower lid 5 of the lower opening 4 via the axial center of the high-pressure vessel 2. It can also be provided movably on both sides.
[0085]
  As shown in FIG. 17B, the frames 70 on both sides shown in FIG. That is, each of the frames 70 is provided with a rotating shaft 78, and the second container 30 is detached from the first container 29 when the workpiece 1 is loaded. At that time, the frame 70 is manually or rotated. It is rotated around the rotation shaft 78 (indicated by a dotted arrow) by the drive mechanism. That is, the frame 70 is retracted from a position where the axial force of the internal pressure of the high-pressure vessel 2 is being supported (solid line of the frame 70 in FIG. 17B: the dotted line is retracted). The frame 70 can alternately move between a position for supporting the axial force of the internal pressure of the high-pressure vessel 2 and the retracted position by a rotational motion.
[0086]
  Next, a clamp device 77 is provided for disabling the movement of both the frames 70 while the both frames 70 are supporting the axial force of the internal pressure of the high-pressure vessel 2. The horizontal movement (arrow in FIG. 17B) in the direction opposite to the rotation axis 78 of the frame 70 is usually performed by a drive unit (not shown). The clamping and fixing of the frame by the clamp device 77 prevents an unexpected movement such as escape of the frame 70 radially outward when high pressure gas is used for the high pressure vessel 2. The relief of the frame 70 radially outward occurs in the flange 71 due to the axial force support of the frame 70 at a position where the axial force of the internal pressure of the high-pressure vessel 2 deviates from the axial center in the radial direction. This is thought to be due to “deflection”.
[0087]
  FIG. 18 is a top view (schematic diagram) illustrating a clamp device 77 according to another embodiment of the present invention. The frames 70 on both sides linearly approach and separate from each other from the radial direction of the high-pressure vessel 2. Then, two sets of upper and lower clamping devices 77 that make the movement of both frames 70 impossible (the solid line state in FIG. 18) are provided, and the movement (indicated by arrows) is performed by a drive unit (not shown) or the like. . That is, the clamping device 77 that supports the axial force of the internal pressure of the high-pressure vessel 2 is fitted and fixed to both ends of the frame 70 to prevent the frame 70 from moving as described above.
[0088]
  Further, the axial force of the internal pressure of the high-pressure vessel 2 can be supported by the frame 70 having a length (height) corresponding to the axial length of the first container 29 as shown in FIG. 17 (FIG. 18). In addition to reducing the cost of the apparatus due to downsizing, etc., the frame 70 can be easily and quickly attached and detached when the processed material 1 is put in and out. Compared to the structure in which the axial force of the internal pressure of the high-pressure vessel 2 is fixed by screwing the lid and the high-pressure vessel, etc. The operational safety of the pressure and pressure device is also high.
[0089]
  In addition, this invention is not limited to what is shown to each said embodiment. A configuration obtained by combining the configurations described in each embodiment can be employed. Further, the high-pressure vessel is not limited to the cylindrical vertical axis arrangement, and includes a cylindrical shape other than the cylinder and the horizontal axis arrangement.
[0090]
【The invention's effect】
  According to the present invention, it is possible to provide an isotropic pressure pressurizing apparatus and an isotropic pressure pressurizing processing method that can eliminate the drawbacks of the conventional techniques and shorten the cycle time.
[Brief description of the drawings]
FIG. 1 is a cross-sectional view of an isotropic pressure device showing an embodiment of the present invention.
FIG. 2 is a cross-sectional view of an isotropic pressure device showing another embodiment of the present invention.
FIG. 3 is a cross-sectional view of an isotropic pressure device showing another embodiment of the present invention.
FIG. 4 is a cross-sectional view of an isotropic pressure device showing another embodiment of the present invention.
FIG. 5 is a cross-sectional view of an isotropic pressure pressurizing apparatus showing another embodiment of the present invention.
FIG. 6 is a cross-sectional view of an isotropic pressure pressurizing apparatus showing another embodiment of the present invention.
FIG. 7 is a cross-sectional view of an isotropic pressure device showing another embodiment of the present invention.
FIG. 8 is a cross-sectional view of an isotropic pressure device showing another embodiment of the present invention.
FIG. 9 is a cross-sectional view of an isotropic pressure pressurizing apparatus showing another embodiment of the present invention, and shows a step of inserting a processed material into a high-pressure vessel.
FIG. 10 is a cross-sectional view showing a evacuation process in the apparatus shown in FIG. 9;
FIG. 11 is a cross-sectional view showing a process chamber insertion step in the apparatus shown in FIG. 9;
12 is a cross-sectional view showing a boosting step in the apparatus shown in FIG. 9. FIG.
FIG. 13 is a cross-sectional view showing a HIP processing step in the apparatus shown in FIG. 9;
FIG. 14 is a cross-sectional view showing a standby chamber pulling process in the apparatus shown in FIG. 9;
FIG. 15 is a cross-sectional view showing a cooling process in the apparatus shown in FIG. 9;
FIG. 16 is a cross-sectional view showing a step-down process in the apparatus shown in FIG. 9;
FIG. 17 (a) is a cross-sectional view of an isotropic pressure pressurizing apparatus showing another embodiment of the present invention.
(B) is a top view (schematic diagram).
FIG. 18 is a top view (schematic diagram) showing another embodiment of the present invention.
(For the cross-sectional view, FIG. 17A is used.)
[Explanation of symbols]
  1 Processed product
  2 High pressure vessel
  6 Container opening
  7 Lid
10 Thermal insulation layer
11 Heat insulation layer opening
12 Switchgear
17 Heating device
18 treatment room
19 Waiting room
20 Processed goods moving device
23 Melt
24 Melt container
25 Mounting part
29 First container
30 Second container
33 Rectifier
34 cylinder
35 Lid moving device
38 Second container moving device
41 Gas flow forming device
42 First passage
43 Second passage
44 3rd passage
70 frames
71 Flange
77 Clamping device

Claims (19)

In a device having a processing chamber surrounded by a heat insulating layer in the lower part of the high-pressure vessel, having a heating device in the processing chamber, and processing a hot isostatic pressure in the processing chamber,
A standby chamber for storing and cooling the processing object is provided outside and above the heat insulating layer surrounding the processing chamber in the high-pressure vessel,
The heat insulating layer is provided with a heat insulating layer opening that allows the processed material to be inserted into and removed from the standby chamber.
The heat insulating layer opening is provided with an opening / closing device that freely opens and closes the opening ,
The standby chamber is provided with a rectifier for circulating the gas in the standby chamber,
The rectifying device is constituted by a cylindrical body that is open at both ends, and the cylindrical body surrounds the processing object in the standby chamber, and the inside of the high-pressure vessel is circulated so as to circulate gas from both ends to the inside and outside of the cylindrical body. An isotropic pressure pressurizing device, wherein the isotropic pressure pressurizing device is disposed through a predetermined gap with the peripheral surface .   The high-pressure vessel has a first container and a second container that are formed in a cylindrical shape and divided into two in the axial direction, the processing chamber is provided in the first container, and the second container The isotropic pressure pressurizing device according to claim 1, further comprising a standby chamber.   The isotropic pressure pressurizing apparatus according to claim 1 or 2, wherein a melt storage container for storing a melt capable of immersing the processed material is provided in the processing chamber.   The isotropic pressure pressurizing device according to claim 3, wherein the melt container is composed of a crucible, and the crucible has a multi-layer structure.   The high-pressure vessel is provided with a container opening that allows the processing object to be taken in and out, and a lid is provided in the opening so as to be openable and closable. The processing object can be moved from the standby chamber to the processing chamber on the lid. The isotropic pressure pressurizing device according to any one of claims 1 to 4, further comprising a workpiece moving device.   The isotropic pressure pressurizing device according to claim 5, wherein the processed product moving device is provided with a holding portion for holding a material of the melt stored in the melt storage container. The isotropic pressure pressurizing device according to claim 5 or 6 , further comprising a lid moving device that allows the lid to be moved between a position where the lid is mounted on the container opening and a position where the lid is not mounted . The isotropic pressure pressurizing device according to claim 7 , wherein the lid moving device has a plurality of the lids . The isotropic pressure applying apparatus according to claim 2,
The first container and the second container are configured to be detachable, and a second container moving device is provided that allows the second container to be moved between a mounting position and a non-mounting position of the first container. An isotropic pressure device characterized by Depending on the sequence of the steps comprising isostatic pressing process from step of claim 1 to 9, characterized in that a predetermined gas flow gas flow formation apparatus allowed to rise to is provided in the high pressure vessel The isotropic pressure pressurizing apparatus according to any one of the above. The gas flow forming device includes a first passage communicating the clearance between the outer peripheral surface of the heat insulating layer and the inner peripheral surface of the high-pressure vessel, the outside of the high-pressure vessel, and the first passage communicating the processing chamber and the outside of the high-pressure vessel. Two passages,
In the step of holding the inside of the high-pressure vessel at a high pressure and opening the heat insulating layer opening, the pressurized medium is supplied from the first passage and is exhausted from the second passage.
In the step of pressurizing the inside of the high-pressure vessel, the pressurized medium is configured to be supplied from the second passage,
The isotropic pressure pressurizing apparatus according to claim 10 , wherein in the step of lowering the pressure in the high-pressure vessel, the first pressure passage is configured to exhaust air . The gas flow forming device has a third passage communicating the standby chamber and the outside of the high-pressure vessel, and is configured to exhaust from the third passage in the step of evacuating the inside of the high-pressure vessel. The isotropic pressure pressurizing device according to claim 10 or 11 . The isotropic pressure applying apparatus according to claim 2,
The first container and the second container are configured to be separable, and the second container is provided with a processing object moving device that allows the processing object to be moved from the standby chamber to the processing chamber. Pressurizing device. In the isotropic pressure applying apparatus according to claim 1,
The high-pressure vessel is composed of a cylindrical body having both ends open, provided with a lid that is fitted and sealed to the openings at both ends, and a frame that supports the axial force of the internal pressure of the high-pressure vessel acting on the lid from the lid outer surface side, An isotropic pressure pressurizing device, wherein the device is movably provided on both sides of the shaft center of the high-pressure vessel . The antechamber of the lid, positioned between the frame, according to claim 14, wherein said processed product of the treated product moving device to move freely into the processing chamber from the standby chamber is provided Isotropic pressure pressurizer. A frame for supporting the axial force of the internal pressure of the high-pressure vessel acting on the first and second vessels from the outer surface side of the first and second vessels is provided movably on both sides via the axis of the high-pressure vessel. The isotropic pressure pressurizing device according to claim 2 or 13 , characterized in that. The isotropic pressure pressurizing device according to claim 16 , wherein a flange supported on the frame is provided in the second container so as to project outward in a radial direction . The frames on both sides are linearly approaching and separating from each other in the radial direction of the high-pressure vessel, or approaching and separating in a double- spreading manner , etc. Directional pressure press. The isotropy according to any one of claims 14 to 18 , wherein a clamping device is provided for disabling the movement of both frames while the both frames support the axial force of the high-pressure vessel. Pressurizing device.

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