JP4355174B2 - Manufacturing method of liquid crystal display device - Google Patents

Manufacturing method of liquid crystal display device Download PDF

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Publication number
JP4355174B2
JP4355174B2 JP2003184665A JP2003184665A JP4355174B2 JP 4355174 B2 JP4355174 B2 JP 4355174B2 JP 2003184665 A JP2003184665 A JP 2003184665A JP 2003184665 A JP2003184665 A JP 2003184665A JP 4355174 B2 JP4355174 B2 JP 4355174B2
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substrate
substrates
liquid crystal
crystal display
display device
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JP2005017856A (en
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公太郎 米田
泰 天野
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Sony Corp
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Sony Corp
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Description

【0001】
【発明の属する技術分野】
本発明は液晶表示装置の製造方法に関する。より詳しくは、一対の電極基板を接合して組み立てられる液晶パネルの基板間隙(ギャップ)を制御する為に用いられるスペーサの改善技術に関する。
【0002】
【従来技術】
従来の液晶表示装置は、各々少なくとも電極が形成された一対の基板と、該一対の基板を互いに接合して両者の間に間隙(ギャップ)を形成するシール剤と、該間隙に充填封入された液晶と、両基板の間に介在して該間隙を一定の寸法に規制するスペーサとを有するフラットパネルである。スペーサとしては、従来から微細な粒状のものが用いられ、一方の基板の表面に散布されていた。最近粒状の散布スペーサに代え、フォトスペーサが用いられている。フォトスペーサは例えばフォトレジストなど感光性の樹脂材料からなり、一対の基板の何れか片方に樹脂材料を所定の厚みで塗工した後、感光性を利用した写真蝕刻(フォトエッチング)を適用して形成される。
【特許文献1】
特開2002−268070号公報
【特許文献2】
特開2002−372717号公報
【特許文献3】
特開2001−188235号公報
【0003】
【発明が解決しようとする課題】
従来のフォトスペーサは互いに接合した両基板の間に介在して、ギャップを一定に保持する機能を有する。フォトスペーサはあらかじめ一方の基板に形成されており、パネルに組み立てる際他方の基板と当接して、ギャップ間隙を規制する。しかしながら、フォトスペーサは他方の基板表面に当接しただけで、必ずしも接着などで強固に固定されていない。従って、パネル形成後において外圧によりパネルに応力が加わった場合、パネル内部に歪が生じて、液晶のドメイン発生など表示品位の低下を招いていた。又、外圧により一対の基板間隙が局部的に大きくなり、真空気泡が発生する場合もある。これにより、表示品位の低下を招く恐れがある。
【0004】
【課題を解決するための手段】
本発明に係る液晶表示装置の製造方法は、それぞれ複数個のパネルを取り出すための大判の基板であって、前記パネルのサイズに合わせて複数に区画された一対の基板のうち、一方の基板の前記パネルを構成しない周辺部に、粒状のスペーサを散布する工程と、前記一対の基板のうち、他方の基板の前記パネルを構成する部分に、樹脂材料からなるフォトスペーサを形成する工程と、前記一対の基板の少なくとも片方に前記各区画に沿ってシール剤を塗布する工程と、前記一対の基板を重ね合わせるとともに、加熱加圧処理により前記樹脂材料の接着性を引き出して前記一対の基板を前記フォトスペーサと前記シール剤で接着する工程とを有するものである。
【0005】
また、本発明に係る液晶表示装置の製造方法は、前記一方の基板の周辺部に前記粒状のスペーサをインクジェット方式で散布するものである。
【0006】
本発明によれば、フォトスペーサに接着性を持たせ、両基板を互いに接着してギャップを一定に固定している。これにより、パネルに外圧が加わっても間隙寸法が変化しなくなり、表示品位をそのまま維持できる。
【0007】
【発明の実施の形態】
以下図面を参照して本発明の実施の形態を詳細に説明する。図1は本発明に係る液晶表示装置の製造方法を示す工程図である。まず(A)に示す様に、TFT基板1を用意する。TFT基板1にはあらかじめ画素電極やこれを駆動する薄膜トランジスタ(TFT)や周辺の駆動回路が一体的に形成されている。尚本実施形態では大判のTFT基板1から最終的に複数個のパネルを取り出す為、TFT基板1はパネルサイズに合わせて区画2毎に分かれている。TFT基板1は半導体プロセス工程であらかじめTFTや画素電極を形成した後、更に配向処理が施されている。この配向処理は、例えばポリイミドなどの配向膜を形成した後ラビング処理を施すことにより行われる。又、TFT基板1の互いに対向する二隅には、あらかじめアライメントマーク5が形成されている。この様なTFT基板1に対し、ディスペンサ3を用いて導電性を有するコモン剤4を塗布する。このコモン剤4は、別の基板に形成された対向電極との間で導通を取る為にあらかじめ塗布されるものである。
【0008】
続いて(B)に示す様に、TFT基板1の周辺部に粒状のスペーサ6を散布する。以下本明細書ではこの散布された粒状のスペーサを散布スペーサと呼んで、後述するフォトスペーサと区別する。基板1の周辺部は膜厚むらやエッジリンスの関係から、フォトスペーサを形成することは困難である。そこで、フォトスペーサに代えてTFT基板1の周辺部に散布スペーサ6を配している。仮に散布スペーサ6がないと、後のホットプレス工程でTFT基板1と別の基板を貼り合わせる際、基板周辺から空気を十分抜くことができず、パネルギャップの均一性が取れない。粒状スペーサ6の散布方法は、通常の乾式散布や湿式散布を採用できる。乾式散布はスペーサ材料を管に通して静電気を利用して振りまくものである。又、湿式散布は溶剤にスペーサ材料を混ぜて振りまく方法である。しかしながら、通常の乾式散布方法や湿式散布方法よりも、インクジェット方式でTFT基板1の周辺部にのみ選択的に粒状スペーサ6を散布することが好ましい。インクジェット方式は、粒状スペーサ6を選択的にTFT基板1の周辺部にのみ供給することが可能である。
【0009】
続いて(C)に示す様に、TFT基板1と貼り合わせるべき別の基板として、同じく大判のCF基板7を用意する。CF基板7は少なくともカラーフィルタ(CF)や対向電極が形成されており、TFT基板1と同じく区画12でパネル毎に分かれている。CF基板7の表面もあらかじめ配向処理が施されている。又、CF基板7の対向する二隅にもアライメントマーク15が形成されている。加えて、CF基板7の各区画12の内部にはフォトスペーサ16が形成されている。このフォトスペーサは感光性及び接着性(熱硬化性)の樹脂材料からなり、例えばアクリル樹脂が好適である。このアクリル樹脂材料をCF基板7の表面に所定の厚みで塗工した後、感光性を利用した写真蝕刻(フォトエッチング)を適用して形成されたものである。樹脂材料の塗工厚みは目標とする基板間隙の寸法と適合する様に設定される。例えば感光性及び接着性を有する樹脂材料としてネガタイプのフォトレジストを用いることができる。このフォトレジストを所定の厚みで塗工した後、マスクを介して選択的に紫外線を照射することで、照射部が硬化する。この状態で現像定着処理を施すことにより、CF基板7の表面に貝柱状で離散的に配されたフォトスペーサ16を設けることができる。尚、本実施形態ではフォトスペーサ16をCF基板7側に形成したが、これに代えてTFT基板1側に形成することもできる。又、フォトスペーサ16に代えて通常の粒状スペーサを用いることも考えられる。しかしながら、粒状スペーサはフォトスペーサに比べ精度が悪い。この結果、粒状スペーサを用いると粒子径のばらつきの影響でギャップの均一性によい結果が得られない。そこで本実施形態では、パネルを構成する部分には精度のよいフォトスペーサ16を形成し、パネルを構成せず且つフォトスペーサが形成できない基板の周辺部に散布スペーサ6を配している。この様に、二種類のスペーサを領域分割的に使い分けることで、最終的にギャップ精度の優れたパネルを作成することができる。
【0010】
工程(C)では、上述の様にあらかじめフォトスペーサ16やアライメントマーク15が形成されたCF基板7に対し、ディスペンサ9を用いてシール剤8を各区画12に沿って塗布する。
【0011】
引続き図2の工程図を参照して、本発明に係る液晶表示装置の製造方法を説明する。(D)に示す様に、あらかじめフォトスペーサ16が形成されたCF基板7と、同じくあらかじめ散布スペーサ6が配されたTFT基板1を互いに重ね合わせる。その際、TFT基板1の周辺部にあらかじめ紫外線硬化型の仮止め剤10を塗工しておく。CF基板7側に形成されたアライメントマーク15とTFT基板1側に形成されたアライメントマーク5を互いに合わせることで、両者の位置決めを行う。具体的には、アライメント用のステージを用いて、X軸,Y軸及び回転角θにつき調整を行って、CF基板7とTFT基板1を互いに合わせ込む。その際、カメラを用いてアライメントマーク5,15を認識し、画像処理によって自動的にステージを駆動し、CF基板7とTFT基板1を合わせ込む様にしてもよい。両者の位置決めが終了した後、紫外線を照射して仮止め剤10を硬化させる。
【0012】
最後に(E)に示す様に、仮止めされたTFT基板1及びCF基板7にプレスで加圧し、あらかじめ設定した基板間隙を作り出す。この設定ギャップは液晶材料の電気光学特性などにより決まっており、通常1〜10μmの間にある。プレスでギャップ形成後オーブンに投入してベーキングを行う。これにより、シール剤8が硬化し、CF基板7とTFT基板1は互いに接合する。その際、フォトスペーサ16もベーキングで加熱処理を受ける為、樹脂材料の接着性が引き出され、CF基板7とTFT基板1を互いに接着する。これにより、間隙寸法が一定に固定される。以上により、本発明に係る液晶表示装置の製造方法の主要工程が完了する。尚、プレスによる加圧工程とオーブンによる加熱工程を両方合わせて同時に行うホットプレス工程としてもよい。
【0013】
図3は、本発明に係る液晶表示装置の製造方法の全体構成を概括するフローチャートである。まずステップS1で半導体プロセスによりTFT基板を作成する。更に、TFT基板を配向処理する。続いてステップS2でコモン剤を塗布する。更にステップS3で大型のTFT基板の周辺部に粒状スペーサを散布する。一方ステップS4でCF基板を作成する。このCF基板はカラーフィルタや対向電極が形成されている。加えてフォトエッチングプロセスでフォトスペーサも形成する。更にTFT基板と同様配向処理を施しておく。ステップS5でCF基板の各区画毎にシール剤をディスペンサで塗布する。ステップS6でTFT基板とCF基板を互いにアライメントする。ステップS7で両基板の間隙寸法を出す為にプレスする。更にステップS8でベーキングを行い、TFT基板及びCF基板を互いに接合する。その際、接着性を備えたフォトスペーサも両基板を互いに接着する為、ギャップを物理的に固定することができる。その後ステップS9で互いに接合されたTFT基板及びCF基板を区画毎に切断し、個々のパネルにする。最後にステップS10で個々のパネルのシール剤によって囲まれた内部空間に液晶を注入封止する。以上で偏平形状の液晶パネルが完成する。液晶はフォトスペーサによって一定に保持されたギャップに真空注入され、所望の電気光学特性を発揮することが可能になる。
【0014】
図4は、互いに接合したCF基板及びTFT基板の断面構造を示す模式的な部分断面図である。図示する様に、CF基板7とTFT基板1はシール剤8によって互いに接合している。両基板7,1の間にはフォトスペーサ16も介在しており、ギャップを一定に維持している。本実施形態ではフォトスペーサ16はあらかじめCF基板7側に形成されており、加圧加熱プロセスでTFT基板1側に接着する様になっている。但し本発明はこれに限られるものではなく、TFT基板1側にフォトスペーサ16を形成し、加圧加熱処理でCF基板7側と接着する様にしてもよい。フォトスペーサ16は感光性及び熱硬化性を有する樹脂材料をCF基板7に塗工して形成する。樹脂材料を塗工した後マスクを介して露光処理することで、感光部分が硬化する。この状態で現像定着処理を施すと未感光で且つ未硬化の部分が除去され、硬化した部分のみが貝柱状に残りフォトスペーサ16となる。一方、基板7,1の周辺部には散布スペーサ6が介在している。本発明はフォトスペーサ16が形成できない周辺部に対し、これに代えて散布スペーサ6を配するものである。散布スペーサ6を配することで、CF基板7とTFT基板1のギャップが維持され、プロセス中に生じる空気の流動を円滑化できる。
【0015】
尚CF基板7側にはあらかじめ赤緑青毎に着色されたカラーフィルタ25が形成されている。又赤緑青に着色された各画素領域を区分する様に黒色のブラックマスク26も形成されている。カラーフィルタ25及びブラックマスク26の上には保護膜を介して対向電極27が形成されている。前述したフォトスペーサ16はこの対向電極27上にフォトエッチングを用いて形成されている。対向電極27の上には更に配向膜28も形成されている。一方、TFT基板1側にはTFTと画素電極20が集積的に形成されている。画素電極20は配向膜21によって被覆されている。
【0016】
図5は、本発明に従って製造された液晶表示装置の一実施例を示す顕微鏡拡大写真である。図示する様に、液晶表示装置はブラックマスク26で仕切られた微細な画素の集合からなる。個々の画素は画素電極20を含んでいる。画素電極20は透明部201と反射部202とに分かれている。反射部202は微細な凹凸を有している。本実施例の液晶表示装置は、反射型と透過型を合体したハイブリッド構成となっている。昼間など外光が豊富に存在する環境下では、反射部202による反射光を利用して画像を映し出す。夜間など外光の乏しい環境下では、パネルの背部に置かれたバックライトからの光を透明部201を通すことで画像を映し出す。この様な反射型と透過型を組み合わせたハイブリッド構成の液晶パネルは、例えばPDAのディスプレイに用いることができる。ここで、フォトスペーサ16は円柱形状を有しており、3画素に1個当りの密度で、フォトリソグラフィにより形成されている。但し、本発明はこれに限られるものではなく、一対の基板間のギャップを一定に維持できる密度であれば問題ない。
【0017】
【発明の効果】
以上説明した様に、本発明によれば、上下基板のギャップ形成後、パネル内部に配されたフォトスペーサの接着力を利用して、上下基板を固定し、間隙寸法を一定に保持する。この結果、外圧が加わってもパネルのギャップは変化しない為、表示品位を一定に保持することが可能になり、液晶表示装置に本発明を利用可能である。
【図面の簡単な説明】
【図1】本発明に係る液晶表示装置の製造工程図である。
【図2】本発明に係る液晶表示装置の製造工程図である。
【図3】本発明に係る液晶表示装置の製造方法を示すフローチャートである。
【図4】本発明に係る液晶表示装置の中間状態を示す模式的な部分断面図である。
【図5】本発明に係る液晶表示装置の拡大顕微鏡写真図である。
【符号の説明】
1・・・TFT基板、2・・・区画、5・・・アライメントマーク、6・・・散布スペーサ、7・・・CF基板、8・・・シール剤、12・・・区画、15・・・アライメントマーク、16・・・フォトスペーサ、20・・・画素電極、26・・・ブラックマスク
[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a process for producing a liquid crystal display equipment. More specifically, the present invention relates to a technique for improving a spacer used for controlling a substrate gap (gap) of a liquid crystal panel assembled by joining a pair of electrode substrates.
[0002]
[Prior art]
In a conventional liquid crystal display device, a pair of substrates each having at least an electrode, a sealant that joins the pair of substrates together to form a gap (gap) therebetween, and the gap is filled and sealed It is a flat panel having a liquid crystal and a spacer that is interposed between both substrates and restricts the gap to a certain size. As spacers, fine particles have been conventionally used, and are dispersed on the surface of one of the substrates. Recently, photo spacers are used in place of granular scattering spacers. The photo spacer is made of a photosensitive resin material such as a photoresist, and after applying the resin material to one of the pair of substrates with a predetermined thickness, photo etching using photo sensitivity (photo etching) is applied. It is formed.
[Patent Document 1]
JP 2002-268070 A [Patent Document 2]
JP 2002-372717 A [Patent Document 3]
Japanese Patent Laid-Open No. 2001-188235
[Problems to be solved by the invention]
A conventional photospacer is interposed between both substrates bonded to each other, and has a function of keeping the gap constant. The photo spacer is formed in advance on one of the substrates, and comes into contact with the other substrate when assembling the panel to regulate the gap gap. However, the photo spacer is merely fixed to the other substrate surface and is not necessarily firmly fixed by adhesion or the like. Therefore, when a stress is applied to the panel by an external pressure after the panel is formed, a distortion is generated inside the panel, resulting in a deterioration in display quality such as generation of a liquid crystal domain. In addition, the gap between the pair of substrates may be locally increased by external pressure, and vacuum bubbles may be generated. As a result, the display quality may be degraded.
[0004]
[Means for Solving the Problems]
The method of manufacturing a liquid crystal display device according to the present invention is a large-sized substrate for taking out a plurality of panels, and one of a pair of substrates divided into a plurality of panels according to the size of the panel. A step of spraying granular spacers on a peripheral portion that does not constitute the panel; a step of forming a photo spacer made of a resin material on a portion of the pair of substrates constituting the panel of the other substrate; A step of applying a sealant along at least one of the pair of substrates along each of the sections; and the pair of substrates are overlapped, and the adhesiveness of the resin material is drawn out by a heat and pressure treatment to remove the pair of substrates from the pair of substrates. And a step of adhering with a photospacer and the sealing agent.
[0005]
In the method for manufacturing a liquid crystal display device according to the present invention, the granular spacers are dispersed on the periphery of the one substrate by an inkjet method.
[0006]
According to the present invention, the photo spacer is provided with adhesiveness, and the two substrates are bonded to each other to fix the gap constant. Thereby, even if an external pressure is applied to the panel, the gap dimension does not change, and the display quality can be maintained as it is.
[0007]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. FIG. 1 is a process diagram showing a method of manufacturing a liquid crystal display device according to the present invention. First, as shown in (A), a TFT substrate 1 is prepared. The TFT substrate 1 is integrally formed with a pixel electrode, a thin film transistor (TFT) for driving the pixel electrode, and a peripheral drive circuit. In this embodiment, since a plurality of panels are finally taken out from the large TFT substrate 1, the TFT substrate 1 is divided into sections 2 according to the panel size. The TFT substrate 1 is further subjected to alignment treatment after forming TFTs and pixel electrodes in advance in the semiconductor process. This alignment process is performed, for example, by forming an alignment film such as polyimide and then performing a rubbing process. In addition, alignment marks 5 are formed in advance at two opposite corners of the TFT substrate 1. A conductive common agent 4 is applied to such a TFT substrate 1 using a dispenser 3. The common agent 4 is applied in advance in order to establish conduction with the counter electrode formed on another substrate.
[0008]
Subsequently, as shown in (B), granular spacers 6 are dispersed around the periphery of the TFT substrate 1. Hereinafter, in the present specification, the dispersed granular spacer is referred to as a dispersed spacer, and is distinguished from a photo spacer described later. It is difficult to form a photo spacer at the peripheral portion of the substrate 1 due to unevenness of film thickness and edge rinse. Therefore, instead of the photo spacer, the scattering spacer 6 is arranged on the periphery of the TFT substrate 1. If the scattering spacer 6 is not provided, when the TFT substrate 1 and another substrate are bonded together in a subsequent hot press process, the air cannot be sufficiently removed from the periphery of the substrate, and the uniformity of the panel gap cannot be obtained. As a spraying method of the granular spacer 6, normal dry spraying or wet spraying can be adopted. In dry spraying, spacer material is passed through a tube and sprinkled using static electricity. In addition, wet spraying is a method in which a spacer material is mixed with a solvent and sprinkled. However, it is preferable to selectively spray the granular spacers 6 only on the peripheral portion of the TFT substrate 1 by an ink jet method, rather than a normal dry spraying method or wet spraying method. The ink jet method can selectively supply the granular spacer 6 only to the peripheral portion of the TFT substrate 1.
[0009]
Subsequently, as shown in (C), a large CF substrate 7 is prepared as another substrate to be bonded to the TFT substrate 1. The CF substrate 7 is formed with at least a color filter (CF) and a counter electrode, and is divided for each panel in a section 12 like the TFT substrate 1. The surface of the CF substrate 7 is also subjected to an orientation process in advance. In addition, alignment marks 15 are also formed at two opposite corners of the CF substrate 7. In addition, a photo spacer 16 is formed inside each section 12 of the CF substrate 7. This photo spacer is made of a photosensitive and adhesive (thermosetting) resin material, and for example, an acrylic resin is suitable. This acrylic resin material is formed on the surface of the CF substrate 7 by applying a predetermined thickness and then applying photo etching using photosensitivity. The coating thickness of the resin material is set so as to match the target substrate gap dimension. For example, a negative type photoresist can be used as a resin material having photosensitivity and adhesiveness. After this photoresist is applied with a predetermined thickness, the irradiated portion is cured by selectively irradiating ultraviolet rays through a mask. By performing the development and fixing process in this state, the photo spacers 16 that are discretely arranged in a shell shape on the surface of the CF substrate 7 can be provided. In this embodiment, the photo spacer 16 is formed on the CF substrate 7 side, but it can be formed on the TFT substrate 1 side instead. It is also conceivable to use a normal granular spacer instead of the photo spacer 16. However, granular spacers are less accurate than photo spacers. As a result, when a granular spacer is used, a good result for gap uniformity cannot be obtained due to the influence of variation in particle diameter. Therefore, in the present embodiment, a photo spacer 16 with high accuracy is formed in the part constituting the panel, and the scattering spacer 6 is arranged in the peripheral part of the substrate which does not constitute the panel and the photo spacer cannot be formed. In this way, a panel having excellent gap accuracy can be finally produced by using two types of spacers in a divided manner.
[0010]
In the step (C), the sealant 8 is applied along each section 12 using the dispenser 9 on the CF substrate 7 on which the photo spacers 16 and the alignment marks 15 are formed in advance as described above.
[0011]
The method for manufacturing the liquid crystal display device according to the present invention will be described with reference to the process diagram of FIG. As shown in (D), the CF substrate 7 on which the photo spacers 16 are formed in advance and the TFT substrate 1 on which the scattering spacers 6 are arranged in advance are overlapped with each other. At that time, an ultraviolet curable temporary fixing agent 10 is applied to the peripheral portion of the TFT substrate 1 in advance. The alignment mark 15 formed on the CF substrate 7 side and the alignment mark 5 formed on the TFT substrate 1 side are aligned with each other, thereby positioning the two. Specifically, using the alignment stage, the CF substrate 7 and the TFT substrate 1 are aligned with each other by adjusting the X axis, the Y axis, and the rotation angle θ. At this time, the alignment marks 5 and 15 may be recognized using a camera, the stage may be automatically driven by image processing, and the CF substrate 7 and the TFT substrate 1 may be aligned. After both positioning is completed, the temporary fixing agent 10 is cured by irradiating with ultraviolet rays.
[0012]
Finally, as shown in (E), the temporarily fixed TFT substrate 1 and CF substrate 7 are pressed with a press to create a preset substrate gap. This set gap is determined by the electro-optical characteristics of the liquid crystal material and is usually between 1 and 10 μm. After gap formation with a press, it is put into an oven and baked. Thereby, the sealing agent 8 is cured, and the CF substrate 7 and the TFT substrate 1 are bonded to each other. At this time, since the photo spacer 16 is also subjected to heat treatment by baking, the adhesiveness of the resin material is pulled out, and the CF substrate 7 and the TFT substrate 1 are bonded to each other. As a result, the gap dimension is fixed. Thus, the main steps of the method for manufacturing the liquid crystal display device according to the present invention are completed. In addition, it is good also as a hot press process performed simultaneously, combining the pressurization process by a press and the heating process by oven.
[0013]
FIG. 3 is a flowchart outlining the overall configuration of the liquid crystal display manufacturing method according to the present invention. First, in step S1, a TFT substrate is formed by a semiconductor process. Further, the TFT substrate is subjected to alignment treatment. Subsequently, the common agent is applied in step S2. In step S3, granular spacers are dispersed around the large TFT substrate. On the other hand, a CF substrate is created in step S4. This CF substrate is provided with a color filter and a counter electrode. In addition, a photo spacer is also formed by a photo etching process. Further, the alignment process is performed in the same manner as the TFT substrate. In step S5, a sealant is applied to each section of the CF substrate with a dispenser. In step S6, the TFT substrate and the CF substrate are aligned with each other. In step S7, pressing is performed to obtain a gap dimension between the two substrates. Further, baking is performed in step S8, and the TFT substrate and the CF substrate are bonded to each other. At this time, since the photo spacer having adhesiveness also bonds the two substrates to each other, the gap can be physically fixed. After that, in step S9, the TFT substrate and the CF substrate bonded to each other are cut for each section to form individual panels. Finally, in step S10, liquid crystal is injected and sealed in the internal space surrounded by the sealant of each panel. A flat liquid crystal panel is thus completed. The liquid crystal is vacuum-injected into the gap held constant by the photo spacer, and it becomes possible to exhibit desired electro-optical characteristics.
[0014]
FIG. 4 is a schematic partial cross-sectional view showing a cross-sectional structure of a CF substrate and a TFT substrate bonded to each other. As shown in the figure, the CF substrate 7 and the TFT substrate 1 are bonded to each other by a sealant 8. A photo spacer 16 is also interposed between the two substrates 7 and 1 to maintain a constant gap. In this embodiment, the photo spacer 16 is formed in advance on the CF substrate 7 side, and is adhered to the TFT substrate 1 side by a pressure heating process. However, the present invention is not limited to this, and the photo spacer 16 may be formed on the TFT substrate 1 side and bonded to the CF substrate 7 side by pressure and heat treatment. The photo spacer 16 is formed by applying a resin material having photosensitivity and thermosetting to the CF substrate 7. The photosensitive portion is cured by applying an exposure process through a mask after coating the resin material. When the development and fixing process is performed in this state, the unexposed and uncured portion is removed, and only the cured portion remains in the shape of a shell and becomes the photo spacer 16. On the other hand, scattering spacers 6 are interposed in the periphery of the substrates 7 and 1. In the present invention, instead of this, the scattering spacer 6 is disposed on the peripheral portion where the photo spacer 16 cannot be formed. By providing the scattering spacer 6, the gap between the CF substrate 7 and the TFT substrate 1 is maintained, and the flow of air generated during the process can be smoothed.
[0015]
A color filter 25 colored in advance for each of red, green and blue is formed on the CF substrate 7 side. Also, a black black mask 26 is formed so as to partition each pixel region colored red, green, and blue. A counter electrode 27 is formed on the color filter 25 and the black mask 26 via a protective film. The photo spacer 16 described above is formed on the counter electrode 27 using photo etching. An alignment film 28 is further formed on the counter electrode 27. On the other hand, TFTs and pixel electrodes 20 are formed in an integrated manner on the TFT substrate 1 side. The pixel electrode 20 is covered with an alignment film 21.
[0016]
FIG. 5 is an enlarged photo of a microscope showing one embodiment of the liquid crystal display device manufactured according to the present invention. As shown in the figure, the liquid crystal display device includes a set of fine pixels partitioned by a black mask 26. Each pixel includes a pixel electrode 20. The pixel electrode 20 is divided into a transparent portion 201 and a reflective portion 202. The reflection part 202 has fine irregularities. The liquid crystal display device of this embodiment has a hybrid configuration in which a reflection type and a transmission type are combined. In an environment where there is abundant external light such as in the daytime, an image is projected using the light reflected by the reflection unit 202. In an environment with poor external light such as at night, an image is projected by passing light from a backlight placed on the back of the panel through the transparent portion 201. Such a liquid crystal panel having a hybrid configuration combining a reflective type and a transmissive type can be used, for example, in a PDA display. Here, the photo spacer 16 has a cylindrical shape, and is formed by photolithography at a density of one per three pixels. However, the present invention is not limited to this, and there is no problem as long as the density can keep the gap between the pair of substrates constant.
[0017]
【The invention's effect】
As described above, according to the present invention, after forming the gap between the upper and lower substrates, the upper and lower substrates are fixed and the gap size is kept constant by using the adhesive force of the photo spacer disposed inside the panel. As a result, since the gap of the panel does not change even when an external pressure is applied, the display quality can be kept constant, and the present invention can be used for a liquid crystal display device.
[Brief description of the drawings]
FIG. 1 is a manufacturing process diagram of a liquid crystal display device according to the present invention.
FIG. 2 is a manufacturing process diagram of a liquid crystal display device according to the present invention.
FIG. 3 is a flowchart showing a method for manufacturing a liquid crystal display device according to the present invention.
FIG. 4 is a schematic partial cross-sectional view showing an intermediate state of the liquid crystal display device according to the present invention.
FIG. 5 is an enlarged micrograph of a liquid crystal display device according to the present invention.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 ... TFT substrate, 2 ... Compartment, 5 ... Alignment mark, 6 ... Scatter spacer, 7 ... CF substrate, 8 ... Sealing agent, 12 ... Compartment, 15 ... Alignment mark, 16 ... photo spacer, 20 ... pixel electrode, 26 ... black mask

Claims (2)

それぞれ複数個のパネルを取り出すための大判の基板であって、前記パネルのサイズに合わせて複数に区画された一対の基板のうち、一方の基板の前記パネルを構成しない周辺部に、粒状のスペーサを散布する工程と、A large-sized substrate for taking out a plurality of panels, each of a pair of substrates divided into a plurality of sizes according to the size of the panel. A process of spraying,
前記一対の基板のうち、他方の基板の前記パネルを構成する部分に、樹脂材料からなるフォトスペーサを形成する工程と、Forming a photo spacer made of a resin material on a portion of the pair of substrates that constitutes the panel of the other substrate;
前記一対の基板の少なくとも片方に前記各区画に沿ってシール剤を塗布する工程と、Applying a sealant along each of the sections to at least one of the pair of substrates;
前記一対の基板を重ね合わせるとともに、加熱加圧処理により前記樹脂材料の接着性を引き出して前記一対の基板を前記フォトスペーサと前記シール剤で接着する工程とSuperimposing the pair of substrates and drawing out the adhesiveness of the resin material by heat and pressure treatment to bond the pair of substrates to the photo spacer with the sealant;
を有する液晶表示装置の製造方法。A method of manufacturing a liquid crystal display device having
前記一方の基板の周辺部に前記粒状のスペーサをインクジェット方式で散布する
請求項1記載の液晶表示装置の製造方法。
The granular spacers are sprayed on the periphery of the one substrate by an ink jet method.
A method for manufacturing a liquid crystal display device according to claim 1 .
JP2003184665A 2003-06-27 2003-06-27 Manufacturing method of liquid crystal display device Expired - Lifetime JP4355174B2 (en)

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