JP4361029B2 - Field emission type cold cathode aging apparatus and aging method - Google Patents

Description

  The present invention relates to an aging apparatus and an aging method for a field emission cold cathode, and more particularly to an aging apparatus and an aging method for a field emission cold cathode which prevents deterioration of emission current.

  One type of display device (display) is a field emission display (FED). In a field emission display, electrons are emitted from a field emission cold cathode into a vacuum, and the phosphors emit light by irradiating the electrons with the electrons. More specifically, field emission cold cathodes are arranged in a matrix corresponding to pixels on a cathode panel in a field emission display, and electrons are emitted from the field emission cold cathode according to the principle of field emission. A fluorescent panel is arranged opposite to the cathode panel. A fluorescent substance is arranged on the fluorescent panel corresponding to a display pixel, and the fluorescent substance arranged on the fluorescent panel emits light by electrons emitted from the field emission cold cathode. To do.

  Here, in the field emission display, it is important to stably emit electrons from the field emission type cold cathode in order to obtain stable light emission characteristics, and the process of manufacturing the field emission type cold cathode for stable emission of electrons. Aging is performed at.

For example, Patent Document 1 discloses the following field emission cold cathode aging apparatus and aging method. That is, the gate of the field emission cold cathode is opened (floating), and no voltage is applied, and a high voltage is applied to the anode of the field emission cold cathode to emit electrons from the cathode. With such a configuration, it is possible to prevent abnormal discharge from occurring between the gate and the cathode, and to perform aging without destroying the cathode.
JP-A-8-203423

  By the way, when electrons are emitted from the cathode, the emitted electrons collide with the gas adsorbed on the phosphor disposed on the anode, whereby the gas is emitted from the anode. The gas generated from the anode is, for example, oxygen, carbon dioxide, carbon monoxide, methane, and the like, and different gases are generated depending on the material of the anode.

  When gas is released from the anode, positive ions are generated by collision between gas molecules and electrons emitted from the cathode, and collide with the cathode, which is the cathode, to damage the tip shape of the cathode. Further, the gas released from the anode is adsorbed on the cathode, whereby the tip shape of the cathode is temporarily deformed. If the tip shape of the cathode is damaged or deformed, the electric field generated between the cathode and the gate is weakened, and the amount of electrons emitted from the cathode to the anode, that is, the emission current flowing from the anode to the cathode is reduced, and the emission characteristics of the field emission display Will deteriorate.

  Therefore, the field emission cold cathode aging device and the aging method described in Patent Document 1 have a problem in that the cathode is damaged because no measures are taken to prevent the influence of the gas generated from the anode. .

  SUMMARY OF THE INVENTION Therefore, an object of the present invention is to provide an aging apparatus and an aging method capable of preventing damage to the cathode due to the influence of gas generated from the anode in aging of the field emission cold cathode.

In order to solve the above-described problems, an aging apparatus according to an aspect of the present invention includes a gate and a cathode, and ages a field emission cold cathode in which electrons are emitted from the cathode when a gate voltage is applied to the gate. An aging apparatus for controlling a gate voltage, comprising: a gate voltage control unit that controls a gate voltage; and a fluctuation measurement unit that measures fluctuations in an anode current flowing into an anode that is an electron emission destination. had row control for changing the gate voltage based on the voltage that affects the electron amount or rate is varied and release of the anode current, the gate voltage control unit controls to the gate voltage and the pulse voltage.

An aging apparatus according to another aspect of the present invention is an aging apparatus for aging a field emission type cold cathode that includes a gate and a cathode and emits electrons from the cathode when a gate voltage is applied to the gate. A gate voltage control unit that controls the gate voltage and a fluctuation measurement unit that measures fluctuations in the anode current flowing into the anode to which electrons are emitted, and the gate voltage control unit includes fluctuations in the measured anode current and The aging device further includes an anode voltage control unit that controls the anode voltage applied to the anode , and performs control to change the gate voltage based on a voltage that affects the amount or speed of emitted electrons. The control unit changes the gate voltage based on the fluctuation of the anode current and the applied gate voltage. The anode voltage control unit performs control to change the anode voltage based on the measured variation of the anode current, the changed gate voltage, and the applied anode voltage. The gate voltage control unit further includes: Control is performed to change the gate voltage based on the changed anode voltage.

In order to solve the above problems, an aging method according to an aspect of the present invention includes a gate and a cathode, and a field emission type cold cathode in which electrons are emitted from the cathode when a gate voltage is applied to the gate. Aging method for measuring the fluctuation of the anode current flowing into the anode from which electrons are emitted, and the fluctuation of the measured anode current and the amount or speed of the emitted electrons based on the voltage applied only contains a gate voltage control step of performing control for changing the gate voltage, the gate voltage control step performs control to the gate voltage and the pulse voltage.

An aging method according to another aspect of the present invention includes an aging apparatus for aging a field emission type cold cathode which includes a gate and a cathode and emits electrons from the cathode when a gate voltage is applied to the gate. A method for measuring a variation in anode current flowing into an anode to which electrons are emitted, and a variation measurement step, and a voltage that affects the measured variation in anode current and the amount or speed of electrons emitted. look including a gate voltage control step of performing control for changing the gate voltage, the gate voltage control step performs control for changing the gate voltage on the basis of the gate voltage being varied in the anode current, and application, the aging process is In addition, the measured anode current variation, the modified gate current And an anode voltage control step for performing control to change the anode voltage applied to the anode based on the applied anode voltage, and a gate voltage resetting step for performing control to change the gate voltage based on the changed anode voltage Including .

  ADVANTAGE OF THE INVENTION According to this invention, the damage of the cathode by the influence of the gas emitted from an anode can be prevented in the aging of a field emission type cold cathode.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings.

[Configuration and basic operation]
FIG. 1 is a diagram showing a configuration of an aging device 100 and a field emission display 101 according to an embodiment of the present invention.

  Referring to FIG. 1, aging apparatus 100 includes a gate power supply unit 6, a current measurement unit 7, an anode power supply unit 8, and a control unit 9.

  The control unit 9 includes a fluctuation measurement unit 21, a gate voltage control unit 23, and an anode voltage control unit 24.

  The field emission display 101 includes a cathode panel 5 and an anode 3.

  A field emission cold cathode 10 and a gate insulating film 4 are mounted on the cathode panel 5.

  The field emission cold cathode 10 includes a cathode 1 and a gate 2.

  First, the operation of the field emission display 101 will be described. By applying a positive voltage to the gate 2 and the anode 3 with respect to the cathode 1, an electric field is generated between the cathode 1 and the gate 2. Electrons are emitted from the cathode 1 by field emission of an electric field generated between the cathode 1 and the gate 2, and the emitted electrons collide with the phosphor formed on the anode 3, thereby causing the phosphor to emit light.

  The gate insulating film 4 electrically insulates between the cathode 1 and the gate 2.

  Next, the operation of the aging device 100 will be described.

  The gate power supply unit 6 applies a pulse voltage as a gate voltage to the gate 2 based on the gate voltage control signal received from the gate voltage control unit 23.

  The anode power supply unit 8 applies a DC voltage as an anode voltage to the anode 3 based on the anode voltage control signal received from the anode voltage control unit 24.

  Here, the anode voltage control unit 24 performs control so that the DC voltage applied to the anode 3 by the anode power supply unit 8 is larger than the amplitude of the pulse voltage applied to the gate 2 by the gate power supply unit 6. This is because the anode voltage for satisfying the luminance specification of the field emission display 101 is usually on the order of 10 kV and needs to be larger than the gate voltage which is usually on the order of 10 V or 100 V.

  The current measuring unit 7 measures the anode current flowing into the anode 3. Here, since about 10% of the emission current normally flows into the gate 2, the current value of the anode current is about 90% of the current value of the emission current.

  The fluctuation measuring unit 21 acquires measured values of the anode current measured by the current measuring unit 7 at predetermined intervals. Then, the fluctuation measuring unit 21 measures the fluctuation of the anode current based on the measurement value acquired from the current measuring part 7, and outputs fluctuation information representing the fluctuation of the anode current to the gate voltage control unit 23 and the anode voltage control unit 24. To do. Here, the interval at which the fluctuation measuring unit 21 acquires the anode current is on the order of 1 minute to 10 minutes.

  The gate voltage control unit 23 applies the fluctuation information received from the fluctuation measurement unit 21, the amplitude of the pulse voltage being applied by the gate power supply unit 6, and the anode power supply unit 8 represented by the anode voltage control signal received from the anode voltage control unit 24. Based on at least one of the anode voltages to be generated, a gate voltage control signal representing the amplitude of the pulse voltage which is the gate voltage is generated and output to the gate power supply unit 6 and the anode voltage control unit 24.

  Note that the gate voltage control signal includes a content in which the gate voltage applied by the gate power supply unit 6 is a pulse voltage, the gate power supply unit 6 uses the gate voltage control signal as a pulse voltage, and The voltage value represented by the gate voltage control signal may be configured to be the amplitude of the pulse voltage, or the gate voltage control signal only represents the voltage value, and the gate power supply unit 6 autonomously outputs the pulse voltage. It may be.

  The anode voltage control unit 24 is a pulse applied by the gate power supply unit 6 represented by the variation information received from the variation measurement unit 21, the anode voltage being applied by the anode power supply unit 8, and the gate voltage control signal received from the gate voltage control unit 23. Based on at least one of the amplitudes of the voltage, an anode voltage control signal representing the voltage value of the anode voltage is generated and output to the anode power supply unit 8 and the gate voltage control unit 23.

[Operation]
FIG. 2 is a flowchart defining an operation procedure when the aging device 100 according to the embodiment of the present invention performs aging of the field emission cold cathode 10.

  First, the anode voltage control unit 24 performs control to set the anode voltage to 10% of the rated anode voltage (S1). Here, the rated anode voltage is a voltage necessary to satisfy the luminance specification of the field emission display 101, and is a voltage determined according to the type of the field emission display, the shipping destination, and the like.

Next, the gate voltage control unit 23 sets 10% of the rated anode current to the target value of the anode current (S2), and a gate voltage control signal indicating the amplitude of the pulse voltage assumed to obtain this target value. Is output to the gate power supply unit 6 and the anode voltage control unit 24 (S10). Here, the rated anode current is a current value necessary for satisfying the luminance specification of the field emission display 101, and means the current value of the anode current when the field emission display 101 emits light. The rated anode current is determined according to the type of field emission display and the shipping destination. Here, the specification of the luminance of the field emission display 101 is, for example, 800 cd (candela) / cm ² or more when the anode current per pixel is 4 μA (microamperes) and the anode voltage is 10 kV.

  Here, the voltage values of 10 types of gate voltages, which are assumed to obtain target values of 10 stages of anode current from 10% to 100% of the rated anode current, are respectively stored in a memory (not shown). The gate voltage control unit 23 can recognize the necessary amplitude of the pulse voltage by referring to this memory.

  Next, the gate voltage control unit 23 acquires a measured value of the anode current measured by the current measuring unit 7. (S11). When the measured value of the anode current acquired from the current measuring unit 7 is less than the target value of the anode current (NO in S12), the gate voltage control unit 23 increases the pulse voltage amplitude by 1V. Is output to the gate power supply unit 6 and the anode voltage control unit 24 (S13).

  This is because even when a gate voltage having the same voltage value is applied to the gate 2 for each cathode panel, an anode current having a different current value is obtained for each cathode panel due to manufacturing variations or the like, and thus a target value for the anode current is obtained. This is because it is necessary to finely adjust the gate voltage.

  On the other hand, when the measured value of the anode current acquired from the current measuring unit 7 is equal to or larger than the target value of the anode current (YES in S12), the gate voltage control unit 23 outputs the target value acquisition information to the fluctuation measuring unit 21. To do.

  The fluctuation measuring unit 21 receives the target value acquisition information from the gate voltage control unit 23, and acquires the measured value of the anode current measured by the current measuring unit 7 at a predetermined interval (S3). Then, the fluctuation measurement unit 21 periodically calculates the fluctuation rate of the anode current based on the measurement value acquired from the current measurement unit 7, and the fluctuation information indicating the calculated fluctuation rate of the anode current is obtained from the gate voltage control unit 23 and It outputs to the anode voltage control part 24 (S4). Note that the fluctuation measuring unit 21 may calculate fluctuation values of the anode current at a predetermined interval to obtain fluctuation information.

  The gate voltage control unit 23 receives the variation information from the variation measurement unit 21, and keeps the amplitude of the pulse voltage constant when the variation rate of the anode current is 10% or more. No output (NO in S5).

  On the other hand, the gate voltage control unit 23 has a variation rate of the anode current of less than 10% (YES in S5), and the amplitude of the pulse voltage applied by the gate power supply unit 6 is a voltage value at which a rated anode current is obtained. If not (NO in S6), the target value of the anode current is set to a value increased by 10% of the rated anode current (S7), and the amplitude of the pulse voltage assumed to obtain this target value is set. The expressed gate voltage control signal is output to the gate power supply unit 6 and the anode voltage control unit 24 (S10). For example, when the amplitude of the current gate voltage is a voltage value at which 10% of the rated anode current is obtained, the gate voltage control unit 23 sets a voltage value that is assumed to obtain 20% of the rated anode current. The expressed gate voltage control signal is output to the gate power supply unit 6 and the anode voltage control unit 24.

  The anode voltage control unit 24 receives the variation information from the variation measurement unit 21 and the gate voltage control signal from the gate voltage control unit 23, the variation rate of the anode current is less than 10% (YES in S5), and the gate power supply When the amplitude of the pulse voltage being applied by the unit 6 is a voltage value at which a rated anode current is obtained (YES in S6), and the anode voltage being applied by the anode power supply unit 8 is not the rated value of the anode voltage (NO in S8), an anode voltage control signal representing a voltage value obtained by increasing the anode voltage by 10% of the rated anode voltage is output to the anode power supply unit 8 and the gate voltage control unit 23 (S9).

  The gate voltage control unit 23 receives the anode voltage control signal from the anode voltage control unit 24, recognizes that the anode voltage applied by the anode power supply unit 8 is increased by 10% of the rated anode voltage, and outputs the pulse voltage Is controlled to return to a voltage value at which 10% of the rated anode current is obtained (S2, S10 to S13).

  The variation rate of the anode current is less than 10% (YES in S5), and the amplitude of the pulse voltage applied by the gate power supply unit 6 is a voltage value at which the rated anode current is obtained (YES in S6). If the anode voltage applied by the anode power supply unit 8 is the rated value of the anode voltage, the aging device 100 ends the aging (YES in S8).

  3 and 4 below, the case where the above-described fine adjustment of the gate voltage is not necessary in order to simplify the description, that is, the ten types of gate voltages stored in the above-described memory (not shown) are used. A case will be described where a cathode panel is used in which the target values of 10 levels of anode current from 10% to 100% of the rated anode current can be obtained by applying to the gate 2 respectively.

  FIG. 3 is a diagram showing temporal changes in the anode voltage, the gate voltage, and the anode current when the aging device 100 according to the embodiment of the present invention performs aging.

  Referring to the figure, when a pulse voltage is applied to gate 2, the anode current gradually decreases during the period from the rise of the pulse voltage to the fall of the pulse voltage. This is because the electric field generated between the cathode 1 and the gate 2 is weakened by the influence of the gas generated from the anode 3 as described above. In the aging device 100 according to the embodiment of the present invention, the gate voltage to be applied first in aging is set to a voltage value at which 10% of the rated anode current is obtained, and the current value is 10% of the rated anode current. Since the gate voltage is increased stepwise to increase the anode current stepwise, the amount of electrons emitted from the cathode per unit time is small. Accordingly, since the amount of gas generated from the anode is moderately increased, the tip shape of the cathode 1 is hardly damaged, and the decrease in the anode current is mainly due to the adsorption of gas on the cathode 1.

  Further, when a pulse voltage is applied to the gate 2, the anode current gradually decreases during the period from the rise of the pulse voltage to the fall of the pulse voltage (a in the figure), but when the next pulse voltage is applied to the gate 2 The anode current returns to 10% of the rated anode current (b in the figure). As described above, the decrease in the anode current is mainly caused by the gas adsorbed on the cathode 1. When the pulse voltage is turned off and the gate voltage is not applied to the gate 2, the gas adsorbed on the cathode 1 is reduced. This is because the tip shape of the cathode 1 returns to the original state away from the cathode 1.

  In addition, in the pulse voltage (a in the figure) first applied to the gate 2, the amount of decrease in the anode current during the period from the rise of the pulse voltage to the fall of the pulse voltage is large. With the pulse voltage (b in the figure), the decrease amount of the anode current becomes small. This is because the gas adsorbed on the cathode 1 decreases to the outside after the pulse voltage is first applied and before the next pulse voltage is applied.

  When the decrease amount of the anode current in the period from the rise of the pulse voltage to the fall of the pulse voltage becomes small and the variation rate of the anode current becomes less than 10% (c in the figure), the gate voltage control unit 23 Since the amplitude of the pulse voltage applied by the gate power supply unit 6 is a voltage value at which 10% of the rated anode current is obtained, the control for changing the amplitude of the pulse voltage to a voltage value at which 20% of the rated anode current is obtained. (D in the figure).

  Then, the gate voltage control unit 23 performs control to change the amplitude of the pulse voltage to a voltage value at which the rated anode current is obtained, and the fluctuation rate of the anode current becomes less than 10%, and the anode voltage applied by the anode power supply unit 8 Is not yet the rated value of the anode voltage (f in the figure), the anode voltage control unit 24 performs control to change the anode voltage to 20% of the rated anode voltage. Further, since the anode voltage control unit 24 performs control to increase the anode voltage, the gate voltage control unit 23 performs control to return the amplitude of the pulse voltage to a voltage value at which 10% of the rated anode current can be obtained (the same figure). G).

  FIG. 4 shows the relationship between the gate voltage, the average anode current, and the anode voltage when the field emission type cold cathode 10 is aged by actually using the aging apparatus 100 according to the embodiment of the present invention.

  The field emission display 101 used in this experiment has an anode current rating of 10 μA and an anode voltage rating of 10 kV.

  With reference to the figure, in this experiment, the gate voltage control unit 23 performs control so that the gate voltage applied first in aging is a voltage value at which 5% of the rated anode current is obtained. That is, the gate voltage control unit 23 controls the gate voltage to be applied first in aging so that the anode average current is 0.5 μA.

  Then, the gate voltage control unit 23 performs control to increase the gate voltage stepwise in order to increase the anode current by 5% of the rated anode current. That is, the gate voltage control unit 23 performs control to increase the gate voltage stepwise so that the anode average current increases stepwise by 0.5 μA.

  The anode voltage control unit 24 controls the anode voltage to be applied first in aging to 10% of the rated anode voltage. That is, the anode voltage control unit 24 performs control to set the anode voltage to be applied first in aging to 1 kV.

  Then, the anode voltage control unit 24 performs control to increase the anode voltage stepwise by 10% of the rated anode voltage. That is, the anode voltage control unit 24 performs control to increase the anode voltage step by step by 1 kV.

  Note that the anode current rating of the field emission display 101 used in this experiment is 10 μA, but in order to prevent a failure of the field emission display 101 due to aging, the anode average current is increased to 8 μA instead of 10 μA. Was done.

  By using the aging apparatus 100 according to the embodiment of the present invention to perform aging as described above on the field emission display 101, a good aging result could be obtained. That is, the field emission display 101 capable of obtaining a stable emission current with little time fluctuation when a rated voltage was applied to the gate 2 and the anode 3 could be manufactured.

  In addition, the gate voltage control unit 23 performs control so that the gate voltage to be applied first in aging is a voltage value at which 10% of the rated anode current is obtained, and the gate voltage control unit 23 controls 10% of the rated anode current. Good aging results could be obtained even if control was performed to increase the gate voltage stepwise in order to increase the anode current step by step.

  Here, if the duty, which is the ratio of the period in which the pulse voltage is applied to the gate 2 and one period of the pulse voltage, is too large, the period in which the emission current flows increases, causing Joule heat to increase and the gate insulating film The load increases, the insulating film is destroyed, and the emission current does not flow. In this experiment, even if the duty of the pulse voltage was halved, a good aging result could be obtained without causing the above-mentioned problems. Further, the larger the duty of the pulse voltage, the shorter the time required for aging. This is because the longer the gate voltage application time, the more gas adsorbed to the anode is released, and the pulse voltage of the same amplitude that is required until the decrease in anode current during the period from the rise to the fall of the pulse voltage becomes small. This is because the number of repetitions of is less.

  Moreover, even when the anode voltage was increased by a maximum of 50% of the rated anode voltage, good aging results could be obtained.

  By the way, in the field emission type cold cathode aging device and aging method described in Patent Document 1, there is a problem that the cathode is damaged because no measures are taken to prevent the influence of the gas generated from the anode. . However, in the aging device according to the embodiment of the present invention, the gate voltage control unit 23 keeps the amplitude of the pulse voltage constant when the variation rate of the anode current is 10% or more. Then, when the variation rate of the anode current becomes less than 10%, the gate voltage controller 23 increases the amplitude of the pulse voltage stepwise. Therefore, in the aging apparatus according to the embodiment of the present invention, in the aging of the field emission type cold cathode 10, it is possible to suppress a rapid increase of gas generated from the anode and to prevent the cathode from being damaged.

  In addition, the anode voltage control unit 24 in the aging device 100 according to the embodiment of the present invention performs control so that the anode voltage applied first in aging is 10% of the rated anode voltage. The anode voltage control unit 24 has a variation rate of the anode current of less than 10%, the amplitude of the pulse voltage applied by the gate power supply unit 6 is a voltage value at which a rated anode current is obtained, and When the anode voltage applied by the anode power supply unit 8 is not the rated value of the anode voltage, control is performed to increase the anode voltage stepwise by 10% of the rated anode voltage. With such a configuration, since the potential difference between the cathode 1 and the anode 3 is large, the velocity of electrons emitted from the cathode 1 is increased and the amount of gas generated from the anode 3 is prevented from increasing, and damage to the cathode 1 is prevented. be able to. Further, it is possible to suppress discharge of the emission current due to a sudden increase in the potential difference between the cathode 1 and the anode 3 and obtain a stable emission current.

  In addition, the gate voltage control unit 23 in the aging device 100 according to the embodiment of the present invention has a pulse voltage when the anode voltage control unit 24 performs control to increase the anode voltage by 10% of the rated anode voltage. Is controlled to return to a voltage value at which 10% of the rated anode current is obtained. With such a configuration, it is possible to suppress a sudden increase in the gas generated from the anode 3 due to an increase in the anode voltage and prevent the cathode 1 from being damaged.

  As described above, in the aging apparatus according to the embodiment of the present invention, damage to the cathode due to the influence of gas generated from the anode can be prevented in aging of the field emission cold cathode.

  Furthermore, in the aging device according to the embodiment of the present invention, the gate voltage control unit 23 keeps the gate voltage constant for a predetermined period, and the fluctuation measurement unit 21 measures the fluctuation of the anode current in the period where the gate voltage is constant. Thus, the decrease in anode current due to the influence of gas generated from the anode can be accurately measured. This is because when the gate voltage is not constant, for example, when it is gradually increased, a decrease in anode current accompanying an increase in gas generated from the anode and an increase in anode current accompanying an increase in the gate voltage occur simultaneously. This is because it is difficult to grasp the decrease in gas at the anode based on the above.

  Furthermore, in the aging device according to the embodiment of the present invention, the gate power supply unit 6 applies a pulse voltage as the gate voltage to the gate 2 based on the gate voltage control signal received from the gate voltage control unit 23. With such a configuration, a period in which no voltage is applied to the gate 2 can be created, so that an increase in Joule heat due to the emission current flowing can be suppressed. In other words, it is possible to prevent Joule heat from increasing and a load on the gate insulating film from increasing, and the insulating film from being destroyed to prevent the emission current from flowing.

[Modification]
The present invention is not limited to the above embodiment, and includes, for example, the following modifications.

(1) Gate voltage In the aging device according to the embodiment of the present invention, the gate power supply unit 6 applies a pulse voltage as the gate voltage to the gate 2 based on the gate voltage control signal received from the gate voltage control unit 23. However, the present invention is not limited to this.

  Even if the gate voltage applied to the gate 2 by the gate power supply unit 6 is not a pulse voltage, the gate voltage control unit 23 keeps the gate voltage constant when the fluctuation rate of the anode current is a predetermined value or more, and If the variation rate of the anode current is less than a predetermined value, the gate voltage may be increased stepwise. With such a configuration, in the aging of the field emission type cold cathode 10, it is possible to suppress a rapid increase in gas generated from the anode and to prevent the cathode from being damaged.

(2) Control of anode voltage In the aging device according to the embodiment of the present invention, the anode voltage control unit 24 performs control to set the anode voltage to be applied first in aging to 10% of the rated anode voltage. The anode voltage control unit 24 is configured to perform control to increase the anode voltage stepwise by 10% of the rated anode voltage when a predetermined condition is satisfied. However, the present invention is not limited to this.

  Even if the aging device does not include the anode voltage control unit 24 and the anode power supply unit 8 applies a fixed voltage to the anode 3 as the anode voltage, the gate voltage control unit 23 performs field emission by controlling the gate voltage. In the aging of the cold cathode, it is possible to prevent damage to the cathode due to the influence of gas generated from the anode.

(3) Conditions for Increasing Anode Voltage In the aging device according to the embodiment of the present invention, the anode voltage control unit 24 is configured such that the amplitude of the pulse voltage applied by the gate power supply unit 6 is a voltage value at which a rated anode current is obtained. And that the anode voltage applied by the anode power supply unit 8 is the rated value of the anode voltage is included in the conditions for controlling the anode voltage to be increased by 10% of the rated anode voltage. It is not limited. For reasons such as preventing failure of the field emission display 101 caused by aging, the anode voltage control unit 24 obtains a predetermined current value in which the amplitude of the pulse voltage applied by the gate power supply unit 6 is less than the rated anode current. And a condition for performing control to increase the anode voltage by 10% of the rated anode voltage, and that the anode voltage applied by the anode power supply unit 8 is a predetermined voltage value lower than the rated value of the anode voltage. It can be set as the structure included in.

(4) Aging termination condition In the aging device according to the embodiment of the present invention, the amplitude of the pulse voltage applied by the gate power supply unit 6 is a voltage value at which a rated anode current is obtained, and the anode power supply unit 8 Although it is configured that the anode voltage being applied is the rated value of the anode voltage is included in the condition for ending the aging, the present invention is not limited to this. The amplitude of the pulse voltage applied by the gate power supply unit 6 is a voltage value at which a predetermined current value less than the rated anode current can be obtained for reasons such as preventing failure of the field emission display 101 due to aging, etc. A condition in which the aging is terminated may include that the anode voltage applied by the anode power supply unit 8 is a predetermined voltage value lower than the rated value of the anode voltage.

  The embodiment disclosed this time should be considered as illustrative in all points and not restrictive. The scope of the present invention is defined by the terms of the claims, rather than the description above, and is intended to include any modifications within the scope and meaning equivalent to the terms of the claims.

It is a figure which shows the structure of the aging apparatus 100 and the field emission display 101 which concern on embodiment of this invention. 3 is a flowchart that defines an operation procedure when the aging device 100 according to the embodiment of the present invention performs aging of the field emission cold cathode 10. It is a figure which shows the time change of the anode voltage, gate voltage, and anode current when the aging apparatus 100 concerning embodiment of this invention performs aging. It is a figure which shows the relationship of the gate voltage at the time of aging of the field emission type cold cathode 10 actually using the aging apparatus 100 based on embodiment of this invention, an anode average current, and an anode voltage.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 1 Cathode, 2 Gate, 3 Anode, 4 Gate insulating film, 5 Cathode panel, 6 Gate power supply part, 7 Current measurement part, 8 Anode power supply part, 9 Control part, 10 Field emission cold cathode, 21 Fluctuation measurement part, 23 Gate voltage control unit, 24 anode voltage control unit, 100 aging device, 101 field emission display.

Claims (4)

An aging device comprising a gate and a cathode, for aging a field emission cold cathode in which electrons are emitted from the cathode when a gate voltage is applied to the gate,
A gate voltage controller for controlling the gate voltage;
A fluctuation measuring unit that measures fluctuations in the anode current flowing into the anode to which the electrons are emitted;
The gate voltage control section, the row stomach control for changing the gate voltage based on the voltage that affects the electron amount or rate is varied and the discharge of the measured anode current,
The aging device that controls the gate voltage to be a pulse voltage . An aging device comprising a gate and a cathode, for aging a field emission cold cathode in which electrons are emitted from the cathode when a gate voltage is applied to the gate,
A gate voltage controller for controlling the gate voltage;
A fluctuation measuring unit that measures fluctuations in the anode current flowing into the anode to which the electrons are emitted;
The gate voltage control section, the row stomach control for changing the gate voltage based on the voltage that affects the electron amount or rate is varied and the discharge of the measured anode current,
The aging device further includes:
An anode voltage controller for controlling an anode voltage applied to the anode;
The gate voltage control unit performs control to change the gate voltage based on the variation of the anode current and the applied gate voltage,
The anode voltage control unit performs control to change the anode voltage based on the measured variation of the anode current, the changed gate voltage, and the applied anode voltage,
The aging apparatus, wherein the gate voltage control unit further performs control to change the gate voltage based on the changed anode voltage . An aging method in an aging apparatus for aging a field emission cold cathode comprising a gate and a cathode, wherein a gate voltage is applied to the gate and electrons are emitted from the cathode,
A variation measuring step for measuring a variation in an anode current flowing into the anode to which the electrons are emitted;
Look including a gate voltage control step of performing control for changing the gate voltage based on the voltage that affects the amount or rate of electrons is varied and the discharge of the measured anode current,
An aging method in which, in the gate voltage control step, the gate voltage is controlled to be a pulse voltage . An aging method in an aging apparatus for aging a field emission cold cathode comprising a gate and a cathode, wherein a gate voltage is applied to the gate and electrons are emitted from the cathode,
A variation measuring step for measuring a variation in an anode current flowing into the anode to which the electrons are emitted;
Look including a gate voltage control step of performing control for changing the gate voltage based on the voltage that affects the amount or rate of electrons is varied and the discharge of the measured anode current,
In the gate voltage control step, control is performed to change the gate voltage based on the fluctuation of the anode current and the applied gate voltage,
The aging method further includes:
Control is performed to change the anode voltage applied to the anode based on the variation of the measured anode current, the changed gate voltage, and the applied anode voltage.
The anode voltage control step,
An aging method including a gate voltage resetting step of performing control to change the gate voltage based on the changed anode voltage .

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