JP4407766B2 - Illumination device and projection device - Google Patents

Description

  The present invention relates to an illumination device for illuminating a liquid crystal display element and other spatial light modulation devices, and a projection device that projects an image using the spatial light modulation device and the illumination device.

  For example, in the illumination device disclosed in Patent Document 1 below, after passing light from a lamp light source such as a high-pressure mercury lamp through a pair of array lenses, P-polarized light is transmitted and emitted by a polarization beam splitter array and S-polarized light is emitted. Reflect and emit. At this time, the P-polarized light transmitted and emitted through the polarizing beam splitter array is converted into S-polarized light by the wave plate provided on the exit surface, but the S-polarized light reflected and emitted by the polarizing beam splitter array is converted into the wave plate. The polarization state is maintained. Thereby, only the S-polarized light passes through the polarization beam splitter array. The S-polarized light thus obtained enters the liquid crystal display element through a condenser lens or the like, and efficiently illuminates the liquid crystal display element.

  Further, in the illumination device disclosed in Patent Document 2 below, a spherical reflecting mirror in which light from a lamp light source is collimated and P-polarized light is transmitted and emitted by a pair of prisms and the like and S-polarized light is disposed behind the lamp light source. Return to etc. At this time, the S-polarized light reflected by the prism is converted into P-polarized light while reciprocating between the spherical reflecting mirror and a wave plate provided between the prism and the spherical reflecting mirror. As a result, light from the lamp light source can be converted into only P-polarized light and allowed to pass through a pair of prisms and the like. The P-polarized light thus obtained enters the liquid crystal display element through a condenser lens or the like, and efficiently illuminates the liquid crystal display element.

JP 11-352444 A JP-A-5-66368

  However, in the former illumination device, a pair of array lenses increases the coupling efficiency of light from the lamps incident on the polarization beam splitter array, so that the array lens processed with relatively high accuracy is compared with the polarization beam splitter array. This requires a precise arrangement, resulting in a complicated light source structure and increased costs.

  In the latter illuminating device, the light from the light source cannot be made sufficiently uniform, and the size of the light source is easily increased by the prism and the optical system at the subsequent stage.

  Therefore, an object of the present invention is to provide an illumination device that can generate specific polarized light with high efficiency and purity by using a polarization conversion element having a relatively simple structure.

  Further, the present invention can generate specific polarized light by using a polarization conversion element having a simple structure, and can easily achieve uniform illumination light when generating such polarized light. An object is to provide an apparatus.

  Another object of the present invention is to provide a projection apparatus that can easily and efficiently illuminate and can project a high-quality image by incorporating such an illumination apparatus.

  In order to solve the above problems, an illumination device according to the present invention reflects a part of light that has passed through a light source that generates illumination light, a light mixing unit that mixes light from the light source, and the light mixing unit, A polarization conversion element that transmits the remaining light and converts it into polarized light in a specific direction, and a light feedback unit that returns reflected light from the polarization conversion element to the polarization conversion element again. Here, the “light mixing means” can perform light mixing by, for example, dividing the light from a point-like or planar light source into wavefronts and superimposing the light thus divided.

  In the illumination device, since the light from the light source is mixed by the light mixing means, it is possible to improve the uniformity of the luminance of the illumination light emitted from the device and the distribution of the emission angles. Furthermore, since the reflected light from the polarization conversion element is returned again to the polarization conversion element by the light feedback means, the conversion efficiency to the polarized light by the polarization conversion element can be increased, and the illumination light from the light source can be used efficiently. In addition, heat generation in the subsequent polarizing element or the like can be reduced. As a result, uniform polarized light can be generated efficiently.

  Moreover, in the specific aspect of the said illuminating device, a light mixing means is a rod integrator. In this case, uniform wavefront division and mixing can be performed with a low loss by a simple optical element.

  In another specific aspect of the illumination device, the light mixing unit is a light confinement type rod integrator that also serves as a light feedback unit. In this case, it is possible to perform uniform wavefront division and mixing with low loss while efficiently converting to polarized light by the polarization conversion element with a simple optical element.

  In another specific aspect of the illumination device, the light mixing means is a fly eye integrator. In this case, extremely uniform wavefront division and mixing are possible with low loss.

  In another specific aspect of the illumination device, the light feedback means is a concave reflecting mirror that collects the illumination light emitted from the light source. In this case, since the reflected light from the polarization conversion element is returned to the polarization conversion element again while condensing the illumination light, it is possible to align the distribution of the emission angle of the illumination light within a certain range while improving the use efficiency of the illumination light. it can.

  In another specific aspect of the illumination device, the polarization conversion elements are arranged adjacent to the plurality of first polarization separation sections arranged in an array and the plurality of first polarization separation sections. And a plurality of second polarization separation units for emitting polarized light in a specific direction reflected by the plurality of first polarization separation units to the opposite side of the light source, and a light source side surface of the plurality of second polarization separation units. A reflection member; and a wave plate formed on a side surface opposite to the light source in any one of the plurality of first polarization separation units and the plurality of second polarization separation units. Here, the “first polarization separation unit” can be configured by a polarization beam splitter or the like that incorporates a polarization separation film that separates SP polarized light. In this case, highly polarized P-polarized light or S-polarized light can be obtained by the array of polarized light separating portions.

  In another specific aspect of the illumination device, the polarization conversion element is a wire grid polarization element. In this case, P-polarized light or S-polarized light can be obtained by a simple optical element.

  Further, in another specific aspect of the illumination device, the polarization conversion element includes a plurality of first polarization separation units arranged in an array at predetermined intervals in the short side direction, and each first polarization separation. And a plurality of second polarization separation units for reflecting polarized light in a specific direction reflected by each first polarization separation unit to the light source side. In this case, highly polarized P-polarized light or S-polarized light can be obtained by the array of polarized light separating portions.

  In another specific aspect of the illumination device, a wave plate for changing a polarization state of reflected light from the polarization conversion element is further provided between the polarization conversion element and the light feedback means. In this case, when the polarized light reflected by the polarization conversion element is returned to the polarization conversion element again by the optical feedback means, it can be converted into polarized light that can be transmitted through the polarization conversion element. Efficient removal is possible.

  A first projection device according to the present invention includes the above-described illumination device, a spatial light modulation device illuminated by illumination light from the illumination device, and a projection optical system that projects image light from the spatial light modulation device. Is provided. Here, the “spatial light modulation device” is an optical device typified by, for example, a liquid crystal light valve, and has a concept including a digital mirror device and the like.

  In the first projection device, since the spatial light modulation device is illuminated using the above-described illumination device, uniform polarized light can be efficiently generated, and a high-quality image can be projected by an inexpensive device. it can.

  Further, a second projection device according to the present invention includes a plurality of image forming units for each color each having the above-described illumination device and a spatial light modulation device illuminated by illumination light from the illumination device, and a plurality of images. A light combining member that combines and emits image light from the forming unit, and a projection optical system that projects the image light combined through the light combining member.

  In the second projection apparatus, since the spatial light modulation apparatus is illuminated using the above-described illumination apparatus, uniform polarized light can be efficiently generated for each color, and a high-quality color image can be generated by an inexpensive apparatus. Can project.

[First Embodiment]
FIG. 1 is a block diagram conceptually illustrating the structure of the projection apparatus according to the first embodiment. The projection device, that is, the projector 10 includes an illumination device 20, a light modulation device 30, a projection lens 40, and a control device 50. Here, the illumination device 20 includes an R light illumination device 21, a G light illumination device 23, a B light illumination device 25, and a light source driving device 27. The light modulation device 30 outputs drive signals to the three liquid crystal light valves 31, 33, and 35 that are spatial light modulation devices, the cross dichroic prism 37 that is a light combining member, and the liquid crystal light valves 31, 33, and 35. And an element driving device 38. The R light illumination device 21 and the liquid crystal light valve 31 are collectively called an image forming unit. Similarly, the units of the G light illumination device 23 and the liquid crystal light valve 33 and the units of the B light illumination device 25 and the liquid crystal light valve 35 are also referred to as image forming units.

  FIG. 2 is a diagram illustrating the structure of the R light illumination device 21 in the illumination device 20. This R light illumination device 21 is incident on the light source 21a that generates R light among the three primary colors, the concave reflecting mirror 21b that collects the illumination light emitted from the light source 21a to the side, and the opening of the concave reflecting mirror 21b. The rod integrator 21c is connected to the end, and the polarization conversion element 21d is connected to the exit end of the rod integrator 21c. Of these, the concave reflecting mirror 21b functions as a light feedback means for returning the reflected light from the polarization conversion element 21d back to the polarization conversion element 21d, and the rod integrator 21c splits and mixes the illumination light from the light source 21a. Functions as a mixing means.

  Here, the light source 21a is an LED package also called a solid light source, and incorporates a light emitting unit, that is, a diode chip PC. The light beam LF emitted while diverging in the front direction from the diode chip PC is converted into a light beam having a certain spread by the lens portion LP of the light source 21a, and enters the rod integrator 21c from its incident end IP. The light beam LS emitted while diverging from the diode chip PC in the side surface direction is also converted into a light beam having a certain spread by the concave reflecting mirror 21b, and enters the rod integrator 21c from its incident end IP.

  The rod integrator 21c has a structure in which the inner surface of a square columnar cylinder is formed as a reflecting surface, and the illumination light incident from the incident end IP is divided into wavefronts by inner surface reflection according to the angle, and the illumination is divided in this way. Light is superimposed on the exit end EP from the inside and incident. Thereby, illumination light with a uniform distribution can be emitted with a uniform angular distribution within a certain angular range from the emission end EP. At this time, the size of the aperture AP of the concave reflecting mirror 21b is matched with the size of the incident end IP of the rod integrator 21c, and reflecting surfaces functioning as auxiliary light feedback means are formed at the four corners of the incident end IP. Therefore, the illumination light emitted from the diode chip PC can be coupled to the rod integrator 21c without leakage, and the return reflected light LR returned from the polarization conversion element 21d is externally connected at the joint between the rod integrator 21c and the concave reflecting mirror 21b. Can be prevented from leaking out.

  The polarization conversion element 21d has a structure in which the first polarization beam splitter SP1 as the first polarization separation unit and the second polarization beam splitter SP2 as the second polarization separation unit are alternately arranged adjacent to each other in an array. As a whole, it has the same rectangular shape as the cylindrical cross section of the rod integrator 21c. In the second polarizing beam splitter SP2, a mirror MM, which is a reflecting member that reflects illumination light incident from the rod integrator 21c side, is formed on the side surface on the light source 21a side. A (λ / 2) plate WP, which is a wavelength plate for converting S-polarized light incident from the adjacent first polarizing beam splitter SP1 into P-polarized light, is attached to the opposite side surface of 21a.

  Of the illumination light emitted from the exit end EP of the rod integrator 21c, only the P-polarized light is selected on the polarization separation surface of the first polarization beam splitter SP1 and is emitted from the polarization conversion element 21d. Transmits to the side and becomes output light. Further, the S-polarized light reflected by the polarization separation surface enters the second polarization beam splitter SP2, is reflected again by the polarization separation surface provided thereon, and enters the plate WP. The S-polarized light incident on the (λ / 2) plate WP is converted to P-polarized light by passing through the (λ / 2) plate WP, and is emitted as output light from the polarization conversion element 21d. Thus, only the P-polarized light is emitted from the polarization conversion element 21d as high-luminance output light.

  On the other hand, the illumination light emitted from the exit end EP of the rod integrator 21c that is incident on the second polarizing beam splitter SP2 and reflected by the mirror MM is returned to the rod integrator 21c and travels back through the rod integrator 21c. Then, the light is returned from the incident end IP to the concave reflecting mirror 21b. The concave reflecting mirror 21b reflects the return reflected light from the mirror MM, that is, the polarization conversion element 21d one or more times to return it to the incident end IP of the rod integrator 21c, and re-enters the polarization conversion element 21d. That is, the concave reflecting mirror 21b and the rod integrator 21c function as an optical confinement container, and the illumination light emitted from the light source 21a is incident on the polarization conversion element 21d without omission and is converted into P-polarized light by the polarization conversion element 21d. The reflected light that does not exist is reincident on the polarization conversion element 21d with low loss. By repeating this, the illumination light emitted from the light source 21a is almost completely converted to P-polarized light, and is emitted as uniform and high-luminance output light from the emission side of the polarization conversion element 21d. At this time, the return reflected light from the polarization conversion element 21d also enters the diode chip PC of the light source 21a, but is not absorbed by the diode chip PC, but rather increases the light emission efficiency of the diode chip PC. Note that the (λ / 2) plate WP can be provided not on the second polarizing beam splitter SP2 side but on the exit side of the first polarizing beam splitter SP1. In this case, S-polarized light can be extracted. The second polarization beam splitter SP2 may include a mirror instead of the polarization separation surface.

  The output light from the polarization conversion element 21d is incident on the liquid crystal light valve 31 (see FIG. 1) disposed facing the polarization conversion element 21d with a predetermined distance. The liquid crystal light valve 31 is illuminated by the output light emitted from the polarization conversion element 21d. At this time, due to the presence of the rod integrator 21c and the like provided in the R light illumination device 21, the illumination light from the light source 21a is divided and superimposed to enter the liquid crystal light valve 31 as illumination light having a uniform luminance distribution and incident angle distribution. To do. The uniformity of the output light and the incident angle range to the liquid crystal light valve 31 can be appropriately adjusted by appropriately adjusting the focal length of the concave reflecting mirror 21b, the arrangement of the light source 21a, the length of the rod integrator 21c, and the like. it can.

  Further, in the R light illumination device 21, since the return reflected light from the polarization conversion element 21d is reused due to the presence of the concave reflecting mirror 21b and the like, the polarization conversion efficiency by the polarization conversion element 21d can be increased, and the light source 21a The illumination light from can be used efficiently. Therefore, it is possible to reduce heat generation in the liquid crystal light valve 31 at the rear stage and the polarizing plate disposed in the vicinity thereof.

  In the above description, only the structure of the R light illuminating device 21 in the illuminating device 20 of FIG. 1 has been described. It has basically the same structure as the R light illuminator 21 with only slight changes.

  That is, the G light liquid crystal light valve 33 is illuminated very uniformly by the G light from the G light illuminating device 23, but the illumination light at this time almost completely radiates the G light from the LED package which is a solid state light source. Efficiently converted to P-polarized light. Further, the B light liquid crystal light valve 35 is illuminated very uniformly by the B light from the B light illumination device 25, but the illumination light at this time almost completely converts the B light from the LED package, which is a solid light source. Efficiently converted to P-polarized light.

  Light from each of the illuminating devices 21, 23, 25 incident on the liquid crystal light valves 31, 33, 35 is two-dimensionally modulated by the liquid crystal light valves 31, 33, 35, respectively. The light of each color that has passed through the liquid crystal light valves 31, 33, and 35 is combined by a cross dichroic prism 37 that is a light combining member and is emitted from one side surface. The combined light image emitted from the cross dichroic prism 37 enters the projection lens 40 that is a projection optical system and is projected at a suitable magnification on a screen (not shown) provided outside the projector 10. That is, the projector 10 projects a color image obtained by combining the images of the respective colors R, G, and B appropriately formed on the liquid crystal light valves 31, 33, and 35 on the screen. Although not shown in the drawing, polarizing plates are arranged at appropriate positions in the vicinity of the liquid crystal light valves 31, 33, 35 in order to illuminate and read the liquid crystal light valves 31, 33, 35 with polarized light. ing.

  The control device 50 is composed of a microcomputer or the like, and outputs control signals to the light source driving device 27 and the element driving device 38 to operate the light illumination devices 21, 23, 25 and liquid crystal light valves 31, 33, 35 of the respective colors. Is controlled indirectly. Thus, for example, a color moving image or still image is projected and displayed on the screen with high luminance in accordance with an image signal input to the projector 10 from the outside via the control device 50, for example.

[Second Embodiment]
Hereinafter, the projector according to the second embodiment will be described. The projector according to the second embodiment is a modification of the projector lighting devices 21, 23, and 25 according to the first embodiment, and the same portions are denoted by the same reference numerals and redundant description is omitted.

  FIG. 3 is a diagram illustrating the structure of the R light illumination device incorporated in the projector according to the second embodiment. The R light illuminating device 121 includes a light source unit 121a that generates and collects R light, an end surface sealing type rod integrator 121c that confines illumination light emitted from the light source unit 121a, and an emission end of the rod integrator 121c. And a connected polarization conversion element 21d. Among these, the rod integrator 121c functions as a light mixing unit that divides and mixes the illumination light from the light source unit 121a, and also functions as a light feedback unit that returns the reflected light from the polarization conversion element 21d to the polarization conversion element 21d again. To do.

  The light source unit 121a condenses the illumination light emitted in the front direction from the light source 21a that generates R light, the concave reflecting mirror 121b that collects illumination light emitted from the light source 21a to the side. A convex lens 121g. The light beam LF emitted while diverging in the front direction from the diode chip PC built in the light source 121a is converged by the lens portion LP and the convex lens 121g of the light source 121a and is roded through the pinhole PH provided in the rod integrator 121c. The light enters the inside of the integrator 121c. The light beam LS emitted while diverging from the diode chip PC in the side surface direction is also converged by the concave reflecting mirror 121b and enters the pinhole PH provided in the rod integrator 121c.

  The rod integrator 121c has a structure in which the inner surface and one end surface of a square columnar cylinder are formed as a reflecting surface, and the illumination light incident from the pinhole PH is divided into wavefronts, and the illumination light divided into wavefronts is emitted at the exit end EP, that is, polarized light. Superimposed and incident on the conversion element 21d. Of the illumination light that has entered the polarization conversion element 21d, the light that has passed through the polarization conversion element 21d becomes output light converted to P-polarized light. On the other hand, of the illumination light incident on the polarization conversion element 21d, the light reflected by the polarization conversion element 21d is returned to the rod integrator 21c, travels back through the rod integrator 21c, and enters one end surface SP. The one end surface SP reflects the return reflected light from the polarization conversion element 21d again in the forward direction and re-enters the polarization conversion element 21d. That is, the rod integrator 21c functions as an optical confinement container, and makes the illumination light emitted from the light source 21a incident on the polarization conversion element 21d without omission and reduces the reflected light that has not been converted into P-polarized light by the polarization conversion element 21d. Re-enter the polarization conversion element 21d with loss. By repeating this, the illumination light emitted from the light source 21a is almost completely converted to P-polarized light, and is emitted as uniform and high-luminance output light from the emission side of the polarization conversion element 21d.

  In the above, only the structure of the R light illuminating device 121 among the illuminating devices has been described. It has basically the same structure as the R light illumination device 121. With such an illumination device of each color, a liquid crystal light valve similar to the liquid crystal light valves 31, 33, and 35 shown in FIG. 1 can be illuminated uniformly with high brightness.

[Third Embodiment]
Hereinafter, the projector according to the third embodiment will be described. The projector according to the third embodiment is also a modification of the illumination devices 21, 23, and 25 of the projector according to the first embodiment.

  FIG. 4 is a diagram illustrating the structure of the R light illumination device incorporated in the projector according to the third embodiment. The R light illumination device 221 is disposed so as to block the light source 21a that generates R light, the concave reflecting mirror 21b that collects the illumination light emitted from the light source 21a to the side, and the aperture AP of the concave reflecting mirror 21b. And a (λ / 4) plate 221h which is a wavelength plate bonded to the incident surface of the reflective polarizing plate 221d. Of these, the concave reflecting mirror 21b functions as a light feedback means for returning the reflected light from the reflective polarizing plate 221d back to the reflective polarizing plate 221d, and also returns the illumination light from the light source 21a and the returning from the reflective polarizing plate 221d. It also functions as a light mixing means for dividing and mixing the reflected light.

  Here, the reflection-type polarizing plate 221d is a wire grid polarization element, and has stripe conductors SM made of conductor patterns of equal width formed on the transparent substrate TP at equal intervals of the order of wavelengths. Since the width and interval of the stripe conductor SM are set to be equal to or less than the wavelength of the R light, polarized light perpendicular to the specific direction in which the stripe conductor SM extends (hereinafter, for convenience, out of the light incident on the reflective polarizing plate 221d). Only P-polarized light) selectively passes through the reflective polarizing plate 221d.

  The operation will be described. The light beam L1 emitted from the diode chip PC built in the light source 121a while diverging in the front direction or the side direction is narrowed to an appropriate divergence angle (λ / 4) and passes through the plate 221h. The light enters the reflection type polarizing plate 221d and illuminates the reflection type polarizing plate 221d almost uniformly. Of the light beam L1 incident on the reflective polarizing plate 221d, the light that has passed through the reflective polarizing plate 221d is substantially only P-polarized output light. On the other hand, of the illumination light incident on the reflective polarizing plate 221d, the light reflected by the reflective polarizing plate 221d is substantially composed of only S-polarized light. Such reflected light passes through the (λ / 4) plate 221h. Converted to circularly polarized light. The circularly polarized reflected light that has passed through the (λ / 4) plate 221h is returned to the concave reflecting mirror 21b. The concave reflecting mirror 21b reflects the return reflected light L2 from the reflective polarizing plate 221d one or more times so as to re-enter the reflective polarizing plate 221d. At this time, the circularly polarized light reflected by the concave reflecting mirror 21b is maintained in the circularly polarized state although the rotation direction is reversed, and passes through the (λ / 4) plate 221h when re-entering the reflective polarizing plate 221d. It is converted from circularly polarized light to p-polarized light. As a result, the return reflected light L2 re-entering the reflective polarizing plate 221d efficiently passes through the reflective polarizing plate 221d. In this case, the concave reflecting mirror 21b functions as an optical confinement container, and the illumination light emitted from the light source 21a is incident on the reflective polarizing plate 221d without omission and is not converted to P-polarized light by the reflective polarizing plate 221d. The return reflected light L2 is superimposed while being divided into wavefronts with low loss, and is incident again on the reflective polarizing plate 221d. As a result, the illumination light emitted from the light source 21a is almost completely converted to P-polarized light and emitted as uniform and high-luminance output light from the emission side of the reflective polarizing plate 221d.

  In the above, only the structure of the R light illuminating device 221 among the illuminating devices has been described, but the G light illuminating device and the B light illuminating device also have basically the same structure as the R light illuminating device 221. With such an illumination device of each color, it is possible to uniformly illuminate each color liquid crystal light valve of RGB having the same structure as each of the liquid crystal light valves 31, 33, and 35 shown in FIG.

[Fourth Embodiment]
The projector according to the fourth embodiment will be described below. The projector of the fourth embodiment is also a modification of the projector illumination device of the first embodiment.

  FIGS. 5A and 5B are a plan view and a side view illustrating the structure of the R light illumination device incorporated in the projector of the fourth embodiment. The R light illumination device 321 receives an array light source unit 321a that generates R light, a fly-eye lens 321c through which illumination light emitted from the array light source unit 321a passes, and illumination light that has passed through the fly-eye lens 321c. A polarization conversion device 321d and a lens 321i that uniformly makes the P-polarized light that has passed through the polarization conversion device 321d incident on the liquid crystal light valve 31 for R light as illumination light. Among these, the fly-eye lens 321c and the lens 321i function as a light mixing unit that mixes illumination light from the array light source unit 321a.

  The array light source unit 321a has a plurality of LED packages PAa to PAc that are arranged in a matrix and generate R light, and illumination light that is arranged around each of the LED packages PAa to PAc and is emitted in the side surface direction. A plurality of concave reflecting mirrors 321j that are incident on the fly-eye lens 321c at corners. Each concave reflecting mirror 321j provided in the array light source unit 321a functions as an optical feedback unit that returns the reflected light from the polarization conversion device 321d to the polarization conversion device 321d again. The illumination light from the array light source unit 321a illuminates the polarization conversion device 321d almost uniformly through the fly-eye lens 321c.

  The polarization conversion device 321d has a built-in polarization separation film PSF having a structure that is periodically bent in a folding screen, and a (λ / 4) plate 321k is attached to the incident surface side. The polarization separation film PSF has a 90 ° apex that is a mountain side toward the (λ / 4) plate 321k and a 90 ° apex that is a valley side toward the (λ / 4) plate 321k. A large number are provided, and the P-polarized light is transmitted and the S-polarized light is reflected at the plane portion between the two vertices.

  The operation will be described. The light beam L1 emitted while diverging from the LED packages PAa to PAc in the front direction and the side surface direction is made uniform through the fly-eye lens 321c and enters the polarization conversion device 321d. Of the light beam L1 incident on the polarization conversion device 321d, the P-polarized light component transmitted through the specific polarization separation surface PSF1, which is the first polarization separation unit included in the polarization separation film PSF, becomes output light. The S-polarized light component reflected by the polarization separation surface PSF1 is incident again on the polarization separation surface PSF2, which is the second polarization separation unit facing the first polarization separation unit, and is reflected and travels backward (λ / 4). ) It enters the plate 321k. The S-polarized light component incident on the (λ / 4) plate 321k is converted from S-polarized light to circularly-polarized light by reversing the (λ / 4) plate 321k, and is reflected back as a reflected reflected light L2 via the fly-eye lens 321c. Incident on the mirror 321j. The concave reflecting mirror 321j reflects the return reflected light L2 from the polarization conversion device 321d one or more times so as to re-enter the polarization conversion device 321d. At this time, the circularly polarized light reflected by the concave reflecting mirror 321j is maintained in the circularly polarized state although the rotation direction is reversed, and passes through the (λ / 4) plate 321k before passing again to the polarization separation film PSF. Conversion from polarized light to P-polarized light. As a result, since the return reflected light L2 re-entering the polarization separation film PSF efficiently passes through the polarization separation film PSF, the illumination light emitted from each of the LED packages PAa to PAc is almost completely converted to P-polarized light. Then, it is emitted as uniform and high-brightness output light from the exit side of the polarization conversion device 321d. The output light from the polarization conversion device 321d is projected onto the liquid crystal light valve 31 for R light after having an appropriate beam size by the lens 321i.

  Note that the light beam L1 emitted from the specific LED packages PAa to PAc and incident on the polarization separation film PSF does not necessarily return to the concave reflecting mirror 321j of the same LED package PAa to PAc. For example, as shown in FIG. 5B, the light beam L1 emitted from the LED package PAb ′ is reflected to the concave reflecting mirror 321j of the LED package PAb adjacent to the ridge line direction of the polarization conversion device 321d via the polarization conversion device 321d. It can be returned as the light L2 and can be incident again on the polarization conversion device 321d. Thereby, the S-polarized light reflected by the polarization separation film PSF can be efficiently recovered, and specific polarized light can be efficiently extracted from the polarization conversion device 321d.

  The polarization conversion device 321d is manufactured by, for example, the following method. First, a glass member having a triangular groove array corresponding to the shape of the polarization separation film PSF is prepared. Next, a polarization separation film is formed on the surface of the groove array provided in the glass member. Next, the (λ / 4) plate 321k is brought into contact with the glass member so as to face the polarization separation film, and the transparent resin as an adhesive is placed between the glass member and the (λ / 4) plate 321k. Inject. Thereby, the transparent resin is filled in the groove array. In this state, the transparent resin filled in the groove array is cured by ultraviolet rays or the like, whereby the polarization conversion device 321d is completed, and the (λ / 4) plate 321k is attached to the polarization conversion device 321d. It can be.

  In the above description, it goes without saying that the number of lens elements constituting the fly-eye lens 321c can be appropriately changed according to the application. Further, the number of bendings of the polarization separation film PSF constituting the polarization conversion device 321d, that is, the number of polarization separation surfaces can be appropriately changed according to the application.

  In the above, only the structure of the R light illuminating device 321 of the illuminating device has been described, but the G light illuminating device and the B light illuminating device also have basically the same structure as the R light illuminating device 321. With such an illumination device for each color, in addition to the liquid crystal light valve 31, RGB liquid crystal light valves having the same structure as the liquid crystal light valves 33 and 35 shown in FIG. it can.

[Fifth Embodiment]
The projector according to the fifth embodiment will be described below. The projector of the fifth embodiment is also a modification of the projector illumination device of the first embodiment.

  FIG. 6 is a diagram illustrating the structure of the R light illumination device incorporated in the projector according to the fifth embodiment. This R light illumination device 421 has an incident end connected to a light source 21a that generates R light, a concave reflecting mirror 21b that collects illumination light emitted from the light source 21a to the side, and an opening of the concave reflecting mirror 21b. Rod integrator 21c, and polarization conversion device 321d connected to the exit end of rod integrator 21c.

  The polarization conversion device 321d is the same as that of the fourth embodiment, and includes a polarization separation film PSF having a structure that is periodically bent in a folding screen, and has a (λ / 4) plate on the incident surface side. 321k is pasted.

  The operation will be described. The light beam L1 emitted while diverging from the light source 21a in the front direction or the side direction enters the rod integrator 21c after being narrowed to an appropriate divergence angle, and is made uniform through the rod integrator 21c for polarization conversion. Incident on device 321d. Of the light beam L incident on the polarization conversion device 321d, the P-polarized component transmitted through the specific polarization separation surface PSF1 which is the first polarization separation unit included in the polarization separation film PSF becomes output light. The S-polarized light component reflected by the polarization separation surface PSF1 is incident again on the polarization separation surface PSF2, which is the second polarization separation unit facing the first polarization separation unit, and is reflected and travels backward (λ / 4). ) It enters the plate 321k. The S-polarized light component incident on the (λ / 4) plate 321k is converted from S-polarized light to circularly-polarized light by reversing the (λ / 4) plate 321k, and returns to the concave reflecting mirror through the rod integrator 21c as return reflected light L2. 21b is incident. The concave reflecting mirror 21b reflects the return reflected light L2 from the polarization conversion device 321d one or more times so as to re-enter the polarization conversion device 321d. At this time, the circularly polarized light reflected by the concave reflecting mirror 21b is maintained in the circularly polarized state although the rotation direction is reversed, and passes through the (λ / 4) plate 321k before passing again to the polarization separation film PSF. Conversion from polarized light to P-polarized light. As a result, the return reflected light L2 re-entering the polarization separation film PSF efficiently passes through the polarization separation film PSF, so that the illumination light emitted from the light source 21a is almost completely converted to P-polarized light. The light is emitted as uniform and high-intensity output light from the emission side of the device 321d.

  In the above, only the structure of the R light illuminating device 421 in the illuminating device has been described, but the G light illuminating device and the B light illuminating device also have basically the same structure as the R light illuminating device 421. With such an illumination device of each color, it is possible to uniformly illuminate each color liquid crystal light valve of RGB having the same structure as each of the liquid crystal light valves 31, 33, and 35 shown in FIG.

  Although the present invention has been described based on the above embodiments, the present invention is not limited to the above embodiments. For example, in the first embodiment and the second embodiment, the polarization conversion element 21d formed of an array of polarization beam splitters is used. Instead, the reflective polarizing plate 221d and the (λ / 4) plate shown in FIG. A combination with 221h can be used.

  In the third embodiment, the concave reflecting mirror 21b and the reflective polarizing plate 221d are directly connected via the (λ / 4) plate 221h, but between the concave reflecting mirror 21b and the reflective polarizing plate 221d. The rod integrator 21c used in the first embodiment can also be incorporated. In this case, the uniformity of illumination light can be improved.

  In the first to third embodiments, output light from the polarization conversion element 21d and the reflective polarizing plate 221d is directly incident on the liquid crystal light valve 31, and an appropriate relay lens is inserted between them. be able to.

  In the projector 10 of the above-described embodiment, the light modulation device 30 is configured by the transmissive liquid crystal light valves 31, 33, and 35. However, it can be configured by a reflective liquid crystal element. Further, the liquid crystal light valve can be a light writing type liquid crystal light valve.

  Moreover, in the said embodiment, although the light source is comprised using LED, it replaces with LED and other solid light sources, such as EL light emitting element and LD, can also be used.

It is a figure which shows the structure of the projector which concerns on 1st Embodiment. It is a figure explaining the structure of a light illuminating device among the apparatuses of FIG. It is a figure explaining the illuminating device in 2nd Embodiment. It is a figure explaining the illuminating device in 3rd Embodiment. (A), (c) is a figure explaining 4th Embodiment. It is a figure explaining 5th Embodiment.

Explanation of symbols

  20 illumination device, 21 R light illumination device, 21a light source, 21b concave reflecting mirror, 21c rod integrator, 21d polarization conversion element, 23 G light illumination device, 25 B light illumination device, 30 light modulation device, 31, 33, 35 liquid crystal Light valve, 37 Cross dichroic prism, 40 projection lens, 50 control device, AP aperture, EP exit end, IP entrance end.

Claims (7)

An array light source for generating illumination light;
A fly eye integrator for mixing light from the array light source;
A polarization conversion element that reflects a part of the light that has passed through the fly-eye integrator and transmits the remaining light to convert it into polarized light in a specific direction,
A lens that mixes output light from the polarization conversion element into illumination light of a predetermined beam size;
A plurality of concave reflecting mirrors provided in each light source of the array light source, condensing illumination light emitted from each light source, and returning reflected light from the polarization conversion element to the polarization conversion element again ,
The concave reflecting mirror provided in the one light source, wherein a part of the light beam emitted from the one light source constituting the array light source and incident on the polarization conversion element is reflected by the polarization conversion element. The lighting device characterized by returning to   The lighting device according to claim 1, wherein the plurality of concave reflecting mirrors are disposed adjacent to each other.   The illumination device according to claim 1, wherein the polarization conversion element is a wire grid polarization element. The polarization conversion elements are alternately arranged adjacent to each of the first polarization separation units and a plurality of first polarization separation units arranged in an array at predetermined intervals in the lateral direction, and each first polarization separation unit the lighting device according to polarized light of the reflected specific direction to any one of claims 1 or 2, characterized in that it has a said array light source second polarization plurality of reflected respectively emitted toward the separation portion in parts .   The wave plate which changes the polarization state of the reflected light from the polarization conversion element is further provided between the polarization conversion element and the plurality of concave reflecting mirrors. The lighting device described in 1. The lighting device according to any one of claims 1 to 5,
A spatial light modulator illuminated by illumination light from the illumination device;
A projection apparatus comprising: a projection optical system that projects image light from the spatial light modulator. A plurality of image forming units for each color each having the illumination device according to any one of claims 1 to 5 and a spatial light modulation device illuminated by illumination light from the illumination device;
A light combining member that combines and emits image light from the plurality of image forming units;
A projection apparatus comprising: a projection optical system that projects image light combined through the light combining member.

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