JP4463145B2 - Electrochemical gas sensor and manufacturing method thereof - Google Patents

Electrochemical gas sensor and manufacturing method thereof Download PDF

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JP4463145B2
JP4463145B2 JP2005142902A JP2005142902A JP4463145B2 JP 4463145 B2 JP4463145 B2 JP 4463145B2 JP 2005142902 A JP2005142902 A JP 2005142902A JP 2005142902 A JP2005142902 A JP 2005142902A JP 4463145 B2 JP4463145 B2 JP 4463145B2
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casing
recess
water reservoir
gas sensor
sensor
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JP2006317404A (en
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裕樹 藤森
亀久美 大戸
由起 加藤
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Figaro Engineering Inc
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この発明は、液体電解質ガスセンサやプロトン導電体ガスセンサなどの電気化学ガスセンサとその製造方法とに関する。   The present invention relates to an electrochemical gas sensor such as a liquid electrolyte gas sensor or a proton conductor gas sensor, and a manufacturing method thereof.

特許文献1は、ボタン電池形のプロトン導電体ガスセンサを開示している。このセンサでは、プロトン導電体膜の両面に検知極と対極とを接続したMEAを浅いメタル缶に収容し、メタル缶の底部の開口から検知極へガスを供給する。MEAの上部には開口のないカウンタ電極板を取り付け、ガスケットによりカウンタ電極板をメタル缶に気密に取り付ける。このためメタル缶とカウンタ電極板とがセンサの外部端子となり、センサ各部の接続はかしめによる圧力で保たれる。   Patent Document 1 discloses a button battery type proton conductor gas sensor. In this sensor, an MEA in which a detection electrode and a counter electrode are connected to both surfaces of a proton conductor film is accommodated in a shallow metal can, and gas is supplied from the opening at the bottom of the metal can to the detection electrode. A counter electrode plate without an opening is attached to the upper part of the MEA, and the counter electrode plate is hermetically attached to the metal can with a gasket. For this reason, the metal can and the counter electrode plate serve as external terminals of the sensor, and the connection of each part of the sensor is maintained by pressure due to caulking.

特許文献2では、MEAを一対の金属板の間に挟み込み、上下の熱収縮性フィルムで金属板を覆い、フィルムを熱収縮させたセンサ本体を開示している。熱収縮に伴う圧力で、MEAの内部や金属板との接続が保たれ、金属板をフィルムから突き出させた部分が外部端子となる。また開口を備えた水溜のパックに熱収縮フィルムを取り付け、センサ本体のフィルムの開口と水溜のパックの開口とを接続して、対極へ水蒸気を導入する。   Patent Document 2 discloses a sensor body in which an MEA is sandwiched between a pair of metal plates, the metal plates are covered with upper and lower heat-shrinkable films, and the films are thermally contracted. The connection with the inside of the MEA and the metal plate is maintained by the pressure accompanying the heat shrinkage, and the portion where the metal plate protrudes from the film becomes the external terminal. A heat shrink film is attached to a water reservoir pack having an opening, and the opening of the film of the sensor body and the opening of the water reservoir pack are connected to introduce water vapor into the counter electrode.

特許文献3の図11は、特許文献2と類似のガスセンサを開示している。しかしながらこれらのガスセンサはいずれも実用化されていない。特許文献1のガスセンサは水溜がないので、乾燥雰囲気では動作しない。特許文献2のガスセンサでは、水溜へのセンサ本体の取付の信頼性に疑問がある。   FIG. 11 of Patent Document 3 discloses a gas sensor similar to Patent Document 2. However, none of these gas sensors has been put into practical use. Since the gas sensor of Patent Document 1 has no water reservoir, it does not operate in a dry atmosphere. In the gas sensor of Patent Document 2, there is a question about the reliability of mounting the sensor main body to the water reservoir.

このため発明者らは、特許文献3の図1のガスセンサを実用化してきた。このセンサでは深いメタル缶の上部にくびれを設け、ワッシャをくびれで支持する。ワッシャの下部のメタル缶内のスペースを水溜とし、ワッシャに設けた開口から水蒸気を対極へ導入する。ワッシャの上部には固体電解質や液体電解質を用いた検知部を配置し、その上部にフィルタ材を収容したキャップを被せて、メタル缶とキャップとをガスケットを介してかしめる。検知部の内部やワッシャ、キャップとの接続、ワッシャとメタル缶の接続はかしめの圧力で保たれ、ワッシャの周囲からの水漏れも同様にかしめの圧力とガスケットで防止される。   For this reason, the inventors have put the gas sensor of FIG. This sensor has a constriction at the top of a deep metal can and supports the washer with the constriction. The space in the metal can at the bottom of the washer is used as a water reservoir, and water vapor is introduced into the counter electrode through an opening provided in the washer. A detection unit using a solid electrolyte or a liquid electrolyte is arranged on the top of the washer, and a cap containing a filter material is placed on the detection unit, and the metal can and the cap are caulked through a gasket. The inside of the detector, the connection between the washer and the cap, and the connection between the washer and the metal can are kept at the caulking pressure, and water leakage from around the washer is similarly prevented by the caulking pressure and the gasket.

しかしながら特許文献3の図1のガスセンサは、メタル缶内のワッシャの上部に検知部とキャップとガスケットを配置して製造するので、各部材の位置決めが難しい。
USP5573648 WO 2002/097420A1 WO 2004/011923A1
However, since the gas sensor of FIG. 1 of Patent Document 3 is manufactured by disposing a detection unit, a cap, and a gasket on an upper part of a washer in a metal can, positioning of each member is difficult.
USP 5573648 WO 2002 / 097420A1 WO 2004 / 011923A1

この発明の課題は、製造が容易で特性のばらつきの少ない電気化学ガスセンサと、その製造方法とを提供することにある。   An object of the present invention is to provide an electrochemical gas sensor that is easy to manufacture and has little variation in characteristics, and a method for manufacturing the same.

この発明の電気化学ガスセンサは、
水蒸気導入孔を有しかつ底浅の金属のケーシング内に、少なくとも対極と、液体もしくは固体の電解質膜と、検知極とを備えた検知部が配置され、検知部の上部にかつ検知部と導電的に接続された金属製の蓋が配置され、かつガスケットにより前記蓋の周囲とケーシングとがかしめられたセンサ本体と、
前記ケーシングの底面を支持すると共にケーシングの外周面にフィットしさらに前記センサ本体が導電的に固着されたリセスと、少なくとも該リセスから外部との接続位置までの導電性パスとを有する水溜、とからなる。外部との接続位置は、例えば水溜の底部やリセスの外表面とする。
The electrochemical gas sensor of the present invention is
A detection unit including at least a counter electrode, a liquid or solid electrolyte membrane, and a detection electrode is disposed in a shallow metal casing having a water vapor introduction hole, and is electrically connected to the detection unit and above the detection unit. A sensor body in which a metallic lid connected to each other is arranged and the periphery of the lid and the casing are caulked by a gasket;
A recess that supports the bottom surface of the casing and fits to the outer peripheral surface of the casing and further has the sensor body fixed conductively, and a water reservoir having at least a conductive path from the recess to a connection position with the outside. Become. The connection position with the outside is, for example, the bottom of the water reservoir or the outer surface of the recess.

好ましくは、前記水溜が中間にくびれを有し下部に底のある金属製の筒で、該くびれ部の上部に前記センサ本体のケーシングが固着され、かつくびれの下部のスペースに水が保持されている。
また好ましくは、前記水溜が底板付きのリセスを上部に備えた箱状の部材で、該リセスに前記センサ本体が導電的に固着され、かつ前記箱状の部材の内部のスペースに水が保持されている。
Preferably, the water reservoir is a metal cylinder having a constriction in the middle and a bottom at the bottom, and the casing of the sensor body is fixed to the upper part of the constricted part, and water is held in the space below the constricted part. Yes.
Preferably, the water reservoir is a box-shaped member having a recess with a bottom plate at an upper portion, the sensor body is conductively fixed to the recess, and water is held in a space inside the box-shaped member. ing.

好ましくは、前記リセスで水溜とセンサ本体のケーシングとがかしめられている。
特に好ましくは、前記リセスの裏面とケーシングの表面との間が、シール剤により気密にシールされている。
また好ましくは、前記リセスで水溜とセンサ本体のケーシングとが導電性接着剤により気密に固着されている。
Preferably, the water reservoir and the casing of the sensor main body are caulked by the recess.
Particularly preferably, the space between the back surface of the recess and the surface of the casing is hermetically sealed with a sealant.
Preferably, the water reservoir and the casing of the sensor body are hermetically fixed by the conductive adhesive in the recess.

この発明の電気化学ガスセンサの製造方法は、水蒸気導入孔を有しかつ底浅の金属のケーシング内に、少なくとも対極と、液体もしくは固体の電解質膜と、検知極とを備えた検知部をセットし、検知部の上部にかつ検知部と導電的に接続するように金属製の蓋を配置して、ガスケットにより蓋の周囲とケーシングとをかしめてセンサ本体を製造するステップと、
製造後のセンサ本体を検査するステップと、
前記ケーシングの外周面にフィットしかつ前記ケーシングの底面を支持する底部を備えたリセスと、少なくとも該リセスから外部との接続位置までの導電性パスとを備えた水溜の、リセスの底部で検査済みのセンサ本体のケーシングを支持するように、導電的に固着するステップとからなる。
In the method of manufacturing an electrochemical gas sensor according to the present invention, a detection unit including at least a counter electrode, a liquid or solid electrolyte membrane, and a detection electrode is set in a shallow metal casing having a water vapor introduction hole. A step of manufacturing a sensor main body by arranging a metal lid so as to be conductively connected to the detection unit at the top of the detection unit, and caulking the periphery of the lid and the casing with a gasket;
Inspecting the sensor body after manufacture;
Inspected at the bottom of the recess of the water reservoir having a recess that fits the outer peripheral surface of the casing and supports the bottom surface of the casing, and at least a conductive path from the recess to the connection position with the outside. And a step of conductively fixing so as to support the casing of the sensor body.

この発明では、水溜にではなく、底浅のケーシング内に検知部の各部材をセットすればよいので、これらの位置決めが簡単で、蓋をガスケットでかしめる際にこれらの部材が移動することが少ない。このため製造が簡単で、かつ各部材を所定の位置にセットしやすいので、センサの特性のばらつきが少ない。   In this invention, since each member of the detection unit may be set not in the water reservoir but in the shallow casing, the positioning of these members is simple, and these members may move when the lid is caulked with a gasket. Few. For this reason, manufacturing is simple and each member can be easily set at a predetermined position, so that variations in sensor characteristics are small.

センサのエージングや保管はセンサ本体のみで行うことができ、またセンサ本体のみで検査できるので、良品のみを水溜に固着すれば良い。さらにセンサ本体を水溜に固着するまでは水溜の水は消費されず、かつセンサの寿命は水溜の水が失われることにより定まるので、センサの寿命を延ばすことができる。   Aging and storage of the sensor can be performed only by the sensor main body and can be inspected only by the sensor main body. Further, the water in the water reservoir is not consumed until the sensor body is fixed to the water reservoir, and the life of the sensor is determined by the loss of the water in the water reservoir, so that the life of the sensor can be extended.

センサ本体は水溜のリセスにフィットするように固着されるので、水溜からセンサ本体が脱落したり、水溜に対するセンサ本体の位置が狂うことがない。水溜は例えば金属製とするが、導電性プラスチック製としてもよい。あるいはまた少なくともリセスの内周面や底面から外部との接続位置までを、金属ストリップや金属膜などで接続しても良い。この発明では水溜をセンサ本体の金属ケーシングに導電的に接続できるので、一方の電極の外部端子にでき、金属の蓋が他方の端子となる。またセンサ本体は水溜とは別個の部材で、水溜からセンサ本体内に液体の水が侵入する恐れが少ない。   Since the sensor main body is fixed so as to fit into the recess of the water reservoir, the sensor main body does not fall out of the water reservoir and the position of the sensor main body with respect to the water reservoir does not go wrong. The water reservoir is made of metal, for example, but may be made of conductive plastic. Alternatively, at least from the inner peripheral surface or bottom surface of the recess to the connection position with the outside may be connected with a metal strip or a metal film. In the present invention, the water reservoir can be conductively connected to the metal casing of the sensor body, so that it can be an external terminal of one electrode, and the metal lid is the other terminal. The sensor body is a separate member from the water reservoir, and there is little risk of liquid water entering the sensor body from the water reservoir.

ここでケーシングとリセスの隙間から水蒸気が失われる可能性がある。そこで好ましくはケーシングをリセスにかしめる場合、その間をシーリング剤で気密に封止する。また好ましくはケーシングを導電性接着剤でリセスに固着し、導電性接着剤によるリセスとケーシング間の隙間を封止する。   Here, water vapor may be lost from the gap between the casing and the recess. Therefore, preferably, when the casing is caulked in the recess, the space between the casing is hermetically sealed with a sealing agent. Preferably, the casing is fixed to the recess with a conductive adhesive, and the gap between the recess formed by the conductive adhesive and the casing is sealed.

以下に本発明を実施するための最適実施例を示す。   In the following, an optimum embodiment for carrying out the present invention will be shown.

図1〜図5に、実施例とその変形とを示す。図1において、2はガスセンサで、4はセンサ本体で、6は水溜である。なおセンサ本体4の構造は、実施例と各変形例とを通して共通である。センサ本体4は浅いメタル缶8を備え、その底面に水蒸気導入孔10を備えている。12,16は疎水性導電膜で、例えばPTFE(ポリテトラフルオラエチレン)などで疎水化した、通気性のカーボンシートである。検知部14は例えば固体のプロトン導電体膜や、水酸イオン導電体膜などの電解質膜の表裏に、検知極と対極とを配置したものなどから成り、対極をメタル缶8側に向け、検知極をその反対側に向ける。検知部14には液体電解質膜を用いても良く、この場合硫酸やKOH水溶液、あるいはMgSo4,各種の有機スルホン酸化合物の水溶液などを多孔質のセパレータに保持させる。好ましくはセパレータの両面にプロトン導電体膜などの固体電解質膜を配置し、その外側に検知極と対極とを配置する。なお電解質の種類自体は任意である。 1 to 5 show an embodiment and its modifications. In FIG. 1, 2 is a gas sensor, 4 is a sensor body, and 6 is a water reservoir. The structure of the sensor body 4 is common throughout the embodiments and the respective modifications. The sensor body 4 includes a shallow metal can 8 and a water vapor introduction hole 10 on the bottom surface. Reference numerals 12 and 16 denote hydrophobic conductive films, which are breathable carbon sheets that have been hydrophobized with, for example, PTFE (polytetrafluoroethylene). The detection unit 14 is composed of, for example, a solid proton conductor film or an electrolyte film such as a hydroxide ion conductor film on which the detection electrode and the counter electrode are arranged, and the counter electrode is directed to the metal can 8 side for detection. Point the pole to the other side. A liquid electrolyte membrane may be used for the detection unit 14. In this case, sulfuric acid, a KOH aqueous solution, an aqueous solution of MgSo 4 , various organic sulfonic acid compounds, or the like is held in a porous separator. Preferably, a solid electrolyte membrane such as a proton conductor membrane is disposed on both sides of the separator, and a detection electrode and a counter electrode are disposed on the outside thereof. The type of electrolyte itself is arbitrary.

18はシール剤で、20は金属製のキャップであり、その内部に活性炭やゼオライトなどのフィルタ材22を収容し、24,25は検知ガスの導入用の開口である。開口25と疎水性導電膜16との間に、金属の拡散制御板26を配置し、拡散制御孔28から検知ガスを供給する。拡散制御板26は図示しない検知極へのガスの拡散を制限できる部材であればよい。   Reference numeral 18 denotes a sealing agent, 20 denotes a metal cap, and a filter material 22 such as activated carbon or zeolite is accommodated therein, and 24 and 25 are openings for introducing a detection gas. A metal diffusion control plate 26 is disposed between the opening 25 and the hydrophobic conductive film 16, and a detection gas is supplied from the diffusion control hole 28. The diffusion control plate 26 may be any member that can limit the diffusion of gas to a detection electrode (not shown).

30はガスケットで、32はシール剤で、ガスケット30とメタル缶8の内面との間のスペースを封止する。またシール剤36は、メタル缶8の外面と金属の水溜6の内面の間を気密に封止する。さらに水溜6は底のある筒状の部材で、その中央部よりやや上部にくびれ部34を設けて、この部分でセンサ本体4を支持する。センサ本体4の側面、即ちメタル缶8の側面は、シール剤36により絶縁されているので、メタル缶8の底部のエッジをくびれ部34に当接させて導電性を確保する。また水溜6はかしめ部37により、メタル缶8の上部にかしめられ、これらの間にも前記のシール剤36がある。水溜6の下部には水38が保持され、これは液体の水でもゲル化した水でも良い。   30 is a gasket and 32 is a sealant, which seals the space between the gasket 30 and the inner surface of the metal can 8. The sealing agent 36 hermetically seals between the outer surface of the metal can 8 and the inner surface of the metal water reservoir 6. Further, the water reservoir 6 is a cylindrical member having a bottom, and a constricted portion 34 is provided slightly above the central portion, and the sensor body 4 is supported by this portion. Since the side surface of the sensor body 4, that is, the side surface of the metal can 8 is insulated by the sealing agent 36, the edge of the bottom of the metal can 8 is brought into contact with the constricted portion 34 to ensure conductivity. Further, the water reservoir 6 is caulked on the upper portion of the metal can 8 by the caulking portion 37, and the sealing agent 36 is also present between them. Water 38 is held at the bottom of the water reservoir 6, which may be liquid water or gelled water.

図3に変形例のガスセンサを示す。センサ本体4は図2にもので、円筒状もしくは直方体状の水溜40の蓋42に、底板44を溶接部46で溶接して固着する。45は水蒸気導入孔である。蓋42はこの部分でプレス加工などにより突起48に変形されており、突起48の内側と底板44とから成るリセスに、センサ本体4をかしめ部37でかしめ、その間をシール材36で気密に封止する。かしめ部37からの圧力により、メタル缶8は底板44に押し付けられ、溶接部46を介して蓋42へと電気的接続が保たれる。また蓋42はかしめ部50で水溜40の他の部分にかしめられている。   FIG. 3 shows a modified gas sensor. The sensor main body 4 is as shown in FIG. 2, and a bottom plate 44 is welded and fixed to a lid 42 of a cylindrical or rectangular parallelepiped water reservoir 40 by a welding portion 46. 45 is a water vapor introduction hole. The lid 42 is deformed into a projection 48 at this portion by press working or the like. The sensor body 4 is caulked by a caulking portion 37 in a recess formed by the inside of the projection 48 and the bottom plate 44, and the space between them is sealed with a sealing material 36. Stop. The metal can 8 is pressed against the bottom plate 44 by the pressure from the caulking portion 37, and electrical connection to the lid 42 is maintained through the welded portion 46. The lid 42 is caulked to the other part of the water reservoir 40 by a caulking portion 50.

図3のガスセンサの製造に当たっては、蓋42に底板44を溶接した後、センサ本体4をかしめ、次いでかしめ部50をかしめるとよい。   In manufacturing the gas sensor of FIG. 3, after welding the bottom plate 44 to the lid 42, the sensor main body 4 is caulked, and then the caulking portion 50 is caulked.

図4に他の変形例のガスセンサを示す。この場合も水溜52は筒状もしくは直方体状の形状をし、その蓋54を下側にプレス変形させてリセス58を形成する。センサ本体4をリセス58にセットし、メタル缶8とリセス58の裏面とを導電性接着剤56により固着する。導電性接着剤には例えばアクリル樹脂などにCu粉などの金属粉を混入したものなどを用いると良い。この場合水38の水面が、メタル缶8の底面よりも上部に来る場合、例えばPTFE膜などの通気性のある防水膜60を底板44とメタル缶8との間に配置して防水すると良い。   FIG. 4 shows another modified gas sensor. Also in this case, the water reservoir 52 has a cylindrical shape or a rectangular parallelepiped shape, and the lid 54 is press-deformed downward to form the recess 58. The sensor body 4 is set in the recess 58, and the metal can 8 and the back surface of the recess 58 are fixed by the conductive adhesive 56. As the conductive adhesive, for example, an acrylic resin or the like mixed with metal powder such as Cu powder may be used. In this case, when the water surface of the water 38 comes above the bottom surface of the metal can 8, for example, a waterproof membrane 60 having air permeability such as a PTFE membrane may be disposed between the bottom plate 44 and the metal can 8 to be waterproofed.

実施例や変形例では、センサ本体4は水溜のリセスにセットされ、かしめや導電性接着剤により固着される。センサ本体4の周囲はリセスの内側にフィットし、これらの間の隙間は導電性接着剤で封止され、あるいはシール材36で封止される。これによってこの隙間から水蒸気が蒸発し、水溜の水が失われるのを防止できる。さらにセンサ本体4はリセス内に固着されているので、水溜から脱落したり、あるいは水溜に対して不適切な位置に移動したりすることがない。   In the embodiment and the modification, the sensor body 4 is set in a recess of a water reservoir and fixed by caulking or a conductive adhesive. The periphery of the sensor body 4 fits inside the recess, and the gap between them is sealed with a conductive adhesive or sealed with a sealing material 36. Thus, it is possible to prevent water vapor from evaporating from the gap and losing water in the water reservoir. Furthermore, since the sensor body 4 is fixed in the recess, it does not fall out of the water reservoir or move to an inappropriate position with respect to the water reservoir.

センサ本体4の組立では、浅いメタル缶8の底部に種々の部材をセットしてかしめれば良く、例えば図1のくびれ部34の上に配置されたワッシャなどの上に部材を配置するのではないので、部材の配置が容易である。またこれに伴って部材の位置精度も高く保つことができ、センサ特性のばらつきを小さくできる。メタル缶8は肉厚を薄くできるので、水蒸気導入孔10を小さくできる。水蒸気導入孔10を小さくすると、水溜の水38の消費が少なくなり、ガスセンサ2の寿命を長くすることができる。   In assembling the sensor body 4, various members may be set and caulked on the bottom of the shallow metal can 8. For example, if the member is disposed on a washer disposed on the constricted portion 34 in FIG. Since there is no, arrangement | positioning of a member is easy. As a result, the positional accuracy of the members can be kept high, and variations in sensor characteristics can be reduced. Since the metal can 8 can be made thin, the water vapor introduction hole 10 can be made small. When the water vapor introduction hole 10 is made small, the consumption of the water 38 in the water reservoir is reduced, and the life of the gas sensor 2 can be extended.

図5に、図1のガスセンサ2の製造工程を示すが、図3,図4の変形例の場合も同様である。メタル缶にMEAやセパレータと固体電解質膜や電極膜、並びに疎水性導電膜などをセットし、さらに拡散制御板やシール剤18などをセットする。次いでキャップ20とガスケットとをセットし、かしめることによってセンサ本体4を完成する。   FIG. 5 shows a manufacturing process of the gas sensor 2 of FIG. 1, and the same applies to the modified examples of FIGS. 3 and 4. An MEA, a separator, a solid electrolyte membrane, an electrode film, a hydrophobic conductive film, and the like are set in a metal can, and a diffusion control plate, a sealing agent 18 and the like are further set. Next, the cap body 20 and the gasket are set and caulked to complete the sensor body 4.

この段階でセンサ本体は完成したので、センサ本体のみを在庫し、適宜にエージングする。そして水溜に組み付ける前にセンサ本体を単独で検査し、例えばガス感度を測定する。良品のセンサ本体のみを選別し、水溜のリセスにセンサ本体をセットし、かしめや導電性接着剤などにより固着する。以上により、ガスセンサ2が完成する。
Since the sensor main body is completed at this stage, only the sensor main body is stocked and appropriately aged. And before assembling to a water reservoir, a sensor main body is test | inspected independently, for example, a gas sensitivity is measured. Select only non-defective sensor body, set the sensor body in the water reservoir recess, and fix it by caulking or conductive adhesive. Thus, the gas sensor 2 is completed.

実施例のガスセンサの断面図Sectional view of the gas sensor of the embodiment センサ本体の断面図Cross section of sensor body 変形例のガスセンサの断面図Cross-sectional view of a modified gas sensor 他の変形例のガスセンサの断面図Cross-sectional view of another modified gas sensor 実施例のガスセンサの製造工程図Manufacturing process diagram of gas sensor of embodiment

符号の説明Explanation of symbols

2 ガスセンサ
4 センサ本体
6 水溜
8 メタル缶
10 水蒸気導入孔
12,16 疎水性導電膜
14 検知部
18 シール剤
20 キャップ
22 フィルタ材
24,25 開口
26 拡散制御板
28 拡散制御孔
30 ガスケット
32,36 シール剤
34 くびれ部
37 かしめ部
38 水
40,52 水溜
42,54 蓋
44 底板
45 水蒸気導入孔
46 溶接部
48 突起
50 かしめ部
56 導電性接着剤
58 リセス
60 防水膜
2 Gas sensor 4 Sensor body 6 Water reservoir 8 Metal can 10 Water vapor introduction hole 12, 16 Hydrophobic conductive film 14 Detector 18 Sealing agent 20 Cap 22 Filter material 24, 25 Opening 26 Diffusion control plate 28 Diffusion control hole 30 Gasket 32, 36 Seal Agent 34 Constriction portion 37 Caulking portion 38 Water 40, 52 Water reservoir 42, 54 Lid 44 Bottom plate 45 Water vapor introduction hole 46 Welding portion 48 Projection 50 Caulking portion 56 Conductive adhesive 58 Recess 60 Waterproof film

Claims (7)

水蒸気導入孔を有しかつ底浅の金属のケーシング内に、少なくとも対極と、液体もしくは固体の電解質膜と、検知極とを備えた検知部が配置され、検知部の上部にかつ検知部と導電的に接続された金属製の蓋が配置され、かつガスケットにより前記蓋の周囲とケーシングとがかしめられたセンサ本体と、
前記ケーシングの底面を支持すると共にケーシングの外周面にフィットしさらに前記センサ本体が導電的に固着されたリセスと、少なくとも該リセスから外部との接続位置までの導電性パスとを有する水溜、とからなる電気化学ガスセンサ。
A detection unit including at least a counter electrode, a liquid or solid electrolyte membrane, and a detection electrode is disposed in a shallow metal casing having a water vapor introduction hole, and is electrically connected to the detection unit and above the detection unit. A sensor body in which a metallic lid connected to each other is arranged and the periphery of the lid and the casing are caulked by a gasket;
A recess that supports the bottom surface of the casing and fits to the outer peripheral surface of the casing and further has the sensor body fixed conductively, and a water reservoir having at least a conductive path from the recess to a connection position with the outside. An electrochemical gas sensor.
前記水溜が中間にくびれを有し下部に底のある金属製の筒で、該くびれ部の上部に前記センサ本体のケーシングが固着され、かつくびれの下部のスペースに水が保持されている、請求項1の電気化学ガスセンサ。 The water reservoir is a metal tube having a constriction in the middle and a bottom at the bottom, the casing of the sensor body is fixed to the upper part of the constricted part, and water is held in the space below the constricted part. Item 1. The electrochemical gas sensor according to Item 1. 前記水溜が底板付きのリセスを上部に備えた箱状の部材で、該リセスに前記センサ本体が導電的に固着され、かつ前記箱状の部材の内部のスペースに水が保持されている、請求項1の電気化学ガスセンサ。 The water reservoir is a box-shaped member having a recess with a bottom plate at the top, the sensor body is conductively fixed to the recess, and water is held in a space inside the box-shaped member. Item 1. The electrochemical gas sensor according to Item 1. 前記リセスで水溜とセンサ本体のケーシングとがかしめられている、請求項1の電気化学ガスセンサ。 The electrochemical gas sensor according to claim 1, wherein a water reservoir and a casing of the sensor body are caulked in the recess. 前記リセスの裏面とケーシングの表面との間が、シール剤により気密にシールされている、請求項4の電気化学ガスセンサ。 The electrochemical gas sensor according to claim 4, wherein a gap between the back surface of the recess and the surface of the casing is hermetically sealed with a sealant. 前記リセスで水溜とセンサ本体のケーシングとが導電性接着剤により気密に固着されている、請求項1の電気化学ガスセンサ。 The electrochemical gas sensor according to claim 1, wherein the water reservoir and the casing of the sensor main body are hermetically fixed by the conductive adhesive in the recess. 水蒸気導入孔を有しかつ底浅の金属のケーシング内に、少なくとも対極と、液体もしくは固体の電解質膜と、検知極とを備えた検知部をセットし、検知部の上部にかつ検知部と導電的に接続するように金属製の蓋を配置して、ガスケットにより蓋の周囲とケーシングとをかしめてセンサ本体を製造するステップと、
製造後のセンサ本体を検査するステップと、
前記ケーシングの外周面にフィットしかつ前記ケーシングの底面を支持する底部を備えたリセスと、少なくとも該リセスから外部との接続位置までの導電性パスとを備えた水溜の、リセスの底部で検査済みのセンサ本体のケーシングを支持するように、導電的に固着するステップとからなる、電気化学ガスセンサの製造方法。
A detection unit having at least a counter electrode, a liquid or solid electrolyte membrane, and a detection electrode is set in a shallow metal casing having a water vapor introduction hole, and is electrically connected to the detection unit and above the detection unit. Placing a metal lid so as to be connected, and caulking the periphery of the lid and the casing with a gasket to produce a sensor body;
Inspecting the sensor body after manufacture;
Inspected at the bottom of the recess of the water reservoir having a recess that fits the outer peripheral surface of the casing and supports the bottom surface of the casing, and at least a conductive path from the recess to the connection position with the outside. A method for producing an electrochemical gas sensor, comprising the step of conductively fixing so as to support a casing of the sensor body.
JP2005142902A 2005-05-16 2005-05-16 Electrochemical gas sensor and manufacturing method thereof Expired - Fee Related JP4463145B2 (en)

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