JP4487300B2 - Inkjet head manufacturing method - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a method for manufacturing an inkjet head.
[0002]
[Prior art]
Conventionally, some ink jet heads have two rows of ink channels in order to enable high-speed recording. The manufacture of such an inkjet head having two rows of ink channels is performed, for example, by shifting the positions of two piezoelectric material substrates on which ink channels are formed at the same position, and then nozzles corresponding to the ink channels. A nozzle plate having holes is provided, actuators are connected, wiring boards are connected, and the like.
[0003]
[Problems to be solved by the invention]
If an inkjet head is manufactured by shifting the positions of the two piezoelectric material substrates in this way, it takes time for alignment, and the positional accuracy is lowered, making it difficult to produce a large quantity at low cost. is there.
[0004]
The present invention solves these problems, and an object of the present invention is to provide a method of manufacturing an ink-jet head that is easy to align and capable of mass-producing high-precision products at low cost.
[0005]
[Means for Solving the Problems]
In order to solve the above-described problems, the present invention is configured as follows.
[0006]
According to the first aspect of the present invention, “the first piezoelectric material substrate and the second piezoelectric material substrate are processed in parallel by shifting the pitch of each ink channel;
Forming a drive electrode in the ink channel and forming an extraction electrode connected to the drive electrode;
A cover substrate covering the ink channel is provided on the first piezoelectric material substrate and the second piezoelectric material substrate, leaving the extraction electrode,
The first piezoelectric material substrate and the second piezoelectric material substrate are bonded to the side opposite to the side where the cover substrate is provided, and the center portion is cut,
A method of manufacturing an ink jet head, wherein a nozzle plate having nozzle holes is provided in a portion corresponding to the ink channel. ].
[0007]
According to the first aspect of the present invention, the first piezoelectric material substrate and the second piezoelectric material substrate are processed in parallel by shifting the pitch of each ink channel, and the drive electrode is formed in the ink channel. At the same time, an extraction electrode connected to the drive electrode is formed, and the first piezoelectric material substrate and the second piezoelectric material substrate are bonded to the side opposite to the side where the cover substrate is provided, and the center portion is cut. By providing the nozzle plate, positioning is easy, and high-precision products can be produced in large quantities at low cost.
[0008]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, although the manufacturing method of the ink jet head of the present invention will be described with reference to an embodiment, the embodiment of the present invention is not limited thereto.
[0009]
FIG. 1 is a schematic view showing a manufacturing process of an inkjet head, FIG. 2 is a plan view of a first piezoelectric material substrate, FIG. 3 is a plan view of a second piezoelectric material substrate, and FIG. 4 is provided with a cover substrate. It is a figure which shows a state.
[0010]
First, a first piezoelectric material substrate 10 and a second piezoelectric material substrate 20 are prepared. The first piezoelectric material substrate 10 is composed of a thick substrate 11 and a thin substrate 12, and similarly the second piezoelectric material substrate 10 is provided. The piezoelectric material substrate 20 also includes a thick substrate 21 and a thin substrate 22 (FIG. 1A).
[0011]
A dry film 13 is pasted on the thin substrate 12 of the first piezoelectric material substrate 10, and this dry film 13 is exposed and developed to create a mask for setting the ink channel and electrode processing position (FIG. 1B). ). The first piezoelectric material substrate 10 is grooved at a position set by a mask with laser light to form an ink channel 14, and a drive electrode 15 is formed on the ink channel 14 by Al vapor deposition. The extraction electrode 16 connected to 15 is formed (FIG. 1C).
[0012]
Similarly, a dry film 23 is pasted on the thin substrate 22 of the second piezoelectric material substrate 20, and this dry film 23 is exposed and developed to create a mask for setting the processing positions of ink channels and electrodes. The second piezoelectric material substrate 20 is grooved at a position set by a mask with laser light to form an ink channel 24, and a drive electrode 25 is formed on the ink channel 24 by Al vapor deposition. An extraction electrode 26 connected to 25 is formed.
[0013]
As shown in FIGS. 2 and 3, the first piezoelectric material substrate 10 and the second piezoelectric material substrate 20 are shifted in pitch between the ink channels 14 and 24, and one of the first piezoelectric material substrates 10 and 20 is disposed. The ink channel 14 of the conductive material substrate 10 is processed in parallel by a larger number than the ink channel 24 of the other second piezoelectric material substrate 20. In addition, the ink channel 14 at both end portions of the first piezoelectric material substrate 10 is provided with the extraction electrode 16 at one symmetric position 10a and is not provided with the extraction electrode 16 at the other symmetric position 10b.
[0014]
Next, the cover substrates 17 and 27 covering the ink channels 14 and 24 are provided on the first piezoelectric material substrate 10 and the second piezoelectric material substrate 20 while leaving the extraction electrodes 16 and 26 (FIG. 1D). ) The first piezoelectric material substrate 10 and the second piezoelectric material substrate 20 are bonded to the side opposite to the side where the cover substrates 17 and 27 are provided, and the center portion is cut (FIG. 1 (e)). Then, the nozzle plate 18 having the nozzle holes 18a is provided in the portions corresponding to the ink channels 14 and 24 to manufacture two head bodies (FIG. 1 (f)).
[0015]
Thereafter, an actuator 19a for supplying ink to the ink channels 14 and 24 is connected to each of the two head bodies to the first piezoelectric material substrate 10 and the second piezoelectric material substrate 20, and The wiring board 19b is connected to the extraction electrodes 16 and 26 to simultaneously manufacture two inkjet heads (FIG. 1 (g)).
[0016]
In this way, the pitch of the ink channels 14 and 24 is shifted between the first piezoelectric material substrate 10 and the second piezoelectric material substrate 20, and one substrate is processed in parallel one pair more than the other substrate. Then, the drive electrodes 15 and 25 are formed in the ink channels 14 and 24, and the extraction electrodes 16 and 26 connected to the drive electrodes 15 and 25 are formed, so that the first piezoelectric material substrate 10 and the second piezoelectric material are formed. The material substrate 20 is bonded to the side opposite to the side where the cover substrates 17 and 27 are provided, the center portion is cut, the nozzle plate 18 is provided, and two head bodies are provided, thereby providing two similar inkjet heads. Can be manufactured at the same time.
[0017]
Further, by providing the extraction electrode 16 at one symmetrical position 10a of the first piezoelectric material substrate 10 and not providing the extraction electrode 16 at the other symmetrical position 10b, the first piezoelectric material substrate 10 and the second piezoelectric material substrate 10 are provided. The number of ink channels 14 and the number of ink channels 24 of the piezoelectric material substrate 20 is equal, and the take-out electrode 16 is not provided at the other symmetrical position 10b, so that the head body is positioned, quality control of the product, connection of the actuator 19a, Work in processes such as connection of the wiring board 19b is easy.
[0018]
【The invention's effect】
As described above, in the first aspect of the invention, the first piezoelectric material substrate and the second piezoelectric material substrate are processed in parallel by shifting the pitch of the respective ink channels, and driven to the ink channels. In addition to forming an electrode, an extraction electrode connected to the drive electrode is formed, and the first piezoelectric material substrate and the second piezoelectric material substrate are bonded to the opposite side of the side where the cover substrate is provided. By cutting the section and providing the nozzle plate, it is easy to align and high-precision products can be produced in large quantities at low cost.
[Brief description of the drawings]
FIG. 1 is a schematic view showing a process of manufacturing an inkjet head.
FIG. 2 is a plan view of a first piezoelectric material substrate.
FIG. 3 is a plan view of a second piezoelectric material substrate.
FIG. 4 is a diagram showing a state in which a cover substrate is provided.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 10 1st piezoelectric material board | substrate 20 2nd piezoelectric material board | substrate 14, 24 Ink channel 15, 25 Drive electrode 16, 26 Extraction electrode 17, 27 Cover board | substrate 18 Nozzle plate

Claims (1)

The first piezoelectric material substrate and the second piezoelectric material substrate are processed in parallel by shifting the pitch of each ink channel,
Forming a drive electrode in the ink channel and forming an extraction electrode connected to the drive electrode;
A cover substrate covering the ink channel is provided on the first piezoelectric material substrate and the second piezoelectric material substrate, leaving the extraction electrode,
The first piezoelectric material substrate and the second piezoelectric material substrate are bonded to the side opposite to the side where the cover substrate is provided, and the center portion is cut,
A method of manufacturing an ink jet head, wherein a nozzle plate having nozzle holes is provided in a portion corresponding to the ink channel.

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