JP4369321B2 - Diagnosis method of fluid rotating machine - Google Patents

Description

The present invention relates to a method for diagnosing a fluid rotating machine by comparing the state at normal time and the time of inspection.

Conventionally, in the state diagnosis of gears, bearings, rotors, etc., which are mechanical elements of fluid rotary machines such as vacuum pumps, blowers, or compressors, one or more of acoustic, visual and tactile senses are used. (Including the five senses and those measured electrically), a method based on signs, a method based on electrical signs due to changes in one or more of voltage and current, etc., and foreign matter such as metal scraps in lubricating oil A method based on the analysis is known. There is also known a diagnosis method using a univariate parameter obtained from a vibration signal of vibration detected by an acceleration sensor or the like attached to a casing of a fluid rotary machine (for example, see Non-Patent Document 1).

Liu Nobuyoshi and four others, “Abnormal Diagnosis of Rotating Machines Based on Symmetric Cullback Information”, Journal of the Japan Institute of Equipment Management, 1998, Vol. 10, No. 3, p. 22-27

However, when the state of the fluid rotating machine is analyzed by a mechanical sign method, an electrical sign method, a lubricating oil analysis method, or the like, the measured value varies greatly depending on the usage status of the fluid rotating machine, etc. Therefore, it is difficult to determine the state of the fluid rotating machine, and it is difficult to detect an abnormality early. Moreover, even if it is the same fluid rotary machine, the determination criteria differed when the measurement point or the person to measure differed. In addition, different fluid rotating machines had to set criteria for each. Further, in the method described in Non-Patent Document 1, the diagnosis accuracy is low because diagnosis is performed by univariate.

The present invention has been made in view of such circumstances, and an object of the present invention is to provide a highly accurate diagnosis method for a fluid rotary machine capable of setting a uniform determination criterion.

The fluid rotary machine diagnosis method according to claim 1, which meets the above object, includes a first state signal including a plurality of state signals indicating a state of the fluid rotary machine when the fluid rotary machine having a machine element in a rotating part in advance is normal. A second state signal consisting of a plurality of state signals indicating the state of the fluid rotating machine when the fluid rotating machine is inspected after each group is measured at predetermined time intervals to obtain a dimensional first state data group A first step of measuring each group at predetermined time intervals to obtain a dimensional second state data group;
A time-series first matrix obtained by converting the first state data group to a dimensionless first parameter group, and a time series first matrix converted to a dimensionless second parameter group, respectively. A second step of creating a second matrix of series respectively;
A third step of calculating the first and second matrices as one multivariate Kullback-Liber information amount;
And a fourth step of determining the state of the fluid rotary machine based on the multivariate Kalbach librarian information amount,
An abnormality of the rotating machine is detected by comparing a normal state signal of the fluid rotating machine with a state signal at the time of inspection.

The fluid rotary machine diagnosis method according to claim 1, wherein the rotary part of the fluid rotary machine such as a vacuum pump, a blower, or a compressor includes one or more of a gear, a bearing, a rotor, and the like. Further, liquid or gas can be used as the fluid. The state signal of the fluid rotating machine includes one or more signals such as vibration displacement, speed and acceleration of the fluid rotating machine, that is, a vibration signal, a current of a motor or the like that rotates the rotating part of the fluid rotating machine. And a signal that detects one or both of the voltages, i.e., an electrical signal, a signal that detects the temperature of the gas discharged from the fluid rotating machine, i.e., a temperature signal, a signal that detects the pressure of the space sucked by the fluid rotating machine, i.e. , A pressure signal, a signal that detects one or both of the flow rate and temperature of cooling water that cools the fluid rotating machine, a signal that detects one or both of the flow rate and temperature of the gas supplied to the fluid rotating machine, etc. A state signal group consisting of a plurality of state signals is measured at a predetermined time interval, for example, at intervals of 20 μsec to 0.1 sec, that is, at a sampling frequency of 10 Hz to 50 kHz. That.

The first and second state signal groups measured at the time of normal operation and inspection of the fluid rotary machine are converted into digital state data from the respective analog state signals. A group is obtained. Also, the first and second state data groups are converted into first and second dimensionless parameter groups, respectively. Here, for example, in the case of dimensional state data of the temperature signal, it can be converted into a temperature change rate (non-dimensional) at predetermined time intervals. Furthermore, first and second time series matrices are created from the first and second dimensionless parameter groups, respectively.

Here, the multivariate Kullback-Leibler Infomation (hereinafter also referred to as MKI) is a statistical theory used in economic statistics and the like, and is represented by the equation (1). Here, f _R represents the distribution of the multi-state data at normal time (Reference, R), f _T represents the distribution of the multi-state data at the time of inspection (Test, T), and each of x ₁ to x _k is dimensional. A plurality (k) of parameters converted from vibration data are shown.

mu _R and mu _T is the mean value vector of the k variables of the respective x ₁ ~x _k, S _R and S _T each of x ₁ ~x _k and, mu _R or co of k variables obtained from mu _T A dispersion matrix. μ _R , μ _T , S _R and S _T will be described in detail later. The multivariate Cullback / librar information amount indicates the difference between the distribution of the multi-state data at the normal time and the distribution of the multi-state data at the time of inspection, and the abnormality of the fluid rotating machine can be detected by this value.

The time series first and second matrices X _{I obtained} by converting the normal state data and the inspection state data into a plurality of dimensionless parameters (x _{1 to} x _k ) are shown in Equation (2), and x _{1 to} x each of the average value of _k the mean matrix mu _I consisting (μ ₁ ~μ _k) shown in equation (3). I is R or T (the same applies hereinafter).

Here, from the equations (2) and (3), the covariance matrices S _I at the normal time and the inspection time shown in the equation (4) are obtained, respectively, and μ _R , S _R , μ _T , S _T are _calculated as (1 Substituting into the formula, the multivariate Cullback / librar information amount MKI is calculated. By comparing the calculated MKI value with a predetermined criterion, it is possible to determine the state of the fluid rotating machine, that is, whether it is normal or abnormal.

The fluid rotary machine diagnosis method according to claim 2 is the fluid rotary machine diagnosis method according to claim 1, wherein the first and second state signal groups are a vibration signal, an electric signal, and a temperature of the fluid rotary machine, respectively. Any two or more of the signal and the pressure signal are included.
3. The fluid rotating machine diagnosis method according to claim 2, wherein the vibration signal, the electric signal, the temperature signal, and the pressure signal are each converted into a non-dimensional parameter by, for example, being converted into a rate of change per predetermined time. in the formula, expressed as x ₁ ~x _k.

The fluid rotating machine diagnosis method according to claim 3, wherein the vibration signal includes a degree of distortion, a kurtosis, a crest factor, a minimum value rate, a maximum value rate, and a maximum value. It is converted into a dimensionless parameter of any two or more of rate, stability index, frequency crest factor, equivalent band, and frequency height ratio.
4. The fluid rotating machine diagnostic method according to claim 3, wherein the degree of distortion, the degree of kurtosis, the crest factor, the minimum value rate, the maximum value rate, and the maximum value rate are general statistical analysis formulas, respectively (5) It is shown by Formula-(10) Formula. Further, the stability index, the frequency crest factor, the equivalent band, and the frequency height ratio are mathematical formulas for quantifying the waveform information, and are respectively represented by formulas (11) to (14). These are expressed as x _{1 to} x _k in the equation (1).

Note that the stability index, frequency crest factor, equivalent band, and frequency height ratio represented by the equations (11) to (14) were obtained by performing a fast Fourier transform on the time series waveform of the vibration signal. This is a parameter for quantifying the shape of the power spectrum P (fi).

5. The fluid rotary machine diagnosis method according to claim 4, wherein the vibration signal is measured by an acceleration sensor installed in a casing of the fluid rotary machine. This is the acceleration of vibration of the rotating machine.
5. The fluid rotating machine diagnosis method according to claim 4, wherein the acceleration sensor is an electrical converter that generates an electrical output when subjected to mechanical shock or vibration, and has a relatively large signal as a detection target and a frequency lower than the resonance frequency. It is a device that utilizes the effect of causing a change in force at the point, that is, a change in charge proportional to the acceleration.

As the acceleration sensor, for example, a piezoelectric acceleration sensor is known, and the piezoelectric acceleration sensor is classified into a charge output type and a built-in amplifier type. The amplifier built-in type is further divided into a constant current drive type and a voltage drive type. Since the drive is small and easy to drive, the constant current drive type is preferably used.

The fluid rotary machine diagnosis method according to claim 5 is the fluid rotary machine diagnosis method according to claims 1 to 4, wherein each of the state signals of the first and second state signal groups is 1 of the fluid rotary machine. Measured at one location or two or more locations.
6. The fluid rotary machine diagnosis method according to claim 5, wherein in the fluid rotary machine, for example, a motor or the like, when the axis of the rotary shaft is arranged in the horizontal direction, Vibration signals in the horizontal direction and in the same direction as the axis of the rotating shaft can be measured.

The fluid rotary machine diagnosis method according to claim 6 is the fluid rotary machine diagnosis method according to claims 1 to 5, wherein the state determination of the fluid rotary machine in the fourth step is performed by a statistical generalized asymptotic theory.
In the diagnostic method of the fluid rotating machine according to claim 6, the statistical generalized asymptotic theory is expressed by equation (15). Here, for the null hypothesis H ₀ and the alternative hypothesis H ₁ expressed by the equations (15), (16) and (17), the multivariate Kalbach librarian information is assumed if the significance level is α. The estimated value of the quantity is expressed by equation (18). Note that the criterion R _k (α) for the k-variable MKI follows a chi-square distribution (χ ² distribution).

Here, when the estimated amount of MKI is smaller than the determination criterion R _k (α) of the k-variable MKI, it is determined that the distribution of vibration data at the normal time and the inspection is the same, and the fluid rotary machine is normal. To do. Further, when the estimated amount of MKI is equal to or larger than the criterion R _k (α) of the k-variable MKI, the distribution of vibration data at the normal time and at the time of inspection is different, and it is determined that the fluid rotating machine is abnormal.

The fluid rotary machine diagnosis method according to claim 7 is the fluid rotary machine diagnosis method according to claim 6, wherein the state determination of the fluid rotary machine is performed in two stages.
In the diagnostic method of the fluid rotary machine of claim 7, wherein, the estimated amount of MKI sets a lower than R _k (beta) criterion R _k of k variables MKI (alpha), attention level R _k (beta), Let R _k (α) be the danger level.

Here, as shown in the equation (19), when the MKI is less than the attention level R _k (β), it can be determined that the fluid rotating machine is normal. Further, as shown in the equation (20), when the MKI is not less than the caution level R _k (β) and less than the danger level R _k (α), it can be determined that an abnormality of the fluid rotating machine is likely to occur, and the remaining life Predictions and precise diagnosis can be performed, and one or more maintenance plans can be made, such as preparation of spare machines and procurement of necessary parts. Further, as shown in the equation (21), when the MKI is equal to or higher than the danger level R _k (α), it can be determined that an abnormality has occurred in the fluid rotating machine, and the fluid rotating machine is replaced or maintained.

The fluid rotary machine diagnosis method according to claim 8 is the fluid rotary machine diagnosis method according to any one of claims 1 to 7, wherein the first and second state data groups are noise removal by filtering, time averaging, and Any one or two or more pre-processing of envelope processing is performed.
9. The fluid rotating machine diagnosis method according to claim 8, wherein the status signal includes noise from the outside and inside of the fluid rotating machine, so that any of noise removal, time averaging, envelope processing, etc. Or one or more pretreatments.

The fluid rotary machine diagnosis method according to claim 9 is the fluid rotary machine diagnosis method according to claim 1, wherein the second state signal group is processed online, and the state of the second state signal group is determined. The signals are analyzed sequentially to monitor the fluid rotary machine online.
In the fluid rotary machine diagnosis method according to the ninth aspect, a plurality of fluid rotary machines can be connected by a network such as the Internet or an intranet, and can be analyzed by a single processing device, for example, a personal computer. Since the state of the fluid rotating machine is determined based on the amount of information on the multivariate Kullback and library, it is not necessary to provide a criterion for each of the fluid rotating machines.

The fluid rotary machine diagnosis method according to any one of claims 1 to 9, wherein the fluid rotary machine has a dimensionality obtained from first and second state signal groups each consisting of state signals measured at predetermined time intervals during normal operation and inspection of the fluid rotary machine. Calculating as one multivariate Kullback-Riverer information amount from the first and second matrices formed from the first and second dimensionless parameter groups obtained by converting the first and second state data groups, respectively. Since the state of the fluid rotating machine is judged, highly accurate and reliable diagnosis is possible, and uniform judgment criteria can be set.

In particular, in the fluid rotary machine diagnosis method according to claim 2, the first and second state signal groups include any two or more of a vibration signal, an electrical signal, a temperature signal, and a pressure signal of the fluid rotary machine. Therefore, the state of the fluid rotary machine can be determined with higher accuracy by quantifying the plurality of state signals.
The diagnostic method of the fluid rotating machine according to claim 3, wherein the vibration signal includes a degree of distortion, a kurtosis, a crest factor, a minimum value rate, a maximum value rate, a maximum value rate, a stability index, a frequency crest factor, an equivalent band, and a frequency. Since it is converted into any two or more dimensionless parameters having a high / low ratio, the state of the rotary machine of the fluid rotary machine can be determined with higher accuracy.

The fluid rotary machine diagnosis method according to claim 4 can be easily measured because the vibration signal is an acceleration of vibration of the fluid rotary machine measured by an acceleration sensor installed in a casing of the fluid rotary machine.
In the fluid rotary machine diagnosis method according to claim 5, since the first and second state signal groups are measured at one place or two or more places of the fluid rotary machine, the detection accuracy of abnormality of the fluid rotary machine is improved. .
In the fluid rotary machine diagnosis method according to the sixth aspect, since the state determination of the fluid rotary machine in the fourth step is performed by a statistical generalized asymptotic theory, it can be accurately determined.

In the fluid rotating machine diagnosis method according to the seventh aspect, the state determination of the fluid rotating machine is performed in two stages, so that a maintenance plan for the fluid rotating machine can be made.
The fluid rotary machine diagnosis method according to claim 8, wherein the first and second state data groups are each subjected to preprocessing of one or more of noise removal by filtering, time averaging, and envelope processing. Therefore, the measurement accuracy can be further improved.
The fluid rotating machine diagnosis method according to claim 9, wherein the second state signal group is processed online, and the state signals of the second state signal group are sequentially analyzed to monitor the fluid rotating machine online. Early detection of abnormalities in fluid rotating machines is possible.

Next, embodiments of the present invention will be described with reference to the accompanying drawings for understanding of the present invention.
Here, FIG. 1 is an explanatory diagram of a diagnostic apparatus for a fluid rotary machine to which a fluid rotary machine diagnostic method according to an embodiment of the present invention is applied, and FIGS. 2 and 3 are respectively used in the diagnostic apparatus for the fluid rotary machine. FIG. 4 is a flow chart of a diagnostic method for the fluid rotary machine.

With reference to FIGS. 1 to 3, a fluid rotary machine diagnostic device (hereinafter also simply referred to as a diagnostic device) 10 to which a fluid rotary machine diagnostic method according to an embodiment of the present invention is applied will be described.
The fluid rotary machine diagnostic device 10 is a device that diagnoses a vacuum pump 11 that is an example of a fluid rotary machine having a mechanical element in a rotating portion.

The vacuum pump is used for, for example, sputtering, ion plating, vacuum drying, freeze drying, gas recovery, defoaming, impregnation, or distillation. In this embodiment, the vacuum pump 11 is placed in the reaction vessel 12. It is provided in a chemical vapor deposition apparatus 15 that performs chemical vapor deposition to form a thin film 14 on the substrate 13 disposed, and the inside of the reaction vessel 12 is depressurized to, for example, 1 to 100 Pa. The reaction vessel 12 of the chemical vapor deposition apparatus 15 is provided with a gas supply port 16 for blowing a carrier gas and a raw material gas supplied into the reaction vessel 12 and a gas discharge port 17 for discharging the gas in the reaction vessel 12. An energy supply unit 18 that supplies energy such as heat, plasma, or light that causes the substrate 13 to react with the source gas is provided inside or outside the reaction vessel 12.

As shown in FIGS. 2 and 3, the vacuum pump 11 disposed in the gas discharge port 17 of the reaction vessel 12 through a connecting pipe has first and second screw rotors 19 and 20 disposed in parallel. ing. The first and second screw rotors 19 and 20 have rotary shafts 21 and 22, and helical tooth profile portions 23 and 24 that are provided on the rotary shafts 21 and 22 and mesh with each other, respectively. A rotating shaft 26 of a motor 25 is connected to one end side of the rotor 19. The tooth profile 23 of the first screw rotor 19 is formed as a right-hand thread, and the tooth profile 24 of the second screw rotor 20 is formed as a left-hand thread.

The vacuum pump 11 has a casing 28 in which an inner cylinder portion 27 in which the first and second screw rotors 19 and 20 are disposed is formed. The first and second screw rotors 19, 20 are supported by bearings 29, 30 and bearings 31, 32 having bearings provided at both ends of the casing 28. The casing 28 is provided with a suction port 33 for sucking the gas in the reaction vessel 12 from the gas discharge port 17 between the rotary shafts 21 and 22 on the other end side of the first and second screw rotors 19 and 20. A discharge port 34 for discharging the gas sucked into the vacuum pump 11 to the outside of the vacuum pump 11 is provided on a side surface portion on one end side of the second screw rotor 20.

The second screw rotor 20 is rotated at one end of the rotation shafts 21 and 22 of the first and second screw rotors 19 and 20 in conjunction with the first screw rotor 19 that is rotated by driving of the motor 25. Timing gears 35 and 36 are provided. The casing 28 is provided with a plurality of cooling fins 37 on the side surface on the suction port 33 side, and is further provided with a cooling water chamber 38 to which cooling water is supplied on the side surface on the discharge port 34 side. The hot gas is being cooled.

Here, the vacuum pump 11 drives the motor 25 to rotate the first and second screw rotors 19, 20, and the tooth profile portions 23, 24 of the first and second screw rotors 19, 20 and the casing 28. By moving the gas stored in the space formed by the inner cylinder portion 27 from the suction port 33 side to the discharge port 34 side, the gas can be sucked from the suction port 33. Since the formation of the thin film 14 on the substrate 13 differs depending on the state of the vacuum pump 11, it is necessary to grasp the state of the vacuum pump 11 and detect an abnormality of the vacuum pump 11 at an early stage.

As shown in FIG. 1, the diagnostic device 10 of the vacuum pump 11 includes an acceleration sensor 39 that detects acceleration, which is an example of a vibration signal, above the bearing 29 of the rotating shaft 21 of the first screw rotor 19 and above the casing 28. have. Further, the diagnostic device 10 is provided with a current sensor 40 that measures an electric current value that is an example of an electric signal of a power source (not shown) of the motor 25, and a gas that is provided in the discharge port 34 of the vacuum pump 11 and is discharged from the vacuum pump 11. A temperature sensor 41 that measures a temperature that is a temperature signal; and a pressure sensor 41 a that measures a discharge pressure that is a pressure signal of a gas that is provided at the discharge port 34 of the vacuum pump 11 and is discharged from the vacuum pump 11. Yes. The acceleration of the vacuum pump 11, the current value of the motor 25, and the temperature and pressure of the gas discharged from the vacuum pump 11 are at predetermined time intervals, for example, at a frequency of 10 Hz to 50 kHz (here, 25 kHz, that is, 40 μsec interval). Measured.

Further, the diagnostic device 10 converts the analog state signals (vibration signal, electrical signal, temperature signal, and pressure signal) measured by the acceleration sensor 39, the current sensor 40, the temperature sensor 41, and the pressure sensor 41a into digital state data. An A / D converter 42 that converts (vibration data, electrical data, temperature data, and pressure data), a processing unit 43 that processes state data obtained by the A / D converter 42, and a vacuum generated by the processing unit 43 A monitor 44 for displaying the diagnosis result of the pump 11 and the like is provided. Here, the number of measurement points (n) is not particularly limited. However, if the number is small, accurate determination is difficult, and if the number is large, processing takes time, and the memory of the processing unit 43 must be increased. In the diagnostic apparatus 10, the number of measurement points during normal operation and inspection is 65536 points, and the measurement time is approximately 2.6 seconds.

Next, with reference to FIGS. 1-4, the diagnostic method of the fluid rotary machine which concerns on one embodiment of this invention using the diagnostic apparatus 10 is demonstrated.
(First step)
First, when the vacuum pump 11 is normal, the acceleration sensor 39, the current sensor 40, the temperature sensor 41, and the pressure sensor 41a cause the vibration acceleration (vibration signal) of the vacuum pump 11 and the current value (electrical signal) of the motor 25 of the vacuum pump 11. ), The first state signal group by measuring the temperature (temperature signal) and discharge pressure (pressure signal) of the gas discharged from the discharge port 34 of the vacuum pump 11 at a predetermined time interval (25 kHz, that is, 40 μsec interval). Get. The obtained state signals of the first state signal group are converted into dimensional state data by the A / D converter 42 and stored in the processing unit 43 as the first state data group. Here, the state data is digitized vibration data, electrical data, temperature data, and pressure data (the same applies hereinafter) (step 1).

Further, when the vacuum pump 11 is inspected, the vibration sensor, the electric signal, the temperature signal, and the pressure signal are transmitted at predetermined time intervals (25 kHz, 25 kHz, That is, after obtaining the second state signal group by measuring at intervals of 40 μsec), each state signal of the obtained second state signal group is digitized by the A / D converter 42 to obtain vibration data, electric A second state data group consisting of data, temperature data, and pressure data is stored in the processing unit 43 (step 2).

(Second step)
The processing unit 43 performs any one or more preprocessing of noise removal by filtering, time averaging, and envelope processing on the obtained state data of the first and second state data groups. Perform (Step 3).

The processing unit 43 converts the respective state data of the first and second state data groups that have been preprocessed into dimensionless parameters, and obtains first and second parameter groups. Here, the vibration data is a plurality of dimensionless parameters, for example, degree of distortion, kurtosis, crest factor, minimum value rate, maximum value rate, maximum value rate, stability index, frequency crest factor, equivalent band, and frequency height Convert the ratio to 10 dimensionless parameters. The degree of distortion, the degree of kurtosis, the crest factor, the minimum value rate, the maximum value rate, the maximum value rate, the stability index, the frequency crest factor, the equivalent band, and the frequency height ratio are respectively expressed by Equations (5) to (14). shown, (1), and x ₁ ~x _10, respectively, in equation (2). The electrical data x ₁₁ , the temperature data x ₁₂ , and the pressure data x ₁₃ are the rate of change per predetermined time obtained by the equations (22) to (24), that is, the current fluctuation rate, the temperature rise rate, and the discharge rate. Expressed as the rate of pressure change.

Further, the processing unit 43 calculates the time series of the time series shown in the equation (25) from the parameters (x _{1 to} x ₁₃ ) obtained by the equations (5) to (14) and (22) to (24). First and second matrices X _I are created (step 4).

(Third step)
The processing unit 43 calculates each of the average values μ _{1 of} x ₁ to x ₁₃ obtained from the equation (25) in order to calculate the first and second matrices X _I as one multivariate Kullback-Liber information amount. An average matrix μ _I consisting of ˜μ ₁₃ (ie, μ _R at normal time, μ _T at inspection time) is prepared. Mean Matrix mu _I is represented by formula (26). Further, the processing unit 43 determines that the normal and inspection covariance matrix S _I shown in the equation (27) from the equations (25) and (26) (ie, S _R during normal operation, S _T during inspection). ) Respectively (step 5).

Here, by substituting μ _R , S _R , μ _T , and S _T into the equation (28), the multivariate Cullback / librar information amount MKI is calculated (step 6).

(4th process)
Further, the processing unit 43 determines the determination criteria R _k (α) shown in the equations (19) to (21) derived from the MKI obtained by the equation (28) and the statistical generalized asymptotic theory (15) equation, Compare R _k (β). As shown in equation (29), the risk level criterion R _k (α) is 70.0 when the number k of parameters is 13 and the significance level α is 0.01. As shown in the equation (30), the attention level R _k (β) is 55.6 when the number k of parameters is 13 and the significance level β is 0.3.

Here, when MKI is smaller than 48.3, it is determined that the distribution of vibration data during normal operation and during inspection is substantially the same, and the vacuum pump 11 is normal. When the MKI is 55.6 or more and less than 70.0, the distribution of vibration data at the normal time and at the time of inspection is different, and it is determined that the attention level at which a slight abnormality occurs in the vacuum pump 11 is determined. . Further, when MKI is 70.0 or more, it is determined that the distribution of vibration data at the normal time and at the time of inspection is different, and it is a dangerous level at which a serious abnormality has occurred in the vacuum pump 11. These diagnosis results are displayed on the monitor 44 (step 7).

Here, if the vacuum pump 11 is at a dangerous level, the vacuum pump 11 is replaced (step 8). When the vacuum pump 11 is at a caution level, the remaining life prediction and precise diagnosis of the vacuum pump 11 are performed. The precise diagnosis is performed on rotating parts such as the first and second screw rotors 19 and 20, the motor 25, and the bearings 29 to 32, for example, and an abnormal part is specified. Based on the remaining life prediction and precise diagnosis, a maintenance plan is prepared in advance such as preparation of a spare vacuum pump and procurement of necessary parts (step 9). When the vacuum pump 11 is normal, the diagnostic pump 10 checks the vacuum pump 11 again at a predetermined inspection. The monitor 44 may display the results of the parameters x _{1 to} x _{13 in} addition to the diagnosis result.

The present invention is not limited to the above-described embodiment, and can be changed without changing the gist of the present invention. For example, a part or all of the above-described embodiment and modification examples are combined. Thus, the case where the fluid rotary machine diagnosis method of the present invention is configured is also included in the scope of the right of the present invention.
For example, although the vacuum pump is used as the fluid rotating machine in the fluid rotating machine diagnosis method of the above embodiment, a blower or a compressor may be used. Further, although gas is supplied to the fluid rotary machine, a liquid may be used.

As a status signal of a fluid rotary machine (for example, a vacuum pump), a vibration signal, an electric signal, a temperature signal, and a pressure signal are measured, and one or both of the flow rate and temperature of cooling water for cooling the fluid rotary machine are detected. Or a signal that detects one or both of the flow rate and temperature of the gas supplied to the fluid rotary machine may be measured. Furthermore, you may measure combining these 2 or more.

Further, although the vibration signal is the acceleration of the vibration of the fluid rotating machine, one or both of the displacement and speed of the vibration of the fluid rotating machine may be used as a vibration signal, or these may be combined. The electric signal is the current value of the motor that rotates the rotating part of the fluid rotary machine, but one or both of the voltage value and the resistance value of the motor may be an electric signal, or a combination thereof.

Further, although the acceleration sensor is mounted on the upper part of the casing above the bearing on the opposite side to the motor of the rotation axis of the first screw rotor, it is sufficient if the acceleration can be measured and above the bearing of the rotation axis of the second screw rotor. It may be attached to the upper part of the casing. Moreover, although the acceleration sensor was attached to one place of the upper part of a casing, two or more places, for example, the horizontal direction of the rotating shaft of the 1st and 2nd screw rotor, and the rotating shaft of the 1st and 2nd screw rotor It may be attached to the side surface of the casing in the same direction as the axis, and the acceleration may be measured by each acceleration sensor, and calculated as one multivariate Kullback / librar information amount.

Although the second state signal group measured at the time of the inspection is processed off-line, the fluid rotating machine may be monitored on-line by processing on-line and sequentially analyzing the state signals of the second state signal group. Further, a plurality of fluid rotating machines may be connected by a network such as the Internet or an intranet and analyzed by one processing device, for example, a personal computer. By sequentially analyzing the second state signal group online, it is possible to detect an abnormality of the fluid rotary machine early.

It is explanatory drawing of the diagnostic apparatus of the fluid rotary machine to which the diagnostic method of the fluid rotary machine which concerns on one embodiment of this invention is applied. It is a top view of the vacuum pump used with the diagnostic apparatus of the fluid rotary machine. It is a front view of the vacuum pump used with the diagnostic apparatus of the fluid rotary machine. It is a flowchart of the diagnostic method of the fluid rotary machine.

Explanation of symbols

10: Diagnosis device for fluid rotating machine, 11: Vacuum pump, 12: Reaction vessel, 13: Substrate, 14: Thin film, 15: Chemical vapor deposition device, 16: Gas supply port, 17: Gas discharge port, 18: Energy supply unit , 19: first screw rotor, 20: second screw rotor, 21, 22: rotating shaft, 23, 24: tooth profile portion, 25: motor, 26: rotating shaft, 27: inner cylinder portion, 28: casing, 29 to 32: bearings, 33: suction port, 34: discharge port, 35, 36: timing gear, 37: fin, 38: cooling water chamber, 39: acceleration sensor, 40: current sensor, 41: temperature sensor, 41a: Pressure sensor, 42: A / D converter, 43: processing unit, 44: monitor

Claims (9)

A dimensional first state is obtained by measuring a first state signal group composed of a plurality of state signals indicating the state of the fluid rotary machine when the fluid rotary machine having a mechanical element in the rotating unit is normal at predetermined time intervals. After obtaining the data group, a second state signal group consisting of a plurality of state signals indicating the state of the fluid rotary machine at the time of inspection of the fluid rotary machine is measured at predetermined time intervals, respectively. A first step of obtaining a data group;
A time-series first matrix obtained by converting the first state data group to a dimensionless first parameter group, and a time series first matrix converted to a dimensionless second parameter group, respectively. A second step of creating a second matrix of series respectively;
A third step of calculating the first and second matrices as one multivariate Kullback-Liber information amount;
And a fourth step of determining the state of the fluid rotary machine based on the multivariate Kalbach librarian information amount,
A diagnostic method for a fluid rotary machine, comprising: comparing a normal state signal of the fluid rotary machine with a state signal at the time of inspection to detect abnormality of the rotary machine. 2. The fluid rotary machine diagnosis method according to claim 1, wherein each of the first and second state signal groups includes any two or more of a vibration signal, an electrical signal, a temperature signal, and a pressure signal of the fluid rotary machine. A diagnostic method for a fluid rotary machine. 3. The fluid rotating machine diagnostic method according to claim 2, wherein the vibration signal includes a degree of distortion, a kurtosis, a crest factor, a minimum value rate, a maximum value rate, a maximum value rate, a stability index, a frequency crest factor, an equivalent band, and A diagnostic method for a fluid rotary machine, characterized in that it is converted into a dimensionless parameter of any two or more of the frequency height ratio. 4. The fluid rotary machine diagnosis method according to claim 2, wherein the vibration signal is an acceleration of vibration of the fluid rotary machine measured by an acceleration sensor installed in a casing of the fluid rotary machine. 5. A method for diagnosing a fluid rotating machine, comprising: 5. The fluid rotary machine diagnosis method according to claim 1, wherein each state signal of the first and second state signal groups is measured at one or more locations of the fluid rotary machine. A diagnostic method for a fluid rotary machine, The fluid rotary machine diagnosis method according to any one of claims 1 to 5, wherein the state determination of the fluid rotary machine in the fourth step is performed by a statistical generalized asymptotic theory. Diagnosis method. 7. The fluid rotary machine diagnosis method according to claim 6, wherein the state determination of the fluid rotary machine is performed in two stages. The fluid rotary machine diagnosis method according to claim 1, wherein the first and second state data groups are any one of noise removal by filtering, time averaging, and envelope processing, respectively. Or the diagnostic method of the fluid rotary machine characterized by performing two or more pre-processing. The fluid rotary machine diagnostic method according to any one of claims 1 to 8, wherein the second state signal group is processed online, and the state signals of the second state signal group are sequentially analyzed, A diagnostic method for a fluid rotary machine, wherein the fluid rotary machine is monitored online.

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