JP4425319B1 - ボンディング方法、ボンディング装置及び製造方法 - Google Patents
ボンディング方法、ボンディング装置及び製造方法 Download PDFInfo
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- 238000000034 method Methods 0.000 title claims description 17
- 238000004519 manufacturing process Methods 0.000 title claims description 11
- 238000001514 detection method Methods 0.000 claims description 13
- 239000004065 semiconductor Substances 0.000 claims description 7
- 125000006850 spacer group Chemical group 0.000 description 5
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- 230000008878 coupling Effects 0.000 description 3
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Abstract
【解決手段】ボンディング装置1は、キャピラリ5をボンディング位置まで下降させて、オーバーハングダイ100のパッド104にイニシャルボール10をボンディングするが、その際、所定時間ごとに、キャピラリ5のZ軸方向の位置を検出するとともに、荷重センサ7で検出した荷重を検出して蓄積しておく。そして、蓄積したキャピラリ5に作用する荷重とキャピラリ5の位置とを参照して、荷重変化点を検出して、この荷重変化点におけるキャピラリ5の荷重変化位置からボンディング位置を減算することで、荷重変化位置からボンディング位置に至るキャピラリ5の移動量Zを算出する。そして、この算出した移動量Z分、キャピラリ5を上昇させた後、パッド104とリード105との間にワイヤループを形成させる。
【選択図】図3
Description
Claims (6)
- キャピラリに挿通されたワイヤをオーバーハングダイの自由端に形成されたパッドにボンディングするボンディング方法であって、
所定のボンディング位置までキャピラリを移動させる第1移動ステップと、
第1移動ステップにおいてキャピラリを移動させる際に、キャピラリに作用する荷重を検出して、キャピラリの位置とキャピラリに作用する荷重とを対応付けて蓄積する荷重変化検出ステップと、
ボンディング位置においてパッドにワイヤをボンディングさせるボンディングステップと、
荷重変化検出ステップにより蓄積されたキャピラリの位置とキャピラリに作用する荷重とに基づいてキャピラリに作用する荷重が変化した荷重変化点を求め、荷重変化点におけるキャピラリの位置とボンディング位置との差分を演算してキャピラリの移動量を算出する移動量演算ステップと、
パッドにワイヤをボンディングした後、移動量演算ステップにより算出された移動量分、キャピラリを後退させる第2移動ステップと、
第2移動ステップの後、キャピラリを所定の軌跡に移動させることによりワイヤループを形成させるループ形成ステップと、
を含むボンディング方法。 - 荷重変化点は、ボンディング位置の最も近傍においてキャピラリに作用する荷重が変化した点である請求項1に記載のボンディング方法。
- オーバーハングダイの自由端に形成されたパッドにボンディングするボンディング装置であって、
ワイヤが挿通されたキャピラリと、
キャピラリを通してボンディング対象に超音波を印加する超音波振動子と、
一端にキャピラリを保持するとともに他端に超音波振動子を備え、超音波をキャピラリに伝達させる超音波ホーンと、
キャピラリに作用する荷重を検出する荷重検出器と、
所定のボンディング位置までキャピラリを移動させてパッドにワイヤをボンディングさせ、キャピラリを所定の軌跡に移動させることによりワイヤループを形成させるボンディング制御手段と、
ボンディング制御手段がキャピラリを移動させる際に、キャピラリの位置と荷重検出器により検出されたキャピラリに作用する荷重とを対応付けて蓄積する荷重変化検出手段と、を含み、
ボンディング制御手段は、荷重変化検出手段で蓄積したキャピラリの位置とキャピラリに作用する荷重とに基づいて、キャピラリに作用する荷重が変化した荷重変化点を求め、荷重変化点におけるキャピラリの位置とボンディング位置との差分を演算してキャピラリの移動量を演算し、この演算した移動量分、キャピラリを後退させた後、キャピラリを所定の軌跡に移動させることによりワイヤループを形成させるボンディング装置。 - 揺動可能に取り付けられて超音波ホーンを保持するボンディングアームを更に含み、
ボンディングアームは、ボンディングアームを揺動する駆動部が取り付けられたアーム基端部と、アーム基端部の先端側に位置して超音波ホーンを保持するアーム先端部と、アーム基端部とアーム先端部とを連結して可撓性を有する連結部と、を備え、
荷重検出器は、アーム先端部とアーム基端部との間に配置される請求項3に記載のボンディング装置。 - オーバーハングダイの自由端に形成されたパッドにボンディングして半導体装置を製造する製造方法であって、
ワイヤが挿通されたキャピラリと、
キャピラリを通じてボンディング対象に超音波を印加する超音波振動子と、
一端にキャピラリを保持するとともに他端に超音波振動子を備え、超音波をキャピラリに伝達させる超音波ホーンと、
揺動可能に取り付けられたアーム基端部と、アーム基端部の先端側に位置して超音波ホーンを保持するアーム先端部と、アーム基端部とアーム先端部とを連結して可撓性を有する連結部とを有するボンディングアームと、
超音波ホーンの長手方向の中心軸からボンディング対象に対する接離方向にオフセットして、ボンディングアームの回転中心とアーム先端部との間に取り付けられ、キャピラリに作用する荷重を検出する荷重検出器と、を備えるボンディング装置を用意するステップと、
所定のボンディング位置までキャピラリを移動させる第1移動ステップと、
第1移動ステップにおいてキャピラリを移動させる際に、キャピラリの位置と荷重検出器により検出されたキャピラリに作用する荷重とを対応付けて蓄積する荷重変化検出ステップと、
ボンディング位置においてパッドにワイヤをボンディングさせるボンディングステップと、
荷重変化検出ステップにより蓄積されたキャピラリの位置とキャピラリに作用する荷重とに基づいてキャピラリに作用する荷重が変化した荷重変化点を求め、荷重変化点におけるキャピラリの位置とボンディング位置との差分を演算してキャピラリの移動量を算出する移動量演算ステップと、
パッドにワイヤをボンディングした後、移動量演算ステップにより算出された移動量分、キャピラリを後退させる第2移動ステップと、
第2移動ステップの後、キャピラリを所定の軌跡に移動させることによりワイヤループを形成させるループ形成ステップと、
を含む製造方法。 - 荷重変化点は、ボンディング位置の最も近傍においてキャピラリに作用する荷重が変化した点であることを特徴とする請求項5に記載の製造方法。
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