JP4442506B2 - Nano particle classifier - Google Patents

Nano particle classifier Download PDF

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JP4442506B2
JP4442506B2 JP2005129640A JP2005129640A JP4442506B2 JP 4442506 B2 JP4442506 B2 JP 4442506B2 JP 2005129640 A JP2005129640 A JP 2005129640A JP 2005129640 A JP2005129640 A JP 2005129640A JP 4442506 B2 JP4442506 B2 JP 4442506B2
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aerosol
gas flow
classification
particle size
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大二 奥田
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Description

本発明は、環境エアロゾルの研究分野で、各種ガス中に含まれるエアロゾルの成分を捕集するために適用されるエアロゾル捕集装置に係り、特にエアロゾルに含まれる微粒子を分級して捕集するための装置であって、粒子径ごとに詳細な分析を行うための試料を提供する装置に関するものである。   The present invention relates to an aerosol collection device applied to collect aerosol components contained in various gases in the field of environmental aerosol research, and in particular to classify and collect fine particles contained in aerosols. The present invention relates to an apparatus for providing a sample for performing detailed analysis for each particle diameter.

エアロゾルとは分散媒体がガスで、分散質が液体または固体であるコロイドを示す。分散質が液体の場合には、エアロゾルは、霧、もや、雲等となり、分散質が固体の場合には、ちり、煙等となる。このエアロゾルの構成成分の測定は、環境状態の評価や健康影響などの研究分野において重要な意味を持つ（特許文献１参照。）。   Aerosol refers to a colloid in which the dispersion medium is a gas and the dispersoid is a liquid or a solid. When the dispersoid is a liquid, the aerosol is fog, haze, clouds, or the like, and when the dispersoid is a solid, the aerosol is dust or smoke. The measurement of the components of the aerosol is important in research fields such as evaluation of environmental conditions and health effects (see Patent Document 1).

エアロゾルの構成成分の研究としては、例えば大気汚染測定がある。近年の大気汚染や環境汚染の原因となる車の排気ガスや工業プラントの排煙には、硫黄化合物（ＳＯx，Ｈ2Ｓ等）、窒素化合物（ＮＯx，ＮＨ3等）、炭化水素等が含まれ、これらは化学反応や光化学反応によって硫酸塩や硝酸塩となり、大気中の水蒸気を吸収して液体状のエアロゾルとなる。 As a study of aerosol constituents, for example, there is air pollution measurement. Sulfur compounds (SO x , H 2 S, etc.), nitrogen compounds (NO x , NH 3, etc.), hydrocarbons, etc., for vehicle exhaust gas and industrial plant flue gas that cause recent air pollution and environmental pollution These are converted into sulfates and nitrates by chemical reactions and photochemical reactions, and absorb water vapor in the atmosphere to form liquid aerosols.

測定方法としては、エアロゾルをＬＶＳ(Low Volume Sample)などによりフィルタに捕集した後、溶媒にとかしてＬＣ（液体クロマトグラフィ）で分析する方法や、試料を加熱して有機物を揮発させ、その後揮発物に酸素を加えたガス中でさらに高温に加熱して酸化させ、揮発性有機化合物の総量を定量する方法がある。   As a measurement method, aerosol is collected on a filter using LVS (Low Volume Sample), etc., and then dissolved in a solvent and analyzed by LC (liquid chromatography). There is a method in which the total amount of volatile organic compounds is quantified by heating to a higher temperature in a gas to which oxygen is added and oxidizing.

微分型電気移動度測定器（ＤＭＡ(Differential mobility analyzer)）（特許文献２，３参照。）は、微粒子の粒径を効率的かつ広範囲にわたって測定できる装置であることが知られており、エアロゾルを分級することが可能である。
特開平０９−１８４８０８号公報 特開２０００−４６７２０号公報 特開２００１−１３３３８７号公報 A differential mobility analyzer (DMA) (see Patent Documents 2 and 3) is known to be an apparatus that can efficiently and widely measure the particle size of fine particles. Classification is possible.
JP 09-184808 A JP 2000-46720 A JP 2001-133387 A

ＤＭＡにおいては、分級用電界を目的の粒子径に対応した電圧に固定し、シースガスを流しながら特定の粒子を分級して捕集するため、異なる粒子を続けて捕集する場合は、対象粒子径に対応する電圧を順次変更して捕集する必要があった。そのため、エアロゾルの粒子径分布が変動する場合は、粒子径間の関係が不明なまま捕集してしまう。粒子径分布が変動する場合であっても、繰り返し捕集すれば粒子径間の関係を得ることができるが、そのときは時間に関して平均的な試料を作成することしかできない。   In the DMA, the electric field for classification is fixed at a voltage corresponding to the target particle diameter, and specific particles are classified and collected while flowing the sheath gas. It was necessary to change the voltage corresponding to to sequentially collect. Therefore, when the particle size distribution of the aerosol fluctuates, it is collected without knowing the relationship between the particle sizes. Even if the particle size distribution fluctuates, the relationship between the particle sizes can be obtained by repeated collection, but at that time, only an average sample with respect to time can be prepared.

粒子径が変動する場合や粒子濃度が低い場合、順次捕集する方法では分級されない粒子を無駄に捨てることとなり、複数の粒子径について捕集を行なうには、粒子径の分布の場合の数に比例した時間を要すことになる。
本発明は、エアロゾルに含まれる粒子を粒子径ごとに分級して捕集することを目的とする。 If the particle size fluctuates or the particle concentration is low, particles that are not classified by the method of sequential collection will be wasted, and in order to collect more than one particle size, the number in the case of particle size distribution is used. Proportional time is required.
An object of the present invention is to classify and collect particles contained in an aerosol for each particle size.

本発明のナノ粒子分級捕集装置は、上方から下方に向かって垂直方向にシースガスを流すシースガス流路に平行に設置され、荷電されたエアロゾルをシースガス流路に噴出するためのエアゾロル導入口を備えた第１平面部と、シースガス流路を挟んで第１平面部に平行に配置され、シースガス側に導電性平板を備えた第２平面部とを有し、上記両平面部間にシースガスの流れに直交する直流電界をかけることによってエアロゾルを粒子径ごとに平板に分級するナノ粒子分級捕集装置において、
上記平板はエアロゾルを粒子径ごとに分級して捕集する捕集電極として着脱可能に取り付けられ、エアロゾル導入口は水平方向のスリット状に形成されている。 The nanoparticle classification / collection device of the present invention is provided in parallel with a sheath gas flow channel for flowing a sheath gas in a vertical direction from the upper side to the lower side, and includes an aerosol inlet for ejecting a charged aerosol into the sheath gas flow channel. A first plane portion and a second plane portion arranged in parallel to the first plane portion with the sheath gas flow path interposed therebetween and having a conductive flat plate on the sheath gas side, and the flow of the sheath gas between the two plane portions. In the nanoparticle classification collection device that classifies aerosol into flat plates for each particle size by applying a direct current electric field orthogonal to
The flat plate is detachably attached as a collecting electrode for classifying and collecting the aerosol according to particle size, and the aerosol inlet is formed in a horizontal slit shape.

捕集電極に微小粒子を粒子径に分級して捕集することにより、粒子径の分級操作を順次行なうことなく、効率的にナノ粒子を粒子径ごとに分級して捕集をすることができる。   By collecting and collecting fine particles to a particle size on the collection electrode, it is possible to efficiently classify and collect nanoparticles by particle size without sequentially performing the particle size classification operation. .

以下に図面を参照して本発明の実施形態を説明する。
図１（Ａ）は一実施例のナノ粒子分級捕集装置の斜視図を透視図として表したもの、（Ｂ）は捕集電極をナノ粒子分級捕集装置の内側から示した平面図である。
本発明のナノ粒子分級捕集装置１は、一定の間隔Ｌで互いに平行で、ともに垂直方向に設置された第１平面部３及び第２平面部５と、両平面部３，５を固定する外殻部７とによってシースガス流路９を囲むように形成されている。平面部３および平面部５の形状は、ともに矩形になされている。 Embodiments of the present invention will be described below with reference to the drawings.
FIG. 1A is a perspective view of a perspective view of a nanoparticle classification and collection device of one embodiment, and FIG. 1B is a plan view showing a collection electrode from the inside of the nanoparticle classification and collection device. .
The nanoparticle classifying / collecting apparatus 1 of the present invention fixes the first flat surface portion 3 and the second flat surface portion 5 which are parallel to each other at a constant interval L and are both installed in the vertical direction, and both the flat surface portions 3 and 5. The outer shell 7 is formed so as to surround the sheath gas flow path 9. Both the flat portion 3 and the flat portion 5 are rectangular.

平面部３は、荷電装置１１によって荷電されたエアロゾルをシースガス流路９に噴出するためのエアゾロル導入口１３を上方に備えている。
エアロゾル導入口１３は、分級部であるシースガス流路９でエアロゾルを層流として流すためにシースガス流路に面する開口形状が水平方向に延びるスリット２３となっている。スリット２３の幅は、例えば２０ｍｍ〜１００ｍｍ程度がよい。
平面部５は、シースガス流路９を挟んで平面部３に対向に配置され、エアロゾルを粒子径毎に分級し捕集するための導電性平板としての捕集電極１５をシースガス流路９側に備えている。捕集電極１５は平面部５に着脱可能に取り付けられている。捕集電極１５としては、例えば、グラファイトを板状に固めたものを用いることができる。 The plane portion 3 includes an aerosol inlet 13 for ejecting aerosol charged by the charging device 11 to the sheath gas flow path 9.
The aerosol introduction port 13 is a slit 23 whose opening shape facing the sheath gas flow path extends in the horizontal direction so that the aerosol flows as a laminar flow in the sheath gas flow path 9 which is a classification part. The width of the slit 23 is preferably about 20 mm to 100 mm, for example.
The flat surface portion 5 is disposed opposite to the flat surface portion 3 with the sheath gas flow channel 9 interposed therebetween, and a collection electrode 15 as a conductive flat plate for classifying and collecting the aerosol for each particle diameter is disposed on the sheath gas flow channel 9 side. I have. The collecting electrode 15 is detachably attached to the flat portion 5. As the collecting electrode 15, for example, a graphite plate hardened can be used.

シースガス流路９の上流である外殻部７の上部にはシースガス導入口１７が設けられており、シースガス流路９の下流である外殻部７の下部には排気口１９が設けられている。
シースガス導入口１７の装置内部側には、導入されるシースガスを均一な流れにするための整流フィルタ２１が設けられており、さらに、シースガス導入口１７の装置外部側には、シースガス導入口１７にシースガスを導入するシースガス配管が設けられている（図示は略す。）。シースガスとしては窒素などを用いることができる。 A sheath gas introduction port 17 is provided in the upper part of the outer shell part 7 upstream of the sheath gas flow path 9, and an exhaust port 19 is provided in the lower part of the outer shell part 7 downstream of the sheath gas flow path 9. .
A rectifying filter 21 for making the introduced sheath gas a uniform flow is provided on the inside of the device of the sheath gas introduction port 17. Further, on the outside of the device of the sheath gas introduction port 17, a sheath gas introduction port 17 is provided. A sheath gas pipe for introducing a sheath gas is provided (not shown). Nitrogen or the like can be used as the sheath gas.

平面部３と捕集電極１５のシースガス流路９側の面は共に導電体で構成され、それぞれ他の部分から絶縁されており、この両面間には直流電圧電源２５が接続され、プラスあるいはマイナスの電圧がかけられる。電圧としては例えば、１０〜１００００Ｖが適当である。捕集電極１５にプラスの電圧がかけられた場合はマイナスの極性をもつ微粒子が捕集電極１５に捕集され、マイナスの電圧がかけられた場合はプラスの極性をもつ微粒子が捕集電極１５に捕集される。   Both the flat portion 3 and the surface of the collecting electrode 15 on the sheath gas flow path 9 side are made of a conductor and are insulated from other portions, respectively, and a DC voltage power supply 25 is connected between both the surfaces, plus or minus Is applied. For example, a voltage of 10 to 10,000 V is appropriate. When a positive voltage is applied to the collecting electrode 15, fine particles having a negative polarity are collected by the collecting electrode 15, and when a negative voltage is applied, a fine particle having a positive polarity is collected. To be collected.

次に、図１に示すナノ粒子分級捕集装置において、エアロゾルの分級及び捕集の動作を説明する。
シースガスはシースガス導入口１７よりナノ粒子分級捕集装置内に導入され、整流フィルタ２１を通過した後、シースガス流路９を層流状態で通過し排気口１９より排気される。一方、エアロゾルは荷電装置１１を通過することで荷電エアロゾルとして搬送され、エアロゾル導入口１３よりナノ粒子分級捕集装置に導入され、スリット２３により層流となって装置内部へ噴出される。 Next, the operation of aerosol classification and collection in the nanoparticle classification and collection apparatus shown in FIG. 1 will be described.
The sheath gas is introduced into the nanoparticle classification and collection device through the sheath gas introduction port 17, passes through the rectifying filter 21, passes through the sheath gas flow path 9 in a laminar state, and is exhausted through the exhaust port 19. On the other hand, the aerosol is transported as a charged aerosol by passing through the charging device 11, introduced into the nanoparticle classification / collection device through the aerosol inlet 13, and jetted into the device as a laminar flow through the slit 23.

ナノ粒子分級捕集装置内ではシースガスの流れに垂直な方向に電界が印加されているために、噴出されたエアロゾルはシースガス流路９に沿って下方に搬送されつつ、その荷電数と粒径に依存した電気移動度に応じた軌跡を描きながら平面部３から平面部５の方向に傾斜する。このとき、直流電圧電源２５の電圧を調節することで、捕集電極１５での粒径分布の広がりを調製することができる。
荷電エアロゾルの粒子サイズが小さいものに対しては、シースガスによる下方向の傾度が小さいため、スリット２３から小さい傾斜で捕集電極１５に到達する。一方、荷電エアロゾルの粒子サイズが大きいものに対しては、シースガスによる下方向の傾度がその体積等に比例して大きくなるため、スリット２３から下方向に大きい傾斜で捕集電極１５に到達する。 Since the electric field is applied in a direction perpendicular to the flow of the sheath gas in the nanoparticle classification and collection device, the ejected aerosol is transported downward along the sheath gas flow path 9, and the charge number and particle size are reduced. It inclines in the direction from the plane part 3 to the plane part 5 while drawing a locus corresponding to the dependent electric mobility. At this time, by adjusting the voltage of the DC voltage power supply 25, the spread of the particle size distribution at the collecting electrode 15 can be adjusted.
For charged aerosol particles having a small particle size, since the downward gradient by the sheath gas is small, the particles reach the collecting electrode 15 from the slit 23 with a small inclination. On the other hand, when the charged aerosol particle size is large, the downward gradient due to the sheath gas increases in proportion to the volume and the like, and therefore reaches the collecting electrode 15 with a large downward gradient from the slit 23.

このナノ粒子分級捕集装置を用いると、これまでの粒子径の分級操作を順次行なうことなく、捕集電極１５上に効率的にナノ粒子を粒子径ごとに分級して捕集をすることができる。
その後、質量分析装置などの検出装置でそれぞれの粒子成分を検出する。 By using this nanoparticle classification and collection device, it is possible to efficiently classify and collect nanoparticles on the collection electrode 15 for each particle size without sequentially performing the particle size classification operation so far. it can.
Thereafter, each particle component is detected by a detection device such as a mass spectrometer.

本発明はこれらに限定されるものではなく、特許請求の範囲に記載された本発明の範囲内で種々の変更が可能である。   The present invention is not limited to these, and various modifications can be made within the scope of the present invention described in the claims.

環境エアロゾルの研究分野で、各種ガス中に含まれるエアロゾルの成分を捕集するために適用されるエアロゾル捕集装置に利用することができる。   In the field of environmental aerosol research, the present invention can be used for an aerosol collecting device that is applied to collect aerosol components contained in various gases.

名の粒子分級捕集装置を示しており、（Ａ）はその斜視図であり、（Ｂ）は捕集電極の平面図である。The particle classification collection apparatus of a name is shown, (A) is the perspective view, (B) is a top view of a collection electrode.

符号の説明Explanation of symbols

１ ナノ粒子分級捕集装置
３，５ 平面部
７ 外殻部
９ シースガス流路
１１ 荷電装置
１３ エアロゾル導入口
１５ 捕集電極
１７ シースガス導入口
１９ 排気口
２１ 整流フィルタ
２３ スリット
２５ 直流電圧電源 DESCRIPTION OF SYMBOLS 1 Nanoparticle classification collection apparatus 3,5 Plane part 7 Outer shell part 9 Sheath gas flow path 11 Charging apparatus 13 Aerosol inlet 15 Collection electrode 17 Sheath gas introduction port 19 Exhaust port 21 Rectification filter 23 Slit 25 DC voltage power supply

Claims (1)

上方から下方に向かって垂直方向にシースガスを流すシースガス流路に平行に設置され、荷電されたエアロゾルを前記シースガス流路に噴出するためのエアゾロル導入口を備えた第１平面部と、
前記シースガス流路を挟んで前記第１平面部に平行に配置され、前記シースガス側に導電性平板を備えた第２平面部と、を有し、
前記両平面部間にシースガスの流れに直交する直流電界をかけることによって前記エアロゾルを粒子径ごとに前記平板に分級するナノ粒子分級捕集装置において、
前記平板はエアロゾルを粒子径ごとに分級して捕集する捕集電極として着脱可能に取り付けられ、
前記エアロゾル導入口は水平方向のスリット状に形成されていることを特徴とするナノ粒子分級捕集装置。 A first plane portion provided in parallel with a sheath gas flow channel for flowing a sheath gas in a vertical direction from the upper side to the lower side and having an aerosol inlet for ejecting charged aerosol to the sheath gas flow channel;
A second plane part disposed in parallel to the first plane part across the sheath gas flow path, and having a conductive flat plate on the sheath gas side,
In the nanoparticle classification collection device that classifies the aerosol into the flat plate for each particle diameter by applying a direct current electric field orthogonal to the flow of the sheath gas between the two flat portions,
The flat plate is detachably attached as a collecting electrode that classifies and collects aerosols by particle size,
The aerosol classification and collection device, wherein the aerosol inlet is formed in a horizontal slit shape.
JP2005129640A 2005-04-27 2005-04-27 Nano particle classifier Expired - Fee Related JP4442506B2 (en)

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