JP4389262B2 - Optical components - Google Patents

Description

  The present invention relates to an optical component, and more particularly to an optical component used in a microscope illumination apparatus.

  Conventionally, an optical component including an optical element such as a filter or a lens is assembled into a unit called a lens chamber and unitized, and is fixed to a microscope main body with a screw or the like.

To attach the lens to the holder, the outer peripheral surface of the lens is fitted to the inner peripheral surface of the holder, and the lens is fixed to the holder using a fixing member called an adhesive or a holding ring.
Japanese Utility Model Publication No. 7-36111

  Since the optical component requires a process of separately preparing a lens and a holder and assembling them, there is a problem in that the manufacturing cost is increased.

  The present invention has been made in view of such circumstances, and its object is to reduce the number of parts constituting the optical part, reduce the assembly process, and reduce the manufacturing cost.

In order to solve the above-mentioned problem, an invention according to claim 1 is an optical component incorporated in an optical device, wherein a first surface and a flat surface are formed of a plurality of microlenses, each having a convex surface formed in a two-dimensional shape. Two fly-eye lenses having a second surface, and when the second surfaces of the two fly-eye lenses are arranged to face each other, the distance between the two fly-eye lenses is constant. The two fly's eye lenses have the same shape so that the contact surfaces for holding are respectively formed on the holders, and the contact surfaces formed on the holders do not face each other. In addition, each of the holders is molded integrally with a holder for holding the fly-eye lens, and the contact surface is formed at the same position of each holder on the second surface side .

  According to a second aspect of the present invention, in the optical component according to the first aspect, a first contact surface that serves as a reference for positioning in the optical axis direction when assembled in the optical device is formed on the holder. And

  According to a third aspect of the present invention, in the optical component according to the first or second aspect, the holder has a flange portion and serves as a positioning reference in a direction perpendicular to the optical axis direction when the holder is incorporated in the optical device. Two contact surfaces are formed on the flange portion of the holder.

According to a fourth aspect of the present invention, in the optical component according to the first or second aspect , the holder has a flange portion, and when assembled in the optical device, each of the optical axis direction and the direction orthogonal to the optical axis direction is provided. A third contact surface serving as a reference for positioning in the orthogonal direction is formed on the flange portion.

According to a fifth aspect of the present invention, in the optical component according to the fourth aspect, the second contact surface that serves as a positioning reference in a direction orthogonal to the optical axis direction when incorporated in the optical device is the flange portion of the holder. It is characterized by being formed.

  According to the optical component of the present invention, the number of components constituting the optical component can be reduced, the assembly process can be reduced, and the manufacturing cost can be reduced.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings.

  FIG. 1A is a front view of an optical component according to the first embodiment of the present invention, FIG. 1B is a view taken in the direction of arrow 1B in FIG. 1A, and FIG. 1C is a view in FIG. It is sectional drawing which follows the 1C-1C line.

  As shown in FIG. 1, the X axis, the Y axis, and the Z axis are orthogonal to each other.

  The optical component includes a lens unit (optical element) 10 and a holder 15. The lens unit 10 and the holder 15 are integrally molded with an acrylic resin, for example. The acrylic resin is a colorless and transparent and hard synthetic resin having chemical resistance and electrical insulation.

  The lens unit 10 is composed of a disk-shaped single lens. A first surface 10a is formed on one end surface of the lens unit 10 in the Z-axis direction (optical axis direction), and a second surface 10b is formed on the other end surface. The first surface 10a is a curved surface having a predetermined curvature, and the second surface 10b is a flat surface. The performance of the lens unit 10 is determined by the curvature, thickness, and refractive index of the transparent resin.

  The holder 15 is formed on the outer peripheral edge of the lens unit 10. The holder 15 is integrally formed with flange portions 16a and 16b.

  A flat surface 17 for attaching an optical component to a microscope main body (not shown) of a microscope (optical device) is formed on the bottom surfaces of the flange portions 16a and 16b. The flat surface 17 is integrally formed with seating surfaces 17a and 17b (third contact surfaces) that are pressed against a contact surface (not shown) of the microscope body. The plane 17 is orthogonal to the Y axis and serves as a reference for positioning in the Y axis direction.

  The flange portions 16a and 16b are formed with screw holes 14a and 14b through which screws 13a and 13b that are formed in the microscope main body and screwed into the screws are passed.

  On one end face in the Z-axis direction of the flange portions 16a and 16b, contact surfaces (first contact surfaces) 18a and 18b that are pressed against a contact surface (not shown) provided in the microscope main body are formed. The contact surfaces 18a and 18b serve as a reference for positioning in the Z-axis direction.

  Further, a contact surface (second contact surface) 19 that is pressed against a contact surface (not shown) provided in the microscope main body is formed on one end surface in the X-axis direction of the flange portions 16a and 16b. The contact surface 19 serves as a reference for positioning in the X-axis direction.

  When the seating surfaces 17a and 17b of the optical component are pressed against the contact surface of the microscope body, and the optical component is fixed to the microscope body with screws 13a and 13b, the contact surfaces 18a, 18b and 19 are pressed against the contact surface of the microscope body. Therefore, the position of the optical component in the three-dimensional direction with respect to the microscope main body is determined.

  In addition, since it is not necessary for parts other than the lens part 10 of an optical component to be transparent, the part other than the lens part 10 and the lens part 10 is molded by another material by insert molding or two-color molding. Also good.

  According to this embodiment, since the lens unit 10 and the holder 15 are integrally formed by molding, the number of parts constituting the optical part can be reduced, the assembly process can be reduced, and the manufacturing cost can be reduced.

  In addition, since positioning is performed using only one component, the optical component can be assembled at a predetermined position of the microscope main body with higher accuracy than the case where the lens unit 10 and the holder 15 that are separately manufactured are assembled.

  2 (a) is a front view of an optical component according to a second embodiment of the present invention, FIG. 2 (b) is a view taken along arrow 2B in FIG. 2 (a), and FIG. 2 (c) is FIG. 2 (a). It is sectional drawing which follows the 2C-2C line.

  As shown in FIG. 2, the X axis, the Y axis, and the Z axis are orthogonal to each other.

  The optical component includes a lens unit (optical element) 20 and a holder 25. The lens unit 20 and the holder 25 are integrally molded with an acrylic resin, for example.

  A first surface 20a is formed on one end surface of the lens portion 20 in the Z-axis direction (optical axis direction), and a second surface 20b is formed on the other end surface. The performance of the lens unit 20 is determined by the curvature, thickness, and refractive index of the transparent resin.

  This lens unit 20 is called a fly-eye lens. The first surface 20a is formed with a two-dimensional convex surface constituting a microlens, and the second surface 20b is a flat surface. The plurality of microlenses are arranged symmetrically with respect to the Y axis passing through the optical axis L. Note that the microlenses constituting the fly-eye lens are hexagonal. Since this fly-eye lens can obtain uniform illumination light, it is used, for example, in an exposure apparatus used for semiconductor manufacturing.

  The holder 25 is formed on the outer peripheral edge of the lens unit 20. The holder 25 is integrally formed with flange portions 26a and 26b.

  A flat surface 27 for attaching an optical component to a microscope main body (not shown) is formed on the bottom surfaces of the flange portions 26a and 26b. The flat surface 27 is integrally formed with seating surfaces 27a and 27b (third contact surfaces) that are pressed against a contact surface (not shown) of the microscope body. The plane 27 is orthogonal to the Y axis and serves as a reference for positioning in the Y axis direction.

  The flange portions 26a and 26b are formed with screw holes 24a and 24b through which screws 23a and 23b that are formed in the microscope main body and screwed into the screws are passed.

  On one end face in the Z-axis direction of the flange portions 26a and 26b, contact surfaces (first contact surfaces) 28a and 28b that are pressed against a contact surface (not shown) provided on the microscope main body are formed. The contact surfaces 28a and 28b serve as a reference for positioning in the Z-axis direction.

  On the other end surface of the flange portions 26a and 26b in the Z-axis direction, when the two lens portions 20 are arranged facing each other on the optical axis, a contact surface for keeping the distance between the lens portions 20 constant ( A fourth contact surface) 22 is formed.

  Also, on the end faces in the X-axis direction of the flange portions 26a and 26b, contact surfaces (second contact surfaces) 29a and 29b that are pressed against a contact surface (not shown) provided on the microscope main body are formed. . The contact surfaces 29a and 29b serve as a reference for positioning in the X-axis direction.

  When the seating surfaces 27a and 27b of the optical component are pressed against the contact surface of the microscope body, and the optical component is fixed to the microscope body with screws 23a and 23b, the contact surfaces 28a, 28b, and 29a are respectively pressed against the contact surface of the microscope body. Therefore, the position of the optical component in the three-dimensional direction with respect to the microscope main body is determined.

  Since parts other than the lens part 20 of the optical component do not need to be transparent, the lens part 20 and parts other than the lens part 20 are molded with different materials by insert molding, two-color molding or the like. Also good.

  FIG. 3A is a front view showing a state in which optical components according to the second embodiment of the present invention are arranged facing each other on the optical axis, and FIG. 3B is a view taken in the direction of arrow 3B in FIG. FIG.3 (c) is sectional drawing which follows the 3C-3C line | wire of Fig.3 (a).

  In FIG. 3A to FIG. 3C, in order to distinguish between the two optical components, the upper numerals of the reference numerals are changed, but the two optical components have the same structure.

  The two optical components are arranged on the optical axis L so that the second surface 20b of the lens unit 20 and the second surface 30b of the lens unit 30 face each other.

  The position of one optical component (the optical component on the lower side in FIG. 3B) in the three-dimensional direction with respect to the microscope body is determined by the seating surfaces 27a and 27b and the contact surfaces 28a, 28b, and 29a.

The other optical component (the optical component on the upper side in FIG. 3B) is a seat surface (third contact surface) 37a and a seat surface (not shown) at a position corresponding to the seat surface 27b of one optical component. contact surface of) one of the optical components of the contact surface 22, determines the position of the three-dimensional directions with respect to the microscope body by a contact surface 32, 39 b of the other optical components.

  That is, after determining the position of one optical component in the three-dimensional direction with respect to the microscope body, the position in the other Z direction (optical axis direction) is determined by using one optical component as the contact surface and the XY direction with respect to the microscope body. .

  Further, the contact surface 22 of one optical component is in contact with the flange portion 36a of the other optical component facing each other. Further, the contact surface 32 of the other optical component is in contact with the flange portion 26a of the one optical component facing each other. Therefore, the spacing between the lens portions 20 and 30 of both optical components is held constant by the contact surfaces 22 and 32.

  According to this embodiment, the same effect as that of the first embodiment can be obtained, and the distance between the lens portions of both optical components can be kept constant.

  Further, as can be seen from FIG. 3B, both optical components have exactly the same shape, so only one type of optical component needs to be prepared, and there is no need to manufacture different types of optical components, An optical device can be manufactured more efficiently.

  FIG. 4A is a front view of an optical component according to the third embodiment of the present invention, FIG. 4B is a view taken in the direction of arrow 4B in FIG. 4A, and FIG. 4C is the view in FIG. Sectional drawing which follows the 4C-4C line, FIG.4 (d) is a 4D arrow line view of FIG.4 (c).

  As shown in FIG. 4, the X axis, the Y axis, and the Z axis are orthogonal to each other.

  The optical component includes a lens unit (optical element) 40 and a holder 45. The lens part 40 and the holder 45 are integrally molded with, for example, acrylic resin.

  The lens portion 40 has a disc shape, and a first surface 40a is formed on one end surface in the Z-axis direction (optical axis direction) of the lens portion 40, and a second surface 40b is formed on the other end surface. . The lens unit 40 is called a fly-eye lens, and a convex surface constituting a minute lens is formed two-dimensionally on the first surface 40a, and the second surface 40b is a flat surface. The microlenses are arranged symmetrically with respect to the Y axis passing through the optical axis L.

  The holder 45 is annular and surrounds the outer peripheral edge of the lens unit 40. The holder 45 is slidably mounted in a cylindrical portion 60 (see FIG. 5) provided in the microscope main body 70 (see FIG. 5). Therefore, the holder 45 is prevented from moving in the X-axis direction and the Y-direction by the inner peripheral surface of the cylindrical portion 60, and the positions in the X-axis direction and the Y-direction are determined.

  Notches 49 a and 49 b are formed on the outer peripheral surface of the holder 45. By engaging pins (not shown) provided on the cylindrical portion 60 with the notches 49a and 49b, the rotation of the lens portion 40 around the optical axis L can be prevented. Therefore, when the optical component in FIG. 4 is arranged facing the second surface 40b on the optical axis L so that the second lens 40 faces each other, the microlens is linear with respect to the Y axis passing through the optical axis L in any optical component. It becomes symmetric. When the lens unit 40 is not a fly-eye lens but a single lens, there is no problem even if the holder 45 rotates around the optical axis L, so the notches 49a and 49b are omitted.

  The cylindrical portion 60 has a lens receiving surface 60a (see FIG. 5). The position of the holder 45 in the Z-axis direction is determined by pressing one end face 46a in the Z-axis direction against the lens receiving surface 60a.

  On the other end surface of the holder 45 in the Z-axis direction, when an optical component is disposed facing the optical axis (see FIG. 5), a contact surface (first surface) for keeping the distance between the optical components constant. 4 abutting surfaces) 48a and 48b are formed.

  In addition, since it is not necessary for parts other than the lens part 40 of an optical component to be transparent, the parts other than the lens part 40 and the lens part 40 are molded with different materials by insert molding, two-color molding, or the like. Also good.

  Further, in each of the above-described embodiments, since a flash or the like is generated in the optical component formed integrally by molding, it is preferable to perform a process for removing the flash or the like on the contact surface 22 or the like. By performing this processing, the positioning accuracy of the optical component can be further increased.

  FIG. 5A is a side view showing a part of a microscope equipped with an optical component according to the third embodiment of the present invention, and FIG. 5B is a partially enlarged view thereof.

  In FIG. 5, the upper numerals of the reference numerals are changed in order to distinguish the two optical components, but the two optical components have the same structure. Incidentally, the light source is arranged on the right side of the cylindrical portion 60 of the microscope main body 70 in FIG.

  On the optical axis L, the second surface 40b of one optical component and the second surface 50b of the other optical component are arranged on the cylindrical portion 60 of the microscope body 70 so as to face each other. Both optical components constitute a part of the illumination device.

  The position of the one optical component in the three-dimensional direction is determined by the outer peripheral surface of the holder 45 and the one end surface 46a pressed against the lens receiving surface 60a.

  The contact surfaces 48a and 48b of one optical component (only the contact surface 48a is visible in FIG. 5) are in contact with the other end surface 56b of the holder 55 of the opposite optical component. Further, the contact surfaces 58a and 58b (only the contact surface 58b is visible in FIG. 5) of the other optical component are in contact with the other end surface 46b of the holder 45 of the one optical component facing each other. For this reason, the distance between the optical components is kept constant by the contact surfaces 48a, 48b, 58a, 58b.

  The position of the other optical component in the X-axis direction and the Y-axis direction is determined by the outer peripheral surface of the holder 55.

  Also, one end face 56a of the holder 55 of the other optical component is fixed to the cylindrical portion 60 by a pressing ring 61, and the position of the other optical component in the Z-axis direction is determined.

  According to this embodiment, there exists an effect similar to 2nd Embodiment.

FIG. 1A is a front view of an optical component according to the first embodiment of the present invention, FIG. 1B is a view taken in the direction of arrow 1B in FIG. 1A, and FIG. 1C is a view in FIG. It is sectional drawing which follows the 1C-1C line. 2 (a) is a front view of an optical component according to a second embodiment of the present invention, FIG. 2 (b) is a view taken along arrow 2B in FIG. 2 (a), and FIG. 2 (c) is FIG. 2 (a). It is sectional drawing which follows the 2C-2C line. FIG. 3A is a front view showing a state in which optical components according to the second embodiment of the present invention are arranged facing each other on the optical axis, and FIG. 3B is a view taken in the direction of arrow 3B in FIG. FIG.3 (c) is sectional drawing which follows the 3C-3C line | wire of Fig.3 (a). FIG. 4A is a front view of an optical component according to the third embodiment of the present invention, FIG. 4B is a view taken in the direction of arrow 4B in FIG. 4A, and FIG. 4C is the view in FIG. Sectional drawing which follows the 4C-4C line, FIG.4 (d) is a 4D arrow line view of FIG.4 (c). FIG. 5A is a side view showing a part of a microscope equipped with an optical component according to the third embodiment of the present invention, and FIG. 5B is a partially enlarged view thereof.

Explanation of symbols

10, 20, 30, 40, 50 Lens part (optical element)
15, 25, 35, 45, 55 Holder 16a, 16b, 26a, 26b, 36a, 36b Flange portion 18a, 18b, 28a, 28b, 38a, 38b, 48a, 48b Contact surface (first contact surface)
19, 29a, 29b, 39a, 39b Contact surface (second contact surface)
17, 27, 37 Plane 17a, 17b, 27a, 27b, 37a, 37b Seat surface (third contact surface)
22, 32 Contact surface (4th contact surface)

Claims (5)

In an optical component incorporated in an optical device,
It is composed of a plurality of microlenses, each including two fly-eye lenses having a first surface on which a convex surface is formed two-dimensionally and a second surface on which a flat surface is formed,
When the second surfaces of the two fly-eye lenses are arranged to face each other, a contact surface for maintaining a constant distance between the two fly-eye lenses is formed on the holder, respectively. The two fly-eye lenses have the same shape so that the contact surfaces formed on the holders do not face each other, and are molded integrally with holders that hold the fly-eye lenses, The optical component, wherein the contact surface is formed at the same position of each holder on the second surface side .   The optical component according to claim 1, wherein a first contact surface that serves as a reference for positioning in the optical axis direction when assembled in the optical device is formed on the holder.   The holder has a flange portion, and a second contact surface that serves as a positioning reference in a direction orthogonal to the optical axis direction when incorporated in the optical device is formed on the flange portion of the holder. The optical component according to claim 1 or 2. The holder has a flange portion, and a third contact surface that serves as a positioning reference in the direction orthogonal to the optical axis direction and the direction orthogonal to the optical axis direction is formed in the flange portion when incorporated in the optical device. The optical component according to claim 1 , wherein the optical component is provided. The optical component according to claim 4, wherein a second contact surface that serves as a positioning reference in a direction orthogonal to the optical axis direction when incorporated in the optical device is formed on the flange portion of the holder.

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