JP4415426B2 - Color filter and manufacturing method thereof - Google Patents

Color filter and manufacturing method thereof Download PDF

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Publication number
JP4415426B2
JP4415426B2 JP20438199A JP20438199A JP4415426B2 JP 4415426 B2 JP4415426 B2 JP 4415426B2 JP 20438199 A JP20438199 A JP 20438199A JP 20438199 A JP20438199 A JP 20438199A JP 4415426 B2 JP4415426 B2 JP 4415426B2
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Japan
Prior art keywords
color filter
black matrix
pattern
outer shape
colored pixel
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JP20438199A
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Japanese (ja)
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JP2001033613A (en
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亮輔 安井
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Toppan Inc
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Toppan Inc
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Description

【0001】
【発明の属する技術分野】
本発明は、カラー液晶表示装置に内蔵されるカラーフィルターのうち、遮光パターン部に樹脂系材料等の比較的厚膜に形成する材料を採用し、また色再現特性には必ずしも厳密さを必要としない用途向けのカラー液晶表示装置に用いるカラーフィルタの製造方法に関する。
【0002】
【従来の技術】
カラー液晶表示装置においてカラー表示を行うために、光透過部に開口部のあるパターンを形成した遮光層(ブラックマトリクス)と、該光透過部に赤、緑、青の感光性着色樹脂をパターン形成して着色画素層としたカラーフィルタが一般的に用いられている。最近の液晶表示装置に関する市場の要求の一つとして低コスト化があり、そのためにブラックマトリクスとして高価な金属または酸化金属膜を基板上に形成したものをパターンエッチングする方法に代えて、光透過部の着色画素層と同様の感光性着色樹脂を用いる方法が考案されて実用化しており、少なからぬ割合で採用されている。
【0003】
しかしこの樹脂ブラックマトリクスの場合、厚さが1μm程度と従来の金属ブラックマトリクスに比べ相対的に膜厚が厚い。そのため、従来のように、ブラックマトリクス部が着色画素部よりはるかに薄い膜であることを利用して着色画素部をブラックマトリクス部を横断する形でストライプ形状にすることはできない。よって必然的に、樹脂ブラックマトリクスを採用した場合、その着色画素部の形成パターンは、ブラックマトリクスの開口部の形状に合わせた島状となる。
【0004】
しかしながら、従来の島状の着色画素部のレジストパターンは、ブラックマトリクスとの間隙が生じないよう、位置合わせ精度の余裕をみて、ブラックマトリクス開口部よりわずかに大きな外形形状としていた。それゆえ、着色画素部形成後のカラーフィルタ断面形状は、図4に示すように、着色画素部3がブラックマトリクス2の端部に重なることになり、その重なり部分は大きな突起Cとなって形成されていた。
【0005】
このような断面形状であると、例えば、液晶表示パネルを形成する際、対向基板との間に散布して両基板の間のギャップの厚みを一定に規制する役割を果たすビーズ4の一部が、図4に示すように着色画素部3の突起C部分に位置した場合、正確なギャップ間隔が得られなくなるという問題があった。
さらに、前記両基板の間に注入される液晶が液晶表示パネルとして動作する際、前記図4の突起C部分により液晶の配向乱れが生じ、表示品位に悪影響を及ぼすという問題があった。
【0006】
【発明が解決しようとする課題】
本発明は、上記の問題点に鑑み為されたもので、着色画素部の突起部分が生じない構成のカラーフィルタを提供することを目的とする。
【0007】
【課題を解決するための手段】
本発明は、着色遮光性樹脂を用いたブラックマトリクスと、着色透明樹脂を用いたカラーフィルタ層よりなるカラーフィルタにおいて、カラーフィルタのパターン外形が、ブラックマトリクスの開口部周縁より内側にあり、かつブラックマトリクスのパターン最上部輪郭と、カラーフィルタのパターン外形形状の間隙の幅が1〜5μmの範囲となることを特徴とするカラーフィルタとしたものである。
本発明はまた、着色遮光性樹脂を用いたブラックマトリクスと、着色透明樹脂を用いたカラーフィルタ層よりなるカラーフィルタの製造方法において、カラーフィルタのパターン外形が、ブラックマトリクスの開口部周縁より内側にあり、かつブラックマトリクスのパターン最上部輪郭と、カラーフィルタ用マスクのパターン外形形状の間隙の幅が2〜5μmの範囲となるカラーフィルタ用マスクを用いてパターン露光することを特徴とするカラーフィルタの製造方法である。
【0008】
【発明の実施の形態】
本発明のカラーフィルタおよびその製造方法をその一実施形態に基づいて以下に詳細に説明する。
まず無アルカリガラス製の基板1上に、黒色顔料を分散した紫外線硬化型感光性樹脂(例えば、富士ハントエレクトロニクステクノロジー株式会社製、製品名「CK−2000」)をスピンコータにより塗布・乾燥させ、所定のパターン形状のフォトマスクを介して紫外線を照射し、ベーキング後、現像処理する。こうして形成されたブラックマトリックス2は、赤、緑、青の各色の画素間の遮光層として機能して表示画像のコントラスト向上に役立つものであり、ブラックマトリックス2層の厚さは、透過濃度(log100 /I1 ,但しI0 は入射光量、I1は透過光量)の値を2〜3以上にする必要から例えば、1.0μm程度となる。
【0009】
続いて、赤色、緑色、青色の各色の着色画素部3を、図3に示すように、前記ブラックマトリクス2のパターン開口部の内側に島状に設ける。まず赤色着色材料として、赤色顔料を分散した紫外線硬化型感光性樹脂(例えば 富士ハントエレクトロニクステクノロジー株式会社製、製品名「CR−2000」)をスピンコータにより塗布・乾燥させ、図2に示すような所定形状パターンのカラーフィルタ用マスク5を介して紫外線を照射し、次いでベーキング後、現像処理する。なお、ここで用いるフォトマスク(カラーフィルタ用マスク5)は、ネガ型感光性樹脂の感光後残存部が開口したパターン形状であり、その形状については、以下に記載する。ここで赤色のカラーフィルタ3Rの厚さは、所望の分光特性を得るために1.0〜1.2μm程度が適当である。
【0010】
ここで上記着色画素部3の外形形状(裾部分を除く、パターン最上部の外形)は、図3(a)のAに示すように、ブラックマトリクス2との間に間隙部分(透過部)が生ずる形状にし、ブラックマトリクス2を形成した基板1と、上記着色画素部3形成時のフォトマスクとの位置合わせ精度の誤差分だけずれた場合、すなわち図3(b)のA′に示す如き状態になった場合でも、ブラックマトリクス2と着色画素部3の最上部外周とが、突起を生じた状態では重ならない程度の余裕を持った外形形状とする。
【0011】
具体的には、現状での位置合わせ精度(誤差)は2〜3μm程度であるので、図2でBに示す、ブラックマトリクス2とカラーフィルタ用マスク5の各周縁部間の幅は、その半分程度は確保することが必要である。ただし、着色画素部3の形成後の外周テーパー部(裾部分)がマスクの外形形状より大きく形成されて、ブラックマトリクス2のテーパー部にかかった場合にはその分だけ着色画素部3の裾部分が持ち上がる。また、現像の程度により外形形状がマスクの外形形状より大幅に太く形成される場合がある。すなわちその結果、図1に示すように、着色画素部3が形成されたカラーフィルタ基板上でAに示す間隙は、図2における間隙Bよりも狭くなる。
【0012】
これらのことを考慮すると、上記図2のBに示す、ブラックマトリクス2とカラーフィルタ用マスク5の各周縁部間の間隙の幅は2〜5μmの範囲にあることが望ましい。また、着色画素部3が形成されたカラーフィルタ基板上でAに示す間隙の幅は、1〜5μmの範囲にあることが望ましい。
【0013】
次いで同様な操作を行い、緑色および青色の着色画素部3を形成する。着色材料として、緑色顔料を分散した紫外線硬化型感光性樹脂(例えば 富士ハントエレクトロニクステクノロジー株式会社製、製品名「CG−2000」)および青色顔料を分散した紫外線硬化型感光性樹脂(例えば 富士ハントエレクトロニクステクノロジー株式会社製、製品名「CB−2000」)を使用し、各々スピンコータにより塗布・乾燥させ、同様に所定形状パターンのマスクを介して紫外線を照射し、次いでベーキング後、現像処理することを繰り返して、カラーフィルタ基板を完成する。
【0014】
【発明の効果】
着色画素部を、ブラックマトリクスのパターン開口部の内側に島状に設けるため、着色画素部がブラックマトリクスの端部に重なって、その重なり部分が大きな突起となることがない。また、現像の程度により着色画素部の外形形状がマスク形状より大幅に太く形成されることや、着色画素部の外周テーパー部がマスクの外形形状より外側に形成される場合があることを考慮すると、間隙の幅を2〜5μmとすることが望ましく、これにより、適切に着色画素部とブラックマトリクスとの境界が最小化され、かつ大きな突起も生じないカラーフィルタ表面が得られる。
【0015】
【図面の簡単な説明】
【図1】本発明のカラーフィルタの一部分を示す説明図である。
【図2】本発明のカラーフィルタのうちブラックマトリクスのみが形成された基板と、カラーフィルタパターン用マスクが重ね合わされた状態を示す説明図である。
【図3】(a)〜(b)は、本発明のカラーフィルタを示す断面図である。
【図4】従来のカラーフィルタの様子を示す断面図である。
【符号の説明】
1 基板
2 ブラックマトリクス
3 着色画素部
4 スペーサ
5 カラーフィルタ用マスク
[0001]
BACKGROUND OF THE INVENTION
The present invention employs a material formed in a relatively thick film such as a resin-based material in the light shielding pattern portion among the color filters incorporated in the color liquid crystal display device, and the color reproduction characteristics do not necessarily require strictness. The present invention relates to a method for manufacturing a color filter used in a color liquid crystal display device for non-use applications.
[0002]
[Prior art]
In order to perform color display in a color liquid crystal display device, a light-shielding layer (black matrix) in which a pattern with an opening is formed in a light transmission part, and red, green, and blue photosensitive colored resins are formed in the light transmission part. Thus, a color filter which is a colored pixel layer is generally used. One of the market demands for recent liquid crystal display devices is cost reduction. Therefore, instead of using a pattern etching method in which an expensive metal or metal oxide film is formed on a substrate as a black matrix, a light transmitting portion is used. A method using a photosensitive colored resin similar to that of the colored pixel layer has been devised and put into practical use, and it is employed in a considerable proportion.
[0003]
However, in the case of this resin black matrix, the thickness is about 1 μm, which is relatively thick compared to the conventional metal black matrix. Therefore, unlike the conventional case, the colored pixel portion cannot be formed in a stripe shape so as to cross the black matrix portion by utilizing the fact that the black matrix portion is a film much thinner than the colored pixel portion. Therefore, inevitably, when the resin black matrix is employed, the formation pattern of the colored pixel portion is an island shape matching the shape of the opening of the black matrix.
[0004]
However, the conventional island-shaped colored pixel portion resist pattern has an outer shape slightly larger than the black matrix opening in view of a margin of alignment accuracy so that a gap with the black matrix does not occur. Therefore, the cross-sectional shape of the color filter after the formation of the colored pixel portion is such that the colored pixel portion 3 overlaps the end of the black matrix 2 as shown in FIG. It had been.
[0005]
With such a cross-sectional shape, for example, when a liquid crystal display panel is formed, a part of the beads 4 that serve to regulate the thickness of the gap between the two substrates by being dispersed between the opposing substrates is fixed. As shown in FIG. 4, there is a problem that an accurate gap interval cannot be obtained when it is located at the protrusion C portion of the colored pixel portion 3.
Furthermore, when the liquid crystal injected between the two substrates operates as a liquid crystal display panel, there is a problem that the alignment of the liquid crystal is disturbed by the protrusions C in FIG. 4 and the display quality is adversely affected.
[0006]
[Problems to be solved by the invention]
The present invention has been made in view of the above-described problems, and an object of the present invention is to provide a color filter having a configuration in which no protruding portion of a colored pixel portion is generated.
[0007]
[Means for Solving the Problems]
The present invention relates to a color filter comprising a black matrix using a colored light-shielding resin and a color filter layer using a colored transparent resin, wherein the color filter has a pattern outer shape on the inner side of the peripheral edge of the black matrix and the black filter. The color filter is characterized in that the width of the gap between the uppermost contour of the matrix pattern and the pattern outer shape of the color filter is in the range of 1 to 5 μm.
The present invention also provides a method for producing a color filter comprising a black matrix using a colored light-shielding resin and a color filter layer using a colored transparent resin, wherein the pattern outer shape of the color filter is located on the inner side of the periphery of the opening of the black matrix. A pattern exposure is performed using a color filter mask in which the width of the gap between the top contour of the black matrix pattern and the pattern outer shape of the color filter mask is 2 to 5 μm. It is a manufacturing method.
[0008]
DETAILED DESCRIPTION OF THE INVENTION
The color filter of the present invention and the manufacturing method thereof will be described in detail below based on the embodiment.
First, an ultraviolet curable photosensitive resin (for example, product name “CK-2000” manufactured by Fuji Hunt Electronics Technology Co., Ltd., manufactured by Fuji Hunt Electronics Technology Co., Ltd.) in which a black pigment is dispersed is applied and dried on a non-alkali glass substrate 1 by a spin coater. The film is irradiated with ultraviolet rays through a photomask having the pattern shape described above, developed after baking. The black matrix 2 thus formed functions as a light-shielding layer between pixels of red, green, and blue colors and serves to improve the contrast of the display image. The thickness of the black matrix 2 layer is determined by the transmission density (log). 10 I 0 / I 1 , where I 0 is the amount of incident light and I 1 is the amount of transmitted light), for example, is about 1.0 μm.
[0009]
Subsequently, the colored pixel portions 3 of red, green, and blue are provided in an island shape inside the pattern opening of the black matrix 2 as shown in FIG. First, as a red coloring material, an ultraviolet curable photosensitive resin in which a red pigment is dispersed (for example, product name “CR-2000” manufactured by Fuji Hunt Electronics Technology Co., Ltd.) is applied and dried by a spin coater, and a predetermined color as shown in FIG. Ultraviolet rays are irradiated through the color filter mask 5 having a shape pattern, followed by baking and development. Note that the photomask (color filter mask 5) used here has a pattern shape in which a post-sensitivity remaining portion of the negative photosensitive resin is opened, and the shape will be described below. Here, the thickness of the red color filter 3R is suitably about 1.0 to 1.2 μm in order to obtain desired spectral characteristics.
[0010]
Here, the outer shape of the colored pixel portion 3 (excluding the skirt portion, the outermost shape of the pattern) has a gap portion (transmission portion) between it and the black matrix 2 as shown in A of FIG. When the substrate 1 on which the black matrix 2 is formed and the photomask at the time of forming the colored pixel portion 3 is shifted by an error in alignment accuracy, that is, as shown in A 'of FIG. Even in such a case, the black matrix 2 and the outer periphery of the uppermost portion of the colored pixel portion 3 have an outer shape with a margin that does not overlap when the protrusion is formed.
[0011]
Specifically, since the current alignment accuracy (error) is about 2 to 3 μm, the width between the peripheral portions of the black matrix 2 and the color filter mask 5 shown in FIG. It is necessary to secure the degree. However, when the outer peripheral taper portion (hem portion) after the formation of the colored pixel portion 3 is formed larger than the outer shape of the mask and covers the taper portion of the black matrix 2, the hem portion of the colored pixel portion 3 is correspondingly increased. Lifts up. Further, the outer shape may be formed to be significantly thicker than the outer shape of the mask depending on the degree of development. That is, as a result, as shown in FIG. 1, the gap indicated by A on the color filter substrate on which the colored pixel portion 3 is formed is narrower than the gap B in FIG.
[0012]
Considering these, it is desirable that the width of the gap between the peripheral portions of the black matrix 2 and the color filter mask 5 shown in FIG. 2B is in the range of 2 to 5 μm. The width of the gap indicated by A on the color filter substrate on which the colored pixel portion 3 is formed is preferably in the range of 1 to 5 μm.
[0013]
Subsequently, the same operation is performed to form green and blue colored pixel portions 3. As a coloring material, an ultraviolet curable photosensitive resin in which a green pigment is dispersed (for example, product name “CG-2000” manufactured by Fuji Hunt Electronics Technology Co., Ltd.) and an ultraviolet curable photosensitive resin in which a blue pigment is dispersed (for example, Fuji Hunt Electronics). Technology Co., Ltd., product name “CB-2000”), each is coated and dried with a spin coater, and irradiated with ultraviolet rays through a mask having a predetermined shape pattern, and then repeatedly baked and developed. To complete the color filter substrate.
[0014]
【The invention's effect】
Since the colored pixel portion is provided in an island shape inside the pattern opening portion of the black matrix, the colored pixel portion overlaps with the end portion of the black matrix, and the overlapping portion does not become a large protrusion. Further, considering that the outer shape of the colored pixel portion is formed to be significantly thicker than the mask shape depending on the degree of development, and that the outer peripheral tapered portion of the colored pixel portion may be formed outside the outer shape of the mask. The width of the gap is desirably 2 to 5 μm, and accordingly, a color filter surface can be obtained in which the boundary between the colored pixel portion and the black matrix is appropriately minimized and no large protrusion is generated.
[0015]
[Brief description of the drawings]
FIG. 1 is an explanatory diagram showing a part of a color filter of the present invention.
FIG. 2 is an explanatory diagram showing a state in which a substrate on which only a black matrix is formed in a color filter of the present invention and a color filter pattern mask are overlaid.
FIGS. 3A to 3B are cross-sectional views showing a color filter of the present invention.
FIG. 4 is a cross-sectional view showing a state of a conventional color filter.
[Explanation of symbols]
1 Substrate 2 Black matrix 3 Colored pixel 4 Spacer 5 Color filter mask

Claims (2)

着色遮光性樹脂を用いたブラックマトリクスと、着色透明樹脂を用いたカラーフィルタ層よりなるカラーフィルタにおいて、カラーフィルタのパターン外形が、ブラックマトリクスの開口部周縁より内側にあり、かつブラックマトリクスのパターン最上部輪郭と、カラーフィルタのパターン外形形状の間隙の幅が1〜5μmの範囲であり、しかも、カラーフィルタのパターン外形形状は、ブラックマトリクスとカラーフィルタの最上部外周とが突起を生じた状態では重ならない外形形状となることを特徴とするカラーフィルタ。In a color filter composed of a black matrix using a colored light-shielding resin and a color filter layer using a colored transparent resin, the color filter pattern outline is on the inner side of the peripheral edge of the black matrix opening and the black matrix pattern outermost The width of the gap between the upper contour and the color filter pattern outer shape is in the range of 1 to 5 μm , and the color filter pattern outer shape is in a state where the black matrix and the uppermost outer periphery of the color filter have protrusions. A color filter characterized by an outer shape that does not overlap . 着色遮光性樹脂を用いたブラックマトリクスと、着色透明樹脂を用いたカラーフィルタ層よりなるカラーフィルタの製造方法において、カラーフィルタのパターン外形が、ブラックマトリクスの開口部周縁より内側にあり、かつブラックマトリクスのパターン最上部輪郭と、カラーフィルタ用マスクのパターン外形形状の間隙の幅が2〜5μmの範囲となるカラーフィルタ用マスクを用いてパターン露光することを特徴とするカラーフィルタの製造方法。  In a method for producing a color filter comprising a black matrix using a colored light-shielding resin and a color filter layer using a colored transparent resin, the pattern outer shape of the color filter is inside the periphery of the opening of the black matrix, and the black matrix A method for producing a color filter, wherein pattern exposure is carried out using a color filter mask in which the width of the gap between the pattern top contour and the pattern outer shape of the color filter mask is in the range of 2 to 5 μm.
JP20438199A 1999-07-19 1999-07-19 Color filter and manufacturing method thereof Expired - Fee Related JP4415426B2 (en)

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US6936960B2 (en) * 2003-01-10 2005-08-30 Eastman Kodak Company OLED displays having improved contrast
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