JP4368236B2 - Electrostatic levitation gyroscope - Google Patents

Description

The present invention relates to an electrostatic levitation gyro apparatus including a gyro mechanism and an electronic circuit.
The gyro mechanism unit includes a gyro rotor and a gyro case, and supports the gyro rotor in a floating manner in the gyro case by electrostatic support force. The gyro rotor is placed in a vacuum for proper operation such as rotational operation.
The electronic circuit unit is connected to the gyro mechanism unit, detects the relative displacement between the gyro rotor and the gyro case, and performs attitude control and rotational driving of the gyro rotor.
Specifically, the present invention relates to a displacement detection method and a startup sequence (operation start procedure, startup control means) at the time of startup performed when starting posture control and rotational driving.

[Prerequisite technology]
Electrostatic levitation type gyros suitable for downsizing are used not only for ships and aircraft but also for moving objects such as automobiles. Gyro mechanism consisting of mechanical parts with inertia to detect acceleration to inertial space etc. And an electronic circuit unit for controlling electrostatic support force and detecting relative displacement.
FIG. 19 shows two gyro mechanism parts in such an electrostatic levitation gyro. (A) to (c) are known examples of the disk-shaped rotor type (see, for example, Patent Document 1), and (d) and (e) are known examples of the annular rotor type (for example, Patent Document 2). In the figure, (a) and (d) are longitudinal sectional front views, and (b), (c) and (e) are developed perspective views of built-in components.

  When the portions that are the premise of the implementation and description of the present invention are scratched and reprinted, the gyro rotor 10 is built in the gyro case 20 in a state where the gyro rotor 10 can be electrostatically levitated and rotated. The gyro case 20 is configured by combining an upper bottom member 21, a lower bottom member 22, and a spacer 23 made of an insulating material such as glass, and a disk-like or annular vacuum space is formed therein. The gyro rotor 10 is made of a conductor such as silicon, and is formed in a disk shape or in an annular shape so as to rotate stably around one spin axis. In order to apply an electrostatic supporting force and a rotational driving force from the gyro case 20 to the gyro rotor 10, a large number of electrodes made of a metal film pattern or the like are formed on the surfaces of both. The electrodes of the gyro rotor 10 and the electrodes of the gyro case 20 are arranged so as to satisfy a predetermined correspondence relationship such as a facing distance and a pitch according to their roles.

  The electrodes (multiple electrodes) of the gyro case 20 connected to the electronic circuit will be described in detail. The gyro case 10 is divided into a plurality of pairs opposed to each other with the gyro rotor 10 interposed therebetween. In particular, the electrodes for electrostatic support are further divided into groups and pairs arranged adjacent to each other. Specifically, the adjacent electrodes 31a and 31b and the adjacent electrodes 41a and 41b form an opposing pair, the adjacent electrodes 32a and 32b and the adjacent electrodes 42a and 42b form an opposing pair, and the adjacent electrodes 33a and 33b and the adjacent electrode 43a. , 43b form a counter pair, and the adjacent electrodes 34a, 34b and the adjacent electrodes 44a, 44b form a counter pair. In the case of the annular rotor type, there are many pairs of electrostatic support electrodes, the adjacent electrodes 35a and 35b and the adjacent electrodes 45a and 45b form an opposing pair, and the adjacent electrodes 36a and 36b and the adjacent electrodes 46a and 46b also face each other. Paired.

In addition, among the plurality of electrodes, the rotation driving electrode includes a rotor driving electrode 37 arranged in a circle on the lower surface of the upper bottom member 21 and a rotor driving electrode 47 arranged in a circle on the upper surface of the lower bottom member 22. And make an opposing pair.
Also in the displacement detection electrode, the displacement detection electrode 38 and the displacement detection electrode 48 form an opposing pair.
In the figure, the electrodes provided on the upper bottom member 21 are denoted by reference numerals in the 30th order, and the electrodes provided on the lower bottom member 22 are denoted by reference numerals in the 40th order. Further, in other illustrations and explanations, when calling any one of them without distinguishing the adjacent electrodes 31a and 31b, or calling them together, they are referred to as electrodes 31 with the final alphabet omitted. The same applies to the other electrodes 32 and the like.

  Further, with respect to the ring rotor type gyro mechanism that is relatively simple and clear (see FIGS. 19D and 19E), the specific roles of the electrostatic support electrodes 31 to 36 and 41 to 46 are described. explain. In FIG. 19 (d), the three axes that are orthogonal in space are the X axis, Y axis, and Z axis. In FIG. 19 (d), the X axis is placed in the left-right direction of the paper, the Y axis is placed in a direction penetrating the paper, and The Z axis is set, the rotation around the X axis is φ, and the rotation around the Y axis is θ. Then, the electrode 31 is applied with a control voltage to generate an electrostatic supporting force in the X direction according to the applied voltage, and changes the capacitance with the surface of the gyro rotor 10 according to the displacement of the gyro rotor 10 in the X direction. ing. The opposing electrode 41 is also applied with a control voltage to generate an X-direction electrostatic supporting force, and changes the capacitance with the surface of the gyro rotor 10 in accordance with the displacement of the gyro rotor 10 in the X direction. However, the electrode 31 has a reverse characteristic. The electrode pairs 32 and 42 perform the same function in the Y direction, the electrode pairs 33 and 43 perform the same function in the Z + φ direction, the electrode pairs 34 and 44 perform the same function in the Z + θ direction, 35 and 45 exhibit the same function in the Z-φ direction, and the electrode pairs 36 and 46 perform the same function in the Z-θ direction.

[Conventional technology]
FIG. 20A illustrates an electronic circuit that is connected to a plurality of electrodes 31 to 48 of the gyro case 20 and constitutes an electrostatic levitation type gyro together with the gyro mechanism. Again, for the sake of clarity, the electronic circuit part of the annular rotor type gyro is taken as a specific example, and parts useful for comparison with the embodiment of the present invention are scratched and reprinted.
This electronic circuit includes a control arithmetic circuit 53 (control circuit) that constitutes a constraint control system together with the electrodes 31 to 36 and 41 to 46 for electrostatic support, and a rotor control that constitutes a rotor drive system together with the electrodes 37 and 47 for rotor drive. The circuit 52 (control circuit) and the signal detection circuit which comprises a displacement detection system with the displacement detection electrodes 38 and 48 are provided. In the drawing, the control output circuit 54 is clearly shown for the control arithmetic circuit 53, but the rotor control circuit 52 is omitted.

  The control arithmetic circuit 53 calculates the relative displacement of the gyro rotor 10 and the gyro case 20 other than around the Z axis, that is, the X-direction displacement ΔX, the Y-direction displacement ΔY, the Z-direction displacement ΔZ, the φ-direction displacement Δφ, and the θ-direction displacement Δθ. Perform known calculations to generate control voltages V1, V12, etc. for posture control and apply them to the electrostatic support electrodes 31-36, 41-46 among the plurality of electrodes 31-48, etc. Therefore, attitude control is performed to make those relative displacements zero. These relative displacements are detected from capacitance changes of the electrostatic support electrodes 31 to 36 and 41 to 46. Each control voltage V1, V12, etc. is amplified to a required level before being applied by a control output circuit 54 that outputs a positive voltage signal and a negative voltage signal obtained by inverting the positive voltage signal.

The rotor control circuit 52 also performs a known calculation from the rotation state around the Z axis of the gyro rotor 10 to generate a rotation drive control voltage, for example, a three-phase pulse signal, and outputs them to the rotor drive electrode 37. , 47 and the like, the rotation control for rotating the gyro rotor 10 at a constant speed is performed. The rotational state of the gyro rotor 10 is detected from the capacitance change of the rotor driving electrodes 37 and 47. These control voltages are also amplified to a required level before being applied by the control output circuit 54 or a similar output circuit.
Unlike the electrostatic support electrodes 31 to 36 and 41 to 46 and the rotor drive electrodes 37 and 47 to which such a control voltage is directly applied, the displacement detection electrodes 38 and 48 among the plurality of electrodes 31 to 48 are used. In contrast, a control voltage that affects the motion of the gyro rotor 10 is not applied.

  In order to detect the relative displacement between the gyro rotor 10 and the gyro case 20, the signal detection circuit uses the displacement detection application signals f1 to f12 having a high frequency so as not to affect the motion of the gyro rotor 10. An application signal supply circuit for applying the detection application signals f1 to f12 to a part of the plurality of electrodes 31 to 48, and the displacement detection application signals f1 to f12 after the displacement detection electrodes 38 and 48 are displaced. A current detection circuit 51 (detection signal generation circuit) that detects a signal component related to the detection application signals f1 to f12 and generates a displacement detection detection signal Vp is provided.

  Specifically, the application signal supply circuit generates displacement detection application signals f1 to f12 by combining five sine wave signals w1 to w5 having different frequencies so as to be discriminated based on a well-known relational expression. The displacement detection application signals f1 to f12 are applied not to the displacement detection electrodes 38 and 48 but to the electrostatic support electrodes 31 to 36 and 41 to 46. In addition, at this time, application is performed by superimposing displacement detection application signals f1 to f12 on the control voltages V1, V12, and the like on the output side of the control output circuit 54.

  In the annular rotor type, there are six opposing pairs of electrostatic support electrodes. Of these, the electrode pairs 31 and 41 will be described in detail (see FIG. 20B). The control voltage V1 is a positive voltage + V1 and a negative voltage -V1. Are generated in pairs, and the positive voltage + V1 is applied to the electrostatic support electrode 31b after superimposing the displacement detection application signal f1, and the negative voltage -V1 is applied to the adjacent electrostatic support after superimposing the same displacement detection application signal f1. Applied to the electrode 31a. The control voltage V12 is generated as a pair of a positive voltage + V12 and a negative voltage −V12. The positive voltage + V12 is applied to the electrostatic support electrode 41b after the displacement detection application signal f12 is superimposed, and the negative voltage −V12 is the same. After the displacement detection application signal f12 is superimposed, it is applied to the adjacent electrostatic support electrode 41a.

  On the other hand, the current detection circuit 51 (see FIG. 20A) is not connected to the control output circuit 54 side, but is connected to the displacement detection electrodes 38 and 48 among the plurality of electrodes 31 to 48. The current detection circuit 51 includes an amplifier for signal amplification and the like, and its input line is connected to the parallel connection point of the displacement detection electrodes 38 and 48. The displacement detection detection signal Vp output from the current detection circuit 51 is also sent to the rotor control circuit 52 and the input circuit of the control arithmetic circuit 53.

Here, referring to the input circuit of the displacement detection detection signal Vp in the control arithmetic circuit 53 (see FIG. 20C), the displacement detection detection signal Vp and the sine are connected to the subordinate connection circuit of the synchronous detector and the band pass filter. For example, the X-direction displacement ΔX is detected by inputting the wave signal w1 and extracting the component of the sine wave signal w1 from the detection signal Vp for displacement detection. The same applies to the other displacements ΔY, ΔZ, Δφ, Δθ.
The signal detection circuit detects the relative displacements ΔX, ΔY, ΔZ, Δφ, Δθ and the rotation state based on the capacitance changes of the control electrodes 31 to 37, 41 to 47. In addition, the gyro rotor 10 floats to the neutral position in the gyro case 20 and continues to rotate by the attitude control and the rotational drive of the control arithmetic circuit 53 and the rotor control circuit 52 that have received the input. Furthermore, based on them, the acceleration etc. which acted on the electrostatic levitation type gyro are calculated and detected.

  By the way, such application calculation such as acceleration calculation is performed properly only when the operation state of the gyro mechanism is in a steady state, that is, a stable state within an assumed range. Stop sequence (operation stop procedure, stop control means) and start sequence (operation start procedure, start control means) are performed by executing a stop program or start program of the control circuit (rotor control circuit 52 + control arithmetic circuit 53). It has become.

  More specifically, although not shown in the stop sequence, it is confirmed that the frequency of the signal applied to the rotor drive electrodes 37 and 47 is gradually lowered to decelerate the rotation of the gyro rotor 10 and sufficiently decelerate. After that, for example, after the rotation speed becomes 100 revolutions per minute or less, the whole control is stopped after a predetermined time, for example, 60 seconds elapses.

  Further, since the gyro rotor 10 sinks (drops and descends) in the gyro case 20 due to the control stop, and the gyro rotor 10 comes into contact with the gyro case 20, the gyro rotor 10 is attached to the gyro case 20 when stopped. A support piece 101 for supporting is also provided. FIG. 21A is a longitudinal front view of a mechanism part of a disk-shaped rotor type gyro, and FIG. 21B is a cross-sectional plan view of a gyro case of a disk-type rotor type gyro. (C) is a vertical front view of the mechanism part of the annular rotor type gyro.

  The support piece 101 has conductivity to release unwanted static electricity accumulated in the gyro rotor 10 by contact, and is made into a small piece to reduce intermolecular attractive force. The contact surface (supportable part) is formed in a round shape so that it does not occur, and is arranged on both ends of the inner peripheral surface of the case so as to be stably supported in any direction, and is arranged in two steps radially. In the stopped state, the electrodes of the gyro rotor 10 and the gyro case 20 are prevented from coming into contact with each other or approaching excessively. The same applies to a disc-shaped rotor and an annular rotor.

Further, the activation sequence will be described in detail with reference to the drawings. FIG. 21 (d) is a schematic flowchart of the activation sequence. FIG. 22 (a) is a longitudinal front view of the gyro mechanism, (b) is a cross-sectional plan view thereof, and (c) to (g) are signals. It is an example of a waveform.
In this activation sequence (see FIG. 21 (d)), after a predetermined initialization process such as clearing of the working memory is performed (step S11), control is started (step S12). That is, attitude control based on displacement detection and rotational driving are started. Then, after waiting for the control state to stabilize (step S13), that is, when the relative position and the rotational speed of the gyro rotor 10 fall within a predetermined range, the application calculation such as the acceleration calculation described above is started (step S14). This is normal startup.

  On the other hand, when it does not start, a retry (retry) is performed as follows. That is, when the control state is not stabilized after waiting for a predetermined time, for example, about 5 seconds (step S15), it is determined that the activation has failed and the control is interrupted (step S16). That is, the displacement detection, the attitude control, and the rotational drive are stopped. Then, after waiting for a predetermined time, for example, about 5 seconds (step S17), the control is resumed (step S12). In order to enhance the retry effect, the integrated value is cleared at the start of the control.

  An example of the operation in such a startup sequence will be described. For the sake of simplicity, it is assumed that the gyro rotor 10 is supported by the lower support piece 101 in a state where the gyro mechanism is placed with the Y axis positive direction facing upward. (See FIGS. 22A and 22B). Further, the attitude control voltage for generating electrostatic attractive force in the X-axis positive direction on the gyro rotor 10 is defined as a positive voltage XP + and a negative voltage XP- (which correspond to the above-described + V1 and -V1), respectively. The attitude control control voltage that generates the electrostatic attraction is a positive voltage XM + and a negative voltage XM− (these correspond to the above-described + V12 and −V12), and the attitude control control voltage that generates the electrostatic attraction in the Y-axis positive direction is A positive voltage YP + and a negative voltage YP− are used, and an attitude control control voltage that generates an electrostatic attractive force in the negative Y-axis direction is a positive voltage YM + and a negative voltage YM−. Any one of the three-phase pulse signals is set to a positive voltage RP +.

In this case, the components of the displacement detection application signals f1 to f12 having a high frequency and the invariant offset components do not affect the movement of the gyro rotor 10. Therefore, if these signal components are ignored, the positive voltage XP + and the negative voltage XP- are inverted. The positive voltage XM + and the negative voltage XM− are also inverted waveforms, the positive voltage YP + and the negative voltage YP− are also inverted waveforms, and the positive voltage YM + and the negative voltage YM− are also inverted waveforms.
Furthermore, a specific example is a case where normal startup is performed after two startup failures. In other words (see FIGS. 22 (c) to 22 (g)), starting is started at time t1, starting is interrupted at time t2, starting is restarted at time t3, interrupted again at time t4, and restarting is started at time t5. It is assumed that the activation is successful at time t6 and a steady state is entered.

  Then, immediately after the start of activation (time t1 to t2), the positive voltage YP + and the negative voltage YP− that generate levitation force become maximum outputs so as to eliminate the subsidence state of the gyro rotor 10 (see FIG. 22C). On the other hand, the positive voltage YM + and the negative voltage YM− are the minimum outputs (see FIG. 22D), and the positive voltage XP +, the negative voltage XP−, the positive voltage XM +, and the negative voltage acting in the direction perpendicular to the flying direction and the sinking direction. XM- becomes an intermediate output (see FIGS. 22E and 22F). Although illustration and detailed description are omitted, control voltages in the Z direction, φ, and θ directions are also appropriate intermediate outputs. Further, the positive voltage RP + that generates the rotational driving force is in a pulse output state (see FIG. 22G).

Even if the state is continued, when the activation is not successful, for example, when a predetermined time has passed without rising, the activation is interrupted. In this state (time t2 to t3), the output of all control voltages is suppressed (see FIGS. 22C to 22G).
When the start-up is resumed after a predetermined time has elapsed (time t3 to t4), the positive voltage YP + and the negative voltage YP− are the maximum output and the positive voltage YM + and the negative voltage YM− are the minimum output because of the rising and rotation again. Other attitude control positive voltages XP + and the like are intermediate outputs, and the positive voltage RP + is in a pulse output state.
If it still does not start, the control is interrupted again (time t3 to t4), and the output of all control voltages is suppressed.

Further, after a predetermined time has elapsed, the start-up is resumed (time t5), and because of the rising and rotation, the positive voltage YP + and the negative voltage YP- are the maximum output, the positive voltage YM + and the negative voltage YM- are the minimum output, and other positive The voltage XP + and the like are in an intermediate output state, and the positive voltage RP + is in a pulse output state.
Then, when the gyro rotor 10 floats and rotates (time t6), the positive voltage YP + and the negative voltage YP− that generate the levitation force are changed from the maximum output to the intermediate output (see FIG. 22C), and are attracted to it. The positive voltage YM + and the negative voltage YM− are also changed from the minimum output to the intermediate output (see FIG. 22D).

  In this way, when the relative displacement and rotational speed of the gyro rotor 10 with respect to the gyro case 20 are within a predetermined allowable range, and this is detected and confirmed by displacement detection or the like, thereafter (time t6), the steady state described above. At the same time, posture control and rotational driving are performed, and application calculations such as acceleration calculation are also performed.

  Although illustration is omitted, implementation of such a gyro apparatus will also be described. An electrostatic levitation type gyro apparatus including an electronic circuit and a gyro mechanism as described above is mounted on a printed circuit board or the like to establish an electrical connection. In this case, the printed circuit board on which the gyro case 20 is mounted is mounted. Part of the electronic circuit was also implemented. At that time, circuit portions such as the control output circuit 54 and the current detection circuit 51 that are directly connected to the electrodes 31 to 48 of the gyro case 20 are preferentially mounted on the same substrate. In addition, the preamplifier of the current detection circuit 51 may be mounted on the upper surface of the gyro case 20 or the like. In any case, the vacuum space remains in the gyro case 20, and the gyro mechanism and the electronic circuit are mounted in the atmosphere. Moreover, in order to ensure a vacuum state in the gyro rotor 10 housing space in the gyro case 20, the gyro rotor 10 is assembled in a vacuum atmosphere or evacuated after being assembled. In order to maintain the vacuum state for a long period of time, a getter member (vacuum maintaining member) is also housed in the vacuum space.

Japanese Patent No. 3008074 (FIGS. 1, 2, 4, and 8) JP 2001-235329 A (FIGS. 1, 2, 3, and 6)

[Undisclosed prior art]
[Prior Patent Application 1] Japanese Patent Application No. 2003-050223 [Prior Patent Application 2] Japanese Patent Application No. 2002-362031 [Prior Patent Application 3] Japanese Patent Application No. 2003-099695 [Prior Patent Application 4] Japanese Patent Application No. 2003-130421

  By the way, when the electrostatic levitation type gyro apparatus is further reduced in size, specifically, when the diameter of the gyro rotor 10 is reduced to about several millimeters or less, even after assembly in a vacuum atmosphere, Even with vacuuming, it becomes difficult to work at each stage. For this reason, it is difficult to ensure a vacuum state, and it may lead to an undesired cost increase due to an increase in man-hours and a decrease in yield. In addition, since the burden on the getter increases due to the dimensional effect associated with downsizing, it is difficult to maintain a vacuum state. Moreover, since the cost of the through hole of the glass gyro case 20 is increased, the cost is increased. Therefore, in order to achieve both a request for downsizing and a request for cost reduction, the same applicant has devised a specific embodiment in consideration of the mounting state with respect to securing and maintaining a vacuum state. The main point is that by introducing a vacuum package and expanding the vacuum space more than the gyro mechanism part and taking in the vacuum maintenance member and electronic circuit in it, miniaturization can be promoted without increasing the difficulty of vacuum maintenance etc. It is possible to realize a small electrostatic levitation gyro device at a low cost (refer to the prior patent application 1).

Further, regarding the signal detection circuit for detecting the relative displacement between the gyro rotor and the gyro case, an improvement plan has been created by the same applicant (refer to the prior patent application 2), and the main points thereof will be described.
In the conventional signal detection circuit described above, since the displacement detection application signals f1 to f12 are superimposed on the control voltages V1, V12, etc., the sum of both voltages does not exceed the power supply voltage Vcc of the control output circuit 54. Since this is not possible, the power supply voltage Vcc is assigned to the amplitude voltage Vf of the displacement detection application signal f1 and the maximum voltage of the control voltage V1 (see FIG. 20D). However, when the mechanism of the electrostatic levitation gyro is reduced in size, specifically, for example, when the diameter of the gyro rotor 10 which is conventionally about 5 mm is reduced to about 1 mm, the capacity of the plurality of electrodes 31 to 48 is increased. Get smaller. In particular, the input current Ip to be detected by the current detection circuit 51, which is the source of the displacement detection detection signal Vp, is drastically reduced. For this reason, in order to obtain a displacement detection detection signal Vp of an appropriate level necessary for accurately obtaining the displacement ΔX and the like, it is necessary to increase the amplitude voltage Vf of the displacement detection application signal f1.

  However, increasing the amplitude voltage Vf under a predetermined power supply voltage Vcc is accompanied by a decrease in the maximum voltage of the control voltage V1, so that the balance of allocation to both is undesirably broken (see FIG. 20 (e)). ). The same applies to other displacement detection application signals. Therefore, it is important to improve the signal detection circuit so that the amplitude voltage of the displacement detection application signal can be increased under the same power supply voltage without sacrificing the control voltage. An improved solution to meet such a demand is achieved by reversing the flow of the displacement detection signal from the conventional one so that the superposition of the control voltage and the displacement detection signal is performed by the voltage significant signal and the current significant signal. As a result, it is possible to increase the amplitude voltage of the displacement detection applied signal without sacrificing the control voltage. As a result, even if the electrode capacitance is decreased, an appropriate level of displacement detection detection signal can be easily obtained. As a result, an electrostatic levitation gyro signal detection circuit suitable for miniaturization can be realized.

  Since many of the technical matters described in these unpublished prior patent applications 1 and 2 are the premise of the inventive idea, they will be reprinted here before presenting the problems of the present invention. First, a specific configuration of the electrostatic levitation gyro apparatus will be described with reference to the drawings. 1A and 1B show the structure of the device packaging, in which FIG. 1A is a front view of the device, FIG. 1B is a plan view of the device with the lid removed, and FIG. 2A is an overall circuit diagram including a signal detection circuit, FIG. 2B is a displacement detection application signal generation circuit, and FIG. 2C is a current detection circuit. 3A shows a signal input circuit for the constraint control system, and FIG. 3B shows a signal input circuit for the rotor drive system. In the drawings, the same reference numerals are given to the same components as those in the prior art, and the gyro mechanism described in the column of the premise technology in the background technology column is the following prior art. Since it is used as it is in the example, the description will focus on the differences from the prior art. Again, for the sake of clear contrast, the electronic circuit unit is a specific example of an annular rotor type gyro, and the electronic circuit unit will be described after describing the gyro mechanism unit.

  This gyro device 70 (see FIG. 1) is provided with a sealable device package (vacuum container) consisting of a cap 71 (lid) and a box 72 (box, can). Are a gyro mechanism part composed of the gyro rotor 10 and the gyro case 20 described above, a base 73 (mounting substrate) made of an insulating substrate such as glass, a getter 75 (vacuum maintaining member), and ICs 77 and 78 (integrated circuits). And are stored.

  The cap 71 and the box 72 are made of a member that is excellent in air tightness and easy to process, for example, metal. When the box 71 is covered with the cap 71 and exhausted from the vacuum suction port 76 formed through the front wall of the box 72, When the space is evacuated and the vacuum suction port 76 is further plugged, it is hermetically sealed and a vacuum state is established. A large number of pins 74 (external connection terminals) are planted on the bottom surface of the box 72. The pin 74 is used to establish electrical continuity inside and outside the device package and to support the package when mounted on a printed circuit board. For example, the pin 74 is made of a good conductor similar to a pin of a multi-pin IC PGA (Pin Grid Array) package. Thus, in this example, they are generally arranged in a quadrilateral shape, and all of them penetrate the bottom surface of the box 72. The through hole of the pin 74 is filled with, for example, molten glass for fixing, airtightness and insulation.

  The base 73 is a flat plate that is slightly smaller than the inner bottom of the box 72, is supported by a number of pins 74 in the box 72, and is slightly separated from the bottom surface of the box 72. Although illustration is omitted, a wiring pattern is formed on the upper surface of the base 73, and an appropriate wiring is connected to each pin 74. This connection is made of metal or the like and serves as a connection between the pin 74 and the base 73. The gyro case 20 and the ICs 77 and 78 are mounted on the upper surface of the base 73. The wiring pattern can be connected to the gyro case 20 by wire bonding. In this example, the ICs 77 and 78 are mounted as bare chips. Therefore, the COG (Chip On Glass) method is used in which gold bumps, solder balls, and the like are connected together.

The gyro mechanism portion may be a vacuum-sealed storage space of the gyro rotor 10 of the gyro case 20 as described above, but in this case, since the gyro case 20 is entirely housed in a vacuum device package, there is no need for sealing. There is no need to incorporate a getter member in the gyro case 20.
The getter 75 maintains a vacuum state by adsorbing a gas such as oxygen or nitrogen remaining in or entering the vacuum space in the apparatus package. The getter 75 is a conventional getter member built in the gyro case 20. In comparison, the material is the same, but the size is considerably larger. The getter 75 may be mounted on the base 73, but in this example, a non-evaporable getter that is activated by energization heating is adopted, so the two pins 74 are connected via a wire. It is supported.

  The ICs 77 and 78 are obtained by integrating the control output circuit 54, the current detection circuit 51, the supply circuits for the application signals f1 to f12, and the like if the electronic circuit has the configuration shown in FIG. However, here, since the electronic circuit is improved centering on the signal detection circuit, the integrated parts in the ICs 77 and 78 are also partially different accordingly. A specific integrated portion will be described after detailed differences in electronic circuits, but the ICs 77 and 78 are mounted on the base 73 as bare chips. The number of chips may be two as shown, may be combined into one, or may be three or more.

  Next, the electronic circuit unit will be described. This electronic circuit is different from that of the above-described conventional example (see FIG. 2A), in which an applied signal generating circuit 61 (applied signal supply circuit) is replaced with the displacement detecting electrodes 38 and 48 in place of the current detecting circuit 51. , The point that the displacement detection application signals f1 to f12 are not superimposed on the output of the control output circuit 54, and instead the control output circuit 54 is provided with a current detection circuit 64, and the control circuit 52 , 53 are digitized to become a rotor control circuit 62 and a control arithmetic circuit 63.

  The applied signal generation circuit 61 may generate a sine wave signal as the displacement detection application signal V0 as long as it satisfies the requirement that the frequency is high enough not to affect the motion of the gyro rotor 10, and the amplitude of the displacement detection application signal V0. May be arbitrarily set within the range allowed by the power supply voltage, but here (see FIG. 2B), in order to generate a triangular wave voltage signal as the displacement detection application signal V0, a pair of constant current circuits are reversed. Current sending and current suction are alternately repeated by a switch or the like provided in the direction and switched by the clock CLKa.

  The displacement detection applied signal V0 generated by such a constant current circuit pair and the switch circuit is directly connected to the displacement detection electrode via an appropriate coupling capacitor 61a as shown in the drawing or not. 38, 48. With this configuration, the displacement detection application current i0 supplied from the application signal generation circuit 61 to the parallel connection point of the displacement detection electrodes 38 and 48 has a rectangular wave shape in which the direction of the constant current is inverted in synchronization with the clock CLKa. The displacement detection application signal V0 is a triangular wave voltage signal. The frequency of the clock CLKa is set to 1 MHz or more, for example. This is much higher than several tens of kHz, which is the effective frequency of the control voltage, and the above requirement is satisfied.

  The current detection circuit 64 (see FIG. 2A) is a set of twelve or twelve sets for sending control voltages V1, V12, etc. for posture control from the control arithmetic circuit 63 to the electrostatic support electrodes 31-36, 41-46. Each of the control output circuits 54 is also attached to each of the control output circuits 54 for sending a control voltage for rotational driving from the rotor control circuit 62 to the rotor driving electrode 37. Each current detection circuit 64 (see FIG. 2C) performs a signal amplification, noise removal, and the like on a pair of current mirrors 64a and 64b, a differential output line 64c connecting the output lines. It comprises an amplifier 64d that outputs a detection current i1 for displacement detection and the like.

  The current mirror 64a is inserted and connected to the high potential side (+) of the power supply line of the control output circuit 54 (particularly the output stage circuit) of the attachment destination on the input side, and the current mirror 64b is attached to the attachment side of the current mirror 64b. Of the power supply lines of the control output circuit 54 (particularly, the output stage circuit), the power supply line is inserted and connected to the low potential side (−), and both output sides are connected to the differential output line 64c. As a result, each of the current detection circuits 64 detects the output current of the corresponding control output circuit 54 and generates displacement detection detection currents i1 to i12 and r1 to r6 that are the same as or correspond to them. It has become.

  The calculation contents of the control arithmetic circuit 63 are basically the same as the conventional example, but the circuit configuration (see FIG. 3A) is digitized by the adoption of the DSP 66 (digital signal processor). A / D conversion circuit 65 is provided. In this example, six A / D conversion circuits 65 are provided, and all of them are sampled and sampled at the timing of the clock CLKb and quantized with, for example, 12 bits. The clock CLKb is obtained by shifting the phase of the clock CLKa described above by 90 °, for example, and is synchronized with the clock CLKa. If the transient state at the time of switching is removed, the phase difference may be other than 90 °, and the frequency may be multiplied or decreased.

  The six A / D conversion circuits 65 take the difference between the displacement detection detection current i1 to the electrostatic support electrode 31 and the displacement detection detection current i12 to the electrostatic support electrode 41 to obtain the X-direction displacement ΔX. The component of the Y-direction displacement ΔY is obtained by taking the difference between the signal obtained by extracting the above-mentioned component, the detection current i2 for detecting displacement to the electrostatic support electrode 32, and the detection current i11 for detecting displacement to the electrostatic support electrode 42. A signal obtained by taking the difference between the extracted signal and the detection current i3 for displacement detection to the electrostatic support electrode 33 and the detection current i10 for displacement detection to the electrostatic support electrode 43 and extracting the component of the displacement ΔZ + Δφ in the Z + φ direction And a signal obtained by extracting the component of the displacement ΔZ + Δθ in the Z + θ direction by taking the difference between the detection current i4 for displacement detection to the electrostatic support electrode 34 and the detection current i9 for displacement detection to the electrostatic support electrode 44, Detection current i5 for detecting displacement to the electrode 35 for electric support and electrostatic A signal obtained by extracting the component of the displacement ΔZ−Δφ in the Z-φ direction by taking the difference from the detection current i8 for detecting the displacement to the holding electrode 45 and the detection current i6 for detecting the displacement to the electrostatic support electrode 36 and static It is assigned to a signal obtained by extracting the component of the displacement ΔZ−Δθ in the Z-θ direction by taking the difference from the detection current i6 for detecting the displacement to the electrode 46 for electric support.

  The calculation content of the rotor control circuit 62 is basically the same as that of the conventional example, but the circuit configuration (see FIG. 3B) is also digitized by the adoption of the DSP 67, so that quantization means is provided in the previous stage. It has been. The quantization means may be the same as that of the A / D conversion circuit 65. However, in order to perform the rotor rotation control, it is sufficient to grasp one or more phases of the displacement detection detection currents r1 to r6. A comparator COMP simpler than the / D conversion circuit 65 is provided for each of the detection currents r1 to r6 for displacement detection. Each binarized displacement detection signal is input to the DSP 67 at any time by the sampling program processing of the DSP 67 and is sampled, and then a three-phase pulse signal or the like based on the rotation state of the gyro rotor 10 around the Z-axis. The rotation driving control voltage is generated by a known calculation.

  Among such electronic circuits, the control output circuit 54, the current detection circuit 64, the applied signal generation circuit 61, and the like are integrated in the ICs 77 and 78. The DSPs 66 and 67 may be dedicated products, but general-purpose commercially available products are sufficient, and such DSPs 66 and 67 are not integrated in the ICs 77 and 78.

  The use mode and operation of the electrostatic levitation gyro apparatus having such a configuration will be described with reference to the drawings. FIG. 1D is a perspective view showing a device mounting state. 4A is a detailed view of a control voltage application portion, and FIGS. 4B to 4F are signal waveform examples. Also here, the mounting mode of the mechanism part will be described first, and then the operation of the electronic circuit will be described.

  In order to mount the gyro device 70 on the printed circuit board 80 (see FIG. 1D), prior to that, a through hole corresponding to the pin 74 and a wiring pattern for electrical connection are formed on the printed circuit board 80. ICs such as DSPs 66 and 67 and other electronic components are mounted on the printed circuit board 80 using a general IC mounting technique. A regulator IC 81, a smoothing capacitor 82, and the like constituting the power supply circuit are also mounted. Then, a pin 74 is inserted into the through hole of the printed board 80 and connected by soldering or the like.

  Then, the gyro device 70 is fixed to the printed circuit board 80, and the gyro case 20 is fixed to the printed circuit board 80, and the electrical connection between the electrodes 31 to 48 of the gyro case 20 and the electronic circuit is established. . Specifically, the ICs 77 and 78 which are built-in parts of the electronic circuit are connected to the gyro case 20 by the wiring pattern of the base 73 when the assembly of the gyro device 70 is completed. Are connected via the wiring pattern of the printed circuit board 80 and the pins 74. Thus, when the electrostatic levitation gyro device is mounted on the printed circuit board 80 and incorporated in an automobile or the like, the gyro mechanism and the electronic circuit can be operated.

  As is apparent from the above description, the gyro device 70 can be easily mounted in substantially the same manner as a familiar IC such as a PGA type IC. Furthermore, regarding the vacuuming of the gyro device 70, since it is a device package that is larger and more durable than the gyro case 20 and is easy to handle, the work becomes easier and the existing equipment and jigs can be used continuously. Regarding the maintenance of the vacuum state, the getter 75 can be made sufficiently large. For example, the getter 75 can be made so large that it does not fit in the gyro case 20, so that the vacuum state is maintained for a long period of time. The vacuum space was conventionally sealed with thin glass or the like, but since it is sealed with a package 71 + 72 made of a metal that is thicker and more deformable, the hermetic performance is improved. A vacuum state is maintained over a long period of time. Moreover, the gyro device 70 includes not only the gyro case 20 but also ICs 77 and 78, which are part of the electronic circuit, in a bare chip state, thereby enabling compact mounting of the electronic circuit unit. It is further advanced. The ICs 77 and 78 are mounted on a bare chip. However, the internal space of the gyro device 70 surrounding the ICs 77 and 78 is in a vacuum state, so that it does not deteriorate due to oxidation or the like.

  Next, the operation of the electronic circuit will be described (see FIG. 4A). For the sake of clarity and comparison with the conventional example, the electrode pairs 31 and 41 of the six pairs of electrostatic rotor support electrodes of the annular rotor type will be described. The application state of the control voltage will be described in detail. The control voltage V1 is also divided into a pair of a positive voltage V1b and a negative voltage V1a, the positive voltage V1b is applied to the electrostatic support electrode 31b, and the negative voltage V1a is applied to the adjacent electrostatic support electrode 31a. . The control voltage V12 is also divided into a pair of a positive voltage V12b and a negative voltage V12a. The positive voltage V12b is applied to the electrostatic support electrode 41b, and the negative voltage V12a is applied to the adjacent electrostatic support electrode 41b. The

  And (see FIG. 4 (b)), a constant offset voltage applied to the electrostatic support electrodes 31, 41 when the gyro rotor 10 is stationary at the neutral position apart from the rotation around the Z axis is Vof, If the X-axis control voltage component calculated and changed for attitude control is Vx, the main component output from the control output circuit 54 of the positive voltage V1b is + Vof + Vx, and the main component of the negative voltage V1a is −Vof−Vx. The main component of the positive voltage V12b is set to + Vof−Vx, and the main component of the negative voltage V12a is set to −Vof + Vx. The steps so far are basically the same as in the conventional example, but the displacement detection signal is superimposed differently from the conventional example, so that the displacement detection application signal V0 is directly superimposed on these control voltages V1, V12, etc. There is nothing wrong. However, it is affected by the transmission of the displacement detection application signal V0.

  That is, (see FIG. 4C), the applied signal generation circuit 61 generates a displacement detection application signal V0 whose voltage waveform changes in a triangular wave shape, and this generates the displacement detection electrodes 38 and 48, the gyro rotor 10, and the electrostatic The voltage is superimposed on the control voltages V1 and V12 through the support electrodes 31 and 41 in order. The amplitude of the applied voltage signal V0 for displacement detection can exceed the power supply voltage Vcc of the control output circuit 54 if a booster circuit or the like is added to the applied signal generation circuit 61. It is considerably larger than f12. On the other hand (see FIG. 4B), since the voltage component superimposed on the control voltages V1 and V12 is extremely small, the waveform of the positive voltage V1b does not greatly deviate from the waveform of the main component + Vof + Vx, and the negative voltage V1a is Along the principal component −Vof−Vx, the positive voltage V12b is along the principal component + Vof−Vx, and the negative voltage V12a is along the principal component −Vof + Vx.

  On the other hand, the displacement detection applied current i0 (see FIG. 4 (d)) as well as the displacement detection applied voltage signal V0 are controlled through the displacement detection electrodes 38, 48, the gyro rotor 10, the electrostatic support electrodes 31, 41, etc. in order. At this time, the displacement detection applied current i0 is divided based on the capacitances of the plurality of electrodes 31 to 48, and at the transmission destination, the current detection circuit 64 at the corresponding location is used for displacement detection. Detected as detected current signals i1 to i12. These current signals (see the displacement detection detection current i1 in FIG. 4 (e)) show a clear current value corresponding to the division, and become a rectangular wave having a frequency corresponding to the clock CLKa.

  And (see FIG. 4 (f) and FIG. 3 (a)), the current signal (i1-i12) reflecting the X-direction displacement ΔX at the timing of the clock CLKb that is synchronized with the clock CLKa but out of phase. A similar signal is quantized by the A / D conversion circuit 65, and a known calculation for posture control is performed by the DSP 66 that has taken them in. Also, the angular velocity and acceleration with respect to the inertial space are calculated. Thus, also in this case, posture control, acceleration detection, and the like are appropriately performed. Further, the displacement detection detection currents r1 to r6 are binarized and taken into the DSP 67, and a known calculation for rotational driving is performed by the D67SP that has taken them. The upper limit of the fundamental frequency of the rotational drive control voltage is about several hundreds Hz. However, since the fundamental frequencies of the detection currents r1 to r6 for displacement detection are high as described above, both are easily and accurately discriminated. Thus, the rotor rotational drive is also appropriately performed.

  As is clear from the above description, in the signal detection circuit of the electrostatic levitation type gyro, the applied voltage signal V0 for displacement detection can be expanded as required, and the control voltage V1, Since V12 and the like can be expanded to near the power supply voltage Vcc of the control output circuit 54, a sufficient signal level can be secured even if the capacity of the plurality of electrodes 31 to 48 is reduced due to the downsizing of the gyro mechanism. In addition to properly detecting displacement, it also contributes to improved attitude control performance.

In addition to the technical matters described in these unpublished prior patent applications 1 and 2, the technical matters described in the unpublished prior patent application 3 are also the premise of the present invention, and many Since this part has been taken over by the present invention, the outline will be re-posted.
As described above, even if the gyro mechanism or electronic circuit is incorporated into the vacuum package in order to reduce the size in consideration of the mounting situation, or even if the electrode capacity decreases due to the downsizing of the gyro mechanism, the detection signal for detecting the displacement at an appropriate level Thus, the flow of the displacement detection signal is reversed from that of the prior art to reduce the size of the electrostatic levitation gyro device, and the application range of the electrostatic levitation gyro device is expanded. However, just because miniaturization has become possible, not everything is replaced with a smaller one.

In the case of an electrostatic levitation type gyro apparatus that utilizes the inertia by rotating the gyro rotor, the detection accuracy cannot be avoided depending on the size of the gyro rotor. Various voltages are adopted for the power supply voltage Vcc, the control voltage V1, and the like according to the size. For example, when the rotor diameter is 1 to 2 mm, a voltage of about 3 V or 5 V is sufficient, but when the rotor diameter exceeds 5 mm, a voltage of 12 V or 15 V is often used.
However, if the voltage of the electronic circuit is high, usable electronic parts are limited or expensive. In particular, when a semiconductor component that operates at a high speed such as 1 MHz and requires a wide dynamic range such as a current mirror of the current detection circuit 64 is required to have a high breakdown voltage performance of about 15 V or more, it can be realized at an appropriate price. It becomes difficult.

In that case, the conventional technique of superimposing the displacement detection application signal directly on the control voltage is continuously used.
However, the method of detecting the signal component related to the displacement detection application signal in the output stage circuit of the control voltage by reversing the flow of the displacement detection signal from that of the prior art requires almost no sacrifice of the control voltage. In addition, there are many advantages over the prior art in that the level of the displacement detection application signal can be set almost freely without being restricted by the control voltage.

  Accordingly, a signal detection circuit having a new configuration different from any of the above has been devised on the premise of adopting a technique of applying a displacement detection signal to the displacement detection electrode and performing detection closer to the control circuit than the control electrode. The main point is that when a displacement detection signal is applied to the displacement detection electrode and the detection is performed closer to the control circuit than the control electrode, a reverse-phase control voltage is applied to the adjacent control electrode and an in-phase displacement detection is performed. An electrostatic levitation type gyro apparatus in which the flow of the displacement detection signal is reversed from that of the prior art by performing signal detection by extracting the in-phase component based on the transmission of the applied signal. The thing was able to be realized. In addition, further contrivance has been added so that the influence of the power supply voltage and the control voltage does not reach the detection signal generation circuit as much as possible. For example, when detecting the flow of the displacement detection signal by reversing the conventional flow, the voltage such as the control voltage is applied. The common-mode detection circuit can be implemented with a passive element so that the restriction by level becomes loose.

  Furthermore, improvements have also been attempted in the activation sequence (operation start procedure, activation control means). FIG. 5 shows a specific example, in which (a) is an outline flowchart of the activation sequence, and (b) to (f) are all signal waveform examples. These are contrasted with the above-described conventional example of FIG. 21 (d) and FIGS. 22 (c) to (g), but the signal waveforms are omitted from the inverted waveforms and the positive voltages YP +, YM +, XP +, XM +. , Only RP + is shown.

  The improvement is that the control electrode is divided into an electrostatic support electrode and a rotation drive electrode, and the generation of the control voltage for the gyro rotor attitude control and the control voltage for the rotation drive by the control circuit is also correspondingly divided. Using this, the start-up sequence is divided into a levitation sequence and a rotation sequence. As a result, the electrostatic levitation gyro apparatus is configured to perform rotational driving after performing the attitude control at the time of activation and confirming the floating of the gyro rotor.

In more detail with reference to FIG. 5A, in the conventional control start (step S12), the attitude control and the rotation drive are performed simultaneously, whereas in this prototype (step S21), the rotation drive does not start. At the same time, attitude control is started. Along with this, the conventional control state waits for stabilization (step S13), and in this prototype, it waits for levitation (step S22) and waits for the relative position of the gyro rotor 10 to fall within a predetermined range.
Then, after the confirmation of ascent is obtained (step S22) and before the application calculation is started (step S14), the rotation drive is started and confirmed (steps S23 to S26).

That is, in the rotation sequence in the latter half of the activation sequence, the rotational drive is started in addition to the position where the attitude control based on the displacement detection has already been performed (step S23). Then, the process waits for a predetermined time required for acceleration (step S24), and then confirms that the rotational speed of the gyro rotor 10 has reached a predetermined speed (step S25), and starts the application calculation (step S14). This is normal startup.
On the other hand, when the rotational speed is insufficient, the acceleration time is again waited (steps S25 → S26 → S24). At that time, ascentment is also confirmed (step S26), and when the ascent state is impaired, the ascending sequence is retried (step S26 → S16).

  An example of the operation in such a starting sequence will be described. Again, for the sake of clear comparison, the gyro rotor 10 is supported by the lower support piece 101 with the gyro mechanism placed with the Y-axis positive direction facing upward. Suppose that Further, the attitude control voltage for generating electrostatic attractive force in the X-axis positive direction on the gyro rotor 10 is defined as a positive voltage XP + and a negative voltage XP- (which correspond to the above-described V1b and V1a), and the static voltage in the X-axis negative direction is set. The attitude control control voltage that generates the electric attractive force is the positive voltage XM + and the negative voltage XM− (these correspond to V12b and V12a described above), and the attitude control control voltage that generates the electrostatic attractive force in the Y-axis positive direction is the positive voltage. YP + and negative voltage YP− are used, and the attitude control voltage for generating electrostatic attractive force in the negative Y-axis direction is set as positive voltage YM + and negative voltage YM−. One of the phase pulse signals is set to a positive voltage RP +.

Also in this case, the components of the displacement detection signals V0, i1 to i12 having a high frequency and the invariant offset components do not affect the movement of the gyro rotor 10. Therefore, if these signal components are ignored, the positive voltage XP + and the negative voltage XP- Is an inverted waveform, the positive voltage XM + and the negative voltage XM− are also inverted waveforms, the positive voltage YP + and the negative voltage YP− are also inverted waveforms, and the positive voltage YM + and the negative voltage YM− are also inverted waveforms.
Furthermore, the case where it starts normally after two starting failures again is taken as a specific example. That is, the start is started at time t1, the start is interrupted at time t2, the start is restarted at time t3, the start is stopped again at time t4, the start is restarted at time t5, the start is successful at time t6, and the steady state is reached. Enter.

  Then, immediately after the start of the start (time t1 to t2), the positive voltage YP + and the negative voltage YP− that generate the levitation force become the maximum output so as to eliminate the subsidence state of the gyro rotor 10 (see FIG. 5B). On the other hand, the positive voltage YM + and the negative voltage YM− are the minimum outputs (see FIG. 5C), and the positive voltage XP +, the negative voltage XP−, the positive voltage XM +, and the negative voltage acting in the direction perpendicular to the flying direction and the sinking direction. XM- becomes an intermediate output (see FIGS. 5D and 5E). Although illustration and detailed description are omitted, control voltages in the Z direction, φ, and θ directions are also appropriate intermediate outputs. Unlike the conventional case, the positive voltage RP + that generates the rotational driving force is not output (see FIG. 5F).

Even if the state is continued, when the predetermined time has passed without the gyro rotor 10 being lifted, the attitude control is interrupted. In this state (time t2 to t3), the output of all control voltages is suppressed (see FIGS. 5B to 5F).
Then, when the posture control is resumed after a predetermined time has elapsed (time t3 to t4), the positive voltage YP + and the negative voltage YP− are the maximum output, the positive voltage YM + and the negative voltage YM− are the minimum output. Other attitude control positive voltages XP + and the like are intermediate outputs. Again, the positive voltage RP + is not output.
If it still does not rise, the control is interrupted again (time t3 to t4), and the output of all control voltages is suppressed.

At the same time, attitude control is resumed after a predetermined time (time t5), and again, the positive voltage YP + and the negative voltage YP− are the maximum output, the positive voltage YM + and the negative voltage YM− are the minimum output, and other positive voltages XP + etc. are intermediate outputs. The positive voltage RP + is not output.
When the gyro rotor 10 is levitated (time t6), the positive voltage YP + and the negative voltage YP− that generate levitation force are changed from the maximum output to the intermediate output (see FIG. 5B), and the positive voltage YM + attracting the positive voltage YP + And the negative voltage YM- also changes from the minimum output to the intermediate output (see FIG. 5C).

  In this way, when the relative displacement of the gyro rotor 10 with respect to the gyro case 20 is within a predetermined allowable range, that is, when it is detected and confirmed by displacement detection or the like, the activation sequence shifts from the ascent sequence to the rotation sequence. The positive voltage RP + that generates the rotational driving force is in a pulse output state (see FIG. 5F). The gyro rotor 10 floating in a vacuum usually starts to rotate smoothly and is further accelerated to reach a predetermined rotational speed. Thereafter (from time t6), the above-described steady state attitude control and rotational driving are performed, and application calculations such as acceleration calculation are also performed.

[Technical Problem to be Solved by the Invention]
As described above, in the electrostatic levitation type gyro apparatus of this prototype, the attitude control is performed at the time of activation by utilizing the fact that the electrostatic support electrode and the rotation drive electrode can be individually controlled. Since the rotary drive is performed after confirming the floating of the rotor, it is possible to avoid rubbing between the gyro rotor 10 and the support piece 101 during startup. Therefore, it is possible to reliably prevent an undesired situation in which dust such as a scraping piece is generated from the contact portion between the two. Since the support piece 101 is on the outer peripheral side of the gyro rotor 10, when the gyro rotor 10 rotates, the relative speed between the gyro rotor 10 and the support piece 101 immediately increases. It is easy to be scratched.

By reducing the generation of dust in the gyro rotor storage space, failures due to dust are reliably reduced. In addition, it is expected that there will be fewer startup failures due to garbage.
However, in such an electrostatic levitation type gyro device, since the rotational force of the pulse drive does not work in the levitation sequence, and the influence thereof is great, the levitation ability is somewhat reduced. When there is a pulse-driven rotational force, this causes micro vibrations in the gyro rotor 10, etc., so that generally strong static friction is generally changed to weak dynamic friction, or microscopic adhesion that generates intermolecular force is broken, A natural oxide film that prevents undesired electrostatic attraction that is not controlled and is prevented from being completely discharged, but this is considered to be because such an opportunity is reduced by the post-rotation drive.

  In addition, the displacement detection signal having a high frequency does not affect the motion of the gyro rotor 10 after the gyro rotor 10 is lifted. In the initial state before the lift, the neutral position in the gyro case 20 in the lifted state. In this state, the electrostatic force that increases the displacement between the electrodes of the gyro case and the gyro rotor is acted on by the displacement detection signal. . This undesired action is stronger as the deviation is larger and stronger as the signal is larger. The action of the control voltage for attitude control is weakened to prevent the gyro rotor from rising. Therefore, an effort to increase the amplitude voltage of the displacement detection application signals (f1 to f12, V0) in order to ensure an appropriate level of the displacement detection detection signals (Vp, i1 to i12, r1 to r6) Aside from the steady state, if you look at the initial start-up before ascending, you may even get to the back.

Therefore, while assuming the use of a startup sequence in which the attitude control is performed at startup to confirm the floating of the gyro rotor and then the rotation is driven, the displacement at startup is improved to overcome the drawbacks and improve the flying capability. Devising ingenuity in detection methods and activation sequences is a technical issue.
The present invention has been made to solve such a problem, and an object thereof is to realize an electrostatic levitation type gyro apparatus that floats at a high rate without rubbing the rotor.

  The electrostatic levitation type gyro apparatus of the present invention (Solution 1) has been devised to solve such a problem, and as described in claim 1 at the beginning of the application, the gyro rotor can be electrostatically levitated. In addition, a gyro case built rotatably and a control voltage for controlling the attitude and rotation of the gyro rotor are respectively generated on the electrostatic support electrode and the rotation drive electrode among the plurality of electrodes formed on the gyro case. And a signal detection circuit that transmits and receives a relative displacement detection signal between the gyro rotor and the gyro case via a displacement detection electrode to which the control voltage is not applied among the plurality of electrodes. In the electrostatic levitation type gyro apparatus, an activation control means for performing rotation control after performing the attitude control at the time of activation to confirm the floating of the gyro rotor, and the relative displacement detection A gain variable section disposed on each of the signal application side and the detection side, and a gain variable control circuit that gradually increases the application-side gain of the gain variable section and gradually decreases the detection-side gain during the confirmation of levitation by the activation control means; It is a thing with.

  Further, the electrostatic levitation gyro apparatus of the present invention (solution 2) is the electrostatic levitation gyro apparatus of the solution 1, as described in claim 2 at the beginning of the application, wherein the control voltage for attitude control is used. Or a higher levitation control voltage is applied to the electrostatic support electrode so that the activation control means activates the levitation enhancement means when the gyro rotor levitation confirmation is not established. It is a thing.

  Further, the electrostatic levitation type gyro apparatus of the present invention (solution 3) is the electrostatic levitation type gyro apparatus of the solution 2, as described in claim 3 at the beginning of the application, wherein the levitation enhancing means is A subsidence control voltage for driving the gyro rotor is generated in the opposite direction to the attitude control control voltage or the levitation control voltage, and this is also intermittently applied to the electrostatic support electrode. That's it.

Further, the electrostatic levitation type gyro apparatus of the present invention (solution means 4) is the electrostatic levitation type gyro apparatus of the above solution means 2 and 3, as described in claim 4 at the beginning of the application, wherein the levitation enhancement means. However, a swing control voltage for driving the gyro rotor in a direction orthogonal to or obliquely intersecting with the attitude control control voltage or the levitation control voltage is generated and applied to the electrostatic support electrode. It is that.
Alternatively, as described in claim 6 at the beginning of the application, in the electrostatic levitation type gyro apparatus of the solving means 1, the levitation for applying a control voltage for causing rolling of the gyro rotor to the electrostatic support electrode Strengthening means is provided, and the activation control means is configured to activate the levitation strengthening means when the confirmation of levitation of the gyro rotor is not established.

  The electrostatic levitation type gyro apparatus of the present invention (Solution means 5) is the electrostatic levitation type gyro apparatus of the above solution means 2 to 4, as described in claim 5 at the beginning of the application. Is designed to change the intermittent period.

  In such an electrostatic levitation type gyro apparatus of the present invention (Solution 1), the activation control means is activated at the time of activation, whereby the attitude control is first performed, and the gyro rotor is floated by this attitude control. Is confirmed based on the signal detection, the rotational drive of the gyro rotor is performed thereafter. Therefore, in a state where the gyro rotor is in contact with the gyro case at the time of initial start-up, the rotational drive is never performed, so there is no possibility that the contact support surface of the gyro rotor is rubbed.

Further, at the time of such initial start-up, the gain (gain, signal amplification factor) on the application side is related to the relative displacement detection signal by the gain variable section and the variable gain control circuit until the rotor floating is confirmed. Is gradually increased from a minute level to a steady level. On the other hand, on the detection side, the gain is gradually reduced from a large level to a steady level.
If the application-side gain is small, the displacement detection application signals (f1 to f12, V0) are also small and the levitation-preventing force due to the offset of the gyro rotor is weakened, so that the levitation force due to attitude control is not diminished. It will work well.

On the other hand, the displacement detection detection signals (Vp, i1 to i12, r1 to r6) are also reduced simply by reducing the displacement detection application signal, which causes inconvenience in the displacement detection calculation, etc. In the case of the signal detection circuit of the present invention. While the gain on the applied side is small, the gain on the detection side is large and they cancel each other, so that the detection signal for displacement detection can be obtained at an appropriate level. In addition, if the applied signal for displacement detection is small, the S / N (signal / noise) ratio is lowered, but such a state is only in the initial stage, and gradually increases / decreases until the rising is confirmed. Since it is in a steady state, there is no inconvenience in attitude control and rotational driving after ascent.
Therefore, according to the present invention, it is possible to realize an electrostatic levitation type gyro apparatus that floats at a high rate without rubbing the rotor.

  Further, in the electrostatic levitation type gyro apparatus of the present invention (solution 2), in addition to the above-described levitation enhancement during the confirmation of levitation, another levitation enhancement is performed at the time of levitation failure. That is, when the confirmation of the floating of the gyro rotor is not established, the levitation enhancing means is activated by the activation control means, whereby the attitude control control voltage or the levitation control voltage higher than this is intermittently interrupted, Applied to the electrostatic support electrode. By such intermittent application to the electrostatic support electrode, even if there is no pulse-like rotational drive, not only the force to lift the gyro rotor but also the force to vibrate it works. Regardless of whether the undesired force that prevents levitation is caused by frictional force, intermolecular attractive force, residual electrostatic attractive force, or dust adhesion, it is suppressed. Therefore, the levitation force by the posture control functions sufficiently without being reduced. In addition, since the rotational drive is not yet performed in this state, there is no possibility of rubbing the contact support surface of the gyro rotor. Therefore, according to the present invention, it is possible to realize an electrostatic levitation type gyro apparatus that floats at a higher rate without rubbing the rotor.

  Further, in the electrostatic levitation type gyro apparatus of the present invention (solution 3), when the levitation force depends on the electrostatic attraction, if it is normal posture control, the contact support side is in the subsidence state. Although no effective control voltage is applied to the electrostatic support electrode, in the electrostatic levitation type gyro apparatus of the solving means 3, when the confirmation of the levitation of the gyro rotor is not established, either the attitude control control voltage or the levitation control is applied. The voltage is intermittently applied to the electrostatic support electrode on the remote side, and the subsidence control voltage is intermittently applied to the electrostatic support electrode on the contact support side. When applied, the subsidence control voltage drives the gyro rotor in a direction opposite to that of floating, that is, in a direction that causes the gyro rotor to sink, but since the drive is vibrational, when it is not applied, the gyro rotor reacts against the gyro rotor based on the elastic force from the contact surface. Power works. As a result, the force that induces vibration in the gyro rotor increases, and as a result, the levitation prevention force decreases.

In the electrostatic levitation type gyro apparatus of the present invention (solution 4), when the confirmation of levitation is not established, the gyro rotor is swung by applying a control voltage to the electrostatic support electrode instead of the rotation drive electrode. Rolling is triggered.
In the swinging / rolling state, unlike the rotating operation, the movement in the surface direction on the sinking side / contact support side that causes rubbing is avoided / suppressed, and the source force of the swinging / rolling is the same as when using an insulator. It changes the direction of contact as a fulcrum or action point and works in the flying direction.
In this way, not only the levitation force of attitude control but also the levitation force different from that is added, so the levitation mechanism is diversified and the chance of levitation increases, so even if there is no rotational drive, the gyro rotor has a high probability Will surface.

Further, in the electrostatic levitation type gyro apparatus of the present invention (solution 5), when using vibration, the effect is increased by adjusting the vibration period to the natural frequency. In addition to individual variations due to dimensional differences, etc., there are various causes that prevent the gyro rotor from rising, and because these and contact conditions affect the natural frequency, the optimal vibration period can be estimated to some extent. But it cannot be confirmed. On the other hand, in the electrostatic levitation type gyro apparatus of the solving means 4, since the intermittent period changes, it is expected that the vibration period induced in the gyro rotor will be in an optimal state at any timing. The
As a result, the vibration induced in the gyro rotor is enhanced, and consequently the levitation preventing force is reduced.

  Several forms for implementing the electrostatic levitation type gyro apparatus of the present invention achieved by such a solution will be described.

The first embodiment of the present invention is an electrostatic levitation type gyro apparatus as the above-described solution, and adopts a new configuration in a signal detection circuit in which the flow of a displacement detection signal is reversed from that of the conventional one.
That is, a gyro case in which the gyro rotor is electrostatically levitated and rotatably incorporated, and among the plurality of electrodes formed on the gyro rotor, the electrostatic support electrode and the rotation drive electrode are used for attitude control and rotation of the gyro rotor. A control circuit that generates and applies a control voltage for driving, and an application that applies a displacement detection application signal for detecting a relative displacement between the gyro rotor and the gyro case to a part of the plurality of electrodes. A signal component related to the displacement detection application signal is detected after passing through a signal supply circuit and a displacement detection electrode to which the control voltage is not applied among the plurality of electrodes, and a displacement detection detection signal is generated and the control is performed. A plurality of detection signal generation circuits to be sent to the circuit, and a plurality of the control voltages provided for the control circuit, for at least attitude control. In an electrostatic levitation gyro apparatus including an output stage circuit that generates a pair of phases and distributes and applies to adjacent ones of the plurality of electrodes, the application signal supply circuit includes the displacement detection application A signal is applied to the displacement detection electrode, and the detection signal generation circuit includes a plurality of common-mode detection circuits attached to the output side of each of the output stage circuits, and the common-mode detection circuit includes: Each of them is an output of an output stage circuit at an attachment destination, and a signal component related to the displacement detection application signal is detected by extracting an in-phase component from a pair of opposite-phase relations. .

  In the electrostatic levitation type gyro apparatus of such an embodiment, the displacement detection signal is applied to the displacement detection electrode, and then transmitted to the plurality of control electrodes via the gyro rotor, and the corresponding output stage. Reach the output side of the circuit. Since the capacitance change of each control electrode is reflected in the transmission state and transmission level at that time, if the signal component related to the displacement detection applied signal is detected, the gyro rotor and the gyro case are detected based on the detected value. Relative displacement can be calculated.

  The detection is performed by extracting the in-phase component based on the fact that the displacement detection application signal is transmitted to the adjacent electrodes in the same phase. In addition, since a reverse-phase control voltage is applied to such adjacent control electrodes, in-phase component extraction is performed using electronic components that have high withstand voltage and high response, such as passive elements. It can be embodied. For example, it can be performed by a method such as addition of signals or partial pressure. As a result of such extraction, the detection signal for displacement detection is separated from the control voltage and becomes a single signal. Therefore, high voltage resistance performance like the output stage circuit of the control circuit is no longer required for the subsequent processing. Not.

In this way, a displacement detection signal is applied to the displacement detection electrode to perform detection nearer to the control circuit than the control electrode, and at that time, an opposite-phase control voltage is applied to the adjacent control electrode and the in-phase is detected. Since the detection of the signal component related to the displacement detection application signal is performed by extracting the in-phase component based on the transmission of the displacement detection application signal, current detection is performed by providing a current mirror or the like. Even if it is different from the above, it is possible to appropriately detect a desired signal.
Therefore, according to this embodiment, it is possible to realize a new electrostatic levitation gyro apparatus in which the flow of the displacement detection signal is reversed from the conventional one.

  Embodiment 2 of the present invention is the electrostatic levitation type gyro apparatus according to Embodiment 1 described above, wherein each of the in-phase detection circuits is composed of a series circuit of capacitive elements and has a reverse phase output (that is, an output pair having mutually opposite phases). ) And a frequency component of the control voltage provided between the midpoint voltage detection circuit for detecting a midpoint voltage (that is, a voltage intermediate between both signals) and the midpoint voltage detection circuit and the output stage circuit to which it is attached. Is provided with a current limiting circuit that does not pass the current of the frequency component of the displacement detection application signal.

In the electrostatic levitation type gyro apparatus according to such an embodiment, the common-mode detection circuit is embodied by a midpoint voltage detection circuit and a current limiting circuit, and the midpoint voltage detection circuit is a passive element. This is embodied in a series circuit. The current limiting circuit is also easily embodied by a passive element such as a resistor. By the presence of this current limiting circuit, the displacement detection application signal is transmitted to the midpoint voltage detection circuit without escaping to the output stage circuit.
Such an in-phase detection circuit is composed of passive elements, and has high withstand voltage and high response and is inexpensive.
Therefore, according to this embodiment, it is possible to realize an electrostatic levitation type gyro apparatus that is less constrained by a voltage level such as a control voltage when detecting the flow of a displacement detection signal in the reverse direction.

  With respect to the electrostatic levitation type gyro apparatus of the present invention achieved by such a solution and the embodiment, specific modes for carrying out this will be described with reference to the following first to seventh embodiments. The first embodiment shown in FIGS. 6 to 7 embodies the above-described solution 1 (initial claim 1), and the second embodiment shown in FIGS. 8 to 9 is the first embodiment described above. The third embodiment shown in FIGS. 10 to 13 also embodies the above-described second embodiment and solution means 2 (initial claim 2), and the implementation shown in FIG. Example 4 embodies the above-described solving means 3 (initial claim 3), and the fifth embodiment shown in FIGS. 15 to 16 is one of the above-described solving means 4 (initial claim 4). The sixth embodiment shown in FIG. 17 is an embodiment of the above-described solution 5 (initial claim 5), and the embodiment 7 shown in FIG. 18 is the above-described solution. 4, the solution means 5 (initial claim 5) is embodied.

It should be noted that in the illustration, the premise technology column in the background technology column, the conventional technology column in the background technology column, and the undisclosed prior art column in the problem to be solved by the invention are also shown. Since the same reference numerals are given to the same constituent elements as those mentioned in the above, the gyro mechanism described in the column of the premise technique is also used as it is in the following embodiments. The description will not be repeated, and the following description will focus on differences from known prior art and undisclosed prior art.
Also here, for the sake of clear contrast and the like, a specific example of the electronic circuit unit corresponding to the annular rotor type gyro is taken.

  A specific configuration of the electrostatic levitation gyro apparatus according to the first embodiment of the present invention will be described with reference to the drawings. 6A is a plan view of the package with the lid removed, and FIG. 6B is a longitudinal front view. 7A is an overall circuit diagram including the signal detection circuit, FIG. 7B is a time chart showing the gain change of the displacement detection applied signal, and FIG. 7C is the gain change of the displacement detection signal. It is a time chart.

  This electrostatic levitation type gyro device (see FIGS. 6 and 7) is different from the previously described examples of the prior patent applications 1 and 2 (see FIGS. 1 to 4) and the conventional example (see FIGS. 19 to 22). These are improvements regarding the packaging method (FIG. 1 → FIG. 6) and improvements regarding the signal detection circuit (FIG. 20 → FIG. 7).

  First, improvements regarding the packaging method will be described. The electrostatic levitation gyro apparatus 97 shown in FIG. 6 is an improvement of the above-described one shown in FIG. 1, and the base 73 has a disk shape so that the base 73 of the glass substrate is difficult to break. Yes. Accordingly, the pins 74 are also arranged in a circular shape. The package also has a structure in which a box 71 is covered with a cap 71 and a disk-shaped bottom plate 72 is covered with a circular cap-shaped cap 71.

  Further, the pin 74 is disengaged from the base 73 toward the outer peripheral side, and the joint between them is no longer a rigid joint. The electrical connection between the two is made by a bonding wire 99, and the mechanical connection for supporting the base 73 by floating from the package bottom plate 72 is made by an elastic support member 98 made of, for example, a leaf spring. Thus, the elastic support member 98 is interposed between the pin 74 and the base 73 so that the base 73 is elastically supported only by the elastic support member, thereby improving the function of absorbing the impact. As a problem when an impact is applied, in addition to damage to the base 73, if the rotor collides with the electrode or the stopper and the rotation of the rotor stops, it is necessary to repeat the flying and rotation sequence. It can be avoided.

  Next, regarding the signal detection circuit, the signal detection circuit shown in FIG. 7 (a) is based on the conventional circuit of FIG. 20 (a) instead of the undisclosed prior art of FIG. 2 (a). However, the difference between the signal detection circuit of FIG. 7A and that of FIG. 20A is that the amplifier 60a as the gain variable section on the application side of the relative displacement detection signal is the displacement detection applied signal. a point interpolated in each of the signal lines f1 to f12, a point where an amplifier 60b as a gain variable section on the detection side of the relative displacement detection signal is inserted in the signal line of the displacement detection detection signal Vp, A gain control circuit 60 is added to perform variable gain control that gradually increases the gain of the amplifier 60a, that is, the applied-side gain Ga and gradually decreases the gain of the amplifier 60b, that is, the detection-side gain Gb, while the flying sequence is confirmed during the startup sequence. Is a point. The starting sequence employs the undisclosed prior art (starting control means) shown in FIG. 5. At the initial starting time, attitude control is performed (step S21), and the gyro rotor is confirmed to rise (step S22). , S15) and rotational driving is performed (step S23).

  In order to enable variable control of the application-side gain Ga and the detection-side gain Gb by the gain control circuit 60, amplifiers 60a and 60b having variable amplification factors (gains) are employed. The amplifier with variable gain may be one using a commercially available individual IC, or may be incorporated into ICs 77 and 78 (integrated circuits) using an LSI design system library or the like. For example, a known configuration example will be described. Based on an inverting amplifier or a non-inverting amplifier in which a resistance is provided between the signal input section and the feedback section of an operational amplifier (operational amplifier), a variable resistance is adopted as one or both of the input resistance and the feedback resistance. The value is changed according to the control of the gain control circuit 60.

The amplifier 60a is located upstream of the connection point (or waveform synthesis circuit) of the two signal lines where the displacement detection application signals f1 to f12 are superimposed on the attitude control control voltages V1 to V12, that is, on the application signal generation circuit side. At the application signal supply circuit side, the displacement detection application signals f1 to f12 are inserted in the respective signal lines.
The amplifier 60b is connected to the signal line of the displacement detection detection signal Vp upstream of where the displacement detection detection signal Vp is input to the rotor control circuit 52 and the control arithmetic circuit 53, that is, on the current detection circuit 51 side. It is inserted.

  In the start-up sequence (see FIG. 5A), the gain control circuit 60 sets time t0 when the attitude control starts (step S21), and when the time spent for checking the floating of the gyro rotor 10 has elapsed (step S15). When time t1 is reached, the application-side gain Ga is gradually increased from “0” to “1” from time t0 to time t1, and when the gyro rotor 10 rises during that time (step S22 → S23), time t1 Thereafter, the application-side gain Ga is fixed to “1” (see FIG. 7B). When the confirmation of flying is not established (step S15 → S16 in FIG. 5A), the application side gain Ga is set to “0”.

  As for the detection side gain Gb, the detection side gain Gb is applied in order to maintain the total gain of the displacement detection signal determined by the gain obtained by multiplying the application side gain Ga and the detection side gain Gb at an appropriate value “1”. The reciprocal of the side gain Ga is set (see FIG. 7C). However, in order to prevent the detection-side gain Gb from becoming excessively large and the displacement detection and consequently the flying operation by the attitude control from being undesirably destabilized, the detection-side gain Gb has a certain level (in FIG. 10 ") is not increased (see the portion immediately after time t0 in FIG. 7C).

  The use mode and operation of the electrostatic levitation type gyro apparatus according to the first embodiment, particularly the signal detection circuit, will be described. Here, the difference from the above-described one (FIGS. 20, 22, and 5) will be described. The difference is in the midst of the confirmation of ascent in the startup sequence (steps S22 and S15 in FIG. 5A, FIG. 5). At times t1 to t2, times t3 to t4, and times t5 to t6 in (b) to (e) and FIGS. 22C to 22F, the application-side gain Ga related to the displacement detection application signals f1 to f12 is That is, “0” is gradually increased from “1”, and the detection-side gain Gb related to the displacement detection detection signal Vp is gradually decreased from “10” to “1”.

In this way, at the initial start-up time when the gyro rotor 10 is levitated, since the application-side gain Ga is smaller than the steady value “1”, the displacement detection application signals f1 to f12 are also correspondingly small. Then, immediately after the start of activation (time t1 to t2) or after restarting (time t3 to t4, t5 to t6), even if the gyro rotor 10 is offset downward in the gyro case 20 and is far away from the neutral position. Of the electrostatic force that increases the offset between the electrodes of the gyro case 20 and the gyro rotor 10, those due to the displacement detection signal can be kept small.
As a result, the force to prevent undesired levitation caused by the gyro rotor being offset becomes weaker, so even if the rotational drive is suspended until the gyro rotor levitates at startup, the levitation force due to attitude control will work sufficiently without being reduced. The gyro rotor 10 is likely to float.

  Further, when the application-side gain Ga is smaller than “1”, the detection-side gain Gb is larger than “1”, and the total gain (total amplification factor) of the displacement detection signal is substantially maintained at the steady value “1”. Therefore, since the detection signal Vp for displacement detection maintains an appropriate level suitable for the displacement detection calculation in the control calculation circuit 53, the attitude control is performed so as to eliminate the deviation of the gyro rotor 10. 10 rises quickly. When the rising of the gyro rotor 10 is confirmed, the startup sequence shifts from the flying sequence to the rotation sequence, and after reaching a predetermined rotation speed (from time t6), posture control and rotation drive in a steady state are performed. As described above, the application calculation such as the acceleration calculation is also performed. In this state, the application-side gain Ga and the detection-side gain Gb are maintained at the steady value “1”.

  A specific configuration of the electrostatic levitation gyro apparatus according to the second embodiment of the present invention will be described with reference to the drawings. 8A is an overall circuit diagram including a signal detection circuit, FIG. 8B is a displacement detection application signal generation circuit, and FIG. 8C is a detection signal generation circuit. FIG. 9A is a detailed view of a control voltage application portion, and FIGS. 9B to 9F are signal waveform examples.

This electrostatic levitation type gyro device is different from the above-described examples of the prior patent applications 1 and 2 in the improvement regarding the signal detection circuit (FIG. 2 → FIG. 8).
Similarly to the first embodiment, this signal detection circuit is configured to gradually increase and decrease the gain of the displacement detection signal at the time of startup. However, unlike the first embodiment, the base (premise circuit) is the conventional circuit of FIG. It is not yet disclosed prior art in FIG.
Therefore, the gain control circuit 60 is the same as that of the first embodiment, but the amplifiers 60a and 60b are different in the number of insertion points.

That is, the amplifier 60a that varies the application-side gain Ga is inserted in the output line of the application signal generation circuit 61 so that the displacement detection application voltage signal V0 is steady from a very small level (amplification factor “0”) during the levitation sequence. The level is gradually increased to the level (amplification rate “1”).
An amplifier 60b that varies the detection-side gain Gb is inserted in the output line of each of the large number of current detection circuits 64 so that the displacement detection detection currents i1 to i12 are at a high level (amplification factor “10”) during the levitation sequence. ) To a steady level (amplification factor “1”).

  Also in this case (see FIG. 9), the difference from the above-described one (FIGS. 2, 4 and 5) is that during the ascent check in the activation sequence (steps S22 and S15 in FIG. 5A, FIG. At time t1 to t2, time t3 to t4 and time t5 to t6 in FIGS. 5 (b) to (e) and FIGS. 22 (c) to 22 (f), the displacement detection applied voltage signal V0 and the displacement detection applied current i0. The application-side gain Ga according to the above increases gradually from “0” to “1”, and the detection-side gain Gb related to the displacement detection detection currents i1 to i12 gradually decreases from “10” to “1”.

  In this way, at the initial start-up time when the gyro rotor 10 is levitated, since the application-side gain Ga is smaller than the steady value “1”, the displacement detection applied voltage signal V0 and the displacement detection applied current i0 are also correspondingly reduced ( Refer to the solid line waveforms in FIGS. 9C and 9D, where the broken line waveform is proportional to the fixed gain). Therefore, in this case as well, the force for preventing undesired levitation caused by the gyro rotor being offset becomes weaker, so even if the rotational drive is suspended until the gyro rotor levitates at startup, the levitation force due to attitude control is not diminished. It works sufficiently and the gyro rotor 10 is likely to float.

  Further, when the application side gain Ga is smaller than “1”, the detection side gain Gb is larger than “1” so that the total gain (total amplification factor) of the displacement detection signal is generally maintained at the steady value “1”. Therefore, the displacement detection detection currents i1 to i12 are maintained at an appropriate level suitable for the displacement detection calculation or the like in the control calculation circuit 63 (refer to the solid line waveform in FIG. 9E, and the broken line waveform is variable in gain Ga). In contrast, the gain Gb is fixed. When the flying of the gyro rotor 10 is confirmed, the application-side gain Ga and the detection-side gain Gb are kept at the steady value “1” as described in the first embodiment.

  A specific configuration of the electrostatic levitation gyro apparatus according to the third embodiment of the present invention will be described with reference to the drawings. 10A is an overall circuit diagram including a signal detection circuit, FIG. 10B is a displacement detection application signal generation circuit, and FIG. 10C is a detection signal generation circuit. FIG. 11A is a detailed diagram of the control voltage application portion and the detection signal generation circuit. Further, FIG. 12A is an outline flowchart of the activation sequence, and FIG. 12B is an outline flowchart of the levitation enhancement process.

  This electrostatic levitation type gyro device (see FIGS. 10 to 12) is different from the previously described examples of the prior patent applications 1 and 2 (see FIGS. 1 to 5) and the second embodiment (see FIGS. 8 to 9). What is to be improved is the improvement relating to the signal detection circuit (FIG. 2 → FIG. 8 → FIG. 10) and the improvement relating to the activation sequence (activation control means) (FIG. 5 → FIG. 12).

  First, the difference between the signal detection circuits will be described. The signal detection circuits shown in FIGS. 10 and 11 are different from those shown in FIGS. 2 to 4 and 8 in that the applied signal generation circuit 61 for generating a rectangular wave current is used. Is the application signal generation circuit 90 for generating a rectangular wave voltage, and the common-mode detection circuit 91 is the main part of the detection signal generation circuit instead of the current detection circuit 64. Accordingly, the insertion point of the amplifier 60a becomes the displacement detection applied voltage signal V0 output line of the applied signal generation circuit 90 (see FIG. 10B), and the insertion point of the amplifier 60b becomes the common-mode detection circuit. There are 91 output lines for detecting displacement detection signals m1 to m12 (see FIG. 10C), but the gain control circuit 60, the control arithmetic circuit 63, etc. (see FIG. 10A) etc. are basically the other. The same.

  The applied signal generation circuit 90 (see FIG. 10B), like the applied signal generation circuit 61, is a sinusoidal wave as the displacement detection application signal V0 if it satisfies the requirement that the frequency is high enough not to affect the motion of the gyro rotor 10. In this case, in order to generate a rectangular wave signal suitable for digitization, the clock CLKa is amplified by the amplifier 60a to generate the displacement detection applied voltage signal V0. Also in this case, since the displacement detection applied voltage signal V0 is applied to the displacement detection electrodes 38 and 48, the amplitude of the displacement detection applied signal V0 can be arbitrarily set within the range allowed by the power supply voltage.

The common-mode detection circuit 91 is provided for each control output circuit 54 (see FIG. 10A), and each (see FIG. 10C) includes one midpoint voltage detection circuit 92 and two current limiting circuits 93. Therefore, it is attached to the output side of the control output circuit 54.
The control output circuit 54 for applying the control voltage V1 to the electrostatic support electrode 31 will be described as a specific example (see FIG. 10C). As described above, the electrostatic support electrode 31 is adjacent to the electrostatic support electrode 31. The control electrode V1 is composed of a support electrode 31a and an electrostatic support electrode 31b, and the control voltage V1 is divided into a pair of a negative voltage V1a and a positive voltage V1b that are in opposite phase to each other, and the positive voltage V1b is an electrostatic support electrode. The negative voltage V1a is applied to the adjacent electrostatic support electrode 31a.

  On the premise of this, the common-mode detection circuit 91 detects the signal component m1 related to the displacement detection applied voltage signal V0 by extracting the common-phase component from the reverse-phase outputs V1a and V1b of the control output circuit 54 to which it is attached. Then, this is amplified by the amplifier 60b and sent to the control arithmetic circuit 63 instead of the displacement detection detection current i1 as the displacement detection detection signal m1. For this reason, the midpoint voltage detection circuit 92 Both the negative voltage V1a line and the positive voltage V1b line are connected like a bridge, and the current limiting circuit 93 is connected between the midpoint voltage detection circuit 92 and the control output circuit 54, one of which is the negative voltage V1a line. And the other is connected to the positive voltage V1b line.

  As a specific circuit configuration example (see FIG. 11A), the midpoint voltage detection circuit 92 is composed of a circuit in which two capacitors C (capacitance elements) having the same capacitance are connected in series. One end is connected to the positive voltage V1b line, the other end is connected to the negative voltage V1a line, the detection signal m1 is taken out from the connection point between the capacitors C, and this signal line extends to the control arithmetic circuit 63 via the amplifier 60a. ing. Each of the current limiting circuits 93 includes a resistor R, and is connected between the output terminal of the control output circuit 54 and the connection point of the capacitor C with respect to each of the negative voltage V1a and positive voltage V1b lines. . Although a detailed description that will be repeated is omitted, the electrostatic support electrode 41 that is opposed to the electrostatic support electrode 31 is similarly provided with a midpoint voltage detection circuit 92 and a current limiting circuit 93 to detect displacement. The detection signal m12 is generated and sent to the control arithmetic circuit 63 via the amplifier 60b. Although the detailed view is omitted, the same applies to the other control electrodes 32 to 36 and 42 to 46.

When the improvement of the activation sequence is further described with respect to the configuration, the activation sequence shown in the flowchart in FIG. 12 is different from that in FIG. This means that instead of simply waiting at the timing of waiting for the passage of time (step S17), the levitation enhancement processing (levitation enhancement means) is executed (step S30).
That is, (steps S31 to S32), when the confirmation of the floating of the gyro rotor is not established, the control voltage for attitude control is doubled if possible to generate the control voltage for floating, and this is intermittently applied to the electrostatic support electrode. It has become.

  In detail, including the above-described part, in this activation sequence (see FIG. 12), after performing a predetermined initialization process such as clearing the working memory (step S11), first, attitude control is performed to perform the ascent sequence. Start (step S21). As a result, posture control and displacement detection necessary for it are performed, but rotation driving is not performed. Then, when the rising of the gyro rotor 10 is confirmed and a positive result is obtained within a predetermined time (steps S22 and S15), that is, when the relative position of the gyro rotor 10 falls within the predetermined range, the process proceeds to the rotation sequence. Then, rotational driving is also started (step S23), a lapse of a predetermined time required for acceleration is waited (step S24), and then it is confirmed that the rotational speed of the gyro rotor 10 has reached a predetermined speed (step S25). Application calculation is started (step S14). This is normal startup.

  On the other hand, when the gyro rotor 10 does not float, the retry is performed as follows. That is, when confirmation of ascent is not obtained after waiting for a predetermined time, for example, about 5 seconds (step S15), it is determined that the ascent has failed and the ascent control is interrupted (step S16), and the ascending reinforcement process is performed (step S30). In this levitation enhancement process, the displacement detection and attitude control are not completely stopped, but the normal attitude control is modified to perform special levitation control. Specifically, first, the calculation mode is switched from the normal mode to the levitation enhancement mode.

  In the levitation enhancement mode, the attitude control voltages V1 to V12 calculated by the normal attitude control calculation are doubled, and those exceeding the maximum outputable value are corrected to the maximum value, and these are controlled for levitation. The voltage is set (step S31). Then, these levitation control voltages are applied to the corresponding electrostatic support electrodes 31 to 36 and 41 to 46 in place of the normal attitude control voltages V1 to V12. (Step S32). Then, the intermittent application is continued for a predetermined time, for example, about 5 seconds, and then the levitation enhancement process is finished (step S33), and then normal posture control is resumed (step S21).

In addition, a retry may be performed by returning from the rotation sequence to the ascending sequence. That is, in the rotation sequence, when the rotation speed is insufficient, the acceleration time is again waited (steps S25 → S26 → S24). At that time, ascentment is also confirmed (step S26), and when the ascent state is impaired, the ascending sequence is retried (step S26 → S16).
Also in this case, during the ascent check in the startup sequence (step S22 in FIG. 12A), the gain control circuit 60 applies the gain on the application side related to the displacement detection applied voltage signal V0 and the displacement detection applied current i0. Ga is gradually increased from “0” to “1”, and the detection-side gain Gb related to the displacement detection detection signals m1 to m12 is gradually decreased from “10” to “1”.

The use mode and operation of the electrostatic levitation gyro apparatus according to the third embodiment will be described with reference to the drawings. FIGS. 11B to 11E are signal waveform examples. 13A is a transverse plan view of the gyro mechanism, FIGS. 13B to 13F are signal waveform examples, and FIGS. 13G and 11H are main parts of the transverse plane of the gyro mechanism. It is an enlarged view.
First, the operation in a steady state after normal startup will be described with reference to FIG. 11 (note that in FIG. 11C, the solid line shows the waveform in the steady state, and the broken line shows the gain change during the levitation sequence at startup) After that, the operation at the time of start-up will be described with reference to FIG.

First, the operation in a steady state will be described (see FIGS. 11B to 11E). Here again, the electrode 31 among the six pairs of electrostatic support electrodes of the annular rotor type will be described in detail.
Then (see FIG. 11B), the offset voltage Vof applied to the electrostatic support electrode 31 and the X-axis control voltage component Vx calculated and changed for posture control are the same as those in the aforementioned prior patent applications 1 and 2. Since it is the same as the description example, the main component output from the control output circuit 54 of the positive voltage V1b is set to + Vof + Vx, and the main component of the negative voltage V1a is set to -Vof-Vx. The main component of the positive voltage V12b is + Vof−Vx, and the main component of the negative voltage V12a is −Vof + Vx.
The negative phase control voltage V1, that is, the negative voltage V1a and the positive voltage V1b are also sent from the control output circuit 54 to the electrostatic support electrode 31, and the displacement detection application signal V0 is directly superimposed thereon. The displacement detection application signal V0 is transmitted from the electrostatic support electrode 31 to the control output circuit 54 in the reverse direction.

  That is, (see FIG. 11C), the applied signal generating circuit 90 generates a displacement detection application signal V0 whose voltage waveform is a rectangular wave with a duty ratio of 50%, and this is applied to the displacement detection electrode 38, the gyro rotor 10, and the like. The voltage is superposed on the control voltage V1 through the electrostatic support electrodes 31 in order. The amplitude of the applied voltage signal V0 for displacement detection can exceed the power supply voltage Vcc of the control output circuit 54 as in the case of the applied signal generating circuit 61 if a booster circuit or the like is added to the applied signal generating circuit 90. It is considerably larger than the conventional displacement detection application signal f1 and the like. On the other hand (see FIG. 11B), since the voltage component superimposed on the control voltage V1 is very small, the waveform of the positive voltage V1b does not greatly deviate from the waveform of the main component + Vof + Vx, and the negative voltage V1a is the main component. Along the −Vof−Vx, each draws a waveform almost the same as the main component.

  Since the applied voltage signal V0 for displacement detection is transmitted in phase to the adjacent electrostatic support electrodes 31a and 3b, it is transmitted to the output line of the control output circuit 54 via the electrostatic support electrode 31. In this case, the control voltages V1a and V1b of the opposite phase are superimposed in the same phase (refer to the solid line graph in FIG. 11B). When this voltage component is m1, the positive voltage V1b is + Vof + Vx + m1, and the negative voltage V1a is -Vof-Vx + m1. Then, the midpoint voltage detection circuit 92 detects a voltage just between the two. This detection signal m1 (see FIG. 11D) includes only the in-phase component related to the displacement detection applied voltage signal V0 because the anti-phase component of the control voltage V1 cancels and does not remain. If the disturbance at the edge or the like is ignored, the waveform becomes a rectangular wave having a frequency corresponding to the clock CLKa, and the amplitude thereof includes the electrostatic capacitance of the electrostatic support electrode 31 and the gyro rotor 10 and the relative displacement between the two. ΔX is accurately reflected.

  Then (see FIGS. 11 (e) and 11 (a)), the detection signal m1 reflecting the X-direction displacement ΔX at the timing of the clock CLKb synchronized with the clock CLKa but shifted in phase, and the electrostatic support electrode The detection signal m12 obtained in the same manner from the 41 side is appropriately amplified and then quantized by the A / D conversion circuit 65, and the other electrostatic support electrodes 32-36 and electrostatic support electrodes 42-46. Similarly, a displacement detection detection signal is obtained by the in-phase detection circuit 91, quantized by the A / D conversion circuit 65, and a known calculation for posture control is performed by the DSP 66 that has taken them in. Also, the angular velocity and acceleration with respect to the inertial space are calculated. Thus, also in this case, posture control, acceleration detection, and the like are appropriately performed. Further, although the signs of the displacement detection detection signals r1 to r6 are not changed in the drawing, they are also obtained as voltage signals instead of current signals, which are binarized and taken into the DSP 67, and D67SP that takes them in. Thus, a known calculation for rotational driving is performed.

  The capacitance of the capacitor C and the resistance value of the resistor R are the main components of the control voltage V1 in consideration of the capacitance between the electrostatic support electrode 31 and the gyro rotor 10, the output voltage of the control output circuit 54, and the like. The current of the frequency component included in Vof + Vx passes through the current limiting circuit 93 well (that is, the resistance can be ignored if viewed in a long cycle), but the current of the frequency component of the displacement detection applied voltage signal V0 passes through the current limiting circuit 93. It is selected so that it hardly passes (that is, resistance cannot be ignored when viewed in a short period). For example, the frequency of the negative phase component Vx of the control voltage V1 is at most several tens of kHz, the frequency of the displacement detection applied voltage signal V0, that is, the basic frequency of the detection signal m1 is 1 MHz, and the electrostatic support electrode 31 is static. When the capacitance is about 0.1 pF, the capacitor C and the resistor R may be 20 pF and 250 kΩ, respectively.

Thus, the control voltage V1 is appropriately applied to the electrostatic support electrode 31 regardless of the presence or absence of the in-phase detection circuit 91. In addition, the signal component related to the applied voltage signal V0 for displacement detection is generally transmitted to the midpoint voltage detection circuit 92 by the current limiting circuit 93 without being absorbed by the control output circuit 54 having a small output impedance. Therefore, the detection signal m1 is reliably detected with a small amplitude. The same applies to the other detection signals for displacement detection.
Thus, the rotor attitude control is appropriately performed. Similarly, rotor rotation driving with a fundamental frequency of at most several hundred Hz is also appropriately performed.

  As is apparent from the above description, in the signal detection circuit of the electrostatic levitation gyro according to the present embodiment, the displacement detection applied voltage signal V0 can be easily expanded as necessary, and the control is performed. Since the voltages V1, V12, etc. can be expanded to near the power supply voltage Vcc of the control output circuit 54, even if the capacity of the plurality of electrodes 31 to 48 is reduced due to downsizing of the gyro mechanism, a sufficient signal level is secured. In addition to properly detecting the displacement, it contributes to the improvement of the attitude control performance. Furthermore, even if the capacitor C and the resistor R as described above correspond to a frequency of several MHz or more, those having a withstand voltage performance of several tens of V or more can be easily obtained. The present invention is applicable not only to a small gyro device having a power supply voltage Vcc, control voltage V1, etc. of several volts, but also to an electrostatic levitation type gyro device having a power supply voltage Vcc, control voltage V1, etc. exceeding tens of volts. be able to.

  Next, the operation at the time of startup will be described in detail (see FIG. 13). Here, for the sake of clear comparison, it is assumed that the gyro rotor 10 is supported by the lower support piece 101 in a state where the gyro mechanism portion is placed with the Y-axis positive direction facing upward (see FIG. 13A). Further, the attitude control voltage for generating electrostatic attractive force in the X-axis positive direction on the gyro rotor 10 is defined as a positive voltage XP + and a negative voltage XP- (which correspond to the above-described V1b and V1a), and the static voltage in the X-axis negative direction is set. The attitude control control voltage that generates the electric attractive force is the positive voltage XM + and the negative voltage XM− (these correspond to V12b and V12a described above), and the attitude control control voltage that generates the electrostatic attractive force in the Y-axis positive direction is the positive voltage. YP + and negative voltage YP− are used, and the attitude control voltage for generating electrostatic attractive force in the negative Y-axis direction is set as positive voltage YM + and negative voltage YM−. One of the phase pulse signals is set to a positive voltage RP +.

Also in this case, if the components of the displacement detection application signal V0 and the detection signals m1 to m12 having a high frequency and the invariant offset components are ignored, the positive voltage XP + and the negative voltage XP− have inverted waveforms, and the positive voltage XM + and the negative voltage XM− also has an inverted waveform, positive voltage YP + and negative voltage YP− also have inverted waveforms, and positive voltage YM + and negative voltage YM− also have inverted waveforms.
Furthermore, for the sake of comparison, a specific example will be given of a case where normal startup is performed after two startup failures. That is, (see FIG. 13B), the start is started at time t1, the start is interrupted at time t2, the start is restarted at time t3, the start is stopped again at time t4, the start is restarted at time t5, and the time t6 It is assumed that the startup is successful and the steady state is entered.

  Then, immediately after the start of activation (time t1 to t2), normal posture control is executed in the ascending sequence, so that the positive voltage YP + and the negative voltage YP− that generate levitation force are eliminated so as to eliminate the subsidence state of the gyro rotor 10. Becomes the maximum output (see FIG. 13B), and the positive voltage YM + and the negative voltage YM− opposite to them become the minimum output (see FIG. 13C), and the positive voltage acting in the direction perpendicular to the flying direction and the sinking direction. XP +, negative voltage XP−, positive voltage XM +, and negative voltage XM− are intermediate outputs (see FIGS. 13D and 13E). Although illustration and detailed description are omitted, control voltages in the Z direction, φ, and θ directions are also appropriate intermediate outputs. In the levitation sequence, the positive voltage RP + that generates the rotational driving force is not output (see FIG. 13F).

  In addition, in the ascending sequence at the time of activation, regarding the displacement detection signal, as in the first and second embodiments, the application relating to the displacement detection applied voltage signal V0 is also performed during the ascent confirmation. The side gain Ga gradually increases from “0” to “1”, and the detection side gain Gb related to the detection signals m1 to m12 for displacement detection gradually decreases from “10” to “1”. Then, at the initial start-up time when the gyro rotor 10 is levitated, the displacement detection applied voltage signal V0 becomes smaller corresponding to the applied-side gain Ga being smaller than the steady value (see the broken line waveform in FIG. 11C). Therefore, in this case, the gyro rotor 10 can easily float. In this case as well, when the application-side gain Ga is small, the detection-side gain Gb is large and the total gain of the displacement detection signal is maintained at a steady value “1”. Therefore, the displacement detection detection signals m1 to m12 are An appropriate level suitable for the displacement detection calculation in the control calculation circuit 63 is maintained (see FIG. 11D).

  However (see FIG. 13), even if the above state is continued, when a predetermined time elapses without the gyro rotor 10 being lifted, the normal posture control is interrupted and the routine proceeds to a special lifting control by the lifting enhancement process. During execution of this levitation control (time t2 to t3), each attitude control voltage is doubled and intermittently applied (see FIGS. 13B to 13F). Specifically, the positive voltage YP + and the negative voltage YP− are intermittently applied with the maximum output even if they are doubled (see FIG. 13B), and the positive voltage YM + and the negative voltage YM− are almost the minimum output even if they are doubled. The positive voltage XP +, the negative voltage XP−, the positive voltage XM +, and the negative voltage XM− are doubled and become approximately maximum output and applied intermittently (see FIG. 13 (d). ), (E)). The control voltages in the Z direction, φ, and θ directions are also intermittently applied at a maximum output by doubling. Again, the positive voltage RP + is not output (see FIG. 13F).

When normal posture control is resumed after a lapse of a predetermined time (time t3 to t4), the positive voltage YP + and the negative voltage YP− are the maximum output, and the positive voltage YM + and the negative voltage YM− are the minimum. The output, the positive voltage XP + for other attitude control, etc. are intermediate outputs. Again, the positive voltage RP + is not output. The gradual increase / decrease of the displacement detection signal is also performed again.
If it still does not rise, the normal posture control is interrupted again (time t3 to t4), and the rising reinforcement process is executed. The positive voltage YP + and the negative voltage YP− are intermittently applied at the maximum output, the positive voltage YM + and the negative voltage YM− are approximately the minimum output, and the other positive voltage XP + for posture control is approximately the maximum output. The positive voltage RP + for rotation driving is not output.

Further, normal posture control is resumed after a lapse of a predetermined time (time t5), and again, the positive voltage YP + and the negative voltage YP− are the maximum output, the positive voltage YM + and the negative voltage YM− are the minimum output, A positive voltage XP + or the like becomes an intermediate output. The positive voltage RP + is not output.
When the gyro rotor 10 is lifted (time t6), the positive voltage YP + and the negative voltage YP− that generate the levitation force are changed from the maximum output to the intermediate output (see FIG. 13B), and the positive voltage YM + attracting the positive voltage YP + The negative voltage YM− also changes from the minimum output to the intermediate output (see FIG. 13C).

  In this way, when the relative displacement of the gyro rotor 10 with respect to the gyro case 20 is within a predetermined allowable range, that is, when it is detected and confirmed by displacement detection or the like, the activation sequence shifts from the ascent sequence to the rotation sequence. The positive voltage RP + that generates the rotational driving force is in a pulse output state (see FIG. 13F). The gyro rotor 10 floating in a vacuum usually starts to rotate smoothly and is further accelerated to reach a predetermined rotational speed. Thereafter (from time t6), the above-described steady state attitude control and rotational driving are performed, and application calculations such as acceleration calculation are also performed. The application-side gain Ga and the detection-side gain Gb are both maintained at the steady value “1”.

  In this way, when the relative displacement of the gyro rotor 10 with respect to the gyro case 20 is within a predetermined allowable range, that is, when it is detected and confirmed by displacement detection or the like, the activation sequence shifts from the ascent sequence to the rotation sequence. The positive voltage RP + that generates the rotational driving force is in a pulse output state (see FIG. 13F). The gyro rotor 10 floating in a vacuum usually starts to rotate smoothly and is further accelerated to reach a predetermined rotational speed. Thereafter (from time t6), the above-described steady state attitude control and rotational driving are performed, and application calculations such as acceleration calculation are also performed.

  As described above, in the electrostatic levitation type gyro apparatus of this embodiment, the gyroscope performs the attitude control at the start-up by utilizing the fact that the electrostatic support electrode and the rotation drive electrode can be individually controlled. Since the rotational drive is performed after confirming the floating of the rotor, it is possible to avoid rubbing between the gyro rotor 10 and the support piece 101 at the time of startup. Therefore, it is possible to reliably prevent an undesired situation in which dust such as a scraping piece is generated from the contact portion between the two.

Further, when the gyro rotor 10 is not lifted only by the normal attitude control, the special attitude control modified from the normal attitude control is performed, so that the gyro rotor 10 is slightly vibrated even if the rotational drive is not performed. Can provoke.
That is, when the maximum positive voltage YP + is applied (see FIG. 13 (g)) (see FIG. 13 (g), (h)), a floating force is applied to the gyro rotor 10 (solid arrow). (See) Slightly move in the direction of ascent, but as long as the reverse force that prevents ascent is exceeded (see long dashed line with arrows), ascent is prevented.

Then, when the application of the positive voltage YP + is stopped (see FIG. 13 (h)), the gyro rotor 10 sinks due to the remaining levitation prevention force (see the long broken line with an arrow), and the compressed repelling force of the support piece 101 A reaction force in the ascent direction is generated (see short dashed line with arrows). This elastic force repels the levitation force when the next positive voltage YP + is applied.
In this way, fine vibrations in the rising and lowering directions are generated in the gyro rotor 10, and a levitation force stronger than a single levitation force is applied. In addition, since no rotational drive is performed, rubbing that occurs with rotational drive does not occur.

It should be noted that the effect of strengthening the levitation by vibration is the highest when the intermittent frequency is matched with the natural frequency based on the mass of the gyro rotor 10 and the spring characteristics of the support piece 101. Since the levitation force is strengthened as a result of slight vibration, the frequency at which the control voltage for levitation is intermittently set is set to an appropriate frequency, for example, 500 Hz.
In addition, the intermittent duty ratio may be set as appropriate, but in this example, corresponding to the fact that the attitude control voltage is doubled to generate the levitation control voltage, it is ½ of the reciprocal thereof. . That is, the duty ratio is set to 50%. As a result, the average voltage becomes the same as that at normal time, so that the gyro rotor 10 will not run out of control even if the gyro rotor 10 rises during execution of the levitation strengthening process.

A specific configuration of the electrostatic levitation gyro apparatus according to the fourth embodiment of the present invention will be described with reference to the drawings. In FIG. 14, (a) is a schematic flowchart of the levitation enhancement process, and (b) to (f) are all signal waveform examples.
This electrostatic levitation type gyro apparatus is different from that of the third embodiment described above in that the contents of the levitation strengthening process (S30) are modified as follows. That is, a sinking control voltage for driving the gyro rotor is generated in the direction opposite to the flying control voltage, and this is also intermittently applied to the electrostatic support electrode.

  Specifically, first, the flying direction and the sinking direction are detected and confirmed based on the displacement detection (step S41), and the calculation mode is switched from the normal mode to the floating enhancement mode. In this levitation enhancement mode, only the attitude control voltages V1 to V12 calculated by normal attitude control calculations are used in the levitation direction. In this subsidence state, the Y-axis positive direction YP +, YP- is adopted, doubled, and when it exceeds the maximum value that can be output, it is corrected to the maximum value, and this is controlled by the control voltage for levitation and the subsidence. Control voltage (step S42).

  Then, the levitation control voltage is applied to the corresponding electrostatic support electrode as a positive voltage YP + and a negative voltage YP-, and the subsidence control voltage is applied to the corresponding electrostatic support electrode as a positive voltage YM + and a negative voltage YM-. Apply (step S43). In addition, in this case, both are applied while being interrupted at a predetermined cycle, but they are applied in opposite phases. In other words, the intermittent control voltage is shifted half a cycle from the intermittent control voltage, and the control voltage is applied when the control voltage is not applied. Such intermittent application in reverse phase is continued for a predetermined time (step S44).

  In this case as well, if the same conditions and assumptions as in the third embodiment are applied to the startup sequence, normal attitude control is executed in the ascent sequence immediately after the start of startup (time t1 to t2). Thus, the positive voltage YP + and the negative voltage YP− that generate levitation force are maximum outputs (see FIG. 14B), and the opposite positive voltage YM + and negative voltage YM− are minimum outputs. (See FIG. 14C), the positive voltage XP +, the negative voltage XP−, the positive voltage XM +, and the negative voltage XM− acting in the direction perpendicular to the ascending direction and the sinking direction become intermediate outputs (FIGS. 14D and 14D). e)). The control voltages in the Z direction, φ and θ directions are also appropriate intermediate outputs. The positive voltage RP + that generates the rotational driving force is not output (see FIG. 14F).

  Even if the state is continued, when a predetermined time has passed without the gyro rotor 10 being lifted, the normal posture control is interrupted, and a transition is made to special flying control by the lifting strengthening process. During the execution of the levitation control (time t2 to t3), the levitation control voltage and the subsidence control voltage are intermittently applied in opposite phases (see FIGS. 14B to 14F). Specifically, even if the positive voltage YP + and the negative voltage YP− are doubled, the maximum output is intermittently applied (see FIG. 14B), and the positive voltage YM + and the negative voltage YM− are also the maximum output. The phase is shifted intermittently with a half cycle shift (see FIG. 14C). The positive voltage XP +, the negative voltage XP−, the positive voltage XM +, and the negative voltage XM− are not applied (see FIGS. 14D and 14E). No control voltages in the Z direction, φ, and θ directions are applied. The positive voltage RP + is also not applied (see FIG. 14F).

When normal posture control is resumed after a lapse of a predetermined time (time t3 to t4), the positive voltage YP + and the negative voltage YP− are the maximum output, and the positive voltage YM + and the negative voltage YM− are the minimum. The output, the positive voltage XP + for other attitude control, etc. are intermediate outputs. Again, the positive voltage RP + is not output.
If it still does not rise, the normal posture control is interrupted again (time t3 to t4), and the rising reinforcement process is executed. The positive voltage YP + and the negative voltage YP− are intermittently applied at the maximum output, and the positive voltage YM + and the negative voltage YM− are the maximum output, but are intermittently applied in the reverse phase. No positive voltage RP + is applied.

Further, after a predetermined time has elapsed, normal posture control is resumed (time t5), and since rising, positive voltage YP + and negative voltage YP- are maximum output, positive voltage YM + and negative voltage YM- are minimum output, and other positive voltages XP + etc. are intermediate outputs. The positive voltage RP + is not output.
When the gyro rotor 10 is levitated (time t6), the positive voltage YP + and the negative voltage YP− that generate levitation force are changed from the maximum output to the intermediate output (see FIG. 14B), and the positive voltage YM + attracting the positive voltage YP + And the negative voltage YM− also changes from the minimum output to the intermediate output (see FIG. 14C). Then, when the relative displacement of the gyro rotor 10 with respect to the gyro case 20 falls within a predetermined range, that is, when the fact that the gyro rotor 10 has floated is detected and confirmed by the displacement detection or the like, the activation sequence shifts from the floating sequence to the rotation sequence. The positive voltage RP + that produces the rotational driving force is in a pulse output state (see FIG. 14F).

  As described above, in the electrostatic levitation gyro apparatus of this embodiment, it is possible to cause fine vibrations in the flying direction and the sinking direction in the gyro rotor 10 without rotational driving as in the third embodiment described above. When the electrostatic attraction in the flying direction is not applied to the gyro rotor 10, the sinking of the gyro rotor 10 due to the floating prevention force is increased by applying the electrostatic attraction in the sinking direction, and as a result, the impact of the support piece 101 is increased. Since the repellency is increased, the flying ability can be further enhanced. An additional discharge of residual static electricity can be expected to increase the sinking of the gyro rotor 10.

A specific configuration of the electrostatic levitation gyro apparatus according to the fifth embodiment of the present invention will be described with reference to the drawings. In FIG. 15, (a) is a schematic flowchart of the levitation enhancement process, and (b) to (f) are all signal waveform examples. FIG. 16 is a cross-sectional plan view of the gyro mechanism.
This electrostatic levitation type gyro apparatus is different from that of the fourth embodiment described above in that the contents of the levitation strengthening process (S30) are modified as follows. In other words, the control voltage for subsidence that drives the gyro rotor in the opposite direction to the control voltage for levitation is generated and applied to the electrostatic support electrode while intermittently switching them in reverse phase. An oscillation control voltage for driving the gyro rotor is generated in a direction substantially orthogonal to the control voltage for subsidence and the subsidence control voltage, and this is also applied to the electrostatic support electrode.

  Specifically, first, the ascending direction and the descending direction are detected and confirmed based on displacement detection (step S51), and the calculation mode is switched from the normal mode to the enhanced levitation mode. In the enhanced levitation mode, the attitude control voltages V1 to V12 calculated by the normal attitude control calculation are those that are perpendicular to the levitation direction. In this example, the Y-axis positive direction YP +, YP- is adopted as the flying direction in the subsidence state, doubled, and when it exceeds the maximum value that can be output, it is corrected to the maximum value, and this is levitated. Control voltage and sinking control voltage. Furthermore, the X-axis positive direction XP +, XP- is adopted as the one orthogonal to the flying direction, and it is doubled, and when it exceeds the maximum value that can be output, it is adjusted to the maximum value and this is controlled for oscillation. The voltage is set (step S52).

  Then, the levitation control voltage is applied to the corresponding electrostatic support electrode as a positive voltage YP + and a negative voltage YP-, and the subsidence control voltage is applied to the corresponding electrostatic support electrode as a positive voltage YM + and a negative voltage YM-. The swing control voltage is applied to the corresponding electrostatic support electrode as a positive voltage XP + and a negative voltage XP− (step S53). In addition, at that time, both are applied while being intermittent at a predetermined cycle, but the control voltage for levitation and the control voltage for subsidence are applied in opposite phases. In other words, the intermittent control voltage is shifted half a cycle from the intermittent control voltage, and the control voltage is applied when the control voltage is not applied. Such intermittent application in the reverse phase and intermittent application in the swing direction are continued for a predetermined time (step S54).

  Also in this case, if the conditions and assumptions attached to the startup sequence are inherited as in the fourth embodiment, normal attitude control is executed in the ascent sequence immediately after the start of startup (time t1 to t2). The positive voltage YP + and the negative voltage YP− that generate levitation force are maximum outputs (see FIG. 15B), and the opposite positive voltage YM + and negative voltage YM− are minimum outputs so as to eliminate the subsidence state of the rotor 10. (See FIG. 15C), the positive voltage XP +, the negative voltage XP−, the positive voltage XM +, and the negative voltage XM− acting in the direction orthogonal to the flying direction and the sinking direction are intermediate outputs (FIG. 15D, (See (e)). The control voltages in the Z direction, φ and θ directions are also appropriate intermediate outputs. The positive voltage RP + that generates the rotational driving force is not output (see FIG. 15 (f)).

  Even if the state is continued, when a predetermined time has passed without the gyro rotor 10 being lifted, the normal posture control is interrupted, and a transition is made to special flying control by the lifting strengthening process. During the execution of the levitation control (time t2 to t3), the levitation control voltage and the subsidence control voltage are intermittently applied in opposite phases, and the oscillation control voltage is also intermittently applied (FIG. 15B). ) To (f)). Specifically, the positive voltage YP + and the negative voltage YP− are intermittently applied with the maximum output even if doubled (see FIG. 15B), and the positive voltage YM + and the negative voltage YM− are also the maximum output. The phase is shifted intermittently with a half cycle shift (see FIG. 15C). The positive voltage XP + and the negative voltage XP− are doubled and almost the maximum output is intermittently applied (see FIG. 15D). The positive voltage XM + and the negative voltage XM− are not applied (see FIG. 15E). No control voltages in the Z direction, φ, and θ directions are applied. The positive voltage RP + is not applied (see FIG. 15F).

When normal posture control is resumed after a lapse of a predetermined time (time t3 to t4), the positive voltage YP + and the negative voltage YP− are the maximum output, and the positive voltage YM + and the negative voltage YM− are the minimum. The output, the positive voltage XP + for other attitude control, etc. are intermediate outputs. Again, the positive voltage RP + is not output.
If it still does not rise, the normal posture control is interrupted again (time t3 to t4), and the rising reinforcement process is executed. The positive voltage YP + and the negative voltage YP− are intermittently applied at the maximum output, the positive voltage YM + and the negative voltage YM− are the maximum output but intermittently applied in the reverse phase, and the positive voltage XP + and the negative voltage XP− are intermittently applied at the maximum output. Other positive voltage XM + for posture control and positive voltage RP + for rotational driving are not applied.

Further, after a predetermined time has elapsed, normal posture control is resumed (time t5), and since rising, positive voltage YP + and negative voltage YP- are maximum output, positive voltage YM + and negative voltage YM- are minimum output, and other positive voltages XP + etc. are intermediate outputs. The positive voltage RP + is not output.
When the gyro rotor 10 is levitated (time t6), the positive voltage YP + and the negative voltage YP− that generate levitation force are changed from the maximum output to the intermediate output (see FIG. 15B), and the positive voltage YM + attracting the positive voltage YP + And the negative voltage YM− also changes from the minimum output to the intermediate output (see FIG. 15C). Then, when the relative displacement of the gyro rotor 10 with respect to the gyro case 20 falls within a predetermined range, that is, when the fact that the gyro rotor 10 has floated is detected and confirmed by the displacement detection or the like, the activation sequence shifts from the floating sequence to the rotation sequence. The positive voltage RP + that generates the rotational driving force is in a pulse output state (see FIG. 15F).

  As described above, in the electrostatic levitation type gyro apparatus of this embodiment, as in the first and fourth embodiments described above, the gyro rotor 10 can be caused to generate slight vibrations in the flying direction and the sinking direction without rotational driving. it can. Similarly to the above-described fourth embodiment, when the electrostatic attraction force in the flying direction is not applied to the gyro rotor 10, the electrostatic attraction force in the sinking direction is applied to cause the gyro rotor 10 to sink due to the floating prevention force. As a result, the resilience of the support piece 101 can be increased. Further (see FIG. 16), by applying the swing control voltage, electrostatic attraction acts on the positive X-axis direction XP + and XP-, thereby causing the gyro rotor 10 to swing and move around one support piece 101a. Since it is going to roll, the force which tries to peel off acts on the other support piece 101b. This force is applied to the positive Y-axis directions YP + and YP− without rubbing. This further enhances the flying ability.

A specific configuration of the electrostatic levitation gyro apparatus according to the sixth embodiment of the present invention will be described with reference to the drawings. FIG. 17 is a waveform example of the signal YP + at time t2 to time t3.
This electrostatic levitation type gyro device is different from those of the third to fifth embodiments described above in that the intermittent frequency changes in other words.

In this case, the intermittent frequency starts from 300 Hz and gradually increases and reaches 700 Hz.
The natural frequency based on the mass of the gyro rotor 10 and the spring characteristics of the support piece 101 may be a variation caused by the number of the support pieces 101 in contact with the gyro rotor 10 or their individual differences. For example, since it is generally covered in such a frequency band, the vibration period induced in the gyro rotor becomes an optimal state once during the levitation strengthening process, so that the levitation ability is greatly enhanced.

  In addition, when the vibration by deformation | transformation with the gyro rotor 10 single-piece | unit is also anticipated, it is good to change an intermittent frequency to a higher frequency. As a deformation mode of the gyro rotor that causes such vibration, for example, Y-axis direction compression deformation and X-axis direction extension deformation, Y-axis direction extension deformation and X-axis direction compression deformation are alternately repeated. Is mentioned.

A specific configuration of the electrostatic levitation gyro apparatus according to the seventh embodiment of the present invention will be described with reference to the drawings. In FIG. 18, (a) is a schematic flowchart of the levitation enhancement process, and (b) to (f) are all signal waveform examples.
This electrostatic levitation type gyro apparatus is different from those of the fifth and sixth embodiments described above in that the contents of the levitation strengthening process (S30) are modified as follows. In other words, when the confirmation of floating of the gyro rotor is not established, the swing control voltage that causes the gyro rotor to roll is applied to the electrostatic support electrode, but the floating control voltage and the sink control voltage are not applied. It has become. In addition, when applying the oscillation control voltage, the intermittent operation and the change of the intermittent frequency are succeeded.

  Specifically, first, the rolling direction is detected and confirmed based on the displacement detection (step S61), and the calculation mode is switched from the normal mode to the levitation strengthening mode. In this enhanced levitation mode, the attitude control voltages V1 to V12 calculated by the normal attitude control calculation are used that are orthogonal to the ascent direction. In this example, the X-axis positive direction XP +, XP- is adopted as the one perpendicular to the flying direction in the subsidence state, doubled, and when it exceeds the maximum output value, it is corrected to the maximum value. Is set as the swing control voltage (step S62).

  Then, the oscillation control voltage is applied to the corresponding electrostatic support electrode as a positive voltage XP + and a negative voltage XP− (step S63). In addition, at that time, intermittent application is performed while gradually increasing the intermittent frequency from, for example, 300 Hz to 700 Hz. The control voltage is not applied in the negative direction of the X axis, both positive and negative directions of the Y axis, the Z direction, and the like. Such intermittent application in the rolling direction / swinging direction is continued for a predetermined time (step S64).

  In this case as well, if the conditions and assumptions attached to the startup sequence are inherited as in the fifth embodiment, normal attitude control is executed in the ascent sequence immediately after the start of startup (time t1 to t2). The positive voltage YP + and the negative voltage YP− that generate the levitation force are the maximum outputs (see FIG. 18B), and the positive voltage YM + and the negative voltage YM− are the minimum outputs so as to eliminate the subsidence state of the rotor 10. (See FIG. 18C), the positive voltage XP +, the negative voltage XP−, the positive voltage XM +, and the negative voltage XM− acting in the direction orthogonal to the flying direction and the sinking direction are intermediate outputs (FIG. 18D, (See (e)). The control voltages in the Z direction, φ and θ directions are also appropriate intermediate outputs. The positive voltage RP + that generates the rotational driving force is not output (see FIG. 18 (f)).

  Even if the state is continued, when a predetermined time has passed without the gyro rotor 10 being lifted, the normal posture control is interrupted, and a transition is made to special flying control by the lifting strengthening process. During the execution of the levitation control (time t2 to t3), the application of the levitation control voltage and the subsidence control voltage is stopped and only the oscillation control voltage is intermittently applied (see FIGS. 18B to 18F). . Specifically, the positive voltage YP + and the negative voltage YP− are not applied (see FIG. 18B), and the positive voltage YM + and the negative voltage YM− are not applied (see FIG. 18C). The positive voltage XP + and the negative voltage XP− are doubled and the maximum output is intermittently applied (see FIG. 18D), but the positive voltage XM + and the negative voltage XM− are not applied (see FIG. 18E). No control voltages in the Z direction, φ, and θ directions are applied. The positive voltage RP + is not applied (see FIG. 18F).

When normal posture control is resumed after a lapse of a predetermined time (time t3 to t4), the positive voltage YP + and the negative voltage YP− are the maximum output, and the positive voltage YM + and the negative voltage YM− are the minimum. The output, the positive voltage XP + for other attitude control, etc. are intermediate outputs. Again, the positive voltage RP + is not output.
If it still does not rise, the normal posture control is interrupted again (time t3 to t4), and the rising reinforcement process is executed. The positive voltage XP + and the negative voltage XP− are intermittently applied at the maximum output, but the other positive voltage XM + for attitude control and the positive voltage RP + for rotation driving are not applied.

Further, after a predetermined time has elapsed, normal posture control is resumed (time t5), and since rising, positive voltage YP + and negative voltage YP- are maximum output, positive voltage YM + and negative voltage YM- are minimum output, and other positive voltages XP + etc. are intermediate outputs. The positive voltage RP + is not output.
When the gyro rotor 10 is levitated (time t6), the positive voltage YP + and the negative voltage YP− that generate levitation force are changed from the maximum output to the intermediate output (see FIG. 18B), and the positive voltage YM + attracting the positive voltage YP + And the negative voltage YM- also changes from the minimum output to the intermediate output (see FIG. 18C). Then, when the relative displacement of the gyro rotor 10 with respect to the gyro case 20 falls within a predetermined range, that is, when the fact that the gyro rotor 10 has floated is detected and confirmed by the displacement detection or the like, the activation sequence shifts from the floating sequence to the rotation sequence. The positive voltage RP + that generates the rotational driving force is in a pulse output state (see FIG. 18F).

  Thus, in the electrostatic levitation gyro apparatus of this embodiment, electrostatic attraction acts in the positive X-axis directions XP + and XP− by the application of the swing control voltage, thereby causing the gyro rotor 10 to rotate. Since it tries to move, a force is applied to peel off the other one of the contact parts as a fulcrum without causing rubbing. Thereby, the flying ability is strengthened. In addition, since fine vibrations are generated by intermittent application, the flying ability is further enhanced.

[Others]
In each of the above embodiments, an apparatus package including a plate-shaped cap 71 and a box-shaped box 72 and an apparatus package including a cap-shaped cap 71 and a disk-shaped bottom plate 72 are used. The device package is not limited to this. The device package may be any container that can be hermetically sealed. The vacuum suction port 76 is not limited to the front, but may be located anywhere in the package. When evacuation is not required as in assembly in a vacuum atmosphere, it is not necessary to form the vacuum suction port 76.

  In the first embodiment, the elastic support member 98 is provided between the base 73 and the pin 74. However, the elastic support of the base 73 is not limited thereto. For example, the elastic support member is connected to the base 73. It may be interposed between the packages 71 and 72. The elastic support member is not limited to a leaf spring, and may be made of an elastic member such as a coil spring or silicon rubber, or a combination thereof.

  Various modifications can be made to the signal detection circuit described above. For example, a sequential selection switching circuit may be provided upstream of the A / D conversion circuit 65 to reduce the number of A / D conversion circuits 65. Note that the A / D conversion circuit 65 and the like existing between the current detection circuit 64 and the DSP 66 may be a part of the control arithmetic circuit 63 as described above. Even if it forms a part of the detection circuit, there is no inconvenience even as an interface unit belonging to both. The DSP 66 of the control arithmetic circuit 63 and the DSP 67 of the rotor control circuit 62 may be provided separately as described above, but may be combined into a DSP in which both programs are installed.

  In addition, regarding the levitation strengthening process, in each of the above-described embodiments, intermittent application is continued during a corresponding period (t2 to t3, t4 to t5), but application stop may be used in combination. For example, intermittent application and stop of application of the control voltage may be performed alternately every 1 second. The time and some times in the activation sequence are also examples, and may be changed to appropriate times.

(A) is a front view of the device, (b) is a plan view of the device with the lid removed, (c) is a longitudinal sectional perspective view, and (d) is a device mounting. It is a perspective view which shows a condition. (A) is an overall circuit diagram including a signal detection circuit, (b) is a displacement detection application signal generation circuit, and (c) is a current detection circuit. (A) is a signal input circuit of the constraint control system, and (b) is a signal input circuit of the rotor drive system. (A) is a detailed view of a control voltage application portion, and (b) to (f) are all signal waveform examples. As for a prototype example useful for presenting a problem, (a) is an outline flowchart of an activation sequence, and (b) to (f) are signal waveform examples. About Example 1 of the electrostatic levitation-type gyro apparatus of this invention, (a) is the top view of the place which removed the cover, (b) is a longitudinal front view. (A) is an entire circuit diagram including a signal detection circuit, (b) is a time chart showing a gain change of a displacement detection application signal, and (c) is a time chart showing a gain change of a displacement detection detection signal. In Example 2 of the electrostatic levitation gyro device of the present invention, (a) is an overall circuit diagram including a signal detection circuit, (b) is a displacement detection application signal generation circuit, and (c) is a detection signal generation circuit. It is. (A) is a detailed view of a control voltage application portion, and (b) to (f) are all signal waveform examples. In Example 3 of the electrostatic levitation gyro apparatus of the present invention, (a) is an overall circuit diagram including a signal detection circuit, (b) is a displacement detection application signal generation circuit, and (c) is a detection signal generation circuit. It is. (A) is a detailed view of a control voltage application portion and a detection signal generation circuit, and (b) to (e) are examples of signal waveforms. (A) is a general | schematic flowchart of a starting sequence, (b) is a general | schematic flowchart of a floating reinforcement | strengthening process. (A) is a cross-sectional plan view of the gyro mechanism, (b) to (f) are all signal waveform examples, and (g) and (h) are enlarged views of the main part of the cross-plane of the gyro mechanism. Regarding Example 4 of the electrostatic levitation gyro apparatus of the present invention, (a) is a schematic flowchart of the levitation enhancement process, and (b) to (f) are signal waveform examples. Regarding Example 5 of the electrostatic levitation gyro apparatus of the present invention, (a) is a schematic flowchart of levitation enhancement processing, and (b) to (f) are signal waveform examples. It is a cross-sectional top view of a gyro mechanism part. It is an example of a signal waveform about Example 6 of the electrostatic levitation type gyro apparatus of this invention. In Example 7 of the electrostatic levitation gyro apparatus of the present invention, (a) is a schematic flowchart of the levitation enhancement process, and (b) to (f) are signal waveform examples. The mechanism part of the conventional electrostatic levitation type gyro is shown, (a)-(c) is an example of a disk-shaped rotor type, (d) and (e) are examples of an annular rotor type, (a) and ( d) is a longitudinal front view, and (b), (c), and (e) are exploded perspective views of built-in components. Regarding a conventional signal detection circuit, (a) is an overall circuit diagram in which a signal detection circuit is added to a control circuit or the like, (b) is a detailed connection diagram of a control output circuit, (c) is a part of a signal input circuit, (D) and (e) are voltage distribution examples. As for a conventional electrostatic levitation type gyro, (a) is a longitudinal front view of a mechanism part of a disk-shaped rotor type gyro, (b) is a cross-sectional plan view of a gyro case of a disk-type rotor type gyro, and (c) is an annular shape. A longitudinal front view of the mechanism part of the rotor-type gyro, (d) is a schematic flowchart of the activation sequence. Regarding a conventional electrostatic levitation type gyro, (a) is a longitudinal front view of the gyro mechanism, (b) is a cross-sectional plan view thereof, and (c) to (g) are examples of signal waveforms.

Explanation of symbols

10 Gyro rotor (gyro mechanism)
20 Gyro case (Gyro mechanism)
21 Upper bottom member (gyro case, gyro mechanism)
22 Lower bottom member (gyro case, gyro mechanism)
23 Spacer (gyro case, gyro mechanism)
31-36 Electrostatic support electrodes (attitude control electrodes, control electrodes, restraint control system)
37 Rotor drive electrode (rotary electrode, rotor drive system)
38 Electrode for displacement detection (detection electrode, displacement detection system)
41-46 Electrostatic support electrodes (posture control electrodes, control electrodes, restraint control system)
47 Rotor drive electrode (rotary electrode, rotor drive system)
48 Electrode for displacement detection (detection electrode, displacement detection system)
51 Current detection circuit (displacement detection system)
52 Rotor control circuit (control circuit, rotor drive system)
53 Control arithmetic circuit (control circuit, constraint control system)
54 Control output circuit (control circuit, restraint control system)
55 A / D conversion circuit (control arithmetic circuit, constraint control system)
56 DSP (digital signal processor, control arithmetic circuit, restraint control system)
60 Gain control circuit (gain variable control circuit, signal detection circuit, displacement detection system)
60a, 60b amplifier (gain variable section, signal detection circuit, displacement detection system)
61 Application signal generation circuit (application signal supply circuit, signal detection circuit, displacement detection system)
62 Rotor control circuit (control circuit, rotor drive system)
63 Control arithmetic circuit (control circuit, constraint control system)
64 Current detection circuit (detection signal generation circuit, signal detection circuit, displacement detection system)
64a, 64b Current mirror (current inversion circuit)
65 A / D conversion circuit (signal input circuit, signal detection circuit + control arithmetic circuit)
66 DSP (digital signal processor, control arithmetic circuit, restraint control system)
67 DSP (digital signal processor, control arithmetic circuit, rotor drive system)
70 Gyroscope (Electrostatic Levitation Gyroscope)
71 Cap (lid, vacuum container, hermetically sealed package)
72 boxes (box, can, vacuum container, hermetically sealed package)
73 Base (Glass substrate, insulating substrate, mechanism and circuit board)
74 pins (lead, external connection terminal)
75 Getter (Vacuum maintenance member)
76 Vacuum suction port (through hole + sealing plug)
77, 78 IC (current detection circuit, control output circuit, etc.)
80 Printed circuit board (circuit printed circuit board, gyro device mounting circuit board)
81 Regulator IC (Power supply circuit)
82 Smoothing capacitor (power circuit)
90 Application signal generation circuit (application signal supply circuit, signal detection circuit, displacement detection system)
91 In-phase detection circuit (detection signal generation circuit, signal detection circuit, displacement detection system)
92 Midpoint voltage detection circuit (common-mode detection circuit)
93 Current limiting circuit (low-pass filtering, common-mode detection circuit)
94 Circuit board (insulating board)
97 Gyro Device (Electrostatic Levitation Type Gyro Device)
98 Elastic support member 99 Bonding wire 101 Bearing piece 101

Claims (6)

  A gyro case in which the gyro rotor is electrostatically levitated and rotatably incorporated, and among the plurality of electrodes formed on the gyro rotor, the electrostatic support electrode and the rotation drive electrode are used for attitude control and rotation drive of the gyro rotor. The control circuit for generating and applying the control voltage is transmitted and received through the displacement detection electrode to which the control voltage is not applied among the plurality of electrodes, and a relative displacement detection signal is transmitted and received between the gyro rotor and the gyro case. In an electrostatic levitation type gyro apparatus including a signal detection circuit, a start control means for performing rotation drive after performing the attitude control at the time of start and confirming the floating of the gyro rotor, and the application side of the relative displacement detection signal Further, the gain variable section arranged on each of the detection sides and the application side gain of the gain variable section are gradually increased during the confirmation of the levitation by the activation control means. Electrostatic levitation type gyro device delivery side gain, characterized in that it comprises a variable gain control circuit is gradually decreased.   There is provided a levitation enhancing means for intermittently applying the attitude control control voltage or a higher levitation control voltage to the electrostatic support electrode, and the activation control means is activated when the confirmation of the gyro rotor ascent is not established. 2. The electrostatic levitation type gyro apparatus according to claim 1, wherein the reinforcing means is operated.   The levitation enhancement means generates the control voltage for subsidence driving the gyro rotor in the opposite direction to the control voltage for attitude control or the control voltage for levitation, and this is also intermittently applied to the electrostatic support electrode. 3. The electrostatic levitation gyro apparatus according to claim 2, wherein   The levitation enhancing means generates a swing control voltage for driving the gyro rotor in a direction orthogonal or oblique to the attitude control control voltage or the levitation control voltage, and also applies this to the electrostatic support electrode. 4. The electrostatic levitation gyro apparatus according to claim 2, wherein the electrostatic levitation gyro apparatus is a thing.   5. The electrostatic levitation type gyro apparatus according to claim 2, wherein the levitation enhancing means changes the intermittent period.   Providing a levitation enhancing means for applying a control voltage for causing rolling of the gyro rotor to the electrostatic support electrode, wherein the activation control means activates the levitation enhancing means when the confirmation of the gyro rotor levitation is not established. 2. The electrostatic levitation gyro apparatus according to claim 1, wherein

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