JP4350105B2 - Liquid dispensing valve and liquid dispensing device - Google Patents

Description

  The present invention relates to a discharge valve suitable for use in a liquid quantitative discharge device that also contains viscous fluid, viscous substances, and the like.

  For example, in a semiconductor manufacturing process, a liquid dispensing apparatus is used to apply an electronic material such as a paste on a substrate regularly or irregularly for point application, linear application, or the like. In such a liquid dispensing apparatus, the amount of liquid pushed out from the liquid storage container by a pressurizing means such as a piston is controlled by the opening / closing amount and opening / closing time of the discharge valve. There are various types of such discharge valves, and appropriate discharge valves are properly used depending on the type of liquid to be discharged, the amount of liquid to be discharged per unit time, and the like. In particular, a discharge valve called a needle valve is provided with a needle valve body having an acute tip provided movably in a liquid chamber and a tip of the needle valve body, and a small opening leading to a discharge port is provided in the center. The needle seat is configured to stop the liquid discharge when the tip of the needle valve body closes the opening in the central portion of the valve seat and to discharge the liquid by moving away from the opening. It has the characteristic that the change in the effective sectional area of the valve seat opening with respect to the fine stroke adjustment of the valve body is small, and because of this characteristic, it is said that it is suitable for a small amount of liquid discharge. Such a needle valve is disclosed in Japanese Patent Application No. 10-309179 (filing date: October 29, 1998) filed by the applicant of the present application and entitled “Liquid dispensing apparatus”.

However, when liquid dispensing is performed using such a needle valve, the ratio of the needle valve body that occupies the liquid chamber formed to have an opening communicating with the liquid ejection port changes. A change in the volume occupied by the needle valve in the chamber occurs, which causes a change in the fluid pressure in the fluid chamber, resulting in a subtle change in the discharge speed (discharge amount) of the discharged liquid. There is. The volume occupied by such a needle valve body is minimum when the valve is opened, but gradually increases when the valve is opened from the time of opening to the time of closing, and is maximized when the valve is closed, thereby affecting the liquid discharge amount. In particular, when the discharge amount is required to be minute and constant, even a small volume change greatly acts as a variation factor of the discharge amount.

A main object of the present invention is to eliminate the problems of the needle valve described above, and a liquid metering discharge valve and a liquid that can perform minute discharge of liquid with high accuracy and stability and quickly stop the discharge. An object of the present invention is to provide a metering discharge device.
Another object of the present invention is to determine the amount of liquid provided with pressure compensation means for increasing or decreasing the volume of the liquid chamber so as to cancel the change in the liquid pressure in the liquid chamber accompanying the movement of the needle valve element that opens and closes the liquid discharge port. An object of the present invention is to provide a discharge valve and a liquid dispensing apparatus.

In order to achieve the above object, the liquid dispensing valve of the present invention comprises:
(1) A valve body formed with an inlet hole communicating with the liquid storage container, a liquid chamber for storing the liquid introduced from the inlet hole, and an outlet hole through which the liquid in the liquid chamber is to be discharged. When,
A needle-like valve body that is provided so as to be movable between a first position and a second position in the liquid chamber, and moves in accordance with the pressurizing operation of the liquid in the liquid storage container;
A valve seat formed so as to receive the tip of the valve body at a first position of the valve body and close the outlet hole;
A part of the valve body is arranged facing the liquid chamber, and the increase or decrease of the liquid pressure in the liquid chamber caused by the movement of the valve body from the first position to the second position or the movement from the second position to the first position. Pressure compensation means capable of advancing and retreating toward the liquid chamber so as to reduce or increase the volume occupied by the valve body in the liquid chamber in accordance with the movement of the valve body,
Adjusting means for adjusting the stroke length between the first position and the second position of the valve body;
Adjusting means for adjusting the moving range of the pressure compensating means.
Moreover, the liquid dispensing apparatus of the present invention is
(2) a liquid storage container for storing liquid;
Liquid pressurizing means including a plunger disposed in a liquid-tight manner in the liquid storage container;
A valve body formed having an inlet hole communicating with the liquid storage container, a liquid chamber containing the liquid introduced from the inlet hole, and an outlet hole through which the liquid in the liquid chamber is to be discharged; A needle-like valve body that is provided so as to be movable between the first position and the second position in the liquid chamber and moves in accordance with the operation of the plunger, and the tip of the valve body at the first position of the valve body And a valve seat formed so as to close the outlet hole, and a part of the valve seat faces the liquid chamber, and the valve body moves from the first position to the second position or from the second position. In order to offset the increase or decrease of the hydraulic pressure in the liquid chamber caused by the movement to the first position, the liquid volume is decreased or increased in accordance with the movement of the valve body in accordance with the movement of the valve body. Pressure compensation means that can advance and retreat into the room, and the first place of the valve body When the adjustment means for adjusting the stroke length between the second position, the liquid dispensing valve and an adjusting means for adjusting the range of movement of the pressure compensating means,
It is comprised from these.

  The needle-like valve body in such a liquid fixed amount discharge valve or liquid fixed amount discharge device is disposed so as to be movable between the first position and the second position (moving from the first position to the second position or the second position). The liquid is moved according to the pressurizing operation of the liquid in the liquid storage container, that is, the operation of the plunger disposed in a liquid-tight manner in the liquid storage container. However, the change in the occupied volume of the valve body in the liquid chamber caused by this movement, that is, the change in the hydraulic pressure is offset by the movement of the pressure compensation means. Is always kept at a predetermined value, and the discharge flow rate during the operation of the valve can be kept constant. In particular, it is possible to effectively absorb minute fluctuations in hydraulic pressure due to movement of a needle valve element having a small size and volume, so that liquid can be discharged with high accuracy and stability.

  The liquid metering discharge valve of the present invention can have a valve body configured in the form of a cylinder. In such a form, the rear end of the needle valve body is connected to a piston in the cylinder, and the pressure compensation means is A change in the occupied volume of the valve body in the liquid chamber caused by the movement of the piston is provided by a pressure compensation piston which is provided independently of the piston and a part of which is disposed facing the liquid chamber. Is configured to cancel by moving in the direction opposite to the direction of movement of the piston.

According to such a configuration, the pressure compensating piston operates simultaneously with the forward / backward displacement of the piston of the cylinder, and the volume occupied by the one end of the pressure compensating piston facing the liquid chamber in the liquid chamber changes with the forward / backward displacement of the piston. Therefore, it is possible to more easily, quickly and accurately cope with pressure fluctuations at the discharge port and the vicinity thereof. For example, when the valve opens,
The volume of the needle valve body in the vicinity of the discharge port decreases, and conversely, when the valve is closed, the volume occupied by the needle valve body increases, so in the former case, the pressure compensation piston is advanced. Displacement and the one end of the fluid advancing into the liquid chamber can prevent a decrease in the fluid pressure in the vicinity of the discharge, and in the latter case, the pressure compensation piston is displaced backward and the one end is moved. By retreating from the liquid chamber, an increase in the liquid pressure can be prevented.

In the present invention, means for adjusting the stroke length from the first position to the second position of the needle valve body and adjustment means for adjusting the moving range of the pressure compensation means are provided. By adjusting the stroke length of the valve body, the liquid discharge flow rate can be set to a desired value, and the movement range of the pressure compensation means is commensurate with the adjusted stroke amount of the valve body. be able to.
Further, the movement of the needle valve body and the driving of the actuator forming the pressure compensating means can be configured to be performed by electromagnetic driving means, respectively. In such a case, the rear end of the needle valve body is connected to a first electromagnetic drive means disposed outside the valve body, and the actuator is provided with a second electromagnetic drive disposed outside the valve body. Connected to the means.

Each of the first and second electromagnetic driving means can be composed of a step motor and a mechanism for converting the rotation thereof into a linear motion.
The first electromagnetic driving means includes a first plunger connected to the rear end of the valve body and a first magnetic coil for driving the first plunger, and the second electromagnetic driving means. The driving means can also be composed of a second plunger connected to one end of the actuator and a second magnetic coil for magnetically driving the second plunger.
In the discharge valve configured as described above, a pressure sensor is disposed in the vicinity of the valve seat in the liquid chamber to detect the hydraulic pressure, and based on the detection result, the driving directions of the first electromagnetic driving means and the second electromagnetic driving means The driving time can also be controlled.

As described above, according to the present invention, the movement of the needle valve valve body that opens and closes the liquid discharge port is performed according to the pressurizing operation of the liquid in the liquid storage container or the operation of the plunger of the liquid pressurizing means. And, in response to such movement of the needle valve body, the pressure compensation means cancels the increase or decrease of the hydraulic pressure caused by the movement between the first position and the second position of the needle valve body . Since the occupying volume of the valve body in the liquid chamber moves so as to decrease or increase, it is possible to accurately and stably perform a minute fixed amount discharge of the liquid without a time lag . In particular, the conventional phenomenon caused by the pressure drop of the liquid chamber during liquid discharge, for example, the air is mixed into the liquid or the liquid returns from the discharge port toward the liquid chamber, is eliminated. The liquid can be discharged at a constant discharge flow rate immediately after the operation, and the liquid discharge can be stopped quickly.

Embodiments of a liquid metering discharge valve according to the present invention will be described below with reference to the accompanying drawings.
FIG. 1 is a sectional view showing a first embodiment of the present invention. In FIG. 1, reference numeral 10 denotes an entire needle valve as a discharge valve. This needle valve has a valve body configured in the form of a double-acting air cylinder 12, and an inlet hole communicating with a liquid storage container (not shown), that is, a liquid inlet 14 is provided in the valve body. A needle valve body 20 for quantitatively discharging the pressurized liquid introduced into the liquid chamber 16 through the discharge port 18 is provided. The needle valve body 20 is configured to be moved up and down by a piston 24 in the air cylinder 10, and a needle-like tip is in contact with the opening in the central portion of the valve seat 22 to stop the discharge of liquid. It is possible to move smoothly between the position and a second position that is a predetermined distance away from the first position and that gives the maximum discharge amount of the liquid discharged from the discharge port. It has become.

  That is, the rear end of the needle valve body 20 is connected to the piston 24, and the front end thereof is disposed toward the opening that leads to the discharge port 18 formed in the central portion of the valve seat 22. The piston 24 for moving the needle valve body 20 is slidably disposed in the air chamber 30 provided in the valve body, and the needle valve body 20 is lowered by supplying the compressed air from the port a1, so that the port It is comprised so that the needle valve body 20 may be raised by supplying compressed air from a2.

  In addition, another piston 26 (hereinafter referred to as a pressure compensation piston) can slide independently of the piston 24 in another air chamber 32 that is partitioned from the air chamber 30 by the partition wall 25 and separated from the liquid chamber 16 by the partition wall 27. It is arranged. The pressure compensation piston 26 is configured so that the needle valve body 20 fixed to the piston 24 is inserted in the central portion thereof so that smooth movement of the needle valve body 20 is not hindered. The pressure compensating piston 26 has a protruding portion 26 a that passes through an opening provided in the partition wall 27 and protrudes into the liquid chamber 16, and is raised by supplying compressed air from a port b 1 provided in the air chamber 32. , And is configured to be lowered by supplying compressed air from the port b2.

  The protruding amount of the pressure compensation piston 26 is adjusted so that the change of the occupied volume of the needle valve body 20 that occurs in the liquid chamber when the protrusion 26 a moves the needle valve body 20. That is, when the needle valve body 20 leaves the first position as shown in FIG. 1 and moves toward the second position, the volume of the needle valve body 20 occupying the liquid chamber 16 is reduced, and the liquid chamber 16 When the needle valve body 20 goes from the second position to the first position, the pressure compensation piston 26 is lowered to increase the amount of protrusion. Since the volume of the needle valve body 20 occupying the liquid chamber 16 increases and the liquid pressure in the liquid chamber 16 drops, the pressure compensation piston 26 is raised to reduce the amount of protrusion in order to offset the pressure drop. Configured as follows.

  The movement of the piston 24 and the movement of the pressure compensation piston 26 in synchronism with the movement of the piston 24 are performed by switching compressed air supplied from the air compressor 34 between the flow paths X and Y by the electromagnetic switching valve 36. The flow path X is connected to the port a1 of the air chamber 30 on the piston 24 side and the port b1 of the air chamber 32 on the pressure compensation piston 26 side, while the flow path Y is pressure compensated with the port a2 of the air chamber 30 on the piston 24 side. It is configured to be connected to the port b2 of the air chamber 32 on the piston 26 side.

  Since the liquid metering discharge valve of the present invention configured as described above can synchronize the operation of the needle valve body 20 and the operation of the pressure compensation piston, the discharge flow rate can always be kept constant. In particular, when the needle valve body 20 in the closed state is opened, a phenomenon caused by a pressure drop in the liquid chamber, for example, air is mixed into the liquid or the liquid returns from the discharge port toward the liquid chamber is solved. As a result, the liquid can be discharged at a constant discharge flow rate immediately after the needle valve body 20 is operated, and the liquid discharge can be stopped quickly.

  In addition, between the outer peripheral surface of the piston 24 and the side wall surface of the air chamber 30, between the needle valve body 20 and the partition wall 25, between the outer peripheral surface of the pressure compensation piston 26 and the side wall surface of the air chamber 32, the protruding portion 27. The sealing between the outer peripheral surface of the nozzle and the partition wall 27 and between the needle valve body 20 and the insertion hole of the pressure compensation piston 26 is performed by an O-ring.

In the embodiment as described above , means for adjusting the stroke length is provided for each of the piston 24 and the pressure compensating piston 26 .
That is, the male screw 38 screwed into the air chamber 30 from the upper part of the needle valve body 12 is for adjusting the displacement amount of the piston 24, that is, the stroke length from the first position to the second position of the needle valve body 20. It is. By screwing the screw 38 by a predetermined distance, the second position of the needle valve body 20 can be shifted downward, so that the opening degree of the needle valve can be adjusted to a desired value.

  The male screw 40 screwed into the air chamber 32 from the outside of the partition wall 25 that divides the air chamber 30 and the air chamber 32 is also for adjusting the displacement amount of the pressure compensation piston 26. It is desirable that the adjustment be performed along with the adjustment of the displacement amount of the piston 24. For example, when the tip of the screw 38 is protruded into the air chamber 30 to reduce the stroke of the needle valve body 20 (the opening degree is reduced), the increase / decrease width of the volume occupied in the liquid chamber 16 of the needle valve body 20 This is because it is necessary to adjust the stroke length of the pressure compensation piston 26 in accordance with such an increase / decrease width.

When a micrometer is attached to the male threads 38 and 40 as means for adjusting the stroke length as described above, the stroke amount of each piston can be manually and quantitatively adjusted. In the first embodiment described above, the piston is used as the pressure compensating means. However, the present invention should not be limited to this, and the change in the occupied volume in the liquid chamber 16 accompanying the movement of the needle valve body 20 is offset. In addition, it may be constituted by means capable of changing the volume of the liquid chamber in synchronization with the movement of the valve body, for example, a diaphragm or a bellows.

FIG. 2 is a schematic explanatory view of a second embodiment of the present invention in which the needle valve according to the first embodiment of the present invention is applied to a liquid dispensing system. In the figure, reference numeral 1 denotes a liquid storage container, which is composed of a syringe 3 that can be made of, for example, a synthetic resin material, and a holder 4 that circumscribes and holds the syringe 3. The syringe 3 can be attached and detached.

The pressurizing means 5 for applying the liquid in the liquid storage container 1 to a required pressure is composed of an air cylinder 6, which is preferably airtightly attached to the tip of the piston rod 7, preferably in the syringe 3. The plunger 8 which touches and enters there is attached. Such a liquid storage container 1 is connected to the valve body of the needle valve via the liquid flow path 9. In FIG. 2 , the internal structure of the valve body is omitted, but here, a needle valve as described in the first embodiment is employed. The flow path 9 is connected to a liquid introduction port 14 formed in the valve body 12, and the liquid chamber 16 reaches the discharge port 18 through an opening formed in the central portion of the valve seat 22. The needle valve body 20 that opens and closes in the liquid chamber 16 to open and close the discharge port 18 is configured to be operated by the air cylinder 10, and the tip of the needle valve body 20 faces the central opening of the valve seat 22. The rear end of the cylinder 10 is connected to the piston 24 of the cylinder 10. Further, a liquid pressure compensating piston 26 independent of the piston 24 is disposed between the liquid chamber 16 and the piston 24. The pressure compensating piston 26 is designed to reduce the volume of the liquid chamber 16 when the pressurized air is supplied to the air chamber 32 of the piston 24 and moved forward and displaced, and the air chamber on the liquid chamber 16 side. When pressurized air is supplied to 27 and it is displaced backward, it functions to increase the volume of the liquid chamber 16.

Accordingly, when the liquid pressure in the vicinity of the discharge port 18 is lower than the predetermined value, the pressure compensating piston 26 is moved forward and displaced somewhat. When the liquid pressure is higher than the predetermined value, the pressure compensating piston 26 is It is possible to achieve the hydraulic pressure as expected by making the displacement slightly backward.
Further, here, an air cylinder 6 for pressurizing the liquid storage container 1 and a double-acting air cylinder 10 for advancing and retracting the needle valve body 20 are connected to the respective electromagnetic switching valves 52 and 36, and these electromagnetic switching valves 52 are also connected. , 36 are connected to a control means 54 that controls the operation based on a time signal inputted in advance, and one electromagnetic switching valve 52 that controls the supply of pressurized air to the air cylinder 6 is connected to a manual pressure reducing valve 56, for example. And the other electromagnetic switching valve 36 are directly connected to the pressurized air supply source 34, respectively.

In the quantitative discharge device configured as described above, a signal is output from the control means 54 to each of the electromagnetic switching valves 52 and 36 when the liquid is quantitatively discharged, and is set in the air cylinder 6 by the manual pressure reducing valve 56. Air pressure is supplied to lower the plunger 8 with a required force, and at the same time, preset air pressure is supplied to the input ports a2 and b2 of the air cylinder 10 to raise the piston 24. The needle valve body 20 is raised from the first position to the second position, and the pressure compensation piston 26 is lowered so as to cancel out the decrease in volume occupied by the needle valve body 20 in the liquid chamber 16. Since the liquid pressurized to the required pressure can be discharged from the discharge port 18 for a certain period of time specified in relation to the opening area of the discharge port 18, the liquid is determined. Discharge can be performed with high accuracy without a time lag to.

On the other hand, at the end of fixed discharge, the supply of pressurized air to the air cylinder 6 is stopped simultaneously with the port of the air cylinder 10 based on the discharge end signal from the control means 54 to the electromagnetic switching valves 52 and 36. Pressurized air is supplied to a1 and b1, the piston 24 is lowered to lower the needle valve body 20 from the second position to the first position, and the increase in volume occupied by the needle valve body 20 in the liquid chamber 16 The discharge port 18 is mechanically closed with the needle valve body 20 by raising the pressure compensation piston 26 so as to cancel out the above. Therefore, the outflow of the liquid from the discharge port 18 is completely stopped when the needle valve 10 is closed, and the risk of liquid leakage while the needle valve 10 is closed is sufficiently eliminated.

  In this case, the needle valve body 20 having a small size and volume that constitutes the needle valve 10 always moves back and forth smoothly and rapidly to open and close the discharge port 18 regardless of the size of the liquid pressure. Therefore, it is possible to realize excellent responsiveness together with the certainty of opening and closing of the needle valve 10.

  In the liquid dispensing apparatus using the needle valve as described above, the volume occupied in the liquid chamber 16 of the needle valve body 20 decreases due to the backward displacement of the needle valve body 20 accompanying the start of liquid discharge. The pressure compensation piston 26 is advanced to reduce the resulting hydraulic pressure, and conversely, the piston 26 is retracted to increase the occupied volume when the discharge is stopped by the advance displacement of the needle valve body 20. Thus, subtle pressure fluctuations can be effectively absorbed.

FIG. 3 is a sectional view showing a third embodiment of the present invention. In this embodiment, the movement between the first position and the second position of the needle valve body 20 in the liquid chamber 16 is performed by motor driving, and the rear end of the needle valve body 20 is rotated by the motor 42. Is connected to a mechanism 44 that converts the motion into a linear motion. Further, the pressure compensation means is composed of a motor-driven actuator 46, one end of the actuator 46 facing the liquid chamber 16, and the other end connected to a mechanism 50 for converting the rotation of the motor 48 into a linear motion. . Sealing between the needle valve body 20 and the actuator 46 and the valve body 12 is performed by an O-ring.

  The controller 37 controls the raising / lowering (advance / retreat) of the needle valve body 20 and the advance / retreat operation of the actuator 46 into the liquid chamber 16 by the motor drive. When the needle valve body 20 is moved from the first position to the second position (liquid discharge), the actuator 46 is disposed in the liquid chamber 16 in order to offset the decrease in the volume of the needle valve body 20 in the liquid chamber 16. On the contrary, when the needle valve body 20 moves from the second position to the first position (liquid discharge is stopped), the increase in the volume occupied in the liquid chamber 16 of the needle valve body 20 should be offset. The motors 42 and 48 are driven synchronously so that the actuator 46 moves backward from the liquid chamber 16.

FIG. 4 is a schematic sectional view showing a fourth embodiment of the present invention. In this embodiment, the movement of the needle valve body 20 between the first position and the second position in the liquid chamber 16 is performed by the electromagnetic drive device 59. The electromagnetic drive device 59 includes a magnetic coil 62 for magnetically driving a plunger 60 connected to the rear end of the needle valve body 20, and a fixed core 64 for stabilizing a magnetic field generated by the magnetic coil 62. Is provided. The plunger 60 is supported at its lower end and upper end by coil springs 66 and 68, respectively. In the state shown in the figure, the coil spring 66 pushes up the plunger 60, and the coil spring 68 pushes down. The needle valve body 20 connected to the nozzle is configured to close the discharge port 18. That is, such a plunger 60 is normally pushed downward by the action of the prevailing spring force by the coil spring 68. In order to open the discharge port 18 by moving the plunger 60 upward from this state, a current that can be moved against the spring force is supplied from the control device 80 to the magnetic coil 62. Done. Further, when the supply of such current is stopped, the plunger 60 is pushed down by the spring force of the coil spring 68, so that the discharge port 18 is immediately closed.

On the other hand, the pressure compensation means for canceling the volume change of the liquid chamber 16 accompanying the movement of the needle valve body 20 is composed of an actuator 70 that is advanced and retracted by an electromagnetic drive device 69. The electromagnetic driving device 69 includes a plunger 71 formed integrally with the actuator 70, a magnetic coil 72 for magnetically driving the plunger 71, and stabilization of the magnetic field generated by the magnetic coil 72. And a fixed core 74.

The operation of the electromagnetic drive device 69 is performed by supplying a predetermined current from the control device 80 to the magnetic coil 72, and the plunger 71 is moved to the left by the interaction with the magnetic field generated by the magnetic coil 72 that is supplied with the current. Configured to be moved to the right or left.
The plunger 71 is supported at both ends by a leaf spring 76 and a coil spring 78, respectively. In the illustrated state, the leaf spring 76 pushes the plunger 71 to the right and the spring coil 78 pushes to the left, but the plunger 71 is biased to the right by the prevailing spring force of the leaf spring 76. The tip of the actuator 70 is disposed so as to slightly protrude into the liquid chamber 16.

  When the needle valve body 20 is moved upward in the liquid chamber 16 from such a state, a predetermined current is supplied from the control device 80 to the electromagnetic drive device 59, the magnetic coil 62 is excited, In synchronism with this, a predetermined current is also supplied to the electromagnetic drive device 69 to excite the magnetic coil 72. The current supplied from the control device 80 to the magnetic coil 62 is set in advance to a value that moves the needle valve body 20 by the distance from the first position to the second position, and is similarly supplied to the magnetic coil 72. The electric current is set in advance to such a value as to move the actuator 70 by a distance that cancels the decrease in volume occupied by the needle valve body 20 in the liquid chamber 16. The pressure fluctuation in the liquid chamber 16 is canceled by the entry of the actuator 70 into the liquid chamber 16.

When the supply of such current is stopped, the needle valve body 20 is quickly pushed down from the second position to the first position by the spring force of the coil spring 68, and at the same time, the plunger 71 The spring force quickly moves rightward toward the original position. Even when the needle valve body 20 moves downward, the pressure variation in the liquid chamber 16 is offset by the plunger 71, so that the pressure in the liquid chamber 16 is always kept constant.
Therefore, when the valve moves from the open state to the closed state, the liquid discharge speed of a paste or the like does not increase as in the prior art, which is suitable for uniform line drawing application.

  When the needle valve as described above is applied to a liquid dispensing apparatus, when the work as the liquid application object is appropriately displaced in relation to the liquid discharge timing or the like, the discharge valve The position of the needle valve can be fixed for use.

  However, when the workpiece is positioned and fixed at a specific position, it is necessary to move the needle valve to a required position and direction. In such a case, for example, the needle valve 2 is attached to a rectangular coordinate type three-dimensional manipulator, and this manipulator is operated by a controller that outputs a position signal based on a signal from the above-described control device. The discharge port 18 can be brought to a required position in the three-dimensional coordinate system, and can be used for a work that is tact-conveyed by a conveyer and can provide excellent coating efficiency.

It is sectional drawing which shows the 1st Embodiment of this invention. It is a schematic explanatory drawing of the 2nd Embodiment of this invention which applied the needle valve concerning the 1st Embodiment of this invention to the liquid fixed quantity discharge system. It is sectional drawing which shows the 3rd Embodiment of this invention. It is sectional drawing which shows the 4th Embodiment of this invention.

DESCRIPTION OF SYMBOLS 1 Liquid storage container 3 Syringe 4 Holder 5 Pressurizing means 6 Cylinder 7 Rod 8 Plunger 9 Liquid flow path 10 Needle valve 12 Valve body 14 Liquid inlet 16 Liquid chamber 18 Discharge port 20 Needle valve element 22 Valve seat 24 Pistons 25 and 27 Bulkhead 26 Pressure Compensating Pistons 30 and 32 Air Chamber 34 Compressed Air Supply Source 36 Electromagnetic Switching Valve 37 Controller 38 and 40 Adjusting Screw 42 Motor 44 Converter 46 Actuator 48 Motor 50 Converter 52 Electromagnetic Switching Valve 54 Controller 56 Manual Pressure Reducing Valve 59, 69 Electromagnetic driving device 60, 71 Plunger 62, 72 Magnetic coil 64, 74 Fixed core 66, 68, 78 Coil spring 70 Actuator 80 Control device

Claims (10)

A valve body formed having an inlet hole communicating with the liquid storage container, a liquid chamber containing the liquid introduced from the inlet hole, and an outlet hole through which the liquid in the liquid chamber is to be discharged;
A needle-like valve body that is provided so as to be movable between a first position and a second position in the liquid chamber, and moves in accordance with the pressurizing operation of the liquid in the liquid storage container;
A valve seat formed so as to receive the tip of the valve body at a first position of the valve body and close the outlet hole;
A part of the valve body is arranged facing the liquid chamber, and the increase or decrease of the liquid pressure in the liquid chamber caused by the movement of the valve body from the first position to the second position or the movement from the second position to the first position. Pressure compensation means capable of advancing and retreating toward the liquid chamber so as to reduce or increase the volume occupied by the valve body in the liquid chamber in accordance with the movement of the valve body,
Adjusting means for adjusting the stroke length between the first position and the second position of the valve body;
A liquid metering discharge valve comprising adjusting means for adjusting the movement range of the pressure compensating means. The valve body is configured in the form of a cylinder, the rear end of the valve body is connected to a piston of the cylinder, the pressure compensation means is provided independently of the piston, and a part thereof is disposed facing the liquid chamber. The pressure compensation piston is configured such that fluctuations in the fluid pressure in the fluid chamber are offset by movement of the pressure compensation piston in a direction opposite to the direction of movement of the piston. 1. A liquid dispensing valve according to 1. The valve body is driven by first electromagnetic driving means disposed outside the valve body, and the pressure compensation means is composed of an actuator having one end facing the liquid chamber, and the other end of the actuator is the valve body. 2. The liquid metering valve according to claim 1 , wherein the liquid metering valve is connected to a second electromagnetic driving unit disposed outside the first electrode. 4. The liquid dispensing / dispensing valve according to claim 3 , wherein each of the first and second electromagnetic driving means includes a motor and a mechanism that converts the rotation of the motor into a linear motion. 5. The first electromagnetic drive means is composed of a first plunger connected to the rear end of the valve body and a first magnetic coil for driving the first plunger, and the second electromagnetic drive. means comprises a second plunger which is connected to one end of an actuator, as described in claim 3, characterized in that they are composed of and its second second magnetic coil for the plunger magnetically driven Liquid dispensing valve. A liquid storage container for storing liquid;
Liquid pressurizing means including a plunger disposed in a liquid-tight manner in the liquid storage container;
A valve body formed having an inlet hole communicating with the liquid storage container, a liquid chamber containing the liquid introduced from the inlet hole, and an outlet hole through which the liquid in the liquid chamber is to be discharged; A needle-like valve body that is provided so as to be movable between the first position and the second position in the liquid chamber and moves in accordance with the operation of the plunger, and the tip of the valve body at the first position of the valve body And a valve seat formed so as to close the outlet hole, and a part of the valve seat faces the liquid chamber, and the valve body moves from the first position to the second position or from the second position. to offset the increase or decrease in fluid pressure in the liquid chamber caused by the movement of the first position in response to movement of the valve body, so as to decrease or increase the volume occupied by the liquid chamber of the valve body, the liquid a pressure compensating means which can advance and backward toward the chamber, the first position of the valve body When the adjustment means for adjusting the stroke length between the second position, the liquid dispensing valve and an adjusting means for adjusting the range of movement of the pressure compensating means,
Liquid dispensing device composed of The valve body is configured in the form of a cylinder, the rear end of the valve body is connected to a piston of the cylinder, the pressure compensation means is provided independently of the piston, and a part thereof is disposed facing the liquid chamber. The pressure compensation piston is configured such that fluctuations in the fluid pressure in the fluid chamber are offset by movement of the pressure compensation piston in a direction opposite to the direction of movement of the piston. 7. A liquid dispensing apparatus according to item 6 . The valve body is driven by first electromagnetic driving means disposed outside the valve body, and the pressure compensation means is composed of an actuator having one end facing the liquid chamber, and the other end of the actuator is the valve body. The liquid dispensing apparatus according to claim 6 , wherein the liquid fixed quantity discharge device is connected to a second electromagnetic driving means disposed outside of the liquid. 9. The liquid dispensing apparatus according to claim 8 , wherein each of the first and second electromagnetic driving means is composed of a motor and a mechanism for converting the rotation thereof into a linear motion. The first electromagnetic drive means is composed of a first plunger connected to the rear end of the valve body and a first magnetic coil for driving the first plunger, and the second electromagnetic drive. means comprises a second plunger which is connected to one end of an actuator, as described in claim 8, characterized in that they are composed of and its second second magnetic coil for the plunger magnetically driven Liquid dispensing device.

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