JP4484111B2 - Evaluation Method for Gear Tooth Surface Profile Measuring Machine - Google Patents

Description

  The present invention relates to an evaluation method for a gear tooth surface shape measuring machine, and more specifically, an inspection / calibration artifact for evaluating the measurement accuracy of helical gear tooth trace measurement of a gear tooth surface shape measuring machine and a gear using the same. The present invention relates to a technique for evaluating the measurement accuracy of helical gear tooth trace measurement of a tooth surface shape measuring machine.

  Inspection / calibration of gear tooth surface shape measuring machines that measure production gears (gears shipped as products) is performed by measuring inspection / calibration artifacts (standard devices) whose dimensions and shapes of the measurement parts are known. Yes.

Helical gear tooth trace measurement accuracy is inspected and calibrated by helicoid artifacts. For example, Non-Patent Document 1 discloses a helicoid artifact in which a helicoid-shaped groove is provided in a cylindrical portion.
"ISO 18653: 2003 Gears--Evaluation of instruments for the measurement of individual gears", International Organization for Standardization (Figure 4)

  Such an artifact is a three-dimensionally complicated shape, so that it is difficult to manufacture with high accuracy. In addition, it is difficult to accurately measure the price.

  Furthermore, it is necessary to guarantee the traceability of the artifacts, but it becomes clear how much detailed pricing and measurement can be considered as traceable for complex surface shapes such as helicoid artifacts. Not. In addition, current artefacts may be difficult to measure with high accuracy, and traceability is not usually guaranteed.

  Originally, artifacts must be able to be manufactured with high precision in parts used for inspection and calibration. In addition, it must be possible to measure with high accuracy. It is also desirable to ensure traceability.

  In view of such circumstances, the present invention provides a gear tooth surface shape measuring machine that (1) can be manufactured with high accuracy, (2) can be priced and measured with high accuracy, and (3) can easily ensure traceability. To provide inspection / calibration artifacts used for inspection / calibration for helical gear tooth trace measurement, and a method for inspecting / calibrating measurement accuracy of helical gear tooth trace measurement of a gear tooth surface shape measuring machine using the artifact. Objective.

  In order to solve the above problems, the present invention provides an inspection / calibration artifact used for inspection / calibration of helical gear tooth trace measurement of a gear tooth surface shape measuring machine configured as follows.

  The inspection / calibration artifact used for the inspection / calibration of the helical gear tooth trace measurement of the gear tooth surface shape measuring machine includes a first reference portion included in the first plane, and a predetermined non-perpendicular to the first plane. And a second reference portion included in a second plane having an angle of. The inspection / calibration artifact is used for the inspection / calibration of the helical gear tooth trace measurement of the gear tooth surface shape measuring machine. A) The position and inclination of the first reference portion is determined by the gear tooth surface shape measuring machine. When measuring the tooth trace of the helical gear of the measuring object installed in the following (hereinafter referred to as “measuring object is the helical gear”), the position and inclination of the tooth trace measurement tooth surface are substantially matched, and B) The gear tooth surface shape so that the measurement object when the second reference portion is installed in the gear tooth surface shape measuring machine is substantially parallel or substantially perpendicular to the central axis of the helical gear. In the state where it is installed in the measuring machine, the first reference portion is regarded as the measurement target tooth surface of the helical gear of the helical gear, and tooth trace measurement is performed.

  In the above configuration, the inspection / calibration artifact can be manufactured with high accuracy because the first and second reference portions are flat. In addition, the first and second reference portions can be easily measured for flatness or a predetermined angle, and the traceability can be easily guaranteed.

  According to the above configuration, the first reference portion is measured as a tooth trace measurement tooth surface of a helical gear, and the theoretical value of the tooth trace measurement when measured with a gear tooth profile measuring machine is compared with the actual measurement value. By doing so, the measurement accuracy (measurement error) of the tooth trace measurement of the gear tooth surface shape measuring machine can be evaluated.

  In the above configuration, the predetermined angle formed by the first reference portion and the second reference portion of the inspection / calibration artifact is measured by regarding the first reference portion as the tooth trace measurement tooth surface of the helical gear. The first gap between the first reference portion and the tooth trace measurement tooth surface of the gear to be measured is determined to be appropriate for the measurement, and the first reference portion of the inspection / calibration artifact is defined as the tooth trace measurement tooth surface. It is actually measured with a gear tooth surface shape measuring machine by placing it within a range where tooth traces can be measured. In this case, the measurement object can measure a shape close to the tooth trace measurement tooth surface of the helical gear.

  Alternatively, for the inspection / calibration artifact in which the first reference portion and the second reference portion form a predetermined angle, the theoretical gap between the first reference portion and the tooth trace measurement tooth surface of the measurement target gear is appropriate for the measurement. Therefore, the measurement target is the gear specifications of the helical gear (including the torsion angle, pitch circle radius, and tooth width) as appropriate so that tooth trace measurement is possible. The reference portion may be measured as if the measurement object is a tooth trace measurement tooth surface of a helical gear. In this case, it is possible to inspect and calibrate a helical gear as a measurement object of various gear specifications with one inspection / calibration artifact.

  Preferably, at least one of the third to fifth reference units is further provided. The third reference portion is included in a third plane that is orthogonal to the first plane and orthogonal to the second plane. The fourth reference portion is included in a fourth plane extending in parallel with the third plane at a predetermined interval. The fifth reference portion is included in a fifth plane that is orthogonal to the second plane and orthogonal to the third plane.

  In the above configuration, since the third to fifth reference portions are flat, they can be manufactured with high precision, and each flatness and squareness can be easily measured and traceability can be easily guaranteed. is there.

  According to the above configuration, if the inspection / calibration artifact is installed in the gear tooth surface shape measuring machine and the second reference part and at least one of the third to fifth reference parts are measured, the price is set. Based on the measurement result, the position and inclination of the first reference portion can be easily and accurately obtained without measuring the first reference portion.

  Preferably, the third reference unit and the fourth reference unit are provided.

  According to the above configuration, it is possible to use the inspection / calibration artifact assuming that the measurement object of both the right twist and the left twist is a helical gear.

  Moreover, in order to solve the said subject, this invention provides the inspection / calibration method of the measurement precision of the helical gear tooth trace measurement of a gear tooth surface shape measuring machine.

  An inspection / calibration method of the measurement accuracy of helical gear tooth trace measurement of the gear tooth surface shape measuring machine includes a first reference portion included in a first plane, and a predetermined angle that is not perpendicular to the first plane. And a second reference part included in the second plane, and the inspection / calibration artifact for which the pricing measurement has been performed in advance is used. An inspection / calibration method for measuring accuracy of helical gear tooth trace measurement of the gear tooth surface shape measuring machine includes first to fifth steps. In the first step, a) the position and inclination of the first reference portion of the inspection / calibration artifact is determined by a helical gear (hereinafter referred to as “measurement”) installed in the gear tooth surface shape measuring machine. The object is referred to as “helical gear”)) so that it substantially matches the position and inclination of the tooth trace measurement tooth surface when the tooth trace measurement is performed, and b) the second reference portion of the inspection / calibration artifact. However, the inspection / calibration artifact is applied to the gear tooth surface shape measuring machine so that the object to be measured when installed on the gear tooth surface shape measuring machine is substantially parallel or substantially perpendicular to the central axis of the helical gear. Install. In the second step, the inspection / calibration artifact installed in the gear tooth surface shape measuring machine is measured to determine the position and inclination of the first reference portion of the inspection / calibration artifact. In the third step, the first reference portion of the inspection / calibration artifact is regarded as the tooth trace measurement tooth surface of a helical gear, and the tooth tooth measurement is performed by the gear tooth profile measuring machine. To obtain an actual measurement value of the tooth trace measurement. In the fourth step, based on the result of the pricing measurement of the inspection / calibration artifact, and the position and the inclination of the first reference portion of the inspection / calibration artifact obtained in the second step. Then, the theoretical value of the tooth trace measurement is calculated. In the fifth step, the actual measurement value of the tooth trace measurement obtained in the third step is compared with the theoretical value of the tooth trace measurement calculated in the fourth step.

  In the inspection / calibration method, the order of the third step may be interchanged with the second step or the fourth step. The third step may be executed in parallel with at least one of the second step and the fourth step.

  In the first step, inspection / calibration is performed while adjusting the position and inclination of the first reference portion of the inspection / calibration artifact so that the measurement object substantially coincides with the position and inclination of the tooth trace measurement tooth surface of the helical gear. The artifact may be installed in a gear tooth surface shape measuring machine.

  In the second step, the position and inclination of the first reference portion of the inspection / calibration artifact may be obtained directly by measuring the first reference portion. Or you may obtain | require indirectly from the result of the pricing measurement of a test | inspection / calibration artifact, and the measurement of the 2nd reference | standard part of a test | inspection / calibration artifact. When it is obtained indirectly, the measurement of the first reference part of the inspection / calibration artifact may be performed.

  According to the first step, the inspection / calibration artifact is measured so that the position and inclination of the first reference portion substantially coincide with the position and inclination of the tooth trace measurement tooth surface of the helical gear to be measured. In the third step, the first reference part of the inspection / calibration artifact is regarded as the tooth trace measurement tooth surface of the helical gear in the third step, and the tooth trace is measured by the gear tooth profile measuring machine. Measurements can be made.

  In the fifth step, the measurement accuracy (measurement error) of the tooth trace measurement of the gear tooth profile measuring machine can be evaluated by comparing the theoretical value and the actual measurement value of the tooth trace measurement.

  The present invention (1) can be manufactured with high accuracy, (2) can measure with high accuracy, and (3) can easily guarantee traceability, and it can measure the helical gear tooth trace of a gear tooth profile measuring machine. It is possible to provide an inspection / calibration artifact used for inspection / calibration of the above and a method for inspecting / calibrating the measurement accuracy of helical gear tooth trace measurement of a gear tooth surface shape measuring machine using the artifact.

  Hereinafter, embodiments of the present invention will be described with reference to FIGS.

  First, the principle of the inspection / calibration artifact (hereinafter referred to as “artifact”) according to the present invention and the design and use thereof will be described with reference to FIGS.

  As shown in FIG. 7, the locus of the probe contacting one tooth surface of the helical gear that performs tooth trace measurement, that is, the shape of the tooth surface in the tooth muscle direction is such that the probe contacts the same radius portion. Ideally, it becomes a spiral 52 around the central axis 50. Actually, since the tooth width of the helical gear is finite, only the portion 54 of the spiral 52 corresponding to the tooth width of the helical gear exists on the tooth surface. If an appropriate plane is selected for the spiral 52 of the finite portion 54, the spiral 52 of the finite portion 54 can be positioned in the vicinity of the plane.

  As shown in the perspective view of FIG. 8, the spiral 64 corresponding to the shape of the tooth trace direction with which the probe abuts on the tooth surface of the helical gear tooth trace measurement is on the cylindrical surface 60 having the tooth trace measurement radius. Located in. An ellipse 62 in the figure is an intersection line between a certain plane and the cylindrical surface 60 having a tooth trace measurement radius. As shown in FIG. 8, if an appropriate plane is selected, the spatial positions of the spiral 64 and the ellipse 62 can be substantially overlapped in a certain section 66.

  In this way, using an artifact having a plane (hereinafter, referred to as a “tooth trace equivalent plane”) that substantially overlaps a part of the spiral 64, the tooth trace equivalent plane of the artifact has a shape in the tooth trace direction corresponding to the spiral 64. When tooth trace measurement is performed with a gear tooth profile measuring machine having no measurement error on the assumption that it is a tooth surface of a helical gear, it is placed on a tooth trace equivalent plane near the ellipse 62 instead of the original spiral 64. In the gear tooth surface shape measuring machine with no measurement error, the tooth trace error measured when the probe is in contact with the spiral 64 is zero, so that the spiral 64 and the tooth trace equivalent plane are The gear component line direction component of the distance is output as a measurement value of the tooth trace error, which can be obtained theoretically.The effect of the involute helicoid surface of the helical gear Face to gear shaft Those projected on the corner surface referred to as "gear action line" or "line of action".

  Curve A in FIG. 9 (hereinafter referred to as “theoretical value curve A”) is measured when tooth trace measurement is performed assuming that the tooth trace equivalent plane is the tooth surface of the helical gear. It is the example which calculated | required the tooth-tooth error to be carried out theoretically. The horizontal axis is the tooth width (tooth trace direction), and the vertical axis is the tooth trace error.

  Since the actual gear tooth surface shape measuring machine includes a measurement error in the measured value, when tooth trace measurement is performed assuming that the tooth trace equivalent plane is the tooth face of a helical gear, the theoretical value curve A is A measurement result such as a different curve B (hereinafter referred to as “actual measurement curve B”) is output. Since the difference between the theoretical value curve A and the actual measurement value curve B indicates an error of the gear tooth surface shape measuring machine, the gear tooth surface shape measurement is performed by using the difference between the theoretical value curve A and the actual measurement value curve B. It is possible to inspect and calibrate the measurement accuracy of helical gear tooth trace measurement.

  The actual measurement value curve B includes a deviation in flatness of the measurement portion of the tooth trace equivalent plane. Usually, since the flat surface can be manufactured with high accuracy, the influence of the flatness error on the actual measurement value curve B is not affected. Virtually negligible.

  In addition, the actual measurement value curve B includes the influence of the difference between the position and inclination of the tooth trace equivalent plane when actually measured and the position and inclination of the tooth trace equivalent plane in theoretical calculation. In this case, theoretical calculation considering the actual position and inclination of the tooth trace equivalent plane is performed to obtain a theoretical value curve A, and if the difference from the actual measurement value curve B is taken, the actual position and inclination of the plane are calculated. The influence of the difference between the upper position and the inclination is eliminated, and the difference between the theoretical value curve A and the actual measurement value curve B shows only the error of the gear tooth surface shape measuring machine.

  In order to be able to actually use an artifact having a tooth-equivalent plane for the inspection and calibration of a gear tooth profile measuring machine, The gear and the tooth-equivalent plane of the artifact must satisfy the following conditions (a) and (b).

(A) There is a limit to the range of measurement values guaranteed by the gear tooth surface shape measuring machine, so that the actual measurement curve B falls within the range of measurement values guaranteed by the gear tooth surface shape measuring machine, for example, ± 200 μm It becomes a range. Therefore, in order to inspect and calibrate the gear tooth surface shape measuring machine, it is necessary that the actual measurement curve B, which is the output of the gear tooth surface shape measuring machine, does not exceed this range. In order to realize this, the distance between the spiral corresponding to the tooth trace of the helical gear and the plane corresponding to the tooth trace should not be too large.

(B) The gear tooth surface shape measuring machine probe does not come out of the artifact tooth trace equivalent plane during measurement. The tooth tooth equivalent plane of the artifact is finite, so the gear tooth profile measuring machine probe measures. It is necessary not to protrude from the end of the plane corresponding to the tooth trace.

  Next, a specific method of using the artifact having the tooth trace equivalent plane will be described.

  (Usage method 1) Description will be given of a case in which the gear specifications of a helical gear to be inspected and calibrated are determined, and an artifact designed for the helical gear is used.

  In the artifact design, the inclination of the tooth trace equivalent plane is determined by calculation so as to satisfy the condition (a). Further, the tooth trace equivalent plane is designed to an appropriate size so that the condition (b) is satisfied and the probe does not protrude from the end of the tooth trace equivalent plane during measurement.

  In fact, the inclination of the tooth-corresponding plane of the artifact manufactured based on such a design is slightly different from the design value. If the difference between the artifact and the inclination of the tooth-equivalent plane is not negligible, the theoretical value is calculated by taking into account the result of the inclination of the tooth-equivalent plane, and the helical gear is moved using the artifact. What is necessary is just to compare with the actual value obtained by performing the assumed tooth trace measurement.

  (Usage method 2) When there is already an artifact with a known inclination of the tooth trace equivalent plane, the gear tooth surface shape measuring machine is inspected and calibrated using the artifact and assuming the specifications of the helical gear. The usage will be described.

  Assuming the gear specifications of the helical gear as appropriate, calculation is performed in consideration of the inclination of the known tooth trace equivalent plane of the artifact, and it is confirmed that the conditions (a) and (b) are satisfied. Find the theoretical value of. If the condition (a) or (b) is not satisfied, the assumption of the gear specifications of the helical gear is reviewed.

  Next, tooth trace measurement assuming the gear specifications of the helical gear assumed when the theoretical value is obtained is performed, and an actual measurement value of the tooth trace measurement is obtained and compared with the theoretical value.

  According to this method of use, it is possible to target helical gears of various gear specifications having different torsion angles and basic circle radii with one artifact. For this reason, even in an artifact manufactured for a helical gear of a specific gear specification as in the method of use 1, assuming a helical gear with a different gear specification, the gear tooth surface shape measuring machine Can be used for inspection and calibration.

  (Example) The artifact 10 is a rectangular block when viewed from the front and back as shown in FIGS. 1 (a) and 1 (c), and a substantially triangular block when viewed from the side as shown in FIGS. 1 (b) and 1 (d). Shaped member. The bottom surface 18 and the back surface 12 are rectangles substantially orthogonal to each other. The right side surface 14 and the left side surface 15 are symmetrical right-angled triangles extending in parallel with each other, and are substantially orthogonal to the bottom surface 18 and orthogonal to the back surface 12, respectively.

  A substantially rectangular front surface 17 that is substantially orthogonal to the bottom surface 18, the right side surface 14, and the left side surface 15 is formed at the lower front portion of the artifact 10. A substantially rectangular upper surface 11 that is substantially orthogonal to the rear surface 12, the right side surface 14, and the left side surface 15 is formed on the top of the artifact 10.

  A substantially rectangular slope 16 is formed on the front upper portion of the artifact 10. The inclined surface 16 is orthogonal to the right side surface 14 and the left side surface 15 and is inclined with respect to the rear surface 12 by a predetermined angle γ. The inclined surface 16 is a tooth-equivalent plane that is measured as a tooth surface by a gear tooth surface shape measuring machine as if it were a tooth surface. As described above, the angle γ can be determined according to the gear specifications of the helical gear to be measured set as the measurement condition in the gear tooth surface shape measuring machine.

  Of the surfaces constituting the artifact 10, the back surface 12, the right side surface 14, the left side surface 15, and the slope 16 are measurement targets. Since the back surface 12, the right side surface 14, the left side surface 15, and the inclined surface 16 are flat surfaces, they can be manufactured with high accuracy, and highly accurate pricing measurement is easy.

  That is, each of the back surface 12, the right side surface 14, the left side surface 15, and the inclined surface 16 can be processed to a very good flatness, and each flatness can be obtained with high accuracy by using, for example, optical interference fringes. (For example, with an accuracy of about 20 nm). In addition, the perpendicularity between the back surface 12 and the right side surface 14, the perpendicularity between the back surface 12 and the left side surface 15, the perpendicularity between the slope 16 and the right side surface 14, and the perpendicularity between the slope 16 and the left side surface 15, The angle with the inclined surface 16 can also be processed with very high accuracy, and the angle can be measured and measured with high accuracy.

  Note that the back surface 12, the right side surface 14, the left side surface 15, and the inclined surface 16 need only be processed with high accuracy only in the portion to be measured, and the entire surfaces do not necessarily have to be processed with high accuracy. For example, as shown in FIG. 4, the back surface 12, the right side surface 14, and the left side surface 15 (not shown) are respectively provided with portions 12 a, 14 a, 15 a (not shown) that are processed with high accuracy and extend in the vertical direction. And the portions 12b, 14b, 15b (not shown) extending in the horizontal direction processed with high accuracy, and the hatched portions need not necessarily be processed with high accuracy. There is no.

  Further, a through hole 13 penetrating between the right side surface 14 and the left side surface 15, such as a recess for facilitating handling of the artifact 10, may be formed in a region where there is no problem in measurement.

  After manufacturing, the artifact 10 performs price measurement in advance using a highly accurate measurement device (for example, a traceable three-dimensional coordinate measuring machine), and stores the price measurement result. That is, the flatness of each of the back surface 12, the right side surface 14, the left side surface 15, and the slope 16 is measured. Further, the angle γ formed by the back surface 12 and the slope 16, the perpendicularity between the back surface 12 and the right side surface 14, the perpendicularity between the back surface 12 and the left side surface 15, the perpendicularity between the slope 16 and the right side surface 14, and the slope 16 The perpendicularity with the left side surface 15 is measured.

  As shown in FIG. 2, the artifact 10 is placed on the rotary table 4 of the gear tooth surface shape measuring machine 2 and measured by the gear tooth surface shape measuring machine 2. As a result, the gear tooth surface shape measuring machine 2 performs inspection / calibration of helical gear tooth trace measurement.

  The rotary table 4 of the gear tooth surface shape measuring machine 2 can rotate around the central axis M in the vertical direction. The gear tooth surface shape measuring machine 2 is provided with a sensor mounting portion 6 on a column 5 that is movable in two orthogonal directions within a horizontal plane. In the following, the vertical direction (the direction parallel to the central axis M) is the Z direction, and the measurement target helical gear installed in the gear tooth surface shape measuring machine 2 (hereinafter, the measurement target is referred to as “helical gear”). The action line direction of the tooth trace measurement tooth surface when the tooth trace measurement is performed is the Y direction, and the direction perpendicular to both the Y direction and the Z direction is called the X direction. The central axis of the helical gear to be measured coincides with the central axis M of the rotary table 4.

  The sensor attachment portion 6 is movable in the vertical direction (Z direction) along the column 5. A probe 7 extends from the sensor mounting portion 6 in the substantially X direction toward the turntable 4 side. The probe 7 is displaced when the tip 8 of the probe 7 contacts the tooth surface of the gear, and detects the displacement of the tip 8 of the probe 7.

  The artifact 10 is placed on the rotary table 4 of the gear tooth surface shape measuring machine 2 through a jig whose tilt adjustment is not shown, and the position and inclination of the artifact 10 are adjusted, and then the slope 16 of the artifact 10 is changed. Measure the tooth traces by assuming that the measurement object is the tooth trace measurement tooth surface of the helical gear.

  When the artifact 10 is placed on the rotary table 4 of the gear tooth surface shape measuring machine 2 and the position and inclination of the artifact 10 are adjusted, the position and inclination of the slope 16 of the artifact 10 is measured by the tooth of the helical gear. Adjustment is made so that the position and inclination when the tooth measurement of the muscle measurement tooth surface is performed are substantially the same. As a result, when the tooth slope measurement is performed by regarding the slope 16 of the artifact 10 as a measurement target tooth surface of the helical gear, the slope 16 of the artifact 10 is set within the range in which the tooth trace can be measured. . That is, the condition (b) described above is satisfied.

  The size and shape of the artifact 10, particularly the angle γ between the back surface 12 and the slope 16, is determined by the tooth 16 measuring tooth of the tooth 16 and the gear to be measured after the position adjustment of the artifact 10 placed on the gear tooth surface shape measuring machine 2. It is determined so that the theoretical gap with the surface is appropriate for the measurement (for example, the measurement value of the tooth trace measurement of the slope 16 is within the range guaranteed by the gear tooth surface shape measuring machine). That is, the condition (a) described above is satisfied. As a result, when the tooth 16 is measured by assuming that the slope 16 of the artifact 10 is the tooth trace measurement tooth surface of the helical gear, the measurement object measured by the gear tooth surface shape measuring machine 2 is the tooth trace of the helical gear. A shape close to the measurement tooth surface can be measured.

  Next, details of a procedure for performing inspection / calibration using the artifact 10 will be described.

  First, the artifact 10 is placed on the turntable 4 and the inclination of the back surface 12 and the right side surface 14 or the left side surface 15 of the artifact 10 is measured. At this time, the position and inclination of the artifact 10 are set to a predetermined position and inclination at which the position and inclination of the slope 16 of the artifact 10 can be measured by assuming that the measurement target is a tooth surface measurement tooth surface of a helical gear. Make sure they match.

  At a predetermined position and inclination, as shown in FIG. 3 which is an enlarged view of the main part when the artifact 10 is viewed from the upper side of the rotary table 4 in the Z direction, a plane in which the normal line of the slope 16 of the artifact 10 is perpendicular to the X direction ( Y-Z plane), the length of the contact point where the tip 8 of the probe 7 abuts against the inclined surface 16 of the artifact 10 and the center axis M is the measurement target of the tooth trace radius of the helical gear (for example, the reference pitch circle). Radius). When the tooth trace is measured, the tip 8 of the probe 7 moves along the slope 16 of the artifact 10 and does not jump out of the slope 16 of the artifact 10. Ideally, the normal direction of the back surface 12 of the artifact 10 matches the Y direction, and the normal direction of the right side surface 14 or the left side surface 15 matches the X direction.

  The inclination of the artifact 10 is adjusted by using the jig (not shown) capable of adjusting the tilt while measuring the inclination of the back surface 12 and the right side surface 14 or the left side surface 15 of the artifact 10.

  The inclination of the back surface 12 and the right side surface 14 or the left side surface 15 of the artifact 10 is determined by, for example, attaching a high-precision measuring instrument (for example, an electric micrometer) to the sensor mounting portion 6 of the column 5. The column 5 is moved in the X direction or the Y direction, or the sensor mounting portion 6 is moved in the Z direction with the probe of the measuring instrument in contact with the left side surface 15 or the column 15 or the sensor mounting portion 6. It is obtained from the relationship between the movement distance of and the displacement measured by the measuring instrument.

  Or you may obtain | require by measuring while moving the back surface 12 and the right side surface 14 or the left side surface 15 of the artifact 10 with the probe 7 of the gear tooth surface shape measuring machine 2. In this case, for example, the rotation table 4 is rotated 90 degrees, and the back surface 12 and the right side surface 14 or the left side surface 15 of the artifact 10 are measured in a state substantially parallel to the plane perpendicular to the Y direction (XZ plane). To do.

  The final measurement is performed on the inclination of the back surface 12 and the right side surface 14 or the left side surface 15 of the artifact 10 after adjusting the position and inclination of the artifact 10, and the result is stored.

  Next, the tip 8 of the probe 7 of the gear tooth surface shape measuring machine 2 is brought into contact with the inclined surface 16 of the artifact 10. From this tooth trace measurement start state, assuming that the slope 16 of the artifact 10 is a tooth face of a helical gear, the tooth profile measurement machine 2 performs tooth trace measurement to obtain an actual measurement value. That is, while the rotary table 4 is rotated, the displacement of the tip 8 of the probe 7 is measured while moving the sensor mounting portion 6 in the Z direction in proportion to the rotation angle of the rotary table. For example, the measurement result is stored as a pair of a rotation angle of the rotary table 4 and a measurement value in a state where the tip 8 of the probe 7 is in contact with the inclined surface 16.

  Next, a theoretical value of tooth trace measurement is calculated when tooth trace measurement is performed assuming that the slope 16 of the artifact 10 is a tooth trace measurement tooth surface of a helical gear.

  First, based on the inclination measurement result of the back surface 12 and the right side surface 14 or the left side surface 15 of the artifact 10 after adjusting the position and the inclination, and the pricing measurement result of the artifact 10, the inclination (inclination of the slope 16 of the artifact 10). 16 direction cosines). Further, in a state in which tooth trace measurement can be started by the probe 7 of the gear tooth surface shape measuring machine 2, the reference point of the measurement tooth trace curve is a point on the slope 16 of the artifact 10 (contact point of the tip 8 of the probe 7). Find as position.

  Next, assuming that the inclined surface 16 of the artifact 10 is a tooth surface of a helical gear, when the tooth tooth measurement is performed by the gear tooth surface shape measuring machine 2, the rotary table 4 is set to correspond to the tooth muscle measurement. The contact position where the tip 8 of the probe 7 is in contact with the inclined surface 16 when the sensor mounting portion 6 is moved in the Z direction in proportion to the rotation angle of the rotary table is calculated, and the gear tooth surface The theoretical value to be output by the shape measuring machine is calculated and used as the basis for evaluating the measured value.

Finally, the measured value and the theoretical value of the slope 16 of the artifact 10 are compared. For example, as shown in FIG. 5 (a), the vertical axis tooth trace error F _beta, take tooth width b on the horizontal axis, measured values shown by the solid line (the actual value curve), the theoretical value indicated by the broken line ( The theoretical value curve) is superimposed on the same graph. Alternatively, as shown in FIG. 5B, the vertical axis represents the difference ΔF _β between the measured value and the theoretical value, the horizontal axis represents the tooth width b, and numerical values such as deviations δ ⁺ and δ ⁻ are calculated. Or

  In the above procedure, the inclination of the slope 16 is obtained from the measurement results of the inclination of the back surface 12 and the right side surface 14 or the left side surface 15, and the theoretical value is calculated. That is, the back surface 12, the right side surface 14 or the left side surface 15, and the inclined surface 16 of the artifact 10 are processed with high accuracy, and the flatness and squareness of each, and the angle γ formed by the back surface 12 and the inclined surface 16 are set. A pricing measurement may be performed in advance.

  It should be noted that other surfaces than the above, for example, the upper surface 11 is also included in the reference portion, processed with high accuracy, measured in advance, and measured when installed on the gear tooth surface shape measuring machine 2. Also good. In this case, the accuracy of the theoretical value is increased, and an improvement in accuracy of inspection / calibration of the gear tooth surface shape measuring machine 2 can be expected.

  (Modification 1) Next, a simpler procedure will be described.

  As shown in FIG. 6A, the artifact 10 is placed at a substantially predetermined position on the rotary table 4 of the gear tooth surface shape measuring machine 2 through a jig whose tilt can be adjusted (not shown). Then, with the tip 8 of the probe 7 of the gear tooth surface shape measuring machine 2 in contact with the right side surface 14 or the left side surface 15 of the artifact 10 on the rotary table 4, the sensor mounting portion 6 of the artifact 10 is moved in the Z direction. And the inclination of the artifact 10 is adjusted using a jig so that the right side surface 14 or the left side surface 15 of the artifact 10 is parallel to the central axis M of the rotary table 4.

  Next, measurement is performed while moving the column 5 in the X direction with the tip 8 of the probe 7 of the gear tooth surface shape measuring machine 2 in contact with the right side surface 14 or the left side surface 15 of the artifact 10 on the rotary table 4. The arrangement angle of the artifact 10 on the rotary table 4 is obtained.

  Next, the rotary table 4 is rotated in accordance with the measured arrangement angle of the artifact 10 on the rotary table 4, and as shown in FIG. 6B, the back surface 12 of the artifact 10 is substantially perpendicular to the Y direction (XZ plane). And approximately parallel). Then, with the tip 8 of the probe 7 of the gear tooth surface shape measuring machine 2 in contact with the back surface 12 of the artifact 10 on the rotary table 4, the sensor mounting portion 6 of the gear tooth surface shape measuring machine 2 is moved in the Z direction. The measurement is performed while moving the workpiece 10 and the inclination of the artifact 10 is adjusted using a jig so that the back surface 12 of the artifact 10 is parallel to the central axis M of the turntable 4.

  Next, the column 5 of the gear tooth surface shape measuring machine 2 is moved in the X direction in a state where the tip 8 of the probe 7 of the gear tooth surface shape measuring machine 2 is in contact with the back surface 12 of the artifact 10 on the rotary table 4. To measure. The angle of the rotary table made at the time of these measurements is stored, and the arrangement angle of the artifact 10 on the rotary table 4 is obtained using these values.

  At this time, ideally, the measurement target assumed when the back surface 12 of the artifact 10 is installed in the gear tooth surface shape measuring machine 2 is the central axis of the helical gear, that is, the central axis M of the rotary table 4. It is parallel to the plane to be included and perpendicular to the action line direction (Y direction) of the tooth trace measurement tooth surface of the gear to be measured, and the tip 8 of the probe 7 is moved in the Z direction while contacting the back surface 12 of the artifact 10. However, the Y-direction displacement of the tip 8 of the probe 7 is prevented from occurring.

  Next, the tip 8 of the probe 7 of the gear tooth profile measuring machine 2 is brought into contact with the inclined surface 16 of the artifact 10, and from this state, the inclined surface 16 of the artifact 10 is the measurement target tooth surface of the helical gear. Assuming that there is a tooth, the tooth tooth profile is measured by the gear tooth surface shape measuring machine 2.

  In the above procedure, since a measuring device such as a sensor is not used other than the gear tooth surface shape measuring device 2, the measurement accuracy of the gear tooth surface shape measuring device 2 can be easily evaluated.

  (Modification 2) Next, another procedure will be described.

  As shown in FIG. 6B, the artifact 10 is installed at a substantially predetermined position on the turntable 4 so that the back surface 12 of the artifact 10 is substantially perpendicular to the Y direction (substantially parallel to the XZ plane). The inclination of the back surface 12 of the artifact 10 is measured.

  For example, in the state where the tip 8 of the probe 7 of the gear tooth surface shape measuring machine 2 is in contact with the back surface 12 of the artifact 10 on the rotary table 4, the measurement is performed while moving the sensor mounting portion 6 in the Z direction. Find the angle around the X axis. At this time, referring to the measured value, the inclination of the artifact 10 is adjusted using a jig (not shown) so that the back surface 12 of the artifact 10 is as parallel as possible with the central axis M of the rotary table 4, and then moved in the Z direction. You may make it memorize | store the last measured value (namely, angle around the X-axis of the back surface 12) at the time.

  Next, in a state where the tip 8 of the probe 7 of the gear tooth surface shape measuring machine 2 is in contact with the back surface 12 of the artifact 10 on the rotary table 4, the measurement is performed while moving the column 5 in the X direction. Find the angle around the axis. At this time, referring to the measured value, the inclination of the artifact 10 around the Z-axis is adjusted by using a jig so that the Y-direction displacement of the tip 8 of the probe 7 does not occur as much as possible. (That is, the angle of the back surface 12 around the Z axis) may be stored.

  Next, the tip 8 of the probe 7 of the gear tooth surface shape measuring machine 2 is brought into contact with the inclined surface 16 of the artifact 10 and the column 5 is moved in the X direction, and the measurement result and the inclination of the back surface 12 are measured. The angle around the Y axis of the slope 16 is obtained from the measurement result and the pricing measurement result of the artifact 10. At this time, referring to the measured value, the rotation angle around the Y axis of the artifact 10 is adjusted by using a jig so that the Y direction displacement of the tip 8 of the probe 7 does not occur as much as possible. A value (that is, an angle around the Y axis of the inclined surface 16) may be stored. In addition, you may perform the measurement of the angle around the Y-axis of the slope 16 of the artifact 10 after the tooth trace measurement mentioned later.

  Next, assuming that the slope 16 of the artifact 10 is the tooth trace measuring tooth surface of the helical gear, the tooth tooth profile measurement machine 2 performs tooth trace measurement.

  In the above procedure, the theoretical value can be calculated by deriving the inclination of the slope 16 from the measured values of the back surface 12 and the slope 16. That is, only the back surface 12 and the inclined surface 16 of the artifact 10 are processed with high accuracy using only the reference portion, and the flatness of the back surface 12 and the inclined surface 16 and the angle γ formed between the back surface 12 and the inclined surface 16 need only be measured. In addition, it is good also considering the front surface 17 as a reference | standard part instead of the back surface 12. FIG.

  (Modification 3) Next, yet another procedure will be described.

  As shown in FIG. 6B, the artifact 10 is installed at a substantially predetermined position on the rotary table 4 so that the back surface 12 of the artifact 10 is substantially perpendicular to the Y direction (substantially parallel to the XZ plane). The inclination of the upper surface 11 is measured.

  Next, the tip 8 of the probe 7 of the gear tooth surface shape measuring machine 2 is brought into contact with the inclined surface 16 of the artifact 10 and the column 5 is moved in the X direction, and the measurement result and the inclination of the upper surface 11 are measured. The angle around the Z axis of the slope 16 is obtained from the measurement result and the pricing measurement result of the artifact 10. At this time, referring to the measured value, the rotation angle around the Z axis of the artifact 10 is adjusted by using a jig so that the Y direction displacement of the tip 8 of the probe 7 does not occur as much as possible. A value (that is, an angle around the Z axis of the inclined surface 16) may be stored. The angle around the Z-axis of the slope 16 of the artifact 10 may be measured after the tooth trace measurement described later.

  Next, assuming that the slope 16 of the artifact 10 is the tooth trace measuring tooth surface of the helical gear, the tooth tooth profile measurement machine 2 performs tooth trace measurement.

  In the above procedure, the theoretical value can be calculated by deriving the slope of the slope 16 from the measured values of the upper surface 11 and the slope 16. That is, only the upper surface 11 and the inclined surface 16 of the artifact 10 are processed with high accuracy using the reference portion, and the flatness of the upper surface 11 and the inclined surface 16 and the angle (90 ° −γ) formed by the upper surface 11 and the inclined surface 16 are measured and measured. Just do it.

  (Summary) As described above, the artifact 10 is used, the slope 16 is regarded as the tooth trace measurement tooth surface of the helical gear, the tooth tooth measurement is performed by the gear tooth surface shape measuring machine 2, and the actual measurement value is obtained. By obtaining the theoretical value of the tooth trace measurement, the accuracy of the tooth trace measurement by the gear tooth surface shape measuring machine 2 can be determined from the difference between the measured value and the theoretical value. . The artifact 10 can be manufactured with high accuracy, can be priced and measured with high accuracy, and traceability is easily guaranteed.

  The artifact 10 installed in the gear tooth surface shape measuring machine is measured, and the theoretical value of the tooth trace measurement with the artifact 10 installed can be obtained based on the measured value. Further, since the reference portion is a flat surface, the measurement position can be allowed to shift. Therefore, if the artifact 10 is disposed at a substantially predetermined position that satisfies the conditions (a) and (b) described above, the inspection / calibration can be performed without strict installation of the artifact. Therefore, inspection / calibration can be easily performed.

  The present invention is not limited to the above-described embodiment, and can be implemented with various modifications.

  For example, the positions and inclinations of the surfaces 11, 12, 14, 15, 16, and 17 of the artifact 10 are appropriately selected and measured, and adjusted so that the position and inclination of the slope 16 of the artifact 10 become a predetermined position and inclination. can do.

(A) Front view, (b) Right side view, (c) Rear view, (d) Left side view of the artifact. (Example) It is explanatory drawing of the measurement in a gear tooth surface shape measuring machine. (Example) It is the principal part enlarged view which looked at the gear tooth surface shape measuring machine of FIG. 2 from the top. (Example) It is a perspective view of an artifact. (Example) It is a graph of a measurement result. (Example) It is explanatory drawing of an evaluation procedure. (Modification) It is explanatory drawing of the tooth trace of a helical gear. It is explanatory drawing of the tooth trace of a helical gear, and a tooth-equivalent plane. It is a graph of a theoretical value and an actual measurement value.

Explanation of symbols

2 gear tooth surface shape measuring machine 4 rotary table 5 column 6 sensor mounting portion 7 probe 8 tip 10 artifact 11 upper surface (second reference portion, fifth reference portion)
12 Back (2nd reference part, 5th reference part)
14 Right side (3rd reference part, 4th reference part)
15 Left side (4th reference part, 3rd reference part)
16 Slope (first reference part)

Claims (2)

Inspection / calibration artifact used for inspection / calibration of helical gear tooth trace measurement of gear tooth surface shape measuring machine,
The inspection / calibration artifact has a slope, a back surface, at least one of the right side surface, the left side surface, and the top surface, and a block having a bottom for mounting on a gear tooth surface shape measuring machine. Shaped member,
The inclined surface is a first plane including a first reference portion, the back surface is a second plane including a second reference portion, and one of the right side surface and the left side surface is a third plane including a third reference portion. The other side of the right side and the left side is a fourth plane including a fourth reference portion, and the upper surface is a fifth plane including a fifth reference portion,
The first plane is inclined with respect to the second plane by an angle γ, and the angle γ is set to a value corresponding to the inclination of the tooth trace measurement tooth surface of the helical gear,
The third plane is orthogonal to the first plane and orthogonal to the second plane, the fourth plane is orthogonal to the first plane and orthogonal to the second plane, and 5 planes are formed so as to be orthogonal to the second plane and inclined with respect to the first plane by an angle of 90 ° -γ,
In advance, the flatness of each plane, and
An angle between one of the third plane, the fourth plane, and the fifth plane, the first plane, and each of the three planes of the second plane.
Is a block-like member that is priced by precision measurement . A first reference portion included in the first plane; and a second reference portion included in a second plane that forms a predetermined angle that is non-perpendicular to the first plane. A method for inspecting and calibrating the measurement accuracy of helical gear tooth traces of a gear tooth surface shape measuring machine using a specified inspection / calibration artifact,
a) The position and inclination of the first reference portion of the inspection / calibration artifact is a helical gear to be measured (hereinafter referred to as “measuring object is a helical gear”) installed in the gear tooth surface shape measuring machine. .)) So that the position and inclination of the tooth trace measurement tooth surface when the tooth trace measurement is performed, and b) the second reference portion of the inspection / calibration artifact is the gear tooth face shape. A first step of installing the inspection / calibration artifact in the gear tooth surface shape measuring machine so that the object to be measured when installed in the measuring machine is substantially parallel or substantially perpendicular to the central axis of the helical gear; ,
A second step of measuring the inspection / calibration artifact installed in the gear tooth surface shape measuring machine to determine the position and inclination of the first reference portion of the inspection / calibration artifact;
The first reference portion of the inspection / calibration artifact is regarded as the tooth trace measurement tooth surface of a helical gear, the tooth tooth measurement is performed by the gear tooth surface shape measuring machine, and the tooth trace measurement is performed. A third step of obtaining an actual measurement value of
Based on the result of the pricing measurement of the inspection / calibration artifact and the position and inclination of the first reference portion of the inspection / calibration artifact obtained in the second step, A fourth step of calculating a theoretical value;
A fifth step of comparing the actual measurement value of the tooth trace measurement obtained in the third step with the theoretical value of the tooth trace measurement calculated in the fourth step is provided. This is an inspection / calibration method of the measurement accuracy of helical gear tooth trace measurement of a gear tooth surface shape measuring machine.

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