JP4457345B2 - Cleaning solution for dyeing aluminum - Google Patents
Cleaning solution for dyeing aluminum Download PDFInfo
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- JP4457345B2 JP4457345B2 JP2004102607A JP2004102607A JP4457345B2 JP 4457345 B2 JP4457345 B2 JP 4457345B2 JP 2004102607 A JP2004102607 A JP 2004102607A JP 2004102607 A JP2004102607 A JP 2004102607A JP 4457345 B2 JP4457345 B2 JP 4457345B2
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- acid
- cleaning liquid
- cleaning
- aluminum
- spool
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- Expired - Lifetime
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- 238000004140 cleaning Methods 0.000 title claims description 40
- 229910052782 aluminium Inorganic materials 0.000 title claims description 27
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 title claims description 27
- 238000004043 dyeing Methods 0.000 title claims description 3
- 239000007788 liquid Substances 0.000 claims description 21
- WVDDGKGOMKODPV-UHFFFAOYSA-N Benzyl alcohol Chemical compound OCC1=CC=CC=C1 WVDDGKGOMKODPV-UHFFFAOYSA-N 0.000 claims description 12
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 12
- 150000007524 organic acids Chemical class 0.000 claims description 11
- 239000004065 semiconductor Substances 0.000 claims description 5
- 235000019445 benzyl alcohol Nutrition 0.000 claims description 4
- GVNHOISKXMSMPX-UHFFFAOYSA-N 2-[butyl(2-hydroxyethyl)amino]ethanol Chemical compound CCCCN(CCO)CCO GVNHOISKXMSMPX-UHFFFAOYSA-N 0.000 claims description 3
- 125000004432 carbon atom Chemical group C* 0.000 claims description 3
- CRVGTESFCCXCTH-UHFFFAOYSA-N methyl diethanolamine Chemical group OCCN(C)CCO CRVGTESFCCXCTH-UHFFFAOYSA-N 0.000 claims description 3
- WWZKQHOCKIZLMA-UHFFFAOYSA-N octanoic acid Chemical compound CCCCCCCC(O)=O WWZKQHOCKIZLMA-UHFFFAOYSA-N 0.000 claims description 3
- WVDDGKGOMKODPV-ZQBYOMGUSA-N phenyl(114C)methanol Chemical compound O[14CH2]C1=CC=CC=C1 WVDDGKGOMKODPV-ZQBYOMGUSA-N 0.000 claims description 2
- 150000001735 carboxylic acids Chemical class 0.000 claims 1
- 238000005562 fading Methods 0.000 description 8
- 238000000034 method Methods 0.000 description 7
- 239000003566 sealing material Substances 0.000 description 7
- 238000005406 washing Methods 0.000 description 7
- 239000002253 acid Substances 0.000 description 6
- 239000000463 material Substances 0.000 description 6
- 239000000758 substrate Substances 0.000 description 6
- 239000000853 adhesive Substances 0.000 description 5
- 230000001070 adhesive effect Effects 0.000 description 5
- MUBZPKHOEPUJKR-UHFFFAOYSA-N Oxalic acid Chemical compound OC(=O)C(O)=O MUBZPKHOEPUJKR-UHFFFAOYSA-N 0.000 description 4
- 239000011248 coating agent Substances 0.000 description 4
- 238000000576 coating method Methods 0.000 description 4
- 238000005260 corrosion Methods 0.000 description 4
- 230000007797 corrosion Effects 0.000 description 4
- 239000011148 porous material Substances 0.000 description 4
- 238000004804 winding Methods 0.000 description 4
- QTBSBXVTEAMEQO-UHFFFAOYSA-N Acetic acid Chemical compound CC(O)=O QTBSBXVTEAMEQO-UHFFFAOYSA-N 0.000 description 3
- 238000004040 coloring Methods 0.000 description 3
- 239000003599 detergent Substances 0.000 description 3
- 239000000428 dust Substances 0.000 description 3
- 210000002374 sebum Anatomy 0.000 description 3
- HZAXFHJVJLSVMW-UHFFFAOYSA-N 2-Aminoethan-1-ol Chemical compound NCCO HZAXFHJVJLSVMW-UHFFFAOYSA-N 0.000 description 2
- FERIUCNNQQJTOY-UHFFFAOYSA-N Butyric acid Chemical compound CCCC(O)=O FERIUCNNQQJTOY-UHFFFAOYSA-N 0.000 description 2
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 description 2
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 2
- 239000002390 adhesive tape Substances 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 2
- 239000000356 contaminant Substances 0.000 description 2
- XBDQKXXYIPTUBI-UHFFFAOYSA-N dimethylselenoniopropionate Natural products CCC(O)=O XBDQKXXYIPTUBI-UHFFFAOYSA-N 0.000 description 2
- 238000001035 drying Methods 0.000 description 2
- 238000010828 elution Methods 0.000 description 2
- IPCSVZSSVZVIGE-UHFFFAOYSA-N hexadecanoic acid Chemical compound CCCCCCCCCCCCCCCC(O)=O IPCSVZSSVZVIGE-UHFFFAOYSA-N 0.000 description 2
- 238000007654 immersion Methods 0.000 description 2
- 150000007522 mineralic acids Chemical class 0.000 description 2
- WRIDQFICGBMAFQ-UHFFFAOYSA-N (E)-8-Octadecenoic acid Natural products CCCCCCCCCC=CCCCCCCC(O)=O WRIDQFICGBMAFQ-UHFFFAOYSA-N 0.000 description 1
- IWSZDQRGNFLMJS-UHFFFAOYSA-N 2-(dibutylamino)ethanol Chemical compound CCCCN(CCO)CCCC IWSZDQRGNFLMJS-UHFFFAOYSA-N 0.000 description 1
- BFSVOASYOCHEOV-UHFFFAOYSA-N 2-diethylaminoethanol Chemical compound CCN(CC)CCO BFSVOASYOCHEOV-UHFFFAOYSA-N 0.000 description 1
- LQJBNNIYVWPHFW-UHFFFAOYSA-N 20:1omega9c fatty acid Natural products CCCCCCCCCCC=CCCCCCCCC(O)=O LQJBNNIYVWPHFW-UHFFFAOYSA-N 0.000 description 1
- HNNQYHFROJDYHQ-UHFFFAOYSA-N 3-(4-ethylcyclohexyl)propanoic acid 3-(3-ethylcyclopentyl)propanoic acid Chemical compound CCC1CCC(CCC(O)=O)C1.CCC1CCC(CCC(O)=O)CC1 HNNQYHFROJDYHQ-UHFFFAOYSA-N 0.000 description 1
- QSBYPNXLFMSGKH-UHFFFAOYSA-N 9-Heptadecensaeure Natural products CCCCCCCC=CCCCCCCCC(O)=O QSBYPNXLFMSGKH-UHFFFAOYSA-N 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- UEEJHVSXFDXPFK-UHFFFAOYSA-N N-dimethylaminoethanol Chemical compound CN(C)CCO UEEJHVSXFDXPFK-UHFFFAOYSA-N 0.000 description 1
- 239000005642 Oleic acid Substances 0.000 description 1
- ZQPPMHVWECSIRJ-UHFFFAOYSA-N Oleic acid Natural products CCCCCCCCC=CCCCCCCCC(O)=O ZQPPMHVWECSIRJ-UHFFFAOYSA-N 0.000 description 1
- 229910019142 PO4 Inorganic materials 0.000 description 1
- 235000021314 Palmitic acid Nutrition 0.000 description 1
- 239000004820 Pressure-sensitive adhesive Substances 0.000 description 1
- QAOWNCQODCNURD-UHFFFAOYSA-L Sulfate Chemical compound [O-]S([O-])(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-L 0.000 description 1
- GSEJCLTVZPLZKY-UHFFFAOYSA-N Triethanolamine Chemical compound OCCN(CCO)CCO GSEJCLTVZPLZKY-UHFFFAOYSA-N 0.000 description 1
- MQRWBMAEBQOWAF-UHFFFAOYSA-N acetic acid;nickel Chemical compound [Ni].CC(O)=O.CC(O)=O MQRWBMAEBQOWAF-UHFFFAOYSA-N 0.000 description 1
- 230000002378 acidificating effect Effects 0.000 description 1
- 229910000147 aluminium phosphate Inorganic materials 0.000 description 1
- LHIJANUOQQMGNT-UHFFFAOYSA-N aminoethylethanolamine Chemical compound NCCNCCO LHIJANUOQQMGNT-UHFFFAOYSA-N 0.000 description 1
- 239000004566 building material Substances 0.000 description 1
- 150000001732 carboxylic acid derivatives Chemical class 0.000 description 1
- 229940011182 cobalt acetate Drugs 0.000 description 1
- QAHREYKOYSIQPH-UHFFFAOYSA-L cobalt(II) acetate Chemical compound [Co+2].CC([O-])=O.CC([O-])=O QAHREYKOYSIQPH-UHFFFAOYSA-L 0.000 description 1
- 238000012790 confirmation Methods 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- ZBCBWPMODOFKDW-UHFFFAOYSA-N diethanolamine Chemical compound OCCNCCO ZBCBWPMODOFKDW-UHFFFAOYSA-N 0.000 description 1
- 238000007865 diluting Methods 0.000 description 1
- 238000010981 drying operation Methods 0.000 description 1
- 239000003344 environmental pollutant Substances 0.000 description 1
- 239000010419 fine particle Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 238000005342 ion exchange Methods 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- QXJSBBXBKPUZAA-UHFFFAOYSA-N isooleic acid Natural products CCCCCCCC=CCCCCCCCCC(O)=O QXJSBBXBKPUZAA-UHFFFAOYSA-N 0.000 description 1
- -1 isostearyl Chemical group 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000011859 microparticle Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- WQEPLUUGTLDZJY-UHFFFAOYSA-N n-Pentadecanoic acid Natural products CCCCCCCCCCCCCCC(O)=O WQEPLUUGTLDZJY-UHFFFAOYSA-N 0.000 description 1
- 229940078494 nickel acetate Drugs 0.000 description 1
- ZQPPMHVWECSIRJ-KTKRTIGZSA-N oleic acid Chemical compound CCCCCCCC\C=C/CCCCCCCC(O)=O ZQPPMHVWECSIRJ-KTKRTIGZSA-N 0.000 description 1
- 235000006408 oxalic acid Nutrition 0.000 description 1
- NBIIXXVUZAFLBC-UHFFFAOYSA-K phosphate Chemical compound [O-]P([O-])([O-])=O NBIIXXVUZAFLBC-UHFFFAOYSA-K 0.000 description 1
- 239000010452 phosphate Substances 0.000 description 1
- 231100000719 pollutant Toxicity 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 235000019260 propionic acid Nutrition 0.000 description 1
- IUVKMZGDUIUOCP-BTNSXGMBSA-N quinbolone Chemical compound O([C@H]1CC[C@H]2[C@H]3[C@@H]([C@]4(C=CC(=O)C=C4CC3)C)CC[C@@]21C)C1=CCCC1 IUVKMZGDUIUOCP-BTNSXGMBSA-N 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 125000004079 stearyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- TUNFSRHWOTWDNC-HKGQFRNVSA-N tetradecanoic acid Chemical compound CCCCCCCCCCCCC[14C](O)=O TUNFSRHWOTWDNC-HKGQFRNVSA-N 0.000 description 1
- 229910021642 ultra pure water Inorganic materials 0.000 description 1
- 239000012498 ultrapure water Substances 0.000 description 1
- 238000004506 ultrasonic cleaning Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
Landscapes
- Cleaning By Liquid Or Steam (AREA)
- Detergent Compositions (AREA)
- Cleaning And De-Greasing Of Metallic Materials By Chemical Methods (AREA)
- Wire Bonding (AREA)
Description
本発明は染色アルミニウム用洗浄液に関する。 The present invention relates to a cleaning solution for dyed aluminum.
アルミニウム基材は軽量で加工性に優れるため自動車部材や建材部品、装飾部品、電気部品等の各種用途に供されており、通常は耐食性を向上させる目的からその表面に陽極酸化被膜処理（アルマイト被膜処理）が施される。ところで、当該処理後のアルミニウム基材は金属地金の白色系の外観であるため、意匠の向上等の目的からその表面を更に着色処理することがある。アルミニウム基材の着色処理法としては電解着色法が知られているが、アルマイト処理したアルミニウム基材を染料浴に浸漬し、アルマイト被膜表面に形成された無数の微細な縦孔（ポアー）に有機染料を吸着させることによって表面の染色を行なう染色法も優れた着色処理法の一つである。 Aluminum bases are lightweight and have excellent processability, so they are used in various applications such as automotive parts, building material parts, decorative parts, and electrical parts. Usually, anodized film treatment (anodized coating on the surface for the purpose of improving corrosion resistance) Processing). By the way, since the aluminum base material after the treatment has a white appearance of a metal ingot, the surface thereof may be further colored for the purpose of improving the design. The electrolytic coloring method is known as a coloring treatment method for an aluminum substrate, but anodized aluminum substrate is immersed in a dye bath, and organics are formed in countless fine holes (pores) formed on the surface of the anodized coating. A dyeing method in which a surface is dyed by adsorbing a dye is also an excellent coloring treatment method.
染色したアルミニウムの用途の一つに、半導体のワイヤーボンディングに用いられる極細のワイヤー（金、銅等）を巻装するためのスプールがある。このスプールは染色アルミニウム基材を円筒状に形成したもので両端にフランジを有しており、外壁面は使用現場における混同を防ぐ目的から青、黄、茶色等に色分けされている。ワイヤーはこのスプールの胴部に巻装され、その端部はフランジ部において粘着テープにより仮止めされる。 One of the uses of dyed aluminum is a spool for winding ultrafine wires (gold, copper, etc.) used for semiconductor wire bonding. This spool is formed of a dyed aluminum base material in a cylindrical shape and has flanges at both ends, and the outer wall surface is color-coded in blue, yellow, brown, etc. for the purpose of preventing confusion at the site of use. The wire is wound around the body of the spool, and its end is temporarily fixed with an adhesive tape at the flange.
前記スプールを含め、染色アルミニウム基材からなる部品、部材は使用に先立ち、あるいは使用後にその表面に付着した汚れ（皮脂、ゴミ、チリ等）を除去するため、洗浄に付されることがある。例えば前記スプールの場合、スプールに巻装するワイヤーには極度の清浄度が要求されることから、スプール表面に付着した皮脂やチリ等だけでなく、前記粘着テープの粘着剤残りを極力除去しなければならない。ワイヤーを巻き取った後のスプールは、例えばベンジルアルコールを含有する洗浄液（例えば特許文献１を参照）を用いて洗浄される。洗浄が済むとスプールは純水等のリンス液で濯がれ、ついで乾燥した後に再利用される。 Parts and members made of a dyed aluminum substrate including the spool may be subjected to washing prior to use or to remove dirt (sebum, dust, dust, etc.) adhering to the surface after use. For example, in the case of the spool, since the wire wound around the spool is required to be extremely clean, not only sebum and dust adhering to the spool surface but also the remaining adhesive on the adhesive tape must be removed as much as possible. I must. The spool after winding the wire is cleaned using, for example, a cleaning liquid containing benzyl alcohol (see, for example, Patent Document 1). After cleaning, the spool is rinsed with a rinse solution such as pure water, and then reused after being dried.
しかし、染色アルミニウムからなる被洗浄物を前記洗浄液で繰り返し洗浄した場合にアルミニウム表面色が徐々に退色（脱色）するという問題がしばしば生じていた。特に前記スプールの場合、表面の色が落ちると、単なる意匠性の低下にとどまらず、当初の目的（使用現場での取扱い時の混同防止のために色分け）を達成しがたくなる。 However, when an object to be cleaned made of dyed aluminum is repeatedly cleaned with the cleaning liquid, there is often a problem that the color of the aluminum surface gradually fades (decolors). In particular, in the case of the spool, when the color of the surface is lowered, it is difficult to achieve the original purpose (color coding for preventing confusion at the time of handling at the site of use) as well as a simple decline in design.
本発明は、染色アルミニウム基材からなる部品・部材、特に該基材から形成される半導体ボンディングワイヤー巻装用スプールの表面に付着した汚れに対して、高い洗浄性を示し、かつ表面の退色を生じない洗浄液を提供することを目的とする。 The present invention exhibits high detergency and stains on the surface of parts and members made of a dyed aluminum base material, particularly dirt adhering to the surface of a semiconductor bonding wire winding spool formed from the base material. The purpose is to provide no cleaning solution.
本出願人は前記課題を解決するべく、前記染色アルミニウム基材の退色の機構について鋭意検討を重ねた結果、以下の着眼（仮説）に基づきかかる課題を解決するに至った。 As a result of intensive studies on the fading mechanism of the dyed aluminum base material in order to solve the above problems, the present applicant has come to solve the above problems based on the following viewpoints (hypotheses).
従来、染色アルミニウムは、表面を覆うアルマイト被膜に形成された微細な縦孔（ポアー）に有機染料を吸着させて着色した後、通常このポアーの開口部からの有機染料の溶出を防止するべく、酢酸ニッケルや酢酸コバルト等のいわゆる封孔材を用いて封孔処理されている。そうすると前記の退色は、洗浄の際に、被洗浄物から溶出する汚染物質と封孔材とが化学的に作用して当該封孔材が除去されてしまい、ポアー内部の有機染料が洗浄液中に溶出するため生じるのであろうと仮定した。 Conventionally, dyed aluminum is colored by adsorbing an organic dye in fine vertical holes (pores) formed on the anodized coating covering the surface, and then usually preventing the organic dye from elution from the opening of the pore. Sealing treatment is performed using a so-called sealing material such as nickel acetate or cobalt acetate. In this case, the fading is caused by the chemical action of the contaminants and the sealing material that are eluted from the object to be cleaned during the cleaning process, thereby removing the sealing material, and the organic dye inside the pore is contained in the cleaning liquid. It was assumed that this would occur due to elution.
また、染色アルミニウムの洗浄を繰り返した後の洗浄液ｐＨが洗浄前と比べて酸性領域に傾いているとの事実に照らし、封孔材が除去される理由は、封孔材が汚染物質中の酸成分により侵されて溶解したものであると仮定し、この酸をトラップすれば前記退色を抑制できるとの着想に至った。本発明は上記の事実確認、仮定および着想に基づき完成されたものである。 Also, in light of the fact that the pH of the cleaning solution after repeated washing of the dyed aluminum is inclined to the acidic region compared to before cleaning, the reason for the removal of the sealing material is that the sealing material is an acid in the pollutant. Assuming that it was invaded and dissolved by the components, the inventors have come up with the idea that trapping this acid can suppress the fading. The present invention has been completed based on the above factual confirmation, assumption and idea.
即ち、本発明は、（Ａ）ベンジルアルコール、（Ｂ）アルカノールアミン、（Ｃ）有機酸および（Ｄ）水を含んでなることを特徴とする染色アルミニウム用洗浄液に関する。 That is, the present invention relates to a cleaning solution for dyed aluminum comprising (A) benzyl alcohol, (B) alkanolamine, (C) an organic acid and (D) water.
本発明に係る洗浄液によれば、染色アルミニウム基材表面、特に当該基材から形成される半導体ボンディングワイヤー巻装用スプールの表面に存在する汚れを良好に除去でき、かつ表面の退色を抑制することができる。そして、これらの問題を解消できるため当該洗浄液の繰り返し使用が可能となり、経済的に有利である。 According to the cleaning liquid of the present invention, it is possible to satisfactorily remove stains present on the surface of a dyed aluminum substrate, particularly the surface of a semiconductor bonding wire winding spool formed from the substrate, and to suppress the fading of the surface. it can. Since these problems can be solved, the cleaning liquid can be used repeatedly, which is economically advantageous.
（Ａ）ベンジルアルコールは本発明に係る洗浄液の主剤であり、被洗浄物（染色アルミニウム）に付着した皮脂や粘着剤残りなどの固体状汚染物質を除去することを目的に用いられる。（Ａ）ベンジルアルコールは、洗浄剤中７０〜９５重量％程度、好ましくは８０〜９５重量％の範囲で用いられる。当該範囲の下限値未満では洗浄性能が劣る傾向にあり、上限値を超えると濯ぎに長時間を要するため不経済である。 (A) Benzyl alcohol is the main component of the cleaning liquid according to the present invention, and is used for the purpose of removing solid contaminants such as sebum and adhesive residue adhering to the object to be cleaned (dyed aluminum). (A) Benzyl alcohol is used in the range of about 70 to 95% by weight, preferably 80 to 95% by weight in the detergent. If it is less than the lower limit of the range, the cleaning performance tends to be inferior, and if it exceeds the upper limit, rinsing requires a long time, which is uneconomical.
（Ｂ）アルカノールアミンは前記封孔材を攻撃する酸をトラップする目的で用いられるアルカリ成分であり、これを本発明に係る洗浄液の必須成分とすることにより、染色アルミニウム表面の退色を抑止することができる。尚、封孔材を攻撃する酸が何に由来するのかは明らかではないが、アルマイト被膜はアルミニウム表面を硫酸浴、リン酸浴などの無機酸浴やシュウ酸などの有機酸浴で陽極酸化してなるものであり、被膜中には硫酸根、リン酸根、シュウ酸根等が若干量残存するためであると推察される。（Ｂ）アルカノールアミンの具体例としては、例えば２−アミノエタノール、Ｎ，Ｎ−ジメチルエタノールアミン、Ｎ，Ｎ−ジエチルエタノールアミン、ジエタノールアミン、Ｎ−メチルジエタノールアミン、Ｎ−ブチルジエタノールアミン、トリエタノールアミン、Ｎ，Ｎ−ジブチルエタノールアミン、Ｎ−（β−アミノエチル）エタノールアミンを例示することができる。これらの中でも特にＮ−メチルジエタノールアミン及び／又はＮ−ブチルジエタノールアミンが好ましい。（Ｂ）アルカノールアミンは、洗浄剤中、０．０５〜２０重量％程度、好ましくは０．１〜１０重量％の範囲で用いられる。当該範囲の下限値未満では染色アルミニウムを繰り返し洗浄した際に退色が生じる傾向にある。また上限値より大きいと洗浄液のｐＨが上昇してアルミニウム基材表面の腐食が生じるおそれがある。 (B) Alkanolamine is an alkaline component used for the purpose of trapping acid that attacks the sealing material. By using this as an essential component of the cleaning liquid according to the present invention, the fading of the dyed aluminum surface is suppressed. Can do. It is not clear what the acid that attacks the sealing material comes from, but the alumite film is anodized on the aluminum surface with an inorganic acid bath such as a sulfuric acid bath or phosphoric acid bath or an organic acid bath such as oxalic acid. This is presumably because a slight amount of sulfate, phosphate, oxalate, etc. remain in the coating. Specific examples of (B) alkanolamine include 2-aminoethanol, N, N-dimethylethanolamine, N, N-diethylethanolamine, diethanolamine, N-methyldiethanolamine, N-butyldiethanolamine, triethanolamine, N , N-dibutylethanolamine, N- (β-aminoethyl) ethanolamine. Among these, N-methyldiethanolamine and / or N-butyldiethanolamine are particularly preferable. (B) Alkanolamine is used in the range of about 0.05 to 20% by weight, preferably 0.1 to 10% by weight in the detergent. Below the lower limit of the range, fading tends to occur when the dyed aluminum is washed repeatedly. On the other hand, if the value is larger than the upper limit, the pH of the cleaning solution may increase and corrosion of the aluminum substrate surface may occur.
（Ｃ）有機酸は、前記（Ｂ）アルカノールアミンを用いると洗浄液のｐＨが高くなり、基材であるアルマイトを腐食してしまうことから、このｐＨを５〜８程度、好ましくは５〜７に維持するために用いられる。（Ｃ）有機酸は炭素数１〜２０程度の直鎖または分岐鎖のカルボン酸で、具体的には酢酸、酪酸、オクチル酸、ステアリル酸、イソステアリル酸、ミリスチン酸、オレイン酸、ナフテン酸、パルミチン酸、プロピオン酸等が挙げられる。これらの中でも炭素数６〜１２程度の有機酸が、溶解性、安全性等の面で好ましく、さらにはオクチル酸が最も好ましい。（Ｃ）有機酸は洗浄剤中、０．０５〜２０重量％程度、好ましくは０．１〜１０重量％の範囲で用いられる。当該下限値未満では洗浄液のｐＨを前記範囲に保つことができず、アルミニウム基材が変色する傾向にある。また上限値より大きいと粘着剤成分や微粒子等に対する洗浄性が低下する恐れがある。なお、（Ｃ）有機酸の代わりに一般の無機酸を用いると染色アルミニウムが退色する傾向にある。 When (C) the organic acid is used as the (B) alkanolamine, the pH of the cleaning liquid becomes high and corrodes the base alumite. Therefore, the pH is adjusted to about 5 to 8, preferably 5 to 7. Used to maintain. (C) The organic acid is a linear or branched carboxylic acid having about 1 to 20 carbon atoms, specifically, acetic acid, butyric acid, octylic acid, stearyl acid, isostearyl acid, myristic acid, oleic acid, naphthenic acid, Examples include palmitic acid and propionic acid. Among these, an organic acid having about 6 to 12 carbon atoms is preferable in terms of solubility and safety, and octylic acid is most preferable. (C) The organic acid is used in the detergent in an amount of about 0.05 to 20% by weight, preferably 0.1 to 10% by weight. If it is less than the lower limit, the pH of the cleaning liquid cannot be maintained in the above range, and the aluminum base material tends to discolor. Moreover, when larger than an upper limit, there exists a possibility that the detergency with respect to an adhesive component, microparticles | fine-particles, etc. may fall. In addition, when a general inorganic acid is used instead of the organic acid (C), the dyed aluminum tends to fade.
（Ｄ）水としては、純水や超純水、あるいはイオン交換水が好ましいが、市水を用いることもできる。（Ｄ）水は製剤中４〜８重量％程度用いられる。 (D) As water, pure water, ultrapure water, or ion-exchanged water is preferable, but city water can also be used. (D) Water is used in an amount of about 4 to 8% by weight in the preparation.
洗浄方法としては超音波洗浄、スプレー洗浄液中噴流洗浄、浸漬洗浄などが挙げられる。被洗浄物が前記スプールの場合であれば、本発明に係る洗浄液で満たした洗浄槽に数十個をまとめて入れ、超音波を照射して洗浄するのが好ましい。洗浄後は被洗浄物に残存した洗浄液成分を純水等で十分に濯ぎ落とす。 Examples of the cleaning method include ultrasonic cleaning, jet cleaning in a spray cleaning liquid, and immersion cleaning. In the case where the object to be cleaned is the spool, it is preferable that several dozens are put together in a cleaning tank filled with the cleaning liquid according to the present invention and cleaned by irradiating with ultrasonic waves. After cleaning, the cleaning liquid component remaining on the object to be cleaned is sufficiently rinsed with pure water or the like.
以下に実施例、比較例を示すことにより本発明を更に詳しく説明するが、本発明はこれら実施例のみに制限されるものではない。 Hereinafter, the present invention will be described in more detail by showing examples and comparative examples, but the present invention is not limited to these examples.
表１に示す組成となるように各成分を添加混合し、洗浄液１〜７を調製した。 Each component was added and mixed so that it might become a composition shown in Table 1, and the washing | cleaning liquids 1-7 were prepared.
実施例１〜３、比較例１〜２
洗浄液１で満たした洗浄槽に、染色アルミニウムとして茶色に着色された使用済みの半導体ボンディングワイヤ用スプールを浸漬し、５０℃の液温にて１０分間浸漬洗浄を行った。次いでこれをイオン交換水中に５０℃にて１０分間浸漬してリンスを行った。次いでこれを乾燥炉において６０℃にて１０分間乾燥を行った。乾燥後に表面の汚れ（フランジ部における粘着剤の残り）、表面色の退色の程度、および表面の腐食の程度を目視判定した。その後、同じ洗浄液を用いてこの洗浄〜目視判定の過程を２回繰り返した。これら一連の洗浄〜乾燥作業を洗浄液２〜５についても同様に行った。結果を表２に示す。
Examples 1-3, Comparative Examples 1-2
A used semiconductor bonding wire spool colored in brown as dyed aluminum was immersed in a cleaning tank filled with the cleaning liquid 1, and immersion cleaning was performed at a liquid temperature of 50 ° C. for 10 minutes. Next, this was immersed in ion exchange water at 50 ° C. for 10 minutes for rinsing. Next, this was dried at 60 ° C. for 10 minutes in a drying furnace. After drying, the surface contamination (remaining pressure-sensitive adhesive in the flange portion), the degree of fading of the surface color, and the degree of surface corrosion were visually determined. Then, the process of this washing | cleaning-visual determination was repeated twice using the same washing | cleaning liquid. These series of washing to drying operations were performed in the same manner for the washing solutions 2 to 5. The results are shown in Table 2.
「フランジ部糊残り」・・・○は糊残りが無いことを意味する。
「表面色の退色」・・・○＞△×＞××の順でスプール表面が退色することを意味する。
「表面の腐食」・・・○＞△＞×の順でスプール表面が腐食（白色化）することを意味する。
“Flange portion adhesive residue”... Means that there is no adhesive residue.
“Surface color fading” means that the spool surface fades in the order of ◯> Δ ×> XX.
“Surface corrosion” means that the surface of the spool corrodes (whitens) in the order of ○>Δ> ×.
Claims (6)
The cleaning liquid according to claim 1, wherein the dyed aluminum is used for a semiconductor bonding wire spool.
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