JP4386988B2 - Polishing device - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a polishing apparatus used for polishing a workpiece, for example, a glass member.
[0002]
[Prior art]
As shown in FIG. 7, the polishing machine 1 in the polishing apparatus is roughly composed of a turntable 2 that rotates around a z-axis (vertical axis) and a polisher 3 that is formed on the upper surface of the turntable 2 by a pitch. The workpiece is slidably brought into contact with the surface 3a of the polisher 3 to be polished.
[0003]
A disk-shaped correction tool 4 is generally provided on the polishing machine 1, and this correction tool 4 causes the pitch surface layer to plastically flow due to local damage of the surface shape of the polisher 3 due to friction with the workpiece. Then, the surface 3a is continuously repaired in-process (during the polishing process) and the curvature of the surface 3a is adjusted by the contact pressure with the polisher 3. In this curvature adjustment, the center distance C between the polishing machine 1 and the correction tool 4 is adjusted, the centroid A of the contact surface between the polisher 3 and the correction tool 4 is shifted from the center of gravity G of the correction tool 4, and This is performed by generating a rolling moment (curvature deflection moment) My ′ in the radial direction and causing the pressure pxy ′ exerted on the polisher 3 by the correction tool 4 to have a distribution as shown in the figure and applying a larger pressure to the outer peripheral side of the polisher 3. The curvature deflection moment My ′ can be obtained by multiplying the resultant force P obtained by integrating the pressure pxy ′ over the entire contact surface by the center-shift distance s.
[0004]
My '= P · s
P = ∬pxy'dxdy
As a polishing apparatus provided with such a polishing machine 1 and a correction tool 4, the followings are conventionally known.
[0005]
In the apparatus shown in FIG. 8, a plurality of guide rollers 6 provided on the slide plate 5 are in contact with the outer peripheral surface of the correction tool 4 so as to be able to roll and hold the correction tool 4 rotatably. The slide plate 5 is movable along the radial direction of the polishing machine 1, and the correction tool 4 is positioned with respect to the polishing machine 1 by adjusting the position of the slide plate 5. The correction tool 4 rotates (spins) around by the frictional force with the polisher 3, but a rotation error is likely to occur due to a shape error of the surface 3 a of the polisher 3.
[0006]
In the apparatus shown in FIG. 9, the rotational force by the electric motor 7 is given to one of the guide rollers 6 of the apparatus shown in FIG. 8, and it functions as a driving roller. Since the driving roller 8 applies a rotational force for rotating the correction tool 4 to the outer peripheral surface of the correction tool 4 and positively rotates the correction tool 4, even if there is a shape error on the surface 3 a of the polisher 3. Rotation error is unlikely to occur.
[0007]
In the apparatus shown in FIG. 10, boring is performed on the upper surface of the correction tool 4 of the apparatus shown in FIG. 9, and a metal insert 10 attached to the jack device 9 is embedded therein so that the correction tool 4 can be raised and lowered. Yes. That is, in the jack device 9, when the handle 11 is operated, the screw spindle 12 rotates and the Y-shaped member 13 moves up and down. Accordingly, the I-shaped member 15 to which the metal insert 10 is fixed and fixed to the Y-shaped member 13 with the fixing pin 14 is also moved up and down, so that the correction tool 4 integrated with the I-shaped member 15 is also moved up and down. Thereby, the correction tool 4 can be pulled upward during maintenance work or the like.
[0008]
In the apparatus shown in FIG. 11, the correction tool 4 can be raised and lowered in the same manner as the apparatus shown in FIG. 10, but the air cylinder device 16 is used instead of the jack device 9 for raising and lowering, and the rod 17 is moved downward. By driving, the pressure exerted on the polisher 3 of the correction tool 4 can be increased.
[0009]
[Problems to be solved by the invention]
By the way, in each apparatus shown in FIGS. 8-11, the correction tool 4 is hold | maintained in the fixed position on the polishing board 1 when the guide roller 6 or the drive roller 8 contact | abuts directly on the outer peripheral surface of the correction tool 4. FIG. . Accordingly, as shown in FIG. 12, a shearing force F always acts on the spindle of the guide roller 6 due to the frictional force generated between the polisher 3 and the correction tool 4. When the guide roller 6 is cantilevered as shown, a bending moment M = F · L1 that increases according to the arm length L1 from the point of application of the shearing force F acts on the spindle.
[0010]
On the other hand, the spindle of the driving roller 8 is under an alternating load condition in which the shearing force F and the bending moment M = F · L2 are periodically changed by the rotation of the driving roller 8, as shown in FIG. In addition, a torsional moment T acts on the spindle of the drive roller 8 to give a rotational force to the correction tool 4, and when the rotating correction tool 4 slightly moves up and down, a load in the thrust direction also acts accordingly. .
[0011]
When the driving roller 8 directly applies the rotational force to the outer peripheral surface of the correction tool 4 in this way, the spindle is exposed to severe load conditions and has a high risk of fatigue failure. For example, the roller spindle breaks or becomes large. In the case of deformation, the correction tool 4 is released from the rotation state at a fixed position on the polishing machine 1 and falls from the polishing machine 1 by colliding with other parts of the apparatus and the workpiece. In such an accident, the surface structure of the polisher 3 is often damaged due to the involvement of the work piece, and if the correction tool 4 itself, which is a precision tool, is destroyed by dropping, the damage is serious.
[0012]
Further, when the correction tool 4 is lifted during maintenance work or the like, it is possible to lift the correction tool 4 by hand in a small polishing apparatus, but in a medium to large apparatus, the weight of the correction tool 4 is 30 kg to over 100 kg. As shown in FIGS. 10 and 11, a metal insert 10 is embedded on the upper surface of the correction tool 4, a chain, a wire, a bar or the like is fastened to an anchor material such as an eyebolt or a universal joint, and lifted with a winch, a screw, an air cylinder or the like. The method is taken. Since the center portion of the upper surface of the correction tool 4 is subjected to boring to embed the metal insert 10, the central portion of the correction tool 4 is thinner than other portions. For this reason, the pressure distribution applied to the polisher 3 by the correction tool 4 is slightly different from the case where the boring is not performed, and the pressure distribution intended by design cannot be obtained. Furthermore, since the metal insert 10 is sensitive to temperature disturbances, the curvature of the entire correction surface of the correction tool 4 in which the metal insert 10 is embedded is generally unstable.
[0013]
In the polishing apparatus, a correction tool 4 that has been processed by surface grinding or lapping in advance with a separate machine tool to satisfy flatness and surface roughness to the required specifications is incorporated on the polishing machine 1. Was configured. In such an apparatus, when the shape of the correction tool 4 is greatly damaged, or when the chamfer on the correction surface side of the correction tool 4 is lost due to wear, the correction tool 4 is removed from the polishing machine 1. It must be transported to a specialized factory, installed on the machine tool and reworked. Since the correction tool 4 is mostly made of a highly brittle material such as granite or glass, there is a problem that considerable labor and caution are required when transporting to another place such as a factory.
[0014]
Furthermore, in the conventional polishing apparatus, the pressure exerted on the polisher 3 by the correction tool 4 cannot be adjusted, or can be adjusted by using a plurality of air cylinders or double-acting air cylinders (see FIG. 11). ). As described above, the action of the correction tool 4 is to repair the local damage of the surface shape of the polisher 3 and to adjust the curvature of the surface 3a. For the latter, in addition to the pressure, the dimensional ratio between the outer diameter of the correction tool 4 and the width of the polisher 3 (ring width) dominates the performance. For this reason, it seems that the larger the pressure exerted by the correction tool 4 is, the better the pressure is. However, the increase in the pressure causes a shortening of the tool life due to an increase in the plastic deformation speed of the polisher 3. It requires an excessively redundant design for the equipment rigidity and power system to meet the increased frictional force. It is desirable that the correction tool 4 is as light as possible if effective, and the pressure adjustment mechanism using the air cylinder is advantageous in that an appropriate pressure can be obtained by the light correction tool 4.
[0015]
However, in such a pressure adjustment mechanism using an air cylinder, it is necessary to perform boring processing on the upper surface of the correction tool 4 in order to embed a universal joint or the like used for connection with the rod, and a pressure distribution intended in design can be obtained. There is a possibility that the above-mentioned adverse effects such as inability to occur.
[0016]
The present invention has been made in view of the above circumstances, and its first object is to provide a polishing apparatus that has a small load acting on the drive roller and has high durability and can suppress the occurrence of fatigue failure. It is to provide.
[0017]
A second object is to provide a polishing apparatus capable of lifting a correction tool from the polishing board without boring.
[0018]
A third object is to provide a polishing apparatus capable of easily processing and inspecting a correction tool near a polishing board.
[0019]
A fourth object is to provide a polishing apparatus capable of adjusting the pressure exerted on the polishing machine without boring the correction tool.
[0020]
[Means for Solving the Problems]
In order to solve the above problems, the invention of claim 1 is directed to a polishing machine for polishing a workpiece, a disk-shaped correction tool for correcting the surface shape of the polishing machine, and a rotational force on the outer peripheral surface of the correction tool. In a polishing apparatus having a driving roller for giving and rotating the correction tool, a holding portion for holding the correction tool is formed on an inner peripheral surface, and a ring member is provided in contact with the driving roller on the outer peripheral surface, and the ring member A ring member holding means is provided for holding the rotation of the ring member in a fixed position. The drive roller transmits its rotation to the outer peripheral surface of the ring member to rotate the ring member, and the correction is performed via the ring member. It is characterized by rotating the tool.
[0021]
According to the first aspect of the present invention, the driving roller rotates the correction tool via the ring member, and the ring member is held in a fixed position by the ring member holding means. Is distributed to the ring member holding means through the ring member. Further, since the contact pressure of the ring member with respect to the drive roller is also kept constant, only a small preload necessary for transmitting the rotational force is constantly applied to the drive roller.
[0022]
In other words, the drive roller is released from the severe situation where the direction of the load fluctuates periodically due to the combined action of torsion and bending moment, which improves the durability of the device and prevents fatigue failure, A favorable effect is also achieved from the viewpoint of safety.
[0023]
According to a second aspect of the present invention, in the polishing apparatus according to the first aspect, the ring member holding means is a guide roller and is in contact with the outer peripheral surface of the ring member so as to be able to roll, and the vertical movement of the ring member is restricted. It engages with the outer peripheral surface of the ring member.
[0024]
According to the invention of claim 2, since the guide roller is in contact with the outer peripheral surface of the ring member and restricts the movement of the ring member in the lateral direction (radial direction), the radial load and moment load from the correction tool are absorbed by the guide roller. Thus, transmission to the drive roller is prevented. In addition, since the guide roller engages with the ring member and restricts its vertical movement, the thrust load from the correction tool is also absorbed by the guide roller and is prevented from being transmitted to the drive roller, reducing the load acting on the drive roller. It is done.
[0025]
According to a third aspect of the present invention, in the polishing apparatus according to the first aspect of the present invention, there is provided an elevating means for elevating and lowering the ring member, and the holding portion locks the correction tool when the ring member is raised and lowered. It is characterized by raising and lowering.
[0026]
According to the invention of claim 3, since the raising / lowering of the correction tool is performed by the holding portion for locking the correction tool, the correction tool is lifted from the polishing board without performing boring or embedding a metal insert. be able to. Thus, the pressure distribution exerted by the correction tool on the polishing machine and the curvature of the correction surface of the correction tool can be designed, and the surface shape of the polishing machine can be kept stable.
[0035]
DETAILED DESCRIPTION OF THE INVENTION
Embodiments of the present invention will be described with reference to the drawings.
[0036]
[Example 1]
FIG. 1 shows the overall configuration of a polishing apparatus according to the present invention. The polishing apparatus 20 includes a rotating device 21, a ring polisher plate 22 as a polishing plate, a dam 23, a truing device 24, and an auxiliary device 25.
[0037]
The ring polisher 22 is rotated by the rotating device 21 along the axis O. ₁ It rotates around and polishes the glass member that is the workpiece. The dam 23 holds the polishing liquid supplied to the ring polisher 22 during polishing. The truing device 24 is used for truing the ring polisher 22 and includes a correction tool holding unit 27 that holds the correction tool 26. The correction tool holding unit 27 will be described in detail later.
[0038]
The housing 28 of the truing device 24 has a gate shape when viewed from the front. A fixing plate 30 is provided on the ceiling portion 29 of the housing 28, and a jack device 31 is fixed to the fixing plate 30. Four guide bars 33a and 33b extending in the vertical direction are provided on the inner surface sides of the side wall portions 32a and 32b of the housing 28, respectively. In the space opposite to the side walls 32a, 32b, an elevating part 34 that can be moved up and down along the guide rods 33a, 33b by the jack device 31 is provided so as to face a part of the ring polisher board 22 from above.
[0039]
A screw leg 35 for level adjustment is provided at the bottom of the housing 28. The posture of the casing 28 and the height with respect to the ring polisher 22 are appropriately adjusted by the screw legs 35.
[0040]
The elevating part 34 includes a pair of guide track members 36a and 36b extending substantially horizontally and linearly, and a connection plate 37 connecting the guide track members 36a and 36b. A guide rod 33a is inserted through the guide track member 36a, a guide rod 33b is inserted through the guide track member 36b, and a screw portion 39 of the jack device 31 is connected to the center of the connection plate 37 via a flange 38. Yes. In the jack device 31, when there is an input by rotating the handle 40, the rotation is decelerated by a worm mechanism (not shown), whereby a large thrust is applied to the screw portion 39, and the screw portion 39 is applied to the housing 28. Go up and down. The elevating part 34 moves up and down as the screw part 39 moves up and down, and is self-locked at a predetermined position in the vertical direction.
[0041]
The auxiliary device 25 temporarily holds the correction tool holding portion 27 and serves to rework the correction surface of the correction tool 26. In FIG. 1, for the sake of convenience, in addition to the case where the correction tool holding portion 27 is in the normal position on the truing device 24 side, a state in which the correction tool holding portion 27 is carried by the auxiliary device 25 is also shown. It may be on either side of the truing device 24 or the auxiliary device 25. Moreover, although the auxiliary | assistant apparatus 25 is shown spaced apart from the truing apparatus 24 in the same figure, both may be connected.
[0042]
The auxiliary device 25 includes a reversing unit 41 that carries the correction tool holding unit 27 and vertically flips it, and a gantry 42 that supports the reversing unit 41. A caster 43 is provided at the bottom of the gantry 42 so that the auxiliary device 25 can be easily moved from the truing device 24 side to another place when not needed. At the bottom of the gantry 42, screw legs 44 for level adjustment are further provided. The screw legs 44 are used for lifting the casters 43 from the floor surface when the auxiliary device 25 is in use so that the gantry 42 cannot be moved, and adjusting the height of the gantry 42 according to the truing device 24.
[0043]
The reversing portion 41 is formed in a box shape by the side plates 45 a and 45 b and the connecting plates 46 and 47 that connect them, and is pivotally supported by the mount 42. The reversing unit 41 includes a handle 48, a worm reduction device 49 that decelerates and outputs a rotational input from the handle 48, and an axis O based on the output of the worm reduction device 49. ₂ A rotation mechanism comprising a small-diameter gear that rotates around and a large-diameter gear that meshes with the small-diameter gear and is directly connected to the side plate 45a provides an axis O _Three Rotate around and flip. Since the small diameter gear and the large diameter gear are covered with the safety cover 50, the illustration is omitted.
[0044]
A circular opening 52 having a diameter larger than the diameter of a disk-shaped tool 51 described later is formed in the connecting plate 46 at the center. A plurality of guide rollers 53 for guiding the disk-shaped tool 51 are attached along the circumferential direction of the circular opening 52 inside the box shape of the connecting plate 46.
[0045]
Inside the box-shaped inner side of the side plates 45a and 45b, when the auxiliary device 25 is connected to the truing device 24, it is connected to the guide track members 36a and 36b of the elevating part 34 to form a pair of guide tracks 54a and 54b. Track members 55a and 55b are provided. The correction tool holding unit 27 is held by the guide tracks 54 a and 54 b and can move between the truing device 24 and the auxiliary device 25.
[0046]
As shown in FIG. 2, the correction tool holding unit 27 includes a base 56, a total of six guide rollers 57 provided on both sides of the base 56 so as to be paired on the left and right sides, and a ring having the same shape as the guide roller 57. It has a guide roller 58 as a member holding means, a drive ring 59 as a ring member, and a friction drive roller 60 as a drive roller.
[0047]
The guide roller 57 has a vertically symmetrical shape and has two conical surfaces 61. The conical surfaces 61 are in contact with inclined surfaces 62 (see FIG. 1) formed on the guide tracks 54a and 54b. That is, when the inclined surface 62 comes into contact with the conical surface 61 from above and below, the guide roller 57 is held on the guide track 54a or 54b, whereby the correction tool holding portion 27 is held on the guide tracks 54a and 54b. Moreover, the correction tool holding | maintenance part 27 can move along the guide track | routes 54a and 54b because the guide roller 57 rolls with respect to the guide track | trucks 54a and 54b.
[0048]
A circular opening 63 is formed at the center of the base 56, and a total of four guide rollers 58 are provided every 90 ° along the circumferential direction of the opening 63. Similar to the guide roller 57, the guide roller 58 also has a conical surface 64 at the top and bottom.
[0049]
The drive ring 59 is provided in the opening 63 of the base 56, and inclined surfaces 65 are formed above and below the outer peripheral surface of the drive ring 59. The guide roller 58 abuts on the inclined surface 65 with the conical surface 64, thereby engaging the outer peripheral surface of the guide ring 59 so as to restrict the vertical movement of the drive ring 59 and holding the drive ring 59 in a fixed position on the base 56. . However, since the guide roller 58 can roll with respect to the drive ring 59, the drive ring 59 can rotate in its fixed position.
[0050]
On the inner peripheral surface of the drive ring 59, a plurality (18 in this case) of drive rods 66 as holding portions are provided at equal intervals along the circumferential direction. The drive rod 66 extends in the vertical direction, and a projection 67 that protrudes toward the center of the drive ring 59 is formed at the lower end thereof. The correction tool 26 is held by the protrusion 67.
[0051]
The friction drive roller 60 is rotated by the electric motor 68, the rotation of the friction drive roller 60 is transmitted to the outer peripheral surface of the drive ring 59, the drive ring 59 is rotated, and the correction tool 26 is rotated through the rotation. The electric motor 68 is fixed to an electric motor fixing plate 69 whose position can be adjusted with respect to the base 56, and the rotational force of the electric motor 68 is transmitted to the friction driving roller 60 through the driving pulley 70, the timing belt 71, and the driven pulley 72. . In this embodiment, the tension of the timing belt 71 is adjusted by adjusting the position of the motor fixing plate 69 with respect to the base 56. In FIG. 2, reference numeral 73 denotes a reinforcing rib for the base 56, 74 denotes a safety cover, and 110 denotes a bracket for fixing to a feed screw 111 provided in each of the truing device 24 and the auxiliary device 25.
[0052]
3 and 4 show the detailed structure of the drive ring 59 and the friction drive roller 60. FIG. The drive ring 59 is formed by fixing a drive rod 66 to a ring body 75 with screws 76. The lower portion of the drive rod 66 protrudes below the base 56 through the opening 63. A rubber member 78 is attached to the lower end portion of the drive rod 66 with a screw 79 through an adjustment washer 77, whereby a projection 67 is formed. On the other hand, the correction tool 26 includes a disk-shaped tool main body portion 81 having a correction surface 80 and a flange portion 82 formed with a diameter larger than that of the tool main body portion 81, and the outer peripheral surface of the main body portion 81 and the drive rod 66. Is adjusted by the adjustment washer 77 to be 1 to 2 mm.
[0053]
In the friction drive roller 60, a rotating portion 85 is attached to a fixed shaft 83 fixed on the base 56 via a ball bearing 84, and a driven pulley 72 is fastened to the rotating portion 85 via a rotating shaft portion 86. It is constituted by. Specifically, the fixed shaft 83 is attached to a mounting flange 88 by a screw 87, and the mounting flange 88 is fixed on the base 56 by a screw 89. The ball bearings 84 are respectively provided above and below the outer periphery of the fixed shaft 83, and space collars 90 and 91 are interposed between the two ball bearings 84. The rotating portion 85 is provided on the outer periphery of the ball bearing 84 and the space collar 91, and a plurality of grooves 92 having a V-shaped cross section are formed on the outer peripheral surface of the rotating portion 85 over the entire periphery. An O-ring 93 is attached to each groove 92, and the O-ring 93 rotates by friction in contact with a portion of the outer peripheral surface of the drive ring 59 that is not the inclined surface 65, that is, a cylindrical surface portion of the outer peripheral surface of the ring body 75. Transmit power. The rotating shaft portion 86 is fixed to the upper portion of the rotating portion 85 with screws 95 so that the shaft 94 is coaxial with the fixed shaft 83. The driven pulley 72 is fitted so that the shaft 94 of the rotating shaft portion 86 is coaxial, and the driven pulley 72 and the rotating shaft portion 86 are fastened by a parallel key 96 and a fixing screw 97.
[0054]
In the correction tool holding portion 27, the rubber member 78 of the protrusion 67 is rotated around the outer periphery of the tool main body 81 so that the correction tool 26 rotates as the drive ring 59 is rotated by the friction drive roller 60 during polishing. Elastically contact the surface to give a rotational force (Fig. 4). Further, at the time of polishing, the distance h between the protrusion 67 and the flange 82 is 3 mm or more. On the other hand, when the lifting / lowering portion 34 is raised by the jack device 31 and the correction tool holding portion 27 is raised accordingly, the protrusion 67 is locked to the flange portion 82 and the correction tool 26 is lifted (FIG. 3). .
[0055]
When the correction tool holding part 27 on the ring polisher 22 is transferred to the auxiliary device 25 and the correction surface 80 of the correction tool 26 is processed, the guide 34 is raised after the elevating part 34 is raised to a predetermined height. The track members 36a, 36b and the guide track members 55a, 55b of the reversing part 41 are aligned to form a pair of guide tracks 54a, 54b, and the correction tool holding unit 27 is placed along the guide tracks 54a, 54b with the auxiliary device. Move to 25 side.
[0056]
Specifically, first, the auxiliary device 25 is positioned with respect to the truing device 24 by the caster 43, and the level adjustment is performed by the screw leg 44. Next, while raising / lowering part 34 is raised to predetermined height with the jack apparatus 31, angle adjustment of the inversion part 41 is performed with a rotation mechanism in order to adjust the acceptance posture of the correction tool holding | maintenance part 27. FIG. At this time, the reversing part 41 is vertically oriented so that the connecting plate 46 in which the circular opening 52 is formed is downward and the connecting plate 47 is upward.
[0057]
After the guide tracks 54a and 54b are thus formed, the correction tool holding portion 27 is moved along the auxiliary track 25 along the guide tracks 54a and 54b. At this time, the bracket 110 of the base 56 is moved to the feed screw on the truing device 24 side. 111 is removed from the nut 111, the correction tool holding part 27 is slid to an arbitrary position of the auxiliary device 25, and the bracket 110 is connected to the nut of the feed screw 111 on the auxiliary device 25 side.
[0058]
Further, in the auxiliary device 25, the correction tool holding portion 27 is turned upside down by the reversing portion 41. In order to prevent the correction tool 26 from dropping at the time of the turning, the drive rod 66 has a rubber plate 98 as shown in FIG. A support piece 99 to which is attached is screwed in advance. The support pieces 99 do not have to be provided for all the drive rods 66, but by providing them on the plurality of drive rods 66, the correction tool 26 at the time of reversal is supported from below so that the fall is prevented.
[0059]
The reworking of the correction surface 80 of the correction tool 26 is performed by placing the disk-shaped tool 51 for lapping and polishing on the correction surface 80 through the circular opening 52 with the correction tool holding unit 27 reversed by the reversing unit 41. The correction tool 26 is rotated by the electric motor 68. When the correction tool 26 rotates, the disk-shaped tool 51 is held at a fixed position by the guide roller 53, so that it rotates around the correction surface 80 to process it. Since the relative positional relationship between the correction tool 26 and the disk-shaped tool 51 can be freely defined by the feed screw 111 described above, the centroid between the centroid of the contact surface and the center of gravity of the disk-shaped tool 51 is shifted. Can be adjusted, and the movement trajectory of the disk-shaped tool 51 can be changed. The polishing liquid used at the time of processing is held in an annular container 100 (see FIG. 1) that is easy to attach and detach and has a simple configuration so that it does not spill from the correction tool 26.
[0060]
In the polishing apparatus 20 according to this embodiment, the friction drive roller 60 rotates the correction tool 26 via the drive ring 59, but the guide roller 58 is in contact with the outer peripheral surface of the drive ring 59 in the lateral direction (radial). (Direction) is restricted, so that the radial load and moment load from the correction tool 26 are absorbed by the guide roller 58. For this reason, the friction drive roller 60 only needs to apply a rotational force to the drive ring 59 and does not need to play a role of holding the drive ring 59. Therefore, the friction drive roller 60 has only a preload necessary for transmitting the rotational force. Acts constantly in the radial direction. Furthermore, since the shearing force based on this preload is divided into the upper and lower parts by the two ball bearings 84 and transmitted to the fixed shaft 83, the bending moment acting on the fixed shaft 83 and the mounting flange 88 is suppressed minutely.
[0061]
The guide roller 58 is engaged with the inclined surface 65 of the drive ring 59 by the conical surface 64 to restrict the vertical movement of the drive ring 59, and the friction drive roller 60 is configured not to contact the inclined surface 65. Therefore, all the thrust load from the correction tool 26 is absorbed by the guide roller 58 and transmission to the friction drive roller 60 is prevented.
[0062]
Since the load acting on the friction drive roller 60 is minimized as described above, the durability of the polishing apparatus 20 is improved and the occurrence of fatigue failure is also effectively suppressed.
[0063]
Ascending / descending of the correction tool 26 is performed with the protruding portion 67 of the drive rod 66 engaged with the flange portion 82, so that it is not necessary to perform boring or embedding a metal insert in the correction tool 26. For this reason, the pressure distribution exerted on the ring polisher board 22 by the correction tool 26 and the curvature of the correction surface 80 of the correction tool 26 can be designed, and the surface shape of the ring polisher board 22 can be kept stable. be able to.
[0064]
The correction tool holding portion 27 can be easily transferred to the auxiliary device 25 by the guide tracks 54a and 54b and the guide roller 57. In the auxiliary device 25, the reversing portion 41 easily flips it upside down and reworks it. Therefore, reworking of the correction tool can be performed remarkably efficiently as compared with the conventional case where the correction tool is transferred to a factory or the like. At this time, the correction tool 26, the friction drive roller 60, and the like are integrally transferred as the correction tool holding portion 27, so that the correction tool 26 can be rotated without providing a separate drive device on the auxiliary device 25 side. The ease of movement and reversal of the correction tool 26 in this way is very advantageous not only for reworking the correction surface 80 but also for inspection, measurement, and the like.
[0065]
[Example 2]
The polishing apparatus according to the present embodiment is configured by providing a thin cylinder 101 on the upper surface of the correction tool 26 of the polishing apparatus 20 according to the first embodiment (see the frame in FIG. 1). Since there is, explanation is omitted.
[0066]
As shown in FIG. 6, on the upper surface of the correction tool 26, a thin cylinder 101 is bonded with silicon rubber 102 so as to be watertight, thereby forming a liquid tank 103 having the upper surface as a bottom surface. The liquid tank 103 is provided with a liquid level holding device 104 as a liquid level holding means.
[0067]
The liquid level holding device 104 is connected to a liquid introduction pipe 105 that introduces a liquid fed under pressure by a pump (not shown), a discharge pipe 106 that discharges the liquid from the liquid introduction pipe 105 into the liquid tank 103, and a liquid tank. And a float switch 108 that controls the operation of the built-in electromagnetic valve in response to the liquid level of the liquid 107 in the liquid crystal 103.
[0068]
In the polishing apparatus according to this embodiment, the correction tool 26 whose upper surface is pressurized by the weight of the liquid 107 placed in the liquid tank 103 pressurizes the ring polisher 22 with a strength corresponding to the amount of the liquid 107. Therefore, the pressure exerted on the ring polisher 22 can be adjusted without boring the correction tool 26.
[0069]
Even if the upper surface shape of the correction tool 26 is irregular, the pressure p acting on the upper surface by the liquid 107 is uniform according to the Pascal principle, and therefore the upper surface shape of the correction tool 26 affects the ring polisher 22. Without affecting the pressure, the ring polisher 22 can be pressed evenly.
[0070]
Further, when the amount of the liquid 107 is reduced and the liquid level is lowered, the liquid level holding device 104 releases the electromagnetic valve, and the liquid is discharged from the discharge pipe 106 until the float switch 108 detects the liquid level. Thereby, the liquid level height of the liquid 107 is maintained at a preset constant value, and the pressing force of the liquid 107 on the upper surface of the correction tool 26 and the pressing force of the correction tool 26 on the ring polisher 22 can be stabilized. .
[0071]
As shown in the figure, the liquid level holding device 104 may be provided with a suction pipe 109 for sucking in the liquid 107, so that the liquid level of the liquid 107 is kept constant while circulating the temperature-controlled liquid. Can be held.
[0072]
【The invention's effect】
As described above, according to the invention of claim 1, the driving roller rotates the correction tool via the ring member, but the ring member is held in place by the ring member holding means, so that the rotation correction is performed. The force exerted by the tool on the periphery is distributed to the ring member holding means through the ring member. Further, since the contact pressure of the ring member with respect to the drive roller is also kept constant, only a small preload necessary for transmitting the rotational force is constantly applied to the drive roller.
[0073]
In other words, the drive roller is released from the severe situation where the direction of the load fluctuates periodically due to the combined action of torsion and bending moment, which improves the durability of the device and prevents fatigue failure, A favorable effect is also achieved from the viewpoint of safety.
[0074]
According to the invention of claim 2, since the guide roller is in contact with the outer peripheral surface of the ring member and restricts the movement of the ring member in the lateral direction (radial direction), the radial load and moment load from the correction tool are absorbed by the guide roller. Thus, transmission to the drive roller is prevented. In addition, since the guide roller engages with the ring member and restricts its vertical movement, the thrust load from the correction tool is also absorbed by the guide roller and is prevented from being transmitted to the drive roller, reducing the load acting on the drive roller. It is done.
[0075]
According to the invention of claim 3, since the raising / lowering of the correction tool is performed by the holding portion for locking the correction tool, the correction tool is lifted from the polishing board without performing boring or embedding a metal insert. be able to. As a result, the pressure distribution exerted on the polishing machine by the correction tool and the curvature of the correction surface of the correction tool can be designed, and the surface shape of the polishing machine can be kept stable.
[Brief description of the drawings]
FIG. 1 is an explanatory view showing a polishing apparatus according to the present invention.
2 shows a correction tool holding portion of the polishing apparatus of FIG. 1, wherein (a) is a plan view, (b) is a rear view, and (c) is a side view. FIG.
FIG. 3 is an explanatory diagram showing an enlarged view of a drive ring and a friction drive roller of the correction tool holding unit in FIG. 2, and a state in which the drive ring engages the correction tool.
4 is an enlarged view showing a drive ring and a friction drive roller of the correction tool holding unit in FIG. 2, and is an explanatory view showing a state in which the correction tool is on the ring polisher board.
FIG. 5 is an explanatory diagram showing a state in which the correction tool holding unit is turned upside down in the auxiliary device.
FIG. 6 is an explanatory view showing a state in which a liquid tank is provided on the upper surface of the correction tool.
FIG. 7 is an explanatory diagram showing the operation of the correction tool on the polishing board.
FIG. 8 is an explanatory view showing a conventional polishing apparatus that holds a correction tool with a guide roller.
FIG. 9 is an explanatory view showing a conventional polishing apparatus that holds a correction tool with a driving roller and a guide roller.
FIG. 10 is an explanatory view showing a conventional polishing apparatus in which a correction tool is held by a driving roller and a guide roller, and the correction tool can be moved up and down by a jack device.
FIG. 11 is an explanatory view showing a conventional polishing apparatus in which a correction tool is held by a driving roller and a guide roller, and the correction tool can be moved up and down by an air cylinder device.
12 is an explanatory view showing a load acting on a guide roller in the polishing apparatus of FIGS. 8 to 11. FIG.
13 is an explanatory view showing a load acting on a driving roller in the polishing apparatus of FIGS. 9 to 11. FIG.
[Explanation of symbols]
20 Polishing equipment
22 Ring Polisher Board (Polishing Machine)
26 Correction tool
59 Drive ring (ring member)
60 Friction drive roller (drive roller)
66 Drive rod (holding part)
58 Guide roller (ring member holding means)

Claims (3)

Polishing comprising a polishing machine for polishing a workpiece, a disk-shaped correction tool for correcting the surface shape of the polishing machine, and a drive roller for rotating the correction tool by applying a rotational force to the outer peripheral surface of the correction tool In the apparatus, a ring member holding means for holding a holding member for holding the correction tool on an inner peripheral surface and provided with a ring member that is in contact with the driving roller on the outer peripheral surface and rotatably holding the ring member in a fixed position The polishing apparatus is characterized in that the driving roller transmits its rotation to the outer peripheral surface of the ring member, rotates the ring member, and rotates the correction tool via the ring member. The ring member holding means is a guide roller and is in contact with the outer peripheral surface of the ring member so as to be able to roll, and is engaged with the outer peripheral surface of the ring member so as to restrict the vertical movement of the ring member. The polishing apparatus according to claim 1. 2. The polishing apparatus according to claim 1, further comprising elevating means for elevating and lowering the ring member, wherein the holding portion engages the correction tool and elevates the correction tool when the ring member is raised and lowered .

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