JP2004333327A - Electrostatic flaoting type gyro apparatus - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To improve to float up a gyro rotor at a high efficiency, without rubbing. <P>SOLUTION: The electrostatic floating type gyro apparatus has an electrostatic supporting electrode and a rotary driving electrode formed in a gyro case. Its starting sequence is divided into a floating sequence S22-S16 and a rotation sequence S23-S25. The attitude is controlled at starting to verify the floating of a gyro rotor and then the rotation drive is performed. If it fails in the floating, a control voltage is intermittently applied to the electrostatic supporting element (S30). <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to an electrostatic levitation gyro device including a gyro mechanism and an electronic circuit.
The gyro mechanism section includes a gyro rotor and a gyro case, and supports the gyro rotor in the gyro case in a floating manner by an electrostatic supporting force. The gyro rotor is placed in a vacuum for proper operation such as rotation operation.
The electronic circuit section is connected to the gyro mechanism section, detects relative displacement between the gyro rotor and the gyro case, and controls the attitude and rotation of the gyro rotor.
More specifically, the present invention relates to a start sequence (operation start procedure, start control means) performed when starting posture control and rotation drive.
[0002]
[Premise technology]
The electrostatic levitation gyro suitable for miniaturization is used not only for ships and aircraft, but also for moving objects such as automobiles. And an electronic circuit for controlling the electrostatic supporting force, detecting the relative displacement, and the like.
FIG. 16 shows two gyro mechanism units in such an electrostatic levitation gyro. FIGS. 1A to 1C are known examples of a disk-shaped rotor type (for example, see Patent Document 1), and FIGS. 2D and 2E are known examples of an annular rotor type (eg, FIG. Patent Document 2). In addition, in the figure, (a) and (d) are longitudinal sectional front views, and (b), (c), and (e) are exploded perspective views of built-in components.
[0003]
When the gyro rotor 10 is electrostatically levitated and rotatable in any of the gyro mechanism sections, the gyro case 20 is incorporated into the gyro case 20 in any of the gyro mechanism sections. The gyro case 20 is configured by combining an upper bottom member 21, a lower bottom member 22, and a spacer 23 made of an insulator such as glass, and has a disk-shaped or annular vacuum space formed therein. The gyro rotor 10 is made of a conductor such as silicon, and is formed in a disk shape or an annular shape so as to rotate stably around one spin axis. In order to apply an electrostatic supporting force or a rotational driving force to the gyro rotor 10 from the gyro case 20, a large number of electrodes formed of a metal film pattern or the like are formed on both surfaces. The electrodes of the gyro rotor 10 and the electrodes of the gyro case 20 are arranged so as to satisfy a predetermined correspondence such as a facing distance and a pitch according to their respective roles.
[0004]
The electrodes (multiple electrodes) of the gyro case 20 connected to the electronic circuit will be described in detail. The gyro rotor 20 is divided into a plurality of pairs facing each other with the gyro rotor 10 interposed therebetween. In particular, the electrodes for electrostatic support are further divided into groups / pairs which are further arranged in each pair. Specifically, the adjacent electrodes 31a and 31b and the adjacent electrodes 41a and 41b form an opposing pair, the adjacent electrodes 32a and 32b and the adjacent electrodes 42a and 42b form an opposing pair, and the adjacent electrodes 33a and 33b and the adjacent electrode 43a. , 43b form an opposing pair, and the adjacent electrodes 34a, 34b and the adjacent electrodes 44a, 44b form an opposing pair. In the case of the annular rotor type, there are many pairs of electrodes for electrostatic support, and the adjacent electrodes 35a, 35b and the adjacent electrodes 45a, 45b also form opposing pairs, and the adjacent electrodes 36a, 36b and the adjacent electrodes 46a, 46b also oppose. In pairs.
[0005]
Among the plurality of electrodes, among the plurality of electrodes, the rotation driving electrodes 37 are arranged in a circle on the lower surface of the upper bottom member 21 and the rotor driving electrodes 47 arranged in a circle on the upper surface of the lower bottom member 22. Are opposed to each other.
Also in the displacement detection electrodes, the displacement detection electrodes 38 and the displacement detection electrodes 48 are opposed to each other.
In the drawings, the electrodes provided on the upper bottom member 21 are denoted by reference numerals in the thirties, and the electrodes provided on the lower bottom member 22 are denoted by reference numerals in the forties. In other drawings and explanations, when any of the adjacent electrodes 31a and 31b is called without distinction, or when they are collectively called, the electrode 31 is omitted and the last alphabet is omitted. The same applies to the other electrodes 32 and the like.
[0006]
Further, the specific role of the electrostatic support electrodes 31 to 36, 41 to 46 is described for an annular rotor type gyromechanism part whose role assignment is relatively simple and clear (see FIGS. 16D and 16E). explain. The three axes orthogonal to each other in the space are defined as an X axis, a Y axis, and a Z axis, respectively. In FIG. 16D, the X axis is placed in the left-right direction on the paper surface, the Y axis is placed in a direction penetrating the paper surface, and the vertical direction in the paper surface is shown. The Z axis is placed, rotation around the X axis is φ, and rotation around the Y axis is θ. Then, the electrode 31 applies the control voltage to generate an electrostatic support force in the X direction corresponding to the control voltage, and changes the capacitance between the electrode 31 and the surface of the gyro rotor 10 according to the displacement of the gyro rotor 10 in the X direction. ing. The electrodes 41 forming an opposing pair also apply a control voltage, generate an electrostatic support force in the X direction corresponding to the control voltage, and change the capacitance between the gyro rotor 10 and the surface of the gyro rotor 10 according to the displacement of the gyro rotor 10 in the X direction. However, the characteristics are opposite to those of the electrode 31. The electrode pairs 32 and 42 perform the same function in the Y direction, the electrode pairs 33 and 43 perform the same function in the Z + φ direction, and the electrode pairs 34 and 44 perform the same function in the Z + θ direction. The electrodes 35 and 45 have the same function in the Z-φ direction, and the electrode pairs 36 and 46 have the same function in the Z-θ direction.
[0007]
[Prior art]
FIG. 17A illustrates an electronic circuit connected to the plurality of electrodes 31 to 48 of the gyro case 20 and configuring an electrostatic levitation gyro together with the gyro mechanism. Again, for clarity, the electronic circuit section of the annular rotor gyro is taken as a specific example, and portions useful for comparison with the embodiment of the present invention are scraped and re-shown.
This electronic circuit includes a control operation circuit 53 (control circuit) that forms a restraint control system together with the electrostatic support electrodes 31 to 36 and 41 to 46, and a rotor control that forms a rotor drive system together with the rotor drive electrodes 37 and 47. A circuit 52 (control circuit) and a signal detection circuit that constitutes a displacement detection system together with the displacement detection electrodes 38 and 48 are provided. In the drawing, the control output circuit 54 is clearly shown for the control arithmetic circuit 53, but the rotor control circuit 52 is omitted.
[0008]
The control operation circuit 53 calculates the relative displacement of the gyro rotor 10 and the gyro case 20 other than around the Z axis, that is, the X direction displacement ΔX, the Y direction displacement ΔY, the Z direction displacement ΔZ, the φ direction displacement Δφ, and the θ direction displacement Δθ, A known operation is performed to generate control voltages V1, V12 and the like for attitude control, and to apply the voltages to the electrostatic support electrodes 31 to 36 and 41 to 46 among the plurality of electrodes 31 to 48, for example. Thus, attitude control for making the relative displacement zero is performed. These relative displacements are detected from the capacitance changes of the electrostatic support electrodes 31 to 36, 41 to 46. Each of the control voltages V1, V12, and the like is amplified to a required level before application by a control output circuit 54 that outputs a positive voltage signal and a negative voltage signal obtained by inverting the positive voltage signal.
[0009]
The rotor control circuit 52 also performs a well-known operation from the rotation state of the gyro rotor 10 about the Z axis to generate a control voltage for rotational driving, for example, a three-phase pulse-like signal, and outputs the control voltage to the rotor driving electrode 37. , 47, etc., so as to control the rotation of the gyro rotor 10 at a constant speed. The rotation state of the gyro rotor 10 is detected from a change in capacitance of the rotor driving electrodes 37 and 47. These control voltages are also amplified to a required level by the control output circuit 54 or a similar output circuit before application.
Unlike the electrostatic support electrodes 31 to 36, 41 to 46 and the rotor drive electrodes 37, 47 to which such a control voltage is directly applied, the displacement detection electrodes 38, 48 of the multiple electrodes 31 to 48 are different. , A control voltage that affects the movement of the gyro rotor 10 is not applied.
[0010]
The signal detection circuit uses displacement detection application signals f1 to f12 having a frequency high enough not to affect the movement of the gyro rotor 10 in order to detect the relative displacement between the gyro rotor 10 and the gyro case 20. An application signal supply circuit for applying the detection application signals f1 to f12 to a part of the plurality of electrodes 31 to 48, and a displacement after the displacement detection application signals f1 to f12 pass through the displacement detection electrodes 38 and 48; And a current detection circuit 51 (detection signal generation circuit) that detects a signal component related to the detection application signals f1 to f12 and generates a displacement detection detection signal Vp.
[0011]
Specifically, the application signal supply circuit generates displacement detection application signals f1 to f12 by combining five sine wave signals w1 to w5 having different frequencies so as to be distinguishable, based on a known relational expression. The displacement detection application signals f1 to f12 are applied not to the displacement detection electrodes 38 and 48 but to the electrostatic support electrodes 31 to 36 and 41 to 46. In addition, at this time, the application is performed by superimposing the displacement detection application signals f1 to f12 on the control voltages V1, V12 and the like on the output side of the control output circuit 54.
[0012]
In the annular rotor type, there are six opposing pairs of electrodes for electrostatic support. Among them, the electrode pairs 31 and 41 will be described in detail (see FIG. 17B), and the control voltage V1 is a positive voltage + V1 and a negative voltage -V1. Are generated as a pair, the positive voltage + V1 is applied to the electrostatic support electrode 31b after the displacement detection application signal f1 is superimposed, and the negative voltage -V1 is applied to the adjacent electrostatic support electrode after the same displacement detection application signal f1 is superimposed. The voltage is applied to the electrode 31a. The control voltage V12 is a pair of a positive voltage + V12 and a negative voltage -V12. The positive voltage + V12 is applied to the electrostatic support electrode 41b after the displacement detection application signal f12 is superimposed, and the negative voltage -V12 is the same. After the displacement detection application signal f12 is superimposed, it is applied to the adjacent electrostatic support electrode 41a.
[0013]
On the other hand, the current detection circuit 51 (see FIG. 17A) is not connected to the control output circuit 54 side, but is connected to the displacement detection electrodes 38 and 48 of the multiple electrodes 31 to 48. The current detection circuit 51 includes an amplifier for signal amplification and the like, and its input line is connected to a parallel connection point of the displacement detection electrodes 38 and 48. Further, the displacement detection detection signal Vp output from the current detection circuit 51 is sent to the input circuits of the rotor control circuit 52 and the control operation circuit 53.
[0014]
Here, referring to the input circuit of the displacement detection detection signal Vp in the control arithmetic circuit 53 (see FIG. 17C), the displacement detection detection signal Vp and the sine are added to the dependent connection circuit between the synchronous detector and the band-pass filter. By inputting the wave signal w1 and extracting the component of the sine wave signal w1 from the displacement detection detection signal Vp, for example, the X-direction displacement ΔX is detected. The same applies to other displacements ΔY, ΔZ, Δφ, and Δθ.
The signal detection circuit detects the relative displacements ΔX, ΔY, ΔZ, Δφ, Δθ and the rotation state based on the capacitance change of the control electrodes 31 to 37 and 41 to 47. In addition, the gyro rotor 10 floats to the neutral position in the gyro case 20 and continues to rotate by the attitude control and the rotation drive of the control arithmetic circuit 53 and the rotor control circuit 52 to which the input has been made. Further, based on them, the acceleration or the like acting on the electrostatic levitation gyro is calculated and detected.
[0015]
By the way, such applied calculations as acceleration calculation are properly performed only when the operation state of the gyro mechanism is in a steady state, that is, a stable state within an assumed range. The stop sequence (operation stop procedure, stop control means) and the start sequence (operation start procedure, start control means) are performed by executing the stop program and start program of the control circuit (rotor control circuit 52 + control operation circuit 53). Has become.
[0016]
More specifically, although the illustration is omitted in the stop sequence, the rotation of the gyro rotor 10 is decelerated by gradually lowering the frequency of the signal applied to the rotor driving electrodes 37 and 47, and it is confirmed that the gyro rotor 10 is sufficiently decelerated. After that, for example, after the rotation speed becomes 100 revolutions per minute or less, all the control is stopped after waiting for a further predetermined time, for example, 60 seconds.
[0017]
Further, the gyro rotor 10 sinks (falls and descends) in the gyro case 20 due to the stop of the control, and the gyro rotor 10 comes into contact with the gyro case 20. A bearing piece 101 for bearing is also provided. 18 (a) is a vertical sectional front view of a mechanical part of a disk-shaped rotor gyro, and FIG. 18 (b) is a cross-sectional plan view of a gyro case of the disk-shaped rotor gyro. (C) is a longitudinal sectional front view of the mechanism of the annular rotor gyro.
[0018]
The bearing piece 101 is provided with a conductive property to release unwanted static electricity accumulated in the gyro rotor 10 by contact, and is made into a small piece to reduce intermolecular attraction. The contact surface (supportable portion) is formed in a round shape so as not to be stuck, and is lined up on both ends of the inner peripheral surface of the case to stably support in any direction, and is arranged in a two-stage radial pattern. In the stopped state, the electrodes of the gyro rotor 10 and the electrodes of the gyro case 20 are prevented from contacting each other or being excessively approached. The same applies to a disk-shaped rotor and an annular rotor.
[0019]
Further, the startup sequence will be described in detail with reference to the drawings. FIG. 18D is a schematic flowchart of the startup sequence. FIG. 19A is a vertical sectional front view of the gyromechanical unit, FIG. 18B is a cross-sectional plan view thereof, and FIGS. It is a waveform example.
In this start-up sequence (see FIG. 18D), after performing a predetermined initialization process such as clearing of the working memory (step S11), control is started (step S12). That is, the posture control and the rotation drive based on the displacement detection are started. Then, after the control state is stabilized (step S13), that is, when the relative position and the rotation speed of the gyro rotor 10 fall within a predetermined range, the applied calculation such as the above-described acceleration calculation is started (step S14). This is normal startup.
[0020]
On the other hand, when it is not started, a retry (retry) is performed as follows. That is, when the control state is not stabilized after waiting for a predetermined time, for example, about 5 seconds (step S15), it is determined that the startup has failed, and the control is interrupted (step S16). That is, both the displacement detection, the attitude control, and the rotation drive are stopped. Then, after waiting for a predetermined time, for example, about 5 seconds (step S17), the control is resumed (step S12). At the start of the control, the integral value is cleared, etc., in order to enhance the effect of the retry.
[0021]
An operation example in such a start-up sequence will be described. For simplicity, it is assumed that the gyro rotor 10 is supported by the lower support piece 101 in a state where the gyro mechanism is placed with the Y-axis positive direction upward. (See FIGS. 19A and 19B). Further, the control voltages for attitude control that cause the gyro rotor 10 to generate an electrostatic attractive force in the positive direction of the X axis are defined as a positive voltage XP + and a negative voltage XP− (these correspond to + V1 and −V1 described above). The attitude control voltage for generating the electrostatic attractive force is defined as a positive voltage XM + and a negative voltage XM- (these correspond to + V12 and -V12 described above). The positive voltage YP + and the negative voltage YP-, the control voltage for attitude control that generates an electrostatic attraction in the Y-axis negative direction is the positive voltage YM + and the negative voltage YM-, and the rotational drive control voltage of the gyro rotor 10 around the Z axis. One of the three-phase pulse signals is a positive voltage RP +.
[0022]
In this case, the components of the displacement detection applied signals f1 to f12 having a high frequency and the invariable offset components do not affect the movement of the gyro rotor 10, and if these signal components are ignored, the positive voltage XP + and the negative voltage XP- are inverted. As a result, the positive voltage XM + and the negative voltage XM- are also inverted waveforms, the positive voltage YP + and the negative voltage YP- are also inverted waveforms, and the positive voltage YM + and the negative voltage YM- are also inverted waveforms.
Further, a case in which normal startup is performed after two startup failures is taken as a specific example. That is, (see FIGS. 19C to 19G), the start is started at time t1, the start is interrupted at time t2, the start is restarted at time t3, the start is restarted at time t4, and the start is restarted at time t5. Then, at time t6, it is assumed that the activation is successful and the system enters a steady state.
[0023]
Then, immediately after the start of the start-up (time t1 to t2), the positive voltage YP + and the negative voltage YP- that generate the levitation force become the maximum output so as to eliminate the sinking state of the gyro rotor 10 (see FIG. 19C). And the opposite positive and negative voltages YM + and YM- have a minimum output (see FIG. 19 (d)), and the positive voltage XP +, negative voltage XP-, positive voltage XM + and negative voltage acting in the direction perpendicular to the floating or sinking direction. XM- is an intermediate output (see FIGS. 19E and 19F). Although illustration and detailed description are omitted, the control voltages in the Z direction and the φ and θ directions also have appropriate intermediate outputs. In addition, the positive voltage RP + that generates the rotational driving force enters a pulse output state (see FIG. 19G).
[0024]
Even if the state is continued, if the activation does not succeed, for example, if the predetermined time has elapsed without ascending, the activation is interrupted. In this state (time t2 to t3), output of all control voltages is suppressed (see FIGS. 19C to 19G).
Then, when the start is resumed after a predetermined time has elapsed (time t3 to t4), the positive voltage YP + and the negative voltage YP- are the maximum output, and the positive voltage YM + and the negative voltage YM- are the minimum output because of the floating and rotation. , And other positive voltages XP + for attitude control have an intermediate output, and the positive voltage RP + has a pulse output state.
If it still does not start, the control is interrupted again (time t3 to t4), and the output of all control voltages is suppressed.
[0025]
Further, after a lapse of a predetermined time, the start is resumed (time t5). Further, due to the floating and rotation, the positive voltage YP + and the negative voltage YP- are the maximum output, the positive voltage YM + and the negative voltage YM- are the minimum output, and the other positive and negative voltages. The voltage XP + and the like enter an intermediate output state, and the positive voltage RP + enters a pulse output state.
Then, when the gyro rotor 10 flies and rotates (time t6), the positive voltage YP + and the negative voltage YP-, which generate a levitation force, immediately change from the maximum output to the intermediate output (see FIG. 19C), and are attracted to it. The positive voltage YM + and the negative voltage YM- also change from the minimum output to the intermediate output (see FIG. 19D).
[0026]
In this manner, the relative displacement and the rotational speed of the gyro rotor 10 with respect to the gyro case 20 fall within a predetermined allowable range, and when this is detected and confirmed by displacement detection or the like, thereafter (from time t6), the above-described steady state In addition to performing the attitude control and the rotational drive, applied calculations such as acceleration calculation are also performed.
[0027]
Although illustration is omitted, implementation of such a gyro device will also be described. The electrostatic levitation gyro device including the above-described electronic circuit and the gyro mechanism unit is mounted on a printed circuit board or the like to establish an electrical connection. In this case, the gyro case 20 is mounted on the printed circuit board. Some of the electronics were also implemented. At this time, circuit portions directly connected to the electrodes 31 to 48 of the gyro case 20, such as the control output circuit 54 and the current detection circuit 51, are preferentially mounted on the same substrate. The preamplifier of the current detection circuit 51 may be mounted on the upper surface of the gyro case 20 or the like. In any case, the vacuum space remains in the gyro case 20, and the gyro mechanism and the electronic circuit are mounted under the atmosphere. Further, in order to secure a vacuum state in the gyro rotor 10 storage space in the gyro case 20, the assembly is performed in a vacuum atmosphere or the assembly is evacuated. In order to maintain the vacuum state for a long period of time, a getter member (vacuum maintaining member) is also housed in the vacuum space.
[0028]
[Patent Document 1]
Japanese Patent No. 3008074 (FIGS. 1, 2, 4, and 8)
[Patent Document 2]
JP 2001-235329 A (FIGS. 1, 2, 3, and 6)
[0029]
[Undisclosed prior art]
[Prior Patent Application 1] Japanese Patent Application No. 2003-050223
[Prior Patent Application 2] Japanese Patent Application No. 2002-362031
[Prior Patent Application 3] Japanese Patent Application No. 2003-099695
By the way, as the size of the electrostatic levitation gyro device is reduced, specifically, when the diameter of the gyro rotor 10 is reduced to about several mm or less, even if the assembly is performed in a vacuum atmosphere, Even with vacuum evacuation, the work becomes difficult at each stage. For this reason, it becomes difficult to secure a vacuum state, and it may lead to an undesirable increase in cost due to an increase in man-hours and a decrease in yield. In addition, since the load on the getter increases due to the dimensional effect accompanying the miniaturization, it is difficult to maintain a vacuum state. In addition, the cost of the through-hole of the glass gyro case 20 increases in an airtight manner, which leads to an increase in cost. Therefore, in order to satisfy both the demand for miniaturization and the demand for cost reduction, a specific embodiment in an appropriate mode has been created by the same applicant in consideration of the mounting situation with respect to securing and maintaining the vacuum state. The point is that by introducing a vacuum package to expand the vacuum space beyond the gyromechanical section and taking in vacuum maintenance members and electronic circuits inside, it is possible to promote miniaturization without increasing the difficulty of maintaining vacuum. It is possible to realize a small-sized electrostatic levitation gyro device at low cost (see Patent Application 1).
[0030]
As for a signal detection circuit for detecting the relative displacement between the gyro rotor and the gyro case, an improvement plan has been created by the same applicant (refer to the prior patent application 2).
In the above-described conventional signal detection circuit, since the displacement detection application signals f1 to f12 are superimposed on the control voltages V1, V12, etc., the sum of the two does not exceed the power supply voltage Vcc of the control output circuit 54. Since it is impossible, the power supply voltage Vcc is allocated to the amplitude voltage Vf of the displacement detection application signal f1 and the maximum voltage of the control voltage V1 (see FIG. 17D). However, as the size of the mechanism of the electrostatic levitation gyro is reduced, specifically, for example, when the diameter of the gyro rotor 10 is reduced from about 5 mm to about 1 mm, the capacity of the plurality of electrodes 31 to 48 is reduced. Become smaller. In particular, the input current Ip to be detected by the current detection circuit 51, which is the source of the displacement detection detection signal Vp, is greatly reduced. Therefore, in order to obtain an appropriate level of the detection signal Vp for displacement detection required for accurately obtaining the displacement ΔX or the like, it is necessary to increase the amplitude voltage Vf of the applied signal f1 for displacement detection.
[0031]
However, increasing the amplitude voltage Vf under the predetermined power supply voltage Vcc involves a decrease in the maximum voltage of the control voltage V1, so that the balance between the two is undesirably disrupted (see FIG. 17E). ). The same applies to other displacement detection applied signals. Therefore, it is important to improve the signal detection circuit so that the amplitude voltage of the displacement detection application signal can be increased without sacrificing the control voltage under the same power supply voltage. In order to respond to such a demand, the control signal and the displacement detection signal are superimposed by the voltage significant signal and the current significant signal by reversing the flow of the displacement detection signal. As a result, it is possible to increase the amplitude voltage of the displacement detection applied signal without sacrificing the control voltage. As a result, even if the electrode capacitance is reduced, the appropriate level of the displacement detection detection signal can be easily obtained. Therefore, a signal detection circuit of an electrostatic levitation gyro suitable for miniaturization can be realized.
[0032]
Since the technical matters described in these unpublished prior patent applications 1 and 2 are premised on the invention of the present invention in many parts, they will be repeated here before presenting the subject of the present invention. First, a specific configuration of the electrostatic levitation gyro device will be described with reference to the drawings. 1A and 1B show the structure of the device packaging, wherein FIG. 1A is a front view of the device, FIG. 1B is a plan view of the device with a lid removed, and FIG. 2A is an overall circuit diagram including a signal detection circuit, FIG. 2B is a circuit for generating a displacement detection application signal, and FIG. 2C is a current detection circuit. 3A shows a signal input circuit of a constraint control system, and FIG. 3B shows a signal input circuit of a rotor drive system. In the drawings, the same components as those in the related art are denoted by the same reference numerals, and the gyro mechanism described in the section of the prerequisite technology is also used in the following prior art example as it is. Therefore, the following description will focus on differences from the related art. Also here, for clear comparison and the like, the electronic circuit section is a specific example of an annular rotor type gyro, and the electronic circuit section will be described after the gyro mechanism section is described.
[0033]
The gyro device 70 (see FIG. 1) includes a sealable device package (vacuum container) including a cap 71 (lid) and a box 72 (box, can). Is a gyromechanical unit composed of the gyro rotor 10 and the gyro case 20 described above, a base 73 (mounting substrate) composed of an insulating substrate such as glass, a getter 75 (vacuum maintaining member), and ICs 77 and 78 (integrated circuit). And are stored.
[0034]
The cap 71 and the box 72 are made of a member having good airtightness and easy to process, for example, metal. When the box 72 is covered with the cap 71 and exhausted from the vacuum suction port 76 formed through the front wall of the box 72, When the space is evacuated and the vacuum suction port 76 is plugged, the space is hermetically sealed and a vacuum is established. A large number of pins 74 (external connection terminals) are implanted on the bottom surface of the box 72. The pins 74 are used to provide electrical continuity inside and outside the device package and to support the package at the time of mounting on a printed circuit board or the like. For example, the pins 74 are made of a good conductor similar to the pins of a PGA (Pin Grid Array) package of a multi-pin IC. That is, in this example, they are arranged in a substantially quadrilateral shape, and all pass through the bottom surface of the box 72. The through hole of the pin 74 is filled with, for example, molten glass or the like for fixing, airtightness, and insulation.
[0035]
The base 73 is formed of a flat plate slightly smaller than the inner bottom of the box 72, is supported by a number of pins 74 in the box 72, and is slightly separated from the bottom of the box 72. Although illustration is omitted, a wiring pattern is formed on the upper surface of the base 73, and an appropriate wiring is connected to each of the pins 74. This connection is made rigid with metal or the like, and also serves as a connection between the pin 74 and the base 73. The gyro case 20 and the ICs 77 and 78 are mounted on the upper surface of the base 73. The connection between the gyro case 20 and the wiring patterns can be made by wire bonding. In this example, the ICs 77 and 78 are mounted as bare chips. Therefore, it is performed by a COG (Chip On Glass) method in which connections are made collectively via gold bumps, solder balls, or the like.
[0036]
The gyro mechanism section may be one in which the storage space of the gyro rotor 10 of the gyro case 20 is vacuum-sealed as described above. In this case, since the entire gyro case 20 is housed in a vacuum device package, there is no need for sealing. There is no need to incorporate a getter member in the gyro case 20.
The getter 75 is for adsorbing gases such as oxygen and nitrogen remaining or entering the vacuum space in the device package to maintain a vacuum state, and is similar to a conventional getter member built in the gyro case 20. In comparison, the material is the same, but the size is considerably larger. The getter 75 may be mounted on the base 73, but in this example, a non-evaporable getter which is activated by electric heating is employed. Supported.
[0037]
If the electronic circuit has the configuration shown in FIG. 17A, the ICs 77 and 78 integrate the control output circuit 54, the current detection circuit 51, the supply circuits for the applied signals f1 to f12, and the like. However, in this case, since the electronic circuit is improved around the signal detection circuit, the integrated portions of the ICs 77 and 78 are partially different accordingly. Although a specific integrated portion will be described later after describing the differences of the electronic circuit in detail, the ICs 77 and 78 are mounted on the base 73 as bare chips. The number of chips may be two as shown, may be integrated into one, or may be three or more.
[0038]
Next, the electronic circuit unit will be described. This electronic circuit is different from that of the above-described conventional example (see FIG. 2A), in that an applied signal generating circuit 61 (an applied signal supply circuit) is used instead of the current detection circuit 51 and the displacement detection electrodes 38, 48. And that the superposition of the displacement detection application signals f1 to f12 on the output of the control output circuit 54 is eliminated, and instead, a current detection circuit 64 is attached to each of the control output circuits 54. , 53 are digitized into a rotor control circuit 62 and a control operation circuit 63.
[0039]
The application signal generation circuit 61 may generate a sine wave signal as the displacement detection application signal V0 if the requirement that the frequency is high enough not to affect the movement of the gyro rotor 10, and the amplitude of the displacement detection application signal V0 may be used. May be set arbitrarily within the range allowed by the power supply voltage. However, in this case (see FIG. 2B), in order to generate a triangular wave voltage signal as the displacement detection application signal V0, a pair of constant current circuits are inverted. The current supply and the current suction are alternately repeated by a switch or the like switched by the clock CLKa.
[0040]
The displacement detection application signal V0 generated by such a constant current circuit pair and the switch circuit is supplied to the displacement detection electrode via a suitable coupling capacitor 61a as shown in the figure or directly without such a capacitor. 38, 48. With such a configuration, the displacement detection application current i0 supplied from the application signal generation circuit 61 to the parallel connection point of the displacement detection electrodes 38 and 48 has a rectangular wave shape in which the direction of the constant current is inverted in synchronization with the clock CLKa. And the displacement detection application signal V0 is a triangular wave voltage signal. The frequency of the clock CLKa is set to, for example, 1 MHz or more. This is far higher than the effective frequency of the control voltage of several tens of kHz, which satisfies the above requirements.
[0041]
The current detection circuit 64 (see FIG. 2A) includes 12 or 12 sets for sending control voltages V1, V12, and the like for attitude control from the control operation circuit 63 to the electrostatic support electrodes 31 to 36, 41 to 46. And a control output circuit 54 for sending a control voltage for rotational drive from the rotor control circuit 62 to the rotor drive electrode 37. Each of the current detection circuits 64 (see FIG. 2C) performs a pair of current mirrors 64a and 64b, a differential output line 64c connecting these output lines, and performs signal amplification, noise removal, and the like. It is composed of an amplifier 64d for outputting a detection current i1 for displacement detection and the like.
[0042]
The current mirror 64a has the input side interposed and connected to the high-potential side (+) of the feeder line of the control output circuit 54 (particularly the output stage circuit) of the destination, and the current mirror 64b has the input side of the destination. The power supply line of the control output circuit 54 (particularly, the output stage circuit) is inserted and connected to the low potential side (-) of the power supply line, and both output sides are connected to the differential output line 64c. Accordingly, the current detection circuit 64 detects the output current of the corresponding control output circuit 54 and generates the same or corresponding displacement detection detection currents i1 to i12 and r1 to r6. Has become.
[0043]
Although the operation content of the control operation circuit 63 is basically the same as that of the conventional example, the circuit configuration (see FIG. 3A) is digitized by adopting a DSP 66 (digital signal processor). A / D conversion circuit 65 is provided. In this example, six A / D conversion circuits 65 are provided, and all of them are sampled and sampled at the timing of the clock CLKb and quantized by, for example, 12 bits. The clock CLKb is obtained by shifting the phase of the above-mentioned clock CLKa by, for example, 90 °, and is synchronized with the clock CLKa. If the transient state at the time of switching is removed, the phase difference may be other than 90 °, and the frequency may be multiplied or reduced.
[0044]
The six A / D conversion circuits 65 calculate the difference ΔX in the X direction by calculating the difference between the detection current i1 for detecting the displacement of the electrostatic support electrode 31 and the detection current i12 for detecting the displacement of the electrostatic support electrode 41. And the difference between the detection current i2 for detecting the displacement of the electrostatic support electrode 32 and the detection current i11 for detecting the displacement of the electrostatic support electrode 42, and calculating the component of the Y-direction displacement ΔY. A signal obtained by taking the difference between the extracted signal and the detection current i3 for detecting the displacement to the electrostatic support electrode 33 and the detection current i10 for detecting the displacement to the electrostatic support electrode 43 to extract the component of the Z + φ direction displacement ΔZ + Δφ. And a signal obtained by extracting the component of the Z + θ direction displacement ΔZ + Δθ by taking the difference between the detection current i4 for detecting the displacement of the electrostatic support electrode 34 and the detection current i9 for detecting the displacement of the electrostatic support electrode 44, and Of the detection current i5 for detecting the displacement of the A signal obtained by extracting a component of the displacement ΔZ−Δφ in the Z-φ direction by taking a difference between the detection current i8 for displacement detection to the holding electrode 45 and the detection current i6 for displacement detection to the electrostatic support electrode 36 and the static The difference from the detection current i6 for detecting the displacement to the electrode 46 is taken as a signal obtained by extracting the component of the displacement ΔZ-Δθ in the Z-θ direction.
[0045]
Although the operation content of the rotor control circuit 62 is basically the same as that of the conventional example, the circuit configuration (see FIG. 3B) is also digitized by the use of the DSP 67. Have been. The quantization means may be the same as that of the A / D conversion circuit 65. However, in order to perform the rotor rotation control, it is sufficient if at least one phase of the detection currents r1 to r6 for displacement detection can be grasped. A comparator COMP simpler than the / D conversion circuit 65 is provided for each of the displacement detection detection currents r1 to r6. Each of the binarized displacement detection signals is input to the DSP 67 as needed by the sampling program of the DSP 67 and sampled, and then a three-phase pulse-like signal or the like based on the rotation state of the gyro rotor 10 around the Z axis. The rotation driving control voltage is generated by a known calculation.
[0046]
Among such electronic circuits, those integrated on the ICs 77 and 78 include the control output circuit 54, the current detection circuit 64, and the applied signal generation circuit 61. Although the DSPs 66 and 67 may be dedicated products, general-purpose commercial products are sufficient, and such DSPs 66 and 67 are not integrated in the ICs 77 and 78.
[0047]
The usage and operation of the electrostatic levitation gyro device having such a configuration will be described with reference to the drawings. FIG. 1D is a perspective view showing a device mounting state. 4A is a detailed view of a control voltage application portion, and FIGS. 4B to 4F are signal waveform examples. Here also, the mounting mode of the mechanical section will be described first, and then the operation of the electronic circuit will be described.
[0048]
Before mounting the gyro device 70 on the printed circuit board 80 (see FIG. 1D), a through hole corresponding to the pin 74 and a wiring pattern for electrical connection are formed on the printed circuit board 80 beforehand. ICs such as DSPs 66 and 67 and other electronic components are mounted on the printed circuit board 80 using a general IC mounting technique. A regulator IC 81 and a smoothing capacitor 82 constituting a power supply circuit are also mounted. Then, the pins 74 are inserted into the through holes of the printed circuit board 80 and connected by soldering or the like.
[0049]
Then, the gyro device 70 is fixed to the printed circuit board 80, and thus the gyro case 20 is fixed to the printed circuit board 80, and the electrical connection between the electrodes 31 to 48 of the gyro case 20 and the electronic circuit is established. . Specifically, the ICs 77 and 78, which are built-in parts of the electronic circuit, are connected to the gyro case 20 by the wiring pattern of the base 73 at the time of completion of the assembly of the gyro device 70. Are connected via the wiring pattern of the printed circuit board 80 and the pins 74. Thus, when the electrostatic levitation type gyro device is mounted on the printed circuit board 80 and is incorporated in an automobile or the like, the gyro mechanism unit and the electronic circuit unit become operable.
[0050]
As is apparent from the above description, the gyro device 70 can be easily implemented in almost the same manner as a familiar IC, for example, a PGA type IC. Further, the vacuuming of the gyro device 70 is also intended for a device package which is larger and more durable than the gyro case 20 and is easy to handle. Therefore, the work becomes easier, and the existing equipment and jig can be easily used continuously. Regarding the maintenance of the vacuum state, the getter 75 can be made sufficiently large, for example, it can be made so large that it does not fit in the gyro case 20, so that the vacuum state is maintained for a long time. Conventionally, the vacuum space was sealed with thin glass or the like. However, since the vacuum space is sealed with a package 71 + 72 made of metal or the like which is thicker and has high deformability, the airtight performance is further improved. The vacuum state is maintained for a long time. Moreover, not only the gyro case 20 is built in the gyro device 70 but also ICs 77 and 78 which are a part of an electronic circuit are built in a bare chip state, so that the electronic circuit unit can be compactly mounted. It is going further. Although the ICs 77 and 78 are mounted with bare chips, the internal space of the gyro device 70 surrounding the ICs is in a vacuum state, so that the ICs 77 and 78 are not deteriorated by oxidation or the like.
[0051]
Next, the operation of the electronic circuit will be described (see FIG. 4A). In order to clarify the comparison with the conventional example, the electrode pairs 31 and 41 of the six ring-shaped electrostatic support electrodes are used. The application state of the control voltage will be described in detail. The control voltage V1 is again divided into a pair of a positive voltage V1b and a negative voltage V1a. The positive voltage V1b is applied to the electrostatic support electrode 31b, and the negative voltage V1a is applied to the adjacent electrostatic support electrode 31a. . The control voltage V12 is also divided into a pair of a positive voltage V12b and a negative voltage V12a, and the positive voltage V12b is applied to the electrostatic support electrode 41b, and the negative voltage V12a is applied to the adjacent electrostatic support electrode 41b. You.
[0052]
Then, (see FIG. 4B), a constant offset voltage applied to the electrostatic support electrodes 31 and 41 when the gyro rotor 10 is stationary at the neutral position aside from rotation about the Z axis is Vof, Assuming that the X-axis control voltage component calculated and changed for the attitude control is Vx, the main component of the positive voltage V1b output from the control output circuit 54 is + Vof + Vx, and the main component of the negative voltage V1a is −Vof−Vx. The main component of the positive voltage V12b is set to + Vof-Vx, and the main component of the negative voltage V12a is set to -Vof + Vx. Up to this point, the operation is basically the same as that of the conventional example. However, since the superposition of the displacement detection signal is different from that of the conventional example, the displacement detection application signal V0 is superimposed directly on these control voltages V1, V12 and the like. There is nothing. However, it is affected by the transmission of the displacement detection application signal V0.
[0053]
That is, (see FIG. 4 (c)), the application signal generation circuit 61 generates an application signal V0 for displacement detection whose voltage waveform changes in a triangular waveform, and this is applied to the electrodes 38, 48 for displacement detection, the gyro rotor 10, and the electrostatic sensor. Superimposed on the control voltages V1 and V12 via the supporting electrodes 31 and 41 in order. The amplitude of the displacement detection applied voltage signal V0 can exceed the power supply voltage Vcc of the control output circuit 54 by adding a booster circuit or the like to the applied signal generation circuit 61. It is considerably larger than f12. On the other hand (see FIG. 4B), since the voltage components superimposed on the control voltages V1 and V12 are extremely small, the waveform of the positive voltage V1b does not largely deviate from the waveform of the main component + Vof + Vx, and the negative voltage V1a is Along the main component -Vof-Vx, the positive voltage V12b is along the main component + Vof-Vx, and the negative voltage V12a is along the main component -Vof + Vx.
[0054]
On the other hand, the displacement detection applied voltage signal V0 and the displacement detection applied current i0 (see FIG. 4 (d)) are also controlled through the displacement detection electrodes 38, 48, the gyro rotor 10, the electrostatic support electrodes 31, 41, and the like. The displacement detection applied current i0 is transmitted to the output line of the output circuit 54 based on the capacitance of the plurality of electrodes 31 to 48. It is detected as detection current signals i1 to i12. These current signals (see the detection current i1 for displacement detection in FIG. 4E) show clear current values according to the division, and become rectangular waves having a frequency corresponding to the clock CLKa.
[0055]
4 (f) and FIG. 3 (a), at the timing of the clock CLKb synchronized with the clock CLKa but out of phase, the current signal (i1-i12) reflecting the X-direction displacement ΔX and The similar signals are quantized by the A / D conversion circuit 65, and a known operation for attitude control is performed by the DSP 66 that has taken them. Further, an angular velocity and an acceleration with respect to the inertial space are also calculated. Thus, also in this case, posture control, acceleration detection, and the like are appropriately performed. Further, the detection currents r1 to r6 for displacement detection are binarized and taken into the DSP 67, and a known operation for rotational driving is performed by the taken-in D67SP. Although the upper limit of the fundamental frequency of the rotation drive control voltage is about several hundred Hz, the fundamental frequencies of the displacement detection detection currents r1 to r6 are high as described above, so that the two can be easily and accurately discriminated. Thus, the rotation of the rotor is appropriately performed.
[0056]
As is apparent from the above description, in the signal detection circuit of this electrostatic levitation gyro, the applied voltage signal V0 for displacement detection can be expanded as required, and the control voltage V1, Since V12 and the like can be increased to near the power supply voltage Vcc of the control output circuit 54, a sufficient signal level can be secured even if the capacitance of the plurality of electrodes 31 to 48 is reduced due to the downsizing of the gyro mechanism. As a result, not only can the displacement be properly detected, but also the attitude control performance can be improved.
[0057]
In addition to the technical matters described in the unpublished prior patent applications 1 and 2, the technical matters described in the above-mentioned unpublished prior patent application 3 are also premise of the present invention. Since the section has been carried over to the present invention, the outline thereof will be repeated.
As described above, a gyro mechanism or an electronic circuit is incorporated in a vacuum package to reduce the size in consideration of the mounting situation, and even if the electrode capacity is reduced due to the downsizing of the gyro mechanism, a detection signal for detecting a displacement of an appropriate level is provided. The flow of the displacement detection signal is reversed so as to obtain the above, and the miniaturization of the electrostatic levitation gyro device is promoted, and the application range of the electrostatic levitation gyro device is expanding. However, just because miniaturization is possible does not mean that everything is replaced with a small one.
[0058]
In the case of an electrostatic levitation type gyro device that rotates a gyro rotor and uses its inertia, various sizes are used because the detection accuracy cannot be avoided depending on the size of the gyro rotor. Various voltages are employed for the power supply voltage Vcc, the control voltage V1, and the like according to the size. For example, when the rotor diameter is 1 to 2 mm, a voltage of about 3 V or 5 V is sufficient, but when the rotor diameter exceeds 5 mm, a voltage of 12 V or 15 V is often used.
However, if the voltage of the electronic circuit is high, available electronic components are limited or expensive. In particular, if a semiconductor component that operates at a high speed of 1 MHz or the like and requires a wide dynamic range, such as the current mirror of the current detection circuit 64, is required to have a high withstand voltage performance of about 15 V or more, the realization at an appropriate price is possible. It becomes difficult.
[0059]
In that case, the conventional technique of superimposing the displacement detection applied signal directly on the control voltage is continuously used.
However, the method of detecting the signal component related to the displacement detection applied signal at the output stage circuit of the control voltage by reversing the flow of the displacement detection signal from the conventional one can hardly sacrifice the control voltage. In addition, there are many advantages over the prior art, such as that the level setting of the displacement detection application signal can be performed almost freely without being restricted by the control voltage.
[0060]
Accordingly, a signal detection circuit having a new configuration different from any of the above-described ones has been devised, on the premise of adopting a technique of applying a displacement detection signal to the displacement detection electrode and performing detection closer to the control circuit than the control electrode. ing. The main point is that, when a displacement detection signal is applied to the displacement detection electrode and detection is performed closer to the control circuit than the control electrode, an opposite-phase control voltage is applied to the adjacent control electrode and the in-phase displacement detection is performed. An electrostatic levitation gyro device in which the flow of the displacement detection signal is reversed from that of the conventional one by performing signal detection by extracting the in-phase component based on the transmission of the application signal The thing was realized. Further, further measures are taken so that the influence of the power supply voltage and the control voltage does not affect the detection signal generation circuit as much as possible. For example, when detecting the flow of the displacement detection signal by reversing the flow of the conventional one, a voltage such as a control voltage is used. The common-mode detection circuit can be embodied by passive elements so that the level restriction is relaxed.
[0061]
[Problems to be solved by the invention]
Further, improvements have also been made on the startup sequence (operation start procedure, startup control means). 5A and 5B show a specific example, in which FIG. 5A is a schematic flowchart of a start-up sequence, and FIGS. 5B to 5F are signal waveform examples. These are compared with FIGS. 18 (d) and 19 (c) to (g) of the conventional example described above, but the signal waveforms are omitted, and the positive voltages YP +, YM +, XP +, XM + , RP + only.
[0062]
The improvement is that the control electrode is divided into an electrode for electrostatic support and an electrode for rotation drive, and the control circuit generates the control voltage for controlling the attitude of the gyro rotor and the control voltage for rotation drive separately. The starting sequence is divided into a levitation sequence and a rotation sequence by utilizing what is performed in (1). As a result, the electrostatic levitation gyro device is configured to perform attitude control at the time of startup and confirm the floating of the gyro rotor before rotating.
[0063]
More specifically, referring to FIG. 5A, in the conventional control start (step S12), the attitude control and the rotation drive were performed simultaneously, whereas in this prototype example (step S21), the rotation drive was not started. At this time, the posture control is started. Along with this, the conventional control state stabilization wait (step S13), and in this prototype example, the floating wait (step S22) waits for the relative position of the gyro rotor 10 to fall within a predetermined range.
Then, after the confirmation of the floating is obtained (Step S22) and before the applied calculation is started (Step S14), the rotation drive is started and its confirmation is performed (Steps S23 to S26).
[0064]
That is, in the rotation sequence in the latter half of the startup sequence, the rotation drive is started in addition to the position where the posture control based on the displacement detection has already been performed (step S23). Then, a predetermined time required for acceleration is waited for (Step S24), and then it is confirmed that the rotation speed of the gyro rotor 10 has reached the predetermined speed (Step S25), and the applied calculation is started (Step S14). This is normal startup.
On the other hand, when the rotation speed is not enough, the elapse of the acceleration time is waited again (steps S25 → S26 → S24). At that time, ascending confirmation is also performed (step S26), and when the flying state is impaired, the process returns to the retry of the flying sequence (step S26 → S16).
[0065]
An operation example in such a start-up sequence will be described. Here, for the sake of clear comparison, the gyro rotor 10 is supported by the lower support piece 101 with the gyro mechanism placed with the Y-axis positive direction upward. Suppose you have In addition, the control voltages for attitude control that cause the gyro rotor 10 to generate an electrostatic attractive force in the positive direction of the X axis are defined as a positive voltage XP + and a negative voltage XP− (these correspond to V1b and V1a described above), The attitude control control voltages that generate the electro-gravity are positive voltage XM + and the negative voltage XM- (these correspond to V12b and V12a described above), and the attitude control control voltage that generates the electrostatic attraction in the Y-axis positive direction is a positive voltage. YP + and the negative voltage YP−, the attitude control control voltage that generates the electrostatic attraction in the Y-axis negative direction is the positive voltage YM + and the negative voltage YM−, and the rotation control voltage of the gyro rotor 10 around the Z-axis is three. One of the phase pulse signals is a positive voltage RP +.
[0066]
Also in this case, the components of the displacement detection signals V0, i1 to i12 having a high frequency and the invariant offset components do not affect the movement of the gyro rotor 10, and if these signal components are ignored, the positive voltage XP + and the negative voltage XP- Is an inverted waveform, the positive voltage XM + and the negative voltage XM- are also inverted waveforms, the positive voltage YP + and the negative voltage YP- are also inverted waveforms, and the positive voltage YM + and the negative voltage YM- are also inverted waveforms.
Further, a case in which normal startup is performed after two startup failures is taken as a specific example. That is, the start is started at the time t1, the start is interrupted at the time t2, the start is restarted at the time t3, the interrupt is restarted at the time t4, the start is restarted at the time t5, the start is successful at the time t6, and the steady state is established. Shall enter.
[0067]
Then, immediately after the start of the start-up (time t1 to t2), the positive voltage YP + and the negative voltage YP- that generate the levitation force become the maximum output so as to eliminate the sinking state of the gyro rotor 10 (see FIG. 5B). The opposite positive voltage YM + and negative voltage YM- have the minimum output (see FIG. 5C), and the positive voltage XP +, the negative voltage XP-, the positive voltage XM +, and the negative voltage acting in the direction orthogonal to the floating direction or the sinking direction. XM- is an intermediate output (see FIGS. 5D and 5E). Although illustration and detailed description are omitted, the control voltages in the Z direction and the φ and θ directions also have appropriate intermediate outputs. Note that, unlike the related art, the positive voltage RP + that generates the rotational driving force is not output (see FIG. 5F).
[0068]
Even if the state is continued, if a predetermined time has elapsed without the gyro rotor 10 rising, the attitude control is interrupted. In this state (time t2 to t3), output of all control voltages is suppressed (see FIGS. 5B to 5F).
Then, when the posture control is resumed after a predetermined time has elapsed (time t3 to t4), since the surface floats again, the positive voltage YP + and the negative voltage YP− have the maximum output, the positive voltage YM + and the negative voltage YM− have the minimum output, Other attitude control positive voltages XP + and the like have intermediate outputs. Here, the positive voltage RP + is not output.
If it still does not float, the control is interrupted again (time t3 to t4), and the output of all control voltages is suppressed.
[0069]
Further, after a lapse of a predetermined time, the attitude control is resumed (time t5), and the surface of the vehicle again floats, so that the positive voltage YP + and the negative voltage YP- have the maximum output, the positive voltage YM + and the negative voltage YM- have the minimum output, and the other positive voltage XP + etc. are intermediate outputs. No positive voltage RP + is output.
Then, when the gyro rotor 10 floats (time t6), the positive voltage YP + and the negative voltage YP-, which generate a levitation force, immediately change from the maximum output to the intermediate output (see FIG. 5B), and the positive voltage YM + attracting them And the negative voltage YM- also changes from the minimum output to the intermediate output (see FIG. 5C).
[0070]
In this manner, when the relative displacement of the gyro rotor 10 with respect to the gyro case 20 falls within a predetermined allowable range, that is, when it is detected and confirmed by displacement detection or the like, the startup sequence shifts from the levitation sequence to the rotation sequence. The positive voltage RP + that generates the rotational driving force enters a pulse output state (see FIG. 5F). The gyro rotor 10 floating in a vacuum generally starts rotating smoothly and is further accelerated to reach a predetermined rotation speed. Thereafter (from time t6), the attitude control and the rotation drive in the steady state described above are performed, and applied calculations such as acceleration calculation are also performed.
[0071]
As described above, in the electrostatic levitation type gyro device of this prototype example, the gyro is controlled by performing the attitude control at the time of startup by utilizing the fact that the electrodes for electrostatic support and the electrodes for rotation driving can be individually controlled. Rotational drive is performed after confirming the floating of the rotor, so that it is possible to avoid rubbing between the gyro rotor 10 and the support piece 101 at startup. Therefore, it is possible to reliably prevent an undesired situation such as generation of dust such as scraping pieces from a contact portion between the two. When the gyro rotor 10 rotates, the relative speed between the gyro rotor 10 and the support piece 101 immediately increases because the bearing piece 101 is located on the outer peripheral side of the gyro rotor 10. Are easily scratched.
[0072]
Since the generation of dust in the gyro rotor storage space is reduced, failure due to dust is reliably reduced. It is also expected that start-up failures due to dust are reduced.
However, in such an electrostatic levitation type gyro device, the levitation ability is somewhat reduced because the rotational force of the pulse drive does not work in the levitation sequence and its influence is large. If there is a pulse-driven rotational force, this causes micro-vibration in the gyro rotor 10, etc., so that generally strong static friction is changed into generally weak dynamic friction, microscopic adhesion that generates intermolecular force is broken, It is considered that a natural oxide film that generates an undesired electrostatic attraction that is not controlled by interrupting the complete discharge is broken, but such an opportunity is considered to be reduced by later rotation driving.
[0073]
Therefore, while presuming the adoption of a startup sequence in which attitude control is performed at startup to check the floating of the gyro rotor and then rotation is performed, the startup sequence is devised to overcome the drawbacks and improve the floating performance. Is a technical issue.
The present invention has been made to solve such a problem, and has as its object to realize an electrostatic levitation gyro device that floats at a high rate without rubbing a rotor.
[0074]
[Means for Solving the Problems]
The configuration, operation and effect of the first to fourth solving means invented to solve such a problem will be described below.
[0075]
[First Solution]
According to a first aspect of the present invention, an electrostatic levitation gyro device includes a gyro case having a gyro rotor built therein so as to be electrostatically levitable and rotatable, and a plurality of gyro cases formed therein. A control circuit for generating and applying a control voltage for controlling the attitude of the gyro rotor and for controlling the rotation of the gyro rotor to the electrode for electrostatic support and the electrode for rotation of the electrodes, and not applying the control voltage among the plurality of electrodes In an electrostatic levitation type gyro device including a signal detection circuit for transmitting and receiving a signal for relative displacement detection between the gyro rotor and the gyro case via a displacement detection electrode, the gyro rotor is configured to perform a posture control at the time of startup. Starting control means for performing rotation driving after confirming the floating of the electrostatic actuator, and intermittently intermittently controlling the attitude control voltage or a higher floating control voltage. A floating reinforcing means for applying the lifting electrodes provided, in which the start control means has to actuate the floating reinforcing means when floating check not satisfied the gyro rotor.
[0076]
In the electrostatic levitation gyro device according to the first solution, the startup control means is activated at the time of startup, whereby the attitude control is first performed, and the signal that the gyro rotor has floated by this attitude control is obtained. When confirmation is made based on the detection, rotation driving is performed thereafter. On the other hand, when the confirmation of the floating of the gyro rotor is not established, the floating control means is operated by the activation control means, whereby the control voltage for attitude control or the control voltage for floating higher than this is interrupted. At the same time, the voltage is applied to the electrode for electrostatic support.
[0077]
Due to the intermittent application to the electrode for electrostatic support, even if there is no pulse-like rotational drive, the gyro rotor has not only a force to float it but also a force to vibrate it, so that the gyro rotor Regardless of whether the undesired force that hinders floating is due to frictional force, intermolecular attraction, attraction of residual static electricity, or adhesion of dust, the relaxation is suppressed. Therefore, the levitation force by the attitude control functions sufficiently without being reduced. In addition, in this state, since the rotary drive is not performed yet, there is no possibility that the contact support surface of the gyro rotor is rubbed.
Therefore, according to the present invention, it is possible to realize an electrostatic levitation gyro device that floats at a high rate without rubbing the rotor.
[0078]
[Second Solution]
An electrostatic levitation gyro device according to a second aspect of the present invention is the electrostatic levitation gyro device according to the first aspect of the invention, wherein the levitation enhancing means is configured as described above. A control voltage for attitude control or a control voltage for sinking that drives the gyro rotor in a direction opposite to the control voltage for floating is generated and also intermittently applied to the electrode for electrostatic support, That is.
[0079]
When the levitation force depends on the electrostatic attraction, if the normal attitude control is performed, no effective control voltage is applied to the electrostatic support electrode on the contact support side during the sinking state. In the electrostatic levitation type gyro device, when the gyro rotor floating confirmation is not established, the control voltage for attitude control or the control voltage for levitation is intermittently applied to the electrostatic support electrode on the remote side, and the contact support The sinking control voltage is intermittently applied to the electrostatic support electrode on the side. When the sink control voltage is applied, the gyro rotor is driven in a direction opposite to the floating, that is, in a direction in which the sink is settled. Power works.
As a result, the force for causing the gyro rotor to vibrate increases, and the levitation inhibiting force decreases.
Therefore, according to the present invention, it is possible to realize an electrostatic levitation gyro device that floats at a higher rate without rubbing the rotor.
[0080]
[Third Solution]
An electrostatic levitation gyro device according to a third aspect of the present invention is the electrostatic levitation gyro device according to the first and second aspects of the invention, wherein the levitation enhancement means Generates a swing control voltage for driving the gyro rotor in a direction orthogonal or oblique to the attitude control voltage or the floating control voltage, and applies the generated voltage to the electrostatic support electrode. It is that.
[0081]
Alternatively, as described in claim 5 at the beginning of the application, a gyro case in which a gyro rotor is electrostatically levitated and rotatably contained, and an electrostatic support electrode and a rotation drive electrode among a plurality of electrodes formed on the gyro rotor. A control circuit that generates and applies control voltages for controlling the attitude and rotation of the gyro rotor to the electrodes, respectively, and the gyro rotor and the gyro rotor through a displacement detection electrode to which the control voltage is not applied among the plurality of electrodes. In an electrostatic levitation type gyro device including a signal detection circuit for transmitting and receiving a signal for detecting a relative displacement to and from a gyro case, an attitude control is performed at the time of startup, and a rotation drive is performed after confirming the floating of the gyro rotor. Control means for applying a control voltage for causing the gyro rotor to roll to the electrode for electrostatic support; Stage is adapted to actuate the floating reinforcing means when floating check unsatisfied said gyro rotor, is that.
[0082]
In the electrostatic levitation gyro device according to the third solution, when the levitation check is not established, the gyro rotor swings and rotates by applying a control voltage to the electrostatic support electrode instead of the rotary drive electrode. Movement is triggered.
In the swinging / rolling state, unlike the rotating operation, the surface movement on the sinking side / contact support side, which causes friction, is avoided / suppressed, and the source force of the swinging / rolling is reduced as in the case of leverage. It changes its direction with the contact part as a fulcrum and an action point, and also works in the floating direction.
[0083]
As described above, not only the levitation force of the attitude control but also the levitation force of a different type is added, so the levitation mechanism is diversified and the chance of levitation increases.Therefore, the gyro rotor has a high probability even without the rotation drive. Will emerge.
Therefore, according to the present invention, it is possible to realize an electrostatic levitation gyro device that floats at a high rate without rubbing the rotor.
[0084]
[Fourth Solution]
According to a fourth aspect of the present invention, there is provided an electrostatic levitation gyro device according to the first to third aspects of the present invention, wherein the levitation enhancing means is provided. Changes the intermittent cycle.
[0085]
When using vibration, the effect is increased if the vibration cycle is adjusted to the natural frequency.However, the natural frequency varies from individual to individual due to dimensional differences at the time of manufacturing, and other factors that hinder the floating of the gyro rotor However, since these and the contact state affect the natural frequency, even if the optimum vibration period can be estimated to some extent, it cannot be completely determined. On the other hand, in the electrostatic levitation type gyro device according to the fourth solution, the intermittent period changes, so that the oscillation period induced by the gyro rotor may be in an optimum state at any timing. Be expected.
As a result, the vibration caused by the gyro rotor is enhanced, and the levitation inhibiting force is reduced.
Therefore, according to the present invention, it is possible to realize an electrostatic levitation gyro device that floats at a higher rate without rubbing the rotor.
[0086]
BEST MODE FOR CARRYING OUT THE INVENTION
An embodiment for implementing the electrostatic levitation gyro device of the present invention achieved by such a solution will be described.
[0087]
A first embodiment of the present invention is an electrostatic levitation type gyro device of the above-described solving means, in which a new configuration is adopted in a signal detection circuit in which the flow of a displacement detection signal is reversed from that in the related art. .
That is, a gyro case in which a gyro rotor is electrostatically levitated and rotatably built therein, and an electrostatic support electrode and a rotation drive electrode among a plurality of electrodes formed on the gyro rotor are used for controlling the attitude and rotation of the gyro rotor. A control circuit for generating and applying a drive control voltage, and an application for applying a displacement detection application signal for detecting a relative displacement between the gyro rotor and the gyro case to a part of the plurality of electrodes. A signal supply circuit, and a signal component relating to the displacement detection applied signal at a position passing through a displacement detection electrode to which the control voltage is not applied among the plurality of electrodes to generate a displacement detection detection signal and generate the displacement detection signal. A detection signal generation circuit to be sent to the circuit, and at least one of the control voltages provided in the control circuit for attitude control, An output stage circuit that generates a pair of phases and distributes and applies the pair to adjacent ones of the plurality of electrodes, wherein the application signal supply circuit includes the displacement detection application gyro. A signal is applied to the displacement detection electrode, and the detection signal generation circuit includes a plurality of in-phase detection circuits provided on the output side of each of the output stage circuits, and the in-phase detection circuit includes: Each of them is configured to detect a signal component related to the displacement detection application signal by extracting an in-phase component from a pair having an anti-phase relationship, which is an output of an output stage circuit of an attachment destination. .
[0088]
In the electrostatic levitation type gyro device of such an embodiment, a displacement detection signal is applied to a displacement detection electrode, and then transmitted to a plurality of control electrodes via a gyro rotor. Reach the output side of the circuit. Since the change in capacitance of each control electrode is reflected in the transmission state and degree of transmission at that time, if the signal component related to the displacement detection applied signal is detected, the gyro rotor and the gyro case can be connected based on the detected value. It is possible to calculate the relative displacement.
[0089]
The detection is performed by extracting an in-phase component based on the fact that an applied signal for displacement detection is transmitted to an adjacent electrode in the same phase. In addition, since a control voltage of the opposite phase is applied to such an adjacent control electrode, the extraction of the common-mode component is performed by using a cheap electronic component having a high withstand voltage and a high response such as a passive element. Can be embodied. For example, it can be performed by a method such as addition of signals or partial pressure. By such extraction, the detection signal for displacement detection is separated from the control voltage and becomes a single signal, so that the subsequent processing no longer requires a high withstand voltage performance as in the output stage circuit of the control circuit. Not done.
[0090]
In this manner, the displacement detection signal is applied to the displacement detection electrode, the detection is performed closer to the control circuit than the control electrode, and at that time, the opposite control voltage is applied to the adjacent control electrode and the in-phase control voltage is applied. The detection of the signal component related to the displacement detection application signal is performed by extracting the in-phase component based on the transmission of the displacement detection application signal, and the current detection is performed by providing a current mirror or the like. Even if the signal is different from the one described above, it is possible to appropriately detect a desired signal.
Therefore, according to this embodiment, it is possible to realize a new electrostatic levitation type gyro device in which the flow of the displacement detection signal is reversed from the conventional one.
[0091]
[Second embodiment]
The second embodiment of the present invention is the electrostatic levitation gyro device according to the first embodiment described above, wherein each of the in-phase detection circuits comprises a series circuit of a capacitive element, and outputs in opposite phases (that is, outputs in opposite phases to each other). A pair of output signals), a midpoint voltage detection circuit for detecting a midpoint voltage (that is, an intermediate voltage between the two signals), and the control voltage provided between the midpoint voltage detection circuit and an output stage circuit to which the midpoint voltage detection circuit is attached. And a current limiting circuit that does not allow the current of the frequency component of the displacement detection applied signal to pass, but allows the passage of the current of the frequency component.
[0092]
In the electrostatic levitation gyro device of such an embodiment, the in-phase detection circuit is embodied by a midpoint voltage detection circuit and a current limiting circuit, and the midpoint voltage detection circuit is a capacitive element that is a passive element. Is embodied in a series circuit. The current limiting circuit is also easily embodied by a passive element such as a resistor, and the presence of the current limiting circuit allows the displacement detection applied signal to be transmitted to the midpoint voltage detection circuit without escaping to the output stage circuit.
Such a common-mode detection circuit is composed of passive elements, has a high withstand voltage, a high responsiveness, and is inexpensive.
Therefore, according to this embodiment, it is possible to realize an electrostatic levitation type gyro device in which the restriction by the voltage level such as the control voltage is gentle when detecting the flow of the displacement detection signal by reversing the flow from the related art.
[0093]
Specific embodiments for carrying out the electrostatic levitation gyro device of the present invention achieved by the above-described solution and embodiments will be described with reference to the following first to fifth embodiments. The first embodiment shown in FIGS. 6 to 10 embodies the above-described first solution (initially claim 1) and each embodiment, and the second embodiment shown in FIG. The third embodiment shown in FIGS. 12 and 13 is an embodiment of the second solution (the first claim 2), and is one of the third solution (the first claim 3). The fourth embodiment shown in FIG. 14 embodies the above-described fourth solution (initial claim 4), and the fifth embodiment shown in FIG. The present invention embodies the other of the above-mentioned third solving means (initial claim 5) and the fourth solving means (initial claim 4).
[0094]
In the drawings, the same reference numerals are given to the same components as those mentioned in the prerequisite technology column, the conventional technology column, and the undisclosed prior art column. In addition, the gyro mechanism section described in the section of the premise technology is used as it is in each of the following embodiments, so repeated description will be omitted, and hereinafter, differences from known prior art and undisclosed prior art will be described. The explanation will focus on the points.
Here also, for clear comparison and the like, a specific example of the electronic circuit unit is one corresponding to the annular rotor type gyro.
[0095]
[First embodiment]
A specific configuration of a first embodiment of the electrostatic levitation gyro device of the present invention will be described with reference to the drawings. 6A is a plan view in which a package lid is removed, and FIG. 6B is a vertical sectional front view. 7A is an entire circuit diagram including a signal detection circuit, FIG. 7B is a circuit for generating a displacement detection applied signal, and FIG. 7C is a detection signal generation circuit. Is a detailed diagram of a control voltage application portion and a detection signal generation circuit. 9A is a schematic flowchart of a startup sequence, and FIG. 9B is a schematic flowchart of a flying enhancement process.
[0096]
The difference between this electrostatic levitation type gyro device (see FIGS. 6 to 10) and the examples described in the above-mentioned prior patent applications 1 and 2 (see FIGS. 1 to 4) is an improvement in the packaging method (see FIG. 1 →). FIG. 6), improvements relating to the signal detection circuit (FIG. 2 → FIG. 7), and improvements relating to the activation sequence (activation control means) (FIG. 18 → FIG. 5 → FIG. 9).
Hereinafter, differences will be described in that order.
[0097]
First, the improvement points regarding the packaging method will be described. The electrostatic levitation gyro device 97 shown in FIG. 6 is an improvement of the device shown in FIG. 1 described above. In order to make the base 73 of the glass substrate hard to break, the base 73 has a disk shape. I have. Accordingly, the pins 74 are also arranged in a circular shape. The package also has a structure in which the box 72 is covered with the cap 71, and a structure in which the disk-shaped bottom plate 72 is covered with the round cap-shaped cap 71.
[0098]
Further, the pin 74 is disengaged from the base 73 to the outer peripheral side, and the joint between them is no longer a rigid joint. The electrical connection between the two is made by a bonding wire 99, and the mechanical connection for supporting the base 73 floating from the package bottom plate 72 is made by an elastic support member 98 made of, for example, a leaf spring. Since the elastic support member 98 is interposed between the pin 74 and the base 73 so that the base 73 is elastically supported only by the elastic support member, the function of absorbing the impact is improved. As a problem when the impact is applied, in addition to the damage to the base 73, when the rotor collides with the electrode or the stopper and the rotation of the rotor stops, it is necessary to repeat the flying and rotation sequence. Can be avoided.
[0099]
Next, the difference between the signal detection circuits will be described. The signal detection circuits shown in FIGS. 7 and 8 are different from those shown in FIGS. The difference is that an application signal generation circuit 90 for generating a rectangular wave voltage is provided, and an in-phase detection circuit 91 is replaced by the current detection circuit 64 and becomes a main part of the detection signal generation circuit. Others are basically the same.
[0100]
The applied signal generation circuit 90 (see FIG. 7B), as in the case of the applied signal generation circuit 61, has a sine wave as the displacement detection applied signal V0 if the requirement that the frequency is high enough not to affect the movement of the gyro rotor 10. Although a signal may be generated, here, in order to generate a rectangular wave signal suitable for digitization, the clock CLKa is amplified by an amplifier to generate the displacement detection applied voltage signal V0. Also in this case, since the displacement detection applied voltage signal V0 is applied to the displacement detection electrodes 38 and 48, the amplitude of the displacement detection applied signal V0 can be arbitrarily set within the range permitted by the power supply voltage.
[0101]
The in-phase detection circuit 91 is provided for each control output circuit 54 (see FIG. 7A), and each of the in-phase detection circuits 91 (see FIG. 7C) includes one midpoint voltage detection circuit 92 and two current limiting circuits 93. That is, it is provided on the output side of the control output circuit 54.
The control output circuit 54 that applies the control voltage V1 to the electrostatic support electrode 31 will be described as a specific example (see FIG. 7C). As described above, the electrostatic support electrode 31 is connected to the adjacent electrostatic support electrode 31. The control voltage V1 includes a support electrode 31a and an electrostatic support electrode 31b, and the control voltage V1 is divided into a pair of a negative voltage V1a and a positive voltage V1b, which are in opposite phases to each other. The negative voltage V1a is applied to the adjacent electrostatic support electrode 31a.
[0102]
On the premise of this, the in-phase detection circuit 91 detects the signal component m1 related to the displacement detection applied voltage signal V0 by extracting the in-phase component from the opposite-phase outputs V1a and V1b of the control output circuit 54 at the destination. Then, this is sent to the control operation circuit 63 instead of the displacement detection detection current i1 as the displacement detection detection signal m1. Therefore, the midpoint voltage detection circuit 92 is connected to the line of the negative voltage V1a. One of the current limiting circuits 93 is connected to the line of the negative voltage V1a between the midpoint voltage detecting circuit 92 and the control output circuit 54, and is connected to both the line of the positive voltage V1b like a bridge. The other is inserted and connected to the line of the positive voltage V1b.
[0103]
As an example of a specific circuit configuration (see FIG. 8A), the midpoint voltage detection circuit 92 includes a circuit in which two capacitors C (capacitance elements) having the same capacitance are connected in series. One end is connected to the line of the positive voltage V1b, the other end is connected to the line of the negative voltage V1a, the detection signal m1 is taken out from the connection point between the capacitors C, and this signal line extends to the control operation circuit 63. Each of the current limiting circuits 93 includes a resistor R, and is connected between the output terminal of the control output circuit 54 and the connection point of the capacitor C for each of the lines of the negative voltage V1a and the positive voltage V1b. . Although repeated detailed description is omitted, the neutral point voltage detection circuit 92 and the current limiting circuit 93 are similarly attached to the electrostatic support electrode 41 that forms a pair opposite to the electrostatic support electrode 31 to detect displacement. The use detection signal m12 is generated and is also sent to the control operation circuit 63. Although detailed drawings are omitted, the same applies to the other control electrodes 32 to 36 and 42 to 46.
[0104]
Further, the improvement of the start-up sequence with respect to the configuration will be described. The difference between the start-up sequence shown in the flowchart of FIG. 9 and that of FIG. 5 is that when the ascent is stopped, the attitude control is stopped and then a predetermined retry (retry) is performed. This means that the levitation enhancement processing (levitation enhancement means) is executed at the timing of waiting for the passage of time (step S17) instead of simply waiting (step S30).
That is, (steps S31 to S32), when the gyro rotor floating check is not established, the control voltage for attitude control is doubled as much as possible to generate a control voltage for floating, and this is applied to the electrode for electrostatic support while intermittently. It has become.
[0105]
In detail, including the above-described portions, in this start-up sequence (see FIG. 9), after performing predetermined initialization processing such as clearing of the working memory (step S11), first, the attitude control is performed to perform the levitation sequence. Start (step S21). As a result, the attitude control and the displacement detection necessary for the attitude control are performed, but the rotational drive is not performed. Then, when the gyro rotor 10 is confirmed to float and a positive result is obtained within a predetermined time (steps S22 and S15), that is, when the relative position of the gyro rotor 10 falls within a predetermined range, the process proceeds to a rotation sequence. Then, the rotation drive is also started (step S23), and the elapse of a predetermined time required for acceleration is waited (step S24). Then, it is confirmed that the rotation speed of the gyro rotor 10 has reached the predetermined speed (step S25). The applied operation is started (Step S14). This is normal startup.
[0106]
On the other hand, when the gyro rotor 10 does not float, a retry is performed as follows. That is, when the ascent is not confirmed after waiting for a predetermined time, for example, about 5 seconds (step S15), it is determined that the ascent is unsuccessful, and the ascent control is interrupted (step S16), and the ascent process is performed (step S30). In this surfacing enhancement processing, special surfacing control is performed by deforming the normal attitude control instead of completely stopping the displacement detection and attitude control. Specifically, first, the calculation mode is switched from the normal mode to the flying height enhancement mode.
[0107]
In the levitation enhancement mode, the attitude control voltages V1 to V12 calculated by the normal attitude control calculation are doubled, and those that exceed the maximum outputtable value are converted to the maximum values, and these are converted to the levitation control. The voltage is set (step S31). Then, these floating control voltages are applied to the corresponding electrostatic support electrodes 31 to 36, 41 to 46 instead of the normal attitude control voltages V1 to V12. (Step S32). Then, after the intermittent application is continued for a predetermined time, for example, about 5 seconds, the flying enhancement processing is finished (step S33), and then the normal attitude control is restarted (step S21).
[0108]
Further, the retry may be performed by returning from the rotation sequence to the flying sequence. That is, in the rotation sequence, when the rotation speed is insufficient, the elapse of the acceleration time is waited again (steps S25 → S26 → S24). At that time, ascending confirmation is also performed (step S26), and when the flying state is impaired, the process returns to the retry of the flying sequence (step S26 → S16).
[0109]
The usage and operation of the electrostatic levitation gyro device according to the first embodiment will be described with reference to the drawings. 8B to 8E are signal waveform examples. 10A is a cross-sectional plan view of the gyromechanism portion, FIGS. 10B to 10F are all signal waveform examples, and FIGS. 10G and 10H are main portions of the cross-sectional plane of the gyromechanism portion. It is an enlarged view.
First, an operation in a steady state after normal startup will be described with reference to FIG. 8, and then an operation at startup will be described with reference to FIG.
[0110]
First, the operation and the like in a steady state will be described (see FIGS. 8B to 8E). Here, the electrode 31 of the six pairs of annular rotor-type electrostatic support electrodes will be described in detail.
Then (see FIG. 8 (b)), the offset voltage Vof applied to the electrostatic support electrode 31 and the X-axis control voltage component Vx calculated and changed for the attitude control are determined by the above-mentioned prior patent applications 1 and 2. Since this is the same as in the description example, the main component of the positive voltage V1b output from the control output circuit 54 is set to + Vof + Vx, and the main component of the negative voltage V1a is set to −Vof−Vx. , The main component of the positive voltage V12b is set to + Vof−Vx, and the main component of the negative voltage V12a is set to −Vof + Vx.
The control voltage V1 of the opposite phase, that is, the negative voltage V1a and the positive voltage V1b are also sent from the control output circuit 54 to the electrode 31 for electrostatic support, and the displacement detection application signal V0 may be directly superimposed thereon. Instead, the displacement detection application signal V0 is transmitted from the electrostatic support electrode 31 to the control output circuit 54 in the opposite direction.
[0111]
That is, (see FIG. 8 (c)), the applied signal generation circuit 90 generates a displacement detection applied signal V0 whose voltage waveform is a rectangular wave having a duty ratio of 50%, and this is applied to the displacement detection electrode 38 and the gyro rotor 10. Superimposed on the control voltage V1 via the electrostatic support electrodes 31 in order. The amplitude of the displacement detection applied voltage signal V0 can exceed the power supply voltage Vcc of the control output circuit 54 as in the case of the applied signal generation circuit 61 if a booster circuit or the like is added to the applied signal generation circuit 90. , Is considerably larger than the conventional displacement detection applied signal f1 or the like. On the other hand (see FIG. 8B), since the voltage component superimposed on the control voltage V1 is extremely small, the waveform of the positive voltage V1b does not largely deviate from the waveform of the main component + Vof + Vx, and the negative voltage V1a is the main component. Along the −Vof−Vx, all draw substantially the same waveform as the main component.
[0112]
Since the displacement detection applied voltage signal V0 is transmitted to the adjacent electrostatic support electrodes 31a and 3b in the same phase, it is transmitted to the output line of the control output circuit 54 via the electrostatic support electrode 31. In this case, they are superimposed in the same phase on the control voltages V1a and V1b of opposite phases (see the solid line graph in FIG. 8B). Assuming that this voltage component is m1, the positive voltage V1b becomes + Vof + Vx + m1, and the negative voltage V1a becomes -Vof-Vx + m1. Then, the midpoint voltage detection circuit 92 detects a voltage exactly intermediate between the two. The detection signal m1 (see FIG. 8D) includes only the in-phase component related to the displacement detection applied voltage signal V0 because the negative-phase component of the control voltage V1 is canceled out and does not remain. The waveform is a rectangular wave having a frequency corresponding to the clock CLKa, if the disturbance at the edge or the like is ignored. The amplitude of the waveform is the capacitance between the electrostatic support electrode 31 and the gyro rotor 10 and the relative displacement between the two. ΔX is accurately reflected.
[0113]
Then, at the timing of the clock CLKb synchronized with the clock CLKa but out of phase (see FIGS. 8E and 8A), the detection signal m1 reflecting the X-direction displacement ΔX and the electrostatic support electrode The detection signal m12 similarly obtained from the 41 side is appropriately amplified and the like, quantized by the A / D conversion circuit 65, and the other electrostatic support electrodes 32 to 36 and the electrostatic support electrodes 42 to 46 are further processed. Similarly, a detection signal for displacement detection is obtained by the in-phase detection circuit 91, quantized by the A / D conversion circuit 65, and a known operation for attitude control is performed by the DSP 66 which has taken in the detection signal. Further, an angular velocity and an acceleration with respect to the inertial space are also calculated. Thus, also in this case, posture control, acceleration detection, and the like are appropriately performed. Further, although the signs of the displacement detection detection signals r1 to r6 are not changed in the drawing, they are also obtained not as current signals but as voltage signals, which are binarized and taken into the DSP 67, and the D67SP obtained by taking these As a result, a known calculation for rotational driving is performed.
[0114]
The capacitance of the capacitor C and the resistance value of the resistor R are determined based on the capacitance between the electrostatic support electrode 31 and the gyro rotor 10, the output voltage of the control output circuit 54, and the like. The current of the frequency component included in Vof + Vx passes through the current limiting circuit 93 well (that is, the resistance can be ignored in a long cycle), but the current of the frequency component of the displacement detection applied voltage signal V0 passes through the current limiting circuit 93. It is selected so that it hardly passes (that is, the resistance cannot be ignored in a short cycle). As an example, the frequency of the anti-phase component Vx of the control voltage V1 is at most several tens of kHz, the frequency of the applied voltage signal V0 for displacement detection, that is, the basic frequency of the detection signal m1 is 1 MHz, and the static When the capacitance is about 0.1 pF, the capacitor C and the resistor R may be 20 pF and 250 kΩ, respectively.
[0115]
As a result, the control voltage V1 is appropriately applied to the electrostatic support electrode 31 regardless of the presence or absence of the in-phase detection circuit 91. In addition, the signal component related to the displacement detection applied voltage signal V0 is generally transmitted to the midpoint voltage detection circuit 92 by the current limiting circuit 93 without being absorbed by the control output circuit 54 having a small output impedance. Therefore, the detection signal m1 is reliably detected while having a small amplitude. The same applies to other detection signals for displacement detection.
Thus, the rotor attitude control is appropriately performed. Similarly, the rotation of the rotor whose fundamental frequency is at most about several hundred Hz is appropriately performed.
[0116]
As is clear from the above description, in the signal detection circuit of the electrostatic levitation type gyro of this embodiment, the displacement detection applied voltage signal V0 can be expanded as necessary, and it is easy to control. Since the voltages V1, V12, etc. can be increased to near the power supply voltage Vcc of the control output circuit 54, a sufficient signal level is ensured even if the capacitance of the multiple electrodes 31 to 48 is reduced due to the downsizing of the gyro mechanism. This not only contributes to appropriate detection of displacement, but also contributes to improvement of attitude control performance. Further, since the capacitor C and the resistor R as described above are compatible with a frequency of several MHz or more, those having a withstand voltage of several tens V or more can be easily obtained. The present invention can be applied not only to a small gyro device in which the power supply voltage Vcc and the control voltage V1 and the like are about several volts but also to an electrostatic levitation gyro device in which the power supply voltage Vcc and the control voltage V1 and the like exceed tens of volts. be able to.
[0117]
Next, the operation at the time of startup and the like will be described in detail (see FIG. 10). Here also, for clear comparison, it is assumed that the gyro rotor 10 is supported by the lower support piece 101 with the gyro mechanism placed with the Y-axis positive direction upward (see FIG. 10A). In addition, the control voltages for attitude control that cause the gyro rotor 10 to generate an electrostatic attractive force in the positive direction of the X axis are defined as a positive voltage XP + and a negative voltage XP− (these correspond to V1b and V1a described above), The attitude control control voltages that generate the electro-gravity are positive voltage XM + and the negative voltage XM- (these correspond to V12b and V12a described above), and the attitude control control voltage that generates the electrostatic attraction in the Y-axis positive direction is a positive voltage. YP + and the negative voltage YP−, the attitude control control voltage that generates the electrostatic attraction in the Y-axis negative direction is the positive voltage YM + and the negative voltage YM−, and the rotation control voltage of the gyro rotor 10 around the Z-axis is three. One of the phase pulse signals is a positive voltage RP +.
[0118]
Also in this case, the components of the displacement detection application signal V0 and the detection signals m1 to m12 having a high frequency and the invariant offset components do not affect the movement of the gyro rotor 10, so if these signal components are ignored, the positive voltage XP + and the negative voltage XP + The voltage XP- has an inverted waveform, the positive voltage XM + and the negative voltage XM- also have an inverted waveform, the positive voltage YP + and the negative voltage YP- also have an inverted waveform, and the positive voltage YM + and the negative voltage YM- also have an inverted waveform.
Further, for comparison, a case where a normal startup is performed after two startup failures is also taken as a specific example. That is, (see FIG. 10B), the start is started at the time t1, the start is interrupted at the time t2, the start is restarted at the time t3, the interrupt is restarted at the time t4, the start is restarted at the time t5, and the time t6 is restarted. It is assumed that the startup is successful and a steady state is entered.
[0119]
Then, immediately after the start of the startup (time t1 to t2), the normal attitude control is performed in the levitation sequence, so that the positive voltage YP + and the negative voltage YP− that generate the levitation force are canceled so that the gyro rotor 10 is settled. Is the maximum output (see FIG. 10 (b)), and the opposite positive voltage YM + and negative voltage YM− are the minimum output (see FIG. 10 (c)), and the positive voltage acting in the direction perpendicular to the floating or sinking direction. XP +, negative voltage XP-, positive voltage XM +, and negative voltage XM- are intermediate outputs (see FIGS. 10D and 10E). Although illustration and detailed description are omitted, the control voltages in the Z direction and the φ and θ directions also have appropriate intermediate outputs. In the flying sequence, the positive voltage RP + that generates the rotational driving force is not output (see FIG. 10F).
[0120]
Even if the state is continued, when the predetermined time has elapsed without the gyro rotor 10 rising, the normal attitude control is interrupted, and the process shifts to a special floating control by the flying enhancement processing. During this floating control (time t2 to t3), the doubling of each attitude control voltage and intermittent application are performed (see FIGS. 10B to 10F). More specifically, the positive voltage YP + and the negative voltage YP- are intermittently applied at the maximum output even if they are doubled (see FIG. 10B), and the positive voltage YM + and the negative voltage YM- are almost the minimum output even if they are doubled. The positive voltage XP +, the negative voltage XP−, the positive voltage XM +, and the negative voltage XM− are almost intermittently applied with doubling (see FIG. 10D). ), (E)). The control voltages in the Z direction and the φ and θ directions are also intermittently applied at the maximum output by doubling. Here, the positive voltage RP + is not output (see FIG. 10F).
[0121]
Then, when the normal attitude control is resumed after a predetermined time has elapsed (time t3 to t4), the positive voltage YP + and the negative voltage YP− are maximum output, and the positive voltage YM + and the negative voltage YM− are minimum because the surface floats again. The output and other positive voltages XP + for attitude control are intermediate outputs. Here, the positive voltage RP + is not output.
If still not rising, the normal attitude control is interrupted again (time t3 to t4) and the rising enhancement processing is executed. Then, the positive voltage YP + and the negative voltage YP− are maximum output, the positive voltage YM + and the negative voltage YM− are almost minimum output, and the positive voltage XP + for other attitude control is intermittently applied with almost maximum output. No positive voltage RP + for rotation driving is output.
[0122]
Further, after a predetermined time has elapsed, normal attitude control is resumed (time t5), and because of the floating, the positive voltage YP + and the negative voltage YP- are maximum output, the positive voltage YM + and the negative voltage YM- are minimum output, The positive voltage XP + or the like becomes an intermediate output. No positive voltage RP + is output.
Then, when the gyro rotor 10 floats (time t6), the positive voltage YP + and the negative voltage YP-, which generate a levitation force, immediately change from the maximum output to the intermediate output (see FIG. 10B), and the positive voltage YM + attracting them And the negative voltage YM- also changes from the minimum output to the intermediate output (see FIG. 10C).
[0123]
In this manner, when the relative displacement of the gyro rotor 10 with respect to the gyro case 20 falls within a predetermined allowable range, that is, when it is detected and confirmed by displacement detection or the like, the startup sequence shifts from the levitation sequence to the rotation sequence. The positive voltage RP + that generates the rotational driving force is in a pulse output state (see FIG. 10F). The gyro rotor 10 floating in a vacuum generally starts rotating smoothly and is further accelerated to reach a predetermined rotation speed. Thereafter (from time t6), the attitude control and the rotation drive in the steady state described above are performed, and applied calculations such as acceleration calculation are also performed.
[0124]
As described above, in the electrostatic levitation type gyro device of this embodiment, the gyro is controlled by performing the attitude control at the time of startup by utilizing the fact that the electrodes for electrostatic support and the electrodes for rotation driving can be individually controlled. Since the rotation drive is performed after confirming the floating of the rotor, the gyro rotor 10 and the support piece 101 can be prevented from rubbing at the time of startup. Therefore, it is possible to reliably prevent an undesired situation such as generation of dust such as scraping pieces from a contact portion between the two.
[0125]
Further, when the gyro rotor 10 does not float only by the normal posture control, the special posture control modified from the normal posture control is performed, so that the micro-vibration is applied to the gyro rotor 10 without performing the rotation drive. Can be triggered.
That is, when the maximum positive voltage YP + is applied (see FIG. 10 (g)) (see FIGS. 10 (g) and (h)), a force in the floating direction acts on the gyro rotor 10 (solid arrow). (See reference.) Slight movement in the direction of levitation, but levitation is prevented unless it exceeds the opposite force that prevents levitation (see long dashed line with arrow).
[0126]
When the application of the positive voltage YP + stops (see FIG. 10 (h)), the gyro rotor 10 sinks (see the long dashed line with an arrow) due to the remaining floating stopping force, and the resilient force of the bearing piece 101 compressed by the gyro rotor 10 is applied. A reaction force in the flying direction occurs (see short broken line with arrow). This repelling force adds to the levitation force when the next positive voltage YP + is applied.
In this way, micro-vibration in the floating direction and sinking direction is generated in the gyro rotor 10, and a floating force stronger than a single-shot floating force acts. In addition, since the rotary drive is not performed, the rubbing that occurs when the rotary drive is performed does not occur.
[0127]
The effect of heightening the levitation by vibration is highest when the intermittent period matches the natural frequency based on the mass of the gyro rotor 10 and the spring characteristics of the support piece 101. Since the levitation force is strengthened to some extent by micro-vibration, the frequency at which the levitation control voltage is intermittently set is set to an appropriate frequency, for example, 500 Hz.
Further, the duty ratio of the intermittent operation may be set as appropriate, but in this example, the reciprocal thereof is ２ of the reciprocal corresponding to generating the floating control voltage by doubling the attitude control voltage. . That is, the duty ratio is set to 50%. As a result, the average voltage becomes the same as in the normal state, so that the gyro rotor 10 does not run away even if the gyro rotor 10 floats during the execution of the levitation enhancement processing.
[0128]
[Second embodiment]
A specific configuration of a second embodiment of the electrostatic levitation gyro device of the present invention will be described with reference to the drawings. FIG. 11A is a schematic flowchart of the flying enhancement processing, and FIGS. 11B to 11F are signal waveform examples.
This electrostatic levitation type gyro device differs from that of the first embodiment in that the content of the levitation enhancement processing (S30) is modified as follows. That is, a sinking control voltage for driving the gyro rotor is generated in a direction opposite to the floating control voltage, and this is also intermittently applied to the electrostatic support electrode.
[0129]
Specifically, first, the ascending direction and the descending direction are detected and confirmed based on the displacement detection (step S41), and the calculation mode is switched from the normal mode to the enhanced ascending mode. In the levitation enhancement mode, only the attitude control voltages V1 to V12 calculated in the normal attitude control calculation are used in the levitation direction. In the squat state of this example, the Y-axis positive direction YP +, YP- is adopted, doubled, and when it exceeds the maximum value that can be output, the maximum value is corrected. Control voltage (step S42).
[0130]
Then, the floating control voltage is applied as a positive voltage YP + and a negative voltage YP− to the corresponding electrostatic support electrode, and the sinking control voltage is applied as a positive voltage YM + and a negative voltage YM− to the corresponding electrostatic support electrode. Apply (step S43). In addition, at this time, the voltages are applied intermittently at a predetermined period, but the voltages are applied in opposite phases. In other words, the intermittent control of the sinking control voltage is shifted by half a cycle from the intermittent control of the floating control voltage, and the application of the sinking control voltage is performed when the floating control voltage is not applied. The intermittent application in the opposite phase is continued for a predetermined time (step S44).
[0131]
Also in this case, if the same conditions and assumptions as those in the first embodiment are added to the startup sequence, the normal attitude control is executed in the levitation sequence immediately after the start of the startup (time t1 to t2). The positive voltage YP + and the negative voltage YP- that generate levitation force have the maximum output (see FIG. 11B), and the opposite positive and negative voltages YM + and YM- have the minimum output so as to eliminate the sinking state of the rotor 10. (See FIG. 11C), and the positive voltage XP +, the negative voltage XP−, the positive voltage XM +, and the negative voltage XM− acting in the direction perpendicular to the floating direction and the sinking direction become intermediate outputs (FIG. 11D, (E)). The control voltages in the Z direction and the φ and θ directions also have appropriate intermediate outputs. The positive voltage RP + that generates the rotational driving force is not output (see FIG. 11F).
[0132]
Even if the state is continued, when the predetermined time has elapsed without the gyro rotor 10 rising, the normal attitude control is interrupted, and the process shifts to a special floating control by the flying enhancement processing. During the floating control (time t2 to t3), the floating control voltage and the sinking control voltage are intermittently applied in opposite phases (see FIGS. 11B to 11F). Specifically, even if the positive voltage YP + and the negative voltage YP- are doubled, they are applied intermittently with the maximum output (see FIG. 11B), and the positive voltage YM + and the negative voltage YM- also have the maximum output. It is intermittently applied with a phase shifted by half a cycle (see FIG. 11C). The positive voltage XP +, the negative voltage XP-, the positive voltage XM +, and the negative voltage XM- are not applied (see FIGS. 11D and 11E). No control voltage is applied in the Z direction or in the φ and θ directions. No positive voltage RP + is applied (see FIG. 11 (f)).
[0133]
Then, when the normal attitude control is resumed after a predetermined time has elapsed (time t3 to t4), the positive voltage YP + and the negative voltage YP− are maximum output, and the positive voltage YM + and the negative voltage YM− are minimum because the surface floats again. The output and other positive voltages XP + for attitude control are intermediate outputs. Here, the positive voltage RP + is not output.
If still not rising, the normal attitude control is interrupted again (time t3 to t4) and the rising enhancement processing is executed. The positive voltage YP + and the negative voltage YP- are applied intermittently at the maximum output, and the positive voltage YM + and the negative voltage YM- are applied at the maximum output but intermittently in the opposite phase. Positive voltage RP + is not applied.
[0134]
Further, normal posture control is resumed after a lapse of a predetermined time (time t5), so that the positive voltage YP + and the negative voltage YP- are maximum output, the positive voltage YM + and the negative voltage YM- are minimum output, and the other positive voltage XP + etc. are intermediate outputs. No positive voltage RP + is output.
Then, when the gyro rotor 10 floats (time t6), the positive voltage YP + and the negative voltage YP-, which generate a levitation force, immediately change from the maximum output to the intermediate output (see FIG. 11B), and the positive voltage YM + attracting them And the negative voltage YM- also changes from the minimum output to the intermediate output (see FIG. 11C). Then, when the relative displacement of the gyro rotor 10 with respect to the gyro case 20 falls within a predetermined allowable range, that is, when it is detected and confirmed by the displacement detection or the like, the startup sequence shifts from the levitation sequence to the rotation sequence. The positive voltage RP + that generates the rotational driving force is in a pulse output state (see FIG. 11F).
[0135]
In this manner, in the electrostatic levitation gyro device of this embodiment, fine vibrations in the floating direction and the sinking direction can be generated in the gyro rotor 10 without rotating the same as in the first embodiment described above. In addition, when no electrostatic attraction in the floating direction is acting on the gyro rotor 10, the sinking of the gyro rotor 10 due to the floating inhibiting force is increased by applying the electrostatic attraction in the sinking direction. Since the resilience is enhanced, the levitation ability can be further enhanced. Additional discharge of residual static electricity can be expected to increase the sinking of the gyro rotor 10.
[0136]
[Third embodiment]
A specific configuration of a third embodiment of the electrostatic levitation gyro device of the present invention will be described with reference to the drawings. 12A is a schematic flowchart of the flying height enhancement processing, and FIGS. 12B to 12F are signal waveform examples. FIG. 13 is a cross-sectional plan view of the gyro mechanism.
This electrostatic levitation type gyro device is different from that of the above-described second embodiment in that the content of the levitation enhancement processing (S30) is modified as follows. In other words, the point of generating a sinking control voltage that drives the gyro rotor in the opposite direction to the floating control voltage and applying it to the electrostatic support electrode while intermittently intermittently in the opposite phase is inherited. A swing control voltage for driving the gyro rotor is generated in a direction substantially orthogonal to the control voltage for control and the control voltage for settlement, and this is also applied to the electrode for electrostatic support.
[0137]
Specifically, first, the ascending direction and the descending direction are detected and confirmed based on the displacement detection (step S51), and the calculation mode is switched from the normal mode to the enhanced ascending mode. In the flying height enhancement mode, of the posture control voltages V1 to V12 calculated by the normal posture control calculation, a posture control voltage V1 to V12 that is perpendicular to the flying direction is used. In the sinking state of this example, the Y-axis positive direction YP +, YP- is adopted for the floating direction, and it is doubled. If it exceeds the maximum value that can be output, it is converted to the maximum value and this is raised. Control voltage and subsidence control voltage. In addition, the X-axis positive direction XP +, XP- is adopted for the direction orthogonal to the flying direction, and it is doubled. If it exceeds the maximum value that can be output, the maximum value is converted to the maximum value, and the swing control is performed. The voltage is set (step S52).
[0138]
Then, the floating control voltage is applied as a positive voltage YP + and a negative voltage YP− to the corresponding electrostatic support electrode, and the sinking control voltage is applied as a positive voltage YM + and a negative voltage YM− to the corresponding electrostatic support electrode. The swing control voltage is applied to the corresponding electrostatic support electrode as a positive voltage XP + and a negative voltage XP- (step S53). In addition, at this time, both of them are applied intermittently at a predetermined cycle, but the floating control voltage and the sinking control voltage are applied in opposite phases to each other. In other words, the intermittent control of the sinking control voltage is shifted by half a cycle from the intermittent control of the floating control voltage, and the application of the sinking control voltage is performed when the floating control voltage is not applied. The intermittent application in the opposite phase and the intermittent application in the swing direction are continued for a predetermined time (step S54).
[0139]
Also in this case, if the conditions and assumptions given to the startup sequence are taken over similarly to the above-described second embodiment, the normal attitude control is performed in the levitation sequence immediately after the start of the startup (time t1 to t2). The positive voltage YP + and the negative voltage YP- that generate levitation force have the maximum output (see FIG. 12B), and the opposite positive voltage YM + and the negative voltage YM- have the minimum so as to eliminate the gyro rotor 10 from sinking. 12 (c), and the positive voltage XP +, the negative voltage XP−, the positive voltage XM +, and the negative voltage XM− acting in the direction perpendicular to the floating direction and the sinking direction become intermediate outputs (FIG. 12 (d)). , (E)). The control voltages in the Z direction and the φ and θ directions also have appropriate intermediate outputs. The positive voltage RP + that generates the rotational driving force is not output (see FIG. 12F).
[0140]
Even if the state is continued, when the predetermined time has elapsed without the gyro rotor 10 rising, the normal attitude control is interrupted, and the process shifts to a special floating control by the flying enhancement processing. During the execution of the levitation control (time t2 to t3), in addition to the levitation control voltage and the sinking control voltage being intermittently applied in opposite phases, the swing control voltage is also intermittently applied (FIG. 12 (b)). ) To (f)). Specifically, even if the positive voltage YP + and the negative voltage YP- are doubled, they are applied intermittently with the maximum output (see FIG. 12B), and the positive voltage YM + and the negative voltage YM- also have the maximum output. It is intermittently applied with a phase shifted by a half cycle (see FIG. 12C). The positive voltage XP + and the negative voltage XP- are doubled, and the maximum output is intermittently applied (see FIG. 12D). The positive voltage XM + and the negative voltage XM- are not applied (see FIG. 12E). No control voltage is applied in the Z direction or in the φ and θ directions. No positive voltage RP + is applied (see FIG. 12 (f)).
[0141]
Then, when the normal attitude control is resumed after a predetermined time has elapsed (time t3 to t4), the positive voltage YP + and the negative voltage YP− are maximum output, and the positive voltage YM + and the negative voltage YM− are minimum because the surface floats again. The output and other positive voltages XP + for attitude control are intermediate outputs. Here, the positive voltage RP + is not output.
If still not rising, the normal attitude control is interrupted again (time t3 to t4) and the rising enhancement processing is executed. The positive voltage YP + and the negative voltage YP− are intermittently applied at the maximum output, the positive voltage YM + and the negative voltage YM− are intermittently applied at the opposite phase but the positive voltage XP + and the negative voltage XP− are intermittent at the maximum output. The positive voltage XM + or the like for other attitude control or the positive voltage RP + for rotational driving is not applied.
[0142]
Further, normal posture control is resumed after a lapse of a predetermined time (time t5), so that the positive voltage YP + and the negative voltage YP- are maximum output, the positive voltage YM + and the negative voltage YM- are minimum output, and the other positive voltage XP + etc. are intermediate outputs. No positive voltage RP + is output.
Then, when the gyro rotor 10 floats (time t6), the positive voltage YP + and the negative voltage YP-, which generate a levitation force, immediately change from the maximum output to the intermediate output (see FIG. 12B), and the positive voltage YM + attracting them And the negative voltage YM- also changes from the minimum output to the intermediate output (see FIG. 12C). Then, when the relative displacement of the gyro rotor 10 with respect to the gyro case 20 falls within a predetermined allowable range, that is, when it is detected and confirmed by the displacement detection or the like, the startup sequence shifts from the levitation sequence to the rotation sequence. The positive voltage RP + that generates the rotational driving force enters a pulse output state (see FIG. 12F).
[0143]
As described above, in the electrostatic levitation gyro device of this embodiment, similar to the first and second embodiments described above, the gyro rotor 10 causes the micro-vibration in the floating direction and the sinking direction without the rotation drive. be able to. Similarly to the above-described second embodiment, when no electrostatic attraction in the floating direction is acting on the gyro rotor 10, the electrostatic attraction in the sinking direction is applied, whereby the gyro rotor 10 sinks due to the floating stopping force. Can be increased, and the elasticity of the bearing piece 101 can be increased. Further, (see FIG. 13), by applying the swing control voltage, an electrostatic attraction also acts on the positive X-axis direction XP +, XP-, whereby the gyro rotor 10 swings around one of the support pieces 101a as a fulcrum. Since the roller is about to roll, a force for peeling is applied to the other bearing piece 101b. This force urges in the Y-axis positive direction YP +, YP- without rubbing. Thereby, the floating ability is further enhanced.
[0144]
[Fourth embodiment]
A specific configuration of a fourth embodiment of the electrostatic levitation gyro device of the present invention will be described with reference to the drawings. FIG. 14 is a waveform example of the signal YP + from time t2 to time t3.
This electrostatic levitation type gyro device is different from those of the first, second and third embodiments in that the intermittent frequency, that is, the intermittent frequency changes.
[0145]
In this case, the intermittent frequency starts from 300 Hz, for example, and gradually increases to 700 Hz.
Regarding the natural frequency based on the mass of the gyro rotor 10 and the spring characteristic of the bearing piece 101, a variation caused by the number of the bearing pieces 101 in contact with the gyro rotor 10 and their individual differences, etc. For example, since the frequency band is substantially covered in such a frequency band, the vibration period caused by the gyro rotor is in an optimum state once during the levitation enhancement processing, and the levitation ability is greatly enhanced.
[0146]
When vibration due to deformation of the gyro rotor 10 alone is also expected, the intermittent frequency may be changed to a higher frequency. As a deformation mode of the gyro rotor causing such vibration, for example, a compression deformation in the Y-axis direction and an expansion deformation in the X-axis direction, and an expansion deformation in the Y-axis direction and a compression deformation in the X-axis direction are alternately repeated. Is mentioned.
[0147]
[Fifth embodiment]
A specific configuration of a fifth embodiment of the electrostatic levitation gyro device of the present invention will be described with reference to the drawings. FIG. 15A is a schematic flowchart of the flying enhancement processing, and FIGS. 15B to 15F are signal waveform examples.
This electrostatic levitation type gyro device is different from those of the third and fourth embodiments in that the content of the levitation enhancement processing (S30) is modified as follows. That is, when the confirmation of the floating of the gyro rotor is not established, the swing control voltage that causes the gyro rotor to roll is applied to the electrostatic support electrode, but the floating control voltage and the sinking control voltage are not applied. Has become. It should be noted that the intermittent operation and the changing of the intermittent frequency are applied to the application of the swing control voltage.
[0148]
Specifically, first, the rolling direction is detected and confirmed based on the displacement detection (step S61), and the calculation mode is switched from the normal mode to the levitation enhancement mode. In the flying height enhancement mode, one of the posture control voltages V1 to V12 calculated by the normal posture control calculation that is orthogonal to the flying direction is used. In the squat state of this example, the X-axis positive direction XP +, XP- is adopted as the direction perpendicular to the floating direction, and it is doubled. If it exceeds the maximum value that can be output, it is converted to the maximum value. Is set to the swing control voltage (step S62).
[0149]
Then, the swing control voltage is applied to the corresponding electrostatic support electrode as a positive voltage XP + and a negative voltage XP- (step S63). In addition, at this time, the intermittent application is performed while the intermittent frequency is gradually increased from, for example, 300 Hz to 700 Hz. No control voltage is applied in the X-axis negative direction, the Y-axis positive and negative directions, the Z direction, and the like. The intermittent application in the rolling direction and the oscillating direction is continued for a predetermined time (step S64).
[0150]
Also in this case, if the conditions and assumptions given to the startup sequence are taken over as in the third embodiment, the normal attitude control is executed in the levitation sequence immediately after the start of the startup (time t1 to t2). The positive voltage YP + and the negative voltage YP- that generate levitation force have the maximum output (see FIG. 15B), and the positive voltage YM + and the negative voltage YM- that generate the gyro rotor 10 have the minimum value. 15 (c), and the positive voltage XP +, the negative voltage XP-, the positive voltage XM +, and the negative voltage XM- acting in the direction perpendicular to the floating direction and the sinking direction become intermediate outputs (FIG. 15 (d)). , (E)). The control voltages in the Z direction and the φ and θ directions also have appropriate intermediate outputs. The positive voltage RP + that generates the rotational driving force is not output (see FIG. 15F).
[0151]
Even if the state is continued, when the predetermined time has elapsed without the gyro rotor 10 rising, the normal attitude control is interrupted, and the process shifts to a special floating control by the flying enhancement processing. During this floating control (time t2 to t3), the application of the floating control voltage or the sinking control voltage is stopped, and only the swing control voltage is intermittently applied (see FIGS. 15B to 15F). . Specifically, the positive voltage YP + and the negative voltage YP− are not applied (see FIG. 15B), and neither the positive voltage YM + nor the negative voltage YM− is applied (see FIG. 15C). The positive voltage XP + and the negative voltage XP- are doubled and the maximum output is intermittently applied (see FIG. 15D), but the positive voltage XPM + and the negative voltage XM- are not applied (see FIG. 15E). No control voltage is applied in the Z direction or in the φ and θ directions. No positive voltage RP + is applied (see FIG. 15 (f)).
[0152]
Then, when the normal attitude control is resumed after a predetermined time has elapsed (time t3 to t4), the positive voltage YP + and the negative voltage YP− are maximum output, and the positive voltage YM + and the negative voltage YM− are minimum because the surface floats again. The output and other positive voltages XP + for attitude control are intermediate outputs. Here, the positive voltage RP + is not output.
If still not rising, the normal attitude control is interrupted again (time t3 to t4) and the rising enhancement processing is executed. The positive voltage XP + and the negative voltage XP- are intermittently applied at the maximum output, but no other positive voltage XM + for attitude control or the positive voltage RP + for rotation driving is applied.
[0153]
Further, normal posture control is resumed after a lapse of a predetermined time (time t5), so that the positive voltage YP + and the negative voltage YP- are maximum output, the positive voltage YM + and the negative voltage YM- are minimum output, and the other positive voltage XP + etc. are intermediate outputs. No positive voltage RP + is output.
Then, when the gyro rotor 10 floats (time t6), the positive voltage YP + and the negative voltage YP-, which generate levitation force, immediately change from the maximum output to the intermediate output (see FIG. 15B), and the positive voltage YM + attracting them And the negative voltage YM- also changes from the minimum output to the intermediate output (see FIG. 15C). Then, when the relative displacement of the gyro rotor 10 with respect to the gyro case 20 falls within a predetermined allowable range, that is, when it is detected and confirmed by the displacement detection or the like, the startup sequence shifts from the levitation sequence to the rotation sequence. The positive voltage RP + that generates the rotational driving force is in a pulse output state (see FIG. 15F).
[0154]
As described above, in the electrostatic levitation gyro device of this embodiment, the application of the swing control voltage causes the electrostatic attraction to act in the positive X-axis direction XP +, XP-, thereby rotating the gyro rotor 10. Since it is about to move, a force is exerted on one of the contact sites as a fulcrum and the other is peeled off without rubbing. Thereby, the floating ability is enhanced. In addition, since the minute vibration is generated by the intermittent application, the floating ability is further enhanced.
[0155]
[Other]
In each of the above embodiments, the device package including the plate-shaped cap 71 and the box-shaped box 72 and the device package including the hat-shaped cap 71 and the disc-shaped bottom plate 72 are used. However, the device package is not limited to this. The device package may be a container that can be hermetically sealed. The vacuum suction port 76 may be located anywhere in the package, not limited to the front. When evacuation is not required, such as when assembling in a vacuum atmosphere, the vacuum suction port 76 need not be formed.
[0156]
In the first embodiment, the elastic support member 98 is provided between the base 73 and the pin 74. However, the elastic support of the base 73 is not limited thereto. And the packages 71 and 72. The elastic support member is not limited to a leaf spring, but may be a coil spring, an elastic member such as silicon rubber, or a combination thereof.
[0157]
Various modifications are also possible for the signal detection circuit described above. For example, a sequential selection switching circuit may be provided upstream of the A / D conversion circuit 65 to reduce the number of A / D conversion circuits 65. Note that the A / D conversion circuit 65 and the like existing between the current detection circuit 64 and the DSP 66 may be a part of the control operation circuit 63 as described above. There is no inconvenience whether it forms part of the detection circuit or the interface part belonging to both. Further, the DSP 66 of the control operation circuit 63 and the DSP 67 of the rotor control circuit 62 may be provided separately as described above, or may be integrated into a DSP in which both programs are installed.
[0158]
In the above embodiments, the intermittent application is continued during the corresponding period (t2 to t3, t4 to t5), but the application stop may be used together. For example, the intermittent application of the control voltage and the stop of the application of the control voltage may be performed alternately for 1 second. The time and some times in the startup sequence are also examples, and may be changed to an appropriate time.
[0159]
【The invention's effect】
As is apparent from the above description, in the electrostatic levitation type gyro device according to the first solution of the present invention, when the levitation fails, the rotor is not driven to rotate and the attitude control is intermittently performed. There is an advantageous effect that an electrostatic levitation gyro device that floats at a high rate without rubbing can be realized.
[0160]
Further, in the electrostatic levitation gyro device according to the second solving means of the present invention, in addition to the attitude control, the intermittent operation until the driving in the reverse direction is performed, so that the gyro device can be operated at a higher efficiency without rubbing the rotor. This has an advantageous effect that an electrostatic levitation type gyro device capable of floating by using the above can be realized.
[0161]
Further, in the electrostatic levitation gyro device according to the third solution of the present invention, the control voltage is applied to the electrode for electrostatic support instead of the electrode for rotary drive, so that the swing / roll is caused. With this configuration, it is possible to use the attitude control and a different levitation force, and as a result, there is an advantageous effect that it is possible to realize an electrostatic levitation gyro device that levitates at a high rate without rubbing the rotor.
[0162]
Further, in the electrostatic levitation type gyro device according to the fourth solution of the present invention, the possibility of including the optimal vibration period is increased even if the optimal vibration period cannot be determined, so that the rotor is There is an advantageous effect that an electrostatic levitation gyro device that floats at a higher rate without rubbing can be realized.
[Brief description of the drawings]
1 (a) is a front view of an electrostatic levitation type gyro device of an undisclosed prior art, FIG. 1 (b) is a plan view of the device with a cover removed, FIG. 1 (c) is a vertical sectional perspective view, and FIG. () Is a perspective view showing a device mounting state.
2A is an overall circuit diagram including a signal detection circuit, FIG. 2B is a circuit for generating a displacement detection application signal, and FIG. 2C is a current detection circuit.
3A is a signal input circuit of a constraint control system, and FIG. 3B is a signal input circuit of a rotor drive system.
FIG. 4A is a detailed view of a control voltage application portion, and FIGS. 4B to 4F are signal waveform examples.
FIGS. 5A and 5B are schematic flowcharts of a start-up sequence, and FIGS. 5B to 5F are signal waveform examples of a prototype example useful for presenting a task.
6A is a plan view of the first embodiment of the electrostatic levitation gyro device according to the present invention with the lid removed, and FIG. 6B is a vertical sectional front view.
7A is an overall circuit diagram including a signal detection circuit, FIG. 7B is a circuit for generating a displacement detection application signal, and FIG. 7C is a detection signal generation circuit.
8A is a detailed diagram of a control voltage application portion and a detection signal generation circuit, and FIGS. 8B to 8E are signal waveform examples.
9A is a schematic flowchart of a start-up sequence, and FIG. 9B is a schematic flowchart of a surfacing enhancement process.
10A is a cross-sectional plan view of the gyromechanical unit, FIGS. 10B to 10F are all signal waveform examples, and FIGS. 10G and 10H are enlarged views of a main part of the cross-sectional plane of the gyromechanical unit. It is.
11A is a schematic flowchart of a levitation enhancement process in a second embodiment of the electrostatic levitation gyro device of the present invention, and FIGS. 11B to 11F are signal waveform examples.
12A is a schematic flowchart of a levitation enhancement process in a third embodiment of the electrostatic levitation gyro device of the present invention, and FIGS. 12B to 12F are signal waveform examples.
FIG. 13 is a cross-sectional plan view of the gyro mechanism.
FIG. 14 is a signal waveform example of a fourth embodiment of the electrostatic levitation gyro device of the present invention.
15A and 15B are schematic flowcharts of a levitation enhancement process in a fifth embodiment of the electrostatic levitation gyro device of the present invention, and FIGS. 15B to 15F are signal waveform examples.
16 (a) to 16 (c) show examples of a disk-shaped rotor type, FIGS. 16 (d) and 16 (e) show examples of an annular rotor type, and FIGS. (a) and (d) are longitudinal front views, and (b), (c), and (e) are exploded perspective views of built-in components.
17A is an overall circuit diagram of a conventional signal detection circuit in which a signal detection circuit is added to a control circuit and the like, FIG. 17B is a detailed connection diagram of a control output circuit, and FIG. Signal input circuits, (d) and (e) are examples of voltage distribution.
18 (a) is a longitudinal sectional front view of a mechanical portion of a disk-shaped rotor gyro, FIG. 18 (b) is a cross-sectional plan view of a gyro case of a disk-shaped rotor gyro, and FIG. FIG. 3C is a vertical sectional front view of the mechanical section of the annular rotor gyro, and FIG. 3D is a schematic flowchart of a startup sequence.
19A is a vertical front view of a gyromechanical section, FIG. 19B is a cross-sectional plan view of the gyromechanical section, and FIGS. 19C to 19G are signal waveform examples.
[Explanation of symbols]
10. Gyro rotor (gyro mechanism)
20 Gyro case (gyro mechanism)
21 Upper bottom member (gyro case, gyro mechanism)
22 Lower bottom member (gyro case, gyro mechanism)
23 Spacer (gyro case, gyro mechanism)
31 to 36 Electrodes for electrostatic support (electrode for attitude control, control electrode, constraint control system)
37 Electrode for rotor drive (rotary electrode, rotor drive system)
38 Displacement detection electrode (detection electrode, displacement detection system)
41 to 46 Electrostatic support electrodes (posture control electrodes, control electrodes, constraint control system)
47 Rotor drive electrode (rotary electrode, rotor drive system)
48 Displacement detection electrode (detection electrode, displacement detection system)
51 Current detection circuit (displacement detection system)
52 rotor control circuit (control circuit, rotor drive system)
53 control arithmetic circuit (control circuit, constraint control system)
54 Control output circuit (control circuit, constraint control system)
55 A / D conversion circuit (control operation circuit, constraint control system)
56 DSP (digital signal processor, control operation circuit, constraint control system)
61 Application signal generation circuit (application signal supply circuit, signal detection circuit, displacement detection system)
62 Rotor control circuit (control circuit, rotor drive system)
63 control operation circuit (control circuit, constraint control system)
64 Current detection circuit (detection signal generation circuit, signal detection circuit, displacement detection system)
64a, 64b Current mirror (current inverting circuit)
65 A / D conversion circuit (signal input circuit, signal detection circuit + control operation circuit)
66 DSP (digital signal processor, control operation circuit, constraint control system)
67 DSP (digital signal processor, control operation circuit, rotor drive system)
70 Gyro device (electrostatic levitation gyro device)
71 Cap (lid, vacuum container, hermetically sealed package)
72 box (box, can, vacuum container, hermetically sealed package)
73 base (glass substrate, insulating substrate, mounting board for mechanism and circuit)
74 pins (lead, external connection terminal)
75 getter (vacuum maintenance member)
76 Vacuum suction port (through hole + plug)
77, 78 IC (current detection circuit, control output circuit, etc.)
80 Printed circuit board (circuit printed circuit board, mounting board for gyro device)
81 Regulator IC (power supply circuit)
82 Smoothing capacitor (power supply circuit)
90 Application signal generation circuit (application signal supply circuit, signal detection circuit, displacement detection system)
91 In-phase detection circuit (detection signal generation circuit, signal detection circuit, displacement detection system)
92 Midpoint voltage detection circuit (common mode detection circuit)
93 Current limiting circuit (low-pass filtering, common-mode detection circuit)
94 Circuit board (insulating board)
97 Gyro device (electrostatic levitation gyro device)
98 Elastic support member
99 Bonding wire
101 Bearing piece 101

Claims (5)

A gyro case in which a gyro rotor is electrostatically levitated and rotatably contained, and an electrostatic support electrode and a rotation drive electrode among a plurality of electrodes formed on the gyro rotor for controlling the attitude and rotation of the gyro rotor; And a control circuit for generating and applying a control voltage, and transmitting and receiving a relative displacement detection signal between the gyro rotor and the gyro case via a displacement detection electrode to which the control voltage is not applied among the plurality of electrodes. In an electrostatic levitation type gyro device including a signal detection circuit, a starting control means for performing attitude control at the time of startup and confirming the floating of the gyro rotor and then performing a rotation drive, and controlling the attitude control voltage or Levitation enhancing means for intermittently applying a higher levitation control voltage and applying the control voltage to the electrostatic support electrode; Electrostatic levitation type gyro apparatus characterized by operating the floating reinforcing means during unsatisfied floating confirmation data. The levitation enhancing means generates a control voltage for driving the gyro rotor in a direction opposite to the control voltage for attitude control or the control voltage for levitation, and applies the same to the electrode for electrostatic support by intermittently generating the control voltage. The gyro device according to claim 1, wherein the gyro device is an electrostatic levitation type gyro device. The levitation enhancing means generates a swing control voltage for driving the gyro rotor in a direction orthogonal or oblique to the attitude control voltage or the levitation control voltage, and applies the generated voltage to the electrostatic support electrode. The electrostatic levitation gyro device according to claim 1 or 2, wherein 4. The electrostatic levitation type gyro device according to claim 1, wherein said levitation enhancing means changes an intermittent cycle. A gyro case in which a gyro rotor is electrostatically levitated and rotatably contained, and an electrostatic support electrode and a rotation drive electrode among a plurality of electrodes formed on the gyro rotor for controlling the attitude and rotation of the gyro rotor; And a control circuit for generating and applying a control voltage, and transmitting and receiving a relative displacement detection signal between the gyro rotor and the gyro case via a displacement detection electrode to which the control voltage is not applied among the plurality of electrodes. In an electrostatic levitation type gyro device provided with a signal detection circuit, startup control means for performing attitude control at startup and confirming the gyro rotor floating before starting rotation, and causing the gyro rotor to roll. Levitation enhancing means for applying a control voltage to the electrostatic support electrode, wherein the activation control means fails to confirm the gyro rotor levitation. Electrostatic levitation type gyro apparatus characterized by operating the floating reinforcing means.

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